Automatic doping device for single crystal furnace

Abstract

The invention relates to an automatic doping device for a single crystal furnace, which is structurally characterized in that a sealing cylinder is detachably mounted on a rack, the rack is communicated with a single crystal furnace cavity, one part of a module fixing plate is fixedly connected with the end part of the sealing cylinder, the other part of the module fixing plate is provided with a module along the length direction, the module is parallel to the sealing cylinder, and a linear electromagnet is mounted on the module; an outer magnet assembly is slidably connected to the sealing cylinder in a sleeving mode, an inner magnet assembly is coaxially arranged in the sealing cylinder, a blending supplementing spoon at the end of the inner magnet assembly is located in the rack, an input module is arranged at the end of the other part of the module fixing plate, a taking and placing module is arranged between the input module and the module, and the input module drives the module to do linear motion through the taking and placing module. Or the input module drives the outer magnet assembly to rotate. The device has the advantages that the structural design is reasonable, linear and rotary motion is controlled by adopting a single motor, the weight and size of the device can be effectively reduced by switching modules and gear transmission through the pick-and-place module, the sealing performance is ensured, and the device can be quickly and conveniently disassembled.

Description

Technical Field

[0001] The present invention relates to an automatic doping device for a single crystal furnace, belonging to the technical field of single crystal furnaces. Background Art

[0002] In the existing single crystal growth industry, including single crystal growth in semiconductors and photovoltaics, there has always been a problem of uneven increase in the resistivity of doped crystal bars. The resistivity of the crystal bar can be controlled by doping with powdered master alloy. However, during the furnace charging process, manual addition of the master alloy cannot accurately control the addition amount, and when pouring the master alloy powder, the powder is prone to fluttering and adhesion, and workers are also at risk of falling and being burned. When the existing doping device performs the doping action under vacuum, it is easy to affect the sealing performance of the cavity, and after the doping action is completed, it needs to be disassembled. The disassembly process requires additional process steps such as restoring normal pressure and evacuation, resulting in a significant extension of the crystal pulling time and affecting production capacity. Summary of the Invention

[0003] The present invention provides an automatic doping device for a single crystal furnace, aiming to overcome the above deficiencies in the existing technology and achieve automatic doping and rapid disassembly and assembly on the premise of ensuring the sealing performance of the cavity. Technical solution of the present invention: An automatic doping device for a single crystal furnace, comprising a frame, a sealing cylinder, a module, a module fixing plate, a linear electromagnet, an external magnet assembly, an internal magnet assembly, an input module, and a picking and placing module. The sealing cylinder is detachably installed on the frame, and the frame communicates with the single crystal furnace cavity. One part of the module fixing plate is fixedly connected to the end of the sealing cylinder, and the other part is equipped with a module along the length direction. The module is parallel to the sealing cylinder. A linear electromagnet is installed on the module. An external magnet assembly is slidably sleeved on the sealing cylinder. An internal magnet assembly is coaxially arranged inside the sealing cylinder. The doping replenishing spoon at the end of the internal magnet assembly is located inside the frame. An input module is provided at the end of the other part of the module fixing plate. A picking and placing module is provided between the input module and the module. The input module drives the module to move linearly through the picking and placing module, or the input module drives the external magnet assembly to rotate. During use, the sealing cylinder is installed on the frame, and the module is installed on the sealing cylinder through the module fixing plate. The module drives the external magnet assembly to move linearly on the sealing cylinder through the linear electromagnet. The external magnet assembly and the internal magnet assembly attract each other to form a magnetic coupling, driving the doping replenishing spoon to extend into the cavity. The input module disconnects from the module through the picking and placing module, then connects to the external magnet assembly and drives it to rotate, simultaneously driving the internal magnet assembly to rotate, and pouring the master alloy in the doping replenishing spoon into the silicon material. After use, the input module rotates the internal magnet assembly back, then connects it to the module through the picking and placing module to achieve the switching between rotational motion and linear motion, and retracts the internal magnet assembly into the sealing cylinder through the input module.

[0004] Preferably, the sealing cylinder is installed on the frame through a quick disassembly and assembly device. The quick disassembly and assembly device includes a sealing cylinder flange, a buckle slider, a buckle spring, and a fixed sleeve. The end of the sealing cylinder is coaxially fixed at the center of the sealing cylinder flange. One side of the sealing cylinder flange is coaxially connected to the step surface of the frame. A number of buckle sliders with buckle springs are evenly arranged along the outer circumference of the sealing cylinder flange. The end of the buckle slider presses against the frame. The fixed sleeve is sleeved outside the sealing cylinder flange, and an L-shaped chute corresponding to the number and position of the buckle sliders is arranged along the inside of the fixed sleeve. In the natural state, the buckle slider is pushed open by the buckle spring. After being installed on the frame, the fixed sleeve tightly connects the buckle slider and the frame through the internal L-shaped chute. When disassembling, the fixed sleeve can be unscrewed to achieve quick disassembly and assembly.

[0005] Preferably, the outer magnet assembly includes an external electromagnet, a driven gear cover plate, an outer magnet housing, a housing cover plate, and a rolling bearing. The external electromagnet is installed inside the outer magnet housing. The driven gear cover plate, the outer magnet housing, and the housing cover plate are sequentially fixedly connected by screws. Rolling bearings are respectively arranged between the driven gear cover plate and the outer magnet housing and between the outer magnet housing and the housing cover plate. The external electromagnet cooperates with the linear electromagnet to achieve linear motion and forms a magnetic coupling relationship with the inner magnet of the inner magnet assembly.

[0006] Preferably, the inner magnet assembly includes an inner magnet, a doping supplement spoon, an inner magnet main shaft, a guide sleeve, a guide bearing cover plate, and bearing steel balls. The doping supplement spoon is installed at one end of the inner magnet main shaft. An inner magnet is installed near the other end of the inner magnet main shaft. A pair of guide bearing cover plates are installed at the other end of the inner magnet main shaft. Bearing steel balls are arranged between the two guide bearing cover plates. A guide sleeve is sleeved outside the doping supplement spoon and the inner magnet main shaft, and the guide sleeve is fixed inside the frame. The guide sleeve keeps the inner magnet main shaft always at the center of the sleeve of the frame during the movement process, and the doping supplement spoon can be retracted during recovery. The cooperation between the guide bearing cover plate and the bearing steel balls can achieve the function of a linear bearing.

[0007] Preferably, the input module includes a driving gear, a servo motor, and a push-pull electromagnet. The driving gear is installed at the output end of the servo motor. The push-pull electromagnet is connected to the servo motor and fixed at the end of the other part of the module fixing plate. The pick-and-place module includes a pick-and-place sleeve, a pick-and-place fixing rod, a spring, a pick-and-place collar, and a pick-and-place slider. The pick-and-place fixing rod with its end protruding to the outside is arranged radially inside the pick-and-place sleeve. The spring is installed on the pick-and-place fixing rod. A pick-and-place collar is provided at the center of one side of the pick-and-place sleeve. One end of the pick-and-place slider passes through the pick-and-place collar and extends into the pick-and-place sleeve. The pick-and-place sleeve is connected to the output end of the servo motor, and the other end of the pick-and-place slider is connected to the module. The cooperation between the push-pull electromagnet and the pick-and-place sleeve of the pick-and-place module can realize the switching between the servo motor and the module and the driving of the driving gear, so as to realize the switching between linear motion and rotational motion. In the natural state, the pick-and-place fixing rod is pushed out and opened by the spring and fixed during the process of sleeving the pick-and-place slider, so as to connect the servo motor and the module for linear motion. During the process of further inserting the pick-and-place sleeve, it is separated from the pick-and-place slider, and the servo motor is input into the driving of the driving gear for rotational motion.

[0008] Advantages of the present invention: The structure is reasonably designed. A single motor is used to control linear and rotational motions. By switching between the module and the gear drive through the pick-and-place module, the weight and size of the device can be effectively reduced, and the sealing performance can be ensured, and it can also be quickly and conveniently disassembled. Specifically, the sealing performance of the sealed cavity is ensured by the magnetic drive method. The linear and rotational motions of the outer magnet drive the linear and rotational motions of the central doping spoon. The linear speed and rotational speed controlled by the motor can stably add the master alloy in the doping spoon to the silicon material. The switching between linear and rotational motions is realized through the cooperation between the slider and the fixed ring in the pick-and-place module. The quick disassembly and assembly function is realized through the cooperation between the sleeve and the slider in the quick disassembly and assembly device. Description of the Drawings

[0009] Figure 1 is the structural schematic diagram of the automatic doping device for single crystal furnaces of the present invention.

[0010] Figure 2 is Figure 1 the exploded structural schematic diagram of the outer magnet assembly in.

[0011] Figure 3 is Figure 1 the exploded structural schematic diagram of the input module in.

[0012] Figure 4 is Figure 1 the cross-sectional view of the pick-and-place module in.

[0013] Figure 5 is Figure 1 the exploded structural schematic diagram of the inner magnet assembly in.

[0014] Figure 6 is Figure 1Explosion structure schematic diagram of the quick disassembly and assembly device.

[0015] In the figure, 1 is the frame, 2 is the sealing cylinder, 3 is the quick disassembly and assembly device, 31 is the sealing cylinder flange, 32 is the buckle slider, 33 is the buckle spring, 34 is the fixed sleeve, 4 is the module, 5 is the module fixing plate, 6 is the linear electromagnet, 7 is the outer magnet assembly, 71 is the external electromagnet, 72 is the driven gear cover plate, 73 is the outer magnet housing, 74 is the housing cover plate, 75 is the rolling bearing, 8 is the inner magnet assembly, 81 is the inner magnet, 82 is the doping supplement spoon, 83 is the inner magnet main shaft, 84 is the guide sleeve, 85 is the guide bearing cover plate, 86 is the bearing steel ball, 9 is the input module, 91 is the driving gear, 92 is the servo motor, 93 is the push-pull electromagnet, 10 is the pick-and-place module, 101 is the pick-and-place sleeve, 102 is the pick-and-place fixed rod, 103 is the spring, 104 is the pick-and-place collar, 105 is the pick-and-place slider, A is the first contact surface, B is the second contact surface, C is the third contact surface, 4 is the fourth contact surface. Specific implementation mode

[0016] The present invention will be further described in detail below in conjunction with the embodiments and specific implementation modes.

[0017] As Figure 1 shown, an automatic doping device for a single crystal furnace, its structure includes a frame 1, a sealing cylinder 2, a quick disassembly and assembly device 3, a module 4, a module fixing plate 5, a linear electromagnet 6, an outer magnet assembly 7, an inner magnet assembly 8, an input module 9 and a pick-and-place module 10. Among them, the sealing cylinder 2 is installed on the frame 1 through the quick disassembly and assembly device 3. The frame 1 communicates with the single crystal furnace cavity. One part of the module fixing plate 5 is fixedly connected to the end of the sealing cylinder 2, and the other part is provided with a module 4 along the length direction. The module 4 is parallel to the sealing cylinder 2. A linear electromagnet 6 is installed on the module 4. An outer magnet assembly 7 is slidably sleeved on the sealing cylinder 2. An inner magnet assembly 8 is coaxially arranged in the sealing cylinder 2. The doping supplement spoon 82 at the end of the inner magnet assembly 8 is located in the frame 1. The other part of the end of the module fixing plate 5 is provided with an input module 9. A pick-and-place module 10 is arranged between the input module 9 and the module 4. The input module 9 drives the module 4 to move linearly through the pick-and-place module 10, or the input module 9 drives the outer magnet assembly 7 to rotate.

[0018] During use, the sealing cylinder 2 is installed on the frame 1 through the quick disassembly and assembly device 3, and the module 4 is installed on the sealing cylinder 2 through the module fixing plate 5; the module 4 drives the outer magnet assembly 7 to move linearly on the sealing cylinder 2 through the linear electromagnet 6; the outer magnet assembly 7 attracts the inner magnet assembly 8 to form a magnetic coupling, driving the supplementary doping spoon 82 to extend into the cavity. The input module 9 disconnects from the module 4 through the picking and placing module 10, then connects to the outer magnet assembly 7 and drives it to rotate, while driving the inner magnet assembly 8 to rotate, pouring the master alloy in the supplementary doping spoon 82 into the silicon material. After use, the input module 9 rotates the inner magnet assembly 8 back, then connects it to the module 4 through the picking and placing module 10 to realize the switching between rotational motion and linear motion, and retracts the inner magnet assembly 8 into the sealing cylinder 2 through the input module 9.

[0019] As Figure 6 shown, the quick disassembly and assembly device 3 includes a sealing cylinder flange 31, a buckle slider 32, a buckle spring 33 and a fixed sleeve 34. The end of the sealing cylinder 2 is coaxially fixed at the center of the sealing cylinder flange 31. One side of the sealing cylinder flange 31 is coaxially connected to the step surface of the frame 1. A number of buckle sliders 32 with buckle springs 33 are evenly arranged along the outer circumference of the sealing cylinder flange 31. The end of the buckle slider 32 presses against the frame 1. The fixed sleeve 34 is sleeved outside the sealing cylinder flange 31, and L-shaped chutes corresponding to the number and position of the buckle sliders 32 are arranged along the inside of the fixed sleeve 34.

[0020] In the natural state, the buckle slider 32 is pushed open by the buckle spring 33. After being installed on the frame 1, the fixed sleeve 34 tightly connects the buckle slider 32 to the frame 1 through the internal L-shaped chute. During disassembly, the fixed sleeve 34 can be unscrewed to achieve quick disassembly and assembly.

[0021] As Figure 2 shown, the outer magnet assembly 7 includes an external electromagnet 71, a driven gear cover 72, an outer magnet housing 73, a housing cover 74 and a rolling bearing 75. The external electromagnet 71 is installed inside the outer magnet housing 73. The driven gear cover 72, the outer magnet housing 73 and the housing cover 74 are sequentially fixedly connected by screws. Rolling bearings 75 are respectively arranged between the driven gear cover 72 and the outer magnet housing 73 and between the outer magnet housing 73 and the housing cover 74.

[0022] The external electromagnet 71 cooperates with the linear electromagnet 6 to achieve linear motion and forms a magnetic coupling relationship with the inner magnet 81 of the inner magnet assembly 8.

[0023] As Figure 5As shown in the figure, the inner magnet assembly 8 includes an inner magnet 81, a doping supplement spoon 82, an inner magnet main shaft 83, a guide sleeve 84, a guide bearing cover plate 85, and bearing steel balls 86. The doping supplement spoon 82 is installed at one end of the inner magnet main shaft 83. The inner magnet 81 is installed near the other end of the inner magnet main shaft 83. A pair of guide bearing cover plates 85 are installed at the other end of the inner magnet main shaft 83. Bearing steel balls 86 are arranged between the two guide bearing cover plates 85. The doping supplement spoon 82 and the outer side of the inner magnet main shaft 83 are sleeved with a guide sleeve 84, and the guide sleeve 84 is fixed to the inside of the frame 1.

[0024] The guide sleeve 84 keeps the inner magnet main shaft 83 always at the center of the sleeve of the frame 1 during the movement process, and the doping supplement spoon 82 can be retracted during recovery. The cooperation between the guide bearing cover plate 85 and the bearing steel balls 86 can achieve the function of a linear bearing.

[0025] As Figure 3 shown in the figure, the input module 9 includes a driving gear 91, a servo motor 92, and a push-pull electromagnet 93. The driving gear 91 is installed at the output end of the servo motor 92. The push-pull electromagnet 93 is connected to the servo motor 92, and the push-pull electromagnet 93 is fixed to the other end of the module fixing plate 5.

[0026] The cooperation between the push-pull electromagnet 93 and the pick-and-place sleeve 101 of the pick-and-place module 10 can realize the switching of the transmission between the servo motor 92, the module 4, and the driving gear 91, so as to realize the switching between linear motion and rotational motion.

[0027] As shown in Figure 4, the pick-and-place module 10 includes a pick-and-place sleeve 101, a pick-and-place fixing rod 102, a spring 103, a pick-and-place collar 104, and a pick-and-place slider 105. The pick-and-place fixing rod 102 with an end protruding to the outside is arranged radially inside the pick-and-place sleeve 101. A spring 103 is installed on the pick-and-place fixing rod 102. A pick-and-place collar 104 is arranged at the center of one side of the pick-and-place sleeve 101. One end of the pick-and-place slider 105 passes through the pick-and-place collar 104 and extends into the pick-and-place sleeve 101. The pick-and-place sleeve 101 is connected to the output end of the servo motor 92, and the other end of the pick-and-place slider 105 is connected to the module 4.

[0028] During the specific design, the end cross-section of the pick-and-place slider 105 extending into the pick-and-place sleeve 101 is an isosceles trapezoid with a smaller outer side and a larger inner side. The outer diameter of the part outside the end is smaller than the outer diameter of the end. The plane where the waist of the isosceles trapezoid is located is the first contact surface A. The inner end of the pick-and-place fixing rod 102 is inclined, and the inclination direction is the same as the inclination direction of the waist of the isosceles trapezoid of the end cross-section of the pick-and-place slider 105. The longer side surface of the inner end of the pick-and-place fixing rod 102 is the second contact surface B, and the inclined surface is the third contact surface C. The cross-section of the pick-and-place collar 104 is an isosceles trapezoid that is axisymmetric with the isosceles trapezoid of the end cross-section of the pick-and-place sleeve 101. The plane where the waist of the isosceles trapezoid of the cross-section of the pick-and-place collar 104 is located is the fourth contact surface D.

[0029] In the natural state, the pick-and-place fixing rod 102 is ejected and opened by the spring 103. During the process of being sleeved into the pick-and-place slider 105, it slides in along the first contact surface A and is fixed on the second contact surface B, thereby connecting the servo motor 92 to the module 4 for linear motion. During the process of inserting the pick-and-place sleeve 101, it slides in along the third contact surface C and slides out along the fourth contact surface D during the insertion process, thereby disengaging from the pick-and-place slider 105 and inputting the servo motor 92 into the transmission of the driving gear 91 for rotational motion.

[0030] During specific use, the sealing cylinder 2 is installed on the frame 1 through the quick-disassembly device 3, and the module 4 is installed on the sealing cylinder 2 through the module fixing plate 5. The module 4 is attracted by the linear electromagnet 6 to the external electromagnet 71 in the external magnet assembly 7, driving the external magnet assembly 7 to move linearly on the sealing cylinder 2. The external electromagnet 71 is attracted to the internal magnet 81 in the internal magnet assembly 8 to form a magnetic coupling, driving the doping supplement spoon 82 to extend into the cavity. The input module 9 disconnects the servo motor 92 from the module 4 through the pick-and-place module 10, meshes the driving gear 91 with the gear part on the driven gear cover plate 72, drives the external magnet assembly 7 to rotate through the servo motor 92, and at the same time drives the internal magnet assembly 8 to rotate, pouring the master alloy in the doping supplement spoon 82 into the silicon material. After use, the internal magnet assembly 8 is rotated back by the servo motor 92, and then the servo motor 92 is connected to the module 4 through the pick-and-place module 10 to realize the switching between rotational motion and linear motion, and the internal magnet assembly 8 is retracted into the sealing cylinder 2 by the servo motor 92.

[0031] All the above components are existing technologies, and those skilled in the art can use any models and existing designs that can achieve their corresponding functions.

[0032] The above are only the preferred embodiments of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the creative concept of the present invention, several deformations and improvements can still be made, and these all belong to the protection scope of the present invention.

Claims

1. An automatic doping device for a single crystal furnace, characterized in that, It includes a frame (1), a sealing cylinder (2), a module (4), a module fixing plate (5), a linear electromagnet (6), an outer magnet assembly (7), an inner magnet assembly (8), an input module (9) and a pick-and-place module (10). The sealing cylinder (2) is detachably installed on the frame (1), and the frame (1) communicates with the single crystal furnace cavity. One part of the module fixing plate (5) is fixedly connected to the end of the sealing cylinder (2), and the other part is provided with the module (4) along the length direction. The module (4) is parallel to the sealing cylinder (2). A linear electromagnet (6) is installed on the module (4). An outer magnet assembly (7) is slidably sleeved on the sealing cylinder (2). An inner magnet assembly (8) is coaxially arranged inside the sealing cylinder (2). The doping supplement spoon (82) at the end of the inner magnet assembly (8) is located inside the frame (1). An input module (9) is provided at the end of the other part of the module fixing plate (5). A pick-and-place module (10) is provided between the input module (9) and the module (4). The input module (9) drives the module (4) to move linearly through the pick-and-place module (10), or the input module (9) drives the outer magnet assembly (7) to rotate.

2. The automatic doping device for a single crystal furnace according to claim 1, characterized in that, The sealing cylinder (2) is installed on the frame (1) through a quick disassembly and assembly device (3). The quick disassembly and assembly device (3) includes a sealing cylinder flange (31), a buckle slider (32), a buckle spring (33) and a fixed sleeve (34). The end of the sealing cylinder (2) is coaxially fixed at the center of the sealing cylinder flange (31). One side of the sealing cylinder flange (31) is coaxially connected to the step surface of the frame (1). A plurality of buckle sliders (32) with buckle springs (33) are evenly arranged along the outer circumference of the sealing cylinder flange (31). The end of the buckle slider (32) presses against the frame (1). The fixed sleeve (34) is sleeved on the outside of the sealing cylinder flange (31), and an L-shaped chute corresponding to the number and position of the buckle sliders (32) is arranged along the inside of the fixed sleeve (34).

3. The automatic doping device for a single crystal furnace according to claim 2, wherein The outer magnet assembly (7) includes an external electromagnet (71), a driven gear cover plate (72), an outer magnet housing (73), a housing cover plate (74) and a rolling bearing (75). The external electromagnet (71) is installed inside the outer magnet housing (73). The driven gear cover plate (72), the outer magnet housing (73) and the housing cover plate (74) are sequentially fixedly connected by screws. Rolling bearings (75) are respectively arranged between the driven gear cover plate (72) and the outer magnet housing (73) and between the outer magnet housing (73) and the housing cover plate (74).

4. The automatic doping device for a single crystal furnace according to claim 3, wherein The inner magnet assembly (8) includes an inner magnet (81), a doping supplement spoon (82), an inner magnet main shaft (83), a guide sleeve (84), a guide bearing cover plate (85) and bearing steel balls (86). The doping supplement spoon (82) is installed at one end of the inner magnet main shaft (83). An inner magnet (81) is installed near the other end of the inner magnet main shaft (83). A pair of guide bearing cover plates (85) are installed at the other end of the inner magnet main shaft (83). Bearing steel balls (86) are arranged between the two guide bearing cover plates (85). A guide sleeve (84) is sleeved outside the doping supplement spoon (82) and the inner magnet main shaft (83), and the guide sleeve (84) is fixed to the inside of the frame (1).

5. The automatic doping device for a single crystal furnace according to claim 4, wherein, The input module (9) described above includes a driving gear (91), a servo motor (92), and a push-pull electromagnet (93). The driving gear (91) is installed at the output end of the servo motor (92), and the push-pull electromagnet (93) is connected to the servo motor (92). The push-pull electromagnet (93) is fixed at the end of the other part of the module fixing plate (5); the picking and placing module (10) includes a picking and placing sleeve (101), a picking and placing fixing rod (102), a spring (103), a picking and placing collar (104), and a picking and placing slider (105). The picking and placing fixing rod (102) with its end protruding to the outside is arranged radially inside the picking and placing sleeve (101). The spring (103) is installed on the picking and placing fixing rod (102). The picking and placing collar (104) is provided at the center of one side of the picking and placing sleeve (101). One end of the picking and placing slider (105) passes through the picking and placing collar (104) and extends into the picking and placing sleeve (101). The picking and placing sleeve (101) is connected to the output end of the servo motor (92), and the other end of the picking and placing slider (105) is connected to the module (4).

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