Evaporation coating machine for deep ultraviolet film

Abstract

The invention relates to the technical field of evaporation coating machines, in particular to a deep ultraviolet film evaporation coating machine which comprises an evaporation coating machine body, a first top plate, a sealing door, a first bottom plate and universal wheels, the first top plate is arranged at the top end of the evaporation coating machine body, the evaporation coating machine body is hinged to the sealing door, and the first bottom plate is arranged at the bottom end of the sealing door. Multiple sets of universal wheels are arranged at the bottom end of the first bottom plate, the device further comprises a driving assembly and a material frame assembly, the driving assembly is installed on the first bottom plate, the material frame assembly is placed on the first bottom plate, and the driving assembly is used for rotation of the material frame assembly; when the device is used, a workpiece is hung on the first material frame assembly, the first material frame assembly is placed on the first bottom plate through the hoisting assembly, the first material frame assembly is hoisted away, the second material frame assembly is placed on the first bottom plate, and after the workpiece on the first material frame assembly is unloaded, the workpiece to be coated is hung on the first material frame assembly; and the workpiece coating efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of evaporation coating machines, and particularly to an evaporation coating machine for deep ultraviolet films. Background Art

[0002] A deep ultraviolet film evaporation coating machine is a device for thin film coating. Thin film coating is a common surface treatment technology. By heating a thin film material in a solid state to its evaporation temperature, it is transformed into a gas phase, and then condensed on the surface of the object to be treated to form a thin film layer. The basic components of an evaporation coating machine include the following parts: a vacuum chamber, a heating source, an evaporation source, and a control system.

[0003] In the prior art, a patent document with the publication number CN118390009B discloses an electron beam evaporation device for an evaporation coating machine, including a vacuum evaporation coating machine, a rotating disk, a suspension rod, and a fixed shaft. The middle of the rotating disk is rotatably connected to the fixed shaft. A circular crucible is installed at the middle of the surface of the rotating disk and at the position of the fixed shaft. The fixed shaft penetrates through the middle of the crucible, and a stirring structure is arranged at the intersection of the rotating disk and the fixed shaft; in the present invention, the molten liquid inside the crucible can be stirred. The molten liquid at different positions is stirred to make the heating more uniform. The stirring ball can be swung up and down to stir the heating target material in the crucible, so that the heating target material inside the circular crucible can be contacted, and the heating target material can fall to the bottom of the crucible for heating. While the telescopic inner rod rotates around the fixed shaft, the telescopic inner rod also rotates around its own axis, so as to stir the heating target material at different positions in the crucible more evenly.

[0004] During the use process, it is found that after coating multiple groups of workpieces with the above device, the coated workpieces need to be taken out one by one, and then the workpieces to be coated need to be hung one by one before coating again, resulting in a low coating efficiency of the workpieces. Summary of the Invention

[0005] To solve the above technical problems, the present invention provides an evaporation coating machine for deep ultraviolet films.

[0006] The evaporation coating machine for deep ultraviolet films of the present invention includes an evaporation coating machine main body, a first top plate, a sealing door, a first bottom plate and universal wheels. A first top plate is provided at the top of the evaporation coating machine main body. The evaporation coating machine main body is hinged to the sealing door. A first bottom plate is provided at the bottom of the sealing door. A plurality of groups of universal wheels are provided at the bottom of the first bottom plate. It further includes a driving component and a rack component. The driving component is installed on the first bottom plate. The rack component is placed on the first bottom plate. The driving component is used for the rotation of the rack component. When in use, the workpiece is hung on the first group of rack components. The hoisting component places the first group of rack components on the first bottom plate. Then, the sealing door and the first bottom plate cooperate to seal the evaporation coating machine main body. The driving component is started, so that the first group of rack components rotate inside the evaporation coating machine main body. The evaporation coating machine main body is started to perform the deep ultraviolet film coating operation on the workpiece on the first group of racks. During this period, the staff hangs the workpiece to be coated on the second group of rack components. When the coating of the workpiece on the first group of rack components is completed, the first group of rack components is hoisted away and the second group of rack components is placed on the first bottom plate. When coating the workpiece on the second group of rack components, after the workpiece on the first group of rack components is unloaded, the workpiece to be coated is hung on the first group of rack components, improving the coating efficiency of the workpiece.

[0007] Preferably, the driving component includes a reduction motor, a rotating shaft and a square groove. The reduction motor is installed at the bottom of the first bottom plate. The output end of the reduction motor is provided with a rotating shaft. The top end of the rotating shaft extends above the first bottom plate. The top end of the rotating shaft is provided with a square groove. The rack component is placed at the top of the first bottom plate. The bottom end of the rack component is inserted into the square groove. The reduction motor is started, so that the rotating shaft drives the rack component to rotate through the square groove, improving the coating uniformity and the loading and unloading efficiency.

[0008] Preferably, the rack component includes a first disc, a plug rod, a telescopic limiting rod, a second disc, a lifting lug and a hanging rod assembly. A plug rod is provided at the bottom of the first disc. The plug rod is adapted to the square groove. A telescopic limiting rod is provided at the top of the first disc. The top end of the telescopic limiting rod is connected to the bottom end of the second disc. A lifting lug is installed at the top of the second disc. A plurality of groups of hanging components are rotatably arranged between the first disc and the second disc. The plurality of groups of hanging components are distributed in a circumferential array. The workpiece is hung on the hanging component. Then, the hoisting component hoists the lifting lug, so that the plug rod is inserted into the square groove. The reduction motor is started, so that the rotating shaft drives the first disc to rotate through the square groove and the plug rod. Further, the first disc and the second disc cooperate to drive the plurality of groups of hanging components to revolve while each group of hanging components rotates, so that the evaporation coating machine main body fully coats the workpiece.

[0009] Preferably, the hanging component includes a bracket, a rotating shaft, a roller, a first cone pulley, a second cone pulley, a hollow shaft, a strip-shaped opening, a material hook, and a locking component. A bracket is provided at the bottom end of the first disc. A rotating shaft is rotatably provided on the bracket. The roller is fixedly installed on the rotating shaft. One end of the rotating shaft is provided with a first cone pulley. The hollow shaft passes through the first disc and is rotatably connected to the first disc. A second cone pulley is provided at the bottom end of the hollow shaft. The first cone pulley meshes with the second cone pulley. A plurality of groups of strip-shaped openings are provided on the hollow shaft. A plurality of groups of material hooks are provided on the outer side wall of the hollow shaft. The number of strip-shaped openings is the same as that of the material hooks. A locking component is slidably provided inside the hollow shaft. The top end of the locking component is rotatably connected to the bottom end of the second disc. When the hoisting component hoists the lifting lug, the second disc drives the locking component to rise, so that the locking component releases the locking of the material hook. Then, the workpiece is hung on the material hook. When the plug rod is inserted into the square groove and the locking component in the hollow shaft moves downward, the material hook is locked to prevent the workpiece from falling during the rotation process. The plurality of groups of rollers are in rolling friction contact with the top end of the first bottom plate. The reduction motor is started, so that the first disc rotates, and further the rollers rotate adaptively. The rollers drive the first cone pulley to rotate through the rotating shaft. Since the first cone pulley meshes with the second cone pulley, the second cone pulley drives the hollow shaft to rotate. The hollow shaft drives the workpiece to rotate through a plurality of groups of material hooks, realizing the rotation of the workpiece while revolving, and improving the coating uniformity.

[0010] Preferably, the locking component includes a tension spring, a pull rod, a pressing plate, and a round hole. The tension spring is installed at the inner bottom end of the hollow shaft. The top end of the tension spring is connected to the bottom end of the pull rod. The outer side wall of the pull rod is in contact with the inner side wall of the hollow shaft. The top end of the pull rod is rotatably connected to the bottom end of the second disc. A plurality of groups of pressing plates are provided on the pull rod. Each group of pressing plates respectively passes through a group of strip-shaped openings. Each group of pressing plates is respectively provided with a group of round holes. The round holes are adapted to the material hooks. When the hoisting component hoists the first bottom plate, the first disc moves downward under the action of its own gravity, so that the hollow shaft moves downward relative to the pull rod. At the same time, the material hook is away from the corresponding round hole. Then, the workpiece is hung on the material hook. The plug rod is inserted into the square groove. The plurality of groups of rollers are in rolling friction contact with the top end of the first bottom plate. The pull rod drives the pressing plate to move downward inside the strip-shaped opening under the pulling force of the tension spring, so that the material hook is inserted into the corresponding round hole. The rollers and the material hooks cooperate to lock the workpiece. During hoisting, the telescopic limiting rod limits the distance between the first disc and the second disc, improving the convenience.

[0011] Preferably, it further includes a circular ring, a first lead screw, a first nut and an anti-slip pad. There are two groups of through holes provided on the first bottom plate. Two groups of first lead screws are provided at the bottom end of the circular ring. Each group of first lead screws passes through a group of through holes and is threadedly connected to the first nut. An anti-slip pad is provided at the top end of the circular ring. The first lead screw passes through the through hole and is threadedly connected to the first nut to complete the fixation of the circular ring. The roller is in frictional rolling contact with the anti-slip pad. When the reduction motor drives the first disc to rotate, the roller rolls with the cooperation of the anti-slip pad to prevent slipping. After using for a period of time, the anti-slip pad can be replaced.

[0012] Preferably, it further includes a U-shaped clamping plate, a pin, a second lead screw and a second nut. A U-shaped clamping plate is provided on the sealing door. The second lead screw is hinged to the evaporation coating machine main body with the cooperation of the pin. The second lead screw is threadedly connected to the second nut. When the sealing door seals the evaporation coating machine main body, the second lead screw enters the inside of the U-shaped clamping plate with the cooperation of the pin, and the second nut is rotated, so that one end of the second nut presses against one end of the U-shaped clamping plate, thereby completing the locking of the sealing door and improving the sealing performance.

[0013] Preferably, it further includes a handle. A handle is installed on the sealing door. The staff opens and closes the sealing door through the handle, improving the convenience.

[0014] Preferably, it further includes an observation window. An observation window is provided on the sealing door. The staff observes the coating situation of the workpiece inside the evaporation coating machine main body through the observation window, improving the convenience.

[0015] Preferably, it further includes adjustable feet. Multiple groups of adjustable feet are provided at the bottom end of the evaporation coating machine main body. The multiple groups cooperate with each other to stably support the evaporation coating machine main body, improving the stability.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows: When in use, the workpiece is hung on the first group of rack components, the hoisting component places the first group of rack components on the first bottom plate, and then the sealing door cooperates with the first bottom plate to seal the evaporation coating machine main body. The driving component is started, so that the first group of rack components rotates inside the evaporation coating machine main body. The evaporation coating machine main body is started to perform deep ultraviolet film coating operation on the workpiece on the first group of racks. During this period, the staff hangs the workpiece to be coated on the second group of rack components. When the workpiece on the first group of rack components is coated, the first group of rack components is lifted away and the second group of rack components is placed on the first bottom plate. When coating the workpiece on the second group of rack components, after the workpiece on the first group of rack components is unloaded, the workpiece to be coated is hung on the first group of rack components, improving the workpiece coating efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is the first axonometric structure schematic diagram of the present invention; Figure 2 is Figure 1 The partial enlarged structural schematic diagram of part A; Figure 3 is the second axonometric structural schematic diagram of the present invention; Figure 4 is the exploded structural schematic diagram of structures such as the sealing door and the second disc; Figure 5 is the enlarged structural schematic diagram of structures such as the reduction motor and the first base plate; Figure 6 is the enlarged structural schematic diagram of structures such as the circular ring and the first nut; Figure 7 is the enlarged structural schematic diagram of structures such as the telescopic limit rod and the insertion rod; Figure 8 is Figure 7 The partial enlarged structural schematic diagram of part B; Figure 9 is the enlarged structural schematic diagram of structures such as the pull rod and the material hook; Figure 10 is the sectional structural schematic diagram of structures such as the hollow shaft; Figure 11 is the enlarged structural schematic diagram of structures such as the tension spring and the pressing plate.

[0018] Markings in the attached drawings: 101, evaporation coating machine main body; 102, first top plate; 104, sealing door; 105, first base plate; 106, universal wheel; 107, handle; 108, observation window; 109, adjustable foot; 201, reduction motor; 202, rotating shaft; 203, square groove; 301, first disc; 302, insertion rod; 303, telescopic limit rod; 304, second disc; 305, lifting lug; 401, bracket; 402, rotating shaft; 403, roller; 404, first cone pulley; 405, second cone pulley; 406, hollow shaft; 407, strip-shaped opening; 408, material hook; 501, tension spring; 502, pull rod; 503, pressing plate; 504, round hole; 601, circular ring; 602, first lead screw; 603, first nut; 604, anti-slip pad; 701, U-shaped clamping plate; 702, pin; 703, second lead screw; 704, second nut. Detailed implementation manners

[0019] To facilitate the understanding of the present invention, the present invention will be described more comprehensively below with reference to the relevant attached drawings. The present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0020] Embodiment 1 Such as Figures 1 to 11As shown in the figure, the evaporation coating machine for the deep ultraviolet film of the present invention includes an evaporation coating machine main body 101, a first top plate 102, a sealing door 104, a first bottom plate 105 and universal wheels 106. A first top plate 102 is provided at the top of the evaporation coating machine main body 101. The evaporation coating machine main body 101 is hinged to the sealing door 104. A first bottom plate 105 is provided at the bottom of the sealing door 104. Multiple groups of universal wheels 106 are provided at the bottom of the first bottom plate 105. It further includes a driving component and a rack component. The driving component is installed on the first bottom plate 105. The rack component is placed on the first bottom plate 105. The driving component is used for the rotation of the rack component; The driving component includes a reduction motor 201, a rotating shaft 202 and a square groove 203. The reduction motor 201 is installed at the bottom of the first bottom plate 105. The output end of the reduction motor 201 is provided with a rotating shaft 202. The top end of the rotating shaft 202 extends above the first bottom plate 105. A square groove 203 is provided at the top end of the rotating shaft 202; The rack component includes a first disc 301, a plug rod 302, a telescopic limiting rod 303, a second disc 304, a lifting lug 305 and a hanging rod component. A plug rod 302 is provided at the bottom of the first disc 301. The plug rod 302 is adapted to the square groove 203. A telescopic limiting rod 303 is provided at the top of the first disc 301. The top end of the telescopic limiting rod 303 is connected to the bottom end of the second disc 304. A lifting lug 305 is installed at the top of the second disc 304. Multiple groups of hanging components are rotatably arranged between the first disc 301 and the second disc 304. The multiple groups of hanging components are distributed in a circumferential array; The hanging component includes a bracket 401, a rotating shaft 402, a roller 403, a first cone pulley 404, a second cone pulley 405, a hollow shaft 406, a strip-shaped opening 407, a material hook 408 and a locking component. A bracket 401 is provided at the bottom of the first disc 301. A rotating shaft 402 is rotatably arranged on the bracket 401. A roller 403 is fixedly installed on the rotating shaft 402. One end of the rotating shaft 402 is provided with a first cone pulley 404. The hollow shaft 406 passes through the first disc 301 and is rotatably connected to the first disc 301. A second cone pulley 405 is provided at the bottom end of the hollow shaft 406. The first cone pulley 404 meshes with the second cone pulley 405. Multiple groups of strip-shaped openings 407 are provided on the hollow shaft 406. Multiple groups of material hooks 408 are provided on the outer side wall of the hollow shaft 406. The number of strip-shaped openings 407 is the same as that of the material hooks 408. A locking component is slidably arranged inside the hollow shaft 406. The top end of the locking component is rotatably connected to the bottom end of the second disc 304; The locking assembly includes a tension spring 501, a pull rod 502, a pressing plate 503 and a round hole 504. The tension spring 501 is installed at the inner bottom end of the hollow shaft 406. The top end of the tension spring 501 is connected to the bottom end of the pull rod 502. The outer side wall of the pull rod 502 contacts the inner side wall of the hollow shaft 406. The top end of the pull rod 502 is rotatably connected to the bottom end of the second disc 304. Multiple groups of pressing plates 503 are arranged on the pull rod 502. Each group of pressing plates 503 respectively passes through a group of strip-shaped openings 407. Each group of pressing plates 503 is respectively provided with a group of round holes 504, and the round holes 504 are adapted to the material hooks 408.

[0021] In this embodiment, when the hoisting assembly hoists the lifting lug 305, the second disc 304 drives the locking assembly to rise, so that the locking assembly releases the locking of the material hook 408. Then the workpiece is hung on the material hook 408. When the inserting rod 302 is inserted into the square groove 203 and the locking assembly in the hollow shaft 406 moves downward, the material hook 408 is locked to prevent the workpiece from falling during the rotation process. Multiple groups of rollers 403 are in rolling friction contact with the top end of the first bottom plate 105. The sealing door 104 seals the evaporation coating machine main body 101, so that multiple groups of workpieces enter the inside of the evaporation coating machine main body 101. The reduction motor 201 is started, so that the first disc 301 rotates, and further the rollers 403 rotate adaptively. The rollers 403 drive the first cone pulley 404 to rotate through the rotating shaft 402. Since the first cone pulley 404 meshes with the second cone pulley 405, the second cone pulley 405 drives the hollow shaft 406 to rotate. The hollow shaft 406 drives the workpiece to rotate by multiple groups of material hooks 408, realizing the rotation of the workpiece while revolving, so as to perform the coating operation on multiple groups of workpieces.

[0022] Embodiment 2 On the basis of Embodiment 1, as Figures 1 to 11 shown, for the evaporation coating machine of the deep ultraviolet film of the present invention, the locking assembly includes a tension spring 501, a pull rod 502, a pressing plate 503 and a round hole 504. The tension spring 501 is installed at the inner bottom end of the hollow shaft 406. The top end of the tension spring 501 is connected to the bottom end of the pull rod 502. The outer side wall of the pull rod 502 contacts the inner side wall of the hollow shaft 406. The top end of the pull rod 502 is rotatably connected to the bottom end of the second disc 304. Multiple groups of pressing plates 503 are arranged on the pull rod 502. Each group of pressing plates 503 respectively passes through a group of strip-shaped openings 407. Each group of pressing plates 503 is respectively provided with a group of round holes 504, and the round holes 504 are adapted to the material hooks 408; It further includes a ring 601, a first lead screw 602, a first nut 603 and an anti-slip pad 604. Two through holes are provided on the first bottom plate 105. Two first lead screws 602 are provided at the bottom end of the ring 601. Each group of first lead screws 602 respectively passes through a through hole and is threadedly connected to the first nut 603. An anti-slip pad 604 is provided at the top end of the ring 601; It further includes a U-shaped clamping plate 701, a shaft pin 702, a second lead screw 703 and a second nut 704. The U-shaped clamping plate 701 is arranged on the sealing door 104. The second lead screw 703 is hinged to the evaporation coating machine main body 101 in cooperation with the shaft pin 702. The second lead screw 703 is in threaded connection with the second nut 704; It further includes a handle 107, an observation window 108 and adjustable feet 109. The handle 107 is installed on the sealing door 104. The observation window 108 is arranged on the sealing door 104. Multiple groups of adjustable feet 109 are arranged at the bottom end of the evaporation coating machine main body 101.

[0023] In this embodiment, the first lead screw 602 passes through the through hole and is in threaded connection with the first nut 603 to complete the fixation of the ring 601. The roller 403 is in friction rolling contact with the anti-slip pad 604. When the reduction motor 201 drives the first disc 301 to rotate, the roller 403 rolls in cooperation with the anti-slip pad 604 to prevent slipping. After using for a period of time, the anti-slip pad 604 can be replaced. When the hoisting assembly hoists the first bottom plate 105, the first disc 301 moves downward under the action of its own gravity, so that the hollow shaft 406 moves downward relative to the pull rod 502. At the same time, the material hook 408 moves away from the corresponding round hole 504. Then the workpiece is hung on the material hook 408, and the insertion rod 302 is inserted into the square groove 203. Multiple groups of rollers 403 are in rolling friction contact with the top end of the first bottom plate 105. The pull rod 502 drives the pressing plate 503 to move downward inside the strip-shaped opening 407 under the pulling force of the tension spring 501, so that the material hook 408 is inserted into the corresponding round hole 504. The roller 403 cooperates with the material hook 408 to lock the workpiece. During hoisting, the telescopic limit rod 303 limits the distance between the first disc 301 and the second disc 304. When the sealing door 104 seals the evaporation coating machine main body 101, the second lead screw 703 enters the inside of the U-shaped clamping plate 701 in cooperation with the shaft pin 702, and the second nut 704 is rotated, so that one end of the second nut 704 presses against one end of the U-shaped clamping plate 701, thus completing the locking of the sealing door 104.

[0024] The main functions achieved by the present invention are: when loading the workpiece, the material hook 408 is separated from the pressing plate 503 by using the self-gravity of the first disc 301. After hanging is completed, the material hook 408 is inserted into the round hole 504 again to complete the locking by using the gravity of the second disc 304. At the same time, the weights of the first disc 301, the second disc 304 and the workpiece cause the roller 403 to be in friction rolling contact with the anti-slip pad 604, so as to realize the rotation of the workpiece while revolving, and improve the coating uniformity.

[0025] The evaporation coating machine for the deep ultraviolet film of the present invention has a common mechanical installation method, connection method or setting method, and any implementation that can achieve its beneficial effects can be carried out; for the evaporation coating machine for the deep ultraviolet film of the present invention, when the insertion rod 302 is inserted into the square groove 203, there is extra space between the bottom end of the insertion rod 302 and the inner bottom end of the square groove, mainly to increase the friction between multiple groups of rollers and the anti-slip pad 604. The evaporation coating machine main body 101 and the reduction motor 201 are purchased on the market. Those skilled in the art only need to install and operate according to the attached operation manual, without the need for those skilled in the art to make creative efforts.

[0026] The above are only the preferred embodiments of the present invention. It should be noted that for those of ordinary skill in the art in the technical field, without departing from the technical principle of the present invention, several improvements and modifications can be made, and these improvements and modifications should also be regarded as the protection scope of the present invention.

Claims

1. An evaporation coating machine for deep ultraviolet films, comprising an evaporation coating machine main body (101), a first top plate (102), a sealing door (104), a first bottom plate (105) and universal wheels (106). A first top plate (102) is provided at the top of the evaporation coating machine main body (101). The evaporation coating machine main body (101) is hinged to the sealing door (104). A first bottom plate (105) is provided at the bottom of the sealing door (104). Multiple groups of universal wheels (106) are provided at the bottom of the first bottom plate (105), and its characteristics are that, It also includes a driving component and a rack component. A driving component is installed on the first base plate (105), and a rack component is placed on the first base plate (105). The driving component is used for the rotation of the rack component.

2. The evaporation coating machine for deep ultraviolet films according to claim 1, wherein, The driving component includes a reduction motor (201), a rotating shaft (202) and a square groove (203). The reduction motor (201) is installed at the bottom end of the first base plate (105). A rotating shaft (202) is provided at the output end of the reduction motor (201). The top end of the rotating shaft (202) extends above the first base plate (105), and a square groove (203) is provided at the top end of the rotating shaft (202).

3. The evaporation coating machine for deep ultraviolet films according to claim 2, characterized in that, The rack component includes a first disc (301), a plug rod (302), a telescopic limiting rod (303), a second disc (304), a lifting lug (305) and a hanging rod assembly. A plug rod (302) is provided at the bottom end of the first disc (301). The plug rod (302) is adapted to the square groove (203). A telescopic limiting rod (303) is provided at the top end of the first disc (301). The top end of the telescopic limiting rod (303) is connected to the bottom end of the second disc (304). A lifting lug (305) is installed at the top end of the second disc (304). A plurality of hanging component sets are rotatably arranged between the first disc (301) and the second disc (304), and the plurality of hanging component sets are distributed in a circular array.

4. The evaporation coating machine for deep ultraviolet films according to claim 3, characterized in that, The hanging component set includes a bracket (401), a rotating shaft (402), a roller (403), a first cone pulley (404), a second cone pulley (405), a hollow shaft (406), a strip-shaped opening (407), a material hook (408) and a locking component. A bracket (401) is provided at the bottom end of the first disc (301). A rotating shaft (402) is rotatably arranged on the bracket (401). A roller (403) is fixedly installed on the rotating shaft (402). A first cone pulley (404) is provided at one end of the rotating shaft (402). The hollow shaft (406) passes through the first disc (301) and is rotatably connected to the first disc (301). A second cone pulley (405) is provided at the bottom end of the hollow shaft (406). The first cone pulley (404) is engaged with the second cone pulley (405). A plurality of strip-shaped openings (407) are provided on the hollow shaft (406). A plurality of material hooks (408) are provided on the outer side wall of the hollow shaft (406). The number of strip-shaped openings (407) is the same as that of the material hooks (408). A locking component is slidably arranged inside the hollow shaft (406), and the top end of the locking component is rotatably connected to the bottom end of the second disc (304).

5. The evaporation coating machine for deep ultraviolet films according to claim 4, characterized in that, The locking component includes a tension spring (501), a pull rod (502), a pressing plate (503) and a round hole (504). The tension spring (501) is installed at the inner bottom end of the hollow shaft (406). The top end of the tension spring (501) is connected to the bottom end of the pull rod (502). The outer side wall of the pull rod (502) contacts the inner side wall of the hollow shaft (406). The top end of the pull rod (502) is rotatably connected to the bottom end of the second disc (304). Multiple groups of pressing plates (503) are arranged on the pull rod (502). Each group of pressing plates (503) respectively passes through a group of strip-shaped openings (407). Each group of pressing plates (503) is respectively provided with a group of round holes (504). The round holes (504) are adapted to the material hooks (408).

6. The evaporation coating machine for deep ultraviolet films according to claim 1, wherein It further includes a ring (601), a first lead screw (602), a first nut (603) and an anti-slip pad (604). Two groups of through holes are provided on the first bottom plate (105). Two first lead screws (602) are provided at the bottom end of the ring (601). Each group of first lead screws (602) respectively passes through a group of through holes and is threadedly connected to the first nut (603). An anti-slip pad (604) is provided at the top end of the ring (601).

7. The evaporation coating machine for deep ultraviolet films according to claim 1, wherein, It further includes a U-shaped clamping plate (701), a shaft pin (702), a second lead screw (703) and a second nut (704). The U-shaped clamping plate (701) is provided on the sealing door (104). The second lead screw (703) is hinged to the evaporation coating machine main body (101) with the cooperation of the shaft pin (702). The second lead screw (703) is threadedly connected to the second nut (704).

8. The evaporation coating machine for deep ultraviolet films according to claim 1, characterized in that, It further includes a handle (107). The handle (107) is installed on the sealing door (104).

9. The evaporation coating machine for deep ultraviolet films according to claim 1, characterized in that, It further includes an observation window (108). The observation window (108) is provided on the sealing door (104).

10. The evaporation coating machine for deep ultraviolet films according to claim 1, wherein It further includes adjustable feet (109). Multiple groups of adjustable feet (109) are provided at the bottom end of the evaporation coating machine main body (101).

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