Load port and control method

Abstract

This loading port is provided with: a mounting table on which a container is mounted; a port plate; a port door; a substrate detection means which is provided on the port door and detects a substrate housed in the container; and a displacement member that displaces the substrate detection member in the advancing and retreating direction. The displacement member displaces the substrate detection member in a direction opposite to the port door during the forward and backward movement of the port door by the forward and backward movement member.

Description

Technical Field

[0001] The present invention relates to a loading port and a control method. Background Art

[0002] Containers such as FOUPs for housing substrates such as semiconductor wafers are known. Such a container is opened and closed at a loading port provided in a substrate transfer device, and the substrate inside is taken out or put in. After opening the door portion of the container, in order to confirm the presence of the substrate inside the container, etc., a sensor is used to detect the substrate inside the container (Patent Documents 1 and 2). The sensor is sometimes referred to as a mapping sensor. The loading port of Patent Document 2 is configured such that the door portion 22 and the mapping sensors m1, m2 move in the horizontal direction D and the vertical direction H. The mapping sensors m1, m2 are disposed at positions where they do not interfere with the frame 21 when the door portion 22 is in the fully closed position (C).

[0003] Prior Art Documents

[0004] Patent Documents

[0005] Patent Document 1: Japanese Patent No. 4246420 Gazette

[0006] Patent Document 2: Japanese Patent No. 6455239 Gazette Summary of the Invention

[0007] Problems to be Solved by the Invention

[0008] The disposition positions of the mapping sensors m1, m2 in Patent Document 2 protrude in a direction away from the housing container more than the door portion (see FIGS. 20 and 22). When the door portion 22 is moved in a direction away from the housing container (horizontal direction D) to the retracted position in order to open the lid portion of the housing container, the mapping sensors m1, m2 also move together with the door portion 22. Extra space is required corresponding to the protruding amounts of the mapping sensors m1, m2.

[0009] An object of the present invention is to provide a loading port that suppresses the protrusion of a sensor for detecting a substrate when the port door is in the retracted position.

[0010] Means for Solving the Problems

[0011] According to the present invention, there is provided a loading port, characterized in that the loading port includes:

[0012] A mounting table for mounting a container that houses a substrate;

[0013] A port plate having an opening through which the substrate can be taken out or put in;

[0014] A port door that opens and closes the opening portion and can hold the door portion of the container;

[0015] A substrate detection member provided on the port door for detecting the substrate housed in the container;

[0016] A lifting member that lifts the port door relative to the opening portion;

[0017] A retracting / extending member that retracts and extends the port door relative to the opening portion in the horizontal direction, i.e., the retracting / extending direction; and

[0018] A displacement member that displaces the substrate detection member in the retracting / extending direction,

[0019] During the retracting / extending operation of the port door by the retracting / extending member, the displacement member displaces the substrate detection member in a direction opposite to that of the port door.

[0020] Advantages of the Invention

[0021] According to the present invention, a loading port can be provided that suppresses the protrusion of the sensor for detecting the substrate when the port door is in the retracted position. Description of the Drawings

[0022] Figure 1 is an external view of a loading port according to an embodiment of the present invention provided in a substrate transfer device.

[0023] Figure 2 is a diagram showing Figure 1 the internal mechanism of the loading port and the substrate transfer device.

[0024] Figure 3 is a top view of the retracting / extending unit.

[0025] Figure 4 is a perspective view of the port door and the mapping unit.

[0026] Figure 5 is an explanatory diagram of the rotation mechanism.

[0027] Figure 6 is Figure 5 a cross-sectional view taken along line A-A of

[0028] Figure 7 is an explanatory diagram of the operation of the mapping unit.

[0029] Figure 8 is Figure 1 an explanatory diagram of the operation of the loading port of

[0030] Figure 9 isFigure 1 Operation explanatory diagram of the loading port

[0031] Figure 10 is Figure 1 Operation explanatory diagram of the loading port

[0032] Figure 11 is Figure 1 Operation explanatory diagram of the loading port

[0033] Figure 12 It is a timing diagram showing the position changes of the port door and the mapping sensor Detailed implementation mode

[0034] Hereinafter, the embodiments will be described in detail with reference to the drawings. In addition, the following embodiments do not limit the invention described in the claims, and all combinations of the features described in the embodiments are not necessary for the invention. Two or more of the features described in the embodiments can also be arbitrarily combined. In addition, the same or similar structures are labeled with the same reference numerals, and repeated descriptions are omitted

[0035] <Outline of the device>

[0036] Figure 1 It is an external view of the loading port 1 according to an embodiment of the present invention, showing the form provided in the substrate transfer device 100 Figure 2 It is a diagram showing the internal structure of the loading port 1 and the substrate transfer device 100, and is a cross-sectional schematic view when the container 200 is placed on the loading port 1. In each figure, the arrows X and Y represent horizontal directions orthogonal to each other, and the arrow Z represents the vertical direction

[0037] The loading port 1 is a device for opening and closing a container 200 such as a FOUP. The container 200 has: a box-shaped container body 201 having an opening 201a for taking out or putting in a circular substrate W such as a semiconductor wafer on the side, and a door portion 202 that is detachably mounted on the opening 201a and closes the opening 201a. The container 200 houses the substrate W. It should be noted that Figure 2 There is a state where the door portion 202 is removed from the container body 201 through the loading port 1, and the substrate transfer robot 110 can reach the substrate W inside the container 200

[0038] The loading port 1 is installed on a substrate transfer device 100 having a substrate transfer robot 110 for transferring the substrate W inside. The substrate transfer device 100 has a frame 102 that houses the substrate transfer robot 110. The loading port 1 is installed on the front wall portion 102a of the frame 102. In Figure 1In the example, two loading ports 1 are installed on the front wall portion 102a. The substrate transfer robot 110 sends and receives the substrate W to and from the container 200 placed on the loading port 1.

[0039] The substrate transfer robot 110 includes: an end effector 111 for holding the substrate W, a multi-joint arm 112 that at least holds the end effector 111 in a retractable manner, and a drive unit 113 for rotating and lifting the multi-joint arm 112. The substrate transfer robot 110 also includes a traveling unit 114 that reciprocates the substrate transfer robot 110 in the Y direction. As Figure 2 shown by the dashed line in the figure, by inserting the end effector 111 of the substrate transfer robot 110 into the interior of the container body 201 with the opening 201a opened on the substrate transfer device 100 side, the substrate W is sent and received.

[0040] The loading port 1 includes: a mounting table 2 for mounting the container 200, a port plate 3, a port door 4, a support portion 5 for supporting the mounting table 2, and a mapping unit 6. The port plate 3 is a plate-shaped wall body extending in the Z direction, closing the opening formed in the front wall portion 102a, and together with the front wall portion 102a, separating the external space on the mounting table 2 side from the transfer space 101 of the substrate W inside the substrate transfer device 100. In terms of the partition wall, the port plate 3 can also be said to be a component constituting a part of the front wall portion 102a. The port plate 3 includes a door portion 202 to be removed and an opening 30 through which the end effector 111 can pass in the X direction.

[0041] The mounting table 2 has a dock plate 20 for mounting the container 200. On the dock plate 20, a plurality of positioning pins (motion pins) for positioning and supporting the container 200, a presence sensor for detecting whether the container 200 is in place, a locking mechanism for locking the container 200 placed on the dock plate 20 to the dock plate 20, etc. are provided. Inside the mounting table 2, a drive mechanism 21 for displacing the dock plate 20 in the X direction is built in.

[0042] The support portion 5 is a rectangular parallelepiped-shaped hollow body. In the support portion 5, a lifting unit 7 for lifting the port door 4 relative to the opening 30 and a retracting / extending unit 8 for retracting / extending the port door 4 relative to the opening 30 in the retracting / extending direction (in this embodiment, the X direction) are provided. In the case of this embodiment, the port door 4 is supported by the retracting / extending unit 8, and the lifting unit 7 lifts the port door 4 by lifting the retracting / extending unit 8.

[0043] In the case of the present embodiment, the lifting unit 7 is a ball screw mechanism. However, it may also be other drive mechanisms. The lifting unit 7 includes a ball screw shaft 71, a slider 72, a motor 73 as a drive source, and a belt drive mechanism 74. The ball screw shaft 71 extends in the Z direction and is rotatably supported by the port plate 3. The ball screw shaft 71 is connected to the belt drive mechanism 74 on the lower end side. The slider 72 has an engaging portion that engages with the rail member 32 and can reciprocate in the Z direction by the guidance of the rail member 32. The rail member 32 extends in the Z direction and is supported by the port plate 3.

[0044] The belt drive mechanism 74 includes: a driven pulley connected to the ball screw shaft 71, a driving pulley connected to the output shaft of the motor 73, and an endless belt wound around these pulleys. The rotational force of the motor 73 is transmitted to the ball screw shaft 71 via the belt drive mechanism 74, and the ball screw shaft 71 rotates. The slider 72 is lifted and lowered by the rotation of the ball screw shaft 71.

[0045] In addition to Figure 2 that, reference is also made to Figure 3 to describe the advancing / retreating unit 8. Figure 3 is a top view of the advancing / retreating unit 8. The advancing / retreating unit 8 is arranged below the mounting table 2 and includes a main body frame 80, a linear guide 81, a pair of moving bodies 82, and a drive mechanism 83. The main body frame 80 includes: a pair of side plates 80a separated in the Y direction, an end plate 80b on the port plate 3 side connecting between the pair of side plates 80a, and a bottom plate 80c connecting between the pair of side plates 80a. The end plate 80b is fixed to the slider 72, and the advancing / retreating unit 8 is lifted and lowered by the lifting and lowering of the slider 72.

[0046] The pair of moving bodies 82 are plate-shaped arm members that extend in the X direction through a pair of slits 31 in the port plate 3. The pair of slits 31 extend in the Z direction. A support portion 41 of the port door 4 is fixed to the X-direction ends of the pair of moving bodies 82. Each moving body 82 is supported by the corresponding side plate 80a via the linear guide 81 and is displaceable in the X direction. The linear guide 81 includes a rail member 81a fixed to the moving body 82 and a plurality of sliders 81b fixed to the side plate 80a. The plurality of sliders 81b engage with the rail member 81a extending in the X direction. The rail member 81a reciprocates freely in the X direction by the guidance of the sliders 81b.

[0047] The drive mechanism 83 is provided on the bottom plate 80c and is a cam mechanism that moves a pair of moving bodies 82 in the X direction. The drive mechanism 83 includes a motor 84 as a drive source, a rotating shaft 85, an arm member 86, a roller 87, and a cam member 88. The rotating shaft 85 is a shaft member extending in the Z direction and is connected to the output shaft of the motor 84 via a transmission mechanism (such as a belt transmission mechanism) not shown, and rotates around the Z axis by the driving force of the motor 84. One end of the arm member 86 is fixed to the rotating shaft 85 and rotates around the rotating shaft 85 as the center of rotation by the rotation of the rotating shaft 85. A roller 87 that is rotatable around the Z axis is supported at the other end of the arm member 86.

[0048] The cam member 88 is an L-shaped member with one end fixed to one of the pair of moving bodies 82, and a cam hole 89 is formed at the other end. The cam hole 89 is an oblong opening. The roller 87 is inserted into the cam hole 89, and the circumferential surface of the roller 87 contacts the inner surface of the cam hole 89. By rotating the motor 84, the arm member 86 rotates, and the roller 87 performs a circular motion around the rotating shaft 85. By bringing the roller 87 into contact with the inner surface of the cam hole 89, the relative position of the roller 87 and the cam hole 89 in the Y direction changes, and the moving body 82 is moved in the X direction. Thereby, the port door 4 moves forward and backward in the X direction.

[0049] In addition to Figure 2 In addition, reference is also made to Figure 4 to describe the port door 4 and the mapping unit 6. Figure 4 is a perspective view of the port door 4 and the mapping unit 6. The port door 4 includes a holding portion 40 that holds the door portion 202 and a supporting portion 41 that supports the holding portion 40. The holding portion 40 is provided with, for example, an adsorption mechanism, whereby the door portion 202 can be adsorbed and held. In addition, an operating mechanism (latch key) for operating the opening and closing of the locking mechanism provided in the door portion 202 is provided in the holding portion 40, whereby the container body 201 and the door portion 202 can be disassembled and installed. The supporting portion 41 includes a main body 41a and a cover member 41b and is a hollow body extending in the Z direction. The main body 41a is a box-shaped member that is open on the side of the substrate conveying device 100 in the X direction (the side opposite to the mounting table 2), and the cover member 41b is detachably provided on the main body 41a so as to cover the opening of the main body 41a. In the present embodiment, the cover member 41b is fixed to the main body 41a by a plurality of bolts.

[0050] The mapping unit 6 is provided on the port door 4 and is a substrate detection mechanism that scans the substrate W in the container body 201 in the Z direction when the port door 4 descends. The mapping unit 6 includes: a pair of mapping sensors 60 that detect the substrate W housed in the container body 201; and a displacement unit 600 that displaces the pair of mapping sensors 60 in the advancing and retreating direction of the port door 4 (in the present embodiment, the X direction).

[0051] In the case of the present embodiment, the pair of mapping sensors 60 are optical sensors, one including a light emitting element and the other including a light receiving element. Figure 4 The optical axis 60a represents the optical axis of the light from the light emitting element toward the light receiving element. During scanning, when the substrate W blocks the optical axis 60a, the detection result of the light receiving element changes. Thereby, the presence / absence and position of the substrate W can be measured.

[0052] The displacement unit 600 includes: a frame 61 that supports the pair of mapping sensors 60; and a rotation mechanism 63 provided on the support portion 41 that rotates the frame 61 in the advancing / retreating direction of the port door 4 (the X direction in the present embodiment).

[0053] The entire frame 61 has a rectangular shape surrounding the holding portion 40 and includes a pair of column portions 61a, a beam portion 61b, and a shaft portion 61c. The beam portion 61b is a rod-shaped member extending in the horizontal direction (the Y direction in the present embodiment) intersecting the advancing / retreating direction of the port door 4 (the X direction in the present embodiment). The pair of mapping sensors 60 are supported on the beam portion 61b so as to be separated in the Y direction. The shaft portion 61c is a shaft member extending in parallel with the beam portion 61b and is the rotation center around which the frame 61 is rotated by the rotation mechanism 63. The pair of column portions 61a are rod-shaped members that are separated from each other in the extending direction of the beam portion 61b (the Y direction in the present embodiment) and extend in the Z direction, respectively. One end side (upper side) of the pair of column portions 61a is connected to the beam portion 61b, and the other end side (lower side) is connected to the shaft portion 61c.

[0054] The rotation mechanism 63 is a mechanism that rotates the frame 61 around the shaft portion 61c. In the present embodiment, it is disposed in the internal space of the support portion 41 formed by the main body 41a and the cover member 41b. By covering the rotation mechanism 63 with the cover member 41b, it is possible to suppress the outflow of dust, etc. of the rotation mechanism 63 to the outside. Figure 5 It is a view showing the rotation mechanism 63 inside the support portion 41 and is a view showing the state where the cover member 41b is removed. Figure 6 is Figure 5 A - A line cross-sectional view of

[0055] The main body 41a of the support portion 41 is provided with a pair of side portions 41a1 and 41a2. The pair of side portions 41a1 and 41a2 are plate-shaped members that are separated from each other in the horizontal direction (Y direction in this embodiment) and extend along the Z direction respectively. In the case of this embodiment, holes for inserting the shaft portion 61c are formed in the pair of side portions 41a1 and 41a2, and bearing portions 41c for supporting the shaft portion 61c to be rotatable about the Y axis are formed in the pair of side portions 41a1 and 41a2. That is, the shaft portion 61c is supported by the bearing portions 41c integrally formed with the pair of side portions 41a1 and 41a2 to be rotatable about the Y axis.

[0056] The rotation mechanism 63 includes a motor 64 as a driving source, a cam member 66, and an arm member 67. The rotation mechanism 63 further includes a position detection unit 69. The motor 64 is fixed to the main body 41a via a bracket 65. The output shaft 64a of the motor 64 extends in the Y direction and rotates about the Y axis. The cam member 66 has a cylindrical shape and is an eccentric cam in which the output shaft 64a is fixed at a position offset from its central axis. The cam member 66 rotates by the drive of the motor 64. The rotation mechanism 63 is supported by the support portion 41 by fixing the motor 64 to the main body 41a via the bracket 65. The support portion 41 forms a space for arranging the rotation mechanism 63 through the main body 41a, the pair of side portions 41a1 and 41a2, and the cover member 41b.

[0057] It should be noted that the member that supports the shaft portion 61c to be rotatable is not limited to the bearing portions 41c integrally formed with the pair of side portions 41a1 and 41a2, and can also be provided as a member different from the pair of side portions 41a1 and 41a2 in the space for arranging the rotation mechanism 63.

[0058] The arm member 67 is a member that has a shaft portion 61c fixed to one end side (upper end side) thereof and extends in the radial direction of the shaft portion 61c. A cam hole 67a is formed in the other end side (lower end side) of the arm member 67. The cam hole 67a is an opening portion having an oval cross-section, and the circumferential surface of the cam member 66 contacts its inner surface. When the cam member 66 rotates by the drive of the motor 64, the relative position between the cam member 66 and the cam hole 67a changes, and the shaft portion 61c rotates. Thereby, the frame 61 rotates about the shaft portion 61c as a rotation center.

[0059] In the case of this embodiment, as an example, the frame 61 rotates to three positions. Figure 7 It is an explanatory diagram thereof. At the relative position of the mapping sensor 60 with respect to the X direction of the port door 4, the position P1 is the position closest to the conveying space 101 side, the position P3 is the position closest to the external space side (the position on the container 200 side), and the position P2 is the position between the position P1 and the position P3.

[0060] Position P2 is a position that serves as a reference in determining the tilt angles of position P1 and position P3, and the tilt angle of the support portion 61a in the X direction can be regarded as 0 degrees. That is, the support portion 61a at position P2 becomes the starting line for determining the tilt angles of position P1 and position P3. In the present embodiment, position P2 is a standby position where the support portion 61a is in a vertical posture pointing in the Z direction and its tilt angle is 0 degrees. The mapping sensor 60 is located above the holding portion 40 of the port door 4.

[0061] Position P3 is a scanning position where the support portion 61a is in a tilted posture tilted toward the outer space side (container 200 side) from position P2 and its tilt angle is +α degrees. The positive and negative of the tilt angle are positive on the outer space side and negative on the conveying space 101 side. One end side (upper end side) of the support portion 61a is located on the outer space side (container 200 side), and the mapping sensor 60 is located at a position closer to the outer space side (container 200 side) than the holding portion 40 of the port door 4.

[0062] Position P1 is a retracted position where the support portion 61a is in a tilted posture tilted toward the conveying space 101 side from position P2 and its tilt angle is -β degrees. One end side (upper end side) of the support portion 61a is located on the conveying space 101 side, and the mapping sensor 60 is located at a position closer to the conveying space 101 side than the holding portion 40 of the port door 4. In the case of the present embodiment, as an example, there is a relationship of α > β.

[0063] Refer to again Figure 5 and Figure 6 , the position of the frame 61 is detected by the position detection unit 69. The position detection unit 69 and the rotation mechanism 63 are built in the support portion 41 together. The position detection unit 69 of the present embodiment includes a plurality of optical sensors 691 to 693 arranged in the X direction. The optical sensors 691 to 693 are optical interrupters. A detection piece 68 is fixed to the other end side (lower end side) of the arm member 67. According to the rotation of the arm member 67, that is, the rotation of the frame 61, the position of the detection piece 68 in the X direction changes. The optical sensors 691 to 693 arranged in the X direction detect the detection piece 68 at different positions in the X direction. Therefore, the position of the frame 61 can be determined based on the detection result of the detection piece 68. In the case of the present embodiment, the three positions P1 to P3 of the frame 61 illustrated are detected. Therefore, three optical sensors 691 to 693 are provided. It should be noted that the structure of the position detection unit 69 is an example, and the number, arrangement, or type of sensors can be appropriately designed. Figure 7 The three positions P1 to P3 of the frame 61 as illustrated. Therefore, three optical sensors 691 to 693 are provided. It should be noted that the structure of the position detection unit 69 is an example, and the number, arrangement, or type of sensors can be appropriately designed.

[0064] Refer to Figure 2, a control unit 10 is provided at the loading port 1. The control unit 10 is an electronic circuit that controls the loading port 1. The control unit 10 includes, for example, a processing unit represented by a CPU, storage units such as a RAM and a ROM, an input / output interface between an external device and the processing unit, and a communication interface that communicates with a computer such as a host computer and peripheral devices (such as a substrate transfer robot 110) via a communication line. The control unit 10, for example, acquires the detection results of various sensors and controls various drive sources. The various sensors include, for example, a mapping sensor 60, optical sensors 691 to 693, a presence sensor for the docking plate 20, sensors provided in the lifting unit 7, sensors provided in the advancing / retreating unit 8, and the like. The various drive sources include a motor 64, a motor 73, a motor 84, a drive source for the drive mechanism 21, a drive source for the holding unit 40, and the like.

[0065] <Control Example>

[0066] A control example of the loading port 1 based on the control unit 10 will be described. Figures 8 to 11 An example of the operation of the loading port 1 controlled by the control unit 10 is shown, particularly an example of the control of the advancing / retreating operation of the port door 4 and the displacement operation of the mapping sensor 60 in a series of operations from the feeding of the container 200, the opening of the container 200, the detection of the substrate W, to the closing of the container 200. Figure 12 It represents Figures 8 to 11 a timing chart of the position changes of the port door 4 and the mapping sensor 60 in the series of operations shown.

[0067] In Figure 12 , the positions P1 to P3 of the mapping sensor 60 are the Figure 7 positions P1 to P3 shown. The positions Pf and Pb of the port door 4 represent the positions of the port door 4 in the X direction. The position Pf is the forward position on the container 200 side, and the position Pb is the backward position on the conveying space 101 side. The positions Pu, Ps, Pe, and Pd of the port door 4 represent the positions of the port door 4 in the Z direction. The position Pu is the loading / unloading position where the holding unit 40 is at the same height as the container 200 and the opening 30, and is the upper limit position of the port door 4. The position Pd is the standby position where the holding unit 40 is at a position lower than the container 200 and the opening 30, and is the lower limit position of the port door 4. The position Ps is the detection start position where the detection of the substrate W starts using the mapping sensor 60, which is lower than the loading / unloading position Pu and higher than the standby position Pd. The position Pe is the detection end position where the detection of the substrate W using the mapping sensor 60 ends, which is lower than the detection start position Ps and higher than the standby position Pd.

[0068] Refer to Figure 8。The state ST1 represents the stage before the container 200 is placed on the placement table 200. The docking plate 20 is located away from the port plate 3. The position of the port door 4 is the forward position Pf at the loading / unloading position Pu. The opening 30 is closed by the holding portion 40. The position of the mapping sensor 60 is the retracted position P1. At the retracted position P1, the mapping sensor 60 faces the port plate 3 above the opening 30. By positioning the mapping sensor 60 at the retracted position P1, interference between the mapping sensor 60 and the port plate 3 can be avoided.

[0069] The state ST2 represents the stage where the container 200 is placed on the docking plate 20 of the placement table 200. The position of the port door 4 and the position of the mapping sensor 60 are the same as in the state ST1. The state ST3 represents the stage where the docking plate 20 advances relative to the port plate 3 and the door portion 202 of the container 200 is connected to the holding portion 40 of the port door 4. The position of the port door 4 and the position of the mapping sensor 60 are the same as in the state ST1. Through the holding portion 40, the door portion 202 is held from the conveying space 101 side, and the locking of the door portion 202 relative to the container 200 is released.

[0070] Refer to Figure 9 and Figure 12 。The state ST4 represents the stage where the door portion 202 is separated from the container body 201 of the container 200 and the container 200 is opened. By the advancing / retreating unit 8, the port door 4 retreats from the forward position Pf to the retracted position Pb. In the retreating operation of the port door 4, through the rotation mechanism 63, the mapping sensor 60 is displaced in the opposite direction and advances from the retracted position P1 to the standby position P2. By the retreat of the port door 4, the port door 4 and the mapping sensor 60 move toward the conveying space 101 side. However, by advancing the mapping sensor 60 from the retracted position P1 to the standby position P2, the amount of entry of the mapping sensor 60 into the conveying space 101 can be reduced, and a larger moving space for the substrate conveying robot 110 can be ensured. Therefore, the protrusion of the mapping sensor 60 and the frame 61 when the port door 4 is in the retracted position can be suppressed, and the influence of the mapping unit 6 on the conveying space 101 can be reduced. In addition, in the retreating operation of the holding portion 4, by advancing the mapping sensor 60 from the retracted position P1 to the standby position P2, the amount of movement for displacing the mapping sensor 60 to the scanning position P3, which will be described later, becomes smaller. Compared with the case where the mapping sensor 60 is displaced from the retracted position P1 to the scanning position P3 after the retreating operation of the holding portion 4 is completed, the operation time for displacing the mapping sensor 60 to the scanning position P3 is shortened. Therefore, the cycle time for mapping can be shortened.

[0071] State ST5 represents the stage where the port door 4 is lowered from the loading / unloading position Pu to the detection start position Ps by the lifting unit 7. During the lowering process, the mapping sensor 60 is maintained at the standby position P2. When the port door 4 is at the inspection start position Ps, the position of the mapping sensor 60 is below the height of the opening 30 (more specifically, the height of the upper end of the opening 30) in the vertical direction. State ST6 represents the stage where the mapping sensor 60 is displaced from the standby position P2 to the scanning position P3 by the rotation mechanism. The mapping sensor 60 enters the container 200 (container body 201) from the opening 30. At this time, the optical axis 60a( Figure 4 ) is positioned inside the container 200 at a position where it can detect the substrate W housed in the container 200.

[0072] Refer to Figure 10 and Figure 12 . State ST7 represents the stage where the port door 4 is lowered from the detection start position Ps to the detection end position Pe by the lifting unit 7. During the lowering process, the substrate W is detected from the conveyance space 101 side by the mapping sensor 60, and the detection result and the detection position are stored in the storage unit of the control unit 10. State ST8 represents the stage where the mapping sensor 60 is displaced from the scanning position P3 to the standby position P2 by the rotation mechanism 63. By returning the mapping sensor 60 from the scanning position P3 to the standby position P2, interference between the container body 201, the edge of the opening 30, and the mapping sensor 60 can be avoided. State ST9 represents the stage where the port door 4 is lowered from the detection end position Pe to the standby position Pd by the lifting unit 7. The position of the mapping sensor 60 is the standby position P2. After that, the substrate W is taken out by the substrate conveyance robot 110, the substrate W is processed by a processing device not shown, and the processed substrate W is housed in the container body 201.

[0073] Refer to Figure 11 and Figure 12 . Figure 11 Represents the action of closing the container 200 by installing the door portion 202 on the container body 201, and the positions of the port door 4 and the mapping sensor 60 start to move from the Figure 10 position in state ST9.

[0074] The state ST10 represents the stage where the port door 4 is lifted from the standby position Pd to the loading / unloading position Pu by the lifting unit 7. During the lifting process, the mapping sensor 60 is maintained at the standby position P2. The state ST11 represents the stage where the door part 202 of the container 200 is installed on the container body 201 to close the container 200. By the advancing / retreating unit 8, the port door 4 advances from the retracted position Pb to the advanced position Pf. During the advancing operation of the port door 4, the mapping sensor 60 is displaced in the opposite direction by the rotation mechanism 63, and retreats from the standby position P2 to the retracted position P1. By the advancement of the port door 4, the port door 4 and the mapping sensor 60 move toward the outer space side (the container 200 side), but by retreating the mapping sensor 60 from the standby position P2 to the retracted position P1, it is possible to prevent the mapping sensor 60 from interfering with the port plate 3 above the opening 30.

[0075] After that, by the holding part 40, the door part 202 is locked relative to the container body 201, and in addition, the holding of the door part 202 is released. Through the above operations, a series of actions are completed.

[0076] Thus, in the present embodiment, in the advancing / retreating operation of the port door 4 by the advancing / retreating unit 8, the mapping sensor 60 is displaced in the X direction in the opposite direction to the port door 4. Therefore, it is possible to reduce the amount of entry of the mapping sensor 60 into the conveyance space 101 and prevent the mapping sensor 60 from interfering with the port plate 3. Therefore, it is possible to provide a loading port 1 that has little influence on the conveyance space 101 of the substrate conveyance device 100 and has improved protection performance of the mapping sensor 60.

[0077] In addition, in the present embodiment, the displacement unit 600 that displaces the pair of mapping sensors 60 in the advancing / retreating direction is provided in the support part 41 that supports the holding part 40 of the port door 4. By providing the displacement unit 600 in the support part 41, it is possible to suppress the enlargement of the loading port 1. And by arranging the rotation mechanism 63 in the internal space of the support part 41, it is possible to miniaturize the displacement unit 600 and make the occupied area of the mapping unit 6 space-saving. The lifting unit 7 lifts the mapping unit 6 together with the port door 4, but by miniaturizing the displacement unit 600 (especially suppressing the downward protrusion of the port door 4, etc.), the amount of movement of the slider 72 required for opening and closing the container 200 becomes smaller. Therefore, it is possible to miniaturize the lifting unit 7.

[0078] The embodiments of the invention have been described above, but the present invention is not limited to the above embodiments, and various modifications and changes can be made within the scope of the gist of the invention.

Claims

1. A loading port, characterized in that: The loading port has: a mounting table, the mounting table mounting a container, the container accommodating a substrate; a port plate having an opening portion for taking out or putting in the substrate; a port door that opens and closes the opening and is capable of holding a door portion of the container; a substrate detection member, the substrate detection member being disposed on the port door and detecting the substrate accommodated in the container; a lifting member configured to lift the port door relative to the opening; an advancing and retracting member configured to advance and retract the port door relative to the opening in a horizontal direction, i.e., an advancing and retracting direction; as well as a displacement member that displaces the substrate detection member in the forward and backward directions, The displacement member displaces the substrate detection member in a direction opposite to the port door during the forward and backward movement of the port door by the forward and backward movement member.

2. The load port according to claim 1, wherein: The port plate separates the external space on the mounting table side from the substrate conveying space. The port door holds the door portion of the container from the conveying space side, The substrate detection means detects the substrate accommodated in the container from the conveying space side.

3. The loading port according to claim 2, wherein: When the door portion is separated from the container, the advancing and retracting member retracts the port door from the advanced position on the external space side to the retracted position on the transport space side. When the door portion is mounted on the container, the advancing and retracting member advances the port door from the retracted position to the advanced position. In the forward movement of the port door from the retracted position to the forward position, the displacement member displaces the substrate detection member to a first position, During the retreating movement of the port door from the forward position to the retreated position, the displacement member displaces the substrate detection member to a second position. In the relative position of the substrate detection member with respect to the port door, the second position is closer to the external space than the first position.

4. The load port according to claim 3, wherein: When the substrate detection member is located at a height of the opening, the displacement member displaces the substrate detection member to a third position closer to the external space than the second position.

5. The load port according to claim 4, wherein: The third position is a position where the substrate detection member enters the opening.

6. The load port according to claim 3, wherein: The substrate detection member is arranged at a position higher than the port door, The first position and the second position are positions where the substrate detection member and the port plate face each other above the opening.

7. The load port of claim 4, wherein: The port door has: a holding portion that holds the door portion; and a supporting portion that supports the holding portion, The lifting member causes the support portion to move up and down. The advancing and retreating member causes the supporting portion to advance and retreat. The displacement member has: a frame, the frame supporting the substrate detection component; a rotating mechanism provided on the supporting portion and configured to rotate the frame in the forward and backward directions; and A position detecting member detects a position of the frame.

8. The load port of claim 7, wherein: The framework has: a beam portion extending in a horizontal direction intersecting the forward and backward direction; a shaft portion extending in the horizontal direction and inserted through the support portion; as well as a pair of support portions, the pair of support portions being separated from each other in the extending direction of the beam portion, one end side of the support portions being connected to the beam portion and the other end side being connected to the shaft portion, The substrate detection member is supported by the beam portion, The rotating mechanism rotates the frame in the forward and backward directions with the shaft as the rotation center. At the first position, the pair of support columns are in a first inclined posture in which the one end side is located on the conveying space side. At the third position, the pair of support columns are in a second inclined posture in which the pair of support columns are inclined so that the one end sides are located on the external space side.

9. The load port of claim 8, wherein: At the second position, the pair of support columns are in a vertical posture.

10. The load port of claim 8, wherein: The rotating mechanism comprises: driving source; a cam member rotated by the drive source; and an arm member fixed to the shaft portion and extending radially along the shaft portion; The arm member is formed with an opening having an inner surface that contacts the cam member. The arm member rotates about the shaft portion as a rotation center due to the rotation of the cam member.

11. The load port of claim 10, wherein: The loading port includes a detection piece provided on the arm member and detected by the position detection member. The position detecting means includes a plurality of sensors arranged to detect the detection piece at different positions.

12. The loadport of claim 1, wherein: The lifting member has a first driving source, The advancing and retreating member has a second driving source, The displacement member has a third driving source, The load port includes a control unit for controlling the first drive source, the second drive source, and the third drive source. The control member controls the forward and backward movement of the port door and the displacement movement of the substrate detection member.

13. A loading port, characterized in that: The loading port has: a mounting table, the mounting table mounting a container, the container accommodating a substrate; a port plate having an opening portion for taking out or putting in the substrate; a port door that opens and closes the opening and is capable of holding a door portion of the container; a substrate detection member, the substrate detection member being disposed on the port door and detecting the substrate accommodated in the container; a lifting member configured to lift the port door relative to the opening; an advancing and retracting member that advances and retracts the port door in a horizontal direction, that is, an advancing and retracting direction, relative to the opening; and a displacement member that displaces the substrate detection member in the forward and backward directions, The port door has: a holding portion that holds the door portion; and a supporting portion that supports the holding portion, The advancing and retreating member includes a movable body that supports the supporting portion and moves in the advancing and retreating direction. The displacement member is provided on the support portion.

14. The load port of claim 13, wherein: The advancing and retreating member is arranged below the mounting platform. The displacement member has: a frame supporting the substrate detection member; and A rotating mechanism is provided for rotating the frame in the forward and backward directions.

15. The loadport of claim 14, wherein: The support portion includes: a box-shaped main body, the box-shaped main body being open on a side opposite to the mounting table; and a cover member covering the opening of the main body, The rotating mechanism is arranged in an internal space of the support portion formed by the main body and the cover member.

16. The loadport of claim 14, wherein: The framework has: a beam portion extending in a horizontal direction intersecting the forward and backward directions, and supporting the substrate detection member; a shaft portion extending in the horizontal direction and inserted through the support portion; as well as a pair of support portions, the pair of support portions being separated from each other in the extending direction of the beam portion, one end side of the support portions being connected to the beam portion and the other end side being connected to the shaft portion, The rotating mechanism comprises: driving source; a cam member rotated by the drive source; and an arm member fixed to the shaft portion and extending radially along the shaft portion; The arm member is formed with an opening having an inner surface that contacts the cam member. The arm member rotates about the shaft portion as a rotation center due to the rotation of the cam member.

17. A control method for a load port, wherein the load port comprises: a mounting table, the mounting table mounting a container, the container accommodating a substrate; a port plate having an opening portion for taking out or putting in the substrate; a port door that opens and closes the opening and is capable of holding a door portion of the container; and a substrate detection member, the substrate detection member being provided at the port door and detecting the substrate accommodated in the container, The load port control method is characterized by comprising: a lifting step of lifting and lowering the port door relative to the opening; an advancing and retreating step in which the port door is advanced and retreated in a horizontal direction, that is, an advancing and retreating direction, relative to the opening; and a displacement step in which the substrate detection member is displaced in the forward and backward directions; In the displacement step, the substrate detection member is displaced in a direction opposite to the port door during the forward and backward movement of the port door in the forward and backward movement step.

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