Basket carrying and storing integrated AGV (Automatic Guided Vehicle)

Abstract

The invention discloses a basket carrying and storing integrated AGV, relates to the technical field of semiconductor material sheet transportation, and has the advantage that an AGV trolley can carry out centralized storage on a plurality of baskets. The technical scheme is characterized in that the AGV trolley comprises a trolley body and a storage rack body arranged on the trolley body and used for storing the plurality of baskets; the conveying assembly is arranged on the trolley body and used for conveying the lifting baskets, and the conveying assembly conveys the lifting baskets on the conveying assembly to the storage rack body; and the power piece is arranged on the trolley body and enables the conveying assembly to move in the X-axis direction, the Y-axis direction and the Z-axis direction at the front end of the storage rack body.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor wafer transportation, and specifically to a basket handling and storage integrated AGV. Background Art

[0002] AGV is short for Automated Guided Vehicle, also known as Automated Guided Cart and Automated Guided Vehicle.

[0003] After semiconductor packaging, wafers need to be stored, so an AGV cart is required to handle the baskets for storing wafers. As Figure 13 A basket structure for storing multiple packaged wafers, including a basket body with a U-shaped frame in its longitudinal section. At one end of each of the two vertically opposite side walls of the basket body, several clamping plates extending horizontally into the basket body are provided. Each clamping plate extends and distributes along the width and height directions of the vertical side wall of the basket body. The clamping plate extending along the width direction of the vertical side wall of the basket body is used to support the packaged semiconductor wafers, and the clamping plates extending and distributing along the height direction of the vertical side wall of the basket body are used to limit the packaged semiconductor wafers within the basket body. At this time, the semiconductor wafers are stacked vertically in the basket.

[0004] Currently, the existing AGV cart has a simple structure and cannot achieve centralized storage of multiple baskets.

[0005] Therefore, the applicant has developed a new technical solution during the actual production process to solve the above technical problems. Summary of the Invention

[0006] Aiming at the above existing technical deficiencies, the purpose of the present invention is to provide a basket handling and storage integrated AGV, which has the advantage of enabling the AGV cart to centrally store multiple baskets.

[0007] To solve the above technical problems, the present invention adopts the following technical solutions: The present invention provides a basket handling and storage integrated AGV, including a cart body and a storage rack body provided on the cart body for storing a number of baskets; It further includes a transmission component provided on the cart body for transmitting the baskets, and the transmission component transmits the baskets on the transmission component to the storage rack body; It further includes a power component provided on the cart body to move the transmission component in the XYZ axes in front of the storage rack body.

[0008] By adopting the above technical solution, the power component drives the transmission component to move in the XYZ-axis directions at the front end of the storage rack body, facilitating the transmission component to transfer the basket to the storage rack body for storage. Since the basket has a certain length, the transmission component is required to transfer the basket to the storage rack body. At this time, multiple baskets can be centrally stored on the trolley body, enabling the trolley body to store multiple baskets while moving, allowing one trolley body to dock with multiple devices and store the baskets of the wafers encapsulated by multiple devices, improving intelligence and reducing manual intervention.

[0009] Preferably, a clamping member for clamping the basket onto the transmission component is provided on the transmission component.

[0010] Preferably, a bottom plate is provided at the upper end of the trolley body. The storage rack body includes an inverted U-shaped support frame arranged on one side of the bottom plate. Two opposite vertical sides of the support frame are fixed to the bottom plate, and the horizontal side is distributed away from the bottom plate. A plurality of mutually parallel load-bearing plates are provided between the two opposite vertical sides of the support frame. Each load-bearing plate is horizontally arranged and is spaced in an array along the height direction of the support frame. The gap between two adjacent load-bearing plates up and down is larger than the height of the basket, and the width of each load-bearing plate is larger than the length of the basket. A baffle located on one side of the basket is provided at the end of the load-bearing plate away from the transmission component, and the length of the baffle extends along the length direction of the load-bearing plate.

[0011] Preferably, the transmission component is located on one side of the support frame. The transmission component includes a horizontally distributed mounting plate fixed to the power component. A roller conveyor distributed along the length direction of the mounting plate is installed on the upper surface of the mounting plate through a bracket. The length direction of the mounting plate is perpendicular to the length direction of the load-bearing plate; L-shaped fixing rods are provided on both sides of the bracket in the length direction of the roller conveyor. The vertical part of the fixing rod is fixedly connected to the bracket, and the horizontal part extends above the roller conveyor and has a gap with the roller conveyor. Guide plates are provided on the horizontal parts of both fixing rods. Both guide plates are distributed along the length direction of the roller conveyor, and both ends of the length direction of both guide plates extend outward and expand.

[0012] Preferably, the clamping member includes guide rails I provided on both side edges in the length direction of the mounting plate. Slide blocks I are slidably connected to both guide rails I. The two slide blocks I are connected by a U-shaped transition plate. The horizontal part of the transition plate is located below the mounting plate and has a gap with the mounting plate. The two vertical parts are respectively connected to the two slide blocks I. A driving member for driving the slide block I to reciprocate along the guide rail I is provided on the transition plate; Both ends of the horizontal portion of the transition plate are provided with extension plates extending upward. There are gaps between the two extension plates and the two sides of the transition plate and the roller conveyor. The upper ends of the two extension plates are provided with clamping plates extending towards each other. The clamping plates are located above the guiding plate. An electric structure for driving the two extension plates to approach or move away from each other is provided on the side surface of the horizontal portion of the transition plate facing away from the mounting plate.

[0013] Preferably, the driving member includes a first gear rotatably arranged on the transition plate and distributed towards the mounting plate. A first rack distributed along the length direction of the mounting plate is provided on the lower end surface of the mounting plate. The first rack passes through the gap between the transition plate and the mounting plate. The first rack meshes with the first gear. A first servo motor for driving the first gear to rotate is provided on the transition plate. Alternatively, a speed reducer is provided on the side of the transition plate facing away from the mounting plate. The first servo motor is mounted on the speed reducer, and the output shaft of the first servo motor is connected to the input shaft of the speed reducer. The output shaft of the speed reducer drives the first gear to rotate. The first servo motor is horizontally distributed. At this time, the output shaft and the input shaft of the speed reducer are vertically distributed.

[0014] Preferably, the electric structure includes a driving box provided on the outer shell of the speed reducer and opening upward. An installation box is provided on one side of the driving box. A worm is rotatably connected to the opposite box walls of the driving box. One end of the worm extends into the installation box and is coaxially and fixedly provided with a driven bevel gear. A second servo motor is provided on the outer wall of the installation box. The output shaft of the second servo motor extends into the installation box and is coaxially and fixedly provided with a driving bevel gear meshing with the driven bevel gear. A driving shaft is rotatably connected to the bottom of the driving box. A worm gear meshing with the worm is coaxially and fixedly connected to the driving shaft. A second gear is coaxially and fixedly connected to the driving shaft above the worm gear. The diameter of the second gear is smaller than that of the worm gear. Two sliding plates respectively connected to the two extension plates are slidably connected to the upper end box wall of the driving box. Rack teeth are provided on the two sliding plates. The two rack teeth are respectively located on the left and right sides of the second gear and respectively mesh with the two sides of the second gear. Alternatively, the driving box is connected to the lower end surface of the transition plate through an L-shaped plate. At this time, the horizontal portion of the L-shaped plate is connected to the outer wall of the driving box, and the vertical portion is connected to the lower end surface of the transition plate.

[0015] Preferably, a stabilizing plate with a width smaller than the diameter of the second gear is fixedly provided at the upper end of the drive shaft. Vertical plates extending vertically downward to the bottom of the drive box are provided on both sides in the length direction of the stabilizing plate. The vertical plates are fixed to the bottom of the drive box. The stabilizing plate straddles the worm gear and the worm. Installation bars located above the second rack are provided on both of the two sliding plates. The second rack and the installation bars are detachably connected by bolts. Open slots for the installation bars on the other sliding plate to slide into are formed on both of the two sliding plates. The second rack is located inside the drive box, and one end of the second rack away from the sliding plate extends out of the installation bar.

[0016] Preferably, the power member includes a plurality of second guide rails provided on the bottom plate. The length directions of the respective second guide rails are all distributed along the width direction of the object-carrying plate parallel to it. A storage plate is slidably connected to each of the second guide rails. The lower end surface of the storage plate is slidably connected to each of the second guide rails, and a plurality of third guide rails distributed along the direction perpendicular to the length direction of the second guide rails are provided on the upper end surface. A base is slidably connected to each of the third guide rails. The lower end surface of the base is slidably connected to each of the third guide rails, and a vertical plate distributed along the vertical direction is provided on the upper end surface. A linear motor is slidably connected to the vertical plate along the height direction of the vertical plate. The length direction of the linear motor is horizontally distributed. A connecting plate extending downward is provided on the slider of the linear motor. An installation frame distributed horizontally is provided at one end of the connecting plate away from the linear motor. The installation frame is U-shaped. The two opposite side walls of the installation frame are respectively installed at both ends in the length direction of the installation plate. The roller conveyor is located above the installation frame. A first driving member for driving the storage plate to slide along the second guide rail is provided on the bottom plate. A second driving member for driving the base to slide along the third guide rail is provided on the storage plate. A third driving member for driving the linear motor to reciprocally slide along the height direction of the vertical plate is provided on the vertical plate.

[0017] Preferably, a protective cover covering the storage rack body and the power member is provided on the bottom plate. An inlet and outlet for the transmission assembly to move out of the protective cover are formed on the protective cover.

[0018] The beneficial effects of the present invention are as follows: The power member drives the transmission assembly to move in the XYZ axis directions at the front end of the storage rack body, which is convenient for the transmission assembly to transfer the basket to the storage rack body for storage. Since the basket has a certain length, it is necessary for the transmission assembly to transfer the basket to the storage rack body. At this time, multiple baskets can be centrally stored on the trolley body. This enables the trolley body to store multiple baskets while moving, allowing one trolley body to be docked with multiple devices to store the baskets of the wafers encapsulated by multiple devices, improving the intelligence and reducing the manual intervention. Description of the Drawings

[0019] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0020] Figure 1 is the structural schematic diagram of this embodiment; Figure 2 is the structural schematic diagram for embodying the storage rack body and the transmission component of this embodiment; Figure 3 is the structural schematic diagram for embodying the power component of this embodiment; Figure 4 is the structural schematic diagram for embodying the servo motor three of this embodiment; Figure 5 is the structural schematic diagram for embodying the installation frame of this embodiment; Figure 6 is the structural schematic diagram for embodying the connecting plate of this embodiment; Figure 7 is the structural schematic diagram for embodying the transmission component of this embodiment; Figure 8 is the structural schematic diagram for embodying the first gear of this embodiment; Figure 9 is the structural schematic diagram for embodying the bracket of this embodiment; Figure 10 is the structural schematic diagram for embodying the drive box of this embodiment; Figure 11 is the structural schematic diagram for embodying the stabilizing plate of this embodiment; Figure 12 is the structural schematic diagram for embodying the worm and worm gear of this embodiment; Figure 13 is the structural schematic diagram for embodying the carrying basket.

[0021] Explanation of reference numerals: In the figure: 1. Cart body; 11. Storage rack body; 111. Support frame; 112. Load-bearing plate; 12. Transmission component; 121. Mounting plate; 1211. Guide rail 1; 1212. Slide block 1; 1213. Transition plate; 1214. Extension plate; 1215. Clamping plate; 1216. Gear 1; 1217. Rack 1; 1218. Servo motor 1; 1219. Reducer; 122. Bracket; 123. Roller conveyor; 124. Fixed rod; 125. Guide plate; 126. Drive box; 1261. Installation box; 1262. Worm; 1263. Driven bevel gear; 1264. Servo motor 2; 1265. Driving bevel gear; 1266. Drive shaft; 1267. Worm gear; 1268. Gear 2; 127. Slide plate; 1271. Rack 2; 1272. Stabilizing plate; 1273. Vertical plate; 1274. Mounting strip; 1275. Open slot; 13. Power component; 14. Bottom plate; 15. Guide rail 2; 151. Storage plate; 152. Guide rail 3; 153. Base; 154. Vertical plate; 155. Linear motor; 156. Connecting plate; 157. Installation frame; 16. Protective cover; 161. Inlet and outlet; 17. Rack 3; 171. Servo motor 3; 18. Limiting plate; 181. Positioning plate; 2. Basket; 21. Clamping plate. Detailed implementation manner

[0022] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0023] A basket handling and storage integrated AGV, as Figure 1 and Figure 2 and Figure 3 , includes a cart body 1 and a storage rack body 11 provided on the cart body 1 and used for storing a plurality of baskets 2; the cart body 1 is an existing AGV vehicle body.

[0024] It further includes a transmission component 12 provided on the cart body 1 and used for transmitting the basket 2, and the transmission component 12 transmits the basket 2 on the transmission component 12 to the storage rack body 11; It further includes a power component 13 provided on the cart body 1 and used for moving the transmission component 12 in the XYZ axes at the front end of the storage rack body 11.

[0025] Such as Figure 1 and Figure 2 and Figure 3, the power component 13 drives the transmission component 12 to move in the XYZ-axis directions at the front end of the storage rack body 11, facilitating the transmission component 12 to transfer the basket 2 to the storage rack body 11 for storage. Since the basket 2 has a certain length, the transmission component 12 is required to transfer the basket 2 to the storage rack body 11. At this time, multiple baskets 2 can be centrally stored on the trolley body 1, enabling the trolley body 1 to store multiple baskets 2 while moving, allowing one trolley body 1 to dock with multiple devices to store the baskets 2 of the wafers encapsulated by multiple devices, improving intelligence and reducing manual intervention.

[0026] Such as Figure 1 and Figure 2 and Figure 3 , on the upper end of the trolley body 1, there is a bottom plate 14, and on the bottom plate 14, there is a protective cover 16 covering the storage rack body 11 and the power component 13. An inlet / outlet 161 for the transmission component 12 to move out of the protective cover 16 is provided on the protective cover 16, facilitating the basket 2 to be placed on the transmission component 12 and then being conveyed by the transmission component 12 to the storage rack body 11 for storage.

[0027] Such as Figure 1 and Figure 2 and Figure 3 , in addition, the transmission component 12 is provided with a clamping member for clamping the basket 2 onto the transmission component 12. At this time, the wafers encapsulated on the device are stored in the basket 2. One end of the clamping member extends out of the opening to facilitate clamping the basket 2 onto the transmission component 12 for the next step of storage, further reducing manual intervention.

[0028] Such as Figure 1 and Figure 2 , the storage rack body 11 includes an inverted U-shaped support frame 111 arranged on one side of the bottom plate 14. Two opposite vertical sides of the support frame 111 are fixed on the bottom plate 14, and the horizontal side is distributed away from the bottom plate 14. A number of mutually parallel load-bearing plates 112 are provided between the two opposite vertical sides of the support frame 111. Each load-bearing plate 112 is horizontally arranged and spaced in an array along the height direction of the support frame 111. The gap between two adjacent load-bearing plates 112 in the vertical direction is larger than the height of the basket 2, and the width of each load-bearing plate 112 is larger than the length of the basket 2, which means that the basket 2 is clamped on both sides in the width direction by the clamping member and is conveyed by the transmission component 12 along the length direction of the basket 2 to the load-bearing plate 112. At this time, the baskets 2 on each layer of the load-bearing plate 112 are arranged side by side at intervals. A baffle (not shown in the figure) located on one side of the basket 2 is provided at the end of the load-bearing plate 112 away from the transmission component 12, so that when the transmission component 12 completely conveys the basket 2 to the load-bearing plate 112, the baffle limits the movement of the basket 2, and the length of the baffle is distributed along the length direction of the load-bearing plate 112; in addition, limiting strip plates located on both sides in the width direction of the basket 2 can also be provided on the baffle to make the position of the basket 2 stable on the load-bearing plate 112.

[0029] As Figure 5 and Figure 6 and Figure 7 and Figure 8 and Figure 9 As shown in FIGS. and, the transmission component 12 is located on one side of the support frame 111. The transmission component 12 includes a mounting plate 121 fixed on the power component 13 and horizontally distributed. The upper surface of the mounting plate 121 is provided with a roller conveyor 123 distributed along the length direction of the mounting plate 121 through a bracket 122. The length direction of the mounting plate 121 is perpendicular to the length direction of the object-carrying plate 112, so that the transmission direction of the roller conveyor 123 is also perpendicular to the length direction of the object-carrying plate 112, facilitating the conveyance of the basket 2. The bracket 122 includes a U-shaped bottom frame fixed on the upper surface of the mounting plate 121 and L-shaped fixing frames respectively arranged on two opposite vertical walls of the bottom frame. The roller conveyor 123 is mounted on the vertical portions of the two fixing frames.

[0030] As Figure 5 and Figure 6 and Figure 7 and Figure 8 As shown in FIGS. and, the bracket 122 is provided with L-shaped fixing rods 124 on both sides in the length direction of the roller conveyor 123, that is, the fixing rods 124 are arranged on the fixing frames. The vertical portions of the fixing rods 124 are fixedly connected to the bracket 122, and the horizontal portions extend above the roller conveyor 123 and have a gap with the roller conveyor 123. The horizontal portions of the two fixing rods 124 are both provided with guide plates 125. The two guide plates 125 are both distributed along the length direction of the roller conveyor 123 and the two ends in the length direction of the two guide plates 125 both extend outwardly. The purpose is to facilitate the clamping member to place one end of the basket 2 on the roller conveyor 123 after clamping the basket 2, and then the basket 2 completely slides between the two guide plates 125 under the transmission of the roller conveyor 123.

[0031] As Figure 5 and Figure 6 and Figure 7 and Figure 8 Alternatively, the vertical portions of the fixing rods 124 can also be connected to the body of the roller conveyor 123. At this time, two fixing rods 124 are provided on one side of the roller conveyor 123 and are distributed on both sides in the length direction of the roller conveyor 123. The two fixing rods 124 on the same side of the roller conveyor 123 are connected to one guide plate 125.

[0032] As Figure 5 and Figure 6 and Figure 7 and Figure 8, the clamping member includes guide rails 1211 provided on both sides of the mounting plate 121 in the length direction thereof, that is, the guide rails 1211 are distributed along the length direction of the mounting plate 121 and are consistent with the transmission direction of the roller conveyor 123. Slide blocks 1212 are slidably connected to both of the guide rails 1211. The two slide blocks 1212 are connected by a U-shaped transition plate 1213. The horizontal portion of the transition plate 1213 is located below the mounting plate 121 and there is a gap between the horizontal portion and the mounting plate 121. The two vertical portions are respectively connected to the two slide blocks 1212. A driving member for driving the slide blocks 1212 to reciprocate along the guide rails 1211 is provided on the transition plate 1213; Such as Figure 5 And Figure 6 And Figure 7 And Figure 8 , at both ends of the horizontal portion of the transition plate 1213, there are extension plates 1214 extending upward. There are gaps between both of the extension plates 1214 and the transition plate 1213 and the two sides of the roller conveyor 123. Clamping plates 1215 extending toward each other are provided at the upper ends of the two extension plates 1214. The clamping plates 1215 are located above the guiding plate 125. An electric structure for driving the two extension plates 1214 to approach or move away from each other is provided on the side surface of the horizontal portion of the transition plate 1213 facing away from the mounting plate 121.

[0033] Such as Figure 5 And Figure 6 And Figure 7 And Figure 8 , at this time, the electric structure drives the two extension plates 1214 to move toward or away from each other, and further facilitates driving the two clamping plates 1215 to move toward or away from each other through the extension plates 1214, thereby facilitating the two clamping plates 1215 to clamp the basket 2. Therefore, the driving member first drives the two clamping plates 1215 to move toward the basket 2. At this time, the distance between the two clamping plates 1215 is greater than the width of the basket 2. When the two clamping plates 1215 are respectively located on the outer walls of the basket 2, the electric structure drives the clamping plates 1215 to move toward each other, so that the clamping plates 1215 clamp the basket 2.

[0034] Such as Figure 5 And Figure 6 And Figure 7 And Figure 8, the driving member includes a first gear 1216 rotatably arranged on the transition plate 1213 and distributed towards the mounting plate 121. The horizontal part of the transition plate 1213 can extend a convex plate along the horizontal part direction, and the first gear 1216 is rotatably connected to the convex plate. A first rack 1217 distributed along the length direction of the mounting plate 121 is provided on the lower end surface of the mounting plate 121. The first rack 1217 passes through the gap between the transition plate 1213 and the mounting plate 121, and the first rack 1217 meshes with the first gear 1216. A first servo motor 1218 for driving the first gear 1216 to rotate is provided on the transition plate 1213. At this time, the first servo motor 1218 drives the first gear 1216 to rotate, so that the first gear 1216 meshes with the first rack 1217. Furthermore, the position of the first rack 1217 is fixed. Therefore, the first gear 1216 rolls on the first rack 1217, causing the first slider 1212 to reciprocate along the first guide rail 1211, thereby facilitating the removal and insertion of the clamping plate 1215, that is, one end of the clamping plate 1215 is located on one side in the length direction of the roller conveyor 123, facilitating the clamping of the basket 2 onto the roller conveyor 123.

[0035] Such as Figure 5 And Figure 6 And Figure 7 And Figure 8 , or, a speed reducer 1219 is provided on the side of the transition plate 1213 facing away from the mounting plate 121. The first servo motor 1218 is installed on the speed reducer 1219, and the output shaft of the first servo motor 1218 is connected to the input shaft of the speed reducer 1219. The output shaft of the speed reducer 1219 drives the first gear 1216 to rotate. The first servo motor 1218 is horizontally distributed. At this time, the output shaft and the input shaft of the speed reducer 1219 are vertically distributed, that is, a right-angle shaft speed reducer 1219. The purpose of this design is to reduce the installation space of the first servo motor 1218 and facilitate the installation of the speed reducer 1219. At this time, the length direction of the first servo motor 1218 is horizontally distributed and along the length direction of the roller conveyor 123.

[0036] Such as Figure 10 And Figure 11 And Figure 12 , the electric structure includes a driving box 126 provided on the outer shell of the speed reducer 1219 and opening upwards. An installation box 1261 is provided on one side of the driving box 126. A worm 1262 is rotatably connected to the opposite box walls of the driving box 126. One end of the worm 1262 extends into the installation box 1261 and is coaxially fixed with a driven bevel gear 1263. A second servo motor 1264 is provided on the outer wall of the installation box 1261. The output shaft of the second servo motor 1264 extends into the installation box 1261 and is coaxially fixed with a driving bevel gear 1265 that meshes with the driven bevel gear 1263. At this time, the output shaft of the second servo motor 1264 is rotatably connected to the box wall of the installation box 1261; Such as Figure 10and Figure 11 and Figure 12 The bottom of the driving box 126 is rotatably connected to a driving shaft 1266. A worm gear 1267 that meshes with the worm 1262 is coaxially and fixedly connected to the driving shaft 1266. Above the worm gear 1267, a second gear 1268 is coaxially and fixedly connected to the driving shaft 1266. The diameter of the second gear 1268 is smaller than that of the worm gear 1267. Two sliding plates 127 respectively connected to the two extension plates 1214 are slidably connected to the upper box wall of the driving box 126. The sliding plates 127 are located below the transition plate 1213 and there is a gap between the sliding plates 127 and the transition plate 1213. The sliding plates 127 are horizontally distributed. Two second racks 1271 are provided on the two sliding plates 127. The two second racks 1271 are respectively located on the left and right sides of the second gear 1268 and respectively mesh with the two sides of the second gear 1268. Such as Figure 10 and Figure 11 and Figure 12 The servo motor two 1264 drives the driven bevel gear 1263 to rotate through the driving bevel gear 1265, and then drives the worm 1262 to rotate, so that the worm 1262 drives the worm gear 1267 to rotate. At this time, the worm gear 1267 drives the driving shaft 1266 to rotate, and then drives the second gear 1268 to rotate, so that the second gear 1268 drives the two second racks 1271 to move towards each other or move away from each other, and then drives the two sliding plates 127 to move towards each other or move away from each other; the extension plates 1214 and the clamping plates 1215 are driven to move together through the sliding plates 127.

[0037] Alternatively, the driving box 126 is connected to the lower end surface of the transition plate 1213 through an L-shaped plate. At this time, the horizontal part of the L-shaped plate is connected to the outer wall of the driving box 126, and the vertical part is connected to the lower end surface of the transition plate 1213.

[0038] Such as Figure 10 and Figure 11 and Figure 12, a stabilizing plate 1272 with a width smaller than the diameter of the second gear 1268 is fixedly provided at the upper end of the drive shaft 1266. Vertical plates 1273 extending vertically downward to the bottom of the drive box 126 are provided on both sides in the length direction of the stabilizing plate 1272. The vertical plates 1273 are fixed to the bottom of the drive box 126. The stabilizing plate 1272 straddles the worm gear 1267 and the worm 1262. The stabilizing plate 1272 is provided to facilitate fixing the position of the drive shaft 1266, making the rotation of the drive shaft 1266 stable; mounting strips 1274 located above the second rack 1271 are provided on both sliding plates 127. The second rack 1271 and the mounting strips 1274 are detachably connected by bolts. At this time, the bolts are screwed in from the upper end surface of the mounting strips 1274 and threadedly connected with the second rack 1271 through the mounting strips 1274. Open slots 1275 for the mounting strips 1274 on the other sliding plate 127 to slide into are provided on both sliding plates 127. The second rack 1271 is located inside the drive box 126, and the end of the second rack 1271 away from the sliding plate 127 extends out of the mounting strip 1274. The setting of the mounting strip 1274 facilitates fixing the second rack 1271 on the one hand and reduces the deformation of the second rack 1271 on the other hand.

[0039] As Figure 2 and Figure 3 and Figure 4 , the power member 13 includes a plurality of parallel second guide rails 15 provided on the bottom plate 14. The length directions of the respective second guide rails 15 are all distributed along the width direction parallel to the carrying plate 112. A storage plate 151 is slidably connected to each of the second guide rails 15. The lower end surface of the storage plate 151 is slidably connected to each of the second guide rails 15, and a plurality of third guide rails 152 distributed in a direction perpendicular to the length direction of the second guide rails 15 are provided on the upper end surface. As Figure 2 and Figure 3 and Figure 4, each guide rail three 152 is slidably connected with a base 153. The lower end face of the base 153 is slidably connected with each guide rail three 152, and the upper end face is provided with a vertical plate 154 distributed in the vertical direction. A linear motor 155 is slidably connected to the vertical plate 154 along the height direction of the vertical plate 154. The length direction of the linear motor 155 is horizontally distributed. A connecting plate 156 extending downward is provided on the slider of the linear motor 155. One end of the connecting plate 156 away from the linear motor 155 is provided with a horizontally distributed mounting frame 157. The mounting frame 157 is U-shaped, and the opening direction of the mounting frame 157 is distributed away from the connecting plate 156. The two ends of the mounting plate 121 in the length direction are respectively mounted on the two opposite side walls of the mounting frame 157. The roller conveyor 123 is located above the mounting frame 157. There is a gap between a long strip edge of the mounting plate 121 located inside the mounting frame 157 and the inner wall of the mounting frame 157, facilitating the sliding of the slider one 1212; at this time, the connecting plate 156 can be a vertically distributed Z-shaped plate. At this time, the two vertical sides of the Z-shaped plate are respectively connected to the linear motor 155 and the mounting frame 157, and the horizontal side extends in the direction of the vertical plate 154, reducing the installation space.

[0040] As Figure 2 and Figure 3 and Figure 4 , a driving member one for driving the storage plate 151 to slide along the guide rail two 15 is provided on the bottom plate 14, that is, driving the transmission assembly 12 to move along the Y-axis direction; A driving member two for driving the base 153 to slide along the guide rail three 152 is provided on the storage plate 151, that is, driving the transmission assembly 12 to move along the X-axis direction; A driving member three for driving the linear motor 155 to reciprocally slide along the height direction of the vertical plate 154 is provided on the vertical plate 154, that is, driving the transmission assembly 12 to move along the Z-axis direction.

[0041] The setting of the linear motor 155 facilitates driving the transmission assembly 12 to move out of the inlet and outlet 161 of the protective cover 16 together with the movement in the Y-axis direction.

[0042] As Figure 2 and Figure 3 and Figure 4 , the structures of the driving member one and the driving member two include a rack three 17 provided on the bottom plate 14 and the storage plate 151. The rack three 17 is distributed parallel to the guide rail two 15 or the guide rail three 152. A gear three meshing with the rack three 17 on the bottom plate 14 is rotatably connected to the lower end face of the storage plate 151. A gear four (not shown in the figure) meshing with the rack three 17 on the storage plate 151 is rotatably connected to the lower end face of the base 153. A servo motor three 171 for respectively driving the rotation of the gear three and the gear four is provided on the upper end face of the storage plate 151 and the upper end face of the base 153.

[0043] As Figure 2 and Figure 3 andFigure 4 The driving member three includes relative plates disposed on the vertical plate 154 and distributed vertically and oppositely. A lead screw (not shown in the figure) is rotatably connected between the two relative plates. A lifting seat is threadedly connected to the lead screw. The lifting seat is slidably connected to the vertical plate 154. The linear motor 155 is installed on the lifting seat. The upper end of the lead screw extends upward through the relative plate and a gear five is coaxially fixedly connected to the extending end. A servo motor four is provided on the vertical plate 154. The output shaft of the servo motor four is parallel to the lead screw and is located on one side of the lead screw. A gear six is coaxially fixedly provided on the output shaft of the servo motor four. The gear six meshes with the gear five. When the gear six rotates, it drives the gear five to rotate, thereby facilitating the driving of the lead screw to rotate. The rotation of the lead screw drives the lifting seat to slide up and down on the vertical plate 154, thereby realizing the movement of the transmission assembly 12 in the Z-axis direction.

[0044] As Figure 7 In addition, the clamping member clamps the outer wall at the middle and lower positions of the basket 2, facilitating the stable clamping of the basket 2. A limiting plate 18 is provided on the bracket 122 outside the clamping plate 1215. The limiting plate 18 is in an Ω shape. The protruding part of the limiting plate 18 allows the clamping plate 1215 to move horizontally. One side of the edges on both sides of the protruding part is connected to the bracket 122, and the other side is provided with a positioning plate 181 directly above the guiding plate 125. The two positioning plates 181 are parallel to the guiding plate 125 in the length direction, and both ends of the two positioning plates 181 in the length direction also expand outward, facilitating the sliding-in of the basket 2.

[0045] Alternatively, the lower end of the limiting plate 18 can also be connected to the body of the roller conveyor 123.

[0046] The usage steps of the above structure are as follows: S1, the power member 13 drives the transmission assembly 12 and the clamping member to move together towards the inlet and outlet 161 of the protective cover 16. When moving close to the opening direction of the protective cover 16, the linear motor 155 drives the transmission assembly 12 and the clamping member to partially move out of the inlet and outlet 161 of the protective cover 16. S2, one end of the clamping member moves to one side of the transmission assembly 12, clamps the outer wall of the basket 2 filled with encapsulated wafers, and then the clamping member moves towards the transmission assembly 12 and partially clamps the basket 2 onto the roller conveyor 123. Subsequently, the roller conveyor 123 operates, the clamping member releases the basket 2. After the basket 2 completely moves onto the roller conveyor 123, the clamping member clamps the basket 2 again. S3, the power member 13 drives the transmission assembly 12 and the clamping member to move together towards the storage rack body 11. Until the roller conveyor 123 is aligned with the load-bearing plate 112, the clamping member releases the basket 2. The basket 2 moves onto the load-bearing plate 112 under the transmission of the roller conveyor 123 until the entire basket 2 is moved onto the load-bearing plate 112. S4. Repeat the steps of S1 - S3 above, and the carrier plate 112 can be filled with the baskets 2. S5. When it is necessary to take out the basket 2 on the carrier plate 112, one end of the clamping member first moves to one side of the transmission component 12, clamps the outer wall of the basket 2, then the clamping member moves towards the transmission component 12 and partially clamps the basket 2 onto the roller conveyor 123. Subsequently, the roller conveyor 123 operates, the clamping member releases the basket 2. After the basket 2 completely moves onto the roller conveyor 123, the clamping member clamps the basket 2 again. Finally, driven by the power member 13, the transmission component 12, the clamping member and the basket 2 are conveyed to the inlet and outlet 161 of the protective cover 16. Subsequently, the linear motor 155 further conveys the transmission component 12, the clamping member and the basket 2 out of the inlet and outlet 161 of the protective cover 16, and the basket 2 is conveyed out of the roller conveyor 123 under the action of the roller conveyor 123.

[0047] Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalent technologies, the present invention is also intended to include these changes and modifications.

Claims

1. A basket-carrying, handling and storage integrated AGV, characterized in that, It includes a trolley body (1) and a storage rack body (11) arranged on the trolley body (1) and used for storing a number of baskets (2); It further includes a transmission component (12) arranged on the trolley body (1) and used for transmitting the basket (2), and the transmission component (12) transmits the basket (2) on the transmission component (12) to the storage rack body (11); It further includes a power component (13) arranged on the trolley body (1) and enabling the transmission component (12) to move in the XYZ axes at the front end of the storage rack body (11).

2. The integrated AGV for carrying and storing in a basket according to claim 1, wherein, A clamping component for clamping the basket (2) onto the transmission component (12) is arranged on the transmission component (12).

3. The integrated AGV for carrying and storing in a basket as claimed in claim 1 or 2, wherein A bottom plate (14) is arranged at the upper end of the trolley body (1). The storage rack body (11) includes an inverted U-shaped support frame (111) arranged on one side of the bottom plate (14). Two opposite vertical sides of the support frame (111) are fixed on the bottom plate (14), and the horizontal side is distributed away from the bottom plate (14). A number of parallel load-bearing plates (112) are arranged between two opposite vertical sides of the support frame (111). Each of the load-bearing plates (112) is horizontally arranged and spaced in an array along the height direction of the support frame (111). The gap size between two adjacent load-bearing plates (112) up and down is larger than the height size of the basket (2), and the width size of each of the load-bearing plates (112) is larger than the length size of the basket (2). A baffle located on one side of the basket (2) is arranged at one end of the load-bearing plate (112) away from the transmission component (12), and the length of the baffle is distributed along the length direction of the load-bearing plate (112).

4. The integrated AGV for carrying and storing in a basket as claimed in claim 3, wherein, The transmission component (12) is located on one side of the support frame (111). The transmission component (12) includes a horizontally distributed mounting plate (121) fixed on the power component (13). A roller conveyor (123) distributed along the length direction of the mounting plate (121) is installed on the upper end surface of the mounting plate (121) through a bracket (122). The length direction of the mounting plate (121) is perpendicular to the length direction of the load-bearing plate (112); L-shaped fixing rods (124) are arranged on both sides of the bracket (122) in the length direction of the roller conveyor (123). The vertical parts of the fixing rods (124) are fixedly connected to the bracket (122), and the horizontal parts extend above the roller conveyor (123) and have a gap with the roller conveyor (123). Guide plates (125) are arranged on the horizontal parts of the two fixing rods (124). Both of the guide plates (125) are distributed along the length direction of the roller conveyor (123), and both ends of the length direction of the two guide plates (125) extend outwards and expand.

5. The integrated AGV for basket handling and storage according to claim 4, characterized in that, The clamping member includes guide rails one (1211) provided on both sides of the mounting plate (121) in the length direction. Slide blocks one (1212) are slidably connected to both of the guide rails one (1211). The two slide blocks one (1212) are connected by a U-shaped transition plate (1213). The horizontal portion of the transition plate (1213) is located below the mounting plate (121) and there is a gap between the horizontal portion and the mounting plate (121). The two vertical portions are respectively connected to the two slide blocks one (1212). A driving member for driving the slide blocks one (1212) to reciprocate along the guide rails one (1211) is provided on the transition plate (1213). Both ends of the horizontal portion of the transition plate (1213) are provided with extension plates (1214) extending upward. There are gaps between both of the extension plates (1214) and the two sides of the transition plate (1213) and the roller conveyor (123). Clamping plates (1215) extending towards each other are provided at the upper ends of the two extension plates (1214). The clamping plates (1215) are located above the guide plate (125). An electric structure for driving the two extension plates (1214) to approach each other or move away from each other is provided on the side surface of the horizontal portion of the transition plate (1213) facing away from the mounting plate (121).

6. The integrated AGV for carrying and storing in a basket according to claim 5, wherein, The driving member includes a gear one (1216) rotatably provided on the transition plate (1213) and distributed towards the mounting plate (121). A rack one (1217) distributed along the length direction of the mounting plate (121) is provided on the lower end surface of the mounting plate (121). The rack one (1217) passes through the gap between the transition plate (1213) and the mounting plate (121). The rack one (1217) meshes with the gear one (1216). A servo motor one (1218) for driving the gear one (1216) to rotate is provided on the transition plate (1213). Alternatively, a speed reducer (1219) is provided on the side of the transition plate (1213) facing away from the mounting plate (121). The servo motor one (1218) is mounted on the speed reducer (1219), and the output shaft of the servo motor one (1218) is connected to the input shaft of the speed reducer (1219). The output shaft of the speed reducer (1219) drives the gear one (1216) to rotate. The servo motor one (1218) is horizontally distributed, and at this time, the output shaft and the input shaft of the speed reducer (1219) are vertically distributed.

7. The integrated AGV for carrying and storing in a basket as claimed in claim 6, wherein, The electric structure includes a drive box (126) arranged on the outer shell of a speed reducer (1219) and distributed with an upward opening. One side of the drive box (126) is provided with a mounting box (1261). A worm (1262) is rotatably connected to opposite box walls of the drive box (126). One end of the worm (1262) extends into the mounting box (1261) and is coaxially and fixedly provided with a driven bevel gear (1263). A second servo motor (1264) is provided on the outer wall of the mounting box (1261). The output shaft of the second servo motor (1264) extends into the mounting box (1261) and is coaxially and fixedly provided with a driving bevel gear (1265) meshing with the driven bevel gear (1263). A drive shaft (1266) is rotatably connected to the bottom of the drive box (126). A worm gear (1267) meshing with the worm (1262) is coaxially and fixedly connected to the drive shaft (1266). A second gear (1268) is coaxially and fixedly connected to the drive shaft (1266) above the worm gear (1267). The diameter of the second gear (1268) is smaller than the diameter of the worm gear (1267). Two sliding plates (127) respectively connected to two extension plates (1214) are slidably connected to the upper box wall of the drive box (126). Rack bars two (1271) are provided on both of the two sliding plates (127). The two rack bars two (1271) are respectively located on the left and right sides of the second gear (1268) and respectively mesh with both sides of the second gear (1268). Alternatively, the drive box (126) is connected to the lower end surface of a transition plate (1213) through an L-shaped plate. At this time, the horizontal part of the L-shaped plate is connected to the outer wall of the drive box (126), and the vertical part is connected to the lower end surface of the transition plate (1213).

8. The integrated AGV for carrying and storing in a basket according to claim 7, wherein, A stabilizing plate (1272) with a width smaller than the diameter of the second gear (1268) is fixedly provided at the upper end of the drive shaft (1266). Vertical plates (1273) extending vertically downward to the bottom of the drive box (126) are provided on both sides in the length direction of the stabilizing plate (1272). The vertical plates (1273) are fixed to the bottom of the drive box (126). The stabilizing plate (1272) straddles the worm gear (1267) and the worm (1262). Mounting bars (1274) located above the rack bars two (1271) are provided on both of the two sliding plates (127). The rack bars two (1271) and the mounting bars (1274) are detachably connected by bolts. Open slots (1275) for the mounting bars (1274) on the other sliding plate (127) to slide into are formed on both of the two sliding plates (127). The rack bars two (1271) are located inside the drive box (126), and one end of the rack bar two (1271) away from the sliding plate (127) extends out of the mounting bar (1274).

9. The integrated AGV for carrying and storing in a basket as claimed in claim 4, wherein, The power component (13) includes a plurality of second guide rails (15) provided on the bottom plate (14). The length directions of the respective second guide rails (15) are all distributed along the width direction parallel to the object-carrying plate (112). A storage plate (151) is slidably connected to each of the second guide rails (15). The lower end surface of the storage plate (151) is slidably connected to each of the second guide rails (15), and a plurality of third guide rails (152) are provided on the upper end surface and distributed along the direction perpendicular to the length direction of the second guide rails (15). A base (153) is slidably connected to each of the third guide rails (152). The lower end surface of the base (153) is slidably connected to each of the third guide rails (152), and a vertical plate (154) is provided on the upper end surface and distributed in the vertical direction. A linear motor (155) is slidably connected to the vertical plate (154) along the height direction of the vertical plate (154). The length direction of the linear motor (155) is horizontally distributed. A connecting plate (156) extending downward is provided on the slide block of the linear motor (155). A horizontally distributed mounting frame (157) is provided at one end of the connecting plate (156) away from the linear motor (155). The mounting frame (157) is U-shaped. The two opposite side walls of the mounting frame (157) are respectively mounted at the two ends in the length direction of the mounting plate (121). The roller conveyor (123) is located above the mounting frame (157). A first driving member for driving the storage plate (151) to slide along the second guide rail (15) is provided on the bottom plate (14). A second driving member for driving the base (153) to slide along the third guide rail (152) is provided on the storage plate (151). A third driving member for driving the linear motor (155) to reciprocally slide along the height direction of the vertical plate (154) is provided on the vertical plate (154).

10. The integrated AGV for carrying and storing in a basket according to claim 3, characterized in that, A protective cover (16) covering the storage rack body (11) and the power component (13) is provided on the bottom plate (14). An inlet / outlet (161) for the transfer assembly (12) to move out of the protective cover (16) is provided on the protective cover (16).

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