Spherical surface standing wave three-dimensional procession effect three-axis integrated miniature gyroscope spherical shell resonance structure

Abstract

The invention discloses a spherical surface standing wave three-dimensional procession effect three-axis integrated miniature gyroscope spherical shell resonance structure, the structure comprises a spherical harmonic oscillator, a plurality of electrodes and a shell, and the electrodes are used for measuring the vibration mode of the spherical harmonic oscillator to realize the measurement of the angular velocity of three-axis rotation; a supporting column is arranged in the center of the spherical harmonic oscillator, an inner spherical shell is arranged on the outer layer of the spherical harmonic oscillator, the supporting column comprises a plurality of U-shaped supporting beams, an anchor area sphere and a base, the inner spherical shell is constructed to be in a thickness non-uniform distribution form, and the lower end of the inner spherical shell is provided with a hole structure for the supporting column to penetrate through. Wherein the lower boundary of the hole is overlapped with the upper boundary of the base. The electrodes are arranged on the outer side of the spherical harmonic oscillator, a gap between the outer wall of the spherical harmonic oscillator and the inner wall of each electrode is a capacitance gap, the electrodes are arranged around the equator of the spherical harmonic oscillator every 45 degrees, the electrodes are arranged at the 45-degree positions of an upper hemisphere and a lower hemisphere every 90 degrees, and the electrodes are embedded in the upper face of the shell. The three-axis angular velocity measuring device has the remarkable effects that the structure is simple, the space limitation of two-dimensional precession of a traditional hemispherical resonant gyroscope is broken through, and the three-axis angular velocity measurement is realized under a single structure by utilizing the space precession characteristic of spherical harmonic standing waves under the action of multi-degree-of-freedom inertia force.

Description

Technical Field

[0001] The present invention relates to a spherical shell resonance structure of a three - axis integrated micro - gyroscope with a spherical standing - wave three - dimensional precession effect, belonging to the technical field of micro - electromechanical gyroscopes. Background Art

[0002] Inertial navigation technology, as the core enabling technology in the field of autonomous perception, enables us to rely less on external information strategically. Whether in an environment where signals are interfered or in a particularly complex electromagnetic environment, it can provide extremely accurate spatial position information. It is indispensable for high - precision missile guidance, outer - space exploration, and decision - making of unmanned devices.

[0003] As the core device of an inertial navigation system, the performance of a gyroscope directly determines the accuracy and reliability of the system, and has always been the focus of inertial technology research. Among them, the hemispherical resonant gyroscope based on the precession principle has attracted much attention due to its all - solid - state architecture, resistance to extreme environments, wide dynamic response, and direct angular - rate integral output. However, existing hemispherical resonant gyroscopes are all restricted by the physical constraints of a single - axis sensitive architecture, and multi - axis sensing needs to be achieved through mechanical orthogonal stacking, resulting in a doubling of the system volume and difficulty in suppressing the inter - axis coupling error, severely restricting its further miniaturized application prospects. Studying a gyroscope structure that can measure the angular velocity of three axes has become an important direction in current gyroscope research. Summary of the Invention

[0004] The purpose of the present invention is to provide a spherical shell resonance structure of a three - axis integrated micro - gyroscope with a spherical standing - wave three - dimensional precession effect, which can break through the spatial limitation of the two - dimensional precession of traditional hemispherical resonant gyroscopes, and utilize the spatial precession characteristics of spherical harmonic standing - waves under the action of multi - degree - of - freedom inertial forces to achieve the measurement of three - axis angular velocity in a single structure.

[0005] A spherical shell resonance structure of a three - axis integrated micro - gyroscope with a spherical standing - wave three - dimensional precession effect includes a spherical resonator, a plurality of electrodes, and a housing. The center of the spherical resonator is configured as a support column, and the outer layer of the spherical resonator is an inner spherical shell.

[0006] Further, the support column includes: a plurality of U - shaped support beams, an anchor - area sphere, a base, and a base support. One end of the U - shaped support beam is connected to the anchor - area sphere, and the other end is in direct contact with the inner spherical shell. The endpoints of the U - shaped support beams are connected as a regular tetrahedron. One end of the base support is connected to the anchor - area sphere, and the other end is connected to the base. And the support column is a symmetric structure. The U - shaped support beams, the anchor - area sphere, the base, and the base support are an integral body and need to be integrally manufactured during processing.

[0007] In this way, the U-shaped support beam 10 adopts a regular tetrahedron layout structure, which can effectively improve the anti-interference performance. At the same time, the support column 6 adopts an integrated processing technology. Due to the overall structure design, the processing flow is significantly simplified and the processing convenience is improved.

[0008] Further, the U-shaped support beam includes: a first support cantilever, a first U-shaped support cantilever, a second U-shaped support cantilever, a third U-shaped support cantilever, and a second support cantilever. The first support cantilever is connected to the anchor area sphere, and the other end is connected to one end of the first U-shaped support cantilever, the second U-shaped support cantilever, and the third U-shaped support cantilever. At the same time, the first U-shaped support cantilever, the second U-shaped support cantilever, and the third U-shaped support cantilever are respectively spaced 120 degrees apart. The other ends of the first U-shaped support cantilever, the second U-shaped support cantilever, and the third U-shaped support cantilever are connected to the second support cantilever, and the other end of the second support cantilever is in contact with the inner spherical shell.

[0009] Further, the inner spherical shell is configured in a form of non-uniform thickness distribution, and an opening structure for the support column to penetrate is provided at its lower end, where the lower boundary of the hole coincides with the upper boundary of the base. The non-uniform thickness distribution state can be achieved by adjusting the inner wall thickness of the inner spherical shell.

[0010] In this way, by adjusting the thickness distribution of the inner spherical shell, a specific vibration mode can be effectively optimized, and then a more accurate measurement of the axial rotation angle can be achieved. For example, the structural characteristics at the opening at the lower end of the inner spherical shell will have a significant impact on the vibration mode of the spherical resonator. Therefore, increasing the local thickness at the opening at the lower end of the inner spherical shell can effectively improve the vibration mode characteristics of the spherical resonator.

[0011] Further, the outer shell includes: a left outer shell and a right outer shell. The left outer shell and the right outer shell can completely wrap the spherical resonator when combined, and the outer shape is a cuboid.

[0012] Further, the several electrodes 5 are arranged on the outside of the spherical resonator 1, in the shape of arc tiles, and are divided into three groups. One group is the equatorial electrodes 17, and there are eight electrodes in this group distributed on the equator of the spherical resonator 1, with an angular interval of 45 degrees between each electrode. The second group is the upper hemisphere electrodes 18, and there are four electrodes in this group distributed on the upper hemisphere at 45 degrees, with an angular interval of 90 degrees between each electrode. The third group is the lower hemisphere electrodes 19, and there are four electrodes in this group distributed on the lower hemisphere at 45 degrees, with an angular interval of 90 degrees between each electrode.

[0013] In this way, the distribution of the electrodes can measure the vibration mode changes of the spherical resonator from multiple angles, and then achieve the measurement of the three axial angles.

[0014] Further, the radius of the inner spherical shell is 1 - 50 mm; the radius of the spherical body in the anchor area is 1 / 4 of the radius of the inner spherical shell, the radius of the base is the same as the radius of the spherical body in the anchor area, and the thickness is 1 / 2 of the radius of the base; the ratio of the length of the first support beam, the U-shaped radius of the U-shaped support beam to the length of the second support beam in the U-shaped support beam is 4:3:4, where the length of the first support beam is 1 / 5 of the radius of the inner spherical shell, and the thickness radius of the U-shaped support beam is 0.025 - 1.2 mm and less than the average radius of the inner spherical shell.

[0015] Further, the several electrodes are in the shape of arc-shaped tiles, centered on the center of the spherical resonator, the corresponding central angle is 20 - 25 degrees, the thickness is 0.20 - 0.25 mm, and the thickness of the capacitance gap is 0.15 - 0.20 mm; the length and width of the cuboid formed by the outer shell are the same, which is 5 - 240 mm, and the height is 2.5 - 130 mm. The length, width, and height of the outer shell need to be greater than the diameter of the inner spherical shell.

[0016] Compared with the prior art, the advantages and beneficial effects of the present invention are as follows:

[0017] (1) The traditional hemispherical resonant gyroscope can only measure the angle in a single axial direction, and there are significant limitations in the measurement dimension. Through structural innovation, the present invention can realize the synchronous measurement of multi-axial angles, expand the range and practicality of angle detection, and meet the multi-dimensional measurement requirements in complex scenarios.

[0018] (2) The existing single-structure MEMS three-axis gyroscope cannot achieve direct angular rate integration output based on the precession principle. However, the present invention breaks through this technical limitation by utilizing the precession principle and realizes the direct integration output of the angular rate, improving the efficiency of data processing.

[0019] (3) The thickness of the inner spherical shell is changed by adjusting the thickness of the inner wall of the inner spherical shell, which can effectively improve the vibration mode characteristics of the spherical resonator. Through the precise control of the vibration mode by thickness adjustment, a more flexible and reliable adjustment path is provided for multi-dimensional dynamic angle detection, enhancing the adaptability and measurement stability of the sensor under complex working conditions. Description of the Drawings

[0020] Figure 1 It is a schematic diagram of the spherical shell resonance structure of a three-axis integrated micro gyroscope with a spherical standing wave three-dimensional precession effect.

[0021] Figure 2 It is a schematic diagram of the inner spherical shell in the present invention.

[0022] Figure 3 It is Figure 2 The A - A cross-sectional view in

[0023] Figure 4Schematic diagram of the support beam in the present invention.

[0024] Figure 5 Top view of the support beam in the present invention.

[0025] Figure 6 Schematic diagram of the electrode distribution in the present invention.

[0026] Figure 7 Schematic diagram of the precession of the spherical harmonic standing wave rotating around the Z axis.

[0027] Figure 8 Schematic diagram of the precession of the spherical harmonic standing wave rotating around the X axis. Specific embodiments

[0028] The following further elaborates on the specific embodiments and working principles of the present invention with reference to the accompanying drawings.

[0029] Example: As Figures 1 to 6 shown, a spherical shell resonance structure of a three-axis integrated micro gyroscope with a spherical standing wave three-dimensional precession effect includes a spherical resonator 1, a plurality of electrodes 2, and a housing. The spherical resonator includes a support column 6 and an inner spherical shell 5. The support column 6 includes a plurality of U-shaped support beams 10, an anchor sphere 9, a base 7, and a base support 8. One end of the U-shaped support beam 10 is connected to the anchor sphere 9, and the other end is in direct contact with the inner spherical shell 5. And the endpoints of the U-shaped support beam 10 are connected to form a regular tetrahedron. One end of the base support 8 is connected to the anchor sphere 9, and the other end is connected to the base 7. And the support column is a symmetric structure.

[0030] The U-shaped support beam 10 includes: a first support cantilever 16, a first U-shaped support cantilever 13, a second U-shaped support cantilever 14, a third U-shaped support cantilever 15, and a second support cantilever 12. The first support cantilever 16 is connected to the anchor sphere 9, and the other end is connected to one end of the first U-shaped support cantilever 13, the second U-shaped support cantilever 14, and the third U-shaped support cantilever 15. At the same time, the first U-shaped support cantilever 13, the second U-shaped support cantilever 14, and the third U-shaped support cantilever 15 are spaced 120 degrees apart respectively. The other ends of the first U-shaped support cantilever 13, the second U-shaped support cantilever 14, and the third U-shaped support cantilever 15 are connected to the second support cantilever 12. The other end of the second support cantilever 12 is in contact with the inner spherical shell 5. The endpoints of the U-shaped support beam 10 are connected to form a regular tetrahedron. The U-shaped support beam 10, the anchor sphere 9, the base 7, and the base support 8 are an integral body and need to be integrally manufactured during processing.

[0031] The inner spherical shell 5 is configured in a form with a non-uniform thickness distribution, and an opening structure for the support column to pass through is provided at its lower end, where the lower boundary of the hole coincides with the upper boundary of the base. In implementation, the non-uniform thickness distribution state can be achieved by adjusting the inner wall thickness of the inner spherical shell, such as Figure 3 As shown, the inner curved surface of the inner spherical shell is fitted by a multi-order spherical harmonic function.

[0032] Spherical harmonic function expression:

[0033]

[0034] where θ is the polar angle, is the azimuth angle.

[0035] The several electrodes 2 are arranged outside the spherical resonator 1, in the shape of arc tiles, and are divided into three groups. One group is the equatorial electrodes 17, and there are eight electrodes in this group distributed on the equator of the spherical resonator 1, with an angular interval of 45 degrees between each electrode. The second group is the upper hemisphere electrodes 18, and there are four electrodes in this group distributed on the upper hemisphere at 45 degrees, with an angular interval of 90 degrees between each electrode. The third group is the lower hemisphere electrodes 19, and there are four electrodes in this group distributed on the lower hemisphere at 45 degrees, with an angular interval of 90 degrees between each electrode. The capacitance gap 11 is between the outer wall of the spherical resonator 1 and the inner wall of the electrode.

[0036] The outer shell includes: the left outer shell 3 and the right outer shell 4. The left outer shell 3 and the right outer shell 4 are combined to completely wrap the spherical resonator, and the outer shape is a cuboid.

[0037] The spherical resonator 1 has five different vibration modes. When the whole structure rotates, the vibration mode of the sphere will change accordingly. Utilizing the spatial precession characteristics of the spherical harmonic standing wave under the action of multi-degree-of-freedom inertial forces, the distance between the spherical resonator 1 and the electrode 2 will change. Therefore, the angular rate can be directly integrated and output through the precession principle. At the same time, because the whole structure can rotate around the X-axis, Y-axis, and Z-axis, the angular velocities of rotation around the three axes can be measured, improving the drawback that the hemispherical resonator can only measure the angular velocity of single-axis rotation. Such as Figure 7 and Figure 8 As shown, when the overall structure rotates around the Z-axis and the X-axis, due to the spatial precession characteristics of the spherical harmonic standing wave under the action of multi-degree-of-freedom inertial forces, the vibration mode will produce corresponding precession. From time t0 to time t2, the precession of the vibration mode causes the distance from the electrode to change, so that the corresponding angular velocity magnitude and motion direction can be obtained.

[0038] Preferably, the inner spherical shell has a radius of 4 mm; the radius of the spherical body in the anchor area is 1 mm, the radius of the base is 1 mm, and the thickness is 0.5 mm; the length of the first support beam in the U-shaped support beam is 0.8 mm, the U-shaped radius of the U-shaped support beam is 0.6 mm, the length of the second support beam is 0.8 mm, and the thickness radius of the U-shaped support beam is 0.1 mm;

[0039] Preferably, the plurality of electrodes are in the shape of arc-shaped tiles. Based on the center of the spherical resonator, the corresponding central angle is 20 degrees, the thickness is 0.2 mm, and the thickness of the capacitance gap is 0.2 mm; the length, width, and height of the cuboid formed by the outer shell are 20 mm * 20 mm * 11 mm.

[0040] It should be noted that the above embodiments are not used to limit the protection scope of the present invention. Any equivalent transformation or substitution made on the basis of the above technical solutions falls within the protection scope of the claims of the present invention.

Claims

1. A spherical shell resonance structure of a three-axis integrated micro gyroscope for the three-dimensional precession effect of spherical standing waves, characterized in that: It includes a spherical resonator 1, several electrodes 2 and a housing. A support column 6 is arranged at the center of the spherical resonator, and the outer layer of the spherical resonator is an inner spherical shell 5. The several electrodes 2 are arranged outside the spherical resonator. There is a capacitance gap between the outer wall of the spherical resonator and the inner wall of the electrode. One electrode is placed every 45 degrees around the equator of the resonator, and one electrode is placed every 90 degrees at 45 degrees of the upper and lower hemispheres. Among them, the electrodes are embedded on the housing.

2. The spherical shell resonance structure of a three-axis integrated micro gyroscope with the three-dimensional precession effect of spherical standing waves as described in claim 1, characterized in that: The support column 6 includes: several U-shaped support beams 10, an anchor area sphere 9, a base 7 and a base support 8. One end of the U-shaped support beam is connected to the anchor area sphere, and the other end is in direct contact with the inner spherical shell 5. The endpoints of the U-shaped support beams are connected to form a regular tetrahedron. One end of the base support is connected to the anchor area sphere, and the other end is connected to the base. The support column is a symmetric structure.

3. The spherical resonator structure of the three-axis integrated micro gyroscope with the three-dimensional precession effect of the spherical standing wave as described in claim 2, characterized in that: The U-shaped support beam includes a first support cantilever, a first U-shaped support cantilever, a second U-shaped support cantilever, a third U-shaped support cantilever and a second support cantilever. The first support cantilever is connected to the anchor area sphere, and the other end is connected to one ends of the first U-shaped support cantilever, the second U-shaped support cantilever and the third U-shaped support cantilever. At the same time, the first U-shaped support cantilever, the second U-shaped support cantilever and the third U-shaped support cantilever are spaced 120 degrees from each other. The other ends of the first U-shaped support cantilever, the second U-shaped support cantilever and the third U-shaped support cantilever are all connected to the second support cantilever. The other end of the second support cantilever is in contact with the inner spherical shell.

4. The spherical shell resonance structure of a three-axis integrated micro gyroscope with a spherical standing wave three-dimensional precession effect as described in claim 1, characterized in that: The housing includes a left housing and a right housing. The left housing and the right housing are combined to completely wrap the spherical resonator, and the outer shape is a cuboid.

5. The spherical shell resonance structure of a three-axis integrated micro gyroscope with a spherical standing wave three-dimensional precession effect as described in claim 2, characterized in that: Among them, the U-shaped support beam, the anchor area sphere and the base are an integral whole and need to be integrally manufactured during processing.

6. The spherical shell resonance structure of a three-axis integrated micro gyroscope with the three-dimensional precession effect of a spherical standing wave as described in claim 1, characterized in that, The several electrodes are arranged outside the spherical resonator, in the shape of arc-shaped tiles, and are divided into three groups. One group is the equatorial electrodes. There are eight electrodes in this group distributed on the equator of the spherical resonator, and the angular interval between each electrode is 45 degrees. The second group is the upper hemisphere electrodes. There are four electrodes in this group distributed on the upper hemisphere at 45 degrees, and the angular interval between each electrode is 90 degrees. The third group is the lower hemisphere electrodes. There are four electrodes in this group distributed on the lower hemisphere at 45 degrees, and the angular interval between each electrode is 90 degrees.

7. The spherical shell resonance structure of a three-axis integrated micro gyroscope with a spherical standing wave three-dimensional precession effect according to claim 1, characterized in that, The inner spherical shell is constructed in a form with non-uniform thickness distribution, and an opening structure for the support column to pass through is provided at its lower end. Among them, the lower boundary of the hole coincides with the upper boundary of the base.

8. The spherical shell resonance structure of a three-axis integrated micro gyroscope with spherical standing wave three-dimensional precession effect according to claim 2, characterized in that, The radius of the inner spherical shell is 1 - 50 mm; the radius of the anchor area sphere is 1 / 4 of the radius of the inner spherical shell. The radius of the base is the same as the radius of the anchor area sphere, and the thickness is 1 / 2 of the radius of the base. The ratio of the length of the first support cantilever, the U-shaped radius of the U-shaped support cantilever and the length of the second support cantilever in the U-shaped support beam is 4:3:

4. Among them, the length of the first support cantilever is 1 / 5 of the radius of the inner spherical shell. The thickness radius of the U-shaped support beam is 0.025 - 1.2 mm, and is less than the average radius of the inner spherical shell.

9. The spherical shell resonance structure of a three-axis integrated micro gyroscope with the three-dimensional precession effect of a spherical standing wave as described in claim 1, characterized in that, The several electrodes are in the shape of arc-shaped tiles. Based on the center of the spherical resonator, the corresponding central angle is 20 to 25 degrees, the thickness is 0.20 to 0.25 mm, and the thickness of the capacitance gap is 0.15 to 0.20 mm. The length and width of the cuboid formed by the outer shell are the same, which is 5 to 240 mm, and the height is 2.5 to 130 mm. The length, width, and height of the outer shell need to be greater than the diameter of the inner spherical shell.

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