Pose adjusting and fixing clamp of laser interferometer reflector

Abstract

The invention provides a pose adjusting and fixing clamp for a laser interferometer reflector. The pose adjusting and fixing clamp can achieve installation and precise assembly adjustment of the laser interferometer reflector. The pose adjustment fixing clamp is used for installing a first reflector with the optical direction in the X direction and a second reflector with the optical direction in the Y direction. Comprising a first fixing unit, a second fixing unit and a common support unit. The X-direction end of the first reflector is supported on the first fixing unit, and the other end of the first reflector is supported on the common support unit. One Y-direction end of the second reflector is supported on the second fixing unit, and the other end of the second reflector is supported on the common support unit; the first reflective mirror is supported at one end of the first fixing unit and can be adjusted in the Y direction and the Z direction. The second reflective mirror is supported at one end of the second fixing unit and can be adjusted in the X direction and the Z direction. And one ends, supported on the common support unit, of the first reflective mirror and the second reflective mirror can deflect left and right or up and down pose angles during position adjustment of the other ends of the first reflective mirror and the second reflective mirror.

Description

Technical Field

[0001] The present invention relates to an included angle, and particularly to a precision pose adjustment and fixing fixture for a reflecting mirror of a laser interferometer, belonging to the technical field of laser interferometer applications. Background Art

[0002] Laser has the advantages of high intensity, high directivity, spatial coherence, narrow bandwidth, and high monochromaticity. Laser interferometers can cooperate with various refractive mirrors and reflecting mirrors to perform measurements such as linear position, velocity, angle, true flatness, straightness, parallelism, and perpendicularity, and can be used for calibration work of precision machine tools or measuring instruments.

[0003] There are two types of laser interferometers: single-frequency and dual-frequency. One of the most important parts of a laser interferometer is the fixation of the reflecting mirror. The movable reflecting mirror in the laser interferometer is installed on a moving displacement table; the installation accuracy requirements for fixing the reflecting mirror on the moving displacement table are very high. Therefore, according to the measurement requirements of the moving position accuracy of the moving displacement table, a fixing tooling for the reflecting mirror of the moving displacement table laser interferometer needs to be designed so that it can fix the installation and precision assembly adjustment of the reflecting mirror of the interferometer.

[0004] Patent CN211425336U discloses a fixing fixture for a reflecting mirror of a laser interferometer, including a workbench. A frame is provided on the workbench. A first motor is provided inside the frame. A U-shaped frame is provided above the first motor. A bearing seat is provided on the U-shaped frame. A mutually cooperating and rotatable bearing is provided on the bearing seat. A first groove is provided on the surface of the bearing. A transition part is provided below the bearing. A support plate is provided below the transition part. A second groove is provided on the surface of the support plate.

[0005] Although the above-mentioned fixing fixture for the reflecting mirror of the laser interferometer has the adjustment function of two rotational degrees of freedom, the overall assembly accuracy of the reflecting mirror does not have the adjustment accuracy of the pose. It can only be adjusted by rotating and flipping the reflecting mirror through two angular degrees of freedom. There is no adjustment method for the displacement direction of the reflecting mirror of the interferometer with high pose accuracy requirements. At the same time, there is no treatment measure for the assembly error of the mechanism itself. Summary of the Invention

[0006] In view of this, the present invention provides a pose adjustment and fixing fixture for a reflecting mirror of a laser interferometer, which can realize the installation and precision assembly adjustment of the reflecting mirror of the laser interferometer.

[0007] The technical solution of the present invention is: a pose adjustment and fixing fixture for a reflecting mirror of a laser interferometer, used for the installation of a first reflecting mirror with an optical direction along the X direction and a second reflecting mirror with an optical direction along the Y direction;

[0008] The pose adjustment and fixing fixture includes: a first fixing unit, a second fixing unit, and a common support unit; one end of the first mirror in the X direction is supported on the first fixing unit, and the other end is supported on the common support unit; one end of the second mirror in the Y direction is supported on the second fixing unit, and the other end is supported on the common support unit;

[0009] One end of the first mirror supported on the first fixing unit can be adjusted in the Y and Z directions;

[0010] One end of the second mirror supported on the second fixing unit can be adjusted in the X and Z directions;

[0011] One end of the first mirror and the second mirror supported on the common support unit can have a left - right or up - down pose angle yaw when the other end is adjusted in position.

[0012] As a preferred embodiment of the present invention: the first fixing unit includes: a first fixing base, a first mirror bracket, a Y - direction linear displacement adjustment assembly, and a first Z - direction adjustment assembly;

[0013] The first fixing base is fixed on the displacement table, the Y - direction linear displacement adjustment assembly is arranged on the first fixing base; the first mirror bracket is arranged on the Y - direction linear displacement adjustment assembly;

[0014] The Y - direction linear displacement adjustment assembly is used to adjust the Y - direction position of the first mirror at this end;

[0015] The first Z - direction adjustment assembly is used to adjust the Z - direction position of the first mirror at this end.

[0016] As a preferred embodiment of the present invention: the second fixing unit includes: a second fixing base, a second mirror bracket, an X - direction linear displacement adjustment assembly, and a second Z - direction adjustment assembly;

[0017] The second fixing base is fixed on the displacement table, the X - direction linear displacement adjustment assembly is arranged on the second fixing base, and the second mirror bracket is arranged on the X - direction linear displacement adjustment assembly;

[0018] The X - direction linear displacement adjustment assembly is used to adjust the X - direction position of the second mirror at this end;

[0019] The second Z - direction adjustment assembly is used to adjust the Z - direction position of the second mirror at this end.

[0020] As a preferred embodiment of the present invention: the Y - direction linear displacement adjustment assembly includes: a nut plate, an adjusting setscrew, a slider, a ball, and a ball bracket;

[0021] The nut plate is arranged on the side of the first fixed seat in the Y direction; a threaded hole for cooperating with the adjusting set screw is machined on the front end face of the nut plate;

[0022] A slider is slidably mounted on the first fixed seat, and the slider can slide along the Y direction on the first fixed seat. The slider is integrally connected with the first mirror bracket; the first mirror is connected to the first mirror bracket through the first Z-direction adjusting assembly;

[0023] Ball brackets are arranged on both sides of the slider on the first fixed seat in the X direction, and a row of balls arranged along the Y direction are in rolling fit between the ball brackets and the corresponding side of the slider;

[0024] The adjusting set screw passes through the nut plate and abuts against the slider.

[0025] As a preferred embodiment of the present invention: on the first fixing unit, a limiting plate is provided at the end of the Y-direction displacement of the slider for limiting the Y-direction displacement adjustment of the first mirror.

[0026] As a preferred embodiment of the present invention: a tension spring A is arranged along the Y direction between the slider and the nut plate.

[0027] As a preferred embodiment of the present invention: the first Z-direction adjusting assembly includes: an adjusting plate and a ball head set screw;

[0028] The adjusting plate has a wedge-shaped portion; a groove for placing the wedge-shaped portion of the adjusting plate is provided on the rear end face of the first mirror bracket; a vertical through hole communicating with the groove is machined on the upper end face of the first mirror bracket, and a ball spring cap is placed in the vertical through hole; a threaded hole communicating with the groove is machined on the front end face of the first mirror bracket for installing the ball head set screw;

[0029] The ball spring cap is an elastic member with a ball head end;

[0030] The wedge-shaped portion of the adjusting plate is located in the groove on the rear end face of the first mirror bracket, and the wedge surface of the wedge-shaped portion faces downward; the wedge-shaped portion is connected to the first mirror;

[0031] The upper end face of the wedge-shaped portion abuts against the ball head end of the ball spring cap arranged in the vertical through hole on the upper end face of the first mirror bracket; the ball head at the front end of the ball head set screw is located in the groove and contacts the wedge surface of the wedge-shaped portion.

[0032] As a preferred embodiment of the present invention: the angle plate further includes a flat plate portion fixedly connected to the wedge-shaped portion;

[0033] Spring pins are respectively arranged on the flat plate portion and the first mirror bracket, and a tension spring B is installed between the two spring pins along the Z direction.

[0034] As a preferred embodiment of the present invention: the common support unit includes: a common support, a mirror ball bracket A, a mirror ball bracket B, and an upper and lower elastic pressing assembly;

[0035] The common support has two mutually perpendicular outer side surfaces, namely side surface A with the normal direction in the X direction and side surface B with the normal direction in the Y direction; the common support is fixed on the displacement table;

[0036] The mirror ball bracket A is fixedly connected to the first mirror; the mirror ball bracket B is fixedly connected to the second mirror;

[0037] The center of the end face of the mirror ball bracket A opposite to the side surface A of the common support extends a spherical end towards the common support, and the center of the end face of the mirror ball bracket B opposite to the side surface B of the common support extends a spherical end towards the common support;

[0038] The upper and lower elastic pressing assembly includes: a common support plate, a spring cap group A, and a spring cap group B; both the spring cap group A and the spring cap group B include an upper spring cap and a lower spring cap;

[0039] The upper end face of the common support is a stepped surface, and the common support plate is arranged on the upper stepped surface of the upper end face of the common support; the spherical end extending on the mirror ball bracket A extends into the space between the common support and the common support plate and is pressed between the upper spring cap and the lower spring cap of the spring cap group A; the spherical end extending on the mirror ball bracket B extends into the space between the common support and the common support plate and is pressed between the upper spring cap and the lower spring cap of the spring cap group B.

[0040] Advantages:

[0041] (1) The pose adjustment and fixing fixture for the mirror of the laser interferometer in the present invention is used for the installation of the mirror in the laser interferometer on the displacement table. The mirrors of the laser interferometer for measuring the lengths in two mutually perpendicular directions in the plane are integrated on a fixing fixture, enabling them to have a common reference, capable of realizing the co - adjustment and precise alignment of the two mirrors, and making their relative positions meet the requirements; moreover, the two laser interferometers can be calibrated with each other.

[0042] (2) In the pose adjustment and fixing fixture for the mirror of the laser interferometer in the present invention, the mirror has multiple degrees of freedom for adjustment, and the poses of the two mirrors can be precisely adjusted.

[0043] (3) In the present invention, the position adjustment is carried out by using the adjusting set screw and the ball - head set screw, which can realize fine - tuning of the position, and further realize precise assembly adjustment.

[0044] (4) In the present invention, through the setting of the tension springs (including tension spring A and tension spring B), a constant tension can be maintained along the displacement direction to eliminate the movement clearance.

[0045] (5) In the common support unit of the present invention, an upper and lower elastic pressing assembly is provided. By cooperating with the spherical end on the spherical bracket of the mirror, it can deflect in the left - right or up - down pose angle to adapt to the fine adjustment of the position.

[0046] (6) The pose adjustment and fixing fixture of the laser interferometer mirror of the present invention can accurately and quickly adjust the pose of the mirror, and then quickly calibrate and match with the laser of the laser interferometer. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] Figure 1 is a schematic diagram of the overall structure of the pose adjustment and fixing fixture of the laser interferometer mirror of the present invention Figure 1 ;

[0048] Figure 2 is a schematic diagram of the overall structure of the pose adjustment and fixing fixture of the laser interferometer mirror of the present invention Figure 2 ;

[0049] Figure 3 is a schematic diagram of the partial structure at the first fixing unit of the pose adjustment and fixing fixture of the present invention Figure 1 ;

[0050] Figure 4 is a schematic diagram of the partial structure at the first fixing unit of the pose adjustment and fixing fixture of the present invention Figure 2 ;

[0051] Figure 5 is a bottom view of the pose adjustment and fixing fixture of the laser interferometer mirror of the present invention Figure 1 ;

[0052] Figure 6 is a bottom view of the pose adjustment and fixing fixture of the laser interferometer mirror of the present invention Figure 2 ;

[0053] Figure 7 is a schematic diagram of the structure of the first fixing unit Figure 1 ;

[0054] Figure 8 is a schematic diagram of the structure of the Y - direction linear displacement adjustment assembly;

[0055] Figure 9 is a schematic diagram of the structure of the common support unit in the pose adjustment and fixing fixture of the present invention;

[0056] Wherein: 100 - the first fixing unit, 200 - the second fixing unit, 300 - the common support unit;

[0057] 1 - First fixing base, 2 - First mirror bracket, 3 - Adjusting plate, 31 - Wedge part, 32 - Flat plate part, 4 - Spring stud, 6 - Ball head set screw, 7 - Nut plate, 8 - Adjusting set screw, 10 - Spring A, 11 - Slide block, 12 - Limiting plate, 13 - Ball, 14 - Ball bracket, 15 - Common support, 16 - Common support pressing plate, 17 - Spring cap group A, 18 - Mirror ball bracket A, 20 - First mirror, 21 - Second mirror, 22 - Ball spring cap, 23 - Mirror ball bracket B, 24 - Second fixing base, 25 - Second mirror bracket, 26 - X - direction linear displacement adjusting component, 27 - Second Z - direction adjusting component. Detailed implementation mode

[0058] The following combines the accompanying drawings and embodiments to make a further detailed description of the present invention.

[0059] This embodiment provides a posture adjustment and fixing fixture for a laser interferometer mirror, which can realize the installation and precise assembly adjustment of the laser interferometer mirror.

[0060] In this example, a laser interferometer group with two laser interferometers is respectively used for the length measurement in two mutually perpendicular directions (X - direction and Y - direction respectively) in the plane of the workpiece; the mirrors of the two laser interferometers are the first mirror 20 with the optical direction along the X - direction and the second mirror 21 with the optical direction along the Y - direction respectively; in this solution, the two mirrors are integrally installed on the same fixing fixture, so that they have a common reference point, meet the relative position accuracy of the first mirror 20 and the second mirror 21, and can calibrate the two laser interferometers with each other.

[0061] The posture adjustment and fixing fixture provided in this embodiment is used to install the first mirror 20 and the second mirror 21 on the displacement table, and can realize the co - adjustment and precise assembly adjustment of the two mirrors. In this example, both the first mirror 20 and the second mirror 21 are cuboid structures. The optical direction of the first mirror 20, that is, its length direction, is along the X - direction, and the optical direction of the second mirror 21, that is, its length direction, is along the Y - direction; the direction perpendicular to the XY plane is the Z - direction.

[0062] As Figure 1 shown, the laser interferometer mirror posture adjustment and fixing fixture includes: a first fixing unit 100 for installing the first mirror 20, a second fixing unit 200 for installing the second mirror 21, and a common support unit 300 shared by the first mirror 20 and the second mirror 21.

[0063] The first fixing unit 100, the second fixing unit 200, and the common support unit 300 are all installed (e.g., fixed by screws) on a displacement stage (not shown in the figure); one end (i.e., one end in the X direction) in the length direction of the first mirror 20 is supported on the first fixing unit 100, and the other end is supported on the common support unit 300. One end (i.e., one end in the Y direction) of the second mirror 21 is supported on the second fixing unit 200, and the other end is supported on the common support unit 300.

[0064] One end of the first mirror 20 supported on the first fixing unit 100 can be adjusted in the Y and Z directions; one end of the second mirror 21 supported on the second fixing unit 200 can be adjusted in the X and Z directions; one end of the first mirror 20 and the second mirror 21 supported on the common support unit 300 can have a pose angle yaw left and right or up and down when the other end is adjusted in position.

[0065] Such as Figure 3 and Figure 4 As shown, the first fixing unit 100 includes: a first fixing base 1, a first mirror bracket 2, a Y-direction linear displacement adjustment component, and a first Z-direction adjustment component; the first fixing base 1 is fixed on the displacement stage by screws, the Y-direction linear displacement adjustment component is arranged on the first fixing base 1, and the first mirror bracket 2 is arranged on the Y-direction linear displacement adjustment component.

[0066] The Y-direction linear displacement adjustment component is used to adjust the Y-direction position of the first mirror 20 at this end (usually for fine adjustment).

[0067] As an example, as Figures 5 - 8 shown, the Y-direction linear displacement adjustment component includes: a nut plate 7, an adjusting set screw 8, a slider 11, a limit plate 12, a ball 13, and a ball bracket 14; the nut plate 7 is arranged on the side of the first fixing base 1 in the Y direction; a threaded hole for cooperating with the adjusting set screw 8 is machined on the front end face of the nut plate 7; the adjusting set screw 8 is a fine-thread set screw 8. The slider 11 is slidably installed on the first fixing base 1, and the slider 11 can slide along the Y direction on the first fixing base 1. The slider 11 is integrally connected with the first mirror bracket 2; ball brackets 14 are arranged on both lateral sides (both sides in the X direction) of the slider 11 on the first fixing base 1; the slider 11 and the corresponding ball bracket 14 are in rolling cooperation through a row of balls 13 arranged along the Y direction. As an example, as Figure 7 shown, the opposite side faces of the slider 11 and the ball bracket 14 are both V-shaped faces, which are convenient for accommodating the balls 13. The adjusting set screw 8 passes through the nut plate 7 and abuts against the slider 11. By turning the adjusting set screw 8, the Y-direction feed displacement of it can be used to push the slider 11 and the first mirror bracket 2 to displace in the Y direction, and further make the first mirror 20 displace in the Y direction.

[0068] As an example, on the first fixing unit 100, a limiting plate 12 is provided at the end of the slider 11 in the Y-direction displacement for limiting the Y-direction displacement adjustment of the first reflector 20.

[0069] As an example, a tension spring A10 is provided between the slider 11 and the nut plate 7 in the Y-direction. The tension spring A10 can maintain a constant pulling force along the displacement direction to eliminate the movement clearance; at the same time, the tension spring A10 is also used for the return of the slider 11.

[0070] The first Z-direction adjustment assembly is used to adjust (generally for fine adjustment) the Z-direction position of the first reflector 20 at this end, such as Figure 3 and Figure 4 As shown, the first Z-direction adjustment assembly includes: an adjustment plate 3 and a ball head set screw 6. Specifically, the adjustment plate 3 has a wedge portion 31; a groove for placing the wedge portion 31 of the adjustment plate 3 is provided on the rear end face (the end face facing the first reflector 20) of the first reflector bracket 2; a vertical through hole communicating with the groove is machined on the upper end face of the first reflector bracket 2, and a ball spring cap 22 is placed in the vertical through hole; a threaded hole communicating with the groove is machined on the front end face of the first reflector bracket 2 for installing the ball head set screw 6; the ball head set screw 6 is a fine pitch set screw.

[0071] The ball spring cap 22 is an elastic member with a ball head end. As an example, the ball spring cap 22 includes a ball spring cap body, a spring and a top cover; one end of the ball spring cap body is open and the other end is a hemispherical structure; a spring is coaxially arranged inside it, one end of the spring abuts against the inner bottom surface of the ball spring cap body, and the other end abuts against the top cover arranged at its open end. The ball head end of the ball spring cap 22 faces the vertical through hole installed on the upper end face of the reflector bracket 2.

[0072] As Figure 3 and Figure 4 As shown, the wedge portion 31 of the adjustment plate 3 is located in the groove on the rear end face of the first reflector bracket 2, and the wedge surface (i.e., the inclined surface) of the wedge portion 31 faces downward. The rear end face of the wedge portion 31 is fixed to the first reflector 20 by adhesive; the upper end face of the wedge portion 31 abuts against the ball head end of the ball spring cap 22 arranged in the vertical through hole on the upper end face of the first reflector bracket 2 (i.e., the upper end face of the wedge plate 3 is supported by the ball spring cap 22 between the upper and lower parts of the first reflector bracket 2). The ball head at the front end of the ball head set screw 6 is located in the groove and contacts the wedge surface of the wedge portion 31 (i.e., the ball head at the front end of the ball head set screw 6 is clamped between the wedge surface of the wedge portion 31 and the inner bottom surface of the groove); by screwing the ball head set screw 6, the wedge portion 31 can be lifted by its feeding displacement, so that the position of the wedge portion 31 in the groove rises, and further the first reflector 20 undergoes displacement adjustment in the Z-direction.

[0073] As an example, in order to eliminate the clearance in the displacement direction, a tension spring B5 is further installed in the Z direction; specifically: the angle plate 3 further includes a flat plate portion 32, and the flat plate portion 32 of the angle plate 3 and the wedge portion 31 are of an integral structure; the flat plate portion 32 of the angle plate 3 is located in the corresponding mounting hole on the first mirror bracket 2; tension spring pins 4 are respectively arranged on the front end faces of the flat plate portion 32 and the first mirror bracket 2, and the connection line of the two tension spring pins 4 is along the Z direction; a tension spring B (not shown in the figure) is installed between the two tension spring pins 4 along the Z direction, so as to maintain a constant tension in the Z-direction adjustment direction to eliminate the movement clearance.

[0074] As Figure 2 shown, the second fixing unit 200 includes: a second fixing seat 24, a second mirror bracket 25, an X-direction linear displacement adjustment component 26 and a second Z-direction adjustment component 27; wherein the second fixing seat 24 is fixed on the displacement table by screws, the X-direction linear displacement adjustment component 26 is arranged on the second fixing seat 24, and the second mirror bracket 25 is supported on the X-direction linear displacement adjustment component 26. The X-direction linear displacement adjustment component 26 is used for finely adjusting the X-direction position of the second mirror 21 at this end; the structural form of the X-direction linear displacement adjustment component 26 is the same as that of the Y-direction linear displacement adjustment component, and the difference is only the change in the installation direction. The second Z-direction adjustment component 27 is used for precisely adjusting the Z-direction position of the second mirror 21 at this end, and the structural form of the second Z-direction adjustment component 27 is the same as that of the first Z-direction adjustment component.

[0075] As Figure 9 shown, the common support unit 300 includes: a common support 15, a mirror ball bracket A18, a mirror ball bracket B23 and an upper and lower elastic pressing component; the common support 15 has two mutually perpendicular outer side faces, which are respectively side face A with the normal direction in the X direction and side face B with the normal direction in the Y direction; the common support 15 is fixed on the displacement table by screws. The mirror ball bracket A18 is fixed to the first mirror 20 by adhesive; the mirror ball bracket B23 is fixed to the second mirror 21 by adhesive; specifically: the mirror ball bracket A18 is bonded to the end face of the first mirror 20 opposite to the side face A of the common support 15, and the mirror ball bracket B23 is bonded to the end face of the second mirror 21 opposite to the side face B of the common support 15. A ball end extends from the center of the end face of the mirror ball bracket A18 opposite to the side face A of the common support 15 towards the common support 15, and a ball end extends from the center of the end face of the mirror ball bracket B23 opposite to the side face B of the common support 15 towards the common support 15.

[0076] The upper and lower elastic pressing components include: a common support pressing plate 16, a spring pressing cap group A 17, and a spring pressing cap group B; both the spring pressing cap group A 17 and the spring pressing cap group B include an upper spring pressing cap and a lower spring pressing cap. The upper end surface of the common support 15 is a stepped surface, and the common support pressing plate 16 is arranged on the upper stepped surface of the upper end surface of the common support 15 and is connected to the common support 15 by screws. The spherical end extending from the mirror ball bracket A 18 extends into the space between the common support 15 and the common support pressing plate 16. The upper part of this spherical end is supported by the upper spring pressing cap in the spring pressing cap group A 17 (the upper spring pressing cap is fixed in the corresponding mounting hole on the common support pressing plate 16), and the lower part is supported by the lower spring pressing cap in the spring pressing cap group A 17 on the lower stepped surface of the upper end surface of the common support 15 (the lower spring pressing cap is fixed in the corresponding mounting hole on the common support 15); that is, the spherical end of the mirror ball bracket A 18 is clamped and fixed between the upper and lower spring pressing caps of the spring pressing cap group A 17. Thus, the elastic displacement of the upper and lower spring pressing caps in the spring pressing cap group A 17 moves with the position adjustment of the other end of the first mirror 20.

[0077] As an example, the structural forms of the upper spring pressing cap and the lower spring pressing cap are the same, including a pressing cap, a spring, and a pressing seat; the spring is arranged vertically, with one end connected to the pressing cap and the other end connected to the pressing seat. The pressing seat has an inner concave spherical surface that fits with the spherical end of the mirror ball bracket A 18; for the upper spring pressing cap, its pressing cap is connected to the common support pressing plate 16, and the pressing seat faces downward and fits with the upper spherical surface of the spherical end of the mirror ball bracket A 18 through the inner spherical surface; for the lower spring pressing cap, its pressing cap is connected to the common support, and the pressing seat faces upward and fits with the lower spherical surface of the spherical end of the mirror ball bracket A 18 through the inner spherical surface.

[0078] The spherical end of the mirror ball bracket B 23 is clamped and fixed between the upper and lower spring pressing caps of the spring pressing cap group B in the same way as above; the elastic displacement of the upper and lower spring pressing caps in the spring pressing cap group B moves with the position adjustment of the other end of the second mirror 21.

[0079] Thus, in this pose adjustment and fixing fixture, for the first mirror 20 and the second mirror 21, the angular flipping adjustment in the XY plane and the YZ plane can be realized. The mirror ball bracket A 18 that clamps the first mirror 20 on the common support 15 can have a pose angle yaw in the left - right or up - down direction, and the mirror ball bracket B 23 that clamps the second mirror 21 on the common support 15 can have a pose angle yaw in the left - right or up - down direction; at the same time, the data reflected by the lasers of two laser interferometers passing through the first mirror 20 and the second mirror 22 respectively are used to correct the position direction and magnitude to be adjusted.

[0080] Although the present invention has been described in detail above with general descriptions and specific embodiments, modifications or improvements can be made thereto based on the present invention, which will be obvious to those skilled in the art. Therefore, these modifications or improvements made without departing from the spirit of the present invention all fall within the scope of protection required by the present invention.

Claims

1. A fixture for adjusting and fixing the position and pose of a laser interferometer mirror, characterized in that Installation of a first reflector (20) with an optical direction along the X direction and a second reflector (21) with an optical direction along the Y direction; The pose adjustment and fixing fixture includes: a first fixing unit (100), a second fixing unit (200), and a common support unit (300); one end of the first reflector (20) in the X direction is supported on the first fixing unit (100), and the other end is supported on the common support unit (300); one end of the second reflector (21) in the Y direction is supported on the second fixing unit (200), and the other end is supported on the common support unit (300); One end of the first reflector (20) supported on the first fixing unit (100) can perform Y-direction and Z-direction position adjustments; One end of the second reflector (21) supported on the second fixing unit (200) can perform X-direction and Z-direction position adjustments; One end of the first reflector (20) and the second reflector (21) supported on the common support unit (300) can have a pose angle yaw or pitch left and right or up and down when the other end performs position adjustment.

2. The pose adjustment and fixing fixture for the laser interferometer mirror according to claim 1, characterized in that, The first fixing unit (100) includes: a first fixing seat (1), a first reflector bracket (2), a Y-direction linear displacement adjustment component, and a first Z-direction adjustment component; The first fixing seat (1) is fixed on the displacement table, and the Y-direction linear displacement adjustment component is arranged on the first fixing seat (1); the first reflector bracket (2) is arranged on the Y-direction linear displacement adjustment component; The Y-direction linear displacement adjustment component is used to adjust the Y-direction position of the first reflector (20) at this end; The first Z-direction adjustment component is used to adjust the Z-direction position of the first reflector (20) at this end.

3. The pose adjustment and fixing fixture for the laser interferometer mirror according to claim 1, characterized in that The second fixing unit (200) includes: a second fixing seat (24), a second reflector bracket (25), an X-direction linear displacement adjustment component (26), and a second Z-direction adjustment component (27); The second fixing seat (24) is fixed on the displacement table, the X-direction linear displacement adjustment component (26) is arranged on the second fixing seat (24), and the second reflector bracket (25) is arranged on the X-direction linear displacement adjustment component (265); The X-direction linear displacement adjustment component (26) is used to adjust the X-direction position of the second reflector (21) at this end; The second Z-direction adjustment component (27) is used to adjust the Z-direction position of the second reflector (21) at this end.

4. The pose adjustment and fixing fixture for the laser interferometer mirror according to claim 2, wherein, The Y-direction linear displacement adjustment component includes: a nut plate (7), an adjusting set screw (8), a slider (11), a ball (13), and a ball bracket (14); The nut plate (7) is arranged on the side surface of the first fixing seat (1) in the Y direction; a threaded hole for cooperating with the adjusting set screw (8) is machined on the front end face of the nut plate (7); A slider (11) is slidably mounted on the first fixing seat (1), and the slider (11) can slide along the Y direction on the first fixing seat (1). The slider (11) is integrally connected with the first reflector bracket (2); the first reflector (20) is connected to the first reflector bracket (2) through the first Z-direction adjustment component; On both sides of the slider (11) in the X direction on the first fixing base (1), ball brackets (14) are provided. A row of balls (13) arranged in the Y direction are in rolling fit between the ball brackets (14) and the corresponding side of the slider (11). The adjusting setscrew (8) passes through the nut plate (7) and abuts against the slider (11).

5. The pose adjustment and fixing fixture for the laser interferometer mirror according to claim 4, characterized in that On the first fixing unit (100), a limiting plate (12) is provided at the end of the Y-direction displacement of the slider (11) for limiting the Y-direction displacement of the first reflector (20).

6. The pose adjustment and fixing fixture for the laser interferometer mirror according to claim 4, characterized in that, A tension spring A (10) is arranged in the Y direction between the slider (11) and the nut plate (7).

7. The pose adjustment and fixing fixture for the laser interferometer mirror according to any one of claims 2 or 4-6, characterized in that, The first Z-direction adjusting assembly includes: an adjusting plate (3) and a ball head setscrew (6). The adjusting plate (3) has a wedge-shaped portion (31); a groove for placing the wedge-shaped portion (31) of the adjusting plate (3) is provided on the rear end face of the first reflector bracket (2); a vertical through hole communicating with the groove is machined on the upper end face of the first reflector bracket (2), and a ball spring cap (22) is placed in the vertical through hole; a threaded hole communicating with the groove is machined on the front end face of the first reflector bracket (2) for installing the ball head setscrew (6). The ball spring cap (22) is an elastic member with a ball head end. The wedge-shaped portion (31) of the adjusting plate (3) is located in the groove on the rear end face of the first reflector bracket (2), and the wedge surface of the wedge-shaped portion (31) faces downward; the wedge-shaped portion (31) is connected to the first reflector (20). The upper end face of the wedge-shaped portion (31) abuts against the ball head end of the ball spring cap (22) arranged in the vertical through hole on the upper end face of the first reflector bracket (2); the ball head at the front end of the ball head setscrew (6) is located in the groove and contacts the wedge surface of the wedge-shaped portion (31).

8. The pose adjustment and fixing fixture for the laser interferometer mirror according to claim 7, characterized in that, The angle plate (3) further includes a flat plate portion (32) fixedly connected to the wedge-shaped portion (31). Spring pins (4) are respectively provided on the flat plate portion (32) and the first reflector bracket (2), and a tension spring B is installed in the Z direction between the two spring pins (4).

9. The pose adjustment and fixing fixture for the laser interferometer mirror according to any one of claims 1-6, characterized in that The common support unit (300) includes: a common support (15), a reflector ball bracket A (18), a reflector ball bracket B (23), and an upper and lower elastic pressing assembly. The common support (15) has two mutually perpendicular outer side faces, namely side face A with the normal direction in the X direction and side face B with the normal direction in the Y direction; the common support (15) is fixed on the displacement table. The reflector ball bracket A (18) is fixedly connected to the first reflector (20); the reflector ball bracket B (23) is fixedly connected to the second reflector (21). A ball end extends from the center of the end face of the reflector ball bracket A (18) opposite to side face A of the common support (15) towards the common support (15), and a ball end extends from the center of the end face of the reflector ball bracket B (23) opposite to side face B of the common support (15) towards the common support (15). The upper and lower elastic pressing assembly includes: a common support plate (16), a spring cap group A (17), and a spring cap group B; both the spring cap group A (17) and the spring cap group B include an upper spring cap and a lower spring cap. The upper surface of the common support (15) is a stepped surface, and the common support pressing plate (16) is arranged on the upper stepped surface of the upper end surface of the common support (15); the spherical end extending on the mirror ball support A (18) extends into the space between the common support (15) and the common support pressing plate (16) and is pressed between the upper spring pressing cap and the lower spring pressing cap of the spring pressing cap group A (17); the spherical end extending on the mirror ball support B (23) extends into the space between the common support (15) and the common support pressing plate (16) and is pressed between the upper spring pressing cap and the lower spring pressing cap of the spring pressing cap group B (23).

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