Gallium boat, source filling system and source filling method

Abstract

The invention discloses a gallium boat, a source filling system and a source filling method, and belongs to the field of semiconductor production. According to the technical scheme, the gallium boat comprises a boat body, a filling port is fixedly formed in the upper portion of the boat body, and a sealing cover is detachably installed on the filling port; a conical hole channel is formed in the filling port, the sealing cover comprises a cover body, the cover body is used for covering and covering the filling port, a conical plug part is fixedly arranged on the cover body, the plug part is inserted into the conical hole channel, the outer wall of the plug part and the side wall of the conical hole channel are each of a frosted structure, and multi-stage plugging is achieved through cooperation of the cover body, the plug part and the filling port. The communicating path of the filling port and the outside is prolonged, the sealing effect is improved, the outer wall of the plug part is matched with the inner wall of the filling port through the frosted structure, the sealing effect is good, and the problem of high machining difficulty is solved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor production, and particularly to a gallium boat, a source filling system and a source filling method. Background Art

[0002] Hydride vapor phase epitaxy equipment (HVPE) is a key equipment currently used for growing third-generation semiconductor materials (such as gallium nitride, gallium oxide, aluminum nitride crystals, etc.). The sources used in the hydride vapor phase epitaxy equipment include liquid gallium sources, powdery / flaky gallium sources, etc., and the most commonly used one is a high-purity liquid gallium source. During use, the liquid gallium source is placed in a gallium boat, and the material of the gallium boat is usually quartz. The use environment is at a high temperature of 600-900 degrees Celsius, and the atmosphere includes HCL / CL2 / N2, etc.

[0003] The filling process of the high-purity liquid gallium source needs to ensure no leakage and reduce contact with the external environment, thereby reducing the volatilization of gallium to ensure the purity of the raw material. Currently, the existing gallium boats for horizontal HVPE are mostly made into an integral structure to ensure the connection performance from the inlet to the outlet, which can ensure no leakage between the inlet and the outlet and no premature reaction between different components.

[0004] However, the length of the gallium boat for horizontal HVPE is relatively long. When filling the gallium source into the gallium boat through the side inlet, the gallium boat needs to be tilted or erected, which is not convenient for operation and the filling difficulty is high. If a filling port is directly opened on the upper part of the gallium boat, due to the quartz material of the gallium boat, the installation and processing requirements between the filling port and structures such as the inlet flange are high, resulting in a high sealing difficulty of the filling port. In addition, when filling the liquid gallium source into the gallium boat, the liquid gallium source is extremely easy to contact with air, and it is difficult to ensure its purity. Summary of the Invention

[0005] In order to solve the technical problems in the above background art that the existing gallium boat for horizontal HVPE has a relatively long length, and when a filling port is directly opened on the upper part of the gallium boat, the sealing difficulty and processing difficulty of the filling port are high, the present invention provides a gallium boat.

[0006] The technical solution of the present invention is as follows: The present invention provides a gallium boat, which includes a boat body. A filling port is fixedly provided at the upper part of the boat body, and a sealing cover is detachably installed on the filling port; a conical channel is arranged in the filling port. The sealing cover includes a cover body for covering the filling port. A conical plug part is fixedly provided on the cover body, and the plug part is inserted into the conical channel. The outer wall of the plug part and the side wall of the conical channel are both frosted structures. The filling port is covered and blocked by the cover body to achieve primary sealing, and the conical channel is blocked by the plug part to achieve secondary sealing, extending the path of the filling port communicating with the outside and improving the sealing effect. The outer wall of the plug part and the inner wall of the filling port are matched through the frosted structure to achieve sealing, effectively ensuring the sealing effect of the filling port. Moreover, the inner wall of the filling port and the outer wall of the plug part are subjected to frosted processing, and the processing operation is simpler and more convenient, reducing the quartz processing difficulty and processing cost.

[0007] Preferably, both the plug part and the conical channel are conical structures with a larger diameter at the upper part and a smaller diameter at the lower part, so that when the plug part is inserted into the conical channel, a tighter fit can be formed, further improving the sealing effect. At the same time, it is also convenient for the insertion and extraction of the plug part, enhancing the convenience of use.

[0008] Preferably, a filling pipe is fixedly arranged in the boat body. The upper end of the filling pipe is fixedly connected to the filling port, and there is a gap between the lower end of the filling port and the bottom of the boat body. The setting of the filling pipe not only provides a stable channel for the injection of the liquid gallium source, but also the filling pipe can cooperate with the use of the filling port and the sealing cover to achieve tertiary sealing, which is not only convenient for processing and use, but also effectively improves the sealing effect.

[0009] Preferably, the gap between the lower end of the filling port and the bottom of the boat body is greater than 2 mm. With this gap setting, the liquid gallium will submerge the lower end of the filling pipe to achieve liquid self-sealing and prevent the gas in the boat body from flowing back from the filling port.

[0010] Preferably, a plurality of baffle plates are fixedly arranged at intervals in the boat body. The setting of the baffle plates optimizes the flow path of the reaction gas in the boat body, makes the gas distribution more uniform, extends the contact time between the gas and the liquid gallium source, and improves the reaction efficiency. An air inlet is fixedly arranged at one end of the boat body, and an air outlet is fixedly arranged at the other end of the boat body, ensuring the smooth entry and exit of the reaction gas and maintaining the continuous progress of the reaction.

[0011] A source filling system includes a water bath unit, a gallium bottle, and a gallium boat. The water bath unit is located above the boat body. The gallium bottle contains a solid gallium source and is detachably installed in the water bath unit. The gallium bottle is connected to the filling port on the boat body by a connecting pipe. The water bath unit can precisely control the temperature to ensure that the solid gallium source can be stably melted into a liquid gallium source. The connecting pipe realizes the stable transportation of the liquid gallium source to the gallium boat, improving the operability of the source filling.

[0012] Preferably, a transfer bottle is installed in the water bath unit. The top of the transfer bottle is detachably connected to the mouth of the gallium bottle, and the bottom of the transfer bottle is detachably connected to the connecting pipe. The transfer bottle is connected to the filling port through the connecting pipe. The transfer bottle plays a role of transition and buffering, and can effectively prevent the liquid gallium source from being contaminated during the transfer process.

[0013] Preferably, the overall height of the transfer bottle is lower than the depth of the water bath unit, which can ensure that the transfer bottle can be completely surrounded by hot water, avoiding the cooling and solidification of the liquid gallium source. A connecting pipe is fixedly provided on the transfer bottle, which can be used to connect an inert gas source and play a protective role during the transfer of the liquid gallium source, preventing the liquid gallium source from contacting with air and being oxidized.

[0014] Preferably, the water bath unit is provided with scale lines, which are convenient for operators to control the amount of hot water in the water bath unit, thereby controlling the heating effect on the solid gallium source and ensuring the stability and consistency of the melting process of the liquid gallium source.

[0015] A source filling method includes: Install the transfer bottle in the water bath unit. The transfer bottle is connected to the filling port through the connecting pipe, so that the connecting pipe is connected to the inert gas source, and install the gallium bottle containing the solid gallium source on the top of the transfer bottle, ensuring that the entire system is in an environment protected by inert gas before heating and melting the solid gallium source, effectively preventing the gallium source from being oxidized and ensuring the quality of the liquid gallium source; Fill hot water into the water bath unit so that the liquid level of the hot water is flush with the scale line. The solid gallium source in the gallium bottle is heated and melted into a liquid gallium source. The liquid gallium source flows into the boat body through the transfer bottle, the connecting pipe and the filling port in sequence, ensuring the stability and consistency of the heating environment, which is beneficial to the uniform and stable melting of the solid gallium source into a liquid gallium source and the smooth flow of the liquid gallium source into the gallium boat through the established path, ensuring the smooth progress of the source filling process and avoiding the pollution of the liquid gallium source; After the transfer of the liquid gallium source in the transfer bottle is completed, separate the connecting pipe from the filling port and buckle the sealing cover on the filling port to play a sealing role, which can effectively prevent foreign impurities from entering the gallium boat, maintain the purity of the liquid gallium source, and provide good raw material conditions for the subsequent reaction in the gallium boat.

[0016] It can be seen from the above technical solutions that the advantages of the present invention are: 1. Cover and block the filling port through the cover body to achieve primary sealing, and use the plug part to block the conical channel to achieve secondary sealing, extending the path of the filling port communicating with the outside world and improving the sealing effect. The outer wall of the plug part and the inner wall of the filling port are matched through a frosted structure to achieve sealing, effectively ensuring the sealing effect of the filling port, and performing frosted processing on the inner wall of the filling port and the outer wall of the plug part. The processing operation is simpler and more convenient, reducing the quartz processing difficulty and processing cost.

[0017] 2. Install the transfer bottle inside the water bath unit. The transfer bottle is connected to the filling port through a connecting pipe, such that the connecting pipe is connected to an inert gas source, and install the gallium bottle containing solid gallium source on the top of the transfer bottle, ensuring that the entire system is in an environment protected by inert gas before heating and melting the solid gallium source, effectively preventing the gallium source from being oxidized and ensuring the quality of the liquid gallium source injected into the gallium boat. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] To more clearly illustrate the technical solutions of the present invention, the drawings required for description will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0019] Figure 1 is a partially enlarged structural schematic diagram of the gallium boat filling port according to one or more embodiments of the present invention; Figure 2 is a sectional structural schematic diagram of the sealing cover according to one or more embodiments of the present invention; Figure 3 is an overall structural schematic diagram of the source filling system according to one or more embodiments of the present invention; Figure 4 is a top view structural schematic diagram of the source filling system according to one or more embodiments of the present invention; The components represented by the reference numerals in the drawings are as follows: 1. Boat body; 2. Filling port; 3. Sealing cover; 4. Filling pipe; 5. Conical channel; 6. Frosted wall; 7. Cover body; 8. Plug part; 9. Baffle plate; 10. Air inlet; 11. Air outlet; 12. Liquid gallium source; 13. Water bath unit; 14. Gallium bottle; 15. Transfer bottle; 16. Hot water; 17. First connection part; 18. Second connection part; 19. Third connection part; 20. Bottle mouth; 21. Connecting pipe; 22. Connecting tube; 23. Atmosphere gas; 24. Scale line. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0020] To make the objectives, features, and advantages of the present invention more obvious and understandable, the technical solutions in the present invention will be clearly and completely described below in conjunction with the drawings in the specific embodiments of the present invention. Obviously, the embodiments described below are only a part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments in this patent, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of this patent.

[0021] Embodiment 1 In a typical embodiment of the present invention, as Figure 1As shown in the figure, a gallium boat is proposed. The whole gallium boat is made of quartz material and includes a boat body 1, a filling port 2 and a sealing cover 3. The filling port 2 is fixedly arranged on the upper part of the boat body 1. The filling port 2 is communicated with the inside of the boat body 1. The sealing cover 3 is detachably installed on the filling port 2 to cover and seal the filling port 2 with the sealing cover 3.

[0022] As Figure 1 shown in the figure, the filling port 2 is vertically and fixedly arranged on the upper part of the boat body 1 by welding. The filling port 2 is a conical hole column structure. Specifically, the overall shape of the filling port 2 is columnar, and a conical hole 5 with a larger upper diameter than the lower diameter is arranged inside the filling port 2 to communicate with the inside of the boat body 1 through the conical hole 5. The inner wall of the filling port 2 is a frosted wall 6.

[0023] As Figure 2 shown in the figure, the sealing cover 3 includes a cover body 7 and a plug part 8. The cover body 7 is used to buckle on the filling port 2 and cover and wrap the filling port 2. The plug part 8 is fixedly installed at the central position of the bottom of the cover body 7 by welding. The plug part 8 is used to be inserted into the conical hole 5 inside the filling port 2 to block the conical hole 5 with the plug part 8, realize secondary sealing, extend the path of the filling port 2 communicating with the outside, and improve the sealing effect.

[0024] In this embodiment, the plug part 8 is a conical structure with a larger upper diameter than the lower diameter. The outer shape of the plug part 8 is adapted to the cone of the conical hole 5, and the outer wall of the plug part 8 is a frosted structure, that is, the outer wall of the plug part 8 is also a frosted wall 6. The outer wall of the plug part 8 and the inside of the filling port 2 are matched through the frosted structure to achieve sealing, effectively ensuring the sealing effect of the filling port 2. Moreover, the inner wall of the filling port 2 and the outer wall of the plug part 8 are subjected to frosted processing, and the processing operation is simpler and more convenient, reducing the quartz processing difficulty and processing cost.

[0025] The cover body 7 forms a flanging structure around the plug part 8 to be used to wrap around the outside of the filling port 2, thereby covering and sealing the filling port 2. With the arrangement of the plug part 8, the sealing path of the filling port 2 is zigzag, specifically the conical path between the conical outer wall of the plug part 8 and the conical hole 5 and the linear path between the cover body 7 and the filling port 2, effectively improving the sealing effect.

[0026] As Figure 1As shown in the figure, the gallium boat further includes a filling tube 4, which is also made of quartz. The filling tube 4 is vertically fixedly installed inside the boat body 1 by welding. The upper end of the filling tube 4 is fixedly connected to the bottom of the filling port 2. The filling port 2 is communicated with the inside of the boat body 1 through the filling tube 4. There is a gap D between the lower end of the filling port 2 and the bottom of the boat body 1, and the gap D between the lower end of the filling port 2 and the bottom of the boat body 1 is greater than 2 mm to facilitate the injection of gallium liquid into the boat body 1, and the gallium liquid in the boat body 1 will submerge the lower end of the filling tube 4 to achieve liquid self-sealing and prevent the gas in the boat body 1 from flowing back from the filling port 2. The setting of the filling tube 4, in cooperation with the use of the filling port 2 and the sealing cover 3, realizes three-level sealing, which is not only convenient for processing and use, but also effectively improves the sealing effect.

[0027] Inside the boat body 1, a number of baffle plates 9 are fixedly arranged at intervals along its length direction to optimize the gas flow path by using the baffle plates 9, increase the contact area and time between the gas and the substrate as well as the reaction area, make the reaction gas more evenly distributed in the reaction space, and at the same time make the gas flow path longer, increase the turbulence degree of the gas, thereby improving the mixing effect and mass transfer rate between the reaction gases, and improving the uniformity and consistency of the reaction.

[0028] As Figure 4 shown, an air inlet 10 is fixedly arranged at one end of the boat body 1, and an air outlet 11 is fixedly arranged at the other end of the boat body 1. The air inlet 10 is used for the reaction gas to enter the boat body 1, and the air outlet 11 is used for discharging the tail gas after the reaction.

[0029] In this embodiment, the filling port 2 is covered and blocked by the cover body 7 to achieve primary blocking, and the tapered hole 5 is blocked by the plug portion 8 to achieve secondary blocking, extend the path of the filling port 2 communicating with the outside, and improve the sealing effect. The outer wall of the plug portion 8 and the inner wall of the filling port 2 are matched through a frosted structure to achieve sealing, effectively ensuring the sealing effect of the filling port 2, and the inner wall of the filling port 2 and the outer wall of the plug portion 8 are subjected to frosted processing, and the processing operation is simpler and more convenient, reducing the quartz processing difficulty and processing cost. At the same time, the lower end of the filling tube 4 is submerged by the gallium liquid to achieve liquid self-sealing and prevent the gas in the boat body 1 from flowing back from the filling port 2. The setting of the filling tube 4, in cooperation with the use of the filling port 2 and the sealing cover 3, realizes three-level sealing and further improves the sealing effect.

[0030] After the sealing cover 3 is buckled on the filling port 2, the partial pressure of the ambient gas 23 (such as N2) outside the gallium boat can also be controlled to make the partial pressure of the ambient gas 23 greater than the partial pressure inside the boat body 1, so as to effectively reduce the escape of the process gas (GaCL3 and Ga vapor) inside the boat body 1.

[0031] Embodiment 2 In another typical embodiment of the present invention, as Figure 3As shown, a source filling system is proposed, which uses the gallium boat mentioned in Embodiment 1. The source filling system specifically includes: a gallium boat, a water bath unit 13, and a gallium bottle 14. The gallium boat includes a boat body 1 and a filling port 2 fixedly arranged on the upper part of the boat body 1. The water bath unit 13 is located above the boat body 1. The water bath unit 13 is used to heat the solid gallium source so that the solid gallium source melts into a liquid gallium source 12. The gallium bottle 14 is used to hold the solid gallium source. The gallium bottle 14 is detachably installed in the water bath unit 13. The solid gallium source contained in the bottle is heated by the water bath unit 13 so that the solid gallium source melts into a liquid gallium source 12. The liquid gallium source 12 is used to supplement the gallium boat. The gallium bottle 14 is connected to the filling port 2 on the boat body 1 by a connecting pipe 22. The liquid gallium source 12 is transported into the boat body 1 through the connecting pipe 22.

[0032] It can be understood that the water bath unit 13 can be supported and fixed by a fixing bracket or the like so that the water bath unit 13 is located above the gallium boat. The water bath unit 13 is of a water bath pot structure. There is hot water 16 in the water bath unit 13 to heat the solid gallium source in the gallium bottle 14. The melting point of gallium is low, and the melting point of gallium is 29.78 °C. Thus, it is convenient to heat the solid gallium source with hot water to melt it. The solid gallium source is placed in the gallium bottle 14, which facilitates the storage and heating and melting of the solid gallium source.

[0033] To ensure the sealing performance and avoid the volatilization and pollution of the liquid gallium source 12, a transfer bottle 15 is detachably installed in the water bath unit 13. The top of the transfer bottle 15 is used to be detachably connected to the gallium bottle 14, and the bottom of the transfer bottle 15 is used to be detachably connected to the water bath unit 13 and the connecting pipe 22. The hot water 16 in the water bath unit 13 can directly heat the solid gallium source in the gallium bottle 14 so that it melts into a liquid gallium source 12. The liquid gallium source 12 flows from the gallium bottle 14 into the transfer bottle 15, and then is transported into the boat body 1 through the transfer bottle 15 and the connecting pipe 22. The transfer bottle 15 is made of PTFE / PFA / PP material.

[0034] As Figure 3 shown, a first connecting part 17 is fixedly arranged at the central position of the bottom in the water bath unit 13. The first connecting part 17 has internal threads, and a through hole is opened at the central position of the bottom of the water bath unit 13 for the connecting pipe 22 to pass through. A second connecting part 18 is fixedly arranged at the bottom of the transfer bottle 15. The second connecting part 18 is communicated with the inside of the transfer bottle 15. External threads are provided on the outer wall of the second connecting part 18, and internal threads are provided on the inner wall of the second connecting part 18. The second connecting part 18 is connected to the internal threads of the first connecting part 17 through the external threads, thereby realizing the detachable connection between the transfer bottle 15 and the water bath unit 13 to fix the position of the transfer bottle 15. The internal threads of the second connecting part 18 are used for threaded connection with the connecting pipe 22, thereby ensuring the connection firmness and sealing performance between the connecting pipe 22 and the transfer bottle 15.

[0035] The overall height of the transfer bottle 15 is lower than the depth of the water bath unit 13. Specifically, a third connecting portion 19 is fixedly provided at the top of the transfer bottle 15. The third connecting portion 19 is lower than the top of the water bath unit 13. The third connecting portion 19 is communicated with the inside of the transfer bottle 15, and the third connecting portion 19 contains internal threads. The third connecting portion 19 is detachably connected to the gallium bottle 14 by means of threaded connection, so as to ensure the isolation of the solid gallium source in the gallium bottle 14 from the outside air during the heating process, enabling the molten liquid gallium source 12 to enter the transfer bottle 15 for transfer, and preventing the volatilization and pollution of the liquid gallium source 12.

[0036] The gallium bottle 14 is fixedly provided with a bottle mouth 20. External threads are provided on the outer wall of the bottle mouth 20, and thus it can be detachably connected to the third connecting portion 19 by means of threaded connection to complete the fixation and sealed connection of the positions between the gallium bottle 14 and the transfer bottle 15.

[0037] In order to ensure that the liquid gallium source 12 in the transfer bottle 15 can effectively flow into the boat body 1 through the connecting pipe 22, a communicating pipe 21 is also fixedly provided on the transfer bottle 15. The communicating pipe 21 is vertically and fixedly arranged at the top of the transfer bottle 15, and the communicating pipe 21 is communicated with the inside of the transfer bottle 15. During the heating process, the transfer bottle 15 is connected to an inert gas source (such as an N2 gas source) through the communicating pipe 21 to balance the air pressure, ensure that the liquid gallium source 12 can effectively flow into the boat body 1 through the connecting pipe 22, and also can pump the remaining liquid gallium source 12 in the transfer bottle 15 into the boat body 1, avoiding the residue of the liquid gallium source 12 and reducing the waste of resources.

[0038] The water bath unit 13 is made of stainless steel material. Scale lines 24 are provided on the water bath unit 13. Since the third connecting portion 19 is frequently used and prone to loosening, in this embodiment, the height of the scale lines 24 is set to be lower than the top of the third connecting portion 19 and higher than the top of the transfer bottle 15, that is, the scale lines 24 on the water bath unit 13 are located between the top of the third connecting portion 19 and the top of the transfer bottle 15. Thus, after adding hot water 16, the water level line of the hot water 16 is above the top of the transfer bottle 15 and not higher than the top of the third connecting portion 19. While being able to heat the solid gallium source in the gallium bottle 14 with the hot water 16, it can also effectively prevent the hot water 16 from entering between the bottle mouth 20 of the gallium bottle 14 and the third connecting portion 19, so as to prevent the hot water 16 from entering the transfer bottle 15 to pollute the liquid gallium source 12.

[0039] In other embodiments, in order to improve the connection sealing performance between the transfer bottle 15 and the water bath unit 13, the bottom of the transfer bottle 15 can also be directly fixedly connected to the water bath unit 13. That is, at this time, the first connection part 17 and the second connection part 18 are fixedly connected by welding to improve the connection sealing performance between the two. It can be understood that the specific connection method between the transfer bottle 15 and the water bath unit 13 can be determined according to actual design requirements, and specific details are not restricted here too much. That is, the transfer bottle 15 and the water bath unit 13 can be fixedly connected or detachably connected, as long as the transfer bottle 15 can be fixedly installed in the water bath unit 13 and ensure sealing.

[0040] The setting of the transfer bottle 15 not only protects the liquid gallium source 12, avoiding the volatilization and pollution of the liquid gallium source 12, but also stabilizes the state of the liquid gallium source 12, enabling the liquid gallium source 12 to remain in a liquid state and flow into the connecting pipe 22, avoiding the liquid gallium source 12 from cooling and solidifying into a solid state.

[0041] Embodiment 3 In another typical embodiment of the present invention, a source filling method is proposed, which adopts the source filling system mentioned in Embodiment 2. The specific process includes: First, fixedly install the transfer bottle 15 in the water bath unit 13. In this embodiment, the transfer bottle 15 and the water bath unit 13 are detachably connected. The bottom of the transfer bottle 15 is threadedly connected and fixed to the first connection part 17 in the water bath unit 13 through the second connection part 18. The transfer bottle 15 is vertically arranged in the water bath unit 13. Connect one end of the connecting pipe 22 to the second connection part 18 at the bottom of the transfer bottle 15 by threaded connection, and insert the other end of the connecting pipe 22 into the filling port 2; then connect the communication pipe 21 to an inert gas source, and threadedly connect the gallium bottle 14 filled with solid gallium source to the third connection part 19 at the top of the transfer bottle 15. After the source filling system is assembled, fill hot water 16 into the water bath unit 13 so that the liquid level of the hot water 16 is flush with the scale line 24 on the water bath unit 13. In this embodiment, the temperature of the hot water 16 is not lower than 30 °C. After the hot water 16 is filled, let it stand. The solid gallium source in the gallium bottle 14 is heated and melted into the liquid gallium source 12. The liquid gallium source 12 flows into the transfer bottle 15 and is transported to the boat body 1 through the connecting pipe 22. During the transportation of the liquid gallium source 12, the transfer bottle 15 is connected to the inert gas source by the communication pipe 21 to stabilize the air pressure, and the inert gas is used to assist the liquid gallium source 12 to flow into the connecting pipe 22 to avoid the residue of the liquid gallium source 12. After the transfer of the liquid gallium source 12 in the bottle 15 to be transferred is completed, the connecting pipe 22 is separated from the filling port 2, and the sealing cover 3 is buckled on the filling port 2 to block the filling port 2 with the sealing cover 3, so as to avoid the volatilization and pollution of the liquid gallium source 12.

[0042] The foregoing description of the disclosed embodiments enables those skilled in the art to practice or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Thus, the invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A gallium boat, comprising: The boat body (1), characterized in that, a filling port (2) is fixedly arranged on the upper part of the boat body (1), and a sealing cover (3) is detachably installed on the filling port (2); a conical channel (5) is arranged in the filling port (2), the sealing cover (3) includes a cover body (7), the cover body (7) is used for covering the filling port (2), a conical plug part (8) is fixedly arranged on the cover body (7), the plug part (8) is inserted into the conical channel (5), and the outer wall of the plug part (8) and the side wall of the conical channel (5) are both frosted structures.

2. The gallium boat according to claim 1, wherein Both the plug part (8) and the conical channel (5) are conical structures with a larger diameter at the upper part and a smaller diameter at the lower part.

3. The gallium boat according to claim 1, characterized in that, A filling pipe (4) is fixedly arranged in the boat body (1), the upper end of the filling pipe (4) is fixedly connected to the filling port (2), and there is a gap between the lower end of the filling port (2) and the bottom of the boat body (1).

4. The gallium boat according to claim 3, characterized in that, The gap between the lower end of the filling port (2) and the bottom of the boat body (1) is greater than 2 mm.

5. The gallium boat according to claim 1, characterized in that, A plurality of baffle plates (9) are fixedly arranged in the boat body (1) at intervals, an air inlet (10) is fixedly arranged at one end of the boat body (1), and an air outlet (11) is fixedly arranged at the other end of the boat body (1).

6. A source filling system, characterized in that, Including: A water bath unit (13), a gallium bottle (14), and the gallium boat as described in claim 1, the water bath unit (13) is located above the boat body (1), the gallium bottle (14) contains a solid gallium source, the gallium bottle (14) is detachably installed in the water bath unit (13), and the gallium bottle (14) is connected to the filling port (2) on the boat body (1) by a connecting pipe (22).

7. The source charging system according to claim 6, wherein A transfer bottle (15) is installed in the water bath unit (13), the top of the transfer bottle (15) is detachably connected to the bottle mouth (20) of the gallium bottle (14), the bottom of the transfer bottle (15) is detachably connected to the connecting pipe (22), and the transfer bottle (15) is connected to the filling port (2) through the connecting pipe (22).

8. The source refueling system according to claim 7, wherein The overall height of the transfer bottle (15) is lower than the depth of the water bath unit (13), and a connecting pipe (21) is fixedly arranged on the transfer bottle (15).

9. The source charging system according to claim 7, characterized in that, A scale line (24) is arranged on the water bath unit (13).

10. A source charging method, characterized in that, Adopting the source filling system as described in any one of claims 6-9, including: Install the transfer bottle (15) in the water bath unit (13), connect the transfer bottle (15) to the filling port (2) through the connecting pipe (22), connect the connecting pipe (21) to an inert gas source, and install the gallium bottle (14) containing the solid gallium source on the top of the transfer bottle (15); Fill hot water (16) into the water bath unit (13) so that the liquid level of the hot water (16) is flush with the scale line (24), the solid gallium source in the gallium bottle (14) is heated and melted into a liquid gallium source (12), and the liquid gallium source (12) flows into the boat body (1) through the transfer bottle (15), the connecting pipe (22), and the filling port (2) in sequence; After the liquid gallium source (12) in the transfer bottle (15) is transferred, separate the connecting pipe (22) from the filling port (2) and buckle the sealing cover (3) on the filling port (2).

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