A vapor phase epitaxy device for MOCVD dedicated glove box cabinet

Abstract

This invention discloses a vapor phase epitaxy (VPE) device with a dedicated glove box for MOCVD. The invention relates to the field of general experimental equipment technology. The VPE device includes a box, a control pedal, a panel mechanism, a wearing mechanism, a glove mechanism, an operating table, and a chassis. The box has a window. The panel mechanism includes a slide rail and a mounting plate. The wearing mechanism includes a horizontal rail and a negative pressure mechanism. The negative pressure mechanism includes a sleeve with a magnetic suction port. The glove mechanism includes a magnetic chuck and double-sided gloves. The horizontal rail, operating table, and chassis are all fixedly connected to the box. The slide rail is fixedly connected to the window. The control pedal is hinged to the chassis. The double-sided gloves are fixedly connected to the mounting plate. The magnetic chuck and magnetic suction port are connected magnetically. The control pedal, wearing mechanism, and operating table are all electrically connected to the chassis. This invention allows for multi-person collaborative operation on one side, with visual inspection for automatic glove wearing and smoothing, improving wearing comfort and operational accuracy. The gloves are self-cleaned after operation.

Description

Technical Field

[0001] This invention relates to the field of general experimental equipment technology, specifically a vapor phase epitaxy device for a dedicated MOCVD glove box cabinet. Background Technology

[0002] Specialized glove boxes designed for metal-organic chemical vapor deposition (MOCVD) processes are crucial sealed devices in scientific research and industry, primarily used in high-precision technology fields such as the epitaxial growth of semiconductor and optoelectronic materials. By creating an operating space isolated from the external environment, this equipment supports operators in performing delicate process operations. Its performance must meet stringent technical requirements such as maintaining an ultra-pure inert atmosphere, controlling a dust-free environment, and corrosion resistance.

[0003] Existing MOCVD glove boxes have room for optimization in their glove system design: Firstly, in single-person operation scenarios, it is inconvenient for operators to independently put on and take off gloves; secondly, to achieve efficient dust protection, research gloves are mostly made of sealed rubber, which can lead to insufficient fit when worn alone, causing discomfort to the operator's hands and affecting the comfort and accuracy of long-term precision work. Furthermore, gloves used for extended periods require timely cleaning and maintenance to prevent contaminant buildup from interfering with precision processes. Summary of the Invention

[0004] The purpose of this invention is to provide a vapor phase epitaxy device for MOCVD glove box cabinets, so as to solve the problems in the prior art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: A vapor phase epitaxy device for MOCVD dedicated glove box cabinet includes a box body, a control pedal, a panel mechanism, a wearing mechanism, a glove mechanism, an operating table, and a chassis. The box body is provided with a window. The panel mechanism includes a slide rail and a mounting plate. The wearing mechanism includes a horizontal rail and a negative pressure mechanism. The negative pressure mechanism includes a sleeve with a magnetic suction port. The glove mechanism includes a magnetic suction cup and a double-sided glove. The horizontal rail, operating table, and chassis are all fixedly connected to the box body. The slide rail is fixedly connected to the window. The control pedal is hinged to the chassis. The double-sided glove is fixedly connected to the mounting plate. The magnetic suction cup and the magnetic suction port are connected by magnetic force. The control pedal, wearing mechanism, and operating table are all connected to the chassis by electrical signals.

[0006] This invention is a dedicated glove box for the MOCVD process. Operators control the MOCVD process via a control pedal. The machine transmits electrical signals to the operating table. The panel mechanism moves along the window via a slide rail, allowing multiple operators to work together on one side. When putting on gloves, the operator pre-places their hands in the glove mechanism, which is then positioned in the wearing mechanism. The gloves are secured using a magnetic connection between a magnetic chuck and a magnetic suction port. A negative pressure is generated inside the wearing mechanism, inflating the plastic gloves. Once the gloves are on, visual inspection confirms they are properly worn. The wearing mechanism generates a leveling, circulating airflow inside the rubber gloves, ensuring a snug fit to the operator's hands. This improves comfort and accuracy during operation. After completing the task, the glove mechanism can be returned to the wearing mechanism for self-cleaning.

[0007] Furthermore, the panel mechanism also includes a large transparent panel, a ring rail, and a small transparent panel. The large transparent panel is slidably connected to the sliding rail. The large transparent panel is provided with a round window. There are two sets of round windows, ring rail, and mounting sleeves. The two sets of round windows, ring rail, and mounting sleeves are arranged in a mirror image along the central axis of the large transparent panel. The ring rail is fixedly connected to the round window, and the mounting sleeve is fixedly connected to the small transparent panel. The mounting sleeve and the small transparent panel are rotatably connected to the ring rail.

[0008] The large transparent panel moves along the window via a sliding rail, and the mounting plate and the small transparent panel both rotate within the round window along the sliding rail. The double-sided gloves can rotate freely 360 degrees, allowing multiple workers to cooperate on one side, which greatly improves work efficiency.

[0009] Furthermore, the wearing mechanism also includes a base mechanism and an adjustment mechanism. The base mechanism includes a rotary table, a hinge frame, and a spring buckle. The sleeve is also equipped with a rotating shaft. The rotary table is slidably connected to the horizontal rail, and the rotating shaft is rotatably connected to the hinge frame. The hinge frame and the rotating shaft are both fixedly connected to the spring buckle. The negative pressure mechanism also includes a limiting frame. The adjustment mechanism includes a ring shell. The ring shell and the limiting frame are both fixedly connected to the sleeve. The glove mechanism also includes a positioning ring. The positioning ring is equipped with positioning beads. The limiting frame is equipped with ball grooves. There are several sets of positioning beads and ball grooves. The several sets of positioning beads and ball grooves are evenly distributed along the circumference of the positioning ring. The positioning beads are in contact with the ball grooves.

[0010] When workers put on gloves, they place their hands inside the double-sided gloves, then place the gloves inside the sleeve. Several sets of positioning beads, evenly distributed around the circumference of the positioning ring, are inserted into the ball grooves. The assembly is fixed by the magnetic connection between the magnetic chuck and the magnetic suction port. The rotating shaft on the sleeve is rotated and assembled with the hinge frame. The movement of the hands can drive the turntable along the horizontal rail, and the sleeve tilts around the axis of the rotating shaft, so that the workers' hands are in a natural and comfortable state when putting on the gloves. After the gloves are put on, the sleeve returns to its original position under the restoring deformation of the spring buckle, so that the magnetic suction port is vertically upward.

[0011] Furthermore, the base mechanism also includes a vacuum pump, a liquid pump, and a circulation pump. The hinge frame is fixedly connected to the rotary table, the vacuum pump, the liquid pump, and the circulation pump. The sleeve is also provided with a bottom opening, which is connected to the vacuum pump through a hose. The negative pressure mechanism also includes a liquid pipe, which is connected to the liquid pump through a hose. The ring shell is provided with an air inlet chamber and an air outlet chamber, which are both connected to the circulation pump through hoses.

[0012] When putting on gloves, workers pre-place their hands inside double-sided gloves, then place the gloves inside a sleeve. The sleeve is secured using a magnetic connection between the magnetic cup and the magnetic opening, creating a sealed space between the sleeve and the gloves. A vacuum pump, connected to the bottom of the sleeve via a hose, evacuates the sleeve to create negative pressure. The plastic gloves inflate under this negative pressure, making them easier for workers to put on. After the initial donning is complete, the hands detach from the sleeve, the magnetic cup separates from the magnetic opening, and the sleeve is no longer sealed. The plastic gloves then adhere to the worker's hands under atmospheric pressure. The double-sided gloves are then placed back into the sleeve. The magnetic chuck connects to the magnetic port, and a visual inspection is performed to check if the gloves are properly worn. The circulation pump generates airflow that enters the gloves through the inlet chamber and exits through the outlet chamber. By setting the inlet and outlet positions, a designated area of ​​circulating airflow is generated inside the rubber gloves to level the area. This causes the non-fitting areas of the automatically worn gloves to expand again. After the operation is completed, the double-sided gloves can be placed back into the sleeve. The liquid pump sprays the externally stored cleaning water mist evenly onto the double-sided gloves through the liquid pipe. The vacuum pump then performs a second vacuum to dry the water mist, completing the self-cleaning process.

[0013] Furthermore, the negative pressure mechanism also includes a spray nozzle and a visual inspection table. Both the spray nozzle and the visual inspection table are fixedly connected to the sleeve, and the liquid pipe is fixedly connected to the spray nozzle.

[0014] When workers put on gloves, the vacuum pump creates a negative pressure inside the sleeve, causing the plastic gloves to inflate and making them easier to put on. The workers visually inspect whether the gloves are put on properly through the inspection table. After the work is completed, the gloves can be placed back into the sleeve, and the liquid pump transports the externally stored cleaning water mist to the spray nozzle through the liquid pipe, which is then sprayed evenly onto the gloves.

[0015] Furthermore, the adjustment mechanism also includes a servo motor, a first gear rod, a second gear rod, a gear ring, and an electromagnetic block. Two sets of servo motors, gear rings, and electromagnetic blocks are provided. The servo motor is fixedly connected to the ring housing. The output end of one set of servo motors is fixedly connected to the first gear rod, and the output end of the other set of servo motors is fixedly connected to the second gear rod. Both the first and second gear rods mesh with the tooth surfaces of the gear ring. One set of gear rings is rotatably connected to the air inlet chamber, and the other set of gear rings is rotatably connected to the air outlet chamber. The vacuum pump, liquid pump, circulation pump, inspection table, servo motor, and electromagnetic block are all electrically connected to the chassis.

[0016] The inspection station detects uneven areas of the glove during wear and sends data signals back to the chassis. The chassis then sends control signals to the servo motors. The two servo motors output fixed-axis torque to the first and second gears, respectively. Through the meshing of the teeth between the first and second gears and the gear ring, the torque is transmitted, causing the gear ring to rotate at different angles. This positions the two electromagnetic blocks on both sides of the cross-section of the uneven area of ​​the glove during wear. The magnetic force opens the corresponding air inlets, and the air inlet and outlet positions are set. The circulation pump generates airflow that enters the glove from the inlet chamber and exits through the outlet chamber, creating a designated area for smoothing the circulating airflow inside the rubber glove. This causes the non-fitting areas of the automatically worn glove to expand a second time.

[0017] Furthermore, the glove mechanism also includes a positioning ring and a return mechanism. The return mechanism includes a ring cylinder. The magnetic chuck, positioning ring, and ring cylinder are all fixedly connected to the double-sided glove, and the ring cylinder is in contact with the ring shell.

[0018] When staff put on gloves, they place their hands inside double-sided gloves, then place the gloves inside a sleeve. Several sets of positioning beads, evenly distributed around the circumference of the positioning ring, are inserted into the ball groove. The assembly is fixed by magnetic connection between the magnetic suction cup and the magnetic suction port. The electromagnetic block opens the airflow port at the corresponding position of the ring cylinder by magnetic force, setting the air inlet and outlet positions.

[0019] Furthermore, the reflux mechanism also includes an intake solenoid valve and an exhaust solenoid valve. The ring cylinder is provided with channels, and there are several sets of channels, intake solenoid valves, and exhaust solenoid valves. The several sets of channels, intake solenoid valves, and exhaust solenoid valves are evenly distributed along the circumference of the ring cylinder. The intake solenoid valves and exhaust solenoid valves are fixedly connected to the channels, and the intake solenoid valves and exhaust solenoid valves are magnetically connected to the solenoid block.

[0020] The servo motor outputs torque to drive the gear ring to rotate at different angles, so that the two sets of electromagnetic blocks are located on both sides of the cross-section of the uneven area of ​​the glove wearing wrinkles. The magnetic force opens the corresponding air intake solenoid valve and exhaust solenoid valve, and sets the air intake and exhaust positions.

[0021] Compared with existing technologies, the beneficial effects of this invention are as follows: This invention designs a panel mechanism where a large transparent panel moves along a slide rail along a window, and both the mounting plate and the small transparent panel rotate along the slide rail within the circular window. The double-sided gloves can rotate freely 360 degrees, allowing multiple workers to work together on one side, greatly improving work efficiency. This invention also designs a wearing mechanism and a corresponding glove mechanism. When wearing the gloves, the hands are pre-placed inside the double-sided gloves, which are then placed inside a sleeve. The gloves are fixed in place by a magnetic connection between the magnetic suction cup and the magnetic suction port, creating a sealed space between the sleeve and the gloves. A vacuum pump is connected to the bottom of the sleeve via a hose, creating a negative pressure inside the sleeve. The plastic gloves inflate under this negative pressure, facilitating wearing. After initial wearing, the hands actively detach from the sleeve, the magnetic suction cup separates from the magnetic suction port, and the inside of the sleeve is no longer sealed. The plastic gloves then expand under atmospheric pressure. The gloves are then adsorbed and fitted onto the worker's hand. The gloves are then placed back into the sleeve, and a visual inspection is performed to ensure they are properly worn. A circulating pump generates airflow that enters the glove through the inlet chamber and exits through the outlet chamber. By setting the inlet and outlet positions, a designated area of ​​circulating airflow is generated inside the rubber glove to level the area, causing a secondary inflation of any non-adherent areas. This ensures the gloves fit the worker's hand, improving comfort and accuracy. After the task is completed, the gloves are placed back into the sleeve, and a liquid pump sprays externally stored cleaning mist evenly onto the gloves through a liquid pipe. A vacuum pump then evacuates and dries the mist, completing the self-cleaning process. This invention allows for multi-person collaborative work on one side, with visual inspection and automatic glove-wearing and smoothing, improving comfort and accuracy, and providing self-cleaning after the task is completed. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0023] Figure 2 This is a schematic diagram of the panel mechanism structure of the present invention;

[0024] Figure 3 This is a partial cross-sectional view of the panel mechanism of the present invention;

[0025] Figure 4 This is a partial sectional view of the overall structure of the present invention;

[0026] Figure 5 This is a schematic diagram of the wearable mechanism structure of the present invention;

[0027] Figure 6 This is a schematic diagram of the negative pressure mechanism of the present invention;

[0028] Figure 7 This is a schematic diagram of the adjustment mechanism structure of the present invention;

[0029] Figure 8 for Figure 7 A magnified view of part A.

[0030] In the diagram: 1. Housing; 11. Window; 2. Control pedal; 3. Panel mechanism; 31. Slide rail; 32. Large transparent panel; 321. Round window; 33. Ring rail; 34. Mounting plate; 35. Small transparent panel; 4. Wearing mechanism; 41. Horizontal rail; 42. Base mechanism; 421. Rotary table; 422. Hinge frame; 423. Spring buckle; 424. Vacuum pump; 425. Liquid pump; 426. Circulation pump; 43. Negative pressure mechanism; 431. Sleeve; 4311. Bottom opening; 4312. Magnetic suction port; 4313. Rotating shaft; 432. Spray nozzle ; 433, Liquid pipe; 434, Inspection table; 435, Limiting frame; 4351, Ball slide groove; 44, Adjustment mechanism; 45, Ring shell; 451, Air inlet chamber; 452, Air outlet chamber; 46, Servo motor; 47, First gear rod; 48, Second gear rod; 49, Gear ring; 491, Electromagnetic block; 5, Glove mechanism; 51, Magnetic chuck; 52, Positioning ring; 521, Positioning bead; 53, Return mechanism; 54, Ring cylinder; 541, Channel; 55, Air inlet solenoid valve; 56, Air outlet solenoid valve; 57, Double-sided gloves; 6, Operating table; 7, Chassis. Detailed Implementation

[0031] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0032] like Figure 1 , Figure 2 , Figure 4 , Figure 7As shown, the present invention provides a technical solution for a vapor phase epitaxy device with a dedicated glove box for MOCVD, comprising a box body 1, a control pedal 2, a panel mechanism 3, a wearing mechanism 4, a glove mechanism 5, an operating table 6, and a chassis 7. The box body 1 is provided with a window 11. The panel mechanism 3 includes a slide rail 31 and a mounting plate 34. The wearing mechanism 4 includes a horizontal rail 41 and a negative pressure mechanism 43. The negative pressure mechanism 43 includes a sleeve 431, which is provided with a magnetic suction port 4312. The glove mechanism 5 includes a magnetic chuck 51 and a double-sided glove 57. The horizontal rail 41, the operating table 6, and the chassis 7 are all fixedly connected to the box body 1. The slide rail 31 is fixedly connected to the window 11. The control pedal 2 is hinged to the chassis 7. The double-sided glove 57 is fixedly connected to the mounting plate 34. The magnetic chuck 51 and the magnetic suction port 4312 are connected by magnetic force. The control pedal 2, the wearing mechanism 4, and the operating table 6 are all connected to the chassis 7 by electrical signals.

[0033] This invention is a dedicated glove box for the MOCVD process. Operators control the MOCVD process via a control pedal 2. The machine housing 7 transmits electrical signals to the operating table 6. The panel mechanism 3 moves along the window 11 via a slide rail 31, allowing multiple operators to work together on one side. When putting on gloves, the operator pre-places their hands in the glove mechanism 5, which is then positioned in the wearing mechanism 4. The gloves are secured by a magnetic connection between the magnetic suction cup 51 and the magnetic suction port 4312. A negative pressure is generated inside the wearing mechanism 4, inflating the plastic gloves. Once the gloves are on, visual inspection confirms they are properly worn. The wearing mechanism 4 generates a leveling circulating airflow inside the rubber gloves, ensuring the automatically worn gloves fit the operator's hands, improving comfort and accuracy. After completing the task, the glove mechanism 5 can be returned to the wearing mechanism 4 for self-cleaning.

[0034] like Figure 2 , Figure 3 As shown, the panel mechanism 3 also includes a large transparent panel 32, a ring rail 33, and a small transparent panel 35. The large transparent panel 32 is slidably connected to the slide rail 31. The large transparent panel 32 is provided with a circular window 321. The circular window 321, the ring rail 33, and the mounting sleeve 34 are all provided in two sets. The two sets of circular windows 321, the ring rail 33, and the mounting sleeve 34 are all arranged in a mirror image along the central axis of the large transparent panel 32. The ring rail 33 is fixedly connected to the circular window 321, and the mounting sleeve 34 is fixedly connected to the small transparent panel 35. The mounting sleeve 34 and the small transparent panel 35 are both rotatably connected to the ring rail 33.

[0035] The large transparent panel 32 moves along the window 11 via the slide rail 31. The mounting plate 34 and the small transparent panel 35 both rotate along the ring rail 33 in the round window 321. The double-sided gloves 57 can rotate freely 360 degrees, allowing multiple workers to cooperate on one side, which greatly improves work efficiency.

[0036] like Figure 5 , Figure 6 , Figure 7 As shown, the wearing mechanism 4 also includes a base mechanism 42 and an adjustment mechanism 44. The base mechanism 42 includes a rotary table 421, a hinge frame 422, and a spring buckle 423. A rotating shaft 4313 is also provided on the sleeve 431. The rotary table 421 is slidably connected to the horizontal rail 41, and the rotating shaft 4313 is rotatably connected to the hinge frame 422. Both the hinge frame 422 and the rotating shaft 4313 are fixedly connected to the spring buckle 423. The negative pressure mechanism 43 also includes a limiting frame 435, and the adjustment mechanism 44... The entire mechanism 44 includes a ring shell 45, and the ring shell 45 and the limiting frame 435 are fixedly connected to the sleeve 431. The glove mechanism 5 also includes a positioning ring 52, on which positioning beads 521 are provided, and on the limiting frame 435, ball grooves 4351 are provided. Several sets of positioning beads 521 and ball grooves 4351 are provided, and the several sets of positioning beads 521 and ball grooves 4351 are evenly distributed along the circumference of the positioning ring 52. The positioning beads 521 are in contact with the ball grooves 4351.

[0037] When workers put on gloves, they place their hands in double-sided gloves 57, then place the gloves 57 into sleeves 431. Several sets of positioning beads 521, evenly distributed around the circumference of positioning rings 52, are inserted into ball grooves 4351. The gloves are then fixed in place by magnetic connection between magnetic chuck 51 and magnetic suction port 4312. The rotating shaft 4313 on sleeve 431 is rotated and assembled with hinge frame 422. Hand movements can drive the rotary table 421 along the horizontal rail 41, and the sleeve 431 tilts around the axis of rotating shaft 4313, so that the workers' hands are in a natural and comfortable state when putting on gloves. After the gloves are put on, the sleeve 431 returns to its original position under the restoring deformation of spring buckle 423, so that the magnetic suction port 4312 is vertically upward.

[0038] like Figure 5 , Figure 6 As shown, the base mechanism 42 also includes a vacuum pump 424, a liquid pump 425, and a circulation pump 426. The hinge frame 422 is fixedly connected to the rotary table 421, the vacuum pump 424, the liquid pump 425, and the circulation pump 426. The sleeve 431 is also provided with a bottom opening 4311, which is connected to the vacuum pump 424 through a hose. The negative pressure mechanism 43 also includes a liquid pipe 433, which is connected to the liquid pump 425 through a hose. The ring shell 45 is provided with an air inlet chamber 451 and an air outlet chamber 452, which are both connected to the circulation pump 426 through hoses.

[0039] When putting on gloves, the worker places their hands inside the double-sided glove 57, then places the double-sided glove 57 into the sleeve 431. The sleeve 431 and the double-sided glove 57 are secured by a magnetic connection between the magnetic suction cup 51 and the magnetic suction port 4312, creating a sealed space. A vacuum pump 424 is connected to the bottom opening 4311 of the sleeve 431 via a hose. The vacuum pump 424 creates a negative pressure by evacuating the inside of the sleeve 431. The plastic glove inflates under this negative pressure, making it easier for the worker to put on. After the initial wearing is complete, the hand actively detaches from the sleeve 431, the magnetic suction cup 51 separates from the magnetic suction port 4312, and the inside of the sleeve 431 is no longer sealed. The plastic glove then adheres to the work area under atmospheric pressure. After the personnel's hands are cleaned, the double-sided gloves 57 are placed back into the sleeve 431. The magnetic suction cup 51 is magnetically connected to the magnetic suction port 4312. The visual inspection is performed to check whether the gloves are properly worn. The circulation pump 426 generates airflow that enters the inside of the gloves through the air inlet chamber 451 and exits through the air outlet chamber 452. By setting the air inlet and outlet positions, a designated area of ​​circulating airflow is generated inside the rubber gloves to level the area. This causes the non-fitting areas of the automatically worn gloves to expand again. After the operation is completed, the double-sided gloves 57 can be placed back into the sleeve 431. The liquid pump 425 sprays the externally stored cleaning water mist evenly onto the double-sided gloves 57 through the liquid pipe 433. The vacuum pump 424 performs a second vacuum to dry the water mist, completing the self-cleaning process.

[0040] like Figure 6 As shown, the negative pressure mechanism 43 also includes a spray cylinder 432 and a visual inspection table 434. Both the spray cylinder 432 and the visual inspection table 434 are fixedly connected to the sleeve 431, and the liquid pipe 433 is fixedly connected to the spray cylinder 432.

[0041] When the staff puts on the gloves, the vacuum pump 424 creates a negative pressure by drawing a vacuum inside the sleeve 431. The plastic gloves inflate under the negative pressure, making it easier for the staff to put them on. The staff visually inspects the gloves to see if they are put on properly through the inspection table 434. After the work is completed, the double-sided gloves 57 can be placed back into the sleeve 431. The liquid pump 425 transports the externally stored cleaning water mist to the spray nozzle 432 through the liquid pipe 433 and sprays it evenly onto the double-sided gloves 57.

[0042] like Figure 7 , Figure 8As shown, the adjustment mechanism 44 also includes a servo motor 46, a first gear rod 47, a second gear rod 48, a gear ring 49, and an electromagnetic block 491. The servo motor 46, gear ring 49, and electromagnetic block 491 are each provided in two sets. The servo motor 46 is fixedly connected to the ring housing 45. The output end of one set of servo motor 46 is fixedly connected to the first gear rod 47, and the output end of the other set of servo motor 46 is fixedly connected to the second gear rod 48. The first gear rod 47 and the second gear rod 48 are both meshed with the tooth surface of the gear ring 49. One set of gear ring 49 is rotatably connected to the air inlet chamber 451, and the other set of gear ring 49 is rotatably connected to the air outlet chamber 452. The vacuum pump 424, liquid pump 425, circulation pump 426, inspection table 434, servo motor 46, and electromagnetic block 491 are all connected to the chassis 7 via electrical signals.

[0043] The inspection station 434 detects uneven areas of the glove during wear and sends data signals to the chassis 7. The chassis 7 then sends control signals to the servo motors 46. The two servo motors 46 output fixed-axis torque to the first gear rod 47 and the second gear rod 48, respectively. Through the meshing of the teeth between the first gear rod 47 and the second gear rod 48 and the gear ring 49, the torque is transmitted to rotate the gear ring 49 at different angles. This positions the two sets of electromagnetic blocks 491 on both sides of the cross-section of the uneven area of ​​the glove during wear. The air inlets at the corresponding positions are opened by magnetic force. The air inlet and outlet positions are set, and the circulation pump 426 generates airflow that enters the glove through the air inlet chamber 451 and exits through the air outlet chamber 452. This generates a designated area of ​​circulating airflow inside the rubber glove to level the area and cause the non-fitting areas of the automatically worn glove to expand again.

[0044] like Figure 4 , Figure 6 As shown, the glove mechanism 5 also includes a positioning ring 52 and a return mechanism 53. The return mechanism 53 includes a ring cylinder 54. The magnetic chuck 51, the positioning ring 52, and the ring cylinder 54 are all fixedly connected to the double-mouth glove 57. The ring cylinder 54 is in contact with the ring shell 45.

[0045] When the staff puts on the gloves, they place their hands in the double-sided gloves 57 and then place the double-sided gloves 57 in the sleeve 431. Several sets of positioning beads 521, which are evenly distributed around the circumference of the positioning ring 52, are inserted into the ball groove 4351. The assembly is fixed by the magnetic connection between the magnetic chuck 51 and the magnetic suction port 4312. The electromagnetic block 491 opens the airflow port at the corresponding position of the ring cylinder 54 by magnetic force, and sets the air inlet and outlet positions.

[0046] like Figure 8As shown, the reflux mechanism 53 also includes an intake solenoid valve 55 and an exhaust solenoid valve 56. The annular cylinder 54 is provided with a channel 541. The channel 541, the intake solenoid valve 55, and the exhaust solenoid valve 56 are all provided in several groups. The several groups of channels 541, intake solenoid valves 55, and exhaust solenoid valves 56 are all evenly distributed along the circumference of the annular cylinder 54. The intake solenoid valves 55 and exhaust solenoid valves 56 are all fixedly connected to the channel 541. The intake solenoid valves 55 and exhaust solenoid valves 56 are all magnetically connected to the electromagnetic block 491.

[0047] The servo motor 46 outputs torque to drive the gear ring 49 to rotate at different angles, so that the two sets of electromagnetic blocks 491 are located on both sides of the cross-section of the uneven area of ​​the glove wearing wrinkles. The magnetic force opens the corresponding air intake solenoid valve 55 and exhaust solenoid valve 56, and sets the air intake and exhaust positions.

[0048] The working principle of this invention: The operator controls the MOCVD process via the control pedal 2. The chassis 7 transmits electrical signals to the operating table 6. The large transparent panel 32 moves along the window 11 via the slide rail 31. The double-sided gloves 57 can rotate freely 360 degrees, allowing multiple operators to work together on one side, greatly improving work efficiency. When putting on the gloves, the operator pre-places their hands in the double-sided gloves 57, then places the gloves 57 into the sleeve 431. The gloves are fixed in place by the magnetic connection between the magnetic chuck 51 and the magnetic suction port 4312, creating a sealed space between the sleeve 431 and the gloves 57. The vacuum pump 424 is connected to the bottom port 4311 of the sleeve 431 via a hose. The vacuum pump 424 creates a negative pressure inside the sleeve 431, causing the plastic gloves to inflate under this negative pressure, facilitating the operator's wearing. After the initial wearing is complete, the hands actively detach from the sleeve 431, and the magnetic chuck 51 separates from the magnetic suction port 4312. The sleeve 431 is no longer sealed. Under atmospheric pressure, the plastic glove adheres to the worker's hand. Then, the double-sided glove 57 is placed back into the sleeve 431. The magnetic suction cup 51 is magnetically connected to the magnetic suction port 4312. Visual inspection is performed to check if the glove is properly worn. The circulation pump 426 generates airflow that enters the glove through the air inlet chamber 451 and exits through the air outlet chamber 452. By setting the air inlet and outlet positions, a designated area is generated inside the rubber glove to level the circulating airflow. This causes the non-fitting areas of the automatically worn glove to expand again, making the automatically worn glove fit the worker's hand. This improves the comfort and accuracy of the worker when wearing the glove. After the operation is completed, the double-sided glove 57 can be placed back into the sleeve 431. The liquid pump 425 sprays the externally stored cleaning water mist evenly onto the double-sided glove 57 through the liquid pipe 433. The vacuum pump 424 performs a second vacuum to dry the water mist, completing the self-cleaning process.

[0049] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A vapor phase epitaxy apparatus for a dedicated MOCVD glove box cabinet, characterized in that: The vapor phase epitaxy equipment includes a housing (1), a control pedal (2), a panel mechanism (3), a wearing mechanism (4), a glove mechanism (5), an operating table (6), and a chassis (7). The housing (1) has a window (11). The panel mechanism (3) includes a slide rail (31) and a mounting plate (34). The wearing mechanism (4) includes a horizontal rail (41) and a negative pressure mechanism (43). The negative pressure mechanism (43) includes a sleeve (431). The sleeve (431) has a magnetic suction port (4312). The glove mechanism (7) 5) Includes a magnetic chuck (51) and a double-mouth glove (57). The horizontal rail (41), the operating table (6), and the chassis (7) are all fixedly connected to the box body (1). The slide rail (31) is fixedly connected to the window (11). The control pedal (2) is hinged to the chassis (7). The double-mouth glove (57) is fixedly connected to the mounting plate (34). The magnetic chuck (51) is connected to the magnetic suction port (4312) by magnetic force. The control pedal (2), the wearing mechanism (4), and the operating table (6) are all connected to the chassis (7) by electrical signal. The wearing mechanism (4) also includes an adjustment mechanism (44), which includes a ring shell (45), and the ring shell (45) and the limiting frame (435) are fixedly connected to the sleeve (431); The adjustment mechanism (44) further includes a servo motor (46), a first gear rod (47), a second gear rod (48), a gear ring (49), and an electromagnetic block (491). The servo motor (46), gear ring (49), and electromagnetic block (491) are each provided in two sets. The servo motor (46) is fixedly connected to the ring shell (45). One set of the servo motor (46) has its output end fixedly connected to the first gear rod (47), and the other set of the servo motor (46) has its output end fixedly connected to the second gear rod (48). The gear rod (48) is fixedly connected. The first gear rod (47) and the second gear rod (48) are both meshed with the tooth surface of the gear ring (49). One set of the gear rings (49) is rotatably connected to the air inlet chamber (451), and the other set of the gear rings (49) is rotatably connected to the air outlet chamber (452). The vacuum pump (424), liquid pump (425), circulation pump (426), inspection table (434), servo motor (46), and electromagnetic block (491) are all connected to the chassis (7) via electrical signals.

2. The vapor phase epitaxy equipment for MOCVD dedicated glove box cabinet as described in claim 1, characterized in that: The panel mechanism (3) further includes a large transparent panel (32), a ring rail (33) and a small transparent panel (35). The large transparent panel (32) is slidably connected to the slide rail (31). The large transparent panel (32) is provided with a round window (321). The round window (321), the ring rail (33) and the mounting plate (34) are provided in two sets. The two sets of the round window (321), the ring rail (33) and the mounting plate (34) are arranged in a mirror image along the central axis of the large transparent panel (32). The ring rail (33) is fixedly connected to the round window (321). The mounting plate (34) is fixedly connected to the small transparent panel (35). The mounting plate (34) and the small transparent panel (35) are rotatably connected to the ring rail (33).

3. The vapor phase epitaxy equipment for MOCVD dedicated glove box cabinet according to claim 1, characterized in that: The wearable mechanism (4) further includes a base mechanism (42), which includes a rotary table (421), a hinge frame (422), and a spring buckle (423). A rotating shaft (4313) is also provided on the sleeve (431). The rotary table (421) is slidably connected to the horizontal rail (41), and the rotating shaft (4313) is rotatably connected to the hinge frame (422). Both the hinge frame (422) and the rotating shaft (4313) are fixedly connected to the spring buckle (423). The negative pressure machine... The structure (43) also includes a limiting frame (435), and the glove mechanism (5) also includes a positioning ring (52). The positioning ring (52) is provided with positioning beads (521), and the limiting frame (435) is provided with ball grooves (4351). The positioning beads (521) and ball grooves (4351) are provided in several groups. The several groups of positioning beads (521) and ball grooves (4351) are evenly distributed along the circumference of the positioning ring (52), and the positioning beads (521) are in contact with the ball grooves (4351).

4. The vapor phase epitaxy equipment for MOCVD dedicated glove box cabinet as described in claim 3, characterized in that: The base mechanism (42) also includes a vacuum pump (424), a liquid pump (425) and a circulation pump (426). The hinge frame (422) is fixedly connected to the rotary table (421), the vacuum pump (424), the liquid pump (425) and the circulation pump (426). The sleeve (431) is also provided with a bottom opening (4311). The bottom opening (4311) is connected to the vacuum pump (424) through a hose. The negative pressure mechanism (43) also includes a liquid pipe (433). The liquid pipe (433) is connected to the liquid pump (425) through a hose. The ring shell (45) is provided with an air inlet chamber (451) and an air outlet chamber (452). The air inlet chamber (451) and the air outlet chamber (452) are both connected to the circulation pump (426) through a hose.

5. A vapor phase epitaxy apparatus for a dedicated MOCVD glove box cabinet according to claim 4, characterized in that: The negative pressure mechanism (43) also includes a spray cylinder (432) and a visual inspection table (434). The spray cylinder (432) and the visual inspection table (434) are both fixedly connected to the sleeve (431), and the liquid pipe (433) is fixedly connected to the spray cylinder (432).

6. A vapor phase epitaxy apparatus for a dedicated MOCVD glove box cabinet according to claim 3, characterized in that: The glove mechanism (5) also includes a positioning ring (52) and a return mechanism (53). The return mechanism (53) includes a ring cylinder (54). The magnetic chuck (51), the positioning ring (52), and the ring cylinder (54) are all fixedly connected to the double-mouth glove (57). The ring cylinder (54) is in contact with the ring shell (45).

7. A vapor phase epitaxy apparatus for a dedicated MOCVD glove box cabinet according to claim 6, characterized in that: The reflux mechanism (53) also includes an intake solenoid valve (55) and an exhaust solenoid valve (56). The annular cylinder (54) is provided with a channel (541). The channel (541), intake solenoid valve (55), and exhaust solenoid valve (56) are provided in several groups. The channels (541), intake solenoid valve (55), and exhaust solenoid valve (56) are evenly distributed around the circumference of the annular cylinder (54). The intake solenoid valve (55) and exhaust solenoid valve (56) are fixedly connected to the channel (541). The intake solenoid valve (55) and exhaust solenoid valve (56) are magnetically connected to the electromagnetic block (491).

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