Multi-nozzle large-size plasma generator

Abstract

The invention discloses a multi-nozzle large-size plasma generator. The multi-nozzle large-size plasma generator comprises a hollow shaft brushless motor, a ground electrode seat, a ground electrode sealing cover and a ground electrode nozzle assembly, according to the multi-nozzle large-size plasma generator, a ground electrode base and the shaft end of a hollow shaft brushless motor are sealed in an inserted mode, a connecting end cover is arranged at the top of the ground electrode base, a metal circular ring piece matched with the connecting end cover is arranged on the inner side of the connecting end cover, and the metal circular ring piece is connected to the output shaft end of the hollow shaft brushless motor through a clamping spring; a ground electrode sealing cover is fixedly installed at the bottom of the ground electrode base through bolts, a plurality of ground electrode nozzle assemblies are installed on the circumference of the bottom of the ground electrode sealing cover, a conductive sliding ring is installed in the ground electrode base, and high-voltage electrodes corresponding to the ground electrode nozzle assemblies are installed in the ground electrode sealing cover. The hollow shaft brushless motor drives the ground electrode base and the ground electrode sealing cover to rotate, so that the ground electrode nozzle assembly is driven to rotate, and a large normal-pressure non-thermal arc plasma jet covering area is formed.

Description

Technical Field

[0001] The present invention relates to the field of plasma technology, and particularly to a multi-nozzle large-size plasma generator. Background Art

[0002] For low-pressure discharges, since the gas density is relatively low and the collision frequency between electrons and neutral particles is also relatively low, electrons are relatively easy to obtain high energy under the action of an electric field. This makes ionization relatively easy to occur, resulting in relatively easy acquisition of a high-density plasma under low-pressure conditions. At this time, the concentration of active particles is also relatively high, and at the same time, it can ensure that the gas temperature remains at a relatively low level. This makes low-pressure non-equilibrium plasmas widely used in industry, such as plasma etching, material surface modification and cleaning, improving the biocompatibility of materials, generating nanomaterials, etc. In addition, it is relatively easy to generate uniform plasmas under low pressure, which is crucial for many applications such as surface modification and etching.

[0003] To overcome the above-mentioned drawbacks, in recent years, researchers have developed atmospheric-pressure non-equilibrium plasma jets. Since atmospheric-pressure non-equilibrium plasma jets can generate atmospheric-pressure non-equilibrium plasmas in open spaces rather than in gaps, this makes it possible to realize many applications. Although atmospheric-pressure plasmas have a wide range of applications, there is a problem of small size in the existing atmospheric pressure. Therefore, a multi-nozzle large-size plasma generator is proposed to solve this problem. Summary of the Invention

[0004] The purpose of the present invention is to provide a multi-nozzle large-size plasma generator to solve the problems raised in the above background art.

[0005] To achieve the above purpose, the present invention provides the following technical solutions:

[0006] A multi-nozzle large-size plasma generator includes a stationary component and a rotating component. The rotating component is assembled and installed on the rotating head of the stationary component. The stationary component includes a hollow-shaft brushless motor. The rotating component includes a ground electrode seat. The ground electrode seat is inserted and sealed with the shaft end of the hollow-shaft brushless motor. A connection end cover is provided at the top of the ground electrode seat. An inner side of the connection end cover is provided with a metal ring plate adapted thereto. The metal ring plate is connected to the output shaft end of the hollow-shaft brushless motor by a snap ring. A ring groove adapted to the snap ring is provided on the output shaft end of the hollow-shaft brushless motor. The metal ring plate is fixedly installed with the connection end cover by bolts. A clamping and fixing effect is formed by the cooperation of the metal ring plate, the connection end cover and the snap ring. A ground electrode cover is fixedly installed at the bottom of the ground electrode seat by bolts. A plurality of ground electrode nozzle assemblies are installed around the bottom circumference of the ground electrode cover. A conductive slip ring is installed in the ground electrode seat. A high-voltage electrode is installed in the ground electrode cover corresponding to each ground electrode nozzle assembly.

[0007] As a further solution of the present invention: A lengthened fixed cylinder adapted to it is press-fitted on the top of the housing of the hollow shaft brushless motor. A rear end cover adapted to it is press-fitted on the top of the lengthened fixed cylinder. The rear end cover is fixedly connected to the top of the hollow shaft brushless motor by bolts. An intermediate electrical channel is provided on the rear end cover. A gas cavity is formed at the tail end of the hollow shaft brushless motor through the rear end cover and the lengthened fixed cylinder, which is convenient for forming a gas path connection with the gas path hole.

[0008] As a further solution of the present invention: An electrical pipeline adapted to it is movably penetrated through the hollow shaft of the hollow shaft brushless motor. The tail end of the electrical pipeline is fixedly installed on the housing of the hollow shaft brushless motor by bolts. A high-voltage wire hole is provided at the center of the tail end of the electrical pipeline, and a gas path hole is provided at the eccentric position of the tail end of the electrical pipeline. The tail end of the electrical pipeline is provided with a blind flange.

[0009] As a further solution of the present invention: A first insulating ring is fixedly connected by plugging at the bottom end of the electrical pipeline. A second insulating ring adapted to it is embedded inside the ground electrode seat. A special-shaped insulating ring adapted to it is embedded inside the ground electrode cover.

[0010] As a further solution of the present invention: A plug is provided at the bottom end of the first insulating ring, and a ventilation hole is provided inside the plug. The stator end of the conductive slip ring is fixedly connected to the plug. The rotor end of the conductive slip ring is fixedly connected inside the first air swirling ring. The first air swirling ring is fixedly connected inside the second insulating ring. The high-voltage electrode is fixedly connected inside the second air swirling ring. Gas flow channels are provided on the ground electrode cover and the special-shaped insulating ring corresponding to each ground electrode nozzle assembly. The second air swirling ring is fixedly connected inside the gas flow channel on the special-shaped insulating ring. Ventilation holes are provided on both the first air swirling ring and the second air swirling ring.

[0011] As a further solution of the present invention: The stator end of the conductive slip ring is connected to a high-voltage wire. The rotor end of the conductive slip ring is connected in parallel with multiple high-voltage electrodes. A constant voltage module can be connected in series on the connection line of the high-voltage electrode.

[0012] As a further solution of the present invention: A ground wire is connected to the rear end face of the hollow shaft brushless motor. The hollow shaft brushless motor, the ground electrode seat, the ground electrode cover and the ground electrode nozzle assembly are all made of metal conductive materials.

[0013] As a further solution of the present invention: The ground electrode nozzle assembly includes a double-headed threaded connection seat, a threaded gland and a nozzle head. The double-headed threaded connection seat is threadedly connected to the ground electrode cover. The threaded gland is threadedly connected to the double-headed threaded connection seat. A spherical cavity is provided on both the double-headed threaded connection seat and the threaded gland. The tail end of the nozzle head is threadedly connected with a spherical head, and the spherical head is press-fitted and installed inside the spherical cavity. The nozzle head penetrates through the threaded gland.

[0014] As a further solution of the present invention: an installation platform is provided on the outer wall of the hollow shaft brushless motor, and the hollow shaft brushless motor is fixedly installed with the equipment host through the installation platform.

[0015] Compared with the prior art, the beneficial effects of the present invention are:

[0016] 1. The present invention drives the ground electrode seat and the ground electrode cover to rotate through the hollow shaft brushless motor, thereby driving the ground electrode nozzle assembly to rotate, forming a large coverage area of the atmospheric pressure non-thermal arc plasma jet.

[0017] 2. In the present invention, the nozzle head is connected in the spherical cavity between the threaded gland and the double-headed threaded connection seat through a spherical head, so that the angle of the nozzle head can be adjusted and misaligned adjusted, thereby forming a multi-ring atmospheric pressure non-thermal arc plasma jet. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic structural diagram of a multi-nozzle large-size plasma generator.

[0019] Figure 2 It is a cross-sectional view of a multi-nozzle large-size plasma generator.

[0020] Figure 3 It is an enlarged view of A in a multi-nozzle large-size plasma generator.

[0021] Figure 4 It is a display diagram of the electrical pipeline in a multi-nozzle large-size plasma generator.

[0022] Figure 5 It is an upward perspective view of a multi-nozzle large-size plasma generator.

[0023] In the figure: 1. Stationary component; 2. Rotating component; 3. Hollow shaft brushless motor; 4. Extended fixed cylinder; 5. Rear end cover; 6. Intermediate electrical channel; 7. Ground electrode seat; 8. Connecting end cover; 9. Metal ring plate; 10. Snap ring; 11. Ground electrode cover; 12. Ground electrode nozzle assembly; 13. Conductive slip ring; 14. Electrical pipeline; 15. High-voltage wire hole; 16. Gas path hole; 17. First insulating ring; 18. Second insulating ring; 19. Special-shaped insulating ring; 20. High-voltage electrode; 21. Vent hole; 22. First swirling gas ring; 23. Second swirling gas ring; 24. Double-headed threaded connection seat; 25. Threaded gland; 26. Nozzle head; 27. Spherical cavity; 28. Spherical head; 29. Installation platform. DETAILED DESCRIPTION OF THE INVENTION

[0024] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0025] Please refer to Figures 1 to 5 , in an embodiment of the present invention, a multi-nozzle large-size plasma generator includes a stationary component 1 and a rotating component 2. The rotating component 2 is assembled and installed on the rotating head of the stationary component 1. The stationary component 1 includes a hollow shaft brushless motor 3. The rotating component 2 includes a ground electrode seat 7. The ground electrode seat 7 is inserted and sealed with the shaft end of the hollow shaft brushless motor 3. A connection end cover 8 is provided at the top of the ground electrode seat 7. A metal ring plate 9 adapted thereto is provided inside the connection end cover 8. The metal ring plate 9 is connected to the output shaft end of the hollow shaft brushless motor 3 through a snap ring 10. A ring groove adapted to the snap ring 10 is provided on the output shaft end of the hollow shaft brushless motor 3. The metal ring plate 9 is fixedly installed with the connection end cover 8 through bolts. The metal ring plate 9 and the connection end cover 8 cooperate with the snap ring 10 to form a clamping and fixing effect. The bottom of the ground electrode seat 7 is fixedly installed with a ground electrode sealing cover 11 through bolts. A plurality of ground electrode nozzle assemblies 12 are installed on the circumference of the bottom of the ground electrode sealing cover 11. A conductive slip ring 13 is installed inside the ground electrode seat 7. A high-voltage electrode 20 is installed inside the ground electrode sealing cover 11 corresponding to each ground electrode nozzle assembly 12.

[0026] A lengthened fixed cylinder 4 adapted thereto is pressed on the top of the housing of the hollow shaft brushless motor 3. A rear end cover 5 adapted thereto is pressed on the top of the lengthened fixed cylinder 4. The rear end cover 5 is fixedly connected to the top of the hollow shaft brushless motor 3 through bolts. An intermediate electrical channel 6 is provided on the rear end cover 5. A gas chamber is formed at the tail end of the hollow shaft brushless motor 3 through the rear end cover 5 and the lengthened fixed cylinder 4, which is convenient for forming a gas path connection with the gas path hole 16.

[0027] An electrical pipeline 14 adapted thereto is movably penetrated through the hollow shaft of the hollow shaft brushless motor 3. The tail end of the electrical pipeline 14 is fixedly installed with the housing of the hollow shaft brushless motor 3 through bolts. A high-voltage wire hole 15 is provided at the center of the tail end of the electrical pipeline 14. A gas path hole 16 is provided at the eccentric position of the tail end of the electrical pipeline 14. The tail end of the electrical pipeline 14 is provided with a blind flange.

[0028] A first insulating ring 17 is fixedly connected by inserting at the bottom end of the electrical pipeline 14. A second insulating ring 18 adapted thereto is embedded inside the ground electrode seat 7. A special-shaped insulating ring 19 adapted thereto is embedded inside the ground electrode sealing cover 11. The first insulating ring 17, the second insulating ring 18, and the special-shaped insulating ring 19 can be processed from insulating materials such as polytetrafluoroethylene and insulating ceramics.

[0029] A seal is provided at the bottom end of the first insulating ring 17, and air vents 21 are provided inside the seal. The stator end of the conductive slip ring 13 is fixedly connected to the seal, the rotor end of the conductive slip ring 13 is fixedly connected inside the first air swirling ring 22, the first air swirling ring 22 is fixedly connected inside the second insulating ring 18, the high-voltage electrode 20 is fixedly connected inside the second air swirling ring 23, and gas flow channels are provided on the ground electrode cover 11 and the special-shaped insulating ring 19 corresponding to each ground electrode nozzle assembly 12. The second air swirling ring 23 is fixedly connected inside the gas flow channel on the special-shaped insulating ring 19, and air vents are provided on both the first air swirling ring 22 and the second air swirling ring 23.

[0030] The stator end of the conductive slip ring 13 is connected to a high-voltage wire, the rotor end of the conductive slip ring 13 is connected in parallel with a plurality of high-voltage electrodes 20, and a constant voltage module can be connected in series on the connection line of the high-voltage electrode 20.

[0031] A ground wire is connected to the rear end face of the hollow shaft brushless motor 3, and the hollow shaft brushless motor 3, the ground electrode seat 7, the ground electrode cover 11 and the ground electrode nozzle assembly 12 are all made of metal conductive materials.

[0032] The ground electrode nozzle assembly 12 includes a double-headed threaded connection seat 24, a threaded gland 25 and a nozzle head 26. The double-headed threaded connection seat 24 is threadedly connected to the ground electrode cover 11, the threaded gland 25 is threadedly connected to the double-headed threaded connection seat 24, a spherical cavity 27 is provided on both the double-headed threaded connection seat 24 and the threaded gland 25, the tail end of the nozzle head 26 is threadedly connected with a spherical head 28, and the spherical head 28 is press-fitted and installed in the spherical cavity 27, and the nozzle head 26 passes through the threaded gland 25.

[0033] An installation platform 29 is provided on the outer wall of the hollow shaft brushless motor 3, and the hollow shaft brushless motor 3 is fixedly installed with the equipment host through the installation platform 29.

[0034] Gas path: The air pipe is connected to the intermediate electrical channel 6 on the rear end cover 5, enters the gas cavity formed between the elongated fixed cylinder 4, the rear end cover 5 and the housing of the hollow shaft brushless motor 3 through the intermediate electrical channel 6, further enters the electrical pipeline 14 through the air path hole 16, enters the second insulating ring 18 through the air vents 21 on the first insulating ring 17, enters the special-shaped insulating ring 19 inside the ground electrode cover 11 through the air vents on the first air swirling ring 22, passes through the air vents on the second air swirling ring 23, and then flows through the gas flow channel to the ground electrode nozzle assembly 12, flows to the tip of the high-voltage electrode 20, and a plasma is formed by breakdown between the high-voltage electrode 20 and the ground electrode nozzle assembly 12. The plasma jet flows out along a plurality of nozzles.

[0035] High voltage: The high-voltage wire enters along the middle electrical channel 6 of the rear engine cover 5, further enters the electrical pipeline 14 through the high-voltage wire hole 15, and is connected to the stator end of the conductive slip ring 13 (a rotating module that can conduct high voltage). The rotor end of the conductive slip ring 13 is connected to multiple identical branches, and each branch is sequentially connected to the voltage constant module and the high-voltage electrode 20 with high-voltage wires. The high-voltage transmission part needs to be electrically isolated from the surrounding components. From top to bottom, the first insulating ring 17, the second insulating ring 18, and the special-shaped insulating ring 19 are used to isolate the peripheral conductive ground electrode seat 7 and the ground electrode cover 11.

[0036] Ground wire: The ground wire enters along the middle electrical channel 6 of the rear engine cover 5 and is fixed on the rear end face of the hollow shaft brushless motor 3. The brushless electrode, the ground electrode seat 7, the ground electrode cover 11, and the ground electrode nozzle assembly 12 are metal materials that connect to the ground electrode of the power supply. Plasma is generated by high-voltage breakdown at a certain point on the inner wall of the ground electrode nozzle assembly 12 and the tip of the high-voltage electrode 20.

[0037] The brushless motor has a hollow structure, with an air path and a high-voltage wire in the core. The high-voltage wire connects the conductive slip ring 13 to the stationary part of the whole machine. The other end of the conductive slip ring 13 is connected to the high-voltage output, which is divided into two. This part rotates with the motor. The polytetrafluoro component isolates the high voltage and the ground electrode. The external is the ground electrode, and the internal is the high-voltage electrode 20. Plasma is generated by discharging between the high-voltage electrode 20 and the channel of the ground electrode nozzle assembly 12. The distance between the two nozzle heads 26 is adjustable, and the generated plasma jet can cover an area with a diameter exceeding 200 mm.

[0038] Furthermore, the number of ground electrode nozzles can be three or more, and the ground electrodes can be asymmetrically arranged, which can generate multiple layers of plasma jet rings.

[0039] The working principle of the present invention is:

[0040] In use, the ground electrode seat 7 is rotated by the hollow shaft brushless motor 3, and then the ground electrode nozzle assembly 12 is driven to rotate by the ground electrode cover 11. At this time, air is introduced through the intermediate electrical channel 6 on the rear end cover 5 and the high-voltage wire is introduced. At the same time, the power supply ground electrode wire is introduced through the intermediate electrical channel 6. The gas enters the electrical pipeline 14 through the gas path hole 16, and the high-voltage wire enters the electrical pipeline 14 through the high-voltage wire hole 15. At this time, the gas further passes through the breathable hole 21, the first swirling ring 22 and the second swirling ring 23 to drive the end of the high-voltage electrode 20. The high voltage is connected through the conductive slip ring 13 and shunted to the high-voltage electrode 20. The ground electrode wire reaches the gas flow channel between the high-voltage electrode 20 and the ground electrode nozzle assembly 12 through the brushless electrode, the ground electrode seat 7 and the ground electrode cover 11. Discharge occurs between the channels of the high-voltage electrode 20 and the ground electrode nozzle assembly 12 to generate plasma. At this time, the nozzle head 26 rotates, so that the generated plasma jet can cover an area with a diameter exceeding 200 mm. Further, by turning the threaded gland 25, the angle of the nozzle head 26 can be adjusted under the cooperation of the spherical cavity 27 and the spherical head 28 to form an asymmetric setting, so that a multi-ring atmospheric non-thermal arc plasma jet can be formed.

[0041] Although the present invention has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A multi-nozzle large-size plasma generator, comprising a stationary component (1) and a rotating component (2), characterized in that: The rotating assembly (2) is assembled and installed on the rotating head of the stationary assembly (1). The stationary assembly (1) includes a hollow shaft brushless motor (3). The rotating assembly (2) includes a ground electrode seat (7). The ground electrode seat (7) is inserted and sealed with the shaft end of the hollow shaft brushless motor (3). A connection end cover (8) is provided at the top of the ground electrode seat (7). A metal ring plate (9) adapted thereto is provided inside the connection end cover (8). The metal ring plate (9) is connected to the output shaft end of the hollow shaft brushless motor (3) by a snap ring (10). The metal ring plate (9) is fixedly installed with the connection end cover (8) by bolts. A ground electrode cover (11) is fixedly installed at the bottom of the ground electrode seat (7) by bolts. A plurality of ground electrode nozzle assemblies (12) are installed on the bottom circumference of the ground electrode cover (11). A conductive slip ring (13) is installed inside the ground electrode seat (7). A high-voltage electrode (20) is installed inside the ground electrode cover (11) corresponding to each ground electrode nozzle assembly (12).

2. The multi-nozzle large-size plasma generator according to claim 1, characterized in that: A lengthened fixed cylinder (4) adapted thereto is pressed on the top of the housing of the hollow shaft brushless motor (3). A rear end cover (5) adapted thereto is pressed on the top of the lengthened fixed cylinder (4). The rear end cover (5) is fixedly connected to the top of the hollow shaft brushless motor (3) by bolts. An intermediate electrical channel (6) is provided on the rear end cover (5).

3. A multi-nozzle large-size plasma generator according to claim 1, characterized in that: An electrical pipeline (14) adapted thereto movably penetrates through the hollow shaft of the hollow shaft brushless motor (3). The tail end of the electrical pipeline (14) is fixedly installed with the housing of the hollow shaft brushless motor (3) by bolts. A high-voltage wire hole (15) is provided at the center of the tail end of the electrical pipeline (14). An air passage hole (16) is provided at an eccentric position of the tail end of the electrical pipeline (14).

4. A multi-nozzle large-size plasma generator according to claim 3, characterized in that: A first insulating ring (17) is fixedly connected by insertion at the bottom end of the electrical pipeline (14). A second insulating ring (18) adapted thereto is embedded inside the ground electrode seat (7). A special-shaped insulating ring (19) adapted thereto is embedded inside the ground electrode cover (11).

5. A multi-nozzle large-size plasma generator according to claim 4, characterized in that: A plug is provided at the bottom end of the first insulating ring (17). An air vent hole (21) is provided inside the plug. The stator end of the conductive slip ring (13) is fixedly connected to the plug. The rotor end of the conductive slip ring (13) is fixedly connected inside a first air swirling ring (22). The first air swirling ring (22) is fixedly connected inside the second insulating ring (18). The high-voltage electrode (20) is fixedly connected inside a second air swirling ring (23). Gas flow channels are provided on the ground electrode cover (11) and the special-shaped insulating ring (19) corresponding to each ground electrode nozzle assembly (12). The second air swirling ring (23) is fixedly connected inside the gas flow channel on the special-shaped insulating ring (19).

6. The multi-nozzle large-size plasma generator according to claim 1, wherein: The stator end of the conductive slip ring (13) is connected with a high-voltage wire. The rotor end of the conductive slip ring (13) is connected in parallel with a plurality of high-voltage electrodes (20).

7. A large-sized plasma generator with multiple nozzles according to claim 1, characterized in that: A ground wire is connected to the rear end face of the hollow shaft brushless motor (3). The hollow shaft brushless motor (3), the ground electrode seat (7), the ground electrode cover (11) and the ground electrode nozzle assemblies (12) are all made of metal conductive materials.

8. A multi-nozzle large-size plasma generator according to claim 1, characterized in that: The ground electrode nozzle assembly (12) includes a double-threaded connecting seat (24), a threaded gland (25) and a nozzle head (26). The double-threaded connecting seat (24) is threadedly connected to the ground electrode cover (11), the threaded gland (25) is threadedly connected to the double-threaded connecting seat (24), a spherical cavity (27) is formed on the double-threaded connecting seat (24) and the threaded gland (25) together. The tail end of the nozzle head (26) is threadedly connected with a spherical head (28), and the spherical head (28) is press-fitted and installed in the spherical cavity (27). The nozzle head (26) passes through the threaded gland (25).

9. A multi-nozzle large-size plasma generator according to claim 1, characterized in that: An installation table (29) is provided on the outer wall of the hollow shaft brushless motor (3).

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