A resistance testing device for improving test accuracy and stability

Abstract

The present application relates to the technical field of semiconductor testing and provides a resistance testing device for improving the stability of test accuracy. The device comprises a detection arm, a base rotatably connected to the detection arm, a plurality of probes spaced about the axis of the base, and a drive assembly for driving the base to rotate about its own axis. The detection arm extends at one end along its length to above a test table. The base comprises a first section rotatably connected to the detection arm and a second section arranged in a conical shape. The second section is arranged near the test table, and the busbar of the second section is parallel to the table surface of the test table. The probe is provided with a plurality of probes, the axis of each probe being perpendicular to the table surface of the test table. The probes of each probe are of different types, and the probes protrude from the conical surface of the second section. The drive assembly is electrically connected to a controller, and the controller is electrically connected to a host computer. The present application has the beneficial effect of improving the stability of test accuracy.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor testing, and in particular to a resistance testing device capable of improving testing accuracy and stability. Background Art

[0002] Four-probe resistance meters are used in semiconductor manufacturing to measure the sheet resistance or resistivity of thin films such as those produced by implantation, diffusion, epitaxy, and metal coating. Different probe types are required for wafers prepared using different processes, such as ion implantation and metal coating. This requires changing the resistance meter probes as needed, which is relatively cumbersome and time-consuming.

[0003] However, during the replacement process, it is necessary to verify that the probe is properly installed. Frequent probe replacement is cumbersome, making installation accuracy difficult to guarantee, which can easily affect the final measurement accuracy. Furthermore, during installation, there is a risk of the probe coming into contact or colliding with the surrounding environment, which can easily cause damage and failure, ultimately affecting the stability of test accuracy. Therefore, further improvements are needed. Summary of the Invention

[0004] In order to solve the above problems, the present application provides a resistance testing device that improves the testing accuracy and stability.

[0005] This application provides a resistance testing device that improves test accuracy and stability, using the following technical solutions:

[0006] A resistance testing device for improving test accuracy and stability comprises a detection arm, a base rotatably connected to the detection arm, a plurality of probes spaced apart around the axis of the base, and a drive assembly for driving the base to rotate around its own axis; one end of the detection arm extends above a detection table along its length, the base comprises a first section rotatably connected to the detection arm and a second section arranged in a conical shape, the second section being arranged close to the detection table, a busbar of the second section being parallel to the table surface of the detection table, a plurality of probes being arranged on the probe, the axes of the probes being perpendicular to the table surface of the detection table, the probe types of each probe being different, the probes protruding from the conical surface of the second section, the drive assembly being electrically connected to a controller, and the controller being electrically connected to a host computer.

[0007] By adopting the above technical solution, in which the second section is arranged in a cone shape and the busbar is parallel to the surface of the detection table, a plurality of probes of different types are provided, so that the driving assembly can be used to drive the base to rotate to select the appropriate probe, thereby reducing the time spent on frequent replacement of probes, saving time and improving efficiency; and reducing the steps of verifying whether the probe is installed in place, ensuring the installation accuracy, thereby improving the final measurement accuracy; reducing the risk of the probe contacting or colliding with the surrounding environment during installation, reducing the damage and failure of the probe, and improving the stability of the test accuracy.

[0008] Preferably, the driving assembly includes a first driving motor provided on the detection arm and a transmission rod fixedly connected to the output shaft of the first driving motor, and the transmission rod is rotatably passed through the detection arm and fixedly connected to the upper surface of the base.

[0009] By adopting the above technical solution, the first drive motor is used to drive the transmission rod to rotate, and then drive the base to rotate around its own axis, so that different types of probes can be switched, which reduces the time spent on frequent removal and installation of probes, as well as the impact of improper installation of probes and difficulty in ensuring installation accuracy on measurement accuracy. At the same time, the risk of damage and failure caused by contact or collision between the probe and the surrounding environment during installation is reduced, thereby improving the stability of test accuracy.

[0010] Preferably, the base also includes a third section arranged between the first section and the second section, the third section is arranged in a conical shape, the busbar of the second section and the busbar of the third section are arranged to intersect, and a probe is also protruding from the side of the third section. The detection arm is provided with an adjustment component for driving the busbar of the second section or the busbar of the third section parallel to the table surface of the detection table.

[0011] By adopting the above technical solution, a third section is added, and a probe is also protruding from the side of the third section. In conjunction with the adjustment component on the detection arm that can drive the second section busbar or the third section busbar parallel to the surface of the detection table, the types of probes that can be used are increased, further meeting more diverse measurement needs, reducing the operation of replacing probes, and improving test accuracy and stability.

[0012] Preferably, the detection arm includes a first arm and a second arm in sequence in the direction away from the detection platform, and the adjustment assembly includes a rotating rod arranged on the first arm and a driving member that drives the first arm to rotate, and the first arm is rotatably connected to the second arm through the rotating rod.

[0013] Preferably, the detection arm is provided with a stabilizing mechanism for stabilizing the edge of the base.

[0014] By adopting the above technical solution, the base is rotated by the drive assembly, so that the probes of different types of probes are switched to the measurement position, thereby improving measurement efficiency and reducing the impact on measurement accuracy. Since the busbar of the second section of the base is parallel to the detection table, the axis of the base is set at an angle. Under the influence of gravity, the transmission rod used to connect the base and the detection arm or the output shaft of the drive motor will deflect, thereby affecting the accuracy of the busbar of the second section or the third section of the base being parallel to the detection table, thereby affecting the subsequent measurement accuracy. In this regard, by providing a stabilizing mechanism on the detection arm, the edge of the base can be stabilized, and the stability of the base during rotation and stop can be enhanced, thereby improving the stability of the test accuracy.

[0015] Preferably, the stabilizing mechanism includes a rotating ring for connecting the first section to rotation and a limiting component provided on the rotating ring to limit the rotation of the first section, and the rotating ring is connected to the detection arm.

[0016] By adopting the above technical solution, a rotating ring is provided for the first section of the base to be rotated and connected, and the rotation of the first section is limited by the limit assembly on the rotating ring. This can stabilize the edge of the base and reduce the shaking of the base, so as to stabilize it during measurement and improve the probe position stability, thereby ensuring the accuracy of the probe measurement position and improving the stability of the test accuracy.

[0017] Preferably, the limiting assembly includes a first bolt passing through the rotating ring, and several first bolts are arranged at intervals around the axis of the rotating ring. The side wall of the first section is provided with a threaded hole for threaded connection of the first bolt, and several threaded holes are arranged at intervals around the axis of the first section.

[0018] By adopting the above technical solution, a plurality of first bolts arranged at intervals around the axis of the rotating ring are threadedly connected with a plurality of threaded holes arranged at intervals around the axis of the first section, thereby limiting the rotation of the first section, reducing unnecessary rotation of the base during the test, improving the stability of the probe position, and thus improving the stability of the test accuracy.

[0019] Preferably, a limit ring is provided around the outer peripheral wall of the first section, the limit ring is arranged in an isosceles triangle cross-section, the rotating ring is provided with two, the surfaces of the two rotating rings close to each other are provided with inclined surfaces, the side surfaces of the limit ring are arranged close to the inclined surfaces, and a rotation space is left between the inclined surfaces and the limit ring, and an angle formed between the side and bottom edges of the limit ring is greater than the angle formed between the side surfaces and the bottom edges of the limit ring; the inner wall of the rotating ring is provided with a limit surface connected to the inclined surface; the limit assembly also includes a ball arranged in the rotation space, a rubber pad arranged on the inclined surface and the side surface of the limit ring, a first elastic member arranged on the limit surface, and a second driving member for driving the two rotating rings to move in a direction approaching or moving away from each other, the ball abutting the limit ring, the first elastic member being used to push the ball to move in a direction away from the limit surface, the inclined surface is provided with a sliding groove along its own inclined direction, and the ball is slidably connected to the sliding groove.

[0020] By adopting the above technical solution, in order to stabilize the edge of the base, the second driving member can also be started to drive the two rotating rings to move closer to or away from the limit ring. When approaching, since the angle formed between the side and bottom edge of the limit ring is greater than the angle formed between the side and the bottom edge of the limit ring, the rotation space gradually increases toward the direction approaching the limit surface, and the ball will move toward the direction approaching the limit surface after being squeezed. As it approaches, when it abuts the rubber pad, the friction force generated by the ball squeezing the rubber pad can limit the rotation of the base, reduce shaking and deviation during rotation, and further improve the stability of the test accuracy.

[0021] When it is necessary to rotate the base to switch the probe, the second driving member drives the two rotating rings to move away from each other. At this time, the ball is subjected to the elastic force of the first elastic member to push the ball to move in the direction away from the limit surface, thereby playing a certain reset role and also facilitating the base to rotate in the rotating ring under the drive of the driving assembly.

[0022] Preferably, the limit assembly includes a scissor arm connected to a rotating ring, and the second driving member includes two connecting plates respectively hinged to the two ends of the scissor arm on a side away from the rotating ring, a guide rod and a screw passing through the two connecting plates, a fixed plate for connecting the lower end of the guide rod, a second spring coaxially sleeved on the guide rod and a nut threadedly connected to the screw; two second springs are provided and are respectively provided on the side of the two connecting plates away from each other, and the ends of the two second springs away from each other are respectively connected to the detection arm and the fixed plate, and the second spring forces the two ends of the scissor arm on one side to move in a direction away from each other, and the nut is provided with two to respectively abut against the side surfaces of the two connecting plates away from each other.

[0023] By adopting the above technical solution, the connecting plate is hinged on the two ends of the scissor arm away from the rotating ring, so that the movement of the scissor arm can be transmitted to the connecting plate. The guide rod and the screw rod are passed through the two connecting plates to ensure the stability of the movement of the connecting plates. At the same time, the guide rod can also play a guiding role. The fixed plate is connected to the lower end of the guide rod to provide a stable support base for the entire structure. The second spring is coaxially sleeved on the guide rod and respectively arranged on the side where the two connecting plates are away from each other. Its two ends are respectively connected to the detection arm and the fixed plate, forcing the two ends of the scissor arm on one side to move in a direction away from each other, so that the elastic adjustment of the position of the rotating ring can be achieved, which increases the flexibility and buffering performance of the device. The nut is threadedly connected to the screw rod and respectively abuts against the sides of the two connecting plates away from each other. By rotating the nut, the position of the connecting plate can be accurately controlled, and then the distance between the rotating rings can be adjusted, so that the base can be more accurately stabilized, thereby improving the test accuracy and stability of the resistance testing device.

[0024] Preferably, the screw is a bidirectional threaded rod, and the screw thread passes through the connecting plate.

[0025] By adopting the above technical solution, the screw is configured as a bidirectional threaded rod and its threads are inserted into the connecting plate. When the screw is rotated, the characteristics of the bidirectional threaded rod can cause the connecting plates on both sides to move synchronously in opposite directions. This structure enables the scissor arms connected to the connecting plates to stably drive the two rotating rings to move toward or away from each other, thereby more accurately controlling the limiting operation of the base and effectively enhancing the stability of the overall operation of the device.

[0026] In summary, this application has the following beneficial effects:

[0027] By setting up multiple probes of different probe types spaced around the axis of the base and using the drive assembly to drive the base to rotate to switch the probes, the frequent operation of replacing probes is reduced, saving time and labor costs, as well as measurement errors caused by insufficient installation accuracy, and improving the final measurement accuracy; it can also reduce the risk of the probe contacting or colliding with the surrounding environment during installation, and improve the stability of the test accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 This is a schematic diagram of the overall structure of Example 1 of the present application;

[0029] Figure 2 This is a schematic diagram of the structure in which the busbar of the second section of the base is parallel to the surface of the test table in Example 1 of the present application;

[0030] Figure 3 This is a schematic structural diagram of the stabilizing mechanism in Example 1 of the present application;

[0031] Figure 4 is a schematic structural diagram of the regulating assembly in Example 1 of the present application;

[0032] Figure 5 This is a schematic diagram of the structure in which the busbar of the third section of the base is parallel to the surface of the test table in Example 1 of the present application;

[0033] Figure 6 This is a schematic structural diagram of the stabilizing mechanism in Example 2 of the present application;

[0034] Figure 7 is a schematic cross-sectional structural diagram of the stabilizing mechanism in Example 2 of the present application;

[0035] Figure 8 yes Figure 7 A partial enlarged schematic diagram of part A;

[0036] Figure 9 Schematic diagram of the structure of the ball in Example 2 of the present application;

[0037] Figure 10 This is a schematic structural diagram of Example 3 of the present application;

[0038] Figure 11 yes Figure 10 A partial enlarged schematic diagram of part B;

[0039] Figure 12 It is a structural diagram of Example 4 of the present application.

[0040] Explanation of reference numerals: 1. detection arm; 11. first arm; 12. second arm; 2. base; 21. first section; 22. second section; 23. third section; 24. limiting ring; 241. rotation space; 3. probe; 31. probe; 4. driving assembly; 41. first driving motor; 42. transmission rod; 5. detection platform; 6. adjustment assembly; 61. rotating rod; 62. driving member; 621. driven gear; 622. driving gear; 6 23. Second drive motor; 7. Stabilizing mechanism; 8. Rotating ring; 81. Inclined surface; 811. Slide groove; 82. Limiting surface; 821. Mounting hole; 9. Limiting assembly; 91. First bolt; 92. Ball bearing; 93. Rubber pad; 94. First elastic member; 95. Second drive member; 951. Connecting plate; 952. Guide rod; 953. Screw rod; 954. Fixing plate; 955. Second spring; 956. Nut; 96. Scissor arm. DETAILED DESCRIPTION

[0041] The following is combined with Figure 1 -Attached Figure 12 , further details of this application are given.

[0042] The embodiments of the present application disclose a resistance testing device that improves the stability of testing accuracy. Example 1:

[0043] A resistance test device that improves test accuracy and stability, referring to Figure 1 , including a detection arm 1, a base 2 rotatably connected to the detection arm 1, a plurality of probes 3 spaced apart around the axis of the base 2, and a driving assembly 4 for driving the base 2 to rotate around its own axis.

[0044] Among them, one end of the detection arm 1 along the length direction extends to the top of the detection table 5, and the detection table 5 is used to carry the wafer to be measured. Specifically, the detection arm 1 plays the role of supporting and connecting other components. In the direction away from the detection table 5, it includes a first arm 11 and a second arm 12 in sequence. Its structure can be a rod-shaped structure made of metal material with certain strength and rigidity. The first arm 11 is close to the detection table 5, and its end extends above the detection table 5, making it convenient for the probe 3 to measure the wafer on the detection table 5 and for the drive component 4 to be installed.

[0045] Reference Figure 2 、 Figure 3, wherein the base 2 specifically includes a first section 21 connected to the first arm 11, a second section 22 close to the test table 5 and arranged in a conical shape, and a third section 23 arranged between the first section 21 and the second section 22. Under normal conditions, the busbar of the second section 22 is parallel to the table surface of the test table 5. A plurality of probes 31 are provided on the probe 3, specifically arranged on the lower surface of the probe 3. The probes 31 protrude from the conical surface of the second section 22, and the axes of the probes 31 are perpendicular to the busbars of the second section 22, so that the probes 31 are arranged perpendicular to the table surface of the test table 5. It should be noted that the probes 31 of each probe 3 are of different types, and different types of probes 31 are suitable for wafers prepared by different processes. When the base 2 rotates, different types of probes 3 are rotated to the top of the test table 5 in turn, and the corresponding probes 31 can measure the resistance of the wafer.

[0046] In this embodiment, the third section 23 is arranged in a truncated cone shape, the busbar of the second section 22 and the busbar of the third section 23 are arranged to intersect, and a number of probes 3 are also arranged at intervals around the third end of the third section 23. At this time, the probe 31 on the probe 3 also protrudes from the side of the third section 23, and the axis of the probe 31 is perpendicular to the busbar of the third section 23.

[0047] The drive assembly 4 is electrically connected to a controller (not shown), which is in turn electrically connected to a host computer (not shown). Since the controller and host computer are conventional, they will not be described in detail here. The drive assembly 4 is used to drive the base 2 to rotate about its own axis. Specifically, it includes a first drive motor 41 disposed on the first arm 11 and a transmission rod 42 fixedly connected to the output shaft of the first drive motor 41. The transmission rod 42 is rotatably disposed through the first arm 11 to be fixedly connected to the upper surface of the base 2. The first drive motor 41 can be a stepper motor that receives commands from the host computer via the controller to precisely control the angle and speed of rotation. The drive assembly 4 can also utilize a servo motor to achieve higher control accuracy and stability.

[0048] Regarding the selection of the probe 31 set on the second section 22 or the third section 23, in this embodiment, the detection arm 1 is provided with an adjustment component 6 for driving the busbar of the second section 22 or the busbar of the third section 23 to be parallel to the table surface of the detection table 5.

[0049] Reference Figure 4 、 Figure 5 Adjustment assembly 6 can adjust the posture of base 2 according to actual measurement requirements, so that the generatrix of second section 22 or third section 23 is parallel to the surface of inspection table 5, so that probes 31 at different positions can accurately contact the wafer. Adjustment assembly 6 specifically includes a rotating rod 61 provided on first arm 11 and a driving member 62 that drives first arm 11 to rotate. First arm 11 is rotatably connected to second arm 12 via rotating rod 61.

[0050] The driving member 62 can be an electric push rod or other device, which drives the first arm 11 to rotate around the rotating rod 61 through the telescopic action, thereby adjusting the angle of the base 2. The driving member 62 can also use a hydraulic cylinder to provide greater driving force. Or Figure 4 As shown, a mounting groove for installing the driving member 62 is opened on the second arm 12, and the rotating rod extends into the mounting groove. The driving member 62 specifically includes a driven gear 621 coaxially fixedly connected to the outside of the rotating rod 61, a driving gear 622 engaged with the driven gear 621, and a second driving motor 623 that drives the driving gear 622 to rotate. The second driving motor 623 is built into the mounting groove.

[0051] Reference Figure 2 、 Figure 3 Furthermore, the detection arm 1 is provided with a stabilizing mechanism 7 for stabilizing the edge of the base 2. In this embodiment, the stabilizing mechanism 7 specifically includes a rotating ring 8 for rotatably connecting the first section 21 and a limiting assembly 9 provided on the rotating ring 8 to limit the rotation of the first section 21. The rotating ring 8 is connected to the detection arm 1. The limiting assembly 9 specifically includes a first bolt 91 that passes through the rotating ring 8. A plurality of first bolts 91 are arranged at intervals around the axis of the rotating ring 8. The side wall of the first section 21 is provided with threaded holes for threaded connection of the first bolts 91. A plurality of threaded holes are arranged at intervals around the axis of the first section 21. When the base 2 needs to be fixed, the first bolt 91 is tightened to cooperate with the threaded hole to limit the rotation of the base 2.

[0052] The implementation principle of a resistance testing device for improving test accuracy and stability in an embodiment of the present application is as follows: the resistance testing device drives the base 2 to rotate through a driving component 4 to achieve switching between different types of probes 3, reducing the tedious operation and installation accuracy issues caused by replacing the probes 3, and improving the stability of test accuracy. The adjustment component 6 can adjust the posture of the base 2 so that the probes 31 in different positions can accurately contact the wafer, further improving the accuracy of the measurement. The stabilizing mechanism 7 ensures the stability of the base 2 during rotation and measurement, reducing the impact of the shaking of the base 2 on the measurement results. Through the synergistic effect of these structures, the device effectively improves the accuracy and stability of resistance testing. Example 2:

[0053] Reference Figure 6 、 Figure 7, the difference from Example 1 is that, in this embodiment, a limiting ring 24 is provided around the outer peripheral wall of the first section 21, and the cross-section of the limiting ring 24 is an isosceles triangle. Two rotating rings 8 are provided, and the surfaces of the two rotating rings 8 close to each other are provided with an inclined surface 81. The inner wall of the rotating ring 8 is provided with a limiting surface 82 connected to the inclined surface 81. The side of the limiting ring 24 is provided close to the inclined surface 81, and a rotation space 241 is left between the inclined surface 81 and the limiting ring 24. The angle formed between the side and the bottom of the limiting ring 24 is greater than the angle formed between the side and the bottom of the limiting ring 24, so that the rotation space 241 gradually increases towards the limit surface 82.

[0054] Reference Figure 7 、 Figure 8 In this embodiment, the limiting assembly 9 also includes a ball 92 arranged in the rotating space 241, a rubber pad 93 arranged on the inclined surface 81 and the side of the limiting ring 24, a first elastic member 94 arranged on the limiting surface 82, and a second driving member 95 for driving the two rotating rings 8 to move toward or away from the limiting ring 24.

[0055] Reference Figure 8 , Figure 9 , wherein the inclined surface 81 is provided with a slide groove 811 along its own inclination direction, the ball 92 is slidably connected to the slide groove 811, the ball 92 is used to abut against the limiting ring 24, and the first elastic member 94 is used to push the ball 92 to move in the direction away from the limiting surface 82. The first elastic member 94 is specifically a first spring, and the limiting surface 82 is provided with a mounting hole 821 for installing the first spring, and the first spring is partially exposed in the mounting hole 821.

[0056] The second driving member 95 specifically includes two connecting plates 951 respectively connected to the two rotating rings 8, a guide rod 952 and a screw 953 that slide through the two connecting plates 951, a fixing plate 954 to which the lower end of the guide rod 952 is fixedly connected, a second spring 955 coaxially sleeved on the guide rod 952, and a nut 956 threadedly connected to the screw 953. Two second springs 955 are provided and are respectively provided on the side of the two connecting plates 951 that are away from each other. The ends of the two second springs 955 that are away from each other are respectively connected to the first arm 11 and the fixing plate 954. The second springs 955 force the two connecting plates 951 to move in a direction away from each other. Two nuts 956 are provided and are respectively abutted against the side of the two connecting plates 951 that are away from each other.

[0057] By rotating the nut 956, the position of the connecting plate 951 can be precisely controlled, thereby adjusting the distance between the rotating rings 8, thereby more accurately and firmly operating the base 2 and improving the test accuracy and stability of the resistance testing device. Example 3:

[0058] Reference Figure 10 、 Figure 11 The difference from Example 2 is that the stabilizing mechanism 7 also includes a hinged scissor arm 96, which is arranged between the connecting plate 951 and the rotating ring 8. One end of the scissor arm 96 is fixedly connected to the rotating ring 8, and the other end of the scissor arm 96 is hinged to the connecting plate 951 to improve the clamping effect. Example 4:

[0059] Reference Figure 12 The difference from Example 2 or 3 is that, in this embodiment, the screw 953 is a bidirectional threaded rod, and the screw 953 is threaded through the connecting plate 951. When the nut 956 is rotated, since the screw 953 is a bidirectional threaded rod, the two connecting plates 951 will move toward or away from each other, thereby realizing the approach or distance of the rotating ring 8.

[0060] The above are all preferred embodiments of the present application, and are not intended to limit the scope of protection of the present application. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the scope of protection of the present application.

Claims

1. A resistance testing device for improving test accuracy and stability, characterized by: The invention comprises a detection arm (1), a base (2) rotatably connected to the detection arm (1), a plurality of probes (3) arranged at intervals around the axis of the base (2), and a driving assembly (4) driving the base (2) to rotate around its own axis; the detection arm (1) extends at one end in the length direction to above the detection table (5); the base (2) comprises a first section (21) rotatably connected to the detection arm (1) and a second section (22) arranged in a conical shape; the second section (22) is arranged close to the detection table (5); the busbar of the second section (22) is parallel to the table surface of the detection table (5); the probe (3) is provided with a plurality of probes (31); the probes The axis of the (31) is perpendicular to the table surface of the detection table (5), the probe (31) of each probe (3) is of different types, the probe (31) protrudes from the conical surface of the second section (22), the driving component (4) is electrically connected to the controller, and the controller is electrically connected to the host computer; the detection arm (1) is provided with a stabilizing mechanism (7) for stabilizing the edge of the base (2), the stabilizing mechanism (7) includes a rotating ring (8) for connecting the first section (21) to rotation and a limit assembly (9) provided on the rotating ring (8) to limit the rotation of the first section (21), the rotating ring (8) is connected to the detection arm (1); the first section (21 ) is provided with a limiting ring (24) around the outer peripheral wall, the cross section of the limiting ring (24) is arranged in an isosceles triangle, the rotating ring (8) is provided with two, the surfaces of the two rotating rings (8) close to each other are provided with an inclined surface (81), the side of the limiting ring (24) is provided close to the inclined surface (81), a rotating space (241) is left between the inclined surface (81) and the limiting ring (24), the angle formed between the side and the bottom of the limiting ring (24) is greater than the angle formed between the side and the bottom of the limiting ring (24), and the inner wall of the rotating ring (8) is provided with a limiting surface (82) connected to the inclined surface (81); the limiting assembly (9) also It includes a ball (92) arranged in the rotating space (241), a rubber pad (93) arranged on the inclined surface (81) and the side of the limiting ring (24), a first elastic member (94) arranged on the limiting surface (82), and a second driving member (95) for driving the two rotating rings (8) to move toward or away from each other, the ball (92) abuts against the limiting ring (24), the first elastic member (94) is used to push the ball (92) to move in a direction away from the limiting surface (82), the inclined surface (81) is provided with a slide groove (811) along its own inclined direction, and the ball (92) is slidably connected to the slide groove (811).

2. A resistance testing device for improving test accuracy and stability according to claim 1, characterized in that: The driving assembly (4) comprises a first driving motor (41) provided on the detection arm (1) and a transmission rod (42) fixedly connected to the output shaft of the first driving motor (41); the transmission rod (42) is rotatably provided through the detection arm (1) and is fixedly connected to the upper surface of the base (2).

3. The resistance testing device for improving test accuracy and stability according to claim 1, characterized in that: The base (2) further includes a third section (23) arranged between the first section (21) and the second section (22), the third section (23) being arranged in a truncated cone shape, the busbar of the second section (22) and the busbar of the third section (23) being arranged to intersect, and a probe (31) protruding from the side of the third section (23), and the detection arm (1) being provided with an adjustment component (6) for driving the busbar of the second section (22) or the busbar of the third section (23) to be parallel to the table surface of the detection table (5).

4. The resistance testing device for improving test accuracy and stability according to claim 3, characterized in that: The detection arm (1) includes a first arm (11) and a second arm (12) in sequence in a direction away from the detection platform (5); the adjustment assembly (6) includes a rotating rod (61) provided on the first arm (11) and a driving member (62) for driving the first arm (11) to rotate; the first arm (11) is rotatably connected to the second arm (12) via the rotating rod (61).

5. The resistance testing device for improving test accuracy and stability according to claim 1, characterized in that: The limiting assembly (9) includes a first bolt (91) passing through the rotating ring (8), and a plurality of the first bolts (91) are arranged at intervals around the axis of the rotating ring (8). The side wall of the first section (21) is provided with a threaded hole for threaded connection of the first bolt (91), and a plurality of the threaded holes are arranged at intervals around the axis of the first section (21).

6. The resistance testing device for improving test accuracy and stability according to claim 1, characterized in that: The limiting assembly (9) includes a scissor arm (96) connected to the rotating ring (8), and the second driving member (95) includes two connecting plates (951) respectively hinged to the two ends of the scissor arm (96) away from the rotating ring (8), a guide rod (952) and a screw rod (953) passing through the two connecting plates (951), a fixing plate (954) for connecting the lower end of the guide rod (952), a second spring (955) coaxially sleeved on the guide rod (952), and a screw rod (953) threadedly connected to the screw rod (95 3) nut (956); two second springs (955) are provided and are respectively provided on the side of the two connecting plates (951) away from each other, and the ends of the two second springs (955) away from each other are respectively connected to the detection arm (1) and the fixing plate (954), and the second springs (955) force the two ends of the scissor arm (96) on one side to move in a direction away from each other, and the nuts (956) are provided to respectively abut against the side surfaces of the two connecting plates (951) away from each other.

7. The resistance testing device for improving test accuracy and stability according to claim 6, characterized in that: The screw rod (953) is a bidirectional threaded rod, and the screw rod (953) is threadedly disposed through the connecting plate (951).

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