Redundant graph checking method and device, computer equipment and storage medium

Abstract

The invention relates to a redundant graph checking method and device, computer equipment and a storage medium. The redundant graph checking method comprises the steps that a design rule checking file is generated, the design rule checking file is associated with a redundant graph layer corresponding to a target filling command, the target filling command comprises at least one redundant graph filling command in a redundant graph filling rule, and the redundant graph layer is a graph layer filled with redundant graphs; the design rule checking file is used for checking whether the redundant graph filled in the redundant graph layer conforms to a redundant graph filling rule or not; a density rule checking file is generated, the density rule checking file is associated with the redundant layer corresponding to the target filling command, and the density rule checking file is used for checking whether the redundant graph density of the redundant layer is larger than or equal to a redundant graph density threshold value or not; and based on the design rule checking file and the density rule checking file, checking the redundant layers. According to the method, the accuracy of the inspection result can be ensured, and the inspection efficiency can be improved.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor technology, and particularly to a redundant pattern inspection method, apparatus, computer device, and storage medium. Background Art

[0002] In the process of integrated circuit manufacturing, in addition to ensuring the correct logic and function of the circuit, some virtual redundant patterns (dummy shapes) unrelated to the circuit need to be added to the layout to solve some pattern loading effects during the etching process, improve the flatness of the wafer after chemical mechanical polishing (CMP), and thus improve the process capabilities. The virtual redundant patterns usually need to be filled according to the given filling rules. If the redundant patterns do not conform to the filling rules, it will reduce the yield of chip production and even cause problems such as chip function failure or performance fluctuation.

[0003] To ensure the correctness and integrity of the redundant pattern filling, it is necessary to perform a design rule check (DRC) on the layout after filling the redundant patterns to check whether the filled redundant patterns conform to the filling rules and verify whether the filling rules are reasonable. However, the design rules become more and more complex as the process nodes progress, and it is often necessary to modify them frequently during the verification of the dummy deck. Therefore, performing a complete design rule check process usually requires a large amount of time cost. Summary of the Invention

[0004] To overcome the problems in the related art, the present disclosure provides a redundant pattern inspection method, apparatus, computer device, and storage medium.

[0005] According to the first aspect of the embodiments of the present disclosure, a redundant pattern inspection method is provided. The method includes:

[0006] Generating a design rule check file, the design rule check file being associated with a redundant layer corresponding to a target filling command, the target filling command including at least one redundant pattern filling command in the redundant pattern filling rules, the redundant layer being the layer after filling the redundant patterns, and the design rule check file being used to check whether the redundant patterns filled in the redundant layer conform to the redundant pattern filling rules;

[0007] Generating a density rule check file, the density rule check file being associated with the redundant layer corresponding to the target filling command, wherein the density rule check file is used to check whether the density of the redundant patterns in the redundant layer is greater than or equal to a redundant pattern density threshold;

[0008] Check the redundant layers based on the design rule check file and the density rule check file.

[0009] In an exemplary embodiment, the generating of the design rule check file includes:

[0010] Obtain layer information and filling conditions from the target filling command, where the layer information includes identification information of a reference layer and identification information of the redundant layer, and the filling conditions include geometric features of redundant graphics in the same redundant layer, positional relationships between redundant graphics in different redundant layers, and positional relationships between redundant graphics in the redundant layer and reference graphics in the reference layer;

[0011] Generate the design rule check file according to the layer information and the filling conditions.

[0012] In an exemplary embodiment, the generating of the design rule check file according to the layer information and the filling conditions includes:

[0013] If the target filling command is used to indicate that the same redundant layer includes multiple first redundant patterns, adjust the filling conditions of the multiple first redundant patterns, and generate a design rule check command for the redundant layer according to the adjusted filling conditions;

[0014] If the target filling command is used to indicate that the same redundant layer includes a second redundant pattern, generate a design rule check command for the redundant layer according to the filling conditions of the second redundant pattern;

[0015] The design rule check file is composed of design rule check commands of all the redundant layers.

[0016] In an exemplary embodiment, the generating of the density rule check file includes:

[0017] Generate the density rule check file based on a preset redundant graphic density calculation rule and the redundant graphic density threshold.

[0018] In an exemplary embodiment, the preset redundant graphic density calculation rule includes:

[0019] Obtain the initial filling area layer corresponding to the redundant layer, where the initial filling area layer represents a layer formed by the areas where the redundant graphics in the redundant layer are located;

[0020] Determine a reference filling area layer according to the initial filling area layer;

[0021] Determine the redundant graphic density of the redundant layer according to the ratio of the area of the redundant graphics in the redundant layer to the area of the reference filling area layer.

[0022] In an exemplary embodiment, determining a reference filling area layer according to the initial filling area layer includes:

[0023] Determining a scaling parameter according to the center distance between two adjacent redundant graphics of the same type;

[0024] Scaling the initial filling area graphics in the initial filling area layer based on the scaling parameter to obtain the reference filling area layer.

[0025] In an exemplary embodiment, checking the redundant layer based on the design rule check file includes:

[0026] Obtaining a reference layer from the target filling command, where the reference layer includes at least one of a first reference layer and a second reference layer, the first reference layer represents a layer for filling redundant graphics, and the second reference layer represents a layer for constraining the filled redundant graphics;

[0027] Generating a reference layout corresponding to the target filling command from the reference layer;

[0028] Checking the redundant layer based on the reference layout and the design rule check file.

[0029] According to a second aspect of the embodiments of the present disclosure, there is provided a redundant graphic checking device, the device includes:

[0030] A first generation module for generating a design rule check file, the design rule check file is associated with a redundant layer corresponding to a target filling command, the target filling command includes at least one redundant graphic filling command in the redundant graphic filling rule, the redundant layer is a layer after filling redundant graphics, and the design rule check file is used to check whether the redundant graphics filled in the redundant layer conform to the redundant graphic filling rule;

[0031] A second generation module for generating a density rule check file, the density rule check file is associated with the redundant layer corresponding to the target filling command, where the density rule check file is used to check whether the density of the redundant graphics in the redundant layer is greater than or equal to a redundant graphic density threshold;

[0032] An inspection module for inspecting the redundant layer based on the design rule check file and the density rule check file.

[0033] According to a third aspect of the embodiments of the present disclosure, a computer device is provided, including a memory and a processor. The memory stores a computer program, and when the processor executes the computer program, the method described in the first aspect is implemented.

[0034] According to a fourth aspect of the embodiments of the present disclosure, a computer-readable storage medium is provided, on which a computer program is stored. When the computer program is executed by a processor, the method described in the first aspect is implemented.

[0035] The technical solutions provided by the embodiments of the present disclosure may include the following beneficial effects: The method checks from different aspects through two types of inspection files, which can ensure the accuracy of the inspection results, so as to accurately verify whether the logic of the redundant graphic filling rule is reasonable, discover its logical hidden dangers in advance, and then be able to modify the filling rule in time, accelerate the efficiency of verification iteration, save iteration time, and accurately check whether there are errors in the redundant graphic filling, thereby ensuring the correctness and filling quality of the redundant graphic filling. In addition, the method can automatically implement a complete inspection process through a software program without human intervention, which can improve the inspection efficiency.

[0036] It should be understood that the above general description and the following detailed description are only exemplary and explanatory, and cannot limit the present disclosure. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] The accompanying drawings herein are incorporated into the specification and constitute a part of this specification, showing embodiments consistent with the present invention, and are used together with the specification to explain the principles of the present invention.

[0038] Figure 1 is a flowchart of a redundant graphic inspection method shown according to an exemplary embodiment;

[0039] Figure 2 is a schematic diagram of a reference layer and a redundant layer shown according to an exemplary embodiment;

[0040] Figure 3 is a schematic diagram of an initial filling area layer shown according to an exemplary embodiment;

[0041] Figure 4 is a conversion schematic diagram of a reference filling area layer shown according to an exemplary embodiment;

[0042] Figure 5 is a schematic diagram of a redundant layer shown according to an exemplary embodiment;

[0043] Figure 6 is a block diagram of a redundant graphic inspection device shown according to an exemplary embodiment;

[0044] Figure 7It is a block diagram of a computer device shown according to an exemplary embodiment. Detailed implementation

[0045] Here, the exemplary embodiments will be described in detail, and the examples are shown in the drawings. When the following description refers to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present invention. On the contrary, they are merely examples of devices and methods consistent with some aspects of the present invention as detailed in the appended claims.

[0046] In an exemplary embodiment of the present disclosure, to solve the problem of the long time of the design rule check process in the prior art, a redundant graphic check method is provided, including: generating a design rule check file, the design rule check file is associated with a redundant layer corresponding to a target filling command, the target filling command includes at least one redundant graphic filling command in the redundant graphic filling rule, the redundant layer is the layer after filling the redundant graphic, and the design rule check file is used to check whether the redundant graphic filled in the redundant layer conforms to the redundant graphic filling rule; generating a density rule check file, the density rule check file is associated with a redundant layer corresponding to a target filling command, and the density rule check file is used to check whether the density of the redundant graphic in the redundant layer is greater than or equal to the redundant graphic density threshold; based on the design rule check file and the density rule check file, checking the redundant layer. This method can ensure the accuracy of the check result by performing checks from different aspects through two check files, and this method can automatically implement the complete check process through a software program without manual intervention, which can improve the efficiency of the check.

[0047] In an exemplary embodiment of the present disclosure, a redundant graphic check method is provided, which is applied to a computer device. Figure 1 It is a flowchart of a redundant graphic check method shown according to an exemplary embodiment, as Figure 1 shown, including the following steps:

[0048] Step S101, generating a design rule check file, the design rule check file is associated with a redundant layer corresponding to a target filling command, the target filling command includes at least one redundant graphic filling command in the redundant graphic filling rule, the redundant layer is the layer after filling the redundant graphic, and the design rule check file is used to check whether the redundant graphic filled in the redundant layer conforms to the redundant graphic filling rule.

[0049] The redundant pattern filling rule is a pre - set design rule for filling redundant patterns in the layout of the original reference pattern. The redundant pattern filling rule includes at least one filling command, and the filling command is used to describe the specific content of the filling rule, such as the shape and size of the redundant pattern, the interval between different redundant patterns, the offset, and the distance between the redundant pattern and the original reference pattern, etc. The layer where the reference pattern is located is the reference layer, and the number of original reference patterns in the reference layer can be one or more, which is determined by the reference pattern design rule; the layer after filling the redundant pattern is the redundant layer, that is, the layer where the redundant pattern is located, and the number of redundant patterns in the redundant layer can be one or more, which is determined by the redundant pattern filling rule.

[0050] Select a set of filling commands from the redundant pattern filling rule. The number of filling commands can be set according to actual needs and computing power. Use at least one selected redundant pattern filling command as the target filling command. Obtain all the redundant layers in the target filling command, and input the target filling command into the first preset algorithm. The first preset algorithm is used to convert the filling command into an inspection and judgment command. For example, if the filling command includes that the shape of the redundant pattern is a square, the first preset algorithm will convert it into a command to judge whether the redundant pattern in the redundant layer is a square. The design rule inspection file corresponding to the redundant layer is formed by the inspection and judgment command.

[0051] Step S102: Generate a density rule inspection file. The density rule inspection file is associated with the redundant layer corresponding to the target filling command, and the density rule inspection file is used to check whether the density of the redundant patterns in the redundant layer is greater than or equal to the redundant pattern density threshold.

[0052] The redundant pattern density represents the proportion of the area occupied by the redundant patterns in the redundant layer, and the redundant pattern density threshold is a preset value. Input the target filling command and the redundant pattern density threshold into the second preset algorithm. The second preset algorithm is used to calculate the density of the redundant patterns in the redundant layer after filling the redundant patterns according to the target filling command, and convert the redundant pattern density and the redundant pattern density threshold into a judgment command. This judgment command is used to judge whether the redundant pattern density is greater than or equal to the redundant pattern density threshold. The density inspection file corresponding to the redundant layer is formed by this judgment command.

[0053] Step S103: Based on the design rule inspection file and the density rule inspection file, check the redundant layer.

[0054] Taking the redundant layer as the input, execute the design rule check file and the density rule check file. The design rule check file checks whether the redundant graphics filled in the redundant layer comply with the redundant graphics filling rule, and the density rule check file checks whether the redundant graphics density of the redundant layer is greater than or equal to the redundant graphics density threshold. Optionally, each time of checking, one redundant layer corresponding to the target filling command can be checked, or multiple or all redundant layers corresponding to the target filling command can be checked simultaneously. If at least one of the design rule check file and the density rule check file fails the check, it indicates that there are defects in the redundant graphics filling; if both the design rule check file and the density rule check file pass the check, it indicates that the redundant graphics filling is reasonable.

[0055] This redundant graphics checking method can be applied to check whether the redundant graphics filled in the redundant layer comply with the filling rule. Among them, the redundant layer is filled according to the preset filling rule. When the check fails, modify the redundant layer to make the redundant layer meet the preset requirements; it can also be applied to verify whether the filling rule is reasonable, check whether the redundant layer filled according to the initial filling rule meets the preset requirements, modify the initial filling rule when the check fails, and when the redundant layer filled according to the modified filling rule passes the check, determine the filling rule at this time as the target filling rule.

[0056] In the embodiments of the present disclosure, a design rule check file and a density rule check file corresponding to the target filling command are respectively generated. The design rule check file is used to check whether the redundant graphics filled in the redundant layer comply with the redundant graphics filling rule, and the density rule check file is used to check whether the redundant graphics density of the redundant layer is greater than or equal to the redundant graphics density threshold. This method checks from different aspects through two check files, which can ensure the accuracy of the check results, so as to accurately verify whether the logic of the redundant graphics filling rule is reasonable, discover its logical hidden dangers in advance, and then be able to modify the filling rule in time, accelerate the efficiency of the verification iteration, save the iteration time, and accurately check whether there are errors in the redundant graphics filling, thereby ensuring the correctness and filling quality of the redundant graphics filling. In addition, this method can automatically implement the complete check process through a software program without manual intervention, which can improve the efficiency of the check.

[0057] In some embodiments, generating the design rule check file in the above step S101 includes the following steps:

[0058] S101-1, obtain the layer information and filling conditions from the target filling command. Among them, the layer information includes the identification information of the reference layer and the identification information of the redundant layer, and the filling conditions include the geometric features of the redundant graphics in the same redundant layer, the positional relationship between the redundant graphics in different redundant layers, and the positional relationship between the redundant graphics in the redundant layer and the reference graphics in the reference layer.

[0059] Identify the layer information related to the target filling command through the first preset algorithm. The layer information is the identification information of each layer, and the identification information includes the layer name and the layer number. The layer information includes the identification information of the reference layer and the redundant layer. The reference layer includes the original reference layer (original layer) and the intermediate reference layer (derived layer). Among them, the intermediate reference layer is obtained through operation commands such as logic, density, and attributes on the basis of the original reference graph. For example, if the redundant layer output by the first filling command is the reference layer of the second filling command, then this layer is the intermediate reference layer, and the identification information of the intermediate reference layer is set by calling a specified command. For example, set the identification information of a certain intermediate reference layer to clyr65536, where clyr is the layer name and 65536 is the layer number.

[0060] Identify the filling conditions corresponding to each layer related to the target filling command through the first preset algorithm. The filling conditions include the geometric features of the redundant graphics in the same redundant layer, such as the height (height), width (width), step (step), and offset (offset) of the redundant graphics; the filling conditions also include the positional relationship between the redundant graphics in different redundant layers, such as logical relationships such as touch and enclosure and geometric relationships such as distance between different types of redundant graphics; the filling conditions also include the positional relationship between the redundant graphics in the redundant layer and the reference graphics in the reference layer, such as logical relationships such as interact and enclosure and geometric relationships such as distance.

[0061] In some embodiments, the layer information can also be referred to as the layer mapping relationship.

[0062] In one example, Figure 2 is a schematic diagram of the reference layer and the redundant layer shown according to an exemplary embodiment, as Figure 2As shown, the reference layers corresponding to the target filling command include: the layer InLayer to be filled, the constraint layers RefLayer1 and RefLayer2 used to constrain the positions of redundant graphics, and the redundant layers corresponding to the target filling command include DumLayer1 and DumLayer2. On this basis, the filling conditions corresponding to the target filling command include: ① The height 12, width 11, and spacing 13 of the redundant graphics meet the given values; ② The redundant graphics are surrounded by the graphics in InLayer; ③ The distance 14 from the edge of the redundant graphics to the edge of the reference graphics in InLayer is not less than the given value; ④ There should be no overlap with the reference graphics in RefLayer1 and RefLayer2; ⑤ The vertical distance 15 from the edge of the redundant graphics to the vertical edge of the reference graphics in RefLayer1 is not less than the given value, and the distances from the edge of the redundant graphics to the edges in all directions of the reference graphics in RefLayer2 should also meet the conditions; ⑥ There should be no overlap with the redundant graphics in DumLayer1; ⑦ The distance 21 from the edge of the redundant graphics to the edge of the redundant graphics in DumLayer1 is not less than the given value.

[0063] S101-2. Generate a design rule check file according to the layer information and filling conditions.

[0064] Convert the layer information and filling conditions into design rule check commands through a first preset algorithm. For example, convert the filling condition "The height 12 of the redundant graphics meets the given value" into the design rule check command "Whether the height 12 of the redundant graphics is the given value". The design rule check file is composed of all the design rule check commands.

[0065] In some embodiments, there are two cases when generating the design rule check commands for the redundant layers:

[0066] First, if the target filling command is used to indicate that the same redundant layer includes multiple first redundant patterns, adjust the filling conditions of the multiple first redundant patterns, and generate the design rule check commands for the redundant layer according to the adjusted filling conditions.

[0067] If it is detected that the target filling command is used to indicate that the same redundant layer includes multiple first redundant patterns, without adjusting the filling command, the filling conditions associated with the multiple first redundant patterns are integrated according to a preset rule and adjusted to a unified filling condition, and a design rule check command for the redundant layer is generated according to the adjusted filling condition to ensure that the design rule check command can check the multiple first redundant patterns in the layer simultaneously. For example, if there are two first redundant patterns, a and b, in the same redundant layer, the filling condition corresponding to a includes that the width is greater than 3, and the filling condition corresponding to b includes that the width is greater than 4. If the filling condition for converting to the design rule check command is that the width is greater than 3, then even if b meets the filling condition, it will fail the check. Therefore, in order to check whether both of these two graphics meet the filling condition at this time, the filling condition of a needs to be adjusted to that the width is greater than 4.

[0068] In addition, if it is detected that the target filling command is used to indicate that the same redundant layer includes multiple first redundant patterns, the filling command can also be adjusted to output the multiple first redundant patterns to different redundant layers.

[0069] Second, if the target filling command is used to indicate that the same redundant layer includes a second redundant pattern, a design rule check command for the redundant layer is generated according to the filling condition of the second redundant pattern.

[0070] In some embodiments, if the reference layer or the redundant layer is a graphic layer and the corresponding filling condition includes direction information, the graphic layer is split into edge layers according to the direction information.

[0071] The graphic layer indicates that the layer contains polygon graphics. The direction information includes the horizontal direction, the vertical direction, and other inclined directions. If it is detected that the filling condition includes direction information, for example, the filling condition is that the interval between two graphic layers in the horizontal direction is m. At this time, the edges of the graphics in these two layers in the vertical direction are split out respectively to obtain two edge layers, and these two edge layers are used as the target layers for generating the design rule check file.

[0072] In some embodiments, generating the density rule check file in step S102 above includes: generating a density rule check file based on a preset redundant graphic density calculation rule and a redundant graphic density threshold.

[0073] The redundant layer, preset redundant graphic density calculation rule and redundant graphic density threshold corresponding to the target fill command are input into the second preset algorithm. The second preset algorithm calculates the redundant graphic density in the redundant layer based on the preset redundant graphic density calculation rule, and generates a density judgment command according to the redundant graphic density and the redundant graphic density threshold. For example, if the redundant graphic density is Density and the redundant graphic density threshold is 80%, the generated density judgment command is: judge whether Density is greater than or equal to 80%.

[0074] In some embodiments, the preset redundant pattern density calculation rule indicates that the redundant pattern density is calculated by including the following steps:

[0075] S102-1, obtaining an initial filling area layer corresponding to the redundant layer, where the initial filling area layer represents a layer formed by an area where redundant graphics in the redundant layer are located.

[0076] The redundant graphics fill command is included in the fill rule file. When the fill rule file is executed and all redundant layers are output, the fill region layer corresponding to the redundant layers will also be output, that is, the initial fill region layer. The initial fill region layer is formed by the region where the redundant graphics are located in all redundant layers. In an example, Figure 2 Based on the reference layers and redundant layers shown, Figure 3 is a schematic diagram of an initial fill area layer according to an exemplary embodiment. Figure 3 As shown, the redundant layers corresponding to the target fill command include DumLayer1 and DumLayer2, and FR_1 and FR_2 are the initial fill area layers corresponding to DumLayer1 and DumLayer2 respectively.

[0077] In some embodiments, for redundant layers specified for output in the fill rule file, redundant graphics or instances are generated in the layout file according to the output mode and layer mapping relationship described in the output rule. For redundant layers in the fill rule file that are input layers for other commands, since they are intermediate layers, the layer information is set by calling the specified command, and then output to the layout file in an array compact manner, so as to reduce the layout size and improve the layout file reading and writing speed.

[0078] Among them, array compression includes the following steps: ① Establishing graphic cells for redundant graphics in the middle layer; ② Replacing redundant graphics with rectangles, the size of the rectangle is used to indicate the type of graphic cell, and the position of the rectangle is used to indicate the position of the redundant graphics; ③ Constructing a graphic array for the rectangle; ④ Replace the rectangle in the graphic array with a reference instance of the graphic cell and output it to the layout file.

[0079] S102-2. Determine a reference filling area layer according to the initial filling area layer.

[0080] Determine the geometric features of the redundant graphics in the redundant layer, scale the initial filling area layer so that the size of the filling area reaches the upper limit of the filling area, and obtain the reference filling area layer.

[0081] In some embodiments, S102-2 determines a reference filling area layer according to the initial filling area layer, including:

[0082] Determine a scaling parameter according to the center distance between two adjacent redundant graphics of the same type;

[0083] Scale the initial filling area graphics in the initial filling area layer based on the scaling parameter to obtain the reference filling area layer.

[0084] The center distance between two graphics represents the distance between the center points of the two graphics. Take half of the center distance between two adjacent redundant graphics of the same type in the target direction as the scaling parameter in the target direction. Use the scaling parameter in the target direction to scale the initial filling area graphics in the target direction. The scaled filling area graphics are the reference filling area graphics, and the layer where they are located is the reference filling area layer. Among them, the target direction includes the horizontal direction, the vertical direction, and other inclined directions.

[0085] In one example, Figure 4 is a conversion schematic diagram of the reference filling area layer shown according to an exemplary embodiment. As Figure 4 shown, the area with the filling pattern represents the filling area graphics, and the area without the filling pattern represents the non-filling area graphics. Then the left figure is the initial filling area layer, and this initial filling area layer is Figure 3 a simplified version of the initial filling area layer shown, and the right figure is the reference filling area layer. Assume Figure 3 the redundant graphics corresponding to the redundant layer DumLayer1 in Figure 3 are squares, and the spacing between two adjacent redundant graphics in the horizontal direction and the vertical direction is the same. Taking the redundant graphics of the square type in Figure 4 as an example, it can be seen that half of the center distance between two adjacent redundant graphics of the square type in the vertical direction is close to the height and width of the non-filling area graphics. Then the scaling parameter is 1, that is, the height of the non-filling area graphics remains unchanged, and so on, to obtain

[0086] S102-3. Determine the redundant graphic density of the redundant layer according to the ratio of the area of the redundant graphics in the redundant layer to the area of the reference filling area layer.

[0087] In one example, the redundancy graphic density of the redundant layer is calculated by the following formula:

[0088] Density = K × pitchX × pitchY / S

[0089] Where Density represents the redundancy graphic density of the redundant layer, pitchX represents the center distance between two adjacent redundant graphics in the horizontal direction, pitchY represents the center distance between two adjacent redundant graphics in the vertical direction, K represents the number of redundant graphics filled in the redundant layer, and S represents the area of the reference filling area graphic.

[0090] In some embodiments, in step S103, the redundant layer is checked based on the design rule check file, including the following steps:

[0091] S103-1, obtain the reference layer from the target filling command, where the reference layer includes at least one of the first reference layer and the second reference layer. The first reference layer represents the layer for filling redundant graphics, and the second reference layer represents the layer for constraining the filled redundant graphics.

[0092] The first reference layer represents the layer for filling redundant graphics and is used to limit the filling range of the redundant graphics, such as Figure 2 the layer InLayer shown; the second reference layer represents the layer for constraining the filled redundant graphics and is used to limit the position of the redundant graphics, such as Figure 2 the layers RefLayer1 and RefLayer2 shown. In some embodiments, after identifying all the reference layers from the target filling command, duplicate reference layers are removed.

[0093] S103-2, generate the reference layout corresponding to the target filling command from the reference layer.

[0094] Output the reference layer identified from the target filling command to the layout file to obtain the reference layout.

[0095] S103-3, check the redundant layer based on the reference layout and the design rule check file.

[0096] Input the reference layout into the design rule check file so as to check the redundant layer using the design rule check file based on the reference layout.

[0097] In some embodiments, in step S103, the files are checked based on the density rule to check for redundant layers, including: outputting the redundant layer corresponding to the target filling command to the layout file to generate a redundant layer layout; outputting the reference filling area layer associated with the redundant layer corresponding to the target filling command to the layout file to generate a reference layout of the filling area layer; inputting the redundant layer layout and the reference layout of the filling area layer into the density rule check file, so as to use the density rule check file to check the redundant layer based on the redundant layer layout and the reference layout of the filling area layer.

[0098] In one example, Figure 5 is a schematic diagram of a redundant layer shown according to an exemplary embodiment, as Figure 5 shown, the area with the filling pattern represents the filling area pattern, the area without the filling pattern represents the non-filling area pattern, the redundant layer corresponding to the target filling command is DumLayer, and FR is the reference filling area layer corresponding to DumLayer. It can be seen that there is no redundant layer between the second non-filling area pattern and the third non-filling area pattern, so the redundant pattern density is small. Therefore, when it passes the check by the design rule check file, checking it again by the density rule check file can ensure the accuracy of the check result.

[0099] In an exemplary embodiment of the present disclosure, a redundant pattern checking device is provided. Figure 6 is a block diagram of a redundant pattern checking device shown according to an exemplary embodiment, as Figure 6 shown, the redundant pattern checking device includes:

[0100] A first generation module 601, the first generation module 601 is used to generate a design rule check file, the design rule check file is associated with the redundant layer corresponding to the target filling command, the target filling command includes at least one redundant pattern filling command in the redundant pattern filling rule, the redundant layer is the layer after filling the redundant pattern, and the design rule check file is used to check whether the redundant pattern filled in the redundant layer conforms to the redundant pattern filling rule;

[0101] A second generation module 602, the second generation module 602 is used to generate a density rule check file, the density rule check file is associated with the redundant layer corresponding to the target filling command, and the density rule check file is used to check whether the redundant pattern density of the redundant layer is greater than or equal to the redundant pattern density threshold;

[0102] A checking module 603, the checking module 603 is used to check the redundant layer based on the design rule check file and the density rule check file.

[0103] In an exemplary embodiment, the first generation module 601 is further used for:

[0104] Obtain layer information and filling conditions from the target filling command, where the layer information includes the identification information of the reference layer and the identification information of the redundant layer, and the filling conditions include the geometric features of the redundant graphics in the same redundant layer, the positional relationship between the redundant graphics in different redundant layers, and the positional relationship between the redundant graphics in the redundant layer and the reference graphics in the reference layer;

[0105] Generate a design rule check file according to the layer information and the filling conditions.

[0106] In an exemplary embodiment, the first generation module 601 is further configured to:

[0107] If the target filling command is used to indicate that the same redundant layer includes multiple first redundant patterns, adjust the filling conditions of the multiple first redundant patterns, and generate a design rule check command for the redundant layer according to the adjusted filling conditions;

[0108] If the target filling command is used to indicate that the same redundant layer includes a second redundant pattern, generate a design rule check command for the redundant layer according to the filling conditions of the second redundant pattern;

[0109] The design rule check file is composed of the design rule check commands of all redundant layers.

[0110] In an exemplary embodiment, the second generation module 602 is further configured to:

[0111] Generate a density rule check file based on a preset redundant graphic density calculation rule and a redundant graphic density threshold.

[0112] In an exemplary embodiment, the second generation module 602 is further configured to:

[0113] Obtain an initial filling area layer corresponding to the redundant layer, where the initial filling area layer represents a layer formed by the areas where the redundant graphics in the redundant layer are located;

[0114] Determine a reference filling area layer according to the initial filling area layer;

[0115] Determine the redundant graphic density of the redundant layer according to the ratio of the area of the redundant graphics in the redundant layer to the area of the reference filling area layer.

[0116] In an exemplary embodiment, the second generation module 602 is further configured to:

[0117] Determine a scaling parameter according to the center distance between two adjacent redundant graphics of the same type;

[0118] Scale the initial filling area graphics in the initial filling area layer based on the scaling parameter to obtain the reference filling area layer.

[0119] In an exemplary embodiment, the checking module 603 is further configured to:

[0120] Obtain a reference layer from the target filling command, where the reference layer includes at least one of a first reference layer and a second reference layer. The first reference layer represents a layer for filling redundant graphics, and the second reference layer represents a layer for constraining the filled redundant graphics;

[0121] Generate a reference layout corresponding to the target filling command from the reference layer;

[0122] Check the redundant layer based on the reference layout and the design rule checking file.

[0123] Each module in the above redundant graphics checking device can be implemented in whole or in part by software, hardware, and their combination. Each of the above modules can be embedded in the processor of the computer device in hardware form or independent of the processor, or stored in the memory of the computer device in software form, so that the processor can call and execute the operations corresponding to each of the above modules.

[0124] In an exemplary embodiment, a computer device is provided, including a processor and a memory. The memory stores a computer program, and when the processor executes the computer program, the above-mentioned redundant graphics checking method is implemented.

[0125] In an exemplary embodiment, a computer-readable storage medium is provided, on which a computer program is stored. When the computer program is executed by a processor, the above-mentioned redundant graphics checking method is implemented. The computer-readable storage medium can be ROM, random access memory (RAM), CD-ROM, magnetic tape, floppy disk, and optical data storage device, etc.

[0126] In an exemplary embodiment, a computer program product is provided, including a computer program. When the computer program is executed by a processor, the above-mentioned redundant graphics checking method is implemented.

[0127] Reference Figure 7 , the structural block diagram of a computer device that can be the camera 2 or the terminal 1 of the present disclosure will now be described. The computer device includes a computing unit 101, which can execute various appropriate actions and processes according to the computer program stored in the read-only memory (ROM) 102 or the computer program loaded from the storage unit 108 into the random access memory (RAM) 103. In the RAM 103, various programs and data required for the operation of the computer device 100 can also be stored. The computing unit 101, the ROM 102, and the RAM 103 are connected to each other through a bus 104. The input / output (I / O) interface 105 is also connected to the bus 104.

[0128] Multiple components in the computer device 100 are connected to the I / O interface 105, including: an input unit 106, an output unit 107, a storage unit 108, and a communication unit 109. The input unit 106 can be any type of device capable of inputting information into the computer device 100. The input unit 106 can receive input digital or character information, and generate key signal inputs related to the user settings and / or function controls of the computer device 100, and can include, but are not limited to, a mouse, a keyboard, a touch screen, a trackpad, a trackball, a joystick, a microphone, and / or a remote control. The output unit 107 can be any type of device capable of presenting information, and can include, but are not limited to, a display, a speaker, a video / audio output terminal, a vibrator, and / or a printer. The storage unit 108 can include, but are not limited to, magnetic disks and optical discs. The communication unit 109 allows the computer device 100 to exchange information / data with other devices via a computer network such as the Internet and / or various telecommunication networks, and can include, but are not limited to, a modem, a network card, an infrared communication device, a wireless communication transceiver, and / or a chipset, such as a Bluetooth™ device, a WiFi device, a WiMax device, a cellular communication device, and / or the like.

[0129] The computing unit 101 can be various general-purpose and / or special-purpose processing components with processing and computing capabilities. Some examples of the computing unit 101 include, but are not limited to, a central processing unit (CPU), a graphics processing unit (GPU), various dedicated artificial intelligence (AI) computing chips, various computing units running machine learning model algorithms, a digital signal processor (DSP), and any suitable processor, controller, microcontroller, etc. The computing unit 101 executes the various methods and processes described above, such as the redundant graphics checking method. For example, in some embodiments, the redundant graphics checking method can be implemented as a computer software program that is tangibly contained in a machine-readable medium, such as the storage unit 108. In some embodiments, part or all of the computer program can be loaded and / or installed onto the computer device 100 via the ROM 102 and / or the communication unit 109. When the computer program is loaded into the RAM 103 and executed by the computing unit 101, one or more steps of the redundant graphics checking method described above can be executed. Alternatively, in other embodiments, the computing unit 101 can be configured to execute the redundant graphics checking method by any other suitable means (e.g., by means of firmware).

[0130] The computer device 100 can be implemented by one or more application-specific integrated circuits (ASICs), digital signal processors (DSPs), digital signal processing devices (DSPDs), programmable logic devices (PLDs), field-programmable gate arrays (FPGAs), controllers, microcontrollers, microprocessors, or other electronic components for performing the above-described redundant graphics checking method.

[0131] Those of ordinary skill in the art can understand that all or part of the steps in the above methods can be completed by instructing relevant hardware through a program, and the program can be stored in a computer-readable storage medium, such as a read-only memory, a magnetic disk, or an optical disc, etc. Optionally, all or part of the steps of the above embodiments can also be implemented using one or more integrated circuits. Correspondingly, each module / unit in the above embodiments can be implemented in the form of hardware or in the form of a software functional module. The present invention is not limited to any specific form of combination of hardware and software.

[0132] After considering the specification and practicing the invention disclosed herein, those skilled in the art will readily conceive of other embodiments of the present invention. This application is intended to cover any variations, uses, or adaptations of the present invention, which follow the general principles of the present invention and include known common knowledge or conventional technical means in the technical field not disclosed in this disclosure. The specification and examples are only to be considered as exemplary, and the true scope and spirit of the present invention are pointed out by the following claims.

[0133] It should be understood that the present invention is not limited to the exact structures described above and shown in the drawings, and various modifications and changes can be made without departing from its scope. The scope of the present invention is only limited by the appended claims.

Claims

1. A redundant graph checking method, characterized in that, The method includes: Generating a design rule check file, which is associated with a redundant layer corresponding to a target filling command. The target filling command includes at least one redundant graphic filling command in the redundant graphic filling rules. The redundant layer is the layer after filling the redundant graphics. The design rule check file is used to check whether the redundant graphics filled in the redundant layer comply with the redundant graphic filling rules; Generating a density rule check file, which is associated with the redundant layer corresponding to the target filling command. The density rule check file is used to check whether the density of the redundant graphics in the redundant layer is greater than or equal to a redundant graphic density threshold; Based on the design rule check file and the density rule check file, checking the redundant layer.

2. The redundant graphic inspection method according to claim 1, wherein The generating of the design rule check file includes: Obtaining layer information and filling conditions from the target filling command. Among them, the layer information includes the identification information of the reference layer and the identification information of the redundant layer. The filling conditions include the geometric features of the redundant graphics in the same redundant layer, the positional relationship between the redundant graphics in different redundant layers, and the positional relationship between the redundant graphics in the redundant layer and the reference graphics in the reference layer; Generating the design rule check file according to the layer information and the filling conditions.

3. The redundant graphic checking method according to claim 2, wherein The generating of the design rule check file according to the layer information and the filling conditions includes: If the target filling command is used to indicate that the same redundant layer includes multiple first redundant patterns, adjusting the filling conditions of the multiple first redundant patterns, and generating a design rule check command for the redundant layer according to the adjusted filling conditions; If the target filling command is used to indicate that the same redundant layer includes a second redundant pattern, generating a design rule check command for the redundant layer according to the filling conditions of the second redundant pattern; The design rule check file is composed of the design rule check commands of all the redundant layers.

4. The redundant graphic checking method according to claim 1, characterized in that, The generating of the density rule check file includes: Generating the density rule check file based on a preset redundant graphic density calculation rule and the redundant graphic density threshold.

5. The redundant graphic checking method according to claim 4, wherein The preset redundant graphic density calculation rule includes: Obtaining an initial filling area layer corresponding to the redundant layer. The initial filling area layer represents the layer formed by the area where the redundant graphics in the redundant layer are located; Determining a reference filling area layer according to the initial filling area layer; Determining the redundant graphic density of the redundant layer according to the ratio of the area of the redundant graphics in the redundant layer to the area of the reference filling area layer.

6. The redundant graphic inspection method according to claim 5, wherein The determining of the reference filling area layer according to the initial filling area layer includes: Determining a scaling parameter according to the center distance between two adjacent redundant graphics of the same type; Scaling the initial filling area graphics in the initial filling area layer based on the scaling parameter to obtain the reference filling area layer.

7. The redundant graphic checking method according to claim 1, wherein Based on the design rule check file, checking the redundant layer includes: Obtain a reference layer from the target filling command, where the reference layer includes at least one of a first reference layer and a second reference layer, the first reference layer represents a layer for filling redundant graphics, and the second reference layer represents a layer for constraining the filled redundant graphics; Generate a reference layout corresponding to the target filling command from the reference layer; Check the redundant layer based on the reference layout and the design rule check file.

8. A redundant graphic inspection device, characterized in that, The device includes: A first generation module, which is used to generate a design rule check file, the design rule check file is associated with a redundant layer corresponding to a target filling command, the target filling command includes at least one redundant graphic filling command in the redundant graphic filling rule, the redundant layer is a layer after filling redundant graphics, and the design rule check file is used to check whether the redundant graphics filled in the redundant layer conform to the redundant graphic filling rule; A second generation module, which is used to generate a density rule check file, the density rule check file is associated with the redundant layer corresponding to the target filling command, where the density rule check file is used to check whether the redundant graphic density of the redundant layer is greater than or equal to the redundant graphic density threshold; An inspection module, which is used to inspect the redundant layer based on the design rule check file and the density rule check file.

9. A computer device, comprising a memory and a processor, the memory storing a computer program, characterized in that, When the processor executes the computer program, the method according to any one of claims 1 to 7 is implemented.

10. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by a processor, the method according to any one of claims 1 to 7 is implemented.

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