Conversion support and sample conversion device

Abstract

The invention discloses a conversion support and a sample conversion device. The conversion support comprises a base, a plurality of groups of mounting structures, a plurality of groups of tabletting structures and a plurality of sample supports, the mounting structure is fixedly mounted on the base in the circumferential direction, and the mounting structure comprises two mounting columns which are oppositely arranged; the pressing piece structure comprises two pressing pieces arranged oppositely, the two pressing pieces are fixedly installed on the corresponding installation columns respectively, and an installation groove is defined by the two pressing pieces, the two installation columns and the base. And the sample support is inserted into the mounting groove. The sample conversion device comprises a transfer frame, a parking support detachably installed on the transfer frame and the conversion support, and the conversion support is arranged on the parking support. A plurality of sample supports can be placed on one conversion support, transfer of a plurality of samples in an ultrahigh vacuum environment can be rapidly and efficiently achieved through the conversion support, and the sample transfer efficiency is improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of vacuum interconnection systems, and particularly relates to a conversion carrier and a sample conversion device. Background Art

[0002] X-ray Photoelectron Spectroscopy (XPS) is an advanced test and analysis device in the microscopic analysis of electronic materials and components. It not only provides information on molecular structure and atomic valence states for chemical research, but also provides information on the elemental composition and content, chemical state, molecular structure, and chemical bonds of various compounds for electronic materials research. However, XPS has extremely high requirements for the surface of the analyzed sample, and it is necessary to avoid contamination of the sample surface by impurities such as water, oxygen, and carbon in the atmospheric environment. If the sample can be directly analyzed by XPS after being prepared in a vacuum environment without being exposed to the atmosphere, secondary contamination can be effectively avoided and the surface state problem can be solved.

[0003] Therefore, people have invented a vacuum interconnection system, which integrates test and analysis equipment with material growth and preparation equipment, and can realize the transfer and test analysis of samples in an ultra-high vacuum environment without damaging the sample surface. There are two common methods for vacuum interconnection systems. The first method is to integrally install a variety of different devices in the same ultra-high vacuum device. Compared with a single sample test and analysis device, this ultra-high vacuum device is expensive, and there may be interference between different test devices in the test results. The second method is to use an ultra-high vacuum transfer chamber to realize the transfer of samples between different devices. Although the second method does not have mutual interference between devices, due to the small amount of samples used for XPS test and analysis, the sample holder used by the test device has a small size, which is inconvenient for transmission and transfer. Moreover, in a vacuum interconnection system integrating multiple devices, only one sample holder is transported to the X-ray photoelectron spectrometer each time, and the transfer efficiency of the samples is low, which is not conducive to quickly and effectively testing and analyzing the samples.

[0004] The information disclosed in this background art section is only intended to enhance the overall understanding of the present invention and should not be regarded as an admission or any form of suggestion that this information constitutes prior art already known to those of ordinary skill in the art. Summary of the Invention

[0005] The purpose of the present invention is to provide a conversion carrier and a sample conversion device, which can quickly and efficiently realize the transfer of multiple samples in an ultra-high vacuum environment and avoid the surface of the samples being damaged by exposure to the atmospheric environment.

[0006] To achieve the above object, the technical solution provided by a specific embodiment of the present invention is as follows:

[0007] A conversion carrier, the conversion carrier includes:

[0008] Base;

[0009] A plurality of mounting structures, the mounting structures being fixedly mounted on the base along the circumferential direction, the mounting structures including two relatively arranged mounting columns;

[0010] A plurality of pressing sheet structures, the pressing sheet structures including two relatively arranged pressing sheets, the two pressing sheets being respectively fixedly mounted on the corresponding mounting columns, the two pressing sheets, the two mounting columns, and the base enclosing to form a mounting groove;

[0011] A plurality of sample holders, inserted into the mounting groove.

[0012] In one or more embodiments of the present invention, the pressing sheet includes an assembly portion fixedly mounted on one mounting column, a connecting portion connected to the assembly portion, and a pressing portion connected to the connecting portion and bent towards the base.

[0013] In one or more embodiments of the present invention, a guiding portion is inclined upwards on the outer side wall of the pressing portion.

[0014] In one or more embodiments of the present invention, the assembly portion is located in the connecting portion, the assembly portion is connected to the inner wall of the connecting portion far from the other mounting column, and the pressing portion is connected to the outer wall of the connecting portion facing the other mounting column; and / or,

[0015] A first assembly hole is provided on the mounting column, a second assembly hole matching the first assembly hole is provided on the assembly portion, and the conversion tray further includes a fastener penetrating and installed in the first assembly hole and the second assembly hole.

[0016] In one or more embodiments of the present invention, a plurality of avoidance grooves are provided on the base along the circumferential direction, the sample holder includes a main body portion and a pulling portion, the main body portion is inserted into the mounting groove, and at least part of the pulling portion is located above the avoidance groove.

[0017] In one or more embodiments of the present invention, a first through groove is opened on the base, and the first through groove is arranged between two mounting columns of the same group; and / or,

[0018] A second through groove is opened on the base, and the second through groove is arranged between two adjacent mounting columns of different groups.

[0019] In one or more embodiments of the present invention, a first limiting block and a second limiting block are respectively provided on both sides of the mounting column; and / or,

[0020] A positioning groove is opened on the mounting column; and / or,

[0021] A limiting column is arranged on the base along the axial direction.

[0022] The technical solution provided by another specific embodiment of the present invention is as follows:

[0023] A sample conversion device, the sample conversion device includes an adapter frame, a parking tray detachably mounted on the adapter frame, and a conversion tray as described above, and the conversion tray is disposed on the parking tray.

[0024] In one or more embodiments of the present invention, the adapter frame includes a support rod, a substrate connected to the support rod, a vertical plate vertically disposed on the substrate, a plurality of fixed plates vertically spaced apart on the vertical plate, and a plurality of elastic pieces. One end of the elastic piece facing the vertical plate is fixedly installed on the fixed plate, and the parking tray is inserted between the fixed plate and the elastic piece.

[0025] In one or more embodiments of the present invention, a card slot is provided on the fixed plate. The parking tray includes a main body inserted into the card slot, a top plate disposed above the main body, and a bottom plate disposed below the main body. The distance between the end of the elastic piece away from the vertical plate and the fixed plate is greater than the thickness of the bottom plate, and the minimum distance between the elastic piece and the fixed plate is less than the thickness of the bottom plate. A positioning hole is axially opened on the base of the conversion tray, and a positioning post is upwardly extended on the top plate and is matched with the positioning hole.

[0026] Compared with the prior art, the present invention has the following beneficial effects:

[0027] The present invention discloses a conversion tray and a sample conversion device, which can place a plurality of sample trays on one conversion tray, and can quickly and efficiently transfer a plurality of samples in an ultra-high vacuum environment through the conversion tray, improve the transfer efficiency of the samples, and avoid the exposure of the samples to the atmospheric environment to damage the surface, effectively prevent secondary pollution and solve the surface state problem. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments recorded in the present invention. For those of ordinary skill in the art, other drawings can be obtained according to these drawings without creative efforts.

[0029] Figure 1 It is a three-dimensional structural schematic diagram of a partial structure of the conversion tray in an embodiment of the present invention;

[0030] Figure 2 It is a side view structural schematic diagram of a partial structure of the conversion tray in an embodiment of the present invention;

[0031] Figure 3 Schematic three-dimensional structure diagram of the conversion tray in an embodiment of the present invention;

[0032] Figure 4 Schematic three-dimensional structure diagram of the sample conversion device in another embodiment of the present invention;

[0033] Figure 5 Schematic side view structure diagram of the sample conversion device in another embodiment of the present invention. Detailed implementation manners

[0034] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present invention.

[0035] It should be noted that: similar reference numerals and letters denote similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0036] It should be noted that, without conflict, the embodiments in the present invention and the features in the embodiments can be combined with each other.

[0037] The technical solutions in the present invention will be described below with reference to the accompanying drawings.

[0038] Referring to Figures 1 to 3 As shown, the conversion tray in an embodiment of the present invention includes: a base 1, multiple groups of mounting structures, multiple groups of pressing structures, and multiple sample trays 4. The mounting structures are fixedly installed on the base 1 along the circumferential direction. The mounting structure includes two opposite mounting columns 2; the pressing structure 3 includes two opposite pressing pieces 3. The two pressing pieces 3 are respectively fixedly installed on the corresponding mounting columns 2. The two pressing pieces 3, the two mounting columns 2, and the base 1 enclose to form a mounting groove 30; the sample tray 4 is inserted into the mounting groove 30. Therefore, multiple sample trays 4 can be placed on one base 1, and samples can be placed on each sample tray 4. Among them, the number of sample trays 4 is less than or equal to the number of mounting grooves 30. According to this design, multiple sample trays 4 can be placed on one conversion tray, and multiple samples can be quickly and efficiently transferred in an ultra-high vacuum environment through the conversion tray, improving the transfer efficiency of the samples.

[0039] In order to prevent the sample tray 4 from detaching from the conversion tray during the transfer process, referring to Figure 1 、 Figure 2As shown, the pressing piece 3 in this embodiment includes an assembling part 31 fixedly installed on an installation column 2, a connecting part 32 connected to the assembling part 31, and a pressing part 33 connected to the connecting part 32 and bent towards the base 1. According to this design, the sample holder 4 can be pressed by the pressing part 33 of the pressing piece 3, and the sample holder 4 can be reliably and stably fixed in the installation groove 30.

[0040] To fixedly install the pressing piece 3, referring to Figure 1 As shown, a first assembling hole 21 is provided on the installation column 2 in this embodiment, a second assembling hole 311 matching the first assembling hole 21 is provided on the assembling part 31, and the conversion holder further includes a fastener (not shown in the drawings) penetrating and installed in the first assembling hole 21 and the second assembling hole 311.

[0041] Preferably, to facilitate the smooth insertion of the sample holder 4 into the installation groove 30, referring to Figure 1 、 Figure 2 As shown, a guiding part 34 inclined upward is provided on the outer side wall of the pressing part 33 in this embodiment. According to this design, the distance between one end of the guiding part 34 away from the pressing part 33 and the base 1 is greater than the thickness of the sample holder 4, and the minimum distance between the pressing part 33 and the base 1 is less than the thickness of the sample holder 4. According to this design, during the process of inserting the sample holder 4, the sample holder 4 first inserts between one end of the guiding part 34 away from the pressing part 33 and the base 1. Since the pressing piece 3 has a certain elastic deformation ability, and the minimum distance between the pressing part 33 and the base 1 is less than the thickness of the sample holder 4, during the inward insertion process, the inward movement of the sample holder 4 can drive the pressing part 33 to elastically deform away from the base 1 until the minimum distance between the pressing part 33 and the base 1 is slightly greater than the thickness of the sample holder 4, so that the sample holder 4 can be smoothly inserted into the installation groove 30. Of course, a guiding part 34 inclined upward can also be provided on the outer side wall of the pressing part 33 in the layout of this application.

[0042] Preferably, referring to Figure 1As shown, the assembly part 31 in this embodiment is located in the connecting part 32. The assembly part 31 is connected to the inner wall of the connecting part 32 away from the other mounting post 2, and the pressing part 33 is connected to the outer wall of the connecting part 32 facing the other mounting post 2. It should be noted that the remaining inner wall of the assembly part 31 is not connected to the connecting part 32 and has a gap. Therefore, the operator applies an insertion force to the sample tray 4, so that the sample tray 4 is inserted into the installation groove 30. During the insertion process, the fulcrum when the pressing piece 3 undergoes elastic deformation is near the position of the inner wall of the connecting part 32 away from the other mounting post 2, and the sample tray 4 is in contact with the pressing part 33 during the process of inserting into the installation groove 30. Therefore, the sample tray 4 applies an upward acting force to the pressing part 33. According to the lever principle, the greater the distance between the acting point of this acting force and the fulcrum, the longer the power arm, the smaller the insertion force that needs to be applied, and the easier it is for the pressing piece 3 to undergo elastic deformation upward. According to this design, it is beneficial to the elastic deformation of the pressing piece 3, facilitating the insertion of the sample tray 4, saving time and effort.

[0043] Referring to Figure 1 、 Figure 3 As shown, the base 1 in this embodiment is provided with a plurality of avoiding grooves 11 along the circumferential direction. The sample tray 4 includes a main body part 41 and a pulling part 42. The main body part 41 is inserted into the installation groove 30, and at least part of the pulling part 42 is arranged above the avoiding grooves 11. Samples are placed on the main body part 41. Since the pulling part 42 is located above the avoiding grooves 11, the operator can insert or extract the sample tray 4 in a smaller space; at the same time, the design of the avoiding grooves 11 can reduce the weight of the conversion tray.

[0044] Optionally, in order to reduce the weight of the conversion tray, referring to Figure 1 As shown, a first through groove 12 is opened on the base 1 in this embodiment. The first through groove 12 is arranged between two mounting posts 2 in the same group. Of course, the present application is not limited to this. In one embodiment, a second through groove 13 is opened on the base 1. The second through groove 13 is arranged between two adjacent mounting posts 2 in different groups.

[0045] Optionally, in order to prevent the pressing piece 3 from generating displacement, referring to Figure 1 As shown, a first limiting block 22 and a second limiting block 23 are respectively arranged on both sides of the mounting post 2 in this embodiment. Of course, the present application is not limited to this. In one embodiment, a positioning groove 24 is opened on the mounting post 2.

[0046] Optionally, in order to limit the insertion depth of the sample tray 4, referring to Figure 1 As shown, a limiting post 14 is arranged on the base 1 along the axial direction in this embodiment. The limiting post 14 is in the shape of a multi-prismatic column, so the limiting post 14 has a plurality of vertically arranged limiting surfaces. Among them, the number of limiting surfaces is the same as the number of installation grooves 30.

[0047] Referring to Figure 4 、 Figure 5As shown in the figure, another embodiment of the present invention discloses a sample conversion device. The sample conversion device in another embodiment includes a transfer rack 5, a parking tray 6 detachably installed on the transfer rack 5, and a conversion tray as shown in the previous embodiment. The conversion tray is arranged on the parking tray 6. According to this design, when multiple sample trays 4 are inserted into the conversion tray and multiple samples are placed on the sample trays 4, the conversion tray can be placed on the parking tray 6, thereby realizing the transfer of multiple samples.

[0048] Specifically, referring to Figure 4 、 Figure 5 As shown in the figure, the transfer rack 5 in another embodiment includes a support rod (not shown in the drawing), a substrate 51 connected to the support rod, a vertical plate 52 arranged vertically on the substrate 51, a plurality of fixing plates 53 arranged at intervals in the vertical direction on the vertical plate 52, and a plurality of elastic pieces 54. One end of the elastic piece 54 facing the vertical plate 52 is fixedly installed on the fixing plate 53, and the parking tray 6 is inserted between the fixing plate 53 and the elastic piece 54. Among them, the support rod has the functions of lifting in the vertical direction and rotating in the horizontal direction. When the parking tray 6 is placed on each fixing plate 53, the transfer efficiency of the sample can be further improved.

[0049] Of course, the present application is not limited to this. Other structures, such as a sample stage, can also be detachably installed on the transfer rack. According to this design, the sample tray 4 on the conversion tray can be transferred to the sample stage through an external structure, such as an operating rod, a manipulator, etc., and then the sample stage can be transferred to the detection and analysis equipment through other external structures, such as an operating rod, a manipulator, a sample fork, etc., to perform characterization analysis on the samples on the sample tray 4. Exemplarily, the first layer of the sample conversion device can place the parking tray 6, and the second layer can place the sample stage. Its working principle is as follows: In the vacuum interconnection system, the conversion tray with the sample tray 4 inserted is placed on the parking tray 6, and samples are placed on the sample tray 4. The manipulator with the clamping function takes down the sample tray 4 on the conversion tray, and then raises the support rod in the vertical direction and rotates it in the horizontal direction, thereby raising and rotating the transfer rack 5. When the sample tray 4 clamped by the manipulator is facing the second layer of the transfer rack 5, move the manipulator forward to insert the sample tray 4 into the sample stage, then retreat the manipulator and rotate the support rod horizontally, thereby rotating the transfer rack 5 to face the sample fork. Move the sample fork forward to take away the sample stage on the second layer of the transfer rack 5, and then lower the transfer rack 5 in the vertical direction until it does not block the sample fork. Move the sample fork carrying the sample stage horizontally to the test and analysis equipment, and the sample transfer is completed. It can be understood that when the third layer of the transfer rack 5 is provided with a sample stage, the operation of sample transfer is the same, and will not be elaborated here. Of course, the present application is not limited to this. The transfer rack 5 can be provided with one layer of fixing plates 53, or two layers of fixing plates 53, or three layers of fixing plates 53, or multiple layers of fixing plates 53. Since the transfer rack 5 is a multi-layer design, the sample conversion device can also have the function of storing the sample tray 4.

[0050] Further, referring toFigure 4 , Figure 5 As shown in Figure 5 , in another embodiment, a clamping groove 531 is provided on the fixing plate 53. The parking support 6 includes a main body 61 inserted into the clamping groove 531, a top plate 62 arranged above the main body 61, and a bottom plate 63 arranged below the main body 61. The distance between the end of the elastic piece 54 away from the vertical plate 52 and the fixing plate 53 is greater than the thickness of the bottom plate 63, and the minimum distance between the elastic piece 54 and the fixing plate 53 is less than the thickness of the bottom plate 63. During the process of inserting the parking support 6 into the clamping groove 531, the bottom plate 63 is first inserted between the end of the elastic piece 54 away from the vertical plate 52 and the fixing plate 53. Since the elastic piece 54 has a certain elastic deformation ability, and the minimum distance between the elastic piece 54 and the fixing plate 53 is less than the thickness of the bottom plate 63, during the process of inserting the parking support 6 downward, the movement of the parking support 6 towards the vertical plate 52 can tend to cause the pressing piece 3 to elastically deform in the direction away from the fixing plate 53 until the minimum distance between the elastic piece 54 and the fixing plate 53 is slightly greater than the thickness of the bottom plate 63, so that the bottom plate 63 of the parking support 6 can be smoothly inserted between the elastic piece 54 and the fixing plate 53, thereby reliably and firmly arranging the parking support 6 on the fixing plate 53.

[0051] Preferably, in order to fix the conversion support and prevent it from rotating when the parking support 6 is placed on it, referring to Figure 1 , Figure 4 As shown in Figure 4 , in another embodiment, a positioning hole 15 is axially opened on the base 1 of the conversion support, and a positioning post 621 that cooperates with the positioning hole 15 is upwardly extended and provided on the top plate 62.

[0052] From the above technical solutions, it can be seen that the present invention has the following beneficial effects:

[0053] The present invention discloses a conversion support and a sample conversion device, which can place multiple sample supports on one conversion support, can quickly and efficiently transfer multiple samples in an ultra-high vacuum environment through the conversion support, improve the transfer efficiency of the samples, and avoid the samples being exposed to the atmospheric environment to damage the surface, effectively preventing secondary pollution and solving the surface state problem.

[0054] For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or basic characteristics of the present invention. Therefore, in any aspect, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, it is intended to include all changes falling within the meaning and scope of the equivalent elements of the claims in the present invention. Any reference signs in the claims should not be regarded as limiting the claimed rights.

[0055] In addition, it should be understood that although this specification is described in terms of embodiments, not every embodiment contains only one independent technical solution. This narrative way of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A conversion support, characterized in that, The conversion tray includes: A base; Multiple sets of mounting structures, which are fixedly mounted on the base along the circumferential direction. The mounting structure includes two relatively arranged mounting posts; Multiple sets of pressing sheet structures, which include two relatively arranged pressing sheets. The two pressing sheets are respectively fixedly mounted on the corresponding mounting posts. The two pressing sheets, the two mounting posts, and the base enclose to form a mounting groove; Multiple sample trays, which are inserted into the mounting groove.

2. The conversion support according to claim 1, characterized in that, The pressing sheet includes an assembly part fixedly mounted on one mounting post, a connecting part connected to the assembly part, and a pressing part connected to the connecting part and bent towards the base.

3. The conversion support according to claim 2, characterized in that A guiding part is inclined upwards on the outer side wall of the pressing part.

4. The conversion support according to claim 2, characterized in that, The assembly part is located in the connecting part, the assembly part is connected to the inner wall of the connecting part far away from the other mounting post, and the pressing part is connected to the outer wall of the connecting part facing the other mounting post; and / or, A first assembly hole is provided on the mounting post, a second assembly hole is provided on the assembly part and is matched with the first assembly hole. The conversion tray further includes a fastener penetrating and installed in the first assembly hole and the second assembly hole.

5. The conversion support according to claim 1, characterized in that, The base is provided with multiple avoidance grooves along the circumferential direction. The sample tray includes a main body part and a pulling part. The main body part is inserted into the mounting groove, and at least part of the pulling part is arranged above the avoidance groove.

6. The conversion support according to claim 1, wherein A first through groove is formed on the base, and the first through groove is arranged between two mounting posts of the same group; and / or, A second through groove is formed on the base, and the second through groove is arranged between two adjacent mounting posts of different groups.

7. The conversion support according to claim 1, characterized in that, A first limiting block and a second limiting block are respectively arranged on two sides of the mounting post; and / or, A positioning groove is formed on the mounting post; and / or, A limiting post is arranged on the base along the axial direction.

8. A sample conversion device, characterized in that, The sample conversion device includes a transfer rack, a parking tray detachably mounted on the transfer rack, and a conversion tray as described in any one of claims 1 to 7. The conversion tray is arranged on the parking tray.

9. The sample conversion device according to claim 8, wherein, The transfer rack includes a support rod, a substrate connected to the support rod, a vertical plate vertically arranged on the substrate, multiple fixing plates arranged at intervals on the vertical plate along the vertical direction, and multiple elastic pieces. One end of the elastic piece facing the vertical plate is fixedly mounted on the fixing plate, and the parking tray is inserted between the fixing plate and the elastic piece.

10. The sample conversion device according to claim 9, wherein, A clamping groove is provided on the fixing plate. The parking tray includes a main body inserted into the clamping groove, a top plate arranged above the main body, and a bottom plate arranged below the main body. The distance between the end of the elastic piece far away from the vertical plate and the fixing plate is greater than the thickness of the bottom plate, and the minimum distance between the elastic piece and the fixing plate is less than the thickness of the bottom plate. A positioning hole is axially formed on the base of the conversion tray, and a positioning post matched with the positioning hole extends upwards on the top plate.

Images