Cleaning method of dry vacuum pump and cleaning device of dry vacuum pump

Abstract

The present invention relates to a method for cleaning a dry vacuum pump in which deposits remain. The present invention is provided with: a start-up confirmation check that confirms whether or not the dry vacuum pump can be started up; a regeneration treatment step that is executed when the dry vacuum pump cannot be started up; and a continuation treatment step that is executed when the dry vacuum pump can be started up or when the dry vacuum pump can be started up after the regeneration treatment step. The regeneration treatment step is a step for introducing a high-temperature fluid into the dry vacuum pump to remove the accumulated material remaining therein. The continuous processing step is a step for introducing a high-temperature fluid into the dry vacuum pump while the dry vacuum pump is activated, thereby removing the deposits remaining in the dry vacuum pump.

Description

Technical Field

[0001] The present invention relates to a cleaning method for a dry vacuum pump used in a vacuum device, and a cleaning device for the dry vacuum pump used in this method. Background Art

[0002] A dry vacuum pump is provided in an exhaust system of a vacuum device such as a CVD device or an etching device for manufacturing semiconductors, liquid crystal panels, etc. It is known that this dry vacuum pump is used to suck the reacted process gas discharged from within a process device such as a vacuum chamber, so deposits such as powder, liquid, or colloidal substances adhere and accumulate inside due to long-term use. In the worst case, it may not be possible to start due to solidified deposits.

[0003] In order to avoid the above-mentioned failures, conventionally, the dry vacuum pump after operation has been periodically disassembled and overhauled, but this overhaul has the problem of taking a lot of time and cost. Therefore, as an existing technology capable of solving the problems related to such overhauls, for example, in the following Patent Document 1 (Japanese Unexamined Patent Application Publication No. 2021-195893), a vacuum pump is disclosed which rotates the rotating blades of a turbomolecular pump to exhaust gas, and has a cleaning function unit for cleaning deposits inside the vacuum pump and a deposit detection function unit for detecting the accumulation of the deposits. According to this technology, it is possible to provide a vacuum pump that can remove deposits without overhaul and can also detect the completion of deposit removal. Prior Art Documents Patent Documents

[0004] Patent Document 1: Japanese Unexamined Patent Application Publication No. 2021-195893 Summary of the Invention Problems to be Solved by the Invention

[0005] However, the above-mentioned prior art has the following problems. That is, when a cleaning function unit, a deposit detection function unit, etc. are added to the vacuum pump, the following situation may occur: Even if there is no problem with the function of the vacuum pump itself, the vacuum pump has to be stopped when a failure occurs in the cleaning function unit, the deposit detection function unit, etc. In addition, in a vacuum pump with various added functions, its structure becomes complex, and when an overhaul is required, it takes more time and cost than a conventional vacuum pump. As a result, it is desirable to perform so-called replacement maintenance of replacing the operating vacuum pump with a standby pump of the same type, rather than installing a maintenance mechanism in the vacuum pump itself. However, for a dry vacuum pump that cannot start due to solidified deposits, a cleaning method for the dry vacuum pump that can perform regeneration or life extension equivalent to an overhaul in a simpler way has not been realized.

[0006] Therefore, the main object of the present invention is to provide a cleaning method for a dry vacuum pump in which deposits are fixed inside, which can remove the deposits fixed inside the dry vacuum pump for regeneration or life extension in a shorter time and more simply than a major overhaul, and a cleaning device for a dry vacuum pump used in this method. Technical means for solving the problem

[0007] In order to achieve the above object, the present invention is configured as follows for a cleaning method of a dry vacuum pump in which deposits are retained inside, as Figures 1 to 2 shown. That is, it includes a start confirmation check S3 for confirming whether the dry vacuum pump can be started, a regeneration treatment step S4 executed when the above dry vacuum pump cannot be started, and a life extension treatment step S6 executed when the above dry vacuum pump can be started or becomes able to be started after the above regeneration treatment step S4. The above regeneration treatment step S4 is a step of introducing a high-temperature fluid into the inside of the above dry vacuum pump to remove the retained above deposits. In addition, the above life extension treatment step S6 is a step of introducing a high-temperature fluid into the inside of the dry vacuum pump in a state where the dry vacuum pump has been started to remove the above deposits remaining inside the dry vacuum pump.

[0008] The present invention, for example, has the following effects. Since which one of the regeneration treatment step and the life extension treatment step is to be executed is selected according to the startable state of the dry vacuum pump caused by deposits retained inside, deposits inside the dry vacuum pump can be efficiently removed.

[0009] In the present invention, preferably, the high-temperature fluid is formed by heating at least one fluid selected from the group consisting of air, nitrogen, oxygen, argon, hydrofluoric acid, and chlorine trifluoride to 50°C or more and 400°C or less. In this case, most of the deposits retained in the dry vacuum pump can be removed chemically or physically. Here, when the temperature of the high-temperature fluid is less than 50°C, it is sometimes difficult to heat the deposits to reduce their viscosity. On the contrary, when the temperature of the high-temperature fluid exceeds 400°C, it sometimes has an adverse effect on seals and the like installed on the dry vacuum pump.

[0010] In addition, in the present invention, preferably, in the above regeneration treatment step and the above life extension treatment step, in addition to the above high-temperature fluid, active species are also introduced into the inside of the above dry vacuum pump. In this case, when the deposits are mainly composed of a firmly fixed substance such as SiO2 (silicon dioxide), the removal effect of the deposits can be particularly improved.​ Furthermore, preferably, when introducing a high-temperature fluid into the dry vacuum pump, the pressure of the high-temperature fluid is varied. Additionally, preferably, while introducing the high-temperature fluid into the dry vacuum pump, the start / stop of the dry vacuum pump is repeated.

[0011] The "cleaning device for a dry vacuum pump" of the second invention in the present invention is a device for implementing the above method. For example, as Figure 3 shown, the cleaning device for a dry vacuum pump is configured as follows. The cleaning device is characterized by including: an inlet pipe 14 connected to the suction port of the dry vacuum pump 12; an outlet pipe 16 connected to the exhaust port of the dry vacuum pump 12; a high-temperature fluid supply means 18 for supplying a high-temperature fluid into the dry vacuum pump 12 via the inlet pipe 14; an atmospheric pressure exhaust pipeline 16a and a reduced-pressure exhaust pipeline 16b, which are branched from the downstream end of the outlet pipe 16 and can switch the flow destination of the gas; a vacuum pump 20 provided in the reduced-pressure exhaust pipeline 16b; and a decontamination device 22 provided on the downstream side of the atmospheric pressure exhaust pipeline 16a and the reduced-pressure exhaust pipeline 16b for decontaminating the exhaust gas discharged from the dry vacuum pump 12.

[0012] In the present invention, preferably, an active species supply means 24 is further included for supplying active species into the dry vacuum pump 12 via the inlet pipe 14. Additionally, preferably, a trapping device 26 for trapping components other than the gas discharged from the dry vacuum pump 12 is provided in the outlet pipe 16.

[0013] Furthermore, in the present invention, preferably, a heating device 28 is included for heating the dry vacuum pump 12 from the outside. Particularly preferably, the heating means of the heating device 28 is induction heating. Additionally, preferably, a preheating chamber is further provided for preheating the dry vacuum pump 12 for which a cleaning operation will be performed next. Advantages of the Invention

[0014] According to the present invention, it is possible to provide a cleaning method for a dry vacuum pump and a cleaning device for a dry vacuum pump used in the method, which can remove deposits adhering to the inside of the dry vacuum pump more simply and in a shorter time compared to a major overhaul for regeneration or life extension of the dry vacuum pump in which deposits are fixed inside. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is a flowchart showing an example of the cleaning method for a dry vacuum pump of the present invention. Figure 2is a flowchart showing Figure 1 a subroutine of Figure 2 A shows a subroutine of the regeneration process. Figure 2 B shows a subroutine of the life extension process. Figure 3 is an explanatory diagram showing the outline of the cleaning device of the dry vacuum pump according to an embodiment of the present invention. Detailed Embodiment

[0016] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. Figure 1 is a flowchart showing an example of the cleaning method of the dry vacuum pump of the present invention. Figure 2 is a flowchart showing Figure 1 a subroutine of Figure 3 is an explanatory diagram showing the outline of the cleaning device 10 of the dry vacuum pump according to an embodiment of the present invention. The cleaning device 10 of the dry vacuum pump of the present embodiment is a device for regenerating and extending the life of the dry vacuum pump 12 in which deposits are retained inside. As shown in this Figure 3 figure, it is generally composed of an inlet pipe 14, an outlet pipe 16, a high-temperature fluid supply means 18, a vacuum pump 20, a decontamination device 22, and an active species supply means 24 provided as needed. They are attached with a control system, a cooling water system, etc. which are not shown.

[0017] The inlet pipe 14 is connected to the suction port of the dry vacuum pump 12 installed in the cleaning chamber 32 covered by the cover 30, and is used to introduce high-temperature fluid etc. into the dry vacuum pump 12. Therefore, the downstream end of the fluid supply pipe 50 of the high-temperature fluid supply means 18 described later is connected to this inlet pipe 14. In addition, a pressure gauge 34 for measuring the internal pressure is installed in this inlet pipe 14.

[0018] The outlet pipe 16 is connected to the exhaust port of the dry vacuum pump 12 installed in the cleaning chamber 32 covered by the cover 30, and is used to transfer the high-temperature fluid that has flowed through the dry vacuum pump 12 and has become exhaust gas or deposits etc. discharged from the inside of the dry vacuum pump 12 through this high-temperature fluid.

[0019] The downstream end of this outlet pipe 16 bifurcates to form two branch pipes. One of them becomes the atmospheric pressure exhaust pipe line 16a, and the other becomes the reduced pressure exhaust pipe line 16b. Among them, a vacuum pump 20 is provided in the middle of the reduced pressure exhaust pipe line 16b. In addition, a switching valve 36 and a switching valve 38 are installed in the atmospheric pressure exhaust pipe line 16a and the reduced pressure exhaust pipe line 16b respectively. By switching these valves, it is possible to switch which one of the atmospheric pressure exhaust pipe line 16a and the reduced pressure exhaust pipe line 16b the exhaust gas etc. flows through. In addition, in Figure 3In the state shown, switching valve 36 is closed and switching valve 38 is open, so the exhaust gas etc. is in a state of flowing through the decompression exhaust pipe line 16b.

[0020] Here, in the present embodiment, a trapping device 26 described later is installed upstream of the bifurcation of the outlet pipe 16, and an outlet valve 40 that is closed when the dry vacuum pump 12 connected to the outlet pipe 16 is pressurized is installed between the trapping device 26 and the bifurcation of the outlet pipe 16. In addition, pressure gauges 42, 44, and 46 for measuring the internal pressure are installed in the trapping device 26, the atmospheric exhaust pipe line 16a, and the decompression exhaust pipe line 16b, respectively.

[0021] The trapping device 26 is a device that captures deposits such as powder, liquid, or colloidal substances discharged from inside the dry vacuum pump 12 via the outlet pipe 16 in its internal space to prevent them from flowing downstream of the outlet pipe 16, and the inside of the trapping device 26 is cooled by cooling water (not shown).

[0022] The high-temperature fluid supply means 18 is used to supply high-temperature fluid into the dry vacuum pump 12 in which deposits are fixed inside via the inlet pipe 14, and includes a fluid heating device 48 having a heat source such as an electric heater, and a fluid supply pipe 50 that transports the high-temperature fluid heated by the fluid heating device 48 to the inlet pipe 14.

[0023] As the fluid heated by the fluid heating device 48, it is preferably at least one selected from the group consisting of air, nitrogen, oxygen, argon, hydrofluoric acid, and chlorine trifluoride. In addition, as the temperature of the high-temperature fluid obtained by heating the fluid with the fluid heating device 48, it is preferably in the range of 50°C or higher and 400°C or lower as described above.

[0024] In Figure 3 In the embodiment shown, air (CDA; Clean Dry Air) and nitrogen (N2) are supplied to the fluid heating device 48. Specifically, CDA is supplied to the fluid heating device 48 via a CDA supply line 52 whose gas supply amount is controlled by a mass flow controller 52a, and N2 is supplied to the fluid heating device 48 via an N2 supply line 54 whose gas supply amount is also controlled by a mass flow controller 54a. In addition, when CDA is supplied to the fluid heating device 48 through the CDA supply line 52, the on-off valve 52b is opened, and when N2 is supplied to the fluid heating device 48 through the N2 supply line 54, the on-off valve 54b is opened.

[0025] The detoxification device 22 is a device for detoxifying the exhaust gas discharged from the dry vacuum pump 12 via the atmospheric pressure exhaust line 16a or the reduced pressure exhaust line 16b from the outlet pipe 16. The detoxification device 22 may be any type, such as a combustion type, a thermal decomposition type, a wet type, an atmospheric pressure plasma type, an adsorption type, or a water scrubber. However, considering the space efficiency and detoxification efficiency of the device, the atmospheric pressure plasma type is the most preferred. Figure 3 Reference numeral 56 denotes a pipe for discharging the exhaust gas after the detoxification process by the detoxification device 22 into the atmosphere, and reference numeral 58 denotes a fan for sucking the exhaust gas.

[0026] The reactive species supply means 24 is provided as needed to supply reactive species such as F (fluorine) radicals and O (oxygen) radicals via the inlet pipe 14 into the dry vacuum pump 12, where deposits are fixed. It includes an reactive species generating device 60 equipped with plasma generating means such as a high-frequency induction coil for generating ICP (inductively coupled plasma), and an reactive species supply pipe 62 for conveying the reactive species generated by the reactive species generating device 60 to the inlet pipe 14. The reactive species supply pipe 62 branches midway to form a branch pipe 62a. The downstream end of this branch pipe 62a is connected to the upstream end of the outlet pipe 16, enabling the supply of reactive species into the dry vacuum pump 12 from the outlet pipe 16 side. Furthermore, an on-off valve 64 is attached to this branch pipe 62a, which is opened to supply the reactive species to the upstream end of the outlet pipe 16.

[0027] Furthermore, Ar (argon) gas required for plasma generation and NF3 and O2, which serve as raw materials for the active species, are supplied to the active species generator 60. Specifically, Ar gas is supplied to the active species generator 60 via an Ar supply line 66, the gas supply rate of which is controlled by a mass flow controller 66a; NF3 is supplied to the active species generator 60 via an NF3 supply line 68, the gas supply rate of which is controlled by a mass flow controller 68a; and O2 is supplied to the active species generator 60 via an O2 supply line 70, the gas supply rate of which is controlled by a mass flow controller 70a. Furthermore, when Ar gas is supplied to the active species generator 60 via the Ar supply line 66, the on-off valve 66b is opened; when NF3 is supplied to the active species generator 60 via the NF3 supply line 68, the on-off valve 68b is opened; and when O2 is supplied to the active species generator 60 via the O2 supply line 70, the on-off valve 70b is opened, while the on-off valve 65 is closed.

[0028] In addition, when the active species supply means 24 is provided, it is preferable to Figure 3As shown, a differential exhaust pipe 72 that connects the inlet pipe 14 and the outlet pipe 16 is installed. This is because, in order to generate active species using the active species generation device 60, it is necessary to start a plasma generation means (not shown) to ionize NF3, O2, etc. For this purpose, it is necessary to operate the vacuum pump 20 to evacuate the inside of the plasma generation means. However, when the inside of the dry vacuum pump 12 is almost completely blocked by deposits, evacuation cannot be performed. In such a case, by opening the on-off valve 74 provided in the differential exhaust pipe 72, the inside of the plasma generation means can be evacuated using the vacuum pump 20, and the active species supply means 24 can be operated.

[0029] In the cleaning device 10 of the dry vacuum pump according to the present embodiment configured as described above, the following configuration is further provided. First, when the dry vacuum pump 12 that is subjected to the regeneration and life extension treatment using the cleaning device 10 is Figure 3 configured as shown, consisting of a main pump 12a in the lower section and an auxiliary pump 12b in the upper section, if the inside is blocked when a high-temperature fluid is introduced into the pump from the inlet pipe 14 connected to the auxiliary pump 12b side, the main pump 12a cannot be sufficiently heated. Therefore, a heating device 28 for heating the main pump 12a is provided. As the heating means of the heating device 28, a known method can be adopted, but it is particularly preferable to use induction heating (IH) that can directly heat the outer shell of the iron-made main pump 12a from the surface. In addition, in order to prevent melting of the O-ring (made of fluororubber) of the pump (not shown), etc., the heating temperature based on the heating device 28 is preferably set to 300°C or lower, more preferably 250°C or lower. In addition, depending on the structure of the pump, the auxiliary pump may sometimes be heated.

[0030] In addition, in the cleaning device 10 of the dry vacuum pump according to the present embodiment, a second fluid heating device 76 is provided. In the second fluid heating device 76, N2 supplied via a branch pipe 54c branched from the N2 supply line 54 is heated to generate a high-temperature fluid. In addition, CDA may sometimes be used in addition to N2. And the generated high-temperature fluid is supplied to the upstream end of the outlet pipe 16 via a fluid supply pipe 78. In addition, Figure 3 the reference numeral 54d in

[0031] Furthermore, in the cleaning device 10 of the dry vacuum pump according to the present embodiment, the space in the cleaning chamber 32 covered by the hood 30 communicates with the atmospheric pressure exhaust pipeline 16a through the local station exhaust pipe 80. Therefore, during the replacement operation of the dry vacuum pump 12 or the like, even if harmful exhaust gas leaks into the cleaning chamber 32, the leaked exhaust gas will be sucked through the local station exhaust pipe 80, the atmospheric pressure exhaust pipeline 16a, the decontamination device 22, and the fan 58, so it is safe.

[0032] Moreover, in the cleaning device 10 of the dry vacuum pump according to the present embodiment, although not shown, a preheating chamber for preheating the dry vacuum pump 12 to be subjected to the next cleaning operation is provided adjacent to the cleaning chamber 32. In order to perform preheating, a high-temperature fluid is also supplied to the dry vacuum pump 12 provided in this preheating chamber and waiting for the cleaning operation.

[0033] The cleaning device 10 of the dry vacuum pump according to the present embodiment configured as described above has each component housed in a single casing 82, and a casing exhaust cylinder 84 is installed in this casing 82 to prevent harmful gases from accumulating inside.

[0034] Next, with reference to Figure 1 and Figure 2 , a cleaning method for the dry vacuum pump using the cleaning device 10 of the dry vacuum pump according to the present embodiment will be described. As Figure 1 shown, the cleaning method for the dry vacuum pump of the present invention sequentially performs each process of "pre-operation inspection S1", "dry vacuum pump installation S2", "start confirmation inspection S3", "regeneration treatment process S4" that is executed as needed, "start confirmation re-inspection S5", "life extension treatment process S6", "post-operation inspection S7", and "dry vacuum pump disassembly S8". Among them, the particularly important processes are "start confirmation inspection S3", "regeneration treatment process S4", and "life extension treatment process S6".

[0035] The pre-operation inspection S1 is a process for checking whether the dry vacuum pump 12 cannot be started due to the fixation of deposits. The state of the deposits is confirmed by visually observing the inside of the pump from the suction port or the exhaust port. In addition, samples of the deposits are taken as needed for chemical analysis (qualitative analysis), and the rotor is manually rotated using a torque wrench. When the torque at this time is below a specified reference value such as 24 N·m or 60 N·m or less, the "dry vacuum pump installation S2" of installing the dry vacuum pump 12 into the cleaning chamber 32 is executed. On the other hand, when the torque when manually rotating the rotor using the torque wrench exceeds the specified reference value, it is preferably considered that regeneration is impossible and it is excluded from the treatment target.

[0036] Next, the dry vacuum pump 12 installed in the clean room 32 starts recording the current value, and performs the "start confirmation check S3" for confirming the initial start using atmospheric pressure exhaust. If it can be started, the "life extension processing step S6" is executed. If it fails to start (cannot be started), the "regeneration processing step S4" is executed. In addition, when it can be started, sometimes the initial characteristics such as conductivity and exhaust characteristics are measured before the "regeneration processing step S4" or the "life extension processing step S6".

[0037] The "regeneration processing step S4" is a step of mainly introducing a high-temperature fluid into the interior of the dry vacuum pump 12 to remove the deposits remaining in the interior of the dry vacuum pump 12. As shown in Figure 2 A, the "heating regeneration using atmospheric pressure exhaust S4.1", the "heating regeneration using vacuum exhaust S4.2", and the "circulation exhaust S4.3" are sequentially executed.

[0038] The heating regeneration using atmospheric pressure exhaust S4.1 refers to the following treatment: for a high-temperature fluid of a specified flow rate, it is introduced into the dry vacuum pump 12 from the inlet pipe 14 while adjusting within a range that does not cause excessive pressure, and the exhaust gas etc. discharged from the dry vacuum pump 12 via the outlet pipe 16 is sent to the decontamination device 22 via the atmospheric pressure exhaust pipe line 16a. After the heating regeneration using atmospheric pressure exhaust has been performed for a specified time such as 70 minutes, the heating regeneration using vacuum exhaust S4.2 is executed.

[0039] The heating regeneration using vacuum exhaust S4.2 refers to the following treatment: for a high-temperature fluid of a specified flow rate, it is introduced into the dry vacuum pump 12 from the inlet pipe 14 while adjusting within a range that does not cause excessive pressure, and the exhaust gas etc. discharged from the dry vacuum pump 12 via the outlet pipe 16 is sent to the decontamination device 22 while being vacuum suctioned by the vacuum pump 20 via the reduced pressure exhaust pipe line 16b. After the heating regeneration using vacuum exhaust has been performed for a specified time such as 15 minutes, the circulation exhaust S4.3 is executed.

[0040] The circulation exhaust S4.3 means that in a state where the outlet valve 40 of the outlet pipe 16 is closed, a high-temperature fluid is supplied from the inlet pipe 14, and the interior of the dry vacuum pump 12 is made into a pressurized state by the high-temperature fluid. Then, when the outlet valve 40 is opened, the high-temperature fluid inside the dry vacuum pump 12 is discharged all at once, and the deposits inside are discharged by the momentum of the high-temperature and high-pressure gas flow. Repeating this series of steps for a specified number of settings such as 10 times is the circulation exhaust S4.3. In this circulation exhaust S4.3, the exhaust gas etc. discharged from the dry vacuum pump 12 is vacuum suctioned by the vacuum pump 20, so it is sent to the decontamination device 22 via the reduced pressure exhaust pipe line 16b.

[0041] After the regeneration process S4 as described above ends for the dry vacuum pump 12, a "start confirmation recheck S5" for confirming initial startup by exhausting with atmospheric pressure is performed. When regeneration is successful and startup is possible, a "lifespan extension process S6" is executed. When startup fails (cannot start), the "regeneration process S4" is executed again. In addition, regarding the number of times the regeneration process S4 is repeatedly executed due to inability to start after the start confirmation recheck S5, it is preferable to set an upper limit based on considerations such as protection of each component part of the dry vacuum pump 12 and economic efficiency.

[0042] The "lifespan extension process S6" is a process for removing the above-mentioned deposits remaining inside the dry vacuum pump 12 by introducing a high-temperature fluid into the inside of the dry vacuum pump 12 mainly in a state where the dry vacuum pump 12 has been started, as Figure 2 shown in B, and "startup of dry vacuum pump S6.1" and "cleaning operation S6.2" are sequentially executed. Among them, the startup of dry vacuum pump S6.1 refers to the process of starting the dry vacuum pump 12 as the literal meaning implies.

[0043] The cleaning operation S6.2 refers to the following treatment: By continuously and integrally implementing the operation processes of the above-mentioned "heating regeneration S4.1 using atmospheric pressure exhaust" and "heating regeneration S4.2 using vacuum exhaust", for a high-temperature fluid of a specified flow rate, it is introduced into the dry vacuum pump 12 from the inlet pipe 14 while adjusting within a range where excessive pressure will not occur, and the exhaust gas etc. discharged from the dry vacuum pump 12 via the outlet pipe 16 is first sent to the decontamination device 22 via the atmospheric pressure exhaust pipe line 16a. After being treated for a specified time such as 60 minutes, it is switched to be sent to the decontamination device 22 via the reduced-pressure exhaust pipe line 16b, and is sent to the decontamination device 22 while being vacuum-sucked by the vacuum pump 20 for a specified time such as 30 minutes.

[0044] Next, the dry vacuum pump 12 after the lifespan extension process S6 is subjected to an "after-operation inspection S7". This after-operation inspection S7 inspects the exhaust characteristics and conductivity of the dry vacuum pump 12. Through this inspection, when the restoration of the performance aspect is confirmed for the dry vacuum pump 12 after the cleaning operation S6.2, the current value recording is ended, and "disassembly of dry vacuum pump S8" is performed, and the cleaning method of the dry vacuum pump of the present embodiment ends.

[0045] According to the cleaning method of the dry vacuum pump of the present embodiment, since either the regeneration process S4 or the lifespan extension process S6 is selected and executed according to the startup possible state of the dry vacuum pump 12 caused by deposits remaining inside, the deposits inside the dry vacuum pump 12 can be efficiently removed.

[0046] In addition, in the above-described embodiment, a case where only the high-temperature fluid is introduced into the dry vacuum pump 12 in the regeneration treatment step S4 and the life extension treatment step S6 is shown. However, when the deposits in the dry vacuum pump 12 cannot be removed only by the high-temperature fluid, active species such as F radicals generated by the active species supply means 24 may be introduced into the dry vacuum pump 12 together with the high-temperature fluid or independently of the regeneration treatment step S4 or the life extension treatment step S6 to chemically decompose and remove the deposits.

[0047] In addition, in the above-described embodiment, a case where only the high-temperature fluid is used to heat the dry vacuum pump 12 is shown. However, particularly in the regeneration treatment step S4 for the dry vacuum pump 12 in which the deposits are fixed inside to the extent that it cannot be started, it is preferable to also heat from the main pump 12a side using the heating device 28.

[0048] In addition to this, the present invention can of course be variously modified within the scope conceivable by those skilled in the art. Explanation of Reference Numerals

[0049] 10: Cleaning device for dry vacuum pump; 12: Dry vacuum pump; 14: Inlet pipe; 16: Outlet pipe; 16a: Atmospheric pressure exhaust line; 16b: Vacuum exhaust line; 18: High-temperature fluid supply means; 20: Vacuum pump; 22: Decontamination device; 24: Active species supply means; 26: Trapping device; 28: Heating device.

Claims

1. A cleaning method for a dry vacuum pump, which is a cleaning method for a dry vacuum pump with deposits remaining inside, is characterized in that, Comprising: A startup confirmation check for confirming whether the dry vacuum pump can be started; A regeneration treatment process executed when the dry vacuum pump cannot be started; and A life extension treatment process executed when the dry vacuum pump can be started or when it becomes startable after the regeneration treatment process, The regeneration treatment process is a process of removing the accumulated deposits by introducing a high-temperature fluid into the interior of the dry vacuum pump; The life extension treatment process is a process of removing the accumulated deposits remaining in the interior of the dry vacuum pump by introducing a high-temperature fluid into the interior of the dry vacuum pump in a state where the dry vacuum pump has been started; 2. The cleaning method of the dry vacuum pump according to claim 1, wherein The high-temperature fluid is formed by heating at least one fluid selected from the group consisting of air, nitrogen, oxygen, argon, hydrofluoric acid, and chlorine trifluoride to 50°C or higher and 400°C or lower; 3. The cleaning method of the dry vacuum pump according to claim 1 or 2, characterized in that, In the regeneration treatment process and the life extension treatment process, in addition to the high-temperature fluid, an active species is also introduced into the interior of the dry vacuum pump; 4. The cleaning method of the dry vacuum pump according to claim 1 or 2, characterized in that, When introducing the high-temperature fluid into the interior of the dry vacuum pump, the pressure of the high-temperature fluid is changed; 5. The cleaning method of the dry vacuum pump according to claim 1 or 2, characterized in that, While introducing the high-temperature fluid into the interior of the dry vacuum pump, the startup / stop of the dry vacuum pump is repeated; 6. A cleaning device for a dry vacuum pump is a cleaning device used for the regeneration and life extension of a dry vacuum pump with deposits remaining inside, and is characterized in that, Comprising: An inlet pipe (14) connected to the suction port of the dry vacuum pump (12); An outlet pipe (16) connected to the exhaust port of the dry vacuum pump (12); A high-temperature fluid supply means (18) for supplying a high-temperature fluid into the dry vacuum pump (12) via the inlet pipe (14); An atmospheric pressure exhaust pipe line (16a) and a reduced pressure exhaust pipe line (16b) bifurcated from the downstream end of the outlet pipe (16) and capable of switching the gas flow destination; A vacuum pump (20) provided in the reduced pressure exhaust pipe line (16b); and A decontamination device (22) provided on the downstream side of the atmospheric pressure exhaust pipe line (16a) and the reduced pressure exhaust pipe line (16b) for decontaminating the exhaust gas discharged from the dry vacuum pump (12); 7. The cleaning device of the dry vacuum pump according to claim 6, characterized in that, An active species supply means (24) is further provided for supplying an active species into the dry vacuum pump (12) via the inlet pipe (14); 8. The cleaning device for a dry vacuum pump according to claim 6 or 7, characterized in that, In the outlet pipe (16), a trapping device (26) for trapping components other than the gas discharged from the interior of the dry vacuum pump (12) is provided; 9. The cleaning device for a dry vacuum pump according to claim 6 or 7, characterized in that, A heating device (28) for heating the dry vacuum pump (12) from the outside is further provided; 10. The cleaning device for a dry vacuum pump according to claim 9, characterized in that, The heating means of the heating device (28) is induction heating; 11. The cleaning device of the dry vacuum pump according to claim 6 or 7, characterized in that, A preheating chamber is further provided for preheating the dry vacuum pump (12) to be subjected to a cleaning operation next.

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