Particle handling device, sorting device, detection device and corresponding method

Abstract

The invention relates to a particle control, sorting and detection device and method, and the device comprises a special ultrasonic device which comprises two side edges extending from a first end to a second end, and the two side edges are gradually shrunk along the extending direction and form an angle, so that the dragging force of acoustic fluid formed by the side edges is gradually reduced along the extending direction; a second side edge, close to the downstream side of the first flow channel, of the two side edges is inclined to the extending direction of the first flow channel; when the special ultrasonic device is in a working state, particles in the first flow channel are captured, the particles are made to move towards the second end along the acoustic fluid tunnel of the second side edge, and the particles are made to break away from the acoustic fluid tunnel of the second side edge at the position where the dragging force of the acoustic fluid is matched with the dragging force of the fluid in the first flow channel. The invention further provides a corresponding method. Multi-channel particle sorting can be achieved through one special ultrasonic device, the number of the special ultrasonic devices is reduced, and the micro-fluidic device is suitable for miniaturization of a micro-fluidic system.

Description

Technical Field

[0001] This application relates to the fields of Micro-Electro-Mechanical System (MEMS) technology and microfluidics technology, particularly to a particle manipulation device, a sorting device, a detection device, a manipulation method, a sorting method, and a detection method. Background Art

[0002] A microfluidic system mainly consists of a microfluidic control chip, supplemented by an external driving physical field and a detection system, aiming to construct a miniaturized on-chip biochemical laboratory, that is, to integrate basic operation processes such as sample preparation, reaction, detection, separation, cell culture, screening, and lysis involved in the fields of biology and chemistry into a microchannel network at the micron level, so as to more efficiently realize various functions of the biochemical laboratory at a lower cost.

[0003] Among them, droplet microfluidics is an important branch of microfluidics. Currently, common droplet manipulation techniques include droplet generation, cutting, fusion, sorting, and inner laminar flow mixing and particle enrichment of droplets. Among them, droplet sorting technology refers to a droplet manipulation technology that transports and distributes droplets into different downstream sub-channels by using a special channel structure, the physical and chemical properties of droplets, or by introducing an external physical field.

[0004] In droplet sorting technology, sorting schemes based on technologies such as electricity, magnetism, acoustics, thermotics, and pneumatics are included. Among them, droplet sorting based on acoustics has the characteristic of good biocompatibility. For example, in the patent application with the Chinese patent application number CN202311458207.9, a technology for realizing particle sorting using a special ultrasonic device is disclosed. In this patent application, the end of the special ultrasonic device is angled, and the particles flowing through its effective range are captured and then released from the end of the special ultrasonic device into the target sorting channel. And when there are multiple (such as at least three) sorting channels, corresponding multiple special ultrasonic devices can be set. When each target particle passing by in sequence is detected through an optical system, each special ultrasonic device can be respectively controlled to start to capture each target particle and release it from the end of each special ultrasonic device into the corresponding target sorting channel.

[0005] How to reduce the number of special ultrasonic devices when there are multiple sorting channels and miniaturize the microfluidic system is a technical problem to be solved. Summary of the Invention

[0006] In view of the above problems in the prior art, this application provides a particle manipulation device, a sorting device, a detection device, a manipulation method, a sorting method, and a detection method to achieve sorting with one special ultrasonic device corresponding to multiple sorting channels.

[0007] The first aspect of this application provides a particle manipulation device, including:

[0008] A super ultrasonic device, comprising two side edges extending from a first end to a second end, wherein the spacing between the two side edges gradually shrinks along the extension direction and forms an angle at the second end, so as to gradually reduce the drag force of the acoustic fluid formed on the side edges along the extension direction, wherein the first end comprises an arcuate edge protruding away from the second end, and the two ends of the arcuate edge are connected to the two side edges in a smooth transition manner;

[0009] A second side edge of the two side edges close to the downstream side of the first flow channel is inclined with respect to the extending direction of the first flow channel;

[0010] The effective range of the ultra-sonic device includes the first flow channel, and is used to capture particles in the liquid flowing through the first end in the first flow channel when in working state, and to move the particles along the acoustic fluid tunnel on the second side toward the second end, and to make the particles leave the acoustic fluid tunnel on the second side at a position where the drag force of the acoustic fluid matches the drag force of the fluid in the first flow channel, so as to flow downstream.

[0011] A second aspect of the present application provides a particle sorting device, comprising:

[0012] A super ultrasonic device, comprising two side edges extending from a first end to a second end, wherein the spacing between the two side edges gradually shrinks along the extension direction and forms an angle at the second end, so as to gradually reduce the drag force of the acoustic fluid formed on the side edges along the extension direction, wherein the first end comprises an arcuate edge protruding away from the second end, and the two ends of the arcuate edge are connected to the two side edges in a smooth transition manner;

[0013] A second side edge of the two side edges close to the downstream side of the first flow channel is inclined with respect to the extending direction of the first flow channel;

[0014] The first flow channel is connected to at least two downstream sub-flow channels downstream, and the inlet of each of the downstream sub-flow channels faces a different position of the second side;

[0015] The effective range of the ultra-sonic device includes the first flow channel, and is used to capture particles in the liquid flowing through the first end in the first flow channel when in a working state, and to move the particles along the acoustic fluid tunnel on the second side toward the second end, and to make the particles leave the acoustic fluid tunnel on the second side at a position where the drag force of the acoustic fluid matches the drag force of the fluid in the first flow channel, so as to flow to a corresponding downstream sub-flow channel.

[0016] The third aspect of the present application provides a particle detection device, comprising:

[0017] A super ultrasonic device, comprising two side edges extending from a first end to a second end, wherein the spacing between the two side edges gradually shrinks along the extension direction and forms an angle at the second end, so as to gradually reduce the drag force of the acoustic fluid formed on the side edges along the extension direction, wherein the first end comprises an arcuate edge protruding away from the second end, and the two ends of the arcuate edge are connected to the two side edges in a smooth transition manner;

[0018] A second side edge of the two side edges close to the downstream side of the first flow channel is inclined with respect to the extending direction of the first flow channel;

[0019] The effective range of the ultra-sonic device includes the first flow channel, and is used to capture particles in the liquid flowing through the first end in the first flow channel in a working state, and move the particles along the acoustic fluid tunnel on the second side toward the second end, and make the particles leave the acoustic fluid tunnel on the second side at a position where the drag force of the acoustic fluid matches the drag force of the fluid in the first flow channel, so as to flow downstream;

[0020] A detection unit for generating a detection signal when particles flow through a detection region is disposed downstream of the first flow channel. The detection signal is related to the size of the particles and the position of the particles flowing through the detection region.

[0021] In some achievable embodiments, the position where the particle leaves the acoustic fluid tunnel on the second side is adjusted by one of the following:

[0022] Adjusting the power of driving the ultra-ultrasonic device, the greater the power, the closer the position is to the second end;

[0023] Adjusting the duration of the ultra-ultrasonic device being in the working state, the longer the duration, the closer the position is to the second end;

[0024] The flow rate of the fluid in the first flow channel is adjusted; the faster the flow rate, the closer the position is to the first end.

[0025] In some achievable embodiments, when the particles in the liquid flowing through the first end in the first flow channel include particles of different sizes, the smaller the particle, the closer to the second end the position where the particle leaves the acoustic fluid tunnel on the second side.

[0026] In some achievable embodiments, at least one of the following is also included:

[0027] The first end of the ultra-sonic device is at a first distance from the side wall closest to the first flow channel, and the first distance allows particles flowing through the first end to be captured by the acoustic fluid tunnel of the arc-shaped side of the first end, and allows the particles to move toward the acoustic fluid tunnel of the second side;

[0028] The second side of the particular ultrasonic device is inclined at a first angle with respect to the extending direction of the first flow channel, and the first angle enables the microparticles to move a distance exceeding a threshold along the acoustic fluid tunnel on the second side, and the deviation degree of the position where the microparticles break away from the acoustic fluid tunnel on the second side exceeds a threshold.

[0029] In some realizable ways, it further includes at least one of the following:

[0030] A first upstream sub-channel and at least one second upstream sub-channel are connected upstream of the first flow channel; the outlet of the first upstream sub-channel faces a first position at the inlet of the first flow channel, and the first position is directly opposite the first end of the particular ultrasonic device downstream, so that the first upstream sub-channel flows the liquid including the microparticles towards the first end of the particular ultrasonic device; the outlets of the at least one second upstream sub-channel face the remaining positions at the inlet of the first flow channel, and are used to introduce liquid into the first flow channel to maintain the stable flow direction of the liquid including the microparticles entering the first flow channel through the first upstream sub-channel;

[0031] A support structure located in the first flow channel, which is supported between the bottom and the top of the first flow channel;

[0032] A balance flow channel that leapfrog-connects each of the downstream sub-channels to balance the flow resistance of each of the downstream sub-channels, and the cross-sectional size of the balance flow channel is smaller than the cross-sectional size of the sub-channel.

[0033] The fourth aspect of the present application provides a method for manipulating microparticles, which is characterized in that the device according to any one of claims 1-7 is used, and the method includes:

[0034] When the particular ultrasonic device is in a working state, the microparticles in the liquid flowing through the first end of the particular ultrasonic device in the first flow channel are captured, and the microparticles are made to move along the acoustic fluid tunnel on the second side of the particular ultrasonic device towards the second end;

[0035] The microparticles break away from the acoustic fluid tunnel on the second side at a position where the drag force of the acoustic fluid and the drag force of the fluid in the first flow channel match, and flow downstream.

[0036] The fifth aspect of the present application provides a method for sorting microparticles, which is characterized in that the device according to any one of claims 1-7 is used, and the method includes:

[0037] When the particular ultrasonic device is in a working state, the microparticles in the liquid flowing through the first end of the particular ultrasonic device in the first flow channel are captured, and the microparticles are made to move along the acoustic fluid tunnel on the second side of the particular ultrasonic device towards the second end;

[0038] The microparticles break away from the acoustic fluid tunnel on the second side at a position where the drag force of the acoustic fluid and the drag force of the fluid in the first flow channel match, and flow into the corresponding downstream sub-flow channel.

[0039] The sixth aspect of the present application provides a microparticle detection method, characterized in that the device according to any one of claims 1-7 is used, and the method includes:

[0040] When the special ultrasonic device is in a working state, the microparticles in the liquid flowing through the first end of the special ultrasonic device in the first flow channel are captured, and the microparticles are moved along the acoustic fluid tunnel on the second side of the special ultrasonic device towards the second end;

[0041] The microparticles break away from the acoustic fluid tunnel on the second side at a position where the drag force of the acoustic fluid and the drag force of the fluid in the first flow channel match, and flow downstream;

[0042] A detection signal is generated by a detection unit arranged downstream of the first flow channel when the microparticles flow through the detection area, and the detection signal is related to the size of the microparticles and the position where the microparticles flow through the detection area.

[0043] The microparticle manipulation, sorting, and detection solutions provided by the present application can achieve sorting of multiple channels based on a single special ultrasonic device, such as sorting of two, three, or more than three channels, etc., which can effectively reduce the number of special ultrasonic devices and facilitate the miniaturization of the microfluidic system. Description of the Drawings

[0044] Figure 1 is a schematic diagram of the acoustic fluid tunnel provided by an embodiment of the present application;

[0045] Figure 2 is a schematic diagram of microparticle manipulation by the microparticle manipulation device provided by the first embodiment of the present application;

[0046] Figure 3 is a schematic diagram of the special ultrasonic device in an embodiment of the present application;

[0047] Figure 4 is a schematic diagram of the microparticle sorting device provided by the second embodiment of the present application;

[0048] Figure 5 is a schematic diagram of the microparticle detection device provided by the third embodiment of the present application;

[0049] Figure 6a is a schematic diagram of the experimental platform for microparticle sorting provided by an embodiment of the present application;

[0050] Figure 6b is an experimental result diagram of droplet deflection at different positions of the special ultrasonic device in the first flow channel provided by an embodiment of the present application;

[0051] Figure 6c1 and Figure 6c2 are experimental result diagrams for manipulating droplets of different sizes with a fixed power of the driving terahertz ultrasonic device;

[0052] Figure 6d1 and Figure 6d2 are experimental result diagrams for droplets of the same size using different powers of the driving terahertz ultrasonic device;

[0053] Figure 6e1 and Figure 6e2 are experimental result diagrams for droplet sorting experiments applied to three channels;

[0054] Figure 6f are experimental result diagrams for droplet sorting experiments applied to five channels;

[0055] Figure 6g are experimental result diagrams for droplet sorting experiments applied to seven channels.

[0056] It should be understood that in the above structural schematic diagrams, the sizes and shapes of the respective block diagrams are for reference only and should not constitute an exclusive interpretation of the embodiments of the present invention. The relative positions and inclusion relationships between the respective block diagrams presented in the structural schematic diagrams only schematically represent the structural associations between the block diagrams and do not limit the physical connection manners of the embodiments of the present invention. Specific Embodiments

[0057] The following are embodiments with reference to the accompanying drawings to further illustrate the technical solutions provided in this application. It should be understood that the system structures and service scenarios provided in the embodiments of this application are mainly for illustrating possible implementation manners of the technical solutions of this application and should not be interpreted as the only limitation of the technical solutions of this application. Those of ordinary skill in the art will know that with the evolution of the system structure and the emergence of new service scenarios, the technical solutions provided in this application are equally applicable to similar technical problems.

[0058] It should be understood that the implementation of the particle sorting solution provided in the embodiments of this application includes a particle manipulation device, a sorting device, a detection device, a manipulation method, a sorting method, and a detection method. Since the principles of these technical solutions for solving problems are the same or similar, in the following introduction of specific embodiments, some repetitive parts may not be elaborated again, but it should be regarded that there are mutual references between these specific embodiments and they can be combined with each other.

[0059] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field to which this application belongs. In case of inconsistency, the meaning stated in this specification or the meaning derived from the content recorded in this specification shall prevail. Additionally, the terms used herein are for the purpose of describing the embodiments of this application only and are not intended to limit this application. For the purpose of accurately describing the technical content in this application and for accurately understanding the present invention, the following explanations or definitions of the terms used in this specification are given before describing the specific embodiments:

[0060] 1) Ultra-sonic device: A high-frequency resonator, which can be a device that generates mechanical vibrations by applying a voltage based on the piezoelectric effect. In this application, a piezoelectric resonator that generates ultra-sonic waves of not less than 0.5 gigahertz (gigahertz is GHz) during operation is used. Preferably, it is a piezoelectric resonator that generates ultra-sonic waves of not less than 1 GHz and not higher than 30 GHz. For example, it can be 2G - 2.5 GHz. Such piezoelectric resonators can be, for example, Surface Acoustic Wave (SAW) devices, Bulk Acoustic Wave (BAW) devices, etc. Also, when it is a BAW, it can be a Film Bulk Acoustic Resonator (FBAR), a Solidly Mounted Resonator (SMR), or a Lamb Wave Resonator (LWR). For the convenience of description, the piezoelectric resonator that can generate ultra-sonic waves of not less than 0.5 GHz will be hereinafter referred to as an ultra-sonic device.

[0061] 2) Acoustic-fluid tunnel: When the ultra-sonic device is excited by an input signal, it generates ultra-high-frequency vibrations to emit body waves. The body waves propagate in the fluid, causing the directional movement of the fluid and forming fluid vortices. One of the phenomena is that, as Figure 1 shown, several tiny fluid vortices can be generated at the chip edge of the ultra-sonic device in the fluid. These fluid vortices can capture the particles in the liquid. Combining the position distribution of these fluid vortices, it presents the phenomenon that the particles in the liquid are distributed at the chip edge of the ultra-sonic device. Since the particles in the fluid will flow through these fluid vortices distributed at the chip edge, the flow path of the particles formed by these fluid vortices is referred to as the acoustic-fluid tunnel in this application.

[0062] 3) Particle: It refers to a geometric body with a specific shape within a certain size range. For example, microscopic particles located in a liquid environment that can be distinguished from the liquid environment (i.e., insoluble) and can be moved within the liquid environment can be regarded as the particles described in this application.

[0063] In some embodiments, the particle diameter range can span from the nanoscale to the millimeter scale. The particles can include: cells, molecules, molecular polymers, long-chain molecules, DNA nucleic acids, inorganic particles, metal particles, composite particles, magnetic particles, quantum dots, microbeads (or microspheres, used for modifying functions such as modifying proteins, specific substances, etc.), and so on. In some embodiments, the particles can also be non-solid. For example, they can be in the form of droplets, such as droplets in another immiscible liquid medium, such as water droplets (or water beads) in the oil phase within a flow channel, or oil droplets (or oil beads) in the water phase, etc.

[0064] 4) Main forces acting on the particles in the fluid: mainly include the drag force of the acoustic radiation force of the special ultrasonic device (mainly constraining the particles in the acoustic fluid tunnel) and the downstream fluid drag force (mainly driving the particles downstream). The position where the drag force of the acoustic radiation force balances the fluid drag force is the critical position for the particles to break away from the acoustic fluid tunnel. Among them, in the embodiments of the present application, the special ultrasonic device can be in the shape of a droplet, with a gradually changing distance between the two sides forming the tip of the droplet, so that the drag force of the acoustic fluid at the side gradually changes, enabling different-sized particles to be released at different positions at the side.

[0065] 5) Reasonable ranges of parameters, as well as positive and negative correlations between parameters: The reasonable range refers to the range of parameters that conform to the solution of the present application. For example, the particle size is within a reasonable range, and the power is controlled within a reasonable range, etc. These ranges can be obtained based on experiments. A positive correlation between parameters means that one parameter increases as another parameter increases, and a negative correlation means that one parameter increases as another parameter decreases. Each parameter mentioned in the present application cannot be infinitely small or infinitely large. Therefore, unless otherwise specified, the values of each parameter mentioned in the present application are all within a reasonable numerical range. For example, when describing that parameter A is positively correlated with parameter B, it means that within a certain value range, parameter A is positively correlated with parameter B, and it can be predicted that outside this range, parameter B is no longer positively correlated with parameter A (when parameter B reaches a saturation state after parameter A increases to a certain value, then parameter B no longer increases with the increase of parameter A). Then this value range is the reasonable numerical range.

[0066] Microfluidic particle sorting solutions include acoustic-based sorting methods, which have the advantages of low power consumption, little damage to cells, and strong versatility. Among them, based on acoustic sorting technology, ultra-ultrasonic devices can be used to improve screening accuracy. For example, in the solution provided by the Chinese patent application CN202311458207.9, two-dimensional sheath flow or other focusing methods can be used upstream of the microchannel to arrange the particle samples in a queue in the fluid. When the detection device detects the target particles in the queue, the ultra-ultrasonic device is controlled to start, and the target particles flowing through its action range are driven to flow to the target branch channel, and when it is not started, the particles flowing through its action range are caused to flow to another branch channel. When there are more branch channels, more ultra-ultrasonic devices need to be set up to drive different target particles to flow to different branch channels.

[0067] The present application provides an improved particle sorting solution, which can use a single ultra-ultrasonic device to achieve multi-channel sorting, that is, use a single ultra-ultrasonic device to drive particles of different sizes in a fluid to flow into different branch channels, thereby reducing the number of ultra-ultrasonic devices used.

[0068] The solution provided in this application is described in detail below with reference to the accompanying drawings and embodiments.

[0069] The first embodiment of the present application provides a particle manipulation device, referring to Figure 2 As shown, the control device includes:

[0070] Ultrasonic devices, such as Figure 3 An embodiment of the ultra-sonic device shown includes two side edges extending from a first end to a second end, and the spacing between the two side edges gradually shrinks along the extension direction and forms an angle at the second end, so as to gradually reduce the drag force of the acoustic fluid formed on the side edges along the extension direction, and the first end includes an arc-shaped edge protruding away from the second end, and the two ends of the arc-shaped edge are connected to the two side edges in a smooth transition manner;

[0071] The two side edges include a first side edge and a second side edge, wherein the second side edge is closer to the downstream flow channel, so that the second side edge close to the downstream side of the first flow channel is inclined to the extending direction of the first flow channel;

[0072] The effective range of the ultra-sonic device includes the first flow channel, and is used to capture particles in the liquid flowing through the first end in the first flow channel when in working state, and to move the particles along the acoustic fluid tunnel on the second side toward the second end, and to make the particles leave the acoustic fluid tunnel on the second side at a position where the drag force of the acoustic fluid matches the drag force of the fluid in the first flow channel, so as to flow downstream.

[0073] like Figure 2As shown, a particle capture region is shown, where particles in the liquid flowing through the first end in the first flow channel are captured in this region and enter the acoustic fluidic tunnel of the arc edge. A release region is also shown, which corresponds to the distribution region of the acoustic fluidic tunnel on the second side edge.

[0074] In the above-mentioned particle manipulation device, the width of the special ultrasonic device is designed to decrease from the first end to the second end, so as to realize that the distribution of the acoustic fluid drag force on the second side edge of the special ultrasonic device gradually decreases from the first end to the second end. Under the action of the fluid drag force and the acoustic fluid drag force, particles of different sizes will break away from the acoustic fluid tunnel at different positions on the second side edge. Specifically, the smaller the size of the particles, the closer the position where they break away from the acoustic fluid tunnel is to the second end. Therefore, when particles of different sizes flow through the special ultrasonic device, they can be manipulated to corresponding different positions and flow downstream, realizing the manipulation of particles.

[0075] The second embodiment of the present application provides a particle sorting device, including the particle manipulation device described in the first embodiment, as Figure 3 shown. Specifically, this particle sorting device includes:

[0076] A special ultrasonic device, which includes two side edges extending from the first end to the second end, and the distance between the two side edges gradually shrinks along the extension direction and forms an angle at the second end, so as to make the drag force of the acoustic fluid formed on the side edge gradually decrease along the extension direction. The first end includes an arc edge protruding in the direction away from the second end, and both ends of the arc edge are connected to the two side edges in a smooth transition manner;

[0077] The two side edges include a first side edge and a second side edge. Among them, the second side edge is closer to the downstream flow channel, and the second side edge, which is the side edge closer to the downstream side of the first flow channel among the two side edges, is inclined to the extension direction of the first flow channel;

[0078] At least two downstream sub-channels are connected to the downstream of the first flow channel, and the inlets of each downstream sub-channel face different positions of the second side edge;

[0079] The effective range of the special ultrasonic device includes the first flow channel, which is used to capture the particles in the liquid flowing through the first end in the first flow channel when in the working state, and make the particles move along the acoustic fluid tunnel of the second side edge towards the second end, and make the particles break away from the acoustic fluid tunnel of the second side edge at the position where the drag force of the acoustic fluid matches the drag force of the fluid in the first flow channel, so as to flow to the corresponding downstream sub-channel.

[0080] Therefore, when there are multiple downstream sub-channels in parallel downstream of the first flow channel, particles of different sizes can be made to flow to different downstream sub-channels, realizing the sorting of particles.

[0081] The third embodiment of the present application provides a particle detection device, including the particle manipulation device described in the first embodiment, Figure 5 A schematic diagram of a particle detection device is shown, the particle detection device comprising:

[0082] A super ultrasonic device, comprising two side edges extending from a first end to a second end, wherein the spacing between the two side edges gradually shrinks along the extension direction and forms an angle at the second end, so as to gradually reduce the drag force of the acoustic fluid formed on the side edges along the extension direction, wherein the first end comprises an arcuate edge protruding away from the second end, and the two ends of the arcuate edge are connected to the two side edges in a smooth transition manner;

[0083] The two side edges include a first side edge and a second side edge, wherein the second side edge is closer to the downstream flow channel, so that the second side edge close to the downstream side of the first flow channel is inclined to the extending direction of the first flow channel;

[0084] The effective range of the ultra-sonic device includes the first flow channel, and is used to capture particles in the liquid flowing through the first end in the first flow channel in a working state, and move the particles along the acoustic fluid tunnel on the second side toward the second end, and make the particles leave the acoustic fluid tunnel on the second side at a position where the drag force of the acoustic fluid matches the drag force of the fluid in the first flow channel, so as to flow downstream;

[0085] A detection unit for generating a detection signal when particles flow through a detection region is disposed downstream of the first flow channel. The detection signal is related to the size of the particles and the position of the particles flowing through the detection region.

[0086] From the above, when there is a detection unit downstream of the first flow channel, the detection of particles can be achieved by combining the detection signals related to the particle size and the position of the particles passing through the detection area.

[0087] In some embodiments, when the detection unit can detect the fluorescence intensity of the particles (the particles are pre-modified with fluorescence), not only can the fluorescence intensity be detected based on the size of the particles, but the size of the particles can also be determined based on the position of the fluorescence flowing through the detection area. The two signals enhance the judgment of the particle size.

[0088] In some embodiments, when the detection unit can detect the electrical signal of the particles, it can not only detect the strength of the electrical signal based on the size of the particles, but also determine the strength of the electrical signal of the particles according to the position of the particles flowing through the detection area. The two signals enhance the judgment of the particle size. The following is a further introduction to the principle of increasing the differentiation of different particle electrical property detection:

[0089] Through the special ultrasonic device, the capture of each particle in the fluid can be achieved; the captured particles move towards the end position of the special ultrasonic device through the acoustic fluid tunnel of the special ultrasonic device. During this movement, under the action of the gradually decreasing drag force of the acoustic radiation force, particles with different particle sizes will break away from the acoustic fluid tunnel at different positions, realizing the distribution of particles with different particle sizes into different laminar flows (referring to the laminar flow distributed from the side of the flow channel to the center of the flow channel). Based on this, the difference in the electrical parameters detected for different particles can be increased to improve the accuracy of particle identification, sorting, detection, etc. The specific description is as follows:

[0090] Among them, in an experiment, as Figure 5 shown in the schematic diagram, when the electrical detection area is a coplanar electrode located on one side of the flow channel, the closer the particles with the same particle size are to this side of the flow channel, that is, the closer they are to the electrode, the greater the detected impedance signal. Also, when the electrical detection area is an array electrode located on one side of the flow channel, the closer the particle is to the opposite side of the flow channel, that is, the farther it is from the electrode, the smaller the detected impedance signal. Thus, the position of the electrical detection area can be designed to make the magnitude of the electrical signal detected for the particles be positively or negatively correlated with the laminar flow position of the particles to be measured in the flow channel. This is called the first correlation here.

[0091] Among them, in another experiment, when particles with different particle sizes flow through the electrical detection area through the same path (referring to being arranged in a line), the magnitude of the detected electrical signal is positively or negatively correlated with the particle size. This is called the second correlation here. Specifically, whether it is a positive or negative correlation is related to the electrical parameters of the particles and the fluid. For example, if the conductivity of the particles is lower than that of the fluid, the particle size is positively correlated with the magnitude of the measured impedance signal; if the conductivity of the particles is higher than that of the fluid, the particle size is negatively correlated with the magnitude of the measured impedance signal.

[0092] Based on the correlations revealed in the above two experiments, the position of the electrical detection area is set so that the combination of the first correlation and the second correlation can enhance the difference in the electrical parameters of different particles detected: The first correlation is: the correlation between the electrical parameters detected for the particles flowing through the electrical detection area and the laminar flow (from one side of the flow channel to the other side) of the particles in the flow channel; the second correlation is: the correlation between the electrical parameters detected for the particles flowing through the electrical detection area and the particle size. That is, based on this principle, the position of the electrical detection area on the side of the microchannel can be set so that when particles with different particle sizes flow through the electrical detection area through different laminar flow paths, the difference in the detected electrical signals is strengthened. The following is an example:

[0093] For example, in some embodiments, when the particle size of each particle to be measured is positively correlated with the magnitude of the measured impedance signal, the electrical detection region may be set as a coplanar electrode located on the side of the flow channel corresponding to the first end of the special ultrasonic device. Thus, the larger the particle size of the particle to be measured, the closer the particle is to the side of the flow channel, and the larger the impedance signal detected. These two positive correlations enhance the difference in the detection results of particles with different particle sizes, which is beneficial to improving the detection sensitivity and accuracy.

[0094] For another example, in some other embodiments, when the particle size of each particle to be measured is negatively correlated with the magnitude of the measured impedance signal, the electrical detection region may be set as a coplanar electrode located on the side of the flow channel corresponding to the second end of the special ultrasonic device. Thus, the larger the particle size of the particle to be measured, the farther the particle is from the coplanar electrode, and the smaller the impedance signal detected. These two negative correlations enhance the difference in the detection results of particles with different particle sizes, which is beneficial to improving the detection sensitivity and accuracy.

[0095] For the device described in the first, second, or third embodiment above, in some embodiments, the position where the particle detaches from the acoustic fluid tunnel on the second side is adjusted by one of the following:

[0096] Adjust the power of driving the special ultrasonic device. The greater the power, the closer the position is to the second end;

[0097] Adjust the duration of the special ultrasonic device in the working state. The longer the duration, the closer the position is to the second end;

[0098] Adjust the fluid flow rate in the first flow channel. The faster the flow rate, the closer the position is to the first end.

[0099] Among them, the greater the power of driving the special ultrasonic device, the greater the drag force of the formed acoustic fluid, the stronger the binding effect on the particles, and the longer the distance that the particles can move in the acoustic fluid tunnel, so that the release point of the particles is closer to the second end. Among them, the faster the liquid flow rate in the first flow channel, the greater the drag force on the particles, the shorter the moving distance in the tunnel, and the release point is closer to the first end of the special ultrasonic device. Among them, the longer the special ultrasonic device is in the working state, the longer the action time on the particles, the longer the moving time of the particles in the acoustic fluid tunnel, and the release point of the particles is closer to the second end of the special ultrasonic device. Thus, the position where the particle detaches from the acoustic fluid tunnel on the second side can be adjusted based on the above methods to make it flow to the target downstream sub-channel.

[0100] For the device described in the above first, second, or third embodiment, in some embodiments, when the particles in the liquid flowing through the first end in the first flow channel include particles of different sizes, the smaller the size of the particles, the closer the position where the particles break away from the acoustic fluidic tunnel on the second side is to the second end. Accordingly, particles of different sizes can be made to flow to corresponding different downstream sub-flow channels.

[0101] For the device described in the above first, second, or third embodiment, in some embodiments, with reference to the schematic diagram as Figure 2 shown, it further includes: the side wall of the first end of the special ultrasonic device closest to the first flow channel has a first distance d, and the first distance d enables the particles flowing through the first end to be captured by the acoustic fluidic tunnel on the arc edge of the first end and makes the particles move towards the acoustic fluidic tunnel on the second side. Among them, a suitable first distance d can enable the particles to flow through the arc edge of the first end, be captured by the corresponding acoustic fluidic tunnel of the arc edge, and gradually change the moving direction of the particles to the acoustic fluidic tunnel on the second side based on the arc-shaped acoustic fluidic tunnel corresponding to the arc edge; if the first distance is too large, some particles will flow downstream without flowing through the first end of the special ultrasonic device; if the first distance is too small, some particles will directly rush towards the acoustic fluidic tunnel on the second side without going through the process of being captured by the first end and gradually changing the direction. In this way, due to the lack of a process of gradually changing the direction of the particles, they cannot be captured by the acoustic fluidic tunnel on the second side and flow downstream.

[0102] For the device described in the above first, second, or third embodiment, in some embodiments, with reference to the schematic diagram as Figure 2 shown, it further includes: the second side of the special ultrasonic device is inclined at a first angle θ with respect to the extending direction of the first flow channel, and the first angle θ enables the particles to move along the acoustic fluidic tunnel on the second side by a distance exceeding a threshold value, and the deviation degree of the position where the particles break away from the acoustic fluidic tunnel on the second side with respect to the initial moving position exceeds a threshold value. Among them, if the first angle is too small, the release positions of particles of different sizes will be too concentrated on the laminar flow (referring to the laminar flow from one side of the first flow channel to the other side) (the deviation degree of the release position with respect to the initial moving position is too concentrated); if the first angle is too large, the particle flow cannot utilize the fluid force to move along the second side towards the second end. Therefore, a suitable first angle θ can make different particles flow more dispersedly downstream on the laminar flow, which is more conducive to the sorting of particles.

[0103] For the device described in the above first, second, or third embodiment, in some embodiments, as Figure 2 , Figure 4 or Figure 5As shown, a first upstream sub-flow channel and at least one second upstream sub-flow channel are connected upstream of the first flow channel; the outlet of the first upstream sub-flow channel faces a first position of the inlet of the first flow channel, and the downstream of the first position faces the first end of the super ultrasonic device, so that the first upstream sub-flow channel flows the liquid including the particles to the first end of the super ultrasonic device; the outlet of the at least one second upstream sub-flow channel faces the remaining position of the inlet of the first flow channel, and is used to pass liquid into the first flow channel to maintain the stability of the flow direction of the liquid including the particles entering the first flow channel through the first upstream sub-flow channel.

[0104] For the device described in the first, second, or third embodiment above, in some embodiments, if Figure 2 , Figure 4 or Figure 5 As shown, it also includes a support structure located in the first flow channel, supported between the bottom and top of the first flow channel to prevent the flow channel from collapsing. The support structure can also be located at the junction of the second upstream sub-flow channel and the first flow channel, or at the entrance of each downstream sub-flow channel, etc.

[0105] For the particle separation device described in the second embodiment, in some embodiments, Figure 4 As shown, it also includes a balancing flow channel that crosses and connects each of the downstream sub-flow channels to balance the flow resistance of each of the downstream sub-flow channels, and the cross-sectional size of the balancing flow channel is smaller than the cross-sectional size of the sub-flow channel.

[0106] For the apparatus described in the first, second, or third embodiment above, in some embodiments, the first ultra-sonic device is located at the bottom of the microfluidic channel or on a substrate supporting the microfluidic channel, and is arranged close to the bottom of the microfluidic channel or the surface of the substrate.

[0107] A fourth embodiment of the present application provides a particle manipulation method, using the particle manipulation device described in the first embodiment or any optional embodiment thereof, the manipulation method comprising:

[0108] When the super ultrasonic device is in working state, the particles in the liquid flowing through the first end of the super ultrasonic device in the first flow channel are captured, and the particles are moved toward the second end along the acoustic fluid tunnel on the second side of the super ultrasonic device;

[0109] The particles are separated from the acoustic fluid tunnel on the second side at a position where the drag force of the acoustic fluid matches the drag force of the fluid in the first flow channel, and flow downstream.

[0110] A fifth embodiment of the present application provides a particle sorting method, using the particle sorting device described in the second embodiment or any optional embodiment thereof, the sorting method comprising:

[0111] When the super ultrasonic device is in working state, the particles in the liquid flowing through the first end of the super ultrasonic device in the first flow channel are captured, and the particles are moved toward the second end along the acoustic fluid tunnel on the second side of the super ultrasonic device;

[0112] The particles are separated from the acoustic fluid tunnel on the second side at a position where the drag force of the acoustic fluid matches the drag force of the fluid in the first flow channel, and flow to a corresponding downstream sub-flow channel.

[0113] A sixth embodiment of the present application provides a particle detection method, using the particle detection device described in the third embodiment or any optional embodiment thereof, the detection method comprising:

[0114] When the super ultrasonic device is in working state, the particles in the liquid flowing through the first end of the super ultrasonic device in the first flow channel are captured, and the particles are moved toward the second end along the acoustic fluid tunnel on the second side of the super ultrasonic device;

[0115] The particles leave the acoustic fluid tunnel on the second side at a position where the drag force of the acoustic fluid matches the drag force of the fluid in the first flow channel, and flow downstream;

[0116] The detection unit arranged downstream of the first flow channel generates a detection signal when the particles flow through the detection area. The detection signal is related to the size of the particles and the position of the particles flowing through the detection area.

[0117] For the method described in the first, second, or third embodiment above, in some embodiments, it further includes at least one of the following:

[0118] Adjusting the power of driving the ultra-sonic device to adjust the position where the particles are separated so as to flow to a corresponding downstream sub-channel as a target channel;

[0119] Adjusting the duration of the ultra-sonic device being in the working state to adjust the position where the particles are separated to flow to a corresponding downstream sub-channel as the target channel;

[0120] The liquid inlet flow rate is adjusted to adjust the fluid flow rate in the first flow channel, so as to adjust the position where the particles are separated so as to flow to a corresponding downstream sub-flow channel as a target flow channel.

[0121] In order to further understand the present application, the present application is further introduced below in combination with some specific experiments.

[0122] like Figure 6aThe device built in the experiment for droplet sorting is shown, including a droplet generation device. The generated droplets (aqueous droplets separated by an oil phase) enter the first channel through the first upstream sub-channel, and the biased oil phase enters the first channel through the second upstream sub-channel, so that the droplets will not drift towards the center of the first channel when entering the wider first channel. The droplets are sorted by the special ultrasonic device in the first channel and enter the corresponding downstream sub-channel. Each downstream sub-channel realizes flow resistance balance through the balance channel, avoiding that the flow resistance balance between different downstream sub-channels is not broken after the previous droplet enters a certain downstream sub-channel. At the same time, in order to prevent crosstalk between droplets in adjacent downstream sub-channels, the size of the balance channel is designed to be 1 / 5 of the size of the downstream sub-channel, or less than 1 / 2 of the droplet size, etc. In this example, the width of the first channel is about 190 μm and the length is about 280 μm.

[0123] As Figure 6b It is a diagram of the experimental results of droplet deflection at different positions of the special ultrasonic device, used to determine the reasonable values of the first distance d between the first end of the special ultrasonic device and the nearest side wall of the first channel, and the first angle θ between the second side of the special ultrasonic device and the extending direction of the first channel. It can be known from the experiment that Figure 6b At position 3 in [], droplet deflection cannot be achieved, while at positions 1, 4, and 5, only small-distance droplet deflection can be achieved. Figure 6b At position 2 in [], the droplet can deviate from the original flow direction by a large amount. Its first distance d is 46 μm and the first angle θ is 67°. In subsequent experiments, the special ultrasonic device is placed with reference to this position.

[0124] Here, for Figure 6bThe specific analysis is as follows: For position 1, since the special ultrasonic device is too close to the lower channel wall, the acoustic eddy current at the droplet capture position is compressed, so droplets of this size cannot be captured there. As the droplet advances, the acoustic eddy current will first increase and then decrease, and there will be a small deflection at the maximum position. However, due to the lack of the previous capture process, the droplet speed is still very fast at this time, so it will immediately fall off, and thus a large deflection cannot be achieved. For position 3, since the special ultrasonic device is too far from the lower channel wall, the droplet is not within the effective action range of the acoustic streaming, so the capture of the droplet cannot be achieved. As the droplet advances, the distance becomes even farther, so the deflection of the droplet can never be achieved. For position 4, the droplet can be captured, but due to the large angle between the deflection boundary (the second side) of the special ultrasonic device and the lower channel wall, the component force of the laminar drag force perpendicular to the deflection boundary exceeds the confinement force of the acoustic fluid tunnel, so the droplet will immediately fall off, and thus only a small deflection can be achieved. For position 5, the droplet undergoes a complete process of capture, deflection, and release. However, due to this small-angle placement, the projected distance of the deflection boundary in the longitudinal direction of the channel is small, so the longitudinal distance for the droplet to deflect along this boundary is also small. For position 2, an appropriate placement distance can achieve the capture of the droplet, and an appropriate placement angle can achieve a large deflection. Therefore, this placement method is suitable for multi-channel droplet sorting.

[0125] Figure 6c1 In the experiment, the power driving the special ultrasonic device was fixed, and experiments were conducted on droplets of different sizes. From Figure 6c1 It can be seen that for small droplets of 5.6 pL and 8.7 pL, although a large deflection can be achieved, they will be captured on the device. Only after the subsequent droplets enter the acoustic streaming tunnel will the previous droplets be released. In this case, the several droplets captured simultaneously will deflect into the same sub-channel, which is an undesirable result in the droplet sorting process. Therefore, droplets that are too small are not suitable for multi-channel sorting. For droplets of 12.3 - 65.7 pL, the capture of a single droplet and a large deflection can be achieved, which is suitable for multi-channel sorting. For droplets that are too large, the confinement force generated by the acoustic streaming tunnel on them will decrease, and the drag force generated by the laminar flow on them will increase, so they will fall off earlier, and thus a large deflection cannot be achieved. Therefore, they are also not suitable for multi-channel droplet sorting in this system. So, in the subsequent experiment, the droplet size was selected in the range of 12.3 - 65.7 pL.

[0126] On the other hand, Figure 6c2From the experimental result data, it can be seen that when the droplet size is selected in the range of 12.3 - 65.7 pL, as the droplet size increases, the deviation of droplet release becomes larger, that is, the release position is lower in the longitudinal distance of the flow channel. Therefore, it can be seen from this that within a reasonable range of droplets, the special ultrasonic device can sort droplets of different sizes into different downstream sub-channels.

[0127] Figure 6d1 In the experiment, droplets of the same size were used and different powers were applied to drive the special ultrasonic device for the experiment. It can be seen from the figure that as the driving power increases, the movement trajectory of the droplet gradually deflects upward. When the power increases to a certain extent, multiple droplets will be captured in the acoustic streaming tunnel at the same time. Under this experimental condition, Figure 6d2 From the experimental results, it can be seen that when the power is lower than 1260 mW, as the power increases, the longitudinal deflection displacement of the droplet also gradually increases. When the power continues to increase, the deflection displacement will not continue to increase because the release position of the droplet has reached the uppermost corner of the special ultrasonic device. From the experimental results of this group, it can be seen that within a reasonable power range, the longitudinal deflection displacement of the droplet can be controlled by adjusting the power, so as to achieve multi-channel sorting of droplets.

[0128] Figure 6e1 is a figure applied to the three-channel sorting experiment, Figure 6e2 are the experimental results, and the sizes of the downstream sub-channels are all 50 μm. It can be seen from the figure that three-channel sorting can be achieved, among which, Figure 6e2 The longitudinal displacement in refers to the distance that the droplet moves in the longitudinal direction from the initial position. Five-channel sorting experiments were also carried out, and the experimental results are shown in Figure 6f And seven-channel sorting experiments were carried out, and the experimental results are shown in Figure 6g . These experiments verify the feasibility of this application, and droplet sorting can be carried out by controlling the power.

[0129] In several embodiments provided by this application, it should be understood that the disclosed devices and methods are not limited to the above embodiments and can also be implemented in other ways. For example, the device embodiments described above are only illustrative. For example, the division of the units is only a logical function division, and there can be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point, the displayed or discussed coupling or direct coupling or communication connection to each other can be through some interfaces, and the indirect coupling or communication connection of the device or unit can be in electrical, mechanical or other forms.

[0130] The unit described as a separation component may or may not be physically separated. The component shown as a unit may or may not be a physical unit, that is, it may be located in one place or may be distributed over multiple network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0131] In addition, the terms "first", "second", "third", etc. or similar terms such as module A, module B, module C, etc. in the specification and claims are only used to distinguish similar objects and do not represent a specific order for the objects. Understandably, the specific order or sequence can be interchanged when permitted so that the embodiments of the present application described here can be implemented in an order other than that illustrated or described here.

[0132] The term "comprising" used in the specification and claims should not be construed as limited to the content listed thereafter; it does not exclude other elements or steps. Therefore, it should be interpreted as specifying the presence of the mentioned features, wholes, steps or components, but does not exclude the presence or addition of one or more other features, wholes, steps or components and their groups. Therefore, the expression "a device comprising device A and B" should not be limited to a device consisting only of components A and B.

[0133] "An embodiment" or "embodiments" mentioned in this specification means that the specific features, structures or characteristics described in connection with the embodiment are included in at least one embodiment of the present application. Therefore, the phrases "in an embodiment" or "in embodiments" that appear throughout this specification do not necessarily all refer to the same embodiment, but may refer to the same embodiment. In addition, in one or more embodiments, the various specific features, structures or characteristics can be combined in any suitable manner, as will be apparent to those of ordinary skill in the art from this disclosure.

[0134] Note that the above is only the preferred embodiment of the present application and the technical principles applied. Those skilled in the art will understand that the present application is not limited to the specific embodiments described here, and various obvious changes, re-adjustments and substitutions can be made by those skilled in the art without departing from the protection scope of the present application. Therefore, although the present application has been described in more detail through the above embodiments, the present application is not limited to the above embodiments only. Without departing from the concept of the present application, more other equivalent embodiments can be included, all of which fall within the protection scope of the present application.

Claims

1. A particle manipulation device, characterized in that, include: A super ultrasonic device, comprising two side edges extending from a first end to a second end, wherein the spacing between the two side edges gradually shrinks along the extension direction and forms an angle at the second end, so as to gradually reduce the drag force of the acoustic fluid formed on the side edges along the extension direction, wherein the first end comprises an arcuate edge protruding away from the second end, and the two ends of the arcuate edge are connected to the two side edges in a smooth transition manner; A second side edge of the two side edges close to the downstream side of the first flow channel is inclined with respect to the extending direction of the first flow channel; The effective range of the ultra-sonic device includes the first flow channel, and is used to capture particles in the liquid flowing through the first end in the first flow channel when in working state, and to move the particles along the acoustic fluid tunnel on the second side toward the second end, and to make the particles leave the acoustic fluid tunnel on the second side at a position where the drag force of the acoustic fluid matches the drag force of the fluid in the first flow channel, so as to flow downstream.

2. A particle sorting device, characterized in that, include: A super ultrasonic device, comprising two side edges extending from a first end to a second end, wherein the spacing between the two side edges gradually shrinks along the extension direction and forms an angle at the second end, so as to gradually reduce the drag force of the acoustic fluid formed on the side edges along the extension direction, wherein the first end comprises an arcuate edge protruding away from the second end, and the two ends of the arcuate edge are connected to the two side edges in a smooth transition manner; A second side edge of the two side edges close to the downstream side of the first flow channel is inclined with respect to the extending direction of the first flow channel; The first flow channel is connected to at least two downstream sub-flow channels downstream, and the inlet of each of the downstream sub-flow channels faces a different position of the second side; The effective range of the ultra-sonic device includes the first flow channel, and is used to capture particles in the liquid flowing through the first end in the first flow channel when in a working state, and to move the particles along the acoustic fluid tunnel on the second side toward the second end, and to make the particles leave the acoustic fluid tunnel on the second side at a position where the drag force of the acoustic fluid matches the drag force of the fluid in the first flow channel, so as to flow to a corresponding downstream sub-flow channel.

3. A particle detection device, characterized in that, include: A super ultrasonic device, comprising two side edges extending from a first end to a second end, wherein the spacing between the two side edges gradually shrinks along the extension direction and forms an angle at the second end, so as to gradually reduce the drag force of the acoustic fluid formed on the side edges along the extension direction, wherein the first end comprises an arcuate edge protruding away from the second end, and the two ends of the arcuate edge are connected to the two side edges in a smooth transition manner; A second side edge of the two side edges close to the downstream side of the first flow channel is inclined with respect to the extending direction of the first flow channel; The effective range of the ultra-sonic device includes the first flow channel, and is used to capture particles in the liquid flowing through the first end in the first flow channel in a working state, and move the particles along the acoustic fluid tunnel on the second side toward the second end, and make the particles leave the acoustic fluid tunnel on the second side at a position where the drag force of the acoustic fluid matches the drag force of the fluid in the first flow channel, so as to flow downstream; A detection unit for generating a detection signal according to the particles flowing through the detection area is provided downstream of the first flow channel, and the detection signal is related to the particle size and the position where the particles flow through the detection area.

4. The device according to any one of claims 1 to 3, characterized in that The position where the particles leave the acoustic-fluidic tunnel on the second side is adjusted by one of the following: Adjust the power driving the extraordinary ultrasonic device. The greater the power, the closer the position is to the second end; Adjust the duration of the extraordinary ultrasonic device in the working state. The longer the duration, the closer the position is to the second end; Adjust the fluid flow rate in the first flow channel. The faster the flow rate, the closer the position is to the first end.

5. The device according to any one of claims 1-4, characterized in that, When the particles in the liquid flowing through the first end in the first flow channel include particles of different sizes, the smaller the size of the particles, the closer the position where they leave the acoustic-fluidic tunnel on the second side is to the second end.

6. The device according to any one of claims 1-5, characterized in that It further includes at least one of the following: The first end of the extraordinary ultrasonic device has a first distance from the closest side wall of the first flow channel. The first distance enables the particles flowing through the first end to be captured by the acoustic-fluidic tunnel of the arc edge at the first end and makes the particles move towards the acoustic-fluidic tunnel on the second side; The second side of the extraordinary ultrasonic device is inclined at a first angle with the extending direction of the first flow channel. The first angle enables the particles to move along the acoustic-fluidic tunnel on the second side for a distance exceeding a threshold value, and the deviation degree of the position where the particles leave the acoustic-fluidic tunnel on the second side exceeds a threshold value.

7. The device according to any one of claims 1-6, characterized in that, It further includes at least one of the following: A first upstream sub-channel and at least one second upstream sub-channel are connected upstream of the first flow channel; the outlet of the first upstream sub-channel faces a first position at the inlet of the first flow channel, and directly downstream of the first position is the first end of the extraordinary ultrasonic device, so that the first upstream sub-channel directs the liquid including the particles towards the first end of the extraordinary ultrasonic device; the outlet of the at least one second upstream sub-channel faces the remaining positions at the inlet of the first flow channel, and is used to introduce liquid into the first flow channel to maintain the stable flow direction of the liquid including the particles entering the first flow channel through the first upstream sub-channel; A support structure located in the first flow channel, supported between the bottom and the top of the first flow channel; A balance flow channel that leapfrog-connects each of the downstream sub-channels to balance the flow resistance of each of the downstream sub-channels. The cross-sectional size of the balance flow channel is smaller than the cross-sectional size of the sub-channel.

8. A method for manipulating microparticles, characterized in that, Using the device according to any one of claims 1-7, the method includes: When the extraordinary ultrasonic device is in the working state, capture the particles in the liquid flowing through the first end of the extraordinary ultrasonic device in the first flow channel, and make the particles move along the acoustic-fluidic tunnel on the second side of the extraordinary ultrasonic device towards the second end; The particles leave the acoustic-fluidic tunnel on the second side at a position where the drag force of the acoustic fluid matches the drag force of the fluid in the first flow channel, and flow downstream.

9. A particle sorting method, characterized in that, Using the device according to any one of claims 1-7, the method includes: When the special ultrasonic device is in the working state, it captures the particles in the liquid flowing through the first end of the special ultrasonic device in the first flow channel, and moves the particles along the acoustic fluid tunnel on the second side of the special ultrasonic device towards the second end; The particles break away from the acoustic fluid tunnel on the second side at a position where the drag force of the acoustic fluid matches the drag force of the fluid in the first flow channel and flow into the corresponding downstream sub-flow channel.

10. A particle detection method, characterized in that, Using the device according to any one of claims 1-7, the method includes: When the special ultrasonic device is in the working state, it captures the particles in the liquid flowing through the first end of the special ultrasonic device in the first flow channel, and moves the particles along the acoustic fluid tunnel on the second side of the special ultrasonic device towards the second end; The particles break away from the acoustic fluid tunnel on the second side at a position where the drag force of the acoustic fluid matches the drag force of the fluid in the first flow channel and flow downstream; A detection signal is generated when the particles flow through the detection area by a detection unit arranged downstream of the first flow channel, and the detection signal is related to the particle size and the position where the particles flow through the detection area.

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