Multipoint force regulation and control type reflecting mirror bending device for synchrotron radiation

Abstract

The invention discloses a multipoint force regulation and control type reflector bending device for synchrotron radiation, the reflector bending device comprises a support and a driving assembly, and the support is provided with a positioning assembly used for restraining a reflector; the driving assembly is arranged on the support and comprises two first driving parts and a second driving part which are suitable for being connected with the reflecting mirror, and the two first driving parts are arranged on the two sides of the second driving part in the extending direction of the reflecting mirror; the first driving part and the second driving part are suitable for applying acting force in opposite directions to the reflecting mirror so as to be suitable for bending deformation of the reflecting mirror due to stress; the first driving part and the second driving part each comprise a driving part and a force sensor, the driving parts are arranged on the support, the output ends of the driving parts are connected with the reflecting mirror so as to apply force to the reflecting mirror, and the force sensors are suitable for measuring the stress of the reflecting mirror in real time. The large-scale reflecting mirror bending device can be suitable for large-scale bending of large-size reflecting mirrors, the surface type error of bending can be effectively reduced, and the bending precision is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of synchrotron radiation beamline technology, and more particularly to a multi-point force regulation type mirror bending device for synchrotron radiation. Background Art

[0002] The multi-point force regulation type mirror bending device for synchrotron radiation is an important mechanical device used in synchrotron radiation beamlines. According to the requirements of the experimental station, the bending device is used to elastically bend the optical mirror to obtain a certain radius of curvature, so as to realize optical modulation processing such as deflection, collimation, and focusing of X-rays. At present, the main methods for forming the reflecting focusing mirror surface are profile bending, piezoelectric bending, and mechanical bending. Among them, mechanical bending has the advantages of adjustable bending radius of curvature, high surface accuracy, and easy manufacturing compared with profile bending, and has higher reliability, stability, and universality compared with piezoelectric bending, and is the most widely used in current synchrotron radiation beamline stations.

[0003] In the related art, the mechanical bending method applies torque at both ends of the mirror for pure bending, and then applies multi-point forces to balance the influence of gravity on the surface error. However, when this technology is applied to large-sized mirrors or for large-range bending, the bending error is relatively large, and it is difficult to suppress the surface error introduced by X-ray thermal deformation, etc. In addition, when using multi-point forces for gravity compensation in this technology, bolt hand-tightening control is mostly used, without force value indication, which is not convenient for adjustment and is prone to errors. Summary of the Invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. For this reason, an object of the present invention is to provide a multi-point force regulation type mirror bending device for synchrotron radiation, which can be applied to large-sized mirrors for large-range bending and can reduce the bending surface error.

[0005] The present application provides a multi-point force regulation type mirror bending device for synchrotron radiation. The multi-point force regulation type mirror bending device for synchrotron radiation includes a bracket and a driving assembly. A positioning assembly for restricting the mirror is arranged on the bracket; the driving assembly is arranged on the bracket, and the driving assembly includes two first driving parts and one second driving part adapted to be connected to the mirror, and the two first driving parts are arranged on both sides of the second driving part along the extending direction of the mirror; the first driving part and the second driving part are adapted to apply opposite-direction acting forces to the mirror so that the mirror is bent and deformed under force; each first driving part includes at least one first driving mechanism, the second driving part includes at least one second driving mechanism, and each first driving mechanism and second driving mechanism include a driving member and a force sensor. The driving member is arranged on the bracket and the output end of the driving member is connected to the mirror to apply force to the mirror, and the force sensor is adapted to measure the magnitude of the force on the mirror in real time.

[0006] According to the multi-point force regulation type mirror bending device for synchrotron radiation of the present application, since the first driving mechanism and the second driving mechanism apply acting forces in opposite directions to the mirror, the mirror can be bent and deformed under the bending moment formed by the multi-point forces; since a plurality of the first driving mechanisms and the second driving mechanisms are discretely distributed along the extension direction of the mirror, and each driving mechanism can independently control the applied acting force, the stress on the mirror is dispersed, and the surface shape can be adjusted in a small range to reduce the bending error, and thus it can be applied to large-size mirrors, suitable for large-range bending, and has a high bending accuracy; since the force sensor can measure the acting force of each driving mechanism in real time, the control and adjustment of the stress and deformation of the mirror are more accurate, the bending surface shape error can be further reduced, and the bending accuracy can be improved. The present application has the advantages of simple structure, good bending effect, high efficiency and low cost.

[0007] According to some embodiments of the present application, the multi-point force regulation type mirror bending device for synchrotron radiation further includes a measuring assembly. The measuring assembly is arranged on the bracket, and the measuring assembly and the driving assembly are respectively arranged on opposite sides of the mirror; the measuring assembly includes a plurality of measuring parts. The plurality of measuring parts are arranged at intervals along the extension direction of the mirror and are arranged opposite to the mirror, so as to be suitable for measuring the bending displacement of corresponding positions of the mirror.

[0008] According to some embodiments of the present application, the first driving mechanism and / or the second driving mechanism further includes an elastic member. One end of the elastic member is connected to the output end of the driving member, and the other end is connected to the mirror.

[0009] According to some embodiments of the present application, one of the first driving mechanism and the second driving mechanism further includes a connecting seat. One side of the connecting seat is connected to the driving member, and the other side is directly connected to the mirror, so as to be suitable for applying a pulling force to the mirror; wherein grooves are formed on both sides of the mirror in a first direction, and the connecting seat is formed with a convex portion that is in fit connection with the groove.

[0010] According to some embodiments of the present application, the connecting seat includes a first connecting portion and a second connecting portion. The first connecting portion is formed with a convex portion, the second connecting portion is connected to the output end of the driving member, and the first connecting portion and the second connecting portion are connected in a universal joint manner.

[0011] According to some embodiments of the present application, the driving assembly further includes a mounting plate. The mounting plate is movably arranged on the bracket along a direction perpendicular to the extension direction of the mirror, and the first driving portion and the second driving portion are arranged on the mounting plate.

[0012] According to some embodiments of the present application, the positioning assemblies are configured into two groups, which are respectively arranged on the bracket near both ends of the mirror. Each positioning assembly includes a positioning base, a first positioning mechanism, a second positioning mechanism, and a third positioning mechanism. The positioning base is arranged on the bracket; the first positioning mechanism, the second positioning mechanism, and the third positioning mechanism are arranged on the positioning base; wherein the first positioning mechanism is arranged below the mirror to be adapted to support the mirror; the second positioning mechanism abuts against both sides of the mirror in the first direction to be adapted to restrict the mirror in the first direction; the third positioning mechanism abuts against the end face of the mirror in the extending direction to be adapted to restrict the mirror in the extending direction.

[0013] According to some embodiments of the present application, the first positioning mechanism of one group of positioning assemblies includes a roller and a bushing. The roller is arranged on the positioning base and the extending direction of the roller is perpendicular to the extending direction of the mirror; the bushing is sleeved outside the roller and abuts against the mirror. When the mirror is bent and deformed, it is adapted to drive the bushing to rotate; wherein a support ring is arranged on the outer circumference of the roller, the support ring abuts against the inner surface of the bushing, and a swing gap is formed between the inner surface of the bushing and the outer surface of the roller. When the mirror is bent and deformed, it is adapted to drive the bushing to swing relative to the roller around the support ring.

[0014] According to some embodiments of the present application, the third positioning mechanism of one group of positioning assemblies includes a positioning reed. The positioning reed is arranged on the positioning base, and one end abuts against the end face of the mirror to be adapted to elastically restrict the mirror.

[0015] According to some embodiments of the present application, the second positioning mechanism and / or the third positioning mechanism are formed with protrusions that abut against the mirror.

[0016] Additional aspects and advantages of the present invention will be given in part in the following description, become apparent in part from the following description, or be learned through the practice of the present invention. Description of the Drawings

[0017] The above and / or additional aspects and advantages of the present invention will become apparent and be readily understood from the description of the embodiments in conjunction with the following drawings, wherein:

[0018] Figure 1 is a schematic structural diagram of a mirror bending device according to some embodiments of the present application;

[0019] Figure 2 is a schematic structural diagram of the cooperation between the driving assembly and the mirror according to some embodiments of the present application;

[0020] Figure 3 is a schematic structural diagram of a first connecting seat according to some embodiments of the present application;

[0021] Figure 4 is a schematic structural diagram of a clamping arm according to some embodiments of the present application;

[0022] Figure 5 is a schematic structural diagram of a connection block according to some embodiments of the present application;

[0023] Figure 6 is a schematic structural diagram of a second connection part according to some embodiments of the present application;

[0024] Figure 7 is a schematic structural diagram of a bracket according to some embodiments of the present application;

[0025] Figure 8 is a schematic structural diagram of the cooperation of a positioning component, a measuring component and a mirror according to some embodiments of the present application;

[0026] Figure 9 is a schematic structural diagram of a follow-up end positioning component according to some embodiments of the present application;

[0027] Figure 10 is a comparison diagram of the bending curve of a mirror and a target curve according to some embodiments of the present application;

[0028] Figure 11 is a comparison diagram of the surface shape of the bending curve of a mirror and the target ideal curve surface shape according to some embodiments of the present application.

[0029] Reference numerals:

[0030] Mirror 10; Groove 11;

[0031] Bracket 20; Bracket main body 21; Support beam 22; Anchor 23; Base plate 24;

[0032] Drive assembly 30; First drive mechanism 31; First drive member 311; First force sensor 312; First elastic member 313; First connection seat 314; Clamping arm 3141; Connection block 3142; Second connection part 3143; Limiting surface 3144; Limiting hole 3145; Fitting surface 3146; Protrusion 3147;

[0033] Second drive mechanism 32; Second drive member 321; Second force sensor 322; Third elastic member 323; Spring sleeve 324; Second connection seat 325;

[0034] Mounting plate 33; Auxiliary support 34; Screw 35; Nut 36;

[0035] Positioning component 40; Positioning base 41; First positioning mechanism 42; Roller 421; Bush 422; Axial end cover 423; Second positioning mechanism 43; Second positioning end 431; Third positioning mechanism 44; Positioning reed 441; Positioning bolt 442; Third positioning end 443;

[0036] Measuring assembly 50; Measuring unit 51; Fixed plate 52; Adapter 53;

[0037] Control cabinet 60; Display panel 70. Detailed implementation manner

[0038] The embodiments of the present invention will be described in detail below. The examples of the embodiments are shown in the drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary and are only used to explain the present invention and should not be construed as a limitation of the present invention.

[0039] Reference is made below to Figures 1 - 11 Describe a multi-point force regulation type mirror bending device for synchrotron radiation according to an embodiment of the present invention.

[0040] The present application provides a multi-point force regulation type mirror bending device for synchrotron radiation. The multi-point force regulation type mirror bending device for synchrotron radiation includes a bracket 20 and a driving assembly 30. A positioning assembly 40 for constraining the mirror 10 is provided on the bracket 20. The driving assembly 30 is disposed on the bracket 20. The driving assembly 30 includes two first driving parts and one second driving part adapted to be connected to the mirror 10, and the two first driving parts are disposed on both sides of the second driving part along the extending direction of the mirror 10. The first driving part and the second driving part are adapted to apply opposite-direction acting forces to the mirror 10 so that the mirror 10 is deformed by bending under force. Each first driving part includes at least one first driving mechanism 31, and the second driving part includes at least one second driving mechanism 32. Each first driving mechanism 31 and second driving mechanism 32 includes a driving member and a force sensor. The driving member is disposed on the bracket 20 and the output end of the driving member is connected to the mirror 10 to apply a force to the mirror 10, and the force sensor is adapted to measure the magnitude of the force applied to the mirror 10 in real time.

[0041] According to the multi-point force regulation type mirror bending device for synchrotron radiation of the present application, the first driving part and the second driving part are arranged at intervals along the extension direction of the mirror 10. The first driving part and the second driving part are adapted to apply forces in opposite directions to the mirror 10, and the mirror 10 undergoes bending deformation under the action of multiple groups of forces. Among them, the first driving part includes a plurality of first driving mechanisms 31 arranged at intervals along the extension direction of the mirror 10, and the second driving part includes a plurality of second driving mechanisms 32 arranged at intervals along the extension direction of the mirror 10. The first driving mechanisms 31 and the second driving mechanisms 32 are discretely distributed along the extension direction of the mirror 10 and independently and controllably apply acting forces to the mirror 10 at corresponding positions, so that the forces on the mirror 10 are dispersed, the deformations at each place are accurately controllable, small-range adjustment is facilitated, the bending surface error of the mirror 10 can be reduced, and the surface shape influence caused by gravity and the like can be compensated, especially the small-range surface shape error introduced by thermal deformation can be compensated. In addition, both the first driving mechanism 31 and the second driving mechanism 32 include driving parts and force sensors, and the acting force values applied by each driving part to the mirror 10 can be measured and obtained in real time, which is convenient for control and adjustment, and the bending surface error of the mirror 10 can be further reduced.

[0042] According to the mirror bending device of the present application, since the first driving mechanism 31 and the second driving mechanism 32 apply acting forces in opposite directions to the mirror 10, the mirror 10 can undergo bending deformation under the bending moment formed by multi-point forces; since the plurality of first driving mechanisms 31 and the second driving mechanisms 32 are discretely distributed along the extension direction of the mirror 10, and each driving mechanism can independently control the applied acting force, the forces on the mirror 10 are dispersed, the surface shape can be adjusted in a small range to reduce the bending error, and thus it can be applied to large-size mirrors 10, suitable for large-range bending, and has a high bending accuracy; since the force sensor can measure the acting force of each driving mechanism in real time, the control and adjustment of the force and deformation of the mirror 10 are more accurate, and the bending surface error can be further reduced. The present application has the advantages of simple structure, good bending effect, high efficiency and low cost.

[0043] It should be noted that when the driving assembly 30 applies an acting force to the mirror 10 to cause deformation, only by measuring and adjusting the force on the mirror 10 in real time can it be judged whether the force applied by the driving assembly 30 conforms to the target, but it cannot directly judge whether the deformation of the mirror 10 is accurately in line.

[0044] In view of the above problems, according to some embodiments of the present application, the multi-point force regulation type mirror bending device for synchrotron radiation further includes a measurement component 50. The measurement component 50 is arranged on the bracket 20, and the measurement component 50 and the driving component 30 are respectively arranged on opposite sides of the mirror 10. The measurement component 50 includes a plurality of measurement parts 51. The plurality of measurement parts 51 are arranged at intervals along the extension direction of the mirror 10 and are arranged facing the mirror 10, so as to be suitable for measuring the bending displacement of the corresponding points of the mirror 10.

[0045] In this embodiment, by arranging the measurement component 50, the bending displacement of the mirror 10 in its force direction can be measured in real time, so that it can be judged in real time whether the mirror 10 reaches the target surface shape of bending; based on the measurement results, adjusting the magnitude of the force applied by the driving component 30 to the mirror 10 can timely correct the surface shape deviation of the mirror 10 and reduce the bending error. Further, the plurality of measurement parts 51 are arranged at intervals along the extension direction of the mirror 10, and can independently measure the displacement of the mirror 10 at the corresponding points, and can capture the deformation conditions of the mirror 10 in different position areas, so as to more comprehensively understand the overall deformation state of the mirror 10, and further ensure that the overall bending surface shape of the mirror 10 is more close to the target surface shape. In addition, the measurement component and the driving component 30 are respectively arranged on opposite sides of the mirror 10, which can avoid the driving component 30 blocking the detection range of the measurement component 50 and optimize the spatial distribution of the structure.

[0046] In the above embodiment, the measurement part 51 can be selected as a laser interferometer to realize real-time monitoring of the surface shape of the mirror 10. Further, the measurement component 50 further includes an adapter 53 and a fixing plate 52. As Figure 8 shown, the adapter 53 is arranged on the bracket 20 or the positioning component 40, the fixing plate 52 is arranged on the adapter, a plurality of probe mounting holes are formed on the fixing plate 52, and the laser interferometer probes are respectively arranged in the probe mounting holes and are arranged facing the mirror 10.

[0047] As Figure 1 、 Figure 2 shown, in some embodiments, the driving component 30 is arranged directly below the mirror 10, and the measurement component 50 is arranged directly above the mirror 10. Such an arrangement can perform gravity compensation while the driving component 30 drives the mirror 10 to deform, simplifying the structural scheme. In other embodiments, the driving component 30 and the measurement component can also be respectively arranged on both sides of the mirror 10 in the horizontal direction, but the gravity influence during the bending deformation process of the mirror 10 needs to be considered at the same time. It should be noted that the center line of the extension direction of the mirror 10, the measurement points of the measurement component, and the acting force of the driving component 30 should be located in the same plane perpendicular to the force-bearing surface of the mirror 10, so that the mirror 10 is in force balance and the force and the bending displacement measurement are accurate.

[0048] According to some embodiments of the present application, the first driving mechanism 31 and / or the second driving mechanism 32 further includes an elastic member, one end of the elastic member is connected to the output end of the driving member, and the other end is connected to the mirror 10. In this embodiment, by providing the elastic member, the rigid force output by the driving member can be converted into the elastic force of the elastic member, reducing the precision requirements for the driving member and the minimum acting force actually output by the driving mechanism. The force-displacement decoupling is achieved through the compliance and energy storage of the elastic member, thereby ensuring the independence of the force adjustment at each point.

[0049] Specifically, as Figure 2 shown, the first driving mechanism 31 includes a first driving member 311, a first force sensor 312, and a first elastic member 313. One end of the first elastic member 313 is connected to the output end of the first driving member 311, and one end is connected to the first force sensor 312. The first force sensor 312 is connected to the mirror 10. The second driving mechanism 32 includes a second driving member 321, a second force sensor 322, and a second elastic member 323. One end of the second elastic member 323 is connected to the output end of the second driving member 321, and one end is connected to the second force sensor 322. The second force sensor 322 is connected to the mirror 10.

[0050] In some embodiments, both the first driving member 311 and the second driving member 321 can be configured as electric push rods, which can automatically adjust the force with high operating efficiency; and have high control precision, and can accurately adjust the thrust / tension and speed.

[0051] In some embodiments, the first driving part is adapted to apply a tensile force to the mirror 10, and the second driving part is adapted to apply a thrust force to the mirror 10. Based on this, the first elastic member 313 can be configured as a tension spring. The second elastic member 323 can be configured as a compression spring. In some embodiments, the two ends of the tension spring of the first driving mechanism 31313 are connected to the first driving member 311 and the first force sensor 312 through spring connection seats. In some embodiments, the second driving mechanism 32 further includes a spring sleeve 324 for installing the compression spring. One end of the compression spring abuts against the inner bottom wall of the spring sleeve 324, and the other end abuts against the second force sensor 322.

[0052] According to some embodiments of the present application, one of the first driving mechanism 31 and the second driving structure further includes a first connecting seat 314. One side of the first connecting seat 314 is connected to the driving member, and the other side is directly connected to the mirror 10 to be adapted to apply a tensile force to the mirror 10; wherein grooves 11 are formed on both sides of the mirror 10 in the first direction, and the first connecting seat 314 is formed with a convex portion 3147 that cooperates with the grooves 11. In this embodiment, as Figure 2As shown, the first direction is perpendicular to the force direction and the extension direction of the mirror 10. In this embodiment, the connection between the first connecting seat 314 and the mirror 10 is realized through the cooperation of the groove 11 and the convex portion 3147, and further the connection between the first driving mechanism 31 and the mirror 10 is realized. Specifically, the first connecting seat 314 is connected between the first force sensor 312 and the mirror 10. Arranging the groove 11 in the first direction can avoid contact with the mirror surface of the mirror 10 and prevent affecting the mirror surface shape of the mirror 10. It should be noted that the above-mentioned first connecting seat 314 is arranged on the driving mechanism that provides a pulling force to the mirror 10. For the sake of simple description, the subsequent content will be based on Figure 2 shown as an example. The first driving mechanism 31 applies a pulling force to the mirror 10 and includes the above-mentioned first connecting seat; the second driving mechanism 32 applies a pushing force to the mirror 10.

[0053] Furthermore, the second driving mechanism 32 includes a second connecting seat 325, and the second connecting seat 325 is connected between the second force sensor 322 and the mirror 10. Even further, the end face of the second connecting seat 325 in contact with the mirror 10 is configured as an arc surface to be suitable for point contact with the mirror 10, so as to ensure the accuracy of the force application point position and prevent the mirror 10 from being unbalanced in force.

[0054] According to some embodiments of the present application, the first connecting seat 314 includes a first connecting portion and a second connecting portion 3143. The first connecting portion is formed with a convex portion 3147. The second connecting portion 3143 is connected to the output end of the driving member, and the first connecting portion and the second connecting portion 3143 are connected in a universal joint manner.

[0055] In this embodiment, the first connecting portion and the second connecting portion are connected in a universal joint manner. When the first driving mechanism 31 applies a pulling force to the mirror 10, the second connecting portion can rotate at a small angle relative to the first connecting portion, which can improve the structural flexibility and adaptability of the first driving mechanism 31, and make the pulling force transmission of the first driving mechanism 31 stable, reliable and with high transmission efficiency. Specifically, as Figures 3 - 6 shown, in some embodiments, the first connecting portion is formed with a limiting hole 3145. A part of the second connecting portion 3143 passes through the limiting hole 3145 and is connected to the first force sensor 312, and a part forms a limiting surface 3144 to cooperate with and abut against the first connecting portion. Among them, the part of the limiting surface 3144 configured as a spherical surface, and a part of the wall surface of the limiting hole 3145 is configured as a mating surface 3146 with the same center of the circle to cooperate with it. In some embodiments, the limiting hole 3145 can be configured as a tapered counterbore. In some embodiments, the second connecting portion 3143 includes a connecting screw and a spherical washer, and the above-mentioned limiting surface 3144 is formed on the spherical washer. In some embodiments, the second connecting portion 3143 is threadedly connected to the first force sensor 312.

[0056] To further improve the flexibility of the first driving structure, in some embodiments, the first elastic member 313 may be suspended and connected to the output end of the first driving member 311 and the first force sensor 312 through a pull ring.

[0057] In some embodiments, the first connecting portion includes two clamping arms 3141 and a connecting block 3142. The connecting block 3142 is connected between the ends of the two clamping arms 3141 and is formed with the above-mentioned limiting hole 3145; the other end of the clamping arm 3141 is formed with the convex portion 3147. When the first connecting seat is cooperatively connected with the mirror 10, a part of the mirror 10 is received between the two clamping arms 3141, and the convex portion 3147 is disposed in the groove and the corresponding surfaces of the convex portion 3147 and the groove are in abutment.

[0058] Furthermore, as Figure 4 shown, a contact point protruding from the surface is formed on the surface of the convex portion 3147. The contact point is in point contact with the groove wall surface, which can ensure the accuracy of the force application point and avoid affecting the bending process of the mirror 10. The contact point can be configured as a hemispherical shape.

[0059] According to some embodiments of the present application, the driving assembly 30 further includes a mounting plate 33. The mounting plate 33 is movably disposed on the bracket 20 along a direction perpendicular to the extending direction of the mirror 10, and the first driving portion and the second driving portion are disposed on the mounting plate 33. In this embodiment, as Figure 7 shown, by providing the mounting plate 33, the driving assembly 30 can be moved relative to the mirror 10, so as to facilitate the connection between the driving assembly 30 and the mirror 10 during installation, and also facilitate adapting to mirrors 10 of different sizes.

[0060] It should be noted that the effective heights of the first driving mechanism 31 and the second driving mechanism 32 may not be the same. When they are disposed on the mounting plate 33 and connected to the mirror 10, for the driving mechanism with a smaller height, an auxiliary support 34 can be provided at the bottom, as Figure 2 shown.

[0061] In some embodiments, a support beam 22 is formed on the bracket 20. A plurality of screw rods 35 are disposed on the support beam 22. The mounting plate 33 is formed with mounting holes matching the screw rods 35. The mounting plate 33 is cooperatively connected with the screw rods 35 and is adapted to move relative to the support beam 22 and is fixed by a nut 36 when moved to a target position.

[0062] It should be noted that during the bending process of the mirror 10, due to factors such as unbalanced force, the mirror 10 is prone to torsion problems. To this end, the positioning assembly 40 can be used to reasonably restrain it to prevent torsion during bending. At the same time, due to the bending deformation, the shape and extension length of the mirror 10 will change slightly, and the positioning assembly 40 needs to cooperate with it.

[0063] According to some embodiments of the present application, the positioning assembly 40 is configured into two groups, which are respectively arranged on the bracket 20 near both ends of the mirror 10. Each positioning assembly 40 includes a positioning base 41, a first positioning mechanism 42, a second positioning mechanism 43, and a third positioning mechanism 44. The positioning base 41 is arranged on the bracket 20; the first positioning mechanism 42, the second positioning mechanism 43, and the third positioning mechanism 44 are arranged on the positioning base 41; wherein the first positioning mechanism 42 is arranged below the mirror 10 to be adapted to support the mirror 10; the second positioning mechanism 43 abuts against both sides of the mirror 10 in the first direction to be adapted to restrict the mirror 10 in the first direction; the third positioning mechanism 44 abuts against the end face of the mirror 10 in the extending direction to be adapted to restrict the mirror 10 in the extending direction. In this embodiment, as Figure 8 shown, by arranging three groups of positioning mechanisms to restrict the mirror 10 in three directions, its installation and fixation are realized. Among them, the second positioning mechanism 43 provides constraints to the mirror 10 on both sides in the first direction, which can effectively prevent the mirror 10 from twisting during the bending process.

[0064] In some embodiments, as Figure 8 shown, the positioning base 41 includes a cross bar and two vertical bars. The cross bar is fixed on the bracket 20, and the vertical bars are fixedly arranged on the cross bar at intervals, so as to facilitate the installation and fixation of the first positioning mechanism 42, the second positioning mechanism 43, and the third positioning mechanism 44. In some embodiments, the positioning base 41 is integrally formed by machining, and the cross bar and the vertical bars are of an integral structure.

[0065] In view of the above problems, according to some embodiments of the present application, the first positioning mechanism 42 of one group of the positioning assemblies 40 includes a roller 421 and a bushing 422. The roller 421 is arranged on the positioning base 41 and the extending direction of the roller 421 is perpendicular to the extending direction of the mirror 10; the bushing 422 is sleeved outside the roller 421 and abuts against the mirror 10. When the mirror 10 is bent and deformed, it is adapted to drive the bushing 422 to rotate; wherein a support ring is arranged on the outer periphery of the roller 421, the support ring abuts against the inner surface of the bushing 422, and a swing gap is formed between the inner surface of the bushing 422 and the outer surface of the roller 421. When the mirror 10 is bent and deformed, it is adapted to drive the bushing 422 to swing relative to the roller 421 around the support ring.

[0066] In this embodiment, as Figure 8As shown, the bushing 422 abuts against the mirror 10 in line contact to support the mirror 10, making the force on the mirror 10 more balanced in the vertical direction and avoiding torsion. At the same time, since the bushing can swing relative to the roller and rotate relative to the bracket 20, when the extension length of the mirror 10 changes slightly during the bending process, it can drive the bushing 422 to move slightly, reducing the influence of factors such as friction on the bending deformation of the mirror 10. Specifically, a clearance fit can be adopted between the bushing 422 and the roller 421, and an interference fit can be adopted between the bushing 422 and the support ring.

[0067] Further, the first positioning mechanism 42 in the other positioning assembly 40 also includes a roller and a bushing, and the bushing is rotatably sleeved on the outer periphery of the roller. The bushing remains in line contact with the mirror 10 and can rotate relative to the roller about the axis of the roller, being suitable for providing support to the mirror 10 and maintaining a certain flexibility to adapt to the morphological changes of the mirror 10 during the bending process.

[0068] The combination of two groups of the first positioning mechanisms 42 can further prevent the mirror 10 from twisting during the bending process. Further still, in the two groups of the first positioning mechanisms 42, roller mounting holes are formed on the vertical rods, and shaft end caps 423 are provided at both ends of the roller. The shaft end caps 423 are connected to the roller by screws and are connected in cooperation with the roller mounting holes. The shaft end caps can play an axial limiting role on the roller and / or the bushing.

[0069] Based on the above embodiments, the two groups of positioning assemblies 40 can be divided into a fixed-end positioning assembly 40 and a follower-end positioning assembly 40. The first positioning mechanism 42 provided with the support ring is applied to the follower-end positioning assembly 40, and the other first positioning mechanism 42 is applied to the fixed-end positioning assembly 40. The follower-end positioning assembly 40 can adapt to the bending deformation of the mirror 10.

[0070] It should also be noted that if the third positioning mechanism restricts the deformation of the mirror in the extension direction, local stress will be introduced during the bending deformation of the mirror, resulting in micro-curvature distortion of the mirror surface.

[0071] To address the above problems, according to some embodiments of the present application, the third positioning mechanism 44 of one group of the positioning assemblies 40 includes a positioning spring piece 441. The positioning spring piece 441 is disposed on the positioning base 41 and abuts against the end face of the mirror 10 at one end to be suitable for elastically constraining the mirror 10. In this embodiment, the positioning spring piece 441 can elastically deform itself, providing a deformation space for adapting to the change in the extension length of the mirror 10 while maintaining a small binding force. The mirror 10 can bend and deform in extension by overcoming the elastic binding force, which can avoid the torsion problem to a certain extent and also prevent the mirror surface from being distorted due to excessive stress on the mirror.

[0072] Further, asFigure 9 As shown, the third positioning mechanism 44 further includes a positioning bolt 442. One end of the positioning reed 441 is disposed on the vertical rod of the base, and the other end extends toward the other vertical rod; the positioning bolt 442 is disposed on the positioning reed 441. Wherein, the relative position between the positioning bolt 442 and the mirror 10 can be adjusted by adjusting the position of the nut to achieve effective abutment. Further, the positioning reed 441 can be configured as a bent structure, which is convenient for connecting the mirror 10 and the vertical rod, and is also convenient for adjusting to adapt to mirrors 10 of different lengths.

[0073] The above-mentioned third positioning mechanism 44 is applied to the follower end positioning assembly 40. Further, the third positioning mechanism 44 in the fixed end positioning assembly 40 includes a rigid positioning piece and a positioning bolt to provide rigid constraint to one end of the mirror 10.

[0074] According to some embodiments of the present application, the second positioning mechanism 43 can be configured as two sets of locking bolts, which are respectively disposed on two vertical rods to be adapted to abut against both sides of the mirror 10 in the first direction, so that the mirror 10 does not move in the first direction during the bending process, avoiding tipping or torsion. At the same time, by adjusting the locking bolts, the installation position of the mirror 10 can be adjusted to align it with the driving assembly 30 to achieve balanced force. In addition, the number of each set of locking bolts is not limited to one and can be set according to the constraint requirements.

[0075] According to some embodiments of the present application, the second positioning mechanism 43 and / or the third positioning mechanism 44 form a protrusion that abuts against the mirror 10. In this embodiment, the second positioning mechanism 43 and the third positioning mechanism 44 are in contact with the surface of the mirror 10 through the protrusion, which can reduce the contact area and reduce the influence on the bending deformation of the mirror 10.

[0076] Specifically, as Figure 9 shown, a second positioning end 431 that abuts against the mirror 10 is formed at the end of the second positioning mechanism 43. The second positioning end 431 is formed with the above-mentioned protrusion, and the surface of the protrusion is configured as an arc surface or a hemispherical surface to be adapted to point contact with the mirror 10, reducing the influence on the bending surface shape of the mirror 10. A third positioning end 443 is formed at the end of the positioning bolt 442 of the third positioning mechanism 44. The third positioning end 443 is formed with the above-mentioned protrusion, and the surface of the protrusion is configured as an arc surface or a hemispherical surface to make point contact with the end face of the mirror 10, reducing the influence on the bending surface shape of the mirror 10.

[0077] When the mirror bending device of the present application is in use, the bracket 20 provides stable support, and the positioning assembly 40 provides simply supported beam constraint and good support stiffness for the mirror 10.

[0078] According to some embodiments of the present application, a control cabinet 60 and a display panel 70 are further provided on the support 20. A control unit for controlling the driving assembly 30 is arranged in the control cabinet 60 to be adapted to send instructions to each driving mechanism to bend the mirror 10. The display panel 70 is connected to the measuring assembly and each force sensor of the driving assembly 30 to be adapted to display the real-time force magnitude and the bending displacement magnitude at each position of the mirror 10.

[0079] According to some embodiments of the present application, the support 20 includes a support main body 21 and a floor footing 23 provided at the bottom of the support main body 21. The floor footing 23 is used to be placed on the ground or a working plane. A backing plate 24 can be provided between the floor footing 23 and the bottom surface of the support main body 21. The floor footing 23 and the backing plate 24 are connected by threads, which is convenient for adjusting the height of the device. At the same time, the contact area can be increased to reduce the pressure and enhance the stability of the structure. Among them, the support main body 21 can be made of Q235 carbon structural steel and is welded by multiple beam structures; the backing plate 24 can be made of stainless steel.

[0080] Using the mirror bending device of the present application to bend the mirror 10, the following tests are carried out:

[0081] The multi-point force regulation type mirror bending device for synchrotron radiation is as Figures 1 - 11 shown. Among them, three first driving mechanisms 31 are provided, and four second driving mechanisms 32 are provided; the measuring assembly is arranged 42 mm above the mirror 10. The mirror 10 is a cylindrical single-crystal silicon mirror 10, which is polished on one side, and two side surfaces in the horizontal direction are grooved so that its cross-section is in the shape of a "work" character, and the outer contour dimensions are 600×50×50 mm 3 , and the grooving dimensions of the two side surfaces are 600×10×10 mm 3 .

[0082] Bending target: an elliptical surface type with an object distance of 13 m, an image distance of 5 km, and a grazing incidence angle of 3.5 mrad.

[0083] By establishing an Euler-Bernoulli beam model of the mirror 10 and solving the multi-point force distribution in combination with the boundary conditions, with the left end face of the single-crystal silicon mirror 10 as the reference, from left to right, the positions of the 7 acting points are 50 mm, 130 mm, 210 mm, 300 mm, 390 mm, 470 mm, and 550 mm in sequence, and the corresponding acting forces at each position are 169.39 N, 2.11 N, -6.51 N, -5.38 N, -2.99 N, -11.80 N, and 183.73 N respectively. Among them, the positive and negative of the force represent the direction. In this embodiment, it is stipulated that the downward pulling force is positive and the upward pushing force is negative.

[0084] Before bending starts, place the mirror 10 on the positioning component 40 and adjust the initial position. During the bending process, control each electric push rod through the control cabinet, monitor the current actual output force value at each acting point through the force sensor, and view it in real time on the force display panel. Stop the bending drive when each force value is consistent with the preset force value. During the bending process, the laser interferometer probe above the mirror 10 records the change in bending displacement throughout the process. Through multi-point fitting, the actual surface shape of the mirror 10 after bending can be obtained. Considering the self-weight of the mirror 10, the curve after bending under the action of seven-point force is tested and compared with the target curve, as Figure 10 shown; compare the slope of the curve after bending with the slope of the target ideal curve, as Figure 11 shown; the displacement error between the tested surface shape and the target surface shape is 0.003μm, and the slope error (RMS) is 0.043urad, which can meet the optical accuracy requirements of the synchrotron beamline.

[0085] Combined with the analysis of the test results, the multi-point force regulation type mirror bending device for synchrotron radiation of the present application can reduce the bending surface shape error of the mirror 10.

[0086] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention.

[0087] In the description of the present invention, the "first feature" and "second feature" may include one or more of such features.

[0088] In the description of the present invention, the meaning of "a plurality of" is two or more.

[0089] In the description of the present invention, the first feature being "above" or "below" the second feature may include the first and second features being in direct contact, or may include the first and second features not being in direct contact but being in contact through additional features therebetween.

[0090] In the description of the present invention, the first feature being "above", "over" and "on" the second feature includes the first feature being directly above and obliquely above the second feature, or merely indicating that the horizontal height of the first feature is higher than that of the second feature.

[0091] In the description of this specification, the descriptions referring to terms such as "one embodiment", "some embodiments", "schematic embodiments", "examples", "specific examples", or "some examples", etc. mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0092] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the claims and their equivalents.

Claims

1. A multi-point force regulation type mirror bending device for synchrotron radiation, characterized in that, Comprising: A bracket, on which a positioning component is provided for constraining a mirror; A driving component, which is arranged on the bracket. The driving component includes two first driving parts and one second driving part adapted to be connected to the mirror, and the two first driving parts are arranged on both sides of the second driving part along the extending direction of the mirror; the first driving part and the second driving part are adapted to apply acting forces in opposite directions to the mirror so that the mirror can be bent and deformed under the action of force; Wherein Each of the first driving parts includes at least one first driving mechanism, and the second driving part includes at least one second driving mechanism. Each of the first driving mechanism and the second driving mechanism includes a driving part and a force sensor. The driving part is arranged on the bracket and the output end of the driving part is connected to the mirror to be adapted to apply force to the mirror, and the force sensor is adapted to measure the magnitude of the force applied to the mirror in real time.

2. The multi-point force regulation type mirror bending device for synchrotron radiation according to claim 1, characterized in that, Further comprising: A measuring component, which is arranged on the bracket, and the measuring component and the driving component are respectively arranged on opposite sides of the mirror; The measuring component includes a plurality of measuring parts, and the plurality of measuring parts are arranged at intervals along the extending direction of the mirror and are arranged opposite to the mirror to be adapted to measure the bending displacement of corresponding points of the mirror.

3. The bending device for the synchrotron radiation multi-point force-regulated mirror according to claim 1, wherein The first driving mechanism and / or the second driving mechanism further includes: An elastic member, one end of which is connected to the output end of the driving part and the other end is connected to the mirror.

4. The multi-point force regulation type mirror bending device for synchrotron radiation according to claim 1, characterized in that, One of the first driving mechanism and the second driving structure further includes: A connecting seat, one side of which is connected to the driving part and the other side is directly connected to the mirror to be adapted to apply a pulling force to the mirror; wherein Grooves are formed on both sides of the mirror in a first direction, and the connecting seat is formed with convex parts adapted to be connected with the grooves.

5. The multi-point force regulation type mirror bending device for synchrotron radiation according to claim 4, characterized in that The connecting seat includes: A first connecting part and a second connecting part. The first connecting part is formed with the convex part, the second connecting part is connected to the output end of the driving part, and the first connecting part and the second connecting part are connected in a universal joint manner.

6. The bending device for the synchrotron radiation multi-point force-controlled mirror according to claim 1, characterized in that The driving component further includes: A mounting plate, which is movably arranged on the bracket along a direction perpendicular to the extending direction of the mirror, and the first driving part and the second driving part are arranged on the mounting plate.

7. The bending device for a synchrotron radiation multi-point force-regulated mirror according to claim 1, characterized in that, The positioning component is configured into two groups, which are respectively arranged on the bracket near both ends of the mirror. Each positioning component includes: A positioning base, which is arranged on the bracket; A first positioning mechanism, a second positioning mechanism and a third positioning mechanism, which are arranged on the positioning base; wherein The first positioning mechanism is arranged below the mirror to be adapted to support the mirror; The second positioning mechanism abuts against both sides of the mirror in a first direction to be adapted to constrain the mirror in the first direction; The third positioning mechanism abuts against the end face of the mirror in the extending direction to be adapted to constrain the mirror in the extending direction.

8. The multi-point force regulation type mirror bending device for synchrotron radiation according to claim 7, characterized in that, The first positioning mechanism of one set of the positioning components includes: A roller, the roller is arranged on the positioning base and the extending direction of the roller is perpendicular to the extending direction of the mirror; A bushing, the bushing is sleeved outside the roller and abuts against the mirror, and when the mirror is bent and deformed, it is adapted to drive the bushing to rotate; wherein A support ring is arranged on the outer periphery of the roller, the support ring abuts against the inner surface of the bushing, and a swing gap is formed between the inner surface of the bushing and the outer surface of the roller. When the mirror is bent and deformed, it is adapted to drive the bushing to swing relative to the roller around the support ring.

9. The multi-point force regulation type mirror bending device for synchrotron radiation according to claim 7, characterized in that The third positioning mechanism of one set of the positioning components includes: A positioning reed, the positioning reed is arranged on the positioning base, and one end abuts against the end face of the mirror to be adapted to elastically constrain the mirror.

10. The bending device for a synchrotron radiation multi-point force-regulated mirror according to claim 7, characterized in that, The second positioning mechanism and / or the third positioning mechanism are formed with protrusions abutting against the mirror.

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