Assembly and device for preparing diamond film on surface of full-ceramic bearing ring

Abstract

The invention relates to the technical field of diamond film preparation, in particular to an assembly and device for preparing a diamond film on the surface of a full-ceramic bearing ring, and the assembly comprises a heating component which comprises a plurality of hot wires arranged at equal intervals with the surface of the bearing ring; the rotating component is used for driving the bearing ring to rotate; the base is used for mounting the heating component and the rotating component; the cover body is buckled on the base, and a reaction chamber is defined by the base and the cover body; the heating component and the rotating component are arranged in the reaction chamber; an air inlet and an air outlet are further formed in the cover body, and the air inlet is used for being connected with an external air supply device; the device comprises the chemical vapor deposition assembly, a gas supply device, a motor, a power supply system and a cooling water channel. The hot wires and the surface of the bearing ring are arranged at equal intervals, and the bearing ring is driven to rotate at a constant speed through the rotating component, so that all surface areas are subjected to the same thermal radiation and gas decomposition environment, and the deposition efficiency and the film layer quality are improved.

Description

Technical Field

[0001] The present invention relates to the technical field of diamond film preparation, and particularly to a component and a device for preparing a diamond film on the surface of an all-ceramic bearing raceway. Background Art

[0002] A silicon nitride all-ceramic bearing refers to a bearing in which its outer ring, inner ring, and rolling elements are all made of silicon nitride ceramic material. As an important rotating mechanical part, silicon nitride all-ceramic bearings have been increasingly widely used in various fields in recent years. In special environments such as high temperature, high speed, corrosion resistance, vacuum, electrical insulation, and non-magnetic in aerospace, nuclear industry, petroleum industry, chemical industry, light textile industry, food industry, high-speed machine tools, etc., the role of silicon nitride all-ceramic bearings is being gradually recognized. The outstanding effect of silicon nitride all-ceramic bearings is to greatly improve the service life and limit speed of the bearings, providing basic components for the development of high-speed and ultra-high-speed, high-precision machine tools. However, in harsh environments such as high temperature or high vacuum, the performance of traditional lubricants will drop significantly or even be difficult to use, thus seriously affecting the service life and reliability of silicon nitride all-ceramic bearings. Therefore, the diamond film formed on the surface of silicon nitride all-ceramic bearings by applying chemical vapor deposition technology has extremely high hardness, the best chemical stability, good thermal conductivity, and wear resistance, and is a very promising coating form. Using the diamond film as a wear-resistant coating on the surface of silicon nitride all-ceramic bearings will reduce the friction coefficient of the ceramic bearings, increase the surface hardness and thermal conductivity of the ceramic bearings, and greatly improve the service performance and service life of the ceramic bearings.

[0003] The hot-filament chemical vapor deposition technology is an effective method for depositing diamond films on the surface of silicon nitride all-ceramic bearings. However, using the hot-filament chemical vapor deposition method to deposit diamond films on the surface of ceramic bearing raceways requires a special deposition device. The traditional hot-filament chemical vapor deposition horizontally arranges the hot filaments, and the horizontal arrangement method of hot filaments is suitable for depositing diamond films on flat or small-curvature substrates. When applied to the outer surface of the inner ring and the inner surface of the outer ring (360° circular surface) of silicon nitride ceramic bearings, the vertical distance between the horizontally arranged hot filaments and different regions of the substrate varies significantly, resulting in uneven thermal field distribution, different gas dissociation efficiencies, and chaotic diamond grain orientations. In the area near the hot filament, it is easy to overheat and generate a graphite phase, while in the far-distance area, amorphous carbon is formed due to insufficient pyrolysis. At the same time, the grain growth direction is disordered, reducing the denseness of the film layer and seriously affecting the coating uniformity and bonding strength. At the same time, when using the hot-filament chemical vapor deposition method to prepare diamond films on the surface of ceramic bearing raceways, the bearing raceway needs to rotate at a constant speed to ensure that a high-quality diamond film is obtained on the entire surface of the ceramic bearing raceway. Summary of the Invention

[0004] Aiming at the deficiencies of the existing technology, the present invention provides a component and a device for preparing a diamond film on the surface of a fully ceramic bearing race, which realizes depositing a diamond film on the surface of the bearing race by the hot wire chemical vapor deposition method, improves the uniformity and stability of the diamond film, and has broad application prospects.

[0005] The specific technical solutions are as follows:

[0006] A component for preparing a diamond film on the surface of a fully ceramic bearing race, comprising:

[0007] A heating member, including a plurality of hot wires arranged at equal intervals from the surface of the bearing race;

[0008] A rotating member for driving the bearing race to rotate;

[0009] A base for installing the heating member and the rotating member;

[0010] A cover body, which is buckled on the base, and the base and the cover body enclose a reaction chamber; the heating member and the rotating member are both arranged in the reaction chamber; an air inlet and an air outlet are also arranged on the cover body, and the air inlet is used to be connected with an external gas supply device.

[0011] Furthermore, the heating member includes:

[0012] Columns, two groups of columns are inserted opposite to each other on the base, and the bottom ends of the columns are used to connect the power supply system;

[0013] Connection blocks, the number of which is the same as that of the columns, are respectively detachably installed on the columns. The connection blocks have through holes and can be sleeved on the columns. They also have a locking screw hole structure. According to the required installation height, the relative positions of the connection blocks and the columns are adjusted, and screws are inserted into the locking screw holes to lock the connection blocks on the columns;

[0014] Molybdenum electrode bars, having a strip structure, are equipped with two, and are respectively arranged on each group of connection blocks;

[0015] Molybdenum electrode disks, having a hollow disk-like structure, and the number of molybdenum electrode disks is the same as that of the molybdenum electrode bars. The installation parts of the molybdenum electrode disks match the strip structures of the molybdenum electrode bars and are correspondingly installed on the molybdenum electrode bars;

[0016] Hot wire fixing disks, having a hollow disk-like structure matching the molybdenum electrode disks, are respectively concentrically installed on each molybdenum electrode disk;

[0017] Hot wire fixing screws, having a plurality of them, are symmetrically arranged along the circumference on the hot wire fixing disks and are equidistant from the center line of the hot wire fixing disks;

[0018] The hot wire tensioning springs are respectively installed on the hot wire fixing screws of one of the hot wire fixing discs. One ends of multiple hot wires are respectively wound around the hot wire tensioning springs, and the other ends are connected to the symmetrically arranged hot wire fixing screws.

[0019] Further, the rotating member includes:

[0020] A bevel gear set, including a driving bevel gear and a driven bevel gear meshing with the driving bevel gear;

[0021] A rotating shaft for driving the bearing race to rotate. The driven bevel gear is installed on the rotating shaft. Both ends of the rotating shaft are respectively supported by support seats arranged outside the molybdenum electrode disc and are rotatably connected to the support seats, and penetrate through the hollow structure of the molybdenum electrode disc. The bearing race is located between two molybdenum electrode discs;

[0022] A vertical shaft is arranged outside the molybdenum electrode disc. One end of the vertical shaft is connected to the driving bevel gear, and the other end passes through the base and is used to be connected to the motor through a coupling. The vertical shaft is rotatably connected to the base.

[0023] Further, a guiding block is rotatably connected to the vertical shaft. The guiding block is approximately in an inverted U shape and includes one or more U-shaped sides. The U-shaped sides have through holes for sleeving on the vertical shaft. The vertical shaft is rotatably connected to the guiding block through bearings arranged on the through holes; the bottom edge of the guiding block is fixedly connected to the support seat or the base.

[0024] Further, the support seat includes a bearing seat arranged at its upper end. The rotating shaft is rotatably connected to the bearing seat through a bearing.

[0025] Further, a mechanical seal is arranged at the connection between the base and the vertical shaft. The vertical shaft passes through the mechanical seal and is rotatably connected to the base.

[0026] Further, the rotating member further includes: a bearing race sleeve sleeved on the rotating shaft. The bearing race is an inner bearing ring, and several inner bearing rings are sleeved outside the bearing race sleeve.

[0027] Further, the rotating member further includes:

[0028] A bearing race sleeve is rotatably connected to the rotating shaft through a spur gear set;

[0029] A sleeve support seat is rotatably sleeved at both ends of the bearing race sleeve through bearings. The support part of the sleeve support seat is installed on the installation part of the molybdenum electrode disc. The driving spur gear of the spur gear set is installed on the rotating shaft, and the driven spur gear of the spur gear set is installed outside the bearing race sleeve. The driving spur gear meshes with the driven spur gear. The bearing race is an outer bearing ring, and the outer bearing ring is installed on the inner wall of the bearing race sleeve.

[0030] Further, it further includes a turntable which is arranged in the middle of the base.

[0031] A device for preparing diamond films on the surface of all-ceramic bearing rings includes the above-mentioned components for preparing diamond films on the surface of all-ceramic bearing rings, a gas supply device, a motor, a power supply system, and a cooling water channel; the gas supply device is connected to the air inlet, the motor is connected to the rotating member through a coupling, the power supply system is electrically connected to the components for preparing diamond films on the surface of all-ceramic bearing rings, and the cooling water channel is arranged in the reaction chamber and connected to an external cooling device.

[0032] The beneficial effects of the present invention are as follows: The present invention can deposit diamond films on the surface (360° continuous annular inner curved surface) of the bearing ring by using the hot wire chemical vapor deposition method. The hot wire is arranged at an equal distance from the surface of the bearing ring. Through the uniform rotation of the rotating member, the uniform rotation of the bearing ring is driven, so that the temperature field distribution around the bearing ring is uniform, and each surface area experiences the same heat radiation and gas decomposition environment. The hot wire is arranged in a semi-circular array directly above the surface of the bearing ring, and the gravitational field is used to guide the active groups to migrate towards the substrate surface, improving the deposition efficiency and film quality, so as to deposit diamond films on the surface of the bearing ring and ensure that high-quality diamond films are obtained on the entire surface of the ceramic bearing ring; the present invention can change the inner diameter of the silicon nitride all-ceramic bearing inner ring and realize the hot wire chemical vapor deposition of diamond films on the surfaces of silicon nitride all-ceramic bearing rings with different sizes; the present invention can deposit diamond films on the surface of large-size silicon nitride all-ceramic bearing rings by changing the number of hot wires. Description of the Drawings

[0033] Figure 1 It is a three-dimensional structural schematic diagram of the component for preparing diamond films on the surface of all-ceramic bearing rings of the present invention;

[0034] Figure 2 It is a front view structural schematic diagram of the component for preparing diamond films on the surface of all-ceramic bearing rings of the present invention;

[0035] Figure 3 It is a structural schematic diagram of the device for preparing diamond films on the surface of all-ceramic bearing rings of the present invention;

[0036] Figure 4 It is a three-dimensional structural schematic diagram of the component for preparing diamond films on the surface of all-ceramic bearing rings of the present invention;

[0037] Figure 5 It is a front view structural schematic diagram of the component for preparing diamond films on the surface of all-ceramic bearing rings of the present invention;

[0038] Figure 6 It is a structural schematic diagram of the device for preparing diamond films on the surface of all-ceramic bearing rings of the present invention.

[0039] In the figure: 1. Rotating shaft; 2. Locking nut; 3. Base; 4. Bearing housing; 5. Hot wire fixing screw; 6. Hot wire fixing plate; 7. Molybdenum electrode plate; 8. Tantalum wire; 9. Inner ring of bearing; 10. Sleeve of bearing ring; 11. Hot wire tension spring; 12. Bevel gear set; 13. Support seat; 14. Guide block; 15. Vertical shaft; 16. Mechanical seal; 17. Molybdenum electrode bar; 18. Connecting block; 19. Column; 20. Turntable; 21. Cover body; 22. Sleeve support seat; 23. Straight gear set; 24. Outer ring of bearing; 25. Air inlet; 26. Exhaust port. Specific implementation mode

[0040] For better explaining the present invention for easy understanding, the technical solutions and effects of the present invention will be described in detail below with reference to the drawings through specific implementation modes.

[0041] As Figure 1-6 shown, this embodiment discloses a component for preparing a diamond film on the surface of a fully ceramic bearing ring. The fully ceramic bearing is a silicon nitride fully ceramic bearing, including:

[0042] A heating member, including a plurality of hot wires arranged at equal intervals on the surface of the bearing ring;

[0043] A rotating member for driving the bearing ring to rotate;

[0044] A base 3 for installing the heating member and the rotating member;

[0045] A cover body 21 is buckled on the base 3, and the base 3 and the cover body 21 enclose a reaction chamber; the heating member and the rotating member are both arranged in the reaction chamber; an air inlet 25 and an exhaust port 26 are further arranged on the cover body 21, and the air inlet 25 is used to be connected with an external gas supply device.

[0046] It should be noted that the component for preparing the diamond film on the surface of the fully ceramic bearing ring sets the ring of the bearing on the rotating member, and arranges a plurality of hot wires of the heating member at equal intervals on the surface of the bearing ring. By the uniform rotation of the rotating member, the uniform rotation of the bearing ring is driven, so that the temperature field distribution around the bearing ring is uniform. Methane and hydrogen are introduced into the device through the air inlet 25, and the heating member is heated. By using the hot wire chemical vapor deposition method, a diamond film is deposited on the surface of the bearing ring, ensuring that a high-quality diamond film is obtained on the entire surface of the ceramic bearing ring, improving the uniformity and stability of the diamond film. The unreacted gases (such as methane and hydrogen) and by-products (such as ethane and ethylene) are discharged through the exhaust port 26.

[0047] Among them, referring to Figure 3 or Figure 6, a reaction chamber is formed by enclosing the base 3 and the cover 21. The heating member and the rotating member are both arranged in the reaction chamber, thereby providing a sealed environment for preparing the thin film. As a preferred solution, the heating member includes:

[0048] The upright posts 19, two groups of upright posts 19 are inserted relatively on the base 3, and the bottom ends of the upright posts 19 are used to connect the power supply system;

[0049] The connecting blocks 18, the number of which is the same as that of the upright posts 19, are respectively detachably installed on the upright posts 19. The connecting blocks 18 have through holes and can be sleeved on the upright posts 19. They also have a locking screw hole structure. According to the required installation height, the relative positions of the connecting blocks 18 and the upright posts 19 are adjusted, and the connecting blocks 18 are locked on the upright posts 19 by inserting screws into the locking screw holes;

[0050] The molybdenum electrode bars 17, having a bar-shaped structure, are equipped with two, and are respectively arranged on each group of connecting blocks 18;

[0051] The molybdenum electrode disks 7, having a hollow disk-shaped structure, and the number of the molybdenum electrode disks 7 is the same as that of the molybdenum electrode bars 17. The installation parts of the molybdenum electrode disks 7 match the bar-shaped structures of the molybdenum electrode bars 17 and are correspondingly installed on the molybdenum electrode bars 17;

[0052] The hot wire fixing disks 6, having a hollow disk-shaped structure matching the molybdenum electrode disks 7, are respectively concentrically installed on each molybdenum electrode disk 7;

[0053] The hot wire fixing screws 5, having a plurality of them, are symmetrically arranged along the circumference on the hot wire fixing disks 6 and are equidistant from the center line of the hot wire fixing disks 6;

[0054] The hot wire tension springs 11, a plurality of hot wire tension springs 11 are respectively installed on the hot wire fixing screws 5 of one of the hot wire fixing disks 6. One ends of multiple hot wires are respectively wound around the hot wire tension springs 11, and the other ends are connected to the symmetrically arranged hot wire fixing screws 5.

[0055] It should be noted that two groups (a total of 4) of upright posts 19 are relatively arranged on the base 3, and their bottom ends pass through the base 3 and are connected to the existing power supply system. The upright posts 19 and the connecting blocks 18 both have the function of conducting electricity. The current of the power supply system is transmitted to the hot wire through the upright posts 19, the connecting blocks 18, the molybdenum electrode bars 17, the molybdenum electrode disks 7, the hot wire fixing disks 6, the hot wire fixing screws 5, and the hot wire tension springs 11 to heat the hot wire so that the temperature of the hot wire meets the film-making requirements (usually 1800 - 2200 °C).

[0056] Among them, the connecting block 18 has a locking screw hole structure. According to the required distance from the hot wire to the surface of the bearing ring, the relative position between the connecting block 18 and the column 19 can be changed for locking, so as to adjust the position to meet the requirements of bearing rings of different sizes. In this embodiment, the locking screw holes are arranged oppositely to improve the locking stability. The molybdenum electrode disk 7 can be replaced according to the size of the bearing ring to ensure a constant distance between the hot wire and the bearing ring. The molybdenum electrode bar 17 is arranged between the molybdenum electrode disk 7 and the connecting block 18 to play a transitional role, which is convenient for installation and avoids over-large processing of the molybdenum electrode disk 7. The hot wire fixing disk 6 is used to connect the hot wire fixing screw 5 and the molybdenum electrode disk 7. Multiple hot wire fixing screws 5 can be configured, and the projection of the formed whole on the hot wire fixing disk 6 can be arcs of different sizes. In this embodiment, in order to ensure uniform temperature distribution, multiple hot wire fixing screws 5 are arranged in a semi-circular array directly above the surface of the bearing ring to ensure that the vertical distance from the hot wire to each point on the surface of the bearing ring is constant, and the uniformly distributed multiple hot wires help to keep the temperature of the reaction area consistent, with a larger deposition area, improving the uniformity of the thin film. The efficiency of hot wire chemical vapor deposition highly depends on the pyrolysis of the reaction gas by the hot wire, and the hot wire must be located above the substrate to utilize the gravitational field to guide the active groups to migrate towards the substrate surface. When the hot wire deviates from directly above the substrate (such as being arranged laterally or below), the diffusion path of the active groups is extended, which not only reduces the deposition rate but also causes film layer defects due to gas turbulence. The hot wire tension spring 11 is installed on one side of the hot wire fixing screw 5. In this embodiment, the hot wire tension spring 11 is adopted. When the two ends of the hot wire are connected, one end can be wound around the hook of the hot wire tension spring 11, and the other end passes through the hollow disk-shaped structure and is tightened and pressed by the hot wire fixing screw 5 for connection, formed between the two molybdenum electrode disks 7. The lengths of the hot wire tension springs 11 are unified to achieve consistent pre-tightening force of the hot wire, prevent the hot wire from bending after heating, and avoid brittle fracture of the hot wire; the materials, diameters, intervals, etc. of multiple hot wires can be adjusted according to actual needs. In this embodiment, the hot wire is a tantalum wire 8, which generates high temperature through heat generation, provides the required heat energy for the reaction gas to reach the reaction temperature, decomposes the gas near the tantalum wire 8 to generate carbon-containing active groups, and these active groups diffuse to the surface of the bearing ring and form diamond thin films through surface reactions.

[0057] As a preferred solution, the rotating member includes:

[0058] A bevel gear set 12, including a driving bevel gear and a driven bevel gear meshing with the driving bevel gear;

[0059] A rotating shaft 1 for driving the bearing ring to rotate. The driven bevel gear is installed on the rotating shaft 1. The two ends of the rotating shaft 1 are respectively supported by support seats 13 arranged outside the molybdenum electrode disk 7 and are rotatably connected to the support seats 13, and penetrate through the hollow structure of the molybdenum electrode disk 7. The bearing ring is located between the two molybdenum electrode disks 7;

[0060] The vertical shaft 15 is arranged outside the molybdenum electrode disk 7. One end of it is connected to the driving bevel gear, and the other end passes through the base 3 and is used to be connected to the motor through a coupling. The vertical shaft 15 is rotatably connected to the base 3.

[0061] It should be noted that the driving bevel gear and the driven bevel gear that mesh with each other in the bevel gear set 12 are respectively installed on the vertical shaft 15 and the rotating shaft 1. During operation, the motor drives the vertical shaft 15 to rotate at a constant speed, and then the gear set 12 is used to convert the vertical rotation of the vertical shaft 15 into the horizontal rotation of the rotating shaft 1, driving the bearing race to rotate at a constant speed.

[0062] As a preferred solution, a guiding block is rotatably connected to the vertical shaft 15. The guiding block is approximately inverted U-shaped and includes one or more U-shaped sides. The U-shaped sides have through holes for sleeving on the vertical shaft 15, and the vertical shaft 15 is rotatably connected to the guiding block through bearings arranged on the through holes; the bottom edge of the guiding block is fixedly connected to the support seat 13 or the base 3.

[0063] It should be noted that the guiding block is used to guide the vertical rotation of the vertical shaft 15. It is installed on the vertical shaft 15 through the through holes arranged on the U-shaped sides of the guiding block to realize the guiding of the vertical rotation of the vertical shaft 15 and avoid the meshing failure of the bevel gear set 12. In this embodiment, the guiding block has two U-shaped sides, and the distance and number of the U-shaped sides can be set according to the length of the vertical shaft 15 to better guide the vertical shaft 15 and avoid the vertical shaft 15 from breaking. The guiding block is fixedly installed on the support seat 13 or the base 3 by fixing the U-shaped bottom plate of the guiding block with screws. Bearings can be installed on the through holes to facilitate the rotation of the vertical shaft 15.

[0064] As a preferred solution, the support seat 13 includes a bearing seat 4 arranged at its upper end, and the rotating shaft 1 is rotatably connected to the bearing seat 4 through a bearing.

[0065] Among them, the bearing seat 4 is used to support and fix the bearing, and the rotating shaft 1 realizes radial rotation through the arrangement of the bearing. A locking nut 2 is arranged between the bearing and the bearing seat 4. The outer surface of the locking nut 2 is threadedly connected to the hole of the bearing seat 4, and the inner surface of the locking nut 2 abuts against the outer ring of the bearing. By abutting the inner surface of the locking nut 2 against the outer ring of the bearing, the purpose of fastening the bearing by the locking nut 2 is achieved.

[0066] As a preferred solution, a mechanical seal 16 is arranged at the connection between the base 3 and the vertical shaft 15, and the vertical shaft 15 passes through the mechanical seal 16 and is rotatably connected to the base 3.

[0067] It should be noted that the vertical shaft 15 and the base 3 are connected by a mechanical seal method to solve the sealing problem between the vertical shaft 15 and the base 3 and prevent air leakage at the joint. The mechanical seal 16 is a common shaft seal device, and its function can be realized by using the existing structure.

[0068] The bearing ring is a bearing inner ring 9 or a bearing outer ring 24 .

[0069] As a preferred solution, when the bearing ring is a bearing inner ring 9, the rotating member further comprises:

[0070] The bearing ring sleeve 10 is sleeved on the rotating shaft 1 . The bearing ring is a bearing inner ring 9 . A plurality of bearing inner rings 9 are sleeved on the outside of the bearing ring sleeve 10 .

[0071] It should be noted that the ceramic bearing ring sleeve 10 is used to install the bearing ring, which can be replaced according to the size of the ceramic bearing ring to meet the needs of depositing diamond films on the surfaces of bearing rings of different sizes. The bearing ring sleeve 10 can be set to a certain length. The bearing ring in this embodiment is a bearing inner ring 9. Multiple bearing inner rings 9 can be installed on the outside of the bearing ring sleeve 10 to meet the needs of film forming on the outer surfaces of multiple bearing inner rings simultaneously, greatly improving the film forming efficiency. In this embodiment, the bearing ring sleeve 10 is installed with clearance fit with the rotating shaft 1 (the clearance fit satisfies that the tolerance zone of the rotating shaft 1 is located below the tolerance zone of the bearing ring sleeve 10), and the bearing inner ring 9 is installed with clearance fit with the bearing ring sleeve 10 (the clearance fit satisfies that the tolerance zone of the bearing ring sleeve 10 is located below the tolerance zone of the bearing inner ring 9). This assembly method is easy to install and disassemble, suitable for frequent adjustment or low-speed rotation of the structure, and ensures that no relative displacement occurs when the structure rotates at low speed.

[0072] As a preferred solution, when the bearing ring is a bearing outer ring 24, the rotating member further comprises:

[0073] The bearing ring sleeve 10 is rotatably connected to the rotating shaft 1 through the spur gear set 23;

[0074] The sleeve support seat 22 is rotatably connected to the two ends of the bearing ring sleeve 10 through the bearing. The supporting part of the sleeve support seat 22 is installed on the mounting part of the molybdenum electrode disk 7. The driving spur gear of the spur gear set 23 is installed on the rotating shaft 1. The driven spur gear of the spur gear set 23 is installed on the outside of the bearing ring sleeve 10. The driving spur gear is meshed with the driven spur gear. The bearing ring is a bearing outer ring 24, and the bearing outer ring 24 is installed on the inner wall of the bearing ring sleeve 10.

[0075] It should be noted that the bearing ring sleeve 10 rotates through the rotation of the spur gear set 23, driving the rotation of the bearing outer ring 24, so that the temperature field distribution around the bearing ring is uniform. In this embodiment, the bearing ring is the bearing outer ring 24. Multiple bearing outer rings 24 can be installed on the inner wall of the bearing ring sleeve 10 to meet the film forming requirements of the inner surfaces of multiple bearing outer rings synchronously, greatly improving the film forming efficiency. The driving spur gear of the spur gear set 23 is fixedly connected to the rotating shaft 1, and the driven spur gear of the spur gear set 23 is fixedly connected to the outside of the bearing ring sleeve 10. The driving spur gear meshes with the driven spur gear. The bearing ring is the bearing outer ring 24, and the bearing outer ring 24 is installed on the inner wall of the bearing ring sleeve 10. The bearing ring sleeve 10 is evenly provided with heat dissipation through holes for heat circulation to make its distribution more uniform. In this embodiment, the bearing ring sleeve 10 is installed with a clearance fit with the sleeve support seat 22 (the clearance fit satisfies that the tolerance zone of the bearing ring sleeve 10 is located below the tolerance zone of the sleeve support seat 22), and the bearing outer ring 24 is installed with a clearance fit with the bearing ring sleeve 10 (the clearance fit satisfies that the tolerance zone of the bearing outer ring 24 is located below the tolerance zone of the bearing ring sleeve 10). This assembly method is easy to install and disassemble, suitable for frequent adjustment or low-speed rotation of the structure, and ensures that there is no relative displacement during the low-speed rotation of the structure.

[0076] As a preferred solution, the device further includes a turntable 20, and the turntable 20 is arranged in the middle of the base 3.

[0077] It should be noted that in addition to meeting the film forming of the bearing ring, the device can also use the turntable 20 to prepare a film on a flat part. The shape of the turntable 20 is not limited. For example, a rectangular shape or other shapes are acceptable, which can meet the film preparation on the cylindrical surface and the film preparation on the flat part.

[0078] A device for preparing a diamond film on the surface of a fully ceramic bearing ring includes the above-mentioned components for preparing a diamond film on the surface of a fully ceramic bearing ring, a gas supply device, a motor, a power supply system, and a cooling water channel; the gas supply device is connected to the air inlet 25, the motor is connected to the rotating member through a coupling, the power supply system is electrically connected to the components for preparing a diamond film on the surface of a fully ceramic bearing ring, and the cooling water channel is arranged in the reaction chamber and connected to an external cooling device.

[0079] Among them, the gas supply device is connected to the air inlet 25 through a pipeline. A pneumatic control valve and a mass flow controller (S4932 / AMT) are provided on the pipeline. The pressure of the gas is initially reduced through the pneumatic control valve, and the flow rate of the gas passing through is controlled by the mass flow controller. The exhaust port 26 controls the flow rate of the exhaust port 26 through a throttle valve (MKS 649B). The gas supply device is a gas cylinder filled with hydrogen and methane respectively. The reaction chamber is equipped with a thin film gauge (INFICON CDG045) and a high-temperature infrared thermometer (WilliamsonPro-92-40). The thin film gauge is used to detect the reaction pressure in the chamber to ensure that the gas flow rate remains constant. By controlling the opening degree of the throttle valve, the pressure in the reaction chamber is ensured to be stable at the reaction pressure. The opening degree of the throttle valve is controlled by a PID controller. The temperature of the heating wire in the reaction chamber is monitored by the high-temperature infrared thermometer, and the temperature of the ceramic ferrule surface in the reaction chamber is monitored by the low-temperature infrared thermometer. A cooling water channel is provided on the inner wall of the reaction chamber. The cooling water channel is connected to an external cooling device (COOLSOONCHILLER) and circulates to dissipate heat to maintain a constant temperature. The power supply system includes a power supply at the output end, which is electrically connected to the column 19 of the component for preparing the diamond thin film on the surface of the all-ceramic bearing ferrule to input current. When the temperature of the heating wire in the reaction chamber monitored by the high-temperature infrared thermometer is too high or too low, the temperature of the heating wire is controlled by adjusting the magnitude of the current value. The motor is connected to the vertical shaft 15 of the rotating member through a coupling.

[0080] Taking the inner ring 9 of the bearing as an example, its process parameters include a heating wire temperature of 2000 °C, a reaction pressure of 10 Torr, a gas flow rate of 400 sccm, the shortest distance from the heating wire to the arc apex of the outer surface of the inner ring 9 of the bearing is 10 mm, the carbon source concentration (methane / hydrogen) is generally less than 5%, and in this embodiment, it is 3%. The deposition time is determined according to the required thickness, but generally not less than 2 hours, and in this embodiment, it is 10 hours.

[0081] The working process of this device: After the inner ring 9 of the bearing is installed, the reaction chamber of the device is evacuated to 1e-3 Pa, the cooling water channel is opened, and then methane and hydrogen are introduced into the reaction chamber. The motor is started to drive the vertical shaft 15 to rotate at a constant speed, and the inner ring 9 of the bearing is driven to rotate at a constant speed through the bevel gear set 12; the power supply system is started to energize the heating wire to make its temperature 2000 °C, so that the gas decomposes near the tantalum wire 8 to generate carbon-containing active groups. The active groups diffuse to the surface of the inner ring 9 of the bearing and form a diamond thin film through surface reaction. The unreacted gas is discharged to the outside through the exhaust port 26.

[0082] The working process of the bearing outer ring 24 is the same as that of the bearing inner ring 9. Its process parameters include a hot wire temperature of 2000 °C, a reaction pressure of 10 Torr, a gas flow rate of 400 sccm, the shortest distance from the hot wire to the arc apex of the inner surface of the bearing outer ring 24 is 10 mm, the carbon source concentration (methane / hydrogen) is 3%, and the deposition time is 10 hours.

Claims

1. A component for preparing diamond thin films on the surface of all-ceramic bearing rings, characterized in that: Comprising: A heating member, including a plurality of heating wires arranged at equal intervals from the surface of the bearing ring; A rotating member for driving the rotation of the bearing ring; A base for mounting the heating member and the rotating member; A cover body fastened on the base, and the base and the cover body enclose a reaction chamber; the heating member and the rotating member are both arranged in the reaction chamber; an air inlet and an air outlet are further arranged on the cover body, and the air inlet is used for connecting with an external gas supply device.

2. The assembly for preparing diamond thin film on the surface of all-ceramic bearing rings according to claim 1, characterized in that: The heating member includes: Columns, two groups of columns are inserted into the base relatively, and the bottom ends of the columns are used for connecting the power supply system; Connection blocks, the same number as the columns, are respectively detachably mounted on the columns. The connection blocks have through holes and can be sleeved on the columns, and also have a locking screw hole structure. According to the required installation height, the relative positions of the connection blocks and the columns are adjusted, and the connection blocks are locked on the columns by inserting screws into the locking screw holes; Molybdenum electrode bars, having a bar-shaped structure, two are provided, and are respectively arranged on each group of connection blocks; Molybdenum electrode discs, having a hollow disc-shaped structure, and the number of molybdenum electrode discs is the same as that of the molybdenum electrode bars. The mounting parts of the molybdenum electrode discs match the bar-shaped structures of the molybdenum electrode bars and are correspondingly mounted on the molybdenum electrode bars; Hot wire fixing discs, having a hollow disc-shaped structure matching the molybdenum electrode discs, and are respectively concentrically mounted on each molybdenum electrode disc; Hot wire fixing screws, there are a plurality of them, which are symmetrically arranged along the circumference on the hot wire fixing discs and are at equal distances from the center line of the hot wire fixing discs; Hot wire tension springs, a plurality of hot wire tension springs are respectively mounted on the hot wire fixing screws of one of the hot wire fixing discs. One ends of a plurality of hot wires are respectively wound around the hot wire tension springs, and the other ends are connected to the symmetrically arranged hot wire fixing screws.

3. The assembly for preparing a diamond thin film on the surface of an all-ceramic bearing raceway according to claim 1, characterized in that: The rotating member includes: A bevel gear set, including a driving bevel gear and a driven bevel gear meshing with the driving bevel gear; A rotating shaft for driving the rotation of the bearing ring, the driven bevel gear is mounted on the rotating shaft. The two ends of the rotating shaft are respectively supported by support seats arranged outside the molybdenum electrode discs and are rotatably connected to the support seats, and penetrate through the hollow structure of the molybdenum electrode discs. The bearing ring is located between the two molybdenum electrode discs; A vertical shaft, arranged outside the molybdenum electrode disc, one end of which is connected to the driving bevel gear, and the other end passes through the base and is used for connecting with a motor through a coupling. The vertical shaft is rotatably connected to the base.

4. The assembly for preparing a diamond thin film on the surface of an all-ceramic bearing race according to claim 3, characterized in that: A guide block is rotatably connected to the vertical shaft. The guide block is approximately inverted U-shaped and includes one or more U-shaped sides. The U-shaped sides have through holes for sleeving on the vertical shaft, and the vertical shaft is rotatably connected to the guide block through bearings arranged on the through holes; the bottom edge of the guide block is fixedly connected to the support seat or the base.

5. The assembly for preparing a diamond thin film on the surface of an all-ceramic bearing raceway according to claim 3, characterized in that: The support seat includes a bearing seat arranged at its upper end, and the rotating shaft is rotatably connected to the bearing seat through a bearing.

6. The assembly for preparing a diamond thin film on the surface of an all-ceramic bearing raceway according to claim 3, characterized in that: A mechanical seal is arranged at the connection part of the base and the vertical shaft, and the vertical shaft passes through the mechanical seal and is rotatably connected to the base.

7. The assembly for preparing the diamond thin film on the surface of the all-ceramic bearing race according to claim 3, characterized in that: The rotating member further includes: a bearing ring sleeve, sleeved on the rotating shaft, and the bearing ring is an inner bearing ring, and a plurality of inner bearing rings are sleeved outside the bearing ring sleeve.

8. The assembly for preparing diamond thin film on the surface of all-ceramic bearing rings according to claim 3, characterized in that: The rotating member further includes: A bearing ring sleeve, rotatably connected to the rotating shaft through a spur gear set; The sleeve support base is rotatably sleeved on both ends of the bearing ring sleeve through bearings. The support part of the sleeve support base is installed on the installation part of the molybdenum electrode plate. The driving spur gear of the spur gear set is installed on the rotating shaft, and the driven spur gear of the spur gear set is installed on the outer side of the bearing ring sleeve. The driving spur gear meshes with the driven spur gear. The bearing ring is an outer bearing ring, and the outer bearing ring is installed on the inner wall of the bearing ring sleeve.

9. The assembly for preparing a diamond thin film on the surface of an all-ceramic bearing race according to claim 1, characterized in that: It further includes a turntable, and the turntable is arranged in the middle of the base.

10. An apparatus for preparing diamond thin films on the surface of all-ceramic bearing rings, characterized in that, It includes the assembly for preparing the diamond film on the surface of the all-ceramic bearing ring, the gas supply device, the motor, the power supply system and the cooling water channel as described in any one of claims 1 to 9; the gas supply device is connected to the air inlet, the motor is connected to the rotating member through a coupling, the power supply system is electrically connected to the assembly for preparing the diamond film on the surface of the all-ceramic bearing ring, and the cooling water channel is arranged in the reaction chamber and connected to the external cooling device.

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