Deep Raman-LIBS (laser-induced breakdown spectroscopy) combined remote detection method and device

Abstract

The invention discloses a deep Raman-LIBS (laser-induced breakdown spectroscopy) combined remote detection method and device, and belongs to the technical field of spectrum detection. According to the deep Raman-LIBS combined remote detection method, a remote deep Raman spectrum and remote LIBS are combined, substance element information is obtained by utilizing an LIBS spectrum, and component information of hidden substances is obtained by utilizing the deep Raman spectrum, so that accurate recognition of deep substances is realized. The deep Raman-LIBS combined remote detection device comprises a light source system, a dichroic light splitting system, a long-focus optical system, a first reflecting mirror, a reflecting system, a detected sample, a filtering system, a first convergent mirror and a spectrum detection system, wherein the dichroic light splitting system and the long-focus optical system are positioned in the reflection direction of the light splitting system; the first reflecting mirror and the reflecting system are positioned in the transmission direction of the light splitting system; when the reflection system is a galvanometer, detection of different depths is achieved by adjusting the deflection angle of the galvanometer. When the spectrum detection system is composed of an optical fiber spectrometer, detection of different depths is achieved by adjusting the annular size of a connecting optical fiber bundle. The method has the advantages of multi-spectrum combination, deep penetration, remote detection and the like.

Description

Technical Field

[0001] The present invention belongs to the field of spectral detection, and relates to a method and device for remote detection by combining deep Raman-LIBS. Background Art

[0002] In laser Raman spectroscopy detection technology, various information such as the spectral line position, spectral peak intensity, and width of the excitation spectrum can be detected to obtain various information such as the chemical bonds and molecular structure of the sample, and then the molecular component information of the substance can be obtained. In laser LIBS detection technology, by detecting the atomic and ionic spectral lines in the laser-induced plasma, the atomic and small molecule elemental composition information of the substance can be obtained.

[0003] Raman spectroscopy can be used for qualitative and quantitative detection of organic and inorganic substances, but it is not sensitive to elements such as metal elements (such as aluminum and iron); LIBS is suitable for full-element analysis and has advantages especially in the detection of metal elements, but it cannot provide molecular structure information. It can be seen that both have their unique advantages and limitations. Therefore, combining the two can complement these deficiencies and achieve more comprehensive sample characteristic analysis. However, the existing Raman-LIBS combined technology can only detect surface substances and it is difficult to obtain the component information of deep substances, thus restricting the further application of the spectral combined technology. Summary of the Invention

[0004] In order to overcome the deficiencies of the prior art, the purpose of the present invention is to provide a method and device for remote detection by combining deep Raman-LIBS, which combines remote deep Raman spectroscopy with remote LIBS, uses LIBS spectroscopy to obtain substance element information, and uses deep Raman spectroscopy to obtain the component information of hidden substances, so as to achieve accurate identification of deep substances. The present invention has advantages such as multi-spectrum combination, deep penetration, and remote detection, and is applicable to fields such as deep space exploration and security inspection.

[0005] The purpose of the present invention is achieved by the following technical solutions.

[0006] The disclosed method for remote detection by combining deep Raman-LIBS of the present invention combines remote deep Raman spectroscopy with remote LIBS, uses LIBS spectroscopy to obtain substance element information, and uses deep Raman spectroscopy to obtain the component information of hidden substances, so as to achieve accurate identification of hidden substances. The specific steps are as follows.

[0007] Step 1: The excitation light emitted from the light source system is reflected by the spectroscopic system and the dichroic spectroscopic system, and then converges on the sample to be measured through the long-focus optical system.

[0008] Step 2: The plasma excited by the sample is collected by the long-focus optical system and returns to the device along the original optical path. After passing through the dichroic spectroscopic system and the filtering system, it is focused on the spectral detection system by the first lens for LIBS detection.

[0009] Step 3: After the excitation light emitted from the light source system passes through the spectroscopic system, it is reflected by the first mirror and the reflection system and then irradiates the sample to be measured.

[0010] Step 4: The Raman scattered light excited by the sample is collected by the long-focus optical system and then returns to the device along the original optical path. After passing through the dichroic spectroscopic system and the filtering system, it is focused by the first condenser lens on the spectral detection system for deep Raman spectroscopy detection.

[0011] Furthermore, the detection depth can be adjusted through the reflection system at the excitation end, or through the spectral detection system at the collection end.

[0012] Furthermore, the long-focus optical system is used to achieve long-distance focusing of the light beam.

[0013] Furthermore, the reflection system is used to emit the Raman excitation light to the sample.

[0014] The deep Raman-LIBS combined remote detection device disclosed by the present invention is used to implement the deep Raman-LIBS combined remote detection method. The deep Raman-LIBS combined remote detection device includes a light source system, a dichroic spectroscopic system and a long-focus optical system located in the reflection direction of the spectroscopic system, a first mirror and a reflection system, a sample to be measured, a filtering system, a first condenser lens, and a spectral detection system located in the transmission direction of the spectroscopic system.

[0015] The excitation light emitted by the light source system is reflected by the spectroscopic system and the dichroic spectroscopic system, and then converges on the sample to be measured through the long-focus optical system.

[0016] The plasma excited by the sample is collected by the long-focus optical system and then returns to the device along the original optical path. After passing through the dichroic spectroscopic system and the filtering system, it is focused by the first lens on the spectral detection system for LIBS detection.

[0017] After the excitation light emitted from the light source system passes through the spectroscopic system, it is reflected by the first mirror and the reflection system and then irradiates the sample to be measured.

[0018] The Raman scattered light excited by the sample is collected by the long-focus optical system and then returns to the device along the original optical path. After passing through the dichroic spectroscopic system and the filtering system, it is focused by the first condenser lens on the spectral detection system for deep Raman spectroscopy detection.

[0019] Preferably, the long-focus optical system includes a Cassegrain optical system, or includes a lens group system.

[0020] More preferably, it further includes a long-focus lens and other systems that can achieve long-distance focusing of the light beam.

[0021] Preferably, the reflection system includes a reflector, or may further include a galvanometer or other devices capable of realizing beam reflection; when the reflection system is a galvanometer, different depths of detection can be achieved by adjusting the deflection angle of the galvanometer.

[0022] Preferably, the spectral detection system is composed of a spatial light input spectrometer, or may further include an optical fiber spectrometer; when the spectral detection system is composed of an optical fiber spectrometer, different depths of detection can be achieved by adjusting the annular size of the connecting optical fiber bundle.

[0023] Beneficial effects:

[0024] The remote depth Raman-LIBS combined remote detection method disclosed by the present invention combines remote depth Raman spectroscopy with remote LIBS, obtains material element information using LIBS spectroscopy, and obtains component information of deep substances using depth Raman spectroscopy, thereby realizing complete component detection of substances at a long distance and high depth. Description of the drawings

[0025] Figure 1 Schematic diagram of the remote detection method and device for depth Raman-LIBS combination of the present invention;

[0026] Figure 2 Schematic diagram of Embodiment 1 of the remote detection method and device for depth Raman-LIBS combination of the present invention;

[0027] Figure 3 Schematic diagram of Embodiment 2 of the remote detection method and device for depth Raman-LIBS combination of the present invention;

[0028] Wherein: 1 - light source system, 2 - beam splitting system, 3 - dichroic beam splitting system, 4 - long focal length optical system, 5 - primary mirror, 6 - secondary mirror, 7 - first reflector, 8 - reflection system, 9 - second reflector, 10 - sample to be measured, 11 - filtering system, 12 - first condenser, 13 - spectral detection system, 14 - optical fiber bundle, 15 - spectrometer, 16 - second condenser, 17 - third condenser, 18 - galvanometer. Detailed implementation manners

[0029] The present invention will be further described below in conjunction with the drawings and embodiments.

[0030] Embodiment 1

[0031] As Figure 2 shown, the remote detection device for depth Raman-LIBS combination disclosed in this embodiment includes a light source system 1, a dichroic beam splitting system 3 and a long focal length optical system 4 located in the reflection direction of the beam splitting system 2, a first reflector 7 and a reflection system 8 located in the transmission direction of the beam splitting system 2, a sample to be measured 10, a filtering system 11, a first condenser 12 and a spectral detection system 13.

[0032] The light source system 1 uses a laser.

[0033] The long focal length optical system 4 uses a Cassegrain optical system composed of a primary mirror 5 and a secondary mirror 6.

[0034] The reflection system 8 uses a reflecting mirror 9.

[0035] The spectral detection system 13 uses a fiber optic spectrometer, including a fiber optic bundle 14 and a spectrometer 15, where the fiber optic bundle is arranged in a circular pattern.

[0036] The deep Raman-LIBS combined remote detection method disclosed in this embodiment realizes Raman spectrum detection at different depths by adjusting the parameters of the collection end. The specific implementation steps are as follows:

[0037] Step 1: The excitation light emitted from the laser 1 is reflected by the beam splitting system 2 and the dichroic beam splitting system 3, and then irradiates the secondary mirror 6 of the long focal length optical system 4 through the circular hole in the middle of the primary mirror 5 of the long focal length optical system 4. After being reflected by the secondary mirror 6 to the primary mirror 5, it is reflected by the primary mirror 5 and exits, and finally focuses on the measured sample 10;

[0038] Step 2: The plasma excited by the sample is collected by the long focal length optical system 4 and returns to the device along the original optical path. After being reflected and collimated by the secondary mirror 6 and the primary mirror 5, it passes through the dichroic beam splitting system 3 and the filtering system 11, and is focused on the spectral detection system 13 by the first focusing mirror 12. It is collected by the spectrometer 15 via the fiber optic bundle 14 for LIBS detection;

[0039] Step 3: The excitation light emitted from the laser 1 passes through the beam splitting system 2 and is then irradiated onto the measured sample 10 after being reflected by the first reflecting mirror 7 and the reflecting mirror 9;

[0040] Step 4: The Raman scattered light excited by the sample is collected by the long focal length optical system 4 and returns to the device along the original optical path. After being reflected and collimated by the secondary mirror 6 and the primary mirror 5, it passes through the dichroic beam splitting system 3 and the filtering system 11, and is focused on the spectral detection system 13 by the first focusing mirror 12. By selecting different annular sizes of the circular arrangement of the fiber optic bundle 14, Raman spectrum detection at different depths is performed.

[0041] Embodiment 2

[0042] As Figure 3 shown, in this example, Raman spectrum detection at different depths is realized by adjusting the parameters of the excitation end.

[0043] In this embodiment, the long focal length optical system 4 includes a second focusing mirror 16 and a third focusing mirror 17. By adjusting the focal lengths of the second focusing mirror 16 and the third focusing mirror 17, long-distance optical focusing is achieved.

[0044] The reflection system 8 uses a galvanometer 18.

[0045] The spectral detection system 13 uses a spatial light input spectrometer, including an optical spectrometer 15.

[0046] The rest of the device is the same as that in Embodiment 1.

[0047] The specific implementation steps of the deep Raman-LIBS combined remote detection method disclosed in this embodiment are as follows:

[0048] Step 1: The excitation light emitted from the laser 1 is reflected by the beam splitting system 2 and the dichroic beam splitting system 3, and then focused on the sample to be measured 10 after passing through the second condenser 16 and the third condenser 17 in the long focal length optical system 4;

[0049] Step 2: The plasma excited by the sample is collected by the long focal length optical system 4 and returned to the device along the original optical path. After being reflected and collimated by the third condenser 17 and the second condenser 16, it passes through the dichroic beam splitting system 3 and the filtering system 11, and is focused by the first condenser 12 on the spectral detection system 13 and collected by the spectrometer 15 for LIBS detection;

[0050] Step 3: The excitation light emitted from the laser 1 passes through the beam splitting system 2, and then is reflected by the first mirror 7 and the galvanometer 18 and irradiated on the sample to be measured 10, and the deflection angle of the galvanometer 18 is adjusted according to application requirements;

[0051] Step 4: The Raman scattered light excited by the sample is collected by the long focal length optical system 4 and returned to the device along the original optical path. After being reflected and collimated by the third condenser 17 and the second condenser 16, it passes through the dichroic beam splitting system 3 and the filtering system 11, and is focused by the first condenser 12 on the spectral detection system 13 and collected by the spectrometer 15 for Raman spectroscopy detection at different depths.

[0052] The specific implementation manners of the present invention have been described above in conjunction with the accompanying drawings, but these descriptions should not be construed as limiting the scope of the present invention. The protection scope of the present invention is defined by the appended claims, and any modification based on the claims of the present invention falls within the protection scope of the present invention.

Claims

1. A deep Raman-LIBS combined remote detection method, characterized in that: Combining remote deep Raman spectroscopy with remote LIBS, using the LIBS spectrum to obtain elemental information of substances and the deep Raman spectrum to obtain component information of hidden substances, to achieve precise identification of hidden substances, specifically including the following steps: Step 1: The excitation light emitted from the light source system (1) is reflected by the spectroscopic system (2) and the dichroic spectroscopic system (3), and then converges onto the sample to be measured (10) through the long-focus optical system (4). Step 2: The plasma excited by the sample is collected by the long-focus optical system (4) and returns to the device along the original optical path. After passing through the dichroic spectroscopic system (3) and the filtering system (11), it is focused on the spectral detection system (13) by the first condenser lens (12) for LIBS detection. Step 3: The excitation light emitted from the light source system (1) passes through the spectroscopic system (2), and after being reflected by the first mirror (7) and the reflection system (8), it irradiates the sample to be measured (10). Step 4: The Raman scattered light excited by the sample is collected by the long-focus optical system (4) and returns to the device along the original optical path. After passing through the dichroic spectroscopic system (3) and the filtering system (11), it is focused on the spectral detection system (13) by the first condenser lens (12) for deep Raman spectroscopy detection.

2. The deep Raman-LIBS combined remote detection method according to claim 1, characterized in that: The detection depth is adjusted through the reflection system (8) at the excitation end.

3. The depth Raman-LIBS combined remote detection method according to claim 1, characterized in that: The detection depth is adjusted through the spectral detection system (13) at the collection end.

4. The depth Raman-LIBS combined remote detection method according to claim 1, characterized in that: The long-focus optical system (4) is used to achieve long-distance focusing of the light beam.

5. The depth Raman-LIBS combined remote detection method according to claim 1, characterized in that: The reflection system (8) is used to emit the Raman excitation light to the sample.

6. A deep Raman-LIBS combined remote detection device for implementing the deep Raman-LIBS combined remote detection method as claimed in claim 1, characterized in that: It includes a light source system (1), a dichroic spectroscopic system (3) located in the reflection direction of the spectroscopic system (2) and a long-focus optical system (4), a first mirror (7) and a reflection system (8) located in the transmission direction of the spectroscopic system (2), a sample to be measured (10), a filtering system (11), a first condenser lens (12), and a spectral detection system (13); The excitation light emitted by the light source system (1) is reflected by the spectroscopic system (2) and the dichroic spectroscopic system (3), and then converges onto the sample to be measured (10) through the long-focus optical system (4). The plasma excited by the sample is collected by the long-focus optical system (4) and returns to the device along the original optical path. After passing through the dichroic spectroscopic system (3) and the filtering system (11), it is focused on the spectral detection system (13) by the first condenser lens (12) for LIBS detection. The excitation light emitted from the light source system (1) passes through the spectroscopic system (2), and after being reflected by the first mirror (7) and the reflection system (8), it irradiates the sample to be measured (10). The Raman scattered light excited by the sample is collected by the long-focus optical system (4) and returns to the device along the original optical path. After passing through the dichroic spectroscopic system (3) and the filtering system (11), it is focused on the spectral detection system (13) by the first condenser lens (12) for deep Raman spectroscopy detection.

7. The depth Raman-LIBS combined remote detection device according to claim 6, characterized in that: The long-focus optical system (4) includes a Cassegrain optical system or includes a lens group system.

8. The deep Raman-LIBS combined remote detection device according to claim 7, characterized in that: It also includes a system for achieving long-distance focusing of the light beam.

9. The depth Raman-LIBS combined remote detection device according to claim 6, wherein: The reflection system (8) includes a mirror or also includes a device for achieving beam reflection; when the reflection system (8) is a galvanometer, different depths of detection are achieved by adjusting the deflection angle of the galvanometer.

10. The deep Raman-LIBS combined remote detection device according to claim 6, characterized in that: The spectral detection system (13) includes a space light input type spectrometer or also includes an optical fiber spectrometer; when the spectral detection system (13) is composed of an optical fiber spectrometer, detection at different depths is achieved by adjusting the annular size of the connecting optical fiber bundle.

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