Mass spectrometer and method for decomposing mass spectrometer

Abstract

The objective of the present invention is to avoid damage to an optical element during maintenance of a mass spectrometer or replacement of components, and to facilitate maintenance and other operations. The present disclosure proposes a mass spectrometer (referring to Figure 2) comprising: a first vacuum chamber that houses a first multipole electrode that transports sample ions ionized by an ion source; a second vacuum chamber that is adjacent to the first vacuum chamber and houses a second multipole electrode that transports the sample ions output from the first vacuum chamber; a rear-stage vacuum chamber that houses at least a third multipole electrode that transports the sample ions output from the second vacuum chamber; and a detector that is provided at the rear stage of the rear-stage vacuum chamber and detects sample ions, the first vacuum chamber being configured so as to be separable from the second vacuum chamber at the rear stage.

Description

Technical Field

[0001] The present disclosure relates to a quality analysis device and a disassembly method of the quality analysis device. Background Art

[0002] A quality analysis device used for analyzing a sample ionizes the sample to be analyzed and analyzes the ions according to the mass-to-charge ratio. Generally, the quality analysis device includes an ion source that ionizes the sample, a mass analysis unit that separates ions according to the mass-to-charge ratio, and a detection unit that detects the amount of ions passing through the mass analysis unit.

[0003] Among the structural elements of the quality analysis device, the mass analysis unit is housed in a vacuum chamber, but when performing maintenance or component replacement, the mass analysis unit is sometimes taken out of the vacuum chamber.

[0004] Regarding the disassembly of the mass analysis unit during the above-mentioned maintenance, for example, Patent Document 1 discloses a structure for loading and unloading an ion optical element (ion lens) from the side of the device. In addition, Patent Document 2 discloses a structure in which when performing maintenance such as cleaning on various ion optical elements disposed in an intermediate vacuum chamber, instead of individually disassembling each ion optical element from the device, each ion optical element is disassembled from the device as a unit. Prior Art Documents Patent Documents

[0005] Patent Document 1: Japanese Patent Laid-Open No. 2021-082496 Patent Document 2: International Publication No. 2021 / 106277 Summary of the Invention Technical Problem to be Solved by the Invention

[0006] However, in the technology of Patent Document 1, when disassembling the second multipole electrode (optical element in the second vacuum chamber: Q0) provided at the subsequent stage of the first multipole electrode (optical element in the first vacuum chamber: Q00), it is difficult to ensure sufficient working space on the side surface of the second vacuum chamber. This is because a plurality of other analysis devices (such as a pretreatment liquid chromatograph, etc.) are fixedly arranged on the side surface of the second vacuum chamber, and there are many spatial restrictions (design restrictions). In addition, in the technology of Patent Document 2, when taking out the unit, the optical element collides with the wall surface of the first vacuum chamber, and the optical element may be damaged.

[0007] In view of such a situation, the present disclosure provides a technology that avoids damage to optical elements during maintenance or component replacement operations of a quality analysis device and enables easy maintenance operations. Technical Solution for Solving the Technical Problem

[0008] To solve the above technical problems, the present disclosure provides a quality analysis device, including: a first vacuum chamber that houses a first multipole electrode for transporting sample ions ionized by an ion source; a second vacuum chamber adjacent to the first vacuum chamber that houses a second multipole electrode for transporting the sample ions output from the first vacuum chamber; a subsequent-stage vacuum chamber that houses at least a third multipole electrode for transporting the sample ions output from the second vacuum chamber; and a detector disposed at the subsequent stage of the subsequent-stage vacuum chamber for detecting sample ions, wherein the first vacuum chamber is configured to be separable from the second vacuum chamber at its subsequent stage.

[0009] Further features associated with the present disclosure are clarified through the description and drawings of this specification. In addition, the embodiments of the present disclosure are achieved and realized through combinations of elements and various elements, as well as the following detailed description and the appended claims. The descriptions in this specification are merely typical examples and do not limit the scope of the claims of the present disclosure or the application examples of the present disclosure in any way. Advantages of the Invention

[0010] According to the technology of the present disclosure, it is possible to avoid damage to optical elements during maintenance or component replacement operations of the quality analysis device, and it is possible to easily disassemble the quality analysis device to perform maintenance and other operations. Brief Description of the Drawings

[0011] Figure 1 FIG. is a diagram showing an example of the external structure of a quality analysis device 100 according to an embodiment of the present disclosure. Figure 2 FIG. is a diagram for explaining the steps of disassembling each structural part (such as the first vacuum chamber 103, the second vacuum chamber 104, etc.) of the quality analysis device 100. Figure 3A FIG. is a diagram showing an example of a cross-sectional structure (basic configuration example) along the ion optical axis of each structural part (from the ion source 101 to the subsequent-stage vacuum chamber 105) of the quality analysis device 100. Figure 3B FIG. is a diagram showing an example of a cross-sectional structure (modified example) along the ion optical axis of each structural part (from the ion source 101 to the subsequent-stage vacuum chamber 105) of the quality analysis device 100. Figure 4A FIG. is a diagram showing an example of the structure of the back surface (the surface opposite to the first vacuum chamber 103) of the ion source side partition 102. Figure 4B FIG. is a diagram showing an example of the structure of the front surface (the surface opposite to the ion source side partition 102) of the first vacuum chamber 103. Figure 4CThis is a diagram showing a structural example of the back surface of the first vacuum chamber 103 (the surface opposite to the front surface of the second vacuum chamber 104). Figure 4D This is a diagram showing a structural example of the front surface of the second vacuum chamber 104 (the surface opposite to the back surface of the first vacuum chamber 103). Figure 4E This is a diagram showing a structural example of the back surface of the second vacuum chamber 104 (the surface opposite to the front surface of the subsequent vacuum chamber 105). Figure 4F This is a diagram showing a structural example of the front surface of the subsequent vacuum chamber 105 (the surface opposite to the back surface of the second vacuum chamber 104). Figure 5 This is a diagram for explaining the connection between the first vacuum chamber 103 and the second vacuum chamber 104. Detailed implementation mode

[0012] An embodiment of the present invention relates to the following technology: in a mass spectrometry device, it is possible to access an ion source, a first vacuum chamber, and a second vacuum chamber from a common working space (the ion injection side in the ion optical axis direction) for them, and reduce the limitation of the working space caused by the vacuum chamber wall surface.

[0013] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. In the drawings, elements having the same function are sometimes denoted by the same reference numerals. In addition, although the drawings show specific implementation modes that follow the principles of the present disclosure, these are for understanding the present disclosure and are by no means for a limiting interpretation of the present disclosure.

[0014] In addition, in the present embodiment, although the present disclosure has been described in sufficient detail to enable those skilled in the art to implement the present disclosure, it should be understood that other implementation schemes and methods are also possible, and changes in the composition and structure and replacement of various elements can be made without departing from the scope and spirit of the technical idea of the present invention. Therefore, the subsequent description cannot be interpreted as being limited thereto.

[0015] <External structural example of the mass spectrometry device 100> Figure 1 This is a diagram showing an external structural example of the mass spectrometry device 100 according to an embodiment of the present disclosure. The mass spectrometry device 100 includes: an ion source side partition wall 102 on which an ion source 101 is mounted, a first vacuum chamber 103, a second vacuum chamber 104, a subsequent vacuum chamber 105, a turbo molecular pump 106 that can rotate around a rotation axis 1061 (can lift the front part) and evacuate the second vacuum chamber 104 and the subsequent vacuum chamber 105, a first support table 107 that supports the first vacuum chamber 103, a second support table 108 that supports the subsequent vacuum chamber 105, and a detector 109.

[0016] The ion source side partition wall 102 has fine holes (see Figure 4A ), and can be mounted and dismounted in the first vacuum chamber 103. The mounting and dismounting structure of the ion source side partition wall 102 and the first vacuum chamber 103 will be described later.

[0017] The first vacuum chamber 103 houses the ion lens (first multipole electrode Q00). The ion source 101 side (upstream of the mass spectrometer 100) is detachably connected to the ion source-side partition 102. The detector 109 side (downstream of the mass spectrometer 100) is detachably connected to the front portion of the second vacuum chamber 104 via a joint 110. The detachable structure of the first vacuum chamber 103 and the second vacuum chamber 104 will be described later. Furthermore, the interior of the first vacuum chamber 103 is maintained at a pressure of approximately several hundred Pascals (e.g., 200 Pa) by an external vacuum pump (not shown).

[0018] The second vacuum chamber 104 houses the ion lens (second multipole electrode Q00), and its ion source 101 side (upstream side of the mass spectrometer 100) is detachably connected to the rear portion of the first vacuum chamber 103 via a joint 110, and its detector 109 side (downstream side of the mass spectrometer 100) is detachably connected to the front portion (front face) of the subsequent vacuum chamber 105. The detachable structure of the second vacuum chamber 104 and the subsequent vacuum chamber 105 will be described later. In addition, in the second vacuum chamber 104, the turbomolecular pump 106 is detachably connected to the vacuum exhaust hole 1042 (see FIG. 1 ) provided on the upper surface (top surface). Figure 2 ) connection (engagement) (see Figure 2 In this case, an O-ring may be installed around the periphery of the vacuum exhaust hole 1042 to improve the contact between the upper surface (top surface) of the second vacuum chamber 104 and the suction port (not shown) of the turbomolecular pump 106. Furthermore, the interior of the second vacuum chamber 104 is maintained at a pressure of several Pascals (e.g., 3 Pascals) by the turbomolecular pump 106.

[0019] The post-stage vacuum chamber 105 houses the ion lens (multipole electrodes Q1 to Q3), and its ion source 101 side (upstream side of the mass spectrometer 100) is detachably connected to the rear portion of the second vacuum chamber 104 via a joint 110. Furthermore, the post-stage vacuum chamber 105 is also connected to a vacuum exhaust port (not shown) provided on the upper surface thereof with a turbomolecular pump 106 (see FIG. Figure 2 ). In addition, the interior of the post-stage vacuum chamber 105 is maintained at 10 -3 In the mass spectrometer 100, since it is impossible to reach 10 from the atmospheric pressure (the pressure at the position of the ion source 101) in one go, -3 To achieve a horizontal vacuum degree, differential exhaust is performed to gradually achieve a vacuum from several hundred Pascals (inside the first vacuum chamber 103).

[0020] <Disassembly Steps of Each Structural Part> Figure 2 This is a diagram for explaining the steps of disassembling each structural part (such as the first vacuum chamber 103, the second vacuum chamber 104, etc.) of the mass spectrometry apparatus 100.

[0021] (I) For example, in the case of performing maintenance (cleaning operation), first, the ion source 101 is disassembled from the mass spectrometry apparatus 100 in the state where each structural part is installed (refer to Figure 1 ).

[0022] (II) Next, the ion source side partition wall 102 is disassembled, and the front part of the first vacuum chamber 103 is opened. For example, by fitting the connection protrusion 1032 provided on the first vacuum chamber 103 into the protrusion receiving hole 1021 at the corresponding position provided on the ion source side partition wall 102 (refer to Figure 4A ), the ion source side partition wall 102 is installed at the front part of the first vacuum chamber 103. Therefore, by stretching the ion source side partition wall 102 toward the ion source 101 to make this fitting come off, the ion source side partition wall 102 can be disassembled from the first vacuum chamber 103.

[0023] In addition, in Figure 2 , protrusions are provided at the four corners of the opening, but more protrusions can also be provided. In addition, in the same way as the connection method between the rear wall of the first vacuum chamber 103 and the front part (opening) of the second vacuum chamber, the connection between the ion source side partition wall 102 and the first vacuum chamber 103 can also be achieved through the joint part 110. If the ion source side partition wall 102 is disassembled, access can be made to the ion lens (the first multipole electrode Q00) from the front of the first vacuum chamber 103. Therefore, it becomes a state where the ion lens (the first multipole electrode Q00) can be simply cleaned.

[0024] (III) Next, the connection (fixing) between the first vacuum chamber 103 and the second vacuum chamber 104 through the joint part 110 is released, the first vacuum chamber 103 is disassembled from the second vacuum chamber 104, and the front part (front surface) of the second vacuum chamber 104 is opened. As a result, the first vacuum chamber 103 can be completely separated from the mass spectrometry apparatus 100. Therefore, the first vacuum chamber 103 can be moved to a maintenance place (cleaning place) different from the place where the mass spectrometry apparatus 100 is placed, and maintenance (such as cleaning with a cleaning agent (organic solvent) or component replacement) can be performed on the first vacuum chamber 103 and the ion lens 1031.

[0025] In addition, if the first vacuum chamber 103 is separated from the mass spectrometry device 100, the ion lens (second multipole electrode Q0) can be accessed from the front of the second vacuum chamber 104. Therefore, a state is achieved in which the ion lens (second multipole electrode Q0) can be easily cleaned.

[0026] (IV) Further, by tilting the turbomolecular pump 106 upward about the rotation axis 1061 (lifting the ion source side end of the turbomolecular pump 106), the engagement between the turbomolecular pump 106 and the vacuum exhaust hole 1042 of the second vacuum chamber 104 and the engagement with the vacuum exhaust hole (not shown) of the subsequent vacuum chamber 105 are released.

[0027] (V) Then, the connection (fixing) of the joint portion 110 between the second vacuum chamber 104 and the subsequent vacuum chamber 105 is released, the second vacuum chamber 104 is detached from the subsequent vacuum chamber 105, and the front portion of the subsequent vacuum chamber 105 is opened. As a result, the second vacuum chamber 104 can be completely separated from the mass spectrometry device 100. Therefore, the second vacuum chamber 104 can be moved to a maintenance site (cleaning site) different from the site where the mass spectrometry device 100 is placed, and the second vacuum chamber 104 can be maintained (cleaning with a cleaning agent (organic solvent), component replacement, etc.). In addition, the ion lens (from multipole electrodes Q1 to Q3) can be accessed from the front (opening) of the subsequent vacuum chamber 105 and taken out of the housing of the subsequent vacuum chamber 105 to the outside. Therefore, the ion lens (from multipole electrodes Q1 to Q3) is moved to a maintenance site (cleaning site) different from the site where the mass spectrometry device 100 is placed, and the ion lens can be maintained (cleaning with a cleaning agent (organic solvent), component replacement).

[0028] In the mass spectrometry device 100, the structural parts closer to the ion source 101 are more likely to be contaminated. Therefore, the structural parts closer to the ion source 101 are maintained (cleaned) more frequently. For example, the ion source side partition 102 and the first vacuum chamber 103 are separated from the mass spectrometry device 100 for maintenance once every three months. In addition, the second vacuum chamber 104 is separated from the mass spectrometry device 100 for maintenance once a year. In addition, the multipole electrodes Q1 to Q3 housed in the subsequent vacuum chamber 105 are taken out of the subsequent vacuum chamber 105 for maintenance once every seven years. Therefore, up to the first vacuum chamber 103 is separated from the mass spectrometry device 100 once every three months, and up to the second vacuum chamber 104 is separated from the mass spectrometry device 100 once a year.

[0029] <Example of cross-sectional structure of each structural part of the mass spectrometry device 100> Figures 3A to 3BThese are diagrams showing cross-sectional structures along the ion optical axis of the respective structural parts (from the ion source 101 to the post-stage vacuum chamber 105) of the mass analyzer 100. Figure 3A Showing a basic structural example, Figure 3B Showing a modified example.

[0030] (i) Basic structural example As Figure 3A shown, the first vacuum chamber 103 and the second vacuum chamber 104 have a structure with an opening at the front (upstream direction: ion source side) and only ion passage holes provided at the back (downstream direction: detector side), and the cross-section along the ion optical axis is roughly U-shaped. In addition, the post-stage vacuum chamber 105 has a structure with an opening at the front and a completely closed back, and the cross-section along the ion optical axis is U-shaped.

[0031] For the first vacuum chamber 103, the ion source side partition 102 covers the opening at its front. In addition, for the second vacuum chamber 104, the wall surface on the back side of the first vacuum chamber 103 covers the opening at its front. And for the post-stage vacuum chamber 105, the wall surface on the back side of the second vacuum chamber 104 covers the opening at its front.

[0032] In this way, since the first vacuum chamber 103 and the second vacuum chamber 104 can be completely separated independently from the mass analyzer 100, it is easier to perform operations on the structural parts with a shorter maintenance cycle and closer to the ion source 101 side. In addition, since the wall surface on the back of the structural part (e.g., the first vacuum chamber 103) provided at the front stage (upstream side) covers the front opening of the structural part (e.g., the second vacuum chamber 104) provided at the post stage (downstream side), the number of components is small, and the separation (disassembly) operation of each structural part also becomes easier.

[0033] (ii) Modified example As Figure 3B shown, the first vacuum chamber 103' and the second vacuum chamber 104' can also be configured as cylindrical. In this case, in addition to the ion source side partition 102, a partition 102' covering the back of the first vacuum chamber 103' and the front of the second vacuum chamber 104', and a partition 102'' covering the back of the second vacuum chamber 104' and the front of the post-stage vacuum chamber 105 are also provided. According to the modified example, since the number of components increases compared to the basic structural example ( Figure 3A ), the operation of separating (disassembling) each structural part from the mass analyzer 100 becomes complicated. On the other hand, it is possible to carefully maintain (clean) the details of each structural part.

[0034] <Examples of the back and front structures of each structural part> Figures 4A to 4FThis is a diagram showing the rear structure example and the front structure example of each structural part (from the ion source side partition wall 102 to the subsequent vacuum chamber 105). Figure 4A This is a diagram showing the structure example of the rear surface (the surface facing the first vacuum chamber 103) of the ion source side partition wall 102. Figure 4B This is a diagram showing the structure example of the front surface (the surface facing the ion source side partition wall 102) of the first vacuum chamber 103. Figure 4C This is a diagram showing the structure example of the rear surface (the surface facing the front surface of the second vacuum chamber 104) of the first vacuum chamber 103. Figure 4D This is a diagram showing the structure example of the front surface (the surface facing the rear surface of the first vacuum chamber 103) of the second vacuum chamber 104. Figure 4E This is a diagram showing the structure example of the rear surface (the surface facing the front surface of the subsequent vacuum chamber 105) of the second vacuum chamber 104. Figure 4F This is a diagram showing the structure example of the front surface (the surface facing the rear surface of the second vacuum chamber 104) of the subsequent vacuum chamber 105.

[0035] On the rear surface of the ion source side partition wall 102, fine holes 1023 through which ions emitted from the ion source 101 pass and a plurality of protrusion receiving holes 1021 into which a plurality of connection protrusions 1032 of the first vacuum chamber 103 are fitted can be confirmed (refer to Figure 4A ).

[0036] When observing the front surface of the first vacuum chamber 103, an ion lens (multipole electrode Q00) 1031 housed in the lens housing part 1034 and a plurality of connection protrusions 1032 provided on the housing frame 1033 can be confirmed (refer to Figure 4B ). Ions pass through the central space surrounded by the multipole electrode Q00 of the ion lens 1031 (in Figure 4B , as an example, it is a quadrupole electrode).

[0037] If observing the rear surface of the first vacuum chamber 103, mounting ears 1103 of the joint part 110 provided at a plurality of positions (at the four corners of the wall surface in Figure 4C ), ion lens holes 1035, and an ion lens (multipole electrode Q00: quadrupole electrode) 1031 can be confirmed (refer to Figure 4C ). The ion lens 1031 is arranged in contact with the inner periphery of the ion lens hole 1035. Ions passing through the central space surrounded by the multipole electrode Q00 (quadrupole electrode) of the ion lens 1031 are directly guided to the central space of the ion lens 1041 in the second vacuum chamber 104.

[0038] If observing the front surface of the second vacuum chamber 104, an ion lens (multipole electrode Q0) 1041 housed in the lens housing part 1044 and a plurality of (at a plurality of positions on the wall surface in Figure 4DThe mounting lugs 1103 of the joint 110 (at the four corners of the wall surface in the middle) (refer to Figure 4D ). Ions pass through the middle space surrounded by the multipole electrodes Q0 (quadrupole electrodes) of the ion lens 1041.

[0039] If the back surface of the second vacuum chamber 104 is observed, it can be confirmed that a plurality of (at the four corners of the wall surface in the middle) mounting lugs 1103 of the joint 110, ion lens holes 1045, and ion lenses (multipole electrodes Q00: quadrupole electrodes) 1041 are provided on the wall surface (refer to Figure 4E ). The ion lens 1041 is arranged in contact with the inner periphery of the ion lens hole 1045. Ions passing through the middle space surrounded by the multipole electrodes Q0 (quadrupole electrodes) of the ion lens 1031 are directly guided to the middle space of the ion lens 1051 in the subsequent vacuum chamber 105. Figure 4E

[0040] If the front surface of the subsequent vacuum chamber 105 is observed, it can be confirmed that the ion lens (multipole electrodes Q1 to Q3) 1051 housed in the lens housing portion 1054 and a plurality of (at the four corners of the wall surface in the middle) mounting lugs 1103 of the joint 110 are provided on the wall surface (refer to Figure 4F Figure 4F ). Ions pass through the middle space surrounded by the multipole electrodes Q0 (quadrupole electrodes) of the ion lens 1051 and are guided to the detector 109.

[0041]

[0042] In addition, regarding the diameter φ1 of the fine hole 1023 of the ion source side partition wall 102, the diameter φ2 of the ion lens hole 1035 on the back surface of the first vacuum chamber 103, and the diameter φ3 of the ion lens hole 1045 on the back surface of the second vacuum chamber 104, the relationship of the diameter sizes can be set as φ1 < φ3 < φ2. Figure 5 <Connection between each structural part> Figure 5 This is a diagram for explaining the connection between the first vacuum chamber 103 and the second vacuum chamber 104. In addition, the connection between the second vacuum chamber 104 and the subsequent vacuum chamber 105 is the same as the method shown in Figure 5 and its description is omitted.

[0043] If the back surface of the first vacuum chamber 103 and the front surface (opening) of the second vacuum chamber 104 are aligned without creating a gap, the mounting ears 1103 of the joint portions 110 provided at the respective four corners are completely aligned with each other. Bolt holes are formed in each of the mounting ears 1103. In a state where the mounting ear 1103 of the first vacuum chamber 103 and the mounting ear 1103 of the second vacuum chamber 104 are butted against each other, the mounting ears 1103 are fixed to each other with bolts 1101 via an O-ring 1102, for example, from the side of the mounting ear 1103 of the first vacuum chamber 103. Since the fastening is performed with bolts through the O-ring 1102, the torque for fixing the two can be increased. Further, for example, a recess (circumferential amount) may be provided on the front housing frame 1043 of the second vacuum chamber 104, and the O-ring may be mounted on the recess, thereby fixing the back surface of the first vacuum chamber 103 and the front surface of the second vacuum chamber 104 without a gap.

[0044] <Summary> (i) The mass analysis device 100 of the present embodiment includes: a first vacuum chamber 103 that houses a first multipole electrode 1031 for transporting sample ions ionized by an ion source 101; a second vacuum chamber 104 that is adjacent to the first vacuum chamber 103 and houses a second multipole electrode 1041 for transporting sample ions output from the first vacuum chamber 103; a post-stage vacuum chamber 105 that houses at least a third multipole electrode 1051 for transporting sample ions output from the second vacuum chamber 104; and a detector 109 that is provided at a position downstream of the post-stage vacuum chamber with respect to the flow of the sample ions and detects the sample ions. Here, the first vacuum chamber 103 is configured to be separable from the second vacuum chamber 104 at its subsequent stage. In this way, by configuring the first vacuum chamber 103 to be separable from the mass analysis device 100 independently, maintenance work on the electrode 1031 housed in the first vacuum chamber 103 can be efficiently performed. The electrode 1031 is closest to the ion source 101 and is easily contaminated, and its maintenance cycle is shorter than that of the other electrodes 1041 or 1051.

[0045] In the present embodiment, the first vacuum chamber 103 and the second vacuum chamber 104 are partitioned by a common wall surface (provided with a hole for an ion lens). As a form of the common wall surface, a method in which the wall surface on the back surface of the first vacuum chamber 103 covers the front surface (front opening) of the second vacuum chamber (Method I: refer to Figure 3A ), a method in which the first vacuum chamber 103 and the second vacuum chamber 104 are each constituted by a cylindrical housing, and the openings of both are covered with an independent wall surface (provided with a hole for an ion lens) (Method II: refer to Figure 3B ) can be adopted. In Method I, since the number of components can be reduced, there is an advantage of improved work efficiency. In Method II, although the number of components increases, there is an advantage that each component can be cleaned in detail.

[0046] In addition, in the relationship between the second vacuum chamber 104 and the subsequent-stage vacuum chamber 105, Method I and Method II can also be adopted. However, regarding the subsequent-stage vacuum chamber 105, only the front surface close to the ion source 101 is open, and the back surface far from the ion source 101 is sealed (no opening).

[0047] Regarding the separation structure of each vacuum chamber (refer to Figure 5 ), the first vacuum chamber 103 has a first joint portion (mounting ear) 1103 on the wall surface of its back surface for joining with the second vacuum chamber 104, and the second vacuum chamber 104 has a second joint portion (mounting ear) 1103 on its front surface for joining with the first vacuum chamber 103. The first joint portion (mounting ear) 1103 and the second joint portion (mounting ear) 1103 each have bolt holes, and the first joint portion (mounting ear) 1103 and the second joint portion (mounting ear) 1103 are fixedly connected by bolts 1101 inserted into the bolt holes. Thus, the first vacuum chamber 103 and the second vacuum chamber 104 are joined together. In addition, the bolts 1101 can also be inserted into the bolt holes of the joint portion (mounting ear) 1103 via O-rings 1102. Through the O-rings, the tightening torque of the bolts 1101 can be increased.

[0048] (ii) This embodiment also proposes a disassembling method of the mass analyzer 100. As described above, the mass analyzer 100 includes: a first vacuum chamber 103 detachably connected to the ion source 101 via an ion-source side partition 102; a second vacuum chamber 104 detachably connected to the first vacuum chamber 103; a subsequent-stage vacuum chamber 105 detachably connected to the second vacuum chamber 104; and a turbo molecular pump 106 for controlling the vacuum degrees of the second vacuum chamber 104 and the subsequent-stage vacuum chamber 105. The disassembling method of the mass analyzer 100 includes: detaching the ion source 101 from the ion-source side partition 102; detaching the ion-source side partition 102 from the first vacuum chamber 103; disconnecting the joint portion 110 between the first vacuum chamber 103 and the second vacuum chamber 104 and separating the first vacuum chamber 103 from the second vacuum chamber 104. In this way, since the first vacuum chamber 103 located at the front stage (at a position close to the ion source 101) can be separately separated (the engagement of the turbo molecular pump 106 may not be released), even when frequently maintaining the multipole electrode 1031 accommodated in the first vacuum chamber 103 that is easily contaminated, the maintenance operation can be efficiently performed. In addition, the first vacuum chamber 103 and the second vacuum chamber 104 are joined by tightening the respective joint portions (mounting ears) 1103 with bolts. Therefore, the first vacuum chamber 103 and the second vacuum chamber 104 can be easily separated.

[0049] In addition, the disassembly method of the mass spectrometry apparatus 100 includes disengaging the turbo molecular pump 106 from the second vacuum chamber 104 and the subsequent stage vacuum chamber 105, and disconnecting the joint portion (mounting ear) 1103 between the second vacuum chamber 104 and the subsequent stage vacuum chamber 105 to separate the second vacuum chamber 104 from the subsequent stage vacuum chamber 105. The turbo molecular pump 106 is provided on the top surface of the subsequent stage vacuum chamber 105 in such a manner that it rotates about the rotary shaft 1061 at the rear end portion. Further, the second vacuum chamber 104 and the subsequent stage vacuum chamber 105 each have an opening portion on the top surface (the opening portion (vacuum exhaust hole) 1042 of the second vacuum chamber 104; the opening portion of the subsequent stage vacuum chamber 105 is not shown), and the turbo molecular pump 106 is engaged with the second vacuum chamber and the subsequent stage vacuum chamber so as to cover each opening portion. Moreover, similar to the first vacuum chamber 103 and the second vacuum chamber 104, the second vacuum chamber 104 and the subsequent stage vacuum chamber 105 are joined by fastening each joint portion (mounting ear) 1103 with bolts. At this time, disengaging the turbo molecular pump 106 includes rotating the turbo molecular pump 106 about the rotary shaft 1061 at the rear end portion to expose the opening portion (vacuum exhaust hole) 1042 of the second vacuum chamber 104 and the opening portion (not shown) of the subsequent stage vacuum chamber. Further, separating the second vacuum chamber 104 from the subsequent stage vacuum chamber 105 includes removing the fastening of the bolts. Through the above procedure, the mass spectrometry apparatus 100 can be disassembled into respective structural parts by a very simple operation. Further, the mass spectrometry apparatus 100 can be disassembled with man-hours corresponding to the maintenance level.

[0050] (iii) Although specific embodiments have been described in the present disclosure, they are for illustrative purposes (for understanding the technology of the present disclosure) in all aspects and not for limiting. Further, those having ordinary knowledge in the technical field can clarify other implementations of the present disclosure by examining this embodiment. The description and specific examples are merely representative, and the technical scope and spirit of the present disclosure will be shown in the subsequent claims. Reference Signs

[0051] 100 Mass spectrometry apparatus 101 Ion source 102 Ion source side partition wall 103 First vacuum chamber 104 Second vacuum chamber 105 Subsequent stage vacuum chamber 106 Turbo molecular pump 107 First support table 108 Second support table 109 Detector 110 Joint portion.

Claims

1. A quality analysis device, characterized in that, Comprising: A first vacuum chamber that houses a first multipole electrode for transporting sample ions ionized by an ion source; A second vacuum chamber that is adjacent to the first vacuum chamber and houses a second multipole electrode for transporting the sample ions output from the first vacuum chamber; A subsequent-stage vacuum chamber that houses at least a third multipole electrode for transporting the sample ions output from the second vacuum chamber; And A detector that is disposed at a position downstream of the subsequent-stage vacuum chamber with respect to the flow of the sample ions and detects the sample ions, The first vacuum chamber is configured to be separable from the second vacuum chamber at its subsequent stage.

2. The mass spectrometry device according to claim 1, wherein When the first vacuum chamber and the second vacuum chamber are combined to form the mass spectrometry device, the first vacuum chamber and the second vacuum chamber are partitioned by a common wall surface.

3. The mass spectrometry device according to claim 2, wherein In the first vacuum chamber and the second vacuum chamber, the front surface close to the ion source is entirely open, and ion lens holes for arranging the first multipole electrode or the second multipole electrode are provided on the back surface far from the ion source, In a state where the first vacuum chamber and the second vacuum chamber are combined, the wall surface of the back surface of the first vacuum chamber is configured to cover the opening of the front surface of the second vacuum chamber.

4. The mass spectrometry device according to claim 3, wherein The front surface of the subsequent-stage vacuum chamber close to the ion source is entirely open, In a state where the second vacuum chamber and the subsequent-stage vacuum chamber are combined, the wall surface of the back surface of the second vacuum chamber is configured to cover the opening of the front surface of the subsequent-stage vacuum chamber.

5. The mass spectrometry device according to claim 2, wherein The first vacuum chamber and the second vacuum chamber are constituted by a cylindrical housing, It further has a first common wall that covers the opening of the back surface of the first vacuum chamber far from the ion source and the opening of the front surface of the second vacuum chamber close to the ion source, and has ion lens holes for arranging the first multipole electrode, and divides the first vacuum chamber and the second vacuum chamber through this first common wall.

6. The mass spectrometry device according to claim 5, wherein It further has a second common wall that covers the opening of the back surface of the second vacuum chamber far from the ion source and the opening of the front surface of the subsequent-stage vacuum chamber close to the ion source, and has ion lens holes for arranging the second multipole electrode, and divides the second vacuum chamber and the subsequent-stage vacuum chamber through this second common wall.

7. The mass spectrometry device according to claim 1, wherein It further includes an ion source side partition wall that is disposed between the ion source and the first vacuum chamber and has fine holes for the sample ions to pass through, The ion source side partition wall has the ion source mounted on the front surface close to the ion source and the first vacuum chamber mounted on the back surface far from the ion source.

8. The mass analysis device according to claim 3, characterized in that the first vacuum chamber has a first joint portion on the wall surface of its back for combining with the second vacuum chamber, the second vacuum chamber has a second joint portion on its front for combining with the first vacuum chamber, the first joint portion and the second joint portion respectively have bolt holes, the first joint portion and the second joint portion are fixedly connected by bolts inserted into the bolt holes, so that the first vacuum chamber and the second vacuum chamber are combined.

9. The mass analysis device according to claim 8, characterized in that the bolts are inserted into the bolt holes via O-rings.

10. A disassembly method of a mass analysis device, The mass analysis device includes: a first vacuum chamber that is detachably connected to an ion source via a partition wall; a second vacuum chamber that is detachably connected to the first vacuum chamber; and a subsequent-stage vacuum chamber that is detachably connected to the second vacuum chamber. and a turbo molecular pump that controls the vacuum degrees of the second vacuum chamber and the subsequent-stage vacuum chamber, the disassembly method of the mass analysis device is characterized by including: disassembling the ion source from the partition wall; disassembling the partition wall from the first vacuum chamber; and releasing the connection of the connection portion between the first vacuum chamber and the second vacuum chamber, and separating the first vacuum chamber from the second vacuum chamber.

11. The decomposition method of the quality analysis device according to claim 10, characterized in that, It further includes: releasing the engagement of the turbo molecular pump with the second vacuum chamber and the subsequent-stage vacuum chamber; and releasing the connection of the connection portion between the second vacuum chamber and the subsequent-stage vacuum chamber, and separating the second vacuum chamber from the subsequent-stage vacuum chamber.

12. The disassembly method of the mass analysis device according to claim 10, characterized in that the connection portion between the first vacuum chamber and the second vacuum chamber is constituted by the engagement based on bolts inserted into the bolt holes provided in the first vacuum chamber and the bolt holes provided in the second vacuum chamber, separating the first vacuum chamber from the second vacuum chamber includes releasing the engagement.

13. The disassembly method of the mass analysis device according to claim 11, characterized in that the turbo molecular pump is arranged on the top surface of the subsequent-stage vacuum chamber in a manner of rotating the shaft at the rear end, the second vacuum chamber and the subsequent-stage vacuum chamber respectively have openings on the top surface, and the turbo molecular pump is engaged with the second vacuum chamber and the subsequent-stage vacuum chamber in a manner of covering the openings, the connection portion between the second vacuum chamber and the subsequent-stage vacuum chamber is constituted by the engagement based on bolts inserted into the bolt holes provided in the second vacuum chamber and the bolt holes provided in the subsequent-stage vacuum chamber, releasing the engagement of the turbo molecular pump includes rotating the shaft of the turbo molecular pump and exposing the openings of the second vacuum chamber and the openings of the subsequent-stage vacuum chamber, separating the second vacuum chamber from the subsequent-stage vacuum chamber includes releasing the engagement.

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