Liftable magnetic suspension device and heat treatment equipment

Abstract

The invention provides a liftable magnetic suspension device and heat treatment equipment, the magnetic suspension device comprises a cavity, a magnetic suspension stator, a magnetic suspension rotor, a lifting device and a plurality of sensors, the cavity is used for accommodating the magnetic suspension rotor, and the magnetic suspension stator surrounds the periphery of the cavity. Wherein the at least one sensor and the magnetic suspension stator are relatively fixed, the at least one sensor is used for detecting the displacement of the magnetic suspension rotor, the magnetic suspension stator is connected with the lifting device, and the lifting device is used for driving the magnetic suspension stator and the at least one sensor to axially move along the magnetic suspension device. The at least one sensor and the magnetic suspension stator are relatively fixed, the at least one sensor moves along with the magnetic suspension stator, the detection precision of the sensor on the magnetic suspension rotor is improved, and the magnetic suspension rotor can be greatly lifted in the axial direction of the magnetic suspension device through the lifting device. Impurity activation degree maximization and impurity diffusion degree minimization in the peak annealing process are facilitated, and thermal budget can be reduced.

Description

[0001] This application claims the priority of a Chinese patent application with an application number of 202410645953.7 and an invention title of "Liftable Maglev Device and Heat Treatment Equipment" filed with the China National Intellectual Property Administration on May 22, 2024, the entire content of which is incorporated herein by reference. Technical Field

[0002] This application relates to the field of integrated circuit manufacturing processes, and particularly to a liftable maglev device and a heat treatment equipment. Background Art

[0003] Rapid Thermal Treatment (RTP) equipment is widely used in integrated circuit manufacturing processes such as rapid thermal annealing, rapid thermal oxidation, rapid thermal nitridation, rapid thermal diffusion, and rapid chemical vapor deposition, for changing electrical or physical properties such as the dielectric constant, conductivity, and densification of materials. Usually, a maglev motor is used to adjust the position of a substrate in the chamber of the maglev device. Currently, the maglev device can only achieve attitude balance control in the axial direction, enabling the axial horizontal movement of the maglev rotor during rotation. However, the distance of axial movement of the maglev rotor controlled by the suspension coil is very limited, only supporting the axial micro-movement of the maglev rotor. Generally, the adjusted displacement does not exceed 1 mm, and large-stroke lifting movement cannot be achieved. Summary of the Invention

[0004] Embodiments of this application provide a liftable maglev device and a heat treatment equipment.

[0005] In a first aspect, this application provides a liftable maglev device. The maglev device includes a chamber, a maglev stator, a maglev rotor, a lifting device, and multiple sensors. The chamber is used to accommodate the maglev rotor, and the maglev stator surrounds the outer periphery of the chamber. Among them, at least one sensor is relatively fixed to the maglev stator, and at least one sensor is used to detect the displacement of the maglev rotor. The maglev stator is connected to the lifting device, and the lifting device is used to drive the maglev stator and at least one sensor to move along the axial direction of the maglev device.

[0006] In the embodiments of this application, the lifting device is used to drive the maglev stator to move up and down along the axial direction of the maglev device, achieving a large-stroke range of movement of the maglev stator along the axial direction of the maglev device, and further enabling the maglev rotor to move a large stroke along the axial direction of the maglev device. Compared with the situation without a lifting device, where only the maglev stator drives the maglev rotor to move along the axial direction of the maglev device and the driving stroke range of the maglev stator is limited, in this application, the lifting device drives the maglev stator, making the stroke range of the maglev rotor larger.

[0007] In an embodiment of the present application, when the lifting device drives the magnetic levitation stator to move axially along the magnetic levitation device, the magnetic levitation stator drives the magnetic levitation rotor to move axially along the magnetic levitation device. At this time, at least one sensor is relatively fixed to the magnetic levitation stator, and at least one sensor moves axially along the magnetic levitation device with the magnetic levitation stator, so that the distance between at least one sensor and the magnetic levitation rotor remains unchanged. Furthermore, high-precision detection of the magnetic levitation rotor by at least one sensor is realized, which is beneficial to better control the relative position between the magnetic levitation stator and the magnetic levitation rotor, ensure the stable suspension and rotation of the magnetic levitation rotor during the axial lifting along the magnetic levitation device, and is beneficial to improving the flexibility and controllability of the magnetic levitation device.

[0008] In one embodiment, at least one sensor includes an axial displacement sensor, and the axial displacement sensor is used to detect the axial displacement of the magnetic levitation rotor, and the axial displacement sensor is relatively fixed to the magnetic levitation stator.

[0009] In an embodiment of the present application, the axial displacement sensor is generally a high-precision detector. To achieve high-precision detection of the axial displacement of the magnetic levitation rotor, it is necessary to control the distance between the axial displacement sensor and the magnetic levitation rotor within a small range. By relatively fixing the axial displacement sensor to the magnetic levitation stator, when controlling the magnetic levitation stator to move axially up and down along the magnetic levitation device following the magnetic levitation rotor, the axial displacement sensor can also move with the movement of the magnetic levitation stator, thereby ensuring that the axial displacement sensor and the magnetic levitation rotor are always within a relatively close distance range, facilitating high-precision detection of the magnetic levitation rotor by the axial displacement sensor, transmitting reliable position signals, and thus precisely controlling the displacement of the magnetic levitation rotor moved by the lifting device, enabling the magnetic levitation rotor to stably levitate.

[0010] In one embodiment, the chamber includes a top wall and a bottom wall that are oppositely arranged along the axial direction of the magnetic levitation device. The top wall includes an opening, and the opening axially penetrates the top wall along the axial direction of the magnetic levitation device, and / or the bottom wall includes an opening, and the opening axially penetrates the bottom wall along the axial direction of the magnetic levitation device. The axial displacement sensor passes through the opening and moves axially relative to the chamber along the axial direction of the magnetic levitation device.

[0011] In an embodiment of the present application, the axial displacement sensor is disposed through the opening. When the magnetic levitation stator moves axially up and down along the magnetic levitation device, the magnetic levitation stator can drive the axial displacement sensor to pass through the opening and move axially relative to the chamber along the axial direction of the magnetic levitation device through the connecting mechanism. The opening provides space for the axial displacement sensor to be disposed through the bottom wall of the chamber, which is beneficial for the axial displacement sensor to pass through the opening and move axially relative to the chamber when following the magnetic levitation stator to move axially up and down along the magnetic levitation device, facilitating the axial displacement sensor to detect the position information of the magnetic levitation rotor.

[0012] In one embodiment, the chamber includes a bottom wall, the bottom wall includes an opening, the opening axially penetrates the bottom wall along the magnetic levitation device, the axial displacement sensor is disposed through the opening, and the detection end of the axial displacement sensor is located inside the chamber, and the detection end of the axial displacement sensor and the magnetic levitation rotor are arranged at intervals along the axial direction of the magnetic levitation device.

[0013] In the embodiment of the present application, the bottom wall of the chamber has an opening, which provides space for the axial displacement sensor to be disposed through the bottom wall of the chamber. The opening axially penetrates the bottom wall along the magnetic levitation device, which is beneficial to the smooth arrangement of the axial displacement sensor through the opening. The detection end of the axial displacement sensor is located inside the chamber, so that the axial displacement sensor can better detect the position information of the magnetic levitation rotor in the chamber. The detection end of the axial displacement sensor and the magnetic levitation rotor are arranged at intervals along the axial direction of the magnetic levitation device. The axial displacement sensor detects the relative position between the lower end surface of the magnetic levitation rotor and the axial displacement sensor. The detection end of the axial displacement sensor and the magnetic levitation rotor are arranged at intervals along the axial direction of the magnetic levitation device, which provides space for the axial displacement sensor to emit detection signals to the magnetic levitation rotor, facilitating the axial displacement sensor to detect the position information of the magnetic levitation rotor.

[0014] In one embodiment, the axial displacement sensor includes a probe, a housing, and a connecting wire. The inner wall of the housing encloses to form a receiving cavity. The receiving cavity and the chamber are isolated by the housing. The air pressure in the receiving cavity is greater than the air pressure in the chamber. The probe and the connecting wire are located in the receiving cavity. The probe is used to detect the relative position of the magnetic levitation rotor along the axial direction of the magnetic levitation device relative to the magnetic levitation stator, and the connecting wire is electrically connected to the probe.

[0015] In the embodiment of the present application, the probe and the connecting wire are located in the receiving cavity, and the gas environment in the receiving cavity is independent of the gas environment in the chamber. The air pressure in the receiving cavity is greater than the air pressure in the chamber, and the higher air pressure in the receiving cavity makes the breakdown voltage of the gas higher, reducing the risk of insulation failure of the insulating material of the electrical components in the axial displacement sensor, ensuring that the probe and the connecting wire can work normally, and ultimately ensuring the relative position stability of the magnetic levitation rotor and the magnetic levitation stator in the heat treatment equipment, avoiding warping or lattice defects of the substrate during rapid heat treatment, and improving the process yield.

[0016] In one embodiment, the material of the housing includes a vacuum sealing material, and the outgassing rate of the vacuum sealing material is less than 1.0 Pa·L / s / m 2 .

[0017] In the embodiments of the present application, the housing made of a vacuum sealing material has good vacuum isolation performance, which can ensure that the atmospheric pressure in the accommodation cavity is different from the atmospheric pressure in the chamber, and the atmospheric pressure in the accommodation cavity is always greater than the atmospheric pressure in the chamber. In addition, the vacuum sealing material has a low outgassing rate and is not prone to generating H2O and C x H y outgassing, which helps to maintain the internal cleanliness of the chamber for a long time, improving the yield and performance of semiconductor products.

[0018] In one embodiment, the housing has an opening on a side away from the magnetic levitation rotor, the opening is connected to the accommodation cavity, and the connection line is electrically connected to the probe and passes out of the accommodation cavity through the opening.

[0019] In the embodiments of the present application, the housing of the axial displacement sensor is provided with an opening on a side away from the magnetic levitation rotor, and the opening is connected to the accommodation cavity, providing ventilation for the accommodation cavity or a channel for connecting other devices to the structures located in the accommodation cavity. The connection line is electrically connected to the probe and passes out of the accommodation cavity through the opening. The probe can be electrically connected to external devices or control systems through the connection line to achieve data transmission or monitoring functions.

[0020] In one embodiment, the air pressure in the chamber is in the range of 1 Pa to 100 Pa. In the embodiments of the present application, the environment in the chamber is a vacuum environment, the air pressure in the chamber is low, and the content of oxygen or other impurities is low. Under such conditions, heat treatment can avoid oxidation reactions and contamination by impurities, which is beneficial to maintaining the purity of the material surface.

[0021] In one embodiment, the air pressure in the accommodation cavity is in the range of 90 kPa to 110 kPa. In the embodiments of the present application, the environment in the accommodation cavity is an atmospheric environment. The probe and the connection line are placed in the accommodation cavity under atmospheric pressure. The air pressure in the atmospheric environment is higher than that in the vacuum environment, and the breakdown voltage of the gas is higher, effectively increasing the breakdown voltage threshold of the surrounding gas and reducing the risk of insulation material breakdown due to excessive electric field strength, effectively preventing the problem of insulation failure. Thus, the probe and the connection line can work normally, and the detection signal of the axial displacement sensor can be transmitted to external devices or control systems to effectively detect the position of the magnetic levitation rotor, ultimately avoiding warping or lattice defects of the substrate during rapid heat treatment. The probe and the connection line of the axial displacement sensor are located in the atmospheric environment, and the H2O and C x H y outgassing speed is relatively low, having little impact on the high-temperature heat treatment process of the substrate and the product quality.

[0022] In one embodiment, the wall thickness of the housing ranges from 0.2 mm to 1 mm. In the embodiments of the present application, the wall thickness of the housing ranges from 0.2 mm to 1 mm. On the one hand, it is easier for the axial displacement sensor probe to detect through the wall of the housing, which is beneficial to improving the detection accuracy of the axial displacement sensor. On the other hand, the air pressure in the accommodation cavity is greater than that in the chamber, there is a pressure difference between the accommodation cavity and the chamber, and the wall thickness of the housing in the range of 0.2 mm to 1 mm can resist the deformation of the housing caused by the pressure difference.

[0023] In one embodiment, the number of the probes is at least two, and the at least two probes are arranged along the axis of the magnetic levitation device. In the embodiments of the present application, the at least two probes can be in contact with each other, or each probe can be spaced apart. The types of multiple probes can be the same or different. Among them, multiple probes can be detection probes and compensation probes respectively. The compensation probe can perform non-linear compensation such as temperature compensation on the detection probe, so as to eliminate the influence of the non-linear error of the first signal and effectively improve the accuracy and stability of detection. Or the probe can be a differential detection probe, and the differential probe improves the detection resolution through differential non-linear compensation.

[0024] In one embodiment, the number of the axial displacement sensors is at least three, and the vertical distances from the detection ends of the at least three axial displacement sensors to the magnetic levitation rotor are equal.

[0025] In the embodiments of the present application, the vertical distances from the detection ends of the at least three axial displacement sensors to the magnetic levitation rotor are equal, which can ensure that each axial displacement sensor maintains a constant distance from the magnetic levitation rotor, helps to ensure that each axial displacement sensor has the same detection and perception ability for the magnetic levitation rotor, and improves the accuracy and stability of the measurement of the axial displacement sensor. At the same time, it can also more conveniently adjust the position between the axial displacement sensor and the magnetic levitation rotor, and improve the installation convenience of the axial displacement sensor and the rotor installation.

[0026] In one embodiment, the number of the axial displacement sensors is at least three, and the at least three axial displacement sensors are evenly distributed along the circumferential direction of the magnetic levitation device.

[0027] In the embodiments of the present application, the at least three axial displacement sensors are evenly distributed along the circumferential direction of the magnetic levitation device, which can cover different regions of the magnetic levitation rotor, can better capture the dynamic changes of the position of the magnetic levitation rotor during rotation, avoid blind spots or measurement deviations caused by uneven distribution of the axial displacement sensors, realize the omnidirectional measurement of the magnetic levitation rotor, and improve the reliability and accuracy of the detection of the axial displacement sensor.

[0028] In one embodiment, the magnetic levitation device includes a sensor connection mechanism and an elastic sealing tube. The sensor connection mechanism is used to fixedly connect the magnetic levitation stator and the axial displacement sensor. The elastic sealing tube is sleeved on the outer periphery of the axial displacement sensor, and both ends of the elastic sealing tube are fixedly connected to the bottom wall and the sensor connection mechanism respectively.

[0029] In the embodiment of the present application, the sensor connection mechanism is used to fixedly connect the magnetic levitation stator and the axial displacement sensor. When the lifting device drives the magnetic levitation stator to move up and down along the axis of the magnetic levitation device, the axial displacement sensor fixed to the sensor connection mechanism also moves up and down along the axis of the magnetic levitation device. The axial displacement sensor passes through the opening in the bottom wall of the chamber, and the elastic sealing tube is sleeved on the outer periphery of the axial displacement sensor, which can isolate the axial displacement sensor from the external atmospheric environment and ensure cleanliness. The elastic sealing tube itself has elasticity. When the sensor connection mechanism drives the elastic sealing tube to stretch or compress along the axis of the magnetic levitation device, the bottom wall of the chamber will not move, and the elastic sealing tube can absorb the relative displacement between the chamber and the axial displacement sensor, so that the axial displacement sensor is always in an environment isolated from the external atmosphere.

[0030] In one embodiment, the sensor connection mechanism includes a first connection part and a second connection part. The first connection part is used for relatively fixing with the magnetic levitation stator, the second connection part is used for connecting with the housing, the first connection part is connected with the second connection part, the first connection part extends along the direction towards the magnetic levitation stator, and the second connection part extends along the direction perpendicular to the axis of the magnetic levitation device from the connection point with the first connection part.

[0031] In the embodiment of the present application, the first connection part and the second connection part are connected to form a sensor connection mechanism for connecting the axial displacement sensor and the magnetic levitation stator, ensuring that the axial displacement sensor moves when the magnetic levitation stator moves along the axis of the magnetic levitation device.

[0032] In one embodiment, the first connection part has a cylindrical structure. The side of the first connection part facing away from the magnetic levitation stator is connected to the second connection part. The second connection part extends towards the inside of the first connection part along the radial direction of the first connection part from the connection point with the first connection part to form an annular structure. The magnetic levitation rotor, the first connection part and the second connection part are coaxially arranged.

[0033] In the embodiment of the present application, the connection mechanism and the magnetic levitation rotor are arranged at intervals in the axial direction of the magnetic levitation device. The connection mechanism includes a first connection part and a second connection part. The first connection part is cylindrical and the second connection part is annular, which is beneficial to improving the strength of the connection mechanism and the stability of the connection mechanism during movement.

[0034] In one embodiment, the sensor connection mechanism includes a first connection portion, a second connection portion, and a third connection portion. The first connection portion is used for being relatively fixed to the magnetic levitation stator. The second connection portion is used for connecting the first connection portion and the third connection portion. The third connection portion is used for connecting the housing. The first connection portion extends in a direction towards the magnetic levitation stator. The second connection portion extends in a direction perpendicular to the axial direction of the magnetic levitation device from the connection point with the first connection portion. The third connection portion extends in a direction towards the magnetic levitation rotor.

[0035] In the embodiment of the present application, the third connection portion is beneficial to increasing the moving distance of the axial displacement sensor in the axial direction of the magnetic levitation device, and is also beneficial to reducing the requirement for the length of the axial displacement sensor itself, so that the length of the axial displacement sensor itself does not need to be too large, saving costs.

[0036] In one embodiment, the number of the sensor connection mechanisms is at least three, and the at least three sensor connection mechanisms are arranged at intervals along the circumferential direction of the magnetic levitation device. The at least three connection mechanisms are independent of each other, which is beneficial to reducing the material consumption for preparing the connection mechanisms and saving costs.

[0037] In one embodiment, one side of the housing facing the sensor connection mechanism is hermetically connected to the sensor connection mechanism, and the housing and the sensor connection mechanism are used for hermetically isolating the accommodation cavity and the chamber.

[0038] In the embodiment of the present application, one side of the housing facing the connection mechanism is hermetically connected to the connection mechanism, and the housing and the connection mechanism are sealed at the connection point, so that the accommodation cavity and the chamber are hermetically isolated through the connection mechanism and the housing, ensuring that the air pressures in the accommodation cavity and the chamber are different, and reducing the risk of insulation failure of the insulating material in the electrical components of the axial displacement sensor.

[0039] In one embodiment, a channel is provided in the sensor connection mechanism, and the channel is communicated with the accommodation cavity, and at least part of the connection line is located in the channel. The channel is used for providing a routing path for the connection line, facilitating the electrical connection between the connection line and external devices or control systems.

[0040] In one embodiment, the chamber includes a top wall and a bottom wall arranged oppositely along the axial direction of the magnetic levitation device. The chamber further includes an outer wall arranged along the circumferential direction of the magnetic levitation device. Along the radial direction of the magnetic levitation device, the magnetic levitation stator, the outer wall, and the magnetic levitation rotor are arranged at intervals in sequence. The outer wall is located between the top wall and the bottom wall. The magnetic levitation device further includes an elastic seal, and the elastic seal is connected to the top wall and / or the outer wall. The elastic seal expands and contracts along the axial direction of the magnetic levitation device, and the bottom wall moves along the axial direction of the magnetic levitation device relative to the top wall.

[0041] In an embodiment of the present application, the elastic seal has elasticity and can expand and contract. The elastic seal can be connected to the top wall, or the elastic seal can be connected to the outer side wall, or the elastic seal can be respectively connected to the top wall and the outer side wall. The bottom wall moves axially relative to the top wall through the elastic seal, enabling partial chambers to move synchronously with a large stroke along the axial direction of the magnetic levitation device, increasing the moving range of the magnetic levitation device along the axial direction of the magnetic levitation device. The magnetic levitation rotor can adjust the relative position of the substrate between the cold source and the heat source within a large range, which is beneficial to reducing the thermal budget.

[0042] In one embodiment, at least a part of the housing is located within the chamber, and the sensor connection mechanism or the housing is hermetically connected to the elastic seal.

[0043] In an embodiment of the present application, the sensor connection mechanism, the elastic seal, the top wall, the outer side wall, and the bottom wall enclose a sealed environment, or the housing, the elastic seal, the top wall, the outer side wall, and the bottom wall enclose a sealed environment, thereby ensuring the vacuum and high cleanliness requirements within the chamber.

[0044] In one embodiment, both sides of the sensor connection mechanism or the housing along the axial direction of the magnetic levitation device are respectively hermetically connected to the elastic seal and the outer side wall. The sensor connection mechanism, the elastic seal, the top wall, the outer side wall, and the bottom wall enclose a sealed environment, or the housing, the elastic seal, the top wall, the outer side wall, and the bottom wall enclose a sealed environment, thereby ensuring the vacuum and high cleanliness requirements within the chamber.

[0045] In one embodiment, the number of the elastic seals is at least two. The at least two elastic seals are arranged along the axial direction of the magnetic levitation device. The sensor connection mechanism or the housing is located between the at least two elastic seals. Both sides of the sensor connection mechanism or the housing along the axial direction of the magnetic levitation device are respectively hermetically connected to the at least two elastic seals. The sensor connection mechanism, the elastic seal, the top wall, the outer side wall, and the bottom wall enclose a sealed environment, or the housing, the elastic seal, the top wall, the outer side wall, and the bottom wall enclose a sealed environment, thereby ensuring the vacuum and high cleanliness requirements within the chamber.

[0046] In one embodiment, the axial displacement sensors are arranged radially along the magnetic levitation device outside the chamber, and the axial displacement sensors and the magnetic levitation rotor are arranged at intervals radially along the magnetic levitation device.

[0047] In an embodiment of the present application, the axial displacement sensors are arranged radially outside the chamber along the magnetic levitation device. The emitted signals of the axial displacement sensors can penetrate the side wall of the chamber to reach the magnetic levitation rotor. By arranging two axial displacement sensors axially on the magnetic levitation device, the position of the magnetic levitation rotor is detected, and the displacement of the magnetic levitation rotor moving along the axial direction of the magnetic levitation device is calculated using the changes in the displacement signals of the magnetic levitation rotor detected by the two axial displacement sensors.

[0048] In one embodiment, at least one sensor further includes a radial displacement sensor for detecting the radial displacement of the magnetic levitation rotor. The radial displacement sensor is arranged radially outside the chamber along the magnetic levitation device, and the radial displacement sensor and the magnetic levitation rotor are arranged at intervals along the radial direction of the magnetic levitation device.

[0049] In the implementation of the present application, along the radial direction of the magnetic levitation device, the radial displacement sensor, the outer side wall of the chamber, and the magnetic levitation rotor are arranged at intervals in sequence. Along the radial direction of the magnetic levitation device, the projection of the magnetic levitation rotor covers the projection of the radial displacement sensor. The radial displacement sensor is arranged inside the magnetic levitation stator, so that the radial displacement sensor can move synchronously with the magnetic levitation stator to detect the radial displacement of the magnetic levitation rotor, which is beneficial to reducing the installation position requirements of the radial displacement sensor. In addition, the radial displacement sensor is adjusted with the position of the magnetic levitation rotor, making it easier for the radial displacement sensor to accurately detect the radial displacement of the magnetic levitation rotor and reducing the length requirement of the magnetic levitation rotor along the axial direction of the magnetic levitation device.

[0050] In one embodiment, the chamber includes an inner side wall arranged circumferentially along the magnetic levitation device. Along the radial direction of the magnetic levitation device, the magnetic levitation stator, the magnetic levitation rotor, and the inner side wall are arranged at intervals in sequence. The inner side wall includes a through hole that penetrates the inner side wall along the radial direction of the magnetic levitation device. The detection end of the radial displacement sensor passes through the through hole and extends into the chamber. The main body of the radial displacement sensor is connected to the detection end of the radial displacement sensor and extends along the axial direction of the magnetic levitation device. The main body of the radial displacement sensor is hermetically connected to the side of the inner side wall facing away from the magnetic levitation rotor.

[0051] In an embodiment of the present application, the detection end of the radial displacement sensor extends into the chamber along the radial direction of the magnetic levitation device through the through hole for detecting the radial position of the magnetic levitation rotor, making the detection result of the radial displacement sensor more accurate. The main body of the radial displacement sensor is connected to the detection end of the radial displacement sensor and extends along the axial direction of the magnetic levitation device. The detection end of the radial displacement sensor is perpendicular to the main body of the radial displacement sensor. The main body of the radial displacement sensor is located outside the chamber and is hermetically connected to the side of the inner side wall facing away from the magnetic levitation rotor, capable of maintaining the vacuum environment inside the chamber.

[0052] In one embodiment, at least one sensor further includes a rotation sensor configured to detect the rotation angle of the magnetic levitation rotor. The rotation sensor is arranged radially along the magnetic levitation device outside the chamber, and the rotation sensor and the magnetic levitation rotor are arranged at a radial interval along the magnetic levitation device.

[0053] In the embodiment of the present application, the rotation sensor is arranged radially along the magnetic levitation device outside the chamber, and the signal emitted by the rotation sensor penetrates the outer wall of the chamber to detect the magnetic levitation rotor. The rotation sensor and the magnetic levitation rotor are arranged at a radial interval along the magnetic levitation device, which facilitates the rotation sensor to emit a detection signal to the magnetic levitation rotor and receive the detection signal reflected back by the magnetic levitation rotor. The rotation sensor is fixed inside the magnetic levitation stator. The rotation sensor can move with the movement of the magnetic levitation stator, move relative to the magnetic levitation rotor, and maintain a relatively small distance from the magnetic levitation rotor, improving the detection accuracy of the rotation sensor for the magnetic levitation rotor.

[0054] In one embodiment, the magnetic levitation stator includes a plurality of rotating motors and a plurality of magnetic bearings. The magnetic levitation rotor includes an annular yoke, a first circular ring convex portion, and a plurality of tooth portions. The first circular ring convex portion and the plurality of tooth portions are fixed on the outer peripheral side of the annular yoke and are axially spaced apart along the magnetic levitation device. Radially along the magnetic levitation device, the first circular ring convex portion and the plurality of tooth portions protrude from the outer peripheral surface of the annular yoke. The plurality of tooth portions are circumferentially spaced apart along the magnetic levitation device. Each rotating motor is configured to interact with at least one of the plurality of tooth portions to drive the magnetic levitation rotor to rotate, and the plurality of magnetic bearings are configured to interact with the first circular ring convex portion to drive the magnetic levitation rotor to displace radially or axially along the magnetic levitation device.

[0055] In the embodiment of the present application, the annular yoke is used to fix the first circular ring convex portion and the plurality of tooth portions. The first circular ring convex portion and the plurality of tooth portions are fixed on the outer peripheral side of the annular yoke and are axially spaced apart, which facilitates the magnetic levitation stator to generate magnetic field acting forces on the first circular ring convex portion and the plurality of tooth portions of the magnetic levitation rotor respectively, and drive the magnetic levitation rotor to displace. Radially along the magnetic levitation device, the first circular ring convex portion and the plurality of tooth portions protrude from the outer peripheral surface of the annular yoke, which is beneficial for the magnetic levitation stator to perform circumferential rotation and axial lifting when generating acting forces on the magnetic levitation rotor. The magnetic levitation stator drives the first circular ring convex portion and the plurality of tooth portions to move simultaneously, causing the annular yoke to move together, which is beneficial for reducing the magnitude of the applied magnetic field acting force.

[0056] In the embodiment of the present application, the plurality of tooth portions are circumferentially spaced apart along the magnetic levitation device, so that when the magnetic levitation stator applies magnetic force to the tooth portions, the plurality of tooth portions can act simultaneously, enabling the magnetic levitation rotor to generate a larger acting force for driving the magnetic levitation rotor to rotate circumferentially, and better realizing the levitation rotation of the magnetic levitation rotor.

[0057] In one embodiment, each tooth portion includes two end faces that are radially opposite to each other in the magnetic levitation device, and the area of one end face of each tooth portion close to the rotary motor is larger than the area of the other end face.

[0058] In the embodiment of the present application, designing the area of one end face of the tooth portion close to the rotary motor to be larger is beneficial to increasing the relative position area between the tooth portion and the rotary motor, beneficial to increasing the detection working area of the tooth portion by the rotary sensor, and facilitating the smooth development of the work of the rotary sensor. In addition, compared with the case where the areas of both end faces of the tooth portion are set to be larger, only setting the area of one end face opposite to the rotary motor to be larger is convenient for reducing the material usage of multiple tooth portions, reducing the weight of the magnetic levitation rotor, making the magnetic levitation rotor more lightweight when lifting or rotating circumferentially along the axis of the magnetic levitation device, and reducing the magnetic field force required for the magnetic levitation stator to drive the magnetic levitation rotor to move.

[0059] In one embodiment, the magnetic levitation rotor further includes a second annular convex portion, which is fixed to the outer peripheral side of the annular yoke portion. Along the radial direction of the magnetic levitation device, the second annular convex portion protrudes from the outer peripheral surface of the annular yoke portion. Along the axial direction of the magnetic levitation device, the second annular convex portion, the first annular convex portion, and multiple tooth portions are arranged at intervals in sequence. Multiple magnetic bearings are used to interact with the second annular convex portion to drive the magnetic levitation rotor to displace along the radial direction or the axial direction of the magnetic levitation device.

[0060] In the embodiment of the present application, the annular yoke portion is used to fix the second annular convex portion, the first annular convex portion, and multiple tooth portions. The second annular convex portion is fixed to the outer peripheral side of the annular yoke portion, and along the radial direction of the magnetic levitation device, the second annular convex portion protrudes from the outer peripheral surface of the annular yoke portion, which is convenient for multiple magnetic bearings to apply a magnetic field force to the second annular convex portion and is beneficial for multiple magnetic bearings to drive the magnetic levitation rotor to lift along the axial direction of the magnetic levitation device. Along the axial direction of the magnetic levitation device, the second annular convex portion, the first annular convex portion, and multiple tooth portions are arranged at intervals in sequence, which is beneficial for the rotary motor to apply a force to drive the magnetic levitation rotor to rotate circumferentially along the magnetic levitation device, and the magnetic bearings can also apply a force to drive the magnetic levitation rotor to lift along the axial direction of the magnetic levitation device to the magnetic levitation rotor without interference to the first annular convex portion and the second annular convex portion.

[0061] In one embodiment, multiple magnetic bearings include multiple radial magnetic bearings and multiple axial magnetic bearings. The multiple radial magnetic bearings and multiple axial magnetic bearings are arranged alternately at intervals in sequence along the circumferential direction of the magnetic levitation device. A part of each radial magnetic bearing is radially aligned with the first annular convex portion along the magnetic levitation device, and a part of each axial magnetic bearing is radially offset from the first annular convex portion along the magnetic levitation device.

[0062] In the embodiments of the present application, multiple radial magnetic bearings and multiple axial magnetic bearings are alternately arranged at intervals in sequence along the circumferential direction of the magnetic levitation device. The arrangement is regular, which is beneficial for the multiple radial magnetic bearings and the multiple axial magnetic bearings to drive the magnetic levitation rotor to move more stably and accurately in the radial direction of the magnetic levitation device and lift in the axial direction of the magnetic levitation device respectively along the circumferential direction of the magnetic levitation device. A part of each radial magnetic bearing is aligned with the first circular ring convex part along the radial direction of the magnetic levitation device, which is convenient for the multiple radial magnetic bearings to apply magnetic force along the radial direction of the magnetic levitation device to the first circular ring convex part, and drive the magnetic levitation rotor to move along the radial direction of the magnetic levitation device. A part of each axial magnetic bearing is offset from the first circular ring convex part along the radial direction of the magnetic levitation device, which is convenient for the multiple axial magnetic bearings to apply magnetic force along the axial direction of the magnetic levitation device to the first circular ring convex part, and drive the magnetic levitation rotor to move along the axial direction of the magnetic levitation device.

[0063] In one embodiment, multiple rotating motors and multiple magnetic bearings are distributed at intervals along the circumferential direction of the magnetic levitation device.

[0064] In the embodiments of the present application, multiple magnetic bearings and rotating motors are arranged along the axial direction of the magnetic levitation device. The rotating motors and multiple tooth parts are arranged opposite to each other along the radial direction of the magnetic levitation device, and multiple magnetic bearings and the first circular ring convex part and the second circular ring convex part are arranged opposite to each other along the radial direction of the magnetic levitation device. The multiple magnetic bearings drive the magnetic levitation rotor to displace along the axial direction and the radial direction of the magnetic levitation device by applying magnetic field force to the first circular ring convex part and the second circular ring convex part.

[0065] In one embodiment, multiple rotating motors and multiple magnetic bearings are distributed at intervals along the circumferential direction of the magnetic levitation device.

[0066] In the embodiments of the present application, along the circumferential direction of the magnetic levitation device, the rotating motors and multiple magnetic bearings are alternately arranged at intervals in sequence. Multiple tooth parts of the magnetic levitation rotor are arranged opposite to the rotating motors and multiple magnetic bearings along the radial direction of the magnetic levitation device at the same time. The multiple tooth parts can not only drive the magnetic levitation rotor to rotate along the circumferential direction of the magnetic levitation device, but also drive the magnetic levitation rotor to move along the axial direction and the radial direction of the magnetic levitation device.

[0067] In one embodiment, each magnetic bearing includes an axial part and two radial parts. The two radial parts are fixed at both ends of the axial part along the axial direction of the magnetic levitation device. Each radial part protrudes from the axial part towards the magnetic levitation rotor along the radial direction of the magnetic levitation device. The axial part is used for winding coils. By adopting the design that the radial part protrudes from the axial part towards the magnetic levitation rotor, it is convenient for each radial part to apply magnetic field force to the magnetic levitation rotor, and drive the magnetic levitation rotor to move along the axial direction and the radial direction of the magnetic levitation device, so that the substrate can be stably levitated and lifted in the magnetic levitation device, and the flexibility and controllability of the magnetic levitation device are improved.

[0068] In one embodiment, a radial portion of at least one magnetic bearing is radially aligned with at least one tooth portion along the radial direction of the magnetic levitation device. The radial portion is configured to interact with the at least one tooth portion to drive the magnetic levitation rotor to displace along the radial direction of the magnetic levitation device, along the axial direction of the magnetic levitation device, or to rotate circumferentially around the magnetic levitation device. Another radial portion of the at least one magnetic bearing is radially aligned with the first annular convex portion along the radial direction of the magnetic levitation device.

[0069] In an embodiment of the present application, a radial portion of at least one magnetic bearing is radially aligned with at least one tooth portion along the radial direction of the magnetic levitation device. The magnetic bearing has a C-shaped structure, and the cross-section of the structure formed by the annular yoke portion, the first annular convex portion, and the plurality of tooth portions of the magnetic levitation rotor is C-shaped. A radial portion of the magnetic bearing can drive the at least one tooth portion to move along the radial or axial direction of the magnetic levitation device, so as to realize the lifting of the magnetic levitation rotor along the axial direction of the magnetic levitation device and the movement along the radial direction of the magnetic levitation device. A radial portion of the magnetic bearing can also drive the at least one tooth portion to rotate circumferentially around the magnetic levitation device, so as to realize the circumferential rotation of the magnetic levitation rotor around the magnetic levitation device. Another radial portion of the at least one magnetic bearing is radially aligned with the first annular convex portion along the radial direction of the magnetic levitation device, so that the two radial portions of the magnetic bearing can simultaneously generate a force for moving the magnetic levitation rotor along the radial direction of the magnetic levitation device, making the movement process of the magnetic levitation rotor smoother. At the same time, the current flowing through the coil wound around the axial portion can also be reduced, and a smaller current can realize the movement of the magnetic levitation rotor.

[0070] In one embodiment, a radial portion of at least one magnetic bearing is radially aligned with the first annular convex portion along the radial direction of the magnetic levitation device. The radial portion is configured to interact with the first annular convex portion to drive the magnetic levitation rotor to displace along the radial direction and the axial direction of the magnetic levitation device. One radial portion is higher than the other radial portion.

[0071] In an embodiment of the present application, a radial portion of at least one magnetic bearing is radially aligned with the first annular convex portion along the radial direction of the magnetic levitation device, that is, a radial portion of the radial magnetic bearing is radially aligned with the first annular convex portion along the radial direction of the magnetic levitation device, which is convenient for driving the first annular convex portion of the magnetic levitation rotor to move along the radial direction and the axial direction of the magnetic levitation device. One radial portion is higher than the other radial portion, and the other radial portion is arranged opposite to the second circular convex portion, which is convenient for driving the second annular convex portion of the magnetic levitation rotor to move along the radial direction and the axial direction of the magnetic levitation device. One radial portion acts on the first annular convex portion, and at the same time, the other radial portion acts on the second annular convex portion, so that the magnetic bearing drives the magnetic levitation rotor to move more smoothly along the axial direction and the radial direction of the magnetic levitation device, which is beneficial to the processing of the substrate by the magnetic levitation device.

[0072] Second aspect, the present application provides a heat treatment device, which includes a heating source and a magnetic levitation device according to any one of the first aspects above. The heating source is used to heat the pre-treated product carried by the magnetic levitation rotor in the magnetic levitation device. In the heat treatment device of the present application, the magnetic levitation device drives the magnetic levitation stator to move through a lifting device, so that the stroke range of the magnetic levitation rotor is larger, and further the distance between the heating source and the pre-treated product carried by the magnetic levitation rotor is closer or farther, which is beneficial to controlling the temperature of heating the pre-treated product in a larger range and improving the quality of the pre-treated product. BRIEF DESCRIPTION OF THE DRAWINGS

[0073] In order to illustrate the technical solutions in the embodiments of the present application more clearly, the following will describe the drawings required to be used in the embodiments of the present application.

[0074] Figure 1 is a schematic structural diagram of a magnetic levitation device provided by an embodiment of the present application;

[0075] Figure 2 is a cross-sectional view of a magnetic levitation device provided by an embodiment of the present application;

[0076] Figure 3 is a cross-sectional view of a magnetic levitation device provided by an embodiment of the present application;

[0077] Figure 4 is a schematic structural diagram of a magnetic levitation device provided by an embodiment of the present application;

[0078] Figure 5 is a cross-sectional view of a magnetic levitation device provided by an embodiment of the present application;

[0079] Figure 6 is a cross-sectional view of a magnetic levitation device provided by an embodiment of the present application;

[0080] Figure 7 is Figure 6 a partial enlarged view of part A1 in;

[0081] Figure 8 is Figure 7 an exploded view of part of the structure in;

[0082] Figure 9 is Figure 2 a partial enlarged view of part M1 in;

[0083] Figure 10 is a cross-sectional view of a magnetic levitation device provided by an embodiment of the present application;

[0084] Figure 11 is a cross-sectional view of a magnetic levitation device provided by an embodiment of the present application;

[0085] Figure 12 is Figure 11Partial enlarged view of part A2;

[0086] Figure 13 is Figure 12 Exploded view of part of the structure in;

[0087] Figure 14 Cross-sectional view of the magnetic levitation device provided by an embodiment of the present application;

[0088] Figure 15 Cross-sectional view of the magnetic levitation device provided by an embodiment of the present application;

[0089] Figure 16 Cross-sectional view of the magnetic levitation device provided by an embodiment of the present application;

[0090] Figure 17 Cross-sectional view of the magnetic levitation device provided by an embodiment of the present application;

[0091] Figure 18 Cross-sectional view of the magnetic levitation device provided by an embodiment of the present application;

[0092] Figure 19 Cross-sectional view of the magnetic levitation device provided by an embodiment of the present application;

[0093] Figure 20 Cross-sectional view of the magnetic levitation device provided by an embodiment of the present application;

[0094] Figure 21 Cross-sectional view of the magnetic levitation device provided by an embodiment of the present application;

[0095] Figure 22 Cross-sectional view of the magnetic levitation device provided by an embodiment of the present application;

[0096] Figure 23 Cross-sectional view of the magnetic levitation device provided by an embodiment of the present application;

[0097] Figure 24 is Figure 6 Partial enlarged view of part A3 in;

[0098] Figure 25 Structural schematic diagram of the magnetic levitation device provided by an embodiment of the present application;

[0099] Figure 26 Structural schematic diagram of the magnetic levitation device provided by an embodiment of the present application;

[0100] Figure 27 is Figure 26 Partial enlarged view of part M2 in;

[0101] Figure 28 Structural schematic diagram of the magnetic levitation rotor provided by an embodiment of the present application;

[0102] Figure 29 It is a schematic structural diagram of a magnetic levitation device provided by an embodiment of the present application;

[0103] Figure 30 It is a schematic structural diagram of a radial magnetic bearing provided by an embodiment of the present application;

[0104] Figure 31 It is a schematic structural diagram of an axial magnetic bearing provided by an embodiment of the present application;

[0105] Figure 32 It is a schematic structural diagram of a magnetic levitation device provided by an embodiment of the present application;

[0106] Figure 33 It is a schematic structural diagram of a magnetic levitation device provided by an embodiment of the present application;

[0107] Figure 34 It is a schematic structural diagram of a magnetic levitation rotor provided by an embodiment of the present application;

[0108] Figure 35 It is a schematic structural diagram of a magnetic levitation rotor provided by an embodiment of the present application;

[0109] Figure 36 It is a schematic structural diagram of a magnetic levitation rotor provided by an embodiment of the present application;

[0110] Figure 37 It is a schematic structural diagram of a magnetic levitation rotor provided by an embodiment of the present application. Detailed implementation manners

[0111] Next, the technical solutions in the embodiments of the present application will be described in conjunction with the accompanying drawings in the embodiments of the present application.

[0112] In this article, terms such as "first" and "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present application, unless otherwise stated, the meaning of "a plurality" is two or more.

[0113] In addition, in this article, orientation terms such as "upper" and "lower" are defined relative to the orientation of the structural schematic diagram in the drawings. It should be understood that these directional terms are relative concepts, and they are used for relative description and clarification, and they may change accordingly with the change of the orientation where the structure is placed.

[0114] To improve the flexibility and controllability of the magnetic levitation device, the present application provides a liftable magnetic levitation device. The magnetic levitation device includes a chamber, a magnetic levitation stator, a magnetic levitation rotor, a lifting device, and multiple sensors. The chamber is used to accommodate the magnetic levitation rotor, and the magnetic levitation stator surrounds the outer periphery of the chamber. Among them, at least one sensor is relatively fixed to the magnetic levitation stator, and at least one sensor is used to detect the displacement of the magnetic levitation rotor. The magnetic levitation stator is connected to the lifting device, and the lifting device is used to drive the magnetic levitation stator and at least one sensor to move along the axis of the magnetic levitation device. Fixing at least one sensor relative to the magnetic levitation stator enables the lifting device to drive the magnetic levitation stator and at least one sensor to move simultaneously, so that at least one sensor follows the magnetic levitation rotor, facilitating the high-precision detection of the suspension position of the magnetic levitation rotor by at least one sensor, which is beneficial to improving the flexibility and controllability of the magnetic levitation device. When the lifting device drives the magnetic levitation stator to move relative to the magnetic levitation rotor, it can ensure the stable suspension, rotation or lifting along the axis of the magnetic levitation device of the magnetic levitation rotor, and can achieve a large stroke lifting of the magnetic levitation rotor along the axis of the magnetic levitation device, facilitating the control of the movement between the substrate, the cold source and the heat source in the magnetic levitation device, realizing the uniform rotation of the substrate to ensure uniform heating of the substrate, maximizing the degree of impurity activation and minimizing the degree of impurity diffusion during the spike annealing process, and realizing the rapid movement of the substrate between the heat source and the cooling source, which is beneficial to reducing the thermal budget.

[0115] Please refer to Figure 1 and Figure 2 , Figure 1 which is a schematic structural diagram of the magnetic levitation device 10 provided by an embodiment of the present application. Figure 2 which is a cross-sectional view of the magnetic levitation device 10 provided by an embodiment of the present application. In one embodiment, the liftable magnetic levitation device 10 includes a chamber 100, a magnetic levitation stator 200, a magnetic levitation rotor 300, a lifting device 400, and multiple sensors 500. The chamber 100 is used to accommodate the magnetic levitation rotor 300, and the magnetic levitation stator 200 surrounds the outer periphery of the chamber 100. Among them, at least one sensor 500 is relatively fixed to the magnetic levitation stator 200, at least one sensor 500 is used to detect the displacement of the magnetic levitation rotor 300, the magnetic levitation stator 200 is connected to the lifting device 400, and the lifting device 400 is used to drive the magnetic levitation stator 200 and at least one sensor 500 to move along the axis O of the magnetic levitation device.

[0116] In the embodiment of the present application, the chamber 100 is a cylindrical sealed chamber, which is processed from a metal material and meets the requirements of high cleanliness sealing or vacuum. In the embodiment of the present application, the magnetic levitation rotor 300 is arranged in the chamber 100. The magnetic levitation rotor 300 has neither windings nor permanent magnets, and the magnetic levitation rotor 300 is made of materials such as ferromagnetic stainless steel with high temperature resistance and high magnetic permeability. The magnetic levitation rotor 300 is accommodated in the chamber 100 to be isolated from the external atmospheric environment, ensuring the high cleanliness inside the chamber 100. The magnetic levitation stator 200 generates electromagnetic force to interact with the magnetic levitation rotor 300, driving the magnetic levitation rotor 300 to move along the axial direction O of the magnetic levitation device, along the radial direction R of the magnetic levitation device, or along the circumferential direction C of the magnetic levitation device.

[0117] Among them, the axial direction O of the magnetic levitation device refers to the direction where the axis around which the magnetic levitation rotor 300 rotates is located, and the axial direction O of the magnetic levitation device is the same as the axial directions of the magnetic levitation stator 200 and the magnetic levitation rotor 300. The radial direction R along the magnetic levitation device is the same as the radial directions of the magnetic levitation stator 200 and the magnetic levitation rotor 300. The circumferential direction C of the magnetic levitation device refers to the circumferential direction of the magnetic levitation device, which is the direction around the axis of the magnetic levitation device 10.

[0118] In the embodiment of the present application, there is no direct contact between the magnetic levitation stator 200 and the magnetic levitation rotor 300, and no friction will occur to generate fine particles, which is convenient for creating an environment with high cleanliness in the chamber 100 and is beneficial to ensuring the stable operation of the magnetic levitation device 10. The magnetic levitation stator 200 surrounds the outer periphery of the chamber 100, and the magnetic levitation rotor 300 is accommodated in the chamber 100, so that the magnetic levitation stator 200 surrounds the outer periphery of the magnetic levitation rotor 300, which is convenient for the magnetic levitation stator 200 to generate electromagnetic force from the outer periphery of the magnetic levitation rotor 300 to drive the magnetic levitation rotor 300 to move, and is convenient for the magnetic levitation rotor 300 to be moved and adjusted, realizing precise control of the movement of the magnetic levitation rotor 300.

[0119] In an embodiment of the present application, the lifting device 400 is used to drive the magnetic levitation stator 200 to move up and down along the axis O of the magnetic levitation device, so as to realize the movement of the magnetic levitation stator 200 within a large stroke range along the axis O of the magnetic levitation device. Furthermore, the magnetic levitation rotor 300 can move within a large stroke along the axis O of the magnetic levitation device. Compared with the situation without the lifting device 400, where the magnetic levitation stator 200 alone drives the magnetic levitation rotor 300 to move along the axis O of the magnetic levitation device, the driving stroke range of the magnetic levitation stator 200 is limited. In the present application, the lifting device 400 drives the magnetic levitation stator 200 and the magnetic levitation rotor 300 within a larger stroke range. The "large stroke" in the movement of the magnetic levitation stator 200 within a large stroke range along the axis O of the magnetic levitation device in the present application is in comparison with the distance when the magnetic levitation stator 200 alone drives the magnetic levitation rotor 300 to move along the axis O of the magnetic levitation device without the lifting device 400. Exemplarily, the distance when the magnetic levitation stator 200 alone drives the magnetic levitation rotor 300 to move along the axis O of the magnetic levitation device without the lifting device 400 is L1, while in the embodiment of the present application, the distance that the lifting device 400 is used to drive the magnetic levitation stator 200 to move up and down along the axis O of the magnetic levitation device is L2, where L2 is greater than L1.

[0120] In an embodiment of the present application, the sensor 500 is used to detect the position of the magnetic levitation rotor 300, and then the position of the magnetic levitation rotor 300 is adjusted and controlled through a magnetic levitation motor controller (not shown). In an embodiment of the present application, at least one sensor 500 is used to detect the displacement of the magnetic levitation rotor 300, where the displacement includes at least one of axial displacement, radial displacement, or angular displacement, and the angular displacement refers to the rotation angle.

[0121] In an embodiment of the present application, when the lifting device 400 drives the magnetic levitation stator 200 to move along the axis O of the magnetic levitation device, the magnetic levitation stator 200 drives the magnetic levitation rotor 300 to move along the axis O of the magnetic levitation device. At this time, at least one sensor 500 is relatively fixed to the magnetic levitation stator 200, and at least one sensor 500 moves along the axis O of the magnetic levitation device with the magnetic levitation stator 200, so that the distance between at least one sensor 500 and the magnetic levitation rotor 300 remains unchanged. Furthermore, the high-precision detection of at least one sensor 500 for the magnetic levitation rotor 300 is improved, which is beneficial to controlling the relative position between the magnetic levitation stator 200 and the magnetic levitation rotor 300, ensuring the stable suspension and rotation of the magnetic levitation rotor 300 during the up and down movement along the axis O of the magnetic levitation device, and being beneficial to improving the flexibility and controllability of the magnetic levitation device 10.

[0122] Please refer to Figure 2 , in one embodiment, the chamber 100 of the magnetic levitation device 10 is used to accommodate the substrate 600, and the substrate 600 is fixed to the magnetic levitation rotor 300 through the substrate support 610.

[0123] In an embodiment of the present application, along the axial direction O of the magnetic levitation device, the magnetic levitation rotor 300, the substrate support 610, and the substrate 600 are arranged adjacent to each other in sequence. The substrate 600 moves as the magnetic levitation rotor 300 moves along the axial direction O of the magnetic levitation device. A cold source or a heat source is arranged above and below outside the chamber 100. When the magnetic levitation rotor 300 achieves stable suspension and rotation, stable movement of the substrate 600 between the cold source and the heat source can also be achieved, so that the substrate 600 can be heated evenly, which is beneficial to maximizing the impurity activation degree and minimizing the impurity diffusion degree of the substrate 600 during the spike annealing process. The substrate 600, the substrate support 610, and the magnetic levitation rotor 300 are suspended and move in the chamber 100, which can reduce particle contamination and prevent warping or lattice defects of the substrate 600 during the rapid thermal processing.

[0124] Please refer to Figure 2 , in one embodiment, the lifting device 400 includes a lifting motor 410, a lifting connection mechanism 420, and a transmission lead screw 430. One end of the transmission lead screw 430 is fixed to the lifting motor 410, and the other end of the transmission lead screw 430 is located below the top wall 150 of the chamber 100. The lifting connection mechanism 420 is sleeved on the transmission lead screw 430, and the magnetic levitation stator 200 is fixed to the lifting connection mechanism 420. Among them, along the axial direction O of the magnetic levitation device, the lifting motor 410, the lifting connection mechanism 420, and the magnetic levitation stator 200 are arranged in sequence. The transmission lead screw 430 and the magnetic levitation stator 200 are arranged at intervals along the radial direction R of the magnetic levitation device. In the embodiment of the present application, the transmission lead screw 430 rotates under the drive of the lifting motor 410, and then the lifting connection mechanism 420 is spirally lifted or lowered, driving the magnetic levitation stator 200 to lift and lower along the axial direction O of the magnetic levitation device.

[0125] Please refer to Figure 2 , in one embodiment, the magnetic levitation device 10 includes a stator housing 210, and the magnetic levitation stator 200 is fixed inside the stator housing 210. The stator housing 210 is connected to the lifting connection mechanism 420 of the lifting device 400. When the lifting connection mechanism 420 moves relative to the transmission lead screw 430 along the axial direction O of the magnetic levitation device under the drive of the lifting motor 410, the lifting connection mechanism 420 drives the stator housing 210 and the magnetic levitation stator 200 to perform lifting and lowering movements along the axial direction O of the magnetic levitation device.

[0126] Please refer to Figure 3 , Figure 3A cross-sectional view of the magnetic levitation device 10 provided by an embodiment of the present application. In another embodiment, the magnetic levitation device 10 includes a fixing plate 220, and the magnetic levitation stator 200 is fixed to the fixing plate 220. The fixing plate 220 is connected to the lifting connection mechanism 420 of the lifting device 400. When the lifting connection mechanism 420 moves relative to the transmission lead screw 430 along the axial direction O of the magnetic levitation device under the drive of the lifting motor 410, the lifting connection mechanism 420 drives the fixing plate 220 and the magnetic levitation stator 200 to perform lifting movement along the axial direction O of the magnetic levitation device.

[0127] Please continue to refer to Figure 1 , in one embodiment, the magnetic levitation device 10 includes two lifting devices 400. The two lifting devices 400 are symmetrically distributed at 180° along the circumferential direction C of the magnetic levitation device. The lifting devices 400 simultaneously apply a force on the magnetic levitation stator 200 in the axial direction O of the magnetic levitation device, facilitating the more stable lifting of the magnetic levitation stator 200 along the axial direction O of the magnetic levitation device when the lifting devices 400 drive it.

[0128] Please refer to Figure 2 , in one embodiment, at least one sensor 500 includes an axial displacement sensor 500a. The axial displacement sensor 500a is used to detect the axial displacement of the magnetic levitation rotor 300, and the axial displacement sensor 500a is relatively fixed to the magnetic levitation stator 200.

[0129] Exemplarily, the axial displacement sensor 500a is a high-precision detector. The smaller the distance between the axial displacement sensor 500a and the magnetic levitation rotor 300, the higher the detection accuracy of the axial displacement of the magnetic levitation rotor 300. Relatively fixing the axial displacement sensor 500a to the magnetic levitation stator 200 can enable the axial displacement sensor 500a to move along with the movement of the magnetic levitation stator 200 when controlling the magnetic levitation stator 200 to move up and down along the axial direction O of the magnetic levitation device following the magnetic levitation rotor 300. Thus, it is ensured that the axial displacement sensor 500a and the magnetic levitation rotor 300 are always within a relatively close distance range, facilitating the high-precision detection of the magnetic levitation rotor 300 by the axial displacement sensor 500a and transmitting reliable position signals. Therefore, when the lifting device 400 drives the magnetic levitation stator 200 to move, the axial displacement sensor 500a can accurately detect the displacement of the magnetic levitation rotor 300, enabling the magnetic levitation rotor 300 to stably levitate. Furthermore, the stable suspension and rotation of the magnetic levitation rotor 300 and the substrate 600 in the chamber 100 are ensured, reducing the risk of warping or lattice defects during the processing of the substrate 600 and improving the product quality.

[0130] Please refer to Figure 2 and Figure 4 , Figure 4Schematic diagram of the structure of the magnetic levitation device 10 provided by an embodiment of the present application. In one embodiment, at least three axial displacement sensors 500a are relatively fixed to the magnetic levitation stator 200 and are used to detect the displacement of the magnetic levitation rotor 300 along the axis O of the magnetic levitation device, thereby improving the accuracy of detecting the displacement of the magnetic levitation rotor 300 along the axis O of the magnetic levitation device.

[0131] In one embodiment, at least three axial displacement sensors 500a are evenly distributed along the circumferential direction C of the magnetic levitation device, can cover different regions of the magnetic levitation rotor 300, can better capture the dynamic changes in the position of the magnetic levitation rotor 300 during rotation, avoid blind spots or measurement deviations caused by uneven distribution of the axial displacement sensors 500a, achieve all-round measurement of the magnetic levitation rotor 300, and improve the reliability and accuracy of the detection by the axial displacement sensors 500a.

[0132] In one embodiment, referring to Figure 4 As shown, the number of axial displacement sensors 500a is three, and any two adjacent axial displacement sensors 500a are spaced 120° apart along the circumferential direction C of the magnetic levitation device. In one embodiment (not shown in the figure), the number of axial displacement sensors 500a is four, and any two adjacent axial displacement sensors 500a are spaced 90° apart along the circumferential direction C of the magnetic levitation device.

[0133] In one embodiment, at least three axial displacement sensors 500a adopt a differential architecture to detect the axial displacement of the magnetic levitation rotor 300. The differential architecture detection is beneficial to improving key indicators such as the sensitivity, linearity, and temperature drift coefficient of the sensor 500, and improving the detection accuracy.

[0134] Please continue to refer to Figure 2 and Figure 4, in one embodiment, the magnetic levitation device 10 further includes an axial temperature compensation sensor 500d. The axial temperature compensation sensor 500d and the axial displacement sensor 500a are arranged oppositely along the circumferential direction C of the magnetic levitation device. The probe material of the axial temperature compensation sensor 500d is the same as that of the axial displacement sensor 500a, and the structural design adopted by the axial temperature compensation sensor 500d enables the inductance of the sensor 500 to be unaffected by the distance, thereby reducing the influence of temperature rise on the output voltage drift of the sensor 500. The axial temperature compensation sensor 500d can compensate for the difference caused by temperature change at the probe end of the axial displacement sensor 500a in the chamber 100, reduce the detection error of the axial displacement of the magnetic levitation rotor 300, and improve the detection accuracy. Exemplarily, the axial temperature compensation sensor 500d can be obtained by covering the probe of a sensor having the same structure as the axial displacement sensor 500a. After the probe of the sensor is covered, it cannot detect displacement, but can detect the signal of temperature change. The signals detected by the axial temperature compensation sensor 500d and the axial displacement sensor 500a are processed and calculated by a processor to obtain an accurate axial displacement signal. Exemplarily, the structure of the axial temperature compensation sensor 500d is the same as that of the axial displacement sensor 500a.

[0135] In one embodiment, the chamber 100 includes a top wall 150 and a bottom wall 110 that are oppositely arranged along the axial direction O of the magnetic levitation device. An opening 120 is provided on the top wall 150. The opening 120 penetrates through the top wall 150 along the axial direction O of the magnetic levitation device, and / or, an opening 120 is provided on the bottom wall 110. The opening 120 penetrates through the bottom wall 110 along the axial direction O of the magnetic levitation device. The axial displacement sensor 500a can move relative to the chamber 100 along the axial direction O of the magnetic levitation device through the opening 120.

[0136] Please refer to Figure 2 , in one embodiment, the chamber 100 includes a bottom wall 110. The bottom wall 110 includes an opening 120. The opening 120 penetrates through the bottom wall 110 along the axial direction O of the magnetic levitation device. The axial displacement sensor 500a is disposed through the opening 120, and the detection end of the axial displacement sensor 500a is located inside the chamber 100. The detection end of the axial displacement sensor 500a and the magnetic levitation rotor 300 are arranged at intervals along the axial direction O of the magnetic levitation device.

[0137] The bottom wall 110 of the chamber 100 has an opening 120, which provides space for the axial displacement sensor 500a to pass through the bottom wall 110 of the chamber 100. The opening 120 penetrates the bottom wall 110 along the axial direction O of the magnetic levitation device, which is conducive to the smooth arrangement of the axial displacement sensor 500a passing through the opening 120. The detection end of the axial displacement sensor 500a is located inside the chamber 100, enabling the axial displacement sensor 500a to more accurately detect the position information of the magnetic levitation rotor 300 inside the chamber 100. The detection end of the axial displacement sensor 500a and the magnetic levitation rotor 300 are arranged at intervals along the axial direction O of the magnetic levitation device. The axial displacement sensor 500a detects the relative position between the lower end face of the magnetic levitation rotor 300 and the axial displacement sensor 500a. The detection end of the axial displacement sensor 500a and the magnetic levitation rotor 300 are arranged at intervals along the axial direction O of the magnetic levitation device, which provides space for the axial displacement sensor 500a to emit detection signals to the magnetic levitation rotor 300, facilitating the axial displacement sensor 500a to detect the position information of the magnetic levitation rotor 300.

[0138] In one embodiment, the axial displacement sensor 500a passes through the opening 120. When the magnetic levitation stator 200 moves up and down along the axial direction O of the magnetic levitation device, the magnetic levitation stator 200 drives the axial displacement sensor 500a to move relative to the chamber 100 along the axial direction O of the magnetic levitation device through the opening 120. The axial displacement sensor 500a can be entirely located inside the chamber 100, or partially located inside the chamber 100, or entirely located outside the chamber 100. It can be understood that when the axial displacement sensor 500a is entirely or partially located inside the chamber 100, the distance between the axial displacement sensor 500a and the magnetic levitation rotor 300 is relatively small, which enables the axial displacement sensor 500a to better detect the position information of the magnetic levitation rotor 300 inside the chamber 100. When the axial displacement sensor 500a is entirely located outside the chamber 100, the moving range of the axial displacement sensor 500a in the axial direction O of the magnetic levitation device can be increased. The bottom wall 110 of the chamber 100 has an opening 120, which provides space for the axial displacement sensor 500a to pass through the bottom wall 110 of the chamber 100. The opening 120 penetrates the bottom wall 110 along the axial direction O of the magnetic levitation device, which is conducive to the axial displacement sensor 500a moving relative to the chamber 100 along the axial direction O of the magnetic levitation device through the opening 120 when following the magnetic levitation stator 200 to move up and down along the axial direction O of the magnetic levitation device.

[0139] Figure 5 The cross-sectional view of the magnetic levitation device 10 provided by an embodiment of the present application is shown in reference to Figure 5As shown, in one embodiment, the chamber 100 includes a top wall 150. The top wall 150 includes an opening 120 that penetrates the top wall 150 along the axial direction O of the magnetic levitation device. The axial displacement sensor 500a is disposed through the opening 120, and the axial displacement sensor 500a can move relative to the chamber 100 along the axial direction O of the magnetic levitation device through the opening 120. When the opening 120 is provided on the top wall 150, the axial displacement sensor 500a and the sensor connection mechanism 700 are correspondingly disposed above the magnetic levitation stator 200 in the axial direction O of the magnetic levitation device. For other structures of the magnetic levitation device 10, reference can be made to the magnetic levitation device 10 when the opening 120 is provided on the bottom wall 110, and details are not described herein again in this application.

[0140] In one embodiment, the chamber 100 includes a top wall 150 and a bottom wall 110 that are oppositely disposed along the axial direction O of the magnetic levitation device. The top wall 150 and the bottom wall 110 are provided with openings 120 that penetrate the top wall 150 and the bottom wall 110 along the axial direction O of the magnetic levitation device. The axial displacement sensors 500a are respectively disposed above and below the magnetic levitation stator 200 in the axial direction O of the magnetic levitation device, and the sensor connection mechanisms 700 are respectively disposed above and below the magnetic levitation stator 200 in the axial direction O of the magnetic levitation device. The axial displacement sensor 500a can move relative to the chamber 100 along the axial direction O of the magnetic levitation device through the opening 120. For other structures of the magnetic levitation device 10, reference can be made to the magnetic levitation device 10 when the openings 120 are respectively provided on the bottom wall 110 and the top wall 150, and details are not described herein again in this application.

[0141] In one embodiment, referring to Figure 5 As shown, the outer wall of the chamber 100 may have an extension structure 160 extending outward from the chamber 100. The lifting device 400 includes a lifting motor 410, a lifting connection mechanism 420, and a transmission lead screw 430. One side of the transmission lead screw 430 may be fixedly connected to the lifting motor 410, and the other side of the transmission lead screw 430 may be fixedly connected to the extension structure 160. The lifting connection mechanism 420 is sleeved on the transmission lead screw 430, and the magnetic levitation stator 200 is fixedly connected to the lifting connection mechanism 420. The transmission lead screw 430 drives the lifting connection mechanism 420 and the magnetic levitation stator 200 to rise or fall along the axial direction O of the magnetic levitation device under the drive of the lifting motor 410.

[0142] In one embodiment, the axial displacement sensor 500a may be one of small-volume distance axial displacement sensors such as an inductive axial displacement sensor, an eddy current axial displacement sensor, or a capacitive axial displacement sensor.

[0143] Figure 6 This is a cross-sectional view of the magnetic levitation device 10 provided in an embodiment of this application. Figure 7 It is Figure 6 a partial enlarged view of part A1 in Figure 8 It isFigure 7 Exploded view of part of the structure. Refer to Figure 6 , Figure 7 and Figure 8 As shown in

[0144] In one embodiment, the axial displacement sensor 500a includes a probe 501, a housing 502, and a connection wire 503. The inner wall of the housing 502 encloses to form a receiving cavity 504, and the probe 501 and the connection wire 503 are located in the receiving cavity 504. The probe 501 can be fixedly connected to the housing 502 by welding, bonding or other means. The probe 501 can include a magnetic assembly and a coil wound around the magnetic assembly. The magnetic assembly can be a permanent magnet or a magnetic sheet, etc., which are structures used to enhance the magnetic field and improve the sensing ability of the axial displacement sensor. One end of the connection wire 503 can be electrically connected to the probe 501, and the other end of the connection wire 503 can be electrically connected to an external circuit or a control system, so as to transmit the position signal of the magnetic levitation rotor 300 detected by the axial displacement sensor 500a to the external circuit or the control system. The axial displacement sensor 500a can be located inside the chamber 100 or outside the chamber 100. When the axial displacement sensor 500a is located inside the chamber 100, it can also be that the probe 501 is located inside the chamber 100, and part of the connection wire 503 is located inside the chamber 100 and part is located outside the chamber 100, and so on. The positional relationship between the probe 501 and the connection wire 503 described here and the chamber 100 refers to the positional relationship of the probe 501 and the connection wire 503 in space with respect to the chamber 100, even if the probe 501 and the connection wire 503 are located inside the chamber 100, the gas environment where the probe 501 and the connection wire 503 are located is different from the gas environment of the chamber 100.The probe 501 and the connecting wire 503 are located inside the accommodation cavity 504. The accommodation cavity 504 and the chamber 100 are isolated by the housing 502. The air pressure inside the accommodation cavity 504 is greater than the air pressure inside the chamber 100. The isolation function of the housing 502 can prevent the gas inside the chamber 100 from entering the accommodation cavity 504, so that the air pressure inside the accommodation cavity 504 can be maintained at a level higher than the air pressure inside the chamber 100. According to Paschen's law, in a low-pressure environment, the breakdown voltage of the gas will decrease. Since the air pressure inside the chamber 100 is lower than the air pressure inside the accommodation cavity 504, correspondingly, the gas breakdown voltage inside the chamber 100 is lower than the gas breakdown voltage inside the accommodation cavity 504. In the embodiment of the present application, by changing the gas environment where the probe 501 and the connecting wire 503 of the axial displacement sensor 500a are located, the probe 501 and the connecting wire 503 are placed inside the accommodation cavity 504. The gas environment inside the accommodation cavity 504 is independent of the gas environment inside the chamber 100, and the gas breakdown voltage inside the accommodation cavity 504 is higher than that inside the chamber 100. This effectively increases the breakdown voltage threshold of the gas inside the accommodation cavity 504, reduces the risk of the insulating material of the electrical components of the axial displacement sensor 500a being broken down due to excessive electric field strength, effectively prevents the problem of insulation failure, ensures that the probe 501 and the connecting wire 503 can work normally, and the detection signal of the axial displacement sensor 500a can be transmitted to external devices or control systems, realizing the effective detection of the position of the magnetic levitation rotor 300. Finally, it ensures the relative position stability of the magnetic levitation rotor 300 and the magnetic levitation stator 200, avoids warping or lattice defects of the substrate 600 during the rapid thermal processing, and improves the process yield.

[0145] In one embodiment, referring to Figure 8 As shown, the detection end 5022 of the axial displacement sensor 500a is the end of the axial displacement sensor 500a facing the magnetic levitation rotor 300, and the detection end 5022 of the axial displacement sensor 500a is arranged at an interval from the magnetic levitation rotor 300.

[0146] In one embodiment, referring to Figure 8 As shown, the probe 501 is located at one end of the housing 502. The end where the probe 501 is located is the detection end 5022 of the axial displacement sensor 500a. The probe 501 is used to detect the relative position of the magnetic levitation rotor 300 relative to the magnetic levitation stator 200 along the axis O of the magnetic levitation device.

[0147] In one embodiment, the material of the housing 502 includes a vacuum sealing material, and the outgassing rate of the vacuum sealing material is less than 1.0 Pa·L / s / m 2 . In the embodiment of the present application, the vacuum sealing material described can be defined as a material with good sealing performance, which can effectively isolate the external environment and achieve vacuum isolation to maintain a vacuum environment. The vacuum sealing material has a low outgassing rate, and the outgassing rate is less than 1.0 Pa·L / s / m2 . Among them, Pa (Pascal) is the unit of pressure, representing the pressure borne per unit area; L / s (liter per second) is the unit of volume flow rate, representing the volume of gas released per unit time; m 2 (square meter) is the unit of area, representing the surface area of the material for releasing gas. The gas release rate in the embodiments of the present application refers to the rate at which the material releases water (H2O) and hydrocarbons (C x H y ) gas in a vacuum environment. A low gas release rate indicates that the material releases H2O and C x H y gas at a slower rate, which is beneficial to maintaining a higher cleanliness in the chamber. The vacuum sealing material may include, but is not limited to, low outgassing metals or non-metallic materials such as stainless steel, titanium alloy, ceramic, quartz, or polymer materials. The housing 502 made of the vacuum sealing material has good vacuum isolation performance and can be used to isolate the accommodation chamber 504 and the chamber 100, ensuring that the air pressure in the accommodation chamber 504 is different from the air pressure in the chamber 100 and always maintaining the air pressure in the accommodation chamber 504 greater than the air pressure in the chamber 100. In addition, due to the interaction between air pressure and molecules, the axial displacement sensor 500a located in a vacuum environment is likely to release H2O and C x H y organic substances released by itself or attached to the surface of the axial displacement sensor 500a. The released H2O and C x H y form H2O and C x H y gas under the high-temperature conditions in the chamber 100, and they may deposit on the substrate surface and react with the substrate surface, affecting the high-temperature heat treatment process of the substrate and the product quality. For example, it may cause problems such as oxide layer defects or doping non-uniformity. The vacuum sealing material has a low gas release rate and is not likely to generate H2O and C x H y outgassing, which helps the chamber 100 maintain the internal cleanliness for a long time and improve the yield and performance of semiconductor products.

[0148] In one embodiment, the vacuum sealing material for preparing the housing 502 is a non-magnetic material. The non-magnetic material has a low magnetic permeability and magnetic susceptibility and is not easily affected by an external magnetic field, effectively isolating the influence of the external magnetic field on the inside of the axial displacement sensor 500a. Ensuring the accuracy and stability of the axial displacement sensor 500a in a complex magnetic field environment.

[0149] In one embodiment, refer to Figure 7 and Figure 8As shown, the housing 502 has an opening 5021 on the side of the housing 502 away from the magnetic levitation rotor 300. The opening 5021 communicates with the accommodation chamber 504, providing ventilation for the accommodation chamber 504 or a channel for connecting structures located in the accommodation chamber 504 to other devices. The connection line 503 is electrically connected to the probe 501 and passes through the opening 5021 out of the accommodation chamber 504. The probe 501 can be electrically connected to an external device or a control system through the connection line 503 to achieve data transmission or monitoring functions.

[0150] In one embodiment, the air pressure in the chamber 100 ranges from 1 Pa to 100 Pa. For example, the air pressure in the chamber 100 can be 1 Pa, the air pressure in the chamber 100 can also be 30 Pa, and the air pressure in the chamber 100 can also be 100 Pa. The chamber 100 is usually a vacuum-sealed chamber, the environment inside the chamber is a vacuum environment, and the air pressure range inside the chamber is from 1 Pa to 100 Pa. The air pressure in the chamber 100 is low, and the content of oxygen or other impurities in the chamber 100 is low. Heat treatment under vacuum conditions can avoid oxidation reactions and contamination by impurities, which is beneficial to maintaining the purity of the material surface.

[0151] In one embodiment, the air pressure inside the accommodation cavity 504 ranges from 90 kPa to 110 kPa. For example, the air pressure inside the accommodation cavity 504 can be 90 kPa, or the air pressure inside the accommodation cavity 504 can be 100 kPa, or the air pressure inside the accommodation cavity 504 can also be 110 kPa. In the embodiment of the present application, the environment where the accommodation cavity 504 is located is the atmospheric environment. The accommodation cavity 504 can be connected to the atmospheric environment, or the accommodation cavity 504 is a closed cavity, and the air pressure inside the accommodation cavity 504 is the same as the atmospheric pressure. The gas environment inside the accommodation cavity 504 is the atmospheric environment, and the gas environment inside the chamber 100 is the vacuum environment. The air pressure inside the accommodation cavity 504 is greater than the air pressure inside the chamber 100. The probe 501 and the connecting wire 503 are both located inside the accommodation cavity 504. The probe 501 and the connecting wire 503 are in the atmospheric environment, avoiding their direct exposure to the vacuum environment. According to Paschen's law, in a low-pressure environment, the breakdown voltage of the gas will decrease. If the probe 501 and the connecting wire 503 are arranged in the vacuum environment, the insulating materials on the probe 501 and the connecting wire 503 are more likely to be broken down by the electric field, resulting in insulation failure. The environment inside the accommodation cavity 504 is the atmospheric environment. In the embodiment of the present application, by placing the probe 501 and the connecting wire 503 inside the accommodation cavity 504 with atmospheric pressure, since the air pressure in the atmospheric environment is higher than that in the vacuum environment, correspondingly, the breakdown voltage of the gas in the atmospheric environment is higher, effectively increasing the breakdown voltage threshold of the surrounding gas, reducing the risk of breakdown of the insulating material due to too high electric field strength, effectively preventing the problem of insulation failure, so that the probe 501 and the connecting wire 503 can work normally, and the detection signal of the axial displacement sensor 500a can be transmitted to an external device or a control system, realizing the effective detection of the position of the magnetic levitation rotor 300, and finally avoiding warping or lattice defects of the substrate 600 during the rapid heat treatment process.

[0152] In addition, due to factors such as air pressure and intermolecular interaction, in the vacuum environment, the axial displacement sensor 500a is more likely to generate H2O and C x H y degassing. Compared with the axial displacement sensor 500a being entirely in the vacuum environment, in the embodiment of the present application, the probe 501 and the connecting wire 503 of the axial displacement sensor 500a are in the atmospheric environment. In the atmospheric environment, the degassing speed of H2O and C x H y is relatively low, and the amount of degassing of H2O and C x H y is also relatively small, and the atmosphere is already saturated with H2O and C x H y gases, which is not likely to affect the high-temperature heat treatment process of the substrate 600 and the product quality.

[0153] In one embodiment, the wall thickness of the housing 502 ranges from 0.2 mm to 1 mm. For example, the wall thickness of the housing 502 can be 0.2 mm, the wall thickness of the housing 502 can also be 0.5 mm, and the wall thickness of the housing 502 can further be 1 mm. The housing 502 may have a housing top wall and a housing side wall. Refer to Figure 2 As shown, the axial displacement sensor 500a in the embodiment of the present application is spaced apart from the magnetic levitation rotor 300 along the axial direction O of the magnetic levitation device. The housing top wall is the wall closer to the magnetic levitation rotor 300 along the axial direction O of the magnetic levitation device. The thicknesses of the housing top wall and the housing side wall can be the same or different. In one embodiment, the thickness of the housing top wall can be 0.2 mm, and the thickness of the housing side wall can be 0.5 mm. The air pressure in the accommodation cavity 504 is greater than the air pressure in the chamber 100. The thickness of the housing side wall is 0.5 mm, which can resist the deformation of the housing caused by the pressure difference between the accommodation cavity 504 and the chamber 100. The volume of the housing top wall is small, and the stress exerted on the housing top wall by the pressure difference between the accommodation cavity 504 and the chamber 100 is small. The thickness of the housing top wall is 0.2 mm and will not deform. The probe 501 of the axial displacement sensor 500a detects the position of the magnetic levitation rotor 300 through the housing top wall. Since the thickness of the housing top wall is small, the probe 501 of the axial displacement sensor 500a can more easily detect through the housing top wall, which is beneficial to improving the detection accuracy of the axial displacement sensor 500a. In one embodiment, reinforcing ribs can also be provided on the housing side wall to enhance the strength of the housing side wall and prevent the housing 502 from deforming. In this embodiment, the thickness of the housing side wall can be correspondingly reduced, for example, less than 0.5 mm.

[0154] In one embodiment, the number of probes 501 is at least two. The at least two probes 501 are arranged along the axial direction O of the magnetic levitation device, and the detection ends 5022 are arranged in the direction towards the magnetic levitation rotor 300. The at least two probes 501 are located in the housing 502 along the axial direction O of the magnetic levitation device. The at least two probes 501 can be in contact with each other, or there is a gap between any adjacent probes 501.

[0155] Refer to Figure 8As shown, in one embodiment, the axial displacement sensor 500a and the magnetic levitation rotor 300 are arranged at intervals along the axis O of the magnetic levitation device. The number of probes 501 is two, and the two probes 501 are arranged at intervals along the axis O of the magnetic levitation device. The two probes 501 are respectively a detection probe and a compensation probe. The compensation probe outputs a signal by detecting air or a fixed distance from other positions, and uses this signal to perform non-linear compensation such as temperature compensation on the detection probe. The detection probe is used to actually detect the distance between the magnetic levitation rotor 300 and the detection end 5022 of the axial displacement sensor 500a and output a first signal, and the compensation probe is used to output a second signal to eliminate the detection error. The second signal output by the compensation probe can be used to perform non-linear compensation on the first signal of the detection probe. Specifically, the compensation probe is used to detect the distance between the object to be measured in the magnetic levitation device 10 and the compensation probe and output a second signal. It should be noted that when the axial displacement sensor 500a moves, the distance between the object to be measured in the magnetic levitation device 10 detected by the compensation probe remains unchanged. The second signal is affected by factors such as temperature changes and exhibits certain non-linear characteristics. By analyzing the non-linear characteristics of the second signal output by the compensation probe, a compensation model is established, and then the compensation model is used to perform non-linear compensation on the first signal output by the detection probe, so as to eliminate the influence of the non-linear error of the first signal and effectively improve the accuracy and stability of the detection.

[0156] In one embodiment, the two probes 501 are two differential detection probes, and the two differential probes perform non-linear compensation through differentiation to improve the detection resolution. Specifically, the two differential detection probes simultaneously detect the distance between the magnetic levitation rotor 300 and the detection end 5022 of the axial displacement sensor 500a and output detection signals. By performing differential operation on the output signals of the two differential detection probes for non-linear compensation, some common-mode non-linear errors such as environmental noise and interference can be eliminated, and a more accurate output signal can be obtained, thereby improving the detection resolution and accuracy and ensuring that the axial displacement sensor 500a can detect the accurate and reliable position of the magnetic levitation rotor 300.

[0157] In one embodiment, during the use of the axial displacement sensor 500a, calibration is performed by using a tooling made of the same material as the magnetic levitation rotor to better simulate the actual working environment, ensure that the calibration conditions are consistent with the actual use conditions, avoid errors caused by material differences, avoid zero-point offset caused by processing and assembly during the actual installation of the axial displacement sensor, ensure the accuracy and stability of the measurement results, and improve the reliability and accuracy of the axial displacement sensor. The calibration tooling can be implemented by schemes such as single-point calibration, two-point calibration, or multi-point calibration.

[0158] In one embodiment, the detection end 5022 of the axial displacement sensor 500a has a detection end face 5022a. The number of axial displacement sensors 500a is at least three, and the vertical distances from the detection end faces 5022a of the detection ends 5022 of at least three axial displacement sensors 500a to the magnetic levitation rotor 300 are equal. Refer to Figure 5 , Figure 6 and Figure 8 As shown, the axial displacement sensor 500a can be located above the magnetic levitation rotor 300 along the axial direction O of the magnetic levitation device, or can be located below the magnetic levitation rotor 300 along the axial direction O of the magnetic levitation device. The magnetic levitation rotor 300 has a first side face 301 and a second side face 302 along the axial direction O of the magnetic levitation device. The axial displacement sensor 500a is used to detect the vertical distance between the detection end face 5022a of the detection end 5022 of the axial displacement sensor 500a and the first side face 301 or the second side face 302 of the magnetic levitation rotor 300. When the axial displacement sensor 500a is located on the side of the first side face 301 of the magnetic levitation rotor 300 that faces away from the second side face 302 (as Figure 5 shown), the axial displacement sensor 500a obtains the position of the magnetic levitation rotor 300 in the axial direction O of the magnetic levitation device by detecting the distance between the first side face 301 and the detection end face 5022a. When the axial displacement sensor 500a is located on the side of the second side face 302 of the magnetic levitation rotor 300 that faces away from the first side face 301 (as Figure 6 shown), the axial displacement sensor 500a obtains the position of the magnetic levitation rotor 300 in the axial direction O of the magnetic levitation device by detecting the distance between the second side face 302 and the detection end face 5022a. The number of axial displacement sensors 500a is at least three. The number of axial displacement sensors 500a can be three, four, five, or even more. Those skilled in the art can make corresponding designs according to actual needs. The detection end faces 5022a of the detection ends 5022 of all axial displacement sensors 500a are located on the same plane, and this plane is parallel to the first side face 301 or the second side face 302 of the magnetic levitation rotor 300. The vertical distances from the detection end faces 5022a of the detection ends 5022 of all axial displacement sensors 500a to the first side face 301 or the second side face 302 of the magnetic levitation rotor 300 are equal, which can ensure that each axial displacement sensor 500a maintains a constant distance from the magnetic levitation rotor 300, helps to ensure that each axial displacement sensor 500a has the same detection and sensing ability for the magnetic levitation rotor 300, and improves the accuracy and stability of the measurement of the axial displacement sensor 500a. At the same time, it can also more conveniently adjust the position between the axial displacement sensor 500a and the magnetic levitation rotor 300, and improve the installation convenience of the axial displacement sensor 500a and the magnetic levitation rotor 300.

[0159] Please refer to Figure 2And Figure 9 , Figure 9 is Figure 2 a partial enlarged view of part M1 in [description]. In one embodiment, the magnetic levitation device 10 includes a sensor connection mechanism 700 and an elastic seal tube 800. The sensor connection mechanism 700 is used to fixedly connect the magnetic levitation stator 200 and the axial displacement sensor 500a. The elastic seal tube 800 is sleeved on the outer periphery of the axial displacement sensor 500a, and both ends of the elastic seal tube 800 are fixedly connected to the bottom wall 110 and the sensor connection mechanism 700 respectively.

[0160] The elastic seal tube 800 can be located above the chamber 100 along the axial direction O of the magnetic levitation device, or below the chamber 100 along the axial direction O of the magnetic levitation device. In this embodiment, the case where the elastic seal tube 800 is located below the chamber 100 along the axial direction O of the magnetic levitation device and both ends of the elastic seal tube 800 are hermetically connected to the bottom wall 110 and the sensor connection mechanism 700 will be described in detail.

[0161] The sensor connection mechanism 700 is used to fixedly connect the magnetic levitation stator 200 and the axial displacement sensor 500a. When the lifting device 400 drives the magnetic levitation stator 200 to move up and down along the axial direction O of the magnetic levitation device, the axial displacement sensor 500a fixed to the sensor connection mechanism 700 also moves up and down along the axial direction O of the magnetic levitation device. The axial displacement sensor 500a passes through the opening 120 of the bottom wall 110 of the chamber 100, and the elastic seal tube 800 is sleeved on the outer periphery of the axial displacement sensor 500a, which can isolate the axial displacement sensor 500a from the external atmospheric environment and ensure cleanliness. Exemplarily, the elastic seal tube 800 can be a corrugated tube.

[0162] Both ends of the elastic seal tube 800 are fixedly connected to the bottom wall 110 and the sensor connection mechanism 700 respectively. The elastic seal tube 800 itself has elasticity. When the sensor connection mechanism 700 drives the elastic seal tube 800 to stretch or compress along the axial direction O of the magnetic levitation device, the bottom wall 110 of the chamber 100 will not move. The elastic seal tube 800 can absorb the relative displacement between the chamber 100 and the axial displacement sensor 500a, so that the axial displacement sensor 500a is always in an environment isolated from the external atmosphere.

[0163] Please refer to Figure 9 , in one embodiment, the sensor connection mechanism 700 includes a first connection portion 710, a second connection portion 720, and a third connection portion 730. The first connection portion 710 is used for relatively fixing with the magnetic levitation stator 200, the second connection portion 720 is used for connecting the first connection portion 710 and the third connection portion 730, the third connection portion 730 is used for connecting the axial displacement sensor 500a, and the first connection portion 710, the second connection portion 720, and the third connection portion 730 form a U-shaped structure.

[0164] Exemplarily, an elastic sealing tube 800 is sleeved on the outer peripheries of the axial displacement sensor 500a and the third connecting portion 730. The axial displacement sensor 500a is fixed above the third connecting portion 730 along the axial direction O of the magnetic levitation device. The third connecting portion 730 is beneficial to increasing the moving distance of the axial displacement sensor 500a in the axial direction O of the magnetic levitation device, and is also beneficial to reducing the requirement for the length of the axial displacement sensor 500a itself, so that the length of the axial displacement sensor 500a itself does not need to be too large, saving costs.

[0165] Exemplarily, two ends of the elastic sealing tube 800 are respectively fixedly connected to the bottom wall 110 and the second connecting portion 720. When the second connecting portion 720 moves up and down under the drive of the lifting device 400, it can trigger the elastic sealing tube 800 to stretch or contract along the axial direction O of the magnetic levitation device, facilitating the isolation of the axial displacement sensor 500a from the external atmospheric environment and ensuring a highly clean environment.

[0166] Please refer to Figure 10 , Figure 10 which is a cross-sectional view of the magnetic levitation device 10 provided by an embodiment of the present application. In one embodiment, the sensor connection mechanism 700 includes a first connecting portion 710 and a second connecting portion 720. The second connecting portion 720 is used to directly connect the axial displacement sensor 500a, and the elastic sealing tube 800 is sleeved on the outer periphery of the axial displacement sensor 500a. The elastic sealing tube 800 can absorb the displacement of the axial displacement sensor 500a when moving up and down with the sensor connection mechanism 700, ensuring the isolation of the axial displacement sensor 500a from the external atmospheric environment and creating a highly clean environment.

[0167] In one embodiment, referring to Figure 6 、 Figure 7 and Figure 8 as shown, the sensor connection mechanism 700 includes a first connecting portion 710 and a second connecting portion 720. The first connecting portion 710 is used to connect with the magnetic levitation stator 200 to make the first connecting portion 710 relatively fixed with the magnetic levitation stator 200. The second connecting portion 720 is used to connect with the housing 502, and the first connecting portion 710 is connected to the second connecting portion 720. The first connecting portion 710 extends in the direction towards the magnetic levitation rotor 300. In the embodiment of the present application, the first connecting portion 710 extends along the axial direction O of the magnetic levitation device towards the magnetic levitation stator 200 and is fixedly connected to the magnetic levitation stator 200. Of course, in other possible embodiments, the first connecting portion 710 can also extend towards the magnetic levitation stator 200 in other directions. For example, the first connecting portion 710 can also extend towards the magnetic levitation stator 200 along a direction forming an angle of 30° with the axial direction O of the magnetic levitation device (not shown in the figure), and so on.

[0168] The second connecting portion 720 is used to connect the axial displacement sensor 500a. The axial displacement sensor 500a is fixed above the second connecting portion 720 along the axis O of the magnetic levitation device. One side of the second connecting portion 720 is connected to the first connecting portion 710, and the other side is connected to the housing 502. The second connecting portion 720 extends from the connection with the first connecting portion 710 in a direction perpendicular to the axis O of the magnetic levitation device. In the embodiment of the present application, the direction perpendicular to the axis O of the magnetic levitation device may be the radial direction R of the magnetic levitation rotor 300. The second connecting portion 720 extends from the connection with the first connecting portion 710 along the radial direction R of the magnetic levitation rotor 300. The cross-section of the second connecting portion 720 in the axis O of the magnetic levitation device is rectangular. The first connecting portion 710 is directly connected to the second connecting portion 720 to form a sensor connecting mechanism 700 for connecting the axial displacement sensor 500a and the magnetic levitation stator 200, ensuring that when the magnetic levitation stator 200 moves along the axis O of the magnetic levitation device, it drives the axial displacement sensor 500a to move.

[0169] In one embodiment, the first connecting portion 710 has a cylindrical structure. The side of the first connecting portion 710 facing away from the magnetic levitation stator 200 is connected to the second connecting portion 720. The second connecting portion 720 extends from the connection with the first connecting portion 710 along the radial direction of the first connecting portion 710 towards the inside of the first connecting portion 710 to form an annular structure. The magnetic levitation rotor 300, the first connecting portion 710, and the second connecting portion 720 are coaxially arranged. In the embodiment of the present application, the first connecting portion 710 is a cylindrical structure. The cylindrical first connecting portion 710 has an upper end and a lower end in the axis O of the magnetic levitation device. The upper end of the first connecting portion 710 is connected to the magnetic levitation stator 200, and the lower end of the first connecting portion 710 is connected to the second connecting portion 720. The second connecting portion 720 extends from the connection with the first connecting portion 710 along the radial direction of the first connecting portion 710 towards the inside of the first connecting portion 710 to form an annular second connecting portion 720. The magnetic levitation rotor 300, the first connecting portion 710, and the second connecting portion 720 are coaxially arranged. The number of the sensor connecting mechanisms 700 is one. The axial displacement sensor 500a is connected to the second connecting portion 720. The number of the axial displacement sensors 500a is at least three. At least three axial displacement sensors 500a are evenly distributed on the second connecting portion 720 along the circumferential direction C of the magnetic levitation device. The sensor connecting mechanism 700 includes the first connecting portion 710 and the second connecting portion 720. The first connecting portion 710 is cylindrical, and the second connecting portion 720 is annular, which is beneficial to improving the strength of the sensor connecting mechanism 700 and the stability of the sensor connecting mechanism 700 during movement.

[0170] In one embodiment, the number of the sensor connection mechanisms 700 is at least three, and the at least three sensor connection mechanisms 700 are arranged at intervals along the circumferential direction of the magnetic levitation rotor 300. The at least three sensor connection mechanisms 700 are independent of each other, which is beneficial to reducing the material consumption for preparing the sensor connection mechanisms 700 and saving costs. The number of the sensor connection mechanisms 700 can be three, four or more. In one embodiment, the number of the sensor connection mechanisms 700 is three, and the three sensor connection mechanisms 700 are independent of each other. The three sensor connection mechanisms 700 are evenly arranged at intervals along the circumferential direction of the magnetic levitation rotor 300. The sensor connection mechanism 700 is used to connect the magnetic levitation stator 200 and the housing 502.

[0171] In one embodiment, one side of the housing 502 facing the sensor connection mechanism 700 is hermetically connected to the sensor connection mechanism 700. The housing 502 and the sensor connection mechanism 700 are used to hermetically isolate the accommodation cavity 504 and the chamber 100. The sensor connection mechanism 700 is used to connect the housing 502 of the axial displacement sensor 500a. One side of the housing 502 facing the sensor connection mechanism 700 is hermetically connected to the sensor connection mechanism 700. The housing 502 and the sensor connection mechanism 700 are sealed at the connection part, so that the accommodation cavity 504 and the chamber 100 are hermetically isolated through the sensor connection mechanism 700 and the housing 502, ensuring that the air pressures in the accommodation cavity 504 and the chamber 100 are different. The hermetic connection between the housing 502 and the sensor connection mechanism 700 can be that the housing 502 and the sensor connection mechanism 700 are hermetically connected at the connection part between the housing 502 and the sensor connection mechanism 700 by one or a combination of ways such as welding, bonding with sealant and sealing with a sealing ring. The hermetic connection mentioned hereinafter can be the same as this.

[0172] In one embodiment, referring to Figure 6 , Figure 7 and Figure 8 as shown, the sensor connection mechanism 700 includes a first connection part 710 and a second connection part 720. The second connection part 720 is hermetically connected to the housing 502. The housing 502 is arranged at an interval from the magnetic levitation rotor 300 along the axis O of the magnetic levitation device. An opening 5021 is provided on the housing 502, and the opening 5021 is located on the side of the housing 502 away from the magnetic levitation rotor 300. The outer wall surface of the second connection part 720 covers the edge of the opening 5021.

[0173] In one embodiment, the connection part between the housing 502 and the second connection part 720 is hermetically connected by welding. When the housing 502 and the second connection part 720 are connected by welding, the housing 502 and the second connection part 720 can be made of the same material to facilitate welding.

[0174] In one embodiment, the connection between the housing 502 and the second connecting portion 720 is sealed by a sealing ring. Specifically, one side of the housing 502 facing the second connecting portion 720 may have an external thread, and the second connecting portion 720 is provided with an internal thread that mates with the external thread on the housing 502. The housing 502 and the second connecting portion 720 are connected by screw thread mating, and a sealing ring (not shown in the figure) is provided at the connection between the housing 502 and the second connecting portion 720. The sealing ring is used to seal the connection between the housing 502 and the second connecting portion 720.

[0175] Figure 11 It is a cross-sectional view of the magnetic levitation device 10 provided by an embodiment of the present application. Figure 12 is Figure 11 a partial enlarged view of part A2 in Figure 13 is Figure 12 an exploded view of part of the structure. In one embodiment, referring to Figure 11 , Figure 12 and Figure 13 shown, it includes a first connecting portion 710, a second connecting portion 720, and a third connecting portion 730. The first connecting portion 710 is used to connect with the magnetic levitation stator 200 to make the first connecting portion 710 and the magnetic levitation stator 200 relatively fixed. The second connecting portion 720 is used to connect the first connecting portion 710 and the third connecting portion 730. The third connecting portion 730 is connected to the housing 502. The first connecting portion 710 extends in the direction towards the magnetic levitation rotor 300. In the embodiment of the present application, the first connecting portion 710 extends along the axial direction O of the magnetic levitation device towards the magnetic levitation stator 200 and is fixedly connected to the magnetic levitation stator 200. One side of the second connecting portion 720 is connected to the first connecting portion 710, and the other side is connected to the third connecting portion 730. The second connecting portion 720 extends in a direction perpendicular to the axial direction O of the magnetic levitation device from the connection with the first connecting portion 710. In the embodiment of the present application, the direction perpendicular to the axial direction O of the magnetic levitation device may be the radial direction R of the magnetic levitation rotor 300. The second connecting portion 720 extends along the radial direction R of the magnetic levitation rotor 300 from the connection with the first connecting portion 710. The third connecting portion 730 extends in the direction towards the magnetic levitation rotor 300. In the embodiment of the present application, the third connecting portion 730 extends along the axial direction O of the magnetic levitation device towards the magnetic levitation rotor 300. The side of the third connecting portion 730 facing away from the second connecting portion 720 is connected to the housing 502 of the axial displacement sensor 500a.

[0176] In one embodiment, referring to Figure 11 , Figure 12 and Figure 13As shown, the sensor connecting mechanism 700 includes a first connecting part 710, a second connecting part 720 and a third connecting part 730. The third connecting part 730 is sealed and connected to the shell 502. The shell 502 is spaced apart from the magnetic levitation rotor 300 along the axial direction O of the magnetic levitation device. An opening 5021 is provided on the shell 502. The opening 5021 is located on the side of the shell 502 away from the magnetic levitation rotor 300. The outer wall surface of the third connecting part 730 covers the edge of the opening 5021.

[0177] In one embodiment, the connection between the shell 502 and the third connection part 730 is sealed by welding. When the shell 502 and the third connection part 730 are connected by welding, the shell 502 and the third connection part 730 can be made of the same material to facilitate welding.

[0178] In one embodiment, the connection between the shell 502 and the third connecting part 730 is sealed by a sealing ring. Specifically, the side of the shell 502 facing the third connecting part 730 may have an external thread, and the third connecting part 730 is provided with an internal thread that matches the external thread on the shell 502. The shell 502 and the third connecting part 730 are connected by threaded cooperation, and a sealing ring (not shown in the figure) is provided at the connection between the shell 502 and the third connecting part 730. The sealing ring is used to seal the connection between the shell 502 and the third connecting part 730.

[0179] In one embodiment, a channel 740 is provided in the sensor connection mechanism 700, and the channel 740 is connected to the accommodating cavity 504, and at least part of the connecting wire 503 is located in the channel 740. The channel 740 is used to provide a routing path for the connecting wire 503, so as to facilitate the electrical connection between the connecting wire and the external device or control system. Figure 6 , Figure 7 and Figure 8 As shown, a channel 740 is provided in the second connection portion 720 of the sensor connection mechanism 700, and at least part of the connecting wire 503 is located in the channel 740. When at least part of the connecting wire 503 is located in the channel 740, the connecting wire 503 located in the channel 740 can be completely filled in the channel 740, and the connecting wire 503 is completely in contact with the wall of the channel 740, or the volume of the channel 740 can be greater than the volume of the connecting wire 503 located in the channel 740, and the channel 740 is not fully filled with the connecting wire 503. The channel 740 is connected to the accommodating cavity 504, and the connecting wire 503 passes through the accommodating cavity 504 and the channel 740 in sequence to be electrically connected to an external device or a control system. For example, refer to Figure 11 , Figure 12 and Figure 13As shown, a channel 740 is provided in the third connecting portion 730 of the sensor connecting mechanism 700, and at least a part of the connecting line 503 is located in the channel 740. The channel 740 can be a straight channel, or a bent or curved channel. It should be noted that the connection between the channel 740 and the accommodating cavity 504 mentioned here means that the channel 740 and the accommodating cavity 504 are connected in a state where neither of them is filled with other objects. When the channel 740 and the accommodating cavity 504 are filled with other solids or gases, it also belongs to the connection between the channel 740 and the accommodating cavity 504 mentioned here.

[0180] Please refer to Figure 2 and Figure 3 , in one embodiment, the first connecting portion 710 of the sensor connecting mechanism 700 is fixedly connected to the stator housing 210 (as Figure 2 shown), in another embodiment, the first connecting portion 710 of the sensor connecting mechanism 700 is fixedly connected to the fixing plate 220 (as Figure 3 shown), so that the first connecting portion 710 is fixedly connected to the magnetic levitation stator 200.

[0181] In one embodiment, the chamber 100 includes a top wall 150 and a bottom wall 110 that are oppositely arranged along the axial direction O of the magnetic levitation device. The chamber 100 further includes an outer side wall 140 arranged along the circumferential direction C of the magnetic levitation device. Along the radial direction R of the magnetic levitation device, the magnetic levitation stator 200, the outer side wall 140, and the magnetic levitation rotor 300 are arranged at intervals in sequence. The outer side wall 140 is located between the top wall 150 and the bottom wall 110. The magnetic levitation device 10 further includes an elastic seal 900, and the elastic seal 900 is connected to the top wall 150 and / or the outer side wall 140. The elastic seal 900 expands and contracts along the axial direction O of the magnetic levitation device, and the bottom wall 110 moves relative to the top wall 150 along the axial direction O of the magnetic levitation device.

[0182] Figure 14 is a cross-sectional view of the magnetic levitation device 10 provided in an embodiment of the present application. Refer to Figure 14 shown, the chamber 100 is a cylindrical closed chamber. The chamber 100 has a top wall 150 and a bottom wall 110 in the axial direction O of the magnetic levitation device. The top wall 150 and the bottom wall 110 are parallel to each other. The chamber 100 further has an annular outer side wall 140 arranged along the circumferential direction C of the magnetic levitation device. The outer side wall 140 is located between the top wall 150 and the bottom wall 110. The magnetic levitation stator 200, the outer side wall 140, and the magnetic levitation rotor 300 are arranged in sequence in the circumferential direction C of the magnetic levitation device. In other embodiments of the present application, the top wall 150, the bottom wall 110, and the outer side wall 140 are fixedly connected or integrally formed to form a vacuum-tight chamber 100 (as Figure 2As shown. In the embodiment of the present application, the magnetic levitation device 10 further includes an elastic seal 900. The elastic seal 900 has elasticity and can expand and contract along the axial direction O of the magnetic levitation device. Exemplarily, the elastic seal 900 can be a bellows. The elastic seal 900 can be connected to the top wall 150, or the elastic seal 900 can be connected to the outer side wall 140, or the elastic seal 900 can be respectively connected to the top wall 150 and the outer side wall 140. The bottom wall 110 moves relative to the top wall 150 along the axial direction O of the magnetic levitation device through the elastic seal 900.

[0183] Specifically, in one embodiment, refer to Figure 14 As shown, the elastic seal 900 is located between the top wall 150 and the outer side wall 140. Both ends of the elastic seal 900 are respectively connected to the top wall 150 and the outer side wall 140. The sensor connection mechanism 700 and the axial displacement sensor 500a are both located below the magnetic levitation rotor 300 along the axial direction O of the magnetic levitation device. When the lifting device 400 moves along the axial direction O of the magnetic levitation device, the bottom wall 110 of the chamber 100 is driven by the lifting device 400 to lift and lower along the axial direction O of the magnetic levitation device. It can not only realize the synchronous large-stroke movement of the bottom wall 110 of the chamber 100 and the magnetic levitation stator 200 along the axial direction O of the magnetic levitation device with the lifting device 400, but also the axial displacement sensor 500a and the magnetic levitation rotor 300 have been in a relatively close distance range, which is convenient for the axial displacement sensor 500a to perform high-precision detection on the magnetic levitation rotor 300. In other possible embodiments, the sensor connection mechanism 700 and the axial displacement sensor 500a can also be both located above the magnetic levitation rotor 300 along the axial direction O of the magnetic levitation device.

[0184] In one embodiment, Figure 15 is a cross-sectional view of the magnetic levitation device 10 provided by an embodiment of the present application. Refer to Figure 15 As shown, both ends of the elastic seal 900 along the axial direction O of the magnetic levitation device are respectively connected to the outer side wall 140. The sensor connection mechanism 700 and the axial displacement sensor 500a are both located below the magnetic levitation rotor 300 along the axial direction O of the magnetic levitation device. When the lifting device 400 moves along the axial direction O of the magnetic levitation device, the bottom wall 110 of the chamber 100 is driven by the lifting device 400 to lift and lower along the axial direction O of the magnetic levitation device.

[0185] In one embodiment, Figure 16 is a cross-sectional view of the magnetic levitation device 10 provided by an embodiment of the present application. Refer to Figure 16As shown, both ends of the elastic seal 900 along the axial direction O of the magnetic levitation device are respectively connected to the top wall 150 and the sensor connection mechanism 700. Both the sensor connection mechanism 700 and the axial displacement sensor 500a are located above the magnetic levitation rotor 300 along the axial direction O of the magnetic levitation device. When the lifting device 400 moves along the axial direction O of the magnetic levitation device, the bottom wall 110 of the chamber 100 is driven by the lifting device 400 to lift and lower along the axial direction O of the magnetic levitation device.

[0186] In one embodiment, Figure 17 is a cross-sectional view of the magnetic levitation device 10 provided by an embodiment of the present application. Refer to Figure 17 As shown, both ends of the elastic seal 900 along the axial direction O of the magnetic levitation device are respectively connected to the outer side wall 140 and the sensor connection mechanism 700. Both the sensor connection mechanism 700 and the axial displacement sensor 500a are located above the magnetic levitation rotor 300 along the axial direction O of the magnetic levitation device. When the lifting device 400 moves along the axial direction O of the magnetic levitation device, the bottom wall 110 of the chamber 100 is driven by the lifting device 400 to lift and lower along the axial direction O of the magnetic levitation device.

[0187] In one embodiment, at least part of the housing 502 is located within the chamber 100, and the sensor connection mechanism 700 or the housing 502 is sealingly connected to the elastic seal 900. The housing 502 of the axial displacement sensor 500a can be partially located within the chamber 100 or completely located within the chamber 100. The axial displacement sensor 500a and the magnetic levitation rotor 300 can be arranged at intervals along the axial direction O of the magnetic levitation device. At this time, the housing 502 of the axial displacement sensor 500a can be completely located within the chamber 100, and the sensor connection mechanism 700 is sealingly connected to the elastic seal 900. The axial displacement sensor 500a can also be arranged at intervals with the magnetic levitation rotor 300 in the radial direction of the magnetic levitation rotor. At this time, the housing 502 of the axial displacement sensor 500a can be partially located within the chamber 100, and the housing 502 is sealingly connected to the elastic seal 900. When the lifting device 400 moves along the axial direction O of the magnetic levitation device, part of the chamber 100 and the magnetic levitation stator 200 move synchronously in a large stroke along the axial direction O of the magnetic levitation device with the lifting device 400, which can adjust the relative position of the substrate between the cold source and the heat source within a large range, and is beneficial to reducing the thermal budget. At the same time, the axial displacement sensor 500a and the magnetic levitation rotor 300 are always in a relatively close distance range, which is convenient for the axial displacement sensor 500a to perform high-precision detection on the magnetic levitation rotor 300.

[0188] In one embodiment, the sensor connection mechanism 700 or the housing 502 is respectively and sealingly connected to the elastic seal 900 and the outer wall 140 on both sides along the axial direction O of the magnetic levitation device. The sensor connection mechanism 700, the elastic seal 900, the top wall 150, the outer wall 140, and the bottom wall 110 enclose a sealed environment, or the housing 502, the elastic seal 900, the top wall 150, the outer wall 140, and the bottom wall 110 enclose a sealed environment.

[0189] In some possible embodiments, referring to Figure 16 and Figure 17 as shown, the axial displacement sensor 500a and the magnetic levitation rotor 300 are arranged at intervals along the axial direction O of the magnetic levitation device. Both the axial displacement sensor 500a and the sensor connection mechanism 700 are located above the magnetic levitation rotor 300 along the axial direction O of the magnetic levitation device. The first connection portion 710 is fixedly connected to the magnetic levitation stator 200. The first connection portion 710 is located outside the chamber 100. The second connection portion 720 is fixedly and sealingly connected to the housing 502 of the axial displacement sensor 500a. Part of the second connection portion 720 and the housing 502 are located inside the chamber 100.

[0190] In Figure 16 the elastic seal 900 is located between the top wall 150 and the second connection portion 720. The elastic seal 900 is respectively and sealingly connected to the top wall 150 and the second connection portion 720. The top wall 150 covers one end of the elastic seal 900. The outer wall surface of the second connection portion 720 covers the other end of the elastic seal 900. The top wall 150 and the second connection portion 720 are respectively and sealingly connected to the ports at both ends of the elastic seal 900. The side of the second connection portion 720 facing away from the elastic seal 900 is sealingly connected to the outer wall 140. Along the axial direction O of the magnetic levitation device, the top wall 150, the elastic seal 900, the sensor connection mechanism 700, and the outer wall 140 are arranged in sequence and are sealingly connected in sequence to maintain the vacuum-sealed environment of the chamber 100, thereby ensuring the vacuum and high cleanliness requirements inside the chamber 100. When the lifting device 400 moves along the axial direction O of the magnetic levitation device, the magnetic levitation stator 200, the axial displacement sensor 500a, the sensor connection mechanism 700, the magnetic levitation rotor 300, and the bottom wall 110 of the chamber 100 are all driven by the lifting device 400 to lift and lower along the axial direction O of the magnetic levitation device. Part of the chamber 100 and the magnetic levitation stator 200 move synchronously in a large stroke along the axial direction O of the magnetic levitation device with the lifting device 400, which can adjust the relative position of the substrate between the cold source and the heat source within a large range, facilitating the reduction of the thermal budget. At the same time, the axial displacement sensor 500a and the magnetic levitation rotor 300 are always in a relatively close distance range, which is convenient for the axial displacement sensor 500a to perform high-precision detection on the magnetic levitation rotor 300.

[0191] In Figure 17In it, the elastic seal 900 is located between the outer sidewall 140 and the second connecting portion 720, and the elastic seal 900 is hermetically connected to the outer sidewall 140 and the second connecting portion 720 respectively. The outer sidewall 140 covers one end of the elastic seal 900, and the outer wall surface of the second connecting portion 720 covers the other end of the elastic seal 900. The outer sidewall 140 and the second connecting portion 720 are hermetically connected to the ports at both ends of the elastic seal 900 respectively. The side of the second connecting portion 720 facing away from the elastic seal 900 is hermetically connected to the outer sidewall 140. Along the axis O of the magnetic levitation device, the top wall 150, a part of the outer sidewall 140, the elastic seal 900, the sensor connecting mechanism 700, and a part of the outer sidewall 140 are arranged in sequence and hermetically connected in sequence to maintain the vacuum tight environment of the chamber 100, so as to ensure the vacuum and high cleanliness requirements in the chamber 100.

[0192] In one embodiment, Figure 18 is a cross-sectional view of the magnetic levitation device provided by an embodiment of the present application. Refer to Figure 18 As shown, the axial displacement sensor 500a and the magnetic levitation rotor 300 are arranged at intervals along the radial direction R of the magnetic levitation device. Along the radial direction R of the magnetic levitation device, the magnetic levitation stator 200, the axial displacement sensor 500a, and the magnetic levitation rotor 300 are arranged in sequence. One end of the housing 502 of the axial displacement sensor 500a along the radial direction R of the magnetic levitation device is fixedly connected to the magnetic levitation stator 200, and the other end of the housing 502 of the axial displacement sensor 500a along the radial direction R of the magnetic levitation device is arranged at intervals from the magnetic levitation rotor 300. A part of the housing 502 of the axial displacement sensor 500a is located outside the chamber 100, and another part of the housing 502 of the axial displacement sensor 500a is located inside the chamber 100. The elastic seal 900 is located between the outer sidewall 140 and the housing 502, and the elastic seal 900 is hermetically connected to the outer sidewall 140 and the housing 502 respectively. The outer sidewall 140 covers one end of the elastic seal 900, and the outer wall surface of the housing 502 covers the other end of the elastic seal 900. The outer sidewall 140 and the housing 502 are hermetically connected to the ports at both ends of the elastic seal 900 respectively. The side of the housing 502 facing away from the elastic seal 900 is hermetically connected to the outer sidewall 140. Along the axis O of the magnetic levitation device, a part of the outer sidewall 140, the elastic seal 900, the housing 502, and a part of the outer sidewall 140 are arranged in sequence and hermetically connected in sequence to maintain the vacuum tight environment of the chamber 100.

[0193] In one embodiment, the number of the elastic seals 900 is at least two, and the number of the elastic seals 900 can be two, three or even more. At least two elastic seals 900 are arranged along the axis O of the magnetic levitation device, and the sensor connection mechanism 700 or the housing 502 is located between at least two elastic seals 900. The two sides of the sensor connection mechanism 700 or the housing 502 along the axis O of the magnetic levitation device are respectively and sealingly connected to two elastic seals 900. The sensor connection mechanism 700, the elastic seals 900, the top wall 150, the outer side wall 140 and the bottom wall 110 enclose a sealed environment, or the housing 502, the elastic seals 900, the top wall 150, the outer side wall 140 and the bottom wall 110 enclose a sealed environment.

[0194] In some possible embodiments, Figure 19 is a cross-sectional view of a magnetic levitation device provided by an embodiment of the present application, Figure 20 is a cross-sectional view of a magnetic levitation device provided by an embodiment of the present application. Refer to Figure 19 and Figure 20 As shown, the number of the elastic seals 900 is two, and the two elastic seals 900 are arranged at intervals along the axis O of the magnetic levitation device. The axial displacement sensor 500a and the magnetic levitation rotor 300 are arranged at intervals along the axis O of the magnetic levitation device. The axial displacement sensor 500a and the sensor connection mechanism 700 are both located above the magnetic levitation rotor 300 along the axis O of the magnetic levitation device. The first connection portion 710 is fixedly connected to the magnetic levitation stator 200, and the first connection portion 710 is located outside the chamber 100. The second connection portion 720 is fixedly and sealingly connected to the housing 502 of the axial displacement sensor 500a, and part of the second connection portion 720 and the housing 502 are located inside the chamber 100. The second connection portion 720 is located between two elastic seals 900, and the two sides of the second connection portion 720 along the axis O of the magnetic levitation device are respectively and sealingly connected to two elastic seals 900. On the side of the second connection portion 720 facing the top wall 150, the elastic seals 900 are respectively and sealingly connected to the top wall 150 and the second connection portion 720.

[0195] In Figure 19Among them, the top wall 150 covers one end of the elastic seal 900, and the outer wall surface of the second connecting portion 720 covers the other end of the elastic seal 900. The top wall 150 and the second connecting portion 720 are respectively and sealingly connected to the ports at both ends of the elastic seal 900. On the side of the second connecting portion 720 facing the bottom wall 110, the elastic seal 900 is located between the outer side wall 140 and the second connecting portion 720, and the elastic seal 900 is respectively and sealingly connected to the outer side wall 140 and the second connecting portion 720. The outer side wall 140 covers one end of the elastic seal 900, and the outer wall surface of the second connecting portion 720 covers the other end of the elastic seal 900. The outer side wall 140 and the second connecting portion 720 are respectively and sealingly connected to the ports at both ends of the elastic seal 900. Along the axis O of the magnetic levitation device, the top wall 150, the elastic seal 900, the sensor connection mechanism 700, the elastic seal 900, and the outer side wall 140 are arranged in sequence and are sealingly connected in sequence to maintain the vacuum tight environment of the chamber 100, so as to ensure the vacuum and high cleanliness requirements inside the chamber 100. When the lifting device 400 moves along the axis O of the magnetic levitation device, the magnetic levitation stator 200, the axial displacement sensor 500a, the sensor connection mechanism 700, the magnetic levitation rotor 300, and the bottom wall 110 of the chamber 100 are all driven by the lifting device 400 to lift along the axis O of the magnetic levitation device. Part of the chamber 100 and the magnetic levitation stator 200 move synchronously in a large stroke along the axis O of the magnetic levitation device with the lifting device 400, and the relative position of the substrate between the cold source and the heat source can be adjusted within a large range, which is beneficial to reducing the thermal budget. At the same time, the axial displacement sensor 500a and the magnetic levitation rotor 300 are always in a relatively close distance range, which is convenient for the axial displacement sensor 500a to perform high-precision detection on the magnetic levitation rotor 300.

[0196] In Figure 20In the middle, on the side of the second connecting portion 720 facing the top wall 150, the elastic seal 900 is respectively and sealingly connected to the outer side wall 140 and the second connecting portion 720. The outer side wall 140 covers one end of the elastic seal 900, and the outer wall surface of the second connecting portion 720 covers the other end of the elastic seal 900. The outer side wall 140 and the second connecting portion 720 are respectively and sealingly connected to the ports at both ends of the elastic seal 900. On the side of the second connecting portion 720 facing the bottom wall 110, the elastic seal 900 is located between the outer side wall 140 and the second connecting portion 720, and the elastic seal 900 is respectively and sealingly connected to the outer side wall 140 and the second connecting portion 720. The outer side wall 140 covers one end of the elastic seal 900, and the outer wall surface of the second connecting portion 720 covers the other end of the elastic seal 900. The outer side wall 140 and the second connecting portion 720 are respectively and sealingly connected to the ports at both ends of the elastic seal 900. Along the axis O of the magnetic levitation device, the top wall 150, the elastic seal 900, the sensor connecting mechanism 700, the elastic seal 900 and the outer side wall 140 are arranged in sequence and are sealingly connected in sequence to maintain the vacuum tight environment of the chamber 100, so as to ensure the vacuum and high cleanliness requirements inside the chamber 100.

[0197] In one embodiment, Figure 21 is a cross-sectional view of the magnetic levitation device provided by an embodiment of the present application. Refer to Figure 21As shown, the housing 502 is located between two elastic seals 900, and the housing 502 is sealingly connected to the two elastic seals 900 on both sides along the axis O of the magnetic levitation device. On the side of the housing 502 facing the top wall 150, the elastic seals 900 are respectively sealingly connected to the outer side wall 140 and the housing 502. The outer side wall 140 covers one end of the elastic seal 900, and the outer wall surface of the housing 502 covers the other end of the elastic seal 900. The outer side wall 140 and the housing 502 are respectively sealingly connected to the ports at both ends of the elastic seal 900. On the side of the housing 502 facing the bottom wall 110, the elastic seals 900 are located between the outer side wall 140 and the housing 502, and the elastic seals 900 are respectively sealingly connected to the outer side wall 140 and the housing 502. The outer side wall 140 covers one end of the elastic seal 900, and the outer wall surface of the housing 502 covers the other end of the elastic seal 900. The outer side wall 140 and the housing 502 are respectively sealingly connected to the ports at both ends of the elastic seal 900. Along the axis O of the magnetic levitation device, part of the outer side wall 140, the elastic seal 900, the sensor connection mechanism 700, the elastic seal 900, and part of the outer side wall 140 are arranged in sequence and are sealingly connected in sequence to maintain the vacuum tight environment of the chamber 100, so as to ensure the vacuum and high cleanliness requirements in the chamber 100. When the lifting device 400 moves along the axis O of the magnetic levitation device, the magnetic levitation stator 200, the axial displacement sensor 500a, the sensor connection mechanism 700, the magnetic levitation rotor 300, and the bottom wall 110 of the chamber 100 are all driven by the lifting device 400 to lift along the axis O of the magnetic levitation device. Part of the chamber 100 and the magnetic levitation stator 200 move synchronously in a large stroke along the axis O of the magnetic levitation device with the lifting device 400, and the relative position of the substrate between the cold source and the heat source can be adjusted within a large range, which is beneficial to reducing the thermal budget. At the same time, the axial displacement sensor 500a and the magnetic levitation rotor 300 are always in a relatively close distance range, which is convenient for the axial displacement sensor 500a to perform high-precision detection on the magnetic levitation rotor 300.

[0198] Please refer to Figure 22 , Figure 22 is a cross-sectional view of the magnetic levitation device 10 provided by an embodiment of the present application. In one embodiment, the axial displacement sensors 500a are arranged radially along the magnetic levitation device R outside the chamber 100, and the axial displacement sensors 500a and the magnetic levitation rotor 300 are arranged at intervals along the radial direction R of the magnetic levitation device.

[0199] The axial displacement sensors 500a are arranged along the radial direction R of the magnetic levitation device on the outside of the chamber 100. The transmitted signal of the axial displacement sensors 500a can penetrate the side wall of the chamber 100 to reach the magnetic levitation rotor 300. By arranging two axial displacement sensors 500a along the axial direction O of the magnetic levitation device, the position of the magnetic levitation rotor 300 is detected, and the displacement of the magnetic levitation rotor 300 moving along the axial direction O of the magnetic levitation device is calculated by using the change of the displacement signals of the magnetic levitation rotor 300 detected by the two axial displacement sensors 500a.

[0200] Exemplarily, the axial displacement sensors 500a and the magnetic levitation rotor 300 are arranged at intervals along the radial direction R of the magnetic levitation device, which is convenient for the axial displacement sensors 500a to transmit and receive detection signals to the magnetic levitation rotor 300.

[0201] Please refer to Figure 23 , Figure 23 FIG. is a cross-sectional view of the magnetic levitation device 10 provided by an embodiment of the present application. In one embodiment, at least one sensor 500 includes a radial displacement sensor 500b, and the radial displacement sensor 500b is used to detect the radial displacement of the magnetic levitation rotor 300. The radial displacement sensor 500b is arranged along the radial direction R of the magnetic levitation device on the outside of the chamber 100, and the radial displacement sensor 500b and the magnetic levitation rotor 300 are arranged at intervals along the radial direction R of the magnetic levitation device.

[0202] Exemplarily, the radial displacement sensor 500b is arranged inside the magnetic levitation stator 200. Optionally, the radial displacement sensor 500b is fixed to the stator housing 210.

[0203] Exemplarily, along the radial direction R of the magnetic levitation device, the radial displacement sensor 500b, the outer side wall 140 of the chamber 100, the magnetic levitation rotor 300, and the inner side wall 130 of the chamber 100 are arranged at intervals in sequence. Along the radial direction R of the magnetic levitation device, the projection of the magnetic levitation rotor 300 covers the projection of the radial displacement sensor 500b. The radial displacement sensor 500b is arranged inside the magnetic levitation stator 200, so that the radial displacement sensor 500b can move synchronously with the magnetic levitation stator 200 to detect the radial displacement of the magnetic levitation rotor 300, which is beneficial to reducing the installation position requirements of the radial displacement sensor 500b. In addition, the radial displacement sensor 500b is adjusted according to the position of the magnetic levitation rotor 300, so that the radial displacement sensor 500b can more easily and accurately detect the radial displacement of the magnetic levitation rotor 300.

[0204] In one embodiment, the magnetic levitation device 10 includes at least four radial displacement sensors 500b. The at least four radial displacement sensors 500b are fixed inside the magnetic levitation stator 200 using a differential architecture and follow the magnetic levitation stator 200 to lift and lower synchronously along the axial direction O of the magnetic levitation device to detect the radial displacement of the magnetic levitation rotor 300. When the volume of the object to be measured is large, the number of radial displacement sensors 500b can be increased. By measuring more positions of the object to be measured, accurate displacement signals are transmitted to achieve more stable levitation of the overall object to be measured.

[0205] Please refer to Figure 2 , in one embodiment, the radial displacement sensor 500b is fixed to the inner side wall 130 of the chamber 100.

[0206] Figure 24 For Figure 6 the partial enlarged view of part A3 in Figure 6 and Figure 24 as shown, in one embodiment, the chamber 100 includes an inner side wall 130 arranged along the circumferential direction C of the magnetic levitation device. Along the radial direction R of the magnetic levitation device, the magnetic levitation stator 200, the magnetic levitation rotor 300, and the inner side wall 130 are arranged at intervals in sequence. The inner side wall 130 includes a through hole 131. The through hole 131 penetrates the inner side wall 130 along the radial direction R of the magnetic levitation device. The detection end 510 of the radial displacement sensor 500b extends into the chamber 100 along the radial direction R of the magnetic levitation device through the through hole 131 for detecting the radial position of the magnetic levitation rotor 300, making the detection result of the radial displacement sensor 500b more accurate. The main body 520 of the radial displacement sensor 500b is connected to the detection end 510 of the radial displacement sensor 500b and extends along the axial direction O of the magnetic levitation device. The detection end 510 of the radial displacement sensor 500b is perpendicular to the main body 520 of the radial displacement sensor 500b. The main body 520 of the radial displacement sensor 500b is located outside the chamber 100 and is hermetically connected to the side of the inner side wall 130 facing away from the magnetic levitation rotor 300. Exemplarily, the main body 520 of the radial displacement sensor 500b is hermetically connected to the side of the inner side wall 130 facing away from the magnetic levitation rotor 300 through a sealing ring. The hermetic connection between the main body 520 of the radial displacement sensor 500b and the side of the inner side wall 130 facing away from the magnetic levitation rotor 300 can maintain the vacuum environment inside the chamber 100.

[0207] The radial displacement sensor 500b is relatively fixed with respect to the chamber 100 and does not move up and down along the axial direction O of the magnetic levitation device with the lifting device 400. The radial displacement sensor 500b passes through the chamber 100 to detect the radial displacement of the magnetic levitation rotor 300. When setting the position of the radial displacement sensor 500b, it is necessary to ensure that during the movement of the magnetic levitation rotor 300 along the axial direction O of the magnetic levitation device, the radial displacement sensor 500b can detect the magnetic levitation rotor 300, and it is not allowed to make the movement of the magnetic levitation rotor 300 lower or higher than the radial displacement sensor 500b, so as to ensure that the radial displacement sensor 500b can detect the radial displacement of the magnetic levitation rotor 300, which is beneficial to the flexible control of the magnetic levitation device 10.

[0208] Exemplarily, the radial displacement sensor 500b and the magnetic levitation rotor 300 are arranged at intervals along the radial direction R of the magnetic levitation device, which is convenient for the radial displacement sensor 500b to emit detection signals to the magnetic levitation rotor 300 and receive the detection signals reflected by the magnetic levitation rotor 300.

[0209] In one embodiment, the magnetic levitation device 10 includes at least three radial displacement sensors 500b fixed outside the chamber 100. The at least three radial displacement sensors 500b use a differential architecture to detect the radial displacement of the magnetic levitation rotor 300. The differential architecture detection is beneficial to improving key indicators such as the sensitivity, linearity, and temperature drift coefficient of the sensor 500, and improving the detection accuracy.

[0210] Please refer to Figure 2 , in one embodiment, at least one sensor 500 further includes a rotation sensor 500c for detecting the rotation angle of the magnetic levitation rotor 300. The rotation sensor 500c is arranged outside the chamber 100 along the radial direction R of the magnetic levitation device, and the rotation sensor 500c and the magnetic levitation rotor 300 are arranged at intervals along the radial direction R of the magnetic levitation device.

[0211] The magnetic levitation rotor 300 will rotate under the action of the magnetic field of the magnetic levitation stator 200. The rotation sensor 500c obtains the rotation angle of the magnetic levitation rotor 300 by emitting detection signals to the magnetic levitation rotor 300 and detecting the difference in the position of the magnetic levitation rotor 300 before and after.

[0212] The rotation sensor 500c is arranged outside the chamber 100 along the radial direction R of the magnetic levitation device, and the rotation sensor 500c penetrates the outer wall 140 of the chamber 100 to detect the magnetic levitation rotor 300. The rotation sensor 500c and the magnetic levitation rotor 300 are arranged at intervals along the radial direction R of the magnetic levitation device, which is convenient for the rotation sensor 500c to emit detection signals to the magnetic levitation rotor 300 and receive the detection signals reflected back by the magnetic levitation rotor 300.

[0213] Exemplarily, the rotation sensor 500c is fixed inside the magnetic levitation stator 200. The rotation sensor 500c can move relative to the magnetic levitation rotor 300 following the movement of the magnetic levitation stator 200, maintaining a relatively small distance from the magnetic levitation rotor 300, thereby improving the detection accuracy of the rotation sensor 500c for the magnetic levitation rotor 300.

[0214] In one embodiment, the magnetic levitation device 10 includes at least three rotation sensors 500c. The at least three rotation sensors 500c are evenly distributed along the circumferential direction C of the magnetic levitation device, facilitating the magnetic levitation sensors 500 to detect the magnetic levitation rotor 300 respectively, and at the same time feeding back multiple sets of measurement data to improve the detection accuracy.

[0215] In Figure 2 In the shown embodiment, the magnetic levitation device 10 includes an axial displacement sensor 500a, a radial displacement sensor 500b, and a rotation sensor 500c that are relatively fixed to the lifting device 400. The axial displacement, radial displacement, and rotation angle of the magnetic levitation rotor 300 are detected by the axial displacement sensor 500a, the radial displacement sensor 500b, and the rotation sensor 500c respectively, thereby improving the control accuracy of the displacement of the magnetic levitation rotor 300.

[0216] In one embodiment, the magnetic levitation device 10 may include two of the axial displacement sensor 500a, the radial displacement sensor 500b, and the rotation sensor 500c that are relatively fixed to the lifting device 400. Exemplarily, the magnetic levitation device 10 includes the axial displacement sensor 500a and the radial displacement sensor 500b. Exemplarily, the magnetic levitation device 10 includes the axial displacement sensor 500a and the rotation sensor 500c. Exemplarily, the magnetic levitation device 10 includes the radial displacement sensor 500b and the rotation sensor 500c.

[0217] In one embodiment, the magnetic levitation device 10 may include one of the axial displacement sensor 500a, the radial displacement sensor 500b, and the rotation sensor 500c that are relatively fixed to the lifting device 400. Exemplarily, as Figure 22 shown, the magnetic levitation device 10 includes the axial displacement sensor 500a. Exemplarily, as Figure 23 shown, the magnetic levitation device 10 includes the radial displacement sensor 500b.

[0218] Please refer to Figure 25 , Figure 25 This is a schematic structural diagram of the magnetic levitation device 10 provided by an embodiment of the present application. In one embodiment, the magnetic levitation stator 200 includes a rotating motor 230 and a plurality of magnetic bearings 240.

[0219] The rotating electric machine 230 is used to provide a magnetic field force to drive the magnetic levitation rotor 300 to rotate circumferentially C along the magnetic levitation device, and a plurality of magnetic bearings 240 are used to provide a magnetic field force to drive the magnetic levitation rotor 300 to move axially O or radially R along the magnetic levitation device.

[0220] Please refer to Figure 25 , in an embodiment, the magnetic levitation rotor 300 includes an annular yoke portion 310, a first circular ring convex portion 320, and a plurality of tooth portions 330. The first circular ring convex portion 320 and the plurality of tooth portions 330 are fixed to the outer peripheral side of the annular yoke portion 310 and are spaced apart along the axial direction O. Along the radial direction R of the magnetic levitation device, the first circular ring convex portion 320 and the plurality of tooth portions 330 protrude from the outer peripheral surface of the annular yoke portion 310. The plurality of tooth portions 330 are spaced apart along the circumferential direction C of the magnetic levitation device. The rotating electric machine 230 is used to interact with the plurality of tooth portions 330 to drive the magnetic levitation rotor 300 to rotate, and the plurality of magnetic bearings 240 are used to interact with the first circular ring convex portion 320 to drive the magnetic levitation rotor 300 to displace radially R or axially O along the magnetic levitation device. In the embodiment of the present application, the annular yoke portion 310 is used to fix the first circular ring convex portion 320 and the plurality of tooth portions 330. The first circular ring convex portion 320 and the plurality of tooth portions 330 are fixed to the outer peripheral side of the annular yoke portion 310 and are spaced apart along the axial direction O, which is convenient for the magnetic levitation stator 200 to generate magnetic field acting forces on the first circular ring convex portion 320 and the plurality of tooth portions 330 of the magnetic levitation rotor 300 respectively, and drive the magnetic levitation rotor 300 to displace. Along the radial direction R of the magnetic levitation device, the first circular ring convex portion 320 and the plurality of tooth portions 330 protrude from the outer peripheral surface of the annular yoke portion 310, which is beneficial for the magnetic levitation stator 200 to generate an acting force on the magnetic levitation rotor 300. When the magnetic levitation rotor 300 can rotate circumferentially C and lift axially O, the magnetic levitation stator 200 drives the first circular ring convex portion 320 and the plurality of tooth portions 330 to move at the same time, so that the annular yoke portion 310 also moves together, which is beneficial for reducing the magnitude of the applied magnetic field acting force.

[0221] Exemplarily, the plurality of tooth portions 330 are spaced apart along the circumferential direction C of the magnetic levitation device, so that when the magnetic levitation stator 200 applies a magnetic force to the tooth portions 330, the plurality of tooth portions 330 can play a role at the same time, so that the magnetic levitation rotor 300 generates a larger acting force to drive the magnetic levitation rotor 300 to rotate circumferentially, and it is easier to realize the levitation rotation of the magnetic levitation rotor 300.

[0222] In the embodiments of the present application, the rotary motor 230 is used to interact with a plurality of tooth portions 330 to drive the magnetic levitation rotor 300 to rotate, facilitating the realization of the magnetic levitation rotor 300 driving the substrate 600 to rotate uniformly in the magnetic levitation device 10 to ensure uniform heating of the substrate 600, and maximizing the degree of impurity activation and minimizing the degree of impurity diffusion during the spike annealing process. The plurality of magnetic bearings 240 are used to interact with the first annular convex portion 320 to drive the magnetic levitation rotor 300 to displace along the radial direction R or the axial direction O of the magnetic levitation device, facilitating the realization of the magnetic levitation rotor 300 driving the substrate 600 to quickly move between the cold source and the heat source outside the chamber 100, which is beneficial to reducing the thermal budget.

[0223] Please refer to Figure 2 、 Figure 26 and Figure 27 , Figure 26 which is a schematic structural diagram of the magnetic levitation device 10 provided by an embodiment of the present application, Figure 27 is Figure 26 a partial enlarged view of the M2 part in . In one embodiment, the rotary motor 230 includes a U-shaped iron core 231 and a coil winding 232, and the magnetic levitation stator 200 further includes a rotary motor support 250.

[0224] The rotary motor 230 is fixed to the bottom of the stator housing 210 through the rotary motor support 250, and the plurality of magnetic bearings 240 are directly fixed or indirectly fixed to the bottom of the stator housing 210 through a support. The coil winding 232 is wound around the U-shaped iron core 231. As Figure 27 shown, the plurality of tooth portions 330 of the magnetic levitation rotor 300 and the U-shaped iron core 231 of the rotary motor 230 are arranged at the same height along the axial direction O of the magnetic levitation device, facilitating the rotary motor 230 to apply a magnetic field force to the plurality of tooth portions 330 to drive the magnetic levitation rotor 300 to rotate along the circumferential direction C of the magnetic levitation device.

[0225] It should be noted that the plurality of tooth portions 330 of the magnetic levitation rotor 300 and the U-shaped iron core 231 of the rotary motor 230 being arranged at the same height along the axial direction O of the magnetic levitation device means that the midpoints of the plurality of tooth portions 330 of the magnetic levitation rotor 300 in the axial direction O of the magnetic levitation device are collinear with the midpoint of the U-shaped iron core 231 along the axial direction O of the magnetic levitation device.

[0226] Please refer to Figure 1 and Figure 26, in one embodiment, coil windings 232 are wound around both ends of a U-shaped iron core 231 respectively, that is, a rotary motor 230 includes two coil windings 232. The ratio of the number of coil windings 232 in the magnetic levitation stator 200 to the number of tooth parts 330 in the magnetic levitation rotor 300 needs to satisfy a relationship that can drive the magnetic levitation rotor 300 to rotate. Exemplarily, the ratio of the number of coil windings 232 to the number of tooth parts 330 in the magnetic levitation rotor 300 is 3:4, 4:6 or 6:4.

[0227] Please refer to Figure 1 , in one embodiment, the rotary motor 230 adopts a switched reluctance motor structure. The U-shaped iron core 231 can be wound with one or more coil windings 232 in series according to the installation space to increase the slot fill factor. The magnetic levitation device 10 includes a plurality of rotary motors 230. Each rotary motor 230 includes a U-shaped structure, and the U-shaped structure is composed of a magnetic conductive material. Each U-shaped structure is relatively independent, realizing electromagnetic and thermal isolation structurally, supporting separate replacement, improving the independent operation ability of each structure, being beneficial to improving the fault tolerance of the magnetic levitation device 10 for the rotary motor 230, and facilitating assembly and maintenance. All U-shaped structures can be integrally assembled on a non-conductive circular ring structure, and the U-shaped structures are uniformly distributed and fixed along the circumferential direction C of the magnetic levitation device. The rotation of the magnetic levitation rotor 300 is controlled by controlling the energization sequence of the U-shaped structures, and a multi-phase motor scheme can be realized through the combination of U-shaped structures. Exemplarily, it can be a three-phase motor, a five-phase motor or an eight-phase motor.

[0228] Please refer to Figure 2 , in one embodiment, the substrate support 610 is fixed to a plurality of tooth parts 330 of the magnetic levitation rotor 300. The rotation of the plurality of tooth parts 330 is driven by the rotary motor 230 to drive the substrate 600 to rotate along the circumferential direction C of the magnetic levitation device, facilitating the realization of uniform heating of the substrate 600, maximizing the degree of impurity activation and minimizing the degree of impurity diffusion during the spike annealing process.

[0229] Please refer to Figure 2 , in one embodiment, a plurality of tooth parts 330 of the magnetic levitation rotor 300 are also arranged in the same layer as the rotation sensor 500c along the axial direction O of the magnetic levitation device.

[0230] Exemplarily, the rotation sensor 500c is used to detect the rotation angle signal of the magnetic levitation rotor 300. The rotation sensor 500c is arranged corresponding to a plurality of tooth portions 330, facilitating the rotation sensor 500c to detect the rotation angle of the plurality of tooth portions 330, that is, realizing the detection of the rotation angle of the magnetic levitation rotor 300 by the rotation sensor 500c. Exemplarily, the plurality of tooth portions 330 all have special markings, and the rotation sensor 500c can calculate the rotation angle of the magnetic levitation rotor 300 by detecting the difference in signals of the tooth portions 330 at different times. It should be noted that the plurality of tooth portions 330 are also arranged on the same layer as the rotation sensor 500c along the axial direction O of the magnetic levitation device, which also shows that the plurality of tooth portions 330 are arranged oppositely to the rotation sensor 500c along the radial direction R of the magnetic levitation device.

[0231] In one embodiment, the magnetic levitation device 10 includes six rotation sensors 500c. The rotation sensors 500c adopt a differential structure. Due to the different positions of the six rotation sensors 500c relative to the plurality of tooth portions 330, three periodic waveforms with phase differences can be output within one revolution of the magnetic levitation rotor 300, thereby realizing the function of detecting the rotational speed of the magnetic levitation rotor 300.

[0232] Please refer to Figure 28 、 Figure 29 、 Figure 30 、 Figure 31 and Figure 32 , Figure 28 which is a schematic structural diagram of the magnetic levitation rotor 300 provided by an embodiment of the present application, Figure 29 which is a schematic structural diagram of the magnetic levitation device 10 provided by an embodiment of the present application, Figure 30 which is a schematic structural diagram of the radial magnetic bearing 241 provided by an embodiment of the present application, Figure 31 which is a schematic structural diagram of the axial magnetic bearing 242 provided by an embodiment of the present application, Figure 32 which is a schematic structural diagram of the magnetic levitation device 10 provided by an embodiment of the present application. In one embodiment, the magnetic levitation rotor 300 includes an annular yoke portion 310, a first circular ring convex portion 320, and a plurality of tooth portions 330. The cross-section of the magnetic levitation rotor 300 is C-shaped.

[0233] Please refer to Figure 28 . In one embodiment, each tooth portion 330 includes two end faces 331 and 332 that are opposite to each other along the radial direction R of the magnetic levitation device. The area of one end face 331 of each tooth portion 330 close to the rotating motor 230 is larger than the area of the other end face 332.

[0234] Exemplarily, each tooth portion 330 includes two end faces 331 and 332 that are opposite to each other along the radial direction R of the magnetic levitation device. One of the end faces 332 is fixed to the annular yoke portion 310 of the magnetic levitation rotor 300, and one end face 331 is arranged opposite to the rotary motor 230 along the radial direction R of the magnetic levitation device. Designing the area of the end face 331 of the tooth portion 330 close to the rotary motor 230 to be larger is beneficial to increasing the interaction area between the tooth portion 330 and the rotary motor 230, beneficial to increasing the detection working area of the tooth portion 330 by the rotary sensor 500c, and improving the working accuracy of the rotary sensor 500c. In addition, compared with the case where the areas of both end faces 331 and 332 of the tooth portion 330 are set to be larger, only setting the area of the end face 331 opposite to the rotary motor 230 to be larger is convenient for reducing the material usage of multiple tooth portions 330, reducing the weight of the magnetic levitation rotor 300, making it more convenient for the magnetic levitation rotor 300 to move up and down along the axial direction O of the magnetic levitation device or rotate along the circumferential direction C of the magnetic levitation device, and reducing the magnetic field force required for the magnetic levitation stator 200 to drive the magnetic levitation rotor 300 to move.

[0235] Please refer to Figure 28 , in an embodiment, the annular yoke portion 310 of the magnetic levitation rotor 300 has a uniform thickness along the radial direction R of the magnetic levitation device.

[0236] Exemplarily, the radial displacement sensor 500b is arranged outside the chamber 100 along the radial direction R of the magnetic levitation device, and the radial displacement sensor 500b does not move with the magnetic levitation rotor 300. The radial displacement sensor 500b detects and determines the radial displacement of the magnetic levitation rotor 300 by detecting the position of the annular yoke portion 310 of the magnetic levitation rotor 300. The annular yoke portion 310 has a uniform thickness along the radial direction R of the magnetic levitation device, which can ensure that the transmission distance of the signal emitted by the radial displacement sensor 500b to the magnetic levitation rotor 300 is consistent, and improve the detection accuracy of the radial displacement sensor 500b.

[0237] Exemplarily, the condition for setting the thickness of the annular yoke portion 310 along the radial direction R of the magnetic levitation device includes: ensuring that the detection signal of the radial displacement sensor 500b cannot penetrate the annular yoke portion 310, so that the signal of the radial displacement sensor 500b can feedback the detection signal when it reaches the surface of the annular yoke portion 310.

[0238] Please refer to Figure 29In one embodiment, the radial displacement sensor 500b is fixed to the stator housing 210, and the radial displacement sensor 500b and the plurality of teeth 330 are arranged in the same layer along the axial direction O of the magnetic suspension device. In the embodiment of the present application, when the magnetic suspension rotor 300 is lifted or lowered along the axial direction O of the magnetic suspension device, the radial displacement sensor 500b moves simultaneously with the stator housing 210 along the axial direction O of the magnetic suspension device, so that the radial displacement sensor 500b and the teeth 330 of the magnetic suspension rotor 300 always maintain a relative state, which is conducive to the consistency of the position signal of the magnetic suspension rotor 300 fed back by the radial displacement sensor 500b, thereby improving the detection accuracy.

[0239] See also Figure 30 , Figure 31 and Figure 33 , Figure 33 FIG. 1 is a schematic diagram of the structure of a magnetic suspension device 10 provided in an embodiment of the present application. In one embodiment, the plurality of magnetic bearings 240 include a plurality of radial magnetic bearings 241 and a plurality of axial magnetic bearings 242 (eg, Figure 33 As shown), a plurality of radial magnetic bearings 241 and a plurality of axial magnetic bearings 242 are alternately arranged in sequence along the circumferential direction C of the magnetic suspension device, a portion of each radial magnetic bearing 241 is aligned with the first annular protrusion 320 along the radial direction R of the magnetic suspension device, and a portion of each axial magnetic bearing 242 is staggered with the first annular protrusion 320 along the radial direction R of the magnetic suspension device.

[0240] In an embodiment of the present application, the multiple magnetic bearings 240 include multiple radial magnetic bearings 241 and multiple axial magnetic bearings 242. The multiple radial magnetic bearings 241 are used to drive the magnetic levitation rotor 300 to move along the radial direction R of the magnetic levitation device, and the multiple axial magnetic bearings 242 are used to drive the magnetic levitation rotor 300 to move along the axial direction O of the magnetic levitation device. The combined action of the multiple radial magnetic bearings 241 and the multiple axial magnetic bearings 242 can realize the suspension and lifting of the magnetic levitation rotor 300, which is conducive to the rapid movement of the substrate 600 between the cold source and the heat source, and can also maintain the stable suspension of the substrate 600.

[0241] Exemplarily, multiple radial magnetic bearings 241 and multiple axial magnetic bearings 242 are alternately arranged in sequence along the circumferential direction C of the magnetic suspension device, and the arrangement is regular, which is conducive to the multiple radial magnetic bearings 241 and multiple axial magnetic bearings 242 respectively driving the magnetic suspension rotor 300 to move in the radial direction R of the magnetic suspension device and to lift and lower the magnetic suspension device in the axial direction O along the circumferential direction C of the magnetic suspension device more stably and accurately. Exemplarily, the spacing distance between each adjacent radial magnetic bearing 241 and an axial magnetic bearing 242 along the circumferential direction C of the magnetic suspension device is the same, so that the arrangement is more regular.

[0242] For example, Figure 30As shown, a part of each radial magnetic bearing 241 is aligned with the first circular ring convex part 320 along the radial direction R of the magnetic levitation device, such that a plurality of radial magnetic bearings 241 apply a magnetic force along the radial direction R of the magnetic levitation device to the first circular ring convex part 320, driving the magnetic levitation rotor 300 to move along the radial direction R of the magnetic levitation device. As Figure 31 shown, a part of each axial magnetic bearing 242 is offset from the first circular ring convex part 320 along the radial direction R of the magnetic levitation device, such that a plurality of axial magnetic bearings 242 apply a magnetic force along the axial direction O of the magnetic levitation device to the first circular ring convex part 320, driving the magnetic levitation rotor 300 to move along the axial direction O of the magnetic levitation device.

[0243] It should be noted that a part of each radial magnetic bearing 241 being aligned with the first circular ring convex part 320 along the radial direction R of the magnetic levitation device means that a part of the radial magnetic bearing 241 and the first circular ring convex part 320 are collinear at the midpoint in the axial direction O of the magnetic levitation device. A part of each axial magnetic bearing 242 being offset from the first circular ring convex part 320 along the radial direction R of the magnetic levitation device means that a part of the axial magnetic bearing 242 and the first circular ring convex part 320 are not collinear at the midpoint in the axial direction O of the magnetic levitation device. Along the axial direction O of the magnetic levitation device, a part of the axial magnetic bearing 242 is higher than the first circular ring convex part 320 at the midpoint in the axial direction O of the magnetic levitation device.

[0244] In Figure 30 , a part of each radial magnetic bearing 241 may be Figure 30 the part shown as 245 of the radial magnetic bearing 241 in Figure 31 . In Figure 31 , a part of each axial magnetic bearing 242 may be

[0245] the part shown as 245 of the axial magnetic bearing 242 in Figure 33 . Please refer to

[0246] In one embodiment, the magnetic levitation stator 200 of the magnetic levitation device 10 includes six magnetic bearings 240. The magnetic bearings 240 include a C-shaped structure made of a magnetic conductive material, with a coil 246 wound in the middle of the C-shaped structure. The C-shaped structure can be embedded with an auxiliary permanent magnet to enhance the magnetism. The six magnetic bearings 240 are symmetrically distributed around the magnetic levitation rotor 300 along the circumferential direction C of the magnetic levitation device. The six magnetic bearings 240 are relatively independent of each other and can be individually controlled, improving the fault tolerance of the magnetic levitation device 10 for the magnetic bearings 240.

[0246] Please refer to Figure 32 . In one embodiment, a plurality of rotary motors 230 and a plurality of magnetic bearings 240 are distributed at intervals along the circumferential direction C of the magnetic levitation device.

[0247] Exemplarily, a plurality of rotary motors 230 and a plurality of magnetic bearings 240 are directly fixed to the stator housing 210. Along the circumferential direction C of the magnetic levitation device, the plurality of rotary motors 230 and the plurality of magnetic bearings 240 are arranged at intervals in sequence. A plurality of tooth portions 330 of the magnetic levitation rotor 300 are arranged opposite to the rotary motors 230 and the plurality of magnetic bearings 240 along the radial direction R of the magnetic levitation device. The plurality of tooth portions 330 can drive the rotation of the magnetic levitation rotor 300 along the circumferential direction C of the magnetic levitation device, and can also drive the movement of the magnetic levitation rotor 300 along the axial direction O and the radial direction R of the magnetic levitation device.

[0248] Please refer to Figure 30 , in one embodiment, each magnetic bearing 240 includes an axial portion 243 and two radial portions 244, 245. The two radial portions 244, 245 are fixed to both ends of the axial portion 243 along the axial direction O of the magnetic levitation device. Along the radial direction R of the magnetic levitation device, each of the radial portions 244, 245 protrudes from the axial portion 243 towards the magnetic levitation rotor 300, and the axial portion 243 is used for winding the coil 246.

[0249] Exemplarily, the axial portion 243 and the radial portions 244, 245 of the magnetic bearing 240 can be made of a magnetic conductive material. The two radial portions 244, 245 are used to be arranged opposite to the magnetic levitation rotor 300 to drive the magnetic levitation rotor 300 to move along the axial direction O and the radial direction R of the magnetic levitation device. The two radial portions 244, 245 are fixed to both ends of the axial portion 243 along the axial direction O of the magnetic levitation device, so that the magnetic bearing 240 has a C-shaped structure. The C-shaped structure of the magnetic bearing 240 and the magnetic levitation rotor 300 form a minimum magnetic field loop. Along the radial direction R of the magnetic levitation device, each of the radial portions 244, 245 protrudes from the axial portion 243 towards the magnetic levitation rotor 300, which is convenient for each of the radial portions 244, 245 to apply a magnetic field force to the magnetic levitation rotor 300 to drive the magnetic levitation rotor 300 to move along the axial direction O and the radial direction R of the magnetic levitation device, so that the substrate 600 can be stably levitated and lifted in the magnetic levitation device 10, improving the flexibility and controllability of the magnetic levitation device 10.

[0250] Please refer to Figure 30 , in one embodiment, one radial portion 244 of at least one magnetic bearing 240 is aligned with at least one tooth portion 330 along the radial direction R of the magnetic levitation device. One radial portion 244 is used to interact with at least one tooth portion 330 to drive the magnetic levitation rotor 300 to displace along the radial direction R, the axial direction O of the magnetic levitation device or rotate along the circumferential direction C of the magnetic levitation device. The other radial portion 245 of at least one magnetic bearing 240 is aligned with the first annular convex portion 320 along the radial direction R of the magnetic levitation device.

[0251] Exemplarily, one radial portion 244 of at least one magnetic bearing 240 is aligned with at least one tooth portion 330 along the radial direction R of the magnetic levitation device. The cross-section of the magnetic levitation rotor 300 is a C-shaped structure, and the cross-section of the structure formed by the annular yoke portion 310, the first circular ring convex portion 320, and the plurality of tooth portions 330 is also a C-shaped structure. One radial portion 244 of the magnetic bearing 240 can drive at least one tooth portion 330 to move along the radial direction R or the axial direction O of the magnetic levitation device, so as to realize the lifting of the magnetic levitation rotor 300 along the axial direction O of the magnetic levitation device and the movement along the radial direction R of the magnetic levitation device. One radial portion 244 of the magnetic bearing 240 can also drive at least one tooth portion 330 to rotate along the circumferential direction C of the magnetic levitation device, so as to realize the rotation of the magnetic levitation rotor 300 along the circumferential direction C of the magnetic levitation device.

[0252] Exemplarily, another radial portion 245 of at least one magnetic bearing 240 is aligned with the first circular ring convex portion 320 along the radial direction R of the magnetic levitation device, so that the two radial portions 244 and 245 of the magnetic bearing 240 can simultaneously generate a force for the magnetic levitation rotor 300 to move along the radial direction R of the magnetic levitation device, making the movement process of the magnetic levitation rotor 300 smoother. At the same time, the current flowing through the coil 246 wound around the axial portion 243 can also be reduced, and a smaller current can realize the movement of the magnetic levitation rotor 300.

[0253] It should be noted that one radial portion 244 of at least one magnetic bearing 240 being aligned with at least one tooth portion 330 along the radial direction R of the magnetic levitation device means that the midpoint of one radial portion 244 of at least one magnetic bearing 240 in the axial direction O of the magnetic levitation device is collinear with the midpoint of at least one tooth portion 330 in the axial direction O of the magnetic levitation device. Another radial portion 245 of at least one magnetic bearing 240 being aligned with the first circular ring convex portion 320 along the radial direction R of the magnetic levitation device means that the midpoint of another radial portion 245 of at least one magnetic bearing 240 in the axial direction O of the magnetic levitation device is collinear with the midpoint of the first circular ring convex portion 320 in the axial direction O of the magnetic levitation device.

[0254] Please refer to Figure 30 、 Figure 31 and Figure 32 , in an embodiment, the plurality of magnetic bearings 240 includes at least three radial magnetic bearings 241 and at least three axial magnetic bearings 242. The C-shaped structures of the at least three radial magnetic bearings 241 are aligned with the plurality of tooth portions 330 and the first circular ring convex portion 320 of the magnetic levitation rotor 300 along the radial direction R of the magnetic levitation device, and the C-shaped structures of the at least three axial magnetic bearings 242 are offset from the plurality of tooth portions 330 and the first circular ring convex portion 320 of the magnetic levitation rotor 300 along the radial direction R of the magnetic levitation device.

[0255] Exemplarily, such as Figure 30As shown, one radial part 244 of at least three radial magnetic bearings 241 is aligned with at least one tooth part 330 along the radial direction R of the magnetic levitation device, and another radial part 245 of at least three radial magnetic bearings 241 is aligned with the first circular ring convex part 320 along the radial direction R of the magnetic levitation device, which is beneficial for one radial part 244 and another radial part 245 to drive at least one tooth part 330 and the first circular ring convex part 320 of the magnetic levitation rotor 300 to move along the radial direction R of the magnetic levitation device respectively. By passing a small current through the coil 246, the magnetic levitation rotor 300 can be driven to move along the radial direction R of the magnetic levitation device.

[0256] Exemplarily, as Figure 31 As shown, one radial part 244 of at least three axial magnetic bearings 242 is offset from at least one tooth part 330 along the radial direction R of the magnetic levitation device, and another radial part 245 of at least three axial magnetic bearings 242 is offset from the first circular ring convex part 320 along the radial direction R of the magnetic levitation device, which is beneficial for one radial part 244 and another radial part 245 to drive at least one tooth part 330 and the first circular ring convex part 320 of the magnetic levitation rotor 300 to move along the axial direction O of the magnetic levitation device respectively. By passing a small current through the coil 246, the magnetic levitation rotor 300 can be driven to move along the axial direction O of the magnetic levitation device.

[0257] It should be noted that the C-shaped structure of at least three radial magnetic bearings 241 being aligned with multiple tooth parts 330 and the first circular ring convex part 320 of the magnetic levitation rotor 300 along the radial direction R of the magnetic levitation device means that the midpoint of one radial part 244 of at least three radial magnetic bearings 241 in the axial direction O of the magnetic levitation device is collinear with the midpoint of at least one tooth part 330 in the axial direction O of the magnetic levitation device, and the midpoint of another radial part 245 of at least three radial magnetic bearings 241 in the axial direction O of the magnetic levitation device is collinear with the midpoint of the first circular ring convex part 320 in the axial direction O of the magnetic levitation device. The C-shaped structure of at least three axial magnetic bearings 242 being offset from multiple tooth parts 330 and the first circular ring convex part 320 of the magnetic levitation rotor 300 along the radial direction R of the magnetic levitation device means that the midpoint of one radial part 244 of at least three axial magnetic bearings 242 in the axial direction O of the magnetic levitation device is not collinear with the midpoint of multiple tooth parts 330 of the magnetic levitation rotor 300 in the axial direction O of the magnetic levitation device, and the midpoint of another radial part 245 of at least three axial magnetic bearings 242 in the axial direction O of the magnetic levitation device is not collinear with the midpoint of the first circular ring convex part 320 in the axial direction O of the magnetic levitation device. Along the axial direction O of the magnetic levitation device, the midpoint of one radial part 244 of at least three axial magnetic bearings 242 in the axial direction O of the magnetic levitation device is higher than the midpoint of multiple tooth parts 330 of the magnetic levitation rotor 300 in the axial direction O of the magnetic levitation device, and the midpoint of another radial part 245 of at least three axial magnetic bearings 242 in the axial direction O of the magnetic levitation device is higher than the midpoint of the first circular ring convex part 320 in the axial direction O of the magnetic levitation device.

[0258] Please refer to Figure 34, Figure 34 The structural schematic diagram of the magnetic levitation rotor 300 provided by an embodiment of the present application. In one embodiment, the magnetic levitation rotor 300 further includes a second annular convex portion 340, which is fixed on the outer peripheral side of the annular yoke portion 310. Along the radial direction R of the magnetic levitation device, the second annular convex portion 340 protrudes from the outer peripheral surface of the annular yoke portion 310. Along the axial direction O of the magnetic levitation device, the second annular convex portion 340, the first annular convex portion 320, and a plurality of tooth portions 330 are arranged at intervals in sequence. A plurality of magnetic bearings 240 are used to interact with the second annular convex portion 340 to drive the magnetic levitation rotor 300 to displace along the radial direction R or the axial direction O of the magnetic levitation device.

[0259] The annular yoke portion 310 is used to fix the second annular convex portion 340, the first annular convex portion 320, and a plurality of tooth portions 330. The second annular convex portion 340 is fixed on the outer peripheral side of the annular yoke portion 310. Along the radial direction R of the magnetic levitation device, the second annular convex portion 340 protrudes from the outer peripheral surface of the annular yoke portion 310, which is convenient for a plurality of magnetic bearings 240 to apply a magnetic field force to the second annular convex portion 340, and is beneficial for a plurality of magnetic bearings 240 to drive the magnetic levitation rotor 300 to lift along the axial direction O of the magnetic levitation device.

[0260] Exemplarily, along the axial direction O of the magnetic levitation device, the second annular convex portion 340, the first annular convex portion 320, and a plurality of tooth portions 330 are arranged at intervals in sequence. When the rotary motor 230 applies a force to drive the magnetic levitation rotor 300 to rotate along the circumferential direction C of the magnetic levitation device to the plurality of tooth portions 330, the magnetic bearings 240 can also apply forces to the first annular convex portion 320 and the second annular convex portion 340 without interference to drive the magnetic levitation rotor 300 to lift along the axial direction O of the magnetic levitation device.

[0261] In the embodiment of the present application, a plurality of magnetic bearings 240 are used to interact with the second annular convex portion 340 to drive the magnetic levitation rotor 300 to displace along the radial direction R or the axial direction O of the magnetic levitation device, which is convenient for realizing the lifting of the magnetic levitation rotor 300, driving the substrate 600 to move along the axial direction O of the magnetic levitation device, facilitating the realization of the rapid movement of the magnetic levitation rotor 300 driving the substrate 600 between the cold source and the heat source outside the chamber 100, and being beneficial for reducing the thermal budget.

[0262] Please refer to Figure 34 , Figure 35 , Figure 36 and Figure 37 , Figure 35 The structural schematic diagram of the magnetic levitation rotor 300 provided by an embodiment of the present application, Figure 36 The structural schematic diagram of the magnetic levitation rotor 300 provided by an embodiment of the present application, Figure 37Schematic diagram of the structure of the magnetic levitation rotor 300 provided by an embodiment of the present application. In one embodiment, the magnetic levitation rotor 300 includes an annular yoke portion 310, a first circular ring convex portion 320, a plurality of tooth portions 330, and a second circular ring convex portion 340. The cross-section of the magnetic levitation rotor 300 has an E-shaped structure. The first circular ring convex portion 320 and the second circular ring convex portion 340 can both receive the magnetic field force of the magnetic bearing 240, facilitating the movement of the magnetic levitation rotor 300.

[0263] Please refer to Figure 22 and Figure 34 , in one embodiment, the axial displacement sensors 500a are arranged radially along the R direction of the magnetic levitation device on the outer side of the chamber 100, and the axial displacement sensors 500a and the magnetic levitation rotor 300 are arranged at intervals along the R direction of the magnetic levitation device.

[0264] In the embodiment of the present application, two axial displacement sensors 500a are arranged at intervals along the O direction of the magnetic levitation device. As Figure 22 shown, in one embodiment, the two axial displacement sensors 500a and the first circular ring convex portion 320 are stacked along the R direction of the magnetic levitation device, so that the two axial displacement sensors 500a and the first circular ring convex portion 320 have an overlapping portion along the R direction of the magnetic levitation device. By detecting the signal difference of the overlapping area between the two axial displacement sensors 500a and the first circular ring convex portion 320 along the R direction of the magnetic levitation device, the distance of the magnetic levitation rotor 300 moving along the O direction of the magnetic levitation device is calculated to determine the position of the magnetic levitation rotor 300.

[0265] Please refer to Figure 35 and Figure 36 , as Figure 35 shown, in another embodiment, the two axial displacement sensors 500a are distributed opposite to the annular yoke portion 310 between the plurality of tooth portions 330 and the first circular ring convex portion 320. The two axial displacement sensors 500a determine the axial displacement of the magnetic levitation rotor 300 by detecting the axial displacement of the annular yoke portion 310 between the tooth portions 330 and the first circular ring convex portion 320. As Figure 36 shown, in another embodiment, the two axial displacement sensors 500a are distributed opposite to the annular yoke portion 310 between the first circular ring convex portion 320 and the second circular ring convex portion 340. The two axial displacement sensors 500a determine the axial displacement of the magnetic levitation rotor 300 by detecting the axial displacement of the annular yoke portion 310 between the first circular ring convex portion 320 and the second circular ring convex portion 340.

[0266] Please refer to Figure 1 and Figure 2 , in one embodiment, a plurality of rotary motors 230 and a plurality of magnetic bearings 240 are respectively arranged at intervals along the circumferential direction C of the magnetic levitation device.

[0267] Exemplarily, asFigure 2 As shown, the rotary electric machine 230 is fixed to the stator housing 210 through the rotary electric machine support member 250. A plurality of magnetic bearings 240 are directly fixed to the stator housing 210. The plurality of magnetic bearings 240 and the plurality of rotary electric machines 230 are arranged along the axial direction O of the magnetic levitation device. The rotary electric machine 230 and the plurality of tooth portions 330 are arranged opposite to each other along the radial direction R of the magnetic levitation device. The plurality of magnetic bearings 240 and the first annular convex portion 320 and the second annular convex portion 340 are arranged opposite to each other along the radial direction R of the magnetic levitation device. The plurality of magnetic bearings 240 drive the magnetic levitation rotor 300 to displace along the axial direction O and the radial direction R of the magnetic levitation device by applying a magnetic field force to the first annular convex portion 320 and the second annular convex portion 340.

[0268] Please refer to Figure 36 and Figure 37 , in one embodiment, a radial portion 244 of at least one magnetic bearing 240 is aligned with the first annular convex portion 320 along the radial direction R of the magnetic levitation device. The radial portion 244 is used to interact with the first annular convex portion 320 to drive the magnetic levitation rotor 300 to displace along the radial direction R and the axial direction O of the magnetic levitation device. The radial portion 244 is higher than another radial portion 245.

[0269] In the embodiment of the present application, the magnetic levitation rotor 300 includes an annular yoke portion 310, a first annular convex portion 320, a plurality of tooth portions 330, and a second annular convex portion 340. The cross-section of the magnetic levitation rotor 300 has an E-shaped structure. The magnetic bearings 240 and the rotary electric machines 230 are arranged along the axial direction O of the magnetic levitation device. The two radial portions 244 and 245 of the magnetic bearing 240 are respectively arranged opposite to the first annular convex portion 320 and the second annular convex portion 340.

[0270] Exemplarily, a radial portion 244 of at least one magnetic bearing 240 is aligned with the first annular convex portion 320 along the radial direction R of the magnetic levitation device, that is, a radial portion 244 of the radial magnetic bearing 241 is aligned with the first annular convex portion 320 along the radial direction R of the magnetic levitation device, which is convenient for driving the first annular convex portion 320 of the magnetic levitation rotor 300 to move along the radial direction R and the axial direction O of the magnetic levitation device. The radial portion 244 is higher than another radial portion 245. The other radial portion 245 is used to be arranged opposite to the second circular convex portion, which is convenient for driving the second annular convex portion 340 of the magnetic levitation rotor 300 to move along the radial direction R and the axial direction O of the magnetic levitation device. The radial portion 244 interacts with the first annular convex portion 320, and at the same time the other radial portion 245 interacts with the second annular convex portion 340, so that when the magnetic bearing 240 drives the magnetic levitation rotor 300 to move along the axial direction O and the radial direction R of the magnetic levitation device, it is more stable, which is beneficial to the processing of the substrate 600 by the magnetic levitation device 10.

[0271] One radial part 244 and another radial part 245 of the magnetic bearing 240 respectively form a minimum magnetic field loop with the first ring convex part 320 and the second ring convex part 340 of the magnetically levitated rotor 300. The two magnetic field loops can simultaneously generate an electromagnetic force on the magnetically levitated rotor 300 to drive the magnetically levitated rotor 300 to lift and lower along the axis O of the magnetic levitation device, making the lifting and lowering of the magnetically levitated rotor 300 along the axis O of the magnetic levitation device more stable, and the current required to be passed through the coil 246 wound around the axial part 243 can be smaller.

[0272] It should be noted that one radial part 244 of at least one magnetic bearing 240 being aligned with the first ring convex part 320 along the radial direction R of the magnetic levitation device means that the midpoint of one radial part 244 of at least one magnetic bearing 240 on the axis O of the magnetic levitation device is collinear with the midpoint of the first ring convex part 320 on the axis O of the magnetic levitation device.

[0273] Please refer to Figure 36 and Figure 37 In one embodiment, a plurality of magnetic bearings 240 include at least three radial magnetic bearings 241 and at least three axial magnetic bearings 242. The C-shaped structures of the at least three radial magnetic bearings 241 are aligned with the first ring convex part 320 and the second ring convex part 340 of the magnetically levitated rotor 300 along the radial direction R of the magnetic levitation device, and the C-shaped structures of the at least three axial magnetic bearings 242 are offset from the first ring convex part 320 and the second ring convex part 340 of the magnetically levitated rotor 300 along the radial direction R of the magnetic levitation device.

[0274] Exemplarily, one radial part 244 of the at least three radial magnetic bearings 241 is aligned with the first ring convex part 320 along the radial direction R of the magnetic levitation device, and another radial part 245 of the at least three radial magnetic bearings 241 is aligned with the second ring convex part 340 along the radial direction R of the magnetic levitation device. One radial part 244 of the at least three axial magnetic bearings 242 is offset from the first ring convex part 320 along the radial direction R of the magnetic levitation device, and another radial part 245 of the at least three axial magnetic bearings 242 is offset from the second ring convex part 340 along the radial direction R of the magnetic levitation device.

[0275] One radial part 244 and another radial part 245 of the three radial magnetic bearings 241 respectively drive the first ring convex part 320 and the second ring convex part 340 of the magnetically levitated rotor 300 to move along the radial direction R of the magnetic levitation device simultaneously. One radial part 244 and another radial part 245 of the three axial magnetic bearings 242 respectively drive the first ring convex part 320 and the second ring convex part 340 of the magnetically levitated rotor 300 to move along the axis O of the magnetic levitation device simultaneously. One radial part 244 and another radial part 245 simultaneously act on the magnetically levitated rotor 300 with magnetic field forces, which is beneficial to reducing the current passed through the coil 246.

[0276] It should be noted that the C-shaped structures of at least three radial magnetic bearings 241 are aligned with the first annular convex portion 320 and the second annular convex portion 340 of the magnetic levitation rotor 300 along the radial direction R of the magnetic levitation device, which means that a radial portion 244 of at least three radial magnetic bearings 241 is collinear with the midpoint of the first annular convex portion 320 in the axial direction O of the magnetic levitation device at the midpoint in the axial direction O of the magnetic levitation device, and another radial portion 245 of at least three radial magnetic bearings 241 is collinear with the midpoint of the second annular convex portion 340 in the axial direction O of the magnetic levitation device at the midpoint in the axial direction O of the magnetic levitation device. The C-shaped structures of at least three axial magnetic bearings 242 are offset from the first annular convex portion 320 and the second annular convex portion 340 of the magnetic levitation rotor 300 along the radial direction R of the magnetic levitation device, which means that a radial portion 244 of at least three axial magnetic bearings 242 is not collinear with the midpoint of the first annular convex portion 320 in the axial direction O of the magnetic levitation device at the midpoint in the axial direction O of the magnetic levitation device, and another radial portion 245 of at least three axial magnetic bearings 242 is not collinear with the midpoint of the second annular convex portion 340 in the axial direction O of the magnetic levitation device at the midpoint in the axial direction O of the magnetic levitation device. Along the axial direction O of the magnetic levitation device, a radial portion 244 of at least three axial magnetic bearings 242 is higher than the midpoint of the first annular convex portion 320 in the axial direction O of the magnetic levitation device at the midpoint in the axial direction O of the magnetic levitation device, and another radial portion 245 of at least three axial magnetic bearings 242 is higher than the midpoint of the second annular convex portion 340 in the axial direction O of the magnetic levitation device at the midpoint in the axial direction O of the magnetic levitation device.

[0277] In one embodiment, the outer side wall 140 of the chamber 100 of the magnetic levitation device 10 is fixedly connected to the lifting device 400, and the outer side wall 140 of the chamber 100 is movably connected to the top wall 150 of the chamber 100, so as to realize the synchronous large-stroke movement of the outer side wall 140 of the chamber 100 and the magnetic levitation stator 200 along the axial direction O of the magnetic levitation device with the lifting device 400, so that the magnetic levitation rotor 300 in the chamber 100 can move along the axial direction O of the magnetic levitation device with the lifting device 400, reduce the axial O displacement difference between the magnetic levitation rotor 300 and the magnetic levitation stator 200, and further make the suspension rotation of the substrate 600 in the chamber 100 stable, reduce the risk of warping or lattice defects during the processing of the substrate 600, and improve the product quality.

[0278] Exemplarily, the way that the outer wall portion of the chamber 100 is movably connected to the top of the chamber 100 includes adopting a telescopic structure similar to the elastic sealing tube 800 or adopting a rigid structure capable of realizing dynamic sealing.

[0279] In one embodiment, the present application further provides a heat treatment device, which includes a heating source and the magnetic levitation device 10 in any of the above embodiments. The heating source is used to heat the pre-treated product carried by the magnetic levitation rotor 300 in the magnetic levitation device 10. The pre-treated product includes a wafer, a substrate, or a semi-finished or finished electronic device. In one embodiment, the heat treatment device further includes a cooling source, which is used to cool the pre-treated product. In one embodiment, the heating source and the cooling source are distributed at the top, bottom, or outer periphery outside the magnetic levitation device 10.

[0280] In the embodiment of the present application, the magnetic levitation device 10 in the heat treatment device drives the magnetic levitation stator 200 to move through the lifting device 400, so that the stroke range of the magnetic levitation rotor 300 is larger, and further, the distance between the heating source or the cooling source and the pre-treated product carried by the magnetic levitation rotor 300 is closer or farther, which is beneficial to controlling the heating temperature of the pre-treated product in a larger range and improving the quality of the pre-treated product. When the pre-treated product is a substrate, the heat treatment device in the embodiment of the present application can reduce the risk of warping or lattice defects during the rapid thermal processing of the substrate.

[0281] In one example, the heat treatment device can be a rapid thermal processing device, which is applied to advanced integrated circuit manufacturing process fields such as rapid thermal annealing, rapid thermal oxidation, rapid thermal nitridation, rapid thermal diffusion, and rapid chemical vapor deposition, and is used to change electrical or physical properties such as the dielectric constant, conductivity, and densification of materials.

[0282] The liftable magnetic levitation device and the heat treatment device provided in the embodiments of the present application have been introduced in detail above. Specific examples are used in this article to elaborate on the principle and embodiments of the present application. The description of the above embodiments is only used to help understand the method and its core idea of the present application; at the same time, for those of ordinary skill in the art, according to the idea of the present application, there will be changes in the specific embodiments and application scopes. In summary, the content of this specification should not be construed as a limitation to the present application.

Claims

1. A liftable magnetic levitation device, characterized in that, The magnetic levitation device includes a chamber, a magnetic levitation stator, a magnetic levitation rotor, a lifting device, and a plurality of sensors. The chamber is used to accommodate the magnetic levitation rotor, and the magnetic levitation stator surrounds the outer periphery of the chamber, wherein; At least one of the sensors is fixedly relative to the magnetic levitation stator. The at least one sensor is used to detect the displacement of the magnetic levitation rotor. The magnetic levitation stator is connected to the lifting device, and the lifting device is used to drive the magnetic levitation stator and the at least one sensor to move along the axial direction of the magnetic levitation device.

2. The magnetic levitation device according to claim 1, characterized in that, The at least one sensor includes an axial displacement sensor. The axial displacement sensor is used to detect the axial displacement of the magnetic levitation rotor, and the axial displacement sensor is fixedly relative to the magnetic levitation stator.

3. The magnetic levitation device according to claim 2, characterized in that, The chamber includes a top wall and a bottom wall oppositely arranged along the axial direction of the magnetic levitation device. The top wall includes an opening that penetrates the top wall along the axial direction of the magnetic levitation device, and / or the bottom wall includes an opening that penetrates the bottom wall along the axial direction of the magnetic levitation device. The axial displacement sensor passes through the opening and moves relative to the chamber along the axial direction of the magnetic levitation device.

4. The magnetic levitation device according to claim 3, wherein The chamber includes a bottom wall. The bottom wall includes an opening that penetrates the bottom wall along the axial direction of the magnetic levitation device. The axial displacement sensor is disposed in the opening, and the detection end of the axial displacement sensor is located inside the chamber. The detection end of the axial displacement sensor and the magnetic levitation rotor are arranged at intervals along the axial direction of the magnetic levitation device.

5. The magnetic levitation device according to any one of claims 2-4, characterized in that, The axial displacement sensor includes a probe, a housing, and a connecting wire. The inner wall of the housing encloses to form a receiving cavity. The receiving cavity and the chamber are isolated by the housing. The air pressure in the receiving cavity is greater than the air pressure in the chamber. The probe and the connecting wire are located in the receiving cavity. The probe is used to detect the relative position of the magnetic levitation rotor along the axial direction of the magnetic levitation device relative to the magnetic levitation stator, and the connecting wire is electrically connected to the probe.

6. The magnetic levitation device according to claim 5, wherein The material of the housing includes a vacuum sealing material, and the outgassing rate of the vacuum sealing material is less than 1.0 Pa·L / s / m 2 .

7. The magnetic levitation device according to claim 5 or 6, characterized in that, The housing has an opening. The opening is located on the side of the housing away from the magnetic levitation rotor. The opening is communicated with the receiving cavity. The connecting wire is electrically connected to the probe and passes out of the receiving cavity through the opening.

8. The magnetic levitation device according to any one of claims 5-7, characterized in that, The air pressure in the chamber is in the range of 1 Pa to 100 Pa.

9. The magnetic levitation device according to any one of claims 5-8, characterized in that, The air pressure in the receiving cavity is in the range of 90 kPa to 110 kPa.

10. The magnetic levitation device according to any one of claims 5-9, characterized in that, The wall thickness of the housing is in the range of 0.2 mm to 1 mm.

11. The magnetic levitation device according to any one of claims 5-10, characterized in that, The number of the probes is at least two, and at least two of the probes are arranged along the axial direction of the magnetic levitation device.

12. The magnetic levitation device according to any one of claims 5-11, characterized in that, The number of the axial displacement sensors is at least three, and the vertical distances from the detection ends of the at least three axial displacement sensors to the magnetic levitation rotor are equal.

13. The magnetic levitation device according to any one of claims 5-12, characterized in that, The number of the axial displacement sensors is at least three, and the at least three axial displacement sensors are evenly distributed along the circumferential direction of the magnetic levitation device.

14. The magnetic levitation device according to any one of claims 5-13, characterized in that, The magnetic suspension device includes a sensor connecting mechanism and an elastic sealing tube. The sensor connecting mechanism is used to fixedly connect the magnetic suspension stator and the axial displacement sensor. The elastic sealing tube is sleeved on the outer circumference of the axial displacement sensor. The two ends of the elastic sealing tube are respectively fixedly connected to the bottom wall and the sensor connecting mechanism.

15. The magnetic levitation device according to claim 14, characterized in that, The sensor connecting mechanism includes a first connecting part and a second connecting part, the first connecting part is used to be relatively fixed to the magnetic suspension stator, the second connecting part is used to be connected to the shell, the first connecting part is connected to the second connecting part, the first connecting part extends in a direction toward the magnetic suspension stator, and the second connecting part extends from the connection with the first connecting part in a direction perpendicular to the axial direction of the magnetic suspension device.

16. The magnetic levitation device according to claim 15, wherein The first connection part is a cylindrical structure, and the first connection part is connected to the second connection part on the side facing away from the magnetic levitation stator. The second connection part extends from the connection with the first connection part along the radial direction of the first connection part toward the inside of the first connection part to form an annular structure, and the magnetic levitation rotor, the first connection part and the second connection part are coaxially arranged.

17. The magnetic levitation device according to claim 14, wherein The sensor connecting mechanism includes a first connecting part, a second connecting part and a third connecting part, the first connecting part is used to be fixed relative to the magnetic levitation stator, the second connecting part is used to connect the first connecting part and the third connecting part, the third connecting part is used to connect the shell, the first connecting part extends in a direction toward the magnetic levitation stator, the second connecting part extends from the connection with the first connecting part in a direction perpendicular to the axial direction of the magnetic levitation device, and the third connecting part extends in a direction toward the magnetic levitation rotor.

18. The magnetic levitation device according to any one of claims 14-17, characterized in that, The number of the sensor connection mechanisms is at least three, and the at least three sensor connection mechanisms are arranged at intervals along the circumferential direction of the magnetic suspension device.

19. The magnetic levitation device according to any one of claims 14-18, characterized in that, The side of the shell facing the sensor connecting mechanism is sealed and connected to the sensor connecting mechanism, and the shell and the sensor connecting mechanism are used to seal and isolate the accommodating cavity and the chamber.

20. The magnetic levitation device according to any one of claims 14-19, characterized in that, A channel is provided in the sensor connection mechanism, the channel is communicated with the accommodating cavity, and at least part of the connecting line is located in the channel.

21. The magnetic levitation device according to any one of claims 5-20, characterized in that, The chamber includes a top wall and a bottom wall that are arranged opposite to each other along the axial direction of the magnetic suspension device. The chamber also includes an outer wall that is arranged circumferentially along the magnetic suspension device. The magnetic suspension stator, the outer wall and the magnetic suspension rotor are arranged in sequence along the radial direction of the magnetic suspension device. The outer wall is located between the top wall and the bottom wall. The magnetic suspension device also includes an elastic seal that is connected to the top wall and / or the outer wall. The elastic seal expands and contracts along the axial direction of the magnetic suspension device, and the bottom wall moves axially along the magnetic suspension device relative to the top wall.

22. The magnetic levitation device according to claim 21, wherein At least a portion of the housing is located in the chamber, and the sensor connecting mechanism or the housing is sealingly connected to the elastic sealing member.

23. The magnetic levitation device according to claim 22, wherein The sensor connection mechanism or both sides of the housing along the axial direction of the magnetic levitation device are respectively and sealingly connected to the elastic seal and the outer side wall. The sensor connection mechanism, the elastic seal, the top wall, the outer side wall and the bottom wall enclose a sealed environment, or the housing, the elastic seal, the top wall, the outer side wall and the bottom wall enclose a sealed environment.

24. The magnetic levitation device according to claim 22, characterized in that, The number of the elastic seals is at least two. The at least two elastic seals are arranged along the axial direction of the magnetic levitation device. The sensor connection mechanism or the housing is located between the at least two elastic seals. Both sides of the sensor connection mechanism or the housing along the axial direction of the magnetic levitation device are respectively and sealingly connected to the at least two elastic seals. The sensor connection mechanism, the elastic seals, the top wall, the outer side wall and the bottom wall enclose a sealed environment, or the housing, the elastic seals, the top wall, the outer side wall and the bottom wall enclose a sealed environment.

25. The magnetic levitation device according to claim 2, characterized in that, The axial displacement sensors are arranged radially outside the chamber along the magnetic levitation device, and the axial displacement sensors and the magnetic levitation rotor are arranged at intervals radially along the magnetic levitation device.

26. The magnetic levitation device according to any one of claims 1-25, characterized in that, The at least one sensor includes a radial displacement sensor for detecting the radial displacement of the magnetic levitation rotor. The radial displacement sensor is arranged radially outside the chamber along the magnetic levitation device, and the radial displacement sensor and the magnetic levitation rotor are arranged at intervals radially along the magnetic levitation device.

27. The magnetic levitation device according to claim 26, wherein, The chamber includes an inner side wall arranged circumferentially along the magnetic levitation device. The magnetic levitation stator, the magnetic levitation rotor and the inner side wall are arranged at intervals in sequence radially along the magnetic levitation device. The inner side wall includes a through hole that penetrates the inner side wall radially along the magnetic levitation device. The detection end of the radial displacement sensor passes through the through hole and extends into the chamber. The main body of the radial displacement sensor is connected to the detection end of the radial displacement sensor and extends axially along the magnetic levitation device. The main body of the radial displacement sensor is sealingly connected to the side of the inner side wall facing away from the magnetic levitation rotor.

28. The magnetic levitation device according to any one of claims 1-27, characterized in that, The at least one sensor includes a rotation sensor for detecting the rotation angle of the magnetic levitation rotor. The rotation sensor is arranged radially outside the chamber along the magnetic levitation device, and the rotation sensor and the magnetic levitation rotor are arranged at intervals radially along the magnetic levitation device.

29. The magnetic levitation device according to any one of claims 1-27, characterized in that, The magnetic levitation stator includes a plurality of rotating motors and a plurality of magnetic bearings. The magnetic levitation rotor includes an annular yoke, a first circular ring convex portion, and a plurality of tooth portions. The first circular ring convex portion and the plurality of tooth portions are fixed on the outer peripheral side of the annular yoke and are spaced apart along the axial direction of the magnetic levitation device. Along the radial direction of the magnetic levitation device, the first circular ring convex portion and the plurality of tooth portions protrude from the outer peripheral surface of the annular yoke. The plurality of tooth portions are spaced apart along the circumferential direction of the magnetic levitation device. Each rotating motor is used to interact with at least one of the tooth portions to drive the magnetic levitation rotor to rotate. The plurality of magnetic bearings are used to interact with the first circular ring convex portion to drive the magnetic levitation rotor to displace along the radial direction or the axial direction of the magnetic levitation device.

30. The magnetic levitation device according to claim 29, characterized in that, Each tooth portion includes two end faces opposite to each other along the radial direction of the magnetic levitation device. The area of one end face of each tooth portion close to the rotating motor is larger than that of the other end face.

31. The magnetic levitation device according to claim 29, wherein, The magnetic levitation rotor further includes a second circular ring convex portion. The second circular ring convex portion is fixed on the outer peripheral side of the annular yoke. Along the radial direction of the magnetic levitation device, the second circular ring convex portion protrudes from the outer peripheral surface of the annular yoke. Along the axial direction of the magnetic levitation device, the second circular ring convex portion, the first circular ring convex portion, and the plurality of tooth portions are arranged at intervals in sequence. The plurality of magnetic bearings are further used to interact with the second circular ring convex portion to drive the magnetic levitation rotor to displace along the radial direction or the axial direction of the magnetic levitation device.

32. The magnetic levitation device according to claim 29, wherein, The plurality of magnetic bearings include a plurality of radial magnetic bearings and a plurality of axial magnetic bearings. The plurality of radial magnetic bearings and the plurality of axial magnetic bearings are alternately spaced apart in sequence along the circumferential direction of the magnetic levitation device. A part of each radial magnetic bearing is aligned with the first circular ring convex portion along the radial direction of the magnetic levitation device. A part of each axial magnetic bearing is offset from the first circular ring convex portion along the radial direction of the magnetic levitation device.

33. The magnetic levitation device according to claim 29, characterized in that, The plurality of rotating motors and the plurality of magnetic bearings are respectively spaced apart along the circumferential direction of the magnetic levitation device.

34. The magnetic levitation device according to claim 29, characterized in that, Each magnetic bearing includes an axial portion and two radial portions. The two radial portions are fixed at both ends of the axial portion along the axial direction of the magnetic levitation device. Along the radial direction of the magnetic levitation device, each radial portion protrudes from the axial portion towards the magnetic levitation rotor. The axial portion is used for winding coils.

35. The magnetic levitation device according to claim 34, wherein One radial portion of at least one magnetic bearing is aligned with at least one tooth portion along the radial direction of the magnetic levitation device. The one radial portion interacts with the at least one tooth portion to drive the magnetic levitation rotor to displace along the radial direction, or the axial direction, or rotate along the circumferential direction of the magnetic levitation device. The other radial portion of the at least one magnetic bearing is aligned with the first circular ring convex portion along the radial direction of the magnetic levitation device.

36. The magnetic levitation device according to claim 34, characterized in that, One radial portion of at least part of the magnetic bearings is aligned with the first circular ring convex portion along the radial direction of the magnetic levitation device. The one radial portion interacts with the first circular ring convex portion to drive the magnetic levitation rotor to displace along the radial direction and the axial direction of the magnetic levitation device. The one radial portion is higher than the other radial portion.

37. A heat treatment device, characterized in that, The heat treatment equipment includes a heating source and the magnetic levitation device according to any one of claims 1-36, and the heating source is used to heat the pre-treated product carried by the magnetic levitation rotor in the magnetic levitation device.

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