Novel nanoimprint device and method

Abstract

The invention discloses novel nano-imprinting equipment and method, the novel nano-imprinting equipment comprises a fluid bearing body, a soft template, a lifting driving device, a substrate bearing seat and a UV curing lamp, a closed space for bearing liquid is arranged in the fluid bearing body, and an imprinting part of the closed space can deform along with the gravity of the liquid in the closed space; the soft template is fixedly connected with the fluid bearing body, a plate body of the soft template is attached to the imprinting part of the closed space, and the plate body of the soft template can correspondingly deform along with deformation of the imprinting part; the lifting driving device is in transmission connection with the fluid bearing body and the soft template or the base plate bearing seat and can drive the fluid bearing body and the soft template or the base plate bearing seat to ascend and descend. According to the method, liquid gravity is used for driving the center of the soft template to protrude downwards, the edge of the soft template is gradually attached to the base plate, bubble-free attachment diffusing outwards from the center is achieved, and the bubble defect of traditional rigid imprinting is avoided.

Description

Technical Field

[0001] The present invention belongs to the technical field of nanoimprinting, and in particular relates to a novel nanoimprinting device and method. Background Art

[0002] As a low-cost and high-efficiency method for replicating micro-nano pattern structures, nanoimprinting technology occupies an important position in the fields of optical component manufacturing, semiconductor device processing, etc.

[0003] Traditional nanoimprinting processes rely on rigid molds or pneumatic or hydraulically driven imprinting methods, but face many challenges in practical applications:

[0004] First, when rigid molds are pressed, uneven pressure distribution can easily lead to deviations in the replication accuracy of micro-nano pattern structures. Especially in large-area imprinting scenarios, the pressure difference between the edge and the center area may cause pattern distortion.

[0005] Second, air is easily drawn into the mold and substrate during bonding to form bubbles, resulting in imprint defects.

[0006] Third, the heat generated by the light source during UV curing may cause local overheating of the adhesive layer, which can easily lead to thermal expansion and deformation of the resin layer, affecting the pattern accuracy. Summary of the invention

[0007] In order to solve the above technical problems, the present invention proposes a novel nanoimprinting device and method.

[0008] In order to achieve the above object, the technical solution of the present invention is as follows:

[0009] In a first aspect, the present invention discloses a novel nanoimprinting device, comprising:

[0010] A fluid carrier, wherein the fluid carrier has a closed space for carrying liquid, and the stamping portion of the closed space can be deformed with the gravity of the liquid in the closed space;

[0011] A soft template having a micro-nano pattern structure, the soft template is fixedly connected to the fluid carrier, and the plate body of the soft template is fitted with the imprinting part of the closed space, and the plate body of the soft template can be deformed correspondingly with the deformation of the imprinting part;

[0012] A lifting drive device, which is in driving connection with the fluid carrier and the soft template, or the substrate carrier, and can drive the fluid carrier and the soft template, or the substrate carrier to lift and lower;

[0013] A substrate supporting seat, the substrate supporting seat is used to support the substrate;

[0014] UV curing lamp, UV curing lamp is used to cure the embossed adhesive on the substrate.

[0015] On the basis of the above technical solution, the following improvements can be made:

[0016] As a preferred solution, a bearing ring is fixedly installed at a position of the fluid carrier close to the imprinting part. The bearing ring is used to limit the edge of the soft template, and the plate body of the soft template is attached to the imprinting part.

[0017] As a preferred solution, the fluid carrier is fixedly connected to the support frame. The support frame is in transmission connection with the lifting drive device, and the through hole on the support frame passes through the guide post. The through hole is slidably matched with the guide post to limit the lifting trajectory of the support frame.

[0018] As a preferred solution, the fluid carrier is provided with a communication port communicating with the closed space. The communication port is communicated with the liquid storage device through a communication pipe, and a control valve is installed on the communication pipe to regulate the liquid injection or extraction rate.

[0019] As a preferred solution, the novel nanoimprinting device further includes: a liquid level control device, and the liquid level control device includes: a liquid level monitoring device and an angle adjustment drive device;

[0020] The liquid level monitoring device includes: a camera and / or a capacitance sensor. The camera is installed above the liquid level of the liquid, and the capacitance sensor is installed on the cavity walls at different positions of the closed space of the fluid carrier. The liquid level monitoring device is used to monitor the liquid level angle of the liquid carried in the closed space.

[0021] The angle adjustment drive device is in transmission connection with the fluid carrier and is used to adjust the liquid level angle of the liquid carried in the closed space of the fluid carrier.

[0022] As a preferred solution, one or more annular partition parts are further arranged in the closed space of the fluid carrier. The radii of the multiple annular partition parts are different and are all distributed with the center of the imprinting part as the center of the circle;

[0023] The annular partition part divides the imprinting part into multiple independent imprinting units, and the sub-spaces corresponding to each imprinting unit can independently carry the corresponding volume of liquid.

[0024] In a second aspect, the present invention also discloses a novel nanoimprinting method, which uses any one of the above novel nanoimprinting devices for imprinting, including:

[0025] Step S1: Inject a preset volume of liquid into the closed space of the fluid carrier. Under the action of the gravity of the liquid, the plate body of the soft template deforms correspondingly as the imprinting part of the closed space deforms, and its center bulges downward;

[0026] Step S2: The lifting drive device drives the fluid carrier and the soft template, or the substrate carrier to lift and lower, so that the center of the soft template first contacts and then slowly fits with the substrate coated with the imprinting glue;

[0027] Step S3: After the pressure stabilizes, use a UV curing lamp to cure the imprinting adhesive on the substrate.

[0028] Step S4: The lifting drive device drives the fluid carrier and the soft template, or the substrate carrier to lift, separating the soft template from the substrate for demolding to achieve imprinting.

[0029] As a preferred solution, Step S4 further includes:

[0030] Step S4.1: Pump out the liquid in the closed space of the fluid carrier.

[0031] Step S4.2: The lifting drive device drives the fluid carrier and the soft template, or the substrate carrier to lift, separating the soft template from the substrate for demolding to achieve imprinting.

[0032] As a preferred solution, Step S4.1 further includes:

[0033] Pump out the liquid in the sub - spaces corresponding to the imprinting units at the corresponding positions in sequence from the edge area to the center area of the imprinting part, so that the pressure between the soft template and the substrate decreases in order from the edge area to the center area.

[0034] As a preferred solution, it further includes:

[0035] Step S5: Use a vision detection device to detect the morphology of the micro - nano pattern structure imprinted on the substrate to obtain detection data.

[0036] Step S6: Compare the collected detection data with a preset standard value, and according to the deviation between the two, reversely adjust the liquid level angle and / or the preset volume of the liquid in the closed space of the fluid carrier.

[0037] The present invention discloses a novel nano - imprinting device and method, which has the following beneficial effects:

[0038] First, pressure uniformity and bubble control. The present invention uses the method of driving the center of the soft template to convex downward and the edge to gradually fit the substrate by liquid gravity to achieve bubble - free fitting that diffuses from the center to the outside, avoiding the bubble defects of traditional rigid imprinting; the fluidity of the liquid enables the pressure to be evenly transmitted to the glue layer through the soft template, significantly improving the consistency of large - area imprinting.

[0039] Second, optimization of thermal stability. The liquid medium achieves a constant temperature effect through heat conduction during UV curing, suppressing the deformation of the glue layer caused by local overheating and improving the structure replication accuracy.

[0040] Third, dynamic adjustment and high-precision control. The liquid level is monitored in real time through visual monitoring or capacitive sensors, and the angle of the liquid surface is finely adjusted in combination with the angle adjustment drive device to ensure dynamic uniformity of the pressure distribution; the newly added reverse feedback adjustment mechanism can adaptively optimize the process parameters according to the imprinting results, improving the adaptability of the equipment to complex scenarios.

[0041] Fourth, gentle demolding and structural protection. The demolding method of extracting liquid in regions reduces the damage of demolding stress to the micro-nano pattern structure by controlling the pressure release sequence of the edge and central regions, especially suitable for imprinting scenarios with high aspect ratios or fragile structures, further improving the yield of finished products. Description of the Drawings

[0042] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention, and thus should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can be obtained based on these drawings without creative efforts.

[0043] Figure 1 Schematic structural diagram of the novel nanoimprinting device provided by the embodiment of the present invention (without liquid).

[0044] Figure 2 Schematic structural diagram of the novel nanoimprinting device provided by the embodiment of the present invention (with liquid).

[0045] Figure 3 Schematic diagram of the camera installation provided by the embodiment of the present invention.

[0046] Figure 4 Schematic diagram of the capacitive sensor installation provided by the embodiment of the present invention.

[0047] Figure 5 Schematic diagram of the angle adjustment drive device provided by the embodiment of the present invention.

[0048] Figure 6 Schematic diagram of the partition of the imprinting part provided by the embodiment of the present invention.

[0049] Figure 7 Flowchart of the novel nanoimprinting method provided by the embodiment of the present invention.

[0050] Wherein: 1 - fluid carrier, 11 - enclosed space, 111 - imprinting portion, 12 - liquid, 2 - soft template, 3 - UV curing lamp, 4 - substrate, 5 - imprinting adhesive, 6 - carrier ring, 7 - support frame, 8 - guide post, 9 - liquid storage device, 101 - camera, 102 - capacitance sensor, 103 - angle adjustment driving device, 201 - first partition portion, 202 - second partition portion, 301 - first unit, 302 - second unit, 303 - third unit. Detailed implementation manners

[0051] The preferred implementation manners of the present invention will be described in detail below with reference to the accompanying drawings.

[0052] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without making creative efforts shall fall within the protection scope of the present invention.

[0053] Using ordinal numbers such as "first", "second", "third", etc. to describe ordinary objects only represents different instances of similar objects, and does not intend to imply that the objects so described must have a given order in terms of time, space, sorting, or any other way.

[0054] The expression of "including" elements is an "open-ended" expression, which only means that there are corresponding components or steps, and should not be construed as excluding additional components or steps.

[0055] In order to achieve the purpose of the present invention, in some embodiments of the novel nanoimprinting device and method, as Figure 1 and 2 shown, the novel nanoimprinting device sequentially includes from top to bottom: a fluid carrier 1, a soft template 2, a lifting driving device (not shown in the figure), a substrate carrier (not shown in the figure), and a UV curing lamp 3.

[0056] The fluid carrier 1 is internally provided with an enclosed space 11 for carrying the liquid 12, and the imprinting portion 111 of the enclosed space 11 can deform with the gravity of the liquid 12 in the enclosed space 11, with the center protruding downward.

[0057] In this embodiment, the liquid 12 can be but is not limited to: water, oil, fluorinated liquid, etc.

[0058] The soft template 2 has a micro-nano pattern structure. The soft template 2 is fixedly connected to the fluid carrier 1, and the plate body of the soft template 2 is attached to the imprinting portion 111 of the enclosed space 11. The plate body of the soft template 2 can deform correspondingly with the deformation of the imprinting portion 111.

[0059] In this embodiment, the soft template 2 can be, but is not limited to, PET, PC, PDMS, etc.

[0060] The lifting drive device is in transmission connection with the fluid carrier 1 and the soft template 2, and can drive the fluid carrier 1 and the soft template 2 to lift.

[0061] The substrate carrier is used to carry the substrate 4.

[0062] The UV curing lamp 3 is used to cure the imprinting glue 5 on the substrate 4.

[0063] The present invention discloses a novel nanoimprinting device, which can provide uniform and stable pressure and thermal stability.

[0064] Before imprinting, a liquid 12 is poured into the closed space 11. By using the gravity of the liquid 12 itself, the soft template 2 deforms when bearing the gravity of the liquid 12, with the center bulging downward. Then the entire fluid carrier 1 is lowered, so that the soft template 2 is attached to the substrate 4 to be imprinted for imprinting. In this way, the way of central contact spreading outward can also avoid generating bubbles during the attachment process and avoid introducing defects. The flow characteristics of the liquid 12 will also make the pressure finally acting on the soft template 2 more uniform. During the curing process, the irradiation of the UV light source will generate heat. Excessive or uneven heat will cause an increase in the deformation of the imprinted sample and a decrease in quality. At this time, the liquid 12 in contact with the soft template 2 can play a role in maintaining a constant temperature, further improving the quality of the imprinted sample.

[0065] In order to further optimize the implementation effect of the present invention, in some other embodiments, the other characteristic technologies are the same, except that a bearing ring 6 is fixedly installed at a position of the fluid carrier 1 close to the imprinting part 111. The bearing ring 6 is used to limit the edge of the soft template 2, and the plate body of the soft template 2 is attached to the imprinting part 111.

[0066] In order to further optimize the implementation effect of the present invention, in some other embodiments, the other characteristic technologies are the same, except that the fluid carrier 1 is fixedly connected to the support frame 7, the support frame 7 is in transmission connection with the lifting drive device, and the through hole on the support frame 7 passes through the guide post 8, and the through hole is in sliding fit with the guide post 8 to limit the lifting trajectory of the support frame 7.

[0067] In order to further optimize the implementation effect of the present invention, in some other embodiments, the other characteristic technologies are the same, except that the fluid carrier 1 is provided with a communication port communicating with the closed space 11. The communication port is communicated with the liquid storage device through a communication pipe, and a control valve is installed on the communication pipe to adjust the liquid injection or extraction rate.

[0068] In order to further optimize the implementation effect of the present invention, in some other embodiments, the remaining characteristic technologies are the same, except that, Figures 3 - 5 As shown, the novel nanoimprinting device further includes: a liquid level control device, the liquid level control device includes: a liquid level monitoring device and an angle adjustment driving device 103;

[0069] The liquid level monitoring device includes: a camera 101 and / or a capacitive sensor 102, the camera 101 is installed on the side of the liquid 12, the capacitive sensor 102 is installed on the cavity wall at different positions of the closed space 11 of the fluid carrier 1, and the liquid level monitoring device is used to monitor the liquid level angle of the liquid 12 carried in the closed space 11;

[0070] The angle adjustment driving device 103 is in transmission connection with the fluid carrier 1 and is used for adjusting the liquid surface angle of the liquid 12 carried in the closed space 11 of the fluid carrier 1 .

[0071] The liquid level monitoring device may use a visual detection camera 101, and utilizes the high-precision camera 101 to collect images and analyze the angle of the liquid level. Further, in order to improve the accuracy of the analysis, a fluorescent agent may be injected into the liquid 12.

[0072] Alternatively, the liquid level monitoring device may use a capacitive sensor 102, and two, three, four or more than five capacitive sensors 102 may be arranged on the cavity wall at different positions of the closed space 11 of the fluid carrier 1, and a polar solvent may be added to the liquid 12 to achieve the effect of detecting the liquid surface angle. If the capacitive sensors 102 are installed at the same height on both sides of the liquid 12 cavity, the horizontality of the liquid surface can be detected.

[0073] In order to further optimize the implementation effect of the present invention, in some other embodiments, the remaining characteristic technologies are the same, except that, Figure 6 As shown, two annular partitions are further provided in the closed space 11 of the fluid carrier 1 . The two annular partitions have different radii and are both distributed around the center of the stamping portion 111 , specifically, a first partition 201 and a second partition 202 .

[0074] The two annular partitions divide the stamping part 111 into three independent stamping units (specifically: a first unit 301, a second unit 302, and a third unit 303), and the subspace corresponding to each stamping unit can independently carry a corresponding volume of liquid 12.

[0075] In some other embodiments, the present invention also discloses a novel nanoimprinting method, which uses the novel nanoimprinting device to perform imprinting, such as Figure 7 As shown, including:

[0076] Step S101: Inject a preset volume of liquid 12 into the closed space 11 of the fluid carrier 1. Under the action of the gravity of the liquid 12, the plate body of the soft template 2 deforms correspondingly as the imprinting part 111 of the closed space 11 deforms, and its center bulges downward, as shown in (a) and (b) of Figure 7 ;

[0077] Step S102: The lifting drive device drives the fluid carrier 1 and the soft template 2, or the substrate carrier to lift, so that the center of the soft template 2 first contacts and then slowly fits with the substrate 4 coated with the imprinting adhesive 5, as shown in (c) of Figure 7 ;

[0078] Step S103: After the pressure is stabilized, use the UV curing lamp 3 to cure the imprinting adhesive 5 on the substrate 4, as shown in (d) of Figure 7 ;

[0079] Step S104: The lifting drive device drives the fluid carrier 1 and the soft template 2, or the substrate carrier to lift, so that the soft template 2 is separated from the substrate 4 to demold and complete the imprinting, as shown in (e) of Figure 7 ;

[0080] In some other embodiments, step S104 further includes:

[0081] Step S104.1: Extract the liquid 12 in the closed space 11 of the fluid carrier 1;

[0082] Step S104.2: The lifting drive device drives the fluid carrier 1 and the soft template 2, or the substrate carrier to lift, so that the soft template 2 is separated from the substrate 4 to demold and complete the imprinting.

[0083] It should be noted that step S104.1 further includes:

[0084] Extract the liquid 12 in the corresponding sub-spaces of the imprinting units at the corresponding positions in sequence from the edge area to the center area of the imprinting part 111, so that the pressure between the soft template 2 and the substrate 4 decreases in sequence from the edge area to the center area.

[0085] Specifically, step S104.1 includes:

[0086] Step S104.11: Extract the liquid 12 in the sub-space corresponding to the third unit 303, so that the pressure between the edge area of the soft template 2 and the substrate 4 gradually decreases;

[0087] Step S104.12: Extract the liquid 12 in the sub-space corresponding to the second unit 302, so that the pressure between the middle area of the soft template 2 and the substrate 4 gradually decreases;

[0088] Step S104.13: Withdraw the liquid 12 within the subspace corresponding to the first unit 301, so that the pressure between the central region of the soft template 2 and the substrate 4 gradually decreases.

[0089] It should be noted that the extraction rates of the liquid 12 for different imprinting units are also different. The extraction rate of the liquid 12 for the imprinting unit in the edge region is greater than that in the central region. The ratio of the extraction rate of the liquid 12 in the edge region to that in the central region is 2:1 to 5:1, and the extraction rate of the liquid 12 in the edge region is 0.1 - 1 L / min, while that in the central region is 0.05 - 0.5 L / min.

[0090] In order to further optimize the implementation effect of the present invention, in some other embodiments, with the remaining characteristic technologies being the same, the difference lies in that the above new nanoimprinting method further includes:

[0091] Step S105: Detect the morphology of the micro - nano pattern structure imprinted on the substrate 4 through a vision detection device to obtain detection data;

[0092] Step S106: Compare the collected detection data with a preset standard value, and according to the deviation between the two, reversely adjust the liquid level angle of the liquid 12 and / or the preset volume of the liquid 12 within the sealed space 11 of the fluid carrier 1.

[0093] The present invention discloses a new nanoimprinting device and method, which has the following beneficial effects:

[0094] First, pressure uniformity and bubble control. The present invention uses the method of driving the central part of the soft template to bulge downward and the edge to gradually fit the substrate 4 by the gravity of the liquid 12, realizing bubble - free fitting that diffuses from the center to the outside, avoiding the bubble defects of traditional rigid imprinting; the fluidity of the liquid 12 enables the pressure to be evenly transmitted to the glue layer through the soft template, significantly improving the consistency of large - area imprinting.

[0095] Second, optimization of thermal stability. The liquid 12 medium realizes a constant temperature effect through heat conduction during the UV curing process, suppressing the deformation of the glue layer caused by local overheating and improving the structure replication accuracy.

[0096] Third, dynamic adjustment and high - precision control. The liquid level of the liquid 12 is monitored in real time through vision monitoring or a capacitance sensor 102, and the fine adjustment of the liquid level angle of the liquid 12 is realized in combination with the angle adjustment driving device 103 to ensure the dynamic uniformity of the pressure distribution; the newly added reverse feedback adjustment mechanism can adaptively optimize the process parameters according to the imprinting results, improving the adaptability of the device to complex scenarios.

[0097] Fourth, gentle demolding and structural protection. The demolding method of extracting liquid 12 in regions reduces the damage of demolding stress to the micro-nano pattern structure by controlling the pressure release sequence of the edge and central regions, and is especially suitable for imprinting scenarios with high aspect ratios or fragile structures, further improving the finished product yield.

[0098] In the description of the present invention, it should be understood that the orientation or positional relationships indicated by the terms "coaxial", "bottom", "one end", "top", "middle", "the other end", "upper", "one side", "top", "inner", "front", "center", "both ends", etc. are based on the orientation or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation of the present invention.

[0099] In the present invention, unless otherwise clearly specified and defined, the terms "mount", "set", "connect", "fix", "swivel connection", etc. should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal communication of two elements or the interaction relationship between two elements. Unless otherwise clearly defined, for those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0100] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. The above embodiments and the description in the specification only illustrate the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed. The scope of the present invention claimed is defined by the appended claims and their equivalents.

Claims

1. A novel nanoimprinting device, characterized in that, include: A fluid carrier, wherein the fluid carrier has a closed space for carrying liquid, and the stamping portion of the closed space can be deformed with the gravity of the liquid in the closed space; A soft template, wherein the soft template has a micro-nano pattern structure, the soft template is fixedly connected to a fluid carrier, and the plate body of the soft template is fitted with an imprinting portion of a closed space, and the plate body of the soft template can be deformed correspondingly with the deformation of the imprinting portion; A lifting drive device, which is in driving connection with the fluid carrier and the soft template, or the substrate carrier, and can drive the fluid carrier and the soft template, or the substrate carrier to lift and lower; A substrate supporting seat, wherein the substrate supporting seat is used to support a substrate; UV curing lamp, the UV curing lamp is used to cure the embossed adhesive on the substrate.

2. The novel nanoimprinting device according to claim 1, wherein, A carrying ring is fixedly installed at a position of the fluid carrying body close to the stamping part, and the carrying ring is used to limit the edge of the soft template, and the plate body of the soft template is fitted with the stamping part.

3. The novel nanoimprinting device according to claim 1, characterized in that, The fluid carrier is fixedly connected to the support frame, the support frame is transmission-connected to the lifting drive device, and the through hole on the support frame passes through the guide column, and the through hole and the guide column are slidably matched to limit the lifting trajectory of the support frame.

4. The novel nanoimprinting device according to claim 1, characterized in that, The fluid carrier is provided with a communication port communicating with the enclosed space, and the communication port is communicated with the liquid storage device through a communication pipe. A control valve is installed on the communication pipe to adjust the liquid injection or extraction rate.

5. The novel nanoimprinting device according to claim 1, wherein, The novel nanoimprinting device further comprises: a liquid level control device, wherein the liquid level control device comprises: a liquid level monitoring device and an angle adjustment driving device; The liquid level monitoring device comprises: a camera and / or a capacitive sensor, the camera is installed above the liquid level, the capacitive sensor is installed on the cavity wall at different positions of the closed space of the fluid carrier, and the liquid level monitoring device is used to monitor the liquid level angle of the liquid carried in the closed space; The angle adjustment driving device is in driving connection with the fluid carrier and is used to adjust the liquid surface angle of the liquid carried in the closed space of the fluid carrier.

6. The novel nanoimprinting device according to claim 1, characterized in that, One or more annular partitions are also provided in the closed space of the fluid carrier, and the radii of the multiple annular partitions are different and are all distributed with the center of the stamping part as the center of the circle; The annular partition divides the stamping part into a plurality of independent stamping units, and the subspace corresponding to each stamping unit can independently carry a corresponding volume of liquid.

7. A novel nanoimprinting method, characterized in that, Imprinting is performed using the novel nanoimprinting device as claimed in any one of claims 1 to 6, comprising: Step S1: injecting a preset volume of liquid into the closed space of the fluid carrier, and the plate body of the soft template deforms correspondingly with the deformation of the stamping part of the closed space under the action of the gravity of the liquid, and the center thereof convexes downward; Step S2: The lifting drive device drives the fluid carrier and the soft template, or the substrate carrier to move up and down, so that the center of the soft template first contacts the substrate coated with the embossing glue, and then slowly fits with it; Step S3: After the pressure is stabilized, the printed adhesive on the substrate is cured using a UV curing lamp; Step S4: The lifting drive device drives the fluid carrier and the soft template, or the substrate carrier to move up and down, so that the soft template is separated from the substrate and demoulded to achieve imprinting.

8. The novel nanoimprinting method according to claim 7, characterized in that, The step S4 further includes: Step S4.1: Extract the liquid in the closed space of the fluid carrier; Step S4.2: The lifting drive device drives the fluid carrier and the soft template, or the substrate carrier to lift, so that the soft template is separated from the substrate for demolding, and imprinting is realized.

9. The novel nanoimprinting method according to claim 8, wherein, The step S4.1 further includes: In the direction from the edge area to the center area of the imprinting part, sequentially extract the liquid in the subspaces corresponding to the imprinting units at the corresponding positions, so that the pressure between the soft template and the substrate decreases in order from the edge area to the center area.

10. The novel nanoimprinting method according to any one of claims 7-9, characterized in that, It further includes: Step S5: Detect the morphology of the micro-nano pattern structure imprinted on the substrate through a vision detection device to obtain detection data; Step S6: Compare the collected detection data with a preset standard value, and reversely adjust the liquid level angle and / or the preset volume of the liquid in the closed space of the fluid carrier according to the deviation between the two.

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