Galvanometer motor, galvanometer device and laser equipment

Abstract

The invention provides a galvanometer motor, a galvanometer device and laser equipment, and relates to the technical field of laser. The galvanometer motor comprises a driving shaft used for being connected with one end of a lens; the driven shaft is connected with the other end of the lens; the torque assembly comprises an iron core, a winding and a rotor, and the rotor is connected with the driving shaft; the position signal assembly comprises a light emitting part, a light sensing unit, a circuit board and a first light blocking part, the light sensing unit is electrically connected with the circuit board, the first light blocking part is located between the light emitting part and the light sensing unit, and the first light blocking part is connected with the driven shaft. According to the galvanometer motor, the driving shaft and the driven shaft are arranged, so that the rotor in the torque assembly and the first light blocking piece in the position signal assembly keep synchronous movement, and meanwhile, the winding in the torque assembly is far away from the circuit board in the position signal assembly, so that the influence of a variable magnetic field generated by electrifying the winding on an electric signal in the circuit board is avoided; normal operation of position signal feedback is ensured, and the reliability of the galvanometer motor is further improved.

Description

Technical Field

[0001] The present invention relates to the field of laser technology, and in particular to a galvanometer motor, a galvanometer device and a laser device. Background Art

[0002] A galvanometer motor is an excellent vector scanning device, which is currently mainly used in laser devices. Its main application characteristics are high-speed and high-precision operation to meet the use functions of application products.

[0003] In order to meet the requirements of high-precision operation, in addition to the torque generating components of ordinary motors, a position signal feedback component is also provided in the galvanometer motor.

[0004] The common position signal feedback component consists of a silicon photovoltaic panel, a silicon photocell, an infrared diode and a light blocking piece. The silicon photocell is irradiated by the infrared diode to generate a weak voltage signal. The voltage signal is sent to the drive board circuit through the silicon photovoltaic panel, and the drive board circuit performs the next signal processing. During the operation of the galvanometer motor, the light blocking piece rotates with the drive shaft of the galvanometer motor, periodically blocking the light emitted by the infrared diode, so that the voltage signal is periodically generated and disappeared, so as to realize the position signal feedback of the drive shaft.

[0005] However, in actual use, the above voltage signal often generates errors, resulting in abnormal movements during the operation of the galvanometer motor, such as irregular swinging operation, or the driving lens hitting the limit structure, or the lens cannot return to the zero position when initially powered on, etc., with low reliability. Summary of the Invention

[0006] In order to solve the problems existing in the prior art, one of the purposes of the present invention is to provide a galvanometer motor.

[0007] The present invention provides the following technical solutions:

[0008] A galvanometer motor, comprising:

[0009] A driving shaft for connecting one end of the lens;

[0010] A driven shaft for connecting the other end of the lens;

[0011] A torque assembly, comprising an iron core, a winding and a rotor, the rotor being connected to the driving shaft; and

[0012] A position signal assembly, comprising a light emitting member, a photosensitive unit, a circuit board and a first light blocking piece, the photosensitive unit being electrically connected to the circuit board, the first light blocking piece being located between the light emitting member and the photosensitive unit, and the first light blocking piece being connected to the driven shaft.

[0013] As a further alternative solution for the galvanometer motor, the position signal assembly includes at least two of the photosensitive units, and the at least two photosensitive units are arranged circumferentially along the driven shaft.

[0014] As a further alternative solution for the galvanometer motor, the photosensitive unit includes at least two photosensitive elements, and the photosensitive elements are electrically connected to the circuit board.

[0015] As a further alternative solution for the galvanometer motor, the position signal assembly further includes a second light blocking member, the second light blocking member is located between the light emitting member and the photosensitive unit, a light passing hole is provided on the second light blocking member, and the light passing hole is aligned with the photosensitive unit.

[0016] As a further alternative solution for the galvanometer motor, the position signal assembly further includes a spacer, the second light blocking member, the spacer and the circuit board are stacked in sequence along the axis direction of the driven shaft, and the photosensitive unit is arranged on the side of the circuit board facing the second light blocking member.

[0017] As a further alternative solution for the galvanometer motor, the rotor is a magnetic ring, the magnetic ring is sleeved on the driving shaft, and the magnetic ring is fixedly connected to the driving shaft.

[0018] Another object of the present invention is to provide a galvanometer device.

[0019] The present invention provides the following technical solutions:

[0020] A galvanometer device includes a bracket, a lens and the above-mentioned galvanometer motor;

[0021] The driving shaft and the torque assembly are arranged at one end of the bracket, and the driven shaft and the position signal assembly are arranged at the other end of the bracket;

[0022] One end of the lens is connected to the driving shaft, and the other end of the lens is connected to the driven shaft.

[0023] As a further alternative solution for the galvanometer device, a first mounting seat is provided at one end of the bracket, the driving shaft is rotatably arranged on the first mounting seat, and the iron core is fixedly arranged on the first mounting seat;

[0024] A second mounting seat is provided at the other end of the bracket, the driven shaft is rotatably arranged on the second mounting seat, and the light emitting member, the photosensitive unit and the circuit board are fixedly arranged on the second mounting seat.

[0025] As a further alternative solution for the galvanometer device, a first connecting seat is provided at one end of the lens, and the first connecting seat is fixedly connected to the driving shaft;

[0026] The other end of the lens is provided with a second connecting seat, and the second connecting seat is fixedly connected to the driven shaft.

[0027] Another object of the present invention is to provide a laser device.

[0028] The present invention provides the following technical solutions:

[0029] A laser device includes the above-mentioned galvanometer device.

[0030] The embodiments of the present invention have the following beneficial effects:

[0031] When the above-mentioned galvanometer motor works, the winding is energized and generates a changing magnetic field, driving the rotor to rotate, and the rotor further drives the driving shaft to rotate. Since the driving shaft and the driven shaft are respectively connected to both ends of the lens, the driving shaft and the driven shaft always rotate synchronously. At the same time, since the first light-shielding member is connected to the driven shaft, the first light-shielding member is in the same motion state as the rotor. On this basis, the light-emitting member, the photosensitive unit and the first light-shielding member cooperate to reflect the position change of the rotor through the change of the electrical signal of the photosensitive unit, realizing the position signal feedback of the rotor of the galvanometer motor. Since the circuit board is far from the iron core and the winding, the electrical signal transmitted from the photosensitive unit to the circuit board is not easily affected by the changing magnetic field generated by the winding, which is beneficial to the normal progress of the position signal feedback, thereby improving the reliability of the galvanometer motor.

[0032] To make the above objects, features, and advantages of the present invention more obvious and understandable, the following specific preferred embodiments are given below in conjunction with the accompanying drawings and described in detail as follows. Description of the Drawings

[0033] To more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the drawings required for use in the embodiments. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other related drawings can also be obtained based on these drawings.

[0034] Figure 1 Shows the overall structural schematic diagram of a galvanometer device provided by an embodiment of the present invention;

[0035] Figure 2 Shows the internal structural schematic diagram of a galvanometer device provided by an embodiment of the present invention;

[0036] Figure 3 Shows Figure 2 The enlarged schematic diagram at A in

[0037] Figure 4 Shows Figure 2 The enlarged schematic diagram at B in

[0038] Figure 5 Shows an exploded schematic diagram of a position signal component in a galvanometer motor provided by an embodiment of the present invention;

[0039] Figure 6 Shows a schematic diagram of the connection relationship between a lens and a driving shaft in a galvanometer device provided by an embodiment of the present invention.

[0040] Description of main component symbols:

[0041] 10 - Galvanometer motor; 20 - Bracket; 21 - First mounting seat; 22 - Second mounting seat; 30 - Lens; 31 - First connecting seat; 32 - Second connecting seat;

[0042] 100 - Driving shaft; 200 - Driven shaft; 300 - Torque assembly; 310 - Iron core; 320 - Winding; 330 - Rotor; 340 - End cover; 400 - Position signal component; 410 - Light emitting element; 420 - Photosensitive unit; 421 - Photosensitive element; 430 - Circuit board; 440 - First light blocking member; 450 - Fixed seat; 451 - Mounting hole; 460 - Second light blocking member; 461 - Light passing hole; 470 - Spacer. Detailed implementation manners

[0043] The embodiments of the present invention will be described in detail below. The examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are only used to explain the present invention and should not be construed as a limitation of the present invention.

[0044] It should be noted that when an element is referred to as being "fixed to" another element, it can be directly on the other element or there can also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. On the contrary, when an element is referred to as being "directly on" another element, there is no intermediate element. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are only for the purpose of illustration.

[0045] In the present invention, unless otherwise clearly defined and limited, the terms "mounting", "connecting", "connecting", "fixing" and other terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. It can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0046] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, "a plurality of" means two or more unless otherwise specifically defined.

[0047] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terms used in the description of the template herein are for the purpose of describing specific embodiments only and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0048] Embodiment 1

[0049] Please refer to Figure 1 and Figure 2 simultaneously. This embodiment provides a galvanometer motor 10, specifically a galvanometer motor with a separated design of the main magnetic field and the position signal component. The galvanometer motor 10 is composed of a driving shaft 100, a driven shaft 200, a torque component 300, and a position signal component 400.

[0050] Among them, the driving shaft 100 is used to connect one end of the lens 30, and the driven shaft 200 is used to connect the other end of the lens 30.

[0051] Please refer to Figure 3 simultaneously. The torque component 300 includes an iron core 310, a winding 320, and a rotor 330, and the rotor 330 is connected to the driving shaft 100.

[0052] Please refer to Figure 4 simultaneously. The position signal component 400 includes a light-emitting element 410, a photosensitive unit 420, a circuit board 430, and a first light-blocking member 440. The photosensitive unit 420 is electrically connected to the circuit board 430. The first light-blocking member 440 is located between the light-emitting element 410 and the photosensitive unit 420, and the first light-blocking member 440 is connected to the driven shaft 200.

[0053] When the above galvanometer motor 10 operates, the winding 320 is energized to generate a changing magnetic field, which drives the rotor 330 to rotate. The rotor 330 further drives the driving shaft 100 to rotate. Since the driving shaft 100 and the driven shaft 200 are respectively connected to both ends of the lens 30, the driving shaft 100 and the driven shaft 200 always rotate synchronously. At the same time, since the first light-blocking member 440 is connected to the driven shaft 200, the motion state of the first light-blocking member 440 is consistent with that of the rotor 330.

[0054] On this basis, the light-emitting component 410, the photosensitive unit 420, and the first light-shielding member 440 cooperate to reflect the position change of the rotor 330 through the change of the electrical signal of the photosensitive unit 420, thereby realizing the position signal feedback of the rotor 330 of the galvanometer motor 10.

[0055] Since the circuit board 430 is far from the iron core 310 and the winding 320, the electrical signal transmitted from the photosensitive unit 420 to the circuit board 430 is not easily affected by the changing magnetic field generated by the winding 320, which is beneficial to the normal progress of the position signal feedback, thereby improving the reliability of the galvanometer motor 10.

[0056] In contrast, taking a conventional galvanometer motor that uses components such as a silicon photovoltaic panel, a silicon photocell, and an infrared diode as the position signal feedback component as an example, the silicon photovoltaic panel is installed between the rear cover and the magnetic conductive housing and is directly connected to the magnetic conductive housing that serves as the magnetic path of the changing magnetic field. At this time, the changing magnetic field in the magnetic conductive housing will inevitably affect the voltage signal sent from the silicon photocell to the silicon photovoltaic panel, resulting in a voltage signal transmitted to the drive circuit board that is different from the ideal signal, and further causing problems such as the galvanometer motor hitting the edge, the zero position not being able to return, or the motor not being able to operate normally after being used for a period of time.

[0057] In addition, a conventional galvanometer motor uses a magnetic rod as the rotor, and one end of the magnetic rod is fixedly connected to the output shaft to output torque. Due to the relatively brittle and hard material properties of the magnetic rod itself, during the operation of the galvanometer motor, the magnetic rod constantly swings back and forth, which is prone to problems such as fracture. Especially under high torque or too fast vibration frequency, the magnetic rod is extremely easy to be broken under high-frequency back-and-forth vibration, resulting in the complete failure of the vibration motor.

[0058] Please refer to Figure 3 , in order to avoid the failure of the vibration motor caused by the fracture of the rotor 330, in some embodiments, the rotor 330 is a magnetic ring. The magnetic ring is sleeved on the driving shaft 100 and is fixedly connected to the driving shaft 100.

[0059] During use, the magnetic ring rotates under the action of the changing magnetic field generated by the winding 320, thereby driving the driving shaft 100 to rotate. At the same time, the driving shaft 100 supports the magnetic ring. Under high-frequency back-and-forth vibration, the driving shaft 100 can still maintain its original shape and size, and the magnetic ring attached to the driving shaft 100 is not easily broken.

[0060] Please also refer to Figure 4 and Figure 5 , specifically, the light-emitting component 410, the first light-shielding member 440, the photosensitive unit 420, and the circuit board 430 are arranged in sequence along the axis direction of the driven shaft 200, and the X direction is shown in the figure.

[0061] In some specific embodiments, the position signal assembly 400 further includes a fixing seat 450. The fixing seat 450 is cylindrical, and a mounting hole 451 is formed in the middle of the fixing seat 450, and the axis of the mounting hole 451 coincides with the axis of the driven shaft 200. The light emitting element 410 is installed in the mounting hole 451.

[0062] Optionally, the light emitting element 410 is an infrared diode.

[0063] Furthermore, the position signal component 400 further includes a second light blocking member 460. The second light blocking member 460 is located between the light emitting member 410 and the photosensitive unit 420, and a light through hole 461 is provided on the second light blocking member 460. The light through hole 461 is aligned with the photosensitive unit 420, and the projection area of ​​the light through hole 461 along the X direction is smaller than the projection area of ​​the first light blocking member 440 along the X direction.

[0064] When the first light blocking member 440 rotates with the driven shaft 200 to be misaligned with the light hole 461, the light emitted by the light emitting member 410 passes through the light hole 461 to illuminate the photosensitive unit 420, so that the photosensitive unit 420 generates an electrical signal. When the first light blocking member 440 rotates with the driven shaft 200 to be aligned with the light hole 461, the first light blocking member 440 completely blocks the light hole 461, so that the light emitted by the light emitting member 410 cannot illuminate the photosensitive unit 420, and the electrical signal generated by the photosensitive unit 420 disappears.

[0065] During this process, the second light blocking member 460 can block the light reflected from other structural surfaces to the photosensitive unit 420, reduce or even eliminate the interference of the reflected light, and ensure the accuracy of the position signal feedback.

[0066] Optionally, the second light blocking member 460 is a light blocking plate, and the light blocking plate is arranged perpendicular to the axis of the driven shaft 200 .

[0067] In some specific embodiments, the second light blocking member 460 is located on a side of the first light blocking member 440 facing away from the light emitting member 410 .

[0068] In some other specific implementations, the second light blocking member 460 may also be disposed between the first light blocking member 440 and the light emitting member 410 .

[0069] Furthermore, the position signal component 400 further includes a cushion block 470 , and the fixing seat 450 , the second light blocking member 460 , the cushion block 470 and the circuit board 430 are stacked in sequence along the axial direction of the driven shaft 200 .

[0070] The spacer 470 separates the second light blocking member 460 from the circuit board 430 , and forms an accommodation space between the second light blocking member 460 and the circuit board 430 . The photosensitive unit 420 is located in the accommodation space and is disposed on the circuit board 430 .

[0071] Further, the position signal component 400 includes at least two photosensitive units 420, and the photosensitive units 420 are arranged circumferentially along the driven shaft 200.

[0072] In use, according to the presence or absence of the electrical signals of the photosensitive units 420, the photosensitive units 420 blocked by the first light-shielding member 440 can be identified, and thus the specific position of the first light-shielding member 440 can be known. Alternatively, when electrical signals are generated by all the photosensitive units 420, according to the order of generation of the electrical signals, it can be determined between which two photosensitive units 420 the first light-shielding member 440 is located, and thus the specific position of the first light-shielding member 440 can be known.

[0073] Therefore, setting a larger number of photosensitive units 420 can improve the position recognition accuracy of the first light-shielding member 440 and achieve accurate feedback of the position signal.

[0074] In some specific embodiments, the number of photosensitive units 420 is two, and the two photosensitive units 420 are evenly distributed circumferentially along the driven shaft 200.

[0075] In other specific embodiments, the number of photosensitive units 420 can also be three, four or more.

[0076] Further, the photosensitive unit 420 includes at least two photosensitive members 421. The photosensitive members 421 are arranged on the circuit board 430 and electrically connected to the circuit board 430.

[0077] Correspondingly, the first light-shielding member 440 has a plurality of light-shielding areas to respectively block the light irradiated on the photosensitive members 421.

[0078] In use, if any one of the photosensitive members 421 in the photosensitive unit 420 generates an electrical signal, it can be determined that the photosensitive unit 420 is not blocked by the first light-shielding member 440, and it is not easy to have a misjudgment due to an overly weak electrical signal, and the error tolerance rate is higher.

[0079] In some specific embodiments, the photosensitive unit 420 is composed of two photosensitive members 421, and the two photosensitive members 421 are symmetrically arranged about the axis of the driven shaft 200.

[0080] In other specific embodiments, the photosensitive unit 420 can also include three, four or more photosensitive members 421, and the photosensitive members 421 belonging to the same photosensitive unit 420 are evenly distributed circumferentially along the driven shaft 200.

[0081] In some specific embodiments, the photosensitive unit 420 uses a silicon photovoltaic cell, which can generate a voltage signal when irradiated by light.

[0082] In some other specific embodiments, the photosensitive unit 420 may also be a photosensitive element such as a photoresistor or a photoelectric capacitor. Correspondingly, the circuit board 430 outputs corresponding signals according to the change in its resistance value or capacitance.

[0083] In summary, by providing the driving shaft 100 and the driven shaft 200, the rotor 330 in the torque assembly 300 of the above-mentioned galvanometer motor 10 is kept in synchronous motion with the first light-shielding member 440 in the position signal assembly 400, and at the same time, the winding 320 in the torque assembly 300 is away from the circuit board 430 in the position signal assembly 400, thereby avoiding the influence of the changing magnetic field generated by the energization of the winding 320 on the electrical signals in the circuit board 430, ensuring the normal progress of the position signal feedback, and further improving the reliability of the galvanometer motor 10.

[0084] Embodiment 2

[0085] Please refer to Figure 1 and Figure 2 This embodiment provides a galvanometer device, including a bracket 20, a lens 30, and the above-mentioned galvanometer motor 10.

[0086] Among them, the driving shaft 100 and the torque assembly 300 are arranged at one end of the bracket 20, and the driven shaft 200 and the position signal assembly 400 are arranged at the other end of the bracket 20.

[0087] Correspondingly, one end of the lens 30 is connected to the driving shaft 100, and the other end of the lens 30 is connected to the driven shaft 200.

[0088] During use, the torque assembly 300 drives the driving shaft 100 to rotate, and then drives the lens 30 to rotate, realizing the control of the angle of the lens 30. At the same time, the driven shaft 200 rotates synchronously with the lens 30. By using the position signal assembly 400 to detect the position of the driven shaft 200, the positions of the lens 30, the driving shaft 100, and the rotor 330 in the torque assembly 300 can be known.

[0089] In some embodiments, a first mounting seat 21 is arranged at one end of the bracket 20. The driving shaft 100 is rotatably arranged on the first mounting seat 21, and the iron core 310 is fixedly arranged on the first mounting seat 21.

[0090] In addition, a second mounting seat 22 is arranged at the other end of the bracket 20. The driven shaft 200 is rotatably arranged on the second mounting seat 22, and the light-emitting member 410, the photosensitive unit 420, and the circuit board 430 are fixedly arranged on the second mounting seat 22.

[0091] Please combine with Figure 3, optionally, the torque assembly 300 further includes an end cap 340. The end cap 340, the iron core 310, and the first mounting seat 21 are stacked in sequence along the axis direction of the driving shaft 100 and are bolted and fixed. First bearings are respectively provided on the first mounting seat 21 and the end cap 340, and the first bearings are sleeved on the driving shaft 100.

[0092] Please refer to Figure 4 , similarly, the fixed seat 450, the second light blocking member 460, the spacer 470, the circuit board 430, and the second mounting seat 22 are stacked in sequence along the axis direction of the driven shaft 200 and are bolted and fixed. A second bearing is provided on the second mounting seat 22, and the second bearing is sleeved on the driven shaft 200.

[0093] Please refer to again Figure 1 , in some embodiments, one end of the lens 30 is provided with a first connecting seat 31, and the first connecting seat 31 is fixedly connected to the driving shaft 100. The other end of the lens 30 is provided with a second connecting seat 32, and the second connecting seat 32 is fixedly connected to the driven shaft 200.

[0094] Please refer to Figure 6 , taking the first connecting seat 31 as an example, one end of the lens 30 is engaged with one side of the first connecting seat 31 and is bolted and fixed. The driving shaft 100 is inserted and matched with the other side of the first connecting seat 31, and a screw is passed through the first connecting seat 31. The screw is in threaded cooperation with the first connecting seat 31 and abuts against the side surface of the driving shaft 100, thereby fixing the driving shaft 100 and the first connecting seat 31.

[0095] The connection manner of the lens 30, the second connecting seat 32, and the driven shaft 200 is similar and will not be elaborated here.

[0096] This embodiment also provides a laser device, including the above galvanometer device.

[0097] In some specific embodiments, the laser device is a lidar.

[0098] In some other specific embodiments, the laser device may also be a laser marking machine, a laser drilling machine, etc.

[0099] In all the examples shown and described here, any specific value should be construed as merely exemplary, not as a limitation. Therefore, other examples of the exemplary embodiments may have different values.

[0100] It should be noted that: similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0101] The above-described embodiments merely represent several implementation manners of the present invention. Their descriptions are relatively specific and detailed, but should not be construed as limiting the scope of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can still be made, and these all fall within the protection scope of the present invention.

Claims

1. A galvanometer motor, characterized in that, Comprising: A driving shaft for connecting one end of the lens; A driven shaft for connecting the other end of the lens; A torque assembly including an iron core, a winding, and a rotor, the rotor being connected to the driving shaft; and A position signal assembly including a light-emitting element, a photosensitive unit, a circuit board, and a first light-blocking member, the photosensitive unit being electrically connected to the circuit board, the first light-blocking member being located between the light-emitting element and the photosensitive unit, and the first light-blocking member being connected to the driven shaft.

2. The galvanometer motor according to claim 1, wherein, The position signal assembly includes at least two of the photosensitive units, and the at least two photosensitive units are arranged circumferentially along the driven shaft.

3. The galvanometer motor according to claim 2, characterized in that, The photosensitive unit includes at least two photosensitive members, and the photosensitive members are electrically connected to the circuit board.

4. The galvanometer motor according to claim 1, characterized in that, The position signal assembly further includes a second light-blocking member, the second light-blocking member being located between the light-emitting element and the photosensitive unit, and a light-passing hole being provided on the second light-blocking member, the light-passing hole being aligned with the photosensitive unit.

5. The galvanometer motor according to claim 4, wherein, The position signal assembly further includes a spacer, the second light-blocking member, the spacer, and the circuit board being stacked in sequence along the axis direction of the driven shaft, and the photosensitive unit being provided on a side of the circuit board facing the second light-blocking member.

6. The galvanometer motor according to any one of claims 1-5, characterized in that, The rotor is a magnetic ring, the magnetic ring being sleeved on the driving shaft, and the magnetic ring being fixedly connected to the driving shaft.

7. A galvanometer device, characterized in that, Comprising a bracket, a lens, and a galvanometer motor according to any one of claims 1-6; The driving shaft and the torque assembly are provided at one end of the bracket, and the driven shaft and the position signal assembly are provided at the other end of the bracket; One end of the lens is connected to the driving shaft, and the other end of the lens is connected to the driven shaft.

8. The galvanometer device according to claim 7, characterized in that A first mounting seat is provided at one end of the bracket, the driving shaft being rotatably provided in the first mounting seat, and the iron core being fixedly provided in the first mounting seat; A second mounting seat is provided at the other end of the bracket, the driven shaft being rotatably provided in the second mounting seat, and the light-emitting element, the photosensitive unit, and the circuit board being fixedly provided in the second mounting seat.

9. The galvanometer device according to claim 7, characterized in that, A first connecting seat is provided at one end of the lens, the first connecting seat being fixedly connected to the driving shaft; A second connecting seat is provided at the other end of the lens, the second connecting seat being fixedly connected to the driven shaft.

10. A laser device, characterized in that, Comprising a galvanometer device according to claim 7, 8, or 9.

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