Glass coating equipment and glass production system

Abstract

The invention provides glass coating equipment and a glass production system. The glass coating equipment comprises a cavity, a cathode, a vacuum pump, a sputtering power supply, a first cooling device and a second cooling device, the cavity is provided with a coating chamber; the cathode is accommodated in the coating chamber and is used for bearing a target material; the vacuum pump is used for extracting air in the coating chamber, so that a vacuum environment is formed in the coating chamber; the sputtering power supply is electrically connected to the cathode; the first cooling device is in heat exchange connection with the cathode so as to cool the cathode; and the second cooling device is in heat exchange connection with the sputtering power supply and the vacuum pump so as to cool the sputtering power supply and the vacuum pump. According to the glass coating equipment provided by the invention, the cooling effect on the cathode, the sputtering power supply and the vacuum pump is effectively improved, so that the reliability of the glass coating equipment is effectively improved.

Description

Technical Field

[0001] The present application relates to the technical field of glass manufacturing, and in particular, to a glass coating device and a glass production system. Background Art

[0002] In the process of glass manufacturing, in order to endow the glass with functions such as heat reflection and light reflection, a glass coating device is usually used to coat the surface of the glass. The glass coating device generally includes a cathode, a vacuum pump, a sputtering power supply, and a cooling device. The cooling device is used to circulate a cooling medium to cool the cathode, the vacuum pump, the sputtering power supply, and other components to be cooled. However, since the cooling medium in the cooling device will flow through each component to be cooled in sequence, the temperature of the cooling medium will continuously increase, resulting in a poor cooling effect of the component to be cooled at the downstream position, which is not conducive to improving the reliability of the glass coating device. Summary of the Invention

[0003] The purpose of the present application is to provide a glass coating device and a glass production system, aiming to solve the technical problem of the reliability of the glass coating device in the related art.

[0004] To achieve the above purpose, the technical solution adopted in the embodiment of the present application is: providing a glass coating device, including a cavity, a cathode, a vacuum pump, a sputtering power supply, a first cooling device, and a second cooling device; the cavity has a coating chamber; the cathode is accommodated in the coating chamber and is used to carry a target; the vacuum pump is used to extract the air in the coating chamber to form a vacuum environment in the coating chamber; the sputtering power supply is electrically connected to the cathode; the first cooling device is heat-exchange connected to the cathode to cool the cathode; the second cooling device is heat-exchange connected to the sputtering power supply and the vacuum pump to cool the sputtering power supply and the vacuum pump.

[0005] The glass coating device provided by the embodiment of the present application has at least the following beneficial effects: The glass coating device provided by the embodiment of the present application is provided with a first cooling device and a second cooling device. The first cooling device is used to cool the cathode, and the second cooling device is used to cool the sputtering power supply and the vacuum pump. In this way, the cooling medium in the first cooling device can be isolated from the cooling medium in the second cooling device, so that the heat of the cooling medium in the first cooling device will not be transferred to the heat of the cooling medium in the second cooling device, effectively improving the cooling effect on the cathode, the sputtering power supply, and the vacuum pump, and thus effectively improving the reliability of the glass coating device.

[0006] In some embodiments of the present application, the first cooling device includes a first internal circulation cooling component and a first external circulation cooling component. The first internal circulation cooling component is used to circulate a first cooling medium and is heat-exchange connected to the cathode to cool the cathode. The first external circulation cooling component is used to circulate a second cooling medium and is heat-exchange connected to the first internal circulation cooling component to cool the first cooling medium.

[0007] In some embodiments of the present application, the first cooling medium is pure water or cooling oil.

[0008] In some embodiments of the present application, the first external circulation cooling component includes a first cooling tower and a first liquid storage tank. The first liquid storage tank is used to store the second cooling medium. The first cooling tower is connected to the first liquid storage tank through a pipeline to transport the second cooling medium from the first liquid storage tank to the first cooling tower.

[0009] In some embodiments of the present application, the first cooling tower is arranged above the first liquid storage tank.

[0010] In some embodiments of the present application, the second cooling device includes a second internal circulation cooling component and a second external circulation cooling component. The second internal circulation cooling component is used to circulate a third cooling medium and is heat-exchange connected to the sputtering power supply and the vacuum pump to cool the sputtering power supply and the vacuum pump. The second external circulation cooling component is used to circulate a fourth cooling medium and is heat-exchange connected to the second internal circulation cooling component to cool the third cooling medium.

[0011] In some embodiments of the present application, the third cooling medium is pure water or cooling oil.

[0012] In some embodiments of the present application, the second external circulation cooling component includes a second cooling tower and a second liquid storage tank. The second liquid storage tank is used to store the fourth cooling medium. The second cooling tower is connected to the second liquid storage tank through a pipeline to transport the fourth cooling medium from the second liquid storage tank to the second cooling tower.

[0013] In some embodiments of the present application, the second cooling tower is arranged above the second liquid storage tank.

[0014] In a second aspect, an embodiment of the present application provides a glass production system, including the glass coating device described in any one of the above embodiments.

[0015] The glass production system provided by the embodiment of the present application has at least the following beneficial effects: Since the glass production system provided by the embodiment of the present application adopts the glass coating device described in any one of the above embodiments, the reliability of the glass production system is effectively improved. Description of the Drawings

[0016] To more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the accompanying drawings required in the embodiments or the description of the prior art. Obviously, the accompanying drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0017] Figure 1 It is a schematic structural diagram of the glass coating equipment provided by the embodiment of the present application.

[0018] Among them, the reference numerals in the figure are as follows:

[0019] 100, glass coating equipment;

[0020] 10, cavity; 11, coating chamber; 20, cathode; 30, vacuum pump; 40, sputtering power supply; 50, first cooling device; 51, first internal circulation cooling component; 511, first liquid storage tank; 512, first delivery pipeline; 513, first power pump; 514, second delivery pipeline; 515, second power pump; 516, first bypass pipeline; 517, third power pump; 518, second bypass pipeline; 519, fourth power pump; 52, first external circulation cooling component; 521, first cooling tower; 522, first liquid storage pool; 523, third delivery pipeline; 524, fifth power pump; 525, third bypass pipeline; 526, sixth power pump; 53, first heat exchange mechanism; 60, second cooling device; 61, second internal circulation cooling component; 611, second liquid storage tank; 612, fourth delivery pipeline; 613, seventh power pump; 614, fifth delivery pipeline; 615, eighth power pump; 616, fourth bypass pipeline; 617, ninth power pump; 618, fifth bypass pipeline; 619, tenth power pump; 62, second external circulation cooling component; 621, second cooling tower; 622, second liquid storage pool; 623, sixth delivery pipeline; 624, eleventh power pump; 625, sixth bypass pipeline; 626, twelfth power pump; 63, second heat exchange mechanism. Detailed implementation manners

[0021] The following will describe in detail the embodiments of the present application. The examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions from beginning to end. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to explain the present application, and should not be construed as a limitation to the present application.

[0022] Reference to "one embodiment" or "an embodiment" throughout this specification means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the present application. Thus, the phrases "in one embodiment" or "in some embodiments" appearing throughout the specification do not necessarily all refer to the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.

[0023] In the description of the present application, it should be understood that the orientation or positional relationships indicated by the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as a limitation of the present application.

[0024] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features.

[0025] In the present application, unless otherwise clearly defined and limited, the terms "mounted", "connected", "coupled", "fixed", etc. shall be construed broadly. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the internal communication of two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application may be understood according to specific circumstances.

[0026] In order to illustrate the technical solutions provided by the present application, the following will be described in detail with reference to specific drawings and embodiments.

[0027] In a first aspect, please refer to Figure 1, embodiments of the present application provide a glass coating device 100, including a cavity 10, a cathode 20, a vacuum pump 30, a sputtering power supply 40, a first cooling device 50 and a second cooling device 60; the cavity 10 has a coating chamber 11; the cathode 20 is accommodated in the coating chamber 11 and is used to carry a target; the vacuum pump 30 is used to extract air in the coating chamber 11 to form a vacuum environment in the coating chamber 11; the sputtering power supply 40 is electrically connected to the cathode 20; the first cooling device 50 is heat-exchange connected to the cathode 20 to cool the cathode 20; the second cooling device 60 is heat-exchange connected to the sputtering power supply 40 and the vacuum pump 30 to cool the sputtering power supply 40 and the vacuum pump 30.

[0028] The cavity 10 is used to provide a coating environment for the glass, and at least part of this coating environment constitutes the above-mentioned coating chamber 11.

[0029] The cathode 20 is a carrier of the target. By accelerating ions through an electric field to bombard the surface of the target, target atoms are released and deposited on the surface of the glass. At the same time, the plasma distribution is optimized through magnetic field design to achieve coating of the glass. The cathode 20 can be, but is not limited to, a planar cathode 20, a rotating cathode 20, etc.

[0030] The vacuum pump 30 is used to pump the air in the coating chamber 11 to the outside of the coating chamber 11 to form a vacuum environment in the coating chamber 11, reduce the interference of gas impurities, and ensure the purity and uniformity of the film layer. The vacuum pump 30 can be, but is not limited to, a molecular pump, a mechanical pump, a diffusion pump, etc.

[0031] The sputtering power supply 40 is the core energy source for the glass coating device 100 to coat the glass. The sputtering power supply 40 is used to convert the electric energy provided by the external power grid into high-voltage direct current, radio frequency or pulsed power supply to provide an electric field to accelerate ions to the cathode 20 and maintain a stable plasma discharge environment, thereby controlling the sputtering rate and film quality energy conversion.

[0032] In some embodiments, the glass coating device 100 further includes a conveying mechanism, and the conveying mechanism is used to convey the glass.

[0033] As an example, the number of cathodes 20, the number of vacuum pumps 30, and the number of sputtering power supplies 40 are all multiple. The multiple cathodes 20 are arranged in one-to-one correspondence with the multiple sputtering power supplies 40. Along the conveying direction of the conveying mechanism, the coating chamber 11 has multiple coating areas. Each coating area is provided with at least one cathode 20. The targets carried by the cathodes 20 in each coating area can be the same or different, so that multiple mutually overlapping film layers can be formed on the surface of the glass during the conveying process of the glass. Each coating area is also provided with at least one vacuum pump 30 to improve the vacuum degree of each coating area.

[0034] The first cooling device 50 is used to cool the cathode 20. In some embodiments, a cooling medium flow path is formed inside the first cooling device 50, and the cathode 20 is disposed on this flow path so that the cooling medium flows through the cathode 20, thereby taking away the heat of the cathode 20 to achieve the purpose of cooling the cathode 20.

[0035] The second cooling device 60 is used to cool the sputtering power supply 40 and the vacuum pump 30. In some embodiments, a cooling medium flow path is formed inside the second cooling device 60, and both the sputtering power supply 40 and the vacuum pump 30 are disposed on this flow path so that the cooling medium flows through the sputtering power supply 40 and the vacuum pump 30, thereby taking away the heat of the sputtering power supply 40 and the heat of the vacuum pump 30 to achieve the purpose of cooling the sputtering power supply 40 and the vacuum pump 30.

[0036] In some embodiments, the number of cathodes 20, the number of vacuum pumps 30, and the number of sputtering power supplies 40 are all multiple. The multiple cathodes 20 are all disposed on the cooling medium flow path of the first cooling device 50 to cool the multiple cathodes 20, and the multiple sputtering power supplies 40 and the multiple vacuum pumps 30 are all disposed on the cooling medium flow path of the second cooling device 60 to cool the multiple sputtering power supplies 40 and the multiple vacuum pumps 30.

[0037] It can be understood that the first cooling device 50 and the second cooling device 60 are independent of each other, that is, the cooling medium flow path of the first cooling device 50 is not connected to the cooling medium flow path of the second cooling device 60, so that the cooling medium in the first cooling device 50 does not contact the cooling medium in the second cooling device 60.

[0038] The glass coating device 100 provided by the embodiments of the present application is provided with the first cooling device 50 and the second cooling device 60. The first cooling device 50 is used to cool the cathode 20, and the second cooling device 60 is used to cool the sputtering power supply 40 and the vacuum pump 30. In this way, the cooling medium in the first cooling device 50 and the cooling medium in the second cooling device 60 can be isolated from each other, so that the heat of the cooling medium in the first cooling device 50 does not transfer with the heat of the cooling medium in the second cooling device 60, effectively improving the cooling effect on the cathode 20, the sputtering power supply 40, and the vacuum pump 30, thereby effectively improving the reliability of the glass coating device 100.

[0039] In some embodiments of the present application, please refer to Figure 1, the first cooling device 50 includes a first internal circulation cooling assembly 51 and a first external circulation cooling assembly 52. The first internal circulation cooling assembly 51 is used to circulate a first cooling medium and is heat-exchange connected to the cathode 20 to cool the cathode 20. The first external circulation cooling assembly 52 is used to circulate a second cooling medium and is heat-exchange connected to the first internal circulation cooling assembly 51 to cool the first cooling medium.

[0040] In some embodiments, the first cooling device 50 further includes a first heat exchange mechanism 53. The first heat exchange mechanism 53 is used to heat-exchange connect the first internal circulation cooling assembly 51 and the first external circulation cooling assembly 52 so that the first cooling medium and the second cooling medium can perform heat exchange.

[0041] As an example, the first internal circulation cooling assembly 51 includes a first liquid storage tank 511, a first delivery pipeline 512, a first power pump 513, a second delivery pipeline 514, and a second power pump 515. The first liquid storage tank 511 is used to store the first cooling medium. The first delivery pipeline 512 is used to connect the first liquid storage tank 511 and the cathode 20. The first power pump 513 is arranged on the first delivery pipeline 512 to drive the first cooling medium to circulate between the first liquid storage tank 511 and the cathode 20 along the first delivery pipeline 512. The second delivery pipeline 514 is used to connect the first liquid storage tank 511 and the first heat exchange mechanism 53. The second power pump 515 is arranged on the second delivery pipeline 514 to drive the first cooling medium to circulate between the first liquid storage tank 511 and the first heat exchange mechanism 53 along the second delivery pipeline 514. It can be understood that when the number of cathodes 20 is multiple, the multiple cathodes 20 are all arranged on the first delivery pipeline 512, and the multiple cathodes 20 can be arranged in parallel or in series on the first delivery pipeline 512.

[0042] As an example, the first internal circulation cooling assembly 51 further includes a first bypass pipeline 516 and a third power pump 517. The first bypass pipeline 516 is connected to the first delivery pipeline 512, and both ends of the first bypass pipeline 516 are respectively arranged on opposite sides of the first power pump 513 along the flow direction of the first cooling medium. The third power pump 517 is arranged on the first bypass pipeline 516 so that the first power pump 513 and the third power pump 517 are arranged in parallel. In this way, when the first power pump 513 fails, the third power pump 517 can be started to ensure that the first internal circulation cooling assembly 51 can continue to operate normally, thereby further improving the reliability of the glass coating equipment 100.

[0043] As an example, the first internal circulation cooling assembly 51 further includes a second bypass pipeline 518 and a fourth power pump 519. The second bypass pipeline 518 is connected to the second delivery pipeline 514, and both ends of the second bypass pipeline 518 are respectively arranged on opposite sides of the second power pump 515 along the flow direction of the first cooling medium. The fourth power pump 519 is arranged on the second bypass pipeline 518 so that the second power pump 515 and the fourth power pump 519 are arranged in parallel. In this way, when the second power pump 515 fails, the fourth power pump 519 can be started, thereby ensuring that the first internal circulation cooling assembly 51 can continue to operate normally, and further improving the reliability of the glass coating equipment 100.

[0044] By adopting the above technical solution, the cooling effect of the counter cathode 20 can be further improved, thereby further improving the reliability of the glass coating equipment 100.

[0045] In some embodiments of the present application, the first cooling medium is pure water or cooling oil.

[0046] By adopting the above technical solution, the scaling inside the first cooling device 50 can be improved, enabling the cooling medium to flow more smoothly inside the first cooling device 50, further improving the cooling effect of the counter cathode 20, and thus further improving the reliability of the glass coating equipment 100.

[0047] In some embodiments of the present application, please refer to Figure 1 , the first external circulation cooling assembly 52 includes a first cooling tower 521 and a first liquid storage tank 522. The first liquid storage tank 522 is used to store the second cooling medium. The first cooling tower 521 is connected to the first liquid storage tank 522 through a pipeline to deliver the second cooling medium from the first liquid storage tank 522 to the first cooling tower 521.

[0048] In some embodiments, the first cooling device 50 further includes a first heat exchange mechanism 53. The first heat exchange mechanism 53 is used to heat-exchange connect the first internal circulation cooling assembly 51 and the first external circulation cooling assembly 52 so that the first cooling medium and the second cooling medium can conduct heat exchange.

[0049] As an example, the first external circulation cooling assembly 52 further includes a third delivery pipeline 523 and a fifth power pump 524. The third delivery pipeline 523 is used to connect the first cooling tower 521, the first liquid storage tank 522 and the first heat exchange mechanism 53. The fifth power pump 524 is arranged on the third delivery pipeline 523 to drive the second cooling medium to circulate between the first cooling tower 521, the first liquid storage tank 522 and the first heat exchange mechanism 53 along the third delivery pipeline 523.

[0050] As an example, the first external circulation cooling assembly 52 further includes a third bypass pipeline 525 and a sixth power pump 526. The third bypass pipeline 525 is connected to the third delivery pipeline 523, and both ends of the third bypass pipeline 525 are respectively arranged on opposite sides of the fifth power pump 524 along the flow direction of the second cooling medium. The sixth power pump 526 is arranged on the third bypass pipeline 525, so that the fifth power pump 524 and the sixth power pump 526 are arranged in parallel. In this way, when the fifth power pump 524 fails, the sixth power pump 526 can be started to ensure that the first external circulation cooling assembly 52 can continue to operate normally, thereby further improving the reliability of the glass coating equipment 100.

[0051] By adopting the above technical solution, in the case of a water cut-off, the first liquid storage tank 522 can continue to supply the second cooling medium to the first cooling tower 521, thereby ensuring the normal operation of the first cooling device 50 and further improving the reliability of the glass coating equipment 100.

[0052] In some embodiments of the present application, please refer to Figure 1 , the first cooling tower 521 is arranged above the first liquid storage tank 522.

[0053] In some embodiments, a first liquid return port is opened at the bottom of the first cooling tower 521, and the second cooling medium can flow back to the first liquid storage tank 522 from the first liquid return port under the action of gravity, thereby effectively reducing the number of pipe fittings and simplifying the structure of the first external circulation cooling assembly 52.

[0054] By adopting the above technical solution, the structure of the first cooling device 50 can be made more compact, thereby effectively reducing the area occupied by the glass coating equipment 100.

[0055] In some embodiments of the present application, please refer to Figure 1 , the second cooling device 60 includes a second internal circulation cooling assembly 61 and a second external circulation cooling assembly 62. The second internal circulation cooling assembly 61 is used for circulating a third cooling medium and is heat-exchanged with the sputtering power supply 40 and the vacuum pump 30 to cool the sputtering power supply 40 and the vacuum pump 30. The second external circulation cooling assembly 62 is used for circulating a fourth cooling medium and is heat-exchanged with the second internal circulation cooling assembly 61 to cool the third cooling medium.

[0056] In some embodiments, the second cooling device 60 further includes a second heat exchange mechanism 63. The second heat exchange mechanism 63 is used to heat-exchange the second internal circulation cooling assembly 61 and the second external circulation cooling assembly 62, so that the third cooling medium and the fourth cooling medium perform heat exchange.

[0057] As an example, the second internal circulation cooling assembly 61 includes a second liquid storage tank 611, a fourth delivery pipeline 612, a seventh power pump 613, a fifth delivery pipeline 614, and an eighth power pump 615. The second liquid storage tank 611 is used to store the third cooling medium. The fourth delivery pipeline 612 is used to connect the second liquid storage tank 611, the sputtering power supply 40, and the vacuum pump 30. The seventh power pump 613 is arranged on the fourth delivery pipeline 612 to drive the third cooling medium to circulate between the second liquid storage tank 611, the sputtering power supply 40, and the vacuum pump 30 along the fourth delivery pipeline 612. The fifth delivery pipeline 614 is used to connect the second liquid storage tank 611 and the second heat exchange mechanism 63. The eighth power pump 615 is arranged on the fifth delivery pipeline 614 to drive the third cooling medium to circulate between the second liquid storage tank 611 and the second heat exchange mechanism 63 along the fifth delivery pipeline 614. It can be understood that when the number of sputtering power supplies 40 and the number of vacuum pumps 30 are both multiple, multiple sputtering power supplies 40 and multiple vacuum pumps 30 are both arranged on the fourth delivery pipeline 612. Multiple sputtering power supplies 40 can be arranged in parallel on the fourth delivery pipeline 612, or can be arranged in series on the fourth delivery pipeline 612. Similarly, multiple vacuum pumps 30 can be arranged in parallel on the fourth delivery pipeline 612, or can be arranged in series on the fourth delivery pipeline 612.

[0058] As an example, the second internal circulation cooling assembly 61 further includes a fourth bypass pipeline 616 and a ninth power pump 617. The fourth bypass pipeline 616 is connected to the fourth delivery pipeline 612, and both ends of the fourth bypass pipeline 616 are respectively arranged on opposite sides of the seventh power pump 613 along the flow direction of the third cooling medium. The ninth power pump 617 is arranged on the fourth bypass pipeline 616 so that the seventh power pump 613 and the ninth power pump 617 are arranged in parallel. In this way, when the seventh power pump 613 fails, the ninth power pump 617 can be started to ensure that the second internal circulation cooling assembly 61 can continue to operate normally, thereby further improving the reliability of the glass coating equipment 100.

[0059] As an example, the second internal circulation cooling assembly 61 further includes a fifth bypass pipeline 618 and a tenth power pump 619. The fifth bypass pipeline 618 is connected to the fifth delivery pipeline 614, and both ends of the fifth bypass pipeline 618 are respectively arranged on opposite sides of the eighth power pump 615 along the flow direction of the third cooling medium. The tenth power pump 619 is arranged on the fifth bypass pipeline 618 so that the eighth power pump 615 and the tenth power pump 619 are arranged in parallel. In this way, when the eighth power pump 615 fails, the tenth power pump 619 can be started to ensure that the second internal circulation cooling assembly 61 can continue to operate normally, further improving the reliability of the glass coating equipment 100.

[0060] By adopting the above technical solution, the cooling effect on the sputtering power supply 40 and the vacuum pump 30 can be further improved, thereby further enhancing the reliability of the glass coating equipment 100.

[0061] In some embodiments of the present application, the third cooling medium is pure water or cooling oil.

[0062] By adopting the above technical solution, the scaling inside the second cooling device 60 can be improved, enabling the cooling medium to flow more smoothly inside the second cooling device 60, further enhancing the cooling effect on the sputtering power supply 40 and the vacuum pump 30, and thus further improving the reliability of the glass coating equipment 100.

[0063] In some embodiments of the present application, please refer to Figure 1 , the second external circulation cooling assembly 62 includes a second cooling tower 621 and a second liquid storage tank 622. The second liquid storage tank 622 is used to store the fourth cooling medium, and the second cooling tower 621 is connected to the second liquid storage tank 622 through pipelines to transport the fourth cooling medium from the second liquid storage tank 622 to the second cooling tower 621.

[0064] In some embodiments, the second cooling device 60 further includes a second heat exchange mechanism 63. The second heat exchange mechanism 63 is used to heat-exchange connect the second internal circulation cooling assembly 61 and the second external circulation cooling assembly 62, enabling the third cooling medium to exchange heat with the fourth cooling medium.

[0065] As an example, the second external circulation cooling assembly 62 further includes a sixth delivery pipeline 623 and an eleventh power pump 624. The sixth delivery pipeline 623 is used to connect the second cooling tower 621, the second liquid storage tank 622, and the second heat exchange mechanism 63. The eleventh power pump 624 is arranged on the sixth delivery pipeline 623 to drive the fourth cooling medium to circulate between the second cooling tower 621, the second liquid storage tank 622, and the second heat exchange mechanism 63 along the sixth delivery pipeline 623.

[0066] As an example, the second external circulation cooling assembly 62 further includes a sixth bypass pipeline 625 and a twelfth power pump 626. The sixth bypass pipeline 625 is connected to the sixth delivery pipeline 623, and both ends of the sixth bypass pipeline 625 are respectively arranged on opposite sides of the eleventh power pump 624 along the flow direction of the fourth cooling medium. The twelfth power pump 626 is arranged on the sixth bypass pipeline 625, such that the eleventh power pump 624 and the twelfth power pump 626 are arranged in parallel. In this way, when the eleventh power pump 624 fails, the twelfth power pump 626 can be started to ensure that the second external circulation cooling assembly 62 can continue to operate normally, thereby further improving the reliability of the glass coating equipment 100.

[0067] By adopting the above technical solution, in the event of a water supply interruption, the second liquid storage tank 622 can continue to supply the fourth cooling medium to the second cooling tower 621, thereby ensuring the normal operation of the second cooling device 60 and further improving the reliability of the glass coating equipment 100.

[0068] In some embodiments of the present application, please refer to Figure 1 , the second cooling tower 621 is disposed above the second liquid storage tank 622.

[0069] In some embodiments, a second liquid return port is formed at the bottom of the second cooling tower 621, and the fourth cooling medium can flow back to the second liquid storage tank 622 from the second liquid return port under the action of gravity, thereby effectively reducing the number of pipe fittings provided and simplifying the structure of the second external circulation cooling assembly 62.

[0070] By adopting the above technical solution, the structure of the second cooling device 60 can be made more compact, thereby effectively reducing the area occupied by the glass coating equipment 100.

[0071] In a second aspect, an embodiment of the present application provides a glass production system, including the glass coating equipment 100 described in any one of the above embodiments.

[0072] Since the glass production system provided by the embodiment of the present application adopts the glass coating equipment 100 described in any one of the above embodiments, the reliability of the glass production system is effectively improved.

[0073] The foregoing is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A glass coating device, characterized in that, The glass coating equipment includes: A cavity having a coating chamber; A cathode accommodated in the coating chamber and used for carrying a target; A vacuum pump for pumping air in the coating chamber to form a vacuum environment in the coating chamber; A sputtering power supply electrically connected to the cathode; A first cooling device heat-exchange connected to the cathode to cool the cathode; A second cooling device heat-exchange connected to the sputtering power supply and the vacuum pump to cool the sputtering power supply and the vacuum pump.

2. The glass coating equipment according to claim 1, wherein: The first cooling device includes a first internal circulation cooling component and a first external circulation cooling component. The first internal circulation cooling component is used for circulating a first cooling medium and is heat-exchange connected to the cathode to cool the cathode. The first external circulation cooling component is used for circulating a second cooling medium and is heat-exchange connected to the first internal circulation cooling component to cool the first cooling medium.

3. The glass coating equipment according to claim 2, wherein: The first cooling medium is pure water or cooling oil.

4. The glass coating equipment according to claim 2, characterized in that: The first external circulation cooling component includes a first cooling tower and a first liquid storage tank. The first liquid storage tank is used for storing the second cooling medium. The first cooling tower is connected to the first liquid storage tank through a pipeline to convey the second cooling medium from the first liquid storage tank to the first cooling tower.

5. The glass coating device according to claim 4, wherein: The first cooling tower is arranged above the first liquid storage tank.

6. The glass coating equipment according to any one of claims 1-5, characterized in that: The second cooling device includes a second internal circulation cooling component and a second external circulation cooling component. The second internal circulation cooling component is used for circulating a third cooling medium and is heat-exchange connected to the sputtering power supply and the vacuum pump to cool the sputtering power supply and the vacuum pump. The second external circulation cooling component is used for circulating a fourth cooling medium and is heat-exchange connected to the second internal circulation cooling component to cool the third cooling medium.

7. The glass coating equipment according to claim 6, wherein: The third cooling medium is pure water or cooling oil.

8. The glass coating equipment according to claim 6, wherein: The second external circulation cooling component includes a second cooling tower and a second liquid storage tank. The second liquid storage tank is used for storing the fourth cooling medium. The second cooling tower is connected to the second liquid storage tank through a pipeline to convey the fourth cooling medium from the second liquid storage tank to the second cooling tower.

9. The glass coating equipment according to claim 8, characterized in that: The second cooling tower is arranged above the second liquid storage tank.

10. A glass production system, characterized in that: The glass production system includes the glass coating equipment according to any one of claims 1-9.

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