Pure oxygen combustion burner device and waste gas treatment equipment

Abstract

The invention provides a pure oxygen combustion burner device and waste gas treatment equipment, and the pure oxygen combustion burner device comprises a burner fixing assembly, an anode assembly, a cathode part, a first three-way part, a second three-way part and a detection part, one end of the burner fixing assembly is fixedly connected with one end of the anode assembly, an anode part in the anode assembly extends into the cathode part, the distance between the outer wall of the anode part and the inner wall of the cathode part is within a preset distance range, and the other end of the anode assembly is connected with the first three-way part. The first three-way component is connected with the second three-way component, and the second three-way component is connected with the detection component. According to the pure oxygen burner, the reasonable component layout and connection mode are adopted, and the area between the anode component and the cathode component replaces an ignition electrode, so that the heating degree of the electrode can be effectively reduced, and the effects of prolonging the service life of the pure oxygen burner and improving the stability of the pure oxygen burner are achieved.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor manufacturing, and more specifically, to a pure oxygen combustion burner device and an exhaust gas treatment device. Background Art

[0002] Currently, a large amount of flammable, corrosive or toxic chemical raw materials are used in the manufacturing process of integrated circuits. However, the actual utilization rate of these raw materials is extremely low, and a large amount of residual chemical raw materials and reaction by-products will enter the exhaust gas treatment system for treatment. Since some exhaust gases need to be treated by high-temperature flames, in order to improve the thermal efficiency, pure oxygen heating is often used.

[0003] In a pure oxygen heating environment, the combustion reaction is more intense, the flame temperature is higher, which easily causes the electrodes applied to the pure oxygen burner to be extremely damaged, resulting in a short service life of the electrodes. As a result, it is impossible to detect the flame signal in time through the electrodes to judge whether the flame is stably burning, whether the burner is normally ignited, etc., leading to problems such as low service life and insufficient stability of the pure oxygen burner. Summary of the Invention

[0004] In view of this, the purpose of the present application is to provide a pure oxygen combustion burner device and an exhaust gas treatment device. By reasonable component layout and connection methods, and by using the area between the anode component and the cathode component instead of the ignition electrode, the heat absorption degree of the electrode can be effectively reduced, achieving the effects of extending the service life of the pure oxygen burner and improving the stability of the pure oxygen burner.

[0005] In a first aspect, an embodiment of the present application provides a pure oxygen combustion burner device, which includes: a burner fixing assembly, an anode assembly, a cathode component, a first three-way component, a second three-way component, and a detection component. The cathode component is disposed inside the burner fixing component. One end of the burner fixing component is fixedly connected to one end of the anode assembly. The anode component in the anode assembly extends into the cathode component, and the distance between the outer wall of the anode component and the inner wall of the cathode component is within a preset distance range. The other end of the anode assembly is connected to the first three-way component. The first three-way component is connected to the second three-way component. The second three-way component is connected to the detection component.

[0006] In an optional embodiment, the anode assembly includes an anode component, an anode base, and an anode cover. One end of the burner fixing component is fixedly connected to one end of the anode base. The anode component is disposed inside the anode base and extends through the center position of the anode base into the cathode component. The other end of the anode base is connected to one end of the anode cover. The other end of the anode cover is connected to the first three-way component.

[0007] In an alternative embodiment, the anode component includes a disc-shaped first connection part, a cylindrical second connection part, and an elongated power connection part. The second connection part extends vertically away from the first connection part from the central position of the first connection part. The power connection part is disposed on the first connection part, and the length direction of the power connection part is perpendicular to the extension direction of the second connection part.

[0008] The first connection part is disposed inside the anode base and is connected to the anode cover. The power connection part passes through the anode base and is connected to an external power supply. The second connection part extends through the central position of the anode base into the interior of the cathode component, and the cathode component is concentrically fitted with the burner fixing assembly.

[0009] In an alternative embodiment, an air inlet and an oxygen inlet are provided in a direction perpendicular to the extension direction of the anode base and the anode component.

[0010] In an alternative embodiment, the burner fixing assembly includes a burner fixing member body and a pipe assembly. A cooling system is provided inside the burner fixing member body, and a pipe assembly is provided on the periphery of the burner fixing member body.

[0011] In an alternative embodiment, the detection assembly includes a first ultraviolet detection member and a second ultraviolet detection member. The first ultraviolet detection member is connected to the first pipe interface of the second three-way component, and the second ultraviolet detection member is connected to the second pipe interface of the second three-way component. The third pipe interface of the second three-way component is connected to the first three-way component. The extension direction of the first pipe is the same as the extension direction of the anode component, and the extension direction of the second pipe is perpendicular to the extension direction of the first pipe.

[0012] In an alternative embodiment, the second three-way component is an equal-diameter three-way, and a 45° inclined surface is provided inside the second three-way component.

[0013] In an alternative embodiment, the inner diameter of the first pipe of the second three-way component connected to the first ultraviolet detection member is smaller than the inner diameters of the other two pipes of the second three-way component.

[0014] In an alternative embodiment, a natural gas inlet is provided in a direction perpendicular to the extension direction of the first three-way component and the anode component.

[0015] In a second aspect, an embodiment of the present application further provides an exhaust gas treatment device, which includes the pure oxygen combustion burner device as described above. The burner fixing assembly of the pure oxygen combustion burner device is connected to a detachable cover plate at one end of the reaction chamber of the exhaust gas treatment device.

[0016] The embodiment of the present application provides a pure oxygen combustion burner device and an exhaust gas treatment device. The pure oxygen combustion burner device includes: a burner fixing component, an anode component, a cathode component, a first three-way component, a second three-way component, and a detection component. The cathode component is arranged inside the burner fixing component. One end of the burner fixing component is fixedly connected to one end of the anode component. The anode component in the anode component extends into the inside of the cathode component, and the distance between the outer wall of the anode component and the inner wall of the cathode component is within a preset distance range. The other end of the anode component is connected to the first three-way component. The first three-way component is connected to the second three-way component. The second three-way component is connected to the detection component. By means of a reasonable component layout and connection method and by using the area between the anode component and the cathode component instead of the ignition electrode, the present application can effectively reduce the heating degree of the electrode, achieving the effects of extending the service life of the pure oxygen burner and improving the stability of the pure oxygen burner.

[0017] To make the above objects, features, and advantages of the present application more obvious and understandable, the following specifically enumerates preferred embodiments and, in conjunction with the accompanying drawings, makes a detailed description as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] To more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings required for use in the embodiments. It should be understood that the following drawings only show some embodiments of the present application and should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other related drawings can also be obtained based on these drawings.

[0019] Figure 1 The structural schematic diagram of a pure oxygen combustion burner device provided by an embodiment of the present application;

[0020] Figure 2 The internal structural schematic diagram of a pure oxygen combustion burner device provided by an embodiment of the present application;

[0021] Figure 3 The structural schematic diagram of an anode component provided by an embodiment of the present application;

[0022] Figure 4 The structural schematic diagram of a second three-way component provided by an embodiment of the present application.

[0023] Reference numerals: 11 - body of burner fixing member; 121 - first elbow; 122 - second elbow; 21 - anode component; 211 - first connecting portion; 212 - second connecting portion; 213 - electricity connection portion; 22 - anode base; 221 - air inlet; 222 - oxygen inlet; 23 - anode cover plate; 3 - cathode component; 4 - first three - way component; 41 - natural gas inlet; 5 - second three - way component; 51 - first pipeline; 61 - first ultraviolet detector; 62 - second ultraviolet detector. Detailed implementation manners

[0024] To make the objectives, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all of the embodiments. Usually, the components of the embodiments of the present application described and illustrated in the accompanying drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application claimed, but only represents the selected embodiments of the present application. All other embodiments obtained by those skilled in the art based on the embodiments of the present application without creative efforts fall within the scope of protection of the present application.

[0025] In the description of the embodiments of the present application, it should be noted that the orientation or positional relationships indicated by the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the orientation or positional relationships shown in the accompanying drawings, or the orientation or positional relationships in which the product of this application is usually placed during use. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation of the present application. In addition, the terms "first", "second", "third", etc. are only used for descriptive distinction and cannot be understood as indicating or implying relative importance.

[0026] In addition, terms such as "horizontal" and "vertical" do not mean that the components are required to be absolutely horizontal or hanging vertically, but can be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0027] In the description of the embodiments of the present application, it should also be noted that unless otherwise clearly specified and limited, the terms "set", "installed", "connected", and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific situations.

[0028] Please refer to Figure 1 and Figure 2 , Figure 1 which is a schematic structural diagram of an oxy-fuel burner device provided by an embodiment of the present application, Figure 2 and which is an internal structural diagram of an oxy-fuel burner device provided by an embodiment of the present application. As shown in Figure 1 and Figure 2 , the oxy-fuel burner device includes a burner fixing assembly (including a burner fixing member body 11, a first elbow 121, and a second elbow 122), an anode assembly (including an anode member 21, an anode base 22, and an anode cover 23), a cathode member 3, a first three-way member 4, a second three-way member 5, and a detection member (including a first ultraviolet detection member 61 and a second ultraviolet detection member 62). The cathode member 3 is disposed inside the burner fixing assembly. One end of the burner fixing assembly is fixedly connected to one end of the anode assembly. The anode member 21 in the anode assembly extends into the cathode member 3, and the distance between the outer wall of the anode member 21 and the inner wall of the cathode member 3 is within a preset distance range. The other end of the anode assembly is connected to the first three-way member 4. The first three-way member 4 is connected to the second three-way member 5, and the second three-way member 5 is connected to the detection member.

[0029] Here, the burner fixing assembly is the support foundation of the entire oxy-fuel burner device, which is used to fix other components and connect to external equipment; the anode assembly is mainly responsible for conducting current to provide conditions for ignition; the cathode member 3 cooperates with the anode member 21 to form a space for ignition and combustion; the first three-way member 4 plays a role in connecting the anode assembly and the second three-way member 5 and guiding the fuel to enter; the second three-way member 5 is used to connect the first three-way member 4 and the detection member, and can enable the ultraviolet light generated by the flame to irradiate the detection member; the detection member is used to monitor the combustion condition of the flame in real time.

[0030] Regarding the burner fixing assembly, the burner fixing assembly provides a stable installation foundation for the entire device and ensures the accurate relative positions of the components. For example, in waste gas treatment equipment, the burner fixing assembly can be firmly installed on the reaction chamber to ensure that the oxy-fuel burner device does not shake or displace during operation.

[0031] The cathode component 3 is disposed inside the burner fixing assembly. The burner fixing assembly provides an installation space and protection for the cathode component 3, ensuring that the cathode component 3 operates in a stable environment. The cathode component 3 cooperates with other components inside the burner fixing assembly to complete the fuel combustion process.

[0032] Optionally, the internal structure of the burner fixing assembly is carefully designed to provide a suitable installation position and support for the cathode component 3. For example, there are special installation grooves or positioning structures inside the burner fixing assembly, enabling the cathode component 3 to be accurately installed and ensuring the relative position accuracy with the anode component 21. The cathode component 3 can be protected from external factors such as dust and moisture inside the burner fixing assembly, thereby extending its service life. For instance, in some harsh industrial environments, the burner fixing assembly can effectively protect the cathode component 3 and enable it to operate normally. In addition, the burner fixing assembly can also play a certain heat insulation role, reducing the high-temperature impact on the cathode component 3. For example, during the high-temperature combustion process, the burner fixing assembly can block part of the heat transfer, lower the temperature of the cathode component 3, and improve its stability.

[0033] Furthermore, after installing the cathode component 3 inside the burner fixing assembly, the operation of the device becomes more stable. When the fuel burns inside the cathode component 3, the burner fixing assembly can effectively protect the cathode component 3 and also ensure the sealing of the entire burner device to prevent gas leakage. When maintenance personnel maintain the device, they can also conveniently inspect and repair the burner fixing assembly and the cathode component 3.

[0034] Specifically, the burner fixing assembly includes a burner fixing body 11 and a pipe assembly. A cooling system is provided inside the burner fixing body 11, and the pipe assembly is disposed on the peripheral side of the burner fixing body 11. Optionally, the pipe assembly includes a first elbow 121 and a second elbow 122, and the first elbow 121 and the second elbow 122 are oppositely arranged on the peripheral side of the burner fixing body 11.

[0035] Among them, the cooling system can adopt the water-cooling or air-cooling method, which can effectively reduce the temperature of the burner fixing body 11 and prevent the normal operation of other components from being affected by high temperature. The pipe assembly is used to connect other components to introduce cold water or cold air. Specifically, a cooling system is provided inside the burner fixing body 11, and cold water or cold air is introduced into the inside of the burner fixing body 11 through the first elbow 121 and the second elbow 122 to cool down the burner fixing body 11.

[0036] Furthermore, equipping the burner fixing assembly with a cooling system, which combines the advantages of water-cooling or air-cooling, can effectively prevent the top cover from overheating caused by high-temperature radiation, thereby avoiding the problem that the service life of other related devices is shortened due to heat influence. At the same time, it also greatly extends the service life of the burner itself.

[0037] In addition, the fixed connection between the burner fixing component and the anode component can be achieved by means such as bolt connection and welding. For example, when using bolt connection, it is convenient to disassemble and install, facilitating the maintenance and replacement of components of the equipment. Welding connection can provide a more secure connection, ensuring that the connection between the two will not become loose under harsh environments such as high temperature and high pressure. The embodiments of the present application do not limit the manner of the fixed connection. As long as it can meet the connection requirements of the burner fixing component and the anode component, it is within the protection scope of the present application. After the burner fixing component and the anode component are fixedly connected in a suitable manner, the structure of the entire burner device is more stable.

[0038] Furthermore, this fixed connection method ensures the stability and reliability between the burner fixing component and the anode component, enabling the two to work together. The burner fixing component provides support and positioning for the anode component. Through the connection with the burner fixing component, the anode component can accurately cooperate with other components.

[0039] Regarding the anode component, the anode part 21 in the anode component extends into the interior of the cathode part 3, and the distance between the outer wall of the anode part 21 and the inner wall of the cathode part 3 is within a preset distance range.

[0040] Among them, the extension of the anode part 21 into the interior of the cathode part 3 is to form a suitable ignition space between the two. When current passes through the anode part 21, a high-voltage arc can be generated in this space to ignite the fuel. The setting of the preset distance range is to ensure the generation of the arc and the ignition effect of the fuel, while avoiding faults such as short circuits between the anode part 21 and the cathode part 3.

[0041] Optionally, the shape and size of the anode part 21 are carefully designed so that it can smoothly extend into the interior of the cathode part 3 and maintain a suitable distance from the cathode part 3. For example, the anode part 21 can be designed as a cylinder, and its outer diameter matches the inner diameter of the cathode part 3 to ensure a uniform distance between the two. The size of the preset distance range can be determined according to factors such as the characteristics of the fuel and the combustion conditions. For example, for different types of natural gas, the arc intensity and distance required for combustion may be different, so the preset distance range needs to be adjusted according to the actual situation. In actual production, through precise processing and assembly processes, the distance between the anode part 21 and the cathode part 3 can be ensured to meet the preset distance range. Exemplarily, the distance between the outer wall of the anode part 21 and the inner wall of the cathode part 3 can be between 3 and 5 millimeters and is placed in the low-temperature area of the flame.

[0042] Specifically, when the anode component 21 extends into the cathode component 3 and the distance meets the preset distance range, a high-voltage arc can be effectively generated to ignite the fuel. If the distance is too large, an arc with sufficient intensity may not be generated, resulting in the inability to ignite the fuel; if the distance is too small, a short circuit may occur, damaging the equipment. Therefore, strictly controlling the distance between the anode component 21 and the cathode component 3 is the key to ensuring the normal operation of the burner device.

[0043] Furthermore, the other end of the anode assembly is connected to the first three-way component 4. Here, when the other end of the anode assembly is connected to the first three-way component 4, a channel will be formed between the two, facilitating the flow of fuel and other gases. Through the connection with the first three-way component 4, the anode assembly can guide the fuel entering from the first three-way component 4 into the cathode component 3 to achieve fuel combustion.

[0044] Optionally, the connection between the anode assembly and the first three-way component 4 can adopt a sealed connection method to prevent gas leakage. For example, a sealing gasket or sealant is used at the connection part to ensure the tightness of the connection. The connection structure between the anode assembly and the first three-way component 4 is optimized to reduce the resistance of gas flow. In addition, this connection method can also ensure the relative position stability between the anode assembly and the first three-way component 4, avoiding displacement or loosening during the operation of the equipment.

[0045] Furthermore, after the anode assembly is connected to the first three-way component 4, fuels such as natural gas can smoothly enter the anode assembly through the first three-way component 4 and then be guided into the cathode component 3. The sealed connection method can effectively prevent gas leakage and ensure the safety of the equipment. At the same time, good gas flow performance can improve the fuel supply efficiency and make the combustion more complete.

[0046] Specifically, the anode assembly includes an anode component 21, an anode base 22, and an anode cover 23. One end of the burner fixing component is fixedly connected to one end of the anode base 22. The anode component 21 is arranged inside the anode base 22 and extends through the center position of the anode base 22 into the cathode component 3. The other end of the anode base 22 is connected to one end of the anode cover 23, and the other end of the anode cover 23 is connected to the first three-way component 4. Among them, an air inlet 221 and an oxygen inlet 222 are provided in the direction perpendicular to the extending direction of the anode base 22 and the anode component 21.

[0047] Here, the anode base 22 provides a space for mounting and protecting the anode component 21, reducing the exposure of the anode component 21 to the external environment, and also providing a passage for the entry of air and oxygen. The anode cover plate 23 serves to connect the anode base 22 and the first tee component 4, enabling the fuel to smoothly enter the anode component 21 from the first tee component 4. For example, in an actual burner device, the anode base 22 is fixedly connected to the burner fixing assembly by bolts, the anode component 21 is installed inside the anode base 22, and the anode cover plate 23 connects the anode base 22 and the first tee component 4 to form a complete fuel supply passage.

[0048] Moreover, the provision of the air inlet 221 and the oxygen inlet 222 allows the temperature of the flame to be controlled by adjusting the flow rates of air and oxygen, achieving an ideal oxygen-to-fuel ratio. For example, when treating exhaust gases with different compositions, the valve openings of the air inlet 221 and the oxygen inlet 222 can be adjusted according to the characteristics of the exhaust gas to adjust the amounts of air and oxygen entering, thereby changing the temperature and combustion effect of the flame. In the embodiments of the present application, the proportion of the combustion-supporting gas is adjusted to achieve the adjustment of the air ratio within the largest range.

[0049] As Figure 3 shown, the anode component 21 includes a disc-shaped first connection portion 211, a cylindrical second connection portion 212, and a strip-shaped power connection portion 213. The second connection portion 212 extends perpendicularly from the central position of the first connection portion 211 in a direction away from the first connection portion 211. The power connection portion 213 is provided on the first connection portion 211 and the length direction of the power connection portion 213 is perpendicular to the extension direction of the second connection portion 212. The first connection portion 211 is arranged inside the anode base 22 and is connected to the anode cover plate 23. The power connection portion 213 passes through the anode base 22 and is connected to an external power supply. The second connection portion 212 extends through the central position of the anode base 22 into the interior of the cathode component 3, and the cathode component 3 is concentrically fitted with the burner fixing assembly.

[0050] Here, the disc-shaped first connection portion 211 facilitates connection with the anode base 22 and the anode cover plate 23 to ensure stable arrangement inside the anode base 22. The cylindrical second connection portion 212 can accurately extend into the interior of the cathode component 3 to form an ignition space. The strip-shaped power connection portion 213 is convenient for connection with an external power supply to form a circuit for conducting current. Specifically, a notch is provided on the wall surface at the top of the anode base 22, and the power connection portion 213 can extend outward from here to connect with an external power supply. For example, in practical applications, the first connection portion 211 of the anode component 21 is tightly connected to the anode cover plate 23 by bolts, and the power connection portion 213 passes through the notch on the anode base 22 and is connected to the high-voltage cap of an external power supply. When the power supply is energized, current is conducted through the power connection portion 213 to the second connection portion 212, generating a high-voltage arc inside the cathode component 3.

[0051] In the embodiment of the present application, the area between the anode component 21 and the cathode component 3 is used to replace the traditional ignition electrode, and the distance between the outer wall of the anode component 21 and the inner wall of the cathode component 3 is within a preset distance range, which can effectively reduce the heating degree of the electrode, thereby significantly extending the service life of the burner.

[0052] Regarding the cathode component 3, the inside of the cathode component 3 provides a space for the mixing of fuel and combustion-supporting gas, enabling the fuel to burn sufficiently. For example, after oxygen and natural gas are evenly mixed inside the cathode component 3, they burn rapidly under the action of the arc generated at the anode.

[0053] Furthermore, the first three-way component 4 is connected to the second three-way component 5. Here, the connection between the first three-way component 4 and the second three-way component 5 forms a light conduction channel, guiding the ultraviolet light generated by the flame from the first three-way component 4 to the second three-way component 5 for detection by the detection component.

[0054] Optionally, the connection between the first three-way component 4 and the second three-way component 5 can adopt a detachable connection method, such as threaded connection, ferrule connection, etc. This facilitates the installation, maintenance, and replacement of components of the equipment. For example, when using threaded connection, the two three-way components can be conveniently connected together and are also easy to operate when disassembly is required. The connection part between the first three-way component 4 and the second three-way component 5 is specially designed to ensure the smooth conduction of light. In addition, this connection method can also ensure the sealing between the two three-way components to prevent light scattering.

[0055] Regarding the first three-way component 4, the setting of the first three-way component 4 enables natural gas to enter the pure oxygen combustion burner device smoothly, providing fuel for combustion. For example, natural gas enters the anode assembly through the pipeline of the first three-way component 4 and mixes with oxygen.

[0056] Specifically, a natural gas inlet 41 is provided in a direction perpendicular to the extending direction of the anode component 21 on the first three-way component 4. The setting of the natural gas inlet 41 enables natural gas to enter the first three-way component 4 conveniently, and then enter the anode assembly and the cathode component 3 through the pipeline to achieve fuel supply. For example, in an actual device, the natural gas pipeline is connected to the natural gas inlet 41 of the first three-way component 4 through a ferrule, so that natural gas enters the burner device through the natural gas inlet 41 for combustion.

[0057] For the second three-way component 5, the second three-way component 5 radiates the ultraviolet light generated by the flame to the detection component to detect the combustion condition. For example, the light travels inside the second three-way component 5, a part directly reaches the detection component at the top, and a part reaches the detection component at the side through reflection. The detection component feeds back the combustion condition of the flame in real time according to the received ultraviolet light radiation information, and the staff can adjust the size and switch of the gas according to this information.

[0058] Furthermore, the second three-way component 5 is connected to the detection component. Here, the detection component can receive the ultraviolet light radiation generated by the flame, thereby realizing the real-time monitoring of the flame combustion condition. The second three-way component 5 accurately guides the light to the detection component, and the detection component feeds back the combustion state of the flame according to the received light information.

[0059] Optionally, the connection between the second three-way component 5 and the detection component can adopt a dedicated interface and connection method to ensure the effective transmission of light. For example, a material with good light transmittance is used at the connection part, or devices such as optical lenses are set to improve the light transmission efficiency. The connection structure between the detection component and the second three-way component 5 is optimized to reduce the interference of external light. In addition, this connection method can also ensure the stability between the detection component and the second three-way component 5, avoiding shaking or displacement during the operation of the device and affecting the detection result.

[0060] Furthermore, after the second three-way component 5 is connected to the detection component, the detection component can accurately receive the ultraviolet light radiation generated by the flame. The detection component converts the received light information into an electrical signal and transmits it to the control system through a circuit. The staff can adjust the size and switch of the gas in time according to the information displayed by the control system to ensure the stable operation of the device.

[0061] Specifically, the detection component includes a first ultraviolet detection piece 61 and a first ultraviolet detection piece 62. The first ultraviolet detection piece 61 is connected to the first pipe 51 interface of the second three-way component 5, and the first ultraviolet detection piece 62 is connected to the second pipe interface of the second three-way component 5. The third pipe interface of the second three-way component 5 is connected to the first three-way component 4. The extending direction of the first pipe 51 is the same as the extending direction of the anode component 21, and the extending direction of the second pipe is perpendicular to the extending direction of the first pipe 51.

[0062] Here, the setting of the dual ultraviolet detection pieces improves the accuracy and reliability of the detection. Through the cross-calibration and verification of the dual light sources, it is ensured that problems such as gas leakage and flame extinction can be detected in time. For example, in actual operation, a part of the ultraviolet light generated by the flame directly enters the first ultraviolet detection piece 61, and a part enters the first ultraviolet detection piece 62 through reflection inside the second three-way component 5. The two detection pieces work simultaneously to mutually verify the detection results.

[0063] Optionally, the second three-way component 5 is an equal-diameter three-way, and there is an inclined surface at 45° inside the second three-way component 5. Here, the equal-diameter three-way is a pipe fitting used to connect three pipes with the same pipe diameter. That is to say, the pipes of the first ultraviolet detection member 61 and the first ultraviolet detection member 62 connected to the second three-way component 5 have the same pipe diameter. The inclined surface at 45° can accurately reflect a part of the light into the first ultraviolet detection member 62, improving the utilization efficiency of light and the accuracy of detection. Optionally, the inclined surface at 45° is treated with a mirror finish. For example, during the actual light propagation process, when the light reaches the inclined surface, it will change the propagation direction according to the law of reflection and enter the first ultraviolet detection member 62.

[0064] Exemplarily, the first ultraviolet detection member 61 and the first ultraviolet detection member 62 can be two UV sensors. One UV sensor is located at the top of the second three-way component 5, and the other UV sensor is arranged at the side end of the second three-way component 5, forming an accurate 90-degree angle between them. To ensure that the side UV sensor can receive light information unobstructed, there is a 45-degree inclined surface inside the three-way, and this inclined surface has been treated with a mirror finish to improve the efficiency of light reflection and UV reception. Here, the advantages of dual UV detection in improving detection accuracy and equipment safety are relatively prominent. Dual UV ensures accurate detection through the mutual calibration and verification of dual light sources, improving the overall safety of the equipment.

[0065] Furthermore, as Figure 4 shown, the inner diameter of the first pipe 51 of the second three-way component 5 connected to the first ultraviolet detection member 61 is smaller than the inner diameters of the other two pipes of the second three-way component 5. This design can converge and adjust the light to a certain extent, improving the detection sensitivity. For example, in actual detection, the pipe with a smaller inner diameter can make the light more concentrated, enhancing the light intensity received by the first ultraviolet detection member 61.

[0066] The oxy-fuel burner device provided by the embodiment of the present application can effectively reduce the heat absorption degree of the electrode through reasonable component layout and connection method and the area between the anode component and the cathode component instead of the ignition electrode, solving the problems of short service life, instability and inaccurate detection of the existing oxy-fuel burner, enabling the burner to burn stably, improving the thermal efficiency and waste gas treatment efficiency, and achieving the effect of extending the service life of the oxy-fuel burner and improving the stability of the oxy-fuel burner. At the same time, the setting of the dual detection components ensures accurate detection of the flame combustion situation, enhancing the safety and reliability of the equipment.

[0067] In a second aspect, the embodiment of the present application provides a waste gas treatment device, including as Figures 1 to 4For the described pure oxygen combustion burner device, the burner fixing component of the pure oxygen combustion burner device is connected to the detachable cover plate at one end of the reaction chamber of the waste gas treatment equipment.

[0068] Here, the burner fixing component of the pure oxygen combustion burner device is connected to the detachable cover plate at one end of the reaction chamber of the waste gas treatment equipment. This connection method enables the pure oxygen combustion burner device to be conveniently installed on the waste gas treatment equipment, and when maintenance or replacement of the burner device is required, the operation can be carried out by removing the cover plate. For example, the detachable cover plate can be a flange cover plate at the upper end of the reaction chamber, and the burner fixing component is installed on the flange cover plate at the upper end of the reaction chamber, and the two can be fixed by screws.

[0069] During the operation of the waste gas treatment equipment, oxygen and air enter the anode base through the oxygen inlet and air inlet on the anode base respectively. The operator can adjust the flow rates of the two according to production requirements to control the temperature of the flame, so as to achieve an ideal oxygen-to-fuel ratio. After oxygen and air enter the anode base, they enter the cathode along the internal pipeline of the anode base and the outer wall of the anode straight pipe. Natural gas enters the inside of the tee through the natural gas inlet of the first tee component, enters the inside of the anode upper cover along the tee pipeline, then enters the inside of the anode straight pipe, and then enters the cathode. At this time, oxygen and natural gas meet and mix. The electrical connection rod of the anode is connected to the high-voltage cap of the power supply. When the ignition power supply is applied to the ignition electrode (i.e., the area between the anode component and the cathode component), a high-voltage arc will be generated at the electrode, breaking down the surrounding air to produce a spark. The spark spreads to the fuel and oxygen, igniting the fuel. The flame formed by the fuel combustion generates ultraviolet light radiation. The light enters the inside of the anode straight pipe, the inside of the anode upper cover, and the inside of the first tee component from the cathode, and finally reaches the inside of the second tee component. The light can directly irradiate the first ultraviolet detection component at the top. Part of the light is reflected under the action of the 45° inclined plane inside the second tee component, and then enters the second ultraviolet detection component at the side end. The first ultraviolet detection component and the second ultraviolet detection component feedback the internal combustion situation according to the received flame information. The staff can adjust the size and switch of the gas in time according to the information provided by the detection components to ensure the stable operation of the burner device and efficiently treat the waste gas. At the same time, the cooling system inside the burner fixing part continuously passes cold water or cold air through the elbow to cool the burner fixing part body, preventing the normal operation of other components from being affected by high temperature.

[0070] This application has the advantages of high production efficiency, convenient use, and higher reliability. And because the temperature of the combustion flame increases, the temperature and pressure inside the furnace increase, and the radiant heat transfer amount increases, improving the utilization efficiency of the heat inside the furnace. And by calibrating and verifying the light source by two ultraviolet detection components, the accuracy of the detection is ensured, and thus the continuous and stable operation of the equipment is ensured.

[0071] Finally, it should be noted that the above-described embodiments are only specific implementation manners of the present application, used to illustrate the technical solutions of the present application, rather than limiting it. The protection scope of the present application is not limited thereto. Although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that any person skilled in the technical field of the present application can still modify the technical solutions described in the foregoing embodiments or easily conceive of changes, or perform equivalent replacements on some of the technical features; and these modifications, changes or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present application, and should all be covered within the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. A pure oxygen combustion burner device, characterized in that, The pure oxygen combustion burner device includes: a burner fixing component, an anode component, a cathode component, a first three-way component, a second three-way component, and a detection component. The cathode component is disposed inside the burner fixing component. One end of the burner fixing component is fixedly connected to one end of the anode component. The anode component in the anode component extends into the inside of the cathode component, and the distance between the outer wall of the anode component and the inner wall of the cathode component is within a preset distance range. The other end of the anode component is connected to the first three-way component. The first three-way component is connected to the second three-way component. The second three-way component is connected to the detection component.

2. The oxy-fuel burner device according to claim 1, characterized in that, The anode component includes an anode component, an anode base, and an anode cover plate. One end of the burner fixing component is fixedly connected to one end of the anode base. The anode component is disposed inside the anode base and extends through the central position of the anode base into the inside of the cathode component. The other end of the anode base is connected to one end of the anode cover plate. The other end of the anode cover plate is connected to the first three-way component.

3. The oxy-fuel burner device according to claim 2, characterized in that, The anode component includes a disk-shaped first connecting portion, a cylindrical second connecting portion, and a strip-shaped power connection portion. The second connecting portion extends vertically away from the first connecting portion from the central position of the first connecting portion. The power connection portion is disposed on the first connecting portion, and the length direction of the power connection portion is perpendicular to the extending direction of the second connecting portion. The first connecting portion is disposed inside the anode base and is connected to the anode cover plate. The power connection portion passes through the anode base and is connected to an external power supply. The second connecting portion extends through the central position of the anode base into the inside of the cathode component. The cathode component is concentrically fitted with the burner fixing component.

4. The oxy-fuel burner device according to claim 2, characterized in that, An air inlet and an oxygen inlet are provided in a direction perpendicular to the extending direction of the anode component of the anode base.

5. The oxy-fuel burner device according to claim 1, characterized in that, The burner fixing component includes a burner fixing member body and a pipe assembly. A cooling system is provided inside the burner fixing member body. A pipe assembly is provided on the peripheral side of the burner fixing member body.

6. The oxy-fuel burner device according to claim 1, characterized in that, The detection assembly includes a first ultraviolet detection member and a second ultraviolet detection member. The first ultraviolet detection member is connected to the first pipe interface of the second three-way component. The second ultraviolet detection member is connected to the second pipe interface of the second three-way component. The third pipe interface of the second three-way component is connected to the first three-way component. The extending direction of the first pipe is the same as the extending direction of the anode component. The extending direction of the second pipe is perpendicular to the extending direction of the first pipe.

7. The oxy-fuel burner device according to claim 6, characterized in that, The second three-way component is an equal-diameter three-way, and a 45° inclined surface is provided inside the second three-way component.

8. The oxy-fuel burner device according to claim 6, characterized in that, The inner diameter of the first pipe of the second three-way component connected to the first ultraviolet detection member is smaller than the inner diameters of the other two pipes of the second three-way component.

9. The oxy-fuel burner device according to claim 1, characterized in that, A natural gas inlet is provided in a direction perpendicular to the extending direction of the anode component of the first three-way component.

10. An exhaust gas treatment device, characterized in that, The waste gas treatment device includes an oxygen-enriched combustion burner device as described in any one of claims 1 to 9, and a burner fixing assembly of the oxygen-enriched combustion burner device is connected to a detachable cover plate at one end of a reaction chamber of the waste gas treatment device.

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