Photoresist fluorosilicone initiator drying system

Abstract

The invention discloses a drying system for a photoresist fluorosilicone initiator, relates to the technical field of photoresist fluorosilicone initiators, and solves the problem that after the photoresist fluorosilicone initiator is synthesized, some impurities and unnecessary components are doped in the photoresist fluorosilicone initiator, so that the purity of materials is influenced. A photoresist fluorosilicone initiator drying system comprises a base, a filter box and a drying barrel, the filter box and the drying barrel are both fixedly arranged at the upper end of the base, inserting grooves are formed in the upper portion and the lower portion of the interior of the filter box, and filter plates are fixedly installed in the upper inserting groove and the lower inserting groove through limiting devices; and one side of the bottom end of the filtering box is in through connection with one side of the upper end of the drying barrel through a material pipe, and the interior of the drying barrel is in driving connection with a stirring rod through a motor. According to the invention, the filter plate is limited and fixed in the filter box through the limiting device, so that a photoresist fluorosilicone initiator entering the filter box is filtered, and the purity of a dried material is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of fluorosilicon initiators for photoresists, and particularly to a drying system for fluorosilicon initiators for photoresists. Background Art

[0002] Fluorosilicon initiator for photoresist is a key material used in the lithography process, mainly for fine pattern processing in semiconductor manufacturing. Fluorosilicon initiator for photoresist belongs to a type of photoresist, and its core components include photosensitive resin, sensitizer, and solvent. Under light illumination, the photoinitiator absorbs energy and triggers a chemical reaction, causing chemical changes such as crosslinking or breaking of the photoresist, thereby forming the required image on the surface of the semiconductor material.

[0003] During the synthesis process of fluorosilicon initiator for photoresist, certain moisture and organic solvents will remain. These impurities will affect its activity and stability, so drying treatment is required to ensure the quality and activity of the photoinitiator. However, after the synthesis of fluorosilicon initiator for photoresist, some impurities and unnecessary components are doped inside, and drying in the dryer will affect the purity of the material; therefore, it does not meet the existing requirements, and for this reason, we propose a drying system for fluorosilicon initiator for photoresist. Summary of the Invention

[0004] The purpose of the present invention is to provide a drying system for fluorosilicon initiator for photoresist to solve the problem that during the synthesis process of fluorosilicon initiator for photoresist, certain moisture and organic solvents will remain, these impurities will affect its activity and stability, so drying treatment is required to ensure the quality and activity of the photoinitiator, but after the synthesis of fluorosilicon initiator for photoresist, some impurities and unnecessary components are doped inside, and drying in the dryer will affect the purity of the material as mentioned in the above background art.

[0005] To achieve the above purpose, the present invention provides the following technical solution: A drying system for fluorosilicon initiator for photoresist, including a base, a filter box, and a drying barrel. The filter box and the drying barrel are both fixedly arranged at the upper end of the base. Slots are respectively opened at the upper and lower parts inside the filter box, and filter plates are fixedly installed inside the upper and lower slots through limiting devices. One side of the bottom end of the filter box is connected through a material pipe to one side of the upper end of the drying barrel. Inside the drying barrel, a stirring rod is driven by a motor, and a number of stirring blades are fixedly connected at equal intervals on the outer surface of the stirring rod;

[0006] On the side of the drying barrel away from the filter box and located at the upper end of the base, a blower is fixedly provided. One side of the blower is connected to an air box through a connecting pipe, and one side of the air box away from the blower is connected to a heater through a connecting pipe. One side of the upper end of the heater is connected through an air supply pipe to the inside of the drying barrel, and one side of the top end of the drying barrel is connected through an air outlet pipe to the inside of the air box.

[0007] Preferably, on one side where the upper and lower slots are close to each other and inside the filter box, symmetric movable cavities are provided. Between one side where the two movable cavities are close to each other and on the outer surface of the filter box, a groove is provided. The limiting device is arranged inside the movable cavity, and the limiting device includes a movable rod, a limiting plate, and a limiting block.

[0008] Preferably, movable rods are movably arranged inside the upper and lower movable cavities respectively. One end of the movable rod movably penetrates the movable cavity and extends into the groove. The limiting plate is fixedly connected to one end of the movable rod inside the movable cavity.

[0009] Preferably, a spring is fixedly connected between one side of the limiting plate and one side of the inner wall of the movable cavity, and the spring is wound around the outer surface of the movable rod. The limiting block is fixedly connected to the side of the limiting plate away from the movable rod.

[0010] Preferably, symmetric limiting grooves are provided on one side where the upper and lower filter plates are close to each other. One end of the limiting block away from the limiting plate movably penetrates the movable cavity and extends into the slot to be inserted into the corresponding limiting groove.

[0011] Preferably, a driving structure for driving the limiting device to move is arranged inside the groove. The driving structure includes a threaded hole plate, a rotating shaft, a semi-threaded rod, and a cam. The threaded hole plate is fixedly connected to the outside of the groove.

[0012] Preferably, the rotating shaft is fixedly arranged on the inner wall of the groove. One end of the semi-threaded rod threadedly penetrates the threaded hole plate and is rotatably connected to the rotating shaft. The cam is fixedly connected to the outer surface of the semi-threaded rod. One end of the movable rod extending into the groove is in sliding contact with the outer surface of the cam.

[0013] Preferably, a sleeve is fixedly installed at the top end inside the drying barrel through bolts. The output end of the motor penetrates and extends into the sleeve and is fixedly connected to an outer sleeve rod. An inner movable rod is slidably connected inside the outer sleeve rod and penetrates and extends outside the outer sleeve rod. The bottom end of the movable rod is fixedly connected to a sliding seat.

[0014] Preferably, the sliding seat is slidably connected inside the sleeve. The inner wall of the sleeve is provided with an inclined annular track. A convex block slidably connected to the annular track is fixedly connected to the outer surface of the sliding seat. The top end of the stirring rod is fixedly connected to the bottom end of the sliding seat through bolts.

[0015] Compared with the prior art, the beneficial effects of the present invention are:

[0016] 1. In the present invention, the filter plate is inserted into the interior of the slot respectively, and then the half-threaded rod is rotated, so that the half-threaded rod rotates the rotating shaft and drives the cam to rotate. Through the contact between the outer surface of the cam and one end of the upper and lower movable rods, the convex end of the cam pushes the movable rod to move towards the interior of the movable cavity, and drives the spring to stretch. Furthermore, the limiting block on one side of the movable rod penetrates and extends into the interior of the slot and is inserted into the limiting groove at the bottom end of the filter plate, thereby limiting and fixing the filter plate inside the filter box, and facilitating subsequent disassembly and cleaning. Through the installation of the filter plate, some impurities and unnecessary components doped in the photoresist fluorosilicon initiator entering the filter box are filtered, thereby improving the purity of the dried material;

[0017] 2. In the present invention, the motor drives the outer sleeve rod to rotate inside the sleeve. Furthermore, the sliding seat connected to the movable rod at the bottom end of the outer sleeve rod moves along the annular track on the inner wall of the sleeve through the convex block on the outer surface, and then drives the stirring rod and the stirring blades to move up and down and rotate for stirring inside the drying barrel, so that the photoresist fluorosilicon initiator inside the drying barrel is fully stirred for drying, avoiding uneven drying due to accumulation. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is a schematic structural diagram of the whole of the present invention;

[0019] Figure 2 is a side sectional view of the filter box of the present invention;

[0020] Figure 3 is a front sectional view of the whole of the present invention;

[0021] Figure 4 is of the present invention Figure 2 is a schematic structural diagram of the part at A in;

[0022] Figure 5 is a schematic structural diagram of the half-threaded rod and the cam of the present invention;

[0023] Figure 6 is of the present invention Figure 3 is a schematic structural diagram of the part at B in.

[0024] In the figure: 1, base; 2, filter box; 201, slot; 202, groove; 203, movable cavity; 3, feed inlet; 4, drying barrel; 5, material pipe; 6, discharge outlet; 7, filter plate; 701, limit groove; 8, drive structure; 801, threaded hole plate; 802, rotating shaft; 803, semi-threaded rod; 804, cam; 9, limiting device; 901, movable rod; 902, limiting plate; 903, spring; 904, limiting block; 10, fan; 11, air box; 12, heater; 13, air supply pipe; 14, air outlet pipe; 15, motor; 16, sleeve; 1601, annular track; 17, outer sleeve rod; 18, movable rod; 19, sliding seat; 20, convex block; 21, stirring rod; 22, stirring blade. Detailed implementation mode

[0025] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments.

[0026] Please refer to Figures 1 to 6 , an embodiment provided by the present invention: a dry system for a fluorosilicon initiator of a photoresist, including a base 1, a filter box 2 and a drying barrel 4. The filter box 2 and the drying barrel 4 are both fixedly arranged at the upper end of the base 1. Slots 201 are opened at the upper and lower parts inside the filter box 2. Filter plates 7 are fixedly installed inside the upper and lower slots 201 through a limiting device 9. One side of the bottom end of the filter box 2 is connected to one side of the upper end of the drying barrel 4 through a material pipe 5. Inside the drying barrel 4, a stirring rod 21 is driven and connected by a motor 15. A plurality of stirring blades 22 are fixedly connected to the outer surface of the stirring rod 21 at equal intervals;

[0027] On one side of the drying barrel 4 away from the filter box 2 and located at the upper end of the base 1, a fan 10 is fixedly provided. One side of the fan 10 is connected to an air box 11 through a connecting pipe. One side of the air box 11 away from the fan 10 is connected to a heater 12 through a connecting pipe. One side of the upper end of the heater 12 is connected to the inside of the drying barrel 4 through an air supply pipe 13. One side of the top end of the drying barrel 4 is connected to the inside of the air box 11 through an air outlet pipe 14. By starting the fan 10 to input air into the heater 12, the heater 12 heats the air into hot air, and then the hot air enters the drying barrel 4 from the air supply pipe 13 to dry the material. Then the hot air flows out from the air outlet pipe 14 and converges inside the air box 11, and then the fresh air passing through the fan 10 is sent into the heater 12 for heating to achieve heat exchange, thereby reducing the energy consumption required to heat the fresh air and realizing energy conservation and environmental protection.

[0028] On the sides of the upper and lower slots 201 close to each other and inside the filter box 2, symmetric movable cavities 203 are provided. Between the sides of the two movable cavities 203 close to each other and on the outer surface of the filter box 2, a groove 202 is provided. A limiting device 9 is arranged inside the movable cavity 203. The limiting device 9 includes a movable rod 901, a limiting plate 902 and a limiting block 904. Movable rods 901 are movably arranged inside the upper and lower movable cavities 203, and one end of the movable rod 901 movably penetrates through the movable cavity 203 and extends into the groove 202. The limiting plate 902 is fixedly connected to one end of the movable rod 901 inside the movable cavity 203. A spring 903 is fixedly connected between one side of the limiting plate 902 and one side of the inner wall of the movable cavity 203, and the spring 903 is wound around the outer surface of the movable rod 901. The limiting block 904 is fixedly connected to the side of the limiting plate 902 away from the movable rod 901.

[0029] On the sides of the upper and lower filter plates 7 close to each other, symmetric limiting grooves 701 are provided. One end of the limiting block 904 away from the limiting plate 902 movably penetrates through the movable cavity 203 and extends into the slot 201 to be inserted into the corresponding limiting groove 701. A driving structure 8 for driving the limiting device 9 to move is arranged inside the groove 202. The driving structure 8 includes a threaded hole plate 801, a rotating shaft 802, a semi-threaded rod 803 and a cam 804. The threaded hole plate 801 is fixedly connected to the outside of the groove 202. The rotating shaft 802 is fixedly arranged on the inner wall of the groove 202. One end of the semi-threaded rod 803 is threadedly penetrated through the threaded hole plate 801 and rotatably connected to the rotating shaft 802. The cam 804 is fixedly connected to the outer surface of the semi-threaded rod 803. One end of the movable rod 901 extending into the groove 202 is in sliding contact with the outer surface of the cam 804.

[0030] By inserting the filter plates 7 into the slots 201 respectively, then rotating the semi-threaded rod 803, the semi-threaded rod 803 rotates the rotating shaft 802 and drives the cam 804 to rotate. Through the contact between the outer surface of the cam 804 and one end of the upper and lower movable rods 901, the convex end of the cam 804 pushes the movable rod 901 to move towards the inside of the movable cavity 203 and drives the spring 903 to stretch. Furthermore, the limiting block 904 on one side of the movable rod 901 penetrates and extends into the slot 201 and is inserted into the limiting groove 701 at the bottom of the filter plate 7, thereby limiting and fixing the filter plate 7 inside the filter box 2.

[0031] At the top inside the drying barrel 4, a sleeve 16 is fixedly installed by bolts. The output end of the motor 15 penetrates and extends into the inside of the sleeve 16, and is fixedly connected with an outer sleeve rod 17. An inner movable rod 18 that penetrates and extends to the outside of the outer sleeve rod 17 is slidably connected inside the outer sleeve rod 17. The bottom end of the movable rod 18 is fixedly connected with a sliding seat 19. The sliding seat 19 is slidably connected inside the sleeve 16. An annular track 1601 that is inclined is provided on the inner wall of the sleeve 16. A convex block 20 that is slidably connected to the annular track 1601 is fixedly connected to the outer surface of the sliding seat 19. The top end of the stirring rod 21 is fixedly connected to the bottom end of the sliding seat 19 by bolts.

[0032] By starting the motor 15 to drive the outer sleeve rod 17 to rotate inside the sleeve 16, the sliding seat 19 connected to the movable rod 18 at the bottom end of the outer sleeve rod 17 can move along the annular track 1601 on the inner wall of the sleeve 16 through the convex block 20 on the outer surface, and then drive the stirring rod 21 and the stirring blade 22 to move up and down, and rotate and stir inside the drying barrel 4.

[0033] When the photoresist fluorosilicon initiator drying system is in use, by inserting the filter plate 7 into the inside of the slot 201 respectively, and then rotating the semi-threaded rod 803, the semi-threaded rod 803 rotates the rotating shaft 802 and drives the cam 804 to rotate. Through the contact between the outer surface of the cam 804 and one end of the upper and lower movable rods 901, the protruding end of the cam 804 pushes the movable rod 901 to move towards the inside of the movable cavity 203, and drives the spring 903 to stretch. Furthermore, the limiting block 904 on one side of the movable rod 901 penetrates and extends into the inside of the slot 201, and is inserted into the limiting groove 701 at the bottom end of the filter plate 7, so as to limit and fix the filter plate 7 inside the filter box 2, and it is convenient for subsequent disassembly and cleaning. Through the installation of the filter plate 7, some impurities and unnecessary components doped in the photoresist fluorosilicon initiator entering the filter box 2 are filtered, thereby improving the purity of the dried material;

[0034] The filtered photoresist fluorosilicon initiator enters the interior of the drying barrel 4 through the material pipe 5. Then, the blower 10 is started to input air into the heater 12. The heater 12 heats the air into hot air, which then enters the drying barrel 4 from the air supply pipe 13 to dry the material. Then, the hot air flows out from the air outlet pipe 14 and converges inside the air box 11. Then, the fresh air from the blower 10 is sent into the heater 12 for heating to achieve heat exchange, thereby reducing the energy consumption required to heat the fresh air and realizing energy conservation and environmental protection. While the interior of the drying barrel 4 is being dried, the motor 15 is started to drive the outer sleeve rod 17 to rotate inside the sleeve 16. Then, the sliding seat 19 connected to the movable rod 18 at the bottom of the outer sleeve rod 17 moves along the annular track 1601 on the inner wall of the sleeve 16 through the convex block 20 on the outer surface. Then, it drives the stirring rod 21 and the stirring blade 22 to move up and down and rotate and stir inside the drying barrel 4, so that the photoresist fluorosilicon initiator inside the drying barrel 4 is fully stirred and dried, avoiding uneven drying due to accumulation.

[0035] For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and the present invention can be implemented in other specific forms without departing from the spirit or basic characteristics of the present invention. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present invention. Any reference signs in the claims should not be regarded as limiting the claims involved.

Claims

1. A dry system for a fluorosilicon initiator of a photoresist, comprising a base (1), a filter box (2) and a drying barrel (4), wherein the filter box (2) and the drying barrel (4) are both fixedly arranged at the upper end of the base (1), and it is characterized in that: The upper and lower parts inside the filter box (2) are both provided with slots (201). The filter plates (7) are fixedly installed inside the upper and lower slots (201) through limiting devices (9). One side of the bottom end of the filter box (2) is connected to one side of the upper end of the drying barrel (4) through a material pipe (5). Inside the drying barrel (4), a stirring rod (21) is driven and connected by a motor (15). A plurality of stirring blades (22) are fixedly connected to the outer surface of the stirring rod (21) at equal intervals. On one side of the drying barrel (4) away from the filter box (2) and located at the upper end of the base (1), a blower (10) is fixedly provided. One side of the blower (10) is connected to an air box (11) through a connecting pipe. One side of the air box (11) away from the blower (10) is connected to a heater (12) through a connecting pipe. One side of the upper end of the heater (12) is connected to the inside of the drying barrel (4) through an air supply pipe (13). One side of the top end of the drying barrel (4) is connected to the inside of the air box (11) through an air outlet pipe (14).

2. A drying system for a fluorosilicon initiator of a photoresist according to claim 1, characterized in that: On one side of the upper and lower slots (201) close to each other and inside the filter box (2), symmetrical movable cavities (203) are provided. Between the sides of the two movable cavities (203) close to each other and on the outer surface of the filter box (2), a groove (202) is provided. The limiting device (9) is arranged inside the movable cavity (203). The limiting device (9) includes a movable rod (901), a limiting plate (902), and a limiting block (904).

3. A drying system for a fluorosilicon initiator of a photoresist according to claim 2, characterized in that: Movable rods (901) are movably arranged inside the upper and lower movable cavities (203). One end of the movable rod (901) movably penetrates the movable cavity (203) and extends into the groove (202). The limiting plate (902) is fixedly connected to one end of the movable rod (901) inside the movable cavity (203).

4. A dry system for a fluorosilicon initiator of a photoresist, according to claim 3, characterized in that: A spring (903) is fixedly connected between one side of the limiting plate (902) and one side of the inner wall of the movable cavity (203), and the spring (903) is wound around the outer surface of the movable rod (901). The limiting block (904) is fixedly connected to the side of the limiting plate (902) away from the movable rod (901).

5. A dry system for a fluorosilicon initiator of a photoresist, according to claim 4, characterized in that: Symmetrical limiting grooves (701) are provided on one side of the upper and lower filter plates (7) close to each other. One end of the limiting block (904) away from the limiting plate (902) movably penetrates the movable cavity (203) and extends into the slot (201) to be inserted into the corresponding limiting groove (701).

6. A dry system for a fluorosilicon initiator of a photoresist, according to claim 2, characterized in that: A driving structure (8) for driving the limiting device (9) to move is arranged inside the groove (202). The driving structure (8) includes a threaded hole plate (801), a rotating shaft (802), a semi-threaded rod (803), and a cam (804). The threaded hole plate (801) is fixedly connected to the outside of the groove (202).

7. A dry system for a fluorosilicon initiator of a photoresist, according to claim 6, characterized in that: The rotating shaft (802) is fixedly arranged on the inner wall of the groove (202). One end of the semi-threaded rod (803) threadedly penetrates through the threaded hole plate (801) and is rotatably connected to the rotating shaft (802). The cam (804) is fixedly connected to the outer surface of the semi-threaded rod (803). One end of the movable rod (901) that penetrates and extends into the groove (202) is in sliding contact with the outer surface of the cam (804).

8. A dry system for a fluorosilicon initiator of a photoresist, according to claim 1, characterized in that: At the top inside the drying barrel (4), a sleeve (16) is fixedly installed by bolts. The output end of the motor (15) penetrates and extends into the sleeve (16) and is fixedly connected to an outer sleeve rod (17). A movable rod (18) that penetrates and extends to the outside of the outer sleeve rod (17) is slidably connected inside the outer sleeve rod (17). The bottom end of the movable rod (18) is fixedly connected to a sliding seat (19).

9. A dry system for a fluorosilicon initiator of a photoresist, according to claim 8, characterized in that: The sliding seat (19) is slidably connected inside the sleeve (16). An annular track (1601) that is inclined is formed on the inner wall of the sleeve (16). A convex block (20) that is slidably connected to the annular track (1601) is fixedly connected to the outer surface of the sliding seat (19). The top end of the stirring rod (21) is fixedly connected to the bottom end of the sliding seat (19) by bolts.

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