Conveying equipment for liquid crystal substrate processing

Abstract

The invention discloses conveying equipment for liquid crystal substrate processing, and relates to the technical field of conveying equipment, the conveying equipment comprises a table body with the top surface of a frame body structure, an air pump machine arranged at the bottom of the table body, two side supporting frames fixed on the top surface of the table body in a mirror image manner, and a first air floating mechanism and a second air floating mechanism which are arranged on the top surface of the frame body structure of the table body in a crossing manner; the dust isolation assembly is connected to the interior of the table body in a penetrating mode, the side guide assembly is connected to the top faces of the side supporting frames in a penetrating mode, the overturning and brushing assembly is arranged on the top faces of the two side supporting frames in a crossing mode, the dust isolation assembly is inserted between the first air flotation mechanism and the second air flotation mechanism, and the first air flotation mechanism comprises multiple sets of first air flotation assemblies; the substrate glass is conveyed through the first air flotation assembly and the second air flotation assembly, separation is conducted through the partition supporting plate, air flotation adjustment is conducted on the just-placed substrate glass, it is guaranteed that the air flotation height is stable, the conveyed substrate glass is not affected, and the stability and safety of air flotation conveying of the substrate glass are improved.

Description

Technical Field

[0001] The present invention relates to the technical field of conveying equipment, and specifically to a conveying equipment for liquid crystal substrate processing. Background Art

[0002] Liquid crystal substrate glass is one of the key materials in the manufacture of liquid crystal displays (LCDs), mainly used to carry liquid crystal molecules and drive circuits. It is usually made of ultra-thin glass with high purity and high transparency, and has excellent flatness, thermal stability and chemical stability. The thickness of the substrate glass is usually between 0.3 mm and 0.7 mm, and the surface requires extremely smoothness to ensure the uniform distribution of the liquid crystal layer and the clarity of the display effect. During the production and transportation of liquid crystal substrate glass, preventing scratches is crucial. Since the surface of the substrate glass is extremely fragile, any tiny scratch or damage will affect its optical performance, resulting in defects in the display panel, such as bright spots, dark spots or uneven display, etc. This will not only reduce the yield of the product, but also increase the production cost.

[0003] In the prior art, as disclosed in the patent number CN221070069U, a glass air-floating conveying table is provided. The first conveying component includes a blower and a plurality of air-floating platform components. The blower is respectively connected to the plurality of air-floating platform components, and the blower supplies air to the plurality of air-floating platform components so that the plurality of air-floating platform components cooperate together to form an air-floating support surface. Although this conveying table can reduce the contact with the glass by using the air-floating platform components to avoid scratching the glass, when the glass is placed, since the glass is not stable when it is just placed, the air buoyancy on the glass is likely to be unstable, resulting in the glass shifting or even colliding, which is likely to cause damage to the glass.

[0004] Therefore, an improved conveying equipment is needed, which can improve the stability and safety of the conveyance of the substrate glass. Summary of the Invention

[0005] The purpose of the present invention is to provide a conveying equipment for liquid crystal substrate processing to solve the problems raised in the prior art.

[0006] To achieve the above object, the present invention provides the following technical solutions: It includes a table body with a frame structure on the top surface, an air pump machine arranged at the bottom of the table body, two side support frames mirror-fixed on the top surface of the table body, a first air-floating mechanism and a second air-floating mechanism horizontally arranged on the top surface of the frame structure of the table body, a dust separation component penetrating and connecting inside the table body, a side guide component penetrating and connecting on the top surface of the side support frame, a brush flipping component horizontally arranged on the top surfaces of the two side support frames. The dust separation component is inserted between the first air-floating mechanism and the second air-floating mechanism. The first air-floating mechanism includes multiple groups of first air-floating components, and the second air-floating mechanism includes multiple groups of second air-floating components. The first air-floating components and the second air-floating components have the same structure. Position sensors are arranged between adjacent two groups of first air-floating components and between adjacent two groups of second air-floating components. The air pump machine is respectively connected in communication with the interiors of the first air-floating components and the second air-floating components;

[0007] The dust separation component includes a partition board inserted between the first air-floating component and the second air-floating component, tooth grooves opened on both sides of the partition board, two first motors fixed on the bottom surface of the table body, gears connected to the rotating ends of the first motors, and the gears are meshed with the tooth grooves on one side. The partition board is driven by the gears to have two states;

[0008] In the first state, the partition board rises and is separated between the first air-floating component and the second air-floating component, and the top surface of the partition board is inserted between the two side support frames;

[0009] In the second state, the partition board descends and the top surface is flush with the top surface of the table body.

[0010] Preferably, the side guide component penetrates and is inserted vertically inside the side support frame. The bottom of the side guide component is a guiding structure. The side guide component is arranged on the top of the partition board. The side guide component is pushed up and down by the partition board to have two states;

[0011] In the first state, the side guide component is pushed up by the partition board so that the guiding structure at the bottom of the side guide component is at the same horizontal height as the top surface of the first air-floating component;

[0012] In the second state, the height of the guiding structure at the bottom of the side guide component is lower than the height of the top surface of the first air-floating component.

[0013] Preferably, the side guide component includes a push rod and a guide rod penetrating and connecting inside the side support frame, a spring sleeved on the outer wall of the push rod, a second lifting plate fixed at the top end of the push rod, a fixing plate fixed at the top end of the guide rod, a first fixing column connecting between the top surface of the fixing plate and the bottom surface of the second lifting plate, an inclined baffle plate connected to the bottom end of the guide rod, a limiting plate fixed on the bottom surface of the inclined baffle plate, multiple second fixing columns connected to the bottom surface of the inclined baffle plate, rollers rotatably sleeved on the outer walls of the second fixing columns, the bottom ends of the rollers are frustum-shaped structures. The push rod is arranged on the top of the partition board, and the spring is connected between the top surface of the side support frame and the bottom surface of the second lifting plate.

[0014] Preferably, the dust separation component further includes a vacuum cleaner and an air blower embedded and fixed inside the partition support plate. The vacuum cleaner is arranged at the bottom of the air blower, and there is a through connection between the air outlet of the vacuum cleaner and the air inlet of the air blower;

[0015] In the first state, the top surface height of the first air floating component is set at the intermediate height between the vacuum cleaner and the air blower.

[0016] Preferably, the dust separation component further includes two connecting plates fixed to one side of the partition support plate, a first lifting plate fixed to one side of the connecting plate, a sealing plate spanning and fixed on the top surfaces of the two first lifting plates, and a camera arranged on the top surface of the sealing plate. The sealing plate has two states of lifting through the partition support plate;

[0017] In the first state, the sealing plate is arranged at the top of the side support frame;

[0018] In the second state, the sealing plate is blocked between the two side support frames.

[0019] Preferably, the first air floating component includes a first air guide box, a second air guide box, and a third air guide box spanning and fixed on the top surface of the table body, an air outlet component connected through between the top surfaces of the first air guide box, the second air guide box, and the third air guide box, air inlet pipes respectively connected through to the bottom surfaces of the first air guide box, the second air guide box, and the third air guide box, and sealing plates hermetically fixed on both sides of the first air guide box, the second air guide box, the third air guide box, and the air outlet component.

[0020] Preferably, the air outlet component includes a fixed box fixed on the top surfaces of the first air guide box, the second air guide box, and the third air guide box, a plurality of first air pipes, second air pipes, and third air pipes penetrating and connected inside the fixed box. The bottom end of the first air pipe is connected through to the inside of the first air guide box, the bottom end of the second air pipe is connected through to the inside of the second air guide box, the bottom end of the third air pipe is connected through to the inside of the third air guide box, and the plurality of first air pipes, second air pipes, and third air pipes are arranged staggered one by one.

[0021] Preferably, a first partition is fixed to the inner wall of the first air guide box, and the first partition is arranged at the bottom of the bottom end of the first air pipe. A second partition is fixed to the inner wall of the second air guide box, and the second partition is arranged at the bottom of the bottom end of the second air pipe. A third partition is fixed to the inner wall of the third air guide box, and the third partition is arranged at the bottom of the bottom end of the third air pipe.

[0022] Preferably, the inclination angle between the inner bottom surface of the fixed box of the first air pipe is 30° - 60°, and the second air pipe and the first air pipe are arranged mirror - image staggered with each other.

[0023] Preferably, the brush - turning component includes two groups of sliding - turning components respectively arranged on the top surfaces of the two side support frames, and a brush plate connected between the sliding - turning components;

[0024] The sliding and flipping component includes two fixing blocks fixed on the top surface of the side support plate, a sliding rod connected between the two fixing blocks, an electric slider slidably sleeved on the outer walls of the two sliding rods, a second motor fixed on the top surface of the electric slider, a flipping plate connected to the rotating end of the second motor, and a brush plate fixed on the bottom surface of the flipping plate.

[0025] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0026] 1. The substrate glass is conveyed by the first air-floating component and the second air-floating component. First, it is separated by the partition plate, and the air-floating adjustment of the just-placed substrate glass is carried out to ensure the stability of the air-floating height without affecting the substrate glass being conveyed, improving the stability and safety of air-floating conveyance of the substrate glass.

[0027] 2. When the substrate glass is placed on the first air-floating component, through the separation of the partition plate, the first air-floating component cleans the bottom surface of the substrate glass, effectively avoiding dust from being blown onto the glass being conveyed on the second air-floating component, ensuring the cleanliness of the conveyed substrate glass, and further improving the effect of dust-free conveyance. Description of the Drawings

[0028] Figure 1 It is a schematic structural diagram of a conveying device for liquid crystal substrate processing according to the present invention in the first state;

[0029] Figure 2 It is a schematic structural diagram of the whole of the present invention in the second state;

[0030] Figure 3 It is a schematic structural diagram of the dust separation component of the present invention;

[0031] Figure 4 It is a schematic structural diagram of the connection between the dust separation component and the first air-floating component of the present invention;

[0032] Figure 5 It is a schematic internal structural diagram of the first air-floating component of the present invention;

[0033] Figure 6 It is a schematic structural diagram of the side guiding component of the present invention;

[0034] Figure 7 It is a schematic structural diagram of the flipping and brushing component of the present invention;

[0035] Reference Numerals:

[0036] 100, table body;

[0037] 200, First air flotation component; 210, Air outlet component; 211, Fixed box; 212, First air pipe; 213, Second air pipe; 214, Third air pipe; 220, First air guide box; 221, First partition board; 230, Second air guide box; 231, Second partition board; 240, Third air guide box; 241, Third partition board; 250, Air inlet pipe; 260, Sealing plate;

[0038] 300, Second air flotation component; 400, Position sensor;

[0039] 500, Dust separation component; 510, Partition support plate; 511, Tooth groove; 520, First motor; 530, Gear; 540, Vacuum cleaner; 550, Air outlet fan; 560, Connecting plate; 570, First lifting plate; 580, Sealing plate; 590, Camera;

[0040] 600, Side guide component; 610, Push rod; 620, Spring; 630, Second lifting plate; 640, First fixed column; 650, Fixed plate; 660, Guide rod; 670, Inclined baffle; 671, Limiting plate; 680, Second fixed column; 690, Roller;

[0041] 700, Brush turning component; 710, Fixed block; 720, Slide bar; 730, Electric slider; 740, Second motor; 750, Turning plate; 760, Brush plate;

[0042] 800, Side support frame; 900, Air pump machine. Detailed implementation mode

[0043] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0044] Embodiment: The present invention provides a technical solution for a conveying device for liquid crystal substrate processing, as Figures 1 - 7As shown in the figure, it includes a table body 100 with a frame structure on the top surface, an air pump 900 arranged at the bottom of the table body 100, two side support frames 800 mirror-fixed on the top surface of the table body 100, a first air-floating mechanism and a second air-floating mechanism spanning across the top surface of the frame structure of the table body 100, a dust separation component 500 penetrating and connecting inside the table body 100, a side guide component 600 penetrating and connecting to the top surface of the side support frame 800, a brush flipping component 700 spanning across the top surfaces of the two side support frames 800. The dust separation component 500 is inserted between the first air-floating mechanism and the second air-floating mechanism. The first air-floating mechanism includes multiple groups of first air-floating components 200, and the second air-floating mechanism includes multiple groups of second air-floating components 300. The first air-floating components 200 and the second air-floating components 300 have the same structure. Position sensors 400 are arranged between adjacent two groups of first air-floating components 200 and between adjacent two groups of second air-floating components 300. The air pump 900 is respectively connected to the inside of the first air-floating components 200 and the second air-floating components 300 in a penetrating manner;

[0045] The dust separation component 500 includes a separating plate 510 inserted between the first air-floating component 200 and the second air-floating component 300, tooth grooves 511 opened on both sides of the separating plate 510, two first motors 520 fixed on the bottom surface of the table body 100, gears 530 connected to the rotating ends of the first motors 520, and the gears 530 are meshed with the tooth grooves 511 on one side. The separating plate 510 is driven by the gears 530 to have two states;

[0046] In the first state, the separating plate 510 rises and is separated between the first air-floating component 200 and the second air-floating component 300, and the top surface of the separating plate 510 is inserted between the two side support frames 800;

[0047] In the second state, the separating plate 510 descends and the top surface is flush with the top surface of the table body 100;

[0048] The substrate glass is transported through the first air-floating components 200 and the second air-floating components 300. First, it is separated by the separating plate 510, and the air-floating adjustment of the just-placed substrate glass is carried out to ensure the stability of the air-floating height without affecting the substrate glass being transported, thus improving the stability and safety of air-floating transportation of the substrate glass;

[0049] When the substrate glass is placed on the first air-floating component 200, through the separation of the separating plate 510, the bottom surface of the substrate glass is cleaned by the first air-floating component 200, effectively avoiding dust from being blown onto the glass being transported on the second air-floating component 300, ensuring the cleanliness of the transported substrate glass, and further improving the effect of dust-free transportation.

[0050] Further, the side guide assembly 600 is inserted through the side support frame 800 in the vertical direction. The bottom of the side guide assembly 600 is a guiding structure. The side guide assembly 600 is arranged on the top of the partition support plate 510. The side guide assembly 600 has two states through the lifting and pushing of the partition support plate 510;

[0051] In the first state, the side guide assembly 600 is pushed up by the partition support plate 510 so that the guiding structure at the bottom of the side guide assembly 600 is at the same horizontal height as the top surface of the first air floating assembly 200;

[0052] In the second state, the height of the guiding structure at the bottom of the side guide assembly 600 is lower than the height of the top surface of the first air floating assembly 200;

[0053] When placing the substrate glass on the first air floating assembly 200, the partition support plate 510 rises to separate the substrate glass, and at the same time pushes the side guide assembly 600 to rise. The guiding structure supports the substrate glass to maintain a preset air floating height, and the substrate glass is maintained at the preset air floating height by adjusting the first air floating assembly 200. Then, the partition support plate 510 is lowered so that the side guide assembly 600 is separated from the substrate glass, ensuring the stability of the substrate glass transportation.

[0054] Further, the side guide assembly 600 includes a push rod 610 and a guide rod 660 that are connected through the inside of the side support frame 800, a spring 620 sleeved on the outer wall of the push rod 610, a second lifting plate 630 fixed to the top end of the push rod 610, a fixing plate 650 fixed to the top end of the guide rod 660, a first fixing column 640 connecting the top surface of the fixing plate 650 and the bottom surface of the second lifting plate 630, an inclined baffle 670 connected to the bottom end of the guide rod 660, a limiting plate 671 fixed to the bottom surface of the inclined baffle 670, a plurality of second fixing columns 680 connected to the bottom surface of the inclined baffle 670, and a roller 690 rotatably sleeved on the outer wall of the second fixing column 680. The bottom end of the roller 690 is a frustum structure. The push rod 610 is arranged on the top of the partition support plate 510, and the spring 620 is connected between the top surface of the side support frame 800 and the bottom surface of the second lifting plate 630;

[0055] The push rod 610 is pushed upward by the partition support plate 510, so that the spring 620 is stretched. The inclined baffle 670 rises to guide and position the substrate glass, and the substrate glass is supported by the roller 690 until the substrate glass is air-floated and just separated from the roller 690. Then, the partition support plate 510 is lowered to separate from the push rod 610, and the spring 620 pulls the second lifting plate 630, so that the roller 690 is separated. The separation operation is simple and efficient.

[0056] Further, the dust separation assembly 500 further includes a vacuum cleaner 540 and a blower 550 embedded and fixed in the partition support plate 510. The vacuum cleaner 540 is arranged at the bottom of the blower 550, and the air outlet of the vacuum cleaner 540 is connected to the air inlet of the blower 550 in a through manner;

[0057] In the first state, the top surface height of the first air flotation assembly 200 is set at the middle height between the dust collector 540 and the air outlet fan 550;

[0058] By arranging a vacuum cleaner 540 and a blower 550 on the spacer plate 510, when the bottom surface of the substrate glass is floated, the vacuum cleaner 540 assists in sucking away the dust on the bottom surface, while the dust on the top surface of the substrate glass is blown away by the blower 550, thereby ensuring the cleanliness of the substrate glass and simplifying the cleaning operation.

[0059] Furthermore, the dust isolation assembly 500 further includes two connecting plates 560 fixed to one side of the spacer plate 510, a first lifting plate 570 fixed to one side of the connecting plate 560, a sealing plate 580 fixed across the top surfaces of the two first lifting plates 570, and a camera 590 disposed on the top surface of the sealing plate 580. The sealing plate 580 is lifted and lowered by the spacer plate 510 and has two states.

[0060] In the first state, the sealing plate 580 is disposed on the top of the side support frame 800;

[0061] In the second state, the sealing plate 580 is stopped between the two side support frames 800;

[0062] When the side support plates are raised, the sealing plates 580 are raised synchronously to open the side support frames 800 to facilitate the placement of the glass substrates. The sealing plates 580 are lowered along with the side support plates to seal the side support frames 800 to facilitate dust-free transportation of the glass substrates.

[0063] Further, the first air flotation assembly 200 includes a first air guide box 220, a second air guide box 230, and a third air guide box 240 that span across and are fixed to the top surface of the table body 100, an air outlet component 210 that is connected between the top surfaces of the first air guide box 220, the second air guide box 230, and the third air guide box 240, an air inlet pipe 250 that is connected to the bottom surfaces of the first air guide box 220, the second air guide box 230, and the third air guide box 240, respectively, and a sealing plate 260 that is fixed to both sides of the first air guide box 220, the second air guide box 230, the third air guide box 240, and the air outlet component 210;

[0064] Air is introduced into the air outlet component 210 through the first air guide box 220, the second air guide box 230 and the third air guide box 240 respectively, and is exported through the air outlet component 210 to realize three air outlet modes respectively, so as to flexibly adjust the air floating operation of the substrate glass, thereby ensuring the stability of the air floating transportation of the substrate glass.

[0065] Further, the air outlet component 210 includes a fixed box 211 fixed to the top surfaces of the first air guide box 220, the second air guide box 230, and the third air guide box 240, a plurality of first air pipes 212, second air pipes 213, and third air pipes 214 penetrating and connecting inside the fixed box 211. The bottom end of the first air pipe 212 is connected to the inside of the first air guide box 220 in a penetrating manner, the bottom end of the second air pipe 213 is connected to the inside of the second air guide box 230 in a penetrating manner, and the bottom end of the third air pipe 214 is connected to the inside of the third air guide box 240 in a penetrating manner. The plurality of first air pipes 212, second air pipes 213, and third air pipes 214 are arranged alternately one by one;

[0066] Through the alternately arranged first air pipes 212, second air pipes 213, and third air pipes 214, the three air outlet directions are evenly distributed, ensuring the stability of the air floating adjustment of the substrate glass.

[0067] Further, a first partition plate 221 is fixed to the inner wall of the first air guide box 220. The first partition plate 221 is arranged at the bottom of the bottom end of the first air pipe 212. A second partition plate 231 is fixed to the inner wall of the second air guide box 230. The second partition plate 231 is arranged at the bottom of the bottom end of the second air pipe 213. A third partition plate 241 is fixed to the inner wall of the third air guide box 240. The third partition plate 241 is arranged at the bottom of the bottom end of the third air pipe 214;

[0068] By providing the first partition plate 221, the second partition plate 231, and the third partition plate 241, the entering gas is prevented from directly filling into the first air pipe 212, the second air pipe 213, and the third air pipe 214, thereby ensuring the stability of the air outlet.

[0069] Further, the inclination angle between the first air pipe 212 and the inner bottom surface of the fixed box 211 is 30° - 60°. The second air pipe 213 is arranged in a mirror-image and alternating manner with the first air pipe 212;

[0070] Through the inclined and mirror-image arranged first air pipe 212 and second air pipe 213, the air can be discharged obliquely to control the translation of the substrate glass in two directions, improving the flexibility of controlling the translation of the substrate glass.

[0071] Further, the brush flipping assembly 700 includes two sets of sliding and flipping components respectively arranged on the top surfaces of the two side support frames 800, and a brush plate 760 connected between the sliding and flipping components;

[0072] The sliding and flipping component includes two fixing blocks 710 fixed to the top surface of the side support plate, a sliding rod 720 connected between the two fixing blocks 710, an electric slider 730 slidably sleeved on the outer walls of the two sliding rods 720, a second motor 740 fixed to the top surface of the electric slider 730, a flipping plate 750 connected to the rotating end of the second motor 740, and the brush plate 760 is fixed to the bottom surface of the flipping plate 750;

[0073] The brush plate 760 is flipped over to be flush with the top surface of the fixing box 211 , and then driven by the electric slider 730 to translate the brush plate 760 to brush and clean the top surface of the fixing box 211 , so as to ensure the stability of the air outlet on the top surface of the fixing box 211 .

[0074] Specifically, the sealing plate 580 is opened first, the substrate glass is placed on the top of the first air flotation assembly 200, and the side of the substrate glass is rolled and fitted between the rollers 690. The vacuum cleaner 540 and the blower 550 are started to suck and blow away the dust on the surface of the substrate glass, and then the air pump 900 is started to inflate the first air flotation assembly 200. A control valve is arranged inside the air pump 900 to control the gas to enter the first air guide box 220, the second air guide box 230 and the third air guide box 240 respectively through multiple air inlet pipes 250, and blown out to the top surface of the fixed box 211 through the first air pipe 212, the second air pipe 213 and the third air pipe 214. The buoyancy of the gas blowing blows up the substrate glass and just separates it from the roller 690.

[0075] Then, the first motor 520 is started to drive the spacer plate 510 to descend, thereby releasing the separation between the first air flotation assembly 200 and the second air flotation assembly 300. At the same time, the spacer plate 510 descends to drive the sealing plate 580 to descend, thereby sealing the opening when the glass substrate is placed. The spacer plate 510 descends and separates from the push rod 610. The spring 620 pulls the second lifting plate 630 to descend, and the second lifting plate 630 drives the fixing plate 650 to descend, thereby causing the limiting plate 671 and the roller 690 to descend and separate from the glass substrate.

[0076] The camera 590 is used to monitor whether there are scratches or dust on the surface of the substrate glass. If no abnormality occurs, the air volume of the first air pipe 212, the second air pipe 213 and the third air pipe 214 is adjusted to push the substrate glass to translate onto the second air flotation assembly 300, and each position sensor 400 is used to monitor the position where the substrate glass passes. After the substrate glass completely reaches the second air flotation assembly 300, the same air pump 900 inflates the interior of the second air flotation assembly 300 to control the translational transportation of the substrate glass, and the second motor 740 is started to drive the spacer plate 510 to rise again to continue to convey new substrate glass and separate it from the substrate glass being conveyed, thereby ensuring the stability of the substrate glass conveyance.

[0077] It is obvious to those skilled in the art that the present invention is not limited to the details of the above-described exemplary embodiments, and that the present invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the present invention. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be embraced within the present invention. Any reference signs in the claims should not be construed as limiting the claims involved.

Claims

1. A conveying device for liquid crystal substrate processing, characterized in that, It includes a table body with a frame structure on the top surface, an air pump machine set at the bottom of the table body, two side support frames mirror-fixed on the top surface of the table body, a first air floating mechanism and a second air floating mechanism spanning across the top surface of the frame structure of the table body, a dust separation component penetrating and connecting inside the table body, a side guide component penetrating and connecting on the top surface of the side support frames, a brush flipping component spanning across the top surfaces of the two side support frames. The dust separation component is inserted between the first air floating mechanism and the second air floating mechanism. The first air floating mechanism includes multiple groups of first air floating components, and the second air floating mechanism includes multiple groups of second air floating components. The first air floating components and the second air floating components have the same structure. Position sensors are arranged between adjacent two groups of first air floating components and between adjacent two groups of second air floating components. The air pump machine is respectively connected in through connection with the inside of the first air floating components and the second air floating components; The dust separation component includes a partition plate inserted between the first air floating component and the second air floating component, tooth grooves opened on both sides of the partition plate, two first motors fixed on the bottom surface of the table body, gears connected to the rotating ends of the first motors, and the gears are meshed and connected with the tooth grooves on one side. The partition plate is driven by the gears to have two states; In the first state, the partition plate rises and is separated between the first air floating component and the second air floating component, and the top surface of the partition plate is inserted between the two side support frames; In the second state, the partition plate descends and the top surface is flush with the top surface of the table body.

2. The conveying device for liquid crystal substrate processing according to claim 1, wherein: The side guide component is inserted vertically through the inside of the side support frame. The bottom of the side guide component is a guiding structure. The side guide component is arranged on the top of the partition plate. The side guide component is pushed up and down by the partition plate to have two states; In the first state, the side guide component is pushed up by the partition plate so that the guiding structure at the bottom of the side guide component is at the same horizontal height as the top surface of the first air floating component; In the second state, the height of the guiding structure at the bottom of the side guide component is lower than the height of the top surface of the first air floating component.

3. The conveying device for liquid crystal substrate processing according to claim 2, wherein: The side guide component includes a push rod and a guide rod penetrating and connecting inside the side support frame, a spring sleeved on the outer wall of the push rod, a second lifting plate fixed at the top end of the push rod, a fixing plate fixed at the top end of the guide rod, a first fixing column connecting between the top surface of the fixing plate and the bottom surface of the second lifting plate, an inclined baffle plate connected to the bottom end of the guide rod, a limiting plate fixed on the bottom surface of the inclined baffle plate, multiple second fixing columns connected to the bottom surface of the inclined baffle plate, rollers rotatably sleeved on the outer walls of the second fixing columns, the bottom ends of the rollers are frustum-shaped structures, the push rod is arranged on the top of the partition plate, and the spring is connected between the top surface of the side support frame and the bottom surface of the second lifting plate.

4. A conveying device for processing a liquid crystal substrate according to claim 1, characterized in that: The dust separation component further includes a vacuum cleaner and an air outlet fan embedded and fixed inside the partition plate. The vacuum cleaner is arranged at the bottom of the air outlet fan, and the air outlet of the vacuum cleaner is connected in through connection with the air inlet of the air outlet fan; In the first state, the height of the top surface of the first air floating component is set at the middle height between the vacuum cleaner and the air outlet fan.

5. A conveying device for processing a liquid crystal substrate according to claim 1, characterized in that: The dust separation component further includes two connecting plates fixed on one side of the partition plate, a first lifting plate fixed on one side of the connecting plates, a sealing plate spanning and fixed on the top surfaces of the two first lifting plates, a camera arranged on the top surface of the sealing plate. The sealing plate has two states through the lifting of the partition plate; In the first state, the sealing plate is arranged on the top of the side support frame; In the second state, the sealing plate stops between the two side support frames.

6. The conveying device for liquid crystal substrate processing according to claim 1, wherein: The first air flotation assembly includes a first air guide box, a second air guide box, and a third air guide box that are fixedly spanned across the top surface of the table body, an air outlet component that is connected through and between the top surfaces of the first air guide box, the second air guide box, and the third air guide box, air inlet pipes that are respectively connected through and to the bottom surfaces of the first air guide box, the second air guide box, and the third air guide box, and sealing plates that are fixedly enclosed on both sides of the first air guide box, the second air guide box, the third air guide box, and the air outlet component.

7. The conveying device for liquid crystal substrate processing according to claim 6, wherein: The air outlet component includes a fixed box that is fixed on the top surfaces of the first air guide box, the second air guide box, and the third air guide box, a plurality of first air pipes, second air pipes, and third air pipes that are connected through the inside of the fixed box, the bottom end of the first air pipe is connected through and to the inside of the first air guide box, the bottom end of the second air pipe is connected through and to the inside of the second air guide box, the bottom end of the third air pipe is connected through and to the inside of the third air guide box, and the plurality of first air pipes, second air pipes, and third air pipes are arranged staggered one by one.

8. A conveying device for liquid crystal substrate processing according to claim 7, characterized in that: A first partition is fixed to the inner wall of the first air guide box, the first partition is arranged at the bottom of the bottom end of the first air pipe, a second partition is fixed to the inner wall of the second air guide box, the second partition is arranged at the bottom of the bottom end of the second air pipe, a third partition is fixed to the inner wall of the third air guide box, and the third partition is arranged at the bottom of the bottom end of the third air pipe.

9. A conveying device for liquid crystal substrate processing according to claim 8, wherein: The inclination angle between the inner bottom surface of the fixed box of the first air pipe is 30°-60°, and the second air pipe is arranged mirror-image staggered with the first air pipe.

10. The conveying device for liquid crystal substrate processing according to claim 1, characterized in that: The turning and brushing assembly includes two groups of sliding and turning components that are respectively arranged on the top surfaces of two side support frames, and a brush plate that is connected between the sliding and turning components; The sliding and turning component includes two fixed blocks that are fixed on the top surface of the side support plate, a sliding rod that is connected between the two fixed blocks, an electric slider that is slidably sleeved on the outer walls of the two sliding rods, a second motor that is fixed on the top surface of the electric slider, a turning plate that is connected to the rotating end of the second motor, and the brush plate is fixed to the bottom surface of the turning plate.

Images