Material opening sliding table for Stock material box

Abstract

The material opening sliding table comprises a first-stage sliding table body, the first-stage sliding table body comprises a fixed plate, a movable plate and a driving assembly, the movable plate is located above the fixed plate and is in sliding connection with the fixed plate, and the driving assembly is used for controlling the movable plate to stretch out and draw back; the second-stage sliding table comprises a table plate and a transmission assembly, and the transmission assembly is used for driving the table plate to move in the same direction when the movable plate moves; and the number of the limiting mechanisms is multiple, the limiting mechanisms correspond to the material boxes one to one, and the limiting mechanisms are used for limiting the material boxes in the limiting grooves. Through the arrangement of the first-stage sliding table and the second-stage sliding table, namely through the active and passive two-stage telescopic design, the large stroke is achieved in the limited material opening space, meanwhile, after the table plate stretches out, an open type taking and placing area is formed and matched with a limiting mechanism, it is ensured that the material box does not deviate in the moving process, and micro damage caused by vibration of the material box is avoided.

Description

Technical Field

[0001] The present invention relates to the technical field of material storage, and particularly to a material port sliding table for a Stocker cassette. Background Art

[0002] In high-precision manufacturing fields such as semiconductor manufacturing and electronic assembly, a Stocker (automated material storage system), as the core temporary storage and transfer equipment for wafers and chip cassettes (such as MGZ cassettes), its design directly affects the stability of the production rhythm and the overall equipment efficiency. The material port sliding tables of traditional Stocker cassettes mostly adopt an open structure, and by reserving sufficient horizontal and vertical spaces, it is convenient for manual or robotic arms to perform the picking and placing operations of the cassettes.

[0003] However, with the increasing requirement for space utilization rate in the manufacturing workshop, the embedded material port design has gradually become the mainstream. This type of design embeds the material port in the equipment body, significantly reducing the floor area of the equipment and at the same time optimizing the compactness of the production line layout. Although the embedded material port saves space, there is a lack of an open area when picking and placing cassettes, making it difficult for manual and robotic operations. Summary of the Invention

[0004] The purpose of the present invention is to provide a material port sliding table for a Stocker cassette to solve the problems mentioned in the above background art.

[0005] To solve the above technical problems, the present invention provides a material port sliding table for a Stocker cassette, which includes:

[0006] A first-level sliding table, the first-level sliding table includes a fixed plate, a moving plate and a driving component, the moving plate is located above the fixed plate and is slidably connected to the fixed plate, and the driving component is used to control the telescopic movement of the moving plate;

[0007] A second-level sliding table, the second-level sliding table includes a table plate and a transmission component, the table plate is located above the moving plate and is provided with a plurality of limiting grooves adapted to the cassettes at intervals, the table plate is slidably connected to the moving plate, and the transmission component is used to drive the table plate to move in the same direction when the moving plate moves;

[0008] A limiting mechanism, the number of the limiting mechanisms is multiple, corresponding to the cassettes one by one, and the limiting mechanism is used to limit the cassettes in the limiting grooves.

[0009] Further, the driving component includes a rack, a gear and a motor, the rack is installed at the bottom of the moving plate, the gear meshes with the rack, and the motor is used to drive the gear to rotate.

[0010] Further, guide rails and a plurality of rubber rollers are installed on the tops of the fixed plate and the moving plate. Sliders are installed on the bottoms of the moving plate and the table plate. The sliders are slidably connected to the guide rails. The plurality of rubber rollers are respectively rotatably connected to the fixed plate and the moving plate, and are respectively in contact with the moving plate and the table plate.

[0011] Further, the transmission assembly includes two first tensioning seats, two second tensioning seats, two idler wheels and two synchronous belts respectively arranged on both sides of the moving plate. The two first tensioning seats are respectively located at the front end and the middle end of the top of the fixed plate, and are both detachably connected to the fixed plate. The two second tensioning seats are both detachably connected to the bottom of the table plate. The two idler wheels are respectively located at the front end and the rear end of the moving plate, and are both rotatably connected to the moving plate. The two synchronous belts are respectively sleeved on the corresponding idler wheels, and their two ends are respectively connected to the corresponding first tensioning seats and second tensioning seats.

[0012] Further, a plurality of installation grooves communicating with the limiting grooves are formed on the table plate. The limiting mechanism includes a plurality of L-shaped positioning blocks. The plurality of positioning blocks are symmetrically arranged on both sides of the limiting groove and correspond to the plurality of installation grooves. The positioning blocks are rotatably connected to the inner walls of the installation grooves. The upper end surface of the bottom of the positioning block is in contact with the bottom surface of the material box, and the inner side surface of the top of the positioning block is in contact with the outer side surface of the material box.

[0013] Further, a retaining strip is provided on the outside of each of the plurality of installation grooves. The retaining strip is used to limit the upward rotation angle of the positioning block.

[0014] Further, each of the plurality of installation grooves penetrates longitudinally. A plurality of anti-rotation plates are installed on the bottom of the support plate. The anti-rotation plates are used to limit the downward rotation angle of the positioning block.

[0015] Further, a micro photo-electric sensor is installed in the limiting groove.

[0016] Further, the motor is installed below the fixed plate through a mounting plate.

[0017] The beneficial effects of the present invention are as follows: By providing a first-stage sliding table and a second-stage sliding table, that is, through an active and passive two-stage telescopic design, a large stroke can be achieved within a limited material port space. At the same time, after the table plate extends, an open picking and placing area is formed, which cooperates with the limiting mechanism to ensure that the material box has no offset during movement and avoid micro-damage of the material box caused by vibration. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a three-dimensional structural schematic diagram when the embodiment of the present invention extends.

[0019] Figure 2Schematic front view structure diagram when the embodiment of the present invention extends out.

[0020] Figure 3 Schematic three - dimensional structure diagram when the embodiment of the present invention contracts.

[0021] Wherein: 1. Primary slide; 2. Secondary slide; 3. Limit mechanism; 4. Guide rail; 5. Rubber roller; 6. Slide block; 7. Micro photoelectric sensor; 8. Magazine.

[0022] 11. Fixed plate; 12. Moving plate; 13. Driving component; 21. Table board; 22. Transmission component; 23. Limit groove; 31. Installation groove; 32. Positioning block; 33. Stop bar; 34. Anti - rotation plate.

[0023] 131. Rack; 132. Gear; 133. Motor; 134. Mounting plate; 221. First tensioning seat; 222. Second tensioning seat; 223. Idler pulley; 224. Timing belt. Detailed implementation manners

[0024] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only one embodiment of the present invention, rather than all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0025] To make the purpose, technical solution and advantages of the present application clearer, the following further details the present application in conjunction with the accompanying drawings and specific embodiments.

[0026] In the following description, references to "one embodiment", "embodiment", "one example", "example", etc. indicate that the described embodiment or example may include specific features, structures, characteristics, properties, elements or limitations, but not every embodiment or example necessarily includes specific features, structures, characteristics, properties, elements or limitations. Additionally, repeated use of the phrase "according to an embodiment of the present application" may, although possibly, refer to the same embodiment, but not necessarily.

[0027] As Figures 1-3 shown, the present invention discloses a material - opening slide for a Stocker magazine 8, which is arranged in an embedded material opening, and the opening direction of the material opening is outward, including:

[0028] The first-stage slide table 1, the first-stage slide table 1 includes a fixed plate 11, a moving plate 12 and a driving component 13. The moving plate 12 is located above the fixed plate 11 and is slidably connected to the fixed plate 11. The driving component 13 is used to control the telescopic movement of the moving plate 12; that is, the driving component 13 (such as a servo motor 133 + lead screw / synchronous belt 224) drives the moving plate 12 to perform a linear telescopic movement along the fixed plate 11, providing a basic lateral displacement.

[0029] The second-stage slide table 2, the second-stage slide table 2 includes a table board 21 and a transmission component 22. The table board 21 is located above the moving plate 12 and is provided with a plurality of limiting grooves 23 adapted to the material box 8 at intervals. The table board 21 is slidably connected to the moving plate 12. The transmission component 22 is used to drive the table board 21 to move in the same direction when the moving plate 12 moves; that is, the transmission component 22 (such as a synchronous belt 224, a gear 132 rack or a link structure) transfers the linear movement of the moving plate 12 to the table board 21, so that the table board 21 slides synchronously above the moving plate 12, forming a further lateral displacement.

[0030] The limiting mechanism 3, the number of the limiting mechanisms 3 is multiple, corresponding to the material boxes 8 one by one. The limiting mechanism 3 is used to limit the material box 8 in the limiting groove 23. Each limiting groove 23 is configured with an independently driven limiting mechanism 3 (such as a pneumatic chuck, an electromagnetic plug or a spring pressing plate), which automatically clamps when the material box 8 is placed, preventing the material box 8 from shifting due to inertia or vibration during the movement of the slide table; it is synchronously released when taking the material to avoid interference.

[0031] In the initial state, the first-stage / second-stage slide table 2 is completely retracted and hidden in the material port. During use, the driving component 13 is started, and the moving plate 12 of the first-stage slide table 1 begins to extend, driving the transmission component 22 to start synchronously, so that the table board 21 of the second-stage slide table 2 begins to extend until the table board 21 is located outside the material port. The material box 8 is placed in the limiting groove 23, and the limiting mechanism 3 restricts the material box 8. Then the driving component 13 is started again to make the moving plate 12 of the first-stage slide table 1 begin to retract, driving the transmission component 22 to start synchronously, so that the table board 21 of the second-stage slide table 2 begins to retract, and the slide table is reset. That is, through the hierarchical movement of the slide table, the material box 8 is actively delivered from a narrow embedded space to an open area, and the robotic arm only needs a single-axis linear movement to pick and place, reducing the complexity of motion planning.

[0032] The present invention realizes a large stroke in a limited material port space by setting the first-stage slide table 1 and the second-stage slide table 2, that is, through an active and passive two-stage telescopic design. At the same time, after the table board 21 extends, an open picking and placing area is formed, which cooperates with the limiting mechanism 3 to ensure that the material box 8 has no offset during movement and avoid micro-damage to the material box 8 caused by vibration.

[0033] In one embodiment, the driving assembly 13 includes a rack 131, a gear 132, and a motor 133. The rack 131 is installed at the bottom of the moving plate 12 and serves as a track for linear motion. The gear 132 meshes with the rack 131, and the motor 133 is used to drive the rotation of the gear 132 to convert the rotational motion of the motor 133 into linear motion. In this embodiment, the motor 133 is electrically connected to a controller, which is a prior art and will not be elaborated herein.

[0034] In one embodiment, guide rails 4 and a plurality of rubber rollers 5 are installed on the tops of both the fixed plate 11 and the moving plate 12. Sliders 6 are installed on the bottoms of both the moving plate 12 and the table plate 21. The sliders 6 are slidably connected to the guide rails 4, and the plurality of rubber rollers 5 are respectively rotatably connected to the fixed plate 11 and the moving plate 12 and are respectively in contact with the moving plate 12 and the table plate 21.

[0035] In this embodiment, two high-precision linear guide rails 4 are arranged in parallel on the top of the fixed plate 11 and the top of the moving plate 12. The length of the guide rails 4 covers the full stroke of the moving plate 12 and the table plate 21. Each guide rail 4 is configured with a slider 6, and the sliders 6 are installed at the bottom of the moving plate 12 and the bottom of the table plate 21 to form a support. Rubber rollers 5 are installed at the front ends of both the fixed plate 11 and the moving plate 12, so that the bottom surfaces of the moving plate 12 and the table plate 21 are in contact with them during the telescoping process, converting a part of the sliding friction into rolling friction, reducing energy consumption and wear.

[0036] In one embodiment, the transmission assembly 22 includes two first tensioning seats 221, two second tensioning seats 222, two idler pulleys 223, and two synchronous belts 224 respectively arranged on both sides of the moving plate 12. The two first tensioning seats 221 are respectively located at the front end and the middle end of the top of the fixed plate 11 and are both detachably connected to the fixed plate 11. The two second tensioning seats 222 are both detachably connected to the bottom of the table plate 21. The two idler pulleys 223 are respectively located at the front end and the rear end of the moving plate 12 and are both rotatably connected to the moving plate 12. The two synchronous belts 224 are respectively sleeved on the corresponding idler pulleys 223, and their two ends are respectively connected to the corresponding first tensioning seats 221 and second tensioning seats 222. Each synchronous belt 224 on each side bypasses the corresponding idler pulley 223 in a C shape, with one end fixed to the first tensioning seat 221 on the fixed plate 11 and the other end fixed to the second tensioning seat 222 on the table plate 21.

[0037] In this embodiment, on the first side of the moving plate 12, the first tensioning seat 221 is located at the front end of the fixed plate 11, and the idler pulley 223 is located at the rear end of the moving plate 12. On the second side of the moving plate 12, the first tensioning seat 221 is located at the middle end of the fixed plate 11, and the idler pulley 223 is located at the front end of the moving plate 12. When the moving plate 12 moves, the idler pulleys 223 at its front end / rear end follow, and the synchronous belt 224 forms a fulcrum at the idler pulley 223.

[0038] When the moving plate 12 extends, the front-end idler pulley 223 follows, driving the corresponding side synchronous belt 224 to stretch forward. The platen 21 moves forward under the traction of this synchronous belt 224, and the rear-end idler pulley 223 compensates synchronously to maintain the tension of the corresponding side synchronous belt 224. When the moving plate 12 contracts, the rear-end idler pulley 223 follows, driving the corresponding side synchronous belt 224 to stretch backward. The platen 21 moves backward under the traction of this synchronous belt 224, and the front-end idler pulley 223 compensates synchronously to maintain the tension of the corresponding side synchronous belt 224.

[0039] In one embodiment, a plurality of mounting grooves 31 communicating with the limiting groove 23 are formed on the platen 21. The limiting mechanism 3 includes a plurality of L-shaped positioning blocks 32. The plurality of positioning blocks 32 are symmetrically arranged on both sides of the limiting groove 23 and correspond to the plurality of mounting grooves 31. The positioning blocks 32 are rotatably connected to the inner walls of the mounting grooves 31. The upper end surface of the bottom of the positioning block 32 contacts the bottom surface of the cartridge 8 (support surface), and the inner side surface of the top of the positioning block 32 contacts the outer side surface of the cartridge 8 (clamping surface), forming a two-point constraint. In the embodiment, when installing the positioning block 32, its center of gravity is controlled to make it in a natural open state. When the cartridge 8 is placed, the bottom surface of the cartridge 8 contacts the upper end surface of the bottom of the positioning block 32. The self-weight of the falling cartridge 8 presses downwards, causing the positioning blocks 32 to all rotate downwards, so that the inner side surface of the top of the positioning block 32 contacts the outer side surface of the cartridge 8 to form left and right clamping. When the robotic arm lifts the cartridge 8, the positioning blocks 32 automatically reset to the natural open state due to the center of gravity, releasing the clamping force. The positioning blocks 32 achieve automatic clamping through self-gravity and the lever principle, with pure mechanical self-locking and the parts not being easily damaged.

[0040] In one embodiment, a retaining strip 33 is provided on the outside of each of the plurality of mounting grooves 31. The retaining strip 33 is used to limit the upward rotation angle of the positioning block 32. By limiting the maximum upward rotation angle of the positioning block 32, it is ensured that the opening angles in the natural state are consistent, avoiding too large or too small opening angles caused by the deviation of the center of gravity.

[0041] In one embodiment, the plurality of mounting grooves 31 all penetrate longitudinally. A plurality of anti-rotation plates 34 are installed at the bottom of the support plate. The anti-rotation plates 34 are used to limit the downward rotation angle of the positioning block 32. By limiting the maximum downward rotation angle of the positioning block 32, it is prevented that when the cartridge 8 is pressed down, the positioning block 32 rotates excessively, resulting in too large a clamping force or being stuck and unable to reset.

[0042] In one embodiment, a micro photoelectric sensor 7 is installed in the limiting groove 23, which is used to detect whether the cartridge 8 is placed correctly. When the sensor signal is abnormal, an alarm is triggered and the movement is stopped to prevent the cartridge 8 from falling or mechanical collision.

[0043] In one embodiment, the motor 133 is installed below the fixing plate 11 through the mounting plate 134. Placing the motor 133 below releases the space above the sliding table, improving the space utilization rate.

[0044] The working process of the embodiments of the present invention is as follows:

[0045] The sliding table is installed in the material inlet. In the initial state, the first / second stage sliding table 2 is fully retracted and hidden in the material inlet. When in use, the controller starts the motor 133, and the motor 133 drives the gear 132 to rotate. Since the gear 132 meshes with the rack 131 on the moving plate 12, the moving plate 12 of the first stage sliding table 1 starts to extend. The idler pulley 223 at the front end of the moving plate 12 follows, driving the corresponding side synchronous belt 224 to stretch forward. The idler pulley 223 at the rear end of the moving plate 12 compensates synchronously to maintain the tension of the corresponding side synchronous belt 224. The platen 21 moves forward under the traction of this synchronous belt 224, that is, the platen 21 of the second stage sliding table 2 starts to extend until the platen 21 is located outside the material inlet.

[0046] Align the material box 8 with the limit slot 23 and place it down, that is, make the bottom surface of the material box 8 contact the upper end surface of the bottom of the corresponding positioning block 32. The self-weight pressure when the material box 8 drops causes the corresponding positioning blocks 32 to rotate downward, so that the inner side surface of the top of the corresponding positioning blocks 32 contacts the outer side surface of the material box 8 to form left and right clamping.

[0047] Then use the controller to start the motor 133 to rotate, so that the moving plate 12 of the first stage sliding table 1 starts to retract. The idler pulley 223 at the rear end follows, driving the corresponding side synchronous belt 224 to stretch backward. The platen 21 moves backward under the traction of this synchronous belt 224. The idler pulley 223 at the front end compensates synchronously to maintain the tension of the corresponding side synchronous belt 224, so that the platen 21 of the second stage sliding table 2 starts to retract, the sliding table resets, and the material box 8 enters the material inlet.

[0048] By setting the first stage sliding table 1 and the second stage sliding table 2, that is, through the active and passive two-stage telescopic design, a large stroke is achieved within the limited space of the material inlet. At the same time, after the platen 21 extends, an open picking and placing area is formed, which cooperates with the limiting mechanism 3 to ensure that the material box 8 has no offset during movement and avoid micro-damage to the material box 8 caused by vibration.

[0049] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be obvious to those skilled in the art. The general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the present invention will not be limited to these embodiments shown herein, but rather to the broadest scope consistent with the principles and novel features disclosed herein.

Claims

1. A material port sliding table for a Stocker cassette, characterized in that: Comprising: A first-level sliding table, the first-level sliding table includes a fixed plate, a moving plate and a driving component. The moving plate is located above the fixed plate and is slidably connected to the fixed plate. The driving component is used to control the telescopic movement of the moving plate. A second-level sliding table, the second-level sliding table includes a table plate and a transmission component. The table plate is located above the moving plate and is provided with a plurality of limiting grooves adapted to the material boxes at intervals. The table plate is slidably connected to the moving plate. The transmission component is used to drive the table plate to move in the same direction when the moving plate moves. A limiting mechanism, the number of the limiting mechanisms is multiple, corresponding to the material boxes one by one. The limiting mechanism is used to limit the material boxes in the limiting grooves.

2. The material inlet slide table for a Stocker cassette according to claim 1, characterized in that: The driving component includes a rack, a gear and a motor. The rack is installed at the bottom of the moving plate. The gear meshes with the rack. The motor is used to drive the gear to rotate.

3. A material port slide for a Stocker cassette, characterized in that: Guide rails and a plurality of rubber rollers are installed on the tops of both the fixed plate and the moving plate. Sliders are installed on the bottoms of both the moving plate and the table plate. The sliders are slidably connected to the guide rails. The plurality of rubber rollers are respectively rotatably connected to the fixed plate and the moving plate and are respectively in contact with the moving plate and the table plate.

4. A material port slide for a Stocker cassette according to claim 1, characterized in that: The transmission component includes two first tensioning seats, two second tensioning seats, two idler wheels and two synchronous belts respectively arranged on both sides of the moving plate. The two first tensioning seats are respectively located at the front end and the middle end of the top of the fixed plate and are both detachably connected to the fixed plate. The two second tensioning seats are both detachably connected to the bottom of the table plate. The two idler wheels are respectively located at the front end and the rear end of the moving plate and are both rotatably connected to the moving plate. The two synchronous belts are respectively sleeved on the corresponding idler wheels and their two ends are respectively connected to the corresponding first tensioning seats and second tensioning seats.

5. The material inlet slide table for the Stocker cassette according to claim 1, characterized in that: A plurality of installation grooves communicating with the limiting grooves are formed in the table plate. The limiting mechanism includes a plurality of L-shaped positioning blocks. The plurality of positioning blocks are symmetrically arranged on both sides of the limiting groove and correspond to the plurality of installation grooves. The positioning blocks are rotatably connected to the inner walls of the installation grooves. The upper end surface of the bottom of the positioning block is in contact with the bottom surface of the material box. The inner side surface of the top of the positioning block is in contact with the outer side surface of the material box.

6. The material port sliding table for a Stocker cassette according to claim 5, wherein: Blocking strips are arranged outside the plurality of installation grooves. The blocking strips are used to limit the upward rotation angle of the positioning blocks.

7. A material inlet slide table for a Stocker cassette, characterized in that: The plurality of installation grooves all penetrate longitudinally. A plurality of anti-rotation plates are installed at the bottom of the support plate. The anti-rotation plates are used to limit the downward rotation angle of the positioning blocks.

8. A material inlet slide for a Stocker cassette according to claim 1, characterized in that: Micro photoelectric sensors are installed in the limiting grooves.

9. The material inlet sliding table for a Stocker cassette according to claim 2, characterized in that: The motor is installed below the fixed plate through a mounting plate.

Images