Matching path determination method, matching path determination device and impedance matching equipment

Abstract

The invention provides a matching path determination method, a matching path determination device and impedance matching equipment, and relates to the technical field of radio frequency. The matching path determination method comprises the following steps: establishing an impedance matching coordinate system, and determining a coordinate value of an equivalent impedance point corresponding to an impedance value in the impedance matching coordinate system according to the impedance value of a load. And determining the coordinate value of the target circle center and the target central angle at least according to the coordinate value of the equivalent impedance point and the original point of the impedance matching coordinate system. According to the coordinate value of the target circle center, the target central angle, the coordinate value of the equivalent impedance point and the original point of the impedance matching coordinate system, an arc impedance matching path is determined, the center of curvature of the impedance matching path is the target circle center, and the central angle of the impedance matching path is the target central angle; and two end points of the impedance matching path are respectively an equivalent impedance point and an original point of the impedance matching coordinate system. According to the invention, impedance matching can be realized more quickly, and impact on a radio frequency power supply system is reduced.

Description

Technical Field

[0001] The present application relates to the field of radio frequency technology, and in particular to a matching path determination method, a matching path determination device, and an impedance matching device. Background Art

[0002] With the advancement of RF power technology, RF power systems are now widely used in various semiconductor devices. These applications place increasing demands on impedance matching, requiring rapid impedance matching to avoid significant reflected power while minimizing the impact on the RF power system during the impedance matching process to achieve optimal output performance. However, current methods for determining impedance matching paths struggle to balance both speed and stability. Therefore, achieving impedance matching faster and minimizing the impact on the RF power system during the impedance matching phase are key considerations. Summary of the Invention

[0003] The present application provides a matching path determination method, a matching path determination device, and an impedance matching device, which can achieve impedance matching more quickly, reduce the impact on the radio frequency power supply system, and achieve better output effects.

[0004] In a first aspect, a method for determining a matching path is provided. The method comprises: establishing an impedance matching coordinate system, and determining the coordinate value of an equivalent impedance point corresponding to the impedance value in the impedance matching coordinate system based on the impedance value of the load. The coordinate value of a target circle center and a target center angle are determined based on at least the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system. Based on the coordinate value of the target circle center, the target center angle, the coordinate value of the equivalent impedance point, and the origin of the impedance matching coordinate system, an impedance matching path is determined as an arc, wherein the center of curvature of the impedance matching path is the target circle center, the center angle of the impedance matching path is the target center angle, and the two endpoints of the impedance matching path are the equivalent impedance point and the origin of the impedance matching coordinate system, respectively.

[0005] In one possible implementation, determining the coordinate value of the target circle center and the target central angle based on at least the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system includes: determining the coordinate value of the target circle center based on the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system; and determining the target central angle based on the coordinate value of the equivalent impedance point, the origin of the impedance matching coordinate system, and the coordinate value of the target circle center.

[0006] In one possible implementation, determining the coordinate value of the target circle center based on the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system includes determining a first equation related to the coordinate value of the target circle center based on the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system. The coordinate value of the target circle center is determined based on at least the first equation.

[0007] In one possible implementation, determining the coordinate value of the target circle center based on at least the first equation includes: determining the coordinate value of the equal resistance point based on the coordinate value of the equivalent impedance point; determining the second equation based on the coordinate value of the equal resistance point; and determining the coordinate value of the target circle center based on the intersection of a line containing the first equation and a line containing the second equation.

[0008] In a possible implementation, when the impedance matching coordinate system is a plane rectangular coordinate system, the coordinate value of the equivalent impedance point is (r, x), and the coordinate value of the target center is (a, b), the first equation related to the coordinate value of the target center is (ra) 2 +(xb) 2 =a 2 +b 2 , and the coordinate value of the equal resistance point is (r / (r+1), 0), the second equation is Γx=r / (r+1), then the coordinate value of the target circle center is (r / (r+1), x / 2+r 2 -r / (2xr+2x)). wherein r and x are obtained according to the impedance value of the load, and Γx is the vertical axis of the impedance matching coordinate system.

[0009] In one possible implementation, determining the coordinate value of the target circle center and the target central angle based on at least the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system includes: obtaining a preset arc length, determining the coordinate value of the target circle center based on the coordinate value of the equivalent impedance point, the origin of the impedance matching coordinate system, and the preset arc length; and determining the target central angle based on the coordinate value of the equivalent impedance point, the origin of the impedance matching coordinate system, and the coordinate value of the target circle center.

[0010] In one possible implementation, determining the coordinates of the target circle center and the target central angle based on at least the coordinates of the equivalent impedance point and the origin of the impedance matching coordinate system includes obtaining a preset central angle and determining the target central angle based on the preset central angle. The coordinates of the target circle center are determined based on the coordinates of the equivalent impedance point, the origin of the impedance matching coordinate system, and the target central angle.

[0011] In one possible implementation, establishing an impedance matching coordinate system and determining, based on the impedance value of the load, the coordinate value of an equivalent impedance point corresponding to the impedance value in the impedance matching coordinate system includes: establishing an impedance matching coordinate system having perpendicular horizontal and vertical axes; determining, based on the resistance value of the load, the horizontal coordinate of the equivalent impedance point corresponding to the resistance value in the impedance matching coordinate system; and determining, based on the reactance value of the load, the vertical coordinate of the equivalent impedance point corresponding to the reactance value in the impedance matching coordinate system.

[0012] In a second aspect, a matching path determination device is further provided, wherein the matching path determination device uses the above-mentioned matching path determination method to determine the impedance matching path. The matching path determination device includes an acquisition unit and a control unit. The acquisition unit is used to obtain the impedance value of the load. The control unit is used to establish an impedance matching coordinate system, determine the coordinate value of the equivalent impedance point based on the impedance value of the load, and determine the coordinate value and target center angle of the target circle center based on at least the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system, and determine, based on the coordinate value of the target circle center and the target center angle, that an arc whose two endpoints are the equivalent impedance point and the origin is the impedance matching path.

[0013] In a third aspect, an impedance matching device is also provided, comprising an impedance matching device and a matching path determining device. The matching path determining device comprises an acquisition unit and a control unit. The acquisition unit is configured to acquire the impedance value of the load. The control unit is configured to establish an impedance matching coordinate system, determine the coordinate value of the equivalent impedance point based on the impedance value of the load, and determine the coordinate value and target center angle of a target circle center based at least on the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system. Furthermore, based on the coordinate value and target center angle of the target circle center, an arc whose two endpoints are the equivalent impedance point and the origin is determined to be the impedance matching path.

[0014] The matching path determination method, matching path determination device and impedance matching equipment of the present application are configured to determine the coordinate value of the target center and the target central angle based on at least the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system, and configure the target center as the center of curvature of the impedance matching path, the target central angle as the central angle of the impedance matching path, the equivalent impedance point and the origin of the impedance matching coordinate system as the two endpoints of the impedance matching path, respectively, so that the impedance matching path of the arc can be determined, and impedance matching is performed according to the impedance matching path of the arc, which can achieve impedance matching faster and reduce the impact on the RF power supply system, while taking into account the speed and stability of impedance matching, and can achieve better output effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.

[0016] Figure 1 Flowchart of a method for determining a matching path in one embodiment of the present application.

[0017] Figure 2 for Figure 1 A sub-flowchart of step S200 in FIG.

[0018] Figure 3 for Figure 2 A sub-flowchart of step S210 in FIG.

[0019] Figure 4 for Figure 3 A sub-flowchart of step S212 in .

[0020] Figure 5 Schematic diagram of a matching path in an embodiment of the present application.

[0021] Figure 6 for Figure 1 Another sub-flowchart of step S200 in .

[0022] Figure 7 for Figure 1 Another sub-flowchart of step S200 in .

[0023] Figure 8 for Figure 1 A sub-flowchart of step S100 in FIG.

[0024] Figure 9 FIG. 1 is a schematic diagram of a matching path determination device in an embodiment of the present application.

[0025] Figure 10 Schematic diagram of an impedance matching device in an embodiment of the present application.

[0026] Explanation of the reference numerals: Γx, horizontal axis, Γr, vertical axis, P, equivalent impedance point, O, origin, Q, target center, A, equal resistance point, 1000, impedance matching device, 10, matching path determination device, 100, acquisition unit, 200, control unit, 20, impedance matching device, RL, load. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0028] In the description of the embodiments of this application, it should be noted that, unless otherwise specified or limited, the terms "connected" and "connection" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; and direct connections or indirect connections through an intermediary. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0029] In the following, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the embodiments of this application, unless otherwise specified, "plurality" means two or more.

[0030] In describing the embodiments of the present application, it should be noted that the terms "first," "second," and the like in the specification and claims of the present application and the accompanying drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or precedence. It should be understood that the terms used in this manner are interchangeable where appropriate, such that the embodiments of the present application described herein can be implemented in an order other than that illustrated or described herein.

[0031] In addition, the terms "include" and "have" and any variations thereof are intended to cover a non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, product, or device.

[0032] See also Figure 1 , Figure 1 FIG. 1 is a flow chart of a method for determining a matching path in an embodiment of the present application. Figure 1 As shown, the present application provides a method for determining a matching path, comprising:

[0033] Step S100: establishing an impedance matching coordinate system, and determining the coordinate value of an equivalent impedance point corresponding to the impedance value in the impedance matching coordinate system according to the impedance value of the load.

[0034] Step S200: determining the coordinate value of the target circle center and the target circle center angle based on at least the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system.

[0035] Step S300: Determine an impedance matching path as an arc based on the coordinate value of the target circle center, the target central angle, the coordinate value of the equivalent impedance point, and the origin of the impedance matching coordinate system, wherein the center of curvature of the impedance matching path is the target circle center, the central angle of the impedance matching path is the target central angle, and the two endpoints of the impedance matching path are the equivalent impedance point and the origin of the impedance matching coordinate system, respectively.

[0036] Therefore, the above-mentioned matching path determination method in the present application is configured to determine the coordinate value of the target center and the target central angle based on at least the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system, and configure the target center as the center of curvature of the impedance matching path, the target central angle as the central angle of the impedance matching path, the equivalent impedance point and the origin of the impedance matching coordinate system are respectively the two endpoints of the impedance matching path, so that the impedance matching path of the arc can be determined, and impedance matching is performed according to the impedance matching path of the arc, which can achieve impedance matching faster and reduce the impact on the RF power supply system, while taking into account the speed and stability of impedance matching, and can achieve better output effect.

[0037] In particular, the impedance matching path of the determined arc may be a poor arc.

[0038] Please also refer to Figure 2 , Figure 2 for Figure 1 A sub-flowchart of step S200 in FIG. Figure 1 、 Figure 2 As shown, step S200: determining the coordinate value of the target circle center and the target circle center angle based on at least the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system, which may specifically include:

[0039] Step S210: Determine the coordinate value of the target circle center according to the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system.

[0040] And, step S220: determining the target center angle according to the coordinate value of the equivalent impedance point, the origin of the impedance matching coordinate system, and the coordinate value of the target center.

[0041] Therefore, the above-mentioned matching path determination method in the present application can first determine the coordinate value of the target circle center based on the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system, and then determine the target circle center angle based on the coordinate value of the target circle center and the equivalent impedance point and the origin on the circle.

[0042] Specifically, in step S210, the coordinate value of the target circle center can be determined based on the distance from the equivalent impedance point and the origin to the target circle center being the radius of the circle. The coordinate value of the target circle center can also be determined based on the perpendicular bisector of the line between the equivalent impedance point and the origin. The coordinate value of the target circle center can also be determined based on other methods such as vectors. The present application is not limited to this, as long as the coordinate value of the target circle center can be determined based on the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system.

[0043] Specifically, in step S220, the target center angle can be determined using trigonometric functions based on the distance between the equivalent impedance point and the origin, and the distance between the equivalent impedance point and the target center. Alternatively, the target center angle can be determined based on the relationship between the arc length of the impedance matching path of the arc and the circumference of the circle. This application is not limited to this, and any method that can determine the target center angle based on the coordinate values of the equivalent impedance point, the origin of the impedance matching coordinate system, and the coordinate values of the target center will suffice.

[0044] Please also refer to Figure 3 , Figure 3 for Figure 2 A sub-flowchart of step S210 in FIG. Figure 2 、 Figure 3 As shown, step S210: determining the coordinate value of the target circle center according to the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system, which may specifically include:

[0045] Step S211: determining a first equation related to the coordinate value of the target circle center according to the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system.

[0046] And, step S212: determining the coordinate value of the target circle center at least according to the first equation.

[0047] Therefore, the above-mentioned matching path determination method in this application can first determine the first equation related to the coordinate value of the target center to obtain the feasible range of the coordinate value of the target center, and then determine a better coordinate value of the target center at least based on the first equation.

[0048] According to the first equation alone, any solution of the first equation can be determined as the coordinate value of the center of the target circle.

[0049] Please also refer to Figure 4 , Figure 4 for Figure 3 A sub-flowchart of step S212 in FIG. Figure 3 、 Figure 4 As shown, step S212: determining the coordinate value of the target circle center according to at least the first equation, which may specifically include:

[0050] Step S213: determining the coordinate value of the equal resistance point according to the coordinate value of the equivalent impedance point.

[0051] Step S214: Determine a second equation according to the coordinate values of the equal resistance points.

[0052] Step S215: Determine the coordinate value of the target circle center according to the intersection point of the straight line where the first equation is located and the straight line where the second equation is located.

[0053] Therefore, the above-mentioned matching path determination method in the present application can use equal resistance points to find the optimal coordinate value of the target circle center, thereby achieving the best impedance matching effect.

[0054] Specifically, before step S214, the method may further include determining the coordinate value of the equal resistance point based on the impedance value of the load. The coordinate value of the equal resistance point is the coordinate value of the center of the equal resistance circle of the Smith chart in the impedance matching coordinate system. The equal resistance circle is also the locus of equal normalized resistance values. The coordinate value of the equal resistance point is related to the impedance value of the load. The coordinate value of the equivalent impedance point is also related to the impedance value of the load. Therefore, the coordinate value of the equal resistance point can be determined based on the impedance value of the load or the coordinate value of the equivalent impedance point.

[0055] See also Figure 5 , Figure 5 FIG. 1 is a schematic diagram of a matching path in an embodiment of the present application. Figure 5 As shown, when the impedance matching coordinate system is a plane rectangular coordinate system, the coordinate value of the equivalent impedance point is (r, x), and the coordinate value of the target center is (a, b), the first equation related to the coordinate value of the target center is (ra) 2 +(xb) 2 =a 2 +b 2 , and the coordinate value of the equal resistance point is (r / (r+1), 0), the second equation is Γx=r / (r+1), then the coordinate value of the target circle center is (r / (r+1), x / 2+r 2 -r / (2xr+2x)). Here, r and x are obtained based on the impedance of the load, and Γx is the vertical axis of the impedance matching coordinate system.

[0056] Therefore, in the above-mentioned method for determining the matching path in the present application, when the impedance matching coordinate system is a plane rectangular coordinate system and the coordinate value of the equivalent impedance point is (r, x), the first equation related to the coordinate value of the target circle center can be determined as (ra): 2 +(xb) 2 =a 2 +b 2, and the coordinate value of the equal resistance point is (r / (r+1), 0), and then the horizontal coordinate of the target circle center is r / (r+1), and the vertical coordinate is x / 2+r 2 -r / (2xr+2x).

[0057] Among them, such as Figure 5 As shown, Γr is the horizontal axis of the impedance matching coordinate system.

[0058] In some embodiments, the impedance matching coordinate system may specifically be a normalized impedance coordinate system in the field of radio frequency technology.

[0059] Please also refer to Figure 6 , Figure 6 for Figure 1 Another sub-flowchart of step S200 in FIG. Figure 1 、 Figure 6 As shown, step S200: determining the coordinate value of the target circle center and the target circle center angle based on at least the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system, may specifically include:

[0060] Step S230: Obtain a preset arc length, and determine the coordinate value of the target circle center according to the coordinate value of the equivalent impedance point, the origin of the impedance matching coordinate system, and the preset arc length.

[0061] Step S240: determining the target center angle according to the coordinate value of the equivalent impedance point, the origin of the impedance matching coordinate system, and the coordinate value of the target center.

[0062] Therefore, the above-mentioned matching path determination method in the present application can control the length of the impedance matching path according to specific needs, that is, control the preset arc length to control the time to complete the impedance matching, and according to the above-mentioned calculation principle, the coordinate value of the target center and the target center angle can be determined in sequence.

[0063] Please also refer to Figure 7 , Figure 7 for Figure 1 Another sub-flowchart of step S200 in FIG. Figure 1 、 Figure 7 As shown, step S200: determining the coordinate value of the target circle center and the target circle center angle based on at least the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system, may further include:

[0064] Step S250: Obtain a preset center angle, and determine a target center angle based on the preset center angle.

[0065] Step S260: determining the coordinate value of the target circle center according to the coordinate value of the equivalent impedance point, the origin of the impedance matching coordinate system, and the target circle center angle.

[0066] Therefore, the method for determining the above-mentioned matching path in the present application can control the curvature of the impedance matching path, that is, control the preset central angle, according to specific needs, so as to control the disturbance of the impedance matching to the RF power supply system, and according to the above-mentioned calculation principle, the target central angle and the coordinate value of the target center can be determined in turn.

[0067] Please also refer to Figure 8 , Figure 8 for Figure 1 A sub-flowchart of step S100 in FIG. Figure 1 、 Figure 8 As shown, step S100: establishing an impedance matching coordinate system, and determining the coordinate value of the equivalent impedance point corresponding to the impedance value in the impedance matching coordinate system according to the impedance value of the load, which may specifically include:

[0068] Step S110: establishing an impedance matching coordinate system having a horizontal axis and a vertical axis that are perpendicular to each other.

[0069] Step S120: determining the abscissa of the equivalent impedance point corresponding to the resistance value in the impedance matching coordinate system according to the resistance value of the load.

[0070] Step S130: determining the ordinate of the equivalent impedance point corresponding to the reactance value in the impedance matching coordinate system according to the reactance value of the load.

[0071] Therefore, the above-mentioned method for determining the matching path in the present application can respectively determine the horizontal coordinate and the vertical coordinate of the equivalent impedance point according to the resistance value and the reactance value of the load.

[0072] In some embodiments, the abscissa of the equivalent impedance point may be the resistance value of the load, and the ordinate of the equivalent impedance point may be the reactance value of the load.

[0073] Among them, step S120 and step S130 can be executed successively or simultaneously, and this application is not limited to this.

[0074] The method for determining the matching path of the present application can, through the above steps, determine the coordinate value of the target center and the target center angle according to specific needs, at least based on the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system, so as to determine the impedance matching path of the arc, and perform impedance matching according to the impedance matching path of the arc, thereby reducing the length of the impedance matching path, achieving impedance matching faster, and adjusting the arc, which can reduce the impact on the RF power supply system, while taking into account the speed and stability of impedance matching, and achieving better output effect.

[0075] See also Figure 9 , Figure 9 FIG. 1 is a schematic diagram of a matching path determination device in an embodiment of the present application. Figure 9As shown, the present application also provides a matching path determination device 10, which uses the matching path determination method in any of the aforementioned embodiments to determine the impedance matching path. The matching path determination device 10 includes an acquisition unit 100 and a control unit 200. The acquisition unit 100 is used to obtain the impedance value of the load RL. The control unit 200 is used to establish an impedance matching coordinate system, determine the coordinate value of the equivalent impedance point according to the impedance value of the load RL, and determine the coordinate value and target center angle of the target circle center based on at least the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system, and determine the arc whose two endpoints are the equivalent impedance point and the origin as the impedance matching path based on the coordinate value and the target center angle of the target circle center.

[0076] The operations performed by the matching path determination apparatus 10 or the control unit 200 correspond to the steps in the matching path determination method in any of the aforementioned embodiments. For further operations that can be performed by the matching path determination apparatus 10 or the control unit 200, please refer to the relevant contents of the matching path determination method in any of the aforementioned embodiments, and will not be repeated here.

[0077] like Figure 9 As shown, the acquisition unit 100 can be used to connect to the load RL to obtain the impedance value of the load RL. The load RL can be used to input radio frequency power. The control unit 200 can be connected to the acquisition unit 100 to receive the impedance value of the load RL.

[0078] Among them, the acquisition unit 100 is mainly used to execute the step of obtaining the impedance value of the load RL in the above-mentioned matching path determination method. The acquisition unit 100 may include an integrated impedance sensor, or may include an impedance acquisition circuit composed of multiple independent sensors such as voltage sensors and current sensors.

[0079] Among them, the control unit 200 is mainly used to execute other specific steps of the above-mentioned matching path determination method. The control unit 200 may include a general-purpose processor such as a central processing unit (CPU), or a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA) or other programmable logic devices, discrete gate logic devices, transistor logic devices and other logic control devices, or a microprocessor such as a micro control unit (MCU).

[0080] The matching path determination method and matching path determination device 10 of the present application, through the above steps and structures, determine the coordinate value of the target center and the target center angle based on at least the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system, thereby being able to determine the impedance matching path of the arc, and perform impedance matching based on the impedance matching path of the arc, thereby reducing the length of the impedance matching path, achieving impedance matching faster, and being able to adjust the arc, thereby reducing the impact on the RF power supply system, while taking into account the speed and stability of impedance matching, and achieving better output effects.

[0081] See also Figure 10 , Figure 10 Schematic diagram of an impedance matching device in an embodiment of the present application. Figure 10 As shown, the present application further provides an impedance matching device 1000 , which includes an impedance matching device 20 and a matching path determining device 10 in any of the aforementioned embodiments.

[0082] Please refer again Figure 9 .like Figure 9 As shown, the matching path determination device 10 includes an acquisition unit 100 and a control unit 200. The acquisition unit 100 is configured to acquire the impedance value of the load RL. The control unit 200 is configured to establish an impedance matching coordinate system, determine the coordinate value of the equivalent impedance point based on the impedance value of the load RL, and determine the coordinate value and target center angle of the target circle center based on at least the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system. Furthermore, based on the coordinate value and target center angle of the target circle center, determine that an arc whose endpoints are the equivalent impedance point and the origin, respectively, is the impedance matching path.

[0083] The more specific structure of the matching path determining device 10 can be found in the relevant content of the matching path determining device 10 in any of the aforementioned embodiments, and will not be repeated here.

[0084] like Figure 10 As shown, the impedance matching device 20 is used to be connected to the load RL, and the matching path determination device 10 is connected to the impedance matching device 20 .

[0085] In some embodiments, the impedance matching device 20 is further used to connect to the RF source to transmit the RF power output by the RF source to the load RL through the impedance matching device 20. The impedance matching device 20 can be used to perform impedance matching between the RF source and the load RL.

[0086] Furthermore, the impedance matching device 20 may include electronic components such as inductors and capacitors, and the type of the impedance matching device 20 may be any one of T-type, π-type, L-type, and τ-type, or a combination of multiple types of T-type, π-type, L-type, and τ-type.

[0087] The matching path determination method, matching path determination device 10, and impedance matching device 1000 of the present application determine the coordinate value of the target center and the target center angle based on at least the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system, thereby determining the impedance matching path of the arc and performing impedance matching based on the impedance matching path of the arc. This reduces the length of the impedance matching path, enables faster impedance matching, and allows for adjustable curvature, thereby reducing the impact on the RF power supply system. At the same time, both the speed and stability of impedance matching are taken into account, thereby achieving better output effects.

[0088] The present application also provides a computer-readable storage medium, in which a computer program is stored. When the computer program runs on a computer or a processor, the method for determining a matching path of any of the aforementioned embodiments is implemented.

[0089] In the multiple embodiments provided in this application, it should be understood that the disclosed methods, devices, and equipment can be implemented in other ways. For example, the device embodiments described above are merely schematic; for example, the division of units is merely a logical function division, and there may be other division methods in actual implementation; for example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0090] Units described as separate components may or may not be physically separate, and components shown as units may or may not be physical units, that is, they may be located in one place or distributed across multiple network units. Some or all of these units may be selected to achieve the purpose of this embodiment according to actual needs.

[0091] In addition, the functional units in various embodiments of the present invention may be integrated into a single processing unit, each unit may be physically included separately, or two or more units may be integrated into a single unit. The aforementioned integrated units may be implemented in the form of hardware or hardware plus software functional units.

[0092] The above-mentioned integrated unit implemented in the form of a software functional unit can be stored in a computer-readable storage medium. The above-mentioned software functional unit is stored in a storage medium and includes a number of instructions for causing a computer device (which can be a personal computer, server, or network device, etc.) to perform some steps of the method of each embodiment of the present invention. The aforementioned storage medium includes: a USB flash drive, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk, or an optical disk, etc., various media that can store program code.

[0093] The above description is only a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by any person skilled in the art within the technical scope disclosed in this application should be included in the scope of protection of this application; the embodiments of this application and the features of the embodiments can be combined with each other unless there is a conflict. Therefore, the scope of protection of this application should be based on the scope of protection of the claims.

Claims

1. A method for determining a matching path, characterized in that: include: Establishing an impedance matching coordinate system, and determining the coordinate value of the equivalent impedance point corresponding to the impedance value in the impedance matching coordinate system according to the impedance value of the load; Determine the coordinate value of the target circle center and the target circle center angle based on at least the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system; According to the coordinate value of the target circle center, the target central angle, the coordinate value of the equivalent impedance point, and the origin of the impedance matching coordinate system, an impedance matching path as an arc is determined, wherein the center of curvature of the impedance matching path is the target circle center, the central angle of the impedance matching path is the target central angle, and the two endpoints of the impedance matching path are the equivalent impedance point and the origin of the impedance matching coordinate system, respectively.

2. The method for determining a matching path according to claim 1, wherein: The step of determining the coordinate value of the target circle center and the target circle center angle based on at least the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system includes: Determine the coordinate value of the target circle center according to the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system; and The target center angle is determined based on the coordinate values of the equivalent impedance point, the origin of the impedance matching coordinate system, and the coordinate values of the target center.

3. The method for determining a matching path according to claim 2, wherein: Determining the coordinate value of the target circle center according to the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system includes: Determining a first equation related to the coordinate value of the target circle center according to the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system; and Based on at least the first equation, the coordinate values of the target circle center are determined.

4. The method for determining a matching path according to claim 3, wherein: Determining the coordinate value of the target center according to at least the first equation includes: According to the coordinate value of the equivalent impedance point, the coordinate value of the equal resistance point is determined; Determine the second equation based on the coordinate values of the equal resistance points; The coordinate value of the target circle center is determined according to the intersection point of the straight line where the first equation is located and the straight line where the second equation is located.

5. The method for determining a matching path according to claim 4, wherein: When the impedance matching coordinate system is a plane rectangular coordinate system, the coordinate value of the equivalent impedance point is (r, x), and the coordinate value of the target circle center is (a, b), the first equation related to the coordinate value of the target circle center is (ra) 2 +(xb) 2 =a 2 +b 2 , and the coordinate value of the equal resistance point is (r / (r+1), 0), the second equation is Γx=r / (r+1), then the coordinate value of the target circle center is (r / (r+1), x / 2+r 2 -r / (2xr+2x)); Wherein, r and x are obtained according to the impedance value of the load, and Γx is the vertical axis of the impedance matching coordinate system.

6. The method for determining a matching path according to claim 1, wherein: The step of determining the coordinate value of the target circle center and the target circle center angle based on at least the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system includes: Obtain the preset arc length, and determine the coordinate value of the target circle center based on the coordinate value of the equivalent impedance point, the origin of the impedance matching coordinate system, and the preset arc length; The target center angle is determined based on the coordinate values of the equivalent impedance point, the origin of the impedance matching coordinate system, and the coordinate values of the target center.

7. The method for determining a matching path according to claim 1, wherein: The step of determining the coordinate value of the target circle center and the target circle center angle based on at least the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system includes: Obtaining a preset center angle, and determining a target center angle based on the preset center angle; The coordinate value of the target circle center is determined according to the coordinate value of the equivalent impedance point, the origin of the impedance matching coordinate system, and the target circle center angle.

8. The method for determining a matching path according to claim 1, wherein: The step of establishing an impedance matching coordinate system and determining the coordinate value of an equivalent impedance point corresponding to the impedance value in the impedance matching coordinate system according to the impedance value of the load includes: Establishing an impedance matching coordinate system with perpendicular horizontal and vertical axes; According to the resistance value of the load, determine the horizontal coordinate of the equivalent impedance point corresponding to the resistance value in the impedance matching coordinate system; According to the reactance value of the load, the ordinate of the equivalent impedance point corresponding to the reactance value in the impedance matching coordinate system is determined.

9. A matching path determination device, characterized in that: The matching path determining device determines the impedance matching path using the matching path determining method according to any one of claims 1 to 8; Wherein, the matching path determining device includes: An acquisition unit, used for acquiring the impedance value of the load; A control unit is used to establish an impedance matching coordinate system, determine the coordinate value of the equivalent impedance point according to the impedance value of the load, and determine the coordinate value and target central angle of the target center according to at least the coordinate value of the equivalent impedance point and the origin of the impedance matching coordinate system, and determine, according to the coordinate value of the target center and the target central angle, that an arc whose two endpoints are the equivalent impedance point and the origin is the impedance matching path.

10. An impedance matching device, characterized in that: It comprises an impedance matching device and the matching path determining device as claimed in claim 9.

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