Wafer storage box

Abstract

The invention relates to a wafer storage box which comprises a box body, at least two limiting rings are fixedly installed on the inner side of the box body, clamping rings are movably installed on the right sides of the multiple limiting rings and located on the inner side of the box body, and clamping and sleeving rings are fixedly installed at the tops and the bottoms of the multiple clamping rings. And movable rods are movably installed on the inner sides of the clamping sleeve rings at the top and the bottom, pressing rods are movably installed at the left ends of the movable rods at the top and the bottom and located on the inner side of the box body, and side covers are movably installed on the left sides of the pressing rods. According to the wafer storage box, the clamping ring, the clamping sleeve ring, the movable rod, the clamping sleeve seat, the ejector rod, the two springs and the spring cover plate are arranged, after the spring cover plate is fixed to the box body, the springs push the ejector rod towards the side away from the spring cover plate, and then the clamping ring is pushed to move towards the side of the corresponding limiting ring; the purpose of clamping and fixing the wafer placed on the inner sides of the limiting ring and the clamping ring can be achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor device manufacturing, and particularly to a wafer storage box. Background Art

[0002] The manufacturing of semiconductor devices is achieved by subjecting wafers to numerous process flows such as surface oxidation, chemical vapor deposition, coating, exposure and development, etching, and cleavage. Between each process, a wafer cassette is used to store, transport, and transfer wafers between stations.

[0003] Most of the wafer storage boxes on the market use a V-shaped card slot to hold the wafers. Due to the particularity of the wafers, even the width at the bottom of the V-shaped card slot is greater than the thickness of the wafers, so the wafers cannot be clamped, and there are still many gaps at the edges. During the process of opening the lid, the box body cannot protect the wafers. If the box body is tilted or shaken, the wafers are easily broken or damaged. If a sponge pad is directly pasted into the wafer card slot for filling, although it can provide clamping protection, every time the wafers are taken and placed, the sponge pad will rub against the surface of the wafers, contaminating the wafer surface and affecting the subsequent process quality, which is not convenient for taking and placing. Summary of the Invention

[0004] Aiming at the deficiencies of the prior art, the present invention provides a wafer storage box, which has the advantages of wafer clamping and convenient taking and placing, and solves the problems that the existing wafer storage boxes cannot clamp wafers and are not convenient for taking and placing.

[0005] To achieve the above-mentioned purposes of wafer clamping and convenient taking and placing, the present invention provides the following technical solution: A wafer storage box includes a box body and a box cover. Inside the box body, there are fixed at least two limiting rings. On the right side of the plurality of limiting rings and inside the box body, there are movably installed clamping rings. On the top and bottom of the plurality of clamping rings, there are fixedly installed clamping sleeve rings. Inside the clamping sleeve rings at the top and bottom, there are movably installed movable rods. On the left end of the movable rods at the top and bottom and inside the box body, there is movably installed a pressing rod. On the left side of the pressing rod, there is movably installed a side cover. At the ends of the movable rods at the top and bottom far from the pressing rod, there are movably installed clamping sleeve seats. Inside the two clamping sleeve seats, there is fixedly installed a top rod. On the right side of the top rod, there are movably installed two springs. On the right side of the two springs, there is movably installed a spring cover plate. On the right side of the spring cover plate, there are movably installed two limiting screws extending into the interior of the box body. In the middle of the two springs on the right side of the top rod, there is fixedly installed a rod column. On the front of the rod column, there is movably installed a sliding knob.

[0006] Further, limiting hoops are fixedly installed on both the left and right sides of the box body, two pins are fixedly installed at the bottom of the box cover, the box body is adapted to the box cover, and the limiting hoops on both sides of the box body are adapted to the two pins at the bottom of the box cover.

[0007] Further, a card slot adapted to the outer side of the rod column is formed inside the sliding knob, and the sliding knob and the rod column are connected in a sleeved manner.

[0008] Further, a sliding groove adapted to the sliding knob is formed on the front surface of the box body and outside the sliding knob, and a sliding through groove adapted to the bottom of the sliding knob is formed inside the sliding groove.

[0009] Further, the inner side of the clamping ring is arc-shaped, and elastic pads are fixedly bonded to the top and bottom of the corresponding clamping ring and the adjacent side of the corresponding limiting ring, which can provide buffering for the clamping action during rapid rebound, reduce hard contact, and provide better protection for the wafer.

[0010] Further, a through-shaped hole is formed inside the card sleeve ring, and a movable rod card cavity is formed inside the card sleeve ring and outside the shaped hole. An unthrough-shaped hole is formed inside the card sleeve seat, and a movable rod card cavity communicating with the shaped hole is formed inside the card sleeve seat. A card pin adapted to the movable rod card cavity is fixedly installed on the outer side of the movable rod, so that the card sleeve ring, the movable rod and the card sleeve seat form a detachable kit, which is convenient for assembly and replacement of a single damaged part in the later stage.

[0011] Further, the side cover is movably installed on the box body through fixing screws, an elastic rubber sleeve is fixedly installed in the middle of the side cover, and the length of the side cover is greater than the length of the pressing rod.

[0012] Further, two slots adapted to the movable rod are formed inside the pressing rod, and a movable cavity adapted to the pressing rod is formed inside the box body.

[0013] Further, limiting ring sleeves are fixedly installed on the adjacent sides of the card sleeve seat and the spring cover plate, and the inner diameter of the limiting ring sleeve is adapted to the outer diameter of the spring.

[0014] Further, an installation groove adapted to the spring cover plate is formed on the right side of the box body, and the depth of the installation groove is greater than the thickness of the spring cover plate, which is convenient for adjusting the clamping of wafers with different thicknesses in the later stage.

[0015] Compared with the prior art, the present invention provides a wafer storage box, which has the following beneficial effects:

[0016] 1. For this wafer storage box, by setting a clamping ring, a sleeve ring, a movable rod, a sleeve seat, a push rod, two springs and a spring cover plate, after fixing the spring cover plate on the box body, the spring pushes the push rod towards the side away from the spring cover plate, and then pushes the clamping ring towards the side of the corresponding limiting ring, so as to provide clamping and fixing for the wafers placed inside the limiting ring and the clamping ring.

[0017] 2. For this wafer storage box, by setting a pressing rod, a side cover and an elastic rubber sleeve, pressing the elastic rubber sleeve makes the pressing rod drive the movable rod to move towards the spring cover plate direction, increasing the gap between the clamping ring and the inner side of the corresponding limiting ring, which is convenient for taking and placing wafers. At the same time, by setting a rod column, a sliding knob and a sliding groove, by pushing the sliding knob towards the spring cover plate direction, the gap between the clamping ring and the inner side of the corresponding limiting ring is increased, which is convenient for taking and placing wafers. Multiple pushing methods are convenient for wafer taking and placing work in multiple scenarios.

[0018] 3. For this wafer storage box, by setting an installation groove on the right side of the box body that is adapted to the spring cover plate, and the groove depth of the installation groove is greater than the plate thickness of the spring cover plate. By screwing the limit screw, the left - right movement range of the spring cover plate can be adjusted, and then the telescopic length path of the spring can be controlled to adjust the clamping force suitable for wafer storage. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a cross - sectional view of the box body of a wafer storage box of the present invention;

[0020] Figure 2 It is a front view of the box body of a wafer storage box of the present invention;

[0021] Figure 3 It is a schematic installation diagram of the box body and the box cover of a wafer storage box of the present invention;

[0022] Figure 4 It is a left - hand view of the box body of a wafer storage box of the present invention;

[0023] Figure 5 It is a right - hand view of the box body of a wafer storage box of the present invention;

[0024] Figure 6 It is a schematic structural diagram of a wafer storage box of the present invention, where a is a side view of the sleeve ring and the sleeve seat, b is a cross - sectional view of the sleeve ring, and c is a cross - sectional view of the sleeve seat.

[0025] In the figure: 1 box body, 2 limiting ring, 3 clamping ring, 4 sleeve ring, 41 special - shaped hole, 42 movable rod cavity, 5 movable rod, 6 pressing rod, 7 side cover, 71 elastic rubber sleeve, 8 sleeve seat, 9 push rod, 10 spring, 11 spring cover plate, 12 limit screw, 13 rod column, 14 sliding knob, 15 sliding groove, 16 elastic pad, 17 limiting hoop, 18 box cover, 19 bolt. Detailed implementation mode

[0026] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0027] Please refer to Figures 1-6 , a wafer storage box, including a box body 1 and a box cover 18. Inside the box body 1, at least two limiting rings 2 are fixedly installed. On the right side of the multiple limiting rings 2 and inside the box body 1, clamping rings 3 are movably installed. On the top and bottom of the multiple clamping rings 3, card sleeve rings 4 are fixedly installed. Inside the card sleeve rings 4 at the top and bottom, movable rods 5 are movably installed. On the left end of the movable rods 5 at the top and bottom and inside the box body 1, a pressing rod 6 is movably installed. On the left side of the pressing rod 6, a side cover 7 is movably installed. At the ends of the movable rods 5 at the top and bottom away from the pressing rod 6, card sleeve seats 8 are movably installed. Inside the two card sleeve seats 8, a top rod 9 is fixedly installed. On the right side of the top rod 9, two springs 10 are movably installed. On the right side of the two springs 10, a spring cover plate 11 is movably installed. On the right side of the spring cover plate 11, two limiting screws 12 are movably installed and extend into the box body 1. In the middle of the two springs 10 on the right side of the top rod 9, a rod column 13 is fixedly installed. On the front of the rod column 13, a sliding knob 14 is movably installed.

[0028] In this embodiment, limiting hoops 17 are fixedly installed on both the left and right sides of the box body 1. At the bottom of the box cover 18, two insertion pins 19 are fixedly installed. The box body 1 is adapted to the box cover 18, and the limiting hoops 17 on both sides of the box body 1 are adapted to the two insertion pins 19 at the bottom of the box cover 18. By inserting the insertion pins 19 into the limiting hoops 17, the box cover 18 is tightly covered on the box body 1.

[0029] In this embodiment, a card slot adapted to the outer side of the rod column 13 is opened inside the sliding knob 14. The connection mode between the sliding knob 14 and the rod column 13 is socket connection. The top end of the rod column 13 is inserted into the inside of the card slot. By sliding the sliding knob 14, the rod column 13 can be driven to move.

[0030] In this embodiment, a chute 15 adapted to the sliding knob 14 is opened on the front of the box body 1 and outside the sliding knob 14. Inside the chute 15, a sliding through slot adapted to the bottom of the sliding knob 14 is opened. The sliding knob 14 slides inside the sliding through slot, and the rod column 13 slides inside the chute 15. The width of the sliding knob 14 is greater than the width of the chute 15.

[0031] In this embodiment, the inner side of the clamping ring 3 is arc-shaped. Elastic pads 16 are fixedly bonded to both the top and bottom of the corresponding clamping ring 3 and the adjacent side of the corresponding limiting ring 2, which can provide buffering for the clamping action during rapid rebound, reduce hard contact, and provide better protection for the wafer.

[0032] In this embodiment, a through-shaped hole 41 is formed inside the sleeve ring 4. A movable rod clamping cavity 42 is formed inside the sleeve ring 4 and located outside the shaped hole 41. An unthrough-shaped hole 41 is formed inside the sleeve seat 8, and a movable rod clamping cavity 42 communicating with the shaped hole 41 is formed inside the sleeve seat 8. A clamping pin adapted to the movable rod clamping cavity 42 is fixedly installed on the outer side of the movable rod 5, so that the sleeve ring 4, the movable rod 5, and the sleeve seat 8 form a detachable kit, which is convenient for assembly and replacement of a single damaged part in the later stage.

[0033] In this embodiment, the side cover 7 is movably installed on the box body 1 through fixing screws. An elastic rubber sleeve 71 is fixedly installed in the middle of the side cover 7, and the length of the side cover 7 is greater than the length of the pressing rod 6.

[0034] In this embodiment, two slots adapted to the movable rod 5 are formed inside the pressing rod 6, and a movable cavity adapted to the pressing rod 6 is formed inside the box body 1.

[0035] In this embodiment, limiting ring sleeves are fixedly installed on the adjacent sides of the sleeve seat 8 and the spring cover plate 11, and the inner diameter of the limiting ring sleeve is adapted to the outer diameter of the spring 10.

[0036] In this embodiment, an installation groove adapted to the spring cover plate 11 is formed on the right side of the box body 1, and the depth of the installation groove is greater than the thickness of the spring cover plate 11, which is convenient for adjusting the clamping of wafers with different thicknesses in the later stage.

[0037] When this embodiment is in use, when there is another baffle on the working table, place the spring cover plate 11 surface of the box body 1 flush with the baffle. The operator presses the elastic rubber sleeve 71 with the left hand, so that the pressing rod 6 drives the movable rod 5, the clamping ring 4 and the clamping ring 3 to move towards one side of the spring cover plate 11. The gap between the clamping ring 3 and the inner side of the corresponding limiting ring 2 increases. The operator can use tweezers to pick and place the wafer inside the clamping ring 3 and the corresponding limiting ring 2 with the right hand. After the operation is completed, slowly release the pressed elastic rubber sleeve 71. The spring 10 pushes the ejector rod 9 towards the side away from the spring cover plate 11, and then pushes the clamping ring 3 towards the side of the corresponding limiting ring 2, which can provide clamping and fixing for the wafer placed inside the limiting ring 2 and the clamping ring 3. When there is no other baffle on the working table, press the sliding knob 14 with one hand and push it towards the spring cover plate 11 side, thereby driving the gap between the clamping ring 3 and the inner side of the corresponding limiting ring 2 to increase. The operator can perform the pick-and-place operation of the wafer. After the pick-and-place operation is completed, slowly release the sliding knob 14. The spring 10 pushes the ejector rod 9 towards the side away from the spring cover plate 11, and then pushes the clamping ring 3 towards the side of the corresponding limiting ring 2, which can provide clamping and fixing for the wafer placed inside the limiting ring 2 and the clamping ring 3.

[0038] The beneficial effects of the above embodiment are as follows:

[0039] For this wafer storage box, by setting the clamping ring 3, the clamping sleeve ring 4, the movable rod 5, the clamping sleeve seat 8, the ejector rod 9, two springs 10 and the spring cover plate 11, after the spring cover plate 11 is fixed on the box body 1, the spring 10 pushes the ejector rod 9 towards the side away from the spring cover plate 11, and then pushes the clamping ring 3 towards the side of the corresponding limiting ring 2, which can achieve the purpose of clamping and fixing the wafer placed inside the limiting ring 2 and the clamping ring 3.

[0040] For this wafer storage box, by setting the pressing rod 6, the side cover 7 and the elastic rubber sleeve 71, pressing the elastic rubber sleeve 71 makes the pressing rod 6 drive the movable rod 5 to move towards the spring cover plate 11 direction. The gap between the clamping ring 3 and the inner side of the corresponding limiting ring 2 increases, which is convenient for the pick-and-place of the wafer. At the same time, by setting the rod column 13, the sliding knob 14 and the sliding groove 15, by pushing the sliding knob 14 towards the spring cover plate 11 direction, the gap between the clamping ring 3 and the inner side of the corresponding limiting ring 2 increases, which is convenient for the pick-and-place of the wafer. Multiple pushing methods are convenient for the pick-and-place work of the wafer in multiple scenarios.

[0041] For this wafer storage box, by setting an installation groove on the right side of the box body 1 that is adapted to the spring cover plate 11, and the depth of the installation groove is greater than the plate thickness of the spring cover plate 11. By turning the limit screw 12, the left-right movement range of the spring cover plate 11 can be adjusted, and then the telescopic length path of the spring 10 can be controlled to adjust the appropriate clamping force for wafer storage.

[0042] It should be noted that, in this document, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variation thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements not only includes those elements but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or device. Without further limitation, an element defined by the phrase "comprising an..." does not exclude the presence of additional identical elements in the process, method, article or device comprising said element.

[0043] Although embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A wafer storage box, comprising a box body (1), characterized in that: Inside the box body (1), there are fixed and installed no less than two limiting rings (2). On the right side of the multiple limiting rings (2) and inside the box body (1), there are movably installed clamping rings (3). On the top and bottom of the multiple clamping rings (3), there are fixed and installed clamping sleeve rings (4). Inside the top and bottom clamping sleeve rings (4), there are movably installed movable rods (5). On the left end of the top and bottom movable rods (5) and inside the box body (1), there is movably installed a pressing rod (6). On the left side of the pressing rod (6), there is movably installed a side cover (7). At the ends of the top and bottom movable rods (5) far away from the pressing rod (6), there are movably installed clamping sleeve seats (8). Inside the two clamping sleeve seats (8), there is fixed and installed a top rod (9). On the right side of the top rod (9), there are movably installed two springs (10). On the right side of the two springs (10), there is movably installed a spring cover plate (11). On the right side of the spring cover plate (11), there are movably installed two limiting screws (12) that extend into the interior of the box body (1). On the right side of the top rod (9) and in the middle of the two springs (10), there is fixed and installed a rod column (13). On the front of the rod column (13), there is movably installed a sliding knob (14).

2. A wafer storage box according to claim 1, comprising a box cover (18), characterized in that: On the left and right sides of the box body (1), there are fixed and installed limiting hoops (17). At the bottom of the box cover (18), there are fixed and installed two pins (19). The box body (1) is adapted to the box cover (18), and the limiting hoops (17) on both sides of the box body (1) are adapted to the two pins (19) at the bottom of the box cover (18).

3. A wafer storage box according to claim 1, characterized in that: Inside the sliding knob (14), there is a card slot adapted to the outer side of the rod column (13), and the connection mode between the sliding knob (14) and the rod column (13) is socket connection.

4. A wafer storage box according to claim 1, characterized in that: On the front of the box body (1) and outside the sliding knob (14), there is a chute (15) adapted to the sliding knob (14), and inside the chute (15), there is a sliding through slot adapted to the bottom of the sliding knob (14).

5. The wafer storage box according to claim 1, wherein: The inner side of the clamping ring (3) is arc-shaped, and on the top and bottom of the corresponding clamping ring (3) and the side close to the corresponding limiting ring (2), there are fixed and bonded elastic pads (16).

6. The wafer storage box according to claim 1, characterized in that: Inside the clamping sleeve ring (4), there is a through-shaped special-shaped hole (41). Inside the clamping sleeve ring (4) and outside the special-shaped hole (41), there is a movable rod clamping cavity (42). Inside the clamping sleeve seat (8), there is an unthrough special-shaped hole (41), and inside the clamping sleeve seat (8), there is a movable rod clamping cavity (42) connected to the special-shaped hole (41). On the outer side of the movable rod (5), there is fixed and installed a card tip adapted to the movable rod clamping cavity (42).

7. A wafer storage box according to claim 1, characterized in that: The side cover (7) is movably installed on the box body (1) through a fixing screw. In the middle of the side cover (7), there is fixed and installed an elastic rubber sleeve (71), and the length of the side cover (7) is greater than the length of the pressing rod (6).

8. A wafer storage box according to claim 1, characterized in that: Inside the pressing rod (6), there are two slots adapted to the movable rods (5), and inside the box body (1), there is a movable cavity adapted to the pressing rod (6).

9. A wafer storage box according to claim 1, characterized in that: On the sides of the ferrule seat (8) and the spring cover plate (11) close to each other, limiting ring sleeves are fixedly installed, and the inner diameter of the limiting ring sleeve is adapted to the outer diameter of the spring (10).

10. A wafer storage box according to claim 1, characterized in that: An installation groove adapted to the spring cover plate (11) is provided on the right side of the box body (1), and the depth of the installation groove is greater than the thickness of the spring cover plate (11).

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