Vapor deposition device for preventing vibration

Abstract

The vapor deposition apparatus according to one aspect of the present invention comprises: a vapor deposition chamber providing a vapor deposition space; a first plate that can be separated from the upper side of the vapor deposition chamber; a second plate disposed on an upper side of the first plate; the six-degree-of-freedom platform is connected to the second plate, passes through the first plate and extends to the evaporation space; the electrostatic chuck is arranged on the lower side of the six-degree-of-freedom platform and used for fixing a substrate, and evaporation particles are evaporated on the substrate; a first support portion extending from the second plate to the vapor deposition space and supporting a mask facing the substrate; and a vibration prevention portion disposed between the first plate and the second plate and configured to prevent vibration of the first plate from being transmitted to the second plate.

Description

Technical Field

[0001] The present invention relates to an evaporation coating technology, and more particularly, to an evaporation coating apparatus that prevents vibration during the evaporation coating process to improve the evaporation coating quality. Background Art

[0002] In recent years, the demand for Organic Light Emitting Diodes (OLED) in the display market has increased significantly. In particular, in the display markets for televisions and smartphones, the demand for high-resolution and large-sized Organic Light Emitting Diode (OLED) displays is continuously growing.

[0003] In the manufacturing process of Organic Light Emitting Diodes (OLED) for achieving the high resolution of such displays, the core process is the evaporation coating process for manufacturing RGB pixels. The evaporation coating process refers to a process of heating an organic material by an evaporation source located at the lower end of a chamber to sublime the heated organic material. The sublimated organic material passes through a mask and is evaporated onto a substrate to form a Thin Film Transistor (TFT).

[0004] Moreover, for such a thin film transistor, in order to achieve a high-resolution display, it is necessary to form a smaller-sized thin film transistor through the evaporation coating process.

[0005] However, when there is a slight curvature in the substrate, there is a problem of a decrease in the evaporation coating quality during the evaporation coating process of reducing the size of the thin film transistor.

[0006] In addition, when vibrations generated by mechanical movements inside the chamber or vibrations generated outside the chamber are transmitted to the chamber, there is a problem of a decrease in the evaporation coating quality.

[0007] On the other hand, the evaporation source moves inside the chamber to uniformly eject the sublimated organic material onto the substrate or to an appropriate position on the substrate.

[0008] However, the movement of such an evaporation source transmits vibrations to the chamber, so there is a problem of reducing the evaporation coating uniformity of the substrate.

[0009] Moreover, the vibrations caused by the movement of the evaporation source affect various sensors provided inside the chamber, so there is a problem of difficulty in precisely controlling the evaporation coating process. Summary of the Invention

[0010] Problems to be Solved by the Invention

[0011] The present invention aims to solve the above problems, and the object of the present invention is to provide an evaporation coating apparatus that prevents a decrease in the evaporation coating quality due to vibration.

[0012] In addition, another object of the present invention is to provide an evaporation apparatus that precisely controls evaporation uniformity by minimizing the influence of vibrations caused by the movement of an evaporation source.

[0013] The problems of the present invention are not limited to the above problems, and those skilled in the art will clearly understand other unmentioned problems through the following description.

[0014] Means for Solving the Problems

[0015] According to one aspect of the present invention, there is provided an evaporation apparatus including: an evaporation chamber providing an evaporation space; a first plate separable from an upper side of the evaporation chamber; a second plate disposed on an upper side of the first plate; a six-degree-of-freedom platform connected to the second plate and extending through the first plate into the evaporation space; an electrostatic chuck disposed on a lower side of the six-degree-of-freedom platform and for fixing a substrate onto which evaporation particles are evaporated; a first support portion extending from the second plate into the evaporation space and for supporting a mask opposite to the substrate; and a vibration prevention portion disposed between the first plate and the second plate and for preventing vibration of the first plate from being transmitted to the second plate.

[0016] At this time, the vibration prevention portion may be provided in plurality, and the plurality of vibration prevention portions may be arranged at the same interval from each other.

[0017] At this time, the vibration prevention portion may include: a main body portion inflated by air flowing therein; a pump injecting air into the main body portion; and a control portion controlling the pump.

[0018] At this time, the vibration prevention portion may include: a main body portion disposed on an upper side of the first plate; a vibration sensor portion provided on the main body portion and for detecting vibration; a vibration cancellation portion generating an anti-phase frequency domain to cancel the vibration; and a control portion controlling the vibration cancellation portion based on an electrical signal received from the vibration sensor portion.

[0019] At this time, the vibration cancellation portion may include a linear motor for generating an anti-phase frequency domain.

[0020] At this time, the evaporation apparatus may include: a third plate disposed on an upper side of the second plate; a second support portion extending from either the second plate or the third plate into the evaporation space and moving in an up-and-down direction of the evaporation chamber; and a magnetic portion connected to the second support portion and disposed on an upper side of the electrostatic chuck.

[0021] At this time, the evaporation device may further include: a mask support portion, connected to the first support portion and configured to support the mask; the mask support portion is made of a metal material, and when the magnetic portion moves in a manner approaching the electrostatic chuck, the magnetic portion pulls the mask support portion.

[0022] At this time, the mask may be made of a metal material, and when the magnetic portion moves in a manner approaching the electrostatic chuck, the magnetic portion pulls the mask.

[0023] In addition, according to another aspect of the present invention, there is provided an evaporation device, including: an evaporation chamber, maintaining a vacuum state and configured to accommodate a substrate, evaporation particles being evaporated onto the substrate; an evaporation source, accommodated in the evaporation chamber and configured to eject the evaporation particles; a guide rail, guiding the movement of the evaporation source; a support portion, passing through a through hole formed in a lower side portion of the evaporation chamber and configured to support the guide rail; and an inflow prevention portion, preventing external air of the evaporation chamber from flowing in through the through hole.

[0024] At this time, the inflow prevention portion may be in a corrugated shape.

[0025] At this time, the inflow prevention portion may be formed to wrap a part of the support portion disposed outside the evaporation chamber.

[0026] At this time, the evaporation chamber may include: an upper side portion, disposed above the lower side portion; and a plurality of side face portions, disposed between the lower side portion and the upper side portion, the guide rail and the plurality of side face portions being spaced apart by a predetermined distance.

[0027] At this time, the guide rail and the support portion may not be in contact with the evaporation chamber.

[0028] Advantages of the Invention

[0029] According to the above configuration, the evaporation device according to an embodiment of the present invention prevents vibration from being transmitted to the hexapod, thereby preventing a decrease in evaporation quality due to vibration.

[0030] In addition, by preventing the substrate from bending to improve the flatness of the substrate, a high-resolution display can be realized.

[0031] In the evaporation device according to an embodiment of the present invention, since the support portion supporting the evaporation source passes through the lower side portion of the evaporation chamber and is not in contact with the evaporation chamber, vibration of the evaporation source can be prevented from being transmitted to the evaporation chamber, thereby enabling precise control of evaporation uniformity.

[0032] In addition, even if a part of the support portion is disposed outside the evaporation chamber, the inflow prevention portion can stably maintain the vacuum state of the evaporation chamber. Brief Description of the Drawings

[0033] Figure 1 is a diagram schematically showing an evaporation apparatus according to an embodiment of the present invention.

[0034] Figure 2 is a diagram highlighting the interior of an evaporation apparatus according to an embodiment of the present invention.

[0035] Figure 3 is a perspective view showing a state in which a vibration prevention unit of an evaporation apparatus according to an embodiment of the present invention is arranged on a first plate.

[0036] Figure 4 is a block diagram showing a vibration prevention unit of an evaporation apparatus according to an embodiment of the present invention.

[0037] Figure 5 is a block diagram showing a vibration prevention unit of an evaporation apparatus according to another embodiment of the present invention.

[0038] Figure 6 is a diagram schematically showing an evaporation apparatus according to still another embodiment of the present invention.

[0039] Figure 7 is a perspective view schematically showing the interior of an evaporation apparatus according to still another embodiment of the present invention.

[0040] Figure 8 is a diagram showing a state in which a guide rail of an evaporation apparatus according to still another embodiment of the present invention is separated from an evaporation chamber.

[0041] Description of Reference Numerals

[0042] 100: Evaporation apparatus

[0043] 110: Evaporation chamber

[0044] 210: First plate

[0045] 220: Second plate

[0046] 221: First support portion

[0047] 240: Six-degree-of-freedom platform

[0048] 250: Electrostatic chuck

[0049] 280: Vibration prevention unit Detailed Description

[0050] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those of ordinary skill in the art can easily implement the present invention. The present invention can be implemented in various different forms and is not limited to the embodiments described herein. To clearly explain the present invention, parts irrelevant to the description are omitted in the drawings, and the same or similar parts are given the same reference numerals throughout the specification.

[0051] The words and terms used in this specification and the claims should not be construed as limited to their ordinary meanings or dictionary definitions, but rather, in accordance with the principle that the inventor can define terms and concepts in order to best explain his or her invention, should be construed as having meanings and concepts consistent with the technical idea of the present invention.

[0052] Therefore, the embodiments described in this specification and the configurations shown in the drawings correspond to a preferred embodiment of the present invention and do not represent all the technical ideas of the present invention. Therefore, when applying for the present invention, these configurations may have various equivalents and modification examples that can replace them.

[0053] In this specification, terms such as "comprising" or "having" should be understood as describing the presence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, without precluding the presence or additional possibility of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0054] Unless otherwise specified, when a component is described as being "in front of", "behind", "above", or "below" another component, it includes not only the case where it is in direct contact with and disposed "in front of", "behind", "above", or "below" the other component, but also the case where there are other components in between. Additionally, when a component is described as being "connected" to another component, unless otherwise specified, it includes not only the case where they are directly connected to each other, but also the case where they are indirectly connected to each other.

[0055] Next, a vapor deposition apparatus according to an embodiment of the present invention will be described with reference to the accompanying drawings.

[0056] Figure 1 is a diagram schematically showing a vapor deposition apparatus according to an embodiment of the present invention.

[0057] Referring to Figure 1 , a vapor deposition apparatus (100) according to an embodiment of the present invention includes a vapor deposition chamber (110), a vapor deposition source (120), and an alignment device (200).

[0058] The evaporation chamber (110) can provide an evaporation space (110a) for evaporating particles onto a substrate. The evaporation chamber (110) is generally in a cubic shape. However, the evaporation chamber (110) is not limited to a cubic shape and can also be in various shapes that provide the evaporation space (110a).

[0059] Moreover, the evaporation chamber (110) is made of a metallic material. However, the evaporation chamber (110) is not limited to being made of a metallic material and can also be made of various materials, such as plastics with rigidity.

[0060] In addition, the evaporation space (110a) of the evaporation chamber (110) maintains a vacuum environment. And the evaporation chamber (110) is connected to a vacuum pump (not shown) for maintaining the vacuum environment. And the vacuum pump can be disposed outside or inside the evaporation chamber (110).

[0061] Moreover, the evaporation chamber (110) includes a lower side portion (111), an upper side portion (112), and a plurality of side surface portions (113). The lower side portion (111) is in a flat plate shape. Additionally, according to various embodiments of the present invention, the lower side portion (111) is arranged at a predetermined distance from the ground. And the upper side portion (112) is arranged above the lower side portion (111) in a manner opposite to the lower side portion (111). And the plurality of side surface portions (113) are arranged between the lower side portion (111) and the upper side portion (112).

[0062] The evaporation source (120) is arranged on the lower side portion (111) of the evaporation chamber (110). And the evaporation source (120) accommodates an evaporation material that is converted into evaporation particles by heat. At this time, the evaporation material can be an organic substance or a metal. And the evaporation particles can refer to the state after the evaporation material in a liquid or solid state is vaporized or sublimated.

[0063] Moreover, the evaporation source (120) is provided with a heating portion (not shown) for heating the evaporation material. And the heating portion can be in a coil shape. Additionally, the heating portion can generate heat by receiving power in a resistance heating manner or in an electromagnetic induction manner.

[0064] Moreover, the evaporation source (120) is provided with a driving portion (not shown) for moving in the evaporation chamber (110). The evaporation source (120) moves in the evaporation chamber (110) and appropriately sprays the evaporation particles onto the substrate. On the other hand, when the evaporation source (120) moves on the lower side of the evaporation chamber (110), the vibration caused by the movement of the evaporation source (120) can be transmitted to the evaporation chamber (110).

[0065] The alignment device (200) is configured to align the positions of a substrate and a mask. Moreover, the alignment device (200) is disposed at the upper side portion (112) of the evaporation chamber (110) and is accommodated in the evaporation space (110a) of the evaporation chamber (110). At this time, a clamping portion (112a) for clamping the alignment device (200) is formed at the upper side portion (112), and an insertion hole (112b) is formed at the upper side portion (112), and a part of the alignment device (200) is inserted into the evaporation space (110a) through the insertion hole (112b).

[0066] Accordingly, the alignment device (200) is accommodated in the evaporation space (110a) through the upper side portion (112) of the evaporation chamber (110), or is easily separated from the evaporation chamber (110) through the upper side portion (112) for maintenance or repair.

[0067] A description of the alignment device (200) will be given in detail with reference to the subsequent drawings.

[0068] Figure 2 It is a diagram highlighting the interior of an evaporation device according to an embodiment of the present invention.

[0069] Referring to Figure 2 , the alignment device (200) of the evaporation device according to an embodiment of the present invention includes: a first plate (210), a second plate (220), a third plate (230), a six-degree-of-freedom stage (240), an electrostatic chuck (250), a first support portion (221), and a vibration prevention portion (280).

[0070] The first plate (210) is disposed at the upper side portion (112) of the evaporation chamber (refer to Figure 1 ). The first plate (210) has a flat plate shape. Moreover, the first plate (210) can be fixed to the upper side of the evaporation chamber (110) or separated from the upper side of the evaporation chamber (110).

[0071] Accordingly, when the first plate (210) is separated from the upper side of the evaporation chamber (110), it has the advantage of facilitating maintenance and repair of the interior of the evaporation chamber (110).

[0072] At this time, the area of the first plate (210) is larger than the area of the insertion hole (112b) (refer to Figure 1 ). The first plate (210) serves to seal the insertion hole (112b).

[0073] The second plate (220) is disposed on the upper side of the first plate (210). Additionally, the second plate (220) is spaced apart from and aligned with the first plate (210).

[0074] The third plate (230) is disposed on the upper side of the second plate (220). Additionally, the third plate (230) is spaced apart from and aligned with the second plate (220). At this time, the third plate (230) can be supported on the second plate (220).

[0075] The six-degree-of-freedom platform (240) includes a connection part (241) connected to the second plate (220). That is, the six-degree-of-freedom platform (240) is supported on the second plate (220) through the connection part (241).

[0076] Moreover, it passes through the first plate (210) and extends to the evaporation space (110a). And, the six-degree-of-freedom platform (240) can adjust the position of the electrostatic chuck (250). The six-degree-of-freedom platform (240) tilts the electrostatic chuck (250) while moving in the vertical direction by using a multi-axis structure, thereby adjusting the position of the substrate (S) fixed to the electrostatic chuck (250).

[0077] And, although not shown in the drawings, the six-degree-of-freedom platform (240) is equipped with six linear actuators (not shown) to have a six-axis structure. The six linear actuators are driven independently respectively.

[0078] Additionally, in the alignment device (200) of the evaporation apparatus according to an embodiment of the present invention, a position adjustment part (245) for adjusting the position and tilt angle on the plane of the electrostatic chuck (250) is provided.

[0079] And, after the six-degree-of-freedom platform (240) preliminarily adjusts the position of the electrostatic chuck (250), the position adjustment part (245) performs a secondary adjustment on the position of the electrostatic chuck (250).

[0080] The electrostatic chuck (250) is disposed on the lower side of the six-degree-of-freedom platform (240). And, the electrostatic chuck (250) fixes the substrate (S) by static electricity. At this time, the substrate (S) can be made of silicon material. However, the substrate (S) is not limited to being made of silicon material and can also be made of various materials that can be fixed by the electrostatic force of the electrostatic chuck (250).

[0081] The first support part (221) extends from the second plate (220) to the evaporation space (110a). On the other hand, the first support part (221) is arranged at a distance from the vibration prevention part (280) so that they do not interfere with each other.

[0082] Moreover, the first support part (221) supports the mask (M) opposite to the substrate (S). In addition, a first frame (221a) arranged on the lower side of the mask (M) is provided on the first support part (221). At this time, the first frame (221a) is annular so as not to hinder the movement of the evaporation particles to the substrate (S).

[0083] Also, a second frame (221b) arranged on the upper side of the first frame (221a) is provided on the first support part (221). At this time, the second frame (221b) supports the mask (M). In addition, according to various embodiments of the present invention, the second frame (221b) can electrostatically fix the mask (M).

[0084] On the other hand, the substrate (S) is fixed by the electrostatic chuck (250), but the substrate (S) has a slight downward deflection phenomenon in the downward direction due to the load of the substrate (S). Due to the downward deflection phenomenon of the substrate (S) as described above, a slightly bent part can be formed on the substrate (S). Such a bent part is a factor that hinders the realization of a high-resolution display.

[0085] To solve this problem, the substrate (S) moves downward through the six-degree-of-freedom platform (240) and presses the mask (M). Thus, as the substrate (S) presses and contacts the mask (M), the bent part of the substrate (S) is eliminated, thereby achieving flattening.

[0086] The vibration prevention part (280) is arranged between the first plate (210) and the second plate (220). That is, the first plate (210) supports the vibration prevention part (280), and the vibration prevention part (280) supports the second plate (220).

[0087] Moreover, the vibration prevention part (280) prevents the vibration of the first plate (210) from being transmitted to the second plate (220). Thereby, the vibration of the first plate (210) is prevented from being transmitted to the six-degree-of-freedom platform (240), so that the position of the substrate (S) can be accurately adjusted through the six-degree-of-freedom platform (240).

[0088] In addition, in the alignment device (200) of the evaporation device according to an embodiment of the present invention, a second support portion (212) extending from either the second plate (220) or the third plate (230) to the evaporation space (110a) and a magnetic portion (270) connected to the second support portion (212) are provided.

[0089] The second support portion (212) is formed to be aligned with the first support portion (221). Further, the second support portion (212) is moved in the vertical direction of the evaporation chamber (110) by a driving portion (not shown) provided in the third plate (230).

[0090] The magnetic portion (270) is disposed above the electrostatic chuck (250). Further, when the second support portion (212) moves downward to approach the electrostatic chuck (250), the magnetic portion (270) pulls the mask (M) to prevent the mask (M) from deflecting downward. At this time, the mask (M) is made of a metal material.

[0091] In addition, a mask support portion (260) for supporting the mask (M) may be provided in the alignment device (200).

[0092] The mask support portion (260) is connected to the first support portion (221). Further, the mask support portion (260) is made of a metal material. Further, when the magnetic portion (270) moves to approach the electrostatic chuck (250), the magnetic portion (270) pulls the mask support portion (260).

[0093] At this time, the mask (M) is made of a non-magnetic material. Further, the mask (M) is supported by the mask support portion (260), thereby preventing the mask (M) from deflecting downward.

[0094] Figure 3 FIG. is a perspective view showing a state in which a vibration prevention portion of an evaporation device according to an embodiment of the present invention is disposed on a first plate. Figure 4 FIG. is a block diagram showing a vibration prevention portion of an evaporation device according to an embodiment of the present invention.

[0095] First, as Figure 3 shown, a through hole (210a) through which the six-degree-of-freedom stage (240) (see Figure 2 ) passes is provided in the first plate (210).

[0096] A plurality of vibration prevention portions (280) (see Figure 2 ) are provided and include a first vibration prevention portion (280a), a second vibration prevention portion (280b), a third vibration prevention portion (280c), and a fourth vibration prevention portion (280d).

[0097] The plurality of vibration prevention parts (280) may be arranged at the same interval from each other. In addition, the plurality of vibration prevention parts (280) are symmetrically arranged with the through hole (210a) therebetween. That is, the plurality of vibration prevention parts (280) are symmetrically arranged with the six-degree-of-freedom platform (240) (refer to Figure 2 ) therebetween.

[0098] Accordingly, the plurality of vibration prevention parts (280) may disperse and absorb the vibration of the first plate (210) (refer to Figure 2 ).

[0099] And, as Figure 4 shown, the vibration prevention part (280) includes a main body part (281), a pump (282), a sensor (283), and a control part (284).

[0100] The main body part (281) may be made of a material that expands as air is injected. Accordingly, the main body part (281) may absorb the vibration of the first plate (210).

[0101] The pump (282) is connected to the main body part (281) and may inject air into the main body part (281).

[0102] The sensor (283) may measure the air pressure of the main body part (281).

[0103] The control part (284) is electrically connected to the pump (282) and is also electrically connected to the sensor (283). And, the control part (284) receives an electrical signal from the sensor (283) to control the pump (282), thereby adjusting the air injection into the main body part (281).

[0104] Accordingly, the control part (284) controls the air injection into the main body part (281), thereby adjusting the main body part (281) to appropriately absorb the vibration of the first plate (210).

[0105] On the other hand, the vibration prevention part (280) is not limited to absorbing vibration in a passive manner, and may also apply, for example, an active manner of absorbing vibration using a linear motor.

[0106] Figure 5 It is a block diagram showing a vibration prevention part of an evaporation apparatus according to another embodiment of the present invention.

[0107] Refer to Figure 5 , the vibration prevention part (280') includes a main body part (281'), a vibration sensor part (283'), a vibration cancellation part (282'), and a control part (284').

[0108] The main body portion (281') is disposed on the upper side of the first plate (210).

[0109] The vibration sensor portion (283') is provided on the main body portion (281') and detects vibration transmitted from the first plate (210).

[0110] The vibration cancellation portion (282') generates an anti-phase frequency domain to cancel the vibration transmitted from the first plate (210). Here, the anti-phase frequency domain refers to a wavelength capable of eliminating the vibration transmitted from the first plate (210).

[0111] Moreover, the vibration cancellation portion (282') may include a linear motor for generating an anti-phase frequency domain.

[0112] The control portion (284') is electrically connected to the vibration sensor portion (283') and receives an electrical signal regarding vibration from the vibration sensor portion (283').

[0113] Moreover, the control portion (284') controls the vibration cancellation portion (282') to generate an anti-phase frequency domain based on the electrical signal.

[0114] As described above, according to another embodiment of the present invention, vibration can be eliminated in an active manner using a linear motor.

[0115] Figure 6 FIG. is a diagram schematically showing an evaporation apparatus according to still another embodiment of the present invention, Figure 7 is a perspective view schematically showing the interior of an evaporation apparatus according to still another embodiment of the present invention, Figure 8 is a diagram showing a state in which a rail of an evaporation apparatus according to still another embodiment of the present invention is separated from an evaporation chamber.

[0116] Referring to Figures 1 to 8 , an evaporation apparatus (1100) according to still another embodiment of the present invention includes an evaporation chamber (1110), an evaporation source (1120), a rail (1130), a support portion (1150), and an inflow prevention portion (1170).

[0117] The evaporation chamber (1110) accommodates a substrate (S), and evaporation particles are evaporated onto the substrate (S). The evaporation chamber (1110) is generally in a cubic shape. However, the evaporation chamber (1110) is not limited to a cubic shape and may have various shapes for accommodating the substrate (S).

[0118] Moreover, the evaporation chamber (1110) is made of a metal material. However, the evaporation chamber (1110) is not limited to being made of a metal material and may be made of various materials, such as plastics having rigidity.

[0119] In addition, the interior (1110a) of the evaporation chamber (1110) is maintained in a vacuum environment. Moreover, the evaporation chamber (1110) is connected to a vacuum pump (not shown) for maintaining the vacuum environment. Also, the vacuum pump may be disposed outside or inside the evaporation chamber (1110).

[0120] Moreover, the evaporation chamber (1110) includes a lower side portion (1111), an upper side portion (1112), and a plurality of side surface portions (1113, 1114, 1115, 1116).

[0121] The lower side portion (1111) is arranged at a predetermined interval from the ground by spacers (1160). At this time, the spacers (1160) may be made of a metal material having rigidity to stably support the load of the evaporation chamber (1110).

[0122] In addition, according to various embodiments of the present invention, the spacers (1160) may include an elastic portion (not shown) having elasticity. Thus, the elastic portion can prevent external vibrations from being transmitted to the evaporation chamber (1110), or prevent vibrations generated from the evaporation apparatus (1100) from being transmitted to the outside.

[0123] The upper side portion (1112) is arranged above the lower side portion (1111). At this time, the upper side portion (1112) is arranged opposite to the lower side portion (1111).

[0124] The plurality of side surface portions (1113, 1114, 1115, 1116) are arranged between the lower side portion (1111) and the upper side portion (1112). Moreover, the plurality of side surface portions (1113, 1114, 1115, 1116) include a first side surface portion (1113), a second side surface portion (1114), a third side surface portion (1115), and a fourth side surface portion (1116).

[0125] Moreover, the first side surface portion (1113) extends from the lower side portion (1111) in a direction perpendicular thereto. Also, the second side surface portion (1114) is arranged opposite to the first side surface portion (1113). Moreover, the third side surface portion (1115) is arranged between the first side surface portion (1113) and the second side surface portion (1114). Also, the fourth side surface portion (1116) is arranged opposite to the third side surface portion (1115).

[0126] Moreover, the substrate (S) is arranged below the upper side portion (1112) by a chuck (1117). In addition, the chuck (1117) may be an electrostatic chuck using static electricity.

[0127] In addition, a door (not shown) for opening and closing the interior (1110a) of the evaporation chamber (1110) is provided on at least one of the plurality of side surfaces (1113, 1114, 1115, 1116) of the evaporation chamber (1110). The substrate (S) is introduced into the interior of the evaporation chamber (1110) or led out to the outside of the evaporation chamber (1110) through the door.

[0128] The evaporation source (1120) is disposed inside the evaporation chamber (1110) (1110a). The evaporation source (1120) accommodates an evaporation material that is converted into evaporation particles by heat. At this time, the evaporation material may be an organic substance or a metal. The evaporation particles may refer to the state after the liquid or solid evaporation material is vaporized or sublimated.

[0129] In addition, a heating unit (not shown) for heating the evaporation material is provided in the evaporation source (1120). The heating unit may be in the shape of a coil. In addition, the heating unit may generate heat by receiving power in a resistance heating manner or in an electromagnetic induction manner.

[0130] In addition, a driving unit (not shown) for moving in the evaporation chamber (1110) is provided in the evaporation source (1120). The evaporation source (1120) moves in the evaporation chamber (1110) and appropriately sprays the evaporation particles onto the substrate (S).

[0131] The guide rail (1130) guides the movement of the evaporation source (1120). At this time, the guide rail (1130) includes a first guide rail (1131) and a second guide rail (1132).

[0132] The first guide rail (1131) and the second guide rail (1132) are spaced apart from each other and arranged in alignment. The first guide rail (1131) and the second guide rail (1132) support the load of the evaporation source (1120).

[0133] Thus, the evaporation source (1120) is supported on the guide rail (1130) and can move in a first direction (①) aligned with the X-axis direction or a second direction (②) opposite to the first direction (①).

[0134] The support portion (1150) is formed to penetrate the lower side portion (1111) of the evaporation chamber (1110). The support portion (1150) supports the guide rail (1130). At this time, the support portion (1150) may be in the shape of a rod. However, the support portion (1150) is not limited to the shape of a rod and may also be in various shapes that support the guide rail (1130) from the ground.

[0135] In addition, the support part (1150) includes a connection part (1140) for stably supporting the guide rail (1130). At this time, the connection part (1140) is arranged to cross the guide rail (1130). For example, the connection part (1140) extends in a direction perpendicular to the guide rail (1130). And the connection part (1140) includes a first connection part (1141) and a second connection part (1142).

[0136] And the first connection part (1141) is formed to be aligned with the first side surface part (1113). The first connection part (1141) supports one side of the first guide rail (1131) and one side of the second guide rail (1132).

[0137] At this time, the first connection part (1141) is arranged at a first length (L1) interval from the first side surface part (1113). Thereby, the first connection part (1141) prevents the vibration transmitted to the guide rail (1130) due to the movement of the evaporation source (1120) from being transmitted to the evaporation chamber (1110).

[0138] And the second connection part (1142) is formed to be aligned with the first connection part (1141). And the second connection part (1142) supports the other side of the first guide rail (1131) and the other side of the second guide rail (1132). That is, the first guide rail (1131) and the second guide rail (1132) are supported by the first connection part (1141) and the second connection part (1142).

[0139] At this time, the second connection part (1142) is arranged at a second length L2 interval from the second side surface part (1114). Thereby, the second connection part (1142) prevents the vibration transmitted to the guide rail (1130) due to the movement of the evaporation source (1120) from being transmitted to the evaporation chamber (1110).

[0140] On the other hand, a plurality of through holes (1111a, 1111b, 1111c, 1111d) through which the support part (1150) penetrates are formed in the lower side part (1111). And the plurality of through holes (1111a, 1111b, 1111c, 1111d) include a first through hole (1111a), a second through hole (1111b), a third through hole (1111c), and a fourth through hole (1111d).

[0141] The first through-hole (1111a) is formed below one side of the first connection part (1141). And, the second through-hole (1111b) is formed below the other side of the first connection part (1141). And, the third through-hole (1111c) is formed below one side of the second connection part (1142). And, the fourth through-hole (1111d) is formed below the other side of the second connection part (1142).

[0142] In addition, the support part (1150) includes a first support part (1151), a second support part (1152), a third support part (1153), and a fourth support part (1154). The first support part (1151) passes through the first through-hole (1111a) and contacts the ground. And, the first support part (1151) supports one side of the first connection part (1141). The second support part (1152) passes through the second through-hole (1111b) and contacts the ground. And, the second support part (1152) supports the other side of the first connection part (1141). The third support part (1153) passes through the third through-hole (1111c) and contacts the ground. And, the third support part (1153) supports one side of the second connection part (1142). The fourth support part (1154) passes through the fourth through-hole (1111d) and contacts the ground. And, the fourth support part (1154) supports the other side of the second connection part (1142).

[0143] The inflow prevention part (1170) prevents air outside the evaporation chamber (1110) from flowing in through the plurality of through-holes (1111a, 1111b, 1111c, 1111d). And, the inflow prevention part (1170) is formed to wrap a part of the support part (1150) disposed outside the vacuum chamber (1110). Thus, even if a part of the support part (1150) is exposed to the outside of the vacuum chamber (1110) through the plurality of through-holes (1111a, 1111b, 1111c, 1111d), the inflow prevention part (1170) stably maintains the vacuum state of the inside (1110a) of the evaporation chamber (1110) by sealing between the support part (1150) and the plurality of through-holes (1111a, 1111b, 1111c, 1111d).

[0144] At this time, the inflow prevention part (1170) has the corrugated shape. For example, the inflow prevention part (1170) has the bellows shape. Thus, the inflow prevention part (1170) prevents the seal between the plurality of through holes (1111a, 1111b, 1111c, 1111d) and the support part (1150) from being broken due to vibrations transmitted through the support part (1150).

[0145] In addition, the inflow prevention part (1170) includes a first inflow prevention part (1171), a second inflow prevention part (1172), a third inflow prevention part (1173), and a fourth inflow prevention part (1174). The first inflow prevention part (1171) seals between the first through hole (1111a) and the first support part (1151). The second inflow prevention part (1172) seals between the second through hole (1111b) and the second support part (1152). The third inflow prevention part (1173) seals between the third through hole (1111c) and the third support part (1153). The fourth inflow prevention part (1174) seals between the fourth through hole (1111d) and the fourth support part (1154).

[0146] In addition, as Figure 8 shown, the first guide rail (1131) is arranged aligned with the third side surface part (1115). At this time, the first guide rail (1131) and the third side surface part (1115) are arranged separated by a third length (L3).

[0147] And, the second guide rail (1132) is arranged aligned with the fourth side surface part (1116). At this time, the second guide rail (1132) and the fourth side surface part (1116) are arranged separated by a fourth length (L4).

[0148] As described above, the first guide rail (1131) and the second guide rail (1132) are arranged separated from the evaporation chamber (1110) to prevent vibrations transmitted to the guide rail (1130) as the evaporation source (1120) moves from being transmitted to the evaporation chamber (1110).

[0149] Although embodiments of the present invention have been described, the spirit of the present invention is not limited to the embodiments presented in this specification, and those skilled in the art who understand the spirit of the present invention will be able to easily propose other embodiments by adding, changing, deleting, or adding components within the scope of the same spirit, but these will also fall within the spirit of the present invention.

Claims

1. An evaporation device, comprising: an evaporation chamber providing an evaporation space; a first plate capable of separating from the upper side of the evaporation chamber; a second plate disposed on the upper side of the first plate; a six-degree-of-freedom platform connected to the second plate and extending through the first plate into the evaporation space; an electrostatic chuck disposed on the lower side of the six-degree-of-freedom platform and for fixing a substrate, and evaporation particles are evaporated onto the substrate; a first support portion extending from the second plate into the evaporation space and for supporting a mask opposite to the substrate; and a vibration prevention portion disposed between the first plate and the second plate and for preventing vibration of the second plate from being transmitted to the first plate.

2. The evaporation device according to claim 1, wherein the vibration prevention portions are provided in plurality, and the plurality of vibration prevention portions are arranged at the same interval from each other.

3. The evaporation device according to claim 1, wherein the vibration prevention portion includes: a main body portion that expands by air flowing into its interior; a pump for injecting air into the main body portion; and a control portion for controlling the pump.

4. The evaporation device according to claim 1, wherein the vibration prevention portion includes: a main body portion disposed on the upper side of the first plate; a vibration sensor portion provided on the main body portion and for detecting vibration; a vibration cancellation portion for generating an anti-phase frequency domain to cancel the vibration; and a control portion for controlling the vibration cancellation portion based on an electrical signal received from the vibration sensor portion.

5. The evaporation device according to claim 1, wherein the vibration cancellation portion includes a linear motor for generating an anti-phase frequency domain.

6. The evaporation device according to claim 1, wherein it further includes: a third plate disposed on the upper side of the second plate; a second support portion extending from either the second plate or the third plate into the evaporation space and moving in the vertical direction of the evaporation chamber; and a magnetic portion connected to the second support portion and disposed on the upper side of the electrostatic chuck.

7. The evaporation device according to claim 6, wherein it further includes: a mask support portion connected to the first support portion and for supporting the mask, the mask support portion is made of a metal material, when the magnetic portion moves in a manner approaching the electrostatic chuck, the magnetic portion pulls the mask support portion.

8. The evaporation device according to claim 6, wherein the mask is made of a metal material, when the magnetic portion moves in a manner approaching the electrostatic chuck, the magnetic portion pulls the mask.

9. An evaporation device, comprising: an evaporation chamber maintaining a vacuum state and for accommodating a substrate, and evaporation particles are evaporated onto the substrate; an evaporation source accommodated in the evaporation chamber and for ejecting the evaporation particles; a guide rail for guiding the movement of the evaporation source; a support portion passing through a through hole formed in the lower side portion of the evaporation chamber and for supporting the guide rail; and an inflow prevention portion for preventing external air of the evaporation chamber from flowing in through the through hole.

10. The evaporation device according to claim 9, wherein the inflow prevention portion has a corrugated shape.

11. The evaporation deposition apparatus according to claim 9, wherein the inflow prevention part is formed to wrap a part of the support part disposed outside the evaporation deposition chamber.

12. The evaporation deposition apparatus according to claim 9, wherein the evaporation deposition chamber includes: an upper side part disposed above the lower side part; and a plurality of side face parts disposed between the lower side part and the upper side part, the guide rail is disposed at a prescribed interval from the plurality of side face parts.

13. The evaporation deposition apparatus according to claim 9, wherein the guide rail and the support part do not contact the evaporation deposition chamber.

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