Anti-explosion pressure relief furnace cover for single crystal furnace and single crystal furnace

Abstract

The invention provides an explosion-proof pressure relief furnace cover for a single crystal furnace, which comprises a furnace cover body mounted on a lower furnace chamber of the single crystal furnace and an explosion-proof pressure relief device arranged on the furnace cover body, the explosion-proof pressure relief device comprises a pressure relief cylinder and an auxiliary sealing mechanism, one end of the pressure relief cylinder is hermetically fixed on the outer side of the furnace cover body, and the other end of the pressure relief cylinder is open; the open end of the pressure relief cylinder is communicated with the inner side of the furnace cover body, the auxiliary sealing mechanism is movably arranged on the pressure relief cylinder so as to seal the pressure relief cylinder, and when abnormal water leakage occurs in the single crystal furnace, the pressure in the furnace is instantly and sharply increased, and the auxiliary sealing mechanism is impacted by high pressure in the single crystal furnace, the auxiliary sealing mechanism can be separated from the pressure relief cylinder so as to seal the pressure relief cylinder. And the pressure relief cylinder can be completely opened, so that the pressure of the single crystal furnace is relieved in time, the explosion phenomenon of the furnace body is reduced, and a guarantee is provided for safe production.

Description

Technical Field

[0001] The present invention relates to the technical field of single crystal furnaces, and in particular to an explosion-proof and pressure-relieving furnace cover for a single crystal furnace and the single crystal furnace. Background Art

[0002] In the field of single crystal silicon production, the single crystal furnace is the core equipment used for single crystal silicon production. Its crystal pulling process requires maintaining a high temperature environment (usually above 1400°C), and the cooling water system of the single crystal furnace is key to ensuring the stable operation of the single crystal furnace. During the operation of the single crystal furnace, if the cooling water system fails and stops operating, the single crystal furnace will continue to be in a high temperature state. High temperature will cause the mechanical properties of the furnace structure, piping and other components to deteriorate, causing thermal deformation and embrittlement of metal materials, resulting in structural damage, affecting the normal use and life of the equipment. If key components such as the water cooling jacket malfunction and leak, cooling water enters the high-temperature furnace. The water absorbs a large amount of heat in a very short time and quickly vaporizes. The rapidly expanding water vapor causes the pressure in the furnace to surge instantly. When the pressure exceeds the tolerance limit of the furnace, it will cause the furnace to explode, causing not only damage to the equipment, but also serious consequences such as endangering the lives of operators and the surrounding environment, posing a major safety hazard. Summary of the Invention

[0003] In view of this, it is necessary to provide an explosion-proof pressure relief furnace cover for a single crystal furnace, which can timely relieve the pressure in the furnace when the pressure in the single crystal furnace surges.

[0004] It is also necessary to provide a single crystal furnace.

[0005] The technical solution adopted by the present invention to solve its technical problem is: A explosion-proof pressure relief furnace cover for a single crystal furnace comprises a furnace cover body mounted on a lower furnace chamber of the single crystal furnace and an explosion-proof pressure relief device arranged on the furnace cover body, the explosion-proof pressure relief device comprising a pressure relief cylinder and an auxiliary sealing mechanism, one end of the pressure relief cylinder being sealed and fixed on the outside of the furnace cover body, and the other end being open, the open end of the pressure relief cylinder being in communication with the inner side of the furnace cover body, the auxiliary sealing mechanism being movably arranged on the pressure relief cylinder to seal the pressure relief cylinder, and when subjected to high pressure shock in the single crystal furnace, the auxiliary sealing mechanism can be detached from the pressure relief cylinder, allowing the pressure relief cylinder to be completely open to relieve the pressure of the single crystal furnace.

[0006] Preferably, the auxiliary sealing mechanism includes a sealing cover, a connecting arm, a fixing seat and a pulling rod, the fixing seat is fixedly arranged on the outer side wall of the pressure relief cylinder in a transverse direction, a support is arranged at the end of the fixing seat away from the pressure relief cylinder, one end of the connecting arm is pinned to the support, and the other end of the connecting arm is a free end, the sealing cover is pinned to the free end of the connecting arm, the free end of the connecting arm can freely rotate longitudinally around the support, and the sealing cover can freely rotate longitudinally around the free end of the connecting arm so that the sealing cover can turn to the pressure relief cylinder and can be buckled on the pressure relief cylinder, or turned to the outside of the pressure relief cylinder to keep it away from the pressure relief cylinder, an elastic clamping mechanism is arranged at the end of the fixing seat close to the pressure relief cylinder, one end of the pulling rod is pinned to the connecting arm The middle part is pinned, and the other end is a free end. A stop head matching the elastic clamping mechanism is provided at the free end of the pulling rod. When the sealing cover is buckled on the pressure relief cylinder, the stop head can be correspondingly inserted into the elastic clamping mechanism, and the stop head is clamped by the elastic clamping mechanism to pull and fix the connecting arm through the pulling rod. The connecting arm is used to apply pressure to the sealing cover so that the sealing cover is tightly buckled on the pressure relief cylinder to seal the open port of the pressure relief cylinder. When the sealing cover is subjected to the high-pressure impact force in the single crystal furnace, the reverse force generated by the sealing cover on the connecting arm can pull the pulling rod in the reverse direction, thereby causing the elastic clamping mechanism to deform after being subjected to the force and release the stop head, so that the sealing cover can be detached from the pressure relief cylinder.

[0007] Preferably, the elastic clamping mechanism includes two elastic columns, and a receiving groove is provided on the upper end surface of the fixed seat at one end close to the pressure relief cylinder. The roller surfaces of the two elastic columns are arranged horizontally in the receiving groove opposite to each other, and a clamping channel is formed between the roller surfaces of the two elastic columns. The clamping channel is toward the direction of the pulling rod, and the diameter of the end of the stop head is larger than the width of the clamping channel. After the stop head is inserted into the clamping channel, the two elastic columns can clamp the stop head under the action of their own elastic deformation. When the reverse pulling force applied to the pulling rod is greater than the clamping force of the two elastic columns, the two elastic columns adaptively deform to release the stop head.

[0008] Preferably, the two elastic columns are close to each other and can rotate freely relative to each other. Grooves are respectively provided on the roller surfaces of the two elastic columns along their circumferential directions. The grooves of the two elastic columns face each other to form the above-mentioned clamping channel.

[0009] Preferably, an annular boss supporting a sealing cover is provided along the circumferential direction of the inner side wall of the pressure relief cylinder, and a first sealing ring is provided on the end surface of the annular boss facing the open end of the pressure relief cylinder. The sealing cover can be buckled in parallel on the annular boss and tightly fitted with the first sealing ring to seal the open port of the pressure relief cylinder.

[0010] Preferably, a second sealing ring is further provided on the end surface of the sealing cover in contact with the annular boss. After the sealing cover is buckled onto the annular boss, the second sealing ring is tightly fitted with the end surface of the annular boss or is tightly fitted opposite to the first sealing ring.

[0011] Preferably, a third sealing ring is provided on the inner side wall of the pressure relief cylinder along its circumferential direction. The third sealing ring is close to the upper end surface of the boss and matches the outer edge of the sealing cover.

[0012] Preferably, the open end of the pressure relief cylinder faces upward or upward side of the furnace cover body.

[0013] Preferably, there is at least one group of explosion-proof pressure relief mechanisms.

[0014] A single crystal furnace comprises the above-mentioned explosion-proof and pressure-relieving furnace cover for the single crystal furnace.

[0015] It can be seen from the above technical solution that the explosion-proof pressure relief furnace cover for the single crystal furnace provided in the present application includes a furnace cover body installed on the lower furnace chamber of the single crystal furnace and an explosion-proof pressure relief device arranged on the furnace cover body. The explosion-proof pressure relief device includes a pressure relief cylinder and an auxiliary sealing mechanism. One end of the pressure relief cylinder is sealed and fixed on the outside of the furnace cover body, and the other end is open. The open end of the pressure relief cylinder is interconnected with the inner side of the furnace cover body. The auxiliary sealing mechanism can be movably arranged on the pressure relief cylinder to seal the pressure relief cylinder. The beneficial effect is that when abnormal water leakage occurs in the single crystal furnace and the pressure in the furnace surges instantly, the auxiliary sealing mechanism can be detached from the pressure relief cylinder when it is subjected to the high pressure shock in the single crystal furnace, so that the pressure relief cylinder can be completely opened, and the single crystal furnace can be depressurized in time, reducing the explosion phenomenon of the furnace body, and providing a guarantee for safe production. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a side structural schematic diagram of the invention.

[0017] Figure 2 It is a schematic diagram of the top structure of the invention.

[0018] Figure 3 It is a schematic diagram of the three-dimensional structure of the invention.

[0019] Figure 4 for Figure 2 Schematic diagram of the cross-sectional structure along the middle edge AA.

[0020] Figure 5 It is a side structural schematic diagram of the invention in the pressure relief state.

[0021] Figure 6 It is a schematic diagram of the three-dimensional structure of the invention in the pressure relief state.

[0022] Figure 7 This is a schematic diagram of the structure of the invention installed on a single crystal furnace.

[0023] In the figure: the furnace cover body 10, the explosion-proof pressure relief device 20, the pressure relief cylinder 21, the annular boss 211, the first sealing ring 212, the third sealing ring 213, the auxiliary sealing mechanism 22, the sealing cover 221, the second sealing ring 2221, the connecting arm 222, the fixing seat 223, the pulling rod 224, the stop head 225, the support 226, the receiving groove 228, the auxiliary arm 229, the elastic clamping mechanism 227, the elastic column 2271, the groove 2272, and the lower furnace chamber 30. DETAILED DESCRIPTION

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following is a brief introduction to the drawings required for use in the embodiments. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0025] Please see Figures 1 to 3 An embodiment of the present invention provides an explosion-proof and pressure-relief furnace cover for a single crystal furnace, comprising a furnace cover body 10 installed on a lower furnace chamber 30 of the single crystal furnace and an explosion-proof and pressure-relief device 20 provided on the furnace cover body 10, wherein the explosion-proof and pressure-relief device 20 comprises a pressure-relief cylinder 21 and an auxiliary sealing mechanism 22, wherein one end of the pressure-relief cylinder 21 is sealed and fixed on the outside of the furnace cover body 10, and the other end thereof is open, and the open end of the pressure-relief cylinder 21 is communicated with the inner side of the furnace cover body 10, and the auxiliary sealing mechanism 22 is movably provided on the pressure-relief cylinder 21 to seal the pressure-relief cylinder 21, and when the auxiliary sealing mechanism 22 is subjected to a high pressure shock in the single crystal furnace, it can be detached from the pressure-relief cylinder 21, so that the pressure-relief cylinder 21 can be completely opened to relieve the pressure of the single crystal furnace.

[0026] Please see Figures 3 to 6Specifically, a pressure relief port is provided on the furnace cover body 10. The pressure relief cylinder 21 is a straight cylindrical structure with two ends through. The size of the pressure relief cylinder 21 matches that of the pressure relief port. One end of the pressure relief cylinder 21 is sealed and fixed to the outside of the furnace cover body 10 by welding or flange connection. The auxiliary sealing mechanism 22 includes a sealing cover 221, a connecting arm 222, a fixing seat 223 and a pulling rod 224. The fixing seat 223 is fixedly arranged on the outer wall of the pressure relief cylinder 21 in the horizontal direction. A support 226 is provided at the end of the fixing seat 223 away from the pressure relief cylinder 21. One end of the connecting arm 222 is pinned to the support 226, and the other end of the connecting arm 222 is pinned to the support 226. The free end of the sealing cover 221 is pinned to the free end of the connecting arm 222. The free end of the connecting arm 222 can rotate freely longitudinally around the support 226. The sealing cover 221 can rotate freely longitudinally around the free end of the connecting arm 222. By turning the free end of the connecting arm 222 toward the pressure relief cylinder 21, the sealing cover 221 can be correspondingly buckled on the pressure relief cylinder 21. By turning the free end of the connecting arm 222 toward the outside of the pressure relief cylinder 21, the sealing cover 221 can be kept away from the pressure relief cylinder 21. An elastic clamping mechanism 227 is provided at one end of the fixing seat 223 close to the pressure relief cylinder 21. One end of the pulling rod 224 is connected to the middle of the connecting arm 222. The stopper 225 is matched with the elastic clamping mechanism 227 at the free end of the pulling rod 224. The length of the pulling rod 224 is adapted to the height of the connecting arm 222. When the sealing cover 221 is buckled on the pressure relief cylinder 21, the stopper 225 can be correspondingly inserted into the elastic clamping mechanism 227. The stopper 225 is clamped by the elastic clamping mechanism 227 to pull and fix the connecting arm 222 through the pulling rod 224. The connecting arm 222 is used to apply pressure to the sealing cover 221 so that the sealing cover 221 is tightly buckled on the pressure relief cylinder 21 and is tightly connected to the open port of the pressure relief cylinder 21, which can ensure Normal furnace pressure in the single crystal furnace; once the pressure in the single crystal furnace surges instantly, when the sealing cover 221 is subjected to the high-pressure impact force in the single crystal furnace, the reverse thrust formed by the sealing cover 221 on the connecting arm 222 can pull the pulling rod 224 in the opposite direction. When the high-pressure impact force in the single crystal furnace is greater than the clamping force of the elastic clamping mechanism 227, the elastic clamping mechanism 227 can be deformed after being subjected to the force and release the stop head 225, thereby allowing the sealing cover 221 to be detached from the pressure relief cylinder 21, allowing the pressure relief cylinder 21 to be completely opened, and the single crystal furnace can be depressurized in time through the pressure relief cylinder 21, reducing the explosion of the furnace body and providing a guarantee for safe production.

[0027] During the normal production process of the single crystal furnace, the elastic clamping mechanism 227 clamps the pulling rod 224, and the connecting arm 222 can exert pressure on the sealing cover 221 under the pulling action of the pulling rod 224, so that the sealing cover 221 is pressed tightly on the pressure relief cylinder 21, and is combined with the pressure-sealed cover. When the pressure in the single crystal furnace surges suddenly, the sealing cover 221 is separated from the pressure relief cylinder 21 under the impact of the furnace pressure. The connecting arm 222 can pull the sealing cover 221 to prevent the sealing cover 221 from flying off and causing damage to surrounding equipment or staff. In addition, after use, the sealing cover 221 can be manually restored to a sealed state for reuse.

[0028] Please see Figures 3 to 6 The elastic clamping mechanism 227 includes two elastic columns 2271. A receiving groove 228 is provided on the upper end surface of the fixing seat 223 near the pressure relief cylinder 21. The roller surfaces of the two elastic columns 2271 are arranged in the receiving groove 228 opposite to each other. A clamping channel is formed between the roller surfaces of the two elastic columns 2271. The clamping channel is oriented toward the pulling rod 224. The stop head 225 is a hammer-shaped structure. The diameter of the end of the stop head 225 is larger than the diameter of the pulling rod 224 and larger than the width of the clamping channel, and can pass through the corresponding When the end of the stop head 225 passes through the clamping channel, the two elastic columns 2271 adaptively produce a contraction deformation after being squeezed by the stop head 225, allowing the end of the stop head 225 to pass through. After the end of the stop head 225 passes through the clamping channel, the two elastic columns 2271 adaptively restore their shape to clamp and stop the end of the stop head 225. When the reverse pulling force exerted on the pulling rod 224 is greater than the clamping force of the two elastic columns 2271, the two elastic columns 2271 adaptively produce a deformation to release the stop head 225.

[0029] Please see Figure 6 In this embodiment, the two elastic columns 2271 are made of rubber. During installation, the two elastic columns 2271 can be close to each other and can rotate freely relative to each other. Grooves 2272 are respectively opened on the roller surfaces of the two elastic columns 2271 along their circumferential directions. The grooves 2272 of the two elastic columns 2271 face each other to form the above-mentioned clamping channel. When the end of the stop head 225 passes through the clamping channel, the two elastic columns 2271 are squeezed by the stop head 225 and adaptively produce contraction deformation and adaptive rotation, so that the end of the stop head 225 can smoothly pass through the clamping channel. Since the width of the clamping channel formed between the two elastic columns 2271, the elastic force of the elastic column 2271 and the diameter of the end of the stop head 225 will affect the clamping force between the two, therefore, in the specific implementation, the width of the clamping channel formed between the two elastic columns 2271 should be adapted to the stop head 225, and it should be ensured that when the pulling rod 224 is subjected to a pulling force of less than 2.5 kg, the stop head 225 will not be pulled out of the clamping channel, thereby ensuring the pulling force of the pulling rod 224 on the connecting arm 222 to prevent the sealing cover 221 from loosening.

[0030] Please continue to see Figure 3 and Figure 6 In a preferred embodiment, the sealing cover 221 is embedded in the pressure relief cylinder 21. Specifically, an annular boss 211 is provided along the circumference of the inner wall of the pressure relief cylinder 21 to support the sealing cover 221. The diameter of the sealing cover 221 is smaller than the inner diameter of the pressure relief cylinder 21 and larger than the diameter of the annular boss 211. The sealing cover 221 is placed in the pressure relief cylinder 21 and fastened parallel to the annular boss 211. A first sealing ring 212 is provided in an annular manner on the end surface where the annular boss 211 contacts the sealing cover 221. The sealing cover 221 and the annular boss 211 are in airtight contact with each other to seal the open end of the pressure relief cylinder 21.

[0031] In order to improve the airtightness, a second sealing ring 2221 is also annularly arranged on the end face of the sealing cover 221 that contacts the annular boss 211. After the sealing cover 221 is buckled on the annular boss 211, the second sealing ring 2221 is tightly fitted with the end face of the annular boss 211 or is tightly fitted opposite to the first sealing ring 212.

[0032] Furthermore, a third sealing ring 213 is annularly arranged on the inner wall of the pressure relief cylinder 21 along its circumferential direction. The third sealing ring 213 is close to the upper end face of the boss and matches the outer edge of the sealing cover 221. When the sealing cover 221 is buckled on the annular boss 211, the third sealing ring 213 is in airtight contact with the outer edge of the sealing cover 221, which can further improve the airtightness between the sealing cover 221 and the pressure relief cylinder 21.

[0033] Please see Figure 5 and Figure 6 In order to improve the flexibility of the sealing cover 221, facilitate the sealing cover 221 to be buckled in the pressure relief cylinder 21, and be able to smoothly detach from the pressure relief cylinder 21, a secondary arm 229 is further provided between the connecting arm 222 and the sealing cover 221. The two ends of the secondary arm 229 are pinned to the free ends of the sealing cover 221 and the connecting arm 222 respectively. The length of the secondary arm 229 is smaller than that of the connecting arm 222, and the secondary arm 229 and the sealing cover 221 can both swing freely toward the support 226.

[0034] In the above embodiment, the open end of the pressure relief cylinder 21 is preferably facing the empty area above or above the side of the furnace cover body 10, and the inner diameter of the pressure relief cylinder 21 should be no less than 30 cm. When the pressure relief cylinder 21 releases pressure, the pressure relief cylinder 21 can drain the high-pressure gas in the single crystal furnace, so that the high-pressure gas is sprayed toward the top or above the side of the furnace cover body 10, so as to reduce the damage caused by the high-pressure gas to the equipment or personnel around the single crystal furnace during the pressure relief process.

[0035] Please continue to see Figure 1 and Figure 5 In another preferred embodiment, the explosion-proof pressure relief mechanism is provided as at least one group, which can be symmetrically or spaced apart on the furnace cover body 10 .

[0036] Please see Figure 7 The invention also provides a single crystal furnace, on the lower furnace chamber 30 of which the above-mentioned explosion-proof and pressure-relieving furnace cover for the single crystal furnace is installed.

[0037] During the use of the explosion-proof pressure relief furnace cover for the single crystal furnace, when abnormal water leakage occurs in the single crystal furnace and the pressure in the furnace surges instantly, the sealing cover 221 can be quickly detached from the pressure relief cylinder 21 when subjected to the high pressure impact in the single crystal furnace, so that the pressure relief cylinder 21 can be fully opened, the single crystal furnace can be depressurized in time, the explosion of the furnace body can be reduced, and a guarantee for safe production can be provided.

[0038] The above disclosure is only a preferred embodiment of the present invention, and it is certainly not intended to limit the scope of the present invention. A person skilled in the art can understand that all or part of the processes of the above embodiment and equivalent changes made in accordance with the claims of the present invention are still within the scope of the invention.

Claims

1. An explosion-proof and pressure-relieving furnace cover for a single crystal furnace, characterized in that: It includes a furnace cover body installed on the lower furnace chamber of the single crystal furnace and an explosion-proof pressure relief device arranged on the furnace cover body. The explosion-proof pressure relief device includes a pressure relief cylinder and an auxiliary sealing mechanism. One end of the pressure relief cylinder is sealed and fixed on the outside of the furnace cover body, and the other end is open. The open end of the pressure relief cylinder is interconnected with the inner side of the furnace cover body. The auxiliary sealing mechanism can be movably arranged on the pressure relief cylinder to seal the pressure relief cylinder, and when subjected to high pressure impact in the single crystal furnace, the auxiliary sealing mechanism can be detached from the pressure relief cylinder, allowing the pressure relief cylinder to be completely open to relieve pressure on the single crystal furnace.

2. The explosion-proof and pressure-relieving furnace cover for a single crystal furnace according to claim 1, characterized in that: The auxiliary sealing mechanism includes a sealing cover, a connecting arm, a fixing seat and a pulling rod, the fixing seat is fixedly arranged on the outer side wall of the pressure relief cylinder in a transverse direction, a support is arranged at the end of the fixing seat away from the pressure relief cylinder, one end of the connecting arm is pinned to the support, and the other end of the connecting arm is a free end, the sealing cover is pinned to the free end of the connecting arm, the free end of the connecting arm can rotate freely longitudinally around the support, and the sealing cover can rotate freely longitudinally around the free end of the connecting arm so that the sealing cover can turn to the pressure relief cylinder and can be buckled on the pressure relief cylinder, or turned to the outside of the pressure relief cylinder to keep it away from the pressure relief cylinder, an elastic clamping mechanism is arranged at the end of the fixing seat close to the pressure relief cylinder, one end of the pulling rod is pinned to the middle of the connecting arm The cam is connected to the pressure relief cylinder by a pin, and the other end is a free end. A stop head matching the elastic clamping mechanism is provided at the free end of the pulling rod. When the sealing cover is buckled on the pressure relief cylinder, the stop head can be correspondingly inserted into the elastic clamping mechanism, and the stop head is clamped by the elastic clamping mechanism to pull and fix the connecting arm through the pulling rod. The connecting arm is used to apply pressure to the sealing cover so that the sealing cover is tightly buckled on the pressure relief cylinder to seal the open port of the pressure relief cylinder. When the sealing cover is subjected to the high-pressure impact force in the single crystal furnace, the reverse force generated by the sealing cover on the connecting arm can pull the pulling rod in the reverse direction, thereby causing the elastic clamping mechanism to deform after being subjected to the force and release the stop head, so that the sealing cover can be detached from the pressure relief cylinder.

3. The explosion-proof and pressure-relieving furnace cover for a single crystal furnace according to claim 2, characterized in that: The elastic clamping mechanism includes two elastic columns, and a receiving groove is provided on the upper end surface of the fixed seat near the end of the pressure relief cylinder. The roller surfaces of the two elastic columns are arranged horizontally in the receiving groove opposite to each other, and a clamping channel is formed between the roller surfaces of the two elastic columns. The clamping channel is toward the pulling rod, and the diameter of the end of the stop head is greater than the width of the clamping channel. After the stop head is inserted into the clamping channel, the two elastic columns can clamp the stop head under the action of their own elastic deformation. When the reverse pulling force applied to the pulling rod is greater than the clamping force of the two elastic columns, the two elastic columns adaptively deform to release the stop head.

4. The explosion-proof and pressure-relieving furnace cover for a single crystal furnace according to claim 3, characterized in that: The two elastic columns are close to each other and can rotate freely relative to each other. Grooves are respectively opened on the roller surfaces of the two elastic columns along their circumferential directions. The grooves of the two elastic columns face each other to form the above-mentioned clamping channel.

5. The explosion-proof and pressure-relieving furnace cover for a single crystal furnace according to claim 4, characterized in that: An annular boss supporting a sealing cover is provided along the circumferential direction of the inner side wall of the pressure relief cylinder. A first sealing ring is provided on the end surface of the annular boss facing the open end of the pressure relief cylinder. The sealing cover can be buckled in parallel on the annular boss and tightly fitted with the first sealing ring to seal the open port of the pressure relief cylinder.

6. The explosion-proof and pressure-relieving furnace cover for a single crystal furnace according to claim 5, characterized in that: A second sealing ring is further provided on the end surface of the sealing cover in contact with the annular boss. After the sealing cover is buckled onto the annular boss, the second sealing ring is tightly fitted with the end surface of the annular boss or is tightly fitted opposite to the first sealing ring.

7. The explosion-proof and pressure-relieving furnace cover for a single crystal furnace according to claim 6, characterized in that: A third sealing ring is provided on the inner side wall of the pressure relief cylinder along its circumferential direction. The third sealing ring is close to the upper end surface of the boss and matches the outer edge of the sealing cover.

8. The explosion-proof and pressure-relieving furnace cover for a single crystal furnace according to claim 7, characterized in that: The open end of the pressure relief cylinder faces upward or upward side of the furnace cover body.

9. The explosion-proof and pressure-relieving furnace cover according to claim 8, characterized in that: There is at least one group of explosion-proof pressure relief mechanisms.

10. A single crystal furnace, characterized in that: It comprises the explosion-proof and pressure-relieving furnace cover for a single crystal furnace as described in any one of claims 1 to 9.

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