Device processing system

Abstract

The invention discloses a device processing system, and belongs to the technical field of semiconductor manufacturing. The device processing system is used for processing a device and comprises a detection device used for detecting the surface of the device; the first purging device and the second purging device are both used for cleaning the surface of the device; the device loading device is used for fixing a plurality of devices on the packaging tray; the first conveying device and the second conveying device are both used for conveying devices; wherein the device is driven by the first conveying device to sequentially pass through the detection device, the first purging device and the second conveying device; and under the condition that the device reaches the second conveying device, the device is driven by the second conveying device to sequentially pass through the second purging device and the device loading device. After the device processing system is adopted, the devices can be automatically detected, cleaned and loaded on the packaging tray, the device production efficiency is improved, the device delivery quality is guaranteed, the manual labor intensity can be reduced, and losses caused by human factors are reduced.

Description

Technical Field

[0001] This application belongs to the technical field of semiconductor manufacturing, and particularly relates to a device processing system. Background Art

[0002] A bar, also known as a semiconductor laser bar or LD (Laser Diode) bar, is a strip-shaped device formed by arranging multiple semiconductor laser diodes closely together.

[0003] In the manufacturing process of the bar, end face treatment, optical coating treatment, etc. will be performed on the bar.

[0004] In the related art, each processing step is completed by manually transporting the bar, and the production efficiency of the bar is relatively low. Summary of the Invention

[0005] This application aims to at least solve to a certain extent the technical problem of relatively low production efficiency of semiconductor devices such as bars in the related art. For this reason, this application provides a device processing system.

[0006] An embodiment of this application provides a device processing system for processing devices, including:

[0007] A detection device for detecting the surface of the device;

[0008] A first purging device and a second purging device, both for cleaning the surface of the device;

[0009] A device loading device for fixing a plurality of the devices on a tray;

[0010] A first transfer device and a second transfer device, both for transferring the device;

[0011] Wherein, driven by the first transfer device, the device sequentially passes through the detection device, the first purging device and the second transfer device; when the device reaches the second transfer device, the device sequentially passes through the second purging device and the device loading device driven by the second transfer device.

[0012] In some embodiments, the device processing system further includes:

[0013] A device storage device for storing the device;

[0014] A third transfer device for transferring the device on the device storage device to the first transfer device.

[0015] In some embodiments, the device processing system further includes a transfer cart configured to transfer the devices onto the device storage device and transfer the tray fixed with a plurality of the devices on the device loading device to a post-processing system.

[0016] In some embodiments, the device processing system further includes:

[0017] A tray storage device for storing the trays;

[0018] A fourth transfer device for transferring the trays on the tray storage device to the device loading device.

[0019] In some embodiments, along the X direction, the tray storage device, the fourth transfer device, and the device loading device are arranged in sequence.

[0020] In some embodiments, the first transfer device, the second purging device, and the device loading device are arranged in sequence around the circumferential direction of the second transfer device.

[0021] In some embodiments, the tray includes an upper clamping plate, a lower clamping plate, and a connecting member connecting the upper clamping plate and the lower clamping plate. The upper clamping plate is located above the lower clamping plate. The device loading device includes:

[0022] A support platform for supporting the upper clamping plate and the lower clamping plate

[0023] A first rotating member, the output end of which is connected to the support platform to drive the support platform to rotate;

[0024] A pressing member capable of switching between a working position of pressing the upper clamping plate and the lower clamping plate on the support platform and an idle position away from the support frame;

[0025] A first driving member for driving the connecting member to move so that the upper clamping plate and the lower clamping plate are connected through the connecting member.

[0026] In some embodiments, the first transfer device includes:

[0027] A support member, along the circumferential direction of which a plurality of placement positions for supporting the devices are arranged at intervals. The detection device, the first purging device, and the second transfer device are arranged in sequence along the circumferential direction of the support member;

[0028] A second rotating member, the output end of which is connected to the support member to drive the support member to rotate.

[0029] In some embodiments, the second purging device includes:

[0030] Dust cover, having an installation cavity and a through hole communicating with the installation cavity;

[0031] Blowing member, disposed in the installation cavity;

[0032] Clamping member, for clamping the device;

[0033] Second driving member, the output end of the second driving member is connected to the clamping member. Driven by the second driving member, the clamping end of the clamping member can switch between an extended position outside the dust cover through the through hole and a retracted position inside the dust cover where the device is aligned with the air outlet of the blowing member; under the condition that the clamping member is in the retracted position, the second conveying device places the device on the clamping member or removes the device from the clamping member.

[0034] In some embodiments, the device processing system further includes:

[0035] Exhaust fan, the air inlet of the exhaust fan communicates with the installation cavity;

[0036] Support base, the detection device, the first blowing device, the second blowing device, the device loading device, the first conveying device and the second conveying device are all installed on the support base.

[0037] The present invention has at least the following beneficial effects:

[0038] The first conveying device drives the device, so that the device sequentially passes through the detection device, the first blowing device and the second conveying device, so that the device is first detected by the detection device, then blown by the first blowing device, and then located beside the second conveying device, so that the second conveying device can pick up the detected and blown device for subsequent conveying actions. When the device that has been detected and first blown is located beside the second conveying device, the second conveying device drives the device that has been detected and first blown, so that the device first passes through the second blowing device and is secondarily blown by the second blowing device. After the secondary blowing, the second conveying device places the device on the collection tray on the device loading device. When multiple devices that have been secondarily blown are sequentially placed on the collection tray, the device loading device operates to fix the devices on the collection tray.

[0039] After adopting the device processing system of the present application, the device can automatically complete detection, cleaning, and loading on the loading tray, improving the efficiency of device production, ensuring the quality of devices leaving the factory, helping to reduce the labor intensity of workers, and reducing losses caused by human factors. The device processing system in the present application can thoroughly remove the dirt on the surface of the device through the dual purging of the first purging device and the second purging device, ensuring excellent cleaning effects. In addition, the device processing system also uses the device loading device to fix multiple devices on a single loading tray. This design enables operators to simultaneously carry multiple devices by simply picking up the loading tray, improving the operation efficiency of subsequent device coating and other process flows. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] To more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0041] Figure 1 Shows a schematic structural diagram of a device processing system in one or more embodiments of the present application.

[0042] Figure 2 Shows Figure 1 An enlarged view of part A in

[0043] Figure 3 Shows Figure 1 An enlarged view of part B in

[0044] Figure 4 Shows Figure 1 An enlarged view of part D in

[0045] Figure 5 Shows Figure 1 An enlarged view of part C in

[0046] Figure 6 Shows a schematic structural diagram of the device processing system in one or more embodiments of the present application with the dust cover hidden.

[0047] Figure 7 Shows Figure 6 An enlarged view of part E in

[0048] Figure 8 Shows Figure 6 An enlarged view of part F in

[0049] Reference numerals: 1000 - device processing system, 100 - device storage device, 110 - first storage rack, 110a - support position, 120 - first storage rack driving member, 200 - third transfer device, 210 - third clamping mechanism, 220 - driving mechanism, 221 - first electric cylinder, 222 - second electric cylinder, 300 - detection device, 400 - first purging device, 500 - first transfer device, 510 - support member, 510a - placement position, 520 - second rotating member, 600 - second transfer device, 700 - second purging device, 710 - dust cover, 710a - through hole, 720 - purging member, 730 - clamping member, 740 - second driving member, 750 - purging member driving member, 760 - third driving member, 800 - device loading device, 810 - support table, 820 - first rotating member, 830 - pressing member, 840 - first driving member, 900 - tray storage device, 910 - second storage rack, 920 - second storage rack driving member, 950 - fourth transfer device, 960 - transfer vehicle, 970 - exhaust fan, 980 - support base, 2000 - tray, 2000a - avoidance hole, 2100 - upper chuck, 2200 - lower chuck, 2300 - connecting member, 1000 - device processing system, 100 - device storage device. Detailed implementation manners

[0050] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts belong to the scope of protection of the present invention.

[0051] It should be noted that all the directional indications in the embodiments of the present invention are only used to explain the relative position relationship and movement conditions between components in a specific posture. If this specific posture changes, the directional indication will also change accordingly.

[0052] In the present invention, unless otherwise clearly defined and limited, terms such as "connection" and "fixation" should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components or the interaction relationship between two components, unless otherwise clearly defined. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0053] In addition, in the present invention, descriptions such as "first" and "second" are for descriptive purposes only, and should not be construed as indicating or implying their relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In addition, the technical solutions between various embodiments may be combined with each other, but it must be based on the fact that those of ordinary skill in the art can implement it. When the combination of technical solutions results in contradictions or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0054] In the related art, for example, semiconductor devices such as bar strips have the technical problem of low production efficiency. The embodiments of the present application provide a device processing system, which can at least to some extent solve the technical problem of low production efficiency of semiconductor devices such as bar strips.

[0055] The present application will be described below with reference to the accompanying drawings and specific embodiments:

[0056] As Figures 1 to 5 shown, the device processing system 1000 is used to process devices, including: a detection device 300, a first purging device 400, a second purging device 700, a device loading device 800, a first transfer device 500, and a second transfer device 600. The detection device 300 is used to detect the surface of the device. Both the first purging device 400 and the second purging device 700 are used to clean the surface of the device. The device loading device 800 is used to fix a plurality of devices on the tray 2000. Both the first transfer device 500 and the second transfer device 600 are used to transfer the devices. Among them, driven by the first transfer device 500, the device sequentially passes through the detection device 300, the first purging device 400, and the second transfer device 600; when the device reaches the second transfer device 600, the device sequentially passes through the second purging device 700 and the device loading device 800 driven by the second transfer device 600.

[0057] The detection device 300 can automatically detect dirt on the end face of the device, etc. The detection device 300 can be an AOI (Automated Optical Inspection) camera. The AOI camera can automatically detect and analyze dirt conditions such as dirt distribution and dirt size on the end face of the device, and take pictures of the end face of the device for retention, which helps to improve the device detection efficiency.

[0058] The first purging device 400 can blow out gases, such as nitrogen, argon, helium, etc. Under the action of the first purging device 400, dirt such as large particles on the end face of the device is separated from the device, realizing the preliminary cleaning of the end face of the device.

[0059] The second purging device 700 can also blow out gases, such as nitrogen, argon, helium, etc. Under the action of the second purging device 700, the stubborn dirt on the device end face is detached, achieving deep cleaning of the device end face. In some embodiments, the second purging device 700 blows out liquid carbon dioxide, pressurizes the liquid carbon dioxide and releases it through the second purging device 700 at the solid-liquid critical point, forming fine snowflake-shaped dry ice at the air outlet of the second purging device 700. The snow crystal gasifies instantly when hitting the device, and the shock wave generated by the volume expansion loosens the dirt on the device surface. The extremely low temperature of the dry ice also helps to embrittle the dirt, making the dirt easier to remove, and effectively removing pollutants such as particulate matter on the device.

[0060] The structures of the first purging device 400 and the second purging device 700 are diverse and are not limited in this application. They can both include components such as gas cylinders, air pipes, and nozzles. The gas cylinder is used to store gas, and the air pipe connects the gas cylinder and the nozzle, enabling the gas in the gas cylinder to be ejected from the nozzle to purge the surface of the device.

[0061] A tray 2000 can fix multiple devices. The device loading device 800 fixes multiple devices on a tray 2000, facilitating subsequent device transfer.

[0062] The first transfer device 500 drives the device, enabling the device to pass through the detection device 300, the first purging device 400, and the second transfer device 600 in sequence. Thus, the device is first detected by the detection device 300, then purged by the first purging device 400, and then located beside the second transfer device 600, facilitating the second transfer device 600 to pick up the device that has been detected and purged for subsequent transfer actions. When the device that has been detected and first purged is located beside the second transfer device 600, the second transfer device 600 drives the device that has been detected and first purged, enabling the device to first pass through the second purging device 700 and be secondarily purged by the second purging device 700. After the secondary purging, the second transfer device 600 places the device on the tray 2000 on the device loading device 800. When multiple devices that have been secondarily purged are sequentially placed on the tray 2000, the device loading device 800 operates to fix the devices on the tray 2000.

[0063] After the device processing system 1000 of the present application is adopted, the device can automatically complete detection, cleaning and loading on the tray 2000, improving the efficiency of device production, ensuring the quality of devices leaving the factory, helping to reduce the manual labor intensity and reduce losses caused by human factors. The device processing system 1000 in the present application can thoroughly remove the dirt on the surface of the device through the double purging of the first purging device 400 and the second purging device 700, ensuring an excellent cleaning effect. In addition, the device processing system 1000 also uses the device loading device 800 to fix multiple devices on a tray 2000. This design enables the operator to carry multiple devices simultaneously by simply picking up the tray 2000, improving the operation efficiency of subsequent device coating and other process flows.

[0064] It should be noted that the device can be a semiconductor device such as a bar, which is not limited in the present application. In some embodiments of the present application, the device includes a bar body and a bar fixture. Multiple bar bodies are stacked in the bar fixture, and the bar fixture fixes the stacked bar bodies. In these embodiments, the detection device 300 detects the end face of the bar body, the first purging device 400 and the second purging device 700 purge the end face of the bar body, and the device loading device 800 can indirectly fix the bar body by fixing the bar fixture. The structure of the bar fixture is diverse and is well known to those skilled in the art, and is not limited in the present application.

[0065] In some embodiments, the second transfer device 600 is a robotic arm, and the robotic arm can pick up and move the device. The structure of the robotic arm is diverse and is well known to those skilled in the art, and will not be elaborated here.

[0066] As Figure 1 and Figure 2 shown, in some embodiments, the device processing system 1000 further includes a device storage device 100 and a third transfer device 200. The device storage device 100 is used to store devices. The third transfer device 200 is used to transfer the devices on the device storage device 100 to the first transfer device 500. After such a design, the devices to be processed can be stored on the device storage device 100, and when there is a vacancy on the first transfer device 500, the devices are automatically placed on the first transfer device 500 through the third transfer device 200, realizing the full automation of device storage, transfer, detection, double purging and loading, helping to improve production efficiency, ensuring the consistency and quality of device processing, reducing human intervention, and further reducing the labor intensity and losses caused by human factors. The third transfer device 200 can be a robotic arm or the like.

[0067] As Figure 2As shown, in some embodiments, the device storage device 100 includes a first storage rack 110 and a first storage rack drive member 120. The first storage rack 110 has a plurality of support positions 110a spaced along the height direction, and the support positions 110a support the devices; the output end of the first storage rack drive member 120 is connected to the first storage rack 110 to drive the first storage rack 110 to move along the height direction (i.e., Figure 1 the Z direction in

[0068] As Figure 2 shown, in some embodiments, the third transfer device 200 includes a third clamping mechanism 210 and a drive mechanism 220. The third clamping mechanism 210 is used to clamp the devices on the first storage rack 110; the output end of the drive mechanism 220 is connected to the third clamping mechanism 210 to drive the third clamping mechanism 210 to move between the first storage rack 110 and the first transfer device 500. The third clamping mechanism 210 can be a pneumatic cylinder jaw, a hydraulic cylinder jaw, a lead screw nut drive jaw, etc., which is not limited in this application. The drive mechanism 220 can be a hydraulic cylinder, a pneumatic cylinder, a linear motor, a robotic arm, etc. When it is necessary to replenish the devices on the first transfer device 500, the drive mechanism 220 drives the third clamping member 730 to approach the devices on the first storage rack 110, and then the third clamping mechanism 210 operates to clamp the devices. Then the drive mechanism 220 operates to drive the third clamping mechanism 210 to move, so that the devices clamped by the third clamping mechanism 210 are located on the first transfer device 500. Then the third clamping mechanism 210 operates to release the devices, and the devices are placed on the first transfer device 500.

[0069] As Figure 2As shown, in some embodiments, the first storage rack 110 and the second transfer device 600 are spaced apart along the Y direction. The driving mechanism 220 includes a first electric cylinder 221 and a second electric cylinder 222. The second electric cylinder 222 is arranged along the Z direction, and the first electric cylinder 221 is arranged along the Y direction. The first electric cylinder 221 is fixed to the output end of the second electric cylinder 222, and the third clamping mechanism 210 is installed at the output end of the first electric cylinder 221. After such a design, by arranging the electric cylinder along the Z direction, the third clamping mechanism 210 can be driven to move along the Z direction, so that the third clamping mechanism 210 can clamp devices at different heights on the first storage rack 110. By arranging the electric cylinder along the Y direction, the third clamping mechanism 210 can be driven to move along the Y direction, so that the devices on the first storage rack 110 can be moved onto the first transfer device 500.

[0070] As Figure 1 shown, in some embodiments, the device processing system 1000 further includes a transport vehicle 960. The transport vehicle 960 is used to transfer devices to the device storage device 100 and transfer the tray 2000 fixed with multiple devices on the device loading device 800 to the post-processing system. It should be noted that the transport vehicle 960 can move and can pick up devices and the tray 2000, and its structure is diverse and not limited in this application. In some embodiments, the transport vehicle 960 is an AGV vehicle (Automated Guided Vehicle) equipped with a robotic arm. The transport vehicle 960 automatically transfers the devices to be processed to the first storage rack 110 of the device storage device 100 continuously, and transfers the tray 2000 containing multiple devices that have been processed by the device processing system 1000 of this application to the post-processing system, so that the devices can complete subsequent further processing in the post-processing system, saving labor costs and improving the production efficiency of the devices. The post-processing system can be an optical coating system, an aging test system, a packaging system, etc., which are not limited in this application.

[0071] As Figure 1 and Figure 3 shown, in some embodiments, the device processing system 1000 further includes a tray storage device 900 and a fourth transfer device 950. The tray storage device 900 is used to store the trays 2000; the fourth transfer device 950 is used to transfer the trays 2000 on the tray storage device 900 to the device loading device 800. The trays 2000 fixed with devices are stored neatly and orderly on the trays 2000. When there is a vacant position on the device loading device 800, the trays 2000 are automatically placed on the device loading device 800 through the fourth transfer device 950, realizing the full automation of the whole process of storing, transferring and fixing the trays 2000, which helps to improve the production efficiency of the devices.

[0072] In some embodiments, the fourth transfer device 950 is a robotic arm.

[0073] As Figure 1 shown, in some embodiments, along the X direction, the tray storage device 900, the fourth transfer device 950, and the device loading device 800 are arranged in sequence. After such a design, the fourth transfer device 950 is located between the tray storage device 900 and the device loading device 800, which helps to improve the transfer efficiency of the fourth transfer device 950.

[0074] In some embodiments, to facilitate the second transfer device 600 to pick up the device from the first transfer device 500 and sequentially transfer the device to the second purging device 700 and the device loading device 800, the first transfer device 500, the second purging device 700, and the device loading device 800 are arranged in sequence around the circumferential direction of the second transfer device 600.

[0075] As Figure 3 and Figure 4 shown, in some embodiments, the tray 2000 includes an upper chuck 2100, a lower chuck 2200, and a connecting member 2300 connecting the upper chuck 2100 and the lower chuck 2200, and the upper chuck 2100 is located above the lower chuck 2200. The device loading device 800 includes: a support platform 810, a first rotating member 820, a pressing member 830, and a first driving member 840. The support platform 810 is used to support the upper chuck 2100 and the lower chuck 2200; the output end of the first rotating member 820 is connected to the support platform 810 to drive the support platform 810 to rotate; the pressing member 830 can switch between a working position for pressing the upper chuck 2100 and the lower chuck 2200 on the support platform 810 and an idle position away from the support frame; the first driving member 840 drives the connecting member 2300 to move so that the upper chuck 2100 and the lower chuck 2200 are connected through the connecting member 2300.

[0076] The connecting member 2300 can be a bolt, a screw, etc. The first rotating member 820 can be a motor, and the first rotating member 820 drives the support platform 810 to rotate around the Z direction. Both the upper chuck 2100 and the lower chuck 2200 are placed on the tray storage device 900. Specifically, the upper chuck 2100 is located above the lower chuck 2200, and a plurality of devices are placed between the upper chuck 2100 and the lower chuck 2200. The fourth transfer device 950 first picks up the lower chuck 2200 from the tray storage device 900 and places it on the support platform 810. Then, the second transfer device 600 sequentially clamps and places the devices on the second purging device 700 on the lower chuck 2200. After a plurality of devices are placed on the lower chuck 2200, the fourth transfer device 950 then picks up the upper chuck 2100 from the tray storage device 900 and places it on the lower chuck 2200. Then, the pressing member 830 presses the upper chuck 2100 and the lower chuck 2200, so that the upper chuck 2100 and the lower chuck 2200 are fixed. Finally, the first driving member 840 drives the connecting member 2300 to move, so that the connecting member 2300 connects the upper chuck 2100 and the lower chuck 2200. Under the condition that the upper chuck 2100 and the lower chuck 2200 are not pressed, the pressing member 830 is far away from the support platform 810, so as to avoid interfering with the placement of the device on the lower chuck 2200 and avoid interfering with the upper chuck 2100 from being placed on the lower chuck 2200. The first rotating member 820 drives the support platform 810 to rotate, so that the positions of the areas for storing devices on the lower chuck 2200 can be changed, and sequentially approach the second transfer device 600, which facilitates the second transfer device 600 to sequentially place the devices at various positions on the lower chuck 2200.

[0077] The structures of the upper chuck 2100 and the lower chuck 2200 are diverse. In some embodiments, both the upper chuck 2100 and the lower chuck 2200 are circular. Four avoidance holes 2000a are formed on both the upper chuck 2100 and the lower chuck 2200. The connecting member 2300 is a bolt, and the upper chuck 2100 and the lower chuck 2200 are connected by four bolts. After the device is clamped by the upper chuck 2100 and the lower chuck 2200, the upper and lower end faces of the device are respectively exposed through the avoidance holes 2000a, so as to facilitate subsequent process treatments such as coating on the end faces of the device.

[0078] As Figure 3 shown, in some embodiments, the pressing member 830 includes a cylinder and a pressing head arranged at the front end of the piston rod of the cylinder. The cylinder acts to drive the pressing head to move, so that the pressing head can be switched between the working position of pressing the upper chuck 2100 and the lower chuck 2200 and the idle position away from the support frame.

[0079] In some embodiments, the connecting member 2300 is a bolt, and the first driving member 840 is a robotic arm equipped with an electric screwdriver bit. In these embodiments, the bolt is placed in the bolt hole position of the upper chuck 2100. After the upper chuck 2100 is picked up and placed above the lower chuck 2200, the bolt is placed on the lower chuck 2200 together with the upper chuck 2100 and aligned with the bolt hole position on the lower chuck 2200. Then, the robotic arm drives the electric screwdriver bit to move and align with the bolt, and then the electric screwdriver bit rotates to tighten each bolt in sequence. These embodiments can also make each bolt located under the electric screwdriver bit in sequence and be tightened by the electric screwdriver bit in sequence by controlling the rotation of the first rotating member 820.

[0080] As Figure 4 shown, in some embodiments, the tray storage device 900 includes a second storage rack 910 and a second storage rack driving member 920. The second storage rack 910 has a plurality of support layers arranged at intervals in the height direction. One upper chuck 2100 and one lower chuck 2200 can be placed on each layer, and the upper chuck 2100 and the lower chuck 2200 on each layer are arranged at intervals in the Y direction. The output end of the second storage rack driving member 920 is connected to the second storage rack 910 to drive the second storage rack 910 to move in the Y direction. The second storage rack driving member 920 can be a hydraulic cylinder, a pneumatic cylinder, a screw-nut driving structure, etc., which is not limited in this application. The second storage rack driving member 920 drives the second storage rack 910 to move in the Y direction so that the upper chuck 2100 and the lower chuck 2200 located on the second storage rack 910 can be aligned with the fourth transfer device 950 in the Y direction respectively, so as to facilitate the fourth transfer device 950 to pick up the upper chuck 2100 and the lower chuck 2200.

[0081] In some embodiments, after the device is processed by the post-processing system, the transport vehicle 960 sends the tray 2000 containing the device back to the device loading device 800, disassembles the connecting member 2300 through the device loading device 800 to separate the upper chuck 2100 and the lower chuck 2200, returns the upper chuck 2100 and the lower chuck 2200 to the second storage rack 910 through the fourth transfer device 950, and transports the device separated from the upper chuck 2100 and the lower chuck 2200 to other process flows through the transport vehicle 960.

[0082] As Figure 6 and Figure 8As shown, in some embodiments, the first transfer device 500 includes a support member 510 and a second driving and rotating member 520. The support member 510 is circumferentially provided with a plurality of placement positions 510a for supporting devices at intervals along its circumference. The detection device 300, the first purging device 400, and the second transfer device 600 are sequentially arranged along the circumference of the support member 510. The output end of the second driving and rotating member 520 is connected to the support member 510 to drive the support member 510 to rotate. Such a design helps to improve the compactness of the structures of the first purging device 400, the second transfer device 600, the detection device 300, and the first transfer device 500, and reduces the space occupied by the device processing system 1000. The second driving and rotating member 520 can be a motor. The rotating shaft of the support member 510 is arranged along the Z direction, and a plurality of support positions 110a are provided on the support member 510 so that the support member 510 can transfer a plurality of devices simultaneously. The detection device 300, the first purging device 400, and the second transfer device 600 are sequentially arranged along the circumference of the support member 510 so that when the support member 510 rotates, the devices thereon can sequentially pass through the detection device 300, the first purging device 400, and the second transfer device 600.

[0083] As Figure 8 shown, in some embodiments, the support position 110a is a support groove opened on the support member 510, and a through hole is opened on the bottom wall of the support groove. The lower end surface of the device is exposed outside through the through hole. A plurality of detection devices 300 are provided. The detection heads of the plurality of detection devices 300 are respectively arranged on the upper side and the lower side of the support member 510 and are located on the rotation path of the through hole. A plurality of first purging devices 400 are provided. The nozzles of the plurality of first purging devices 400 are respectively arranged on the upper side and the lower side of the support member 510 and are located on the movement path of the through hole. After such a design, the detection device 300 located on the upper side of the support member 510 can detect the upper end surface of the device, the detection device 300 located on the lower side can detect the lower end surface of the device, the first purging device 400 located on the upper side of the support member 510 can purge the upper end surface of the device, and the first purging device 400 located on the lower side can purge the lower end surface of the device.

[0084] As Figure 8 shown, in some embodiments, two detection devices 300 and two first purging devices 400 are provided. Along the rotation direction of the support member 510, the detection device 300 located on the lower side of the support member 510, the detection device 300 located on the upper side of the support member 510, the first purging device 400 located on the upper side of the support member 510, and the first purging device 400 located on the lower side of the support member 510 are arranged at intervals around the axis of the support member 510.

[0085] In some embodiments, the second purging device 700 includes: a dust cover 710, a purging member 720, a clamping member 730, and a second driving member 740. The dust cover 710 has an installation cavity and a through hole 710a communicating with the installation cavity; the purging member 720 is disposed in the installation cavity; the clamping member 730 is used for clamping a device; the output end of the second driving member 740 is connected to the clamping member 730. Driven by the second driving member 740, the clamping end of the clamping member 730 can switch between an extended position outside the dust cover 710 passing through the through hole 710a and a retracted position inside the dust cover 710 where the device is aligned with the air outlet of the purging member 720; under the condition that the clamping member 730 is in the retracted position, the second conveying device 600 places the device on the clamping member 730 or removes the device from the clamping member 730.

[0086] The purging member 720 can blow out gaseous or liquid gas, and its structure is diverse and not limited in this application. It can include components such as a gas tank, a gas pipe, and a nozzle. The gas pipe connects the nozzle and the gas tank. The clamping member 730 can be a cylinder jaw, and the second driving member 740 drives the clamping member 730 to move, so that the clamping end of the clamping member 730 can be located outside or inside the dust cover 710. When the clamping member 730 needs to clamp the device and purge the device through the purging member 720, the second driving member 740 drives the clamping member 730 to move, so that the output end of the clamping member 730 extends out of the dust cover 710 through the through hole 710a. The second conveying device 600 clamps and places the device on the support member 510 onto the output end of the clamping member 730. After the clamping member 730 clamps the device, the second driving member 740 drives the clamping member 730 to move, so that the device on the clamping member 730 is located inside the dust cover 710 and is purged by the purging member 720 inside the dust cover 710. After the design of this application, the second purging device 700 integrates the dust cover 710, the purging member 720, the clamping member 730, and the second driving member 740. By controlling the movement of the clamping member 730 through the second driving member 740, the clamping member 730 can be flexibly switched inside and outside the dust cover 710, facilitating the unloading of the device by the second conveying device 600. At the same time, the purging member 720 purges the device inside the dust cover 710, which can effectively isolate external pollution, ensure the safety and cleanliness of the purging process, and improve the accuracy and efficiency of device processing.

[0087] In some embodiments, the through hole 710a is opened on the upper end surface of the dust cover 710, and the second driving member 740 drives the clamping member 730 to move up and down along the Z direction. The second driving member 740 can be a cylinder, a hydraulic cylinder, etc.

[0088] In some embodiments, two purging members 720 are provided, and the nozzles of the two purging members 720 are oppositely arranged. Under the clamping of the clamping member 730, the device is located between the two nozzles, and the two purging members 720 simultaneously purge the upper and lower end surfaces of the device, improving the purging efficiency.

[0089] In some embodiments, the second purging device 700 further includes a purging member driving member 750. The purging member driving member 750 drives the purging member 720 to move up and down, so as to facilitate the purging member 720 to purge different areas of the device. The purging member driving member 750 can be an electric cylinder, a cylinder, etc.

[0090] In some embodiments, the second purging device 700 further includes a third driving member 760. The output end of the third driving member 760 is connected to the second driving member 740, driving the second driving member 740 to move in the X direction, so that the device on the clamping member 730 can move in the X direction, to facilitate the purging member 720 to purge different areas of the device. The third driving member 760 can be an electric cylinder, a cylinder, etc.

[0091] In some embodiments, the two purging members 720 are arranged at intervals in the Y direction. After the clamping member 730 clamps the device, it can drive the device to rotate 90° around the X direction, so that the upper and lower end faces of the device face the two purging members 720 respectively.

[0092] In some embodiments, the device processing system 1000 further includes an exhaust fan 970. The air inlet of the exhaust fan 970 is communicated with the installation cavity. In these embodiments, the purging member 720 sprays liquid carbon dioxide, and the tiny dirt on the surface of the device is removed by the gasification of the snowflake-shaped dry ice formed by the nozzle of the purging member 720. The gasified carbon dioxide gas is discharged by the gas exhaust fan 970, avoiding the atomization of the installation cavity. The structure of the exhaust fan 970 is diverse and is well known to those skilled in the art, and will not be elaborated here.

[0093] In some embodiments, the device processing system 1000 further includes a support base 980. The detection device 300, the first purging device 400, the second purging device 700, the device loading device 800, the first transfer device 500 and the second transfer device 600 are all installed on the support base 980. In some embodiments, the device storage device 100, the third transfer device 200, the tray storage device 900 and the fourth transfer device 950 are also all installed on the support base 980.

[0094] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine the different embodiments or examples described in this specification.

[0095] In addition, the technical solutions between various embodiments can be combined with each other, but it must be based on the ability of those of ordinary skill in the art to implement. When the combination of technical solutions results in contradictions or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection required by this application.

[0096] Although the embodiments of the present application have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and purposes of the present application. The scope of the present application is defined by the claims and their equivalents.

Claims

1. A device processing system, characterized in that, For a device processing system, comprising: A detection device (300) for detecting the surface of the device; A first purging device (400) and a second purging device (700), both for cleaning the surface of the device; A device loading device (800) for fixing a plurality of the devices on a tray (2000); A first transfer device (500) and a second transfer device (600), both for transferring the device; Wherein, driven by the first transfer device (500), the device sequentially passes through the detection device (300), the first purging device (400) and the second transfer device (600); when the device reaches the second transfer device (600), the device sequentially passes through the second purging device (700) and the device loading device (800) driven by the second transfer device (600).

2. The device processing system according to claim 1, wherein The device processing system (1000) further comprises: A device storage device (100) for storing the device; A third transfer device (200) for transferring the device on the device storage device (100) to the first transfer device (500).

3. The device processing system according to claim 2, characterized in that, The device processing system (1000) further comprises a transfer cart (960), and the transfer cart (960) is used for transferring the device to the device storage device (100), and for transferring the tray (2000) with a plurality of the devices fixed thereon on the device loading device (800) to a post-processing system.

4. The device processing system according to claim 1, characterized in that, The device processing system (1000) further comprises: A tray storage device (900) for storing the tray (2000); A fourth transfer device (950) for transferring the tray (2000) on the tray storage device (900) to the device loading device (800).

5. The device processing system according to claim 4, wherein Along the X direction, the tray storage device (900), the fourth transfer device (950) and the device loading device (800) are sequentially arranged.

6. The device processing system according to claim 1, wherein, The first transfer device (500), the second purging device (700) and the device loading device (800) are sequentially arranged around the circumference of the second transfer device (600).

7. The device processing system according to any one of claims 1-6, characterized in that, The tray (2000) comprises an upper chuck (2100), a lower chuck (2200) and a connecting member (2300) connecting the upper chuck (2100) and the lower chuck (2200), the upper chuck (2100) is located above the lower chuck (2200), and the device loading device (800) comprises: A support platform (810) for supporting the upper chuck (2100) and the lower chuck (2200); A first rotating member (820), the output end of the first rotating member (820) is connected to the support platform (810) to drive the support platform (810) to rotate; A pressing member (830) capable of switching between a working position of pressing the upper chuck (2100) and the lower chuck (2200) on the support platform (810) and an idle position away from the support frame; The first driving member (840) drives the connecting member (2300) to move, so that the upper chuck (2100) and the lower chuck (2200) are connected through the connecting member (2300).

8. The device processing system according to any one of claims 1-6, characterized in that, The first conveying device (500) includes: A support member (510) is circumferentially and spacedly provided with a plurality of placement positions (510a) for supporting the device. The detection device (300), the first purging device (400), and the second conveying device (600) are sequentially arranged along the circumference of the support member (510). A second rotating member (520), the output end of the second rotating member (520) is connected to the support member (510) to drive the support member (510) to rotate.

9. The device processing system according to any one of claims 1-6, characterized in that, The second purging device (700) includes: A dust cover (710) having an installation cavity and a through hole (710a) communicating with the installation cavity; A purging member (720) disposed in the installation cavity; A clamping member (730) for clamping the device; A second driving member (740), the output end of the second driving member (740) is connected to the clamping member (730). Driven by the second driving member (740), the clamping end of the clamping member (730) can switch between an extended position outside the dust cover (710) through the through hole (710a) and a retracted position inside the dust cover (710) where the device is aligned with the air outlet of the purging member (720). Under the condition that the clamping member (730) is in the retracted position, the second conveying device (600) places the device on the clamping member (730) or removes the device from the clamping member (730).

10. The device processing system according to claim 9, characterized in that, The device processing system (1000) further includes: An exhaust fan (970), the air inlet of the exhaust fan (970) is communicated with the installation cavity; A support base (980), the detection device (300), the first purging device (400), the second purging device (700), the device loading device (800), the first conveying device (500), and the second conveying device (600) are all installed on the support base (980).

Images