A single crystal clamping device for a zone melting furnace

Abstract

This invention relates to the field of zone melting furnaces, specifically a single crystal clamping device for a zone melting furnace. The device includes a base with a central through-hole. Multiple grooves are arranged in a circumferential array on the upper surface of the base, each groove extending radially to the central through-hole. Each groove contains a sliding plate, and an arc-shaped clamping plate is fixed to the end of each sliding plate near the center of the base. A guide rod is provided on the upper surface of each sliding plate. A turntable is located above the base, with a central through-hole. Multiple arc-shaped extrusion holes are arranged in a circumferential array on the turntable, and these extrusion holes are fitted around the outer ring of the guide rods. In this invention, the turntable simultaneously extrudes multiple guide rods, which in turn drive the clamping plate to clamp the crystal and provide support for the entire crystal. This reduces the swaying generated during crystal growth, thereby improving the stability of crystal growth and ensuring smooth crystal growth.

Description

Technical Field

[0001] This invention relates to the field of zone melting furnaces, specifically a single crystal clamping device for zone melting furnaces. Background Technology

[0002] The zone melting method for growing silicon single crystals involves heating polycrystalline silicon material in an argon atmosphere or vacuum using a high-frequency heating coil until it melts and comes into contact with a seed crystal below, growing it into a high-purity silicon single crystal according to the crystal orientation structure of the seed crystal.

[0003] The process of growing silicon single crystals in a zone furnace generally involves: crystal introduction—narrow diameter growth—shoulder formation—constant diameter growth—fracture. In the first three stages of single crystal growth, the crystal diameter gradually increases as the growth process progresses, forming a conical structure. When the crystal diameter grows to a certain characteristic value, the crystal growth enters the constant diameter stage, meaning the crystal diameter maintains a constant growth value.

[0004] Vibrations caused by external environmental factors and the operation of zone melting single crystal furnaces, especially the shaking of large-size single crystals, seriously affect the growth stability of single crystals. Therefore, how to improve the stability of crystals during the preparation of single crystals has become a problem that needs to be solved by those skilled in the art.

[0005] Therefore, a single crystal clamping device for a zone melting furnace is proposed to address the above problems. Summary of the Invention

[0006] In order to overcome the shortcomings of the prior art, at least one technical problem raised in the background art is solved.

[0007] The technical solution adopted by the present invention to solve its technical problem is as follows: The single crystal clamping device of the zone melting furnace of the present invention includes a base, which is through the middle of the base. Multiple sliding grooves are arranged in a circular array on the upper surface of the base. Each sliding groove extends radially through the base to the through position in the middle of the base. Each sliding groove is provided with a sliding plate. An arc-shaped clamping plate is fixed to the end of each sliding plate near the middle of the base. A guide rod is provided on the upper surface of each sliding plate.

[0008] A turntable is provided above the base, with a through-hole in the middle of the turntable. Multiple arc-shaped extrusion holes are arranged in a circular array on the turntable, and the extrusion holes are fitted around the outer ring of the guide rod.

[0009] A drive assembly capable of driving the turntable to deflect is provided between the turntable and the base plate; multiple notches are arranged in a circumferential array on the outer ring of the turntable; the drive assembly includes an arc-shaped rack disposed in the notch, the rack meshing with a gear, and the gear being fixedly connected to a motor disposed on the outer ring of the base plate.

[0010] Preferably, the base includes a bottom plate and a top plate, the top plate is fixed to the bottom plate by bolts, a sliding layer is reserved between the top plate and the bottom plate, and a ring-shaped tension spring is provided in the sliding layer, the tension spring pressing against the outer ring of the guide rod.

[0011] Preferably, the lower surface of the turntable is provided with a limiting ring, which is positioned close to the center of the turntable; an annular groove adapted to the limiting ring is formed on the base plate, and the limiting ring is rotatably connected in the annular groove.

[0012] Preferably, each guide rod includes a base block, which is fixed to the slide plate. An anti-detachment groove is formed on the outer ring of the base block at a position opposite to the tension spring, and the tension spring is embedded in the anti-detachment groove.

[0013] A groove is made on the upper surface of the base block, and a vertical rod is installed in the groove. The lower end of the vertical rod is elastically connected to the groove by a spring, and an anti-detachment plate is fixed to the upper end of the vertical rod. The anti-detachment plate is pressed against the upper surface of the turntable.

[0014] Preferably, a bearing is fitted on the outer ring of the vertical rod, and the bearing is attached to the inner surface of the extrusion hole and rotates.

[0015] The lower surface of the anti-detachment plate has multiple ball grooves, and a ball is rotatably connected in each ball groove.

[0016] Preferably, each of the clamping plates is provided with an arc-shaped auxiliary plate, and the back of the auxiliary plate is symmetrically provided with a locking block, and each pressing plate is provided with a locking slot adapted to the locking block.

[0017] Preferably, each of the slide plates has a row of roller grooves on each side, and each row of roller grooves is rotatably connected with ball bearings.

[0018] Preferably, the drive assembly includes an electric actuator, the output end of which is connected to a connecting lug, the connecting lug being rotatably connected to an extension body provided on the outer ring of the turntable, and the rear end of the cylinder of the electric actuator being rotatably connected to a support rod, the support rod being fixed to the base.

[0019] Preferably, a motor is provided between the output end of the electric actuator and the connecting ear. The end shell of the motor is fixedly connected to the connecting ear. The output shaft of the motor points to the output end of the electric actuator. The output shaft of the motor is fixedly connected to a cylindrical shell. The end face of the shell is rotatably connected to the output end face of the electric actuator. A limit plate is radially fixed to the outer ring of the shell. Multiple sets of limit grooves are formed in a circumferential array on the outer ring of the base.

[0020] Preferably, the motor is a dual-shaft motor, with one output shaft of the motor fixed to the housing and the other output shaft resting on the connecting lug.

[0021] The advantages of this invention are:

[0022] 1. In this invention, the designed turntable synchronously extrudes multiple guide rods, and the multiple guide rods synchronously drive the clamping plate to clamp the crystal and provide support for the entire crystal. This can reduce the swaying generated during crystal growth, thereby improving the stability of crystal growth and ensuring smooth crystal growth.

[0023] 2. In this invention, by setting a ring-shaped tension spring, the tension spring will continuously press on all guide rods. When performing the clamping action on the crystal, all clamping plates can move in a state of synchronization and press on the crystal surface at the same time, avoiding the lag in movement of one or more clamping plates, which would cause the crystal clamping to tilt and affect the normal crystal pulling growth. Attached Figure Description

[0024] Figure 1 This is a perspective view of the single crystal clamping device in the zone melting furnace of the present invention;

[0025] Figure 2 This is a top view of the single crystal clamping device for the zone melting furnace in this invention;

[0026] Figure 3 This is a perspective view of the base in this invention;

[0027] Figure 4 This is a perspective view of the interaction between the base plate and the sliding plate in this invention;

[0028] Figure 5 This is a top view of the base plate in this invention;

[0029] Figure 6 This is a perspective view of the base plate in this invention;

[0030] Figure 7 This is a first-view perspective perspective view of the turntable in this invention;

[0031] Figure 8 This is a second-view perspective perspective view of the turntable in this invention;

[0032] Figure 9 This is a perspective view of the top plate in this invention;

[0033] Figure 10 This is a perspective view of the guide rod in this invention;

[0034] Figure 11 This is a perspective view of the interaction between the vertical rod and the spring in this invention;

[0035] Figure 12 This is a perspective view of the interaction between the guide rod and the sliding plate in this invention;

[0036] Figure 13 This is a perspective view of the auxiliary plate in this invention;

[0037] Figure 14This is a perspective view of the interaction between the electric actuator and the turntable in this invention;

[0038] Figure 15 This is a perspective view of the interaction between the electric actuator and the support rod in this invention;

[0039] Figure 16 This is a schematic diagram showing the fit between the electric actuator and the housing in this invention.

[0040] In the diagram: 1. Base; 2. Slide groove; 3. Slide plate; 4. Clamping plate; 5. Guide rod; 6. Turntable; 7. Extrusion hole; 8. Rack; 9. Gear; 10. Motor; 11. Base plate; 12. Top plate; 13. Sliding layer; 14. Tension spring; 15. Limiting ring; 16. Shaped groove; 17. Bottom block; 18. Anti-detachment groove; 19. Vertical rod; 20. Spring; 21. Anti-detachment plate; 22. Bearing; 23. Ball; 24. Auxiliary plate; 25. Locking block; 26. Locking groove; 27. Ball; 28. Electric actuator; 29. ​​Connecting ear; 30. Extension body; 31. Support rod; 32. Motor; 33. Housing; 34. Limiting plate; 35. Limiting groove. Detailed Implementation

[0041] To make the technical means, creative features, objectives and effects of this invention easier to understand, the invention will be further described below in conjunction with specific embodiments. Example 1

[0042] Reference Figure 1 - Figure 13 A single crystal clamping device for a zone melting furnace includes a base 1 with a through-hole in the middle. Multiple sliding grooves 2 are arranged in a circular array on the upper surface of the base 1. Each sliding groove 2 extends radially through the base 1 to the through-hole position in the middle of the base 1. A sliding plate 3 is provided in each sliding groove 2. An arc-shaped clamping plate 4 is fixed to the end of each sliding plate 3 near the middle of the base 1. A guide rod 5 is provided on the upper surface of each sliding plate 3.

[0043] A turntable 6 is provided above the base 1. The turntable 6 is through the middle and has multiple arc-shaped extrusion holes 7 arranged in a circular array on the turntable 6. The extrusion holes 7 are fitted around the outer ring of the guide rod 5.

[0044] A drive assembly capable of driving the turntable 6 to deflect is provided between the turntable 6 and the base plate 11; multiple notches are arranged in a circular array on the outer ring of the turntable 6; the drive assembly includes an arc-shaped rack 8 disposed in the notch, the rack 8 meshing with a gear 9, and the gear 9 being fixedly connected to a motor 10 disposed on the outer ring of the base plate 11.

[0045] In this embodiment, the base 1 is fixed to the top of the outer shaft of the lower axis inside the zone melting furnace. The seed crystal is fixed to the top of the inner shaft of the lower axis of the zone melting furnace by a seed crystal holder, and rises through the center of the base 1 and the turntable 6 to the starting height for crystal pulling. After crystal pulling begins, the inner and outer shafts of the lower axis of the zone melting furnace rotate synchronously. The inner shaft slowly descends as the crystal grows, while the height of the outer shaft remains unchanged. In the initial stage of crystal pulling, the seed crystal supports the grown crystal. When the crystal diameter grows to a certain specific value, the outer and inner shafts of the lower axis begin to descend synchronously. At this time, the single crystal holding device is operated, as follows:

[0046] The drive motor 10 drives the gear 9 to rotate. The gear 9 meshes with the rack 8 and rotates the turntable 6. The extrusion hole 7 on the turntable 6 extrudes the guide rod 5. The guide rod 5 drives the slide plate 3 to move along the slide groove 2. The slide plate 3 pushes the clamping plate 4 close to the crystal and clamps it on the surface of the crystal. The clamping plate 4 clamps the crystal and supports it. The rotation of the turntable 6 realizes the linear movement of the slide plate 3 and the clamping plate 4. After the turntable 6 stops rotating, the clamping plate 4 can continuously and stably clamp the crystal.

[0047] The crystal is held in place by a single crystal clamping device, which provides support for the entire crystal. This reduces the swaying that occurs during crystal growth, thereby improving the stability of crystal growth and ensuring smooth crystal growth.

[0048] Considering that the operating environment of the motor 10 is at a high temperature, some high-temperature resistant motors 10 can be used. At the same time, some cooling structures can be added to the high-temperature resistant motor 10, such as setting a water-cooling channel inside the outer wall of the motor 10, and continuously injecting coolant into the water-cooling channel through a liquid pump to ensure the stability of the motor 10.

[0049] Reference Figure 1 - Figure 13 The base 1 includes a bottom plate 11 and a top plate 12. The top plate 12 is fixed to the bottom plate 11 by bolts. A sliding layer 13 is reserved between the top plate 12 and the bottom plate 11. A ring-shaped tension spring 14 is provided in the sliding layer 13. The tension spring 14 is pressed against the outer ring of the guide rod 5.

[0050] By setting a ring-shaped tension spring 14, the tension spring 14 continuously presses on all guide rods 5, so that all guide rods 5 are pressed against the inner wall of the corresponding extrusion hole 7. At the same time, the slide plate 3 and the clamping plate 4 are in a taut state. When the turntable 6 rotates, the extrusion hole 7 can directly and effectively press on the guide rods 5. At the same time, the tension spring 14 contracts or expands within the sliding layer 13 as the guide rods 5 move, so that all guide rods 5 move synchronously. When performing the clamping action on the crystal, all clamping plates 4 can move in a state of synchronous movement and press on the crystal surface at the same time, avoiding the lag in movement of one or more clamping plates 4, which would cause the crystal clamping to tilt and affect the normal crystal pulling growth.

[0051] Reference Figure 1 - Figure 13 The lower surface of the turntable 6 is provided with a limiting ring 15, which is located close to the middle of the turntable 6; the bottom plate 11 is provided with an annular groove 16 adapted to the limiting ring 15, and the limiting ring 15 is rotatably connected in the annular groove 16.

[0052] The tension spring 14 compresses the guide rod 5, which provides synchronous constraint for the movement of the clamping plate 4. The limiting ring 15 is rotatably connected in the annular groove 16, which enables the turntable 6 to be stably rotated and connected to the base plate 11. This constraint limits the rotational eccentricity of the turntable 6, ensuring that the axis of the turntable 6 and the axis of the base 1 are always in a state of being co-linear. This allows the rotation of the turntable 6 to directly drive the linear movement of the clamping plate 4, improving the linear movement stability of the clamping plate 4 and further promoting the state of synchronous movement of all clamping plates 4.

[0053] Reference Figure 1 - Figure 13 Each of the guide rods 5 includes a base block 17, which is fixed to the slide plate 3. An anti-detachment groove 18 is formed on the outer ring of the base block 17 at a position opposite to the tension spring 14, and the tension spring 14 is embedded in the anti-detachment groove 18.

[0054] A groove is provided on the upper surface of the bottom block 17, and a vertical rod 19 is provided in the groove. The lower end of the vertical rod 19 is elastically connected to the groove by a spring 20. An anti-detachment plate 21 is fixed to the upper end of the vertical rod 19, and the anti-detachment plate 21 is pressed against the upper surface of the turntable 6.

[0055] All the anti-detachment grooves 18 on the base blocks 17 are evenly positioned at the same height. The outer ring of the tension spring 14 is embedded in the anti-detachment groove 18. At this time, any part of the tension spring 14 is at the same height, and the tension force of the tension spring 14 can be evenly applied to each base 1. Each base block 17 is also in the same execution state. At the same time, the tension spring 14 is pressed against the inner wall of the anti-detachment groove 18, increasing the pressing contact surface between the base block 17 and the tension spring 14, effectively protecting the contact position between the tension spring 14 and the base block 17, and preventing the tension spring 14 from being deformed by compression.

[0056] An anti-detachment plate 21 is provided at the upper end of the vertical rod 19. The elasticity of the spring 20 can press the anti-detachment plate against the upper surface of the turntable 6. The anti-detachment plate 21 restricts the rotation of the turntable 6 in the axial direction, so that the turntable 6 can be stably attached to the base 1, thereby improving the overall integrity and stability of the crystal clamping device.

[0057] Reference Figure 1 - Figure 13 The outer ring of the vertical rod 19 is fitted with a bearing 22, which is attached to the inner surface of the extrusion hole 7 and rotates.

[0058] The lower surface of the anti-detachment plate 21 has multiple ball grooves, and a ball 23 is rotatably connected in each ball groove;

[0059] A bearing 22 is installed on the vertical rod 19. The outer ring of the bearing 22 is attached to the inner wall of the extrusion hole 7 and rotates, converting the sliding friction between the vertical rod 19 and the extrusion hole 7 into rolling friction between the bearing 22 and the extrusion hole 7. This reduces the relative movement resistance between the extrusion hole 7 and the guide rod 5, improves the smoothness and synchronization effect of converting the rotation of the turntable 6 into the linear motion of the slide plate 3, and further improves the stability and precision of the crystal clamping device in performing its actions.

[0060] A ball 23 is provided on the lower surface of the anti-detachment plate 21 to convert the sliding friction between the anti-detachment plate 21 and the turntable 6 into rolling friction between the ball 23 bearing 22 and the turntable 6, thereby reducing the rotational resistance between the anti-detachment plate 21 and the turntable 6 and further improving the rotational stability and smoothness of the turntable 6.

[0061] Reference Figure 1 - Figure 13 Each clamping plate 4 is provided with an arc-shaped auxiliary plate 24, and the back of the auxiliary plate 24 is symmetrically provided with a locking block 25. Each pressing plate is provided with a slot 26 adapted to the locking block 25.

[0062] The crystal diameter has multiple dimensions, and the extrusion hole 7 has limitations in its extrusion movement of the guide rod 5. That is, the diameter of the circle formed by all the clamping plates 4 moving inward is limited. In the case where the diameter of the crystal to be pulled is smaller than the diameter of the circle formed by the clamping plates 4, in this embodiment, a replaceable auxiliary plate 24 is provided on the clamping plate 4. The diameter of the circle formed by the clamping plates 4 is further reduced by the auxiliary plate 24. The auxiliary plate 24 has multiple thicknesses. The auxiliary plate 24 with matching thickness is selected according to the diameter of the crystal to be pulled. The card block 25 is embedded in the card slot 26, and the back of the auxiliary plate 24 is attached to the surface of the extrusion plate.

[0063] Reference Figure 1 - Figure 13 Each of the slide plates 3 has a row of roller grooves on each side, and each row of roller grooves is rotatably connected with a ball bearing 27.

[0064] By setting ball bearings 27 on both sides of the slide plate 3, the sliding friction between the slide plate 3 and the slide groove 2 is converted into rolling friction between the ball bearings 27 and the slide groove 2, thereby reducing the relative moving resistance between the slide plate 3 and the slide groove 2 and improving the smoothness of the slide plate 3's movement. This is also one of the specific ways to improve the stability and precision of the crystal clamping device's actions. Example 2

[0065] Reference Figure 14 - Figure 16Compared with Embodiment 1, as another embodiment of the present invention: the driving component includes an electric actuator 28, the output end of the electric actuator 28 is connected to a connecting ear 29, the connecting ear 29 is rotatably connected to an extension 30 provided on the outer ring of the turntable 6, and the rear end of the cylinder of the electric actuator 28 is rotatably connected to a support rod 31, the support rod 31 is fixedly connected to the base 1.

[0066] In this second embodiment, the power to drive the turntable 6 to rotate is directly provided by the electric push rod 28. The electric push rod 28 pushes the turntable 6 to rotate. At the same time, the extrusion hole 7 on the turntable 6 extrudes the guide rod 5. The guide rod 5 drives the slide plate 3 to move along the slide groove 2. The slide plate 3 pushes the clamping plate 4 close to the crystal and clamps it on the surface of the crystal. The clamping plate 4 clamps the crystal.

[0067] The turntable 6 is driven to rotate by an electric actuator 28. Compared with the turntable 6 being driven by a motor 10 in conjunction with a gear 9 meshing with a rack 8, the electric actuator 28 can flexibly adjust the power according to actual needs when pushing the turntable 6 to rotate. Moreover, the power supply can be stopped after the clamping plate 4 reaches the required position. That is, the power supply can be stopped after the clamping plate 4 clamps the crystal. Therefore, it has a better energy-saving effect and does not require a continuous power supply to maintain the output of the electric actuator 28. In contrast, the motor 10 requires a continuous power supply or has transmission losses, so its energy-saving effect is not as good as that of the electric actuator 28.

[0068] Reference Figure 14 - Figure 16 A motor 32 is provided between the output end of the electric actuator 28 and the connecting ear 29. The end shell of the motor 32 is fixedly connected to the connecting ear 29. The output shaft of the motor 32 points to the output end of the electric actuator 28, and a cylindrical housing 33 is fixedly connected to the output shaft of the motor 32. The end face of the housing 33 is rotatably connected to the output end face of the electric actuator 28. A limiting plate 34 is radially fixed to the outer ring of the housing 33. Multiple sets of limiting grooves 35 are circumferentially arrayed on the outer ring of the base 1.

[0069] After the electric actuator 28 pushes the turntable 6 to its position, the drive motor 32 rotates. The motor 32 drives the limiting plate 34 to deflect through the housing 33. The limiting plate 34 deflects into the limiting groove 35. At this time, the rotation of the turntable 6 and the output end of the electric actuator 28 are both constrained, so that the turntable 6 remains stable and ensures that the turntable 6 continuously and stably squeezes the guide rod 5, thereby ensuring the stable clamping of the crystal by the clamping plate 4.

[0070] Reference Figure 14 - Figure 16 The motor 32 is a dual-axis motor 10, with one output shaft of the motor 32 fixed to the housing 33 and the other output shaft of the motor 32 resting on the connecting lug 29;

[0071] The output end of the electric actuator 28 presses against the housing 33, and the housing 33 presses against one of the output shafts of the motor 32. The other output shaft of the motor 32 rests against the connecting ear 29. This design allows the thrust output by the electric actuator 28 to act directly on the connecting ear 29, thus protecting the motor 32 and preventing the thrust output by the electric actuator 28 from acting on the connecting ear 29 through the housing of the motor 32, which would cause compressive damage to the housing of the motor 32.

[0072] Working principle: The base 1 is fixed at the top of the outer shaft of the lower axis inside the zone melting furnace. The seed crystal is fixed at the top of the inner shaft of the lower axis of the zone melting furnace by the seed crystal holder, and rises through the center of the base 1 and the turntable 6 to the starting height for crystal pulling. After crystal pulling begins, the inner and outer shafts of the lower axis of the zone melting furnace rotate synchronously. The inner shaft slowly descends as the crystal grows, while the height of the outer shaft remains unchanged. In the initial stage of crystal pulling, the seed crystal supports the growing crystal. When the crystal diameter grows to a certain value, the outer and inner shafts of the lower axis begin to descend synchronously. At this time, the single crystal holding device is operated, as follows:

[0073] The drive motor 10 drives the gear 9 to rotate. The gear 9 meshes with the rack 8 and rotates the turntable 6. The extrusion hole 7 on the turntable 6 extrudes the guide rod 5. The guide rod 5 drives the slide plate 3 to move along the slide groove 2. The slide plate 3 pushes the clamping plate 4 close to the crystal and clamps it on the surface of the crystal. The clamping plate 4 clamps the crystal and supports it. The rotation of the turntable 6 realizes the linear movement of the slide plate 3 and the clamping plate 4. After the turntable 6 stops rotating, the clamping plate 4 can continuously and stably clamp the crystal.

[0074] The crystal is held in place by a single crystal clamping device, which provides support for the entire crystal. This reduces the wobbling that occurs during crystal growth, thereby improving the stability of crystal growth and ensuring smooth crystal growth.

[0075] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A single crystal clamping device for a zone melting furnace, characterized in that: The system includes a base with a through-hole in the middle. Multiple grooves are arranged in a circular array on the upper surface of the base. Each groove extends radially through the base to the through-hole in the middle. Each groove contains a slide plate. An arc-shaped clamping plate is fixed to the end of each slide plate near the middle of the base. A guide rod is provided on the upper surface of each slide plate. A turntable is provided above the base, with a through-hole in the middle of the turntable. Multiple arc-shaped extrusion holes are arranged in a circular array on the turntable, and the extrusion holes are fitted around the outer ring of the guide rod. A drive assembly capable of driving the turntable to deflect is provided between the turntable and the base plate; multiple notches are arranged in a circumferential array on the outer ring of the turntable; the drive assembly includes an arc-shaped rack disposed in the notch, the rack meshing with a gear, and the gear being fixedly connected to a motor disposed on the outer ring of the base plate.

2. The single crystal clamping device for a zone melting furnace according to claim 1, characterized in that: The base includes a bottom plate and a top plate. The top plate is fixed to the bottom plate with bolts. A sliding layer is reserved between the top plate and the bottom plate. A ring-shaped tension spring is provided in the sliding layer, and the tension spring is pressed against the outer ring of the guide rod.

3. The single crystal clamping device for a zone melting furnace according to claim 1, characterized in that: The lower surface of the turntable is provided with a limiting ring, which is positioned close to the center of the turntable; an annular groove adapted to the limiting ring is opened on the base plate, and the limiting ring is rotatably connected in the annular groove.

4. The single crystal clamping device for a zone melting furnace according to claim 2, characterized in that: Each of the guide rods includes a base block, which is fixed to the slide plate. An anti-detachment groove is formed on the outer ring of the base block at a position opposite to the tension spring, and the tension spring is embedded in the anti-detachment groove. A groove is made on the upper surface of the base block, and a vertical rod is installed in the groove. The lower end of the vertical rod is elastically connected to the groove by a spring, and an anti-detachment plate is fixed to the upper end of the vertical rod. The anti-detachment plate is pressed against the upper surface of the turntable.

5. The single crystal clamping device for a zone melting furnace according to claim 4, characterized in that: The outer ring of the vertical rod is fitted with a bearing, which is attached to the inner surface of the extrusion hole and rotates. The lower surface of the anti-detachment plate has multiple ball grooves, and a ball is rotatably connected in each ball groove.

6. The single crystal clamping device for a zone melting furnace according to claim 1, characterized in that: Each clamping plate is provided with an arc-shaped auxiliary plate, and the back of the auxiliary plate is symmetrically provided with a locking block. Each pressing plate is provided with a slot adapted to the locking block.

7. The single crystal clamping device for a zone melting furnace according to claim 4, characterized in that: Each of the aforementioned slide plates has a row of roller grooves on each side, and each row of roller grooves is rotatably connected to a ball bearing.

8. The single crystal clamping device for a zone melting furnace according to claim 1, characterized in that: The drive assembly includes an electric actuator, the output end of which is connected to a connecting lug. The connecting lug is rotatably connected to an extension body provided on the outer ring of the turntable. The rear end of the cylinder of the electric actuator is rotatably connected to a support rod, which is fixed to the base.

9. The single crystal clamping device for a zone melting furnace according to claim 8, characterized in that: A motor is provided between the output end of the electric actuator and the connecting ear. The end shell of the motor is fixedly connected to the connecting ear. The output shaft of the motor points to the output end of the electric actuator. The output shaft of the motor is fixedly connected to a cylindrical shell. The end face of the shell is rotatably connected to the output end face of the electric actuator. A limit plate is radially fixed on the outer ring of the shell. Multiple sets of limit grooves are circumferentially arrayed on the outer ring of the base.

10. A single crystal clamping device for a zone melting furnace according to claim 9, characterized in that: The motor is a dual-shaft motor, with one output shaft of the motor fixed to the housing and the other output shaft resting on the connecting lug.

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