Multi-cavity sample growing device

Abstract

The invention belongs to the technical field of electron microscopic imaging, and particularly discloses a multi-cavity sample growing device which comprises a first shell, a first heating mechanism and a first sample holder are arranged in the first shell, and the first heating mechanism is used for heating a sample of the first sample holder; a valve used for mutual connection is arranged between the first shell and the second shell, a second heating mechanism and a second sample support located in the second shell are arranged on the second shell, and the second heating mechanism is used for heating a sample on the second sample support; the sample transfer mechanism comprises a sample transfer rod, and the sample transfer rod can be used for driving the first sample support or the second sample support to transfer between the first shell and the second shell. Through the arrangement of the first shell and the second shell, accurate characterization of nanoscale reaction active sites can be realized in the first shell, meanwhile, macroscopic catalytic reaction research is carried out in the second shell, and the activity difference and the reaction mechanism of the catalyst under different scales are revealed.

Description

Technical Field

[0001] The present invention relates to the field of electron microscopy imaging technology, and particularly to a multi-chamber sample growth device. Background Art

[0002] The growth and preparation of samples are the core fields of sample scientific research. Especially in the research of low-dimensional samples (such as two-dimensional samples, nanowires, nanoparticles, etc.), the structure, properties, and functions of samples often depend on key parameters such as the type of atmosphere, air pressure, temperature, and surface reaction conditions during the growth process. Therefore, precisely controlling these growth conditions is of great significance for achieving high-quality sample preparation.

[0003] In the prior art, an environmental scanning electron microscope is usually used to observe the growth of samples. It can work under high-pressure atmosphere conditions and is suitable for studying the structure and reaction behavior of samples under near-actual environmental conditions. However, most in-situ ESEM systems are only limited to the dynamic research of the sample surface at the microscopic scale and lack the function of observing the growth of samples in the macroscopic state. Summary of the Invention

[0004] In view of the above-mentioned disadvantages of the prior art, the purpose of the present invention is to provide a multi-chamber sample growth device, which is used to solve the problem that the environmental scanning electron microscope in the prior art lacks the function of observing the growth of samples in the macroscopic state.

[0005] To achieve the above object and other related objects, the present invention provides a multi-chamber sample growth device, including:

[0006] A first housing, a first heating mechanism and a first sample holder mounted on the first heating mechanism are provided in the first housing, and the first heating mechanism is used to heat the sample on the first sample holder;

[0007] A second housing, a valve for mutual connection is provided between the first housing and the second housing, a second heating mechanism and a second sample holder located in the second housing are provided on the second housing, and the second heating mechanism is used to heat the sample on the second sample holder;

[0008] A sample transfer mechanism, the sample transfer mechanism is provided on the second housing, the sample transfer mechanism includes a transfer rod, and the transfer rod can be used to drive the first sample holder or the second sample holder to transfer between the first housing and the second housing.

[0009] Optionally, a first chamber is provided in the first housing, the first sample holder is arranged in the first chamber, the first heating mechanism extends into the first chamber and is connected to the first sample holder, and an electron microscope is provided in the first chamber, and the electron microscope is arranged facing the first sample holder.

[0010] Optionally, the first heating mechanism includes a mounting base, a first laser heating head disposed on the mounting base, and a fixing component. The axial direction of the heating head is disposed along the width direction of the mounting base. A refracting member is provided in the fixing component, and the refracting member can be used to refract the laser of the first laser heating head. The first sample holder is detachably connected to the mounting base, and the first sample holder is located on the refracting path of the refracting member.

[0011] Optionally, the fixing component includes a first fixing block and a second fixing block mounted on the mounting base. An installation block is provided between the first fixing block and the second fixing block. The refracting member is disposed in the installation block, and the incident end of the refracting member is perpendicularly disposed with respect to the output end of the first laser heating head.

[0012] Optionally, the second heating mechanism includes a driver and a second laser heating head. A connecting head is provided at the output end of the driver, and the second laser heating head is disposed on the connecting head. The driver can be used to drive the second sample holder to move along the radial direction of the sample transfer rod. A cooling component is provided on the connecting head, and the second sample holder is detachably connected to the connecting head.

[0013] Optionally, the connecting head is provided with a cooling cavity, and the cooling component includes a water inlet pipe and a water outlet pipe. The output end of the water inlet pipe and the input end of the water outlet pipe are disposed in the cooling cavity.

[0014] Optionally, a positioning block is provided on the connecting head, and a pressing plate is detachably connected to the positioning block. The pressing plate can be used to fix the second sample holder on the positioning block. An installation space adapted to the second sample holder is provided between the pressing plate and the positioning block, and the second sample holder is detachably connected to the positioning block through the installation space.

[0015] Optionally, a connecting component is provided on the driver. The connecting component includes a first flange group, and the first flange group is disposed at an end of the driver away from the connecting head. The water outlet pipe and the water inlet pipe are fixed in the driver through the first flange group.

[0016] Optionally, the connecting component further includes a second flange group. The second flange group is disposed on a side of the first flange group away from the connecting head. A connecting pipe is provided between the first flange group and the second flange group. A protective sleeve is provided at an end of the second flange group away from the first flange group. The optical fiber of the second laser heating head sequentially passes through the driver, the first flange group, the second flange group, and the protective sleeve and is connected to an external power supply.

[0017] Optionally, the sample transfer mechanism further includes a limiting tube, which can be used for axial positioning of the sample transfer rod. One end of the sample transfer rod is provided with a sample transfer head, and the free end of the sample transfer head is provided with a connection groove that can be detachably connected to the first sample tray or the second sample tray.

[0018] As described above, a multi-chamber sample growth device proposed by the present invention has the following beneficial effects:

[0019] In the present invention, by providing the first housing and the second housing, samples can be grown synchronously in the two housings. Among them, by controlling the sample growth parameters in the two chambers, it is possible to observe the sample at the microscopic level and also to observe the sample at the macroscopic level. By providing the sample transfer mechanism, the sample can be flexibly driven to transfer between the first housing and the second housing, avoiding damage to the vacuum environment inside the first housing or the second housing, ensuring the growth environment of the sample, and ensuring the accuracy of observation. Compared with the prior art, the present invention can observe the growth of the sample from multiple angles, improve the composite function of the device, and realize diverse experiments from the macroscopic to the atomic scale. Description of the Drawings

[0020] Figure 1 Showing the overall structural schematic diagram of an embodiment of the present invention;

[0021] Figure 2 Showing the side view of the overall structure in an embodiment of the present invention;

[0022] Figure 3 Showing the structural schematic diagram of the first heating mechanism in an embodiment of the present invention;

[0023] Figure 4 Showing the cross-sectional view of the first heating mechanism in an embodiment of the present invention;

[0024] Figure 5 Showing the structural schematic diagram of the second housing in an embodiment of the present invention;

[0025] Figure 6 Showing the structural schematic diagram of the second heating mechanism in an embodiment of the present invention;

[0026] Figure 7 Showing the enlarged view at A in an embodiment of the present invention;

[0027] Figure 8 Showing the cross-sectional view of the second heating mechanism in an embodiment of the present invention;

[0028] Figure 9 Showing the structural schematic diagram of the sample transfer mechanism in an embodiment of the present invention;

[0029] Figure 10It shows a cross-sectional view of the sample transfer mechanism in an embodiment of the present invention;

[0030] Figure 11 It shows an enlarged view of part B in an embodiment of the present invention.

[0031] Explanation of reference numerals in the drawings:

[0032] First housing 1, first cavity 101, electron microscope 2, first heating mechanism 3, mounting base 301, first fixing block 302, second fixing block 303, mounting block 304, refraction member 305, first laser heating head 306, limiting plate 307, first sample holder 4, first connecting portion 401, second housing 5, connection port 501, second cavity 502, valve 6, second heating mechanism 7, driver 701, adapter 702, connector 703, cooling cavity 704, water inlet pipe 705, water outlet pipe 706, first flange group 707, second flange group 708, connecting pipe 709, second laser heating head 710, optical fiber 711, protective sleeve 712, positioning block 8, installation space 801, pressing plate 9, elastic pressing portion 901, second sample holder 10, second connecting portion 1001, temperature measuring element 11, sample transfer mechanism 12, sample transfer rod 1201, limiting tube 1202, sample transfer head 1203, connecting groove 1204, abutting plate 1205, locking groove 1206, molecular pump 13. Detailed implementation manners

[0033] The following uses specific specific examples to illustrate the implementation manners of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation manners. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.

[0034] It should be noted that the illustrations provided in this embodiment only illustrate the basic concept of the present invention in a schematic manner. Therefore, only the components related to the present invention are shown in the drawings, rather than being drawn according to the number, shape, and size of the components in actual implementation. The type, quantity, and ratio of each component in actual implementation can be arbitrarily changed, and the component layout type may also be more complex. The structures, ratios, sizes, etc. shown in the drawings of this specification are only used to cooperate with the content disclosed in the specification for those familiar with this technology to understand and read, and are not used to limit the limiting conditions under which the present invention can be implemented. Therefore, they do not have substantial technical significance. Any modification of the structure, change in the proportional relationship, or adjustment of the size, without affecting the efficacy that the present invention can produce and the purpose that can be achieved, should still fall within the scope covered by the technical content disclosed by the present invention. At the same time, the terms such as "upper", "lower", "left", "right", "middle", and "one" cited in this specification are only for the convenience of clear narration and are not used to limit the scope under which the present invention can be implemented. The change or adjustment of their relative relationship, without substantial change in the technical content, should also be regarded as the scope under which the present invention can be implemented.

[0035] Before describing the embodiments of the present invention, the prior art of this application will be described in detail:

[0036] The sample growth process usually involves gas-phase chemical reactions (such as chemical vapor deposition, atomic layer deposition, etc.), and precise control of the atmosphere type and pressure is required. Different gas component ratios and pressures directly affect the growth kinetics of the sample, such as the formation of crystal nuclei, the growth of crystal grains, and the evolution of surface morphology. In addition, the heating conditions of the sample have a decisive impact on the microstructure of the sample, and the surface reaction behavior at high temperatures is often dynamic and non-equilibrium, making it difficult to capture by traditional characterization means. Traditional vacuum surface science techniques (such as scanning tunneling microscopy, low-energy electron diffraction) need to be carried out under ultra-high vacuum conditions and cannot truly reflect the behavior of the sample in the actual working environment (such as catalytic reaction conditions close to atmospheric pressure), thus there is a problem of "vacuum gap".

[0037] In the prior art, as a special electron microscopy imaging technique, the environmental scanning electron microscope (ESEM) can work under high-pressure atmosphere conditions and is suitable for studying the structure and reaction behavior of samples under conditions close to the actual environment. However, most in-situ ESEM systems are only limited to the dynamic study of the sample surface at the microscale and lack the synchronous observation of the behavior of the sample at the macroscale. In addition, the existing equipment lacks flexibility in atmosphere control and sample heating, making it difficult to achieve experimental designs under complex conditions.

[0038] And this application is based on the ESEM environmental scanning electron microscope to realize the observation of the sample at the micro and macro levels, so as to conveniently realize the performance characterization of the sample during the growth process.

[0039] As Figures 1 - 10 shown, the present invention proposes a multi-chamber sample growth device.

[0040] In an exemplary embodiment, the multi-chamber sample growth device includes:

[0041] A first housing 1, in which a first heating mechanism 3 and a first sample holder 4 are provided, and the first heating mechanism 3 is used to heat the sample on the first sample holder 4;

[0042] A second housing 5, a valve 6 for mutual connection is provided between the first housing 1 and the second housing 5, a second heating mechanism 7 and a second sample holder 10 located in the second housing 5 are provided on the second housing 5, and the second heating mechanism 7 is used to heat the sample on the second sample holder 10;

[0043] A sample transfer mechanism 12, the sample transfer mechanism 12 is provided on the second housing 5, and the sample transfer mechanism 12 includes a sample transfer rod 1201, and the sample transfer rod 1201 can be used to drive the first sample holder 4 or the second sample holder 10 to transfer between the first housing 1 and the second housing 5.

[0044] In this embodiment, by providing the first housing 1 and the second housing 5, the growth of samples can be carried out synchronously in the two housings. Among them, by controlling the sample growth parameters in the two chambers, the sample can be observed at the microscopic level and also at the macroscopic level. By providing the sample transfer mechanism 12, the sample can be flexibly driven to transfer between the first housing 1 and the second housing 5, avoiding damaging the vacuum environment in the first housing 1 or the second housing 5, ensuring the growth environment of the sample, and ensuring the accuracy of the observation. Compared with the prior art, the present invention can observe the growth of the sample from multiple angles, improve the composite function of the device, and realize diverse experiments from the macroscopic to the atomic scale.

[0045] Exemplarily, in this embodiment, the valve 6 between the first housing 1 and the second housing 5 is a vacuum valve 6, which can be operated electrically or manually.

[0046] In this embodiment, the sample transfer mechanism 12 realizes the mutual transfer of the sample holder between the two housings through the sample transfer rod 1201, ensuring that the sample can be flexibly switched between different growth and observation environments, improving the experimental efficiency. At the same time, each housing is equipped with an independent heating mechanism, which can accurately control the growth temperature of the sample, ensuring that the sample grows under the best conditions. The design of the valve 6 enables the two housings to be tightly connected, ensuring the stability and safety of the sample during the transfer process.

[0047] In this embodiment, the first housing 1 adopts the prior art and has the same outer shell as the housing of the existing environmental scanning electron microscope. Its housing structure and imaging principle are the same as those of the existing environmental scanning electron microscope.

[0048] It should be noted that in this embodiment, the first housing 1 can be connected to an external gas supply and pumping control system. The composition and pressure of the atmosphere are adjusted through a mass flow controller (MFC) to achieve precise control of the experimental conditions.

[0049] It should also be noted that in this embodiment, the first housing 1 is mainly used to observe the sample on the first sample holder 4 at the microscopic level, and the second housing 5 is mainly used to observe the sample on the second sample holder 10 at the macroscopic level. In a specific embodiment, after the sample on the second sample holder 10 is grown, it can be pulled out from the second housing 5 through the sample transfer mechanism 12 for observation.

[0050] It should also be noted that in this embodiment, the second housing 5 adopts a spherical structure. The volume of the second housing 5 is much smaller than that of the first housing 1, and its internal space is smaller than that of the first housing 1. Therefore, the second housing 5 can be quickly evacuated to make the vacuum degrees of the first housing 1 and the second housing 5 the same, which is convenient for the rapid transfer of the samples in the first housing 1 and the second housing 5.

[0051] In an exemplary embodiment, a first cavity 101 is provided in the first housing 1. The first sample holder 4 is arranged in the first cavity 101. The first heating mechanism 3 extends into the first cavity 101 and is connected to the first sample holder 4. An electron microscope 2 is arranged in the first cavity 101, and the electron microscope 2 is arranged opposite to the first sample holder 4.

[0052] In this embodiment, the first heating mechanism 3 extends into the first cavity 101 and is connected to the first sample holder 4, which can precisely control the growth temperature of the sample and ensure that the sample grows under the best conditions. This precise temperature control helps to improve the growth quality and consistency of the sample. The electron microscope 2 is the prior art and will not be elaborated here.

[0053] Exemplarily, in this embodiment, the first heating mechanism 3 includes a mounting seat 301, a first laser heating head 306 arranged on the mounting seat 301, and a fixing assembly, the axial direction of the heating head is arranged along the width direction of the mounting seat 301, and a refraction member 305 is arranged in the fixing assembly, and the refraction member 305 can be used to refract the laser of the first laser heating head 306, and the first sample holder 4 is detachably connected to the mounting seat 301, and the first sample holder 4 is located on the refraction path of the refraction member 305. In this embodiment, the first laser heating head 306 is connected to the mounting seat 301 by threaded connection, the incident angle of the laser is in the horizontal direction, and the angle of the laser is changed by the action of the refraction member 305 to make it vertical, so that the laser beam can be accurately focused on the sample on the first sample holder 4, so as to achieve local heating of the sample and ensure that the sample is evenly heated. In a specific embodiment, the design of the refraction member 305 allows the path of the laser beam to be adjusted, thereby changing the position and angle of heating. This allows personnel to flexibly adjust the heating area according to the specific needs of the sample, thereby improving the adaptability and success rate of the experiment.

[0054] It is worth mentioning that in the present embodiment, a plug-in design is adopted between the first sample holder 4 and the mounting seat 301. A pair of limiting plates 307 are provided on the mounting seat 301. There is a gap between the limiting plates 307 and the mounting seat 301 for accommodating the insertion of the first sample holder 4. The front end of the limiting plates 307 (i.e., the part that first contacts the sample holder) is bent to gradually reduce the gap, leaving more margin for the first sample holder 4 to enter the gap.

[0055] It should also be noted that the first sample holder 4 in this embodiment is of the prior art, and its side wall is provided with a first connecting portion 401 which can be used to connect with the sample transfer rod 1201 so that the sample transfer rod 1201 can drive the first sample holder 4 to move.

[0056] It should also be noted that the first laser heating head 306 in the first cavity 101 can be installed in a variety of ways, and can be directly fixed on the translation stage provided by the electron microscope 2, or fixed by a support rod extending from the flange port.

[0057] It should also be noted that in this embodiment, in addition to laser heating, more efficient heating elements, such as infrared heaters or induction heaters, can also be selected to improve the heating speed and uniformity. At the same time, multi-zone temperature control can be designed during the heating process so that the sample can experience different temperature gradients and simulate a more complex growth environment.

[0058] It should also be noted that other observation equipment, such as a spectrometer, an X-ray diffractometer, etc., may be added to the first cavity 101 to achieve multi-dimensional observation of the sample.

[0059] In some embodiments, the fixing component includes a first fixing block 302 and a second fixing block mounted on the mounting base 301. An installation block 304 is provided between the first fixing block 302 and the second fixing block 303. The refraction member 305 is disposed within the installation block 304, and the incident end of the refraction member 305 is perpendicularly arranged with respect to the output end of the first laser heating head 306. By providing the first fixing block 302 and the second fixing block 303, the refraction member 305 can be effectively and firmly fixed within the installation block 304, preventing it from shaking and ensuring the stability of laser refraction. In a specific embodiment, a heat dissipation module is further provided at the bottom of the mounting base 301, and the mounting base 301 can be dissipated by means of circulating water cooling. In a specific embodiment, the refraction member 305 is a triangular prism.

[0060] It is worth noting that the heating mechanism is compactly integrated within the first housing 1, without occupying excessive space. At the same time, it can cooperate with other devices such as the electron microscope 2 to achieve synchronous heating and observation.

[0061] In an exemplary embodiment, the second heating mechanism 7 includes a driver 701 and a second laser heating head 710. A connector 703 is provided at the output end of the driver 701, and the second laser heating head 710 is disposed on the connector 703. The driver 701 can be used to drive the second sample holder 10 to move radially along the sample transfer rod 1201. A cooling component is provided on the connector 703, and the second sample holder 10 is detachably connected to the connector 703.

[0062] In this embodiment, a plurality of connection ports 501 are provided on the second housing 5 for connecting different modules. By providing the second heating mechanism 7 on the second housing 5, the sample within the second cavity 502 can be heated to achieve sample growth. Among them, an adapter 702 is provided on the driver 701, and a connection flange is provided at the end of the adapter 702. The connection flange is connected to one of the connection ports 501, and the driver 701 can drive the entire connector 703 to move within the second cavity 502. The purpose of the movement is to avoid movement interference with the sample transfer rod 1201, ensuring that the second sample holder 10 within the second cavity 502 can be transferred to the first heating mechanism 3 within the first cavity 101 for fixation, or, the first sample holder 4 within the first cavity 101 can be transferred to the connector 703 within the second cavity 502 for fixation. In a specific embodiment, the plurality of connection ports 501 of the second housing 5 can be simultaneously connected to an atmosphere analysis device, a heating device, a cooling device, and a mass spectrometer to support multi-functional experimental applications. Among them, the connection ports 501 are all flange ports to ensure the stability of the connection.

[0063] Exemplarily, in this embodiment, the driver 701 employs a vacuum linear driver 701, which is a prior art and will not be elaborated here. The connector 703 is provided at the output end of the driver 701 and can move in a linear direction through the driver 701. Among them, the movement direction of the connector 703 is perpendicular to the axial direction of the sample transfer rod 1201 to facilitate avoiding the movement of the sample transfer rod 1201.

[0064] Exemplarily, in this embodiment, the connector 703 is provided with a cooling cavity 704. The cooling assembly includes a water inlet pipe and a water outlet pipe 706. The output end of the water inlet pipe and the input end of the water outlet pipe 706 are provided in the cooling cavity 704. In this embodiment, since the second laser heating head 710 is provided on the connector 703, therefore, a large amount of heat will be generated during the operation of the second laser heating head 710. A cooling cavity 704 is provided on the connector 703, and circulating cooling water is introduced into the cooling cavity 704 to facilitate continuous heat dissipation of the connector 703.

[0065] In an exemplary embodiment, a positioning block 8 is provided on the connector 703. A pressing plate 9 is detachably connected to the positioning block 8. The pressing plate 9 can be used to fix the second sample holder 10 on the positioning block 8. An installation space 801 adapted to the second sample holder 10 is provided between the pressing plate 9 and the positioning block 8. The second sample holder 10 is detachably connected to the positioning block 8 through the installation space 801.

[0066] In this embodiment, the provided positioning block 8 and pressing plate 9 are mainly used to fix the second sample holder 10. Among them, the positioning block 8 is installed on the connector 703 by means of bolt connection, and the pressing plate 9 is synchronously installed on the positioning block 8 by bolts. Since there are multiple steps on the positioning block 8, the installation space 801 formed between the pressing plate 9 and the positioning block 8 can fix the second sample holder 10, and the fixing method is also a plug-in type.

[0067] Exemplarily, a pair of elastic pressing parts 901 are symmetrically provided on the pressing plate 9. The elastic pressing parts 901 have the ability of elastic deformation. The elastic pressing parts 901 are slightly inclined toward the inside of the installation space 801 along the direction in which the second sample holder 10 enters. After the sample holder enters the installation space 801, the elastic pressing parts 901 are lifted and elastically deformed to press the second sample holder 10, improving the stability of the second sample holder 10. In a specific embodiment, since the sample transfer rod 1201 moves horizontally in one direction, the coordinates of the cooperation between the connector 703 and the sample transfer rod 1201 can be determined by the controller, so that every time the second sample holder 10 needs to be removed or inserted, the connector 703 is moved to a specified position. Specifically: in this embodiment, the output end of the driver 701 is controlled by the controller to move a specified length to realize the installation or disassembly of the second sample holder 10.

[0068] Exemplarily, in this embodiment, a second connecting portion 1001 is provided on the side wall of the second sample holder 10, which is used to connect with the sample transfer rod 1201 to facilitate the movement of the second sample holder 10.

[0069] It is worth noting that in this embodiment, a pair of temperature measuring elements 11 are provided on the positioning block 8. Through the arranged temperature measuring elements 11, the temperature of the sample growing on the second sample holder 10 can be measured for timely monitoring, and the heating power of the second laser heating head 710 can be controlled in cooperation with a temperature controller.

[0070] In an exemplary embodiment, a connecting component is provided on the driver 701. The connecting component includes a first flange group 707. The first flange group 707 is arranged at one end of the driver 701 away from the connecting head 703. The water outlet pipe 706 and the water inlet pipe are fixed in the driver 701 through the first flange group 707.

[0071] In this embodiment, through the arranged first flange group 707, it can be used for the adaptation of the driver 701 and the second laser heating head 710, and at the same time, it can also fix the water inlet pipe 705 and the water outlet pipe 706. In this embodiment, the inside of the driver 701 is a sealed environment. Since the second connecting head 703 needs to move, but the moving distance is small, a certain margin is left for the parts of the water inlet pipe 705 and the water outlet pipe 706 located inside the driver 701 to facilitate the normal circulation of the cooling water in the water inlet pipe 705 and the water outlet pipe 706.

[0072] In some embodiments, the connecting component further includes a second flange group 708. The second flange group 708 is arranged on the side of the first flange group 707 away from the connecting head 703. A connecting pipe 709 is provided between the first flange group 707 and the second flange group 708. A protective sleeve 712 is provided at one end of the second flange group 708 away from the first flange group 707. The optical fiber 711 of the second laser heating head 710 sequentially passes through the driver 701, the first flange group 707, the second flange group 708 and the protective sleeve 712 and is connected to an external power supply.

[0073] In this embodiment, the provided second flange is mainly used to fix the optical fiber 711 of the second laser heating head 710, avoid damage to the optical fiber 711, and ensure the normal growth of the sample inside the second cavity 502.

[0074] Exemplarily, the second flange group 708 in this embodiment is an optical fiber 711 feeding flange, which can effectively fix the light, use the driver 701 as a carrier, and ensure that the optical fiber 711 can stably transmit power.

[0075] Exemplarily, the provided protective sleeve 712 is used to protect the end of the optical fiber 711 to prevent it from being directly exposed.

[0076] In an exemplary embodiment, the sample transfer mechanism 12 further includes a limiting tube 1202 which can be used for the axial positioning of the sample transfer rod 1201. One end of the sample transfer rod 1201 is provided with a sample transfer head 1203, and a connection groove 1204 capable of being detachably connected to the first sample tray 4 or the second sample tray 10 is provided at the free end of the sample transfer head 1203.

[0077] In this embodiment, by providing the limiting tube 1202, it can be ensured that the sample transfer rod 1201 can only move along its axis. The connection groove 1204 provided on the sample transfer head 1203 can be adapted to the first connection part 401 or the second connection part 1001 to fix the first sample tray 4 or the second sample tray 10, facilitating the movement of the first sample tray 4 or the second sample tray 10.

[0078] Exemplarily, in this embodiment, the connection groove 1204 is a rectangular opening. An abutting plate 1205 is provided inside the sample transfer head 1203, and a locking groove 1206 is formed between the abutting plate 1205 and the connection groove 1204. When the first connection part 401 or the second connection part 1001 enters the locking groove 1206 from the connection groove 1204, rotate the sample transfer rod 1201 by ninety degrees, and the locking of the sample transfer head 1203 to the first sample tray 4 / the sample transfer head 1203 to the second sample tray 10 can be achieved. Pulling the sample transfer rod 1201 can drive the first sample tray 4 or the second sample tray 10 to move. In a specific embodiment, the first sample tray 4 and the second sample tray 10 are perpendicularly arranged to facilitate the position conversion of the first sample tray 4 or the second sample tray 10.

[0079] Exemplarily, in this embodiment, other parts of the sample transfer rod 1201 are prior art, and the movement of the sample transfer head 1203 is driven by magnetic coupling. In this embodiment, a limiting mechanism can be provided on the sample transfer rod 1201 to limit the rotation angle of the sample transfer rod 1201 and fix its rotation angle to ninety degrees for the convenience of the installation of the first sample tray 4 or the second sample tray 10.

[0080] In an exemplary embodiment, a molecular pump 13 is further provided at one of the connection ports 501 on the second housing 5, which is used to evacuate the second housing 5. During specific operation, the valve 6 is set to be open when the atmosphere environments of the second housing 5 and the first housing 1 are the same. Therefore, when the device is operating, there is no need to separately open the first housing 1, and the first sample holder 4 in the first housing 1 can be taken out through the second housing 5, protecting the internal environment of the first housing 1. Specifically, the vacuum environment inside the first housing 1 does not need to be destroyed, and the sample can be placed into the first housing 1 through the sample transfer rod 1201 without consuming more time to evacuate the first housing 1. Therefore, the second housing 5 is set to be a housing with a smaller volume than the first housing 1, which can quickly form the same atmosphere environment as the first housing 1. The setting method of this embodiment does not need to destroy the vacuum environment of the first cavity 101, thereby extending the service life of the present invention.

[0081] Exemplarily, the experimental atmospheres of the first housing 1 and the second housing 5 can be dynamically switched through the gas supply system and the valve 6, supporting multi-environment switching of inert atmosphere, oxidizing atmosphere, and reducing atmosphere. At the same time, both the first housing 1 and the second housing 5 can be equipped with a remote control system to set, monitor, and record experimental parameters through a computer terminal.

[0082] In summary, through the provided first housing 1 and second housing 5, the present invention can accurately characterize the nano-scale reaction active sites inside the first housing 1, while conducting macroscopic catalytic reaction research in the second housing 5 to reveal the activity differences and reaction mechanisms of the catalyst at different scales. Moreover, batch sample growth and processing are realized through the second housing 5, while reducing the frequency of vacuum destruction of the first housing 1, improving the service life of the equipment, and ensuring the long-term stable operation of high-precision instruments.

[0083] The above embodiments merely illustrate the principles and effects of the present invention, rather than limiting the present invention. Any person familiar with this technology can modify or change the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or changes completed by those with ordinary knowledge in the technical field without departing from the spirit and technical ideas disclosed by the present invention should still be covered by the claims of the present invention.

Claims

1. A multi-cavity sample growth device, characterized in that, Comprising: A first housing, within which a first heating mechanism and a first sample holder mounted on the first heating mechanism are provided, and the first heating mechanism is used to heat the sample on the first sample holder; A second housing, a valve for mutual connection is provided between the first housing and the second housing, a second heating mechanism and a second sample holder located within the second housing are provided on the second housing, and the second heating mechanism is used to heat the sample on the second sample holder; A sample transfer mechanism, the sample transfer mechanism is arranged on the second housing, the sample transfer mechanism includes a sample transfer rod, and the sample transfer rod can be used to drive the first sample holder or the second sample holder to transfer between the first housing and the second housing.

2. The multi-cavity sample growth device according to claim 1, wherein: A first cavity is provided within the first housing, the first sample holder is arranged within the first cavity, the first heating mechanism extends into the first cavity and is connected to the first sample holder, and an electron microscope is provided within the first cavity, and the electron microscope is arranged opposite to the first sample holder.

3. The multi-cavity sample growth device according to claim 2, characterized in that: The first heating mechanism includes a mounting base, a first laser heating head arranged on the mounting base, and a fixing component. The axial direction of the heating head is arranged along the width direction of the mounting base. A refraction component is provided within the fixing component, and the refraction component can be used to refract the laser of the first laser heating head. The first sample holder is detachably connected to the mounting base, and the first sample holder is located on the refraction path of the refraction component.

4. The multi-cavity sample growth device according to claim 3, wherein: The fixing component includes a first fixing block and a second fixing block mounted on the mounting base. An installation block is provided between the first fixing block and the second fixing block, the refraction component is arranged within the installation block, and the incident end of the refraction component is vertically arranged with the output end of the first laser heating head.

5. The multi-chamber sample growth device according to claim 1, characterized in that: The second heating mechanism includes a driver and a second laser heating head. A connection head is provided at the output end of the driver, the second laser heating head is arranged on the connection head, the driver can be used to drive the second sample holder to move along the radial direction of the sample transfer rod, a cooling component is provided on the connection head, and the second sample holder is detachably connected to the connection head.

6. The multi-chamber sample growth device according to claim 5, characterized in that: The connection head is provided with a cooling cavity, and the cooling component includes a water inlet pipe and a water outlet pipe. The output end of the water inlet pipe and the input end of the water outlet pipe are arranged within the cooling cavity.

7. The multi-cavity sample growth device according to claim 6, wherein: A positioning block is provided on the connection head, a pressing plate is detachably connected to the positioning block, the pressing plate can be used to fix the second sample holder on the positioning block, an installation space adapted to the second sample holder is provided between the pressing plate and the positioning block, and the second sample holder is detachably connected to the positioning block through the installation space.

8. The multi-cavity sample growth device according to claim 6, wherein: A connection component is provided on the driver, and the connection component includes a first flange group. The first flange group is arranged at the end of the driver away from the connection head, and the water outlet pipe and the water inlet pipe are fixed within the driver through the first flange group.

9. The multi-cavity sample growth device according to claim 8, characterized in that: The connecting component further includes a second flange group, which is arranged on a side of the first flange group away from the connector. A connecting pipe is provided between the first flange group and the second flange group. A protective sleeve is provided at an end of the second flange group away from the first flange group. The optical fiber of the second laser heating head sequentially passes through the driver, the first flange group, the second flange group and the protective sleeve and is connected to an external power supply.

10. The multi-cavity sample growth device according to claim 1, wherein: The sample transfer mechanism further includes a limiting pipe, which can be used for axial positioning of the sample transfer rod. A sample transfer head is provided at one end of the sample transfer rod, and a connecting groove capable of being detachably connected to the first sample tray or the second sample tray is provided at the free end of the sample transfer head.

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