Clean type pneumatic control diaphragm valve and valve block

Abstract

The invention relates to the technical field of semiconductor material transmission, in particular to a clean type pneumatic control diaphragm valve and a valve block. The diaphragm valve comprises an electromagnetic valve, a valve terminal assembly and a diaphragm unit. An adsorption pipe interface, a vacuum interface, a compressed air interface, an external environment interface and a plurality of interfaces communicated with the electromagnetic valve are formed in the surface of the valve terminal assembly; a plurality of gas paths communicated with all the connectors are arranged in the valve terminal assembly; the vacuum interface and the external environment interface can be communicated with the adsorption pipe interface through an electromagnetic valve and an air path; a diaphragm unit is arranged in the valve terminal assembly, the vacuum connector, the compressed air connector and the external environment connector are communicated with the diaphragm unit through an electromagnetic valve and an air path, and the diaphragm unit is controlled to cut off or communicate the air path between the vacuum connector and the adsorption pipe connector or cut off or communicate the air path between the external environment connector and the adsorption pipe connector. The diaphragm unit enables grease gasified substances generated by the electromagnetic valve to stay at the front end of an output port of the diaphragm unit, and then clean adsorption and fixation of the materials are achieved.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor material transfer, and particularly to a clean air-controlled diaphragm valve and valve block. Background Art

[0002] The transfer process of precision semiconductor equipment materials (such as wafers, reticles, etc.) requires high precision, high speed and stable performance. Moreover, the internal structure of advanced semiconductor equipment is complex and the space is compact. At the same time, considering cost, cleanliness, presence detection and safety, the vacuum adsorption method is usually adopted to achieve functions such as material fixation, presence detection and particle generation reduction. Therefore, the directional control valve is an indispensable key component.

[0003] Currently, electromagnetic directional control valves are mostly used, but they have the following disadvantages:

[0004] The material is contaminated during the adsorption process: The adsorption and fixation and release of the material are mainly achieved by the commutation of the electromagnetic valve. The electromagnetic valve realizes commutation by the relative movement of the valve body. The valve body is filled with lubricating grease to reduce sliding friction. The movement of the valve body will generate fine particles and grease vaporized substances, so they will adhere to the material adsorption surface during the vacuum adsorption and vacuum release processes, forming adsorption traces, resulting in material contamination and even affecting the normal use of the material;

[0005] The detection of the material state is unreliable: Fine particles will also be generated during the picking and placing of the material. During the vacuum adsorption and vacuum release processes, "impurities" will be sucked back into the valve body of the electromagnetic valve, resulting in the failure of the electromagnetic valve to move and the inability to move in place, and further causing the detection of the material state to be unreliable;

[0006] Single function and lack of transformability: Existing electromagnetic valves generally only have the commutation function. If new air control functions are to be added, or electromagnetic valves with more digits are to be selected, or the number of electromagnetic valves is to be increased, and the valve island base also needs to be redesigned. The product has poor transformability, large volume and low integration. Summary of the Invention

[0007] The present application provides a clean air-controlled diaphragm valve and valve block, which can adsorb, fix and release materials with high cleanliness in a vacuum.

[0008] The clean air-controlled diaphragm valve provided by the present application includes an electromagnetic valve, a valve island assembly and a diaphragm unit;

[0009] The surface of the valve island assembly is provided with an adsorption tube interface, a vacuum interface, a compressed air interface, an external environment interface for connecting an adsorption assembly, and several interfaces communicated with the electromagnetic valve; several gas paths communicating with each interface are arranged inside the valve island assembly; both the vacuum interface and the external environment interface can be communicated with the adsorption tube interface through the electromagnetic valve and the gas paths;

[0010] A diaphragm unit is arranged inside the valve island assembly. The compressed air interface and the external environment interface are respectively communicated with the diaphragm unit through the solenoid valve and the gas path, and the diaphragm unit is controlled to block or communicate the gas path between the vacuum interface and the adsorption tube interface, or block or communicate the gas path between the external environment interface and the adsorption tube interface.

[0011] In a preferred embodiment, the diaphragm unit includes a first diaphragm;

[0012] The compressed air interface and the vacuum interface can be controlled by the solenoid valve, and the external environment interface is communicated with the bottom surface of the first diaphragm;

[0013] During the vacuum adsorption process, the gas path is switched by controlling the solenoid valve, and a pressure P is applied to the top surface of the first diaphragm from the compressed air joint B , P B is greater than the external environment pressure P C , so that the first diaphragm deforms towards the bottom surface and blocks the gas path between the external environment interface and the adsorption tube interface; and the gas path between the vacuum interface and the adsorption tube interface is conducted by controlling the gas path switching of the solenoid valve, realizing the vacuum adsorption action;

[0014] During the vacuum release process, the gas path between the compressed air joint and the first diaphragm is blocked by controlling the gas path switching of the solenoid valve, and the vacuum interface is communicated with the top surface of the first diaphragm. A negative pressure P is applied to the top surface of the first diaphragm through the vacuum interface A , the first diaphragm deforms towards the top surface and opens the gas path at its bottom, so that the gas path between the external environment interface and the adsorption tube interface is conducted, realizing the vacuum release action.

[0015] In a preferred embodiment, the diaphragm unit includes a first diaphragm and a second diaphragm, and a purging interface is arranged on the surface of the valve island assembly;

[0016] The compressed air interface is communicated with the top surface of the second diaphragm, and the purging interface is communicated with the bottom surface of the second diaphragm; the vacuum interface is communicated with the top surface of the first diaphragm, and the external environment interface is communicated with the bottom surface of the first diaphragm;

[0017] During the vacuum release process, a pressure P is applied to the top surface of the second diaphragm through the compressed air interface B , and a pressure P is applied to the bottom surface of the second diaphragm through the purging interface E , and P B > P E, the second diaphragm deforms towards the bottom surface to block the air passage at its bottom; a negative pressure P is applied to the top surface of the first diaphragm through the vacuum interface. A , the first diaphragm deforms towards the top surface to open the air passage at its bottom, and the air path between the external environment interface and the adsorption tube interface is conducted, realizing the vacuum release action.

[0018] In a preferred embodiment, the diaphragm unit includes a first diaphragm and a second diaphragm, and a purge interface is provided on the surface of the valve island assembly;

[0019] The vacuum interface is communicated with the top surface of the second diaphragm, and the purge interface is communicated with the bottom surface of the second diaphragm; the compressed air interface is communicated with the top surface of the first diaphragm, and the external environment interface is communicated with the bottom surface of the first diaphragm;

[0020] During the purging process, a pressure P is applied to the top surface of the first diaphragm through the compressed air interface B , P B is greater than the external environmental pressure P C , so that the first diaphragm deforms towards the bottom surface and blocks the air path between the external environment interface and the adsorption tube interface; a negative pressure P is applied to the top surface of the second diaphragm through the vacuum interface A , a pressure P is applied to the bottom surface of the second diaphragm through the purge interface E , the second diaphragm deforms towards the top surface to open the air passage at its bottom, and the air path between the purge interface and the adsorption tube interface is conducted, realizing the purging action.

[0021] In a preferred embodiment, a particle extraction interface is further provided on the surface of the valve island assembly, and the particle extraction interface is communicated with the exhaust port of the solenoid valve through an air path.

[0022] In a preferred embodiment, the clean pneumatic diaphragm valve further includes a filter, the inlet end of the filter is used to input external normal pressure air, and the outlet end of the filter is connected to the external environment interface.

[0023] In a preferred embodiment, the clean pneumatic diaphragm valve further includes a detection element, and the detection end of the detection element is communicated with the adsorption tube interface through an air path.

[0024] In a preferred embodiment, the valve island assembly includes a first fixing member, a second fixing member and a third fixing member stacked in sequence;

[0025] The first fixing member is used to connect with the solenoid valve, and the adsorption tube interface, the vacuum interface, the compressed air interface and the external environment interface are all arranged on the third fixing member;

[0026] The diaphragm unit is arranged between the first fixing member and the second fixing member;

[0027] Sealing rings are respectively arranged between the first fixing member and the second fixing member, and at the gas path connection of the second fixing member and the third fixing member.

[0028] In a preferred embodiment, the solenoid valve is a double-electromagnetic-control electromagnetic reversing valve.

[0029] This application also provides a valve block, which includes a plurality of the described clean air-controlled diaphragm valves arranged in parallel.

[0030] This application has the following beneficial effects:

[0031] In this application, a diaphragm unit is arranged inside the valve island assembly to cut off / open the gas path between the solenoid valve and the material adsorption area, so that the grease gasification products generated by the solenoid valve stay at the front end of the output port of the diaphragm unit and cannot enter the area near the adsorption assembly, thereby realizing clean adsorption and fixation of the material. Description of the Drawings

[0032] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention, and therefore should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other relevant drawings can also be obtained based on these drawings.

[0033] Figure 1 It is a longitudinal cross-sectional schematic diagram of the first clean air-controlled diaphragm valve provided by the embodiment of this application;

[0034] Figure 2 It is a schematic diagram of the working principle of the first clean air-controlled diaphragm valve provided by the embodiment of this application in the vacuum adsorption state;

[0035] Figure 3 It is a schematic diagram of the working principle of the first clean air-controlled diaphragm valve provided by the embodiment of this application in the vacuum release state;

[0036] Figure 4 It is a longitudinal cross-sectional schematic diagram of the second clean air-controlled diaphragm valve provided by the embodiment of this application;

[0037] Figure 5 It is a schematic diagram of the working principle of the second clean air-controlled diaphragm valve provided by the embodiment of this application;

[0038] Figure 6 It is a flowchart of the process of selecting and determining the diaphragm material;

[0039] Figure 7It is a schematic structural diagram of a valve block provided by an embodiment of the present application;

[0040] Reference numerals in the figure:

[0041] 1 - Solenoid valve; 2 - Valve island assembly; 21 - First fixing member; 22 - First sealing ring; 23 - Spherical plug; 24 - Second fixing member; 25 - Third fixing member; 3 - Adsorption tube interface; 4 - Diaphragm unit; 41 - Plug; 42 - First diaphragm; 43 - Second diaphragm; 5 - Detection element; 6 - Second sealing ring; 7 - Filter; 8 - Adsorption assembly; A - Vacuum interface; B - Compressed air interface; C - External environment interface; D - Particle exhaust interface; E - Purge interface. Specific embodiments

[0042] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. Components of the embodiments of the present invention usually described and labeled in the accompanying drawings can be arranged and designed in various different configurations.

[0043] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed present invention, but merely represents selected embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts fall within the scope of protection of the present invention.

[0044] It should be noted that similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0045] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of the present invention is usually placed during use. It is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be construed as a limitation of the present invention. In addition, the terms "first", "second", "third", etc. are only used for descriptive distinction and cannot be construed as indicating or implying relative importance.

[0046] In addition, the terms "horizontal", "vertical", "overhanging" and the like do not mean that the components are required to be absolutely horizontal or overhanging, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0047] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0048] Some embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0049] The structure and working principle of the first clean air-controlled diaphragm valve provided in the embodiment of the present application are as follows: Figures 1 to 3 shown.

[0050] The diaphragm valve comprises a solenoid valve 1, a valve island assembly 2 and a diaphragm unit 4; the valve island assembly 2 comprises a first fixing member 21, a second fixing member 24 and a third fixing member 25 which are stacked in sequence;

[0051] The first fixing member 21 is used to connect with the solenoid valve 1; the surface of the third fixing member 25 is provided with an adsorption tube interface 3, a vacuum interface A, a compressed air interface B and an external environment interface C; a diaphragm unit 4 is provided between the first fixing member 21 and the second fixing member 24. Several gas paths are provided inside the valve island assembly 2, and a part of the gas paths are connected to various interfaces and the solenoid valve 1 via the diaphragm unit 4.

[0052] The diaphragm unit 4 includes a plug 41 and a first diaphragm 42, wherein the plug 41 blocks the gas flow, and the first diaphragm 42 cuts off / opens the gas path between the solenoid valve 1 and the material adsorption area, thereby blocking pollutants from entering the material adsorption area and achieving clean adsorption of fixed materials.

[0053] The vacuum connector A and the compressed air connector B can be controlled by the air circuit of the solenoid valve 1, and are independently connected to the top surface of the first diaphragm 42, and the external environment connector C is connected to the bottom surface of the first diaphragm 42. The plug 41 blocks some unused air circuits in the valve island assembly 2.

[0054] During the vacuum adsorption process, the electromagnetic valve 1 controls the air circuit switching, and the pressure P is applied from the compressed air connector B to the top surface of the first diaphragm 42.B , P B Greater than the external environment pressure P C , so that the first diaphragm 42 is deformed toward the bottom surface and blocks the gas path between the external environment interface C and the adsorption tube interface 3, preventing the external environment gas from entering the material adsorption area; and the gas path switching is controlled by the solenoid valve 1, and the gas path between the vacuum interface A and the adsorption tube interface 3 is connected, and the vacuum interface A applies a negative pressure P to the material adsorption surface. A , to achieve vacuum adsorption action.

[0055] During the vacuum release process, the solenoid valve 1 controls the air path switching, blocks the air path between the compressed air connector B and the first diaphragm 42, and connects the vacuum interface A to the top surface of the first diaphragm 42, and applies negative pressure P to the top surface of the first diaphragm 42 through the vacuum interface A. A The first diaphragm 42 deforms toward the top surface and opens the air path at its bottom, so that the air path between the external environment interface C and the adsorption tube interface 3 is connected, and the negative pressure P acting on the material adsorption surface A Disappears, achieving vacuum release action.

[0056] Therefore, during the entire vacuum adsorption and vacuum release process, the grease vaporization inside the solenoid valve 1 stays at the front end of the diaphragm unit output port and cannot enter the adsorption component attachment area, that is, it will not contact the material, thus maintaining good cleanliness.

[0057] Preferably, a particle extraction interface D is also provided on the surface of the third fixing member 25, and the particle extraction interface D is connected to the exhaust port of the solenoid valve 1 through an air path. During the vacuum adsorption or vacuum release process, the extraction action of the air path in the solenoid valve 1 is maintained, so that the fine particles generated in the diaphragm valve can be discharged, so that the diaphragm valve has better cleanliness when adsorbing and fixing materials.

[0058] Preferably, a filter 7 is further provided, the inlet end of the filter 7 is used to input external normal pressure air, and the outlet end of the filter 7 is connected to the external environment interface C. The filter 7 can filter the air entering the valve island assembly 2, thereby improving the cleanliness of the adsorption area.

[0059] Preferably, it further comprises a detection element 5, the detection end of the detection element 5 is connected to the adsorption tube interface 3 through a gas path. The detection element 5 generally comprises a vacuum detection sensor, a flow meter, etc., and its main function is to detect and quantify gas control parameters.

[0060] Preferably, a sealing ring 6 is provided between the first fixing member 21 and the second fixing member 24, and at the gas path connection between the second fixing member 24 and the third fixing member 25. The sealing ring 6 is usually a rubber product, and its main function is to prevent gas leakage.

[0061] Preferably, the solenoid valve 1 uses a double-electrically controlled solenoid reversing valve, which can reduce the heating of the solenoid valve when it is powered on, and the double-electrically controlled indicator light can realize the visualization of vacuum adsorption and vacuum release.

[0062] Preferably, the adsorption tube interface 3 is connected to the adsorption component 8. The adsorption component 8 usually adopts 3-4 adsorption areas and is arranged symmetrically. The material in contact with the material is required to have anti-static, non-metallic and clean characteristics.

[0063] The present application also provides a second clean air-controlled diaphragm valve, the structure and working principle of which are as follows: Figure 4 and Figure 5 shown.

[0064] In this embodiment, the basic composition of the second clean air-controlled diaphragm valve is substantially the same as that of the first clean air-controlled diaphragm valve, both of which include a solenoid valve 1, a valve island assembly 2 and a diaphragm unit 4, and the valve island assembly 2 includes a first fixing member 21, a second fixing member 24 and a third fixing member 25 stacked in sequence.

[0065] The difference is that the diaphragm unit 4 of the second clean air-controlled diaphragm valve includes a first diaphragm 42 , and a second diaphragm 43 is used to replace the plug 41 , and a purge interface E is also provided on the surface of the valve island assembly 2 .

[0066] During the vacuum release process, through the control of the solenoid valve 1, the compressed air interface B is connected to the top surface of the second diaphragm 43, and the purge interface E is connected to the bottom surface of the second diaphragm 43; the vacuum interface A is connected to the top surface of the first diaphragm 42, and the external environment interface C is connected to the bottom surface of the first diaphragm 42.

[0067] A pressure P is applied to the top surface of the second diaphragm 43 through the compressed air interface B. B , a pressure P is applied to the bottom surface of the second diaphragm 43 through the purge interface E. E , and P B >P E The second diaphragm 43 deforms toward the bottom surface to block the air passage at the bottom; a negative pressure P is applied to the top surface of the first diaphragm 42 through the vacuum interface A. A The first diaphragm 42 is deformed toward the top surface to open the air passage at the bottom thereof, and the air passage between the external environment interface C and the adsorption tube interface 3 is connected, thereby realizing the vacuum release action.

[0068] During the purging process, the vacuum interface A is connected to the top surface of the second diaphragm 43, and the purging interface E is connected to the bottom surface of the second diaphragm 43; the compressed air interface B is connected to the top surface of the first diaphragm 42, and the external environment interface C is connected to the bottom surface of the first diaphragm 42;

[0069] A pressure P is applied to the top surface of the first diaphragm 42 through the compressed air interface B. B , P BGreater than the external environmental pressure P C , so that the first diaphragm 42 deforms towards the bottom surface and blocks the gas path between the external environmental interface C and the adsorption tube interface 3; a negative pressure P is applied to the top surface of the second diaphragm 43 through the vacuum interface A A , and a pressure P is applied to the bottom surface of the second diaphragm 43 through the purge interface E E . The second diaphragm 43 deforms towards the top surface to open the air passage at its bottom, making the gas path between the purge interface E and the adsorption tube interface 3 conductive, thus realizing the purge action.

[0070] The purge function is independent of the vacuum adsorption / release function. When this function is not used, a spiral plug can be used to block the port E to prevent air leakage.

[0071] This solution can not only prevent "impurities" from being inhaled back into the valve body, but also realize the directional purge function of the adsorption area, greatly improving the reliability of the entire pneumatic control system and ensuring the accuracy and reliability of material state detection.

[0072] In this embodiment, a valve block is also provided, as Figure 6 shown, which includes a plurality of the above-mentioned clean pneumatic control diaphragm valves arranged in parallel.

[0073] On the premise that the design scheme remains unchanged, three function switches of no diaphragm, single diaphragm and double diaphragm can be realized by replacing the diaphragm unit. The single diaphragm valve can improve the cleanliness level of material adsorption, and the double diaphragm valve can also expand other functions, such as the adsorption surface purge function, while the purge function can greatly improve the reliability of material state detection. Therefore, this diaphragm valve has the characteristics of diverse functions and strong transformability, effectively improving the design efficiency and product flexibility.

[0074] The diaphragm valve provided in the embodiment of the present application integrates gas confluence, commutation, detection, oil mist control, particle extraction and pneumatic control interfaces. When required by the design, a control board and vibration isolation pads can also be integrated. The high integration helps to improve the product stability and modular design, and improve the aesthetics of product piping and wiring, etc.

[0075] In addition, since the material of the diaphragm directly affects the response time of the pneumatic control diaphragm valve, too large diaphragm rigidity will cause gas leakage, and too small diaphragm rigidity will lead to an extended response time. Even after the material is adsorbed for a long time, the first vacuum release may fail, seriously threatening the material safety. Therefore, a reasonable diaphragm material is the key to ensuring the performance of the pneumatic control diaphragm valve.

[0076] The diaphragm material determination process is as Figure 7 shown, and specifically includes the following steps:

[0077] (1) Design a 3D model according to the functional requirements and performance indicators;

[0078] (2) Using finite element simulation to determine the material properties of the diaphragm, such as hardness, density, deformation, cycle life, etc., the simulation result judgment standard is whether the diaphragm valve response time error is ≤5%, that is, (|t-t0| / t0)*100%≤5%, where t represents the response time of the air-controlled diaphragm valve, and t0 represents the response time of the selected solenoid valve;

[0079] (3) Preliminary selection of materials based on simulation results. The diaphragm material is required to be non-metallic and have anti-static and good cleanliness properties;

[0080] (4) The test verification requires given input conditions. First, verify whether the response time of vacuum adsorption and vacuum release of the material meets the standard. Second, verify whether the response time of the first vacuum release after long-term vacuum adsorption (such as ≥8 hours) meets the standard. The judgment standard for both is whether the error of the diaphragm valve response time is ≤10%, that is, (|t-t0| / t0)*100%≤10%;

[0081] (5) After selecting the material, the reliability test of the air-controlled diaphragm valve is required. When the life times N of the air-controlled diaphragm valve is ≥ 95% N0, the reliability test is considered to have met the standard. Otherwise, the material needs to be reselected, where N represents the service life of the air-controlled diaphragm valve and N0 represents the service life of the solenoid valve.

[0082] (6) Finally, a diaphragm material database is established to provide data support for subsequent product iterations and upgrades.

[0083] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A clean air-controlled diaphragm valve, characterized in that, It includes a solenoid valve, a valve island assembly and a diaphragm unit; On the surface of the valve island assembly, there are adsorption tube interfaces, vacuum interfaces, compressed air interfaces, external environment interfaces for connecting the adsorption assembly, and several interfaces communicating with the solenoid valve; inside the valve island assembly, there are several gas paths connecting each interface; both the vacuum interface and the external environment interface can be connected to the adsorption tube interface through the solenoid valve and the gas path; A diaphragm unit is arranged inside the valve island assembly. The compressed air interface and the external environment interface are respectively connected to the diaphragm unit through the solenoid valve and the gas path to control the diaphragm unit to block or connect the gas path between the vacuum interface and the adsorption tube interface, or block or connect the gas path between the external environment interface and the adsorption tube interface.

2. The clean air-controlled diaphragm valve according to claim 1, wherein The diaphragm unit includes a first diaphragm; The compressed air interface and the vacuum interface can be independently connected to the top surface of the first diaphragm through the control of the solenoid valve, and the external environment interface is connected to the bottom surface of the first diaphragm; During the vacuum adsorption process, the solenoid valve is used to control the air path switching, and pressure P is applied to the top surface of the first diaphragm from the compressed air connector. B , P B is greater than the external environmental pressure P C , so that the first diaphragm deforms towards the bottom surface and blocks the air path between the external environmental interface and the adsorption tube interface; and the solenoid valve is used to control the air path switching, and the air path between the vacuum interface and the adsorption tube interface is conducted to realize the vacuum adsorption action; During the vacuum release process, the solenoid valve is used to control the air circuit switching, the air circuit between the compressed air joint and the first diaphragm is blocked, and the vacuum interface is connected to the top surface of the first diaphragm, and a negative pressure P is applied to the top surface of the first diaphragm through the vacuum interface. A The first diaphragm is deformed toward the top surface and opens the air path at its bottom, so that the air path between the external environment interface and the adsorption tube interface is connected, thereby realizing the vacuum release action.

3. The clean air-controlled diaphragm valve according to claim 1, characterized in that, The diaphragm unit includes a first diaphragm and a second diaphragm, and a purge interface is arranged on the surface of the valve island assembly; The compressed air interface is connected to the top surface of the second diaphragm, and the purge interface is connected to the bottom surface of the second diaphragm; the vacuum interface is connected to the top surface of the first diaphragm, and the external environment interface is connected to the bottom surface of the first diaphragm; During the vacuum release process, a pressure P is applied to the top surface of the second diaphragm through the compressed air interface. B , applying pressure P to the bottom surface of the second diaphragm through the purge interface E , and P B >P E , the second diaphragm deforms toward the bottom surface to block the airway at the bottom; a negative pressure P is applied to the top surface of the first diaphragm through the vacuum interface A The first diaphragm is deformed toward the top surface to open the air passage at the bottom thereof, and the air passage between the external environment interface and the adsorption tube interface is connected to realize the vacuum release action.

4. The clean air-controlled diaphragm valve according to claim 1, characterized in that The diaphragm unit includes a first diaphragm and a second diaphragm, and a purge interface is arranged on the surface of the valve island assembly; The vacuum interface is connected to the top surface of the second diaphragm, and the purge interface is connected to the bottom surface of the second diaphragm; the compressed air interface is connected to the top surface of the first diaphragm, and the external environment interface is connected to the bottom surface of the first diaphragm; During the purging process, pressure P is applied to the top surface of the first diaphragm through the compressed air interface B , P B is greater than the external ambient pressure P C , so that the first diaphragm deforms towards the bottom surface and blocks the gas path between the external ambient interface and the adsorption tube interface; a negative pressure P is applied to the top surface of the second diaphragm through the vacuum interface A , and pressure P is applied to the bottom surface of the second diaphragm through the purging interface E , the second diaphragm deforms towards the top surface to open the air passage at its bottom, making the gas path between the purging interface and the adsorption tube interface conductive, and realizing the purging action.

5. The clean air-controlled diaphragm valve according to any one of claims 1 to 4, characterized in that A particle extraction and discharge interface is also arranged on the surface of the valve island assembly, and the particle extraction and discharge interface is connected to the exhaust port of the solenoid valve through a gas path.

6. The clean air-controlled diaphragm valve according to any one of claims 1 to 4, characterized in that, It also includes a filter. The inlet end of the filter is used to input external normal pressure air, and the outlet end of the filter is connected to the external environment interface.

7. The clean air-controlled diaphragm valve according to any one of claims 1 to 4, characterized in that, It also includes a detection element, and the detection end of the detection element is connected to the adsorption tube interface through a gas path.

8. The clean air-controlled diaphragm valve according to any one of claims 1 to 4, characterized in that The valve island assembly includes a first fixing member, a second fixing member and a third fixing member stacked in sequence; The first fixing member is used to connect with the solenoid valve, and the adsorption tube interface, vacuum interface, compressed air interface and external environment interface are all arranged on the third fixing member; The diaphragm unit is arranged between the first fixing member and the second fixing member; Sealing rings are respectively arranged at the gas path connection positions between the first fixing member and the second fixing member, and between the second fixing member and the third fixing member.

9. The clean air-controlled diaphragm valve according to any one of claims 1 to 4, characterized in that, The solenoid valve is a double - electrically - controlled electromagnetic reversing valve.

10. A valve block, characterized in that, It includes multiple clean - type pneumatic diaphragm valves as described in any one of claims 1 - 9 arranged in parallel.

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