Online automatic analysis system and online automatic analysis equipment

Abstract

The invention relates to the technical field of optical analysis and detection equipment, and provides an on-line automatic analysis system and on-line automatic analysis equipment, and the on-line automatic analysis system comprises a filtering module, a detection module and a control device. The filtering module is used for filtering to-be-detected liquid from a production line, the detection module is connected with the filtering module to receive and detect optical data of the filtered to-be-detected liquid, and the control device is connected with the filtering module and the detection module. The control device controls the liquid to be detected to be input into or discharged out of the filtering module and the detection module and controls the operation of the detection module. The quality of the chemical agent used by the machine equipment on the production line can be monitored in real time, the detection efficiency is improved, the production cost is reduced, the replacement time of the chemical agent is accurately evaluated, and the burden of wastewater treatment and the environment is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of optical analysis and detection equipment, and particularly to an on-line automatic analysis system and an on-line automatic analysis device. Background Art

[0002] In the production process of semiconductors, various chemical agents are often used to process wafers. For example, in processes such as yellow light, electroplating, etching, and cleaning, chemical agents are prone to a decrease in purity and concentration due to the accumulation of impurities and particles during long-term use. As the dimensional requirements of semiconductor processes become higher and higher, the quality of chemical agents is related to the precision and qualification rate of wafer finished products. If new chemical agents are not replaced in time, the wafers will be contaminated, there will be particle residues, or the etching will be incomplete, resulting in product scrapping and inability to ship. If new chemical agents are replaced frequently, the production cost will increase, and at the same time, a large amount of organic wastewater will be generated, increasing the burden on wastewater treatment and the environment.

[0003] Currently, for the replacement timing of chemical agents, most often a large number of human resources are allocated in the production department. Samples are taken one by one from production machines manually and returned to the laboratory for testing procedures in sequence. Limited by the number of samples that can be tested per batch and the man-hours, the best testing time is delayed. When the reading of the chemical agent is found to be abnormal, there is often a time interval from the sampling time. If the testing frequency is increased, a large number of samples and human resource requirements will increase, and it is difficult to achieve a good balance. Summary of the Invention

[0004] In view of the current technical difficulties in the industry, there is an urgent need for an on-line automatic analysis system and an on-line automatic analysis device to monitor the quality of chemical agents used in machine equipment on the production line, improve the detection efficiency, reduce the production cost, accurately evaluate the replacement time of chemical agents, and reduce the burden on wastewater treatment and the environment.

[0005] On the one hand, the present invention provides an on-line automatic analysis system, which includes:

[0006] A filtration module for filtering a liquid to be tested from a production line;

[0007] A detection module connected to the filtration module to receive and detect the optical data of the filtered liquid to be tested; and

[0008] A control device electrically connected to the filtration module and the detection module, and the control device controls the input or discharge of the liquid to be tested into and out of the filtration module and the detection module and the operation of the detection module.

[0009] Preferably, the on-line automatic analysis system includes:

[0010] Initial definition mode, in which the control device extracts the initial liquid, flows it through the filtration module and the detection module to measure the initial optical data of the initial liquid, and then discharges it;

[0011] Measurement mode, in which the control device extracts the liquid to be measured, flows it through the filtration module and the detection module to measure the optical data of the liquid to be measured, and then discharges it; and

[0012] Cleaning mode, in which the control device extracts deionized water, flows it through the filtration module and the detection module, and then discharges it.

[0013] Preferably, the on-line automatic analysis system further includes a mixing module, which is connected to the filtration module to pre-mix the filtered liquid to be measured with the reactant.

[0014] Preferably, the on-line automatic analysis system further includes a display device, which is connected to the control device and the detection module. The user controls the on-line automatic analysis system through the display device and views the optical data of the detection module.

[0015] Preferably, the detection module is an on-line X-ray fluorescence analysis device and / or an on-line optical analysis device.

[0016] Preferably, the on-line X-ray fluorescence analysis device includes:

[0017] A liquid storage part for accommodating the liquid to be measured, and the liquid storage part includes a first analysis hole;

[0018] An optical penetration layer covering the first analysis hole; and

[0019] A fixing part provided on the optical penetration layer, and the fixing part includes a second analysis hole, and the second analysis hole is axially aligned with the first analysis hole to fix the optical penetration layer.

[0020] Preferably, the on-line optical analysis device includes:

[0021] A light-transmitting cavity for accommodating the liquid to be measured from the process equipment;

[0022] A light-shielding housing covering the light-transmitting cavity, and the light-shielding housing includes a light inlet connection hole and a light outlet connection hole;

[0023] A light inlet connecting piece connecting the light inlet connection hole of the light-shielding housing; and

[0024] A light outlet connecting piece connecting the light outlet connection hole of the light-shielding housing.

[0025] Preferably, a lens is provided in the light inlet connecting piece, and the focal length of the lens is equal to the distance between the central axis of the lens and the surface or the central axis of the light-transmitting cavity.

[0026] On the other hand, the present invention provides an on-line automatic analysis device, which includes the on-line automatic analysis system described above.

[0027] Preferably, the on-line automatic analysis device is connected to at least one device on the production line to monitor the liquid to be measured of the at least one device.

[0028] The technical solution of the present invention has the following characteristics and advantages compared with the prior art:

[0029] The on-line automatic analysis system of the present invention realizes direct connection with the machines on the production line to obtain chemical agents, has an initial definition mode, a measurement mode and a cleaning mode, monitors whether the optical data of the chemical agents used by one or more machines deviate from the default range, and issues a warning to notify the user, saving the time for manual sampling and detection of samples to be measured one by one in each production machine, automatically detecting the optical properties of chemical agents in real time or regularly, so as to replace new chemical agents in time, and when unqualified products appear, it can be known in time whether it is attributed to chemical agents, effectively increasing production efficiency and qualification rate, and reducing production costs such as labor and time.

[0030] In addition, the on-line automatic analysis system can be provided with an on-line X-ray analysis device and / or an on-line optical analysis device, and the volume is reduced through precise structures such as a modular on-line X-ray fluorescence analysis module and an optical analysis module, so it can be flexibly installed on the production line for intelligent upgrading. When the on-line X-ray fluorescence analysis module and the optical analysis module fail or age, they can be disassembled, replaced or repaired, saving the time for recalibration and avoiding the detection window period. Therefore, the on-line automatic analysis system of the present invention can improve production efficiency, save labor, time and raw material costs, and reduce industrial wastewater emissions. Brief Description of the Drawings

[0031] Figure 1 It is a block diagram of the on-line automatic analysis system of the present invention.

[0032] Figure 2 It is a schematic diagram of the on-line automatic analysis device of the present invention.

[0033] Figure 3 It is a side view of the on-line automatic analysis device of the present invention.

[0034] Figure 4 It is a side view of the on-line automatic analysis device of the present invention.

[0035] Figure 5 It is a rear view of the on-line automatic analysis device of the present invention.

[0036] Figure 6 It is a schematic diagram of the on-line X-ray analysis device of the present invention.

[0037] Figure 7 This is an exploded view of the on-line X-ray fluorescence analysis module of the present invention.

[0038] Figure 8 This is a schematic diagram of the on-line optical analysis device of the present invention.

[0039] Figure 9 This is a schematic diagram of the light-shielding housing of the optical analysis module of the present invention.

[0040] Figure 10 is Figure 9 a schematic diagram of the light-shielding housing of [[]] after opening the upper cover.

[0041] Figure 11 This is a cross-sectional view of the light incident connecting member of the optical analysis module of the present invention.

[0042] Explanation of reference numerals:

[0043] 1. On-line automatic analysis system;

[0044] 2. On-line automatic analysis equipment;

[0045] 10. Housing; 101. First electrical control area; 102. Second electrical control area; 11. Liquid to be tested; 111. Interface for liquid to be tested; 112. Waste liquid discharge interface; 12. Pure water; 120. Pure water interface; 13. Waste liquid tank;

[0046] 20. Filter module; 21. Filter element;

[0047] 30. Mixing module; 31. Reagent tank; 32. Mixing tank;

[0048] 40. Detection module; 41. On-line X-ray analysis device; 410. On-line X-ray fluorescence analysis module; 411. X-ray detector; 4110. Liquid temporary storage part; 4111. Liquid filling cavity; 4112. First analysis hole; 4113. Annular barrier; 4114. Liquid inlet; 4115. Liquid outlet; 4116. First locking hole; 4117. First positioning groove; 4118. Second positioning groove; 4120. Analysis layer; 4121. Third analysis hole; 4130. Optical penetration layer; 4140. Fixing part; 4141. Second analysis hole; 4142. Second locking hole; 4150. Liquid supply pipe; 4160. Drain pipe; 4170. First locking member; 4171. Second locking member; 4181. X-ray; 4182. X-ray fluorescence;

[0049] 42. Online optical analysis device; 420. Optical analysis module; 421. Spectrometer; 422. Light source; 4211. Light-shielding housing; 4212. Upper cover; 42121. First fixing structure; 4213. Accommodation portion; 42131. Accommodation cavity; 42132. Light-emitting connection hole; 42133. Light-incoming connection hole; 42134. Second fixing structure; 42135. Fixing portion; 4221. Light-transmitting cavity 4231, light inlet connector; 42311, optical fiber connector; 42411, optical fiber connector; 42312, connector body; 412, connector body; 42313, lens unit; 413, lens unit; 42314, lens; 4232, light inlet optical fiber; 4241, light outlet connector; 4242, light outlet optical fiber; 4251, liquid discharge pipe; 4252, liquid supply pipe; 4281, base;

[0050] 50. Control device;

[0051] 60. Display device;

[0052] 70. Pump; 71. First valve member; 72. Second valve member; 73. Third valve member; 74. Fourth valve member; 75. Fifth valve member; 76. Sixth valve member; 77. Seventh valve member;

[0053] 80. Processor;

[0054] Dashed lines: electrical connections; solid lines: pipeline connections. DETAILED DESCRIPTION

[0055] The following detailed description of various embodiments of the present invention is accompanied by accompanying drawings to facilitate a better understanding. Beyond these detailed descriptions, the present invention may be broadly implemented in other embodiments. Any simple substitution, modification, or equivalent variation of the described embodiments should be understood to be within the scope of protection of the present invention, which is governed by the scope of the claims. It is important to note that the drawings are for illustrative purposes only and do not represent the actual dimensions or number of components. Some details may not be fully illustrated to maintain clarity.

[0056] See also Figures 1 to 5 The present invention provides an online automated analysis device 2 comprising an online automated analysis system 1 and a housing 10. The online automated analysis device 2 can be used in production lines utilizing chemical reagents, such as in chemical processes such as cleaning, lithography, electroplating, and etching in semiconductor wafer production lines. The online automated analysis device 2 can have at least one electrical control zone, and the online automated analysis system 1 can be located in either the first electrical control zone 101 or the second electrical control zone 102. The figures herein are provided for illustrative purposes only and the present invention is not limited thereto.

[0057] The housing 10 of the on-line automatic analysis device 2 is provided with an interface 111 for the liquid to be measured, a pure water interface 120 and a waste liquid discharge interface 112. The interface 111 for the liquid to be measured is connected to and obtains the liquid 11 to be measured of at least one device on the production line, so as to manage and monitor the conditions of one or more devices simultaneously. The pure water interface 120 is connected to the pure water system of the factory to obtain pure water 12 or deionized water. The waste liquid discharge interface 112 is connected to the industrial waste water discharge system of the factory to centrally collect industrial waste water.

[0058] The on-line automatic analysis system 1 includes: a filtration module 20, a detection module 40 and a control device 50. If pretreatment is required before the optical detection of the liquid 11 to be measured, the on-line automatic analysis system 1 may further be provided with a mixing module 30. The on-line automatic analysis system 1 may also be provided with a display device 60 and a processor 80. The display device 60 can achieve control and data visualization, and the processor 80 can analyze and process the optical data of the detection module 40.

[0059] The filtration module 20 receives the liquid 11 to be measured from the equipment on the production line. The filtration module 20 can be connected to the equipment on the production line through a pump 70 and a first valve 71 to obtain the liquid 11 to be measured in a pipeline manner, or obtain it through the liquid 11 to be measured pre-placed in the liquid tank to be measured by the user. The filtration module 20 is provided with at least one filter element 21, for example: 1 to 3, and its filtration pore diameters decrease in sequence to filter the particles in the liquid 11 to be measured so as not to affect the detection result of the detection module 40. The filtration pore diameter of the filter element 21 is between 0.1 micron and 10 microns, preferably between 0.5 micron and 5 microns.

[0060] The control device 50 is connected to the filtration module 20, the detection module 40, the mixing module 30 and / or the display device 60 to control the operation of each module or device. An example of the control device 50 is a programmable logic controller (also known as a PLC), which includes a CPU board, an I / O board, a display panel, a memory and a power supply, etc. The on-line automatic analysis system 1 sets the following modes through the control device 50: an initial definition mode, a measurement mode and a cleaning mode.

[0061] In the initial definition mode, the control device 50 starts the pump 70 and the first valve 71 to extract the initial liquid in the liquid tank to be measured. The initial liquid can be a standard solution of the solution to be measured or a new chemical reagent that has not been used in the equipment yet. The initial liquid flows through the filtration module 20 to filter the particles, and then the control device 50 starts the third valve 73 to make the initial liquid flow into the detection module 40 to measure the initial optical data of the initial liquid. Finally, the control device 50 starts the seventh valve 77 to discharge it to the waste liquid tank 13 or the waste liquid pipeline.

[0062] The measurement mode can be divided into a first measurement mode and a second measurement mode. In the first measurement mode, the control device 50 starts the pump 70 and the first valve 71 to obtain the liquid to be measured 11 in the equipment unit on the production line or obtains it by the user pre-extracting the liquid to be measured 11 in the equipment unit and placing it in the liquid to be measured tank. It flows through the filter module 20 to filter out particles, and then the control device 50 starts the third valve 73 to make the filtered liquid to be measured 11 flow into the detection module 40 to measure the optical data of the liquid to be measured 11. Finally, the control device 50 starts the seventh valve 77 to discharge it to the waste liquid tank 13 or the waste liquid pipeline.

[0063] The difference between the second measurement mode and the first measurement mode is that a mixing module 30 is added. In the second measurement mode, the control device 50 starts the pump 70 and the first valve 71 to obtain the liquid to be measured 11 in the equipment unit on the production line or obtains it by the user pre-extracting the liquid to be measured 11 in the equipment unit and placing it in the liquid to be measured tank. It flows through the filter module 20 to filter out particles, and then the control device 50 starts the third valve 73 to make the filtered liquid to be measured 11 flow into the mixing tank 32 of the mixing module 30, and adds the reactant from the reactant tank 31 to the mixing tank 32 for chemical reaction treatment. Then the control device 50 starts the fourth valve 74 to make the processed liquid to be measured 11 flow into the detection module 40 to measure the optical data of the liquid to be measured 11. Finally, the control device 50 starts the seventh valve 77 to discharge it to the waste liquid tank 13 or the waste liquid pipeline. The reactant can be a conventional reactant suitable for optical measurement according to the type of the liquid to be measured. Examples of the mixing tank 32 include glass tubes, plastic tubes, test tubes, or centrifuge tubes, etc.

[0064] In the cleaning mode, the control device 50 controls the pure water 12 to clean the filter module 20, the mixing module 30, and / or the detection module 40. Specifically, the control device 50 starts the second valve 72 to extract pure water 12 or deionized water. After the pure water 12 or deionized water flows through the filter module 20, the control device 50 starts the fifth valve 75 to discharge it to the waste liquid tank 13 or the waste liquid pipeline. After the pure water 12 or deionized water flows through the mixing module 30, the control device 50 starts the sixth valve 76 to discharge it to the waste liquid tank 13 or the waste liquid pipeline. After the pure water 12 or deionized water flows through the detection module 40, the control device 50 starts the sixth valve 76 to discharge it to the waste liquid tank 13 or the waste liquid pipeline and then discharges it.

[0065] The mixing module 30 is connected to the filter module 20 to pre-mix the filtered liquid to be measured 11 and the reactant. The mixing module 30 is provided with a reactant tank 31 and a mixing tank 32. The reactant tank 31 contains a reactant suitable for detecting the liquid to be measured 11. The mixing tank 32 is provided with a stirring element to mix the liquid to be measured and the reactant. Examples of the stirring element include but are not limited to: stirring paddles, propellers, magnetic stirring, turbine stirring, etc.

[0066] The processor 80 is connected to the detection module 40 to receive the optical data of the liquid to be measured 11 obtained by the detection module 40, perform data calculation and analysis, generate charts and / or tables from the initial optical data and / or the optical data, compare the differences between the initial optical data in the initial definition mode and the optical data in the measurement mode, and transmit the analysis results to the display module in a wireless or wired manner. Examples of the processor 80 include, but are not limited to: laptop computers, desktop computers, mini computers, industrial computers, workstations, servers, etc.

[0067] The display device 60 is connected to the control device 50, the detection module 40, and / or the processor 80. The control device 50 transmits the optical detection results of the liquid to be measured 11 obtained by the detection module 40 and / or the processor 80 to the display device 60, so as to display the optical data or analysis results of the liquid to be measured 11 of at least one device on the production line on the display device 60, and issue an abnormal warning when the optical data or analysis results deviate from the preset range. The user can set the deviation range for the warning, such as: ±0.5%, ±1%, ±5%, ±10%, ±15%, ±20%, etc. from the preset range. In addition, the user can operate and control the online automated analysis system 1 through the display device 60, so that the control device 50 executes the initial definition mode, the measurement mode, or the cleaning mode. Examples of the display device 60 include, but are not limited to: liquid crystal displays, OLED displays, electronic paper displays, etc.

[0068] The detection module 40 is connected to the filtration module 20 to receive and detect the optical data of the filtered liquid to be measured 11. The detection module 40 is an on-line X-ray fluorescence analysis device and / or an on-line optical analysis device. The setting order and position of the on-line X-ray fluorescence analysis device and the on-line optical analysis device can be interchanged. The illustrations of the present invention are only for easy understanding and examples, and the present invention is not limited thereto.

[0069] Please also refer to Figures 6 to 7 , the on-line X-ray analysis device 41 is provided with an on-line X-ray fluorescence analysis module 410 and an X-ray detector 411.

[0070] The on-line X-ray fluorescence analysis module 410 includes: a liquid storage part 4110, an analysis layer 4120, an optical penetration layer 4130, and a fixing part 4140. The on-line X-ray analysis device 41 can detect the elements, components, concentrations, pollution levels, etc. of chemical agents.

[0071] A liquid storage part 4110 defines a liquid filling cavity 4111 therein, and includes: a liquid inlet 4114 and a liquid outlet 4115 to hold the liquid to be tested from the equipment on the production line. At least a sunken first positioning groove 4117 and / or a second positioning groove 4118 are provided on the top surface of the liquid storage part 4110. A first analysis hole 4112 is provided in the first positioning groove 4117 and / or the second positioning groove 4118 to expose the horizontal plane of the liquid to be tested. The liquid outlet 4115 is arranged on the first surface of the liquid storage part 4110 and is connected to a drain pipe 4160, and the liquid inlet 4114 is arranged on the second surface of the liquid storage part 4110 and is connected to a supply pipe 4150. The first surface and the second surface can be the same or different surfaces. In this embodiment, the first surface is the top surface and the second surface is the side surface. When the liquid level height of the liquid to be tested exceeds the height of the liquid storage part 4110, it is injected into the drain pipe 4160 to ensure that the liquid to be tested fills the liquid storage part 4110 and / or the analysis layer 4120, preventing air or bubbles from remaining in the first analysis hole 4112 or the third analysis hole 4121 and avoiding affecting the measurement value of the X-ray analysis.

[0072] Examples of the material of the liquid storage part 4110 include but are not limited to: polyvinylidene fluoride (PVDF), polytetrafluoroethylene (PTFE), perfluoroethylene propylene (FEP), copolymer of tetrafluoroethylene and perfluoroalkyl vinyl ether (PFA), copolymer of tetrafluoroethylene and ethylene (ETFE) or its derivatives or its combinations.

[0073] The liquid storage part 4110 includes an annular barrier 4113. The annular barrier 4113 is arranged on the outer periphery of the first analysis hole 4112 to prevent the liquid to be tested in the liquid storage part 4110 from leaking out of the first analysis hole 4112 to the outside of the on-line X-ray analysis device 41 and avoid causing damage. The annular barrier 4113 can be made of flexible materials, such as: rubber, silica gel, polymer, etc.

[0074] The analysis layer 4120 is arranged on the first analysis hole 4112 and the annular barrier 4113 and is clamped in the second positioning groove 4118 to be positioned or aligned with the first analysis hole 4112. The analysis layer 4120 includes a third analysis hole 4121 to further define the height and volume of the liquid to be tested 11 accommodated.

[0075] The optical penetration layer 4130 is arranged on the analysis layer 4120 to form a sealed space to prevent the liquid to be tested 11 from leaking out of the analysis layer 4120. The optical penetration layer 4130 has X-ray penetrability and chemical corrosion resistance. Examples of the material of the optical penetration layer 4130 include but are not limited to: polyester, polyimide, polypropylene or its derivatives or its combinations, etc.

[0076] The fixing part 4140 is disposed on the optical penetration layer 4130 to fix the optical penetration layer 4130. The fixing part 4140 can be engaged in the first positioning groove 4117 of the liquid temporary storage part 4110 so as to be positioned or aligned with the first analysis hole 4112 or the third analysis hole 4121. The fixing part 4140 includes a second analysis hole 4141. The first analysis hole 4112, the second analysis hole 4141 and the third analysis hole 4121 are aligned along the axis to provide a channel for the X-ray 4181 to enter, so that the X-ray passes through the optical penetration layer 4130 and enters the liquid to be measured 11, causing an energy level difference in the liquid to be measured 11 and exciting X-ray fluorescence 4182, which is emitted to the X-ray detector 411.

[0077] In another embodiment, the present invention provides another on-line X-ray analysis device 41, which is provided with a liquid temporary storage part 4110, an optical penetration layer 4130 and a fixing part 4140. The difference between this embodiment and the above embodiment is that the analysis layer 4120 and the second positioning groove 4118 are omitted. Therefore, the fixing part 4140 directly fixes the optical penetration layer 4130 on the liquid temporary storage part 4110.

[0078] The X-ray detector 411 can be provided with an X-ray light source, a filter and a silicon drift detector. It can adopt existing principles, components and structures. To make the description of the specification concise, the present invention will not repeat it here. The light source of the X-ray detector 411 is an X-ray tube, for example: a tungsten (W) anode 40 kV X-ray tube. The light source of the X-ray detector 411 emits X-ray 4181 onto the liquid to be measured in the liquid temporary storage part 4110, causing an energy level difference in the liquid to be measured and exciting X-ray fluorescence 4182 to be emitted to the X-ray detector 411 for optical detection, so as to obtain the proportion of each component element of the liquid to be measured according to the energy spectrum of the X-ray fluorescence 4182. It can adopt existing analysis methods, and the present invention will not repeat it here.

[0079] Please refer to Figures 8 to 11 together. The on-line optical analysis device 42 is provided with: a light source 422, a light input optical fiber 4232, an optical analysis module 420, a light output optical fiber 4242, a spectrometer 421 and a base 4281. The on-line optical analysis device can detect the optical properties, purity, pollution degree, etc. of chemical agents.

[0080] The optical analysis module 420 is disposed on the base 4281, and the height of the base 4281 is set such that the interfaces of the outgoing optical fibers 4242 of the optical analysis module 420 and the outgoing optical fibers 4242 of the spectrometer 421 are at the same height. The optical analysis module 420 is provided with: a light-transmitting cavity 4221, a light-shielding housing 4211, a light-incoupling connector 4231, a light-outcoupling connector 4241, a liquid supply pipe 4252, and a liquid discharge pipe 4251.

[0081] The light-shielding housing 4211 includes an upper cover 4212 and a receiving portion 4213. The upper cover 4212 covers the receiving portion 4213 to form a receiving cavity 42131 for covering or receiving the light-transmitting cavity 4221, so as to prevent the light-transmitting cavity 4221 from being interfered by external light during optical analysis. The abutting surfaces of the upper cover 4212 and the receiving portion 4213 may each be provided with a plurality of first fixing structures 42121 and second fixing structures 42134 for snap-fitting or screwing connection with each other. The light-shielding housing 4211 can be fixed to the base 4281 through a fixing portion 42135, for example, by means of screw connection, adhesion, or snap-fitting.

[0082] Two opposite side walls of the light-shielding housing 4211 are respectively provided with a light-outcoupling connection hole 42132 and a light-incoupling connection hole 42133, so that the incident light from the light source 422 enters through the light-outcoupling connection hole 42132 and exits through the light-incoupling connection hole 42133. The other two opposite side walls of the light-shielding housing 4211 are respectively provided with slots for the movement of the liquid supply pipe 4252 and the liquid discharge pipe 4251. It should be understood that the illustrations of the present invention are exemplary examples, and the light-outcoupling connection hole 42132, the light-incoupling connection hole 42133, and the slots of the light-shielding housing 4211 can be provided on the upper cover 4212 or the receiving portion 4213.

[0083] The light-shielding housing 4211 has a surface that has been treated with acid and alkali resistance. Preferably, the acid and alkali resistance treatment is anodic treatment, chemical deposition treatment, or physical coating treatment, so that the light-shielding housing 4211 has a metal oxide film, a Teflon layer, or a nickel-phosphorus alloy layer, etc., to prevent damage caused by corrosion by the solution to be measured.

[0084] The material of the light-shielding housing 4211 can be metal, metal alloy, or polymer. Examples of metals and metal alloys include, but are not limited to: gold, silver, copper, iron, aluminum, or their alloys. Examples of polymers include, but are not limited to: polyethylene (PE), polypropylene (PP), polyvinyl chloride (PVC), polyethylene terephthalate (PET), polystyrene (PS), polycarbonate (PC), polyvinylidene fluoride (PVDF), polytetrafluoroethylene (PTFE), perfluoroethylene propylene copolymer (FEP), copolymer of tetrafluoroethylene and perfluoroalkyl vinyl ether (PFA), copolymer of tetrafluoroethylene and ethylene (ETFE), or their derivatives or combinations. Preferably, the material of the light-shielding housing 4211 is aluminum or Teflon.

[0085] The light-transmitting cavity 4221 is disposed within the light-shielding housing 4211 and houses the liquid under test 11 from the process equipment or the mixed reaction reagent thereof. The material of the light-transmitting cavity 4221 is far-ultraviolet quartz glass, and the light transmittance for light within the wavelength range of 180 nm to 1100 nm is 80% to 99.99%. Preferably, the light transmittance is 90% to 99.99%. The distance between the light-transmitting cavity 4221 and the light-shielding housing 4211 is less than 0.05 cm. The light-transmitting cavity 4221 can be attached to the inner wall of the receiving cavity 42131 of the light-shielding housing 4211 by ultrasonic welding.

[0086] The bottom of the light-transmitting cavity 4221 is liquid-connected to the liquid supply pipe 4252, and the top of the light-transmitting cavity 4221 is liquid-connected to the liquid discharge pipe 4251, such that the liquid under test from the process equipment fills the light-transmitting cavity 4221 starting from the bottom and is discharged from the top, ensuring that the liquid under test completely fills the entire light-transmitting cavity 4221. The liquid supply pipe 4252 and the liquid discharge pipe 4251 can be arranged in the form of an outlet interface or a pipeline. If in the form of an outlet interface, then a pipeline is installed to connect to the process equipment. If in the form of a pipeline, then it is directly connected to the process equipment or transferred to its pipeline.

[0087] Please refer to Figure 11 For simplicity, Figure 11Taking the light incident connection member 4231 as an example, the internal structure of the light exiting connection member 4241 is similar to that of the light incident connection member 4231, so it will not be shown repeatedly. The light incident connection member 4231 is connected to the light incident connection hole 42133 of the light shielding housing 4211, and is connected to the light source 422 through the light incident optical fiber 4232. The light exiting connection member 4241 is connected to the light exiting connection hole 42132 of the light shielding housing 4211, and is connected to the spectrometer 421 through the light exiting optical fiber 4242. The light incident connection member 4231 is provided with an optical fiber connection portion 42311, a connection body 42312, and a lens portion 42313. The light exiting connection member 4241 is provided with an optical fiber connection portion 42411, a connection body 42412, and a lens portion 42413. The optical fiber connection portion 42311 is connected to the light incident optical fiber 4232, and the optical fiber connection portion 42411 is connected to the light exiting optical fiber 4242. The connection body 42312 is disposed between the optical fiber connection portion 42311 and the lens portion 42313. The connection body 42412 is disposed between the optical fiber connection portion 42411 and the lens portion 42413, and the connection body 42312 and the connection body 42412 are provided with circular or polygonal protrusions (for example: hexagon). The sizes of the lens portion 42313 and the lens portion 42413 are respectively adapted to be fitted into the light exiting connection hole 42132 or the light incident connection hole 42133. Lenses are respectively provided in the lens portion 42313 and the lens portion 42413. The focal length of the lens is equal to the distance between the central axis of the lens on the optical axis and the surface or the central axis of the light transmission cavity 4221. Preferably, the lens 42314 is a plano-convex lens. The convex surface of the plano-convex lens is disposed at one end close to the light transmission cavity 4221, and the focal length of the lens 42314 is 5 mm to 15 mm. The focal length of the lens of the light incident connection member 4231 is f1, and the focal length of the lens of the light exiting connection member 4241 is f2, which satisfy the following conditions:

[0088] 0.8 ≤ |f1 / f2| ≤ 1.2

[0089] The light source 422 is connected to the light incident connection member 4231 through the light incident optical fiber 4232, so as to provide incident light to pass through the liquid to be measured 11 in the light transmission cavity 4221. Examples of the light source 422 include but are not limited to: deuterium lamp, halogen lamp or deuterium-halogen lamp. The emission wavelength range of the light source 422 is 180 nm to 1100 nm.

[0090] The spectrometer 421 is connected to the light exiting connection member 4241 through the light exiting optical fiber 4242, so as to receive the exiting light passing through the liquid to be measured 11 in the light transmission cavity 4221. The detection wavelength range of the spectrometer 421 is 180 nm to 1100 nm, and the optical resolution is 0.35 nm to 1.5 nm. The data measured by the spectrometer 421 can be transmitted to the target location or device through wired or wireless transmission. The spectrometer 421 can adopt existing principles, components and structures. For the sake of simplicity of the specification, the present invention will not be described repeatedly herein.

[0091] The on-line automatic analysis system 1 of the present invention realizes direct connection with the machines on the production line to obtain chemical agents, has an initial definition mode, a measurement mode and a cleaning mode, monitors whether the optical data of the chemical agents used by one or more machines deviate from the default range, issues a warning to notify the user, saves the time for personnel to manually extract test samples from each production machine for detection one by one, automatically detects the optical properties of the chemical agents in real time or regularly, so as to replace new chemical agents in time, can timely know whether unqualified products are attributed to chemical agents when they appear, effectively increases production efficiency and qualified rate, and reduces production costs such as manpower and time.

[0092] In addition, the on-line automatic analysis system 1 can be provided with an on-line X-ray analysis device 41 and / or an on-line optical analysis device 42, and the volume is reduced through precise structures such as a modular on-line X-ray fluorescence analysis module 410 and an optical analysis module 420, so it can be flexibly installed on the production line for intelligent upgrading. When the on-line X-ray fluorescence analysis module 410 and the optical analysis module 420 fail or age, they can be disassembled, replaced or repaired, saving the time for recalibration and avoiding the detection blank period. Therefore, the on-line automatic analysis system 1 of the present invention can improve production efficiency and save manpower, time and raw material costs, and reduce the discharge of industrial wastewater.

Claims

1. An online automated analysis system, characterized in that, Comprising: A filtering module for filtering the liquid to be tested from the production line; A detection module connected to the filtering module to receive and detect the optical data of the filtered liquid to be tested; And A control device electrically connected to the filtering module and the detection module, the control device controlling the input or discharge of the liquid to be tested into and out of the filtering module and the detection module and the operation of the detection module.

2. The online automated analysis system according to claim 1, wherein Comprising: An initial definition mode, in which the control device extracts an initial liquid, flows it through the filtering module and the detection module to measure the initial optical data of the initial liquid and then discharges it; A measurement mode, in which the control device extracts the liquid to be tested, flows it through the filtering module and the detection module to measure the optical data of the liquid to be tested and then discharges it; And A cleaning mode, in which the control device extracts deionized water, flows it through the filtering module and the detection module and then discharges it.

3. The on-line automated analysis system according to claim 1, characterized in that It further includes a mixing module connected to the filtering module to pre-mix the filtered liquid to be tested with a reaction reagent.

4. The on-line automated analysis system according to claim 1, characterized in that It further includes a display device connected to the control device and the detection module, and a user controls the on-line automatic analysis system through the display device and views the optical data of the detection module.

5. The on-line automated analysis system according to claim 1, characterized in that, The detection module is an on-line X-ray fluorescence analysis device and / or an on-line optical analysis device.

6. The on-line automated analysis system according to claim 5, characterized in that The on-line X-ray fluorescence analysis device includes: A liquid storage part for accommodating the liquid to be tested, the liquid storage part including a first analysis hole; An optical penetration layer covering the first analysis hole; and A fixing part provided on the optical penetration layer, the fixing part including a second analysis hole, the second analysis hole being axially aligned with the first analysis hole to fix the optical penetration layer.

7. The online automated analysis system according to claim 5, characterized in that, The on-line optical analysis device includes: A light-transmitting cavity for accommodating the liquid to be tested from a process device; A light-shielding housing covering the light-transmitting cavity, the light-shielding housing including a light-incident connection hole and a light-emitting connection hole; A light-incident connecting piece connecting the light-incident connection hole of the light-shielding housing; and A light-emitting connecting piece connecting the light-emitting connection hole of the light-shielding housing.

8. The on-line automatic analysis system according to claim 7, wherein A lens is provided in the light-incident connecting piece, and the focal length of the lens is equal to the distance between the central axis of the lens and the surface or the central axis of the light-transmitting cavity.

9. An on-line automatic analysis device, characterized in that, It includes the on-line automatic analysis system according to any one of claims 1 to 8.

10. The on-line automatic analysis device according to claim 9, characterized in that, The on-line automatic analysis device is connected to at least one device on the production line to monitor the liquid to be tested of at least one of the devices.

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