Quartz cylinder filling device

Abstract

The invention provides a quartz cylinder filling device. The quartz cylinder filling device comprises a filling mechanism, a quartz cylinder transfer mechanism and a feeding mechanism. The filling mechanism comprises a rack, a filling part and a rotary driving part, a filling station is arranged below the filling part, and a blanking port is formed in the bottom of the filling part. The quartz cylinder transfer mechanism comprises a walking part and a bearing support, and the bearing support is installed on the walking part and used for fixedly holding a quartz cylinder; the walking part is used for transferring a quartz cylinder to a filling station, and the rotary driving part is used for being in butt joint with the bearing support and driving the bearing support to rotate, so that the quartz cylinder is aligned to a blanking opening of the filling part; the feeding mechanism is used for feeding a silicon material into the filling part, so that the silicon material falls into the quartz cylinder from the blanking opening; the rotary driving part is also used for driving the bearing bracket to rotate in the filling process, so that the quartz cylinder arranges the silicon material. According to the quartz cylinder filling device provided by the invention, automatic filling of the quartz cylinder is realized, so that the filling efficiency is improved, and the crystal growth cost is reduced.

Description

Technical Field

[0001] This application relates to the field of single crystal furnaces, and more specifically to a quartz tube filling device. Background Art

[0002] A quartz tube is a commonly used mechanism for continuously supplying silicon material to a single crystal furnace. Before crystal growth, silicon material needs to be filled into the quartz tube first, and then the quartz tube is transported to the crystal growth furnace. Currently, generally, silicon material is filled into the quartz tube manually. The manual filling method has low production efficiency and increases production costs. Summary of the Invention

[0003] In view of the above problems existing in the traditional quartz tube filling method, this application provides a quartz tube filling device, and its detailed technical solution is as follows:

[0004] A quartz tube filling device includes a filling mechanism, a quartz tube transfer mechanism, and a feeding mechanism, where:

[0005] The filling mechanism includes a frame, a filling part, and a rotation driving part. Among them, the filling part and the rotation driving part are both installed on the frame. A filling station is provided below the filling part, and a material dropping port is provided at the bottom of the filling part;

[0006] The quartz tube transfer mechanism includes a traveling part and a carrying bracket. Among them, the carrying bracket is rotatably installed on the traveling part, and the carrying bracket is used to hold the quartz tube to be filled;

[0007] The traveling part is used to transfer the quartz tube to the filling station. The rotation driving part is used to dock with the carrying bracket and drive the carrying bracket to rotate, so that the quartz tube is aligned with the material dropping port of the filling part in an inclined state;

[0008] The feeding mechanism is used to put silicon material into the filling part, so that the silicon material falls into the quartz tube from the material dropping port; the rotation driving part is also used to drive the carrying bracket to rotate during the filling process, so that the quartz tube switches from an inclined state to an upright state to sort the silicon material.

[0009] Through the cooperation of the filling mechanism, the quartz tube transfer mechanism, and the feeding mechanism, the quartz tube filling device provided by this application realizes automatic filling of the quartz tube, thereby improving the filling efficiency and reducing the crystal growth cost. In addition, during the filling process, the quartz tube can also switch from an inclined state to an upright state to sort the silicon material, thereby improving the filling uniformity.

[0010] In some embodiments, the filling part includes a funnel and a material guiding channel. One end of the material guiding channel is open to form a downwardly inclined material dropping port; the feeding mechanism puts silicon material into the funnel, and the silicon material falls from the funnel into the material guiding channel and then falls into the quartz tube through the material dropping port.

[0011] Through the cooperation of the funnel and the material guiding channel, it can be ensured that the silicon material in the filling part can accurately and evenly fall into the quartz cylinder.

[0012] In some embodiments, at least two funnels are provided, and a material guiding channel is correspondingly provided below each funnel. One end of the material guiding channel closest to the filling station is open to form a material dropping port; two adjacent material guiding channels are communicated. Among them, the bottom of the material guiding channel farther from the filling station is higher than the bottom of the material guiding channel closer to the filling station, and the feeding mechanism puts the silicon material into each funnel; alternatively, among two adjacent funnels, the material dropping port of the material guiding channel corresponding to the funnel farther from the filling station is located above the funnel closer to the filling station, and the silicon material in the funnel farther from the filling station falls into the funnel closer to the filling station through the corresponding material guiding channel, and the feeding mechanism puts the silicon material into the funnel farthest from the filling station.

[0013] By providing multiple funnels and setting the connection mode of the multiple funnels, the silicon material in the multiple funnels all falls into the quartz cylinder through the material dropping port. With such a setting, the storage capacity of the silicon material in the filling part can be increased, and the feeding frequency of the feeding mechanism can be reduced.

[0014] In some embodiments, the filling part further includes a vibration assembly arranged below the material guiding channel, and the vibration assembly is used to drive the material guiding channel to vibrate during the filling process.

[0015] The vibration assembly drives the material guiding channel to vibrate during the filling process, promotes the silicon material to pass through the material guiding channel faster and fall into the quartz cylinder, and prevents the silicon material from being blocked in the material guiding channel.

[0016] In some embodiments, the rotation driving part includes a translation driving member, a rotation driving member and a first rotation docking member. Among them, the rotation driving member is connected to the driving end of the translation driving member, and the first rotation docking member is connected to the driving end of the rotation driving member; a second rotation docking member matching the first rotation docking member is arranged on the bearing bracket; the translation driving member is used to drive the first rotation docking member to translate towards the second rotation docking member so that the first rotation docking member is docked with the second rotation docking member, and the rotation driving member is used to drive the first rotation docking member to rotate to drive the bearing bracket to rotate.

[0017] By setting the rotation driving part to include a translation driving member, a rotation driving member and a first rotation docking member, and arranging a second rotation docking member matching the first rotation docking member on the bearing bracket, the rotation driving part realizes the docking and locking of the bearing bracket and drives the bearing bracket to rotate, and finally adjusts the posture of the quartz cylinder to sort out the filled material blocks.

[0018] In some embodiments, the feeding mechanism includes a robotic arm and a clamping assembly connected to the end of the robotic arm. The robotic arm is configured to drive the clamping assembly to move, so as to drive the clamping assembly to pick up a cassette containing silicon material and to place the silicon material in the cassette into the filling part; the clamping assembly includes a clamping driving member, a first clamping plate and a second clamping plate. Among them, the clamping driving member is connected to the end of the robotic arm, the first clamping plate and the second clamping plate are paired and connected to two driving ends of the clamping driving member, and the clamping driving member is used to drive the first clamping plate and the second clamping plate to clamp and release the cassette.

[0019] A feeding mechanism with a simple structure is provided. It drives the clamping assembly to move through a robotic arm, so as to drive the clamping assembly to pick up a cassette containing silicon material and accurately place the silicon material in the cassette into the filling part.

[0020] In some embodiments, the filling mechanism further includes a guiding part arranged on the frame and located on the side of the filling station. The guiding part includes a blocking member, a translation driving assembly and a clamping member, where: the blocking member is installed on the frame, and when the walking part transports the quartz cylinder to the filling station, the blocking member is used to block the walking part; the translation driving assembly is installed on the frame, the clamping member is connected to the moving part of the translation driving assembly, and when the walking part transports the quartz cylinder to the filling station, the clamping member clamps the walking part; the translation driving assembly is used to push the walking part out of the filling station after the filling is completed.

[0021] By providing the guiding part, it can be ensured that the quartz cylinder can accurately move to the filling station under the drive of the walking part, so as to ensure that the quartz cylinder is aligned with the material dropping port of the filling part. In addition, the guiding part can lock the walking part at the filling station during the filling process to prevent the walking part from accidentally sliding and causing the quartz cylinder to deviate from the material dropping port.

[0022] In some embodiments, the translation driving assembly includes a slide rail, a mounting plate and a driving motor, where: the slide rail is installed on the frame, and a rack is arranged along the extension direction of the slide rail on the side of the slide rail; the mounting plate is slidably connected to the slide rail, the clamping member and the driving motor are both installed on the mounting plate, a gear meshing with the rack is arranged on the driving end of the driving motor, and the driving motor is used to drive the gear to rotate so as to drive the mounting plate to slide along the slide rail.

[0023] A translation driving assembly with a simple structure is provided, which realizes stable driving of the clamping member.

[0024] In some embodiments, the guiding portion further includes a first guiding wheel set and a second guiding wheel set, wherein: the first guiding wheel set is arranged on the frame along the extending direction of the slide rail and is located on the first side of the filling station, the second guiding wheel set is arranged on the frame along the extending direction of the slide rail and is located on the second side of the filling station, and a guiding channel for the traveling portion to pass through is formed between the first guiding wheel set and the second guiding wheel set; after the traveling portion enters the guiding channel, the first guiding wheel set and the second guiding wheel set respectively roll and abut against one side wall of the traveling portion.

[0025] By providing the first guiding wheel set and the second guiding wheel set, the moving guiding of the traveling portion is realized, and the traveling portion is prevented from deviating.

[0026] In some embodiments, the quartz tube filling device further includes a conveying mechanism; the conveying mechanism is configured to convey the material box filled with silicon material towards the feeding mechanism, and the feeding mechanism is used to pick up the material box filled with silicon material from the conveying mechanism; the feeding mechanism is further used to put the empty material box back onto the conveying mechanism after filling, and the conveying mechanism is further configured to convey the empty material box away from the feeding mechanism.

[0027] By providing or setting the conveying mechanism, the automatic feeding of the material box filled with silicon material is realized, so as to ensure that the feeding mechanism can obtain the material box filled with silicon material nearby, thereby improving the filling efficiency. In addition, the conveying mechanism also realizes the automatic discharging of the emptied empty material box.

[0028] In some embodiments, the conveying mechanism includes a first conveying portion, an intermediate conveying portion and a second conveying portion, wherein: the intermediate conveying portion includes a first conveying line and a second conveying line, and the second conveying line is arranged above the first conveying line; the first conveying portion includes a first lifting module and a first transition conveying line, and the first lifting module is used to drive the first transition conveying line to lift, so as to drive the first transition conveying line to be docked with the first conveying line or the second conveying line; the second conveying portion includes a second lifting module and a second transition conveying line, and the second lifting module is used to drive the second transition conveying line to lift, so as to drive the second transition conveying line to be docked with the first conveying line or the second conveying line; the second transition conveying line is used to receive the material box filled with silicon material and convey the material box filled with silicon material to the first conveying line docked with the second transition conveying line, the first conveying line is used to convey the material box filled with silicon material to the first transition conveying line docked with the first conveying line, and the feeding mechanism picks up the material box filled with silicon material from the first transition conveying line; the feeding mechanism places the empty material box onto the first transition conveying line, and the first transition conveying line is used to convey the empty material box back to the second conveying line docked with the first transition conveying line, and the second conveying line is used to convey the empty material box to the second transition conveying line docked with the second conveying line.

[0029] Provided is a conveying mechanism with a simple structure and less floor space. Through the cooperation of the first conveying part, the intermediate conveying part and the second conveying part, it realizes the automatic feeding of the cartridge filled with silicon material and the automatic discharging of the emptied empty cartridge.

[0030] In some embodiments, the conveying mechanism further includes a lid taking component arranged on the firmware component of the first lifting module. The lid taking component includes a translation driving part and a suction part connected to the driving end of the translation driving part; the first lifting module is further configured to drive the first transition conveying line to rise, so that the lid of the cartridge filled with silicon material located on the first transition conveying line is adsorbed by the suction part, and the translation driving part is configured to drive the suction part to translate relative to the cartridge filled with silicon material, so that the lid adsorbed on the suction part is separated from the cartridge; the first lifting module is further configured to drive the first transition conveying line to rise, so that the lid adsorbed on the suction part is covered on the empty cartridge located on the first transition conveying line.

[0031] By providing the lid taking component, the automatic lid taking of the cartridge filled with silicon material is realized, and the automatic lid closing of the returned empty cartridge is realized.

[0032] In some embodiments, there are two sets of conveying mechanisms and two sets of filling mechanisms, where: the feeding mechanism picks up silicon material from one of the two sets of conveying mechanisms and puts the picked-up silicon material into the filling part of one of the two sets of filling mechanisms.

[0033] The two sets of conveying mechanisms convey the cartridges in parallel, and the two sets of filling mechanisms perform the filling operation on the quartz tubes in parallel, greatly improving the filling efficiency of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 is a schematic structural diagram of the quartz tube filling device in the embodiment of the present application;

[0035] Figure 2 is a schematic structural diagram of the filling mechanism and the quartz tube transfer mechanism in the embodiment of the present application;

[0036] Figure 3 is a schematic structural diagram of the filling mechanism in the embodiment of the present application;

[0037] Figure 4 is a schematic diagram of the funnel installation structure in an embodiment of the present application;

[0038] Figure 5 is a schematic diagram of the funnel installation structure in another embodiment of the present application;

[0039] Figure 6 is Figure 3 a partial enlarged structural diagram of area A of

[0040] Figure 7Schematic structural diagram of the quartz tube transfer mechanism in the embodiment of the present application;

[0041] Figure 8 Schematic structural diagram of the quartz tube transfer mechanism and the rotary drive part in the embodiment of the present application;

[0042] Figure 9 For Figure 5 Partial enlarged structural diagram of area B of

[0043] Figure 10 Schematic diagram of the clamping effect of the middle clamping component on the cartridge in the embodiment of the present application;

[0044] Figure 11 Schematic structural diagram of the middle clamping component in the embodiment of the present application;

[0045] Figure 12 Schematic structural diagram of the conveying mechanism in the embodiment of the application;

[0046] Figures 1 to 12 It includes:

[0047] Filling mechanism 1:

[0048] Frame 11

[0049] Filling part 12: Hopper 121, material guiding channel 122, blanking port 123, vibration assembly 124;

[0050] Rotary drive part 13: Translation drive member 131, rotary drive member 132, first rotary docking member 133;

[0052] Guiding part 14: Blocking member 141, translation drive assembly 142, clamping member 143, first guide wheel

[0053] Group 144, second guide wheel group 145;

[0054] Quartz tube transfer mechanism 2:

[0055] Traveling part 21;

[0056] Carrying bracket 22;

[0057] Second rotary docking member 23;

[0058] Loading mechanism 3:

[0059] Robotic arm 31

[0060] Clamping component 32: Clamping drive member 321, first clamping plate 322, second clamping plate 323;

[0061] Conveying mechanism 4:

[0062] The first conveying part 41: the first lifting module 411, the first transition conveying line 412;

[0063] The middle conveying part 42: the first conveying line 421, the second conveying line 422;

[0064] The second conveying part 43: the second lifting module 431, the second transition conveying line 432;

[0065] The lid taking assembly 44: the translation driving part 441, the adsorbing part 442. Detailed implementation manners

[0066] To make the above objects, features, and advantages of the present application more obvious and understandable, the present application will be further described in detail below with reference to the drawings and specific implementation manners.

[0067] Before crystal growth, it is first necessary to fill silicon material into the quartz tube, and then transfer the quartz tube to the crystal growth furnace. At present, generally, silicon material is filled into the quartz tube manually. The manual filling method has low production efficiency and increases production costs.

[0068] To solve the problem of low production efficiency existing in the existing manual filling method, the present application provides a quartz tube filling device to implement automatic filling of the quartz tube.

[0069] As Figures 1 to 3 shown, the quartz tube filling device in the embodiment of the present application includes a filling mechanism 1, a quartz tube transfer mechanism 2, and a feeding mechanism 3, where:

[0070] The filling mechanism 1 includes a frame 11, a filling part 12, and a rotation driving part 13. Among them, the filling part 12 and the rotation driving part 13 are both installed on the frame 11. A filling station is provided below the filling part 12, and a blanking port 123 is provided at the bottom of the filling part 12.

[0071] The quartz tube transfer mechanism 2 includes a traveling part 21 and a carrying bracket 22. Among them, the carrying bracket 22 is rotatably installed on the traveling part 21, and the carrying bracket 22 is used to hold the quartz tube 100 to be filled. The traveling part 21 can be, for example, an AGV cart or a material rack carried by an AGV cart.

[0072] The traveling part 21 is used to transfer the quartz tube 100 to the filling station, and the rotation driving part 13 is used to dock with the carrying bracket 22 and drive the carrying bracket 22 to rotate so that the quartz tube 100 is aligned with the blanking port 123 of the filling part 12 in an inclined state.

[0073] The feeding mechanism 3 is used to put silicon materials into the filling part 12, so that the silicon materials fall into the quartz cylinder 100 from the material dropping opening 123. The rotation driving part 13 is also used to drive the bearing bracket 22 to rotate during the filling process, so that the quartz cylinder 100 switches from the inclined state to the upright state to sort the silicon materials.

[0074] The working process of the quartz cylinder filling device in the embodiment of the present application is as follows:

[0075] First, the quartz cylinder 100 to be filled is fixed to the bearing bracket 22, and the traveling part 21 transports the quartz cylinder 100 to the filling station.

[0076] Next, the rotation driving part 13 docks with the bearing bracket 22 and drives the bearing bracket 22 to rotate, so that the quartz cylinder 100 is aligned with the material dropping opening 123 of the filling part 12 in the inclined state. Alternatively, the bearing bracket 22 has been pre-fixed to the inclined state and does not need to be driven by the rotation driving part 13.

[0077] Subsequently, the feeding mechanism 3 puts the silicon materials into the filling part 12, so that the silicon materials fall into the quartz cylinder 100 from the material dropping opening 123 of the filling part 12. During the filling process, at regular intervals, the rotation driving part 13 drives the bearing bracket 22 to rotate, so that the quartz cylinder 100 switches from the inclined state to the upright state to sort the silicon materials in the quartz cylinder 100.

[0078] It can be seen that through the cooperation of the filling mechanism 1, the quartz cylinder transfer mechanism 2 and the feeding mechanism 3, the quartz cylinder filling device in the embodiment of the present application realizes automatic filling of the quartz cylinder 100, thereby improving the filling efficiency and reducing the crystal growth cost. In addition, during the filling process, the quartz cylinder 100 can also switch from the inclined state to the upright state to sort the silicon materials, thereby improving the uniformity of filling.

[0079] In order to enable the silicon materials to fall into the quartz cylinder 100 at a uniform speed, optionally, the filling part 12 includes a funnel 121 and a material guiding channel 122. One end of the material guiding channel 122 is open to form a downwardly inclined material dropping opening 123. After the feeding mechanism 2 puts the silicon materials into the funnel 21, the silicon materials fall into the material guiding channel 122 from the funnel 21 and fall into the quartz cylinder 100 through the material dropping opening 123.

[0080] In order to increase the storage capacity of the silicon materials in the filling part 12 and reduce the feeding frequency of the feeding mechanism 2, as Figure 4 and Figure 5 shown, optionally, the funnel 121 is provided with at least two (such as the two in Figure 4 and Figure 5 ), and a material guiding channel 122 is correspondingly arranged below each funnel 121. One end of the material guiding channel 122 closest to the filling station is open to form a material dropping opening 123.

[0081] As Figure 4 shown, in an alternative embodiment, two adjacent material guiding channels 122 are connected, wherein the bottom of the material guiding channel 122 farther from the filling station is higher than the bottom of the material guiding channel 122 closer to the filling station. With such a setting, the material guiding channels 122 of the respective funnels 121 are connected in sequence to form a connected silicon material flow channel that slopes gradiently towards the blanking port 123. The feeding mechanism 2 feeds the silicon material into the respective funnels 121, and the silicon material falling from each funnel 121 flows along this silicon material flow channel to the blanking port 123 and falls into the quartz tube 100 through the blanking port 123.

[0082] As Figure 5 shown, in another alternative embodiment, among two adjacent funnels 121, the blanking port of the material guiding channel 122 corresponding to the funnel 121 farther from the filling station is located above the funnel 121 closer to the filling station. In this way, the silicon material in the funnel 121 farther from the filling station can fall into the funnel 121 closer to the filling station through the corresponding material guiding channel 122. With such a setting, the respective funnels 121 are sequentially formed into a silicon material flow channel that slopes gradiently towards the blanking port 123 under the connection of the corresponding material guiding channels 122. The feeding mechanism 2 only needs to feed the silicon material into the funnel 121 farthest from the filling station. After the silicon material flows through the remaining funnels 121, it finally enters the material guiding channel 122 corresponding to the funnel 121 closest to the filling station and falls into the quartz tube 100 through the blanking port 123 of this material guiding channel 122.

[0083] As Figure 4 and Figure 5 shown, optionally, the filling part 12 further includes a vibration assembly 124 disposed below the material guiding channel 122. The vibration assembly 124 is used to drive the material guiding channel 122 to vibrate during the filling process, thereby promoting the silicon material to pass through the material guiding channel 122 more quickly and fall into the quartz tube 100, preventing the silicon material from being blocked in the material guiding channel 122. The vibration assembly 124 can be, for example, a vibration motor.

[0084] As Figures 6 to 9 shown, optionally, the rotation driving part 13 includes a translation driving member 131, a rotation driving member 132, and a first rotation docking member 133. Among them, the rotation driving member 132 is connected to the driving end of the translation driving member 131, and the first rotation docking member 133 is connected to the driving end of the rotation driving member 132. Correspondingly, a second rotation docking member 23 matching the first rotation docking member 133 is disposed on the bearing bracket 22.

[0085] When the traveling part 21 is used to transfer the quartz tube 100 to the filling station, the translation driving member 131 first drives the first rotary docking member 132 to translate towards the second rotary docking member 23, so that the first rotary docking member 133 is docked with the second rotary docking member 23. Then, the rotation driving member 132 is used to drive the first rotary docking member 133 to rotate, thereby driving the bearing bracket 22 to rotate, and finally implementing the rotation adjustment of the quartz tube 100 held on the bearing bracket 22, so that the quartz tube 100 is aligned with the material dropping port 123 of the filling part 12 in an inclined state.

[0086] Similarly, during the filling process, at regular intervals, the rotation driving member 132 drives the bearing bracket 22 to rotate, so that the quartz tube 100 is switched from an inclined state to an upright state to sort the silicon material in the quartz tube 100.

[0087] As Figure 9 shown, optionally, the first rotary docking member 133 includes a locking block provided with a clamping groove thereon. Correspondingly, the second rotary docking member 23 includes a clamping block matching the clamping groove. The translation driving member 131 drives the first rotary docking member 132 to translate towards the second rotary docking member 23, and the clamping block is clamped into the clamping groove, thereby realizing the docking of the first rotary docking member 133 and the second rotary docking member 23. The translation driving member 131 can adopt various existing linear driving modules capable of driving the first rotary docking member 132 to translate, such as a linear driving module composed of a cylinder, a slide rail and a slider. The rotation driving member 132 can adopt various existing rotation driving modules capable of driving the first rotary docking member 133 to rotate, such as a rotation driving motor, etc.

[0088] As Figure 1 shown, the feeding mechanism 3 includes a robotic arm 31 and a clamping assembly 32 connected to the end of the robotic arm 31. The robotic arm 31 is used to drive the clamping assembly 32 to move, so as to drive the clamping assembly 32 to clamp the material box 200 filled with silicon material and put the silicon material in the material box 200 into the filling part 12.

[0089] As Figure 10 and Figure 11 shown, optionally, the clamping assembly 32 includes a clamping driving member 321, a first clamping plate 322 and a second clamping plate 323. Among them, the clamping driving member 321 is connected to the end of the robotic arm 21, and the first clamping plate 322 and the second clamping plate 323 are connected in pairs to the two driving ends of the clamping driving member 321. The clamping driving member 321 is used to drive the first clamping plate 322 and the second clamping plate 323 to clamp and release the material box 200.

[0090] As Figure 6As shown, optionally, the filling mechanism 1 further includes a guide portion 14 disposed on the frame 11 and located at the side of the filling station, and the guide portion 14 includes a blocking member 141, a translation drive assembly 142 and a clamping member 143, wherein: the blocking member 141 is mounted on the frame 11, and when the walking portion 21 transfers the quartz tube 100 to the filling station, the blocking member 141 is used to block the walking portion 21. The translation drive assembly 142 is mounted on the frame 11, and the clamping member 143 is connected to the movable part of the translation drive assembly 142, and when the walking portion 21 transfers the quartz tube 100 to the filling station, the clamping member 143 clamps the walking portion 21.

[0091] It can be seen that, through the cooperation of the blocking member 141 and the clamping member 143, the quartz cylinder 100 can be accurately moved to the filling station under the drive of the walking part 21 and locked at the filling station, thereby ensuring that the quartz cylinder can be aligned with the blanking port of the filling part after rotation, and ensuring that the stone walking part 21 remains fixed during the filling process to prevent the walking part 21 from accidentally sliding and causing the quartz cylinder 100 to deviate from the blanking port.

[0092] After the filling is completed, the blocking member 141 is unblocked, the clamping member 143 keeps clamping the walking part 21, and the translation drive assembly 142 drives the clamping member 143 to translate out of the filling station, thereby pushing the walking part 21 out of the filling station. Finally, the clamping member 143 releases the walking part 21.

[0093] Optionally, the translation drive assembly 142 includes a slide rail, a mounting plate and a drive motor, wherein: the slide rail is mounted on the frame 11, and a rack is provided on the side of the slide rail along the extension direction of the slide rail. The mounting plate is slidably connected to the slide rail, the clamping member 143 and the drive motor are both mounted on the mounting plate, and a gear meshing with the rack is provided on the driving end of the drive motor, and the drive motor is used to drive the gear to rotate, thereby driving the mounting plate to slide along the slide rail. Of course, the translation drive assembly 142 can also adopt a linear drive module with other structures that can drive the clamping member 143 to translate.

[0094] The blocking member 141 can be a blocking cylinder. In the initial state, the telescopic rod of the blocking cylinder is located at the avoidance position, which will not hinder the walking part 21. When the walking part 21 moves to the filling station, the telescopic rod of the blocking cylinder extends toward the walking part 21, thereby blocking the walking part 21.

[0095] Continue to refer Figure 6As shown, optionally, the guiding part 14 further includes a first guiding wheel set 144 and a second guiding wheel set 145, where: the first guiding wheel set 144 is arranged on the rack 11 along the extending direction of the slide rail and is located on the first side of the filling station, and the second guiding wheel set 145 is arranged on the rack 11 along the extending direction of the slide rail and is located on the second side of the filling station. A guiding channel for the traveling part 21 to pass through is formed between the first guiding wheel set 144 and the second guiding wheel set 145. After the traveling part 21 enters the guiding channel, the first guiding wheel set 144 and the second guiding wheel set 145 respectively roll and abut against one side wall of the traveling part 21 to realize the moving guidance of the traveling part 21 and prevent the traveling part 21 from deviating.

[0096] As Figure 1 shown, the quartz tube filling device in the embodiment of the present application further includes a conveying mechanism 4. The conveying mechanism 4 is configured to convey the material box 200 filled with silicon material towards the feeding mechanism 3, and the feeding mechanism 3 is used to pick up the material box 200 filled with silicon material from the conveying mechanism 4. The feeding mechanism 3 is further used to put the empty material box back onto the conveying mechanism 4 after filling is completed, and the conveying mechanism 4 is further configured to convey the empty material box away from the feeding mechanism 3.

[0097] By providing or setting the conveying mechanism 4, the present application realizes the automatic feeding of the material box filled with silicon material, so as to ensure that the feeding mechanism 3 can obtain the material box filled with silicon material nearby and improve the filling efficiency. In addition, the conveying mechanism 4 also realizes the automatic discharging of the emptied empty material box.

[0098] As Figure 12 shown, optionally, the conveying mechanism 4 includes a first conveying part 41, an intermediate conveying part 42 and a second conveying part 43, where:

[0099] The intermediate conveying part 42 includes a first conveying line 421 and a second conveying line 422, and the second conveying line 422 is arranged above the first conveying line 421.

[0100] The first conveying part 41 includes a first lifting module 411 and a first transition conveying line 412, and the first lifting module 411 is used to drive the first transition conveying line 412 to lift so as to drive the first transition conveying line 412 to be docked with the first conveying line 421 or the second conveying line 422.

[0101] The second conveying part 43 includes a second lifting module 431 and a second transition conveying line 432, and the second lifting module 431 is used to drive the second transition conveying line 432 to lift so as to drive the second transition conveying line 432 to be docked with the first conveying line 421 or the second conveying line 422.

[0102] The second transition conveyor line 432 is used to receive the cassettes filled with silicon materials and convey the cassettes filled with silicon materials to the first conveyor line 421 docked with the second transition conveyor line 432. The first conveyor line 421 is used to convey the cassettes filled with silicon materials to the first transition conveyor line 412 docked with the first conveyor line 421. The loading mechanism 3 picks up the cassettes filled with silicon materials from the first transition conveyor line 412.

[0103] The loading mechanism 3 places the empty cassettes onto the first transition conveyor line 412. The first transition conveyor line 412 is used to convey the empty cassettes back to the second conveyor line 422 docked with the first transition conveyor line 412. The second conveyor line 422 is used to convey the empty cassettes to the second transition conveyor line 432 docked with the second conveyor line 422.

[0104] It can be seen that through the cooperation of the first conveying part 41, the intermediate conveying part 42 and the second conveying part 43, the conveying mechanism 4 realizes the automatic loading of the cassettes filled with silicon materials and the automatic unloading of the emptied empty cassettes.

[0105] Since the cassette filled with silicon materials is covered with a cassette cover, in order to ensure that the loading mechanism 3 can pick up the cassette cover after removing the cassette cover and facilitate directly filling the silicon materials into the quartz tube 100, optionally, the conveying mechanism 4 further includes a cover taking component 44 arranged on the fixing component of the first lifting module 411. The cover taking component 44 includes a translation driving part 441 and a suction component 442 connected to the driving end of the translation driving part 441.

[0106] After the cassette filled with silicon materials enters the first transition conveyor line 412 from the first conveyor line 421, the first lifting module 411 is further used to drive the first transition conveyor line 412 to rise, so that the cassette cover of the cassette filled with silicon materials located on the first transition conveyor line 412 is adsorbed by the suction component 442. Then, the first lifting module 411 drives the first transition conveyor line 412 to descend, and the translation driving part 4 drives the suction component 442 to translate relative to the cassette filled with silicon materials, so that the cassette cover is separated from the cassette. Since the suction component 442 can generate an adsorption force on the cassette cover, a suction cup or an electromagnet can be selected for adsorption.

[0107] After the loading mechanism places the empty cassettes onto the first transition conveyor line 412, the first lifting module 411 is further used to drive the first transition conveyor line 412 to rise, so that the cassette cover adsorbed on the suction component 442 is covered on the empty cassettes.

[0108] Optionally, in order to improve the filling efficiency, there are two sets of conveying mechanisms 4, and the filling mechanisms 1 are correspondingly arranged in two sets, where: the loading mechanism 3 picks up silicon materials from one of the two sets of conveying mechanisms 4 and puts the picked-up silicon materials into the filling part 12 of one of the two sets of filling mechanisms 1.

[0109] The above has described the present application in sufficient detail with a certain particularity. Those of ordinary skill in the art should understand that the descriptions in the embodiments are merely exemplary, and all changes made without departing from the true spirit and scope of the present application should fall within the protection scope of the present application. The scope to be protected by the present application is defined by the claims described, rather than by the above descriptions in the embodiments.

Claims

1. A quartz tube packing device, characterized in that, The quartz tube filling device includes a filling mechanism, a quartz tube transfer mechanism, and a feeding mechanism, where: The filling mechanism includes a frame, a filling part, and a rotation driving part. Among them, the filling part and the rotation driving part are both installed on the frame. A filling station is provided below the filling part, and a material dropping port is provided at the bottom of the filling part; The quartz tube transfer mechanism includes a traveling part and a carrying bracket. Among them, the carrying bracket is rotatably installed on the traveling part, and the carrying bracket is used to hold the quartz tube to be filled; The traveling part is used to transfer the quartz tube to the filling station, and the rotation driving part is used to dock with the carrying bracket and drive the carrying bracket to rotate, so that the quartz tube is aligned with the material dropping port of the filling part in an inclined state; The feeding mechanism is used to put silicon material into the filling part, so that the silicon material falls into the quartz tube from the material dropping port; the rotation driving part is also used to drive the carrying bracket to rotate during the filling process, so that the quartz tube is switched from the inclined state to the vertical state to sort the silicon material.

2. The quartz tube packing device according to claim 1, wherein, The filling part includes a funnel and a material guiding channel. One end of the material guiding channel is open to form the downwardly inclined material dropping port; The feeding mechanism puts silicon material into the funnel. The silicon material falls from the funnel into the material guiding channel and then falls into the quartz tube through the material dropping port.

3. The quartz tube filling device according to claim 2, wherein: At least two funnels are provided, and a material guiding channel is correspondingly provided below each funnel. One end of the material guiding channel closest to the filling station is open to form the material dropping port; Two adjacent material guiding channels are communicated. Among them, the bottom of the material guiding channel farther from the filling station is higher than the bottom of the material guiding channel closer to the filling station, and the feeding mechanism puts silicon material into each funnel; or, Among two adjacent funnels, the material dropping port of the material guiding channel corresponding to the funnel farther from the filling station is located above the funnel closer to the filling station, and the silicon material in the funnel farther from the filling station falls into the funnel closer to the filling station through the corresponding material guiding channel, and the feeding mechanism puts silicon material into the funnel farthest from the material dropping port.

4. The quartz cylinder packing device according to claim 2, characterized in that, The filling part further includes a vibration assembly arranged below the material guiding channel, and the vibration assembly is used to drive the material guiding channel to vibrate during the filling process.

5. The quartz tube filling device according to claim 1, wherein: The rotation driving part includes a translation driving part, a rotation driving part, and a first rotation docking part. Among them, the rotation driving part is connected to the driving end of the translation driving part, and the first rotation docking part is connected to the driving end of the rotation driving part; A second rotation docking part matching the first rotation docking part is arranged on the carrying bracket; The translation driving member is used to drive the first rotary docking member to translate towards the second rotary docking member, so that the first rotary docking member is docked with the second rotary docking member, and the rotation driving member is used to drive the first rotary docking member to rotate, so as to drive the carrying bracket to rotate.

6. The quartz cylinder packing device according to claim 1, characterized in that, The loading mechanism includes a robotic arm and a clamping assembly connected to the end of the robotic arm. The robotic arm is used to drive the clamping assembly to move, so as to drive the clamping assembly to pick up a cartridge filled with silicon material, and to put the silicon material in the cartridge into the filling part. The clamping assembly includes a clamping driving member, a first clamping plate and a second clamping plate. Among them, the clamping driving member is connected to the end of the robotic arm, the first clamping plate and the second clamping plate are connected in pairs to the two driving ends of the clamping driving member, and the clamping driving member is used to drive the first clamping plate and the second clamping plate to clamp and release the cartridge.

7. The quartz cylinder packing device according to claim 1, characterized in that, The filling mechanism further includes a guiding part arranged on the frame and located on the side of the filling station. The guiding part includes a blocking member, a translation driving assembly and a clamping member, where: The blocking member is installed on the frame. When the traveling part transports the quartz cylinder to the filling station, the blocking member is used to block the traveling part. The translation driving assembly is installed on the frame, the clamping member is connected to the moving part of the translation driving assembly. When the traveling part transports the quartz cylinder to the filling station, the clamping member clamps the traveling part. The translation driving assembly is used to push the traveling part out of the filling station after the filling is completed.

8. The quartz tube packing device according to claim 7, characterized in that, The translation driving assembly includes a slide rail, a mounting plate and a driving motor, where: The slide rail is installed on the frame, and a rack is arranged along the extension direction of the slide rail on the side of the slide rail. The mounting plate is slidably connected to the slide rail. The clamping member and the driving motor are both installed on the mounting plate. A gear meshing with the rack is arranged on the driving end of the driving motor. The driving motor is used to drive the gear to rotate, so as to drive the mounting plate to slide along the slide rail.

9. The quartz tube packing device according to claim 8, wherein, The guiding part further includes a first guiding wheel set and a second guiding wheel set, where: The first guiding wheel set is arranged on the frame along the extension direction of the slide rail and located on the first side of the filling station, and the second guiding wheel set is arranged on the frame along the extension direction of the slide rail and located on the second side of the filling station. A guiding channel for the traveling part to pass through is formed between the first guiding wheel set and the second guiding wheel set. After the traveling part enters the guiding channel, the first guiding wheel set and the second guiding wheel set respectively roll and abut against one side wall of the traveling part.

10. The quartz tube packing device according to claim 1, characterized in that, The quartz cylinder filling device further includes a conveying mechanism. The conveying mechanism is configured to convey a cartridge filled with silicon material towards the loading mechanism, and the loading mechanism is used to pick up the cartridge filled with silicon material from the conveying mechanism. The loading mechanism is further used to put the empty cartridge back onto the conveying mechanism after the filling is completed, and the conveying mechanism is further configured to convey the empty cartridge away from the loading mechanism.

11. The quartz cylinder packing device according to claim 10, characterized in that, The conveying mechanism includes a first conveying part, an intermediate conveying part, and a second conveying part, where: The intermediate conveying part includes a first conveying line and a second conveying line, and the second conveying line is arranged above the first conveying line; The first conveying part includes a first lifting module and a first transition conveying line, and the first lifting module is used to drive the first transition conveying line to lift, so as to drive the first transition conveying line to dock with the first conveying line or the second conveying line; The second conveying part includes a second lifting module and a second transition conveying line, and the second lifting module is used to drive the second transition conveying line to lift, so as to drive the second transition conveying line to dock with the first conveying line or the second conveying line; The second transition conveying line is used to receive the cassette containing silicon material, and convey the cassette containing silicon material to the first conveying line docked with the second transition conveying line. The first conveying line is used to convey the cassette containing silicon material to the first transition conveying line docked with the first conveying line, and the loading mechanism picks up the cassette containing silicon material from the first transition conveying line; The loading mechanism places the empty cassette on the first transition conveying line, and the first transition conveying line is used to convey the empty cassette back to the second conveying line docked with the first transition conveying line. The second conveying line is used to convey the empty cassette to the second transition conveying line docked with the second conveying line.

12. The quartz tube packing device according to claim 11, wherein The conveying mechanism further includes a lid-taking assembly arranged on the firmware component of the first lifting module. The lid-taking assembly includes a translation driving member and a suction member connected to the driving end of the translation driving member; The first lifting module is further used to drive the first transition conveying line to rise, so that the lid of the cassette containing silicon material located on the first transition conveying line is adsorbed by the suction member. The translation driving member is used to drive the suction member to translate relative to the cassette containing silicon material, so that the lid adsorbed on the suction member is separated from the cassette; The first lifting module is further used to drive the first transition conveying line to rise, so that the lid adsorbed on the suction member is closed on the empty cassette located on the first transition conveying line.

13. The quartz cylinder packing device according to claim 10, characterized in that, There are two sets of the conveying mechanisms and two sets of the filling mechanisms, where: The loading mechanism picks up silicon material from one of the two sets of the conveying mechanisms and puts the picked-up silicon material into the filling part of one of the two sets of the filling mechanisms.

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