Adjusting device of optical element

Abstract

The invention discloses an adjusting device of an optical element, which relates to the technical field of optical precision machinery and comprises a position sensing device, a telescopic device and a plurality of flexible adjusting blocks. The flexible adjusting block comprises an adjusting block body and a transmission rod arranged in the adjusting block body, the transmission rod comprises a beam and a column which are fixedly connected, an adjusting hole is formed in the side face of the adjusting block body, the adjusting hole is formed in the side portion of the outer mirror frame, and the telescopic end of a telescopic device arranged on the outer mirror frame can enter the adjusting hole. The beam is located above the column, the two ends of the beam are rotationally connected with the adjusting block body through connecting pieces, the connecting pieces can deform, the telescopic end pushes the column, and the end, away from the telescopic end, of the beam can drive the end, close to the inner mirror frame, of the adjusting block body to rise in the direction parallel to the axis of the outer mirror frame. The position sensing device is arranged on the inner wall of the outer mirror frame and used for sensing the position of the inner mirror frame. The position and posture of the lens group can be quickly and precisely adjusted, and adjustment is convenient.

Description

Technical Field

[0001] The present invention relates to the technical field of optical precision machinery, and particularly relates to an adjusting device for an optical element. Background Art

[0002] Precision microscopes play an important role in the manufacturing of large-scale integrated circuits and are used in lithography equipment and defect detection equipment. With the continuous improvement of chip manufacturing processes, these semiconductor devices have higher requirements for precision microscopes. Only objective lens systems with high numerical apertures, large fields of view, and low aberrations can meet their requirements. As the numerical aperture continues to increase, the aperture, thickness, and number of optical elements also increase continuously, while the optical design tolerances become more and more strict, which also poses higher requirements for the structural design. In order to meet the system wave aberration requirements and improve the imaging quality, adjustable optical elements are generally selected as compensators during design, and the optical elements are made to perform precise radial and axial movements through an adjustment mechanism to compensate for the corresponding aberrations.

[0003] There are gaps, friction, and wear between traditional rigid transmission mechanisms, making it difficult to meet the existing high-precision requirements. Flexible mechanisms replace traditional moving parts with flexible hinges and transfer motion according to the elastic deformation characteristics of components. Compared with rigid adjustment mechanisms, flexible mechanisms have high motion resolution, simple manufacturing processes, no friction, and do not require lubrication, showing significant advantages in manufacturing and assembly and adjustment, and thus are widely used in fields such as semiconductor equipment, precision optical instruments, biomedicine, optical remote sensing, and ultra-precision machining.

[0004] Currently, the general axial adjustment device for optical elements can perform fine adjustment of the position of the optical element through a flexible mechanism and a piezoelectric actuator. However, since the axial movement of the frame is adjusted by the axial movement of the piezoelectric actuator, there is often no setting position for the axial adjustment device after the lens assembly is adjusted and assembled, resulting in a lack of adjustment and compensation function during use. Therefore, there is an urgent need for an adjusting device for an optical element to solve the above technical problems. Summary of the Invention

[0005] The purpose of the present invention is to provide an adjusting device for an optical element to solve the problems existing in the above-mentioned prior art, and to be able to quickly and precisely adjust the position and attitude of the lens group and facilitate adjustment.

[0006] To achieve the above purpose, the present invention provides the following solutions:

[0007] The present invention provides an adjusting device for an optical element, comprising a position sensing device and a plurality of flexible adjusting blocks; the plurality of flexible adjusting blocks are arranged between an endoscope frame and an outer frame and are circumferentially distributed along the endoscope frame. The flexible adjusting block comprises an adjusting block body and a transmission rod arranged inside the adjusting block body. The transmission rod comprises a beam and a column fixedly connected. An adjusting hole is arranged on the side surface of the adjusting block body, and the adjusting hole is arranged on the side part of the outer frame. The adjusting hole is used for the telescopic end of a telescopic device arranged on the outer frame to enter and be fixedly connected with the side part of the column. The surface of the adjusting block body provided with the adjusting hole is fixedly connected with the outer frame. The beam is located above the column, and two ends of the beam are rotationally connected with the adjusting block body through a connecting piece. The connecting piece can be deformed, and the telescopic end pushes the column. One end of the beam far away from the telescopic end can drive one end of the adjusting block body close to the endoscope frame to rise in a direction parallel to the axis of the outer frame. The position sensing device is arranged on the inner wall of the outer frame and is used for sensing the position of the endoscope frame.

[0008] In some embodiments, an adjusting plate and a mounting hole are further included. The mounting hole is arranged on a surface of the adjusting block body opposite to the surface where the adjusting hole is arranged. The mounting hole is used for an elastic member to enter. Two ends of the elastic member respectively abut against the side surface of the column and the adjusting plate. By changing the thickness of the adjusting plate, different compression states of the elastic member can be obtained.

[0009] In some embodiments, a first flexible hinge is further included. Two first flexible hinges are arranged on the top surface and the bottom surface of the adjusting block body along a direction parallel to the axis of the outer frame. The length direction of the first flexible hinge is perpendicular to the radial direction of the outer frame. The two first flexible hinges located on the same surface are distributed along the radial direction of the outer frame.

[0010] In some embodiments, the flexible adjusting block further comprises a support block. The support block is arranged between the adjusting block body and the endoscope frame and is fixedly connected with both the endoscope frame and the adjusting block body.

[0011] In some embodiments, the telescopic device is a piezoelectric actuator, the position sensing device is a displacement sensor, and the controller of the piezoelectric actuator and the displacement sensor are both connected to the same control system through electrical signals.

[0012] In some embodiments, the connecting piece is a second flexible hinge. The second flexible hinge is arranged below two ends of the beam. One connecting part of the second flexible hinge is fixedly connected with the beam, and the other connecting part is fixedly connected with the column.

[0013] In some embodiments, the number of the flexible adjustment blocks is the same as that of the position sensing devices, and the flexible adjustment blocks and the position sensing devices are arranged alternately and evenly on the inner side surface of the outer frame.

[0014] In some embodiments, it further includes a plurality of flexible guiding hinges. The flexible guiding hinges are provided with semi-circular grooves on a plane along the direction parallel to the axis of the outer frame. One end of the flexible guiding hinge is fixedly connected to the outer frame, and the other end is fixedly connected to the inner frame. And there is one such flexible guiding chain arranged between each flexible adjustment block and the position sensing device.

[0015] In some embodiments, it further includes a locking device. The locking device is arranged on the outer frame and can limit the deformation of the flexible adjustment block.

[0016] In some embodiments, a protrusion is provided on the outer periphery of the inner frame, and the upper surface of the displacement sensor is arranged parallel to the protrusion.

[0017] The present invention has achieved the following technical effects compared with the prior art:

[0018] The present invention uses the telescopic device to push the column. The side of the column receives the thrust, and the beam located above the column deflects. Under the action of the resistance force of the beam, the end of the beam far from the telescopic end of the telescopic device can drive the end of the adjustment body close to the inner frame to rise, thereby realizing the rapid adjustment of the position and attitude of the lens group. Moreover, the telescopic device is arranged on the outer frame. Through the radial pushing column, the radial driving force of the telescopic device can be converted into the movement of the beam along the axial direction of the lens group. The telescopic device does not need to occupy the installation space on the upper or lower part of the outer frame. By adjusting the axial movement through the radial force, it is very convenient to adjust the lens group during use and can be adjusted at any time according to needs during use. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the embodiments. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0020] Figure 1 It is a schematic structural diagram of a lens mechanism in some embodiments of the present invention;

[0021] Figure 2 It is a schematic connection diagram of a flexible adjustment block with an inner frame and an outer frame in some embodiments of the present invention;

[0022] Figure 3 It is a schematic structural diagram of an outer frame in some embodiments of the present invention;

[0023] Figure 4 Schematic structural diagram of the endoscope frame in some embodiments of the present invention;

[0024] Figure 5 Schematic structural diagram of the flexible guiding chain in some embodiments of the present invention;

[0025] Figure 6 Stereogram of the flexible adjustment block in some embodiments of the present invention;

[0026] Figure 7 Schematic structural diagram of the flexible adjustment block in some embodiments of the present invention.

[0027] In the figure: 1 - outer lens frame; 2 - endoscope frame; 201 - protruding part; 3 - flexible guiding hinge; 301 - semi-circular groove; 4 - flexible adjustment block; 401 - adjustment block body; 402 - adjusting ball head rod; 403 - pin; 404 - compression spring; 405 - compression spring cover plate; 406 - second flexible hinge; 407 - first flexible hinge; 408 - column; 409 - support block; 410 - mounting hole; 411 - adjustment hole; 412 - positioning pin hole; 413 - beam; 5 - lens; 6 - piezoelectric actuator; 7 - locking device; 8 - position sensing device. Specific embodiments

[0028] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0029] The purpose of the present invention is to provide an adjustment device for optical elements to solve the problems existing in the prior art, and can realize the rapid and precise adjustment of the position and attitude of the lens group and is convenient for adjustment.

[0030] To make the above objects, features and advantages of the present invention more obvious and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0031] As Figures 1-7As shown in the figure, the present invention provides an adjusting device for an optical element, which includes a position sensing device 8, a telescopic device, and a plurality of flexible adjusting blocks 4; the plurality of flexible adjusting blocks 4 are arranged between the endoscope frame 2 and the outer frame 1 and are distributed circumferentially along the endoscope frame 2. The flexible adjusting block 4 includes an adjusting block body 401 and a transmission rod arranged inside the adjusting block body 401. The transmission rod includes a beam 413 and a column 408 fixedly connected. An adjusting hole 411 is provided on the side surface of the adjusting block body 401, and the adjusting hole 411 is provided on the side part of the outer frame 1. Specifically, the axial direction of the adjusting hole 411 is perpendicular to the axial direction of the column 408. The adjusting hole 411 is used for the telescopic end of the telescopic device arranged on the outer frame 1 to enter and be fixedly connected to the side part of the column. Specifically, a positioning pin hole 412 is provided on the adjusting block body 401, and a pin 403 passes through the outer frame 1 and is inserted into the positioning pin hole 412 to realize the fixed connection between the adjusting block body 401 and the outer frame 1. The surface of the adjusting block body 401 provided with the adjusting hole 411 is fixedly connected to the outer frame 1. The beam 413 is located above the column 408, and both ends of the beam 413 are rotatably connected to the adjusting block body 401 through a connecting piece. The connecting piece can deform, and the telescopic end pushes the column 408. One end of the beam 413 away from the telescopic end can drive one end of the adjusting block body 401 close to the endoscope frame 2 to rise in the direction parallel to the axis of the outer frame 1. The position sensing device 8 is arranged on the inner wall of the outer frame 1 and is used to sense the position of the endoscope frame 2. After preliminary assembly, the position sensing device 8 outputs a signal. After processing this signal, it is input to the controller of the telescopic device. The telescopic device is used to push the column 408. The side part of the column 408 receives a thrust, and the beam 413 located above the column 408 deflects. Under the action of the resisting force of the beam 413, one end of the beam 413 away from the telescopic end of the telescopic device can drive one end of the adjusting body close to the endoscope frame 2 to rise, thereby realizing the rapid adjustment of the position and posture of the lens group. Moreover, the telescopic device is arranged on the outer frame 1. By radially pushing the column 408, the radial driving force of the telescopic device can be converted into the movement of the beam 413 in the axial direction of the lens group. The telescopic device does not need to occupy the installation space on the upper or lower part of the outer frame 1. By adjusting the axial movement through the radial force, it is very convenient to adjust the lens group during use and can be adjusted at any time according to needs during use. In the prior art, the axial movement of the lens group is adjusted by using the axial force, which occupies the installation space for the upper and lower installations of the lens group, and it is inconvenient to adjust during use once installed.

[0032] It should be noted that the length parameters of the beam 413 and the column 408 can be set according to needs, and the transmission ratio can be changed by changing the parameters. The flexible part of the flexible adjusting block 4 can be processed by wire electrical discharge machining or electrochemical etching.

[0033] In some embodiments, the adjusting device of the optical element further includes an adjusting plate and a mounting hole 410. The mounting hole 410 is provided on a surface of the adjusting block body 401 opposite to the surface where the adjusting hole 411 is provided. The mounting hole 410 is for the elastic member to enter. The two ends of the elastic member respectively abut against the side surface of the column 408 and the adjusting plate. By changing the thickness of the adjusting plate, the elastic member can have different compression states. When in use: first pre-assemble the outer frame 1, the inner frame 2, the position sensing device 8 and the flexible adjusting block 4. By changing the compression degree of the elastic member, the pre-tightening force of the elastic member is changed to achieve rough leveling of the flexible adjusting block 4, which needs to be leveled to within an accuracy of 2 microns (with the upper surface of the outer frame 1 as the reference), and then center (the optical center of the lens 5 is aligned with the optical axis of the lens system) and install the lens 5. Then install the telescopic device.

[0034] Specifically, the light adjusting plate is a compression spring cover plate 405, and the elastic member is a compression spring 404. The compression spring cover plate 405 is arranged between the compression spring 404 and the inner frame 2. By changing the thickness of the compression spring cover plate 405, the compression spring 404 can have different compression states. By replacing the compression spring cover plates 405 with different thicknesses, the compression degree of the compression spring 404 can be conveniently and accurately changed, thereby adjusting the pre-tightening force of the compression spring 404. Using compression spring cover plates 405 with different thicknesses to change the compression state of the compression spring 404 provides great flexibility for the adjusting device. In practical applications, according to different optical system requirements and installation conditions, the compression spring cover plate 405 can be replaced at any time to adjust the pre-tightening force of the compression spring 404 to adapt to different working scenarios, so that the adjusting device of the optical element can better meet diverse usage requirements and improve the versatility of the device.

[0035] In some embodiments, the adjusting device of the optical element further includes a first flexible hinge 407. Two first flexible hinges 407 are provided on both the top surface and the bottom surface of the adjusting block body 401, and the length direction of the first flexible hinge 407 is perpendicular to the radial direction of the outer lens frame 1. The two first flexible hinges 407 located on the same surface are distributed along the radial direction of the outer lens frame 1. The first flexible hinge 407 is provided on both the top surface and the bottom surface of the adjusting block body 401, and its length direction is perpendicular to the radial direction of the outer lens frame 1. The two first flexible hinges 407 above and the two first flexible hinges 407 below can form a parallelogram layout, so that when the adjusting block body 401 is subjected to the acting force of the telescopic device, it can more flexibly realize the adjustment of small angles and positions through the bending deformation of the flexible hinge. Moreover, because the flexible hinge has good elasticity and small frictional resistance, it can accurately transmit the driving force of the telescopic device to the inner lens frame 2, thereby realizing more precise adjustment of the position and attitude of the lens group, which helps to improve the imaging quality of the optical system. The flexible hinge can bear a certain load and has good fatigue performance during repeated adjustment processes. By arranging a plurality of flexible hinges on the top surface and the bottom surface of the adjusting block body 401, the connection between the adjusting block body 401 and the outer lens frame 1 and the inner lens frame 2 can be optimized, enhancing the stability of the entire structure. When the lens group is subjected to external vibration or impact, the flexible hinge can play a buffering and damping role, reducing the influence on the position of the lens group and ensuring the normal operation of the optical system. The setting of the flexible hinge can also compensate for the small errors and deformations that may occur during the adjustment process. Since the optical system has extremely high requirements for precision, any small structural change may affect the imaging effect. The flexible hinge can adapt to these changes to a certain extent, keeping the adjusting device in a good working state all the time and improving the reliability of the adjusting device of the entire optical element.

[0036] In some embodiments, the flexible adjusting block 4 further includes a support block 409. The support block 409 is fixedly arranged at one end of the adjusting block body 401 away from the outer lens frame 1 and is fixedly connected to the inner lens frame 2, and the support block 409 can generate small deformations by itself, which can be used to compensate for the radial error generated by the displacement of the flexible adjusting block 4, so that almost all the transmitted force is applied in the axial direction, improving the transmission efficiency of the telescopic device and the column 408. In an optical system, even a small error may have a significant impact on the imaging quality. By adjusting and correcting these errors through the deformation of the support block 409, it can ensure that the inner lens frame 2 and the optical elements mounted thereon always remain in an accurate position, thereby improving the imaging accuracy and stability of the optical system. Specifically, the support block 409 is arranged in such a form that its top is fixedly connected to the adjusting block body 401, and a small slit is provided at the lower part.

[0037] In some embodiments, the telescopic device is a piezoelectric actuator 6, the position sensing device 8 is a displacement sensor, preferably a high-precision displacement sensor, and the controller of the piezoelectric actuator 6 and the displacement sensor are both connected to the same control system through electrical signals. An adjusting ball head rod 402 is arranged in the adjusting hole 411, and the extending end of the piezoelectric actuator 6 is arranged close to the adjusting ball head rod 402. The piezoelectric actuator 6 has extremely high displacement resolution and accuracy, and can achieve precise control of micro-displacements. Combined with the high-precision displacement sensor, the position change of the endoscope frame 2 is monitored in real time to form a closed-loop feedback control system. The control system accurately adjusts the output of the piezoelectric actuator 6 according to the feedback signal of the displacement sensor, so as to achieve high-precision adjustment of the position and posture of the endoscope frame 2, meet the strict requirements of the optical system for the position accuracy of the lens group, and help improve the imaging quality and resolution of the optical system. Moreover, the response speed of the piezoelectric actuator 6 is very fast, and the required displacement can be generated in a short time. Cooperating with the high-precision displacement sensor and the control system, it can quickly respond to the position change of the endoscope frame 2. Moreover, the piezoelectric actuator 6 is a non-contact driving device, and there are no problems such as mechanical wear and friction, so it has a long service life and high reliability. The high-precision displacement sensor can stably provide accurate position feedback information to ensure that the control system can understand the state of the endoscope frame 2 in real time and accurately. The stability and reliability of the entire system are effectively improved, reducing the downtime and maintenance costs caused by equipment failures, and ensuring the continuous and stable operation of the optical system.

[0038] It should be noted that the position sensing device 8 can also be a capacitive displacement measuring device, an inductive displacement measuring device, etc. The telescopic device can also be an electromagnetic actuator or a hydraulic actuator, etc.

[0039] As a preferred embodiment, a protrusion 201 is arranged on the outer periphery of the endoscope frame 2, and the upper surface of the displacement sensor is arranged parallel to the protrusion 201 for accurately sensing the movement of the endoscope frame 2. Further specifically, a detection block of the displacement sensor is left in the endoscope frame 2 for touching other parts of the displacement sensor on the outer lens frame 1. The upper surface of the displacement sensor is arranged parallel to the protrusion 201, so that the sensor can more accurately capture the micro-displacement changes of the endoscope frame 2 in all directions. The parallel arrangement reduces the measurement error caused by the angular deviation, ensures that the displacement sensor can accurately sense the movement of the endoscope frame 2, and thus provides more accurate feedback information for the subsequent adjustment control, helps to further improve the adjustment accuracy of the adjustment device of the optical element, and meets the high-precision requirements of the optical system. A detection block of the displacement sensor is specifically left in the endoscope frame 2 for touching other parts of the displacement sensor on the outer lens frame 1, providing a stable sensing structure for the displacement sensor. <>

[0040] In some embodiments, the connecting member is the second flexible hinge 406. The second flexible hinge 406 is disposed below the two ends of the beam 413. One connecting portion of the second flexible hinge 406 is fixedly connected to the beam 413, and the other connecting portion is fixedly connected to the column 408. The second flexible hinge 406 is fixedly connected to the endoscope frame 2 and the outer frame 1 respectively, and is located below the two ends of the beam 413, and can provide a stable support structure for the rotation of the beam 413. When the telescopic device pushes the column 408 to deflect the beam 413, the second flexible hinge 406 can limit the swaying or displacement of the beam 413 in unnecessary directions, ensure that the beam 413 drives the adjusting block body 401 and the endoscope frame 2 to move in the expected manner, enhance the stability of the entire adjusting device structure, reduce the adjustment error caused by structural instability, and contribute to ensuring the imaging quality of the optical system. Due to the elastic deformation characteristics of the second flexible hinge 406, it can compensate for the possible small deviations during the rotation of the beam 413 to a certain extent, make the movement of the beam 413 smoother and more precise, and the precise movement is transmitted to the endoscope frame 2, enabling more accurate adjustment of the position and posture of the endoscope frame 2. In the optical system, even a small change in the position of the lens group may affect the imaging effect. The presence of the second flexible hinge 406 helps to improve the adjustment accuracy and meet the high-precision requirements of the optical system.

[0041] In some embodiments, the number of the flexible adjustment blocks 4 is the same as that of the position sensing devices 8, and both are preferably set to three. The included angle between every two flexible adjustment blocks 4 is 120°, and the included angle between every two position sensing devices 8 is also 120°. The flexible adjustment blocks 4 and the position sensing devices 8 are arranged alternately and evenly on the inner side surface of the outer frame 1. During the adjustment process, the three flexible adjustment blocks 4 work together to more stably adjust the position and posture of the endoscope frame 2, ensuring the stability and imaging quality of the optical system. The three position sensing devices 8 are also arranged alternately and evenly at an included angle of 120°, and can sense the position change of the endoscope frame 2 in all directions. No matter in which direction the endoscope frame 2 is displaced or rotated, at least one position sensing device 8 can detect the change in time and accurately and feedback it to the control system. The alternate and even arrangement of the flexible adjustment blocks 4 and the position sensing devices 8 makes the adjustment and monitoring processes more coordinated. The control system can accurately control the actions of each flexible adjustment block 4 according to the feedback information of the position sensing device 8 to achieve fine adjustment of the position and posture of the endoscope frame 2. Due to the symmetry of the distribution of the three flexible adjustment blocks 4 and the position sensing devices 8, the adjustment process is more regular and predictable, which helps to improve the adjustment accuracy and efficiency, and reduce the adjustment time and workload.

[0042] In some embodiments, the adjusting device of the optical element further includes a plurality of flexible guiding hinges 3. The flexible guiding hinges 3 are provided with semi-circular grooves 301 on the surface along the direction parallel to the axis of the outer frame. Preferably, two semi-circular grooves 301 are provided and arranged on the bottom surface of the flexible guiding hinge 3. One end of the flexible guiding hinge 3 is fixedly connected to the outer frame 1, and the other end is fixedly connected to the inner frame 2. And a flexible guiding chain is arranged between each flexible adjusting block 4 and the position sensing device 8. Due to the design of the semi-circular groove 301, the flexible guiding hinge 3 can achieve movement in the axial direction of the lens group. And because there is still a certain thickness above the semi-circular groove 301, the flexible guiding hinge 3 is not prone to radial deformation, which helps to ensure that the inner frame 2 moves axially relative to the outer frame 1.

[0043] In some embodiments, the adjusting device of the optical element further includes a locking device 7. The locking device 7 is arranged on the outer frame 1 and can lock the flexible adjusting block 4. Specifically, the locking device 7 can be set as a bolt. The bolt is screwed into the outer frame 1, but it is not screwed in radially, so that the bolt can abut against the adjusting ball head rod 402 after being screwed in, making the flexible adjusting block 4 no longer able to move.

[0044] The adjusting device of the optical element is arranged in the microscopic objective single lens assembly. The single lens assembly includes a lens 5, an outer frame 1, an inner frame 2 and the adjusting device of the optical element, (the lens 5, the outer frame 1, the inner frame 2 and the adjusting device of the optical element form a lens mechanism). The inner frame 2 is arranged inside the outer frame 1. The inner frame 2 is used to mount the lens 5. The lens 5 is mounted at the center of the inner frame 2 by gluing. Specifically, three gluing points are arranged along the circumferential direction of the inner frame 2, and the included angle between every two gluing points is 120°. And a slit is arranged inside the inner frame 2. The slit is processed by wire electrical discharge machining or electrochemical etching. The slit can limit the propagation path of light to a certain extent and has a certain ability to accommodate deformation, which can reduce the interference of marginal light, make the light participating in imaging more regular and uniform, thereby reducing aberration and helping to achieve high-precision microscopic imaging. Threaded holes are arranged on both the upper ring surface and the lower ring surface of the outer frame 1. The upper ring surface is used to connect with the upper-level lens group, and the lower ring surface is used to connect with the lower-level lens group. And the parallelism accuracy of the upper ring surface and the lower ring surface is below 2 microns.

[0045] During use: First, pre-assemble the outer lens frame 1, the inner lens frame 2, the position sensing device 8, and the flexible adjustment block 4. By changing the compression degree of the elastic member, the pre-tightening force of the elastic member is changed to achieve rough leveling of the flexible adjustment block 4, which needs to be leveled to an accuracy within 2 microns (with the upper surface of the outer lens frame 1 as the reference). Then, centering (aligning the optical center of the lens 5 with the optical axis of the lens system) to install the lens 5. Then install the telescopic device. The position sensing device 8 outputs a signal, which is processed and then input to the controller of the telescopic device. The telescopic device is used to push the column 408. The side of the column 408 receives the thrust, and the beam 413 above the column 408 deflects. Under the action of the resistance force of the beam 413, one end of the beam 413 away from the telescopic end of the telescopic device can drive the end of the adjustment body close to the inner lens frame 2 to rise, achieving fine leveling. After that, the combined mechanism is integrated into the microscope objective lens, and the overall aberration of the microscope objective lens is tested. Then, the piezoelectric actuator 6 is used to adjust the axial displacement of the inner lens frame 2 to correct the aberration. After the correction is completed, the flexible adjustment block 4 is locked by the locking device 7, and finally, high-precision axial displacement adjustment of the position and attitude of the lens 5 is achieved. Moreover, through the position sensing device 8 and multiple flexible adjustment blocks 4, the present embodiment can achieve axial adjustment of the lens 5 at the 10 nm level. During adjustment, the ratio of the horizontally introduced coupling displacement to the main movement axial displacement is less than 0.5%, which can ensure that no new aberration is added during axial adjustment.

[0046] In the present invention, specific examples are used to elaborate on the principle and implementation manner of the present invention. The description of the above embodiments is only used to help understand the method and its core idea of the present invention; at the same time, for those of ordinary skill in the art, according to the idea of the present invention, there will be changes in the specific implementation manner and application scope. In summary, the content of this specification should not be construed as a limitation to the present invention.

Claims

1. An adjusting device for an optical element, characterized in that: It includes a position sensing device, a telescopic device and a plurality of flexible adjustment blocks; the plurality of flexible adjustment blocks are arranged between the endoscope frame and the outer frame and are distributed circumferentially along the endoscope frame. The flexible adjustment block includes an adjustment block body and a transmission rod arranged inside the adjustment block body. The transmission rod includes a beam and a column fixedly connected. An adjustment hole is provided on the side surface of the adjustment block body, and the adjustment hole is provided on the side of the outer frame. The adjustment hole is for the telescopic end of the telescopic device arranged on the outer frame to enter and be fixedly connected to the side of the column. The surface of the adjustment block body provided with the adjustment hole is fixedly connected to the outer frame. The beam is located above the column and both ends of the beam are rotatably connected to the adjustment block body through a connecting piece. The connecting piece can deform, and when the telescopic end pushes the column, one end of the beam away from the telescopic end can drive one end of the adjustment block body close to the endoscope frame to rise in a direction parallel to the axis of the outer frame. The position sensing device is arranged on the inner wall of the outer frame and is used to sense the position of the endoscope frame.

2. The adjusting device for the optical element according to claim 1, characterized in that: It further includes an adjustment plate and a mounting hole. The mounting hole is provided on the surface of the adjustment block body opposite to the surface where the adjustment hole is provided. The mounting hole is for an elastic member to enter. Both ends of the elastic member respectively abut against the side surface of the column and the adjustment plate. By changing the thickness of the adjustment plate, the elastic member can have different compression states.

3. The adjusting device for the optical element according to claim 1, characterized in that: It further includes a first flexible hinge. Two first flexible hinges are provided on both the top surface and the bottom surface of the adjustment block body along the direction parallel to the axis of the outer frame. The length direction of the first flexible hinge is perpendicular to the radial direction of the outer frame. The two first flexible hinges on the same surface are distributed along the radial direction of the outer frame.

4. The adjusting device for an optical element according to claim 3, characterized in that: The flexible adjustment block further includes a support block. The support block is arranged between the adjustment block body and the endoscope frame and is fixedly connected to both the endoscope frame and the adjustment block body.

5. The adjusting device for the optical element according to claim 1, characterized in that: The telescopic device is a piezoelectric actuator, the position sensing device is a displacement sensor, and the controller of the piezoelectric actuator and the displacement sensor are both connected to the same control system through electrical signals.

6. The adjusting device for an optical element according to claim 1, characterized in that: The connecting piece is a second flexible hinge. The second flexible hinge is arranged below both ends of the beam. One connecting part of the second flexible hinge is fixedly connected to the beam, and the other connecting part is fixedly connected to the column.

7. The adjusting device for the optical element according to claim 1, characterized in that: The number of the flexible adjustment blocks is the same as that of the position sensing devices, and the flexible adjustment blocks and the position sensing devices are arranged alternately and evenly on the inner side surface of the outer frame.

8. The adjusting device for an optical element according to claim 1, characterized in that: It further includes a plurality of flexible guiding hinges. The flexible guiding hinges are provided with semi-circular grooves on the surface along the direction parallel to the axis of the outer frame. One end of the flexible guiding hinge is fixedly connected to the outer frame, and the other end is fixedly connected to the endoscope frame. And one flexible guiding chain is arranged between each flexible adjustment block and the position sensing device.

9. The adjusting device for an optical element according to claim 1, characterized in that: It further includes a locking device. The locking device is arranged on the outer frame and can limit the deformation of the flexible adjustment block.

10. The adjusting device for an optical element according to claim 5, characterized in that: A protrusion is provided on the outer periphery of the endoscope frame, and the upper surface of the displacement sensor is arranged parallel to the protrusion.

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