AF evaporation coating device and method

Abstract

The invention relates to an AF evaporation coating device and method. The AF evaporation coating device comprises a liquid medicine tank, an evaporation mechanism and a transmission mechanism, the liquid medicine tank is provided with a sealing cavity, and the sealing cavity is used for containing AF liquid medicine. The evaporation mechanism comprises an evaporation source, a heater and a weighing device, the heater is arranged on the evaporation source, and the evaporation source is installed on the weighing device. The transmission mechanism comprises a liquid outlet pipeline, a driving pipeline and a control assembly, the liquid outlet pipeline comprises a liquid inlet port and a liquid outlet port, the liquid inlet port is arranged in AF liquid, the liquid outlet port is connected with the evaporation source, the driving pipeline comprises a first gas inlet port and a first gas outlet port, the first gas inlet port is used for inputting working gas, and the first gas outlet port is used for outputting working gas; the first air outlet port is arranged in a cavity of the sealing cavity, and the control assembly is arranged on the liquid outlet pipeline and the driving pipeline. The AF evaporation coating device and the AF evaporation coating method have the advantages of good coating quality and good stability.

Description

Technical Field

[0001] The present application relates to the technical field of coating equipment, and particularly to an AF evaporation coating device and method. Background Art

[0002] AF (Anti-Fingerprint Coating) evaporation coating technology is mainly based on the principles of material evaporation and deposition. An AF evaporation coating device forms an AF film on the surface of a material, reducing the reflectivity of the material surface and effectively improving the optical properties and wear resistance of the material, and is widely used in various industries.

[0003] When the AF evaporation coating device is working, it is necessary to inject the AF liquid medicine from the liquid medicine tank into the evaporation source. Currently, the existing AF evaporation coating device cannot achieve precise supply of the AF liquid medicine, and there are errors in the supply speed and supply weight, resulting in the inability to guarantee the processing thickness of the AF film, affecting the performance of the AF film, and having defects such as poor coating quality and poor stability. Summary of the Invention

[0004] Based on this, it is necessary to provide an AF evaporation coating device and method for solving the problems of poor coating quality and poor stability of the AF film.

[0005] The present invention provides an AF evaporation coating device, including:

[0006] A liquid medicine tank, the liquid medicine tank is provided with a sealed cavity for containing the AF liquid medicine;

[0007] An evaporation mechanism, the evaporation mechanism includes an evaporation source, a heater and a weighing device, the heater is arranged on the evaporation source, and the evaporation source is installed on the weighing device;

[0008] And a transmission mechanism, the transmission mechanism includes a liquid outlet pipeline, a driving pipeline and a control component. The liquid outlet pipeline includes a liquid inlet port and a liquid outlet port. The liquid inlet port is arranged in the AF liquid medicine, and the liquid outlet port is connected to the evaporation source. The driving pipeline includes a first gas inlet port and a first gas outlet port. The first gas inlet port is used for inputting working gas, and the first gas outlet port is arranged in the cavity of the sealed cavity. The control component is arranged on the liquid outlet pipeline and the driving pipeline.

[0009] In one embodiment, the control component includes a first control valve, a liquid injection pump and a mass flow controller. The first control valve is arranged on the driving pipeline, the mass flow controller is arranged on the liquid outlet pipeline, and the liquid injection pump is arranged on the liquid outlet pipeline and is located between the mass flow controller and the liquid outlet port.

[0010] In one embodiment, the AF evaporation coating device includes a first housing and a second housing. The first housing is provided with a receiving cavity, and the second housing is provided with a vacuum cavity. The evaporation mechanism is disposed in the vacuum cavity, the liquid medicine tank is disposed in the receiving cavity, the second housing is disposed in the receiving cavity, or the first housing is connected to the second housing.

[0011] In one embodiment, the AF evaporation coating device further includes a second control valve and an inlet gas pipeline. The inlet gas pipeline includes a second inlet port and a second outlet port. The second inlet port is communicated with the driving pipeline and is located between the first control valve and the first outlet port. The second outlet port is communicated with the liquid outlet pipeline between the control component and the liquid inlet port, and the second control valve is disposed on the inlet gas pipeline.

[0012] In one embodiment, the AF evaporation coating device further includes a third control valve and a vacuum pipeline. The vacuum pipeline includes a third inlet port and a third outlet port. The third outlet port is communicated with the vacuum cavity, and the third inlet port is communicated with the driving pipeline and is located between the first control valve and the first outlet port.

[0013] In one embodiment, the evaporation mechanism further includes a temperature sensor, a cooling pipeline, a shielding plate and a driving unit. The temperature sensor is disposed on the evaporation source, the cooling pipeline is disposed on the evaporation source, the shielding plate is movably disposed at the opening of the evaporation source, and the power output end of the driving unit is connected to the shielding plate. The driving unit is used to drive the shielding plate to open or shield the opening.

[0014] In one embodiment, the transmission mechanism further includes a filter, and the filter is disposed on the liquid outlet pipeline.

[0015] The present invention also provides an AF evaporation coating method, which is applicable to the AF evaporation coating device described in any of the above embodiments. When coating, the following steps are included:

[0016] Close the second control valve and the third control valve, and open the first control valve;

[0017] Open the liquid injection pump;

[0018] Measure the weight of the evaporation source through a weighing device;

[0019] Input the working gas into the liquid medicine tank through the control pipeline, apply a positive pressure to the liquid level of the AF liquid medicine, and make the AF liquid medicine input into the liquid outlet pipeline;

[0020] The mass flow controller preliminarily controls the mass flow of the AF liquid medicine; the liquid injection pump further controls the mass flow of the AF liquid medicine input into the evaporation source;

[0021] The weighing device measures and calculates the difference between the actual weight of the AF liquid medicine in the evaporation source and the rated weight of the AF liquid medicine, and controls the liquid injection pump to supply or stop the AF liquid medicine in a timely manner;

[0022] The heater heats the AF liquid medicine for evaporation coating.

[0023] In one embodiment, before film coating, the following steps are further included:

[0024] Open the first control valve and the second control valve, and close the third control valve;

[0025] Open the liquid injection pump;

[0026] Input working gas through the driving pipeline and the air inlet pipeline to purge the liquid outlet pipeline, and clean the residual liquid medicine and other impurities in the liquid outlet pipeline.

[0027] In one embodiment, when replacing a new liquid medicine tank, the following steps are included:

[0028] Close the first control valve, open the second control valve and the third control valve, and connect the vacuum chamber to the driving pipeline through the vacuum pipeline;

[0029] Close the liquid injection pump;

[0030] Use the vacuum chamber to evacuate the air in the driving pipeline.

[0031] In the above AF evaporation coating device and method, the AF liquid medicine is contained in the sealed cavity of the liquid medicine tank, the first air inlet port of the driving pipeline is used to input working gas, the first air outlet port of the driving pipeline is arranged in the cavity of the sealed cavity, the liquid inlet port of the liquid outlet pipeline is connected to the AF liquid medicine, the liquid outlet port of the liquid outlet pipeline is connected to the evaporation source, and the control component is used to control the opening or closing of the liquid outlet pipeline and the driving pipeline. During film coating, the control component controls the working gas to enter the cavity of the sealed cavity, and then squeezes the AF liquid medicine to be transmitted to the evaporation source through the liquid outlet pipeline. The control component also controls the supply speed and supply weight of the AF liquid medicine in the liquid outlet pipeline, so that the AF liquid medicine is accurately supplied to the evaporation source, and then the heater heats the evaporation source, so that the AF liquid medicine evaporates. Among them, the weighing device arranged on the evaporation source can measure, feedback and control the feeding amount, feeding speed of the AF liquid medicine and the actual change of film forming speed during film coating in real time and accurately, ensuring the stability and uniformity of the film coating quality of the AF evaporation coating device, and having the advantages of good film coating quality and good stability. Description of the Drawings

[0032] Figure 1 It is a schematic structural diagram of the AF evaporation coating device described in the embodiment of the present application.

[0033] Figure 2Schematic diagram of the pipeline flushing mechanism of the AF evaporation coating device described in the embodiments of the present application.

[0034] Figure 3 Schematic diagram of the bubble elimination mechanism of the AF evaporation coating device described in the embodiments of the present application.

[0035] Reference numerals in the drawings:

[0036] 10. AF evaporation coating device; 11. First housing; 12. Second housing; 10A. Vacuum chamber; 10B. Accommodation chamber;

[0037] 100. Liquid medicine tank; 110. AF liquid medicine; 100A. Sealed chamber;

[0038] 200. Evaporation mechanism; 210. Evaporation source; 220. Heater; 230. Weigher; 240. Temperature sensor; 250. Cooling pipeline; 260. Shielding plate; 270. Driving unit;

[0039] 300. Transmission mechanism; 310. Liquid outlet pipeline; 311. Liquid inlet port; 312. Liquid outlet port; 320. Driving pipeline; 321. First air inlet port; 322. First air outlet port; 330. Control component; 331. First control valve; 332. Mass flow controller; 333. Liquid injection pump; 340. Filter;

[0040] 410. Second control valve; 420. Air inlet pipeline; 421. Second air inlet port; 422. Second air outlet port;

[0041] 510. Third control valve; 520. Vacuum pipeline; 521. Third air inlet port; 522. Third air outlet port. Detailed implementation manners

[0042] In order to make the above objects, features and advantages of the present application more obvious and understandable, the following will describe in detail the specific implementation manners of the present application with reference to the accompanying drawings. Many specific details are set forth in the following description in order to fully understand the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present application. Therefore, the present application is not limited by the specific embodiments disclosed below.

[0043] In the description of the present application, it should be understood that if there are terms such as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., the orientation or positional relationship indicated by these terms is based on the orientation or positional relationship shown in the drawings. These are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present application.

[0044] In addition, if there are terms such as "first" and "second", these terms are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present application, if there is a term "plurality", the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise specifically and clearly defined.

[0045] In the present application, unless otherwise clearly specified and limited, if there are terms such as "install", "connect", "couple", "fix", etc., these terms should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integral; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements or the interaction relationship between two elements, unless otherwise clearly limited. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0046] In the present application, unless otherwise clearly specified and limited, if there is a description such as a first feature being "on" or "under" a second feature, its meaning may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may mean that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0047] It should be noted that if an element is referred to as "fixed to" or "disposed on" another element, it can be directly on the other element or there may be an intermediate element. If an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. If present, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are only for the purpose of illustration and do not represent the only implementation.

[0048] Referring to Figure 1 , a schematic structural diagram of an AF evaporation coating device 10 in an embodiment of the present application is shown. The AF evaporation coating device 10 includes a liquid medicine tank 100, an evaporation mechanism 200 and a transmission mechanism 300. The liquid medicine tank 100 is provided with a sealed cavity 100A for containing an AF liquid medicine 110. The evaporation mechanism 200 includes an evaporation source 210, a heater 220 and a weighing device 230. The heater 220 is disposed on the evaporation source 210, and the evaporation source 210 is mounted on the weighing device 230. The heater 220 is used to heat the evaporation source 210, and the weighing device 230 is used to weigh the AF liquid medicine 110 in the evaporation source 210.

[0049] The transmission mechanism 300 includes a liquid outlet pipeline 310, a driving pipeline 320 and a control component 330. The liquid outlet pipeline 310 includes a liquid inlet port 311 and a liquid outlet port 312. The liquid inlet port 311 is disposed in the AF liquid medicine 110, and the liquid outlet port 312 is connected to the evaporation source 210. The driving pipeline 320 includes a first air inlet port 321 and a first air outlet port 322. The first air inlet port 321 is used to input a working gas, and the first air outlet port 322 is disposed in the cavity of the sealed cavity 100A. The control component 330 is disposed on the liquid outlet pipeline 310 and the driving pipeline 320.

[0050] Specifically, the liquid outlet pipeline 310 passes through a first through hole in the top cover of the liquid medicine tank 100 so that the liquid inlet port 311 extends into the AF liquid medicine 110; the driving pipeline 320 passes through a second through hole in the top cover of the liquid medicine tank 100 so that the first air outlet port 322 is disposed in the cavity of the sealed cavity 100A.

[0051] Among them, the sealed cavity 100A can be divided into upper and lower partial chambers. The lower partial chamber is used to contain the AF liquid medicine 110, and the upper cavity refers to the space in the sealed cavity 100A that is not occupied by the AF liquid. The working gas can be input into this cavity through the driving pipeline 320.

[0052] In the AF evaporation coating device 10 described in the embodiments of the present application, an AF liquid medicine 110 is contained in the sealed cavity 100A of the liquid medicine tank 100. During coating, the control component 330 controls the working gas to enter the cavity of the sealed cavity 100A. As the gas in the cavity continuously increases and the air pressure continuously increases, the AF liquid medicine is squeezed to be transmitted to the evaporation source through the liquid outlet pipeline 310. During this process, the control component 330 controls the supply speed and supply weight of the AF liquid medicine 110 in the liquid outlet pipeline 310, so that the AF liquid medicine 110 is accurately supplied to the evaporation source 210. Then, the heater 220 heats the evaporation source 210, so that the AF liquid medicine 110 performs evaporation coating on the workpiece to be processed. Among them, the evaporation source 210 is provided with a weighing device 230, and the weighing device 230 is used to accurately obtain the supply data of the AF liquid medicine 110, so as to timely correct the supply speed and supply weight of the AF liquid medicine 110.

[0053] In the AF evaporation coating device 10 described in the embodiments of the present application, by providing the control component 330 in the driving pipeline 320 and the liquid outlet pipeline 310, the control component 330 controls the working gas entering the sealed cavity 100A of the liquid medicine tank 100, and controls the supply speed and supply weight of the AF liquid medicine 110 input from the liquid outlet pipeline 310 to the evaporation source 210. There is also a weighing device 230 to measure, feedback and control the feeding amount, feeding speed of the AF liquid medicine 110 and the actual change of the film formation speed during the coating process in real time and accurately, so as to ensure the stability and uniformity of the coating quality of the AF evaporation coating device 10, and has the advantages of good coating quality and good stability.

[0054] In an exemplary embodiment, the working gas is argon or nitrogen, and argon or nitrogen is an inert gas. After the argon or nitrogen is input into the liquid medicine tank 100, the argon or nitrogen will not react with the AF liquid medicine 110, so as to avoid the working gas affecting the quality of the AF liquid medicine 110 and ensure the stability of the coating quality of the AF liquid medicine 110.

[0055] In an alternative embodiment, the evaporation source 210 is a crucible or an evaporation boat, the heater 220 is a heating resistance wire, and the weighing device 230 is an electronic scale. The heating resistance wire is arranged at the bottom of the crucible or the evaporation boat. When the AF liquid medicine 110 is input into the crucible or the evaporation boat, the electronic scale measures the weight of the AF liquid medicine 110, and the heating resistance wire heats the crucible or the evaporation boat, so that the AF liquid medicine 110 performs evaporation coating.

[0056] Combined with Figure 2, which shows a schematic structural diagram of the AF evaporation coating device 10 in an embodiment of the present application. In some embodiments, the control component 330 includes a first control valve 331, a liquid injection pump 333, and a mass flow controller 332. The first control valve 331 is disposed on the driving pipeline 320, the mass flow controller 332 is disposed on the liquid outlet pipeline 310, and the liquid injection pump 333 is disposed on the liquid outlet pipeline 310 and is located between the mass flow controller 332 and the liquid outlet port 312.

[0057] In this embodiment, by setting the first control valve 331 on the driving pipeline 320, the first control valve 331 controls the opening or closing of the driving pipeline 320. When it is necessary to input the AF liquid medicine 110 into the liquid outlet pipeline 310, the first control valve 331 controls the working gas to be input into the sealing cavity 100A, so that the working gas squeezes the liquid surface of the AF liquid medicine 110, thereby enabling the AF liquid medicine 110 to be input into the liquid outlet pipeline 310. The liquid outlet pipeline 310 is provided with a mass flow controller 332 and a liquid injection pump 333. The mass flow controller 332 can perform preliminary mass flow control on the AF liquid medicine 110, and then the liquid injection pump 333 can control the supply or cut-off of the AF liquid medicine 110 in the liquid outlet pipeline 310, so as to accurately control the mass flow of the AF liquid medicine 110.

[0058] Furthermore, according to the mass flow set by the process, the weighing device 230 configured for the evaporation source 210 can also timely feedback the actual supply data, and cooperate with the control component 330 to achieve accurate supply.

[0059] In an exemplary embodiment, the first control valve 331 is a vacuum solenoid valve or a pneumatic valve.

[0060] In an exemplary embodiment, the liquid injection pump 333 is a piston liquid injection pump. The piston of the piston liquid injection pump has high movement precision, can achieve precise delivery of the AF liquid medicine 110, and is suitable for the high-precision requirements of the AF evaporation coating device 10.

[0061] In an alternative embodiment, as Figure 2 shown, the AF evaporation coating device 10 includes a first housing 11 and a second housing 12. The first housing 11 is provided with a receiving cavity 10B, the second housing 12 is provided with a vacuum cavity 10A, the evaporation mechanism 200 is disposed in the vacuum cavity 10A, the liquid medicine tank 100 is disposed in the receiving cavity 10B, the second housing 12 is disposed in the receiving cavity 10B, or the first housing 11 is connected to the second housing 12.

[0062] In this embodiment, by disposing the evaporation mechanism 200 in the vacuum chamber 10A, the evaporation temperature of the AF liquid medicine 110 can be reduced, making it easier for the AF liquid medicine 110 to reach the evaporation temperature without requiring too high an energy input, which facilitates the vaporization and evaporation of the AF liquid medicine 110. In a vacuum environment, there are extremely few gas molecules, and the molecules of the AF liquid medicine 110 hardly collide with the residual gas molecules during the journey from the evaporation source 210 to the coating surface, enabling the molecules of the AF liquid medicine 110 to be deposited on the coated film smoothly in a straight-line motion, which is beneficial to forming a uniform and dense film layer and has the advantage of good coating quality.

[0063] In an exemplary embodiment, when the second housing 12 is disposed in the accommodation chamber 10B, the liquid outlet pipeline 310 passes through the side wall of the second housing 12 and is connected to the evaporation mechanism 200 in the vacuum chamber 10A. By passing the liquid outlet pipeline 310 through the second housing 12, the liquid medicine tank 100 and the evaporation source 210 are connected, so as to input the AF liquid medicine 110 from the liquid medicine tank 100 to the evaporation source 210.

[0064] In another exemplary embodiment, when the first housing 11 is connected to the second housing 12, the liquid outlet pipeline 310 passes through the side wall of the first housing 11 and the side wall of the second housing 12 and is connected to the evaporation mechanism 200 in the vacuum chamber 10A. By passing the liquid outlet pipeline 310 through the side wall of the first housing 11 and the side wall of the second housing 12, the liquid medicine tank 100 and the evaporation source 210 are connected, so as to input the AF liquid medicine 110 from the liquid medicine tank 100 to the evaporation source 210.

[0065] In an alternative embodiment, as Figure 2As shown, the AF evaporation coating device 10 further includes a second control valve 410 and an intake pipeline 420. The intake pipeline 420 includes a second intake port 421 and a second outlet port 422. The second intake port 421 communicates with the driving pipeline 320 and is located between the first control valve 331 and the first outlet port 322. The second outlet port 422 communicates with the liquid outlet pipeline 310 between the control assembly 330 and the liquid inlet port 311. The second control valve 410 is disposed on the intake pipeline 420. When the AF evaporation coating device 10 is not used for a long time, AF liquid medicine 110 will remain in the liquid outlet pipeline 310. These remaining AF liquid medicine 110 no longer meet the usage requirements and need to purge the liquid outlet pipeline 310 before the next AF coating process. By connecting the intake pipeline 420 between the driving pipeline 320 and the liquid outlet pipeline 310 and providing the second control valve 410 on the intake pipeline 420, when purging the pipeline, open the first control valve 331 and the second control valve 410, and turn on the liquid injection pump 333 to allow the working gas to purge the liquid outlet pipeline 310 through the intake pipeline 420, thereby cleaning the residual AF liquid medicine 110 and other impurities in the liquid outlet pipeline 310, ensuring that the AF liquid medicine 110 used for processing meets the process requirements, and thus ensuring the coating quality of the AF evaporation coating device.

[0066] In an exemplary embodiment, the second control valve 410 is a vacuum solenoid valve or a pneumatic valve.

[0067] In an alternative embodiment, as Figure 3As shown, the AF evaporation coating device 10 further includes a third control valve 510 and a vacuum pipeline 520. The vacuum pipeline 520 includes a third intake port 521 and a third outlet port 522. The third outlet port 522 communicates with the vacuum chamber 10A, and the third intake port 521 communicates with the driving pipeline 320 and is located between the first control valve 331 and the first outlet port 322. When the AF liquid medicine 110 in the liquid medicine tank 100 is used up and a new liquid medicine tank 100 needs to be replaced, although the new liquid medicine tank 100 is in a sealed state, there is still some air remaining in the sealed chamber 100A, and this part of the air needs to be removed to ensure that there are no bubbles when the AF liquid medicine 110 is input into the evaporation mechanism 200. By connecting the vacuum pipeline 520 between the driving pipeline 320 and the vacuum chamber 10A, and a third control valve 510 is provided on the vacuum pipeline 520. The third control valve 510 is used to control the opening and closing of the vacuum pipeline 520. When eliminating bubbles, the first control valve 331 is closed, the second control valve 410 and the third control valve 510 are opened, the liquid injection pump 333 is closed, and the air in the driving pipeline 320 is evacuated by using the vacuum chamber 10A in the AF evaporation coating device 10. At this time, the second control valve 410 is a balance valve, which can balance the pressures in the driving pipeline 320 and the liquid outlet pipeline 310 in the liquid medicine tank 100, and will not cause the AF liquid medicine 110 to flow into the driving pipeline 320 and the liquid outlet pipeline 310 due to the pressure difference. The air in the driving pipeline 320 and the liquid outlet pipeline 310 can be eliminated through the third control valve 510 and the vacuum pipeline 520, and the bubbles contained in the AF liquid medicine 110 can be eliminated, avoiding the residual gas molecules from mixing into the film layer being formed, resulting in defects or impurities in the film layer and affecting the performance of the film layer, thereby improving the coating quality of the AF evaporation coating device 10.

[0068] In an exemplary embodiment, the third control valve 510 is a vacuum solenoid valve or a pneumatic valve.

[0069] In an alternative embodiment, as Figure 2As shown, the evaporation mechanism 200 further includes a temperature sensor 240, a cooling pipeline 250, a shielding plate 260, and a driving unit 270. The temperature sensor 240 is disposed on the evaporation source 210. The cooling pipeline 250 is disposed on the evaporation source 210. The shielding plate 260 is movably disposed at the opening of the evaporation source 210. The power output end of the driving unit 270 is connected to the shielding plate 260, and the driving unit 270 drives the shielding plate 260 to shield and open the opening. Specifically, the driving unit 270 is a motor. The cooling pipeline 250 is wound inside the evaporation source 210, and cooling water is provided inside the cooling pipeline 250. By providing the temperature sensor 240 on the evaporation source 210, the temperature of the AF liquid medicine 110 in the evaporation source 210 can be monitored in real time. If it is lower than the preset temperature, the power of the heater 220 is increased. If it is higher than the preset temperature, the evaporation source 210 is cooled by the cooling pipeline 250 provided on the evaporation source 210, so that the evaporation rate of the AF liquid medicine 110 is within the preset range, thereby ensuring the coating quality. In this embodiment, by providing the shielding plate 260 at the opening of the evaporation source 210, the shielding plate 260 can shield or open the opening under the drive of the driving unit 270. Thus, when the evaporation coating of the AF is completed, the evaporation source 210 is timely covered by the shielding plate 260 to accurately measure and control the actual thickness of the film layer, avoid the influence of other factors, and ensure the stability and uniformity of the coating quality.

[0070] In an alternative embodiment, as Figure 1 and Figure 2 shown, the transfer mechanism 300 further includes a filter 340, and the filter 340 is disposed on the liquid outlet pipeline 310. By providing the filter 340 on the liquid outlet pipeline 310, impurities or solid particles contained in the AF liquid medicine 110 can be filtered to prevent clogging of the liquid outlet pipeline 310 and improve the operation stability of the device.

[0071] In an alternative embodiment, the AF evaporation coating device 10 further includes a tank fixing mechanism. The liquid medicine tank 100 is disposed on the tank fixing mechanism, and the tank fixing mechanism is provided with a heating element for constantly heating the liquid medicine tank 100 to keep the temperature of the AF liquid medicine 110 constant, so as to keep the density of the AF liquid medicine 110 constant and not affected by environmental changes.

[0072] In an alternative embodiment, the AF evaporation coating device 10 further includes a controller, and the first control valve 331, the second control valve 410, the third control valve 510, the liquid injection pump 333, the mass flow controller 332, the heater 220, the weighing device 230, the temperature sensor 240, and the driving unit 270 are all connected to the controller. When coating the AF evaporation coating device 10, the controller is used to control the close cooperation of the temperature sensor 240, the heater 220, the cooling pipeline 250, the weighing device 230, and the shielding plate 260. The weighing device 230 measures, feeds back, and controls the feeding amount, feeding speed of the AF liquid medicine 110 in real time and accurately, as well as the actual change of film formation speed during the coating process, ensuring the stability and uniformity of the coating quality.

[0073] On the other hand, the present application also provides an AF evaporation coating method, which is applicable to the AF evaporation coating device 10 described in any of the above embodiments. The coating process includes the following steps:

[0074] Close the second control valve 410 and the third control valve 510, and open the first control valve 331;

[0075] Open the liquid injection pump 333;

[0076] Measure the weight of the evaporation source 210 through the weighing device 230;

[0077] Input the working gas into the liquid medicine tank 100 through the control pipeline, apply a positive pressure to the liquid level of the AF liquid medicine 110, and make the AF liquid medicine 110 enter the liquid outlet pipeline 310;

[0078] The mass flow controller 332 initially controls the mass flow of the AF liquid medicine 110;

[0079] The liquid injection pump 333 further controls the mass flow of the AF liquid medicine 110 input into the evaporation source 210;

[0080] The weighing device 230 measures and calculates the difference between the actual weight of the AF liquid medicine 110 in the evaporation source 210 and the rated weight of the AF liquid medicine 110, and controls the liquid injection pump 333 to timely supply or stop the AF liquid medicine 110;

[0081] The heater 220 heats the AF liquid medicine 110 for evaporation coating.

[0082] The AF evaporation coating method described in the embodiments of the present application controls the supply speed and supply weight of the AF liquid medicine 110 input from the liquid outlet pipeline 310 to the evaporation source 210 through the mass flow controller 332 and the liquid injection pump 333. There is also a weighing device 230 that measures, feeds back, and controls the feeding amount, feeding speed of the AF liquid medicine 110 in real time and accurately, as well as the actual change of film formation speed during the coating process, ensuring the stability and uniformity of the coating quality of the AF evaporation coating device 10, and having the advantages of good coating quality and good stability.

[0083] In an optional embodiment, before the AF evaporation coating method, the following steps are further included:

[0084] Open the first control valve 331 and the second control valve 410, and close the third control valve 510;

[0085] Open the liquid injection pump 333;

[0086] Input working gas through the driving pipeline 320 and the air inlet pipeline 420 to purge the liquid outlet pipeline 310, and clean the residual liquid medicine and other impurities in the liquid outlet pipeline 310.

[0087] In this embodiment, by controlling the opening of the first control valve 331 and the second control valve 410, the working gas is input into the liquid outlet pipeline 310 through the driving pipeline 320 and the air inlet pipeline 420, purging the liquid outlet pipeline 310, cleaning the residual AF liquid medicine 110 and other impurities in the liquid outlet pipeline 310, ensuring that the AF liquid medicine 110 used for processing meets the process requirements, and thus ensuring the coating quality of the AF evaporation coating device.

[0088] In an optional embodiment, when replacing the new liquid medicine tank 100, the AF evaporation coating method includes the following steps:

[0089] Close the first control valve 331, open the second control valve 410 and the third control valve 510, and connect the vacuum chamber 10A to the driving pipeline 320 through the vacuum pipeline 520;

[0090] Close the liquid injection pump 333;

[0091] Use the vacuum chamber 10A to evacuate the air in the driving pipeline 320.

[0092] In this embodiment, by controlling the opening of the second control valve 410 and the third control valve 510 and closing the first control valve 331, the vacuum chamber 10A is connected to the driving pipeline 320 through the vacuum pipeline 520, thereby extracting the air in the driving pipeline 320, eliminating the air in the driving pipeline 320 and the liquid medicine tank 100, and eliminating the bubbles contained in the AF liquid medicine 110, avoiding the residual gas molecules from mixing into the film layer being formed, resulting in defects or impurities in the film layer and affecting the performance of the film layer, thereby improving the coating quality of the AF evaporation coating device 10.

[0093] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope recorded in this specification.

[0094] The above-described embodiments merely represent several implementation manners of the present application. The description is relatively specific and detailed, but it should not be construed as a limitation on the scope of the patent application. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present application, several modifications and improvements can still be made, and these all fall within the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the appended claims.

Claims

1. An AF evaporation coating device, characterized in that, Comprising: A liquid medicine tank (100), the liquid medicine tank (100) is provided with a sealed cavity (100A), and the sealed cavity (100A) is used for containing AF liquid medicine (110); An evaporation mechanism (200), the evaporation mechanism (200) includes an evaporation source (210), a heater (220) and a weighing device (230), the heater (220) is arranged on the evaporation source (210), and the evaporation source (210) is installed on the weighing device (230); And A transmission mechanism (300), the transmission mechanism (300) includes a liquid outlet pipeline (310), a driving pipeline (320) and a control component (330), the liquid outlet pipeline (310) includes a liquid inlet port (311) and a liquid outlet port (312), the liquid inlet port (311) is arranged in the AF liquid medicine (110), the liquid outlet port (312) is connected to the evaporation source (210), the driving pipeline (320) includes a first air inlet port (321) and a first air outlet port (322), the first air inlet port (321) is used for inputting working gas, the first air outlet port (322) is arranged in the cavity of the sealed cavity (100A), and the control component (330) is arranged on the liquid outlet pipeline (310) and the driving pipeline (320).

2. The AF evaporation coating device according to claim 1, wherein: The control component (330) includes a first control valve (331), a liquid injection pump (333) and a mass flow controller (332), the first control valve (331) is arranged on the driving pipeline (320), the mass flow controller (332) is arranged on the liquid outlet pipeline (310), and the liquid injection pump (333) is arranged on the liquid outlet pipeline (310) and is located between the mass flow controller (332) and the liquid outlet port (312).

3. The AF evaporation coating device according to claim 2, wherein: The AF evaporation coating device (10) includes a first housing (11) and a second housing (12), the first housing (11) is provided with a containing cavity (10B), the second housing (12) is provided with a vacuum cavity (10A), the evaporation mechanism (200) is arranged in the vacuum cavity (10A), the liquid medicine tank (100) is arranged in the containing cavity (10B), the second housing (12) is arranged in the containing cavity (10B), or the first housing (11) is connected to the second housing (12).

4. The AF evaporation coating device according to claim 2, wherein: The AF evaporation coating device (10) further includes a second control valve (410) and an intake pipeline (420). The intake pipeline (420) includes a second intake port (421) and a second outlet port (422). The second intake port (421) communicates with the drive pipeline (320) and is located between the first control valve (331) and the first outlet port (322). The second outlet port (422) communicates with the liquid outlet pipeline (310) between the control assembly (330) and the liquid inlet port (311). The second control valve (410) is disposed on the intake pipeline (420).

5. The AF evaporation coating device according to claim 3, wherein: The AF evaporation coating device (10) further includes a third control valve (510) and a vacuum pipeline (520). The vacuum pipeline (520) includes a third intake port (521) and a third outlet port (522). The third outlet port (522) communicates with the vacuum chamber (10A). The third intake port (521) communicates with the drive pipeline (320) and is located between the first control valve (331) and the first outlet port (322).

6. The AF evaporation coating device according to claim 1, wherein: The evaporation mechanism (200) further includes a temperature sensor (240), a cooling pipeline (250), a shielding plate (260), and a drive unit (270). The temperature sensor (240) is disposed on the evaporation source (210). The cooling pipeline (250) is disposed on the evaporation source (210). The shielding plate (260) is movably disposed at the opening of the evaporation source (210). The power output end of the drive unit (270) is connected to the shielding plate (260). The drive unit (270) is configured to drive the shielding plate (260) to open or shield the opening.

7. The AF evaporation coating device according to claim 1, wherein: The transfer mechanism (300) further includes a filter (340). The filter (340) is disposed on the liquid outlet pipeline (310).

8. An AF evaporation coating method, applicable to the AF evaporation coating device according to any one of claims 1-7, characterized in that, The coating process includes the following steps: Close the second control valve (410) and the third control valve (510), and open the first control valve (331); Open the liquid injection pump (333); Measure the weight of the evaporation source (210) through the weighing device (230); Input the working gas into the liquid medicine tank (100) through the control pipeline, apply a positive pressure to the liquid level of the AF liquid medicine (110), and enable the AF liquid medicine (110) to enter the liquid outlet pipeline (310); The mass flow controller (332) preliminarily controls the mass flow of the AF liquid medicine (110); The liquid injection pump (333) further controls the mass flow of the AF liquid medicine (110) input into the evaporation source (210). The weigher (230) measures and calculates the difference between the actual weight of the AF liquid medicine (110) in the evaporation source (210) and the rated weight of the AF liquid medicine (110), and controls the liquid injection pump (333) to supply or stop the AF liquid medicine (110) in a timely manner; The heater (220) heats the AF liquid medicine (110) for evaporation coating.

9. The AF evaporation coating method according to claim 8, characterized in that, Before film coating, the following steps are further included: Open the first control valve (331) and the second control valve (410), and close the third control valve (510); Turn on the liquid injection pump (333); Input working gas through the drive pipeline (320) and the intake pipeline (420) to purge the liquid outlet pipeline (310), and clean the residual liquid medicine and other impurities in the liquid outlet pipeline (310).

10. The AF evaporation coating method according to claim 8, characterized in that, When replacing a new liquid medicine tank (100), the following steps are included: Close the first control valve (331), open the second control valve (410) and the third control valve (510), and connect the vacuum chamber (10A) to the drive pipeline (320) through the vacuum pipeline (520); Turn off the liquid injection pump (333); Use the vacuum chamber (10A) to evacuate the air in the drive pipeline (320).

Images