Decoupling structure and decoupling method of six-dimensional force sensor

Abstract

The application discloses a decoupling structure and method of a six-dimensional force sensor, which comprises a middle loading platform in an elastic body, a plurality of connecting arms are arranged at equal intervals between the elastic body and the middle loading platform, a strain gauge assembly is arranged on the connecting arm, the strain gauge assembly is used for independent measurement of six-dimensional force, the connecting arm comprises a solid beam, a force arm and a flexible beam in sequence in the direction of the elastic body, the strain gauge assembly comprises a uniaxial strain gauge, a bending normal strain gauge and a torsional shear strain gauge, the uniaxial strain gauge is arranged on the solid beam, and the bending normal strain gauge and the torsional shear strain gauge are both arranged on the force arm; the uniaxial strain gauge is used for measuring Fz / Mz, the bending normal strain gauge is used for measuring Fx / Fy, and the torsional shear strain gauge is used for measuring Mx / My. Through the connecting arm and the strain gauge assembly, mechanical decoupling is realized, and the measurement error is effectively reduced, so that the application can effectively reduce the measurement error.

Description

Technical Field

[0001] This invention relates to the field of six-dimensional force sensor technology, and in particular to a decoupling structure and decoupling method for a six-dimensional force sensor. Background Technology

[0002] In robot joint control, six-dimensional force sensors are used to accurately measure the motion force and its variation law of each joint in space, so as to achieve precise control of the force in each dimension. Traditional six-dimensional force sensors generally arrange bending strain gauges on a multi-cantilever beam centered on a circular axis to measure the force in different directions. However, due to the lack of symmetrical self-compensation function, when a standard force source in one dimension is applied, the bending stress in other dimensions will change significantly, and the change can reach 10% to 80%. This cross-dimensional interference effect is called "coupling interference".

[0003] Currently, in order to solve coupling interference, traditional methods usually rely on complex calibration processes and complex algorithms, using microprocessors to store and process data to restore the true force in each dimension. However, traditional methods are not only cumbersome, but also have high errors in practical applications, thus affecting measurement accuracy.

[0004] Therefore, a decoupling structure and decoupling method for a six-dimensional force sensor are proposed to solve the problem of high measurement error mentioned above. Summary of the Invention

[0005] The purpose of this invention is to provide a decoupling structure and decoupling method for a six-dimensional force sensor, thereby solving the problem of high error in error measurement.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] A decoupling structure for a six-dimensional force sensor includes an intermediate loading stage located within an elastic body. A plurality of connecting arms are equally spaced between the elastic body and the intermediate loading stage. Strain gauge assemblies are mounted on the connecting arms for independent measurement of six-dimensional forces. Each connecting arm, facing the elastic body, sequentially includes a solid beam, a force-bearing arm, and a flexible beam. The strain gauge assembly includes a uniaxial strain gauge, a bending normal strain gauge, and a torsional shear strain gauge. The uniaxial strain gauge is mounted on the solid beam, while the bending normal strain gauge and the torsional shear strain gauge are both mounted on the force-bearing arm. The uniaxial strain gauge measures Fz / Mz, the bending normal strain gauge measures Fx / Fy, and the torsional shear strain gauge measures Mx / My.

[0008] The number of uniaxial strain gauges is the same as the number of solid beams. Several of the uniaxial strain gauges are divided into two groups and symmetrically arranged on two opposite solid beams. The two adjacent uniaxial strain gauges are symmetrically distributed vertically on the two adjacent solid beams. The uniaxial strain gauges are arranged in a U-shape on the solid beams, and the side of the uniaxial strain gauge is used to measure Mz, and the front is used to measure Fz.

[0009] The cross-section of the force arm is U-shaped, and parallel beams are formed on the side of the force arm. The bending normal strain gauge and the torsional shear strain gauge are respectively arranged on the side of the two parallel beams near the inner wall of the elastic body, and a number of bending normal strain gauges and a number of torsional shear strain gauges are alternately distributed.

[0010] A connecting groove is formed in the elastic body corresponding to the flexible beam. The two ends of the flexible beam are respectively connected to the inner sidewall of the connecting groove, and a reserved space is formed between the side of the flexible beam away from the intermediate loading platform and the inner sidewall of the connecting groove.

[0011] A decoupling method for a six-dimensional force sensor, applied to the decoupling structure described above, the decoupling method comprising the following steps:

[0012] Step S1: After setting the six-dimensional force sensor at the designated position, apply a force to the six-dimensional force sensor;

[0013] Step S2: The strain gauge assembly in the six-dimensional force sensor independently measures the six-dimensional force;

[0014] Step S3: Establish a six-dimensional force decoupling matrix, and decouple the six-dimensional forces measured in step S2 using the six-dimensional force decoupling matrix.

[0015] Step S2 specifically includes:

[0016] Step S21: The force is applied to the solid beam, and the uniaxial strain gauge measures Fz / Mz acting on the solid beam.

[0017] Step S22: The force is applied to the parallel beam, and the bending normal strain gauge measures Fx / Fy acting on the parallel beam;

[0018] Step S23: The force is applied to the parallel beam, and the bending normal strain gauge measures Mx / My acting on the parallel beam.

[0019] Fz is calculated according to the following formula:

[0020] ;

[0021] In the formula: kz is the calibration coefficient of Fz; Sa is the output signal of the uniaxial strain gauge, where Sa1, Sa2, Sa3, and Sa4 are the four sets of output signals of the uniaxial strain gauge;

[0022] Mz is calculated according to the following formula:

[0023] ;

[0024] In the formula: kmz is the calibration coefficient of Mz.

[0025] The Fx / Fy is calculated according to the following formula:

[0026] ;

[0027] ;

[0028] In the formula: kx is the calibration coefficient of Fx; Sb is the output signal of the bending normal strain gauge, where Sb1, Sb2, Sb3, and Sb4 are the four sets of output signals of the bending normal strain gauge; ky is the calibration coefficient of Fy.

[0029] The Mx / My ratio is calculated using the following formula:

[0030] ;

[0031] ;

[0032] In the formula: kmx is the calibration coefficient of Mx; St is the output signal of the torsional shear strain gauge, where St1, St2, St3, and St4 are the four sets of output signals of the torsional shear strain gauge; kmy is the calibration coefficient of My.

[0033] The six-dimensional force is decoupled according to the following calculation formula:

[0034] .

[0035] Compared with the prior art, the present invention has the following beneficial effects:

[0036] 1. This invention discloses a decoupling structure and method for a six-dimensional force sensor. Through the connection arm and strain gauge assembly, mechanical decoupling is achieved, effectively reducing measurement errors. When measuring Fz / Mz, the cooperation between the solid beam and the uniaxial strain gauge allows the interference signals of Fx, Fy, Mx, and My to cancel each other out, reducing errors. At the same time, when measuring Fx, Fy, Mx, and My, the cooperation between the parallel beam, the bending normal strain gauge, and the torsional shear strain gauge enables independent measurement of Fx, Fy, Mx, and My, avoiding signal superposition. Furthermore, mechanical isolation reduces signal crosstalk, significantly improving measurement accuracy. Therefore, this invention can effectively reduce measurement errors.

[0037] 2. The present invention provides a decoupling structure and decoupling method for a six-dimensional force sensor. The flexible beam and the reserved space enable dynamic absorption and compensation of stress in non-target directions. When Fz interferes with Mx, the flexible beam preferentially undergoes elastic deformation, which consumes stray stress energy and reduces the interference signal transmitted to the parallel beam. Combined with real-time calibration coefficient correction, the error is further reduced. Attached Figure Description

[0038] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0039] The structures, proportions, sizes, etc., shown in the accompanying drawings of this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the conditions under which the present invention can be implemented. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size, without affecting the effects and objectives that the present invention can produce, should still fall within the scope of the technical content disclosed in the present invention.

[0040] Figure 1 This is a front view structural diagram of the present invention;

[0041] Figure 2 This is a schematic diagram of the rear view structure of the present invention;

[0042] Figure 3 This is a top view of the connecting arm in this invention.

[0043] Figure 4 This is a flowchart of the decoupling method in this invention.

[0044] Illustrations: 1. Elastomer; 11. Connecting groove; 2. Intermediate loading platform; 3. Connecting arm; 31. Solid beam; 32. Force arm; 33. Flexible beam; 34. Parallel beam; 4. Strain gauge assembly; 41. Uniaxial strain gauge; 42. Bending normal strain gauge; 43. Torsional shear strain gauge. Detailed Implementation

[0045] To make the objectives, features, and advantages of this invention more apparent and understandable, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described below are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0046] In the description of this invention, it should be understood that the terms "upper," "lower," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. It should be noted that when a component is considered to be "connected" to another component, it can be directly connected to the other component or there may be a component positioned centrally in the connection.

[0047] Example 1:

[0048] Please see Figure 1-3 The decoupling structure of a six-dimensional force sensor in this embodiment includes an intermediate loading stage 2 located within an elastic body 1. Several connecting arms 3 are equally spaced between the elastic body 1 and the intermediate loading stage 2. Strain gauge assemblies 4 are mounted on the connecting arms 3. The strain gauge assemblies 4 are used to independently measure the six-dimensional force. The connecting arms 3, facing the elastic body 1, sequentially include a solid beam 31, a force-bearing arm 32, and a flexible beam 33. The strain gauge assembly 4 includes a uniaxial strain gauge 41, a bending normal strain gauge 42, and a torsional shear strain gauge 43. The uniaxial strain gauge 41 is mounted on the solid beam 31, and the bending normal strain gauge 42 and the torsional shear strain gauge 43 are both mounted on the force-bearing arm 32. The uniaxial strain gauge 41 is used to measure Fz / Mz, the bending normal strain gauge 42 is used to measure Fx / Fy, and the torsional shear strain gauge 43 is used to measure Mx / My.

[0049] Specifically, such as Figure 1 As shown, the number of connecting arms 3 is four; in another specific embodiment, the number of connecting arms 3 is eight.

[0050] In application, when using a six-dimensional force sensor to measure the force, the force is first applied to the intermediate loading stage 2, and then the intermediate loading stage 2 transmits the force to the connecting arm 3, and the strain gauge assembly 4 on the connecting arm 3 measures the six-dimensional force of the force.

[0051] Understandably, the uniaxial strain gauge 41 is used to measure Fz / Mz, that is, to measure the force Fz and torque Mz in the z-axis direction; the bending normal strain gauge 42 is used to measure Fx / Fy, that is, to measure the force Fx in the x-axis direction and the force Fy in the y-axis direction; and the torsional shear strain gauge 43 is used to measure Mx / My, that is, to measure the torque Mx in the x-axis direction and the torque My in the y-axis direction.

[0052] It is understood that the core structure of a six-dimensional force sensor typically includes a precisely designed elastic body and multiple strain gauges. When an external force or torque is applied to the sensor, the elastic body 1 undergoes a slight deformation. This deformation is transmitted to the strain gauges attached to the elastic body 1, causing a change in the resistance value of the strain gauges. Through a Wheatstone bridge circuit, these resistance changes are converted into electrical signals. The calibration coefficients are obtained by linear regression or polynomial fitting of the historical electrical signals and historical forces / torques. The corresponding force and torque can be obtained by matching the corresponding calibration coefficients with the corresponding electrical signals, thereby realizing the measurement of force / torque. The above description is of the process of measuring force / torque with a six-dimensional force sensor, which should be well known to those skilled in the art. The specific process will not be described in this embodiment.

[0053] It should be noted that the solid beam 31 is used to transfer Fz and Mz, and the solid beam 31 has high rigidity to ensure that Fz / Mz is transferred in a concentrated manner and avoids lateral force interference. The force arm 32 is used to optimize the strain distribution and realize the spatial isolation of bending and shear strain, that is, the spatial isolation of force and moment. In addition, the flexible beam 33 can also dynamically compensate for stray stress during the measurement process and improve the measurement stability.

[0054] It should be emphasized that the connecting arm 3, which consists of a solid beam 31, a force-bearing arm 32, and a flexible beam 33, allows forces / torques in different directions to be transmitted along independent paths, thereby reducing cross-coupling and improving measurement accuracy. Through the segmented structure of the connecting arm 3, and with the different placement positions of the uniaxial strain gauge 41, the bending normal strain gauge 42, and the torsional shear strain gauge 43, error reduction is achieved.

[0055] Furthermore, the number of uniaxial strain gauges 41 is the same as the number of solid beams 31. Several uniaxial strain gauges 41 are divided into two groups and symmetrically arranged on two opposite solid beams 31, and two adjacent uniaxial strain gauges 41 are symmetrically distributed vertically on two adjacent solid beams 31. The uniaxial strain gauges 41 are arranged in a U-shape on the solid beams 31, and the side of the uniaxial strain gauge 41 is used to measure Mz, and the front is used to measure Fz.

[0056] In application, when the force Fz acts on the intermediate loading platform 2, the four solid beams 31 will be compressed or stretched synchronously. After the solid beams 31 deform, the corresponding uniaxial strain gauges 41 will output a signal in the same direction after measuring the Fz acting on the solid beams 31. When the force Mz acts on the intermediate loading platform 2, the adjacent solid beams 31 will undergo reverse shear deformation, and the uniaxial strain gauges 41 will output a differential signal. After obtaining the same-direction signal and the differential signal output by the uniaxial strain gauges 41, decoupling will be performed.

[0057] It should be noted that, as Figures 2-3 As shown, the coupling of Fx, Fy, Mx, and My to Fz / Mz cancels each other out due to the symmetrical distribution of the solid beam 31, thus reducing the residual error.

[0058] It should also be noted that the shear deformation of the solid beam 31 can directly reflect Fz / Mz, avoiding interference from other directions. At the same time, the differential synthesis of the symmetrically arranged uniaxial strain gauges 41 further eliminates lateral coupling and improves measurement accuracy. In addition, due to its high stiffness and vertical layout, the shear strain of the solid beam 31 is concentrated on the upper and lower surfaces when subjected to Fz / Mz. The symmetrically arranged uniaxial strain gauges 41 can simultaneously capture the maximum strain area, amplify the effective signal, and the symmetrical distribution of the uniaxial strain gauges 41 provides signal redundancy. If one uniaxial strain gauge 41 fails due to local damage, the remaining uniaxial strain gauges 41 can still obtain Fz / Mz, thereby improving the robustness of the six-dimensional force sensor.

[0059] In addition, the symmetrically arranged uniaxial strain gauges 41 are located on the same plane and are in the same ambient temperature. Their temperature drift signals can be canceled out by differential calculation, reducing temperature drift error. At the same time, two adjacent uniaxial strain gauges 41 distributed vertically can effectively extract torque signals by differential calculation, thereby reducing Mz measurement error.

[0060] It should also be emphasized that when Fz or Mz is applied, the solid beam 31 mainly undergoes shear deformation, and the upper and lower surfaces generate the maximum shear strain. The uniaxial strain gauge 41 is placed on the solid beam to capture a high signal-to-noise ratio signal, so as to avoid the influence of Fx on Mz, which would cause signal mixing and thus reduce residual error.

[0061] Furthermore, the cross-sectional shape of the force arm 32 is U-shaped, and parallel beams 34 are formed on the side of the force arm 32. Bending normal strain gauges 42 and torsional shear strain gauges 43 are respectively arranged on the side of the two parallel beams 34 near the inner wall of the elastic body 1, and a number of bending normal strain gauges 42 and a number of torsional shear strain gauges 43 are alternately distributed.

[0062] In application, when the force Fx / Fy acts on the intermediate loading platform 2, it will cause the parallel beam 34 to bend and deform. After the parallel beam 34 bends and deforms, the corresponding bending normal strain gauge 42 will output a signal after measuring the Fx / Fy acting on the parallel beam 34 and then decouple. When the force Mx / My acts on the intermediate loading platform 2, it will cause the parallel beam 34 to undergo shear and torsional deformation. After the parallel beam 34 undergoes shear and torsional deformation, the corresponding torsional shear strain gauge 43 will output a signal after measuring the Mx / My acting on the parallel beam 34 and then decouple.

[0063] It should be noted that the spatial isolation formed by the bending normal strain gauge 42 and the torsional shear strain gauge 43 enables independent measurement of Fx / Fy and Mx / My, further reducing the error.

[0064] It should also be noted that parallel beam 34, as an extension of the U-shaped section of the load arm 32, further concentrates bending and shear strain to a specific region, reducing strain diffusion. The moment of inertia of the U-shaped section is significantly higher in the X and Y axes than in other directions, such as... Figure 3 As shown, the parallel beam 34 has higher bending stiffness and can effectively resist deformation in non-target directions, such as deformation along the Z-axis. Under the action of Fx / Fy, the bending deformation of the parallel beam 34 is concentrated in the X-axis and Y-axis directions, avoiding interference in the Z-axis direction. At the same time, the high-stiffness section prevents displacement in the Z-axis direction caused by Mx / My, reducing cross-coupling. In addition, as an extension of the U-shaped section of the force arm 32, the parallel beam 34 concentrates bending and shear strain in a specific area, improving the signal-to-noise ratio.

[0065] It is important to emphasize that the alternating arrangement of bending normal strain gauge 42 and torsional shear strain gauge 43 avoids the simultaneous exposure to bending and shear strain in the same area, preventing signal superposition and avoiding the mixing of measured Fx with Mx, which would increase errors. Furthermore, the placement of bending normal strain gauge 42 and torsional shear strain gauge 43 on the side of the parallel beam 34 near the inner wall of the elastic body 1 improves sensitivity, ensuring accurate measurement of the strain amplitude. In addition, the sensitive direction of bending normal strain gauge 42 is perpendicular to that of torsional shear strain gauge 43, further reducing signal crosstalk. Moreover, bending normal strain gauge 42 only responds to Fx / Fy, and torsional shear strain gauge 43 only responds to Mx / My, effectively simplifying subsequent signal separation steps and improving work efficiency.

[0066] Furthermore, a connecting groove 11 is formed in the elastic body 1 corresponding to the flexible beam 33. Both ends of the flexible beam 33 are connected to the inner sidewall of the connecting groove 11, and a reserved space is formed between the side of the flexible beam 33 away from the intermediate loading platform 2 and the inner sidewall of the connecting groove 11.

[0067] It should be noted that when a non-target force is applied, such as when Fz interferes with Mx, the flexible beam 33 can preferentially deform through the reserved space to absorb stray stress, thereby reducing the transmitted interference signal.

[0068] It should be emphasized that, due to its low elastic modulus, the flexible beam 33 preferentially undergoes elastic deformation within the reserved space, such as bending or torsion, absorbing most of the stray stress. Furthermore, due to its low stiffness, the flexible beam 33 has minimal impact on the strain transmission of the parallel beam 34, thus ensuring the accuracy of the Mx signal.

[0069] Furthermore, when the six-dimensional force sensor is subjected to a force exceeding its range, the flexible beam 33 deforms significantly through the reserved space, dispersing the overload energy to the elastic body 1, thus preventing permanent damage to the solid beam 31, the force arm 32, and the parallel beam 34. Moreover, the reserved space between the flexible beam 33 and the connecting groove 11 allows for quick disassembly and replacement without adjusting the overall sensor structure, reducing maintenance costs. At the same time, during installation, the flexible beam 33 can absorb minor stress caused by assembly errors, preventing the initial preload from affecting measurement accuracy.

[0070] It is known that the elastic deformation characteristics of the flexible beam 33 can alleviate the stress relaxation phenomenon of materials under long-term load, maintain the zero-point stability of the six-dimensional force sensor, and the periodic deformation of the flexible beam 33 disperses fatigue stress concentration and extends the service life of the six-dimensional force sensor.

[0071] Example 2:

[0072] Please see Figure 4 The decoupling method for a six-dimensional force sensor in this embodiment is applied to the decoupling structure as shown in Embodiment 1. The decoupling method includes the following steps:

[0073] Step S1: After setting the six-dimensional force sensor at the designated position, apply a force to the six-dimensional force sensor;

[0074] Step S2: The strain gauge assembly 4 in the six-dimensional force sensor independently measures the six-dimensional force;

[0075] Step S2 specifically includes:

[0076] Step S21: The force is applied to the solid beam 31, and the uniaxial strain gauge 41 measures the Fz / Mz applied to the solid beam 31.

[0077] Fz is calculated using the following formula:

[0078] ;

[0079] In the formula: kz is the calibration coefficient of Fz; Sa is the output signal of uniaxial strain gauge 41;

[0080] Mz is calculated using the following formula:

[0081] ;

[0082] In the formula: kmz is the calibration coefficient of Mz.

[0083] Specifically, Sa1, Sa2, Sa3, and Sa4 are the four sets of output signals of the uniaxial strain gauge 41.

[0084] Step S22: The force is applied to the parallel beam 34, and the bending normal strain gauge 42 measures the Fx / Fy applied to the parallel beam 34.

[0085] Fx / Fy is calculated using the following formula:

[0086] ;

[0087] ;

[0088] In the formula: kx is the calibration coefficient of Fx; Sb is the output signal of the bending normal strain gauge 42; ky is the calibration coefficient of Fy.

[0089] Specifically, Sb1, Sb2, Sb3, and Sb4 are the four sets of output signals of the bending strain gauge 42.

[0090] Step S23: The force is applied to the parallel beam 34, and the torsional shear strain gauge 43 measures Mx / My acting on the parallel beam 34.

[0091] Mx / My is calculated using the following formula:

[0092] ;

[0093] ;

[0094] In the formula: kmx is the calibration coefficient of Mx; St is the output signal of the torsional shear strain gauge 43; kmy is the calibration coefficient of My.

[0095] Specifically, St1, St2, St3, and St4 are the four sets of output signals of the torsional shear strain gauge 43.

[0096] It should be noted that the calibration coefficients kz, kx, ky, kmz, kmx, and kmy are well known to those skilled in the art and will not be described further in this embodiment.

[0097] Step S3: Establish a six-dimensional force decoupling matrix, and decouple the six-dimensional forces measured in step S2 using the six-dimensional force decoupling matrix.

[0098] The six-dimensional force is decoupled according to the following calculation formula:

[0099] .

[0100] The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A decoupling structure for a six-dimensional force sensor, characterized in that, The system includes an intermediate loading platform (2) located within an elastic body (1). Several connecting arms (3) are equally spaced between the elastic body (1) and the intermediate loading platform (2). Strain gauge assemblies (4) are mounted on the connecting arms (3). The strain gauge assemblies (4) are used to independently measure six-dimensional forces. The connecting arms (3) include a solid beam (31), a force-bearing arm (32), and a flexible beam (33) in sequence towards the elastic body (1). The strain gauge assembly (4) includes a uniaxial strain gauge (41), a bending normal strain gauge (42), and a torsional shear strain gauge (43). The uniaxial strain gauge (41) is mounted on the solid beam (31), and the bending normal strain gauge (42) and the torsional shear strain gauge (43) are both mounted on the force-bearing arm (32). The uniaxial strain gauge (41) is used to measure the force Fz and torque Mz in the z-axis direction. The bending normal strain gauge (42) is used to measure the force Fx in the x-axis direction and the force Fy in the y-axis direction, and the torsional shear strain gauge (43) is used to measure the torque Mx in the x-axis direction and the torque My in the y-axis direction; The number of uniaxial strain gauges (41) is the same as the number of solid beams (31). Several uniaxial strain gauges (41) are divided into two groups and symmetrically arranged on two opposite solid beams (31), with adjacent uniaxial strain gauges (41) symmetrically distributed vertically on adjacent solid beams (31). The uniaxial strain gauges (41) are arranged in a U-shape on the solid beams (31), with the side of the uniaxial strain gauge (41) used to measure Mz and the front used to measure Fz. The cross-sectional shape of the force arm (32) is U-shaped, and the side of the force arm (32) forms... There are parallel beams (34), and the bending normal strain gauges (42) and the torsional shear strain gauges (43) are respectively arranged on the side of the two parallel beams (34) close to the inner wall of the elastic body (1), and the bending normal strain gauges (42) and the torsional shear strain gauges (43) are alternately distributed; a connecting groove (11) is formed in the elastic body (1) corresponding to the flexible beam (33), and the two ends of the flexible beam (33) are respectively connected to the inner wall of the connecting groove (11), and a reserved space is formed between the side of the flexible beam (33) away from the intermediate loading platform (2) and the inner wall of the connecting groove (11).

2. A decoupling method for a six-dimensional force sensor, characterized in that, Applied to the decoupling structure as described in claim 1, the decoupling method includes the following steps: Step S1: After setting the six-dimensional force sensor at the designated position, apply a force to the six-dimensional force sensor; Step S2: The strain gauge assembly in the six-dimensional force sensor independently measures the six-dimensional force; Step S3: Establish a six-dimensional force decoupling matrix, and decouple the six-dimensional forces measured in step S2 using the six-dimensional force decoupling matrix.

3. The decoupling method for the six-dimensional force sensor according to claim 2, characterized in that, Step S2 specifically includes: Step S21: The force is applied to the solid beam, and the uniaxial strain gauge measures the force Fz and torque Mz acting on the solid beam in the z-axis direction. Step S22: The force is applied to the parallel beam, and the bending normal strain gauge measures the force Fx in the x-axis direction and the force Fy in the y-axis direction applied to the parallel beam. Step S23: The force is applied to the parallel beam, and the bending normal strain gauge measures the moment Mx in the x-axis direction and the moment My in the y-axis direction acting on the parallel beam.

4. The decoupling method for the six-dimensional force sensor according to claim 3, characterized in that, Fz is calculated according to the following formula: ； In the formula: kz is the calibration coefficient of Fz; Sa is the output signal of the uniaxial strain gauge, where Sa1, Sa2, Sa3, and Sa4 are the four sets of output signals of the uniaxial strain gauge; Mz is calculated according to the following formula: ； In the formula: kmz is the calibration coefficient of Mz.

5. The decoupling method for the six-dimensional force sensor according to claim 3, characterized in that, The Fx / Fy is calculated according to the following formula: ； ； In the formula: kx is the calibration coefficient of Fx; Sb is the output signal of the bending normal strain gauge, where Sb1, Sb2, Sb3, and Sb4 are the four sets of output signals of the bending normal strain gauge; ky is the calibration coefficient of Fy.

6. The decoupling method for the six-dimensional force sensor according to claim 3, characterized in that, The Mx / My ratio is calculated using the following formula: ； ； In the formula: kmx is the calibration coefficient of Mx; St is the output signal of the torsional shear strain gauge, where St1, St2, St3, and St4 are the four sets of output signals of the torsional shear strain gauge; kmy is the calibration coefficient of My.

7. The decoupling method for the six-dimensional force sensor according to claim 2, characterized in that, The six-dimensional force is decoupled according to the following calculation formula: 。

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