Thermal evaporation type AR / VR olfaction generator based on electrostatic MEMS switch

Abstract

The invention provides a thermal evaporation type AR / VR smell generator based on an electrostatic MEMS switch, which adopts a brand-new driving mode of heating and evaporating gas and a mode of statically driving gas release, and the two modes are combined to control the generation of smell; meanwhile, an electrostatic driving film bridge switch control structure manufactured on the basis of the MEMS process is further adopted, rapid mechanical response can be achieved under normal bias voltage, and millimeter-level odor release is achieved.

Description

Technical Field

[0001] The present invention belongs to the field of integrated circuit technology, and particularly relates to a thermal evaporation type AR / VR olfactory generator based on an electrostatic MEMS switch. Background Art

[0002] As the oldest multimodal perception system in the process of human evolution, olfaction has irreplaceable biological value in environmental perception, emotional memory and survival decision-making. Current odor generation technologies have been initially applied in fields such as human-computer interaction (such as VR / AR), education (odor-assisted memory training), medical treatment (olfactory disorder rehabilitation) and entertainment (4D cinemas), etc., but their development lags significantly behind mature perception technologies such as touch, vision, and hearing. Existing odor generator manufacturing technologies are mainly based on two core types. The first is the piezoelectric atomizer, which atomizes and releases liquid odorants through the piezoelectric effect, but has problems such as slow response time (in seconds) and bulky volume. The second is odor wax phase change, which volatilizes odors by heating solid wax-like odorants, and also faces limitations such as response delay and high power consumption.

[0003] In summary, the existing odor generation technologies are restricted by three core bottlenecks:

[0004] 1. Volume limitation: Traditional devices rely on bulky air pumps / liquid storage devices and are difficult to achieve wearable integration.

[0005] 2. Response delay: The odor release speed in seconds (>1 second) cannot meet the requirements of real-time interaction.

[0006] 3. Energy consumption contradiction: High-power heating / driving modules restrict applications in mobile scenarios.

[0007] This technological stagnation has led to the existing systems still remaining in the stage of laboratory or fixed-site applications. With the upgrade of multimodal human-computer interaction requirements, technological evolution is developing towards a miniaturized wearable architecture. Summary of the Invention

[0008] To solve the above problems, the present invention provides a thermal evaporation type AR / VR olfactory generator based on an electrostatic MEMS switch, which controls the opening and closing of air holes through an electrostatically driven MEMS membrane bridge switch to achieve the release of millimeter-level odors.

[0009] A thermal evaporation type AR / VR olfactory generator based on an electrostatic MEMS switch includes a cavity, a perforated top plate, a membrane bridge, an odor medium, and a mobile voltage source, wherein the cavity is composed of an outer wall and a heating bottom plate;

[0010] The perforated top plate is installed at the top of the cavity; the membrane bridge is suspended under the through-hole of the perforated top plate; a mobile voltage source is used to apply a bias voltage between the perforated top plate and the membrane bridge. When the voltage difference between the two is greater than the set threshold, the membrane bridge adsorbs towards the perforated top plate to block the through-hole, making the through-hole in a closed state; when the voltage difference between the two is not greater than the set threshold, the distance between the membrane bridge and the perforated top plate decreases but the through-hole cannot be blocked, making the through-hole in an open state; the odor medium is located inside the cavity; the heating bottom plate is used to heat the odor medium so that the odor escapes from the through-hole in the open state.

[0011] Further, the middle part of the membrane bridge is a square baffle, and mounting rods extend outward from the four corner points of the square baffle. Then, the membrane bridge is suspended and installed under the through-hole of the perforated top plate through the end points of the four mounting rods.

[0012] Further, the membrane bridge is a flat thin film structure, and the membrane bridge is suspended and installed under the through-hole of the perforated top plate through the edge of the flat thin film structure.

[0013] Further, the membrane bridge is an arc-shaped thin film structure, and the membrane bridge is suspended and installed under the through-hole of the perforated top plate through the edge of the arc-shaped thin film structure.

[0014] Further, the greater the distance between the membrane bridge and the perforated top plate, the greater the set threshold; the greater the Young's modulus of the material used for the membrane bridge, the greater the set threshold; the greater the width of the membrane bridge, the greater the set threshold; the greater the length of the membrane bridge, the smaller the set threshold; the greater the thickness of the membrane bridge, the greater the set threshold.

[0015] Further, three through-holes are opened on the perforated top plate, and a membrane bridge is suspended and installed under each of the three through-holes. Moreover, the distances between each membrane bridge and the perforated top plate are different, and the materials, lengths, widths, and thicknesses of each membrane bridge are not completely the same, such that the three membrane bridges correspond to different set thresholds;

[0016] The three membrane bridges are all grounded, and different bias voltages are applied to the perforated top plate through a mobile voltage source, thereby changing the number of open through-holes among the three through-holes to adjust the odor flow rate accordingly.

[0017] Further, two partition plates are arranged inside the cavity, dividing the cavity into three sub-chambers; the odor media in each sub-chamber are different, and each sub-chamber corresponds to a set of through-hole - membrane bridge combinations;

[0018] By applying different bias voltages to the perforated top plate through a mobile voltage source, the number of open through-holes among the three through-holes is changed, thereby adjusting the odor flow rate and mixing degree.

[0019] Further, when the moving voltage source applies a bias voltage between the perforated top plate and the membrane bridge, the bias voltage is applied to the perforated top plate and the membrane bridge is grounded; alternatively, the bias voltage is applied to the membrane bridge and the perforated top plate is grounded.

[0020] Further, the moving voltage source also provides a heating voltage to the heating bottom plate, and the greater the heating voltage, the faster the evaporation rate of the odor medium and the greater the odor flow rate.

[0021] Further, the odor medium is a liquid or a solid. When the odor medium is a liquid, the odor medium is ethanol, propylene glycol, or ethyl acetate; when the odor medium is a solid, the odor medium is a solid wax-like odorant.

[0022] Beneficial effects:

[0023] 1. The present invention provides a thermal evaporation type AR / VR olfactory generator based on an electrostatic MEMS switch, which adopts a brand-new driving mode for heating and evaporating gas and an electrostatic driving gas release mode, and the two jointly control the generation of odor; at the same time, the present invention also adopts an electrostatic driving membrane bridge switch control structure manufactured based on the MEMS process, which can achieve fast mechanical response under normal bias voltage and realize the release of odor at the millimeter level.

[0024] 2. The present invention provides a thermal evaporation type AR / VR olfactory generator based on an electrostatic MEMS switch, which designs an array-arranged membrane bridge switch, and each switch corresponds to a through hole, and can accurately realize the opening and closing of each hole, thereby controlling the size of the gas flow.

[0025] 3. The present invention provides a thermal evaporation type AR / VR olfactory generator based on an electrostatic MEMS switch, which designs an odor generator with partitions, and can realize the generation and switching of different odors. Description of the drawings

[0026] Figure 1 It is a three-dimensional structure diagram of the olfactory generator provided by the present invention;

[0027] Figure 2 It is a two-dimensional cross-sectional view of the olfactory generator provided by the present invention;

[0028] Figure 3 It is the working principle of dual driving of thermal evaporation and electrostatics provided by the present invention;

[0029] Figure 4 It is a three-dimensional diagram of the membrane bridge displacement result when no voltage is applied to the top plate provided by the present invention;

[0030] Figure 5 It is a two-dimensional cross-sectional view of the membrane bridge displacement result in two directions when no voltage is applied to the top plate provided by the present invention;

[0031] Figure 6 3D diagram of the membrane bridge displacement results when a voltage of 40V is applied to the top plate provided by the present invention;

[0032] Figure 7 2D cross-sectional diagrams in two directions of the membrane bridge displacement results when a voltage of 40V is applied to the top plate provided by the present invention;

[0033] Figure 8 Quarter structure of the simulation modeling of the membrane bridge switch in the open and closed states provided by the present invention;

[0034] Figure 9 Flow field diagrams inside and outside the device when the membrane bridge switch provided by the present invention is closed;

[0035] Figure 10 Flow field diagrams inside and outside the device when the membrane bridge switch provided by the present invention is open;

[0036] Figure 11(a) shows the change in the concentration of fragrance vapor at the outlet over time within ten seconds when the membrane bridge switch provided by the present invention is open;

[0037] Figure 11(b) shows the result diagram of 0.1s with a partial box magnification of Figure 11(a) provided by the present invention;

[0038] Figure 12 2D cross-sectional diagram of the array-arranged membrane bridge switch provided by the present invention;

[0039] Figure 13 2D cross-sectional diagram of the olfactory generator with a partition provided by the present invention;

[0040] Figure 14 Schematic diagram of the membrane bridge of the flat thin film structure provided by the present invention;

[0041] Figure 15 Schematic diagram of the membrane bridge of the arc-shaped thin film structure provided by the present invention. Detailed implementation manners

[0042] In order to enable those skilled in the art of the present technology to better understand the solutions of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present application.

[0043] A thermal evaporation type AR / VR olfactory generator based on an electrostatic MEMS switch includes a cavity, a perforated top plate, a membrane bridge, an odor medium, and a mobile voltage source. Among them, the cavity is composed of an outer wall and a heating bottom plate;

[0044] The perforated top plate is installed at the top of the cavity; the membrane bridge is suspended and installed below the through hole of the perforated top plate; the mobile voltage source is used to apply a bias voltage between the perforated top plate and the membrane bridge. When the voltage difference between the two is greater than the set threshold, the membrane bridge adsorbs towards the perforated top plate to block the through hole, making the through hole in a closed state; when the voltage difference between the two is not greater than the set threshold, the distance between the membrane bridge and the perforated top plate decreases but the through hole cannot be blocked, making the through hole in an open state; the odor medium is located inside the cavity; the heating bottom plate is used to heat the odor medium so that the odor escapes from the through hole in the open state.

[0045] That is to say, the olfactory generator of the present invention mainly consists of two parts: an electrostatically driven MEMS membrane bridge switch at the top and a heating bottom plate at the bottom, jointly controlling the generation of odors. Figure 1 is a three-dimensional structure diagram of the complete device, Figure 2 is a two-dimensional cross-sectional view at the midline of the device. ① is the overall structure of the device, with a radius of 1 mm and a height of 1 mm. The outer structure of the device includes a 50-μm-thick perforated top plate ②, where the radius of the hole is 100 μm; a 100-μm-thick outer wall ③ and a 50-μm-thick heating bottom plate ⑤; the internal structure includes a heated liquid or solid ④ and a membrane bridge ⑥ suspended below the perforated top plate ②. The heating medium can be an essence liquid such as ethanol, propylene glycol, ethyl acetate, etc., or a solid wax-like odorant; the thickness of the membrane bridge ⑥ is 3 μm, the gap distance between it and the perforated top plate ② is 12 μm, the overall length of the membrane bridge is 600 μm, the width is 300 μm, where the side length of the square baffle ⑦ is 300 μm, and the anchor point ⑧ is used to connect the membrane bridge to the top plate, and the side length of the anchor point ⑧ is 10 μm.

[0046] It should be noted that the membrane bridge can also be in other structural forms. Such as Figure 14 the flat thin film structure shown, then the membrane bridge is suspended and installed below the through hole of the perforated top plate through the edge of the flat thin film structure. Such as Figure 15 the arc thin film structure shown, then the membrane bridge is suspended and installed below the through hole of the perforated top plate through the edge of the arc thin film structure. It can be seen that as long as the structure that can be electrostatically attracted to the top plate and block the through hole can be used as the membrane bridge structure.

[0047] The working principle of the present invention is as follows:

[0048] The present invention relates to an odor generator based on dual driving of thermal evaporation and electrostatic, and its working principle is as Figure 3As shown in the figure. First, whether the odor can escape depends on whether a voltage is applied to the top plate. The distance between the top plate and the membrane bridge below it is extremely small. When a voltage is applied to the top plate and the membrane bridge is grounded, they form a parallel-plate capacitor structure. Since the thickness of the membrane bridge is much smaller than that of the top plate, the electrostatic force generated between them will cause the membrane bridge to adsorb towards the top plate. Applying a DC voltage greater than the pull-in voltage to the top plate will cause the membrane bridge to fully adhere to the top plate and block the through-hole, thereby preventing the escape of odor. At this time, regardless of whether the bottom plate heats the liquid, no gas will escape from the device, and thus no odor will be generated. Secondly, when the switch is turned on without applying a voltage, whether the odor can escape depends on whether the bottom plate heats the liquid. The fragrance liquid used in the device usually has a low boiling point, and heating the liquid at a relatively low temperature can promote evaporation. Therefore, when the bottom plate is heated, the fragrance evaporates quickly, generating a large amount of gas that escapes from the through-hole, thereby generating an odor; while when the bottom plate is not heated, only a small amount of gas evaporates naturally, which is not enough to produce an odor.

[0049] It should be noted that in the present invention, by changing the distance between the membrane bridge and the top plate, the critical bias voltage at which each membrane bridge is pulled in is changed. There are also other schemes for changing the critical bias voltage: 1) Changing the membrane bridge material - under the same structure, the flexural rigidity of the membrane bridge is proportional to the Young's modulus of the material. The larger the Young's modulus, the larger the bias voltage, that is, the larger the set threshold. 2) Changing the width of the membrane bridge - the larger the width of the membrane bridge, the greater the flexural rigidity, and the larger the bias voltage, that is, the larger the set threshold. 3) Changing the length of the membrane bridge - the larger the length of the membrane bridge, the smaller the flexural rigidity, and the smaller the bias voltage, that is, the smaller the set threshold. 4) Changing the thickness of the membrane bridge baffle - the larger the thickness of the baffle, the greater the flexural rigidity, and the larger the bias voltage, that is, the larger the set threshold. By adopting the above schemes, the number of switches closed can be controlled by changing the applied voltage, achieving the same effect.

[0050] At the same time, for the method of applying a bias voltage between the perforated top plate and the membrane bridge by the mobile voltage source, it can be chosen to apply the bias voltage at the top plate, and all membrane bridge switches are grounded, which is equivalent to controlling the closing of all switches with only one input voltage. It can also ground the top plate and apply a bias voltage to the membrane bridge, and each membrane bridge switch is controlled by its own input voltage. This multi-channel control mode can also achieve the application of the bias voltage.

[0051] Next, in order to prove that the olfactory generator based on dual driving of thermal evaporation and electrostatics proposed in the present invention can effectively control the opening and closing of the through-hole, the present invention uses COMSOL Multiphysics to perform finite element simulations on the closing of the electrostatically driven MEMS membrane bridge switch and the situation of gas escaping from the through-hole due to thermal evaporation as follows:

[0052] I. Simulation results of the closing of the electrostatically driven MEMS membrane bridge switch

[0053] Since this part of the simulation only involves the closing of the switch near the device vias, only the membrane bridge and the upper part of the top plate structure are modeled. The membrane bridge and the vias both adopt the dimensions of the structural components. Whether to apply voltage at the top plate is selected. The anchor points of the membrane bridge are electrically insulated from the top plate, and the baffle of the membrane bridge is grounded. Regular cuboid air domains are constructed around the membrane bridge to realize the finite element simulation of the mechanical deformation of the membrane bridge under the response of the driving voltage. Figure 4 And Figure 5 are respectively the 3D diagram of the membrane bridge displacement result and the 2D cross-sectional diagrams in two different directions when no voltage is applied to the top plate. The results show that when no voltage is applied, the baffle will not displace upward, there is a gap between it and the top plate, and in addition, the membrane bridge will not collapse downward due to gravity. Figure 6 And Figure 7 are respectively the 3D diagram of the membrane bridge displacement result and the 2D cross-sectional diagrams in two different directions when 40V voltage is applied to the top plate. The results show that when 40V voltage is applied, the baffle displaces upward under the action of electrostatic force and is completely attracted to the top plate, and its response time is only 75 us.

[0054] II. Simulation Results of Gas Escaping from Vias due to Thermal Evaporation

[0055] For this part of the simulation, the finite element simulation of the flow field of the gas generated by thermal evaporation inside and outside the device needs to be carried out separately for the two cases of the switch being on and the switch being off, in order to verify whether the switch structure designed in the previous part can work properly here. Figure 8 is a quarter structure of the device modeling in the on and off states of the switch, which completely adopts the dimensions of the structural components, and only the structure of the baffle is different between the two. Since the device is symmetric in both the x-axis and y-axis directions, a quarter structure is adopted during modeling, and the overall result is obtained by mirroring. Figure 9 is the flow field diagram inside and outside the device when the switch is off. The results show that when the switch is off, although the bottom plate is heating the liquid, the gas generated by evaporation cannot escape from the vias. Figure 10 is the flow field diagram inside and outside the device when the switch is on. The results show that when the switch is on, in the state where the bottom plate is heating the liquid, the gas generated by evaporation can escape from the vias. Figures 11(a) and 11(b) show the change of the concentration of the fragrance vapor at the outlet with time when the switch is on. The results show that within 30 - 40 ms after the start of heating, a relatively high concentration of fragrance vapor is generated at the outlet, and this result also conforms to the simulated flow rate result, indicating that the odor generator designed in the present invention has a good response time.

[0056] Furthermore, based on the above-designed olfactory generator driven by both thermal evaporation and electrostatic force, the present invention can arrange the membrane bridges and the through-hole arrays to achieve precise control of each switch, thereby controlling the magnitude of the vapor flow rate. For example, three through-holes are formed on the perforated top plate, and a membrane bridge is suspended and installed below each of the three through-holes. The distances between each membrane bridge and the perforated top plate are different, and the materials, lengths, widths, and thicknesses of each membrane bridge are not completely the same, such that the three membrane bridges correspond to different set thresholds; the three membrane bridges are all grounded, and different bias voltages are applied to the perforated top plate by moving a voltage source, thereby changing the number of opened through-holes among the three, and adjusting the odor flow rate accordingly.

[0057] Specifically, Figure 12 is a two-dimensional cross-sectional view of an array-arranged membrane bridge switch. The device has a total of three through-holes (2-1, 2-2, 2-3) and three membrane bridges (6-1, 6-2, 6-3). The number of through-holes and membrane bridges is not necessarily determined to be three, and it can be determined according to the overall device size. Figure 12 In, the gap sizes between the three membrane bridges and the top plate are different (the relationship is 6-1 < 6-2 < 6-3). The three membrane bridges are all grounded. Therefore, when a bias voltage is applied to the top plate, the three membrane bridges will undergo different degrees of upward displacement (the relationship is 6-1 > 6-2 > 6-3). Three different applied voltages U1, U2, and U3 can be determined such that the number of closed switches is different under the three voltages. Specifically: when the applied bias voltage < U1, all switches are not fully closed, and all three through-holes are opened, and at this time, the flow rate of the fragrance vapor is the largest. When the bias voltage = U1, only the 6-1 membrane bridge switch is fully closed, and the through-holes 2-2 and 2-3 are opened, and at this time, the flow rate of the fragrance vapor is moderate. When the bias voltage = U2, the 6-1 and 6-2 membrane bridge switches are fully closed, and at this time, only the through-hole 6-3 is opened, and the flow rate of the fragrance vapor is the smallest. When the bias voltage = U3, the three membrane bridge switches are fully closed, and at this time, all three through-holes are closed, and no gas escapes, and the device is turned off.

[0058] Furthermore, based on the above-designed olfactory generator driven by both thermal evaporation and electrostatic force, the present invention can install a partition inside the cavity to generate multiple odors; for example, two partitions are provided inside the cavity, dividing the cavity into three sub-cavities; the odor media in each sub-cavity are different, and each sub-cavity corresponds to a set of through-hole-membrane bridge combinations; different bias voltages are applied to the perforated top plate by moving a voltage source, thereby changing the number of opened through-holes among the three, and adjusting the odor flow rate and mixing degree accordingly.

[0059] Specifically, Figure 13 is a two-dimensional cross-sectional view of an odor generator with a partition. In Figure 12On the basis of Figure 12 it is similar, and the improvement lies in that it can generate multiple odors as needed. Specifically: when a bias voltage < U1 is applied, all switches are not fully closed, and all three through-holes are opened, and at this time, a mixed odor of three kinds of flavor liquids is generated. When the bias voltage = U1, only the 6-1 membrane bridge switch is fully closed, and the through-holes 2-2 and 2-3 are opened, and at this time, a mixed odor of flavor liquids 4-2 and 4-3 is generated. When the bias voltage = U2, the 6-1 and 6-2 membrane bridge switches are fully closed, and at this time, only the through-hole 6-3 is opened, and only the odor of flavor liquid 4-3 is generated. When the bias voltage = U3, the three membrane bridge switches are fully closed, and at this time, all three through-holes are closed, and no gas escapes, and the device is turned off.

[0060] To sum up, the present invention designs an olfactory generator based on dual driving of thermal evaporation and electrostatic force, controls a heating medium, such as the generation of flavor vapor, by heating a bottom plate, and controls the opening and closing of through-holes through an electrostatically driven MEMS membrane bridge switch to realize the release of odors; the present invention realizes the structural design of an olfactory generator at the millimeter level, greatly reduces the volume limitation of the prior art, and is beneficial to integration in wearable devices. In addition, the present invention can achieve an odor release response time of about milliseconds (about 40 ms), as well as an extremely fast switch closing response time, so as to quickly switch the release of different odors and quickly regulate the size of the gas flow.

[0061] Of course, the present invention can also have many other embodiments. Without departing from the spirit and essence of the present invention, those skilled in the art can certainly make various corresponding changes and deformations according to the present invention, but these corresponding changes and deformations should all fall within the protection scope of the appended claims of the present invention.

Claims

1. A thermal evaporation type AR / VR olfactory generator based on an electrostatic MEMS switch, characterized in that, It includes a cavity, a perforated top plate, a membrane bridge, an odor medium, and a mobile voltage source. The cavity is composed of an outer wall and a heating bottom plate. The perforated top plate is installed at the top of the cavity. The membrane bridge is suspended below the through-hole of the perforated top plate. The mobile voltage source is used to apply a bias voltage between the perforated top plate and the membrane bridge. When the voltage difference between the two is greater than the set threshold, the membrane bridge adsorbs towards the perforated top plate to block the through-hole, making the through-hole in a closed state. When the voltage difference between the two is not greater than the set threshold, the distance between the membrane bridge and the perforated top plate decreases but cannot block the through-hole, making the through-hole in an open state. The odor medium is located inside the cavity. The heating bottom plate is used to heat the odor medium so that the odor escapes from the open through-hole.

2. The thermal evaporation type AR / VR olfactory generator based on an electrostatic MEMS switch according to claim 1, wherein The middle of the membrane bridge is a square baffle, and mounting rods extend outward from the four corner points of the square baffle. Then the membrane bridge is suspended and installed below the through-hole of the perforated top plate through the endpoints of the four mounting rods.

3. The thermal evaporation type AR / VR olfactory generator based on an electrostatic MEMS switch according to claim 1, characterized in that, The membrane bridge is a flat thin film structure, and the membrane bridge is suspended and installed below the through-hole of the perforated top plate through the edge of the flat thin film structure.

4. The thermal evaporation type AR / VR olfactory generator based on an electrostatic MEMS switch according to claim 1, characterized in that, The membrane bridge is an arc-shaped thin film structure, and the membrane bridge is suspended and installed below the through-hole of the perforated top plate through the edge of the arc-shaped thin film structure.

5. A thermal evaporation type AR / VR olfactory generator based on an electrostatic MEMS switch according to any one of claims 1 to 4, characterized in that, The larger the distance between the membrane bridge and the perforated top plate, the larger the set threshold. The larger the Young's modulus of the material used for the membrane bridge, the larger the set threshold. The wider the membrane bridge, the larger the set threshold. The longer the membrane bridge, the smaller the set threshold. The thicker the membrane bridge, the larger the set threshold.

6. The thermal evaporation type AR / VR olfactory generator based on an electrostatic MEMS switch according to claim 1, wherein Three through-holes are opened on the perforated top plate, and a membrane bridge is suspended and installed below each of the three through-holes. The distances between each membrane bridge and the perforated top plate are different, and the materials, lengths, widths, and thicknesses of each membrane bridge are not exactly the same, so that the three membrane bridges correspond to different set thresholds. The three membrane bridges are all grounded, and different bias voltages are applied to the perforated top plate through the mobile voltage source, thereby changing the number of open through-holes among the three, so as to adjust the odor flow rate.

7. The thermal evaporation type AR / VR olfactory generator based on an electrostatic MEMS switch according to claim 6, wherein Two partitions are arranged inside the cavity, dividing the cavity into three sub-chambers. The odor media in each sub-chamber are different, and each sub-chamber corresponds to a set of through-hole-membrane bridge combinations. By applying different bias voltages to the perforated top plate through the mobile voltage source, the number of open through-holes among the three is changed, so as to adjust the odor flow rate and mixing degree.

8. The thermal evaporation type AR / VR olfactory generator based on an electrostatic MEMS switch according to claim 1, characterized in that, When the mobile voltage source applies a bias voltage between the perforated top plate and the membrane bridge, a bias voltage is applied to the perforated top plate and the membrane bridge is grounded; or, a bias voltage is applied to the membrane bridge and the perforated top plate is grounded.

9. The thermal evaporation type AR / VR olfactory generator based on an electrostatic MEMS switch according to claim 1, wherein The mobile voltage source also provides a heating voltage to the heating bottom plate, and the greater the heating voltage, the faster the evaporation rate of the odor medium and the greater the odor flow rate.

10. The thermal evaporation type AR / VR olfactory generator based on an electrostatic MEMS switch according to claim 1, characterized in that, The odor medium is a liquid or a solid. When the odor medium is a liquid, the odor medium is ethanol, propylene glycol, or ethyl acetate; when the odor medium is a solid, the odor medium is a solid wax-like odorant.

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