Rectangular substrate EBR cleaning device and cleaning method

Abstract

The invention relates to the technical field of cleaning equipment, and discloses a rectangular base plate EBR cleaning device and method.The device comprises a bottom plate and a rectangular base plate, an upper cover body is installed at the top of the bottom plate, an electric push rod is fixedly installed on the outer side of the upper cover body, and the telescopic end of the electric push rod penetrates through the upper cover body to be fixedly connected with the bottom plate; an electric push rod is arranged in the upper cover body, a top cover is fixedly mounted at the top of the electric push rod, a spraying assembly is arranged in the upper cover body, an extraction assembly is arranged in the top cover, the spraying assembly comprises a driving unit, a spraying unit and a temperature adjusting unit, and the driving unit comprises an inner gear ring rotationally mounted in the upper cover body; and a bottom tooth block is fixedly connected to the bottom of the inner gear ring, a second gear and a main bevel gear are rotationally installed on the top of the bottom plate, and the problems that when the temperature of the external environment changes, the edge washing operation is not convenient to use in the corresponding temperature interval, and the use flexibility is reduced are solved.

Description

Technical Field

[0001] The present invention relates to the technical field of cleaning equipment, and specifically to a rectangular substrate EBR cleaning device and a cleaning method. Background Art

[0002] In the semiconductor manufacturing process, Edge Bevel Rinse (EBR) of photoresist is an important step. The edge bevel process is usually carried out after the photoresist is coated on the surface of the wafer and soft baking is completed. The purpose is to remove the overly thick photoresist on the edge of the wafer to prevent contamination or affect the flatness of the wafer during subsequent development and etching processes.

[0003] For example, an air flow enhanced monolithic rectangular substrate cleaning device with the publication number CN115069719B includes a rotating stage and a swing arm unit, and also includes a cavity unit located outside the rotating stage. The cavity unit includes an air inlet and at least one layer of deflector structure inside the cavity unit. The inclined baffle of the deflector structure can direct the air flow into the exhaust port around the annular groove and discharge it from the air extraction port on the side of the annular groove, so as to discharge the liquid medicine gas on the upper surface of the wafer as much as possible. The liquid medicine on the lower surface of the wafer can reduce the gas vortex generated on the lower surface of the wafer by setting air outlets on the inner walls of the thick column and the thin column of the console; However, temperature has a significant impact on the processing speed and effect of EBR edge beveling. A higher temperature can accelerate the reaction rate between the chemical solution and impurities, which helps to remove impurities and contaminants more thoroughly. However, too high a temperature will have an adverse effect on the stability of the chemical solution, which may cause the chemical solution to become unstable, and even may damage the components to be cleaned. Therefore, it is necessary to control the temperature within a suitable range. The operating temperature of the EBR edge removal solvent is usually at room temperature, that is, about 20 - 25 degrees Celsius. When the external environment temperature changes, it is not convenient to make the edge beveling operation use within the corresponding temperature range, reducing the flexibility of use.

[0004] At the same time, due to the good dimensional scalability, higher substrate utilization rate, and more diverse via formation technologies of rectangular substrates, their cost advantages are gradually reflected in multiple fields. However, the EBR edge beveling process, which is inseparable from its lithography process, cannot follow the traditional rotating EBR technical route for circular substrates due to the special nature of rectangular corners, and there is an urgent need for breakthroughs in process methods and equipment design.

[0005] Therefore, a rectangular substrate EBR cleaning device and a cleaning method are proposed to solve the above-mentioned problems. Summary of the Invention

[0006] The object of the present invention is to provide a rectangular substrate EBR cleaning device and a cleaning method, so as to solve the problem that when the temperature changes in the external environment, it is not convenient to make the edge cleaning operation use in the corresponding temperature range, reducing the flexibility of use.

[0007] To achieve the above object, the present invention provides the following technical solution: A rectangular substrate EBR cleaning device includes a bottom plate and a rectangular substrate. A top cover is installed on the top of the bottom plate. An electric push rod is fixedly installed on the outside of the top cover. The telescopic end of the electric push rod passes through the top cover and is fixedly connected to the bottom plate. The top of the electric push rod is fixedly installed with a top cover. It also includes: A spraying assembly is arranged inside the top cover, and an extraction assembly is arranged inside the top cover. The spraying assembly includes a driving unit, a spraying unit and a temperature regulating unit. The driving unit includes an internal gear ring rotatably installed inside the top cover. A bottom gear block is fixedly connected to the bottom of the internal gear ring. A gear two and a main bevel gear are rotatably installed on the top of the bottom plate. The spraying unit includes a reciprocating lead screw rotatably installed inside the top cover and a moving block slidable inside the top cover. A driven bevel gear is fixedly connected to one side of the reciprocating lead screw. A spray pipe is installed on the top of the moving block. The top end of the spray pipe is connected with a liquid inlet pipe.

[0008] Preferably, there are no less than two electric push rods. An annular groove is opened inside the housing of the top cover. A driving motor is fixedly installed at the lower part of one side of the annular groove. The output end of the driving motor is fixedly connected with a gear one. The internal gear ring is rotatably connected to the lower part of the inner side of the top cover. The bottom gear block is located inside the annular groove. The gear one is meshed with the bottom gear block.

[0009] By adopting the above technical solution, when the driving motor is started, the driving motor drives the gear one to rotate. The cleaning agent is sprayed out of the spray pipe through the liquid inlet pipe. The moving block drives the mounting strip and the spray pipe to reciprocate, so as to clean the thicker photoresist on one side of the rectangular substrate.

[0010] Preferably, a rotating shaft is rotatably connected to one side of the top of the bottom plate. The gear two and the main bevel gear are both fixedly connected to the rotating shaft. The main bevel gear is located above the gear two. The gear two is meshed with the internal gear ring. Two connecting plates are symmetrically and fixedly connected to one side of the inner top surface of the top cover. The bottom of the connecting plate is fixedly connected with a fixing plate.

[0011] By adopting the above technical solution, the rotation of the gear one will drive the bottom gear block and the internal gear ring to rotate. The internal gear ring drives the gear two to rotate. The gear two drives the rotating shaft and the main bevel gear to rotate. The main bevel gear drives the driven bevel gear and the reciprocating lead screw to rotate.

[0012] Preferably, the reciprocating lead screw is rotatably connected to the two fixed plates. A guide rod is fixedly connected to the lower part of the inner sides of the two fixed plates. The moving block is in threaded connection with the reciprocating lead screw and is slidably connected to the guide rod. A top block is fixedly connected to the inner top surface of the upper cover body, and the liquid inlet pipe is fixedly installed with the top block.

[0013] By adopting the above technical solution, the liquid inlet pipe is connected to an external cleaning agent pipeline. The cleaning agent passes through the liquid inlet pipe and is sprayed out by the spray pipe, and the spray pipe has flexibility.

[0014] Preferably, the liquid inlet pipe is communicated with the spray pipe. An installation strip is fixedly connected to the top of the moving block, and the spray pipe is fixedly installed with the installation strip. The temperature adjustment unit includes an upper pipe body fixedly installed above the inside of the annular groove. One side of the top of the upper pipe body is connected with an air inlet pipe. The bottom of the upper pipe body is connected with a connecting cylinder. The bottom of the connecting cylinder is connected with a lower pipe body. The bottom of the lower pipe body is fixedly connected with air blowing pipes evenly. A first fan blade part is fixedly connected to the top of the internal gear ring in an array.

[0015] By adopting the above technical solution, external air is sprayed out by the air blowing pipes. The air blowing pipes blow the first fan blade part, which will drive the first fan blade part to rotate. The first fan blade part drives the internal gear ring to rotate, and the reciprocating spraying and cleaning of the spray pipe can also be realized.

[0016] Preferably, the air inlet pipe is fixedly installed on the top of the upper cover body. There are no less than eight air blowing pipes. The first fan blade part is located inside the annular groove, and the number of the first fan blade parts is the same as that of the air blowing pipes. A blocking plate is symmetrically and fixedly connected to the inside of the connecting cylinder. A side block is symmetrically and fixedly connected to the inside of the connecting cylinder. A sealing plate is rotatably installed on the side block through a rotating shaft and a torsion spring. The torsion spring is used for the rotational reset of the sealing plate. The top of the blocking plate is in contact with the sealing plate.

[0017] By adopting the above technical solution, hot air or cold air is introduced into the air inlet pipe. The external air first fills the upper pipe body, and then the external air blows the sealing plate. The sealing plate rotates and opens and acts on the torsion spring. The external air then enters the lower pipe body, improving the uniformity of heating or cooling.

[0018] Preferably, the extraction component includes an upper motor fixedly installed in the middle of the top cover. The output end of the upper motor passes through the top cover and is fixedly connected with a rotating rod. A top groove is opened in the middle of the top of the upper cover body. Side rods are symmetrically and fixedly connected to the outer side of the lower part of the rotating rod. The same fixing ring is fixedly connected to one end of the side rod away from the rotating rod. The fixing ring is rotatably connected to the top groove. A second fan blade part is fixedly connected to the inside of the fixing ring in an array. An activated carbon plate is horizontally and fixedly installed inside the top cover. Scraping rods are symmetrically and fixedly installed on the outer side of the upper part of the rotating rod in upper and lower layers. The upper and lower scraping rods are respectively in contact with the top surface and the bottom surface of the activated carbon plate. A discharge pipe is fixedly installed on one side of the top of the top cover.

[0019] By adopting the above technical solution, when the upper motor is started, the second fan blade part extracts harmful gases upward. The gases are processed by the activated carbon plate, and the rotating rod rotates to drive the upper and lower scraping rods to rotate, facilitating the scraping and cleaning of the activated carbon plate.

[0020] Preferably, a stepper motor is fixedly installed in the middle of the top of the bottom plate. A vacuum chuck is fixedly installed on the top of the stepper motor. A liquid collecting tank is also installed on one side of the top of the bottom plate. An exhaust pipe is connected to the outside of one side of the upper cover body, and the exhaust pipe is communicated with the annular groove.

[0021] By adopting the above technical solution, after one side of the rectangular substrate is cleaned, the stepper motor drives the vacuum chuck and the rectangular substrate to rotate by 90 degrees to clean the lower side of the rectangular substrate until the cleaning of the four sides of the rectangular substrate is completed.

[0022] A cleaning method for a rectangular substrate EBR cleaning device is as follows: Step 1: The liquid inlet pipe is connected to an external cleaning agent pipeline. The rectangular substrate is placed in the middle of the top of the vacuum chuck by an external manipulator. The vacuum chuck is started to adsorb and fix the rectangular substrate. The driving motor is started, and the cleaning agent is sprayed out from the spray pipe through the liquid inlet pipe, thereby cleaning the photoresist on one side of the rectangular substrate. After one side of the rectangular substrate is cleaned, the stepper motor drives the vacuum chuck and the rectangular substrate to rotate by 90 degrees to clean the lower side of the rectangular substrate until the cleaning of the four sides of the rectangular substrate is completed; Step 2: When the external temperature changes, the driving motor is not started, and hot air or cold air is introduced into the air inlet pipe. The external air enters the lower pipe body through the upper pipe body and the connecting cylinder and is sprayed out by the air blowing pipe. The air blowing pipe drives the first fan blade part and the internal gear ring to rotate, facilitating the reciprocating spraying and cleaning of the spray pipe; Step 3: For the harmful gases generated during cleaning, the upper motor is started. The upper motor drives the rotating rod and the side rod to rotate. The side rod drives the fixed ring to rotate. The fixed ring drives the second fan blade part to rotate. The second fan blade part extracts the harmful gases upward, and the gases are processed by the activated carbon plate; Step 4: The rotating rod rotates to drive the upper and lower scraping rods to rotate, facilitating the scraping and cleaning of the activated carbon plate. The discharge pipe is connected to an external pipeline to facilitate the discharge of gases. An air inlet valve is also installed outside the upper cover body to keep the air pressure inside the upper cover body stable.

[0023] Compared with the prior art, the beneficial effects of the present invention are: 1. Organic or inorganic contamination on the surface of the rectangular substrate will seriously affect the quality of the product. Through the cleaning of the spraying component, the defect rate can be reduced, the product quality can be improved, the damage to the equipment caused by the pollutants on the substrate surface can be reduced, the service life of the equipment can be extended. Through the cooperation of the extraction component, it is convenient to collect and process harmful gases, realizing high-quality and low-pollution cleaning of the edges of the rectangular substrate; 2. A spraying component is provided. The liquid inlet pipe is connected to an external cleaning agent pipeline. Start the electric push rod. The elongation of the electric push rod drives the upper cover body to rise and open. Place the rectangular substrate on the top middle of the vacuum chuck through an external manipulator. Start the vacuum chuck to adsorb and fix the rectangular substrate. Start the drive motor. The drive motor drives the first gear to rotate. The first gear drives the bottom tooth block and the internal gear ring to rotate. The internal gear ring drives the second gear to rotate. The second gear drives the rotating shaft and the main bevel gear to rotate. The main bevel gear drives the driven bevel gear and the reciprocating lead screw to rotate. The guide rod limits the movement block. The rotation of the reciprocating lead screw causes the movement block to move linearly back and forth. The cleaning agent is sprayed out of the spray pipe through the liquid inlet pipe. The movement block drives the mounting strip and the spray pipe to move back and forth. The spray pipe has elasticity, so as to clean the thicker photoresist on one side of the rectangular substrate. After one side of the rectangular substrate is cleaned, the stepping motor drives the vacuum chuck and the rectangular substrate to rotate by 90 degrees to clean the next side of the rectangular substrate until the cleaning of the four sides of the rectangular substrate is completed. The cleaning liquid is collected through the liquid collecting tank. When the external temperature changes, the drive motor is not started. The hot air or cold air is introduced into the air inlet pipe. The temperature tester on the top of the upper cover body detects the temperature, so as to maintain the cleaning effect. The external air first fills the upper pipe body, and then the external air blows the sealing plate. The sealing plate rotates and opens and acts on the torsion spring. The external air is then input into the lower pipe body, improving the uniformity of heating or cooling. The external air is then sprayed out of the air blowing pipe. The air blowing pipe blows the first fan part, which will drive the first fan part to rotate. The first fan part drives the internal gear ring to rotate, and the reciprocating spraying and cleaning of the spray pipe can also be realized. The external air finally is discharged and collected through the exhaust pipe, solving the problem that when the external environment has temperature changes, it is not convenient to make the edge cleaning operation use in the corresponding temperature range, reducing the use flexibility; 3. An extraction component is provided. For the harmful gases generated during cleaning, start the upper motor. The upper motor drives the rotating rod and the side rod to rotate. The side rod drives the fixed ring to rotate. The fixed ring drives the second fan part to rotate. The second fan part extracts the harmful gases upward. The gas is treated by the activated carbon plate. The rotation of the rotating rod drives the upper and lower scraping rods to rotate, facilitating the scraping and cleaning of the activated carbon plate. The discharge pipe is connected to an external pipeline, facilitating the discharge of the gas. An air inlet valve is also installed outside the upper cover body to maintain the air pressure stability inside the upper cover body, solving the problem that during the edge cleaning of photoresist, harmful gases such as organic solvents and volatile organic compounds will be generated. These harmful gases not only pollute the environment but also may harm the health of the operators. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the first three-dimensional overall structure of the present invention; Figure 2 It is a schematic diagram of the first and second three-dimensional overall structures of the present invention; Figure 3 For the present invention Figure 2 The enlarged structural schematic diagram at A in; Figure 4Schematic cross-sectional structure diagram of the upper cover body of the present invention; Figure 5 Schematic installation structure diagram of the stepping motor of the present invention; Figure 6 For the present invention Figure 5 Schematic enlarged structure diagram at position B in Figure 7 For the present invention Figure 5 Schematic enlarged structure diagram at position C in Figure 8 Schematic installation structure diagram of the connecting plate of the present invention; Figure 9 For the present invention Figure 8 Schematic enlarged structure diagram at position D in Figure 10 Schematic installation structure diagram of the upper pipe body of the present invention; Figure 11 For the present invention Figure 10 Schematic enlarged structure diagram at position E in Figure 12 Schematic cross-sectional structure diagram of the connecting cylinder of the present invention; Figure 13 Schematic installation structure diagram of the top cover of the present invention; Figure 14 For the present invention Figure 13 Schematic enlarged structure diagram at position F in

[0025] In the figure: 1, bottom plate; 2, upper cover body; 3, electric push rod; 4, top cover; 5, spraying assembly; 51, annular groove; 52, driving motor; 53, gear one; 54, internal gear ring; 55, bottom tooth block; 56, rotating shaft; 57, gear two; 58, main bevel gear; 59, connecting plate; 510, fixing plate; 511, reciprocating lead screw; 512, guide rod; 513, secondary bevel gear; 514, moving block; 515, top block; 516, liquid inlet pipe; 517, mounting strip; 518, spray pipe; 519, upper pipe body; 520, air inlet pipe; 521, connecting cylinder; 522, lower pipe body; 523, blowing pipe; 524, fan part one; 525, blocking plate; 526, side block; 527, sealing plate; 6, extraction assembly; 61, upper motor; 62, rotating rod; 63, top groove; 64, fixing ring; 65, fan part two; 66, side rod; 67, scraping rod; 68, discharge pipe; 7, stepping motor; 8, vacuum chuck; 9, rectangular substrate; 10, liquid collecting tank; 11, exhaust pipe. Detailed implementation manners

[0026] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0027] Please refer to Figures 1 - 3 , the present invention provides a technical solution: a rectangular substrate EBR cleaning device, including a bottom plate 1 and a rectangular substrate 9. A top cover 2 is installed on the top of the bottom plate 1. An electric push rod 3 is fixedly installed on the outside of the top cover 2. The telescopic end of the electric push rod 3 passes through the top cover 2 and is fixedly connected to the bottom plate 1. A top cover 4 is fixedly installed on the top of the electric push rod 3.

[0028] A spraying assembly 5 is arranged inside the top cover 2. The spraying assembly 5 includes a driving unit, a spraying unit and a temperature regulating unit. The driving unit includes an internal gear ring 54 rotatably installed inside the top cover 2. A bottom gear block 55 is fixedly connected to the bottom of the internal gear ring 54. A second gear 57 and a main bevel gear 58 are rotatably installed on the top of the bottom plate 1.

[0029] There are no less than two electric push rods 3. An annular groove 51 is opened inside the housing of the top cover 2. A driving motor 52 is fixedly installed at the lower part of one side of the annular groove 51. The output end of the driving motor 52 is fixedly connected to a first gear 53. The internal gear ring 54 is rotatably connected to the lower inner side of the top cover 2. The bottom gear block 55 is located inside the annular groove 51. The first gear 53 is meshed with the bottom gear block 55.

[0030] A rotating shaft 56 is rotatably connected to one side of the top of the bottom plate 1. Both the second gear 57 and the main bevel gear 58 are fixedly connected to the rotating shaft 56. The main bevel gear 58 is located above the second gear 57. The second gear 57 is meshed with the internal gear ring 54. Two connecting plates 59 are symmetrically and fixedly connected to one side of the inner top surface of the top cover 2. A fixing plate 510 is fixedly connected to the bottom of the connecting plate 59.

[0031] The spraying unit includes a reciprocating lead screw 511 rotatably installed inside the top cover 2 and a moving block 514 slidable inside the top cover 2. A secondary bevel gear 513 is fixedly connected to one side of the reciprocating lead screw 511. A spray pipe 518 is installed on the top of the moving block 514. The top end of the spray pipe 518 is connected to a liquid inlet pipe 516.

[0032] The reciprocating lead screw 511 is rotatably connected to the two fixing plates 510. Guide rods 512 are fixedly connected to the lower inner sides of the two fixing plates 510. The moving block 514 is threadedly connected to the reciprocating lead screw 511. The moving block 514 is slidably connected to the guide rods 512. A top block 515 is fixedly connected to the inner top surface of the top cover 2. The liquid inlet pipe 516 is fixedly installed with the top block 515.

[0033] The liquid inlet pipe 516 is communicated with the spray pipe 518. The top of the moving block 514 is fixedly connected with an installation bar 517, and the spray pipe 518 is fixedly installed with the installation bar 517. The temperature adjustment unit includes an upper pipe body 519 fixedly installed above the inner part of the annular groove 51. One side of the top of the upper pipe body 519 is connected with an air inlet pipe 520, the bottom of the upper pipe body 519 is connected with a connecting cylinder 521, the bottom of the connecting cylinder 521 is connected with a lower pipe body 522, the bottom of the lower pipe body 522 is uniformly and fixedly connected with air blowing pipes 523, and the top of the internal gear ring 54 is arrayed and fixedly connected with a first fan blade part 524.

[0034] The air inlet pipe 520 is fixedly installed with the top of the upper cover body 2. There are no less than eight air blowing pipes 523. The first fan blade part 524 is located inside the annular groove 51, and the number of the first fan blade part 524 is the same as that of the air blowing pipes 523. The inside of the connecting cylinder 521 is symmetrically and fixedly connected with a blocking plate 525. The inside of the connecting cylinder 521 is symmetrically and fixedly connected with side blocks 526. The side blocks 526 are rotationally installed with a sealing plate 527 through a rotating shaft and a torsion spring. The torsion spring is used for the rotational reset of the sealing plate 527, and the top of the blocking plate 525 is in fit with the sealing plate 527.

[0035] Embodiment 1: As Figures 4 - 12 shown, the liquid inlet pipe 516 is connected with an external cleaning agent pipeline. The electric push rod 3 is started. The elongation of the electric push rod 3 drives the upper cover body 2 to rise and open. The rectangular substrate 9 is placed on the top middle of the vacuum chuck 8 through an external manipulator. The vacuum chuck 8 is started to adsorb and fix the rectangular substrate 9. The drive motor 52 is started. The drive motor 52 drives the first gear 53 to rotate. The first gear 53 drives the bottom tooth block 55 and the internal gear ring 54 to rotate. The internal gear ring 54 drives the second gear 57 to rotate. The second gear 57 drives the rotating shaft 56 and the main bevel gear 58 to rotate. The main bevel gear 58 drives the driven bevel gear 513 and the reciprocating lead screw 511 to rotate. The guide rod 512 limits the position of the moving block 514. The rotation of the reciprocating lead screw 511 causes the moving block 514 to linearly reciprocate.

[0036] The cleaning agent is sprayed out from the spray pipe 518 through the liquid inlet pipe 516. The moving block 514 drives the installation bar 517 and the spray pipe 518 to reciprocate. The spray pipe 518 has elasticity, so as to clean the relatively thick photoresist on one side of the rectangular substrate 9. After one side of the rectangular substrate 9 is cleaned, the stepping motor 7 drives the vacuum chuck 8 and the rectangular substrate 9 to rotate by ninety degrees to clean the next side of the rectangular substrate 9 until the cleaning of the four sides of the rectangular substrate 9 is completed. The cleaning liquid is collected through the liquid collecting tank 10.

[0037] When the external temperature changes, the drive motor 52 is not started, and hot air or cold air is introduced into the air inlet pipe 520. The temperature tester at the top of the upper cover 2 detects the temperature, so as to maintain the cleaning effect. The external air first fills the upper pipe body 519, and then the external air blows the sealing plate 527. The sealing plate 527 rotates and opens and acts on the torsion spring. The external air is then input into the lower pipe body 522, improving the uniformity of heating or cooling. The external air is then ejected from the blow pipe 523. The blow pipe 523 blows the first fan blade part 524, which will drive the first fan blade part 524 to rotate. The first fan blade part 524 drives the internal gear ring 54 to rotate, and the reciprocating spraying and cleaning of the spray pipe 518 can also be realized. Finally, the external air is discharged and collected through the exhaust pipe 11, solving the problem that when the external environment temperature changes, it is not convenient to make the edge cleaning operation use in the corresponding temperature range, reducing the use flexibility.

[0038] An extraction component 6 is arranged inside the top cover 4. The extraction component 6 includes an upper motor 61 fixedly installed in the middle of the top of the top cover 4. The output end of the upper motor 61 passes through the top cover 4 and is fixedly connected with a rotating rod 62. A top groove 63 is opened in the middle of the top of the upper cover 2. Symmetrically fixed to the outer side of the lower part of the rotating rod 62 are side rods 66. One end of the side rod 66 away from the rotating rod 62 is fixedly connected with the same fixing ring 64. The fixing ring 64 is rotatably connected with the top groove 63. Arrayed and fixedly connected to the inner side of the fixing ring 64 are second fan blade parts 65. Horizontally fixedly installed inside the top cover 4 is an activated carbon plate. Symmetrically fixedly installed on the outer side of the upper part of the rotating rod 62 are upper and lower scraping rods 67. The upper and lower scraping rods 67 are respectively in contact with the top surface and the bottom surface of the activated carbon plate. Fixedly installed on one side of the top of the top cover 4 is a discharge pipe 68.

[0039] Example two: As Figures 13 - 14 shown, for the harmful gases generated during cleaning, start the upper motor 61. The upper motor 61 drives the rotating rod 62 and the side rod 66 to rotate. The side rod 66 drives the fixing ring 64 to rotate. The fixing ring 64 drives the second fan blade parts 65 to rotate. The second fan blade parts 65 extract the harmful gases upward. The gases are treated by the activated carbon plate. The rotating rod 62 rotates to drive the upper and lower scraping rods 67 to rotate, facilitating the scraping and cleaning of the activated carbon plate. The discharge pipe 68 is connected to the external pipeline, facilitating the discharge of the gases.

[0040] An air inlet valve is also installed outside the upper cover 2 to keep the air pressure inside the upper cover 2 stable, solving the problem that during the edge cleaning of photoresist, harmful gases such as organic solvents and volatile organic compounds will be generated. These harmful gases not only pollute the environment but also may pose a hazard to the health of operators.

[0041] Working principle: When using this device, first, as Figures 1 - 14As shown, the liquid inlet pipe 516 is connected to an external cleaning agent pipeline. The electric push rod 3 is started, and when the electric push rod 3 extends, it drives the upper cover 2 to rise and open. The rectangular substrate 9 is placed in the middle of the top of the vacuum chuck 8 by an external manipulator. The vacuum chuck 8 is started to adsorb and fix the rectangular substrate 9. The drive motor 52 is started, and the cleaning agent is sprayed out from the spray pipe 518 through the liquid inlet pipe 516. The moving block 514 drives the mounting bar 517 and the spray pipe 518 to reciprocate, so as to clean the relatively thick photoresist on one side of the rectangular substrate 9. After one side of the rectangular substrate 9 is cleaned, the stepping motor 7 drives the vacuum chuck 8 and the rectangular substrate 9 to rotate by ninety degrees to clean the next side of the rectangular substrate 9 until the cleaning of the four sides of the rectangular substrate 9 is completed. The cleaning liquid is collected through the liquid collecting tank 10. When the external temperature changes, the drive motor 52 is not started, and hot air or cold air is introduced into the air inlet pipe 520. The external air is sprayed out from the air blowing pipe 523. The air blowing pipe 523 blows the first fan part 524, which will drive the first fan part 524 to rotate. The first fan part 524 drives the internal gear ring 54 to rotate, and the reciprocating spraying and cleaning of the spray pipe 518 can also be realized. The external air is finally discharged and collected through the exhaust pipe 11. For the harmful gases generated during cleaning, the upper motor 61 is started, and the second fan part 65 extracts the harmful gases upward. The gas is treated by the activated carbon plate. The rotating rod 62 rotates to drive the upper and lower scraping rods 67 to rotate, which is convenient for scraping and cleaning the activated carbon plate. The discharge pipe 68 is connected to an external pipeline for convenient gas discharge.

[0042] The content not described in detail in this specification belongs to the prior art well-known to those skilled in the art.

[0043] Although the present invention has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A rectangular substrate EBR cleaning device, comprising a bottom plate (1) and a rectangular substrate (9). A top cover (2) is installed on the top of the bottom plate (1). An electric push rod (3) is fixedly installed on the outer side of the top cover (2). The telescopic end of the electric push rod (3) passes through the top cover (2) and is fixedly connected to the bottom plate (1). A top cover (4) is fixedly installed on the top of the electric push rod (3). It is characterized in that It further includes: A spraying assembly (5) is arranged inside the top cover (2), and an extraction assembly (6) is arranged inside the top cover (4). The spraying assembly (5) includes a driving unit, a spraying unit and a temperature regulating unit. The driving unit includes an internal gear ring (54) rotatably installed inside the top cover (2). A bottom gear block (55) is fixedly connected to the bottom of the internal gear ring (54). A second gear (57) and a main bevel gear (58) are rotatably installed on the top of the bottom plate (1). The spraying unit includes a reciprocating lead screw (511) rotatably installed inside the top cover (2) and a moving block (514) slidable inside the top cover (2). A driven bevel gear (513) is fixedly connected to one side of the reciprocating lead screw (511). A spray pipe (518) is installed on the top of the moving block (514). The top end of the spray pipe (518) is connected to a liquid inlet pipe (516).

2. The rectangular substrate EBR cleaning device according to claim 1, wherein: There are no less than two electric push rods (3). An annular groove (51) is formed inside the shell of the top cover (2). A driving motor (52) is fixedly installed at the lower part of one side of the annular groove (51). The output end of the driving motor (52) is fixedly connected to a first gear (53). The internal gear ring (54) is rotatably connected to the lower inner side of the top cover (2). The bottom gear block (55) is located inside the annular groove (51). The first gear (53) is meshed with the bottom gear block (55).

3. The rectangular substrate EBR cleaning device according to claim 2, wherein: A rotating shaft (56) is rotatably connected to one side of the top of the bottom plate (1). The second gear (57) and the main bevel gear (58) are both fixedly connected to the rotating shaft (56). The main bevel gear (58) is located above the second gear (57). The second gear (57) is meshed with the internal gear ring (54). Two connecting plates (59) are symmetrically and fixedly connected to one side of the inner top surface of the top cover (2). A fixing plate (510) is fixedly connected to the bottom of the connecting plate (59).

4. A rectangular substrate EBR cleaning device according to claim 3, wherein: The reciprocating lead screw (511) is rotatably connected to the two fixing plates (510). Guide rods (512) are fixedly connected to the lower inner sides of the two fixing plates (510). The moving block (514) is threadedly connected to the reciprocating lead screw (511). The moving block (514) is slidably connected to the guide rods (512). A top block (515) is fixedly connected to the inner top surface of the top cover (2). The liquid inlet pipe (516) is fixedly installed on the top block (515).

5. The EBR cleaning device for a rectangular substrate according to claim 4, wherein: The liquid inlet pipe (516) is communicated with the spray pipe (518). A mounting strip (517) is fixedly connected to the top of the moving block (514). The spray pipe (518) is fixedly installed on the mounting strip (517). The temperature regulating unit includes an upper pipe body (519) fixedly installed above the inside of the annular groove (51). One side of the top of the upper pipe body (519) is connected with an air inlet pipe (520). The bottom of the upper pipe body (519) is connected with a connecting cylinder (521). The bottom of the connecting cylinder (521) is connected with a lower pipe body (522). The bottom of the lower pipe body (522) is uniformly and fixedly connected with air blowing pipes (523). A first fan blade part (524) is fixedly connected to the top of the internal gear ring (54) in an array.

6. The EBR cleaning device for a rectangular substrate according to claim 5, characterized in that: The air inlet pipe (520) is fixedly installed on the top of the upper cover body (2). There are no less than eight air blowing pipes (523). The first fan blade part (524) is located inside the annular groove (51). The number of the first fan blade parts (524) is the same as that of the air blowing pipes (523). Blocking plates (525) are symmetrically and fixedly connected to the inside of the connecting cylinder (521). Side blocks (526) are symmetrically and fixedly connected to the inside of the connecting cylinder (521). A sealing plate (527) is rotatably installed on the side block (526) through a rotating shaft and a torsion spring. The torsion spring is used for the rotation reset of the sealing plate (527). The top of the blocking plate (525) is attached to the top of the sealing plate (527).

7. A rectangular substrate EBR cleaning device according to claim 6, characterized in that: The extraction assembly (6) includes an upper motor (61) fixedly installed in the middle of the top of the top cover (4). The output end of the upper motor (61) passes through the top cover (4) and is fixedly connected with a rotating rod (62). A top groove (63) is formed in the middle of the top of the upper cover body (2). Side rods (66) are symmetrically and fixedly connected to the outer side of the lower part of the rotating rod (62). The same fixing ring (64) is fixedly connected to one end of the side rod (66) far away from the rotating rod (62). The fixing ring (64) is rotatably connected with the top groove (63). A second fan blade part (65) is fixedly connected to the inner side of the fixing ring (64) in an array. An activated carbon plate is fixedly installed horizontally inside the top cover (4). Upper and lower scraping rods (67) are symmetrically and fixedly installed on the outer side of the upper part of the rotating rod (62). The upper and lower scraping rods (67) are respectively attached to the top surface and the bottom surface of the activated carbon plate. A discharge pipe (68) is fixedly installed on one side of the top of the top cover (4).

8. A rectangular substrate EBR cleaning device according to claim 7, characterized in that: A stepping motor (7) is fixedly installed in the middle of the top of the bottom plate (1). A vacuum chuck is fixedly installed on the top of the stepping motor (7). A liquid collecting tank (10) is further installed on one side of the top of the bottom plate (1). An exhaust pipe (11) is connected to the outer side of the upper cover body (2). The exhaust pipe (11) is communicated with the annular groove (51).

9. A cleaning method for a cleaning device of a rectangular substrate EBR, characterized in that, For a rectangular substrate EBR cleaning device as claimed in claim 8, the using steps are as follows: Step 1: Connect the liquid inlet pipe (516) to the external cleaning agent pipeline. Place the rectangular substrate (9) in the middle of the top of the vacuum chuck (8) through an external manipulator. Start the vacuum chuck (8) to adsorb and fix the rectangular substrate (9). Start the drive motor (52). The cleaning agent is ejected from the spray pipe (518) through the liquid inlet pipe (516), thereby cleaning the photoresist on one side of the rectangular substrate (9). After one side of the rectangular substrate (9) is cleaned, the stepping motor (7) drives the vacuum chuck (8) and the rectangular substrate (9) to rotate by ninety degrees to clean the next side of the rectangular substrate (9) until the cleaning of the four sides of the rectangular substrate (9) is completed; Step 2: When the external temperature changes, do not start the drive motor (52). Pass hot air or cold air into the air inlet pipe (520). The external air enters the lower pipe body (522) through the upper pipe body (519) and the connecting cylinder (521) and is ejected from the air blowing pipe (523). The air blowing pipe (523) drives the first fan part (524) and the internal gear ring (54) to rotate, facilitating the reciprocating spray cleaning of the spray pipe (518); Step 3: For the harmful gases generated during cleaning, start the upper motor (61). The upper motor (61) drives the rotating rod (62) and the side rod (66) to rotate. The side rod (66) drives the fixed ring (64) to rotate. The fixed ring (64) drives the second fan part (65) to rotate. The second fan part (65) extracts the harmful gases upward, and the gases are treated by the activated carbon plate; Step 4: The rotation of the rotating rod (62) drives the upper and lower scraping rods (67) to rotate, facilitating the scraping and cleaning of the activated carbon plate. The discharge pipe (68) is connected to the external pipeline to facilitate the discharge of gases. An air inlet valve is also installed outside the upper cover body (2) to maintain the air pressure stability inside the upper cover body (2).

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