Vacuum helium detection equipment for detecting air tightness of product

Through the design of vacuum helium detection equipment, the reversing air guide components composed of hollow tubes and regulatory air conduits are used to solve the problems of low efficiency and workpiece damage in traditional detection methods, and efficient and accurate product air tightness detection is achieved.

CN120293432AInactive Publication Date: 2025-07-11SHENZHEN LUZHUO TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202510688853.7
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-05-27
Publication Date
2025-07-11
Estimated Expiration
Not applicable · inactive patent

AI Technical Summary

Technical Problem

Traditional product airtightness detection methods are inefficient and are prone to damage workpieces, and multiple disassembly and assembly results in too long time.

Method used

A vacuum helium detection device is designed, using a reversing air component composed of a hollow tube and a control air tube to achieve vacuuming and helium filling operations without disassembling the product, and ensure that the product is accurately connected to the end of the hollow tube through positioning and moving parts.

Benefits of technology

It improves detection efficiency, avoids workpiece damage, shortens detection time, and improves the accuracy and operating efficiency of airtightness detection.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention discloses vacuum helium detection equipment for detecting the airtightness of a product, and relates to the technical field of helium detection, the vacuum helium detection equipment comprises a vacuum box, a helium mass spectrometer leak detector for detecting the leakage of helium in the vacuum box and an assembly cover are fixed on the outer wall of one end of a closed structure of the vacuum box, the assembly cover is in threaded connection with the inner wall of an opening structure, and a hollow pipe is axially inserted into the assembly cover in a penetrating manner; the two butt-joint pipes are connected with an inflator pump and a vacuum pump respectively, an adjusting air guide pipe extending into the hollow pipe is in threaded connection in the threaded hole, a plurality of rubber sealing rings attached to the inner wall of the hollow pipe in a sliding mode are fixed to the outer wall of the adjusting air guide pipe, and a plurality of air inlet holes are formed in the radial outer wall of the end, close to an opening structure of the adjusting air guide pipe, of the adjusting air guide pipe. Due to the arrangement of the reversing air guide part composed of the hollow pipe and the adjusting air guide pipe, the problems that due to the fact that multiple stations exist in the detection process, products are damaged due to repeated disassembly and assembly, a large amount of time needs to be consumed for disassembly after air tightness detection of the products is completed, and the operation efficiency is low are solved.
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Description

Technical Field

[0001] The present invention relates to the technical field of helium leak detection, and particularly to a vacuum helium leak detection device for detecting the airtightness of products. Background Art

[0002] Helium leak detection is a detection method. The workpiece to be detected is placed in a vacuum chamber with certain vacuum requirements. Some through holes on the workpiece are blocked. After evacuating the workpiece to be detected, helium gas with a certain pressure is filled. The helium mass spectrometer leak detector detects whether there is helium gas in the vacuum chamber. If the workpiece to be detected has leaks, the helium gas leaking into the vacuum chamber can be detected by the helium mass spectrometer leak detector.

[0003] The traditional detection method is to manually clamp the workpiece, then perform operations such as evacuating and filling helium gas, and then remove the workpiece after the operation is completed. The efficiency of such an operation is very low, and since there are many workstations in the detection process, multiple disassembly and assembly operations are likely to cause damage to the workpiece. Therefore, a vacuum helium leak detection device for detecting the airtightness of products is designed here to solve the above problems. Summary of the Invention

[0004] The purpose of the present invention is to provide a vacuum helium leak detection device for detecting the airtightness of products to solve the problems raised in the above background art.

[0005] To achieve the above purpose, the present invention provides the following technical solution: A vacuum helium leak detection device for detecting the airtightness of products, comprising:

[0006] A vacuum chamber, one end of the vacuum chamber is a closed structure, and the other end is an open structure. A helium mass spectrometer leak detector for detecting helium gas leakage in the vacuum chamber is fixed on the outer wall of the closed end of the vacuum chamber. The detection port of the helium mass spectrometer leak detector penetrates through the side wall of the closed structure of the vacuum chamber and communicates with the internal space of the vacuum chamber.

[0007] An assembly cover, one end of the vacuum chamber is a closed structure, and the other end is an open structure. A helium mass spectrometer leak detector for detecting helium gas leakage in the vacuum chamber is fixed on the outer wall of the closed end thereof;

[0008] The assembly cover is threadedly connected to the inner wall of the open structure, and the closed space formed between the assembly cover and the inner wall of the vacuum chamber is the detection space. A rubber pad that closely fits the inner wall of the vacuum chamber is provided on the side wall of the assembly cover facing the detection space;

[0009] A hollow tube is axially inserted through the assembly cover. Two butt tubes distributed in a staggered manner are radially connected to one end of the hollow tube located outside the detection space. The two butt tubes are respectively connected to an air inflation pump and a vacuum pump. The butt tube connected to the vacuum pump is connected to a shunt tube that penetrates through the assembly cover and enters the detection space. The air inlet of the air inflation pump is connected to a helium gas tank.

[0010] The adjusting air duct is arranged inside the hollow tube. One end located outside the hollow tube is a closed structure, and one end located inside the hollow tube is an open structure;

[0011] A plurality of rubber sealing rings that are slidably attached to the inner wall of the hollow tube are fixed to the outer wall of the adjusting air duct. A plurality of air inlet holes are formed in the radial outer wall near the open structure end of the adjusting air duct, and the plurality of air inlet holes are located between two rubber sealing rings near the open structure end of the adjusting air duct.

[0012] Due to the provision of the air direction changing and guiding component composed of the hollow tube and the adjusting air duct, the operation of first evacuating the product and then filling it with helium can be carried out without disassembling the product, which solves the problems that due to there being many workstations in the detection process, multiple disassembly and assembly operations cause damage to the product, and it also leads to a large amount of time being wasted in removing the product after the airtightness detection of the product is completed, and the operation efficiency is relatively low.

[0013] Furthermore, three rubber sealing rings are provided.

[0014] The space between two rubber sealing rings near the open structure end of the adjusting air duct is a gas storage space. The space between two rubber sealing rings near the open structure end of the adjusting air duct is the first isolation space, and the space between one rubber sealing ring near the open structure end of the adjusting air duct and the side wall of the closed structure inside the hollow tube is the second isolation space.

[0015] Furthermore, a positioning component is further included. The positioning component includes:

[0016] A portal-shaped positioning frame;

[0017] And two I-shaped shafts inserted through the two bottom positions of the portal-shaped positioning frame. The axial ends of the I-shaped shafts are symmetrically distributed with the portal-shaped positioning frame as the center. Support rings are slidably sleeved on both axial ends of the I-shaped shafts;

[0018] Support plates are fixed to the opposite side walls of two support rings on the same side of the two I-shaped shafts. The upper ends of the four support plates and the inner top wall of the portal-shaped positioning frame form a clamping space for clamping the product to be detected.

[0019] Furthermore, a plurality of stop bars are fixed to the sides of the support plates at the upper ends of the two support rings on the same I-shaped shaft, which are far away from each other.

[0020] Further, a plugging hole is formed in a side wall of the support ring away from the support plate. A positioning rod is slidably plugged in the plugging hole. A C-shaped clamping interface is formed at one end of the positioning rod extending into the support ring. A fan-shaped groove is formed in an outer wall of the I-shaped shaft. A plurality of cylindrical blocks evenly spaced are fixed between side walls on both sides in the fan-shaped groove. The support ring rotates around the I-shaped shaft as a rotation center. The end of the support plate is lifted and lowered, and products of different sizes are tightly clamped in the clamping space. The end of the positioning rod is pushed into the fan-shaped groove to clamp the C-shaped clamping interface on an outer wall of a cylindrical block at a corresponding position. The support ring stops rotating, and the height of the end of the support plate is limited.

[0021] Further, a slider is fixed to a radial outer wall of the positioning rod, and a sliding groove slidably clamped with the slider is formed in an inner wall of the plugging hole.

[0022] Further, it further includes a moving part of the hoisting and positioning part;

[0023] The moving part includes a moving frame. The moving frame is of an I-shaped structure, and rollers I capable of rolling and fitting along an inner wall of the vacuum chamber are rotatably provided on both sides of an end of the I-shaped structure. A cross plate is fixed to an upper end of a side wall of the moving frame. One end of the cross plate is hinged with a first hinge rod. One end of the first hinge rod extends obliquely downward toward a side close to the moving frame. A vertical column is rotatably provided at an upper end of the portal-shaped positioning frame. One end of the first hinge rod is hinged with an outer wall of the vertical column.

[0024] Further, a buffer hole is formed at one end of the cross plate close to the moving frame. Two cross bars are fixed between side walls on both sides in the buffer hole. A sliding seat is slidably sleeved between outer walls of the two cross bars. Springs located on both sides of the sliding seat are sleeved on outer walls of the cross bars. A second hinge rod is hinged between a bottom wall of the sliding seat and an upper wall of the hinge plate I.

[0025] Further, an extension part extends from a bottom of a side wall of the moving frame, and a mounting notch is formed at an end of the extension part. A roller II that rolls and fits along an inner wall of the vacuum chamber is installed in the mounting notch.

[0026] Compared with the prior art, the beneficial effects of the present invention are:

[0027] The present invention is a vacuum helium leak detection device for detecting air tightness of a product. Since a flow direction changing air guiding part composed of a hollow tube and an adjusting air guiding tube is provided, the product can be vacuumed and then filled with helium without disassembling the product, solving the problems that due to many workstations in the detection process, multiple disassembly and assembly cause damage to the product, and it takes a lot of time to remove the product after the air tightness detection of the product is completed, resulting in low operation efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a schematic assembly diagram of the main structure of the present invention;

[0029] Figure 2 Schematic diagram of the assembly cover structure of the present invention;

[0030] Figure 3 Cross-sectional view of the hollow tube structure of the present invention;

[0031] Figure 4 Schematic diagram of the adjustable air guide tube structure of the present invention;

[0032] Figure 5 Schematic diagram of the moving part and positioning part structure of the present invention;

[0033] Figure 6 of the present invention Figure 5 Enlarged view of the structure at A in;

[0034] Figure 7 Schematic diagram of the moving frame structure of the present invention;

[0035] Figure 8 Partial cross-sectional view of the positioning part of the present invention;

[0036] Figure 9 Schematic diagram of the positioning rod structure of the present invention;

[0037] Figure 10 Partial cross-sectional view of the I-shaped shaft of the present invention.

[0038] In the figure: 1, vacuum chamber; 2, assembly cover; 3, hollow tube; 31, adjustable air guide tube; 32, rubber sealing ring; 4, vacuum pump; 5, inflation pump; 6, gantry positioning frame; 61, I-shaped shaft; 62, support plate; 63, support ring; 64, stop bar; 65, positioning rod; 66, cylindrical block; 7, cross plate; 71, second articulated rod; 72, first articulated rod; 73, moving frame; 74, first roller; 75, sliding seat; 76, cross bar. Detailed implementation manners

[0039] The technical solutions in the embodiments of the present invention will be clearly and completely described below. Apparently, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0040] Embodiment. This embodiment provides a vacuum helium leak detection device for detecting the airtightness of products, including:

[0041] Vacuum chamber 1, one end of the vacuum chamber 1 is a closed structure, and one end is an open structure. Assembly cover 2, the assembly cover 2 is threadedly connected to the inner wall of the open structure. The enclosed space formed between the assembly cover 2 and the inner wall of the vacuum chamber 1 is the detection space. The product is fed into the vacuum chamber 1 from the opening, and the assembly cover 2 is screwed into the vacuum chamber 1 to provide a relatively enclosed detection space to meet the product detection requirements. As Figure 1 shown.

[0042] The assembly cover 2 is axially inserted with a hollow tube 3. One end of the hollow tube 3 located outside the detection space is radially connected with two butt tubes distributed in a staggered manner. The two butt tubes are respectively connected to an air inflation pump 5 and a vacuum pump 4. The butt tube connected to the vacuum pump 4 is connected with a shunt tube that passes through the assembly cover 2 and enters the detection space. The air inlet of the air inflation pump 5 is connected to a helium gas tank. As Figure 1 shown, when the product is placed in the detection space, the product detection port should be aligned with the end of the frustum-shaped structure of the hollow tube 3 on the assembly cover 2. Since one end of the hollow tube 3 located in the detection space is in a frustum-shaped structure, as Figure 2 shown, as the assembly cover 2 is continuously screwed into the vacuum chamber 1, finally the end of the hollow tube 3 can be inserted into the product detection port, and the outer wall of the frustum-shaped structure of the hollow tube 3 can abut against the inner wall of the product detection port to block the product detection port and prevent the internal space of the product from communicating with the detection space.

[0043] One end of the hollow tube 3 located outside the detection space is provided with a threaded hole, and a regulating air guide tube 31 extending into the hollow tube 3 is threadedly connected in the threaded hole. One end of the regulating air guide tube 31 located outside the hollow tube 3 is a closed structure, and one end located inside the hollow tube 3 is an open structure. A plurality of rubber sealing rings 32 that are slidably fitted with the inner wall of the hollow tube 3 are fixed on the outer wall of the regulating air guide tube 31. A plurality of air inlet holes are radially formed in the outer wall near the open end of the regulating air guide tube 31, and the plurality of air inlet holes are located between two rubber sealing rings 32 near the open end of the regulating air guide tube 31. As Figure 3 and Figure 4 shown. According to the requirement of first evacuating the product and then filling it with helium, the air guide component composed of the hollow tube 3 and the regulating air guide tube 31 rotates and adjusts the regulating air guide tube 31 along the axial direction of the threaded hole of the hollow tube 3, so that the regulating air guide tube 31 adjusts its position along the axial direction of the hollow tube 3. The plurality of rubber sealing rings 32 on the outer wall of the regulating air guide tube 31 synchronously adjust their positions, and the air inlet holes are changed in position between the two butt tubes.

[0044] Align the air inlet hole of the regulating air guide tube 31 with the butt tube connected to the vacuum pump 4, and the vacuum pump 4 evacuates the air in the product and the detection space. Subsequently, align the air inlet hole of the regulating air guide tube 31 with the butt tube connected to the air inflation pump 5, and fill the helium gas in the external helium gas tank into the product interior.

[0045] Then, a helium mass spectrometer leak detector for detecting helium leakage in the vacuum chamber 1 is fixed on the outer wall at one end of the closed structure of the vacuum chamber 1. The detection port of the helium mass spectrometer leak detector penetrates through the side wall of the closed structure of the vacuum chamber 1 and communicates with the internal space of the vacuum chamber 1. After helium leaks, the helium reaches the ion generator in the helium mass spectrometer leak detector and is ionized by the electron beam emitted by the filament. After the ions are accelerated by a specific voltage, they fly towards the magnetic field in the helium mass spectrometer leak detector for deflection. According to different masses, different deflection radii are obtained, and the helium ions are screened to reach the analysis tube, generating a microcurrent. After high-performance low-noise amplification, a readable current signal is obtained, and the leak rate relationship is established through calibration, thereby determining the leak rate.

[0046] Due to the provision of a flow-direction-changing gas-conducting component composed of a hollow tube 3 and an adjusting gas-conducting pipe 31, the operation of first evacuating and then filling helium into the product can be carried out without disassembling the product, solving the problems that due to there being many workstations in the detection process, multiple disassembly and assembly operations cause damage to the product, and it also leads to a large amount of time wasted in removing the product after the airtightness detection of the product is completed, and the operation efficiency is relatively low.

[0047] Generally, the volume of the vacuum chamber 1 is determined according to the volume of the workpiece to be detected. The specifications of the vacuum chamber 1 for helium detection are not unified, and a corresponding detection vacuum chamber 1 needs to be made for each product to be detected, resulting in too high inspection costs. Therefore, according to the size of the product, the assembly cover 2 is continuously screwed into the vacuum chamber 1. When the end of the hollow tube 3 cannot be further inserted into the product detection port, the detection space cannot be further reduced at this time. This not only reduces the connection of the gas path but also minimizes the detection space to the greatest extent to avoid the vacuum pump 4 taking too long to evacuate. The helium mass spectrometer leak detector detects in the detection space limited to the greatest extent, and the detection accuracy is high.

[0048] A rubber pad that closely fits the inner wall of the vacuum chamber 1 is provided on the side wall of the assembly cover 2 facing the detection space. The outer diameter of the rubber pad is slightly larger than the inner diameter of the vacuum chamber 1. As long as the assembly cover 2 is screwed into the vacuum chamber 1, the outer diameter of the rubber pad can completely and closely fit on the inner wall of the vacuum chamber 1, ensuring that the detection space is relatively airtight, thereby improving the helium detection accuracy.

[0049] There are three rubber sealing rings 32, as Figure 4 shown. The space between the two rubber sealing rings 32 close to the opening structure of the adjusting gas-conducting pipe 31 is the gas storage space. When the docking pipe connecting the air inlet hole of the adjusting gas-conducting pipe 31 to the vacuum pump 4 is adjusted to be directly opposite, the two rubber sealing rings 32 forming the gas storage space can isolate the docking pipe connected to the inflation pump 5, avoiding pressure relief and air mixing.

[0050] Of course, when the docking pipe connecting the air inlet hole of the adjusting gas-conducting pipe 31 to the inflation pump 5 is adjusted to be directly opposite, the two rubber sealing rings 32 forming the gas storage space can isolate the docking pipe connected to the vacuum pump 4, avoiding pressure relief and air mixing.

[0051] The space between two rubber seals 32 near the opening structure of the adjustment air duct 31 is the isolation space I, and the space between one rubber seal 32 near the opening structure of the adjustment air duct 31 and the side wall of the closed structure inside the hollow tube 3 is the isolation space II. When the docking pipe connecting the gas storage space and the vacuum pump 4 is adjusted to be in alignment, the isolation space I and the isolation space II are used to block the entry of external air, so as to prevent the concentration of helium gas from being insufficient after air is mixed in, which affects the detection accuracy.

[0052] Since the product is manufactured with different external shapes according to user requirements, the positions of the detection ports of products of different sizes and volumes are uncertain. Therefore, placing the product in the vacuum chamber 1 without any limit and accurately docking it with the end of the hollow tube 3 has a large degree of uncertainty, which affects the efficient vacuum pumping and helium filling operations.

[0053] Therefore, to solve the above problems, a positioning component is also included. The positioning component includes a portal-shaped positioning frame 6 and two I-shaped shafts 61 inserted through the two bottom positions of the portal-shaped positioning frame 6. The axial ends of the I-shaped shafts 61 are symmetrically distributed with the portal-shaped positioning frame 6 as the center. Support rings 63 are slidably sleeved on both axial ends of the I-shaped shafts 61. On the opposite side walls of the two support rings 63 on the same side of the two I-shaped shafts 61, support plates 62 are fixed. The upper ends of the four support plates 62 and the inner side wall of the portal-shaped positioning frame 6 form a clamping space for the product to be detected. As Figure 5 shown, according to the width of the product to be detected, the support rings 63 are slid along the outer wall of the I-shaped shafts 61 to ensure that the support part composed of the four support plates 62 can support the product.

[0054] And on the upper ends of the support plates 62 on the side walls of the two support rings 63 on the same I-shaped shaft 61, which are far away from each other, a plurality of stop bars 64 are fixed. The stop bars 64 located outside the clamping space and the portal-shaped positioning frame 6 form an anti-falling frame to prevent the product from sliding off laterally.

[0055] Since the products are of different sizes, after the product is placed on the four support plates 62, in order to ensure the stable placement of the product, a plug hole is provided on the side wall of the support ring 63 away from the support plate 62. A positioning rod 65 is slidably inserted into the plug hole. At the end of the positioning rod 65 extending into the support ring 63, a C-shaped clamping interface is provided. Sector-shaped grooves are provided on the outer wall of the I-shaped shaft 61, and a plurality of columnar blocks 66 evenly spaced are fixed between the two side walls of the sector-shaped grooves. The support ring 63 rotates with the I-shaped shaft 61 as the rotation center, and the end of the support plate 62 is lifted and lowered to ensure that products of different sizes and volumes can adjust their heights in the inner space of the portal-shaped positioning frame 6 to ensure that the detection ports of the products are aligned with the end of the hollow tube 3. Subsequently, the end of the positioning rod 65 is pushed into the sector-shaped groove to clamp the C-shaped clamping interface on the outer wall of the corresponding columnar block 66, and the support ring 63 stops rotating, and the height of the end of the support plate 62 is restricted to ensure that the detection ports of the products are aligned with the end of the hollow tube 3. AsFigure 8 , Figure 9 and Figure 10 shown.

[0056] Furthermore, a slider is fixed on the radial outer wall of the positioning rod 65, and a sliding groove is opened on the inner wall of the plug-in hole for sliding engagement with the slider. The sliding engagement between the slider and the sliding groove does not affect the sliding of the positioning rod 65 along the plug-in hole, and at the same time prevents the positioning rod 65 from detaching from the plug-in hole and being lost.

[0057] Since the weight of products of different sizes is different and larger products are heavier, in order to facilitate loading and unloading, a moving part of the lifting positioning part is also included, and the moving part is used to assist in moving the positioning part that clamps the product.

[0058] The moving parts include a moving frame 73, which is an I-shaped structure, and rollers 74 that can roll and fit along the inner wall of the vacuum box 1 are rotatably provided on both sides of the ends of the I-shaped structure. A horizontal plate 7 is fixed to the upper end of the side wall of the moving frame 73, and a hinge rod 72 is hinged at the end of the horizontal plate 7. The end of the hinge rod 72 extends obliquely downward to the side close to the moving frame 73. A column is rotatably provided at the upper end of the door-shaped positioning frame 6, and the end of the hinge rod 72 is hinged to the outer wall of the column. Figure 5 and Figure 7 As shown. The hinged rod 72 and the door-type positioning frame 6 are rotated around their respective hinged positions, so that the angle between the hinged rod 72 and the cross plate 7 and the angle between the hinged rod 72 and the door-type positioning frame 6 are increased, and the height of the door-type positioning frame 6 is lowered, so as to facilitate lifting heavier products onto the four support plates 62. Then, the hinged rod 72 and the door-type positioning frame 6 are rotated in the opposite direction around their respective hinged positions to raise the height of the product clamped on the inner wall of the door-type positioning frame 6, and the support ring 63 is slid along the outer wall of the I-axis 61, the support ring 63 is rotated on the outer wall of the I-axis 61, and the door-type positioning frame 6 is rotated with the column as the axial direction to correct the position of the product detection port and the end of the hollow tube 3, so as to ensure that the product detection port is accurately docked with the end of the hollow tube 3.

[0059] At the same time, by using the rollers 74 at the upper and lower ends of the moving frame 73 to roll along the inner wall of the vacuum box 1, the product can be moved into the detection space to facilitate loading and unloading.

[0060] In addition, a buffer hole is provided at one end of the horizontal plate 7 near the movable frame 73, and two horizontal bars 76 are fixed between the side walls on both sides of the buffer hole. A sliding seat 75 is slidably sleeved between the outer walls of the two horizontal bars 76, and springs located on both sides of the sliding seat 75 are sleeved on the outer walls of the horizontal bar 76. A hinge rod 2 71 is hinged between the bottom wall of the sliding seat 75 and the upper wall of the hinge plate 1. Figure 6As shown, by utilizing the elastic potential energy of the spring, the sliding seat 75 is pushed towards the side close to the moving frame 73, so that the first hinge rod 72 is flipped around the hinge position with the cross plate 7 through the second hinge rod 71 to reduce the included angle, facilitating the staff to lift the portal positioning frame 6 with the assistance of the elastic force and saving effort.

[0061] Furthermore, in order to enhance the moving stability of the moving component, an extension part extends from the bottom of the side wall of the moving frame 73, and an installation notch is formed at the end of the extension part. A second roller that is in rolling contact with the inner wall of the vacuum box 1 is installed in the installation notch. As Figure 7 shown, an extension part is added to the bottom of the moving frame 73 and the second roller is rotatably arranged at the end of the extension part, expanding the rolling coverage area and enhancing the stability of the moving frame 73 during movement.

[0062] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A vacuum helium leak detection device for detecting the airtightness of a product, characterized in that, Including: A vacuum chamber (1) with one end being a closed structure and the other end being an open structure. A helium mass spectrometer for detecting helium leakage in the vacuum chamber (1) is fixed on the outer wall of the closed - end of the vacuum chamber (1). An assembly cover (2) which is thread - connected to the inner wall of the open structure and forms a detection space with the inner wall of the vacuum chamber (1). A hollow tube (3) axially inserted through the assembly cover (2). At one end of the hollow tube (3) located outside the detection space, two butt - joint tubes distributed in a staggered manner are radially connected. The two butt - joint tubes are respectively connected to an air - charging pump (5) and a vacuum pump (4). The butt - joint tube connected to the vacuum pump (4) is connected to a shunt tube that passes through the assembly cover (2) and enters the detection space. An adjusting air duct (31) arranged inside the hollow tube (3). One end of the adjusting air duct (31) located outside the hollow tube (3) is a closed structure, and one end located inside the hollow tube (3) is an open structure. A plurality of rubber sealing rings (32) that are slidably fitted to the inner wall of the hollow tube (3) are fixed on the outer wall of the adjusting air duct (31). A plurality of air intake holes are formed on the radially outer wall near the open - end of the adjusting air duct (31), and the plurality of air intake holes are located between two rubber sealing rings (32) near the open - end of the adjusting air duct (31).

2. The vacuum helium leak detection device for detecting the airtightness of a product according to claim 1, wherein: There are three rubber sealing rings (32). The space between the two rubber sealing rings (32) near the open - end of the adjusting air duct (31) is a gas storage space. The space between the two rubber sealing rings (32) near the open - end of the adjusting air duct (31) is an isolation space one. The space between one rubber sealing ring (32) near the open - end of the adjusting air duct (31) and the side wall of the closed structure inside the hollow tube (3) is an isolation space two.

3. The vacuum helium leak detection equipment for detecting the airtightness of a product according to claim 1, characterized in that: It further includes a positioning component, and the positioning component includes: A portal - shaped positioning frame (6); And two I - shaped shafts (61) inserted through the two bottom positions of the portal - shaped positioning frame (6). The axial two ends of the I - shaped shafts (61) are symmetrically distributed with the portal - shaped positioning frame (6) as the center. Support rings (63) are slidably sleeved on the axial two ends of the I - shaped shafts (61). On the opposite side walls of two support rings (63) on the same side of the two I - shaped shafts (61), support plates (62) are fixed. The upper ends of the four support plates (62) and the inner top wall of the portal - shaped positioning frame (6) form a clamping space for clamping the product to be detected.

4. The vacuum helium leak detection device for detecting the airtightness of a product according to claim 3, characterized in that: On the upper ends of the support plates (62) on the side walls of the two support rings (63) on the same I - shaped shaft (61) and on the side away from each other, a plurality of stop rods (64) are fixed.

5. The vacuum helium leak detection device for detecting the airtightness of a product according to claim 3, characterized in that: On the side wall of the support ring (63) away from the support plate (62), a plug - in hole is formed. A positioning rod (65) is slidably inserted into the plug - in hole, and a C - shaped clamping interface is formed at one end of the positioning rod (65) extending into the support ring (63). The outer wall of the I-shaped shaft (61) is provided with a sector-shaped groove, and a plurality of cylindrical blocks (66) evenly spaced are fixed between the two side walls of the sector-shaped groove. The support ring (63) rotates around the I-shaped shaft (61), and the end of the support plate (62) rises and falls, and products of different sizes are tightly clamped in the clamping space. The end of the positioning rod (65) is pushed into the sector-shaped groove to clamp the C-shaped clamping interface on the outer wall of the cylindrical block (66) at the corresponding position, and the support ring (63) stops rotating.

6. The vacuum helium leak detection device for detecting the airtightness of a product according to claim 5, characterized in that: A slider is fixed on the outer wall of the positioning rod (65) in the radial direction, and a sliding groove for sliding and clamping with the slider is opened on the inner wall of the insertion hole.

7. The vacuum helium leak detection device for detecting the airtightness of a product according to claim 5, characterized in that: It also includes a moving part of the hoisting and positioning component; The moving part includes a moving frame (73). The moving frame (73) is of I-shaped structure, and a roller one (74) capable of rolling and fitting along the inner wall of the vacuum chamber (1) is rotatably provided on both sides of the end of the I-shaped structure. A cross plate (7) is fixed to the upper end of the side wall of the moving frame (73). One end of the cross plate (7) is hinged with a hinge rod one (72). The end of the hinge rod one (72) extends obliquely downward towards the side close to the moving frame (73). A vertical column is rotatably provided at the upper end of the portal-shaped positioning frame (6), and the end of the hinge rod one (72) is hinged to the outer wall of the vertical column.

8. The vacuum helium leak detection device for detecting the airtightness of a product according to claim 7, characterized in that: A buffer hole is opened at one end of the cross plate (7) close to the moving frame (73), and two cross bars (76) are fixed between the two side walls of the buffer hole; A sliding seat (75) is slidably sleeved between the outer walls of the two cross bars (76). Springs are sleeved on the outer walls of the cross bars (76) on both sides of the sliding seat (75). A hinge rod two (71) is hinged between the bottom wall of the sliding seat (75) and the upper wall of the hinge plate one.

9. The vacuum helium leak detection equipment for detecting the airtightness of a product according to claim 7, characterized in that: The bottom of the side wall of the moving frame (73) extends with an extension part, and an installation notch is opened at the end of the extension part. A roller two that rolls and fits along the inner wall of the vacuum chamber (1) is installed in the installation notch.