Converter unit for acoustic or electrical signals or relative pressure

Abstract

The invention relates to a transducer unit (10) for electrical or acoustic signals and / or relative pressures, comprising a substrate (12), a membrane unit (14), an interaction unit (16), the substrate (12) having at least one cavity (18), the interaction unit (16) being arranged on the substrate (12) such that the interaction unit (16) lies at least partially and / or completely above the cavity (18), the membrane unit (14) is arranged between the interaction unit (16) and the substrate (12) and / or between the interaction unit (16) and a further interaction unit (20), the interaction unit (16) having at least one fluid-tight space (22), the interaction unit (16) being configured to regulate and / or maintain a predetermined pressure in the fluid-tight space (22), the interaction unit (16) having at least one backplate (24), the backplate (24) being configured to support the membrane unit (14). The interaction unit (16) is configured to determine and / or generate an offset (26) of the interaction unit (16) by a change in distance between the backplate (24) and at least one electrode element (28) arranged on at least one wall (30) of the fluid-tight space (22).

Description

Background Art

[0001] Capacitive MEMS microphones have the following advantages, namely low power consumption, favorable signal-to-noise ratio, and simple subsequent processing. However, the double-membrane structure of currently high-performance capacitive MEMS microphones has high mechanical rigidity, which limits its deflectability, and thus also limits the sensitivity and signal-to-noise ratio of the MEMS microphone.

[0002] DE 10 2014 212 340 A1 discloses a MEMS microphone including a double-membrane structure, a counter electrode element, and a low-pressure region. Summary of the Invention

[0003] The advantage of the converter unit according to the invention with the features of claim 1 over known converter units is that the interaction unit is suspended on the substrate in a more flexible manner by substantially a single membrane unit, which can improve both the sensitivity and the signal-to-noise ratio. Additionally preferably, the rigidity of the interaction unit can be adjusted specifically for the application situation, so that a converter unit with better performance and higher efficiency can be provided. Furthermore, the converter unit has the following advantages. By means of a flexible boundary layer or the interaction unit, the damping effect of the fluid squeezing the membrane can be avoided. Moreover, the converter unit has the following advantage that no obvious gap noise will occur during rapid differential pressure changes because the backplate is located in a fluid-sealed space with low pressure. An additional advantage of the converter unit is that by means of the membrane unit preferably arranged between the interaction unit and the substrate and / or between two interaction units, the fluid leakage is minimized and the deflection of the interaction unit in the middle region of the cavity in the substrate is maximized.

[0004] According to the invention, this is achieved in the following way: The converter unit for acoustic or electrical signals and / or relative pressure includes a substrate, a membrane unit, and at least one interaction unit. Wherein, the substrate has at least one cavity. The interaction unit is arranged on the substrate such that the interaction unit is at least partially and / or completely located above the cavity, and the membrane unit is arranged at least between the interaction unit and the substrate and / or between the interaction unit and another interaction unit. In addition, the interaction unit has at least one fluid-sealed space, and the interaction unit is configured to maintain a predetermined pressure, especially a low pressure, in the fluid-sealed space. Moreover, the interaction unit has at least one backplate. Furthermore, the interaction unit is configured to obtain and / or generate the deflection of the interaction unit by means of the change in the distance between the backplate and at least one electrode element arranged on at least one wall of the fluid-sealed space.

[0005] In other words, the converter unit preferably includes a substrate configured especially in a planar manner. Cavities, recesses and / or holes are preferably arranged in the substrate. The cavities in the substrate preferably serve as a back volume or sound entry openings, which reduce the damping effect of the back volume gas spring. Furthermore, the substrate preferably has a solid region adjacent to the cavity, and the interaction unit is preferably arranged on this solid region. In addition, the back plate is also preferably arranged on this solid region.

[0006] The converter unit preferably has at least one membrane unit. The membrane unit is preferably arranged at least between the interaction unit and the substrate or between two interaction units. In addition, the membrane unit can be arranged between the interaction unit and the solid region of the substrate. The membrane unit has the following advantages. Due to its relatively low rigidity, it minimizes fluid leakage and maximizes the offset of the interaction unit.

[0007] Furthermore, the converter unit preferably includes an interaction unit. The interaction unit includes at least one delimiting layer that is displaceable relative to the substrate. The delimiting layer can preferably be configured as a curved beam or a similar structure, that is, for example, it can have local anchoring on the solid region only on one side.

[0008] The interaction unit can be displaced, for example, by a change in the pressure or pressure difference of the surrounding fluid to generate a sensor signal. In another embodiment, an electrical signal is used to displace the interaction unit to generate a change in the pressure difference in the surrounding fluid.

[0009] The interaction unit is preferably arranged on the substrate such that the interaction unit is at least partially and / or completely located above the cavity. Preferably, the interaction unit is at least partially connected to the substrate and / or the solid region of the substrate here. In addition, the interaction unit is preferably completely arranged above the cavity, where the interaction unit is arranged on the substrate and / or the solid region of the substrate by means of at least one membrane unit. The interaction unit is preferably configured circularly, where the membrane unit is configured as a ring and connects the solid region to the interaction unit. The membrane unit is preferably arranged between the interaction unit and the substrate and / or between the interaction unit and another interaction unit. Here, the membrane unit can especially be arranged between a first interaction unit, a second interaction unit and / or additional interaction units to connect the interaction units to each other. In addition, the interaction unit is preferably connected to the substrate and / or the solid region of the substrate by a membrane unit. Here, the membrane unit can especially include a thin layer that connects the interaction unit to the substrate or the interaction units to each other. The thin layer can especially have corrugations and / or recesses here. The advantage of these corrugations is that a greater length extension and a greater offset can be achieved under tensile load.

[0010] The interaction unit preferably has at least one fluid-tight space. In addition, the interaction unit is preferably arranged to adjust and / or maintain a predetermined pressure in the fluid-tight space. Here, the predetermined pressure in the fluid-tight space can in particular be a fluid pressure that is less than the ambient pressure, thereby creating a low-pressure region. Preferably, the fluid-tight space is constructed by at least two bounding layers that form a top and a bottom, and a bounding wall that forms the side wall of the fluid-tight space. Here, the bounding wall can have a wavy surface profile, for example protruding and retracting sections, for in particular reinforcing the peripheral bounding wall.

[0011] Preferably, the interaction unit can in particular be constructed as a flexure beam that bounds the fluid-tight space in which there is a predetermined pressure, in particular a fluid pressure that is less than the ambient pressure. The flexure beam can be anchored at at least one end to a solid region of the substrate.

[0012] In addition, the interaction unit preferably has at least one backplane. The backplane can in particular be constructed as a counter electrode with respect to at least one electrode element. Here, the backplane is preferably composed of a conductive layer. In addition, the backplane can be constructed by an insulating support layer such as silicon-rich nitride having a thickness between 0.5 and 5 micrometers, on which at least one electrode and / or a multi-layer electrode made of, for example, polysilicon can be arranged. The advantage of a backplane composed of an insulating layer with an electrode adjacent to or embedded therein can be that leakage current can be suppressed and the measurement capacitance can be configured such that the measurement capacitance is maximized and the parasitic capacitance is minimized. The backplane can in particular be anchored to a solid region of the substrate, where this anchoring can preferably be located within the fluid-tight space. In addition preferably, the anchoring portion of the backplane can be implemented as an integrated part of the membrane unit.

[0013] Preferably, the interaction unit is configured to determine and / or generate an offset of the interaction unit by means of a change in the distance between the backplane and at least one electrode element arranged on at least one wall of the fluid-tight space. Here, the wall can be a bounding layer and / or a lateral bounding wall, but is not limited thereto. Furthermore preferably, the interaction unit is configured to determine and / or generate an offset of the interaction unit by means of a change in the distance between the backplane and at least one electrode element that follows the movement of the interaction unit. Preferably, the backplane is configured as a counter electrode to at least one electrode element, so that the offset of the interaction unit, in particular the offset of the bounding layer or the flexure beam, can be inferred based on the change in the distance between the backplane and at least one electrode element. For example, the electrode element is arranged on the wall of the fluid-tight space of the interaction unit, wherein, due to the offset of the wall of the fluid-tight space, the distance between the electrode element and the backplane changes, and the electrode element can be measured by the interaction unit, so as to determine an acoustic signal and / or a relative pressure. Here, the wall of the fluid-tight space can be a corresponding surface that forms the fluid-tight space and / or is arranged within the fluid-tight space. For example, the wall can also be formed by a wall with a recess for pressure equalization. The electrode element can be configured as a planar electrode or as an inserted finger electrode extending into the fluid-tight space. Here, the backplane can have a corresponding recess, and the inserted finger electrode can be embedded in the recess.

[0014] The dependent claims show preferred developments of the invention.

[0015] The fluid-tight space preferably includes at least one bounding layer that forms the top and / or bottom of the fluid-tight space. The advantage of this embodiment is that, due to the offset of the bounding layer, by means of the change in the distance between the electrode on the bounding layer and the backplane, an acoustic signal or a relative pressure can be determined. Furthermore, the offset of the interaction unit can be adjusted in a targeted manner by means of the bounding layer.

[0016] Preferably, at least one electrode element is arranged within or on the bounding layer.

[0017] The advantage of this embodiment is that, by means of at least one electrode element, each bounding layer can be used to determine the distance between the respective bounding layer and the backplane.

[0018] The membrane unit is preferably integrally formed with the bounding layer and / or the backplane and / or with the interaction unit, in particular from a single layer.

[0019] The advantage of this embodiment is that the bounding layer and / or the backplane and the membrane unit can be made of the same material, which both increases the degree of freedom in the manufacturing process and additionally reduces costs.

[0020] Furthermore, the bounding layer and / or the bounding wall preferably include a non-conductive material, and at least one electrode element is arranged within and / or on this material.

[0021] The advantage of this embodiment is that, through the insulating effect of the limiting layer, the accuracy of obtaining the distance between at least one electrode and the backplane is improved, especially since the limiting layer and / or the limiting wall protect the interaction unit from other influences.

[0022] The interaction unit preferably has at least two opposing limiting layers, wherein the backplane is at least partially arranged between the two limiting layers, and each of the limiting layers has at least one electrode element, and the electrode elements are respectively arranged between the backplane and one of the surfaces of the limiting layer facing away from the fluid sealing space.

[0023] The advantage of this embodiment is that, through the co-directional offset of the two opposing limiting layers together with the corresponding electrode elements, the different distances of the upper and lower limiting layers relative to the backplane can be obtained as a differential signal, and the differential signal further improves the accuracy of signal detection of the converter unit.

[0024] In other words, the backplane is preferably arranged in the middle of the fluid sealing space, wherein the top of the fluid sealing space is formed by a first limiting layer having a first electrode element, and the bottom of the fluid sealing space is formed by a second limiting layer having a second electrode element. Therefore, the distance between the first electrode element and the backplane can be obtained, and the distance between the second electrode element and the backplane can also be obtained.

[0025] At least one support element, such as a support column or a support wall, is preferably arranged between the opposing limiting layers.

[0026] The advantage of this embodiment is that the support element is arranged in the fluid sealing space, so when a pressure is applied to one of the limiting layers of the limiting layer, the pressure can be transmitted to the other limiting layer by means of the support element. Here, the support element can be arranged on one or both of the limiting layers. In addition, the advantage of the unilateral connection of the support element to only one limiting layer is that a higher degree of freedom and flexibility in the configuration of the limiting layer or the bending beam are achieved.

[0027] At least one wall and / or at least one support column preferably has a recess. Here, at least one electrode element 28 is preferably arranged in the recess such that the surface of the electrode element and the surface of at least one wall 30 are in a plane and / or the surface of the support column is in a plane.

[0028] The advantage of this embodiment is that by integrating the electrode element into the wall, such as the limiting layer, the structural height of the converter unit is further reduced.

[0029] The thickness of the membrane unit is preferably equal to or less than the total thickness of the boundary layer and / or the thickness of the backplate. Particularly preferably, the thickness of the membrane unit is equal to or less than the thickness of one of the boundary layers.

[0030] The advantage of this embodiment is that, due to the thin bridging membrane unit, which has a lower bending stiffness than two boundary layers or membrane elements spaced apart from each other and interconnected by rigid support columns, the accuracy of the converter unit can be further improved.

[0031] The fluid-tight space preferably includes at least one boundary wall.

[0032] The advantage of this embodiment is that, by means of the boundary wall, at least one electrode element and the backplate can be further isolated from the ambient fluid. Here, the boundary wall can in particular be made of a material that provides isolation. In addition, the peripheral boundary wall can have a wavy surface profile, which is in particular composed of protruding and retracting sections that are arranged to locally increase the rigidity of the peripheral boundary wall as required.

[0033] At least one electrode element preferably has a plurality of mutually isolated sections.

[0034] The advantage of this embodiment is that, by means of the mutually isolated sections, capacitances of the sensor that can be read independently of each other can be formed in order to obtain additional information and / or minimize noise.

[0035] Preferably, the interaction unit and / or the membrane unit has at least one recess for pressure equalization.

[0036] The advantage of this embodiment is that the quasi-static pressure difference can be balanced by means of this recess in order to achieve, for example, a defined pressure balance between the back volume and the front volume or the environment in the cavity of the substrate. Thus, the signal obtained by the converter unit can be independent of slow pressure fluctuations in the environment.

[0037] This recess can preferably be arranged in the region of the membrane unit, in the flexural beam or in the central node.

[0038] The interaction unit preferably has a rigidity that is configured to cause the interaction unit to deflect relative to the substrate when a pressure difference is applied to the interaction unit.

[0039] The advantage of this embodiment is that, by means of the predefined or adjustable rigidity of the interaction unit, the converter unit can be adapted to possible application scenarios. Thus, the deflection of the interaction unit can be adjusted specifically for the application scenario, thereby further improving the signal detected by the converter unit. Here, the rigidity of the interaction unit can in particular be adjusted by the material and / or thickness of the boundary layer.

[0040] The backplane preferably has at least one reinforcing element to adjust the rigidity of the backplane.

[0041] The advantage of this embodiment is that, with the aid of the reinforcing element, the backplane can have a much higher rigidity than the boundary layer, which can result in a more robust and better-performing operation of the interaction unit. In addition, the backplane can have a tensile stress here, which adjusts the rigidity of the backplane. Preferably, the rigidity and / or the tensile stress of the backplane is twice that of the boundary layer.

[0042] The substrate preferably has fluid channels that are fluidically connected to a fluid-tight space. In these fluid channels, the backplane can be anchored to the substrate.

[0043] The advantage can be that the backplane can be rigidly and directly anchored to the solid region of the substrate without mechanical coupling to the boundary layer or the membrane unit. Here, the fluid channels can in particular be arranged to reduce the rigidity of the interaction unit, thereby increasing the offset between the backplane and the interaction unit.

[0044] The boundary layer or the boundary wall preferably has corrugations or undulations in the region of the fluid channels and / or in the region adjacent thereto. This achieves a reduction in the mechanical tensile stress in the region around the fluid channels, with the result of a higher robustness of the converter. At the same time, the corrugations or undulations can allow a higher elongation rate in this region, which can lead to a greater offset in the intermediate region of the cavity in the substrate.

[0045] The converter unit for acoustic signals or relative pressure can in particular be configured as a MEMS microphone, a MEMS speaker or a relative pressure sensor, wherein the MEMS microphone and the MEMS speaker in particular have recesses for pressure equalization. Description of the Drawings

[0046] Embodiments of the present invention are described in detail below with reference to the accompanying drawings. In the drawings:

[0047] Figure 1 A converter unit according to one embodiment is shown,

[0048] Figure 2 A converter unit according to one embodiment is shown,

[0049] Figure 3 A converter unit according to one embodiment is shown,

[0050] Figure 4 A converter unit according to one embodiment is shown,

[0051] Figure 5 A converter unit according to one embodiment is shown,

[0052] Figures 6a to 6h shows different embodiments of the converter unit,

[0053] Figure 7a and 7b shows an embodiment of the converter unit,

[0054] Figures 8a to 8d shows an embodiment of the converter unit,

[0055] Figure 9 shows an embodiment of the converter unit,

[0056] Figure 10 shows an embodiment of the converter unit. Detailed Embodiments

[0057] Preferably, the same reference numerals are set for the same units, elements, and / or components in all the drawings.

[0058] Figure 1 The converter unit 10 is shown in a sectional view. The converter unit 10 particularly has a substrate 12 here. The interaction unit 16 is arranged on the substrate 12 such that at least a part of the interaction unit 16 protrudes beyond the cavity 18 in the substrate 12. In addition, the interaction unit 16 has a backplane 24, and at least a part of the backplane is arranged above the cavity 18 of the substrate 12. In addition, the interaction unit 16 has a bounding layer 32. At least one electrode element 28 is arranged on the bounding layer 32. By means of the change in the distance between the electrode element 28 and the backplane 24, the interaction unit 16 is configured to obtain and / or generate the offset 26 of the interaction unit 16.

[0059] In addition, the converter unit 10 has a membrane unit 14. The membrane unit 14 is arranged between the first interaction unit 16 and another interaction unit 20. In addition, the membrane unit 14 has a recess 46 for pressure balance in the middle of the converter unit 10. In addition, the interaction unit 16 has at least one bounding wall 42, and the bounding wall forms the boundary of the fluid-tight space 22. The fluid-tight space 22 is preferably composed of at least one bounding layer 32 and at least one bounding wall 42.

[0060] In addition, Figure 1 section A is shown, and the section shows the converter unit 10 relative to Figure 2 section.

[0061] Figure 2The converter unit 10 is shown in a top view. The converter unit 10 includes a membrane unit 14 that connects the interaction unit 16 to three additional interaction units 20 and / or the substrate 12. In addition, the substrate 12 may have a solid region 13 from the edge region of the substrate 12 to the cavity 18. Further, the membrane unit 14 has a recess 46 for pressure equalization, which is exemplarily located in the middle of the converter unit 10 in Figure 2 . Further, the interaction unit 16 has at least one support post 40. The backplane 24 has a corresponding recess 41 in the region of the support post 40. In addition, the substrate 12 has at least one fluid channel 50 that is connected to the fluid-sealed space 22 and is particularly provided for receiving the rigid anchoring of the backplane 24 on the solid region 13.

[0062] Figure 3 Another preferred embodiment of the converter unit 10 is shown as a cross-sectional view. The converter unit 10 here has an interaction unit 16. The interaction unit 16 has a first bounding layer 32 that is fastened to the substrate 12 by means of the membrane unit 14. Further, the interaction unit 16 has at least one bounding wall 42. The bounding wall 42 connects the first bounding layer 32 to the second bounding layer 38. Thus, the first bounding layer 32 and the second bounding layer 38 are arranged opposite to each other. At least one electrode element 28 is arranged on both the first bounding layer 32 and the second bounding layer 38. The backplane 24 is arranged between the two electrode elements 28. In addition, the membrane unit 14 has a recessed portion, in particular wrinkles. Further, the membrane unit 14 has a recess 46 for pressure equalization.

[0063] Figure 4 The converter unit 10 is shown in a 3D cross-sectional view of another embodiment. Here, the interaction unit 16 is arranged on the substrate 12 of the converter unit 10. The interaction unit 16 and the additional interaction units 20 have a first bounding layer 32 that is arranged directly relative to the cavity 18 of the substrate 12. The first bounding layer 32 is connected to the second bounding layer 38 by means of support posts 40. The backplane 24 here has corresponding recesses 41, and the support posts 40 are arranged in the corresponding recesses without contact. In addition, a bounding wall 42 is arranged between the first bounding layer 32 and the second bounding layer 38. The interaction unit 16 has a fluid-sealed space 22 that is formed by the first bounding layer 32, the second bounding layer 38, and a plurality of bounding walls 42. Further, the converter unit 10 has a recess 46 for pressure equalization. The fluid channels 50 are configured such that they enable the rigid anchoring of the backplane 24 directly in the solid region 13 of the substrate 12.

[0064] Figure 5 Shows Figure 4The converter unit 10 therein, together with its section line. It can be seen that the converter unit has four fluid channels 50. In addition, the converter unit 10 has a membrane unit 14, which connects the boundary layer 32 or the boundary wall 42 to the substrate 12. In addition, the converter unit 10 has a recess 46 for pressure equalization in the middle.

[0065] Figures 6a to 6h Other embodiments of the converter unit 10 and possible arrangements of the membrane unit 14 between the substrate 12 and the interaction unit 16 and possibly 20 are shown. Figure 6a The converter unit 10 is shown, in which the membrane unit 14 is configured in the configuration of an intersecting grid. The recess 46 for pressure equalization is constructed in the peripheral region of the membrane unit 14.

[0066] Figure 6b The membrane unit 14 is shown, which is configured as a diagonal intersection, with arrows at the intersecting ends.

[0067] Figure 6c The membrane unit 14 is shown, which is constructed as an upper bracket and a lower bracket.

[0068] Figure 6d The membrane unit 14 having a basic shape of a polygon is shown, wherein at each corner of the polygon, tabs of the membrane unit 14 project into the interior of the polygon. In addition, Figure 6d The recess 46 for pressure equalization is shown in the center of the polygon.

[0069] Figure 6e The rectangular configuration of the membrane unit 14 is shown, which has two tabs inside the rectangle, and the tabs construct a square interaction unit inside the rectangle.

[0070] Figure 6f The membrane unit 14 is shown, which has two mutually offset squares, and the corners of the squares are connected by the membrane unit 14.

[0071] Figure 6g The membrane unit 14 having a circular bottom surface is shown, wherein inside the circular bottom surface, the tabs of the membrane unit 14 are arranged tangentially to the center point of the circular bottom surface. In addition, Figure 6g The converter unit 10 of has a recess 46 for pressure equalization at the center.

[0072] Figure 6h The converter unit 10 according to an embodiment is shown. Here, the membrane unit 14 connects the interaction unit 16 to the substrate 12, especially completely surrounding the interaction unit 16. Therefore, the interaction unit 16 is preferably suspended on the substrate 12.

[0073] Figure 7a A top view of the converter unit 10 is shown, which has a membrane unit 14 connecting the interaction unit 16 to the substrate 12.

[0074] Figure 7b shows Figure 7a A partial cross-sectional view of the converter unit 10. Here, the converter unit 10 has an S-shaped fluid channel 50, which is arranged on the interaction unit 16 by means of the membrane unit 14 and is fluidly and / or fluidically connected to the fluid-sealed space of the interaction unit. The interaction unit 16 has a first bounding layer 32 and a second bounding layer 38, which form the bottom and top of the fluid-sealed space 22. The backplane 24 is arranged within the fluid-sealed space 22.

[0075] Figure 8a A top view of the converter unit 10 with the membrane unit 14 is shown. Figures 8b to 8d shows Figure 8a A partial cross-sectional view of the converter unit 10. In Figure 8a the converter unit 10 is visible, which has an interaction unit 16. The interaction unit 16 includes a first bounding layer 32 and a second bounding layer 38. The first bounding layer 32 and the second bounding layer 38 form the top and bottom of the fluid-sealed space 22. The backplane 24 is arranged within the fluid-sealed space 22. The interaction unit 16 is connected to the solid-state region of the substrate by means of the membrane unit 14 and the fluid channel 50.

[0076] Compared with Figure 8b it additionally has a strengthening element 48 on the backplane 24. In the comparison between Figure 8c and Figure 8d and Figure 8c there are two back electrode elements 48 on the upper and lower sides of the backplane 24. Figure 8d

[0077] Figure 9 Figure 9 The converter unit 10 is shown in a perspective view. The converter unit 10 includes a substrate 12. The substrate 12 is configured with a cavity 18. Additionally, the substrate 12 may include multiple layers, for example, for connecting the membrane unit 14 to the substrate 12. The converter unit 10 here has an interaction unit 16, which is arranged on the substrate 12 by means of the membrane unit 14. As shown in Figure 9 the interaction unit 16 is substantially implemented as circular. Here, the membrane unit 14 is arranged in the form of a ring surrounding the interaction unit 16. Thus, the membrane unit can space the interaction unit 16 from the substrate 12.

[0078] Furthermore, the interaction unit 16 has a fluid-tight space 22. The backplate 24 and at least one electrode element 28 are arranged within this fluid-tight space. Here, the at least one electrode element 28 can be arranged or anchored on any wall 20 or support pillar 40 of the fluid-tight space.

[0079] Furthermore, the interaction unit 16 has at least one bounding layer 32. The at least one bounding layer 32 can be configured in the shape of a curved beam and is arranged on the substrate 12 and / or another at least partially conductive layer by means of at least partially conductive connecting tabs 33. Additionally, the at least one bounding layer 32 can form the bottom 36 and / or the top 34 of the fluid-tight space 22.

[0080] The interaction unit 16 preferably has at least one bounding wall 42 to form the fluid-tight space 22. Additionally, support pillars 40 can be arranged between the bounding layers 32, 38.

[0081] Figure 10 A cross-sectional view of the converter unit 10 is shown, in particular Figure 9 a cross-sectional view of the converter unit 10.

[0082] As Figure 10 shown, the interaction unit 16 has two bounding walls 42, wherein the membrane unit 14 is arranged between the two bounding walls 42 to arrange the interaction unit 16 on the substrate 12.

[0083] Furthermore, the bounding wall 42 can form the wall 20 of the fluid-tight space 22. Support pillars 40 can preferably be arranged between the bounding layers 32, 38. Additionally, at least one backplate 24 is arranged within the fluid-tight space 22 of the interaction unit 16. Additionally, at least one electrode element 28 is arranged on the wall 20.

Claims

1. A transducer unit (10) for electrical or acoustic signals and / or relative pressures, wherein, The converter unit includes: - a substrate (12), - a membrane unit (14), - an interaction unit (16), wherein the substrate (12) has at least one cavity (18), wherein the interaction unit (16) is arranged on the substrate (12) such that the interaction unit (16) is at least partially and / or completely positioned through the cavity (18), wherein the membrane unit (14) is arranged between the interaction unit (16) and the substrate (12), and / or arranged between the interaction unit (16) and another interaction unit (20), wherein the interaction unit (16) has at least one fluid-tight space (22), wherein the interaction unit (16) is configured to adjust and / or maintain a pre-determined pressure in the fluid-tight space (22), wherein the interaction unit (16) has at least one backplate (24), wherein the interaction unit (16) is configured to obtain and / or generate an offset (26) of the interaction unit (16) by means of a change in the distance between the backplate (24) and at least one electrode element (28), and the electrode element is arranged on at least one wall (30) of the fluid-tight space (22).

2. The converter unit (10) according to claim 1, wherein, The fluid-tight space (22) includes at least one bounding layer (32), and the bounding layer constructs the top (34) and / or bottom (36) of the fluid-tight space (22).

3. The converter unit (10) according to claim 2, wherein, The at least one electrode element (28) is arranged in or on the bounding layer (32).

4. The converter unit (10) according to any one of claims 2 to 3, wherein, The membrane unit (14) is integrally formed with the bounding layer (32), the backplate (24), and / or the interaction unit (16), especially formed by one layer.

5. The converter unit (10) according to any one of claims 2 to 4, wherein, The bounding layer (32) includes a non-conductive material, and the at least one electrode element (28) is arranged in and / or on the non-conductive material.

6. The converter unit (10) according to any one of claims 2 to 5, wherein, The interaction unit (16) has at least two opposing bounding layers (32, 38), wherein the backplate (24) is at least partially arranged between the two bounding layers (32, 38), and each of the bounding layers (32, 38) has at least one of the electrode elements (28), and the electrode elements are respectively arranged between the backplate (24) and the surfaces of the bounding layers (32, 38) facing the fluid-tight space, especially.

7. The converter unit (10) according to claim 6, wherein, At least one support post (40) is arranged between the opposing bounding layers (32, 38), and especially the backplate (24) has a corresponding recess (61), and the support post (40) is arranged in the recess.

8. The converter unit (10) according to claim 7, wherein, The at least one wall (30) and / or the at least one support post (40) has a recess, and the at least one electrode element (28) is arranged in the recess such that the surface of the electrode element is in a plane with the surface of the at least one wall (30), and / or in a plane with the surface of the support post.

9. The converter unit (10) according to any one of claims 2 to 8, wherein, The thickness of the membrane unit (14) is equal to or less than the total thickness of the boundary layers (32, 38) and / or the thickness of the backplate (24).

10. The converter unit (10) according to any one of the preceding claims, wherein, The fluid sealing space (22) includes at least one boundary wall (42).

11. The converter unit (10) according to claim 10 and any one of claims 2 to 9, wherein, The boundary layer (32) is arranged on the substrate (12) and / or on the boundary wall (42).

12. The converter unit (10) according to any one of the above claims, wherein, The at least one electrode element (28) has a plurality of mutually isolated sections (44).

13. The converter unit (10) according to any one of the above claims, wherein, The interaction unit (16) has a rigidity that is configured to displace the interaction unit (16) relative to the substrate (12) when pressure is applied to the interaction unit (16) and / or when an acoustic signal is generated.

14. The converter unit (10) according to any one of the preceding claims, wherein, The backplate (24) has at least one reinforcing element (48) to adjust the rigidity of the backplate (26).

15. The converter unit (10) according to any one of the above claims, wherein, The interaction unit (16) is connected to the substrate (12) via a fluid channel (50), in particular via a solid state region (13), and the fluid channel is fluidically connected to the fluid sealing space (24).

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