Hydraulic pneumatic conversion device suitable for target material backboard water channel detection and use method

Abstract

The invention provides a water pressure pneumatic conversion device suitable for target material backboard water channel detection and a use method. The water pressure pneumatic conversion device suitable for target material backboard water channel detection comprises a main body, and a telescopic column body, a blocking ring, a guide rod, a sealing device and an elastic component which are sequentially arranged in the main body; a hole channel is formed in the side, away from the blocking ring, of the telescopic column body of the body. The hole channel is connected with an access port of a water pressure device; a target material access port is formed in one side, perpendicular to the guide rod, of the main body, and an air compression device access port is formed in the other side of the main body. The water pressure pneumatic conversion device suitable for target material backboard water channel detection is reasonable in structural design and simple in use method, the water pressure detection cost is reduced, and the water pressure detection efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor target materials, and particularly relates to a water pressure pneumatic conversion device suitable for detecting the water channels on the target backplane and a usage method thereof. Background Art

[0002] When the water channels on the target backplane complete the water pressure detection, it is necessary to close the water inlet valve, open the water outlet valve and the liquid extraction pump, drain the water, and then use a water blowing device to blow the water in the water channels clean.

[0003] CN118730745A discloses a water pressure detection device and a backplane water pressure test method. During the test, the liquid delivery pipe of the test liquid is connected to the liquid inlet, and the liquid outlet is connected to the liquid extraction pump etc. through the liquid discharge pipe. Then, the control module controls the valve on the liquid delivery pipe to open according to the detection requirements, and the test liquid enters the test cavity through the liquid delivery pipe and the liquid inlet to introduce a certain amount of test liquid into the test cavity; when the pressure test piece determines that the pressure value in the test cavity reaches the preset pressure value, the control module controls the valve on the liquid delivery pipe to close to stop introducing the test liquid into the test cavity; after the test is completed, the control module controls the liquid extraction pump to start to extract the test liquid in the test cavity. Among them, the preset pressure value is the pressure value that the backplane to be detected needs to bear during use. However, the above water pressure detection equipment for the water channels on the target backplane has many accessories and complex operations.

[0004] CN222336629U discloses a water pressure detection device for water pipes; it includes a water pressure detection device body, a base, a detection module, a connection part and two groups of fixing components. The detection module is arranged on the base, the connection part is connected to the detection module, and the water pressure detection device body is connected to the connection part. The fixing component includes a pull block, a sliding rod, a slider, a limiting arc block and a limiting spring. The sliding rod is slidably connected to the water pressure detection device body, the slider is fixedly connected to one end of the sliding rod, the pull block is fixedly connected to the other end of the sliding rod, the two ends of the limiting spring are respectively fixedly connected to the slider and the water pressure detection device body and sleeved outside the sliding rod, and the limiting arc block is fixedly connected to the slider and located on the outer side wall of the slider. The limiting arc block is also adapted to the limiting hole, realizing the ability to quickly install or disassemble the detection module and the water pressure detection device body, greatly reducing manpower and time, and having simple operation. However, this water pressure detection device is not suitable for the water pressure detection of the water channels on the target backplane.

[0005] CN222110804U discloses a water pressure detection device inside a fire-fighting equipment, which includes a fire-fighting pipe body assembly. The water pressure in the fire-fighting pipe body assembly is directly detected by a second water pressure detection assembly. By the valve body action on the fire-fighting pipe body assembly and the diversion assembly, the pressurized water introduced into the fire-fighting pipe body assembly flows into the first water pressure detection assembly for detection. The secondary detection can analogize the water pressure data to obtain more accurate results. At the same time, both the first water pressure detection assembly and the second water pressure detection assembly are convenient for disassembly and installation, solving the problem that the water pressure detection structure of fire-fighting equipment usually needs regular maintenance and detection, and the disassembly and installation of the water pressure detection structure inside the equipment are inconvenient. However, this water pressure detection device is not suitable for the water pressure detection of the water channel on the target backplane.

[0006] Therefore, it is of great significance to provide a water pressure detection device with simple operation, few equipment accessories, high detection efficiency and suitable for the water pressure detection of the water channel on the target backplane. Summary of the Invention

[0007] In view of the problems existing in the prior art, the present invention provides a water pressure-pneumatic conversion device and a usage method suitable for the water channel detection of the target backplane. By sequentially arranging a telescopic cylinder, a stop ring, a guide rod, a sealing device and an elastic component inside the main body, the water pressure detection device and the compressed air device are integrated together, replacing the inlet valve and the liquid extraction pump in the existing water pressure detection device for the water channel on the target backplane. The device has few accessories and simple operation, and is suitable for wide promotion and application.

[0008] To achieve this purpose, the present invention adopts the following technical solutions:

[0009] In a first aspect, the present invention provides a water pressure-pneumatic conversion device suitable for the water channel detection of the target backplane. The water pressure-pneumatic conversion device suitable for the water channel detection of the target backplane includes a main body and a telescopic cylinder, a stop ring, a guide rod, a sealing device and an elastic component sequentially arranged inside the main body; the main body is provided with a hole on the side of the telescopic cylinder away from the stop ring; the hole is connected to the water pressure device inlet; the main body is provided with a target inlet on one side perpendicular to the guide rod and an air compression device inlet on the other side.

[0010] The water pressure - pneumatic conversion device applicable to the water channel detection of the target backplane in the present invention includes a main body and a telescopic cylinder, a blocking ring, a guide rod, a sealing device, and an elastic component that are sequentially arranged inside the main body. It realizes the integration of a water pressure detection device and a compressed air device, is used to replace the water inlet valve of the existing water pressure detection device, and at the same time removes the liquid extraction pump of the existing water pressure detection device. The device is simple to operate, improving the detection efficiency and production efficiency. The water pressure - pneumatic conversion device applicable to the water channel detection of the target backplane in the present invention can be driven only by the pressure difference, and belongs to an environmentally friendly and easy - to - operate device. The water pressure - pneumatic conversion device applicable to the water channel detection of the target backplane in the present invention can be used for the detection of water channels on the backplane of circular targets and can also be used for the detection of water channels on the backplane of square targets, having universality.

[0011] The target access port described in the present invention is connected to the water channel on the target backplane.

[0012] Preferably, the number of the guide rods is at least 4, for example, it can be 4, 5, 6, etc.

[0013] Preferably, a metal cylinder is arranged between the guide rods.

[0014] Preferably, a first limit block and a second limit block are symmetrically arranged inside the main body.

[0015] Preferably, the first limit block is arranged below the target access port.

[0016] Preferably, the first limit block and the second limit block jointly prevent the blocking ring from moving away from the target access port.

[0017] The first limit block and the second limit block in the present invention do not affect the movement of the guide rod and the metal cylinder.

[0018] Preferably, the length of the moving area of the blocking ring is greater than the diameter of the target access port.

[0019] After the water pressure device in the present invention is started, water flows into the main body through the pore, pushing the blocking ring, the metal cylinder, the guide rod, and the sealing device to move rightward to compress the elastic component. The water flows into the water channel on the target backplane along the target access port for water pressure testing. After the test, the water pressure device is closed; then the air compression device is started, and compressed air enters the main body through the air compression device access port. The blocking ring moves leftward under the action of the compressed air; at the same time, the metal cylinder, the guide rod, and the sealing device move leftward synchronously with the blocking ring under the action of the elastic component. After the compressed air blows the water in the water channel along the target access port and blows it clean, the air compression device is closed.

[0020] Preferably, the air compression device access port is arranged between the second limit block and the sealing device.

[0021] Preferably, the telescopic cylinder includes a hollow stainless steel cylinder.

[0022] Preferably, the sealing device includes a sealing ring.

[0023] Preferably, the elastic member includes a spring.

[0024] In a second aspect, the present invention also provides a method for using a water pressure-pneumatic conversion device applicable to the detection of the water channels on the target substrate backplane as described in the first aspect. The method includes the following steps:

[0025] (1) Connect the water channels on the target substrate backplane to be inspected, the water pressure device, and the air compression device to the water pressure-pneumatic conversion device applicable to the detection of the water channels on the target substrate backplane respectively;

[0026] (2) Start the water pressure device. Water flows into the main body through the channels, pushing the blocking ring, metal cylinder, guide rod, and sealing device to move to the right to compress the elastic member until the water flows from the target access port into the water channels on the target substrate backplane;

[0027] (3) Keep the pressure after the water pressure is stable to complete the water pressure detection of the water channels on the target substrate backplane;

[0028] (4) Turn off the water pressure device and start the air compression device. The blocking ring moves to the left under the action of compressed air; at the same time, the metal cylinder, guide rod, and sealing device move to the left synchronously with the blocking ring under the action of the elastic member;

[0029] (5) Compressed air enters the water channels on the target substrate backplane from the target access port. After blowing the water in the water channels clean, turn off the compression device.

[0030] The method for using the water pressure-pneumatic conversion device applicable to the detection of the water channels on the target substrate backplane described in the present invention is simple to operate. First, start the water pressure device to perform water pressure detection on the water channels on the target substrate backplane, and then start the air compression device to dry the water in the water channels on the target substrate backplane, improving the target detection efficiency and production efficiency.

[0031] Preferably, the water pressure generated by the water pressure device in step (2) is 10 - 25 MPa. For example, it can be 10 MPa, 11 MPa, 12 MPa, 15 MPa, 17 MPa, 20 MPa, or 25 MPa, etc., but is not limited to the listed values. Other unlisted values within this numerical range are equally applicable.

[0032] Preferably, the pressure holding time in step (3) is 5 - 10 min. For example, it can be 5 min, 5.5 min, 6 min, 6.5 min, 7 min, 8 min, or 10 min, etc., but is not limited to the listed values. Other unlisted values within this numerical range are equally applicable.

[0033] Preferably, the continuous introduction time of the compressed air in step (5) is 1 to 3 minutes. For example, it can be 1 minute, 1.5 minutes, 2 minutes, 2.5 minutes, 2.8 minutes, 3 minutes, etc., but is not limited to the listed values, and other unlisted values within this numerical range are equally applicable.

[0034] As a preferred technical solution of the present invention, the usage method includes the following steps:

[0035] (1) Connect the water channel, water pressure device, and air compression device on the backplane of the target to be inspected to the water pressure-pneumatic conversion device applicable to the water channel detection of the target backplane respectively;

[0036] (2) Start the water pressure device to generate a water pressure of 10 to 25 MPa. The water flow enters the main body through the hole, pushing the blocking ring, metal column, guide rod, and sealing device to move to the right to compress the elastic component until the water flow enters the water channel on the target backplane from the target access port;

[0037] (3) Keep the pressure for 5 to 10 minutes after the water pressure is stable to complete the water pressure detection of the water channel on the target backplane;

[0038] (4) Close the water pressure device and start the air compression device. The blocking ring moves to the left under the action of the compressed air; at the same time, the metal column, guide rod, and sealing device move to the left synchronously with the blocking ring under the action of the elastic component;

[0039] (5) The compressed air enters the water channel on the target backplane from the target access port and is continuously introduced for 1 to 3 minutes. After blowing the water in the water channel clean, close the air compression device.

[0040] Compared with the prior art, the present invention has at least the following beneficial effects:

[0041] (1) The water pressure-pneumatic conversion device applicable to the water channel detection of the target backplane provided by the present invention replaces the water inlet valve of the water pressure detection device in the prior art, eliminating the need to set up a liquid extraction pump and reducing the cost of water pressure detection;

[0042] (2) The water pressure-pneumatic conversion device applicable to the water channel detection of the target backplane provided by the present invention has a simple structure and reasonable design, can be quickly assembled and disassembled, improves the water pressure detection efficiency of the water channel on the target backplane and the target production efficiency, and is suitable for wide promotion and application. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] Figure 1 It is a sectional view of the water pressure-pneumatic conversion device applicable to the water channel detection of the target backplane after the water pressure device is started in Embodiment 1 of the present invention.

[0044] Figure 2It is a sectional view of the device after the air compression device of the water pressure - pneumatic conversion device applicable to the water channel detection of the target backplane in Embodiment 1 of the present invention is started.

[0045] Figure 3 It is a three - dimensional exploded view of the water pressure - pneumatic conversion device applicable to the water channel detection of the target backplane in Embodiment 1 of the present invention.

[0046] In the figure: 1 - main body; 2 - telescopic cylinder; 3 - blocking ring; 4 - guide rod; 5 - sealing device; 6 - elastic component; 7 - pore passage; 8 - target access port; 9 - air compression device access port; 10 - metal cylinder; 11 - first limit block; 12 - second limit block; 13 - water pressure device access port. Detailed implementation manners

[0047] The technical solution of the present invention will be further described below in conjunction with the accompanying drawings and through specific implementation manners.

[0048] The present invention will be further described in detail below. However, the following examples are only simple examples of the present invention and do not represent or limit the scope of the protection of the rights of the present invention. The scope of protection of the present invention is subject to the claims.

[0049] It should be understood that in the description of the present invention, the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, so it cannot be understood as a limitation of the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first", "second", etc. may explicitly or implicitly include one or more of such features. In the description of the present invention, unless otherwise stated, the meaning of "a plurality" is two or more.

[0050] It should be noted that in the description of the present invention, unless otherwise clearly defined and limited, the terms "set", "connected", "connected to" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood through specific situations.

[0051] Those skilled in the art should understand that the present invention necessarily includes the necessary pipelines, conventional valves, and general pump equipment for realizing the complete process. However, the above contents do not belong to the main inventive points of the present invention. Those skilled in the art can add and arrange them by themselves based on the process flow and equipment structure selection, and the present invention does not make special requirements and specific limitations on this.

[0052] Embodiment 1

[0053] This embodiment provides a water pressure-pneumatic conversion device applicable to the water channel detection of the target backplane. The sectional view of the device after the water pressure device is started is as shown in Figure 1 shown; the sectional view of the device after the air compression device is started is as shown in Figure 2 shown; its three-dimensional disassembly schematic diagram is as shown in Figure 3 shown.

[0054] The water pressure-pneumatic conversion device applicable to the water channel detection of the target backplane includes a main body 1 and a telescopic cylinder 2, a blocking ring 3, a guide rod 4, a sealing device 5, and an elastic member 6 that are sequentially arranged inside the main body 1; a hole 7 is provided on the side of the main body 1 away from the blocking ring 3 of the telescopic cylinder 2; the hole 7 is connected to the water pressure device access port 13; a target access port 8 is provided on one side of the main body 1 perpendicular to the guide rod 4, and an air compression device access port 9 is provided on the other side.

[0055] The number of the guide rods 4 is 4;

[0056] A metal cylinder 10 is arranged between the guide rods 4.

[0057] First limit blocks 11 and second limit blocks 12 are symmetrically arranged inside the main body 1;

[0058] The first limit block 11 is arranged below the target access port 8;

[0059] The first limit block 11 and the second limit block 12 together prevent the blocking ring 3 from moving away from the target access port 8;

[0060] The length of the moving area of the blocking ring 3 is greater than the diameter of the target access port 8;

[0061] The air compression device access port 9 is arranged between the second limit block 12 and the sealing device 5.

[0062] The telescopic cylinder 2 includes a hollow stainless steel cylinder.

[0063] The sealing device 5 includes a sealing ring.

[0064] The elastic member 6 includes a spring.

[0065] This embodiment also provides a method for using the above-mentioned water pressure-pneumatic conversion device applicable to the water channel detection of the target backplane. The method includes the following steps:

[0066] (1) Connect the water channels on the target backplane to be inspected, the water pressure device, and the air compression device to the water pressure-pneumatic conversion device applicable to the water channel detection of the target backplane respectively;

[0067] (2) Start the water pressure device to generate a water pressure of 10 MPa. The water flow enters the main body 1 through the hole 7, pushing the blocking ring 3, the metal cylinder 10, the guide rod 4, and the sealing device 5 to move to the right to compress the elastic component 6 until the water flow enters the water channel on the target backplane from the target connection port 8;

[0068] (3) Keep the pressure for 5 minutes after the water pressure is stable to complete the water pressure detection of the water channel on the target backplane;

[0069] (4) Turn off the water pressure device and start the air compression device. The blocking ring 3 moves to the left under the action of the compressed air; at the same time, the metal cylinder 10, the guide rod 4, and the sealing device 5 move to the left synchronously with the blocking ring 3 under the action of the elastic component 6;

[0070] (5) Compressed air enters the water channel on the target backplane from the target connection port 8 and is continuously introduced for 1 minute. After blowing the water in the water channel clean, turn off the air compression device.

[0071] Embodiment 2

[0072] This embodiment provides a water pressure-pneumatic conversion device applicable to the water channel detection of the target backplane. The water pressure-pneumatic conversion device applicable to the water channel detection of the target backplane is the same as that in Embodiment 1 except that the number of guide rods is 4.

[0073] This embodiment also provides a method for using the above-mentioned water pressure-pneumatic conversion device applicable to the water channel detection of the target backplane. The method includes the following steps:

[0074] (1) Connect the water channels on the target backplane to be inspected, the water pressure device, and the air compression device to the water pressure-pneumatic conversion device applicable to the water channel detection of the target backplane respectively;

[0075] (2) Start the water pressure device to generate a water pressure of 15 MPa. The water flow enters the main body through the hole, pushing the blocking ring, the metal cylinder, the guide rod, and the sealing device to move to the right to compress the elastic component until the water flow enters the water channel on the target backplane from the target connection port;

[0076] (3) Keep the pressure for 8 minutes after the water pressure is stable to complete the water pressure detection of the water channel on the target backplane;

[0077] (4) Close the water pressure device and start the air compression device. Under the action of the compressed air, the blocking ring moves to the left; at the same time, the metal cylinder, the guide rod and the sealing device move to the left synchronously with the blocking ring under the action of the elastic component.

[0078] (5) The compressed air enters the water channel on the target backplane from the target material inlet and is continuously introduced for 2 minutes. After blowing the water in the water channel clean, the air compression device is closed.

[0079] Example 3

[0080] This example provides a water pressure and pneumatic conversion device applicable to the water channel detection of the target backplane. Except that the number of guide rods is 5, the rest are the same as those in Example 1.

[0081] This example also provides a usage method of the above-mentioned water pressure and pneumatic conversion device applicable to the water channel detection of the target backplane. The usage method includes the following steps:

[0082] (1) Connect the water channel, the water pressure device and the air compression device on the target backplane to be inspected to the water pressure and pneumatic conversion device applicable to the water channel detection of the target backplane respectively.

[0083] (2) Start the water pressure device to generate a water pressure of 25 MPa. The water flow enters the main body through the hole, pushes the blocking ring, the metal cylinder, the guide rod and the sealing device to move to the right to compress the elastic component until the water flow enters the water channel on the target backplane from the target material inlet.

[0084] (3) Keep the pressure for 10 minutes after the water pressure is stable to complete the water pressure detection of the water channel on the target backplane.

[0085] (4) Close the water pressure device and start the air compression device. Under the action of the compressed air, the blocking ring moves to the left; at the same time, the metal cylinder, the guide rod and the sealing device move to the left synchronously with the blocking ring under the action of the elastic component.

[0086] (5) The compressed air enters the water channel on the target backplane from the target material inlet and is continuously introduced for 3 minutes. After blowing the water in the water channel clean, the air compression device is closed.

[0087] In summary, the water pressure and pneumatic conversion device applicable to the water channel detection of the target backplane provided by the present invention has a reasonable design and is convenient to use. It replaces the water inlet valve of the water pressure detection device in the prior art, eliminates the need to set up a liquid extraction pump, integrates the water pressure detection of the water channel on the target backplane and the compressed air device, reduces the water pressure detection cost of the water channel on the target backplane; moreover, the water pressure and pneumatic conversion device applicable to the water channel detection of the target backplane can be quickly assembled and disassembled, improving the water pressure detection efficiency of the water channel on the target backplane and the target production efficiency, and is suitable for wide range of popularization and application.

[0088] The applicant declares that the detailed structural features of the present invention are illustrated by the above embodiments, but the present invention is not limited to the above detailed structural features, that is, it does not mean that the present invention must rely on the above detailed structural features to be implemented. Those skilled in the art should understand that any improvement to the present invention, the equivalent replacement of the components selected for the present invention, the addition of auxiliary components, the selection of specific methods, etc. all fall within the protection scope and the disclosure scope of the present invention.

[0089] The preferred embodiments of the present invention have been described in detail above. However, the present invention is not limited to the specific details in the above embodiments. Within the scope of the technical concept of the present invention, various simple modifications can be made to the technical solution of the present invention, and these simple modifications all belong to the protection scope of the present invention.

Claims

1. A hydraulic-pneumatic conversion device applicable to the detection of the water channels on the backplate of a target, characterized in that, The water pressure-pneumatic conversion device applicable to the water channel detection of the target backplane includes a main body and a telescopic cylinder, a blocking ring, a guide rod, a sealing device, and an elastic member that are sequentially arranged inside the main body; a hole is provided on one side of the main body away from the blocking ring of the telescopic cylinder; the hole is connected to the water pressure device inlet; a target inlet is provided on one side of the main body perpendicular to the guide rod, and an air compression device inlet is provided on the other side.

2. The hydraulic-pneumatic conversion device applicable to the water channel detection of the target backplane according to claim 1, wherein, The number of the guide rods is at least 4. Preferably, a metal cylinder is arranged between the guide rods.

3. The hydraulic-pneumatic conversion device applicable to the water channel detection of the target backplane according to claim 1 or 2, characterized in that, A first limit block and a second limit block are symmetrically arranged inside the main body. Preferably, the first limit block is arranged below the target inlet. Preferably, the first limit block and the second limit block jointly prevent the blocking ring from moving away from the target inlet. Preferably, the length of the moving area of the blocking ring is greater than the diameter of the target inlet. Preferably, the air compression device inlet is arranged between the second limit block and the sealing device.

4. The hydraulic-pneumatic conversion device applicable to the water channel detection of the target backplane according to any one of claims 1 to 3, characterized in that The telescopic cylinder includes a hollow stainless steel cylinder.

5. The hydraulic-pneumatic conversion device applicable to the water channel detection of the target backplane according to any one of claims 1 to 4, characterized in that, The sealing device includes a sealing ring.

6. The hydraulic-pneumatic conversion device applicable to the water channel detection of the target backplane according to any one of claims 1 to 5, characterized in that, The elastic member includes a spring.

7. A method for using a water pressure-pneumatic conversion device applicable to the water channel detection of a target backplane as described in any one of claims 1 to 6, characterized in that, The usage method includes the following steps: (1) Connect the water channel on the target backplane to be inspected, the water pressure device, and the air compression device to the water pressure-pneumatic conversion device applicable to the water channel detection of the target backplane respectively. (2) Start the water pressure device, and the water flow enters the main body through the hole, pushing the blocking ring, the metal cylinder, the guide rod, and the sealing device to move rightward to compress the elastic member until the water flow enters the water channel on the target backplane from the target inlet. (3) Keep the pressure after the water pressure is stable to complete the water pressure detection of the water channel on the target backplane. (4) Turn off the water pressure device and start the air compression device. The blocking ring moves leftward under the action of the compressed air; at the same time, the metal cylinder, the guide rod, and the sealing device move leftward synchronously with the blocking ring under the action of the elastic member. (5) The compressed air enters the water channel on the target backplane from the target inlet, blows the water in the water channel clean, and then turn off the air compression device.

8. The usage method according to claim 7, characterized in that, The water pressure generated by the water pressure device in step (2) is 10 - 25 MPa.

9. The method of use according to claim 7 or 8, characterized in that, The pressure holding time in step (3) is 5 - 10 min.

10. The use method according to any one of claims 7 to 9, characterized in that, The continuous feeding time of the compressed air in step (5) is 1 - 3 min.

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