AGV trolley

Abstract

The AGV trolley comprises a walking base and a trolley body located above the walking base, the trolley body is provided with at least one groove position used for containing a wafer box, and the walking base comprises a base framework and walking mechanisms symmetrically arranged at the bottoms of the two sides of the base framework; the walking mechanism comprises a first driven wheel, a driving wheel assembly and a second driven wheel which are sequentially arranged in the length direction of the walking base. The first driven wheel is fixedly mounted at the front part of the base framework; the driving wheel assembly is connected with the second driven wheel through a connecting rod; a shock absorber is arranged between the driving wheel assembly and the base framework. According to the embodiment of the invention, the problems of floating power loss of the driving wheel and grounding failure of the driven wheel caused by uneven ground are effectively avoided.

Description

Technical Field

[0001] This application relates to the technical field of wafer automated production, and specifically relates to an AGV cart. Background Art

[0002] In the scenario of semiconductor intelligent manufacturing, the efficient and stable transportation of wafer boxes is crucial for the utilization rate of clean rooms. Traditional AGV carts (Automated Guided Vehicles) mostly adopt a rigid chassis and single-drive wheel design. When driving on uneven areas such as floor joints or ramps in the workshop, the drive wheel is prone to being briefly suspended due to bumps, resulting in power interruption or path deviation. In severe cases, there is a risk of wafer box tipping.

[0003] In existing improvement solutions, although the independent suspension driven wheels can alleviate the bump problem, their complex structure leads to redundant chassis layout and low space utilization rate; while the fixed pivot drive wheel group can handle unilateral undulations, but it cannot achieve dynamic load balance of multiple wheel groups, and there are still problems of alternating failure of power wheels under continuous bump conditions. Especially when the drive wheel floats, the vehicle is forced to stop suddenly due to power loss, and at the same time, the body attitude gets out of control due to insufficient ground pressure of the driven wheels. Therefore, there is an urgent need for an automatic conveying device that can simultaneously solve the problems of drive wheel floating and losing power and driven wheel grounding failure to meet the strict requirements of semiconductor manufacturing for transportation stability. Summary of the Invention

[0004] This application aims to solve at least one technical problem existing in the prior art. Specifically, the embodiments of this application provide an AGV cart to solve the problems that the drive wheels are prone to floating and losing power and the driven wheels are prone to grounding failure in the prior art.

[0005] The object of this application can be achieved by the following technical solutions:

[0006] This application provides an AGV cart, including a walking base and a vehicle body located above the walking base. The vehicle body is provided with at least one slot for accommodating a wafer box, and is characterized in that

[0007] The walking base includes a base skeleton and walking mechanisms symmetrically arranged at both bottoms of the base skeleton;

[0008] The walking mechanism includes a first driven wheel, a drive wheel assembly, and a second driven wheel arranged in sequence along the length direction of the walking base, where

[0009] The first driven wheel is fixedly installed at the front of the base skeleton;

[0010] The drive wheel assembly and the second driven wheel are connected by a connecting rod, and the middle of the connecting rod is pivotally connected to the base skeleton;

[0011] A shock absorber is provided between the drive wheel assembly and the base skeleton.

[0012] Optionally, a bearing seat is fixedly arranged at the rear of the middle area of the base frame. A through shaft is arranged in the middle of the connecting rod, and both ends of the shaft are rotatably installed in the bearing seat.

[0013] Optionally, the drive wheel assembly includes a drive wheel, a servo motor, and a motor reducer; the drive wheel is installed on the outer side of the connecting rod, the servo motor is connected to the drive wheel through the motor reducer, and the servo motor and the motor reducer are integrally installed on the inner side of the connecting rod.

[0014] Optionally, the connecting rod includes a middle section extending horizontally, and a first inclined section and a second inclined section extending downward and obliquely from both ends of the middle section;

[0015] The drive wheel assembly is installed at the end of the first inclined section, and the second driven wheel is installed at the end of the second inclined section.

[0016] Optionally, the shock absorber is arranged obliquely downward in the direction from the second driven wheel to the drive wheel assembly.

[0017] Optionally, both the first driven wheel and the second driven wheel adopt shock-absorbing directional wheels.

[0018] Optionally, a main control box, a sub-control box, and a carrier are arranged on the upper surface of the walking base;

[0019] The main control box is arranged in the rear area of the walking base, and the sub-control box extends along the side of the walking base away from the main control box from the side of the main control box;

[0020] The carrier extends horizontally from the middle of the main control box and is fixed on the top of the sub-control box. Slots are arranged on the surface of the walking base between the main control box and the sub-control box and on the carrier.

[0021] Optionally, there are four slots, which are distributed in a rectangular array on the surface of the walking base between the main control box and the sub-control box and on the carrier.

[0022] Optionally, a first sensing element and second sensing elements are installed in the slots. There are at least three second sensing elements, and the three second sensing elements are arranged around the first sensing element; the first sensing element is configured to sense whether a wafer cassette is placed in the slot; the second sensing element is configured to sense whether the edge of the wafer cassette is at a preset position in the slot.

[0023] Optionally, horizontal radars are symmetrically arranged in two diagonal areas of the walking base, and vertical radars are installed at the tops of both side walls of the vehicle body.

[0024] A front ground radar and a rear ground radar are respectively arranged in the middle of the front end and the middle of the rear end of the vehicle body, where:

[0025] The detection direction of the horizontal radar is parallel to the plane where the walking base is located;

[0026] The detection direction of the vertical radar is perpendicular to the plane where the walking base is located;

[0027] The detection directions of the front ground radar and the rear ground radar form an inclination angle of 30°-45° with the horizontal plane.

[0028] One or more of the above embodiments of the present application have at least one or more of the following beneficial effects:

[0029] In the application, the driving wheel assembly and the second driven wheel are linked through a connecting rod pivot structure. When the driving wheel is lifted due to uneven ground on one side, the second driven wheel presses down through the connecting rod, and the driving wheel is forced to keep in contact with the ground by using the lever principle to avoid power interruption. Similarly, when the second driven wheel is lifted due to uneven ground, the driving wheel can also press down through the connecting rod to force the second driven wheel to keep in contact with the ground and avoid the loss of control of the vehicle body posture caused by the second driven wheel leaving the ground. At the same time, the application can also greatly reduce the vehicle body bump through the shock absorber, further forcing the driving wheel to keep in contact with the ground and improving the transportation stability of the wafer cassette. Description of the Drawings

[0030] The present application will be further described below with reference to the drawings.

[0031] Figure 1 It is a schematic diagram of the overall structure of the AGV vehicle in one embodiment of the present application;

[0032] Figure 2 It is a schematic diagram of the overall structure of the AGV vehicle from another perspective in one embodiment of the present application;

[0033] Figure 3 It is a schematic diagram of the partial structure of the AGV vehicle in one embodiment of the present application;

[0034] Figure 4 It is a schematic diagram of another partial structure of the AGV vehicle in one embodiment of the present application.

[0035] Explanation of the Reference Numerals in the Drawings:

[0036] 100, Traveling base; 101, Base frame; 102, First driven wheel; 103, Driving wheel assembly; 1031, Driving wheel; 1032, Servo motor; 1033, Motor reducer; 104, Second driven wheel; 105, Connecting rod; 1051, Middle section; 1052, First inclined section; 1052, Second inclined section; 106, Shock absorber; 107, Bearing seat; 200, Vehicle body; 201, Slot; 202, Main control box; 203, Sub-control box; 204, Carrying rack; 205, First sensor; 206, Second sensor; 207, Stopper; 208, Label identifier; 209, Pad; 210, Positioning pin; 300, Horizontal radar; 301, Vertical radar; 302, Front ground radar; 303, Rear ground radar; 304, Acoustic wave sensor; 305, Main power switch; 306, Voice broadcaster; 307, USB expansion board; 308, 10-inch touch screen; 309, Rear driving recorder; 310, Three-color signal light; 311, WIFI antenna; 312, Battery module; 313, Charging interface; 400, Wafer cassette. Detailed implementation

[0037] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0038] Please refer to Figure 1 , Figure 3 and Figure 4 As shown in, in some embodiments, the present application provides an AGV cart, including a traveling base 100 and a vehicle body 200. The vehicle body 200 is located above the traveling base 100 and is provided with at least one slot 201 for accommodating a wafer cassette 400. The traveling base 100 is a key support structure of the entire AGV cart, and its stability directly affects the running stability of the cart.

[0039] Among them, the traveling base 100 includes a base frame 101 and a traveling mechanism. The base frame 101 constitutes the basic frame of the traveling base 100 and is made of high-strength steel to bear the weight of the vehicle itself and the loaded wafer cassette 400.

[0040] The traveling mechanisms are symmetrically arranged at the bottoms on both sides of the base frame 101. This symmetrical layout can ensure the balance of the trolley during driving. The traveling mechanisms include a first driven wheel 102, a driving wheel assembly 103, and a second driven wheel 104 arranged in sequence along the length direction of the traveling base 100. The first driven wheel 102 is fixedly installed at the front of the base frame 101 and is connected to the base frame 101 through fasteners such as bolts, ensuring its stable position during driving and being able to stably contact the ground to play a guiding role. The driving wheel assembly 103 and the second driven wheel 104 are connected by a connecting rod 105. The middle of the connecting rod 105 is pivotally connected to the base frame 101, enabling the driving wheel assembly 103 and the second driven wheel 104 to form a linked whole, and the angles and positions can be flexibly adjusted according to the ground conditions. A shock absorber 106 is arranged between the driving wheel assembly 103 and the base frame 101, and its two ends are respectively connected to the driving wheel assembly 103 and the base frame 101. When encountering a bumpy road surface, the shock absorber 106 can effectively buffer the vibration, prevent the driving wheel 1031 from floating due to vibration, and ensure the smooth driving of the trolley.

[0041] In this application, the driving wheel assembly 103 and the second driven wheel 104 are linked through the pivotal connection structure of the connecting rod 105. When the ground on one side is uneven and the driving wheel 1031 is lifted, the second driven wheel 104 presses down through the connecting rod 105, and using the lever principle, forces the driving wheel 1031 to remain in contact with the ground to avoid power interruption. Similarly, when the ground is uneven and the second driven wheel 104 is lifted, the driving wheel 1031 can also press down through the connecting rod 105 to force the second driven wheel 104 to remain in contact with the ground and avoid the attitude of the vehicle body 200 getting out of control due to the second driven wheel 104 leaving the ground. At the same time, in this application, the shock absorber 106 can also greatly reduce the bumps of the vehicle body 200, further forcing the driving wheel 1031 to remain in contact with the ground and improving the transportation stability of the wafer cassette 400.

[0042] Please refer to Figure 3 and Figure 4 As shown in, in some embodiments, a bearing seat 107 is fixedly arranged behind the middle area of the base frame 101. The bearing seat 107 is a "U"-shaped metal frame, and the bearing seat 107 is fixedly connected to the base frame 101 through a mounting plate by bolts or welding. A pair of bearings are installed inside the bearing seat 107. A through shaft is provided in the middle of the connecting rod 105, and both ends of the shaft are rotatably installed in the bearing seat 107, realizing the movable connection between the connecting rod 105 and the bearing seat 107, so that the connecting rod 105 can rotate horizontally around the bearing seat 107. This setting makes the swinging of the connecting rod 105 more flexible and without axial play, avoiding the problem of gaps caused by wear of the traditional hinge shaft, improving the reliability of the mechanism, ensuring that the trolley can drive stably under various road conditions, reducing the risk of transportation interruption caused by mechanism failures, and improving the continuity of production.

[0043] Please refer to Figure 3 andFigure 4 As shown, in some embodiments, the drive wheel assembly 103 includes a drive wheel 1031, a servo motor 1032, and a motor reducer 1033. The drive wheel 1031 is installed outside the connecting rod 105 and is fixedly connected to the output shaft of the motor reducer 1033 by a key connection to ensure the stability and reliability of power transmission. The servo motor 1032 and the motor reducer 1033 are integrally installed inside the connecting rod 105. The outer shell of the motor reducer 1033 is fixedly installed on the inner side surface of the connecting rod 105 by multiple bolts arranged in a matrix, and the motor is fixedly installed on the side of the motor reducer 1033 away from the connecting rod 105, forming a compact and stable drive system, reducing space occupation and facilitating reasonable layout within the limited space of the AGV cart.

[0044] At the same time, a servo motor 1032 and a motor reducer 1033 assembly are independently configured for each drive wheel 1031, enabling each drive wheel 1031 to have an independent steering and driving function, greatly improving the motion control accuracy and multi-directional pose adjustment flexibility of the AGV cart, and being able to better adapt to the complex production site environment and the transportation requirements of frequent direction changes.

[0045] Please refer to Figure 3 and Figure 4 As shown, in some embodiments, the connecting rod 105 includes a middle section 1051 extending horizontally, a first inclined section 1052 and a second inclined section 1052 extending downwardly and obliquely from both ends of the middle section 1051.

[0046] Among them, the included angle between the first inclined section 1052 and the middle section 1051 is 120° - 160°, preferably 135°. An installation hole is provided at the end of the first inclined section 1052, and a bearing is provided in the installation hole. The rotating shaft of the drive wheel 1031 passes through the inner ring of the bearing and has an interference fit with it.

[0047] The second inclined section 1052 is symmetrically arranged with the first inclined section 1052 at both ends of the middle section 1051, and the second driven wheel 104 is installed on the end surface of the second inclined section 1052.

[0048] Through the special structural design of the connecting rod 105, the walking mechanism layout of the AGV cart is optimized, the space utilization rate is improved, the center of gravity is reduced, the driving stability is enhanced, the risk of the cart tipping due to bumps or ramps is reduced, the safety and reliability of the transportation process are improved, which helps to extend the service life of the cart and reduce the maintenance cost.

[0049] Please refer to Figure 3As shown, in some embodiments, the shock absorber 106 is disposed obliquely downward from the second driven wheel 104 towards the driving wheel assembly 103, with an angle of 30° - 60° with the horizontal plane, such as 45°. The upper end of the shock absorber 106 is pivotally connected to the chassis skeleton above the middle section 1051 of the connecting rod 105 through a spherical bearing, and the lower end is pivotally connected to the first inclined section 1052 through another spherical bearing. The shock absorber 106 may specifically adopt a spring + hydraulic damping structure shock absorber 106.

[0050] In this application, the obliquely disposed shock absorber 106 can simultaneously absorb impact forces in the vertical and horizontal directions (such as lateral forces during steering), reducing the roll of the vehicle body 200.

[0051] Please refer to Figure 3 and Figure 4 As shown, in some embodiments, both the first driven wheel 102 and the second driven wheel 104 adopt shock-absorbing directional wheels. The specific structure is as follows: shock-absorbing springs or shock-absorbing rubber pads are provided between the first driven wheel 102 and the base skeleton 101, and between the second driven wheel 104 and the connecting rod 105. The shock-absorbing springs or shock-absorbing rubber pads have good elasticity and can effectively absorb vibrations and impacts from the ground, reducing the bumps of the trolley during driving.

[0052] By providing shock-absorbing elements between the driven wheels and the connection structure, the shock-absorbing performance of the AGV trolley is further improved, making the trolley more stable during driving and better adapting to ground conditions with different flatness.

[0053] Please refer to Figure 1 and Figure 2 As shown, in some embodiments, a main control box 202, a sub-control box 203, and a carrier 204 are provided on the upper surface of the walking base 100. The main control box 202 is disposed in the rear area of the walking base 100 and serves as the control center of the entire AGV trolley. Key components such as a control circuit board, a processor, and a power management module are installed inside, for controlling various functions of the trolley such as driving, navigation, and task execution. The sub-control box 203 extends from the side of the main control box 202 along the side of the walking base 100 in a direction away from the main control box 202 and works in cooperation with the main control box 202. Some auxiliary control modules, sensor processing units, and other devices can be placed, increasing the expandability and flexibility of the control system. The carrier 204 extends horizontally from the middle of the main control box 202 and is fixed to the top of the sub-control box 203, and at the same time provides an installation basis for the slot 201 above the sub-control box 203.

[0054] The split arrangement of the main control box 202 and the sub-control box 203 greatly reduces the length of the box body in the width direction of the traveling base 100, enabling the overall width of the AGV vehicle to be narrower, so that it can operate in narrow areas. Moreover, it can reasonably arrange the slots 201, ensuring the stable transportation of the wafer cassette 400 and reducing the risk of damage to the wafer cassette 400 during transportation.

[0055] Please refer to Figure 1 and Figure 2 As shown, in some embodiments, there are four slots 201, which are distributed in a rectangular array on the surface of the traveling base 100 and the carrier 204 between the main control box 202 and the sub-control box 203. The two slots 201 located on the surface of the traveling base 100 and the carrier 204 are both distributed along the length direction of the traveling base 100. The rectangular array distribution of the four slots 201 makes full use of the cargo space of the AGV vehicle, improves the transportation efficiency, and can meet the demand for batch transportation of the wafer cassette 400 during semiconductor manufacturing.

[0056] Please refer to Figure 1 and Figure 2 As shown, in some embodiments, a first sensing element 205 and a second sensing element 206 are installed in each slot 201. Among them, there are at least three second sensing elements 206, and the three second sensing elements 206 are evenly arranged around the first sensing element 205. The first sensing element 205 usually adopts a photoelectric sensor or a pressure sensor, etc., and is used to sense whether the wafer cassette 400 is placed in the slot 201. When the wafer cassette 400 is placed in the slot 201, the first sensing element 205 can detect it in time and feed back a signal to the control system. The second sensing element 206 can be a proximity sensor or an image recognition sensor, etc., and is used to sense whether the edge of the wafer cassette 400 is in a preset position in the slot 201, ensuring that the wafer cassette 400 is placed correctly and stably in the slot 201, and avoiding potential safety hazards or displacement during transportation caused by improper placement.

[0057] Outside each slot 201, three stoppers 207 are respectively arranged along the three-side edges of the wafer cassette 400. The top of each stopper 207 is provided with a downwardly inclined guiding surface for guiding the wafer cassette 400 to fall into the slot 201. On the other side of the slot 201, a label identifier 208 is installed. The label identifier 208 generally uses a barcode scanner or an RFID reader, etc., which can quickly and accurately read the label information on the wafer cassette 400. The label stores important data such as the number of the wafer cassette 400, the specifications of the wafers, and the production batches. Inside the slot 201, there are also multiple cushion blocks 209 and multiple positioning pins 210. The cushion blocks 209 are usually made of soft rubber or foam materials with a certain thickness. The shape and size of the positioning pins 210 are adapted to the positioning holes preset at the bottom of the wafer cassette 400, and can accurately insert into the positioning holes to achieve precise positioning and stable fixation of the wafer cassette 400 in the slot 201.

[0058] Please refer to Figure 1 and Figure 2 As shown, in some embodiments, horizontal radars 300 are symmetrically arranged in two diagonal regions of the walking base 100, vertical radars 301 are installed at the tops of the two side walls of the vehicle body 200, and a front ground radar 302 and a rear ground radar 303 are respectively arranged in the middle of the front end and the middle of the rear end of the vehicle body 200. The detection direction of the horizontal radar 300 is parallel to the plane where the walking base 100 is located, and is used to detect the distance and position of obstacles in the driving direction of the trolley to achieve the obstacle avoidance function. The detection direction of the vertical radar 301 is perpendicular to the plane where the walking base 100 is located, and is used to detect the environmental height information on both sides of the vehicle body 200, such as the height of shelves, walls, etc., to prevent the trolley from colliding with surrounding facilities during driving. The detection directions of the front ground radar 302 and the rear ground radar 303 form an inclination angle of 30° - 45° with the horizontal plane, and are mainly used to detect the undulation of the ground in front of and behind the trolley, anticipate the road conditions in advance, adjust the driving attitude and speed, ensure the trolley passes smoothly, reduce the risk of trolley bumps and wafer cassette 400 damage caused by uneven roads, improve the transportation quality, and ensure the continuity and stability of the semiconductor manufacturing process.

[0059] Please refer to Figure 1 and Figure 2 As shown, in some embodiments, two symmetric ultrasonic sensors 304 are arranged in the two side regions of the rear end face of the walking base 100, and are used to detect the distance of obstacles within a certain range behind the trolley to assist in realizing the obstacle avoidance function during the reverse and backward processes. The ultrasonic sensor 304 measures the distance from the obstacle by emitting and receiving ultrasonic signals, and has the advantages of fast detection speed, high accuracy, and low cost.

[0060] A main power switch 305 is arranged in the middle region of the rear end of the walking base 100, which is convenient for operators to control and manage the power supply of the entire AGV trolley.

[0061] On the rear end face of the main control box 202, there are a voice broadcaster 306, a USB expansion board, a 10-inch touch screen, and a rear driving recorder 309. The voice broadcaster 306 can be used to play system prompt sounds, alarm information, etc. The USB expansion board provides an external device connection interface, facilitating data transmission and software upgrade. The 10-inch touch screen 308 serves as a human-machine interaction interface, which can display the running status, task information, etc. of the trolley, and can receive the command input from the operator. The rear driving recorder 309 is used to record the driving conditions behind the trolley, providing a basis for accident analysis and fault troubleshooting.

[0062] On the top of the main control box 202, there are a front driving recorder, a three-color signal lamp 310, and a WIFI antenna 311. The front driving recorder records the driving conditions ahead. The three-color signal lamp 310 is used to display the working status and running mode of the trolley. The WIFI antenna 311 enables the wireless communication between the trolley and the external network, facilitating remote monitoring and management.

[0063] Inside the walking base 100, there is a charging module. The charging module includes a battery module 312 and a charging interface 313. The battery module 312 is arranged between the first driven wheel 102 and the driving wheel assembly 103, making full use of the space. The charging interface 313 is arranged on the front end face of the walking base 100, facilitating connection with the charging device for charging.

[0064] The above has described a specific embodiment of the present application in detail, but the described content is only the preferred embodiment of the present application and cannot be considered as limiting the implementation scope of the present application. Any equivalent changes and improvements made within the scope of the present application should still fall within the patent coverage scope of the present application.

[0065] It should be noted that the "first", "second" and similar terms used in the present application do not represent any order, quantity or importance, but are only used to distinguish different components. The descriptions of directions such as "left", "right", "left side", "right side", "upper part", "lower part", "top", "bottom", etc. in the present application are all defined based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the described structure must be constructed and operated in a specific orientation. Therefore, it cannot be understood as a limitation to the present application. In the description of the present application, the meaning of "a plurality" is more than two, unless otherwise specifically defined.

[0066] In the description of the present application, unless otherwise clearly defined and limited, the terms "installed", "connected", and "coupled" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be directly connected, or indirectly connected through an intermediate medium, and it may be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

Claims

1. An AGV vehicle, comprising a walking base and a body located above the walking base, wherein the body is provided with at least one slot for accommodating a wafer box, characterized in that: The walking base comprises a base frame and a walking mechanism symmetrically arranged at the bottom of both sides of the base frame; The walking mechanism comprises a first driven wheel, a driving wheel assembly and a second driven wheel which are sequentially arranged along the length direction of the walking base, wherein; The first driven wheel is fixedly mounted on the front part of the base frame; The driving wheel assembly is connected to the second driven wheel via a connecting rod, and the middle portion of the connecting rod is pivotally connected to the base frame; A shock absorber is arranged between the driving wheel assembly and the base frame.

2. The AGV trolley according to claim 1, characterized in that A bearing seat is fixedly arranged at the rear of the middle area of the base frame, and a rotating shaft is penetrating the middle of the connecting rod. Both ends of the rotating shaft are rotatably installed in the bearing seat.

3. The AGV trolley according to claim 1, wherein The driving wheel assembly includes a driving wheel, a servo motor and a motor reducer; the driving wheel is installed on the outside of the connecting rod, the servo motor is connected to the driving wheel through the motor reducer, and the servo motor and the motor reducer are integrated and installed on the inside of the connecting rod.

4. The AGV trolley according to claim 1, characterized in that, The connecting rod comprises a middle section extending horizontally, and a first inclined section and a second inclined section extending obliquely downward from two ends of the middle section; The driving wheel assembly is installed at the end of the first inclined section, and the second driven wheel is installed at the end of the second inclined section.

5. The AGV cart according to claim 1, wherein The shock absorber is arranged to be tilted downward from the second driven wheel toward the driving wheel assembly.

6. The AGV trolley according to claim 1, characterized in that, The first driven wheel and the second driven wheel are both shock-absorbing directional wheels.

7. The AGV trolley according to claim 1, characterized in that, The upper surface of the walking base is provided with a main control box, an auxiliary control box and a bearing frame; The main control box is arranged in the rear area of the walking base, and the auxiliary control box extends from the side of the main control box along the side of the walking base in a direction away from the main control box; The support frame extends transversely from the middle of the main control box and is fixed to the top of the auxiliary control box. The grooves are provided on the surface of the walking base between the main control box and the auxiliary control box and on the support frame.

8. The AGV cart according to claim 7, wherein The slots are provided with four and are distributed in a rectangular array on the walking base surface and the supporting frame between the main control box and the auxiliary control box.

9. The AGV trolley according to claim 1, wherein A first induction member and a second induction member are installed in the slot, and there are at least three second induction members, and the three second induction members are arranged around the first induction member; the first induction member is configured to sense whether a wafer box is placed in the slot; The second sensing element is configured to sense whether an edge of the wafer box is at a preset position in the slot.

10. The AGV cart according to any one of claims 1-9, characterized in that, Horizontal radars are symmetrically arranged at two diagonal areas of the walking base, and vertical radars are installed at the top of the two side walls of the vehicle body. A front ground radar and a rear ground radar are respectively arranged at the middle of the front end and the middle of the rear end of the vehicle body, wherein: The detection direction of the horizontal radar is parallel to the plane where the walking base is located; The detection direction of the vertical radar is perpendicular to the plane where the walking base is located; The detection directions of the front ground radar and the rear ground radar are inclined at an angle of 30°-45° to the horizontal plane.

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