Machining device for high-precision plane mirror
The high-precision planar mirror processing device addresses precision and stability issues by using memory alloy springs and dual-head motors for tool switching, and a fluid damping system, ensuring precise and efficient planar mirror processing.
Patent Information
- Application Number
- CN202510594089.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-05-09
- Publication Date
- 2025-07-15
AI Technical Summary
The clamping device of traditional plane mirror processing devices has insufficient adjustment accuracy, making it difficult to achieve dynamic fine-tuning, process switching is time-consuming and easy to introduce human error, resulting in insufficient processing accuracy and stability.
The fine-tuning mechanism is adopted that links memory alloy springs and semiconductor refrigeration plates, and combines the double-head motor with a thick grinding head and a fine grinding head, an ultrasonic cleaning device and hydraulic oil shock absorption design to achieve nano-level clamping force adjustment, rapid process switching and efficient cleaning.
It ensures stable clamping of the plane mirror during processing, shortens the process switching time, improves processing accuracy and stability, reduces mechanical errors and cleaning time, and improves the cleanliness of the finished product.
Smart Images
Figure CN120307128A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of plane mirror processing, and specifically to a processing device for high-precision plane mirrors. Background Technique
[0002] As a core component of an optical system, the surface accuracy (such as flatness, roughness) of a plane mirror directly affects the imaging quality and energy transmission efficiency of optical devices. Especially in high-end fields such as laser reflectors, interferometer calibration mirrors, and aerospace optical payloads, the processing accuracy requirements for plane mirrors have reached the sub-micron or even nano-level. However, traditional plane mirror processing technologies have significant defects in multiple links, seriously restricting the mass production and process stability of high-precision mirror surfaces.
[0003] The clamping devices of existing plane mirror processing devices mostly rely on mechanical screws or pneumatic fixtures. Their adjustment accuracy is limited by mechanical transmission clearances or air pressure fluctuations, making it difficult to achieve dynamic fine-tuning. This may cause the mirror surface to displace during the grinding process, directly affecting the processing accuracy. Moreover, traditional equipment needs to manually replace rough grinding and fine grinding tools to achieve processing at different stages. The process switching is time-consuming and prone to introducing human errors. The separate design of rough grinding and fine grinding tools also complicates the equipment structure, increasing the risk of vibration sources and assembly errors. Summary of the Invention
[0004] In view of the deficiencies of the existing problems, the present invention provides a processing device for high-precision plane mirrors to solve the problems presented in the above background technique.
[0005] To solve the above problems, the present invention is realized through the following technical solutions: A processing device for high-precision plane mirrors, including a workbench. A side frame is fixedly connected to the side of the upper surface of the workbench. A stepping motor is provided at the top of the side frame. A lead screw is provided at the output end of the stepping motor. A sliding seat is provided on the outer surface of the lead screw. A grinding device is provided on the outer surface of the sliding seat. A first motor is provided at the middle of the lower surface of the workbench. A bent rotating rod is provided at the top of the first motor. A fixing device is fixedly connected to the end of the bent rotating rod. A cleaning device and a collection tank are provided inside the workbench. The fixing device includes an annular seat. A first electric cylinder is provided on the inner surface of the annular seat. An L-shaped base is provided at the output end of the first electric cylinder. A fine-tuning mechanism is provided on the side wall of the L-shaped base. An oil cavity is provided inside the L-shaped base. The fine-tuning mechanism includes a heat preservation sleeve. A shape memory alloy spring is fixedly connected to the end of the inner surface of the heat preservation sleeve. A semiconductor refrigeration sheet is provided inside the heat preservation sleeve. A connecting plate is fixedly connected to the end of the shape memory alloy spring. A push rod is fixedly connected to the side of the connecting plate away from the shape memory alloy spring. A clamping plate is fixedly connected to the end of the push rod away from the connecting plate.
[0006] Preferably, the vertical part of the bent rotating rod penetrates through the workbench, the fixing device is arranged on the upper surface of the workbench, and a cover is arranged at the bottom of the collection tank.
[0007] Preferably, an air pump is arranged on the outer surface of the side frame, a trachea is arranged on the outer surface of the air pump, one end of the trachea far away from the air pump is fixedly connected with a jet head, and both the grinding device and the jet head are arranged above the collection tank.
[0008] Preferably, the grinding device includes a second motor and a connecting rotating rod. The second motor is fixedly arranged on the outer surface of the sliding seat, the end of the connecting rotating rod is rotatably connected to the outer surface of the sliding seat, the output end of the second motor is fixedly connected with a rotating shaft, the output end of the rotating shaft is fixedly connected with a first gear, the outer surface of the connecting rotating rod is fixedly connected with a second gear, and the outer surface of the first gear meshes with the outer surface of the second gear.
[0009] Preferably, one end of the connecting rotating rod far away from the sliding seat is fixedly connected with a fixing frame, a double-headed motor is arranged on the outer surface of the fixing frame, and the output shafts of the double-headed motor are fixedly connected with a rough grinding head and a fine grinding head.
[0010] Preferably, the outer surface of the annular seat is fixedly connected with the end of the horizontal part of the bent rotating rod. The first electric cylinder and the L-shaped base are arranged in a circular arrangement with the central axis of the annular seat as the axis. First balls are arranged at the bottom of the annular seat, and the bottoms of the first balls are in contact with the upper surface of the workbench. A push plate is arranged on the inner surface of the oil cavity, a support rod is fixedly connected to the upper surface of the push plate, the outer surface of the support rod is sleeved inside the L-shaped base, the top end of the support rod is fixedly connected with a bottom plate, second balls are arranged on the upper surface of the bottom plate, and the bottom plate is arranged below the clamping plate.
[0011] Preferably, the end of the heat preservation sleeve is fixedly connected to the side wall of the L-shaped base, the outer surface of the connecting plate is sleeved inside the heat preservation sleeve, and the outer surface of the push rod penetrates through the heat preservation sleeve and extends to the outside.
[0012] Preferably, the cleaning device includes a fixed barrel. The top of the fixed barrel is fixedly connected inside the workbench. An ultrasonic generator and a transducer are arranged at the bottom of the inner surface of the fixed barrel. A cleaning tank body is arranged at the top of the transducer. A liquid inlet pipe and a sewage discharge pipe are fixedly connected to the inner surface of the cleaning tank body, and the outer surfaces of the liquid inlet pipe and the sewage discharge pipe penetrate through the through holes of the fixed barrel and extend to the outside.
[0013] Preferably, a fixed block is fixedly connected to the inner surface of the fixed barrel. A second electric cylinder is arranged on the lower surface of the fixed block, a support net is arranged at the bottom end of the second electric cylinder, and the outer surface of the support net is adapted to the inner surface of the cleaning tank body.
[0014] Preferably, an external housing is fixedly connected to the outer surface of the fixed barrel. A duct is fixedly connected to the inner wall of the external housing. A fan is arranged inside the duct. A dust filter screen is arranged at the end of the duct. An electric heating element is arranged inside the external housing and is opposite to the fan. An air inlet duct is fixedly connected to one side of the external housing away from the duct. An exhaust duct is fixedly connected to the inner wall of the fixed barrel. The outer surface of the air inlet duct penetrates through the external housing and extends into the inner cavity of the fixed barrel. The outer surface of the exhaust duct penetrates through the fixed barrel and extends to the outside.
[0015] The present invention provides a processing device for a high-precision plane mirror, which has the following beneficial effects: First, in the processing device for the high-precision plane mirror, through the fixing device and the fine-tuning mechanism, the traditional clamping device has problems such as response lag or insufficient adjustment accuracy. The fine-tuning mechanism of this device innovatively adopts the linkage design of a shape memory alloy spring and a semiconductor refrigeration chip: when it is necessary to increase the clamping force, the shape memory alloy spring is heated by current to make it expand, and the push rod and the clamping plate are pushed to apply a small amount of positive pressure to the plane mirror. When it is necessary to reduce the clamping force, the semiconductor refrigeration chip quickly cools down, causing the shape memory alloy spring to contract and driving the clamping plate to retract. In this process, the data of the pressure sensor is monitored in real time by the numerical control system, and the current input is dynamically adjusted to achieve nanoscale fine-tuning of the clamping force. Compared with the traditional device, this design avoids the risk of stress concentration or cracking of the mirror surface caused by excessive clamping, ensuring that the plane mirror is always in an ideal fixed state during the processing. In addition, the heat preservation sleeve isolates external temperature interference, further improving the stability and repeatability of the fine-tuning mechanism and laying a foundation for high-precision grinding.
[0016] Second, in the processing device for the high-precision plane mirror, through the grinding device, the traditional grinding process requires frequent replacement of grinding tools, resulting in processing interruption and difficulty in ensuring accuracy. This device adopts a double-headed motor integrated with a rough grinding head and a fine grinding head, and realizes the rapid switching of the grinding head through a gear transmission system. In the rough grinding stage, the rough grinding head faces downward to quickly remove the macroscopic unevenness of the mirror blank. In the fine grinding stage, the fine grinding head faces downward to polish the mirror surface at the nanoscale with its high-density abrasive grains. This design shortens the process switching time and ensures the rapid connection between the rough grinding and fine grinding processes.
[0017] III. The processing device for this high-precision plane mirror, through the cleaning device, during the grinding process, micron-sized dust and coolant residues generated are likely to adhere to the mirror surface. Traditional manual cleaning has low efficiency and a risk of secondary pollution. This device uses the high-frequency vibration of ultrasonic waves to generate cavitation effects in the cleaning tank body, which can completely peel off the particulate matter and oil stains adsorbed on the mirror surface. After the cleaning is completed, the second electric cylinder drives the support net to lift the mirror surface to the hot air drying area. The electric heating element and the fan in the outer casing cooperate to generate high-temperature airflows, which evenly blow the mirror surface through the air ducts, can evaporate moisture and eliminate water stains in a short time, achieving efficient removal and rapid drying of the mirror surface residues, and ensuring the cleanliness of the finished product and the compatibility with subsequent processes.
[0018] IV. The processing device for this high-precision plane mirror, through the fixing device, high-precision grinding has extremely high requirements for the seismic resistance of the equipment. Traditional shock absorption solutions rely on rubber pads or springs and are difficult to cope with high-frequency vibrations. This device sets up an oil cavity filled with high-density hydraulic oil in the L-shaped base of the fixing device. The vibration energy generated during the grinding process is transmitted to the hydraulic oil through the bottom plate, and the high-frequency vibrations are absorbed through the fluid damping effect, effectively suppressing the influence of the vibrations during grinding on the mirror surface accuracy and ensuring the dynamic stability of the processing process. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Figure 1 is a schematic structural diagram of the whole of the present invention; Figure 2 is a schematic structural diagram of the second perspective of the whole of the present invention; Figure 3 is a schematic structural diagram of the grinding device of the present invention; Figure 4 is a schematic structural diagram of the fixing device of the present invention; Figure 5 is a sectional structural diagram of the fixing device of the present invention; Figure 6 is a sectional structural diagram of the L-shaped base of the present invention; Figure 7 is a schematic structural diagram of the fine-tuning mechanism of the present invention; Figure 8 is a schematic structural diagram of the cleaning device of the present invention; Figure 9 is a sectional structural diagram of the cleaning device of the present invention.
[0020] In the figure: 1, workbench; 2, side frame; 3, grinding device; 301, second motor; 302, connecting rotating rod; 303, rotating shaft; 304, first gear; 305, second gear; 306, fixing frame; 307, double-headed motor; 308, rough grinding head; 309, fine grinding head; 4, first motor; 5, bent rotating rod; 6, fixing device; 601, annular seat; 602, first electric cylinder; 603, first ball; 604, L-shaped base; 605, fine adjustment mechanism; 6051, heat preservation sleeve; 6052, shape memory alloy spring; 6053, connecting plate; 6054, push rod; 6055, semiconductor refrigeration sheet; 606, clamping plate; 607, oil cavity; 608, push plate; 609, support rod; 610, bottom plate; 611, second ball; 7, cleaning device; 701, fixed barrel; 702, ultrasonic generator; 703, transducer; 704, cleaning tank body; 705, fixed block; 706, second electric cylinder; 707, support net; 708, liquid inlet pipe; 709, sewage discharge pipe; 710, external shell; 711, air duct; 712, dust filter net; 713, fan; 714, electric heating element; 715, air inlet pipe; 716, air discharge pipe; 8, collection tank; 9, cover; 10, stepping motor; 11, lead screw; 12, sliding seat; 13, air pump; 14, air guide pipe; 15, air jet head. Detailed implementation mode
[0021] The present invention will be further described in detail below with reference to the accompanying drawings and specific implementation modes. The embodiments of the present invention are given for purposes of illustration and description, and are not exhaustive or limit the present invention to the disclosed form. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and design various embodiments with various modifications suitable for specific purposes. Embodiment
[0022] As Figures 1-9As shown in the figure, the present invention provides a technical solution: a processing device for a high-precision plane mirror, including a workbench 1. At the side of the upper surface of the workbench 1, a side frame 2 is fixedly connected. At the top of the side frame 2, a stepping motor 10 is arranged. At the output end of the stepping motor 10, a lead screw 11 is arranged. On the outer surface of the lead screw 11, a sliding seat 12 is arranged. On the outer surface of the sliding seat 12, a grinding device 3 is arranged. At the middle of the lower surface of the workbench 1, a first motor 4 is arranged. At the top of the first motor 4, a bent rotating rod 5 is arranged. At the end of the bent rotating rod 5, a fixing device 6 is fixedly connected. Inside the workbench 1, a cleaning device 7 and a collection tank 8 are arranged. The fixing device 6 includes an annular seat 601. On the inner surface of the annular seat 601, a first electric cylinder 602 is arranged. At the output end of the first electric cylinder 602, an L-shaped base 604 is arranged. On the side wall of the L-shaped base 604, a fine adjustment mechanism 605 is arranged. Inside the L-shaped base 604, an oil cavity 607 is arranged. The fine adjustment mechanism 605 includes a heat preservation sleeve 6051. At the end of the inner surface of the heat preservation sleeve 6051, a shape memory alloy spring 6052 is fixedly connected. Inside the heat preservation sleeve 6051, a semiconductor refrigeration sheet 6055 is arranged. At the end of the shape memory alloy spring 6052, a connecting plate 6053 is fixedly connected. On the side of the connecting plate 6053 away from the shape memory alloy spring 6052, a push rod 6054 is fixedly connected. At the end of the push rod 6054 away from the connecting plate 6053, a clamping plate 606 is fixedly connected.
[0023] The vertical part of the bent rotating rod 5 penetrates through the workbench 1. The fixing device 6 is arranged on the upper surface of the workbench 1. At the bottom of the collection tank 8, a cover 9 is arranged.
[0024] On the outer surface of the side frame 2, an air pump 13 is arranged. On the outer surface of the air pump 13, an air duct 14 is arranged. At the end of the air duct 14 away from the air pump 13, an air jet head 15 is fixedly connected. Both the grinding device 3 and the air jet head 15 are arranged above the collection tank 8.
[0025] The grinding device 3 includes a second motor 301 and a connecting rotating rod 302. The second motor 301 is fixedly arranged on the outer surface of the sliding seat 12. The end of the connecting rotating rod 302 is rotatably connected to the outer surface of the sliding seat 12. At the output end of the second motor 301, a rotating shaft 303 is fixedly connected. At the output end of the rotating shaft 303, a first gear 304 is fixedly connected. On the outer surface of the connecting rotating rod 302, a second gear 305 is fixedly connected. The outer surface of the first gear 304 meshes with the outer surface of the second gear 305.
[0026] At the end of the connecting rotating rod 302 away from the sliding seat 12, a fixing frame 306 is fixedly connected. On the outer surface of the fixing frame 306, a double-headed motor 307 is arranged. At the output shaft of the double-headed motor 307, a rough grinding head 308 and a fine grinding head 309 are fixedly connected.
[0027] The outer surface of the annular seat 601 is fixedly connected to the end of the horizontal part of the bent rotating rod 5. The first electric cylinder 602 and the L-shaped base 604 are arranged annularly with the central axis of the annular seat 601 as the axis. A first ball 603 is provided at the bottom of the annular seat 601, and the bottom of the first ball 603 is in contact with the upper surface of the workbench 1. A push plate 608 is provided on the inner surface of the oil cavity 607. A support rod 609 is fixedly connected to the upper surface of the push plate 608. The outer surface of the support rod 609 is sleeved inside the L-shaped base 604. The top of the support rod 609 is fixedly connected to a bottom plate 610. A second ball 611 is provided on the upper surface of the bottom plate 610. The bottom plate 610 is arranged below the clamping plate 606.
[0028] The end of the heat preservation sleeve 6051 is fixedly connected to the side wall of the L-shaped base 604. The outer surface of the connecting plate 6053 is sleeved inside the heat preservation sleeve 6051. The outer surface of the push rod 6054 penetrates through the heat preservation sleeve 6051 and extends to the outside.
[0029] The cleaning device 7 includes a fixed barrel 701. The top of the fixed barrel 701 is fixedly connected inside the workbench 1. An ultrasonic generator 702 and a transducer 703 are provided at the bottom of the inner surface of the fixed barrel 701. A cleaning tank body 704 is provided at the top of the transducer 703. A liquid inlet pipe 708 and a sewage discharge pipe 709 are fixedly connected to the inner surface of the cleaning tank body 704. The outer surfaces of the liquid inlet pipe 708 and the sewage discharge pipe 709 penetrate through the through holes of the fixed barrel 701 and extend to the outside.
[0030] A fixed block 705 is fixedly connected to the inner surface of the fixed barrel 701. A second electric cylinder 706 is provided on the lower surface of the fixed block 705. A support net 707 is provided at the bottom end of the second electric cylinder 706. The outer surface of the support net 707 is adapted to the inner surface of the cleaning tank body 704.
[0031] An external housing 710 is fixedly connected to the outer surface of the fixed barrel 701. An air duct 711 is fixedly connected to the inner wall of the external housing 710. A fan 713 is provided inside the air duct 711. A dust filter net 712 is provided at the end of the air duct 711. An electric heating element 714 is provided inside the external housing 710. The electric heating element 714 is arranged opposite to the fan 713. An air inlet duct 715 is fixedly connected to the side of the external housing 710 away from the air duct 711. An exhaust duct 716 is fixedly connected to the inner wall of the fixed barrel 701. The outer surface of the air inlet duct 715 penetrates through the external housing 710 and extends to the inner cavity of the fixed barrel 701. The outer surface of the exhaust duct 716 penetrates through the fixed barrel 701 and extends to the outside.
[0032] In use, during the fixing stage of the plane mirror, according to the size of the plane mirror, the first electric cylinder 602 is controlled to synchronously extend, so that the L-shaped base 604 moves to a suitable position. The plane mirror is placed on the bottom plate 610 of the horizontal part of multiple groups of L-shaped bases 604. The first electric cylinder 602 is continuously controlled to extend until multiple groups of clamping plates 606 clamp the edge of the plane mirror. A pressure sensor is arranged on the clamping surface of the clamping plate 606 to accurately monitor the clamping force of the clamping plate 606. The fine adjustment mechanism 605 is used to finely adjust the clamping force of the clamping plate 606. By energizing the shape memory alloy spring 6052, heating can be carried out, so that the shape memory alloy spring 6052 extends, driving the connecting plate 6053 and the push rod 6054 to jointly slightly push the clamping plate 606, and the clamping force of the clamping plate 606 can be slightly increased. By energizing and heating the semiconductor refrigeration sheet 6055, refrigeration can be carried out, so that the shape memory alloy spring 6052 shortens, driving the connecting plate 6053 and the push rod 6054 to jointly slightly pull the clamping plate 606, and the clamping force of the clamping plate 606 can be slightly reduced. The fixing force of the fixing device 6 for fixing the plane mirror can be accurately controlled through the fine adjustment mechanism 605 to prevent the fixing force from being too large or too small. The setting of the second ball 611 can reduce the mechanical friction received by the plane mirror during the process of the L-shaped base 604 clamping the plane mirror. The setting of the heat preservation sleeve 6051 can reduce the influence of the external temperature on the shape memory alloy spring 6052.
[0033] In the grinding process of the plane mirror, the first motor 4 drives the bent rotating rod 5 to rotate, and the annular seat 601 rotates accordingly until the annular seat 601 rotates to directly below the grinding device 3 and directly above the collection tank 8. The second motor 301 drives the rotating shaft 303 to drive the first gear 304 to rotate. The second gear 305 is driven by the first gear 304 to rotate, and the connecting rotating rod 302 rotates accordingly, driving the fixed frame 306, the double-headed motor 307, the rough grinding head 308, and the fine grinding head 309 to rotate, making the rough grinding head 308 face down and the fine grinding head 309 face up. The stepping motor 10 drives the lead screw 11 to rotate, causing the sliding seat 12 to move downward along the lead screw 11 until the rough grinding head 308 contacts the upper surface of the plane mirror. The double-headed motor 307 is started to drive the rough grinding head 308 to rotate at high speed to rough grind the plane mirror. After rough grinding, the stepping motor 10 drives the sliding seat 12 to move upward, moving the rough grinding head 308 upward to an appropriate height. Then, the second motor 301 drives the rotating shaft 303 to rotate 180 degrees, making the fine grinding head 309 face down and the rough grinding head 308 face up. Then, the stepping motor 10 is controlled to move the fine grinding head 309 to the upper surface of the plane mirror, and the double-headed motor 307 is started to drive the fine grinding head 309 to rotate at high speed to fine grind the plane mirror. During the grinding process, the air pump 13 continuously blows and sweeps the grinding debris through the air duct 14 and the jet head 15 to prevent particulate matter from adhering to the mirror surface again. At the same time, the collection tank 8 inside the workbench 1 centrally recovers the waste materials through the inclined diversion structure. The cover 9 is designed to facilitate regular cleaning to ensure a clean processing environment. The vibration generated during grinding is transmitted to the high-density hydraulic oil arranged in the oil chamber 607 through the bottom plate 610, the support rod 609, and the push plate 608. The high-density hydraulic oil can absorb and weaken the vibration to provide a buffering effect.
[0034] After grinding is completed, the first motor 4 is controlled to drive the bent rotating rod 5 to rotate, making the annular seat 601 rotate to directly above the cleaning device 7. The setting of the first ball 603 can reduce the resistance during the movement of the annular seat 601. The cleaning liquid is injected into the cleaning tank body 704 through the liquid inlet pipe 708. The first electric cylinder 602 is controlled to shorten, causing the plane mirror to be released and fall into the cleaning liquid. The ultrasonic generator 702 and the transducer 703 cooperate to generate high-frequency vibration waves, causing the cavitation effect to form on the surface of the lens by the cleaning liquid, completely peeling off the residual grinding dust and oil stains. The dirty liquid is discharged through the sewage pipe 709. After cleaning is completed, the second electric cylinder 706 is controlled to shorten, driving the plane mirror to move upward until the plane mirror moves to the height of the air inlet pipe 715. The air duct 711 inside the external housing 710 generates hot air through the fan 713 and the electric heating element 714. The hot air blows through the air inlet pipe 715, quickly evaporating the moisture and avoiding water stains remaining, facilitating the next process of the plane mirror. The entire processing process is integrated and controlled by the numerical control system, facilitating the realization of high-precision processing of the plane mirror.
[0035] Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all embodiments. All other embodiments obtained by those of ordinary skill in the art and related fields based on the embodiments of the present invention without creative efforts shall fall within the scope of protection of the present invention. Structures, devices, and operation methods not specifically described and explained in the present invention shall be implemented by conventional means in the art unless otherwise specified and limited.
Claims
1. A processing device for a high-precision plane mirror, comprising a workbench (1), characterized in that: On the side of the upper surface of the workbench (1), a side frame (2) is fixedly connected. At the top of the side frame (2), a stepping motor (10) is provided. At the output end of the stepping motor (10), a lead screw (11) is provided. On the outer surface of the lead screw (11), a sliding seat (12) is provided. On the outer surface of the sliding seat (12), a grinding device (3) is provided. In the middle of the lower surface of the workbench (1), a first motor (4) is provided. At the top of the first motor (4), a bent rotating rod (5) is provided. At the end of the bent rotating rod (5), a fixing device (6) is fixedly connected. Inside the workbench (1), a cleaning device (7) and a collection tank (8) are provided. The fixing device (6) includes an annular seat (601). On the inner surface of the annular seat (601), a first electric cylinder (602) is provided. At the output end of the first electric cylinder (602), an L-shaped base (604) is provided. On the side wall of the L-shaped base (604), a fine-tuning mechanism (605) is provided. Inside the L-shaped base (604), an oil cavity (607) is provided. The fine-tuning mechanism (605) includes a heat preservation sleeve (6051). At the end of the inner surface of the heat preservation sleeve (6051), a shape memory alloy spring (6052) is fixedly connected. Inside the heat preservation sleeve (6051), a semiconductor refrigeration sheet (6055) is provided. At the end of the shape memory alloy spring (6052), a connecting plate (6053) is fixedly connected. On the side of the connecting plate (6053) away from the shape memory alloy spring (6052), a push rod (6054) is fixedly connected. At the end of the push rod (6054) away from the connecting plate (6053), a clamping plate (606) is fixedly connected.
2. The processing device for a high-precision plane mirror according to claim 1, wherein: The vertical part of the bent rotating rod (5) penetrates through the workbench (1). The fixing device (6) is arranged on the upper surface of the workbench (1). At the bottom of the collection tank (8), a cover (9) is provided.
3. The processing device for a high-precision plane mirror according to claim 1, characterized in that: On the outer surface of the side frame (2), an air pump (13) is provided. On the outer surface of the air pump (13), an air duct (14) is provided. At the end of the air duct (14) away from the air pump (13), an air jet head (15) is fixedly connected. Both the grinding device (3) and the air jet head (15) are arranged above the collection tank (8).
4. The processing device for a high-precision plane mirror according to claim 1, wherein: The grinding device (3) includes a second motor (301) and a connecting rotating rod (302). The second motor (301) is fixedly arranged on the outer surface of the sliding seat (12). The end of the connecting rotating rod (302) is rotatably connected to the outer surface of the sliding seat (12). At the output end of the second motor (301), a rotating shaft (303) is fixedly connected. At the output end of the rotating shaft (303), a first gear (304) is fixedly connected. On the outer surface of the connecting rotating rod (302), a second gear (305) is fixedly connected. The outer surface of the first gear (304) meshes with the outer surface of the second gear (305).
5. The processing device for a high-precision plane mirror according to claim 4, characterized in that: One end of the connecting rotating rod (302) far from the sliding seat (12) is fixedly connected with a fixing frame (306). A double-headed motor (307) is arranged on the outer surface of the fixing frame (306). The output shafts of the double-headed motor (307) are fixedly connected with a rough grinding head (308) and a fine grinding head (309).
6. The processing device for a high-precision plane mirror according to claim 1, characterized in that: The outer surface of the annular seat (601) is fixedly connected with the end of the horizontal part of the bending rotating rod (5). The first electric cylinders (602) and the L-shaped bases (604) are arranged annularly around the central axis of the annular seat (601). The first balls (603) are arranged at the bottom of the annular seat (601). The bottoms of the first balls (603) are in contact with the upper surface of the workbench (1). A push plate (608) is arranged on the inner surface of the oil cavity (607). A support rod (609) is fixedly connected to the upper surface of the push plate (608). The outer surface of the support rod (609) is sleeved inside the L-shaped base (604). The top of the support rod (609) is fixedly connected with a bottom plate (610). The second balls (611) are arranged on the upper surface of the bottom plate (610). The bottom plate (610) is arranged below the clamping plate (606).
7. The processing device for a high-precision plane mirror according to claim 1, characterized in that: The end of the heat preservation sleeve (6051) is fixedly connected to the side wall of the L-shaped base (604). The outer surface of the connecting plate (6053) is sleeved inside the heat preservation sleeve (6051). The outer surface of the push rod (6054) penetrates through the heat preservation sleeve (6051) and extends to the outside.
8. The processing device for a high-precision plane mirror according to claim 1, characterized in that: The cleaning device (7) includes a fixed barrel (701). The top of the fixed barrel (701) is fixedly connected inside the workbench (1). An ultrasonic generator (702) and a transducer (703) are arranged at the bottom of the inner surface of the fixed barrel (701). A cleaning tank body (704) is arranged on the top of the transducer (703). A liquid inlet pipe (708) and a sewage discharge pipe (709) are fixedly connected to the inner surface of the cleaning tank body (704). The outer surfaces of the liquid inlet pipe (708) and the sewage discharge pipe (709) penetrate through the through holes of the fixed barrel (701) and extend to the outside.
9. The processing device for a high-precision plane mirror according to claim 8, characterized in that: A fixed block (705) is fixedly connected to the inner surface of the fixed barrel (701). A second electric cylinder (706) is arranged on the lower surface of the fixed block (705). A support net (707) is arranged at the bottom end of the second electric cylinder (706). The outer surface of the support net (707) is adapted to the inner surface of the cleaning tank body (704).
10. The processing device for a high-precision plane mirror according to claim 8, characterized in that: The outer surface of the fixed barrel (701) is fixedly connected with an external housing (710). The inner wall of the external housing (710) is fixedly connected with an air duct (711). A fan (713) is arranged inside the air duct (711). A dust filter net (712) is arranged at the end of the air duct (711). An electric heating element (714) is arranged inside the external housing (710). The electric heating element (714) is arranged opposite to the fan (713). One side of the external housing (710) away from the air duct (711) is fixedly connected with an air inlet pipe (715). The inner wall of the fixed barrel (701) is fixedly connected with an air exhaust pipe (716). The outer surface of the air inlet pipe (715) penetrates through the external housing (710) and extends into the inner cavity of the fixed barrel (701). The outer surface of the air exhaust pipe (716) penetrates through the fixed barrel (701) and extends to the outside.