Excimer light source driving control circuit and laser equipment

Abstract

The invention discloses an excimer light source driving control circuit and laser equipment. The circuit includes: a controller; the light source branch comprises an excimer light source and a transformer, and the excimer light source is connected with the secondary side of the transformer in series; the driving branch circuit is connected between the pulse control end of the controller and the primary side of the transformer, is connected with power supply voltage and is used for receiving the pulse control signal output by the controller so as to generate driving current and drive the excimer light source to emit light; the temperature detection branch is connected with the temperature feedback end of the controller and used for detecting the light source temperature of the excimer light source and feeding back the light source temperature to the controller; and the temperature adjusting branch is connected with the adjusting control end of the controller and is used for receiving an adjusting control signal generated by the controller based on the temperature of the light source so as to adjust the temperature of the light source branch. Through the circuit, the excimer light source can be efficiently and stably driven, efficient operation of the excimer light source in a suitable environment is maintained, and the conversion efficiency and stability of the excimer light source are improved.

Description

Technical Field

[0001] This application relates to the field of laser technology, and particularly to an excimer light source drive control circuit and a laser device. Background Art

[0002] Under the action of a high-frequency electric field, a 308nm excimer laser light source forms a compound xenon chloride (XeCl) in an unstable excimer state through the combination of chlorine atoms (Cl) and xenon atoms (Xe). This state is very unstable and will return to the ground state in an extremely short time, thereby emitting single-frequency 308nm excimer light. This light has unique advantages, such as a single wavelength and uniform energy distribution, and can precisely act on a specific depth of the skin. Therefore, in the medical field, especially in dermatological treatment, it shows high treatment efficiency.

[0003] However, in the prior art, the conversion efficiency of traditional excimer light sources driven by sine waves is extremely low, generally lower than 0.05%. This not only results in low irradiation intensity but also causes a large amount of heat generation in the excimer light source. At the same time, as the temperature of the excimer light source increases, the reaction coefficient related to XeCl excimers also decreases, thereby further reducing the luminous efficiency of the excimer light source. Summary of the Invention

[0004] This application mainly provides an excimer light source drive control circuit and a laser device, aiming to solve the technical problem that the conversion efficiency of the excimer light source is reduced due to easy overheating.

[0005] To solve the above technical problem, the technical solution adopted in this application is: providing an excimer light source drive control circuit. The excimer light source drive control circuit includes: a controller; a light source branch, including an excimer light source and a transformer, where the excimer light source is connected in series with the secondary side of the transformer; a drive branch, connected between the pulse control end of the controller and the primary side of the transformer and connected to a power supply voltage, for receiving a pulse control signal output by the controller to generate a drive current to drive the excimer light source to emit light; a temperature detection branch, connected to the temperature feedback end of the controller, for detecting the light source temperature of the excimer light source and feeding back the light source temperature to the controller; a temperature adjustment branch, connected to the adjustment control end of the controller, for receiving an adjustment control signal generated by the controller based on the light source temperature to perform temperature adjustment on the light source branch.

[0006] In some embodiments, the excimer light source drive control circuit further includes: an adjustable power supply, the regulation end of the adjustable power supply is connected to the voltage regulation end of the controller, and the electrical output end of the adjustable power supply is connected to the drive branch, for receiving a voltage regulation signal generated by the controller based on the light source temperature to adjust the power supply voltage output to the drive branch.

[0007] In some embodiments, when the controller determines that the light source temperature fed back by the temperature detection branch is higher than a preset temperature threshold, it controls the temperature regulation branch to perform heat dissipation processing and controls the adjustable power supply to lower the power supply voltage provided to the drive branch.

[0008] In some embodiments, the temperature regulation branch includes a DC fan, a first diode, a first switching tube, a first resistor, a second resistor, and a third resistor; a first end of the first resistor is connected to a DC voltage, a second end of the first resistor is connected to the positive electrode of the DC fan and the negative electrode of the first diode, the positive electrode of the first diode is connected to the negative electrode of the DC fan, a control electrode of the first switching tube is connected to a first end of the second resistor, a first pole of the first switching tube is connected to the negative electrode of the DC fan, a second pole of the first switching tube is grounded, a second end of the second resistor is connected to an adjustment control end of the controller, a first end of the third resistor is connected to the control electrode of the first switching tube, and a second end of the third resistor is grounded. The controller is configured to control the duty cycle of the adjustment signal to adjust the rotation speed of the DC fan for heat dissipation.

[0009] In some embodiments, the drive branch includes a drive chip, a first drive sub-branch, a second drive sub-branch, and a capacitor sub-branch. The drive chip is connected to a pulse control end of the controller. Both the first drive sub-branch and the second drive sub-branch are connected between the drive chip and a first end of the primary side of the transformer. The capacitor sub-branch is connected to a second end of the primary side of the transformer. The controller is configured to control the drive chip to generate a drive signal to drive the first drive sub-branch to charge the capacitor sub-branch and drive the second drive sub-branch to discharge the capacitor sub-branch. The drive current generated when the capacitor sub-branch discharges passes through the primary side of the transformer to drive the excimer light source to emit light.

[0010] In some embodiments, the first drive sub-branch includes a first protection unit and a second switching tube. A first end of the first protection unit is connected to the drive chip, a second end of the first protection unit is connected to the control electrode of the second switching tube, a first pole of the second switching tube is connected to a power supply voltage, and a second pole of the second switching tube is connected to a first end of the primary side of the transformer. The second drive sub-branch includes a second protection unit and a third switching tube. A first end of the second protection unit is connected to the drive chip, a second end of the second protection unit is connected to the control electrode of the third switching tube, a first pole of the third switching tube is connected to a first end of the primary side of the transformer, and a second pole of the third switching tube is grounded.

[0011] In some embodiments, the first protection unit and the second protection unit each include a corresponding fourth resistor, a second diode, and a fifth resistor; a first end of the fourth resistor is connected to the driving chip, and a second end of the fourth resistor is connected to a control electrode of the corresponding second switching transistor or the third switching transistor; a cathode of the second diode is connected to the driving chip, an anode of the second diode is connected to a first end of the fifth resistor, and a second end of the fifth resistor is connected to the control electrode of the corresponding second switching transistor or the third switching transistor.

[0012] In some embodiments, the driving chip is an IR21834 gate driving chip.

[0013] In some embodiments, a pulse control end of the controller includes an upper pulse end and a lower pulse end, the driving branch includes a high-end control end and a low-end control end, and the high-end control end and the low-end control end are used to control a frequency range of a driving signal generated by the driving branch; the excimer light source driving control circuit further includes: a pulse frequency modulation branch, the pulse frequency modulation branch includes an upper pulse frequency modulation sub-branch and a lower pulse frequency modulation sub-branch connected between the controller and the driving branch; the upper pulse frequency modulation sub-branch includes a sixth resistor and a third diode connected in parallel, a first end of the sixth resistor and a cathode of the third diode are both connected to the upper pulse end, and a second end of the sixth resistor and an anode of the third diode are both connected to the high-end control end; the lower pulse frequency modulation sub-branch includes a seventh resistor and a fourth diode connected in parallel, a first end of the seventh resistor and a cathode of the fourth diode are both connected to the lower pulse end, and a second end of the seventh resistor and an anode of the fourth diode are both connected to the low-end control end.

[0014] To solve the above technical problems, another technical solution adopted by the present application is: to provide a laser device, which includes the excimer light source driving control circuit as described above.

[0015] The beneficial effects of the present application are as follows: Different from the prior art, the present application discloses an excimer light source drive control circuit and a laser device. The present application uses a temperature detection branch to detect and feedback the light source temperature of the excimer light source in real time, and the controller generates an adjustment control signal based on the detected light source temperature to adjust the temperature of the light source branch, thereby realizing more refined thermal management, effectively avoiding the problem of low conversion efficiency caused by overheating of the excimer light source, reducing energy consumption and heat generation, extending the service life of the excimer light source, conforming to the current development trend of energy conservation and environmental protection, ensuring the stable light emission of the excimer light source under high-frequency electric fields, and long-term stable and reliable operation at normal working temperatures, improving the light emission efficiency, stability and accuracy of the excimer light source, and being beneficial to improving the overall performance of the corresponding laser device. In addition, since the drive control circuit is uniformly controlled by the controller, it also realizes the intelligent management of precise control and coordinated operation of each circuit part, improves the stability and reliability of the circuit system, reduces the operation complexity, and facilitates the corresponding circuit maintenance and adjustment. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings, where:

[0017] Figure 1 is a schematic structural diagram of an embodiment of the excimer light source drive control circuit provided by the present application;

[0018] Figure 2 is Figure 1 a schematic structural diagram of an embodiment of the excimer light source drive control circuit in the embodiment;

[0019] Figure 3 is a schematic structural diagram of an embodiment of the laser device provided by the present application. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0020] The following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some embodiments of the present application, rather than all embodiments. Based on the embodiments of the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present application.

[0021] The terms "first", "second", and "third" in the embodiments of the present application are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first", "second", and "third" may explicitly or implicitly include at least one of such features. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise specifically defined. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or units is not limited to the listed steps or units, but optionally further includes steps or units not listed, or optionally further includes other steps or units inherent to these processes, methods, products, or devices.

[0022] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in connection with the embodiments can be included in at least one embodiment of the present application. The phrase appears in various places in the specification and does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. Those skilled in the art will explicitly and implicitly understand that the embodiments described herein can be combined with other embodiments.

[0023] The present application provides an excimer light source drive control circuit. Refer to Figure 1 , Figure 1 FIG. is a schematic structural diagram of an embodiment of an excimer light source drive control circuit 100 provided by the present application. The excimer light source drive control circuit 100 includes: a controller 110; a light source branch 120, including an excimer light source 122 and a transformer 121, where the excimer light source 122 is connected in series with the secondary side of the transformer 121; a drive branch 130, connected between the pulse control terminal 111 of the controller 110 and the primary side of the transformer 121 and connected to a power supply voltage, for receiving a pulse control signal output by the controller 110 to generate a drive current to drive the excimer light source 122 to emit light; a temperature detection branch 140, connected to the temperature feedback terminal 112 of the controller 110, for detecting the light source temperature of the excimer light source 122 and feeding back the light source temperature to the controller 110; and a temperature adjustment branch 150, connected to the adjustment control terminal 113 of the controller 110, for receiving an adjustment control signal generated by the controller 110 based on the light source temperature to adjust the temperature of the light source branch 120.

[0024] In this embodiment, the controller 110 is a core component for controlling the working state of the entire circuit, and specifically, it can be a Central Processing Unit (CPU), a Microcontroller Unit (MCU), a Digital Signal Processor (DSP), a Field-Programmable Gate Array (FPGA), or other chips with logic control functions. It can perform precise control and adjustment on each part according to preset algorithms and logics.

[0025] In this embodiment, the light source branch 120 is formed by connecting an excimer light source 122 and a transformer 121 in series. The excimer light source 122, as a light-emitting element, directly affects the performance of related laser devices in terms of its light-emitting effect. The transformer 121 functions to transform voltage and current, converting the electrical energy output by the controller 110 into electrical energy suitable for the excimer light source 122 to emit light. The transformer 121 can be a pulse transformer, a high-frequency transformer, etc., as long as it can meet the requirement of converting the electrical energy output by the controller 110 into electrical energy suitable for the excimer light source 122 to emit light. Through such a design, it can be ensured that the excimer light source 122 obtains instantaneous strong voltage and strong electric field pulses to form xenon chloride. When the high voltage and strong electric field are lost after the pulse ends, it decomposes into chlorine and xenon elements within 10 - 30 ns, transitions from a high-energy state to a low-energy state, and releases photons with a wavelength of 308 nm, thereby enabling the excimer light source 122 to emit light for corresponding medical or cosmetic purposes.

[0026] In this embodiment, the drive branch 130 is an important circuit part connected between the pulse control terminal 111 of the controller 110 and the primary side of the transformer 121. It receives the pulse control signal from the controller 110. After this signal undergoes specific logical processing, a drive current is generated. This drive current passes through the primary side of the transformer 121 and is further converted into electrical energy suitable for the excimer light source 122 to emit light. The drive branch 130 usually needs to introduce greater electrical energy and, through power components such as power transistors or power metal-oxide-semiconductor field-effect transistors, etc., to achieve the conversion and amplification of electrical energy. These power components have high breakdown voltage values and current-carrying values and can withstand the impact of large currents and high voltages, thereby ensuring the stable operation of the circuit. At the same time, in order to improve the efficiency and stability of the circuit, some protection circuits such as overcurrent protection and overvoltage protection can also be added to the drive sub-branch to avoid equipment damage or safety accidents caused by circuit failures. The drive branch 130 has various implementation methods. For example, it can adopt topological structures such as H-bridge circuits, half-bridge circuits, or full-bridge circuits, or can use power semiconductor devices such as Metal-Oxide-Semiconductor Field-Effect Transistors (MOSFETs) or Insulated Gate Bipolar Transistors (IGBTs) as switching elements, or other specific circuit structures and devices can also be used to implement it. Through the drive circuit, the pulse signal output by the controller 110 can be converted into a drive signal capable of driving the excimer light source 122 to emit light. The matching of this drive signal with the light-emitting characteristics of the excimer light source 122 ensures that the excimer light source 122 can obtain stable and efficient electrical energy supply, realizing the effective drive of the excimer light source 122.

[0027] In this embodiment, the temperature detection branch 140 can detect the light source temperature of the excimer light source 122 in real time. The detection of this light source temperature can be specifically achieved through temperature sensors such as thermistors, thermosensitive capacitors, and thermocouples. For example, in a specific circuit, digital temperature sensors such as DS18B20 and LM35 can be used, or analog temperature sensors such as AD590 can be used. These temperature sensors have high precision and stability and can accurately reflect the actual operating temperature of the excimer light source 122. The temperature detection branch 140 converts the detected light source temperature signal into an electrical signal and feeds it back to the temperature feedback terminal 112 of the controller 110. The controller 110 can compare the light source temperature with a preset temperature threshold or, through a specific temperature control algorithm, process and analyze the received temperature signal. When it is determined that the light source temperature is higher than the preset temperature threshold, the controller 110 will generate an adjustment control signal and perform heat dissipation processing on the light source branch 120 through the temperature adjustment branch 150.

[0028] In this embodiment, after receiving the adjustment control signal output by the controller 110, the temperature adjustment branch 150 adjusts the temperature of the light source branch 120 according to the control signal, thereby avoiding the problem of low conversion efficiency caused by overheating of the excimer light source 122 and ensuring the stable light emission of the excimer light source 122 under high-frequency electric fields. The temperature adjustment branch 150 may specifically include tools such as a cooling fan, a heat sink, or a heat dissipation pipe for heat dissipation. For example, when the controller 110 determines that the light source temperature is too high, it can control the relay to close to start the cooling fan, or control the power transistor to conduct to increase the heat dissipation power of the heat sink. Conversely, when the light source temperature drops to the safe range, the controller 110 controls the relay to open or the power transistor to cut off to reduce the heat dissipation power, thereby saving energy while ensuring the normal operation of the excimer light source 122. In addition, the temperature adjustment branch 150 of some embodiments may also preheat the circuit by means such as resistance heating, inductive heating, or infrared heating, so that the circuit elements can be fully activated, improving the element performance and eliminating stress. Among them, since heat dissipation is related to the safety and stability of the circuit, and the cost of heating is relatively high and the heating rate is usually fast in the excimer light source drive control circuit 100 of the present application, heat dissipation problems are usually considered during specific processing. In addition, during specific implementation, the temperature adjustment branch 150 may also include control elements such as relays and power transistors to achieve more precise and safe temperature adjustment control.

[0029] In this embodiment, through the excimer light source drive control circuit 100 with the above structure, while providing a stable and efficient power supply for the excimer light source 122 through the drive circuit, the temperature detection branch 140 also detects the light source temperature of the excimer light source 122 in real time, and based on the detected light source temperature, the temperature adjustment branch 150 performs intelligent temperature adjustment on the light source branch 120. Such a design can not only effectively avoid the problem of low conversion efficiency caused by overheating of the excimer light source 122, but also ensure the stable light emission of the excimer light source 122 under high-frequency electric fields, as well as the long-term stable and reliable operation of the excimer light source 122 at normal operating temperatures, reducing energy consumption and heat generation, extending the service life of the excimer light source 122, and conforming to the current development trend of energy conservation and environmental protection. At the same time, the drive control circuit 100 is uniformly controlled by the controller 110, which also realizes the intelligent management of precise control and coordinated operation of each circuit part, improving the stability and reliability of the circuit system, reducing the operation complexity, and facilitating the corresponding circuit maintenance and adjustment.

[0030] Optionally, refer to Figure 2, in one embodiment, the excimer light source drive control circuit 100 further includes: an adjustable power supply 160. The control terminal of the adjustable power supply 160 is connected to the voltage regulation terminal 114 of the controller 110, and the electrical output terminal of the adjustable power supply 160 is connected to the drive branch 130, and is configured to receive a voltage regulation signal generated by the controller 110 based on the light source temperature, so as to adjust the power supply voltage output to the drive branch 130.

[0031] In this alternative embodiment, the excimer light source drive control circuit 100 further includes an adjustable power supply 160. The adjustable power supply 160 is a power supply device capable of adjusting the output voltage according to the instruction of the controller 110. Different types of adjustable power supplies 160 have output modes such as direct current or alternating current, different output parameters such as voltage and current, different output frequencies and phases, and different display modes such as digital or pointer type. For example, when this application adopts an adjustable DC power supply of 24V to 48V, after inputting the domestic daily-use 220V alternating current, the adjustable DC power supply can convert the alternating current into a DC voltage within the required range according to the received voltage regulation signal from the receiver, so as to meet the requirements for the luminous intensity of the excimer light source 122 in different application scenarios, be able to provide stable electrical energy output, and meet the voltage requirements for the excimer light source 122 to emit light.

[0032] In this alternative embodiment, the adjustable power supply 160 can adjust the power supply voltage output to the drive branch 130 according to the voltage regulation signal sent by the controller 110. Among them, the voltage regulation signal is a signal used by the controller 110 to instruct the adjustable power supply 160 to adjust the output voltage. The generation of this signal can be based on various factors, such as the light source temperature, the luminous demand of the light source, the working state of the circuit, etc. In specific implementation, the controller 110 can process and analyze the received various information through specific algorithms and logics, so as to generate a suitable voltage regulation signal, and send it to the adjustable power supply 160 through the voltage regulation terminal 114. For example, when the excimer light source drive control circuit 100 overheats, the controller 110 can timely reduce the output voltage of the adjustable power supply 160 to reduce the energy loss and heat generation in the circuit, thereby further maintaining the safety and stability of the circuit. On the contrary, when it is necessary to enhance the luminous intensity of the excimer light source 122, the controller 110 can increase the output voltage of the adjustable power supply 160 to ensure that the excimer light source 122 can obtain sufficient electrical energy supply, achieve stable and efficient light emission, and thus achieve effective driving of the excimer light source 122, which not only improves the flexibility and adaptability of the circuit, but also can better meet the requirements for the luminous intensity of the excimer light source 122 in actual application scenarios.

[0033] Optionally, in one embodiment, when the controller 110 determines that the light source temperature fed back by the temperature detection branch 140 is higher than a preset temperature threshold, it controls the temperature regulation branch 150 to perform heat dissipation processing and controls the adjustable power supply 160 to lower the power supply voltage provided to the driving branch 130.

[0034] In this optional embodiment, the parallel implementation of two ways of circuit regulation in the solution of the present application is specified. Specifically, the preset temperature threshold refers to the critical temperature value preset by the controller 110 for judging whether the excimer light source 122 is overheated. This preset temperature threshold reflects the highest temperature allowed for the excimer light source 122 during normal operation. When the light source temperature detected by the temperature detection branch 140 is higher than this preset temperature threshold, it indicates that there is a risk of overheating of the excimer light source 122. At this time, the controller 110 will quickly respond to ensure the safety and stability of the circuit. On the one hand, the controller 110 controls the temperature regulation branch 150 to perform heat dissipation processing. This is usually achieved by starting a cooling fan, increasing the heat dissipation power of the heat sink, etc., to reduce the temperature of the excimer light source 122 and its surrounding circuits, and prevent circuit damage or performance degradation caused by overheating. On the other hand, the controller 110 also controls the adjustable power supply 160 to lower the power supply voltage provided to the driving branch 130. By reducing the power supply voltage, the energy loss and heat generation in the circuit can be reduced, thereby further maintaining the safety and stability of the circuit, maintaining the best discharge conditions, and ensuring the stable output of the irradiation intensity.

[0035] In this optional embodiment, specifically, the temperature regulation control of the temperature regulation branch 150 can be achieved through PWM (Pulse Width Modulation) technology. By changing the duty cycle of the signal, effective control of the analog circuit can be realized. For the regulation of the power supply voltage, it can be lowered in a fixed ratio or amplitude, so as to regulate the corresponding irradiation intensity of the excimer light source. For example, the normal output voltage is 48V and the irradiation intensity is 60mW / cm2. When the temperature is monitored at 70°C, the voltage is automatically lowered to 44V and the irradiation intensity drops to 54mW / cm2. When the temperature drops to 50°C, the voltage returns to 48V and the irradiation intensity returns to 60mW / cm2; if the temperature still rises to 70°C under the output of 44V voltage, the voltage is further lowered to 40V and the irradiation intensity drops to 48mW / cm2. Similarly, when the temperature drops to 50°C, the voltage returns to 48V and the irradiation intensity returns to 60mW / cm. In addition, a corresponding overheat stop protection mechanism can also be set. For example, after the above adjustment, if the temperature still rises to 70°C under the output of 40V voltage, it is determined that the ambient temperature is too high and the drive control circuit 100 needs to be shut down for cooling, so as to effectively ensure the safe operation and long-term stability of the excimer light source drive control circuit 100.

[0036] In this optional embodiment, a closed-loop feedback mechanism is realized through the above-mentioned structure and adjustment method, which can be intelligently adjusted according to the actual working state of the excimer light source 122. When the temperature of the light source is too high, not only is the heat dissipated through the temperature adjustment branch 150 to reduce the temperature of the light source and the surrounding circuits to prevent circuit damage or performance degradation caused by overheating, but also the power supply voltage provided to the driving branch 130 is controlled by the adjustable power supply 160 to reduce the energy loss and heat generation in the circuit, thereby achieving dual protection of the luminous intensity of the excimer light source 122, and further improving the safety and stability of the circuit. At the same time, this closed-loop feedback mechanism can also adjust the circuit parameters in real time according to the actual working conditions, so that the entire circuit system is always in the optimal working state, improve the flexibility and adaptability of the circuit, can better meet the requirements of the luminous intensity of the excimer light source 122 in the actual application scenario, and further ensure the stability, accuracy and reliability of the excimer light source 122 drive.

[0037] Optionally, in one embodiment, the temperature adjustment branch 150 includes a DC fan 151, a first diode 152, a first switch tube 153, a first resistor 154, a second resistor 155 and a third resistor 156; the first end of the first resistor 154 is connected to a DC voltage, the second end of the first resistor 154 is connected to the positive electrode of the DC fan 151 and the negative electrode of the first diode 152, the positive electrode of the first diode 152 is connected to the negative electrode of the DC fan 151, the control electrode of the first switch tube 153 is connected to the first end of the second resistor 155, the first electrode of the first switch tube 153 is connected to the negative electrode of the DC fan 151, the second electrode of the first switch tube 153 is grounded, the second end of the second resistor 155 is connected to the adjustment control end 113 of the controller 110, the first end of the third resistor 156 is connected to the control electrode of the first switch tube 153, and the second end of the third resistor 156 is grounded. The controller 110 is used to control the duty cycle of the adjustment signal to adjust the speed of the DC fan 151 for heat dissipation.

[0038] In this optional embodiment, the temperature adjustment branch 150 is specifically heat-dissipated by a DC fan 151, wherein the DC fan 151 has the advantages of good heat dissipation effect and low noise. In the specific circuit, the positive electrode of the DC fan 151 is connected to the DC voltage through the first resistor 154, and the negative electrode is grounded through the first diode 152, forming a simple circuit loop. When the DC fan 151 is working, it will generate wind flow to take away the heat of the excimer light source 122 and the surrounding circuits, thereby reducing the temperature.

[0039] In this alternative embodiment, the first diode 152 functions as a one-way conductor. It is anti-parallelly connected to the DC fan 151, allowing current to flow from the DC voltage V1 through the first resistor 154 to the DC fan 151, but preventing current from flowing back from the DC fan 151 to the DC voltage, thereby protecting the stable operation of the circuit. Among them, the applied DC voltage V1 has different amplitudes according to different types of DC fans 151. For example, for a DC fan 151 driven by 24V, the amplitude of the applied DC voltage V1 is 24V. The first switching transistor 153 is used to control the on / off of the DC fan 151. Its control electrode is connected to the first end of the second resistor 155, and the second end of the second resistor 155 is connected to the adjustment control terminal 113 of the controller 110. The first switching transistor 153 can specifically be a triode, that is, the control electrode is the base of the triode, the first electrode is the collector of the triode, and the second electrode is the emitter of the triode. By the adjustment control signal output by the controller 110, the conduction and cutoff of the first switching transistor 153 can be controlled, thereby realizing the on / off control of the DC fan 151. In addition, the third resistor 156 is connected to the control electrode of the first switching transistor 153, forming a voltage-dividing circuit for adjusting the magnitude of the control signal to achieve fine adjustment of the rotation speed of the DC fan 151. The controller 110 can change the conduction time of the first switching transistor 153 by adjusting the duty cycle of the output signal, thereby adjusting the rotation speed of the DC fan 151. When the temperature of the light source is too high, the controller 110 will increase the duty cycle of the output signal, making the conduction time of the first switching transistor 153 longer, the rotation speed of the DC fan 151 faster, and the heat dissipation effect stronger; conversely, when the temperature of the light source drops to the safe range, the controller 110 will decrease the duty cycle of the output signal, reducing the rotation speed of the DC fan 151 and reducing energy waste. Through such a design, the temperature adjustment branch 150 can intelligently adjust the rotation speed of the DC fan 151 according to the actual working conditions, achieve effective heat dissipation for the excimer light source 122 and its surrounding circuits, and ensure the safety and stability of the circuit. At the same time, this intelligent adjustment method also improves the flexibility and adaptability of the circuit, and can better meet the requirements for heat dissipation performance in actual application scenarios.

[0040] Optionally, in one embodiment, the driving branch 130 includes a driving chip 131, a first driving sub-branch 132, a second driving sub-branch 133, and a capacitor sub-branch 134. The driving chip 131 is connected to the pulse control terminal 111 of the controller 110. Both the first driving sub-branch 132 and the second driving sub-branch 133 are connected between the driving chip 131 and the first end of the primary side of the transformer 121. The capacitor sub-branch 134 is connected to the second end of the primary side of the transformer 121. The controller 110 is configured to control the driving chip 131 to generate a driving signal to drive the first driving sub-branch 132 to charge the capacitor sub-branch 134 and drive the second driving sub-branch 133 to discharge the capacitor sub-branch 134. The driving current generated when the capacitor sub-branch 134 discharges passes through the primary side of the transformer 121 to drive the excimer light source 122 to emit light.

[0041] In this alternative embodiment, the driving branch 130 is driven based on the driving chip 131, and the charging and discharging of the capacitor sub-branch 134 are controlled by the first driving sub-branch 132 and the second driving sub-branch 133 to achieve stable driving of the excimer light source 122. Among them, the driving chip 131 is an integrated circuit specifically used to generate driving signals. It can convert the pulse signal output by the controller 110 into a driving signal capable of driving the excimer light source 122 to emit light. The driving chip 131 needs to have a high operating frequency and driving ability, and can quickly and accurately respond to the instructions of the controller 110 to generate a stable driving signal. The first driving sub-branch 132 and the second driving sub-branch 133 are respectively connected between the driving chip 131 and the first end of the primary side of the transformer 121. Their function is to charge and discharge the capacitor sub-branch 134 under the control of the driving chip 131. The capacitor sub-branch 134 is connected to the second end of the primary side of the transformer 121. As an energy storage element, it stores electrical energy when charging and releases electrical energy when discharging to generate a driving current. It can quickly release a large amount of electrical energy when discharging the capacitor sub-branch 134 to drive the excimer light source 122 to emit light. This charging and discharging control mechanism enables the driving current to present a stable pulse waveform, thus ensuring the stable light emission of the excimer light source 122.

[0042] In this alternative embodiment, the controller 110 can process and analyze various received information through specific algorithms and logics to generate appropriate pulse control signals, and send them to the driver chip 131 through the pulse control terminal 111. After receiving the pulse control signal, the driver chip 131 controls the first drive sub-branch 132 and the second drive sub-branch 133 to charge and discharge the capacitor sub-branch 134 according to the preset drive logic and timing relationship, so as to effectively drive the excimer light source 122. Through such a design, the drive branch 130 can not only provide stable and efficient power supply, but also flexibly adjust according to the requirements of the excimer light source 122's luminous intensity in actual application scenarios, improving the flexibility and adaptability of the circuit. At the same time, the design of the drive branch 130 also fully considers the safety and stability of the circuit. Through reasonable circuit layout and component selection, it ensures the reliability and stability of the circuit during long-term operation, and further extends the service life of the excimer light source 122.

[0043] Optionally, in one embodiment, the first drive sub-branch 132 includes a first protection unit 132a and a second switching transistor 132b. The first end of the first protection unit 132a is connected to the driver chip 131, the second end of the first protection unit 132a is connected to the control electrode of the second switching transistor 132b, the first pole of the second switching transistor 132b is connected to the power supply voltage, and the second pole of the second switching transistor 132b is connected to the first end of the primary side of the transformer 121; the second drive sub-branch 133 includes a second protection unit 133a and a third switching transistor 133b. The first end of the second protection unit 133a is connected to the driver chip 131, the second end of the second protection unit 133a is connected to the control electrode of the third switching transistor 133b, the first pole of the third switching transistor 133b is connected to the first end of the primary side of the transformer 121, and the second pole of the third switching transistor 133b is grounded.

[0044] In this alternative embodiment, the specific structures of the first drive sub-circuit and the second drive sub-circuit are specified. Among them, the first protection unit 132a and the second protection unit 133a are circuit components used to protect the switching transistors from being damaged by overvoltage or overcurrent, and may specifically include components such as current-limiting resistors, zener diodes, and fuses to ensure that the switching transistors operate within the normal working range, effectively preventing circuit damage caused by overvoltage or overcurrent, and extending the service life of the excimer light source 122. The second switching transistor 132b and the third switching transistor 133b are switching components used to control the charging and discharging operations of the capacitor sub-branch 134. Figure 2In the example, both the second switching transistor 132b and the third switching transistor 133b are N-MOS transistors (N-type metal oxide semiconductor field effect transistors). The first pole of the corresponding switching transistor is the drain of the N-MOS transistor, the second pole is the source of the N-MOS transistor, and the control pole is the gate of the N-MOS transistor. With the high input impedance and low on-resistance characteristics of the N-MOS transistor, rapid response and precise control of the circuit can be achieved. In addition, the second switching transistor 132b and the switching transistor can be the same or different types of other switching transistors, such as other metal oxide semiconductor field effect transistors, insulated gate bipolar transistors, or triodes, etc., as long as they can meet the precise control requirements of the circuit. Their selection needs to consider factors such as the operating frequency, driving ability, breakdown voltage value of the circuit, etc., to ensure that the switching transistor can quickly and accurately respond to the instructions of the driving chip 131 and achieve precise control of the capacitor sub-branch 134.

[0045] In the specific circuit of this alternative embodiment, the first protection unit 132a is connected to the output terminal of the driving chip 131 and is used to limit the magnitude of the output current to prevent damage to the switching transistor due to excessive current. The control pole of the second switching transistor 132b is connected to the driving chip 131 through the first protection unit 132a. Its first pole is connected to the power supply voltage, and the second pole is connected to the first end of the primary side of the transformer 121. When the driving chip 131 outputs a high-level signal, the second switching transistor 132b conducts, and the power supply voltage charges the capacitor sub-branch 134 through the second switching transistor 132b. Similarly, the second protection unit 133a is also connected to the output terminal of the driving chip 131 and is used to protect the third switching transistor 133b. The control pole of the third switching transistor 133b is connected to the driving chip 131 through the second protection unit 133a. Its first pole is connected to the first end of the primary side of the transformer 121, and the second pole is grounded. When the driving chip 131 outputs a low-level signal, the third switching transistor 133b conducts, and the capacitor sub-branch 134 discharges to the ground through the third switching transistor 133b to release the stored electrical energy to generate a driving current. Through such a design, the first driving sub-branch 132 and the second driving sub-branch 133 can precisely charge and discharge the capacitor sub-branch 134 under the control of the driving chip 131, thereby achieving stable and efficient driving of the excimer light source 122, enabling the capacitor sub-branch 134 to continuously perform charge and discharge cycles, and thus ensuring the continuity and stability of the driving current.

[0046] Optionally, in one embodiment, the first protection unit 132a and the second protection unit 133a each include a corresponding fourth resistor 132c or 133c, a second diode 132d or 133d, and a fifth resistor 132e or 133e; the first end of the fourth resistor 132c or 133c is connected to the driving chip 131, and the second end of the fourth resistor 132c or 133c is connected to the control pole of the corresponding second switching tube 132b or the third switching tube 133b; the negative pole of the second diode 132d or 133d is connected to the driving chip 131, the positive pole of the second diode 132d or 133d is connected to the first end of the fifth resistor 132e or 133e, and the second end of the fifth resistor 132e or 133e is connected to the control pole of the corresponding second switching tube 132b or the third switching tube 133b.

[0047] In this optional embodiment, a specific implementation manner of the first protection unit 132a and the second protection unit 133a is described. Among them, the fourth resistor 132c or 133c is used for current limiting to prevent the current at the output end of the driving chip 131 from being too large and damaging the switching tube, which can effectively limit the control pole current of the corresponding switching tube and suppress the switching oscillation of the corresponding switching tube. The second diode 132d or 133d plays a clamping role, which can clamp the voltage of the switching tube control pole within a safe range to prevent the switching tube from being broken down due to too high voltage. The fifth resistor 132e or 133e is used for voltage division to adjust the magnitude of the control signal to ensure that the switching tube can work normally. The series connection of the second diode 132d or 133d and the corresponding fifth resistor 132e or 133e can effectively protect the gate of the switching tube from electrostatic discharge, discharge the overcurrent generated by the parasitic parameters of the control pole of the corresponding switching tube, and avoid mis-conduction. Through this protection unit structure, the switching tube can be effectively protected from being damaged due to overvoltage or overcurrent, thereby improving the reliability and stability of the circuit, effectively extending the service life of the switching tube, reducing the downtime caused by circuit failures, and further improving the operation efficiency of the entire circuit system.

[0048] Optionally, in one embodiment, the driving chip 131 is an IR21834 gate driving chip.

[0049] In this optional embodiment, it is specified that the driving chip 131 uses an IR21834 gate driving chip, such as Figure 2The exemplified IR21834STRPBF chip can also be other models in the IR21834 series, such as IR21834PBF, IR21834SPBF, etc. The IR21834 gate driver chip is a high-performance gate driver chip with characteristics such as high integration, high operating frequency, and strong driving ability, and is very suitable for driving high-load devices such as excimer light source 122. Multiple functional modules are integrated inside the chip, including a logic control unit, a level conversion unit, a drive output unit, etc., which can achieve fast response and precise processing of input signals, and thus output stable drive signals to ensure the stable light emission of excimer light source 122. In addition, the IR21834 gate driver chip also has a perfect protection mechanism, such as overcurrent protection, overvoltage protection, overheat protection, etc., which can cut off the power supply in time when the circuit appears abnormal to protect the safety of the circuit and equipment. Therefore, using the IR21834 gate driver chip as the core component of drive branch 130 can not only improve the driving efficiency and stability of the circuit, but also enhance the reliability and safety of the circuit, providing a strong guarantee for the stable operation of excimer light source 122.

[0050] In this alternative embodiment, when using the IR21834 gate driver chip as the drive chip 131, the dead time for accurately controlling the on-off of the second switching transistor 132b and the third switching transistor 133b can be achieved through this chip to ensure the driving efficiency. According to the characteristics of the IR21834 drive chip, it also has a corresponding topological structure. For example, Figure 2 The exemplified IR21834STRPBF chip includes HIN, LIN#, VSS, DT, COM, LO, VCC, VS, HO, VB, and multiple NC pins that are not connected or are empty pins. Different pins can adopt different electrical connection methods, such as grounding, connecting to the power supply, or connecting to the peripheral circuit, etc. For the control of the corresponding pin functions and pin signals, specific reference can be made to the relevant chip manual. For example, in Figure 2 the 138 area, the DT pin is connected to a resistor and grounded, so as to achieve the control of the dead time, while the VSS pin and the COM pin are directly grounded to provide a stable potential reference to meet the corresponding low-level logic basis, which will not be elaborated in this application.

[0051] In this alternative embodiment, the peripheral circuit of the driving chip 131 existing in the driving circuit structure is introduced. Specifically, in the high-side peripheral circuit 135 of the IR21834 gate driving chip, the resistor 135a in the upper left part functions as a current limiter for the power supply voltage and serves as a fuse for overcurrent protection. The capacitor 135b connected in parallel on one side of this resistor is a capacitor for filtering the power supply voltage. The two groups of capacitors 135c and 135d in the middle part are mainly used for bootstrap energy storage of the high-side switching transistor at the subsequent stage. The diode 135e is used for driving freewheeling of the switching transistor. The capacitors 135f and 135g in the lower right part are mainly used for power supply filtering of the driving chip 131, and the connected voltage V2 is usually 15V. In addition, a capacitor component 137 is provided between the voltage V2 and the capacitor branch. This capacitor 137 is used for decoupling the power supply of the driving chip 131 to reduce the influence of power supply noise on the operation of the driving chip 131 and improve the stability and accuracy of the driving signal. At the same time, this capacitor component 137 can also store a certain amount of electrical energy and provide short-term electrical energy support for the driving chip 131 when the power supply voltage fluctuates, ensuring the normal operation of the driving chip 131. Through such a design, the peripheral circuit of the driving chip 131 can not only effectively protect the driving chip 131 from the interference of power supply noise, but also improve the stability and reliability of the driving signal, thereby ensuring the stable light emission of the excimer light source 122 and the safe operation of the circuit.

[0052] Optionally, the pulse control terminal 111 of the controller 110 includes an upper-end pulse terminal 111a and a lower-end pulse terminal 111b. The driving branch 130 includes a high-side control terminal and a low-side control terminal, and the high-side control terminal and the low-side control terminal are used to control the frequency range of the driving signal generated by the driving branch 130. The excimer light source driving control circuit 100 further includes: a pulse frequency modulation branch, and the pulse frequency modulation branch includes an upper-end pulse frequency modulation sub-branch and a lower-end pulse frequency modulation sub-branch connected between the controller 110 and the driving branch 130; the upper-end pulse frequency modulation sub-branch includes a sixth resistor 136a and a third diode 136b connected in parallel. The first end of the sixth resistor 136a and the cathode of the third diode 136b are both connected to the upper-end pulse terminal 111a, and the second end of the sixth resistor 136a and the anode of the third diode 136b are both connected to the high-side control terminal; the lower-end pulse frequency modulation sub-branch includes a seventh resistor and a fourth diode 136d connected in parallel. The first end of the seventh resistor 136c and the cathode of the fourth diode 136d are both connected to the lower-end pulse terminal 111b, and the second end of the seventh resistor 136c and the anode of the fourth diode 136d are both connected to the low-side control terminal.

[0053] In this alternative embodiment, the circuit of this part, namely the pulse peripheral circuit 136 in the legend. Among them, the pulse control terminal 111 of the controller 110 specifically includes an upper pulse terminal 111a and a lower pulse terminal 111b, which are respectively used to output control signals for controlling the subsequent first drive sub-branch 132 and the second drive sub-branch. Its specific control logic can be set according to the timing logic of the corresponding drive chip 131 or the control logic of other drive methods. This application does not make specific limitations on this. The high-end control terminal and the low-end control terminal of the drive branch 130 are used to receive the frequency modulation signal from the pulse frequency modulation branch, so as to control the frequency range of the drive signal generated by the drive branch 130. Specifically, they can be specific pins of the drive chip 131, such as the HIN pin and the LIN# pin of the IR21834 gate drive chip, or device pins or connection nodes under other specific drive methods. Through such a design, the pulse frequency modulation branch can accurately adjust the frequency of the drive signal generated by the drive branch 130 according to the instructions of the controller 110, so as to realize flexible control of the emission frequency of the excimer light source 122.

[0054] In this alternative embodiment, the sixth resistor 136a and the seventh resistor 136c play a current limiting role, which can protect the subsequent circuit from overcurrent impact. The third diode 136b and the fourth diode 136d play a clamping role, which can clamp the voltage of the control signal within a safe range, quickly discharge the parasitic parameters in the control terminal lines of the controller 110 pins and the drive branch 130, avoid non-expected levels leading to incorrect drive logic of the subsequent switching tubes, and prevent damage to circuit components due to excessive voltage. The third diode 136b and the fourth diode 136d are set in reverse and are respectively connected in parallel with the sixth resistor 136a and the seventh resistor 136c, so as to effectively protect the circuit and ensure the stability and reliability of the circuit when an abnormality occurs in the circuit.

[0055] Refer to Figure 3 , Figure 3 is a schematic structural diagram of an embodiment of a laser device provided by this application. The laser device 200 includes an excimer light source drive control circuit 100 as Figures 1 to 2 described.

[0056] In this embodiment, the laser device 200 is driven and controlled by the excimer light source driving and control circuit 100 to provide driving signals and control, so as to achieve the photon emission and adjustment of the excimer light source, thereby realizing the laser output of specific wavelengths such as 308 nm. The laser device 200 may specifically be a 308 nm excimer laser therapeutic apparatus, which uses ultraviolet laser with a wavelength of 308 nm for treatment, can effectively treat skin diseases such as vitiligo and psoriasis, and is extremely safe and applicable. In addition, the laser device 200 may also specifically be other high peak power pulsed laser devices, photodynamic therapy devices, or laser devices for scientific research, etc., and this application does not make specific limitations thereto. As long as the laser device 200 is driven, controlled, and its light emission is adjusted by the excimer light source driving and control circuit 100 of this application, it can be regarded as within the protection scope of this application. In addition, the excimer light source is not limited to the 308 nm excimer laser light source, and may also be other excimer laser light sources with different parameter requirements such as different wavelength bands, power pulse duration requirements, etc., as long as its light emission process can be precisely controlled by the excimer light source driving and control circuit 100 of this application. Such a design enables the laser device 200 to have broad application prospects and flexibility, and can meet the requirements of different fields and different application scenarios.

[0057] Different from the prior art, this application discloses an excimer light source driving and control circuit and a laser device. The temperature detection branch detects and feeds back the light source temperature of the excimer light source in real time, and the controller generates an adjustment control signal based on the detected light source temperature to adjust the temperature of the light source branch, thereby realizing more refined thermal management, effectively avoiding the problem of low conversion efficiency caused by overheating of the excimer light source, reducing energy consumption and heat generation, extending the service life of the excimer light source, conforming to the current development trend of energy conservation and environmental protection, ensuring the stable light emission of the excimer light source under high-frequency electric fields, and the long-term stable and reliable operation at normal working temperatures, improving the light emission efficiency, stability, and accuracy of the excimer light source, which is beneficial to improving the overall performance of the corresponding laser device. In addition, since the driving and control circuit is uniformly controlled by the controller, it also realizes the intelligent management of precise control and coordinated operation of each circuit part, improves the stability and reliability of the circuit system, reduces the operation complexity, and is convenient for corresponding circuit maintenance and adjustment.

[0058] Each embodiment in this specification is described in a progressive manner. The same or similar parts among the embodiments can be referred to each other, and the key point of each embodiment is to illustrate the differences from other embodiments. In particular, for the laser device embodiment, since it is basically similar to the excimer light source driving and control circuit embodiment, the description is relatively simple, and the relevant parts can be referred to the corresponding description in the excimer light source driving and control circuit embodiment.

[0059] The above are only embodiments of the present application, and do not limit the patent scope of the present application. Any equivalent structural or equivalent process transformations made by using the content of the specification and drawings of the present application, or directly or indirectly applied in other related technical fields, are similarly included in the patent protection scope of the present application.

Claims

1. An excimer light source drive control circuit, characterized in that Comprising: A controller; A light source branch, including an excimer light source and a transformer, where the excimer light source is connected in series with the secondary side of the transformer; A drive branch, connected between the pulse control terminal of the controller and the primary side of the transformer, and connected to a power supply voltage, for receiving the pulse control signal output by the controller to generate a drive current to drive the excimer light source to emit light; A temperature detection branch, connected to the temperature feedback terminal of the controller, for detecting the light source temperature of the excimer light source and feeding back the light source temperature to the controller; A temperature regulation branch, connected to the regulation control terminal of the controller, for receiving the regulation control signal generated by the controller based on the light source temperature to perform temperature regulation on the light source branch.

2. The excimer light source drive control circuit according to claim 1, wherein The excimer light source drive control circuit further includes: An adjustable power supply, the regulation terminal of the adjustable power supply is connected to the voltage regulation terminal of the controller, and the electrical output terminal of the adjustable power supply is connected to the drive branch, for receiving the voltage regulation signal generated by the controller based on the light source temperature to adjust the power supply voltage output to the drive branch.

3. The excimer light source drive control circuit according to claim 2, wherein When the controller determines that the light source temperature fed back by the temperature detection branch is higher than a preset temperature threshold, it controls the temperature regulation branch to perform heat dissipation processing and controls the adjustable power supply to lower the power supply voltage provided to the drive branch.

4. The excimer light source driving and controlling circuit according to claim 1, wherein The temperature regulation branch includes a DC fan, a first diode, a first switching tube, a first resistor, a second resistor, and a third resistor; The first end of the first resistor is connected to a DC voltage, the second end of the first resistor is connected to the positive pole of the DC fan and the negative pole of the first diode, the positive pole of the first diode is connected to the negative pole of the DC fan, the control pole of the first switching tube is connected to the first end of the second resistor, the first pole of the first switching tube is connected to the negative pole of the DC fan, the second pole of the first switching tube is grounded, the second end of the second resistor is connected to the regulation control terminal of the controller, the first end of the third resistor is connected to the control pole of the first switching tube, the second end of the third resistor is grounded, and the controller is used to control the duty cycle of the regulation signal to adjust the rotation speed of the DC fan for heat dissipation.

5. The excimer light source drive control circuit according to claim 1, characterized in that The drive branch includes a drive chip, a first drive sub-branch, a second drive sub-branch, and a capacitor sub-branch. The drive chip is connected to the pulse control terminal of the controller. Both the first drive sub-branch and the second drive sub-branch are connected between the drive chip and the first end of the primary side of the transformer. The capacitor sub-branch is connected to the second end of the primary side of the transformer; The controller is used to control the drive chip to generate a drive signal to drive the first drive sub-branch to charge the capacitor sub-branch and drive the second drive sub-branch to discharge the capacitor sub-branch. The drive current generated when the capacitor sub-branch discharges passes through the primary side of the transformer to drive the excimer light source to emit light.

6. The excimer light source driving and controlling circuit according to claim 5, wherein The first driving sub-branch includes a first protection unit and a second switching transistor. The first end of the first protection unit is connected to the driving chip, the second end of the first protection unit is connected to the control electrode of the second switching transistor, the first pole of the second switching transistor is connected to the power supply voltage, and the second pole of the second switching transistor is connected to the first end of the primary side of the transformer. The second driving sub-branch includes a second protection unit and a third switching transistor. The first end of the second protection unit is connected to the driving chip, the second end of the second protection unit is connected to the control electrode of the third switching transistor, the first pole of the third switching transistor is connected to the first end of the primary side of the transformer, and the second pole of the third switching transistor is grounded.

7. The excimer light source driving and controlling circuit according to claim 6, wherein Both the first protection unit and the second protection unit include corresponding fourth resistors, second diodes, and fifth resistors. The first end of the fourth resistor is connected to the driving chip, and the second end of the fourth resistor is connected to the control electrode of the corresponding second switching transistor or third switching transistor. The cathode of the second diode is connected to the driving chip, the anode of the second diode is connected to the first end of the fifth resistor, and the second end of the fifth resistor is connected to the control electrode of the corresponding second switching transistor or third switching transistor.

8. The excimer light source drive control circuit according to claim 6, characterized in that, The driving chip is an IR21834 gate driving chip.

9. The excimer light source drive control circuit according to claim 1, characterized in that, The pulse control terminal of the controller includes an upper pulse terminal and a lower pulse terminal. The driving branch includes a high-end control terminal and a low-end control terminal. The high-end control terminal and the low-end control terminal are used to control the frequency range of the driving signal generated by the driving branch. The excimer light source driving and controlling circuit further includes: A pulse frequency modulation branch, which includes an upper pulse frequency modulation sub-branch and a lower pulse frequency modulation sub-branch connected between the controller and the driving branch. The upper pulse frequency modulation sub-branch includes a sixth resistor and a third diode connected in parallel. The first end of the sixth resistor and the cathode of the third diode are both connected to the upper pulse terminal, and the second end of the sixth resistor and the anode of the third diode are both connected to the high-end control terminal. The lower pulse frequency modulation sub-branch includes a seventh resistor and a fourth diode connected in parallel. The first end of the seventh resistor and the cathode of the fourth diode are both connected to the lower pulse terminal, and the second end of the seventh resistor and the anode of the fourth diode are both connected to the low-end control terminal.

10. A laser device, characterized in that, The laser device includes the excimer light source driving and controlling circuit according to any one of claims 1-9.

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