Optical detection equipment and method

Abstract

The invention provides an optical detection device and method.The optical detection device comprises a base and a detection platform arranged on the base, the detection platform is provided with a detection system, a moving system and an overturning system, the moving system comprises a moving mechanism and a jacking platform deck installed on the moving mechanism, and the jacking platform deck is installed on the moving mechanism. The moving mechanism drives the jacking platform deck to move to any position of a detection position of the detection system and a turnover position or an avoiding position of the turnover system; the jacking platform deck comprises an ejector pin assembly capable of penetrating through the surface of the jacking platform deck and achieving lifting, and the ejector pin assembly comprises a plurality of ejector pins arranged at intervals; the overturning system comprises a tooth fork assembly capable of overturning by a certain angle along the axis parallel to the surface of the jacking carrying table, and the tooth fork assembly comprises a plurality of adsorption lifting tooth forks which are parallel to the surface of the jacking carrying table and matched with the interval space between the ejector pins. According to the invention, transfer, turn-over and detection processes can be conveniently and quickly completed without complex transfer and turn-over equipment.

Description

Technical Field

[0001] The present invention belongs to the technical field of optical detection, and particularly relates to an optical detection device and method. Background Art

[0002] The display field is another important application field of glass substrates besides semiconductor fields such as chips. The high transparency and optical uniformity of glass substrates ensure good optical performance, excellent flatness guarantees display quality, mechanical strength and chemical resistance enable them to cope with various environments, and thermal stability and low coefficient of thermal expansion ensure the stability of products during high-load operation. Additionally, the self-luminous characteristics of glass substrates are particularly important in new display fields such as Micro LED.

[0003] Although the application of glass substrates in the display field brings many advantages, there are also some obvious disadvantages. The following are the main disadvantages of glass substrates:

[0004] Fragility: Compared with organic substrates, glass substrates have weaker impact and earthquake resistance, so they are more likely to be damaged or cracked during manufacturing, transportation and use. This fragility not only increases the risks in the production process, but may also affect the stability and reliability of the packaged chips.

[0005] Difficult processing: The processing process of glass substrates is relatively complex and difficult. Due to their hardness and brittleness, special cutting, grinding and etching techniques are required, which increases the technical difficulty and cost in the manufacturing process. In addition, for fine patterns and wiring, the processing accuracy requirements for glass substrates are also higher, further increasing the processing difficulty.

[0006] Higher cost: Compared with organic substrates, the manufacturing cost of glass substrates is usually higher. This is mainly due to their complex processing process, special material requirements and higher technical requirements. The high cost may limit the application of glass substrates in low-cost or large-scale production.

[0007] Thermal expansion coefficient mismatch: There may be a problem of mismatch in the thermal expansion coefficients between glass substrates and chip materials. In an environment with large temperature changes, this mismatch may cause problems such as stress concentration, warping or fracture, thereby affecting the reliability and performance of the chips.

[0008] Poor compatibility with existing processes: Due to the characteristics and processing requirements of glass substrates, there may be compatibility problems with existing chip packaging processes. This may require investing more R & D resources to develop packaging processes suitable for glass substrates, increasing the technical difficulty and cost.

[0009] In view of the above problems, it is necessary to perform AOI inspection on the encapsulated glass substrate. However, in the actual production process, optical inspection has high requirements for the positioning accuracy, straightness, speed fluctuation, inspection time, etc. of the three-axis motion platform. Moreover, due to the special properties of the glass substrate, its transportation and movement need to be more stable and convenient to prevent it from being broken or damaged. Especially when performing flip inspection, there is no suitable stable transfer and inspection equipment. Summary of the Invention

[0010] In view of all or part of the deficiencies of the prior art described above, the purpose of the present invention is to provide an optical inspection device and method that can conveniently and quickly complete the transfer, flipping, and inspection processes without the need for complex transfer and flipping equipment.

[0011] To achieve the above invention purpose, the present invention provides the following technical solutions:

[0012] The present invention provides an optical detection device, which includes a base and a detection platform arranged on the base. A detection system, a moving system, and a flipping system are arranged on the detection platform. The moving system includes a moving mechanism and a lifting stage mounted on the moving mechanism. The moving mechanism drives the lifting stage to move to any position among the detection position of the detection system, the flipping position of the flipping system, or the avoidance position. The lifting stage includes a thimble assembly that can pass through its surface and realize lifting. The thimble assembly includes a plurality of thimbles arranged at intervals. The flipping system includes a fork assembly that can flip by a certain angle along an axis parallel to the surface of the lifting stage. The fork assembly includes a plurality of adsorption and lifting forks that are parallel to the surface of the lifting stage and match the interval space between the thimbles. In order to conduct effective tests, products are usually placed on an adsorbable stage for detection. When the products need to be turned over, they can only be taken away by a feeding mechanism and then flipped. When the products are directly taken away from the stage with adsorption holes, false vacuum is likely to occur between the products and the stage, resulting in abnormal feeding. Without flipping the entire stage (the flipping system required for directly flipping the stage has higher requirements and very high costs), using the detection position of the same detection system to detect both sides of the product, the present invention can separate the product from the detection platform by setting a thimble (thimble PIN) mechanism, avoiding the generation of false vacuum between the two and resulting in abnormal feeding. By setting a liftable thimble assembly, when the thimble assembly rises, the product can be placed on the thimble assembly, and the product on the lifting stage can be moved to the flipping position of the flipping system. During the movement, the plurality of adsorption and lifting forks at the flipping position are just arranged within the interval between the thimbles without interference, which can avoid abnormal feeding while simplifying the flipping and transfer operation. After the flipping system flips the product and places it on the lifting stage, the second side of the product can be directly detected, instead of requiring multiple intermediate transfer and transfer mechanism processes like the existing flipping systems to send the product to the detectable platform. The present invention can conveniently and quickly complete the front and back side detection of the product, with a small device volume and can improve the utilization rate of the factory space.

[0013] The flipping system further includes a lifting module and a rotating module installed on the lifting module for realizing flipping. The flipping angle of the tooth fork assembly is controlled within ±180 degrees. The rotating module includes a rotating servo motor installed along the extending direction of the adsorption and lifting tooth fork and a blocking component. The output end of the rotating servo motor is connected to the tooth fork assembly, and the blocking component is used to limit the rotating angle of the tooth fork assembly within a certain range. Setting the lifting module can effectively prevent the flipping system from interfering with the moving system. By descending, the ejector pin assembly of the lifting platform can be inserted between several adsorption and lifting tooth forks. By ascending, it can carry the product on the lifting platform and ascend to a certain height before flipping to prevent interference. The blocking component limits the rotating angle within a certain range as a hard limit, which can protect the product when it is flipped to a certain angle. Further, the flipping angle can be controlled within ±180 degrees to prevent over-flipping and damaging the product when it is placed on the lifting platform. Compared with the existing flipping system that can only flip 90 degrees and requires other moving mechanisms to cooperate to complete the flipping detection, in the present invention, the tooth fork assembly flips 180 degrees and cooperates with the liftable adsorption platform, and can be directly detected after flipping, greatly simplifying the structure and operation steps. The blocking component can effectively prevent damage to the product caused by over-flipping.

[0014] The tooth fork assembly further includes a rotatably connected mounting member and a tooth fork connecting portion. The lifting module is connected to the mounting member. The output end of the rotating servo motor is connected to the middle of the tooth fork connecting portion. One end of the adsorption and lifting tooth fork is connected to the tooth fork connecting portion. The inside of the adsorption and lifting tooth fork is hollow and the surface is provided with a number of uniformly distributed first vacuum suction cups. The rotating module further includes a fine-tuning component. The blocking component controls the flipping angle of the tooth fork assembly within 0 degrees to 190 degrees, and the fine-tuning component controls the rotating angle of the tooth fork assembly within 180 degrees. The fine-tuning component includes a sensing member provided on the tooth fork assembly and a number of sensing components installed on the mounting member. The blocking component is a mechanical blocking component and cannot completely and accurately control the flipping angle within 180 degrees, and it is also necessary to cooperate with the fine-tuning component for adjustment to accurately control it within 180 degrees. Connecting the output end of the rotating servo motor to the middle of the tooth fork connecting portion can improve the stability of flipping, and after flipping, it is still directly above the flipping position and is then transferred at the same position as the subsequent lifting platform, reducing the complexity of the movement control of the lifting platform. The uniformly distributed first vacuum suction cups can effectively adsorb the product and prevent obvious deformation of the product after flipping or dropping during the flipping process.

[0015] The ejector pin assembly of the lifting stage includes a first ejector pin group and a second ejector pin group. The ejector pins of the first ejector pin group and the second ejector pin group are both 3 - 7 in number and arranged in a straight line. The first ejector pin group and the second ejector pin group are arranged parallel and opposite to each other, and are respectively used to support the two side edges of the product to be tested. The product to be tested is a transparent glass substrate, and the surface of the lifting stage is treated with black hard anodizing; an L-shaped positioning part and a linear positioning part are provided on one side of the lifting stage; there are 3 - 7 adsorption and lifting fork teeth. When the lifting stage moves to the flipping position of the flipping system, the adsorption and lifting fork teeth and the ejector pins are arranged at intervals. In the present invention, ejector pin groups are provided at the two side edges of the product, and each ejector pin group contains at least three ejector pins. Through deformation simulation, it can be known that this design can keep the sag amount of the product after lifting within a controllable range. The deformation amount will not only directly affect the flatness of products highly related to display quality, such as glass substrates, but also, if the sag amount is too large and exceeds the controllable range, it will interfere with the pick-and-place mechanism during the loading and unloading process, resulting in damage to the product. The ejector pins provided with vacuum suckers can make the support of the ejector pin assembly for the product more stable. Under the conditions of meeting the deformation amount and the maximum stress, setting a smaller number of ejector pins, preferably 5 for example, can prevent the background influence on the optical detection of transparent products, such as glass substrates. Through the reasonable arrangement of the ejector pins, it is possible to avoid the product generating false vacuum and sticking to the adsorption platform, resulting in pulling and fragmenting during material picking, or even being unable to pick the material. Dark hard anodizing treatment is a metal surface treatment process, especially suitable for aluminum and its alloys, forming a dense and hard oxide film on the surface of the aluminum alloy, significantly enhancing the anti-wear performance of the part surface. Different shades of dark colors (such as black, dark gray) can be obtained, and the dark surface can absorb more light and reduce the light reflectivity. The present invention selects a suitable surface treatment, which can effectively eliminate the influence of the platform background on optical imaging, reduce product friction damage during loading and unloading, and take into account the durability of the platform. The L-shaped positioning part and the linear positioning part are used for positioning the product during manual feeding.

[0016] A first in-position sensor is also provided in the middle of the lifting stage. On one side of the first in-position sensor, at least two groups of the first ejector pin groups are arranged radially, and on the other side, at least two groups of the second ejector pin groups are arranged radially; the distance between adjacent first ejector pin groups and second ejector pin groups is 150-200 mm, the distance between two adjacent first ejector pin groups or two adjacent second ejector pin groups is 100-150 mm, and the distance between two ejector pins in the same first ejector pin group or second ejector pin group is 100-150 mm; the ejector pin includes a second vacuum chuck provided at the top end and an ejector rod connected to the second vacuum chuck. The first in-position sensor is used to sense whether the product to be tested has reached the position. Two groups of first ejector pin groups and two groups of second ejector pin groups are provided. The first ejector pin groups and second ejector pin groups close to the first in-position sensor are used to support products with relatively small sizes, and the first ejector pin groups and second ejector pin groups far from the first in-position sensor are used to support products with relatively large sizes. The same glass substrate optical detection platform can meet the picking, placing and detection of products with different sizes. Through the reasonable layout of distances and sizes, different feeding and discharging methods can be satisfied, and appropriate deformation amounts and maximum stresses can be provided, so that the products can avoid being interfered by the feeding and discharging mechanism and causing fragmentation.

[0017] The lifting stage includes an adsorption platform. The adsorption platform includes a first adsorption area provided with a plurality of first adsorption holes and a second adsorption area provided with a plurality of second adsorption holes. The first adsorption area and the second adsorption area are connected with a switching valve; the first adsorption holes are linearly arranged on both sides of each of the first ejector pin groups and second ejector pin groups, the second adsorption holes are linearly arranged along the circumference of the adsorption platform outside the first adsorption area, and the second adsorption holes are arranged in at least two columns along the radial direction of the adsorption platform; the lifting stage further includes a mounting platform. The adsorption platform and the ejector pin assembly are mounted on the mounting platform. The mounting platform includes a gas distribution plate communicated with the ejector rod for gas circulation during vacuum pumping. By adopting the method of uniformly arranging small holes for adsorption, products such as transparent glass substrates can be evenly adsorbed, solving the problem of Z-direction jumping caused by uneven adsorption generated by the original suction cup / adsorption groove method. And the second adsorption holes are arranged in at least two columns along the radial direction of the adsorption platform. There is an adsorption partition design, and the adsorption area can be automatically or manually switched for products of different specifications.

[0018] The installation platform further includes a rotary drive assembly, a first drive assembly, and a second drive assembly. Both the first drive assembly and the second drive assembly include a mounting plate, two guide rails, and a slide module. The guide rails are mounted on the mounting plate, and the slide module is mounted on the guide rails. The first thimble set is mounted on the slide module of the first drive assembly, and the second thimble set is mounted on the slide module of the second drive assembly. The rotary drive assembly drives the lifting platform to rotate along the θ axis. The two guide rails can make the lifting process more stable and are more conducive to the adsorption and loading of the product by the thimble assembly. In other solutions, the first drive assembly and the second drive assembly can be driven by the same power through a transfer, or only one of the first drive assembly and the second drive assembly can be provided, that is, only one mounting plate, one guide rail, and one slide module are provided, and the first thimble set and the second thimble set are mounted on the same slide module. The rotary drive assembly can be used to adjust the angle of the lifting platform, so as to achieve precise alignment of the product during the detection process and prevent the deviation of the product placement angle from affecting the subsequent detection.

[0019] The moving mechanism includes a Y-axis module and an X-axis module mounted on the Y-axis module. The lifting platform is mounted on the X-axis module. A sensor for receiving and feedbacking whether the lifting platform is in place is provided on the detection platform. It further includes an air-floating platform with a plurality of shock-absorbing units located at the end corners of the detection platform. The detection platform is mounted on the base through the air-floating platform. The X-axis module includes an X-axis linear motor and an X-axis guide rail. The Y-axis module is a dual-drive mechanism, including two parallel Y-axis linear motors and Y-axis guide rails located on both sides of each Y-axis linear motor. The Y-axis module adopting a dual-drive mechanism can increase the load while reducing the equipment size.

[0020] The mounting holes of the X-axis guide rail and the Y-axis guide rail are installed in a densified manner. Adjusting mechanisms are provided on both sides of the X-axis guide rail and the Y-axis guide rail. The adjusting mechanism is composed of a number of adjusting units evenly distributed along the extending direction of the X-axis guide rail and the Y-axis guide rail. Each adjusting unit mainly consists of a tightening column and an extrusion screw. The head of the extrusion screw is provided with an inclined surface. When the extrusion screw is screwed into the corresponding mounting hole on the detection platform, the tightening column is squeezed by the inclined surface and pushed tightly against the side surfaces of the X-axis guide rail and the Y-axis guide rail. The X-axis guide rail and the Y-axis guide rail adopt a densified hole specification and are provided with adjusting mechanisms, which can further ensure the stroke straightness and thus improve the equipment precision. Due to material reasons, the guide rail is no longer straight due to material stress. At this time, through the manual adjustment of the extrusion screw and the tightening column, the straightness of the guide rail can be adjusted. Compared with other adjusting mechanisms, its structure is very simple, and the evenly distributed or even densely distributed adjusting units can finely adjust almost every position on the guide rail, making the adjustment more precise and improving the motion precision.

[0021] The detection system includes at least three AOI main inspection components and at least one AOI re-inspection component. Each of the AOI main inspection components and the AOI re-inspection component is correspondingly provided with an independent lifting mechanism; at least three of the AOI main inspection components are equally spaced, and the AOI re-inspection component is arranged behind the last AOI main inspection component; the AOI main inspection component includes an alignment system and an automatic focusing system. The alignment system is used to adjust the positions of the X-axis, Y-axis, and θ-axis of the adsorption platform, and the automatic focusing system is used to adjust the height of the AOI main inspection component; the AOI re-inspection component includes a 2D detection component and a 3D detection component. By setting at least three groups of AOI cameras and using the snake-shaped movement of the products on the lifting platform, the three parts of the product (evenly divided according to the equal spacing distribution of the AOI main inspection components) can be simultaneously detected by the three groups of AOI cameras. Compared with using one group of AOI cameras to detect one product, two-thirds of the scanning time can be saved, and the production beat can be shortened. The product is particularly suitable for the detection of thin glass substrates. The thickness of the product is preferably greater than or equal to 0.2 mm. When detecting a thin glass substrate, attention needs to be paid to the deformation of the thin glass substrate. When the thin glass substrate is placed on the ejector pins of the lifting platform, it may cause a certain degree of deformation and become uneven. At this time, when using three groups of AOI cameras to detect different positions of the product, focusing is required, and the heights of the AOI main inspection component and the AOI re-inspection component are adjusted through the lifting mechanism to achieve subsequent precise detection.

[0022] The present invention also provides an optical detection method, which uses the optical detection device described above for detection, and includes the following steps:

[0023] Step 1: Place the product to be detected on the lifting platform, and use the moving mechanism to drive the lifting platform to move to the detection position of the detection system to detect the product to be detected, and the first surface of the product to be detected is completed;

[0024] Step 2: The ejector pin assembly rises, the lifting platform moves to the flipping position of the flipping system, and the fork assembly between the product to be detected and the surface of the lifting platform carries the product to be detected;

[0025] Step 3: The lifting platform moves to the avoidance position, the product to be detected is flipped 180 degrees by the flipping system, the lifting platform moves to the flipping position, and the product to be detected on the fork assembly is placed on the lifting platform;

[0026] Step 4: The lifting platform moves to the detection position to detect the product to be detected, and the second surface of the product to be detected is completed;

[0027] Step 5: Repeat Step 2 and Step 3, and unload the detected product. Brief Description of the Drawings

[0028] In order to more clearly illustrate the technical solutions in the specific embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the following described drawings are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0029] Figure 1 It is a schematic structural diagram of the optical detection device provided in Embodiment 1 from a first angle.

[0030] Figure 2 It is a schematic structural diagram of the moving system in Embodiment 1.

[0031] Figure 3 is Figure 11 An enlarged schematic diagram of Area A in [[]] regarding the adjustment unit.

[0032] Figure 4 It is a schematic diagram of the first angle of the structure of the lifting stage part in Embodiment 1.

[0033] Figure 5 It is a top view of the lifting stage in Embodiment 1.

[0034] Figure 6 It is a schematic diagram of the first angle of the thimble part in Embodiment 1.

[0035] Figure 7 It is a schematic diagram of the second angle of the structure of the lifting stage part in Embodiment 1.

[0036] Figure 8 It is a side view of the structure of the lifting stage part in Embodiment 1.

[0037] Figure 9 It is a schematic diagram of the first angle of the thimble part in Embodiment 1.

[0038] Figure 10 is Figure 1 An enlarged schematic diagram of Area B in [[]] regarding the detection system.

[0039] Figure 11 It is a schematic structural diagram of the optical detection device provided in Embodiment 1 from a second angle.

[0040] Figure 12 It is a schematic structural diagram of the flipping system in Embodiment 1.

[0041] Figure 13 is Figure 12 An enlarged schematic diagram of Area C in [[]] regarding the blocking component.

[0042] Reference numerals: 1 - base; 2 - detection platform; 201 - sensor; 202 - grating scale; 3 - air - floating platform; 301 - shock - absorption unit; 4 - lifting stage; 40 - adsorption platform; 400 - ejector pin; 401 - second vacuum suction cup; 402 - ejector rod; 403 - L - shaped positioning member; 404 - linear positioning member; 41 - first ejector - pin group; 42 - second ejector - pin group; 405 - first in - stock inductor; 406 - first adsorption hole; 407 - second adsorption hole; 408 - switching valve; 43 - mounting platform; 409 - air - distribution plate; 410 - rotation drive assembly; 411 - first drive assembly; 412 - second drive assembly; 4110 - mounting plate; 4111 - guiding linear rail; 4112 - slide - table module; 4113 - connecting plate; 4114 - drive motor; 5 - Y - axis module; 501 - Y - axis linear motor; 502 - Y - axis linear rail; 6 - X - axis module; 601 - X - axis linear motor; 602 - X - axis linear rail; 7 - adjustment unit; 701 - pushing column; 702 - extrusion screw; 703 - inclined plane; 8 - AOI main - inspection assembly; 801 - alignment system; 802 - automatic focusing system; 9 - AOI re - inspection assembly; 901 - 2D detection assembly; 902 - 3D detection assembly; 10 - lifting mechanism; 11 - fork assembly; 110 - adsorption - lifting fork; 111 - second in - stock inductor; 1101 - mounting member; 1102 - fork connection part; 1103 - first vacuum suction cup; 12 - lifting module; 13 - rotation module; 130 - rotation servo - motor; 133 - fine - tuning component; 1331 - sensing element; 1332 - sensing assembly. Detailed implementation manners

[0043] The technical solutions in the specific embodiments of the present invention will be clearly and completely described below. Apparently, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts belong to the scope of protection of the present invention.

[0044] It should be noted that, in order to describe the technical solutions more specifically, the steps described in the following embodiments do not strictly correspond one - to - one with the steps described in the inventive content part.

[0045] Embodiment 1

[0046] An optical detection device, referring to Figure 1 , includes a base 1 and a detection platform 2 disposed on the base 1, and further includes an air - floating platform 3, provided with a plurality of shock - absorption units 301 located at the corner of the detection platform 2. The detection platform 2 is mounted on the base 1 through the air - floating platform 3. The detection platform 2 is a marble platform. A detection system, a moving system and a flipping system are provided on the detection platform 2.

[0047] The mobile system includes a mobile mechanism and a lifting platform 4 mounted on the mobile mechanism. The mobile mechanism drives the lifting platform 4 to move to any position among the detection position of the detection system, the flipping position of the flipping system, or the avoidance position. Refer to Figure 2 , the mobile mechanism includes a Y-axis module 5 and an X-axis module 6 mounted on the Y-axis module 5. The lifting platform 4 is mounted on the X-axis module 6. A sensor 201 for receiving and feedbacking whether the lifting platform 4 is in place is provided on the detection platform 2. It also includes a grating scale 202 and a reading head for feedbacking the moving position. The X-axis module 6 includes an X-axis linear motor 601 and an X-axis linear guide 602. The Y-axis module 5 is a dual-drive mechanism, including two parallel Y-axis linear motors 501 and Y-axis linear guides 502 located on both sides of each Y-axis linear motor 501. The mounting holes of the X-axis linear guide 602 and the Y-axis linear guide 502 are installed with increased density. Combine with reference Figure 3 and Figure 11 , adjustment mechanisms are provided on both sides of the X-axis linear guide 602 and the Y-axis linear guide 502. The adjustment mechanisms are composed of a number of adjustment units 7 evenly distributed along the extending direction of the X-axis linear guide 602 and the Y-axis linear guide 502. Each adjustment unit 7 is mainly composed of a tightening column 701 and an extrusion screw 702. The head of the extrusion screw 702 is provided with an inclined surface 703. When the extrusion screw 702 is screwed into the corresponding mounting hole on the detection platform 2, the tightening column 701 is squeezed by the inclined surface 703 and pushed tightly against the side surfaces of the X-axis linear guide 602 and the Y-axis linear guide 502.

[0048] Refer to Figures 4 to 6, the lifting stage 4 includes a thimble assembly that can pass through its surface and achieve lifting. The thimble assembly includes a number of thimbles 400 arranged at intervals. The thimble 400 includes a second vacuum chuck 401 provided at the top end and a thimble rod 402 connected to the second vacuum chuck 401. The thimble assembly of the lifting stage 4 includes a first thimble group 41 and a second thimble group 42. The thimbles 400 of the first thimble group 41 and the thimbles 400 of the second thimble group 42 are both 3-7 in number and arranged in a straight line. In this embodiment, there are 5 and arranged in a straight line. The first thimble group 41 and the second thimble group 42 are arranged parallel and opposite to each other, and are respectively used to support the two side edges of the product to be tested. The product to be tested is a transparent glass substrate, and the surface of the lifting stage 4 is treated by black hard anodizing. One side of the lifting stage 4 is provided with an L-shaped positioning member 403 and a straight-shaped positioning member 404. A first in-place sensor 405 is also provided in the middle of the lifting stage 4. On one side of the first in-place sensor 405, two groups of first thimble groups 41 are arranged radially, and on the other side, two groups of second thimble groups 42 are arranged radially. The distance between adjacent first thimble groups 41 and second thimble groups 42 is 150-200 mm, the distance between adjacent two first thimble groups 41 or adjacent two second thimble groups 42 is 100-150 mm, and the distance between two thimbles 400 within the same first thimble group 41 or second thimble group 42 is 100-150 mm.

[0049] Reference Figure 4 , the lifting stage 4 includes an adsorption platform 40. The adsorption platform 40 includes a first adsorption area provided with a number of first adsorption holes 406 and a second adsorption area provided with a number of second adsorption holes 407. The first adsorption area and the second adsorption area are connected with a switching valve 408. The first adsorption holes 406 are linearly arranged on both sides of each first thimble group 41 and second thimble group 42. The second adsorption holes 407 are linearly arranged along the circumference of the adsorption platform 40 outside the first adsorption area, and there are two columns of the second adsorption holes 407 arranged radially along the adsorption platform 40. Reference Figures 7 to 9, the lifting stage 4 further includes an installation platform 43. The adsorption platform 40 and the thimble assembly are installed on the installation platform 43. The installation platform 43 includes an air distribution plate 409 communicating with the ejector rod 402 for gas circulation during vacuum pumping. The installation platform 43 further includes a rotation drive assembly 410, a first drive assembly 411, and a second drive assembly 412. Both the first drive assembly 411 and the second drive assembly 412 include a mounting plate 4110, two guide rails 4111, and a slide module 4112. The guide rails 4111 are installed on the mounting plate 4110, and the slide module 4112 is installed on the guide rails 4111. The first thimble group 41 is installed on the slide module 4112 of the first drive assembly 411. The slide module 4112 is a Z-axis slide module, including a connecting plate 4113 and a drive motor 4114. The drive motor 4114 is installed on the connecting plate 4113. The connecting plate 4113 is connected to the guide rails 4111, and the air distribution plate 409 is installed on the connecting plate 4113. The second thimble group 42 is installed on the slide module 4112 of the second drive assembly 412; the rotation drive assembly 410 is a rotating shaft, specifically a rotating platform. The lifting stage 4 is installed on the rotating platform, and the rotating platform drives the lifting stage 4 to rotate along the θ axis.

[0050] Refer to Figure 1 and Figure 10 , the detection system includes at least three AOI main inspection components 8 and at least one AOI re-inspection component 9. In this embodiment, there are three AOI main inspection components 8 and one AOI re-inspection component 9. Each of the three AOI main inspection components 8 and the AOI re-inspection component 9 is correspondingly provided with an independent lifting mechanism 10. The three AOI main inspection components 8 are evenly spaced, and the AOI re-inspection component 9 is arranged after the last AOI main inspection component 8. The AOI main inspection component 8 includes a positioning system 801 and an automatic focusing system 802. The positioning system 801 is used to adjust the positions of the adsorption platform 40 in the X-axis, Y-axis, and θ-axis directions, and the automatic focusing system 802 is used to adjust the height of the AOI main inspection component 8; the AOI re-inspection component 9 includes a 2D detection component 901 and a 3D detection component 902.

[0051] Refer to Figure 11 and Figure 12, the flipping system includes a fork assembly 11 that can be flipped by a certain angle along an axis parallel to the surface of the lifting platform 4. The fork assembly 11 includes a number of adsorption and lifting forks 110 that are parallel to the surface of the lifting platform 4 and match the spacing space between the ejector pins 400. The number of adsorption and lifting forks 110 is 3 - 7, and in this embodiment, there are 6. A second in - stock sensor 111 is also provided on one of the adsorption and lifting forks 110. When the lifting platform 4 moves to the flipping position of the flipping system, the adsorption and lifting forks 110 and the ejector pins 400 are arranged at intervals. The flipping system further includes a lifting module 12 and a rotation module 13 installed on the lifting module 12 for realizing flipping, and the flipping angle of the fork assembly 11 is controlled within ±180 degrees. Refer to Figure 13 , the rotation module 13 includes a rotation servo - motor 130 installed along the extending direction of the adsorption and lifting forks 110, and the output end of the rotation servo - motor 130 is connected to the fork assembly 11. The fork assembly 11 further includes a rotatably connected mounting member 1101 and a fork connecting portion 1102. The lifting module 12 is connected to the mounting member 1101, the output end of the rotation servo - motor 130 is connected to the middle of the fork connecting portion 1102, and one end of the adsorption and lifting fork 110 is connected to the fork connecting portion 1102. The interior of the adsorption and lifting fork 110 is hollow and its surface is provided with a number of uniformly distributed first vacuum suckers 1103.

[0052] The rotation module 13 further includes a blocking component, and the blocking component is used to limit the rotation angle of the fork assembly 11 within a certain range. For example, in some embodiments, the blocking component may include a stopper (not shown in the figure) provided on the fork assembly 11 and a limit member (not shown in the figure) provided on the mounting member 1101 or other parts. The stopper extends radially along the rotation servo - motor 130, and the limit member extends axially along the rotation servo - motor 130, and the two cooperate to achieve the blocking action. The rotation module 13 further includes a fine - tuning component 133. The fine - tuning component 133 includes an induction member 1331 provided on the fork assembly 11 and a number of sensing components 1332 installed on the mounting member 1101. The number of sensing components 1332 may include at least two sensing components 1332 arranged from top to bottom and facing the induction member 1331. When the sensing component 1332 senses the induction member 1331, it is considered that the fork assembly 11 has been flipped in place. The sensing component 1332 transmits the signal that the fork assembly 11 has been flipped in place to the rotation servo - motor 130, and the rotation servo - motor 130 controls the flipping stop / start and the flipping angle. The blocking component controls the flipping angle of the fork assembly 11 within 0 degrees to 190 degrees, and the fine - tuning component 133 controls the rotation angle of the fork assembly 11 within 180 degrees.

[0053] Embodiment 2

[0054] An optical detection method, which uses the optical detection device described in Embodiment 1 for detection, includes the following steps (not corresponding one by one to the content of the invention):

[0055] S101. The upstream fork feeds materials to the lifting stage 4 (manual loading and unloading in the early stage): The ejector pin 400 rises along the Z-axis, the ejector pin 400 sucks vacuum, the upstream fork is lowered to the first height (above the ejector pin), the upstream fork breaks vacuum, and then the upstream fork is lowered along the Z-axis to avoid interference, and the upstream fork retracts; The surface of the lifting stage 4 (taking the first adsorption area as an example) sucks vacuum, the ejector pin 400 descends along the Z-axis to the second height (the surface of the lifting stage 4), and the glass substrate (hereinafter referred to as the sheet) falls onto the lifting stage 4. The first in-position sensor 405 senses the sheet, the ejector pin 400 breaks vacuum, and the ejector pin 400 descends along the Z-axis to the third height (below the lifting stage). The product to be tested is placed on the lifting stage 4, and this is the process of exchanging the sheet.

[0056] S102. First surface detection (A Side): It includes three steps: a. Alignment: Move the lifting stage 4 to the alignment camera mark1, the alignment camera takes a picture, move the lifting stage 4 to the alignment camera mark2, the alignment camera takes a picture, and adjust the rotation drive assembly 410 according to the result to drive the lifting stage 4 to rotate along the θ-axis to an appropriate angle (upright); b. Centering: Move the lifting stage 4 to the alignment camera mark3, the alignment camera takes a picture, and calculate the center position; c. Detection: Use the moving mechanism to drive the lifting stage 4 to move to the detection position of the detection system. Through the serpentine movement of the lifting stage 4 (line scan process), the three groups of AOI cameras of the AOI main inspection component 8 can be used to simultaneously perform 2D detection and measurement on three parts of the product (evenly divided according to the equal-spacing distribution of the AOI main inspection component 8), and then use the AOI re-inspection component 9 to perform 2D visual inspection and 3D visual inspection on the product (but it is not necessary to perform AOI re-inspection after the result analysis of the AOI main inspection component 8. It is not mandatory to perform AOI re-inspection). The first surface of the product to be tested is completed with detection.

[0057] S103, flipping (A Side to B Side): move the lifting platform 4 to the avoidance position, break the vacuum on the surface of the lifting platform 4, and the ejector pin 400 absorbs the vacuum, and the ejector pin 400 rises at a low speed along the Z axis; the suction lifting tooth fork 110 is lowered along the Z axis to a safe height for receiving materials (higher than the surface of the lifting platform 4 and lower than the height of the ejector pin 400), and the sheet on the lifting platform 4 is moved to the flipping position (teeth fork receiving material position) of the flipping system. At this time, a number of suction lifting tooth forks 110 are just set in the interval between the ejector pins 400 and do not interfere with each other. The suction lifting tooth fork 110 rises at a low speed along the Z axis to the tooth fork receiving material position, and the tooth fork assembly 11 located between the product to be tested and the surface of the lifting platform 4 carries the product to be tested. product; ejector pin 400 breaks vacuum, suction lift tooth fork 110 absorbs vacuum, tooth fork assembly 11 rises at high speed along Z axis, lifting platform 4 moves to avoidance position and ejector pin 400 drops below suction platform 40; use tooth fork assembly 11 to flip the product to be tested 180 degrees, lift platform 4 moves to flip position below tooth fork assembly 11; suction lift tooth fork 110 drops to first height along Z axis at high speed, suction lift platform 4 surface absorbs vacuum, suction lift tooth fork 110 drops to second height (lift platform 4 surface) along Z axis, suction lift tooth fork 110 breaks vacuum, and place the product to be tested on tooth fork assembly 11 on lifting platform 4. This is the first flipping process.

[0058] S104, second side inspection (B Side): including three steps: a, alignment, moving the lifting platform 4 to the alignment camera mark1, taking pictures with the alignment camera, moving the lifting platform 4 to the alignment camera mark2, taking pictures with the alignment camera, and adjusting the rotation drive component 410 according to the results to drive the lifting platform 4 to rotate along the θ axis to a suitable angle (rotate); b, centering, moving the lifting platform 4 to the alignment camera mark3, taking pictures with the alignment camera, and calculating the center position; c, inspection, using the moving mechanism to drive the lifting platform 4 to move to the inspection position of the inspection system, through the serpentine movement of the lifting platform 4 (line scanning process), the three groups of AOI cameras of the AOI main inspection component 8 can be used to perform 2D inspection and measurement on the three parts of the product (uniformly divided according to the equidistant distribution of the AOI main inspection component 8) at the same time, and then use the AOI re-inspection component 9 to perform 2D visual inspection and 3D visual inspection on the product (but after the result analysis of the AOI main inspection component 8, it is considered necessary to perform AOI re-inspection, and AOI re-inspection is not necessary). The second side of the product to be tested is tested.

[0059] S105. Flip (from B Side to A Side): Move the lifting stage 4 to the avoidance position, break the vacuum on the surface of the lifting stage 4, suck the vacuum of the ejector pins 400, and the ejector pins 400 rise slowly along the Z-axis; the adsorption and lifting fork 110 descends along the Z-axis to the feeding safety height (higher than the surface of the lifting stage 4 and lower than the height of the ejector pins 400), and moves the sheet on the lifting stage 4 to the flipping position of the flipping system (fork feeding position). At this time, several adsorption and lifting forks 110 are just set within the intervals between the ejector pins 400 without interference. The adsorption and lifting fork 110 rises slowly along the Z-axis to the fork feeding position, and the fork assembly 11 between the product to be tested and the surface of the lifting stage 4 carries the product to be tested; the ejector pins 400 break the vacuum, the adsorption and lifting fork 110 sucks the vacuum, the fork assembly 11 rises rapidly along the Z-axis, and the lifting stage 4 moves to the avoidance position; use the fork assembly 11 to flip the product to be tested by 180 degrees, and the lifting stage 4 moves to the flipping position below the fork assembly 44; the adsorption and lifting fork 110 descends rapidly along the Z-axis to the first height, break the vacuum on the surface of the lifting stage 4, the adsorption and lifting fork 110 descends slowly along the Z-axis to the second height (the surface of the lifting stage 4), the adsorption and lifting fork 110 breaks the vacuum, and places the product to be tested on the fork assembly 11 on the lifting stage 4. This is the second flipping process.

[0060] S106. Move the lifting stage 4 to the discharging position (the same as the feeding position), break the vacuum on the surface of the lifting stage 4, suck the vacuum of the ejector pins 400, raise the ejector pins 400 along the Z-axis, the upstream fork extends to the feeding safety position (above the surface of the lifting stage 4 and below the ejector pins 400), the ejector pins 400 break the vacuum, the upstream fork rises slowly along the Z-axis to the first height, the upstream fork sucks the vacuum, the upstream fork rises to the safety position, the upstream fork retracts, and discharges the product after inspection.

[0061] In this embodiment, the product is loaded and unloaded by the upstream fork, that is, the upstream and downstream feeding devices are connected for online production. In other embodiments, manual loading and unloading can also be used, that is, single-machine offline production. The present invention provides a glass substrate optical detection device with high motion accuracy, short production cycle, and capable of front and back surface detection. The device is small in size, which can improve the utilization rate of the factory space; at the same time, it can realize online and offline detection, and improve the utilization rate of the device.

[0062] The description of the above embodiments is only used to help understand the method and core idea of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the principle of the present invention, several improvements and modifications can be made to the present invention, and these improvements and modifications also fall within the scope of the claims of the present invention.

Claims

1. An optical detection device, characterized in that, It includes a base (1) and a detection platform (2) arranged on the base (1). A detection system, a moving system, and a flipping system are arranged on the detection platform (2). The moving system includes a moving mechanism and a lifting carrier (4) installed on the moving mechanism. The moving mechanism drives the lifting carrier (4) to move to any position among the detection position of the detection system, the flipping position of the flipping system, or the avoidance position. The lifting carrier (4) includes a thimble assembly that can pass through its surface and perform lifting. The thimble assembly includes a number of thimbles (400) arranged at intervals. The flipping system includes a fork assembly (11) that can flip a certain angle along an axis parallel to the surface of the lifting carrier (4). The fork assembly (11) includes a number of adsorption and lifting forks (110) that are parallel to the surface of the lifting carrier (4) and match the interval space between the thimbles (400).

2. The optical detection device according to claim 1, wherein The flipping system further includes a lifting module (12) and a rotation module (13) installed on the lifting module (12) for realizing flipping. The flipping angle of the fork assembly (11) is controlled within ±180 degrees. The rotation module (13) includes a rotation servo motor (130) installed along the extending direction of the adsorption and lifting fork (110) and a blocking component. The output end of the rotation servo motor (130) is connected to the fork assembly (11). The blocking component is used to limit the rotation angle of the fork assembly (11) within a certain range.

3. The optical detection device according to claim 2, wherein, The fork assembly (11) further includes a rotatably connected mounting member (1101) and a fork connecting portion (1102). The lifting module (12) is connected to the mounting member (1101). The output end of the rotation servo motor (130) is connected to the middle of the fork connecting portion (1102). One end of the adsorption and lifting fork (110) is connected to the fork connecting portion (1102). The interior of the adsorption and lifting fork (110) is hollow and its surface is provided with a number of uniformly distributed first vacuum suction cups (1103). The rotation module (13) further includes a fine-tuning component (133). The blocking component controls the flipping angle of the fork assembly (11) within 0 degrees to 190 degrees. The fine-tuning component (133) controls the rotation angle of the fork assembly (11) within 180 degrees. The fine-tuning component (133) includes an induction member (1331) arranged on the fork assembly (11) and a number of sensing components (1332) installed on the mounting member (1101).

4. The optical detection device according to claim 1, characterized in that, The ejector pins assembly of the lifting stage (4) includes a first ejector pins group (41) and a second ejector pins group (42). The ejector pins (400) of the first ejector pins group (41) and the ejector pins (400) of the second ejector pins group (42) are both 3 - 7 in number and arranged in a straight line. The first ejector pins group (41) and the second ejector pins group (42) are arranged parallel and opposite to each other, and are respectively used to support the two side edges of the product to be tested. The product to be tested is a transparent glass substrate. The surface of the lifting stage (4) is treated by black hard anodizing. One side of the lifting stage (4) is provided with an L-shaped positioning member (403) and a linear positioning member (404). The adsorption and lifting fork (110) is 3 - 7 in number. When the lifting stage (4) moves to the flipping position of the flipping system, the adsorption and lifting fork (110) and the ejector pins (400) are arranged at intervals.

5. The optical detection device according to claim 4, wherein A first in-place inductor (405) is further provided in the middle of the lifting stage (4). At least two groups of the first ejector pins group (41) are arranged radially on one side of the first in-place inductor (405), and at least two groups of the second ejector pins group (42) are arranged radially on the other side. The distance between the adjacent first ejector pins group (41) and the second ejector pins group (42) is 150 - 200 mm. The distance between two adjacent first ejector pins groups (41) or two adjacent second ejector pins groups (42) is 100 - 150 mm. The distance between two ejector pins (400) within the same first ejector pins group (41) or second ejector pins group (42) is 100 - 150 mm. The ejector pin (400) includes a second vacuum suction cup (401) arranged at the top end and a ejector rod (402) connected to the second vacuum suction cup (401).

6. The optical detection device according to claim 5, characterized in that, The lifting stage (4) includes a suction platform (40). The suction platform (40) includes a first suction area provided with a number of first suction holes (406) and a second suction area provided with a number of second suction holes (407). A switching valve (408) is connected to the first suction area and the second suction area; the first suction holes (406) are linearly arranged on both sides of each of the first ejector pin groups (41) and the second ejector pin groups (42), and the second suction holes (407) are linearly arranged along the circumferential direction of the suction platform (40) outside the first suction area, and at least two rows of the second suction holes (407) are arranged along the radial direction of the suction platform (40); the lifting stage (4) further includes a mounting platform (43). The suction platform (40) and the ejector pin assembly are mounted on the mounting platform (43). The mounting platform (43) includes a manifold plate (409) communicating with the ejector rod (402) for gas flow during vacuum pumping; the mounting platform (43) further includes a rotation drive assembly (410), a first drive assembly (411) and a second drive assembly (412). Both the first drive assembly (411) and the second drive assembly (412) include a mounting plate (4110), two guide linear rails (4111) and a slide module (4112). The guide linear rails (4111) are mounted on the mounting plate (4110), the slide module (4112) is mounted on the guide linear rails (4111), the first ejector pin group (41) is mounted on the slide module (4112) of the first drive assembly (411), and the second ejector pin group (42) is mounted on the slide module (4112) of the second drive assembly (412); the rotation drive assembly (410) drives the lifting stage (4) to rotate along the θ axis.

7. The optical detection device according to claim 1, characterized in that, The moving mechanism includes a Y-axis module (5) and an X-axis module (6) mounted on the Y-axis module (5). The lifting stage (4) is mounted on the X-axis module (6). A sensor (201) for receiving and feeding back a signal indicating whether the lifting stage (4) is in place is provided on the detection platform (2); further included is an air-floating platform (3) provided with a plurality of shock-absorbing units (301) at the end corners of the detection platform (2). The detection platform (2) is mounted on the base (1) through the air-floating platform (3); the X-axis module (6) includes an X-axis linear motor (601) and an X-axis linear rail (602). The Y-axis module (5) is a dual-drive mechanism including two parallel Y-axis linear motors (501) and Y-axis linear rails (502) located on both sides of each of the Y-axis linear motors (501).

8. The optical detection device according to claim 7, characterized in that, The mounting holes of the X-axis linear guide (602) and the Y-axis linear guide (502) are installed in a densified manner; adjustment mechanisms are provided on both sides of the X-axis linear guide (602) and the Y-axis linear guide (502), and the adjustment mechanisms are composed of a number of adjustment units (7) evenly distributed along the extending direction of the X-axis linear guide (602) and the Y-axis linear guide (502). Each adjustment unit (7) mainly consists of a tightening column (701) and an extrusion screw (702). The head of the extrusion screw (702) is provided with an inclined surface (703). When the extrusion screw (702) is screwed into the corresponding mounting hole on the detection platform (2), the tightening column (701) is pushed towards the side of the X-axis linear guide (602) and the Y-axis linear guide (502) under the extrusion of the inclined surface (703).

9. The optical detection device according to claim 1, wherein The detection system includes at least three AOI main inspection components (8) and at least one AOI re-inspection component (9). Each AOI main inspection component (8) and AOI re-inspection component (9) is correspondingly provided with an independent lifting mechanism (10); at least three AOI main inspection components (8) are evenly distributed at equal intervals, and the AOI re-inspection component (9) is arranged behind the last AOI main inspection component (8); the AOI main inspection component (8) includes a positioning system (801) and an automatic focusing system (802). The positioning system (801) is used to adjust the positions of the X-axis, Y-axis, and θ-axis of the adsorption platform (40), and the automatic focusing system (802) is used to adjust the height of the AOI main inspection component (8); the AOI re-inspection component (9) includes a 2D detection component (901) and a 3D detection component (902).

10. An optical detection method, characterized in that, Using the optical detection device according to any one of claims 1-9 for detection, includes the following steps: Step 1: Place the product to be detected on the lifting stage (4), and use the moving mechanism to drive the lifting stage (4) to move to the detection position of the detection system to detect the product to be detected, and the first side of the product to be detected is completed for detection; Step 2: The thimble assembly rises, the lifting stage (4) moves to the flipping position of the flipping system, and the fork assembly (11) located between the surface of the product to be detected and the lifting stage (4) carries the product to be detected; Step 3: The lifting stage (4) moves to the avoidance position, use the flipping system to flip the product to be detected by 180 degrees, the lifting stage (4) moves to the flipping position, and place the product to be detected on the fork assembly (11) on the lifting stage (4); Step 4: The lifting stage (4) moves to the detection position to detect the product to be detected, and the second side of the product to be detected is completed for detection; Step 5: Repeat Step 2 and Step 3, and unload the detected product.

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