Furnace tube equipment

Abstract

The invention discloses furnace tube equipment, and relates to the technical field of semiconductor equipment, the furnace tube equipment comprises an inner tube, an outer tube, a first air exhaust port and a second air exhaust port, a process space is formed in the inner tube, the outer tube is sleeved outside the inner tube, a gap area exists between the outer tube and the inner tube, the inner tube is provided with an air exhaust port, so that the process space is communicated with the gap area, and the first air exhaust port is communicated with the second air exhaust port. The first air exhaust port is communicated with the process space, and the second air exhaust port is communicated with the gap area. In the invention, the first air exhaust port is directly communicated with the process space, and the second air exhaust port is directly communicated with the gap area, so that compared with the design of a single air exhaust port, the first air exhaust port can directly exhaust gas in the process space, and the second air exhaust port can directly exhaust gas in the gap area of the inner pipe and the outer pipe; in the technical process, gas can be exhausted more quickly, so that the production efficiency of furnace tube equipment is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor devices, and particularly to a furnace tube device. Background Art

[0002] As the size of semiconductor devices decreases, the requirements for technologies for depositing thin films on larger substrate areas are gradually increasing. Depositing semiconductor thin films with more uniform composition and thickness is very important for manufacturing high-quality semiconductor devices. Currently, the methods of using furnace tube chemical vapor deposition (CVD) and furnace tube atomic layer deposition (ALD) to prepare semiconductor thin films occupy a large market share.

[0003] Current furnace tube devices are all designed with a single air extraction port. In a double-layer furnace tube device, the inner tube and the outer tube of the furnace tube device are connected, and the air extraction port is usually arranged on the outer tube. When extracting air, the air extraction efficiency is relatively low. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to overcome the defect of low air extraction efficiency of furnace tube devices in the prior art, and provide a furnace tube device.

[0005] The present invention solves the above technical problem through the following technical solutions:

[0006] A furnace tube device, comprising:

[0007] An inner tube, inside which a process space is formed;

[0008] An outer tube, sleeved outside the inner tube, there is a gap region between the outer tube and the inner tube, and an exhaust port is arranged on the inner tube to communicate the process space with the gap region;

[0009] A first air extraction port, which is communicated with the process space;

[0010] A second air extraction port, which is communicated with the gap region.

[0011] The positive and progressive effect of the present invention is that: in the present invention, the first air extraction port is directly communicated with the process space, and the second air extraction port is directly communicated with the gap region. Compared with the design of a single air extraction port, the air extraction efficiency is higher. If only an air extraction port is arranged on the outer tube, when extracting air, although there is an exhaust port on the inner tube, it will still be hindered by the inner tube wall, affecting the air extraction efficiency. Through the first air extraction port, the gas in the process space can be directly extracted, and through the second air extraction port, the gas in the gap region between the inner tube and the outer tube can be directly extracted. During the process, the gas can be discharged faster, thereby improving the production efficiency of the furnace tube device. Description of the Drawings

[0012] Figure 1 Schematic diagram of the furnace tube equipment structure of Embodiment 1 of the present invention;

[0013] Figure 2 Schematic diagram of the furnace tube equipment structure of Embodiment 2 of the present invention;

[0014] Figure 3 Schematic diagram of the furnace tube equipment structure of Embodiment 3 of the present invention. Detailed implementation manners

[0015] The present invention will be further described below by way of embodiments, but the present invention is not limited to the scope of the embodiments.

[0016] Embodiment 1

[0017] As Figure 1 shown, this embodiment provides a furnace tube equipment, including an inner tube 100, an outer tube 200, a first air extraction port 300 and a second air extraction port 400. A process space S1 is formed inside the inner tube 100. The outer tube 200 is sleeved outside the inner tube 100, and there is a gap region S2 between the outer tube 200 and the inner tube 100. An exhaust port 110 is provided on the inner tube 100 to communicate the process space S1 with the gap region S2. The first air extraction port 300 passes through the outer tube 200 and the gap region S2 and is provided on the inner tube 100, and the first air extraction port 300 communicates with the process space S1. The second air extraction port 400 is provided on the outer tube 200, and the second air extraction port 400 communicates with the gap region S2.

[0018] In the present invention, the first air extraction port 300 is directly communicated with the process space S1, and the second air extraction port 400 is directly communicated with the gap region S2. Compared with the design of a single air extraction port, by extracting air together through two air extraction ports, the air extraction efficiency is higher. If only an air extraction port is provided on the outer tube 200, during air extraction, although there is an exhaust port 110 on the inner tube 100, it will still be hindered by the wall of the inner tube 100, affecting the air extraction efficiency. Through the first air extraction port 300, the gas in the process space S1 can be directly extracted, and through the second air extraction port 400, the gas in the gap region S2 between the inner tube 100 and the outer tube 200 can be directly extracted. During the process, the gas can be discharged faster, thereby improving the production efficiency of the furnace tube equipment.

[0019] The number and position of the exhaust port 110 are not limited to the Figure 1 scheme in the present invention and can be flexibly set according to needs.

[0020] In this embodiment, the materials of the inner tube 100 and the outer tube 200 are both quartz, but the present application is not limited thereto. In this embodiment, the material of the first air extraction port 300 is the same as that of the inner tube 100, and the material of the second air extraction port 400 is the same as that of the outer tube 200. On the one hand, it is easier to process materials with the same material together; on the other hand, when heated, the expansion coefficients of the inner tube 100 and the first air extraction port 300 are the same, and the expansion coefficients of the outer tube 200 and the first air extraction port 300 are the same. When the inner tube 100, the outer tube 200, the first air extraction port 300 and the second air extraction port 400 are heated, they are not easily broken and are more stable.

[0021] In some embodiments, the materials of the outer tube 200 and the second air extraction port 400 can also be silicon carbide.

[0022] Regarding the processing methods of the inner tube 100, the outer tube 200, the first air extraction port 300 and the second air extraction port 400, the welding method is adopted in this embodiment. The inner tube 100, the outer tube 200, the first air extraction port 300 and the second air extraction port 400 are processed separately and then welded into a whole.

[0023] The bottom end of the gap area S2 between the inner tube 100 and the outer tube 200 is closed, which is beneficial to maintaining the overall sealing performance of the furnace tube device.

[0024] The substrate reacts in the process space S1. Therefore, it is necessary to give priority to ensuring that the gas in the process space S1 is quickly evacuated. So in this embodiment, the aperture of the first air extraction port 300 is larger than that of the second air extraction port 400. When extracting air, the gas in the process space S1 can be preferentially discharged, which is beneficial to improving the gas discharge rate in the process space S1.

[0025] Taking the ALD process as an example, when supplying the precursor gas or the reaction gas, air can be extracted only from the second air extraction port 400 to ensure the fluidity of the precursor gas or the reaction gas in the furnace tube device and avoid excessive internal pressure. In the purging stage, air can be extracted from both the first air extraction port 300 and the second air extraction port 400 at the same time, which can more quickly extract the excess precursor gas or reaction gas and by-products from the inner tube 100, thereby improving the film formation quality.

[0026] In this embodiment, the furnace tube device further includes a heating component 700, which is arranged outside the outer tube 200, and the first air extraction port 300 and the second air extraction port 400 are located below the heating component 700. In this embodiment, the first air extraction port 300 and the second air extraction port 400 are at the same height. Therefore, the layout of the first air extraction port 300 and the second air extraction port 400 is more compact and will not occupy extra space in the vertical direction, affecting the installation of the heating component 700.

[0027] In this embodiment, the furnace tube device further includes at least two air extraction pumps (not shown in the figure), which are respectively connected to the first air extraction port 300 and the second air extraction port 400.

[0028] Embodiment 2

[0029] As Figure 2 shown, the furnace tube device in this embodiment is basically the same as the furnace tube device in Embodiment 1. The difference is that the furnace tube device in this embodiment further includes a manifold 500 that is generally cylindrical, which is connected to the bottom ends of the inner tube 100 and the outer tube 200, and all sides (such as Figure 2 ) or some sides (not shown) are exposed and not blocked by the outer tube 200. The manifold 500 is in communication with the process space S1 and not in communication with the gap region S2, and the first air extraction port 300 is arranged on the manifold 500. The first air extraction port 300 is in communication with the process space S1, and the position of the second air extraction port 400 remains unchanged and is located above the first air extraction port 300.

[0030] The first air extraction port 300 is arranged on the manifold 500 (for example, on the side). Compared with the first air extraction port 300 passing through the outer tube 200 and the gap region S2 and being arranged on the inner tube 100, it is beneficial to reduce the processing difficulty of the inner tube 100 and the outer tube 200 while ensuring the exhaust efficiency. And, the manifold 500 is usually made of metal. By arranging the first air extraction port 300 on the manifold 500, the processing difficulty of the first air extraction port 300 will also be reduced.

[0031] In this embodiment, the material of the first air extraction port 300 is the same as that of the manifold 500. The first air extraction port 300 and the manifold 500 are processed separately and then welded into a whole.

[0032] In some embodiments, the first air extraction port 300 and the manifold 500 can also be integrally formed. Using integral formation can avoid welding defects at the connection and potential leakage problems.

[0033] Embodiment 3

[0034] As Figure 3 shown, the furnace tube device in this embodiment is basically the same as the furnace tube device in Embodiment 2. The difference is that in this embodiment, the manifold 500 includes a first region S3 and a second region S4 that are not in communication with each other. The first region S3 is in communication with the process space S1, and the second region S4 is in communication with the gap region S2. The first air extraction port 300 is arranged on the manifold 500, and the first air extraction port 300 is in communication with the first region S3. The second air extraction port 400 is arranged on the manifold 500, and the second air extraction port 400 is in communication with the second region S4.

[0035] Compared with the solution in Embodiment 2, in this solution, the second air extraction port 400 is also arranged on the manifold 500. On the premise of ensuring the exhaust efficiency, not only the processing difficulty of the second air extraction port 400 is reduced, but also the processing difficulties of the inner tube 100 and the outer tube 200 are reduced. In addition, there is no need to arrange the first air extraction port 300 and the second air extraction port 400 on the inner tube 100 and the outer tube 200, the processing defects of the inner tube 100 and the outer tube 200 are reduced, and the overall sealing performance of the furnace tube equipment is better.

[0036] In some embodiments, there may also be a communication port between the first region S3 and the second region S4.

[0037] Specifically, the manifold 500 includes a first pipe fitting 510 and a second pipe fitting 520. One end of the second pipe fitting 520 is connected to the inner tube 100 and the outer tube 200, and the other end of the second pipe fitting 520 is connected to the first pipe fitting 510. The first pipe fitting 510 is a single-layer structure in a substantially cylindrical shape, and the second pipe fitting 520 is a double-layer structure with a hollow interlayer. The first region S3 is the region jointly surrounded by the inner layer of the second pipe fitting 520 and the first pipe fitting 510, and the second region S4 is the hollow interlayer region of the second pipe fitting 520. The lateral dimension of the inner layer of the second pipe fitting 520 is smaller than the lateral dimension of the first pipe fitting 510, and there is a step between them. The first air extraction port 300 is arranged on the first pipe fitting 510, and the second air extraction port 400 is arranged on the second pipe fitting 520. A communication port 600 is arranged at the bottom end of the gap region S2 between the inner tube 100 and the outer tube 200, and the second region S4 is communicated with the gap region S2 through the communication port 600. By opening the communication port 600 and modifying the structure of the manifold 500, the position of the second air extraction port 400 can be arranged on the manifold 500.

[0038] In this embodiment, the materials of the first air extraction port 300 and the second air extraction port 400 are the same as that of the manifold 500, and they are all made of metal materials, such as stainless steel.

[0039] In this embodiment, the first air extraction port 300, the second air extraction port 400 and the manifold 500 are processed separately and then welded into a whole.

[0040] In some embodiments, the first air extraction port 300, the second air extraction port 400 and the manifold 500 are integrally formed.

[0041] Although the specific implementation manners of the present invention have been described above, those skilled in the art should understand that this is only an example, and the protection scope of the present invention is defined by the appended claims. Without departing from the principle and essence of the present invention, those skilled in the art can make various changes or modifications to these implementation manners, but these changes and modifications all fall within the protection scope of the present invention.

Claims

1. A furnace tube device, characterized in that, Comprising: An inner tube, within which a process space is formed; An outer tube, sleeved outside the inner tube, with a gap region existing between the outer tube and the inner tube, and an exhaust port is provided on the inner tube to communicate the process space with the gap region; A first air extraction port, which is communicated with the process space; A second air extraction port, which is communicated with the gap region.

2. The furnace tube device according to claim 1, wherein, The first air extraction port is arranged on the inner tube through the outer tube and the gap region, and the second air extraction port is arranged on the outer tube.

3. The furnace tube equipment according to claim 1, characterized in that, The material of the first air extraction port is the same as that of the inner tube, and / or the material of the second air extraction port is the same as that of the outer tube.

4. The furnace tube equipment according to claim 1, wherein It further includes a heating component, arranged outside the outer tube, the first air extraction port and the second air extraction port are located below the heating component, and the first air extraction port and the second air extraction port are at the same height.

5. The furnace tube device according to claim 1, characterized in that, It further includes a manifold, connected to the bottom ends of the inner tube and the outer tube, the manifold is communicated with the process space, the manifold is not communicated with the gap region, the first air extraction port is arranged on the manifold, and the second air extraction port is arranged on the outer tube.

6. The furnace tube equipment according to claim 5, characterized in that, The material of the first air extraction port is the same as that of the manifold, and / or the material of the second air extraction port is the same as that of the outer tube.

7. The furnace tube equipment according to claim 1, characterized in that, It further includes a manifold, connected to the bottom end of the inner tube and the bottom end of the outer tube, the manifold includes a first region and a second region, the first region is communicated with the process space, the second region is communicated with the gap region, the first air extraction port is arranged on the manifold and is communicated with the first region, and the second air extraction port is arranged on the manifold and is communicated with the second region.

8. The furnace tube equipment according to claim 7, characterized in that, The manifold includes: A first pipe fitting; A second pipe fitting, one end of the second pipe fitting is connected to the inner tube and the outer tube, the other end of the second pipe fitting is connected to the first pipe fitting, the second pipe fitting is a double-layer structure with a hollow interlayer, the first region is the region jointly surrounded by the inner layer of the second pipe fitting and the first pipe fitting, and the second region is the hollow interlayer region of the second pipe fitting; The first air extraction port is arranged on the first pipe fitting, and the second air extraction port is arranged on the second pipe fitting.

9. The furnace tube equipment according to claim 7, characterized in that, The materials of the first air extraction port and the second air extraction port are the same as that of the manifold.

10. The furnace tube equipment according to any one of claims 1, 5, and 7, characterized in that, It further includes at least two air extraction pumps, and the air extraction pumps are respectively connected to the first air extraction port and the second air extraction port.

11. The furnace tube equipment according to any one of claims 1, 5, and 7, characterized in that, The aperture of the first air extraction port is larger than that of the second air extraction port.

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