High temperature resistant vibration sensor

Abstract

The application relates to a high-temperature-resistant vibration sensor applied to the field of sensors, which comprises a fixed base installed on the surface of a device to be detected through bolts, a sensor assembly, a sealing assembly and a detection system, a coupling diagnosis module is used to judge the installation coupling degree among the sensor assembly, the fixed base, the fixed base and a heat shield and the fixed base and the device to be detected, coupling degree detection is carried out before the sensor works, and a glue sealing diagnosis module is used to detect the glue sealing performance of the heat shield before and during the work of the sensor, so that the glue sealing integrity is judged, glue sealing failure in a high-temperature vibration environment is avoided, the detection precision of the sensor assembly is ensured, and the cooperation of a heat insulation ring, a thermal expansion block and a heat insulation block enables the heat shield to make coupling compensation even if glue sealing failure occurs during the work, and the detection precision is further improved.

Description

Technical Field

[0001] The present invention relates to a vibration sensor, in particular to a high-temperature resistant vibration sensor used in the field of sensors. Background Art

[0002] Vibration sensors are devices used to detect, measure, and record the vibration or mechanical movement of an object. They are widely used in industries such as industry, automotive, aerospace, and construction to monitor equipment status, predict failures, and optimize performance.

[0003] The specification of Chinese utility model patent CN219996335U discloses a high-temperature resistant piezoelectric vibration sensor. By providing a heat insulation cover on the outside of the piezoelectric component, the temperature tolerance of the entire sensor is increased from 150°C to 260°C, solving the problem that existing IEPE vibration sensors cannot withstand high temperatures.

[0004] The specification of Chinese utility model patent CN216593764U discloses a high-temperature resistant vibration sensor, which relates to the field of sensor technology. By setting a rock wool insulation layer as an insulation sheath wrapped around the outside of the shell, the vibration sensor body has good temperature resistance.

[0005] Existing vibration sensors use thermal insulation sleeves to achieve the purpose of high-temperature resistance of the sensor. However, during the actual operation of the sensor, the thermal insulation cover is usually glued together. Cracks will appear after the glue solidifies, which will also affect the accuracy of the sensor components inside the thermal insulation cover. In addition, the mechanical coupling between the sensor and the installation equipment will be affected by the vibration operation. If corrective treatment is not performed before detection, the accuracy of subsequent vibration detection results will be affected. Summary of the Invention

[0006] In view of the above-mentioned prior art, the technical problem to be solved by the present invention is how to simply realize the detection of the bonding performance and the degree of installation coupling when the vibration sensor is working, and how to prevent the possible interference of vibration on the vibration sensor caused by the reduction of the installation coupling degree of the heat insulation cover due to the failure of bonding when the vibrator is working.

[0007] To address the above-mentioned problems, the present invention provides a high-temperature resistant vibration sensor, comprising a fixed base mounted on the surface of a device to be detected by bolts, a sensor assembly, a sealing assembly, and a detection system. The sensor assembly is mounted above the fixed base, the sealing assembly comprises a heat shield glued to the top of the fixed base, a first pressure sensing membrane and a second pressure sensing membrane are respectively embedded and mounted on the top and bottom of the fixed base, and a third pressure sensing membrane corresponding to the heat shield is embedded and mounted on the top of the fixed base.

[0008] The detection system comprises a data acquisition module, a data analysis module, a coupling diagnosis module and a glue sealing diagnosis module, wherein the glue sealing diagnosis module is used for detecting the glue sealing performance of the heat shield and the fixed base;

[0009] The glue sealing diagnosis module comprises a heat insulation ring member fixedly installed on the inner wall of the heat shield, a thermal expansion block embeddedly installed on the surface of the heat insulation ring member away from the sensor assembly, and a conductive block installed on the surface of the thermal expansion block, the top of the fixed base is provided with a recess located between the third pressure sensing film and the first pressure sensing film, and the recess is embeddedly connected with the heat insulation ring member, the inside of the fixed base is provided with a strip-shaped slot with a built-in conductive member, and the top of the fixed base is provided with a warning light strip located outside the heat shield, and the conductive member is electrically connected with the warning light strip.

[0010] In the above high-temperature vibration-resistant sensor, the coupling diagnosis module is used to judge the installation coupling degree, and the glue sealing performance of the heat shield is detected by the glue sealing diagnosis module to judge the glue sealing integrity, so as to avoid glue sealing failure in a high-temperature vibration environment and ensure the detection accuracy of the sensor assembly.

[0011] As a further improvement of the present application, the coupling diagnosis module is signal-connected with the first pressure sensing film and the second pressure sensing film, and the coupling diagnosis module further comprises a judging unit, the area of the third pressure sensing film is a pressing area, the area of the first pressure sensing film is a sensing area, and the area of the second pressure sensing film is a mounting area.

[0012] As a further improvement of the present application, the working steps of the judging unit are as follows:

[0013] S1, before the sensor assembly performs vibration detection, a plurality of sensing points are randomly selected in the pressing area, the sensing area and the mounting area respectively to form three numerical sequence sets;

[0014] S2, a formula U=1-SD(i) / AVE(i) is used, wherein SD(i) is the standard deviation of the sequence, AVE(i) is the average value of the sequence, U1 represents the installation coupling degree between the sensor assembly and the fixed base, U2 represents the installation coupling degree between the fixed base and the device to be detected, and U3 represents the installation coupling degree between the heat shield and the fixed base;

[0015] S3, when U1, U2 and U3 are all within the safe threshold range, the sensor assembly continues to perform vibration detection, and if one or more of U1, U2 and U3 are outside the safe threshold range, maintenance treatment is performed;

[0016] S4, after the maintenance treatment, S1-S3 are repeatedly continued until U1, U2 and U3 are all within the safe threshold range.

[0017] As a further improvement of the present application, the data acquisition module is used to collect vibration data of the device to be detected, the data analysis module is used to analyze the vibration data collected by the data acquisition module, and the coupling diagnosis module is used to diagnose the installation coupling degree.

[0018] As a further improvement of the present application, the heat insulation cover is bonded to the surface of the fixed base by heat insulation glue, and when the heat insulation ring is inserted into the recess, the cross-sectional area of ​​the thermal expansion block is smaller than the cross-sectional area of ​​the strip groove.

[0019] As a further improvement of the present application, the side of the thermal insulation ring close to the sensor assembly is coated with a thermal insulation coating, and the side of the thermal insulation ring facing away from the sensor assembly is a heat conductive layer.

[0020] As a further improvement of the present application, a phase change cooling layer and a temperature sensor are embedded in the top wall of the heat insulation cover. The temperature sensor is used to assist in determining whether the heat insulation cover can provide normal heat insulation.

[0021] As another improvement of the present application, a sliding groove is provided inside the insulation ring, and an insulation block is slidably connected inside the sliding groove. The inner wall of the recess is provided with an engaging groove matching the insulation block. A thermal expansion part is connected to the surface of one side of the insulation block, and a heat transfer part fixedly installed in the sliding groove is connected between the thermal expansion part and the thermal expansion block.

[0022] As another improvement of the present application, in the initial state, the thermal insulation block is located in the sliding groove, and the depth of the engaging groove is smaller than the width of the thermal insulation block.

[0023] In summary, the coupling diagnosis module is used to determine the installation coupling degree between the sensor assembly and the fixed base, the fixed base and the heat insulation cover, and the fixed base and the device to be detected. The coupling degree is detected before the sensor works, and the seal diagnosis module is used to detect the seal performance of the heat insulation cover before and during the sensor works to determine the integrity of the seal and avoid seal failure in a high temperature and vibration environment, thereby ensuring the detection accuracy of the sensor assembly. In addition, the cooperation of the insulation ring, the thermal expansion block and the insulation block is used to make coupling compensation even if the seal of the heat insulation cover fails during operation, thereby further enhancing the detection accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 This is a schematic diagram of the overall structure of the sensor according to the first embodiment of the present application;

[0025] Figure 2 This is an installation diagram of the fixed base and the second pressure sensing membrane of the first embodiment of the present application;

[0026] Figure 3 This is a diagram showing the internal structure of the heat shield according to the first embodiment of the present application;

[0027] Figure 4 For this application Figure 3 A magnified view of point A in the figure;

[0028] Figure 5 This is an installation diagram of the recess, thermal expansion block and conductive member of the first embodiment of the present application;

[0029] Figure 6 This is a working principle diagram of the warning light bar when the glue seal fails in the first embodiment of this application;

[0030] Figure 7 This is a structural diagram of the interlocking groove and the heat insulation block of the second embodiment of the present application;

[0031] Figure 8 This is a diagram showing the composition of a detection system according to a first embodiment of the present application;

[0032] Figure 9 This is a working step diagram of the judgment unit in the first embodiment of this application.

[0033] Description of the numbers in the figure:

[0034] 1. Sensor assembly; 2. Fixed base; 3. Pressure sensing membrane No. 1; 4. Pressure sensing membrane No. 2; 5. Heat shield; 6. Heat insulation ring; 7. Pressure sensing membrane No. 3; 8. Warning light bar; 9. Depression; 10. Thermal expansion block; 11. Conductive part; 12. Fitting groove; 13. Heat insulation block. DETAILED DESCRIPTION

[0035] Two implementation modes of the present application are described in detail below with reference to the accompanying drawings.

[0036] The first implementation method:

[0037] Figures 1-3 A high-temperature-resistant vibration sensor is shown, comprising a fixed base 2 bolted to the surface of a device to be detected, a sensor assembly 1, a sealing assembly, and a detection system. The sensor assembly 1 is mounted above the fixed base 2. The sealing assembly includes a heat shield 5 glued to the top of the fixed base 2. A first pressure-sensing membrane 3 and a second pressure-sensing membrane 4 are respectively embedded in the top and bottom of the fixed base 2. A third pressure-sensing membrane 7 corresponding to the heat shield 5 is embedded in the top of the fixed base 2.

[0038] Figure 8 As shown, the detection system includes a data acquisition module, a data analysis module, a coupling diagnosis module and a glue sealing diagnosis module, wherein the glue sealing diagnosis module is used to detect the glue sealing performance of the heat shield 5 and the fixed base 2;

[0039] Figures 3-5As shown, the encapsulation diagnostic module comprises a heat insulation ring 6 fixedly installed on the inner wall of the heat insulation cover 5, the heat insulation ring 6 is embeddedly installed with a thermal expansion block 10 away from the surface of the sensor assembly 1, and the surface of the thermal expansion block 10 is installed with a conductive block, the top of the fixed base 2 is provided with a recess 9 located between the third pressure sensing film 7 and the first pressure sensing film 3, and the recess 9 is embeddedly connected with the heat insulation ring 6, the inside of the fixed base 2 is provided with a strip-shaped slot with an embedded conductive piece 11, and the top of the fixed base 2 is installed with a warning light strip 8 located outside the heat insulation cover 5, and the conductive piece 11 is electrically connected with the warning light strip 8.

[0040] Specifically, the first pressure sensing film 3 is used to detect the installation coupling degree of the sensor assembly 1 and the fixed base 2 (that is, to detect the installation stability between the sensor assembly 1 and the fixed base 2, if the installation is stable, the pressure of the sensor assembly 1 on the fixed base 2 is in a uniform stress state), the second pressure sensing film 4 is used to detect the installation coupling degree of the fixed base 2 and the device to be detected, and the third pressure sensing film 7 is used to detect the installation coupling degree of the heat insulation cover 5 and the fixed base 2.

[0041] Although the heat insulation cover 5 has no direct connection relationship with the sensor assembly 1, the sensor assembly 1 and the fixed base 2, and the fixed base 2 and the device to be detected are in a stable installation state, and the heat insulation cover 5 and the fixed base 2 are in a non-stable installation state (for example, part of the glue joint appears peeling and loosening, which reduces the stability of the glue joint), which may cause abnormal position between the heat insulation cover 5 and the fixed base 2 to occur delayed vibration under the action of vibration (because the fixed base 2 and the device to be detected are in a stable installation state, the vibration consumes less when transmitted from the device to be detected to the fixed base 2, but significantly consumes when transmitted from the fixed base 2 to the heat insulation cover 5, the loose connection may introduce a nonlinear effect, causing the vibration frequency of the heat insulation cover 5 and the vibration frequency of the device to be detected to be not completely consistent, and delayed vibration occurs), and noise will affect the detection accuracy of the sensor assembly 1 (for the same reason, if the installation coupling degree of the sensor assembly 1 and the fixed base 2, and the installation coupling degree of the fixed base 2 and the device to be detected are abnormal, the detection accuracy of the sensor assembly 1 will also be affected).

[0042] In addition, if a crack appears in the glue joint of the heat insulation cover 5 but does not affect the stability of the glue joint, the installation coupling degree of the heat insulation cover 5 and the fixed base 2 will not be affected, but external high-temperature heat will enter the heat insulation cover 5 through the crack, and high temperature will also affect the detection accuracy of the sensor assembly 1, so the stability of the performance of the glue joint of the heat insulation cover 5 needs to be paid attention to.

[0043] When installing this sensor, first buckle the heat insulation cover 5 onto the surface of the No. 3 pressure sensing membrane 7. At this time, the heat insulation ring 6 is buckled into the recess 9 to insulate the sensor assembly 1. Then, use heat insulation glue to glue the heat insulation cover 5 onto the fixed base 2, and then use bolts to bolt the fixed base 2 to the surface of the device to be detected.

[0044] The side of the heat-insulating ring 6 close to the sensor assembly 1 is coated with a heat-insulating coating, and the side of the heat-insulating ring 6 facing away from the sensor assembly 1 is a heat-conducting layer.

[0045] The heat insulation cover 5 is bonded to the surface of the fixed base 2 by heat insulation glue, and when the heat insulation ring 6 is inserted into the recess 9, the cross-sectional area of ​​the thermal expansion block 10 is smaller than the cross-sectional area of ​​the strip groove.

[0046] When detecting the stability of the glue seal, if there is a crack, external heat (which can be high temperature heat during operation; if it is not in operation, a heat source can be used, including but not limited to a heating block, etc.) is introduced into the heat-conducting layer of the heat-insulating ring 6 through the crack, and then transferred to the heat-expanding block 10 through the heat-conducting layer, causing the heat-expanding block 10 to expand, driving the conductive block to contact the conductive member 11. After the circuit is connected, the warning light bar 8 lights up to warn. At the same time, the heat transferred to the heat-insulating ring 6 will be intercepted by the heat-insulating coating, and will not affect the detection accuracy of the internal sensor component 1.

[0047] If there is no crack, the heat will not be transferred into the heat shield 5 and further will not be transferred to the heat conductive layer. At this time, the thermal expansion block 10 remains separated from the conductive member 11 and the warning light bar 8 will not light up.

[0048] The coupling diagnostic module is signal-connected to the No. 1 pressure sensing membrane 3 and the No. 2 pressure sensing membrane 4. The coupling diagnostic module also includes a judgment unit. The area of ​​the No. 3 pressure sensing membrane 7 is the pressing area, the area of ​​the No. 1 pressure sensing membrane 3 is the sensing area, and the area of ​​the No. 2 pressure sensing membrane 4 is the installation area.

[0049] Figure 9 As shown, the working steps of the judgment unit are as follows:

[0050] S1. Before the sensor assembly 1 performs vibration detection, a number of sensing points are randomly selected in the pressing area, the sensing area, and the installation area to form three number series sets;

[0051] S2. Using the formula U=1-SD(i) / AVE(i), where SD(i) is the standard deviation of the series, AVE(i) is the average value of the series, U1 represents the degree of mounting coupling between the sensor assembly 1 and the fixed base 2, U2 represents the degree of mounting coupling between the fixed base 2 and the device to be detected, and U3 represents the degree of mounting coupling between the heat shield 5 and the fixed base 2;

[0052] S3, when U1, U2 and U3 are all within the safety threshold range, the sensor assembly 1 continues to perform vibration detection. If one or more of U1, U2 and U3 are outside the safety threshold range, maintenance processing is performed;

[0053] S4. After the maintenance process, continue to repeat S1-S3 until U1, U2 and U3 are all within the safety threshold range.

[0054] The data acquisition module is used to collect vibration data of the device to be detected, the data analysis module is used to analyze the vibration data collected by the data acquisition module, and the coupling diagnosis module is used to install the coupling degree.

[0055] Specifically, the sensor assembly 1 is used to detect vibration data and analyzed by the data analysis module. During this process, the judgment unit in the coupling diagnosis module is used to determine the installation coupling degree between the sensor assembly 1 and the fixed base 2, the fixed base 2 and the heat shield 5, and the fixed base 2 and the device to be detected, so as to perform preliminary detection before the sensor detection work to ensure the accuracy of subsequent sensor detection.

[0056] The top wall of the heat insulation cover 5 is inlaid with a phase change cooling layer and a temperature sensor. The temperature sensor is used to assist in judging whether the heat insulation cover 5 can provide normal heat insulation.

[0057] Specifically, the phase change cooling layer is made of phase change material (paraffin or fatty acid in organic phase change materials can be used, selected according to specific circumstances), which is used to cool the heat generated by the sensor component 1 when working in the heat insulation cover 5, and use the temperature sensor to detect the internal temperature of the heat insulation cover 5. Because the sensor performs detection work in a high-temperature environment and the heat generated by the sensor component 1 when working in the heat insulation cover 5 is limited, when cracks appear in the heat insulation cover 5 itself, the temperature inside the heat insulation cover 5 will cause an abnormal increase, which serves as a warning and prompts the heat insulation cover 5 to be replaced in time.

[0058] The second implementation method:

[0059] Figure 7 It is shown that the interior of the thermal insulation ring 6 is provided with a sliding groove that penetrates through it, and the interior of the sliding groove is slidably connected with an insulation block 13. The inner wall of the recess 9 is provided with an engaging groove 12 that matches the insulation block 13. A thermal expansion part is connected to the surface of one side of the insulation block 13, and a heat transfer part fixedly installed in the sliding groove is connected between the thermal expansion part and the thermal expansion block 10.

[0060] In the initial state, the heat insulating block 13 is located in the sliding groove, and the depth of the fitting groove 12 is smaller than the width of the heat insulating block 13 .

[0061] The difference from the first embodiment is that in the first embodiment, when peeling or loosening occurs at the adhesive joint, resulting in abnormal installation coupling between the heat insulation cover 5 and the fixed base 2, the heat in the external high-temperature environment when the sensor is working will also prompt the adhesive sealing diagnostic module to perform diagnosis, and the warning light bar 8 will light up. In this state, the thermal insulation ring 6 can play an insulating effect, but the abnormal coupling during operation will also affect the detection accuracy of the sensor assembly 1, so this embodiment is adopted for improvement.

[0062] Specifically, when peeling or loosening occurs at the adhesive joint on the surface of the heat insulation cover 5, the thermal expansion block 10 in the glue-sealed diagnostic module expands and extends, and at the same time, heat is transferred to the thermal expansion member through the heat transfer member, so that the thermal expansion member expands and pushes the thermal insulation block 13 to fit into the fitting groove 12, so that the heat insulation cover 5 forms a biaxial connection lock with the fixed base 2 using the thermal insulation ring 6 and the thermal insulation block 13, thereby enhancing the coupling stability and ensuring the detection accuracy.

[0063] In addition, the depth of the interlocking groove 12 is smaller than the width of the insulation block 13. This design allows the insulation block 13 to remain partially in the sliding groove after entering the interlocking groove 12, thereby preventing heat from being transferred into the interlocking groove 12 and providing insulation.

[0064] In summary, the present application utilizes a coupling diagnostic module to determine the installation coupling degree between the sensor assembly 1 and the fixed base 2, the fixed base 2 and the heat insulation cover 5, and the fixed base 2 and the device to be detected, and performs a coupling degree test before the sensor works. The seal diagnostic module is used to test the seal performance of the heat insulation cover 5 before and during the sensor works, so as to determine the integrity of the seal and avoid seal failure in a high-temperature vibration environment, thereby ensuring the detection accuracy of the sensor assembly 1. The cooperation of the heat insulation ring 6, the thermal expansion block 10, and the heat insulation block 13 is utilized, so that even if the seal of the heat insulation cover 5 fails during operation, coupling compensation can be made, thereby further enhancing the detection accuracy.

[0065] In view of current actual needs, the protection scope of the above-mentioned implementation mode adopted in this application is not limited to this. Various changes made within the knowledge scope of technical personnel in this field without departing from the concept of this application still fall within the protection scope of the present invention.

Claims

1. A high temperature resistant vibration sensor comprising a fixed base (2) mounted on the surface of a device to be detected by bolts, a sensor assembly (1), a sealing assembly and a detection system, characterized in that: A sensor assembly (1) is installed above the fixed base (2), the sealing assembly includes a heat shield (5) sealed on the top of the fixed base (2), a first pressure sensing membrane (3) and a second pressure sensing membrane (4) are respectively embedded and installed on the top and bottom of the fixed base (2), and a third pressure sensing membrane (7) corresponding to the heat shield (5) is embedded and installed on the top of the fixed base (2); The detection system comprises a data acquisition module, a data analysis module, a coupling diagnosis module and a glue sealing diagnosis module, wherein the glue sealing diagnosis module is used to detect the glue sealing performance of the heat insulation cover (5) and the fixed base (2); The seal diagnosis module includes a heat insulation ring (6) fixedly mounted on the inner wall of the heat insulation cover (5), a heat expansion block (10) is embedded and mounted on the surface of the heat insulation ring (6) facing away from the sensor assembly (1), and a conductive block is mounted on the surface of the heat expansion block (10), the top of the fixed base (2) is provided with a recess (9) located between the third pressure sensing film (7) and the first pressure sensing film (3), and the recess (9) is engaged and connected with the heat insulation ring (6), the interior of the fixed base (2) is provided with a strip groove with a built-in conductive member (11), the top of the fixed base (2) is provided with a warning light bar (8) located on the outside of the heat insulation cover (5), and the conductive member (11) is electrically connected to the warning light bar (8).

2. The high temperature resistant vibration sensor according to claim 1, characterized in that: The coupling diagnosis module is connected to the first pressure sensing membrane (3) and the second pressure sensing membrane (4) by signals. The coupling diagnosis module also includes a judgment unit. The area of ​​the third pressure sensing membrane (7) is a pressing area, the area of ​​the first pressure sensing membrane (3) is a sensing area, and the area of ​​the second pressure sensing membrane (4) is an installation area.

3. The high temperature resistant vibration sensor according to claim 2, characterized in that: The working steps of the judgment unit are as follows: S1. Before the sensor assembly (1) performs vibration detection, a number of sensing points are randomly selected in the pressing area, the sensing area, and the installation area to form three number series sets; S2, using the formula U=1-SD(i) / AVE(i), where SD(i) is the standard deviation of the series, AVE(i) is the average value of the series, where U1 represents the degree of mounting coupling between the sensor assembly (1) and the fixed base (2), U2 represents the degree of mounting coupling between the fixed base (2) and the device to be detected, and U3 represents the degree of mounting coupling between the heat shield (5) and the fixed base (2); S3, when U1, U2 and U3 are all within the safety threshold range, the sensor assembly (1) continues to perform vibration detection, and if one or more of U1, U2 and U3 are outside the safety threshold range, maintenance processing is performed; S4. After the maintenance process, continue to repeat S1-S3 until U1, U2 and U3 are all within the safety threshold range.

4. The high temperature resistant vibration sensor according to claim 1, characterized in that: The data acquisition module is used to collect vibration data of the device to be detected, the data analysis module is used to analyze the vibration data collected by the data acquisition module, and the coupling diagnosis module is used to diagnose the installation coupling degree.

5. The high temperature resistant vibration sensor according to claim 1, characterized in that: The heat insulation cover (5) is bonded to the surface of the fixed base (2) by heat insulation glue, and when the heat insulation ring (6) is inserted into the recess (9), the cross-sectional area of ​​the thermal expansion block (10) is smaller than the cross-sectional area of ​​the strip groove.

6. The high temperature resistant vibration sensor according to claim 1, characterized in that: The side of the heat-insulating ring (6) close to the sensor assembly (1) is coated with a heat-insulating coating, and the side of the heat-insulating ring (6) facing away from the sensor assembly (1) is a heat-conducting layer.

7. The high temperature resistant vibration sensor according to claim 1, characterized in that: The top wall of the heat insulation cover (5) is inlaid with a phase change cooling layer and a temperature sensor, and the temperature sensor is used to assist in judging whether the heat insulation cover (5) can provide normal heat insulation.

8. The high temperature resistant vibration sensor according to claim 1, characterized in that: The interior of the thermal insulation ring (6) is provided with a sliding groove extending therethrough, and a thermal insulation block (13) is slidably connected to the interior of the sliding groove. The inner wall of the recess (9) is provided with a fitting groove (12) matching the thermal insulation block (13). A thermal expansion member is connected to a surface of one side of the thermal insulation block (13), and a heat transfer member fixedly installed in the sliding groove is connected between the thermal expansion member and the thermal expansion block (10).

9. The high temperature resistant vibration sensor according to claim 8, characterized in that: In the initial state, the heat insulating block (13) is located in the sliding groove, and the depth of the engaging groove (12) is smaller than the width of the heat insulating block (13).

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